Large-area perovskite battery film multi-nozzle ultrasonic spraying equipment and method

Abstract

The invention discloses large-area perovskite battery film multi-nozzle ultrasonic spraying equipment and method.The large-area perovskite battery film multi-nozzle ultrasonic spraying equipment comprises an equipment body, a spraying base table, a vacuum adsorption platform, a transmission mechanism and a spraying mechanism, the spraying mechanism comprises a portal frame, a mounting plate and ultrasonic nozzles, and inclined opposite blowing openings are further formed in the two sides of mist outlets in the bottoms of the ultrasonic nozzles; the inclined opposite blowing openings in the two sides face inwards and obliquely downwards, and the cross section of each blowing opening is a strip-shaped long opening. A transmission mechanism, a spraying mechanism and the like are integrally and precisely matched with an optimization system, a base fixing frame capable of being conveniently and automatically placed and taken is matched with vacuum adsorption to achieve overall convenient placement and stable positioning, then ultrasonic spray heads distributed in an array mode are combined, the vibration adaptability in the spraying process is high, and large-area uniform spraying is achieved; the nozzle support, the liquid supply system and the control unit are combined in a modularized mode, the equipment width and the nozzle number can be flexibly adjusted according to the sizes of different assemblies, and requirements of different stages from pilot plant test to industrial production are met.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of solar photovoltaic device preparation equipment, and particularly relates to a multi-nozzle ultrasonic spraying device suitable for the preparation process of a large-area perovskite solar cell module. The device is widely used in solution processing, high uniformity deposition and industrialized continuous production process of perovskite films, and also relates to the field of precision spraying technology and roll-to-roll process equipment. BACKGROUND

[0002] With the continuous improvement of the efficiency of perovskite solar cells (PSC), the industrialization process in the photovoltaic industry is accelerating. In order to meet the preparation needs of large-area devices, the scientific research and industry have developed various perovskite film deposition methods, including vacuum evaporation, inkjet printing, slot coating and spraying technology. Although the traditional vacuum evaporation method has high film uniformity, it is complex, expensive and difficult to combine with passivation agents to realize interface regulation, which limits the efficiency of the device and makes it difficult to become the mainstream industrialization route.

[0003] The inkjet printing technology has the advantages of flexible pattern and fast deposition speed, but the solvent of perovskite precursor is volatile, the nozzle is easy to block, and the nozzle is expensive, which makes it difficult to be popularized to large-area continuous preparation scene. The slot coating technology is currently the mainstream solution processing route in China, and the knife head can realize meter-level width coating, which is suitable for batch production of large-size modules. However, the slot coating has high requirements for the precision of the knife head, the working distance is very small, the speed is limited, and it is sensitive to the micro-vibration of the workshop, which restricts its further development under the conditions of high efficiency and low cost.

[0004] Compared with the above, the ultrasonic spraying technology has the advantages of simple structure, fast speed, self-cleaning nozzle, non-blocking, non-sensitivity to vibration, and expandable spraying width, which is suitable for the rapid preparation of flexible or large-area perovskite films. At present, with the optimization of material formula and process upgrading, the efficiency of perovskite solar cells prepared by ultrasonic spraying has approached or even exceeded the mainstream level of slot coating, showing great application potential.

[0005] The existing ultrasonic nozzle spraying device design generally has the following technical limitations: Limited spraying width: Most traditional ultrasonic nozzles have a single nozzle structure, and the spraying width is usually within 10 centimeters, which is difficult to meet the one-time film forming needs of large-area substrates (such as >30cm perovskite modules), and multiple reciprocating spraying is required, which is low in efficiency and high in energy consumption.

[0006] Significant airflow disturbance: Since ultrasonic spraying relies on compressed air or carrier gas to assist atomization, when multiple nozzles are arranged side by side, their ejected airflows can easily interfere and create turbulence in adjacent areas, leading to unstable droplet trajectories and uneven thickness distribution.

[0007] Poor spraying uniformity: Traditional equipment has difficulty in synchronously regulating multiple nozzles, and there are blind areas or overlapping areas between nozzles, resulting in inconsistent film thickness and affecting device performance consistency and yield.

[0008] Lack of wide array expansion capability: Most experimental equipment does not have a modular nozzle linkage structure, and cannot flexibly expand the spraying width, making it difficult to adapt to different sizes of devices or various production needs.

[0009] Airflow and material waste problems: Airflow disturbance can also cause some droplets to deviate from the target area, increasing material waste, reducing raw material utilization, and affecting production cost control.

[0010] Insufficient adjustment dimensions: Some nozzle support structures are simplified and lack precise three-dimensional adjustment capabilities, making it difficult to adapt to the fine-tuning needs of multiple nozzle arrays on complex substrates or under different process requirements.

[0011] Repeated spraying and recrystallization problems: In the ultrasonic spraying preparation process of perovskite thin films, in order to obtain uniform and dense crystalline quality, it is usually necessary to quickly complete solution deposition and film formation on the substrate surface. However, in existing single-nozzle or small-width spraying equipment, due to the limited spraying width, multiple overlapping spraying is often required through reciprocating paths to cover the entire substrate surface. This non-one-pass multiple spraying process can cause local dissolution and recrystallization of the perovskite precursor film layer in the previously deposited area when it comes into contact with droplets or solution again. This recrystallization behavior not only causes grain structure damage, formation of pinholes or particle aggregation, etc., but also can lead to thickness inconsistency, stress accumulation, and device performance degradation, seriously affecting the overall quality and repeatability of large-area thin films.

[0012] Therefore, in order to avoid the problems of repeated wetting and recrystallization in the spraying process, it is urgent to develop a large-width ultrasonic spraying system that supports multiple nozzle coordination and realizes one-time coverage and film formation. Through multiple nozzle arrays, synchronous and continuous spraying is achieved, effectively improving film density, crystal integrity, and edge consistency, meeting the process requirements of high-quality perovskite thin film preparation. SUMMARY

[0013] The application provides a large-area perovskite battery thin film multi-nozzle ultrasonic spraying device and method, which optimizes the system through overall precise cooperation of a transmission mechanism, a spraying mechanism and the like, realizes convenient automatic placing and taking of a substrate fixing frame, realizes overall convenient placement and stable positioning through cooperation of vacuum adsorption, then combines array distributed ultrasonic nozzles, has strong vibration adaptability in a spraying process, realizes large-area uniform spraying, and solves the problems in the background art.

