A laser platform energy monitoring method and system

Abstract

The application discloses a kind of laser platform energy monitoring method and system, it is related to laser energy monitoring technique, comprising: the laser energy value measured by each local area of detection window, determine the mapping relationship between the temperature state of each local area of window and corresponding local optical path initial micro-offset;According to the temperature variation rate of real-time acquisition of probe window local area, determine the real-time thermal expansion degree of window each local area material, and determine the real-time optical path micro-offset region and offset;According to the difference degree of real-time optical path micro-offset region and offset and initial mapping relationship, adjust the initial mapping relationship between the temperature of window local area and optical path micro-offset;According to the mapping relationship of real-time adjustment, determine the real-time calibration coefficient of probe current sensitivity drift;The application can realize real-time accurate calibration to laser detection sensitivity drift, effectively improve the energy measurement precision and stability of laser platform under dynamic environment.

Description

Technical Field

[0001] This invention relates to laser energy monitoring technology, specifically to a laser platform energy monitoring method and system. Background Technology

[0002] Lasers are widely used in industrial processing, medical equipment, and scientific instruments. The stability of their energy output and the accuracy of their measurements are crucial to the performance of the system. Existing laser platforms typically employ calibration methods under static or single-condition conditions, which cannot effectively address dynamic interference factors under complex operating conditions, such as the impact of temperature changes on measurement accuracy. These dynamic factors often lead to persistent and unpredictable drift in detector measurement results, significantly reducing the reliability of laser systems in practical applications.

[0003] Traditional methods typically ignore changes in real-time dynamic conditions during calibration, especially in actual operation where they cannot promptly track and identify key interference factors or accurately adjust calibration strategies in real time. Therefore, providing a laser energy monitoring method that can dynamically identify interference factors and adjust calibration strategies promptly under complex real-world conditions has become a pressing technical problem in this field. Summary of the Invention

[0004] The purpose of this invention is to provide a laser platform energy monitoring method and system to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] This invention provides a method for monitoring the energy of a laser platform, comprising:

[0007] Based on the laser energy values ​​measured in each local area of ​​the probe window under different initial stable temperature conditions, the mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro-offset of the local optical path is determined.

[0008] Based on the real-time temperature change rate collected in local areas of the probe window, the real-time thermal expansion of the material in each local area of ​​the window is determined, and the real-time optical path micro-offset area and offset amount are determined.

[0009] Based on the difference between the real-time optical path micro-offset region and the offset amount and the initial mapping relationship, the initial mapping relationship between the temperature of the local area of ​​the window and the optical path micro-offset is adjusted in real time.

[0010] Based on the real-time adjusted mapping relationship, determine the real-time calibration coefficient for the probe's current sensitivity drift.

[0011] Furthermore, the mapping relationship between the temperature state of each local region of the window and the corresponding initial micro-offset of the local optical path is determined, including:

[0012] The laser energy values ​​of different local areas of the probe window were measured under multiple initial stable temperature conditions.

[0013] Determine the distribution of the deviation of the measured energy value relative to the standard energy value in each local area;

[0014] The initial micro-offset of the local optical path caused by the thermal expansion of the window material is determined based on the deviation distribution of the measured energy values ​​in each local area.

[0015] A corresponding mapping relationship is established between the temperature state of each local area of ​​the window and the determined initial micro-offset of the local optical path.

[0016] Furthermore, the deviation distribution of the measured energy value relative to the standard energy value in each local region is determined, including:

[0017] Determine the measured energy value of a local region within the window under each initial stable temperature condition;

[0018] Determine the deviation between the measured energy value and the standard energy value for each local area;

[0019] Determine the specific distribution of the deviation values ​​in different local areas of the window;

[0020] Output the deviation distribution characteristics of the measured energy values ​​for each local region.

[0021] Furthermore, the initial micro-offset of the local optical path caused by the thermal expansion of the window material is determined, including:

[0022] Determine the specific impact of the rate of temperature change in each local area on the degree of expansion of the window material;

[0023] The micro-offset trend of the optical path corresponding to each local area of ​​the window is determined based on the degree of material expansion.

[0024] The initial micro-offset of the optical path in each local region is determined based on the trend of optical path micro-offset.

[0025] Output the initial micro-offset of the local optical path.

[0026] Furthermore, the real-time thermal expansion of the material in each local area of ​​the window is determined, including:

[0027] Real-time determination of the rate of temperature change in various local areas of the window;

[0028] The trend of real-time thermal expansion of the material in each local area is determined based on the rate of temperature change in each local area.

[0029] The degree of thermal expansion of the material in each local area of ​​the window is determined based on the real-time thermal expansion trend.

[0030] The output window shows the real-time thermal expansion of materials in various local areas.

