Probe needle grinding jig and grinding device thereof

Abstract

This application discloses a grinding fixture for probes and its grinding apparatus. The fixture includes a mounting head, a mounting platform, and a connecting platform. Through this application, when grinding new probes, the design of the mounting head allows for the simultaneous grinding of one or more new probes, thereby improving grinding efficiency and avoiding the need for replacing the entire card, significantly reducing replacement costs. The new probes are then sequentially passed through corresponding positions on the mounting head, so that the tails of all new probes abut against corresponding protrusions in the simulated area. This simulates the pressure experienced by the probes during actual operation, allowing the new probes to better replace the replaced burnt-out probes after grinding. Then, the position of the mounting platform is adjusted using appropriate adjusting components to ensure that the levelness of the simulated area meets the grinding requirements, ensuring that the tips of all new probes are on the same plane, thus guaranteeing that the lengths of the new and old probes remain consistent.

Description

Technical Field

[0001] This application relates to the field of probe grinding technology, and in particular to a probe grinding needle fixture and its grinding device. Background Technology

[0002] In semiconductor wafer testing, probe cards are key components connecting the test equipment and the wafer. Their core function is to transmit test signals by having probes contact the chip pads. Among them, 2D MEMS probe cards are widely used in the testing of advanced process chips (such as 5nm and 3nm) due to their high precision and high density characteristics.

[0003] During testing, probes frequently contact the pads, causing their tips to gradually wear down. This leads to increased contact resistance or the accumulation of foreign matter, and prolonged testing may burn out the probes, necessitating replacement. Traditional probe cards (such as cantilever probe cards) typically replace all burnt probes if too many are damaged. However, due to the high production cost of 2D MEMS probe cards, replacing the entire card results in the waste of most usable probes. Some manufacturers replace burnt probes one by one. Before replacement, the new probe usually needs to be ground to ensure its length matches the original. Currently, clamps and other tools are commonly used to hold the new probe during grinding, which often results in the new probe's length not matching the old one, and the grinding efficiency is low, impacting subsequent production. Summary of the Invention

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a grinding fixture for probes and a grinding apparatus thereof to solve the problems of difficulty in maintaining consistent lengths between new and old probes, and low grinding efficiency.

[0005] In a first aspect, this application provides a probe grinding fixture, including a connecting platform, a mounting platform, and a mounting head. The connecting platform and the mounting platform are movably connected by at least three adjusting members, and there is a gap between the connecting platform and the mounting platform. At least three of the adjusting members are not collinearly arranged, and the adjusting members are configured to change the position of the mounting platform. The mounting head is mounted on the mounting platform, and the mounting platform has a simulation area on the side facing the mounting head. The simulation area is used to simulate a protrusion on a PCB board that abuts against an old probe. At least one new probe can penetrate the mounting head and be fixed on the mounting head. After the new probe passes through the mounting head, the tail of the new probe abuts against the protrusion on the simulation area, and the limiting structure limits the new probe.

[0006] Based on the aforementioned probe grinding fixture, when grinding new probes, a certain number of new probes are selected according to the number of burnt probes to be replaced, and corresponding mounting heads are selected according to the positions of the burnt probes to be replaced on the PCB board. The design of the mounting heads allows for the simultaneous grinding of single or multiple new probes, thereby improving grinding efficiency and avoiding the need for replacing the entire board, significantly reducing replacement costs. Next, the new probes are sequentially passed through the corresponding positions of the mounting heads, so that the tails of all new probes abut against the corresponding protrusions in the simulation area. This simulates the pressure experienced by the probes during actual operation, ensuring that the new probes can better replace the replaced burnt probes after grinding. Then, the position of the mounting stage is adjusted using appropriate adjustment components to ensure that the levelness of the simulation area meets the grinding requirements, ensuring that the tips of all new probes are on the same plane, thus guaranteeing that the lengths of the new and old probes remain consistent.

[0007] In one embodiment of the above-described probe grinding fixture, the adjusting member includes a fixing part and an adjusting part, the fixing part and the adjusting part are movably connected, all the fixing parts are mounted on the mounting platform, and at least three of the fixing parts are not collinearly arranged, and all the adjusting parts are threadedly connected to the connecting platform; after the adjusting part is screwed, the adjusting part moves linearly relative to the connecting platform, thereby causing the fixing part movably connected to it to move nonlinearly relative to the connecting platform, so as to change the position of the mounting platform.