[0014] To achieve the above object, the application provides the following technical scheme: a large-area perovskite battery thin film multi-nozzle ultrasonic spraying device, The device body top surface is in a platform structure, the platform is provided with mounting grooves matched with the transmission mechanism and the spraying mechanism, and the mounting of the mechanisms is facilitated. Further, the transmission mechanism for moving the spraying base station is arranged along the front-rear direction of the platform, the transmission mechanism comprises the spraying base station, and the spraying base station is used for placing the perovskite battery substrate thereon. A plurality of spaced protruding vacuum adsorption platforms are arranged on the top surface of the spraying base station, and the vacuum adsorption platforms adsorb and position the perovskite battery substrate when the perovskite battery substrate is placed above the protrusions on the top surface of the square plate; a hinge seat is further arranged on the top surface of the spraying base station outside the vacuum adsorption platforms, the hinge seat is hingedly connected with a substrate fixing frame, the substrate fixing frame is a hollow square frame, the square frame can be laid flat after being rotated around the hinge seat, and when laid flat, the vacuum adsorption platforms are just located in the middle cavity of the square frame; the substrate fixing frame surrounds the middle circle to form a placing clamping groove, that is, the outer edge of the placing clamping groove is higher than the inner edge clamping groove, and the perovskite battery substrate is placed in the placing clamping groove, and the four sides of the substrate are limited by the edge; the substrate fixing frame is hingedly connected with a telescopic rod below the adjacent two sides of the hinge seat through a second hinge seat, and the output end of the telescopic rod is hingedly connected with a corresponding third hinge seat on the platform; when the telescopic rod is extended, the frame can be rotated around the hinge seat to be lifted and separated from the vacuum adsorption platforms; when the telescopic rod is retracted, the frame can be laid flat so that the bottom surface of the perovskite battery substrate placed thereon is in contact with the vacuum adsorption platforms, vacuum adsorption is performed, the four sides are limited by the placing clamping groove, and accurate positioning is realized; meanwhile, the top surface of the spraying base station is provided with a pad block matched with the bottom surface of the substrate fixing frame when the substrate fixing frame is laid flat, so that the frame is supported in place. The transmission mechanism further comprises a guide rail assembly arranged along the Y-axis direction and used for driving the spraying base station to move, and the spraying base station is installed on the guide rail assembly and slides along the guide rail. The spraying mechanism comprises a gantry, a mounting plate and ultrasonic nozzles, and the gantry is arranged along the X-axis direction. A plurality of groups of ultrasonic nozzles are arranged on the mounting plate, and the ultrasonic nozzles are arrayed in an overall interval.

[0015] Preferably, the ultrasonic nozzle specifically comprises an ultrasonic nozzle body, an ultrasonic vibration cavity is arranged in the middle of the ultrasonic nozzle body, and a power connector is arranged. A liquid inlet connector is arranged at the top of the ultrasonic nozzle body, and a mist outlet is arranged below. The spraying liquid entering the liquid inlet connector of the liquid supply pump forms fine mist droplets in the ultrasonic vibration cavity and is sprayed out of the mist outlet. The ultrasonic nozzle further comprises inclined blow nozzles arranged on both sides of the mist outlet at the bottom of the ultrasonic nozzle. The two inclined blow nozzles are respectively inwardly and obliquely downwardly directed, and the cross section of the blow nozzle is a strip-shaped long opening. Side gas guiding connectors are arranged on the upper part of the inclined blow nozzles. After the gas guiding connectors introduce gas, the gas is blown obliquely downward from the inclined blow nozzles. A cooling gas connector is integrally arranged on one side of the liquid inlet connector. The connector is connected to an external cooling gas source. The cooling gas is introduced into the nozzle shell through a constraint gas channel which is directly cast into the shell.

[0016] Preferably, the ultrasonic nozzle is installed on the mounting plate through a multi-axis sliding table to realize a three-dimensional path dynamic control system of the spraying mechanism. The nozzle is installed on a multi-axis sliding table with Z-axis lifting function.

[0017] Preferably, a plurality of independently controllable ultrasonic nozzles are arranged in a staggered manner on a three-dimensional adjustable support. The adjacent nozzles are staggered so that the blow gas flow of the adjacent nozzles does not interfere. At the same time, the staggered layout structure of the nozzles forms an air flow channel in the gap between the adjacent nozzles.

[0018] Preferably, an integrated anti-turbulence cover is arranged around the spraying head array area. The cover body adopts a closed upper structure. Directional exhaust ports are arranged at the bottom of each side wall of the cover body. The multiple exhaust ports on the side walls together form an exhaust system.

[0019] Preferably, the system further comprises a segmented liquid supply and flow balance adjustment system. The whole liquid supply system adopts a segmented independent control structure. The main components include: Solenoid valve: By adjusting the response time and opening degree of the solenoid valve, the spray pulse frequency, flow intensity and spraying mode can be controlled.

[0020] Liquid (such as perovskite precursor solution) is supplied to the nozzle through an independent channel. A back pressure control unit provides stable flow. A solenoid valve is used to control the segmented liquid supply. Speed regulating valve: fine adjustment of liquid flow rate to achieve independent fine control of each nozzle. Pressure gauge: real-time monitoring of pressure of each channel to prevent uneven liquid supply. Modular structure of the nozzle: the liquid supply channels of each nozzle are independent to avoid pressure difference cross talk between multiple nozzles.

[0021] Preferably, the device maintains a working distance of 10-15 cm between the spray head and the substrate, maintains a working distance of 10-15 cm, combined with the air blowing flow channel, has higher tolerance to external vibration and substrate flatness, integrates symmetric air blowing flow channels in 15 cm and above wide spray head structure, and helps to stabilize air flow guidance and mist particle deposition path while maintaining a spray head-substrate distance of 10-15 cm; A row of linear high-brightness auxiliary light strips is designed behind the spray head mist area to enhance the visual contrast of mist droplets in the air, realize mist droplet visualization observation and auxiliary identification of defects.

[0022] Preferably, the spray head system is composed of multiple independent units, each unit including a spray head body, a solenoid valve, a speed regulating valve, a pressure gauge and a connecting pipeline, and connected to the main liquid supply system through a standardized interface; The spray head bottom is provided with a positioning pin and a limiting hole, which can automatically complete accurate positioning after being inserted into the installation slot; at the same time, a spring lock buckle or a side screw compression device is provided to realize quick locking and disassembly; The whole machine adopts a parallel liquid supply structure, all spray heads are branched from a unified total pressure channel, and the liquid supply pressure of each channel is finely adjusted through a speed regulating valve and a pressure gauge. When the number of spray heads is increased or decreased, the liquid supply system does not need to be rebuilt, and the expansion of the spraying area can be quickly realized.

[0023] Preferably, it also includes a preheating mechanism, which includes a heating plate assembly and a cooling unit, for dynamically adjusting the substrate temperature to ensure the stability and consistency of the film forming process.

[0024] The preheating mechanism is composed of the following parts: Heating module: embedded in the platform below the spraying area, in close contact with the substrate.

[0025] Temperature control unit: including temperature sensor and closed-loop controller, for real-time monitoring of heating surface temperature to ensure that the substrate surface maintains the set temperature; Thermal insulation layer: thermal insulation material is provided below the heating module to reduce heat loss and protect other equipment components.

[0026] The device integrates multiple sensors and data acquisition modules to monitor key process parameters such as spraying temperature, flow, spray head frequency, air pressure, substrate speed, etc. in real time; The device is provided with an external protective shell, and the top of the protective shell is provided with a waste gas recovery device, a perspective window and a numerical control operation panel; The device is provided with an integrated waste gas extraction system, and an air extraction port is provided inside the cover above the spraying area, which is directly connected to the central air extraction port of the plant system through a pipeline.

[0027] A large-area perovskite battery thin film multi-spray head ultrasonic spraying method, comprising the following steps: S1, place the perovskite battery substrate into the substrate fixing frame of the spraying base, place the perovskite battery substrate on the substrate fixing frame, and contact the bottom surface of the perovskite battery substrate with the vacuum adsorption platform to perform vacuum adsorption, and cooperate with the four side limiting of the clamping slot to realize accurate positioning; S2, the substrate on the spraying base is uniformly driven to move backward by the transmission mechanism, and then the ultrasonic nozzle sprays when passing through the set position below the spraying mechanism; S3, the array structure multi-nozzle is adopted to support the preparation of a large area component of 1m or more, and realize one-time uniform spraying of a large area; S4, during spraying, the two sides of the mist outlet at the bottom of the ultrasonic nozzle are inclined to blow inward and obliquely downward to the blowing air flow, and the fan flow of the blowing port cooperates to make the mist droplets directional, the air flow is evenly distributed in the fan, and the disturbance between the nozzles is suppressed to form a fan of mist droplets; S5, during spraying, the nozzle is adjusted to be staggered, a gas flow channel is formed between adjacent nozzles, and subsequent waste gas is easily removed from the gap between adjacent nozzles; S6, the nozzle is installed on a multi-axis sliding table with Z-axis lifting function, combined with an intelligent trajectory planning module, and supports dynamically adjusting the spraying height and angle according to the thickness difference of the substrate or the solution characteristics; S7, the whole liquid supply system adopts a segmented independent control structure, the control system sends instructions, adjusts the response time and opening degree of the electromagnetic valve, controls the spraying pulse frequency, flow intensity and spraying mode.