[0031] Furthermore, the real-time optical path micro-offset region and offset amount are determined, including:

[0032] Real-time measurement of laser energy distribution in various local areas of the probe window;

[0033] Determine the real-time difference between the laser energy distribution in each local area and the standard energy distribution;

[0034] The real-time micro-offset region of the current optical path position is determined based on the real-time differences;

[0035] Determine the specific offset amount corresponding to the real-time micro-offset region of the optical path.

[0036] Furthermore, the initial mapping relationship between the local temperature of the window and the micro-offset of the optical path is adjusted in real time, including:

[0037] Determine the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region;

[0038] Determine the trend of the difference between the real-time optical path micro-offset and the initial micro-offset;

[0039] The initial mapping relationship is locally adjusted based on the degree and trend of the difference.

[0040] Obtain the real-time adjusted mapping relationship.

[0041] Furthermore, the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region is determined, including:

[0042] Determine the specific locational difference between the optical path offset region and the initial offset region during real-time measurement;

[0043] Determine the specific impact of locational differences on energy measurements;

[0044] The degree of difference is determined based on the specific impact.

[0045] Further, determine the real-time calibration coefficient for the probe's current sensitivity drift, including:

[0046] Determine the optical path micro-offset in the real-time adjusted mapping relationship that matches the temperature conditions of the current local area of ​​the window;

[0047] The real-time sensitivity drift compensation value is determined based on the determined real-time optical path micro-offset;

[0048] Convert the real-time sensitivity drift compensation value into a real-time calibration coefficient;

[0049] Output the real-time calibration coefficient for the sensitivity drift of the current probe.

[0050] A laser platform energy monitoring system, implemented based on the aforementioned laser platform energy monitoring method, includes:

[0051] The temperature drift mapping module is used to determine the mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro-offset of the local optical path based on the laser energy values ​​measured by the probe in each local area of ​​the window under different initial stable temperature conditions.

[0052] The thermal polarization monitoring module is used to determine the real-time thermal expansion of the material in each local area of ​​the probe window based on the real-time temperature change rate collected in the local area of ​​the probe window, and to determine the real-time optical path micro-offset area and offset amount.

[0053] The differential control module is used to adjust the initial mapping relationship between the temperature of the local area of ​​the window and the micro-offset of the optical path in real time, based on the degree of difference between the real-time optical path micro-offset area and the offset and the initial mapping relationship.

[0054] The sensitivity calibration module is used to determine the real-time calibration coefficient of the probe's current sensitivity drift based on the real-time adjusted mapping relationship.

[0055] The technical effects and advantages provided by the present invention in the above technical solution are as follows:

[0056] This invention, by clearly defining the initial state of different regions of the probe measurement window under temperature change conditions, accurately constructs the mapping relationship between local temperature and initial micro-offset of the optical path, significantly improving the initial measurement accuracy and the reliability of subsequent real-time calibration.

[0057] This invention accurately identifies the region and amount of slight optical path deviation by real-time monitoring of the temperature change rate and thermal expansion of the material in each local area of ​​the detection window, thereby achieving precise tracking and quantification of dynamic interference factors and improving the measurement stability of the laser platform under complex working conditions.

[0058] This invention achieves dynamic compensation for detection sensitivity drift by adjusting the initial mapping relationship between the temperature of the local area of ​​the window and the optical path offset in real time, and determining the sensitivity drift calibration coefficient in real time. This effectively eliminates measurement errors caused by environmental changes and improves the real-time performance and high precision of laser energy measurement. Attached Figure Description

[0059] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0060] Figure 1 This is a flowchart of a laser platform energy monitoring method according to the present invention;

[0061] Figure 2 This is a framework diagram of a laser platform energy monitoring system according to the present invention. Detailed Implementation

[0062] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided to make the description of this application more complete and comprehensive, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The drawings are merely illustrative illustrations of this application and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0063] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more exemplary embodiments. Numerous specific details are provided in the following description to give a full understanding of the exemplary embodiments disclosed in this application. However, those skilled in the art will recognize that the technical solutions disclosed in this application can be practiced with one or more specific details omitted, or other methods, components, steps, etc., can be employed. In other instances, well-known structures, methods, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of the disclosure of this application.

[0064] Example 1

[0065] like Figure 1 As shown, this embodiment discloses a laser platform energy monitoring method, including:

[0066] S101: Based on the laser energy values ​​measured by the probe in each local area of ​​the window under different initial stable temperature conditions, determine the mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro-offset of the local optical path.

[0067] It should be noted that, in order to obtain accurate and reliable initial laser energy measurement data, this embodiment first sets multiple initial stable temperature conditions, such as typical temperature points of 20℃, 25℃, and 30℃. It should be understood that each initial stable temperature condition is precisely and stably controlled by a temperature control device (e.g., a constant temperature chamber or temperature control platform). After the temperature condition reaches the set value, it is maintained in a stable state for at least 20 minutes before measurement is performed to ensure uniform and stable temperature.