[0008] In one embodiment of the above-described probe grinding fixture, the grinding fixture further includes at least three guide rods slidably connected to the connecting platform, and at least three of the guide rods are not collinearly arranged. The end of the guide rod away from the mounting platform has an abutment end, and an elastic element is provided between the abutment end and the connecting platform.

[0009] In one embodiment of the above-described probe grinding needle fixture, the fixing part is a seat with a notch, the notch being located on the side of the fixing part facing the adjusting part, and the adjusting part having a pushing end on the side facing the fixing part, the pushing end being able to enter and exit the fixing part through the notch.

[0010] In one embodiment of the probe grinding fixture described above, the fixing part extends toward the connecting platform and passes through the connecting platform to be slidably connected with the connecting platform. The fixing part has a shielding end on the side away from the mounting platform, and an elastic structure is provided between the shielding end and the connecting platform. The adjusting part has a receiving space with one open end, the receiving space is used to receive the shielding end and the elastic structure, and the receiving space has a bottom wall on the end away from the mounting platform, the bottom wall pressing against the shielding end.

[0011] In one embodiment of the above-described probe grinding fixture, all the adjusting members are evenly distributed circumferentially along the connecting platform; and / or, the connecting platform extends outwardly from its circumference with at least one mounting end; and / or, the connecting platform has a handle on the side away from the mounting platform.

[0012] In one embodiment of the above-described probe grinding fixture, the mounting head is spaced apart from the mounting platform. The mounting head includes an upper guide plate, a surrounding plate, and a lower guide plate connected together, which together form a middle channel. The upper guide plate has at least one upper channel, and the lower guide plate has at least one lower channel. The upper channel and the lower channel form a through channel with the middle channel. The through channel is configured to pass through and fix the new probe.

[0013] In one embodiment of the above-mentioned probe grinding needle fixture, both the upper guide plate and the lower guide plate are provided with at least one mounting hole, and the mounting holes on both are one-to-one; the mounting platform is provided with at least one fixing hole corresponding to the mounting hole on the upper guide plate, and the corresponding fixing hole and the mounting hole are connected by bolts.

[0014] In one embodiment of the above-described probe grinding fixture, the mounting platform is provided with a gold-plated plate on the side facing the mounting head, and the gold-plated plate is provided with raised dots to form the simulated area.

[0015] In a second aspect, this application provides a grinding apparatus, including a grinding needle fixture as described above, a probe platform, and a moving mechanism and an optical auxiliary mechanism disposed on the probe platform. The connecting platform is mounted on the moving mechanism, and the probe platform is provided with a grinding layer. The moving mechanism is used to drive the grinding needle fixture to move and move closer to or away from the grinding layer in a vertical direction. The optical auxiliary mechanism is used to acquire the coordinates of the fixture and the new probe needle tip and needle tail.

[0016] Based on the above-mentioned grinding device, the optical auxiliary mechanism can detect the coordinates of all positions on the fixture, thereby obtaining whether the actual level of the mounting platform meets the requirements. Combining the values ​​provided by the optical auxiliary mechanism, the mounting platform can be precisely adjusted by the corresponding adjustment components so that the level of the simulated area on the mounting platform meets the grinding requirements. Then, the moving mechanism drives the fixture to move directly above the grinding layer, and then drives the fixture to continuously approach and move away from the grinding layer in the vertical direction to grind the tip of the new probe. During the grinding process, the optical auxiliary mechanism will continuously acquire the coordinates of the tip and tail of the new probe, and stop grinding the new probe after it reaches the target length.

[0017] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0018] When grinding new probes, a certain number of new probes are selected based on the number of burnt probes to be replaced, and the corresponding mounting heads are selected based on the position of the burnt probes on the PCB board. The design of the mounting heads allows for the simultaneous grinding of one or more new probes, thereby improving grinding efficiency and avoiding the need to replace the entire card, significantly reducing replacement costs. Next, the new probes are passed through the corresponding positions of the mounting heads in sequence, so that the tails of all the new probes abut against the corresponding protrusions in the simulation area. The simulation area simulates the pressure that the probes experience during actual operation, allowing the new probes to better replace the replaced burnt probes after grinding. Then, the position of the mounting stage is adjusted using appropriate adjustment components to ensure that the level of the simulation area meets the grinding requirements, so that the tips of all new probes are on the same plane, thus ensuring that the lengths of the new probes and the old probes are consistent.