[0028] The perovskite precursor solution is supplied to the nozzle through an independent channel, and the back pressure control unit provides stable flow, and the electromagnetic valve is used to control the segmented liquid supply, and in the multi-nozzle structure, a plurality of electromagnetic valves can be independently controlled to realize differential spraying, edge filling and corner filling operations in local areas; S8, the whole machine structure adopts a modular nozzle support and liquid supply component design, the number of nozzles can be flexibly increased or decreased according to the substrate size and production requirements, the spraying width can be quickly expanded, the equipment adaptability is enhanced, and the preparation requirements of perovskite components of different specifications are met; S9, after spraying is completed, the transmission mechanism returns the perovskite battery substrate to the unloading station for unloading.

[0029] Compared with the prior art, the beneficial effects of the present application are: 1, the device is optimized by the overall precise cooperation of the transmission mechanism, the spraying mechanism and the like, the substrate fixing frame is conveniently and automatically placed, the vacuum adsorption is realized to stably position the whole device, then the ultrasonic nozzle in array distribution is combined, the vibration adaptability in the spraying process is high, and large-area uniform spraying is realized.

[0030] 2. Dynamic regulation system for three-dimensional path of spraying mechanism: The spray head is installed on a multi-axis sliding table with Z-axis lifting function. Combined with an intelligent trajectory planning module, it supports dynamic adjustment of spraying height and angle according to substrate thickness differences or solution characteristics (such as viscosity), improving film uniformity and edge consistency.

[0031] 3. Subsection independent liquid supply and flow closed-loop control system: A multi-path liquid supply channel is constructed to support independent liquid supply for each spray head and real-time feedback of flow status, preventing phenomena such as liquid interruption, uneven spraying, and uneven film thickness caused by uneven liquid supply paths, and improving large-area film stability.

[0032] 4. Modular structure and wide expandable design: The spray head support, liquid supply system, and control unit adopt a modular combination method. The equipment width and number of spray heads can be flexibly adjusted according to different component sizes, suitable for different stages from pilot to industrial production.

[0033] 5. Stable spraying environment and mist control structure: Anti-turbulence covers are set around the spray head area, and directional exhaust ports are opened in the covers to stabilize local airflow, prevent interference between spray heads, reduce the diffusion and pollution of atomized substances to the environment, and improve spraying cleanliness and safety.

[0034] 6. The gas introduced through the gas joint is blown obliquely downward from the inclined counter-blowing port. The fan-shaped flow guidance of the counter-blowing port works together to keep the mist directional, the airflow is evenly distributed in a fan shape, the interference between the spray heads is suppressed, the mist forms a fan, and the deposition trajectory is controlled. The position and speed of the mist are more controlled, improving the edge neatness and thickness uniformity of the film.

[0035] 7. The working distance between the spray head and the substrate of the device is maintained at 10-15 cm. Compared with the structure of a slot coating knife head with a gap less than 100 μm, it has higher tolerance to external vibration and substrate flatness, reduces the dependence on clean rooms and high-precision platforms, thereby reducing the cost of building a line and improving deployment flexibility.

[0036] 8. Multiple independently controllable ultrasonic spray heads are arranged in a staggered manner on a three-dimensional adjustable support. The counter-flow of adjacent spray heads does not interfere, and the staggered layout of the spray heads also forms an airflow channel between adjacent spray heads, avoiding the formation of a barrier by all fan-shaped mists in one plane, facilitating the subsequent removal of waste gas from the gap between adjacent spray heads.

[0037] 9. Online networking monitoring of process parameters and data closed-loop function: Multiple sensors are built into the system to monitor process parameters such as flow, temperature, pressure, and spraying speed in real time, support networking upload, remote monitoring, and fault warning, and realize visual and intelligent management of the spraying process. BRIEF DESCRIPTION OF DRAWINGS

[0038] Figure 1A schematic diagram of the three-dimensional structure of the present application; Figure 2 A schematic diagram of the spraying base opening structure of the present application; Figure 3 A schematic diagram of the spraying base merging structure of the present application; Figure 4 A schematic diagram of the guide rail structure of the present application; Figure 5 A schematic diagram of the spray head mounting structure of the present application; Figure 6 A schematic diagram of the spray head structure of the present application; Figure 7 A schematic diagram of the spray head side view structure of the present application; Figure 8 A schematic diagram of the spray head independent liquid supply structure of the present application; Figure 9 A schematic diagram of the A enlarged structure of the present application; Figure 5 Figure 10 A schematic diagram of the spray head high-low misalignment structure of the present application; Figure 11 A schematic diagram of the anti-interference cover structure of the present application; Figure 12 A schematic diagram of the back pressure control unit structure of the present application; Figure 13 A schematic diagram of the segmented liquid supply and flow equalization regulation system structure of the present application; Figure 14 A schematic diagram of the protective shell structure of the present application.

[0039] BRIEF DESCRIPTION OF REFERENCE NUMERALS: 1, device body; 2, spraying base; 3, vacuum adsorption platform; 4, hinged seat; 5, base fixing frame; 501, placing clamping groove; 6, telescopic rod; 7, cushion block; 8, guide rail; 9, gantry; 10, mounting plate; 11, spray head; 1101, ultrasonic spray head body; 1102, power connector; 1103, liquid inlet connector; 1104, mist outlet; 1105, inclined blowout port; 1106, side flow guide gas connector; 1107, cooling gas connector; 1108, opening; 12, multi-axis sliding table; 1201, screw fine adjustment knob; 13, anti-interference cover; 1301, directional exhaust port; 1302, 12-way gas exhaust diverter; 14, back pressure control unit; 15, electromagnetic valve; 16, speed regulating valve; 17, pressure gauge; 18, protective shell. DETAILED DESCRIPTION

[0040] ​The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0041] Example 1, please refer to Figures 1-5 The present invention provides a large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment, The device comprises a device body 1, which is supported by four legs. The top surface of the device body 1 is a platform structure. The platform is provided with mounting grooves matching the transmission mechanism and the spraying mechanism, which is convenient for the installation of the above mechanisms.

[0042] Furthermore, it also includes the front and rear directions on the platform (i.e. Figure 1 A transmission mechanism for moving the spraying base is arranged in the Y-axis direction, the transmission mechanism includes a spraying base 2, and the spraying base 2 is used to place the perovskite battery substrate thereon, so that the spraying base 2 is driven along the Y-axis direction through the transmission mechanism. Through the transmission action in the Y-axis direction, the perovskite battery substrate is moved back and forth between the loading and unloading stations and the processing stations.