[0068] In specific implementation, this embodiment divides the probe detection window area into multiple distinct local areas. For example, with the center of the probe window as the center, it is divided into a central circular area and multiple concentric annular sub-areas with the center as the center. The specific division criteria are as follows: the radius of the central circle is 2mm, the radius of the first ring is 2mm to 5mm, the radius of the second ring is 5mm to 8mm, and so on, covering the entire probe window area.

[0069] Subsequently, the laser energy of each local area was measured multiple times using the built-in laser energy detector of the probe. For example, each area was measured at least 3 to 5 times repeatedly, and the results of the multiple measurements were arithmetically averaged to obtain an accurate and stable measured energy value for each local area under various initial stable temperature conditions.

[0070] In implementation, the mapping relationship between the temperature state of each local region of the window and the corresponding initial micro-offset of the local optical path is determined, including:

[0071] The laser energy values ​​of different local areas of the probe window were measured under multiple initial stable temperature conditions.

[0072] Determine the distribution of the deviation of the measured energy value relative to the standard energy value in each local area;

[0073] Specifically, the deviation distribution of the measured energy value relative to the standard energy value in each local area is determined, including:

[0074] Determine the measured energy value of a local region within the window under each initial stable temperature condition;

[0075] Determine the deviation between the measured energy value and the standard energy value for each local area;

[0076] It should be noted that, in order to determine the specific deviation between the measured energy value and the standard energy value of each local area, this embodiment pre-calibrates and obtains the standard energy value for each local area. Specifically, the standard energy value is obtained by performing at least 5 measurements on each local area under a standard laboratory environment (e.g., ideal conditions of 25°C and no window offset) and taking the average value. The specific calculation method for determining the measurement deviation is as follows:

[0077] ;

[0078] In the formula: This represents the percentage deviation of the measured energy value in the j-th local region under the i-th stable temperature condition; This represents the average value of the energy measured in practice. This indicates the standard energy value for the corresponding region.

[0079] Determine the specific distribution of the deviation values ​​in different local areas of the window;

[0080] It should be noted that, to clarify the specific distribution of deviation values ​​in each local area, this embodiment further establishes a spatial distribution map of deviation values. Specifically, this embodiment establishes the probe window area as a two-dimensional polar coordinate system or a Cartesian coordinate system, and the deviation values ​​of each local area are marked at the corresponding spatial coordinate positions. For example, a circular window can establish a polar coordinate system with the center of the window as the origin, and each area is clearly defined by its polar radius and angle. Then, the measurement energy deviation values ​​of each local area are filled into the corresponding polar coordinate positions, thereby obtaining a spatial distribution map of deviation. The specific distribution characteristics can be expressed as follows: the area with the higher the deviation value, the darker the color, and the area with the lower the deviation value, the lighter the color, thus clearly reflecting the spatial distribution characteristics of the specific deviations in each area of ​​the window.

[0081] Output the deviation distribution characteristics of the measured energy values ​​for each local region;

[0082] In practice, the aforementioned distribution characteristics of measured energy value deviations can be clearly output in the form of a two-dimensional heatmap, a deviation matrix, or a list. Taking a two-dimensional heatmap as an example, the horizontal axis represents the spatial location of the window or the region number, and the vertical axis represents the percentage of deviation. The degree of deviation in each region is clearly indicated by the intensity of the color, making the measured energy deviation situation intuitive and clear, and providing basic data for subsequent analysis.

[0083] The initial micro-offset of the local optical path caused by the thermal expansion of the window material is determined based on the deviation distribution of the measured energy values ​​in each local area.

[0084] Specifically, determining the initial micro-offset of the local optical path caused by the thermal expansion of the window material includes:

[0085] Determine the specific impact of the rate of temperature change in each local area on the degree of expansion of the window material;

[0086] In practice, the specific degree of thermal expansion of the window material under different temperature change rates is first determined. For example, this embodiment conducts a material expansion calibration experiment, using a non-contact laser displacement measuring device to measure the expansion displacement of the material under different temperature change rates, establishing a clear quantitative relationship between thermal expansion and the temperature change rate. The specific formula is as follows:

[0087] ;

[0088] In the formula: denoted as the expansion displacement of the material; φ is the linear expansion coefficient of the material, determined experimentally; L is the initial length of the material in the measurement region. This refers to the change in temperature.

[0089] The micro-offset trend of the optical path corresponding to each local area of ​​the window is determined based on the degree of material expansion.