[0019] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0020] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0021] Figure 1 This is a schematic diagram of the structure of the top of a grinding needle fixture for a probe, provided in an embodiment of this application;

[0022] Figure 2 This is a schematic diagram of the structure of a grinding needle fixture for probes provided in an embodiment of this application;

[0023] Figure 3 This is a front view of a grinding needle fixture for probing provided in an embodiment of this application;

[0024] Figure 4 This is a cross-sectional view provided in an embodiment of the present application for showing the inner wall structure of a grinding needle fixture for probes;

[0025] Figure 5 This is a cross-sectional view provided in an embodiment of this application for showing an adjusting component;

[0026] Figure 6 This is another cross-sectional view of the adjusting component provided in this application embodiment;

[0027] Figure 7 This is a cross-sectional view of a probe grinding needle fixture provided in an embodiment of this application;

[0028] Figure 8 yes Figure 7 Enlarged view of point A in the middle;

[0029] Figure 9 yes Figure 7 Enlarged view of point B in the middle;

[0030] Figure 10 This is a cross-sectional view provided in an embodiment of the present application for showing the interior of the mounting head;

[0031] Figure 11 This is a simplified structural diagram of a grinding apparatus provided in an embodiment of this application.

[0032] Explanation of reference numerals in the attached figures

[0033] 1. Grinding needle fixture; 10. Mounting head; 101. Through channel; 102. Upper guide plate; 1021. Upper channel; 1022. Mounting hole; 103. Enclosure plate; 104. Lower guide plate; 1041. Lower channel; 105. Middle channel; 106. Through hole; 11. Connecting platform; 111. Mounting end; 112. Annular groove; 113. Sliding hole; 12. Mounting platform; 121. Simulation area; 122. Fixing hole; 123. Bolt; 13. Adjusting component ; 131, Fixing part; 1311, Blocking end; 1312, Elastic structure; 1313, Passage hole; 132, Adjusting part; 1321, Accommodating space; 133, Notch; 134, Pushing end; 135, Snap-fit ​​end; 136, Spherical groove; 14, Guide rod; 141, Abutting end; 142, Elastic element; 15, Handle; 16, Gold plate; 2, Probe platform; 3, Moving mechanism; 4, Optical auxiliary mechanism; 5, Polishing layer; 6, New probe. Detailed Implementation

[0034] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0035] When replacing burnt probes on 2D MEMS probe cards, tools such as clamps are often used to hold the new probes for grinding. This usually results in the new probes being difficult to keep in line with the old probes, and the grinding efficiency is low, affecting subsequent production.

[0036] Therefore, this application creatively proposes a probe grinding fixture and its grinding apparatus. The fixture includes a connecting platform, a mounting platform, and a mounting head. When grinding new probes, a certain number of new probes are selected according to the number of burnt probes to be replaced, and the corresponding mounting head is selected according to the position of the burnt probes to be replaced on the PCB board. That is, the design of the mounting head can realize the simultaneous grinding of one or more new probes, thereby improving grinding efficiency and avoiding the replacement of the entire card, which significantly reduces the replacement cost. Then, the new probes are passed through the corresponding positions of the mounting head in sequence, so that the needle tails of all the new probes abut against the corresponding protrusions in the simulation area. That is, the pressure on the probes during actual operation is simulated by the simulation area, so that the new probes can better replace the replaced burnt probes after being ground. Then, the position of the mounting platform is adjusted by the corresponding adjustment component to ensure that the level of the simulation area meets the grinding requirements, so that the needle tips of all the new probes are on the same plane, thereby ensuring that the length of the new probes and the old probes are consistent. The grinding device includes a probe platform, a moving mechanism, and an optical auxiliary mechanism. The optical auxiliary mechanism can detect the coordinates of all positions on the fixture to determine whether the actual level of the mounting platform meets the requirements. Combining the values ​​provided by the optical auxiliary mechanism, the mounting platform can be precisely adjusted by the corresponding adjustment components to ensure that the level of the simulated area on the mounting platform meets the grinding requirements. The moving mechanism then drives the fixture to move directly above the grinding layer, and then drives the fixture to move closer to and further away from the grinding layer in the vertical direction to grind the tip of the new probe. During the grinding process, the optical auxiliary mechanism continuously acquires the coordinates of the tip and tail of the new probe, and stops grinding the new probe after it reaches the target length.