[0043] The spraying base 2 is in the shape of a square plate as a whole, and a plurality of spaced-apart raised vacuum adsorption platforms 3 are provided on the top surface of the square plate, which are used for adsorbing and positioning the perovskite battery substrate at multiple locations when the substrate is placed above the raised portions on the top surface of the square plate. The adsorption principle of the vacuum adsorption platform is a public technology and will not be described in detail. A hinged seat 4 is also provided on the top surface of the spraying base 2 outside the vacuum adsorption platform 3, and the hinged seat 4 is hingedly connected to a substrate fixing frame 5. The substrate fixing frame 5 is a hollow square frame, and the square frame can be laid flat after rotating around the hinged seat 4. When laid flat, the vacuum adsorption platform 3 is located just in the middle cavity of the square frame, and the substrate fixing frame 5 forms a placement slot 501 around the middle, i.e., the outer edge of the placement slot 501. It is higher than the inner edge slot and is used to place the perovskite battery substrate, and the four sides of the substrate are limited by the edges; the substrate fixing frame 5 is hinged with a telescopic rod 6 through a second hinge seat below the adjacent two sides of the hinge seat 4, such as an electric push rod, and the output end of the telescopic rod 6 is hinged to the corresponding third hinge seat on the platform. When the telescopic rod 6 is extended, the frame can be rotated around the hinge seat 4 and lifted away from the vacuum adsorption platform 3. When the telescopic rod 6 is retracted, the frame can be laid flat so that the bottom surface of the perovskite battery substrate placed thereon will be contacted and adsorbed with the vacuum adsorption platform 3 at multiple points, and the four sides of the placement slot are limited to achieve precise positioning; at the same time, the top surface of the spray base 2 is provided with a pad 7 that fits with the bottom surface of the substrate fixing frame 5 when it is flat, so as to achieve the support of the frame in place.

[0044] The ultrasonic spraying is performed when the perovskite battery base moves under the spraying mechanism; preferably, an upper and lower material loading station is formed at the front end along the Y axis, that is, when the spraying base 2 is moved to the inlet and outlet of the front-end equipment by the transmission mechanism, the convenient loading and unloading of the perovskite battery base is performed.

[0045] The transmission mechanism further comprises precision guide rails 8 arranged along the Y axis direction, the spraying base 2 is installed on the two parallel guide rails 8 and slides along the guide rails 8, and then the spraying base is driven to move by a corresponding drive (such as an electric telescopic rod, a rodless guide rail cylinder, etc.), so as to realize the accurate transmission and positioning of the spraying base along the Y axis.

[0046] The spraying mechanism further comprises a gantry 9, a mounting plate 10 and a spray head 11, the gantry 9 is arranged along the X axis direction, is used for lifting the spraying mechanism to a certain height, so that the moving mechanism is arranged below the gantry 9, and the moving mechanism drives the base plate and the perovskite battery base to move under the spraying mechanism for spraying.

[0047] A plurality of groups of spray heads 11 are arranged on the mounting plate 10, the spray heads 11 are arrayed at intervals, the specific number and interval distance are flexibly set according to the requirement of the base, the spray head 11 is an ultrasonic spray head, the base on the spraying base 2 is uniformly driven to move backward by the transmission mechanism, then when the base reaches the set position under the spraying mechanism, the ultrasonic spray head 11 sprays after the in-place sensor recognizes the in-place position. The customized spray head (single spraying width ≥ 15 cm) is adopted, the multi-spray head array structure is adopted, the large-area assembly preparation of 1 m or more is supported, the one-time uniform spraying of a large area is realized, the film layer recrystallization phenomenon caused by repeated spraying is avoided, and the large-area film forming requirement of the perovskite solar cell is adapted.

[0048] The device realizes the convenient automatic loading and unloading of the base fixing frame through the overall precise cooperation of the transmission mechanism, the spraying mechanism and the like, realizes the convenient placement and stable positioning through the vacuum adsorption, then the vibration adaptability of the spraying process is high in combination with the arrayed ultrasonic spray head, and the large-area uniform and efficient spraying is realized.

[0049] Please refer to Figures 6-8 As an embodiment of the present application, the ultrasonic spray head 11 specifically comprises an ultrasonic spray head body 1101, an ultrasonic vibration cavity is arranged in the middle of the ultrasonic spray head body 1101, and a power connector 1102 is arranged, so as to realize the ultrasonic vibration of the ultrasonic spray head 11, a liquid inlet connector 1103 is arranged at the top of the ultrasonic spray head body 1101, the liquid inlet connector 1103 is used for adding the spraying liquid, is connected with an external liquid supply pump, the liquid supply pump separately supplies liquid, and is separately controlled by an external controller, a mist outlet 1104 is arranged below, the spraying liquid in the liquid inlet connector 1103 enters the ultrasonic vibration cavity and is sprayed out from the mist outlet 1104 in the form of fine mist droplets.

[0050] The ultrasonic nozzle 11 atomizes the liquid into micron-sized fine mist droplets, but these mist droplets are light in mass and small in inertia, and are extremely easy to be disturbed and deviated by external airflow. Therefore, inclined counter-blowing ports 1105 are arranged on both sides of the bottom mist outlet of the ultrasonic nozzle, the two inclined counter-blowing ports 1105 respectively face inward and obliquely downward, and the cross section of the blowing port is a strip-shaped long port, the upper part of the inclined counter-blowing port 1105 is provided with a side flow guiding gas joint 1106, the flow guiding gas joint 1106 introduces gas and blows obliquely downward from the inclined counter-blowing port 1105, the fan flow guiding of the counter-blowing port cooperates to make the mist droplets keep directionality, the airflow is evenly arranged in a fan shape, the disturbance between nozzles is inhibited, the mist droplets form a fan, and the deposition trajectory is controlled, the position and speed of the mist droplets are more controlled in a certain working distance (10-15 cm) during the sinking process, the edge neatness and thickness uniformity of the film layer are improved.

[0051] The cooling gas joint 1107 is arranged on one side of the liquid inlet joint 1103, the joint is connected with an external cooling gas source, the cooling gas is introduced into the nozzle shell through a constraint gas channel, the constraint gas channel is directly cast into the shell, the cooling gas flows along the set path in the nozzle, and local cooling of the ultrasonic atomizer and the liquid supply pipeline is realized. The cooling gas is discharged from the nozzle two-side opening 1108 at the bottom end of the nozzle through the gas channel, forming a stable airflow path, which does not interfere with the spraying and spraying, avoids the influence of high temperature on the stability of the liquid, effectively prolongs the service life of the atomizer, and ensures the temperature control stability and film forming consistency in the long-time spraying process.

[0052] Please refer to Figure 9 , as an embodiment of the present application, the ultrasonic nozzle 11 is installed on the mounting plate 10 through the multi-axis sliding table 12, realizing a three-dimensional path dynamic regulation system of the spraying mechanism: the nozzle 11 is installed on the multi-axis sliding table 12 with Z-axis lifting function, combined with an intelligent trajectory planning module, supporting dynamic adjustment of spraying height and angle according to substrate thickness difference or solution characteristics (such as viscosity), improving film uniformity and edge consistency.

[0053] The multi-axis sliding table 12 in the application adopts modular design, and respectively integrates adjusting components for realizing X, Y and Z three-axis direction fine adjustment. Specifically, the sliding table is composed of three groups of linear sliding rails and adjusting seats which are orthogonally superimposed, and independent screw fine adjustment knobs 1201 are respectively arranged in X, Y and Z directions. By rotating the fine adjustment knob in the corresponding direction, the platform can be driven to realize precise linear movement in the axis direction; the sliding block in each axis direction is provided with a limiting and locking structure, so that the platform can be precisely positioned and stably kept after adjustment. The modules are connected in a dovetail groove or guide rail sliding block plug-in manner, realizing high-precision cooperation and rapid disassembly and assembly, which is convenient for maintenance and replacement, and can flexibly combine and adjust the relative position of the nozzle and the substrate according to the process requirement, improving the adaptability and operation precision of the whole machine.