[0090] It should be noted that the optical path micro-offset trend corresponding to each local area of ​​the window is determined based on the material expansion data and the distribution of energy measurement deviation.

[0091] For example, areas with large measurement deviations correspond to significant thermal expansion displacements. In this embodiment, a significant thermal expansion displacement exceeding 20% ​​of the average thermal expansion displacement of adjacent areas is explicitly defined as a significant thermal expansion displacement. When the thermal expansion displacement of a local area is significantly higher (e.g., more than 20%) than the average thermal expansion displacement of its surrounding adjacent areas, it is clearly determined that the optical path in that area has a significant initial offset trend, specifically manifested as the optical path shifting from the standard position to the outer region or to the central region.

[0092] The initial micro-offset of the optical path in each local region is determined based on the trend of optical path micro-offset.

[0093] In practical implementation, this embodiment utilizes optical simulation software (such as ZEMAX) combined with window material thermal expansion displacement data to specifically analyze and calculate the initial micro-offset of the optical path, clarifying the specific value of the initial micro-offset of the optical path corresponding to each local region. For example, the optical path offset in the central region is 0.05mm, and the optical path offset in the outer first ring region is 0.08mm, specifying the value for each region.

[0094] Output the determined initial micro-offset of the local optical path;

[0095] In practice, the specific values ​​of the initial micro-offset of the optical path in each local area determined above can be output in the form of a data table or a two-dimensional heat map, clearly showing the specific spatial distribution characteristics of the micro-offset in each area.

[0096] A corresponding mapping relationship is established between the temperature state of each local area of ​​the window and the determined initial micro-offset of the local optical path;

[0097] It should be noted that this embodiment explicitly establishes a mapping relationship between the temperature state of each local region of the window and the corresponding initial micro-offset of the optical path. Specifically, the window temperature state is the input variable, and the initial micro-offset of the optical path is the output variable. The mapping relationship between the two is explicitly established through a data fitting algorithm (such as nonlinear regression or interpolation fitting). For example, the mapping relationship can be expressed as:

[0098] ;

[0099] In the formula: This represents the initial micro-offset of the optical path in each region; This is the initial stable temperature condition; represents the spatial coordinates of each local region; is the mapping function, obtained by fitting the aforementioned experimental data.

[0100] S102: Based on the real-time temperature change rate collected in the local area of ​​the probe window, determine the real-time thermal expansion of the material in each local area of ​​the window, and determine the real-time optical path micro-offset area and offset amount.

[0101] During implementation, the real-time thermal expansion of the material in each local area of ​​the window is determined, including:

[0102] Real-time determination of the rate of temperature change in various local areas of the window;

[0103] It should be noted that, in order to accurately determine the real-time thermal expansion of the material in each local area of ​​the window, it is first necessary to determine the rate of temperature change in each local area of ​​the probe window in real time. Specifically, this embodiment can use multiple high-precision miniature temperature sensors (such as PT100 platinum resistance sensors or thermocouples) to be fixedly installed on the back of different local areas of the probe window in a matrix or ring distribution, ensuring that the sensor temperature measuring surface is in direct contact with the probe window, thereby achieving accurate regional temperature measurement.

[0104] In practice, real-time temperature data for local areas of the window is continuously collected by the aforementioned sensors, and the temperature data is sampled at preset time intervals (e.g., once every second), recording the real-time temperature value for each area. Subsequently, the difference between the temperature data collected at two consecutive time points is calculated to determine the real-time temperature change rate of each local area. The specific calculation formula is as follows:

[0105] ;

[0106] In the formula: This represents the real-time temperature change rate of the i-th region of the window at the j-th measurement time point. This represents the real-time temperature value of the i-th region of the window at the j-th measurement point at the current time; This represents the real-time temperature value of the i-th region of the window at the (j-1)-th measurement at the previous time point; This represents the time interval between two measurements; in this embodiment, it is typically 1 second.

[0107] The trend of real-time thermal expansion of the material in each local area is determined based on the rate of temperature change in each local area.

[0108] It should be noted that, based on the real-time temperature change rate determined above, the real-time thermal expansion trend of the material in each local area of ​​the window is further determined. In specific implementation, pre-established experimental data on the thermal expansion characteristics of the window material (i.e., the thermal expansion response relationship of the material at different temperature change rates) can be used to judge the real-time trend.

[0109] In practice, the real-time temperature change rate is compared with a pre-established material expansion characteristic curve to determine the real-time thermal expansion trend of the material within the corresponding temperature change rate. Specifically, for example, if the real-time temperature change rate of a certain region is positive (heating rate greater than 0), it is determined that the material in that region has a real-time expansion trend; if the temperature change rate is negative (cooling rate less than 0), the material in that region has a real-time contraction trend.