[0037] The present application will be described in detail below through specific embodiments.

[0038] Example 1

[0039] Reference Figures 1 to 10 As shown, this application provides a probe grinding needle fixture 1, which includes a connecting platform 11, a mounting platform 12 and a mounting head 10. The connecting platform 11 and the mounting platform 12 are movably connected by at least three adjusting members 13, and there is a gap between the connecting platform 11 and the mounting platform 12. At least three of the adjusting members 13 are not collinear, and the adjusting members 13 are configured to change the position of the mounting platform 12.

[0040] Mounting head 10 is mounted on mounting platform 12. Mounting platform 12 has a simulation area 121 on the side facing mounting head 10. Simulation area 121 is used to simulate the bumps on the PCB board that abut against the old probe. At least one new probe 6 can pass through mounting head 10 and be fixed on mounting head 10. After the new probe 6 passes through mounting head 10, the tail of the new probe 6 abuts against the bumps on simulation area 121.

[0041] It should be noted that the new probe 6 is an unused probe, while the old probe is a used probe. Generally, burnt probes only occur among the old probes. Furthermore, the bumps on the PCB board of the probe card that abut against the probes may also wear down after the probe card has been used for a period of time. Therefore, the simulation area is used to simulate the bumps on the PCB board that abut against the old probes, which can be more accurate and can further improve the matching degree between the new probe 6 after grinding and the probe to be replaced.

[0042] In some examples, the connecting platform 11 can be disc-shaped, square-shaped, or other regular shapes, or even any irregular shape, as long as the adjusting member 13 can smoothly adjust the position and orientation of the mounting platform 12 based on the connecting platform 11, so that the levelness of the simulated area 121 meets the grinding requirements. Similarly, the mounting platform 12 can also be disc-shaped, square-shaped, or other regular shapes, or any irregular shape, as long as the levelness of the simulated area 121 can be adjusted to the required levelness.

[0043] In this embodiment, the connecting platform 11 is generally disc-shaped, and the mounting platform 12 is also disc-shaped.

[0044] In some examples, the number of adjustment components 13 can be four or more, and the adjustment components 13 can be arranged arbitrarily. The specific number and distribution position can be flexibly adjusted according to the size of the mounting platform 12 and other conditions.

[0045] Specifically, when grinding new probes 6, a certain number of new probes 6 are selected according to the number of burnt probes to be replaced, and the corresponding mounting head 10 is selected according to the position of the burnt probes to be replaced on the PCB board. That is, the design of the mounting head 10 can realize the simultaneous grinding of multiple new probes 6, thereby improving grinding efficiency. Then, the new probes 6 are passed through the corresponding positions of the mounting head 10 in sequence, so that the needle tails of all the new probes 6 abut against the corresponding protrusions of the simulation area 121. That is, the simulation area 121 simulates the pressure that the probes are subjected to during actual work, so that the new probes 6 can better replace the replaced burnt probes after being ground. Then, the position of the mounting stage 12 is adjusted by the corresponding adjustment component 13 to ensure that the level of the simulation area 121 meets the grinding requirements, so that the needles of all the new probes 6 are on the same plane.

[0046] Furthermore, in some examples, the adjusting member 13 includes a fixing part 131 and an adjusting part 132, the fixing part 131 and the adjusting part 132 are movably connected, all fixing parts 131 are fixedly installed on the mounting platform 12, and at least three fixing parts 131 are not collinearly arranged, and all adjusting parts 132 are threadedly connected to the connecting platform 11.