[0054] The intelligent trajectory planning module comprises a host computer control system matched with the spraying device and running on a Windows platform, adopts C# to write core control logic, and realizes precise collaborative control on a multi-axis sliding rail platform and a spraying process. The control system mainly comprises the following key functional modules: A graphical human-machine interface (HMI): the system has a visual process setting interface, and a user can set spraying parameters (such as a trajectory path, a spraying speed, a nozzle power, a gas pressure and a flow, etc.) through the host computer, supports process formula calling, parameter saving and process monitoring, is easy and flexible to operate, and the above is a known technology and will not be described in detail.

[0055] Multi-axis precise motion control: the C# control program is linked with a motion control card through a standard industrial bus protocol (such as Modbus or EtherCAT), realizes position, speed and synchronous running control on an X / Y / Z three-axis sliding table. The system supports micron-level positioning accuracy, ensures trajectory consistency and stability of the nozzle under large-scale high-speed running, and the above is a known technology and will not be described in detail.

[0056] System expansion and remote access capability: the platform reserves various communication interfaces (such as a serial port, an Ethernet, an IO expansion port, etc.), supports network docking with an MES system or a host computer, can realize remote task issuing, process monitoring, data acquisition and early warning uploading. At the same time, it has integration capability with external modules such as a visual detection system and an environmental sensor, provides system support for subsequent online detection, AI image recognition and automatic closed-loop regulation, and the above is a known technology and will not be described in detail.

[0057] Multi-nozzle collaborative one-time forming, spraying speed ≥50 cm / s, much higher than slit coating (2-5 cm / s) and traditional multi-pass spraying (about 10 cm / s), significantly improves line beat, meets high-speed continuous production demand, one-time coverage deposition, effectively avoids film layer recrystallization problem caused by traditional multi-pass spraying, and adapts to rapid preparation demand of large-area components.

[0058] Please refer to Figure 10 , as an embodiment of the present application, a plurality of independently controllable ultrasonic nozzles are arranged in a staggered manner on a three-dimensional adjustable support, adjacent nozzles are staggered, that is, the heights of adjacent nozzles in the z-axis direction are different, the positions of adjacent nozzles in the Y-axis direction are staggered, the counter-blowing air flow of adjacent nozzles does not interfere, at the same time, the staggered layout structure of the nozzles also forms an air flow channel between adjacent nozzles, avoids that all fan mist droplets form a barrier on a surface, and facilitates subsequent spraying exhaust gas to be drawn away from the gap between adjacent nozzles.

[0059] The structure is provided with directional counter-blowing nozzles on both sides of each spray head, sprays out a fan-shaped airflow that expands obliquely, and then through staggered arrangement of ultrasonic spray heads, forms multiple symmetrical and staggered low-turbulence airflow channels below the spray head array. The channels flow stably along the parallel or slightly inclined direction of the substrate, providing a stable deposition environment for the mist droplets.

[0060] Synergistic mechanism with ultrasonic atomization: in ultrasonic spraying, the mist droplets are small in size and easy to be disturbed. The counter-blowing structure can stabilize the movement path of the mist droplets, weaken the influence of external disturbance, and improve the deposition accuracy and film uniformity. On the other hand, it can also alleviate the airflow cross interference between multiple spray heads, avoiding mist droplet deviation, intersection or backflow phenomenon.

[0061] Please refer to Figure 11 As an embodiment of the present application, an integrated anti-disturbance cover 13 is arranged at the periphery of the spray head array area, and the cover body adopts a closed upper structure. The cover body design can effectively isolate the disturbance airflow at the periphery of the atomization area during spraying.

[0062] The cover body is provided with directional exhaust ports 1301 connected to the inside at intervals at the bottom of each side wall, and the multiple exhaust ports on the side collectively constitute an exhaust system. The directional exhaust ports 1301 are connected by 12-way gas exhaust distributors 1302, and then the waste liquid is treated by external waste recovery equipment to realize closed loop treatment, so as to form a stable negative pressure airflow field in the cover body. The exhaust gas is first guided to the side and discharged, avoiding interference with the inside, causing airflow turbulence, affecting spraying, and enhancing the synchronous exhaust efficiency of the exhaust gas.

[0063] A single exhaust port is easy to cause dead angles or airflow stagnation zones in the cover body, especially local enrichment during spraying. The design can effectively break the vortex and accumulation through multi-point dispersed air extraction, especially the four directional exhaust ports, to ensure rapid removal of solvent mist droplets. The directions of each exhaust port are accurately set to make the internal airflow flow orderly from the spray source to the outside, effectively preventing solvent and particulate matter from overflowing towards the opening direction of the cover body, and improving environmental friendliness and safety.

[0064] The side exhaust ports can be flexibly configured in terms of opening number and air volume according to different substrate sizes and spraying modes, enhancing adaptability and modular expansion capability. The auxiliary airflow (including the counter-blowing airflow of the spray head and the surrounding guiding airflow) during spraying is orderly discharged according to the predetermined path, avoiding the formation of vortex or backflow area in the cover body.

[0065] The anti-turbulence cover forms a semi-closed space with the nozzle array. By arranging the directional exhaust port 1301 on the side, the air flow generated by the multiple nozzles 11 does not interfere with each other, but is guided in the cover to be quickly discharged in the direction close to the side exhaust port, effectively controlling the air flow directionality and laminar flow. In this way, not only the stability of the overall air flow field is improved, but also the controllability of the mist deposition path is significantly improved, the random drift, scattering and convergence of the mist in the spraying area are inhibited, and the deposition efficiency and film uniformity are improved.

[0066] At the same time, the structure has pollution control function, can reduce the diffusion of atomized material in the working environment, reduce the influence of organic solvent or precursor residue on the operator and equipment, and further improve the safety and cleanliness of the spraying process.

[0067] Please refer to Figures 12-13 As an embodiment of the present application, it further includes a segmented liquid supply and flow equalization regulation system: the whole system adopts a segmented independent control structure, mainly including: a back pressure control unit 14 for controlling the gas flow on both sides of the nozzle 11 to realize precise regulation of the spraying environment. The system is composed of solenoid valve 15, speed regulating valve 16, pressure gauge 17 and gas passage. The cooling gas is introduced from the total positive pressure gas source and delivered to the gas passages on both sides of each nozzle 11. The solenoid valve 15 realizes the gas switch control, the speed regulating valve 16 adjusts the gas flow rate and back pressure intensity, and the pressure gauge 17 monitors the pressure of each gas in real time to ensure that the cooling gas is stably output within the set range.

[0068] The structure can form a stable and symmetrical cooling gas flow environment during spraying, which can cool the nozzle to prolong its service life, and provide gas assistance for the atomization process of the spray to inhibit the splashing and edge interference of the droplets and improve the spraying uniformity. By adjusting the speed regulating valve and combining with pressure feedback, the independent control of the gas back pressure of each nozzle in the multi-nozzle parallel structure is realized, which provides reliable guarantee for high consistency and high precision spraying process.

[0069] In the open state of the solenoid valve, the liquid passage is connected, and the solution flows into the atomization area of the nozzle. When it is necessary to stop supplying liquid or switch the nozzle, the solenoid valve is closed to realize precise start and stop or segmented switching spraying of a single nozzle. In the multi-nozzle structure, a plurality of solenoid valves can be independently controlled to realize differential spraying, edge / angle filling operation in local area.