[0110] The degree of thermal expansion of the material in each local area of ​​the window is determined based on the real-time thermal expansion trend.

[0111] It should be noted that, in order to further determine the specific degree of thermal expansion of the material in each local area of ​​the window in real time, this embodiment quantitatively analyzes the real-time thermal expansion trend of the window material to clearly determine the specific value of the real-time expansion or contraction of the window material.

[0112] In the specific implementation process, this embodiment uses real-time temperature change rate data, combined with pre-calibrated window material thermal expansion characteristic parameters (such as the coefficient of linear expansion φ), and employs the following real-time thermal expansion calculation formula to determine the degree of thermal expansion of the material in each region in real time:

[0113] ;

[0114] In the formula: This represents the real-time expansion of the material in the i-th region of the window at time j during real-time measurement; The coefficient of linear expansion of the window material was determined in advance through calibration experiments; This represents the initial length or feature size of the i-th region; The temperature value measured in real time for the i-th region; This indicates the initial reference temperature of the region.

[0115] The real-time thermal expansion of materials in various local areas of the output window;

[0116] During implementation, the real-time optical path micro-offset region and offset amount are determined, including:

[0117] Real-time measurement of laser energy distribution in various local areas of the probe window;

[0118] It should be noted that, in order to determine the real-time optical path micro-offset region and offset, this embodiment further measures the laser energy distribution of each local area of ​​the probe window in real time. In specific implementation, the laser energy detector collects and records the energy values ​​of different local areas of the probe window in real time, and the interval between each measurement is synchronized with the temperature measurement (e.g., once every 1 second), so as to obtain the real-time measured energy distribution data of each area of ​​the window.

[0119] Determine the real-time difference between the laser energy distribution in each local area and the standard energy distribution;

[0120] It should be noted that the real-time difference in energy distribution within a local area of ​​the window is determined by comparing the real-time measured laser energy distribution data with the preset standard energy distribution data. Specifically, the following formula is used to calculate the difference:

[0121] ;

[0122] In the formula: This represents the real-time energy difference measured in the i-th region at time j. This represents the laser energy value measured in real time in the i-th region; This represents the preset standard energy value for the i-th region.

[0123] The real-time micro-offset region of the current optical path position is determined based on the real-time differences;

[0124] It should be noted that the current real-time optical path micro-offset region is determined based on the real-time energy difference data; in specific implementation, the region where the energy difference exceeds the preset deviation threshold (±5%) is identified as the region where the real-time optical path micro-offset occurs.

[0125] It should be noted that the aforementioned ±5% threshold was obtained through long-term experimental measurements and data statistics in this embodiment. This threshold can effectively identify obvious energy change trends while avoiding misjudgments caused by system noise or measurement errors. For example, if the real-time energy measurement value of a certain area is significantly lower than the standard value and the difference exceeds 5%, it is determined that a real-time optical path micro-offset has occurred in that area.

[0126] Determine the specific offset amount corresponding to the real-time micro-offset region of the optical path;

[0127] It should be noted that, in this embodiment, based on real-time material thermal expansion data, a pre-determined model (such as a finite element model or optical simulation model) is used to specifically calculate the offset corresponding to the real-time optical path micro-offset region. For example, the calculated offset of the real-time optical path micro-offset region is a specific value such as 0.05mm or 0.10mm.

[0128] S103: Based on the difference between the real-time optical path micro-offset region and the offset amount and the initial mapping relationship, adjust the initial mapping relationship between the local temperature of the window and the optical path micro-offset in real time;

[0129] During implementation, the initial mapping relationship between the local temperature of the window and the micro-offset of the optical path is adjusted in real time, including:

[0130] Determine the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region;

[0131] Specifically, determining the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region includes:

[0132] Determine the specific locational difference between the optical path offset region and the initial offset region during real-time measurement;

[0133] In practice, to determine the specific positional difference between the optical path offset region and the initial offset region during real-time measurement, this embodiment uses a window region spatial coordinate system for clear position marking. Specifically, for example, each local region divided by the window can be marked using polar coordinates (radius r and angle θ) or Cartesian coordinates (x, y coordinates).

[0134] In practice, firstly, the position coordinates of the real-time determined optical path micro-offset region (e.g., polar radius r1, angle θ1) are clearly defined, and simultaneously, the position coordinates of the initial optical path micro-offset region determined during initial calibration (e.g., polar radius r0, angle θ0) are also clearly defined. Then, the specific position difference is determined using a clearly defined position difference calculation formula, for example:

[0135] ;

[0136] In the formula: This indicates the difference in radial position between the real-time optical path offset region and the initial offset region; This indicates the difference in angular position between the real-time optical path offset region and the initial offset region; To measure the position coordinates of the optical path offset area in real time; These are the coordinates of the initial optical path offset region.

[0137] Determine the specific impact of locational differences on energy measurements;

[0138] It should be noted that this embodiment further analyzes and determines the specific impact of the aforementioned positional differences on the actual measured energy value. In specific implementation, the relationship between positional differences and changes in measured energy value is quantitatively determined using pre-established experimental or simulation data on the relationship between energy measurement and positional offset.

[0139] For example, this embodiment can obtain an empirical relationship between the position offset and the change in energy measurement value through experimental calibration, such as the specific relationship formula:

[0140] ;

[0141] In the formula: This represents the change in measured energy caused by a specific location difference; R represents the energy position sensitivity coefficient determined in advance through calibration experiments; R represents the reference radius of the optical path detection window region.

[0142] The degree of difference is determined based on the specific impact.

[0143] It should be noted that, based on the aforementioned impact of specific location differences on energy measurement values, this embodiment further determines the level of difference. In specific implementation, clear difference level standards are set. It should be noted that these difference level standards are formulated in this embodiment based on experimental verification and statistical results of laser energy measurement changes caused by the thermal expansion of window materials in actual application scenarios.

[0144] when When the difference is less than 1%, it indicates that the difference in measured energy is within the instrument's accuracy range and can be considered a slight deviation, which is classified as a first-level difference.

[0145] when When the difference is between 1% and 3%, it indicates that the measurement energy difference exceeds the instrument's accuracy range, but the impact on the measurement results is moderate, and it is determined to be a second-order difference.

[0146] when If the difference is above 3%, it indicates a large energy difference, which has a significant impact on measurement accuracy and is classified as a level three difference.

[0147] Determine the trend of the difference between the real-time optical path micro-offset and the initial micro-offset;

[0148] It should be noted that, in order to determine the trend of the difference between the real-time optical path micro-offset and the initial micro-offset, this embodiment further clarifies the specific values ​​of the real-time and initial micro-offsets for trend analysis.

[0149] In practice, the real-time micro-offset is explicitly expressed as The initial micro offset is expressed as The trend of difference is clearly shown through difference calculation:

[0150] ;

[0151] This difference value clearly illustrates the specific manifestation of the trend of the difference:

[0152] When the difference of three or more consecutive time points When all values ​​are greater than 0, and the absolute value of each difference shows a gradually increasing trend, it is determined to be an increasing trend of offset.

[0153] When the difference of three or more consecutive time points When all values ​​are less than 0, and the absolute value of each difference shows a gradually increasing trend, it is determined that the offset is decreasing.

[0154] When the difference of three or more consecutive time points When the absolute values ​​of all values ​​are less than or equal to the preset stability threshold (e.g., 0.005 mm), it is determined to be an offset stability trend.

[0155] The initial mapping relationship is locally adjusted based on the degree and trend of the difference.

[0156] It should be noted that, based on the clearly defined level and trend of difference, this embodiment adjusts the initial mapping relationship in real time. In specific implementation, different adjustment ranges are adopted according to the defined level of difference:

[0157] If the difference is determined to be level one, the mapping relationship is slightly adjusted, for example, by ±1% of the offset corresponding to the initial mapping relationship.

[0158] If the difference is determined to be at level two, a moderate adjustment will be made, with an adjustment range of ±3%.

[0159] If the difference is determined to be level three, a larger adjustment will be made, with an adjustment range of ±5%.

[0160] At the same time, this is combined with clear trends of difference:

[0161] If the trend is increasing, the mapping relationship is adjusted to shift towards increasing.

[0162] If the trend is decreasing, then adjust the direction by shifting the offset towards decreasing.

[0163] If the trend is stable, there will be only minor adjustments or no change at all.

[0164] The specific adjustment formula is as follows (example):

[0165] ;

[0166] In the formula: λ represents the offset corresponding to the adjusted mapping relationship; λ is the adjustment range determined above based on the difference level, with a value between ±1%, ±3%, or ±5%.

[0167] Obtain the real-time adjusted mapping relationship.

[0168] S104: Determine the real-time calibration coefficient for the probe's current sensitivity drift based on the real-time adjusted mapping relationship;

[0169] During implementation, the real-time calibration coefficient for the probe's current sensitivity drift is determined, including:

[0170] Determine the optical path micro-offset in the real-time adjusted mapping relationship that matches the temperature conditions of the current local area of ​​the window;

[0171] It should be noted that, in order to accurately determine the real-time calibration coefficient of the probe's current sensitivity drift during the specific implementation process, it is first necessary to determine the optical path micro-offset in the real-time adjusted mapping relationship that matches the temperature conditions of the local area of ​​the current window.