[0070] The programmable control system (PLC or embedded MCU) of the equipment sets the spraying track and beat, and the solenoid valve synchronously responds to the gas-liquid switching instruction to form the following closed-loop collaborative mechanism: Spraying starts: the gas valve and the liquid valve are opened synchronously, spraying stops or changes track: the gas valve and the liquid valve are closed synchronously or closed with a timing error (to avoid wire drawing and liquid droplet residue), local strengthening: a specific nozzle is opened alone with the liquid valve and strong gas assisted atomization.

[0071] Speed regulating valve: fine control of gas flow rate, independent fine control of each nozzle; Pressure gauge: real-time monitoring of pressure of each channel to prevent uneven gas supply; Modular structure of the nozzle: independent liquid supply path of each nozzle to avoid pressure difference interference between multiple nozzles.

[0072] This structure supports software control system (such as PLC or touch screen) to realize partition gas supply proportional adjustment, according to the film thickness distribution feedback, to fine tune the gas flux of each nozzle one by one, to compensate for local deposition deficiency.

[0073] Build a multi-channel independent gas supply and flow feedback control mechanism to adjust the gas supply state of each nozzle in real time, combined with the back pressure control unit to provide stable flow, prevent gas interruption, flow deviation and other problems caused by pipeline length difference or spraying state change, through the cooperation of multi-channel independent gas supply, flow feedback and three-dimensional adjustment nozzle, achieve vibration adaptation and uniform film forming, ensure the stability of the overall spraying quality.

[0074] Please refer to Figure 1 As an embodiment of the present application, the working distance between the nozzle of the device and the substrate is maintained at 10-15 cm.

[0075] 15cm+spraying width needs to consider air flow balance: when the spraying width of a single nozzle is greater than or equal to 15cm, the droplet deposition path is long, the coverage range is large, and the edge disturbance sensitivity is enhanced. When multiple nozzles are used simultaneously, air flow interference and droplet deviation are significantly aggravated, and if there is no reasonable flow guide structure, it is easy to cause problems such as insufficient edge film thickness and central interference zone, which seriously affects the film consistency and film quality. When multiple large nozzles are working, the air flow superposition effect below them is stronger, and if there is no counter-blowing structure for flow guidance, there will be a "droplet deviation zone" or "central film forming interference zone" between the nozzles; high consistency film forming requirement is improved: perovskite solar cells have very high requirements for large-area uniformity, density and edge integrity, and if there is no good air flow management for a width of 15cm or more, it will greatly affect the performance of the device.

[0076] Therefore, in the 15cm and above wide nozzle structure, the symmetrical counter-blowing air flow channel structure is integrated, which is a key measure to improve the spraying consistency, realize controllable deposition and equipment engineering expansion. Compared with the structure of the gap of the slot coating knife head being less than 100μm, the working distance is maintained at 10-15 cm, combined with the counter-blowing air flow channel, which has higher tolerance to external vibration and substrate flatness, reduces the dependence on clean rooms and high-precision platforms, thereby reducing the cost of building lines and improving the deployment flexibility.

[0077] In the 15 cm and above wide-width nozzle structure, the integration of symmetric air blowing flow channels helps to stabilize the air flow guidance and the deposition path of atomized particles while maintaining a 10-15 cm nozzle-substrate spacing. Compared to the 100 μm level gap between the knife heads in slit coating, this larger spacing can significantly reduce the sensitivity of the equipment to small fluctuations or vibrations in the substrate height. On the one hand, the air blowing flow forms a controllable and stable air flow channel below the nozzle, enhancing the alignment and orientation of the droplets before deposition; on the other hand, this spacing can avoid uneven film thickness or nozzle damage caused by substrate unevenness or local deformation, thereby improving the tolerance to production environment disturbances and substrate size deviations, meeting the requirements for stable film formation and industrialization under more complex working conditions.

[0078] To improve the visualization control and film uniformity evaluation during spraying, a row of linear high-brightness auxiliary light strips is installed behind the nozzle mist area (in the spraying direction) to enhance the visual contrast of the mist droplets in the air, achieving visual observation and defect auxiliary identification of the mist droplets.

[0079] The light strips use short-wave blue light to enhance the visual contrast of the mist droplets, have pulse dimming function synchronized with the spraying frequency, support dynamic spraying freeze capture, and are integrated with the sliding table and have anti-splashing and anti-corrosion performance.

[0080] Please refer to Figure 9 As an embodiment of the present application, the whole machine structure adopts a modular nozzle support and liquid supply assembly design, which can flexibly increase or decrease the number of nozzles according to the substrate size and production requirements, realize rapid expansion of the spraying width, and enhance the equipment adaptability, meeting the preparation requirements of different specifications of perovskite components.

[0081] The nozzle system is composed of multiple independent units, each unit containing a nozzle body, an electromagnetic valve 15, a speed regulating valve 16, a pressure gauge 17, and a connecting pipeline, and connected to the main liquid supply system through a standardized interface. This design realizes the unitization and integration of the functions of each nozzle, facilitating on-demand configuration and maintenance.

[0082] Each nozzle assembly can be installed or removed as a "plug and play" module, facilitating adjustment of the number of nozzles according to the substrate width; each nozzle assembly is designed as a standardized module unit, installed on the sliding rail or mounting base of the spraying platform, and realizes the "plug and play" function through a quick release structure. The nozzle bottom is provided with a positioning pin and a limiting hole, which can automatically complete precise alignment after being inserted into the installation slot; at the same time, a spring lock or a side screw compression device is provided to realize quick locking and dismounting. The gas and liquid interfaces adopt self-sealing joints, which are automatically connected and leak-free after insertion, and the nozzle can be replaced without repeated calibration, facilitating maintenance and adjustment of the spraying head array configuration, greatly improving the system modularity and operation efficiency.

[0083] The modules are precisely aligned by mechanical limiting structures such as positioning pins and guide rail slots, ensuring uniformity of the spray overlap area; the combination of solenoid valves and speed control valves provides independent flow and on-off control for each spray head, avoiding uneven liquid supply or gas-liquid mismatch caused by multi-spray head linkage.

[0084] Width expansion and precision guarantee mechanism: The whole machine adopts a parallel liquid supply structure, all spray heads are divided from a unified total pressure channel, and the liquid supply pressure of each channel is finely controlled through speed control valves and pressure gauges. When the number of spray heads is increased or decreased, there is no need to rebuild the liquid supply system, and the expansion of the spraying area can be quickly realized.

[0085] Even when switching quickly or across-specification components, configuration updates can be completed by plugging in the standardized interface and setting the control parameters, with fast response speed and high system stability; the modules are arranged compactly, minimizing the "blind area" between spray heads, achieving wide-area one-pass deposition, and meeting the continuous spraying needs from small-size battery pieces to large-area components.

[0086] This structure is particularly suitable for multi-specification preparation scenarios of perovskite solar cells, and users can flexibly configure the spray head array according to different substrate widths (such as 156 mm, 210 mm, 500 mm, or 1 m or more), achieving efficient, high-uniformity, and high-consistency spraying and deposition processes.

[0087] Please refer to Figure 14 , as an embodiment of the present application, also includes a preheating mechanism, which includes a heating plate assembly and a cooling unit, for dynamically regulating the substrate temperature to ensure the stability and consistency of the film formation process.

[0088] The preheating mechanism consists of the following parts: Heating module: embedded in the platform below the spraying area, in close contact with the substrate, using electrically heated ceramic.

[0089] Temperature control unit: including temperature sensor and closed-loop controller, for real-time monitoring of heating surface temperature, ensuring the substrate surface to maintain the set temperature (10-150℃).

[0090] Thermal insulation layer: thermal insulation material is provided below the heating module to reduce heat loss and protect other equipment components.