[0172] In practice, the real-time temperature conditions of each local area of ​​the current window are collected and clearly defined (e.g., the real-time measured temperature is 28℃). Based on the mapping relationship between the real-time adjusted window temperature and the optical path micro-offset (i.e., the data relationship adjusted in real-time in step S103 above), the optical path micro-offset value that best matches the current temperature conditions is found or calculated. For example, an interpolation method is used for accurate calculation, and the specific interpolation calculation formula is as follows:

[0173] ;

[0174] In the formula: This is a micro-offset of the optical path to match the current real-time temperature conditions; To measure the temperature in a localized area of ​​the window in real time; These are two adjacent temperature data points in the mapping relationship data; To correspond to temperature The optical path micro-offset data in the mapping relationship.

[0175] The real-time sensitivity drift compensation value is determined based on the determined real-time optical path micro-offset;

[0176] It should be noted that after determining the above-mentioned real-time optical path micro-offset, this embodiment further determines the real-time sensitivity drift compensation value based on the definite optical path micro-offset value.

[0177] In practical implementation, this embodiment determines the sensitivity drift compensation value by pre-calibrating a clear relationship model between the optical path micro-offset and the sensitivity drift compensation value. The mathematical expression for the specific calibration relationship is as follows:

[0178] ;

[0179] In the formula: This is the real-time sensitivity drift compensation value; The optical path micro-offset is determined in real time; m and n are fitting coefficients determined in advance through experimental calibration. For example, under different specific temperature conditions (e.g., 20℃, 25℃, 30℃, 35℃, etc.), the optical path micro-offset and sensitivity drift compensation values ​​of multiple local areas of the window are measured respectively. The above relationship is clearly fitted by least squares fitting or linear regression method, thereby clearly determining the specific values ​​of m and n. For example, m can be 0.85 and n can be 0.01.

[0180] Convert the real-time sensitivity drift compensation value into a real-time calibration coefficient;

[0181] It should be noted that this embodiment further explicitly converts the determined real-time sensitivity drift compensation value into a real-time calibration coefficient to achieve a specific real-time calibration operation.

[0182] In practical implementation, this embodiment uses a specific conversion formula to convert the sensitivity drift compensation value into the probe's real-time calibration coefficient:

[0183] The specific conversion formula is as follows:

[0184] ;

[0185] In the formula: Indicates the real-time calibration coefficient; This is the real-time sensitivity drift compensation value determined above.

[0186] Output the real-time calibration coefficient of the current probe's sensitivity drift;

[0187] It should be noted that in this embodiment, the clearly defined real-time calibration coefficient for the current probe sensitivity drift is output as a specific real-time value and used in real-time for the calibration of subsequent probe energy measurement data. For example, the probe control circuit or processor reads and records the calibration coefficient value (e.g., 1.078 in real time) in real time and corrects the subsequent laser energy measurement results in real time to accurately eliminate measurement errors caused by thermal expansion of the window material and slight offset of the optical path.

[0188] Example 2

[0189] like Figure 2 As shown in the example, the parts not detailed in this embodiment are as shown in Example 1. This embodiment discloses a laser platform energy monitoring system, including:

[0190] Temperature drift mapping module 201 is used to determine the mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro offset of the local optical path based on the laser energy values ​​measured by the probe in each local area of ​​the window under different initial stable temperature conditions.

[0191] The thermal deviation monitoring module 202 is used to determine the real-time thermal expansion of the material in each local area of ​​the probe window based on the real-time temperature change rate collected in the local area of ​​the probe window, and to determine the real-time optical path micro-offset area and offset amount.

[0192] The differential control module 203 is used to adjust the initial mapping relationship between the temperature of the local area of ​​the window and the micro-offset of the optical path in real time according to the degree of difference between the real-time optical path micro-offset area and the offset and the initial mapping relationship.

[0193] The sensitivity calibration module 204 is used to determine the real-time calibration coefficient of the probe's current sensitivity drift based on the real-time adjusted mapping relationship.

[0194] The above formulas are all dimensionless calculations. The formulas are derived from software simulations based on a large amount of collected data to obtain the most recent real-world results. The preset parameters, weights, and thresholds in the formulas are set by those skilled in the art according to the actual situation.

[0195] The above embodiments can be implemented, in whole or in part, by software, hardware, firmware, or any other combination thereof. When implemented using software, the above embodiments can be implemented, in whole or in part, as a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer programs are loaded or executed on a computer, all or part of the processes or functions described in the embodiments of the present invention are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via a wired or wireless network. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more sets of available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium. A semiconductor medium can be a solid-state drive.

[0196] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A method for monitoring the energy of a laser platform, characterized in that, include: Based on the laser energy values ​​measured in each local area of ​​the probe window under different initial stable temperature conditions, the initial mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro-offset of the local optical path is determined. Based on the real-time temperature change rate collected in local areas of each window of the probe, the real-time thermal expansion degree of the material in each local area of ​​the window is determined, and the real-time optical path micro-offset area and optical path micro-offset amount are determined. Determine the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region; determine the trend of the difference between the real-time optical path micro-offset and the initial micro-offset; and make local adjustments to the initial mapping relationship based on the degree and trend of the difference to obtain the real-time adjusted mapping relationship. Based on the real-time adjusted mapping relationship, determine the real-time calibration coefficient for the probe's current sensitivity drift.

2. The laser platform energy monitoring method according to claim 1, characterized in that, Determine the initial mapping relationship between the temperature state of each local region of the window and the corresponding initial micro-offset of the local optical path, including: The laser energy values ​​of different local areas of the probe window were measured under multiple initial stable temperature conditions. Determine the distribution of the deviation of the measured energy value relative to the standard energy value in each local area; The initial micro-offset of the local optical path caused by the thermal expansion of the window material is determined based on the deviation distribution of the measured energy values ​​in each local area. An initial mapping relationship is established between the temperature state of each local area of ​​the window and the determined initial micro-offset of the local optical path.

3. The laser platform energy monitoring method according to claim 2, characterized in that, Determine the distribution of the deviation of the measured energy value relative to the standard energy value for each local region, including: Determine the measured energy value of a local region within the window under each initial stable temperature condition; Determine the deviation between the measured energy value and the standard energy value for each local area; Determine the specific distribution of the deviation values ​​in different local areas of the window; Output the deviation distribution of the measured energy values ​​for each local region.

4. The laser platform energy monitoring method according to claim 3, characterized in that, Determine the initial micro-offset of the local optical path caused by the thermal expansion of the window material, including: Determine the degree of window material expansion corresponding to the rate of temperature change in each local region; The micro-offset trend of the optical path in each local area of ​​the window is determined based on the degree of expansion of the window material. The initial micro-offset of the optical path in each local region is determined based on the trend of optical path micro-offset. Output the initial micro-offset of the optical path for each local region.

5. The laser platform energy monitoring method according to claim 4, characterized in that, Determine the real-time thermal expansion of the material in each local area of ​​the window, including: Real-time determination of the rate of temperature change in various local areas of the window; The trend of real-time thermal expansion of the material in each local area is determined based on the rate of temperature change in each local area. The degree of thermal expansion of the material in each local area of ​​the window is determined based on the real-time thermal expansion trend. The output window shows the real-time thermal expansion of materials in various local areas.

6. The laser platform energy monitoring method according to claim 5, characterized in that, Determine the real-time optical path micro-offset region and optical path micro-offset amount, including: Real-time measurement of laser energy distribution in various local areas of the probe window; Determine the real-time difference between the laser energy distribution in each local area and the standard energy distribution; The real-time optical path micro-offset region is determined based on the real-time difference; Determine the optical path micro-offset corresponding to the real-time optical path micro-offset region.

7. The laser platform energy monitoring method according to claim 6, characterized in that, Determine the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region, including: Determine the specific positional difference between the real-time optical path micro-offset region and the initial micro-offset region; Determine the specific impact of locational differences on energy measurements; The degree of difference is determined based on the specific impact.

8. The laser platform energy monitoring method according to claim 7, characterized in that, Determine the real-time calibration coefficients for the probe's current sensitivity drift, including: Determine the optical path micro-offset in the real-time adjusted mapping relationship that matches the temperature conditions of the current local area of ​​the window; The real-time sensitivity drift compensation value is determined based on the determined optical path micro-offset. Convert the real-time sensitivity drift compensation value into a real-time calibration coefficient; Real-time calibration coefficient for the current sensitivity drift of the output probe.

9. A laser platform energy monitoring system, implemented based on the laser platform energy monitoring method according to any one of claims 1-8, characterized in that, include: The temperature drift mapping module is used to determine the initial mapping relationship between the temperature state of each local area of ​​the window and the corresponding initial micro-offset of the local optical path based on the laser energy values ​​measured by the probe in each local area of ​​the window under different initial stable temperature conditions. The thermal polarization monitoring module is used to determine the real-time thermal expansion of the material in each local area of ​​the probe window based on the real-time temperature change rate collected in each local area of ​​the probe window, and to determine the real-time optical path micro-offset area and optical path micro-offset amount. The difference control module is used to determine the degree of difference between the real-time optical path micro-offset region and the initial micro-offset region; determine the difference trend between the real-time optical path micro-offset and the initial micro-offset; and locally adjust the initial mapping relationship according to the degree of difference and the difference trend to obtain the real-time adjusted mapping relationship. The sensitivity calibration module is used to determine the real-time calibration coefficient of the probe's current sensitivity drift based on the real-time adjusted mapping relationship.

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