[0091] When the substrate enters the spraying area and is fixed on the transmission platform, the preheating mechanism starts, uniformly transferring heat to the substrate through heat conduction. Proper heating temperature can accelerate solvent evaporation, improve film densification, and reduce the mobility of droplets on the substrate surface, thereby improving film uniformity and adhesion.

[0092] The complete film deposition closed-loop control process is formed by the matched setting of the substrate preheating platform, the annealing treatment module (on the heating table) and other multi-link process components, and the film layer crystallization quality and product stability are improved.

[0093] The device integrates various sensors and data acquisition modules, can monitor key process parameters such as spraying temperature, flow, nozzle frequency, air pressure, substrate speed in real time, and realizes networking transmission and remote diagnosis with the upper computer or cloud platform through the industrial communication interface, supports process data visualization, quality trend analysis and intelligent early warning of equipment running state, improves the automation level of the whole line operation and the product consistency control ability.

[0094] The device is provided with an external protective shell 18, and the protective shell 18 is provided with a waste gas recovery device, a perspective window and a numerical control operation panel at the top.

[0095] The device is provided with an integrated waste gas extraction system, and an air extraction port is arranged in the cover body above the spraying area and is directly connected with the central air extraction port (factory air extraction pipe) of the factory system through a pipeline.

[0096] The safety during processing is improved by arranging the protective shell, the internal processing and the external environment are isolated, the environmental protection requirements are met, the generated waste gas is recovered through the waste gas recovery device, the internal processing condition can be observed through the perspective window, and the spraying parameters, power on / off and other work instructions can be set through the numerical control operation panel.

[0097] The application provides a large-area perovskite battery thin film multi-nozzle ultrasonic spraying method, which comprises the following steps: S1, the sealing door of the device protective shell 18 is opened, the telescopic rod 6 is extended out of the frame, rotates around the hinge seat 4 to lift and separate from the vacuum adsorption platform 3, then the perovskite battery substrate is placed into the substrate fixing frame 5 of the spraying base 2, when the telescopic rod 6 is retracted, the frame can be flattened to make the bottom surface of the perovskite battery substrate placed thereon contact with the vacuum adsorption platform 3, and the vacuum adsorption is carried out, and the four side limits of the placing clamping groove 501 are matched to realize accurate positioning; meanwhile, the top surface of the spraying base 2 is provided with a pad 7 which is attached to the bottom surface of the substrate fixing frame 5 when the substrate fixing frame 5 is flattened, so that the frame is supported in place, the sealing door is closed, and the spraying operation instruction is started; S2, the transmission mechanism drives the spraying base 2 to move to the processing station along the Y-axis direction, the substrate on the spraying base 2 is uniformly driven to move backward by the transmission mechanism, then when passing through the set position below the spraying mechanism, the in-place sensor identifies the in-place state, and the ultrasonic nozzle sprays; S3, the array structure multi-nozzle 11 is adopted, 1m or more large-area components can be prepared, one-time uniform spraying of large-area components is realized, the film layer recrystallization phenomenon caused by repeated spraying is avoided, and the large-area film forming demand of the perovskite solar cell is met; S4, during spraying, the two sides of the mist outlet 1104 at the bottom of the ultrasonic nozzle 11 are inclined to blow outwards and downwards to form a gas flow, and the fan-shaped flow of the blowout port cooperates to make the mist droplets directional, the gas flow is evenly distributed in a fan shape, and the disturbance between the nozzles is suppressed to form a fan shape; S5, during spraying, the nozzles 11 are adjusted to be staggered, and a gas flow channel is formed between adjacent nozzles to avoid all fan-shaped mist droplets forming a barrier in one plane, facilitating the subsequent spraying exhaust gas to be drawn away from the gap between adjacent nozzles; S6, the nozzle 11 is installed on a multi-axis sliding table 12 with Z-axis lifting function, and combined with an intelligent trajectory planning module, the spraying height and angle can be dynamically adjusted according to the thickness difference of the substrate or the solution characteristics (such as viscosity), to improve the film uniformity and edge consistency; S7, the whole liquid supply system adopts a segmented independent control structure, the control system sends instructions to control the response time and opening degree of the electromagnetic valve to control the spraying pulse frequency, flow intensity and spraying mode.

[0098] The liquid (such as perovskite precursor solution) is supplied to the nozzle through an independent channel, and a back pressure control unit provides stable flow, and an electromagnetic valve is used to control the segmented liquid supply. In a multi-nozzle structure, multiple electromagnetic valves can be independently controlled to realize differential spraying, edge / angle filling operation in local areas.

[0099] The device programming control system (PLC or embedded MCU) sets the spraying trajectory and beat, and the electromagnetic valve synchronously responds to the gas-liquid switching instruction to form the following closed-loop cooperation mechanism: spraying starts: the gas valve and the liquid valve are opened synchronously, spraying stops or changes track: the gas valve and the liquid valve are closed synchronously or closed with a time lag, local strengthening: a specific nozzle opens the liquid valve alone, and strong gas assists atomization; S8, the whole machine structure adopts a modular nozzle support and liquid supply assembly design, and the number of nozzles can be flexibly increased or decreased according to the substrate size and production requirements, the spraying width can be quickly expanded, and the equipment adaptability is enhanced to meet the preparation requirements of perovskite components of different specifications; S9, after spraying is completed, the transmission mechanism realizes the return of the perovskite battery substrate to the feeding and discharging station through the transmission action in the Y-axis direction.

[0100] Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment, characterized in that: The device comprises a main body, the top surface of which is a platform structure. The platform is provided with mounting grooves matching the transmission mechanism and the spraying mechanism, which is convenient for the installation of the above mechanisms. Furthermore, the invention also includes a transmission mechanism arranged along the front-to-back direction on the platform for moving the spraying base, the transmission mechanism includes the spraying base, and the spraying base is used to place the perovskite battery substrate thereon; The top surface of the spraying base is provided with a plurality of spaced-apart raised vacuum adsorption platforms, which are used for adsorbing and positioning the perovskite battery substrate when it is placed above the raised protrusions on the top surface of the square plate; the top surface of the spraying base is also provided with a hinged seat outside the vacuum adsorption platform, and the hinged seat is hinged with a base fixing frame, which is a hollow square frame. The square frame can be laid flat after rotating around the hinged seat, and the vacuum adsorption platform is just located in the middle cavity of the square frame when laid flat, and the base fixing frame forms a placement slot around the middle circle, that is, the outer edge of the placement slot is higher than the inner edge slot, which is used for placing the perovskite battery substrate The four sides of the bottom are limited by the edges; the base fixing frame is hinged with a telescopic rod through a second hinge seat below the adjacent two sides of the hinge seat, and the output end of the telescopic rod is hinged with the corresponding third hinge seat on the platform. When the telescopic rod is extended, the frame can rotate around the hinge seat and lift it off the vacuum adsorption platform. When the telescopic rod is retracted, the frame can be laid flat so that the bottom surface of the perovskite battery substrate placed thereon contacts the vacuum adsorption platform for vacuum adsorption, and the four sides of the placement slot are limited to achieve precise positioning; at the same time, the top surface of the spray base is provided with a pad that fits the bottom surface of the base fixing frame when it is laid flat, so as to achieve the support of the frame in place; The transmission mechanism also includes a guide rail assembly arranged along the Y-axis direction for driving the spraying base to move. The spraying base is installed on the guide rail assembly and slides along the guide rail. The spraying mechanism also includes a gantry, a mounting plate and an ultrasonic nozzle, and the gantry is arranged along the X-axis direction; A plurality of groups of ultrasonic nozzles are arranged on the mounting plate, and the ultrasonic nozzles are distributed in an array at intervals as a whole.

2. A large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: The ultrasonic nozzle specifically includes an ultrasonic nozzle body, an ultrasonic vibration cavity is set in the middle of the ultrasonic nozzle body, and a power connector is set, a liquid inlet connector is set at the top of the ultrasonic nozzle body, and a mist outlet is set at the bottom. The spray liquid entering the liquid inlet connector through the liquid supply pump is formed into fine mist droplets through the ultrasonic vibration cavity and sprayed out from the mist outlet; The ultrasonic nozzle has inclined counter-blowing ports on both sides of the mist outlet at the bottom. The inclined counter-blowing ports on both sides face inward and obliquely downward, and the cross section of the blowports is a long strip-shaped port. A side drainage gas joint is provided on the upper part of the inclined counter-blowing port. After the drainage gas joint introduces gas, it blows obliquely downward from the inclined counter-blowing port. A cooling gas connector is integrated on one side of the liquid inlet connector. The connector is connected to an external cooling gas source and guides the cooling gas into the interior of the nozzle housing through a constrained air duct. The constrained air duct is directly cast in the housing.

3. A large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 2, characterized in that: The ultrasonic nozzle is installed on the mounting plate through a multi-axis slide to realize the three-dimensional path dynamic control system of the spraying mechanism. The nozzle is installed on a multi-axis slide with Z-axis lifting function.

4. A large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 3, characterized in that: Multiple independently controllable ultrasonic nozzles are staggered and arranged on a three-dimensional adjustable bracket. The adjacent nozzles are staggered so that the blowing airflows of adjacent nozzles do not interfere with each other. At the same time, the staggered layout structure of the nozzles also forms airflow channels in the gaps between adjacent nozzles.

5. The large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: An integrated anti-spoiler cover is set around the spray head array area. The cover adopts an upper closed structure. Directional exhaust ports connected to the interior are provided at intervals at the bottom of each side wall of the cover. Multiple exhaust ports on the side together constitute an exhaust system.

6. The large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: It also includes a segmented liquid supply and flow balance adjustment system: the entire liquid supply system adopts a segmented independent control structure, and its main components include: Solenoid valve: By adjusting the response time and opening of the solenoid valve, the spray pulse frequency, flow intensity and spray pattern can be controlled; Liquid (such as perovskite precursor solution) is supplied to the nozzle through an independent channel, and a back pressure control unit provides a stable flow rate. The solenoid valve is used to control its segmented liquid supply. Speed ​​regulating valve: fine-tune the liquid flow rate to achieve independent and precise control of each nozzle; Pressure gauge: real-time monitoring of each line pressure to prevent uneven liquid supply; Modular structure of the nozzle: each nozzle has an independent liquid supply path to avoid pressure difference crosstalk between multiple nozzles.

7. The large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: This device maintains a working distance of 10–15 cm between the nozzle and the substrate. Maintaining a working distance of 10–15 cm, combined with the counter-blowing airflow channel, has a higher tolerance to external vibration and substrate flatness. The symmetrical counter-blowing airflow channel is integrated into the nozzle structure with a width of 15 cm and above, which helps to stabilize the airflow guidance and atomized particle deposition path while maintaining a nozzle-substrate distance of 10–15 cm. A row of linear high-brightness auxiliary light strips is designed on the rear side of the nozzle mist outlet area to enhance the visual contrast of the droplets in the air, enabling visual observation of the droplets and auxiliary defect identification.

8. The large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: The nozzle system consists of multiple independent units. Each unit includes: nozzle body, solenoid valve, speed regulating valve, pressure gauge and connecting pipes, and is connected to the main liquid supply total pressure system through a standardized interface. The bottom of the nozzle is equipped with a positioning pin and a limit hole, which can automatically complete the precise alignment after being inserted into the installation slot; it is also equipped with a spring lock or a side spiral clamping device to achieve quick locking and disassembly; The whole machine adopts a parallel liquid supply structure. All nozzles are diverted from a unified total pressure channel. The liquid supply pressure of each channel is finely controlled by a speed control valve and a pressure gauge. There is no need to rebuild the liquid supply system when adding or reducing the number of nozzles, and the spraying width can be quickly expanded.

9. The large-area perovskite battery thin film multi-nozzle ultrasonic spraying equipment according to claim 1, characterized in that: It also includes a preheating mechanism, which includes a heating plate assembly and a cooling unit for dynamically controlling the substrate temperature to ensure the stability and consistency of the film forming process; The preheating mechanism consists of the following parts: Heating module: embedded in the platform below the spraying area, maintaining close contact with the substrate; Temperature control unit: includes temperature sensor and closed-loop controller, used to monitor the temperature of the heating surface in real time to ensure that the substrate surface maintains the set temperature; Insulation layer: Insulation material is provided under the heating module to reduce heat loss and protect other equipment components; The equipment integrates multiple sensors and data acquisition modules, which can monitor key process parameters such as spraying temperature, flow rate, nozzle frequency, air pressure, substrate speed, etc. in real time; The equipment is equipped with an external protective shell, and an exhaust gas recovery device, a perspective window and a CNC operation panel are installed on the top of the protective shell; This equipment is equipped with an integrated exhaust gas extraction system. An exhaust port is provided inside the hood above the spraying area, which is directly connected to the central exhaust port of the plant system through a pipeline.

10. A multi-nozzle ultrasonic spraying method for large-area perovskite battery thin film, characterized in that: The steps include: S1, place the perovskite battery substrate on the substrate fixing frame of the spray base, lay the frame flat and place the bottom surface of the perovskite battery substrate on it in contact with the vacuum adsorption platform for vacuum adsorption, and cooperate with the four sides of the placement slot to achieve precise positioning; S2, the substrate on the spraying base is driven by the transmission mechanism to move backward at a constant speed, and then when it passes the set position under the spraying mechanism, the ultrasonic nozzle starts spraying; S3, with an arrayed multi-nozzle structure, supports the preparation of large-area components of 1m and above, achieving uniform one-time spraying of large areas; During S4 spraying, the inclined blowing ports on both sides of the mist outlet at the bottom of the ultrasonic nozzle are respectively inward and obliquely downward toward the blowing airflow. The fan-shaped flow guide of the blowing port synergistically keeps the droplets directional, the airflow is evenly distributed in a fan shape, and the disturbance between the nozzles is suppressed, so that the droplets form a fan shape. S5, during spraying, the nozzles are adjusted to a staggered layout to form airflow channels between adjacent nozzles, making it easier for subsequent spraying exhaust gas to be extracted from the gaps between adjacent nozzles; S6, the nozzle is installed on a multi-axis slide with Z-axis lifting function. Combined with the intelligent trajectory planning module, it supports dynamic adjustment of spraying height and angle according to substrate thickness differences or solution characteristics; S7, the entire liquid supply system adopts a segmented independent control structure. The control system issues instructions and controls the spray pulse frequency, flow intensity and spray pattern by adjusting the response time and opening of the solenoid valve; The perovskite precursor solution is supplied to the nozzle through an independent channel, with a stable flow rate provided by the back pressure control unit. The solenoid valve is used to control its segmented liquid supply. In a multi-nozzle structure, multiple solenoid valves can be independently controlled to achieve differentiated spraying in local areas and edge / angle filling operations. The S8 adopts a modular nozzle bracket and liquid supply component design. The number of nozzles can be flexibly increased or decreased according to substrate size and production needs, achieving rapid expansion of spraying width and enhanced equipment adaptability to meet the preparation requirements of perovskite modules of different specifications. S9, after spraying is completed, the transmission mechanism enables the perovskite battery substrate to return to the unloading station for unloading.

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