[0047] After at least one adjusting part 132 is turned, the adjusting part 132 moves linearly relative to the connecting platform 11. When the moving speed of one adjusting part 132 relative to the connecting platform 11 is different from the moving speed of the other adjusting parts 132 relative to the connecting platform 11, the adjusted part 132 that is turned causes the fixed part 131 that is movably connected to it to move non-linearly relative to the connecting platform 11, thereby changing the position of the mounting platform 12. Using the above actions, the mounting platform 12 can be adjusted to a horizontal state when it is tilted relative to the horizontal plane.

[0048] When the moving speed of one adjustment part 132 relative to the connecting table 11 is the same as the moving speed of the other adjustment parts 132 relative to the connecting table 11, for example, when all adjustment parts 132 are turned at the same speed at the same time, all fixing parts 131 move linearly relative to the connecting table 11, that is, drive the mounting table 12 to move linearly. Using the above action, the distance between the mounting table 12 and the connecting table 11 can be adjusted.

[0049] The linear movement of the adjusting part 132 relative to the connecting platform 11 enables precise control, while the non-linear movement of the fixing part 131 relative to the connecting platform 11 is necessary to achieve leveling of the mounting platform 12. If the fixing part 131 can only move linearly, and the mounting platform 12 is tilted relative to the horizontal plane, the mounting platform 12 will always be tilted and leveling will not be achieved.

[0050] It is understood that the fixing part 131 and the adjusting part 132 can be arranged linearly along the same straight line or staggered in the same direction. In this embodiment, in order to simplify the structure and facilitate the adjustment of the mounting platform 12, the fixing part 131 and the adjusting part 132 are arranged linearly along the same straight line, that is, distributed in a direction parallel to the axial direction of the mounting platform 12.

[0051] It should also be noted that linear motion, physically speaking, is characterized by a straight trajectory and the direction of velocity and acceleration being consistent, such as object A moving at a constant speed or accelerating along a straight road. Nonlinear motion, physically speaking, is characterized by a curved trajectory or abrupt change in path, such as the elliptical orbit of celestial bodies or turbulence in fluid motion. In this embodiment, the nonlinear motion trajectory of the fixed part 131 is a curve.

[0052] Specifically, based on the position of the mounting platform 12, the corresponding adjustment part 132 is turned, and the adjustment part 132 moves linearly relative to the connecting platform 11, thereby driving the fixing part 131 to move nonlinearly, which in turn drives the mounting platform 12 connected to the fixing part 131 to move, causing the position of the mounting platform 12 to change, and finally making the levelness of the simulated area 121 meet the grinding requirements.

[0053] As an alternative example, see 1. Figure 2 and Figure 5As shown, the fixing part 131 is hollow inside, and a passage hole 1313 communicating with the interior of the fixing part 131 is provided on the side facing the connecting platform 11. The main body of the adjusting part 132 is rod-shaped, and a snap-fit ​​end 135 extends outward from the end of the main body that extends into the interior of the fixing part 131. The internal space of the fixing part 131 can be flexibly adjusted, such as to match the shape and size of the snap-fit ​​end 135, so that the snap-fit ​​end 135 can rotate inside the fixing part 131 while reducing the gap between the two, thereby improving the stability between the mounting platform 12 and the connecting platform 11. In addition, in order to further improve the ease of movement of the snap-fit ​​end 135 inside the fixing part 131, so that the snap-fit ​​end 135 can still effectively drive the fixing part 131 to move when the mounting platform 12 deflects, the side of the snap-fit ​​end 135 away from the connecting platform 11 can be made into an arc surface or a spherical surface to reduce the friction between the fixing part 131 and the snap-fit ​​end 135. Furthermore, there is usually a gap between the adjusting part 132 and the passage hole 1313 so that the fixing part 131 can deflect relative to the adjusting part 132 when the fixing part 131 makes non-linear movements. In this embodiment, the passage hole 1313 can be set as an inverted frustum-shaped hole.

[0054] Specifically, when the corresponding adjustment part 132 is turned, the snap-fit ​​end 135 rotates within the fixed part 131, and at the same time the snap-fit ​​end 135 moves along the axial direction of the adjustment part 132, thereby pushing or pulling the fixed part 131 to move non-linearly, thereby realizing the adjustment of the position of the mounting platform 12.

[0055] As another alternative example, see [reference] Figure 1 , Figure 2 and Figure 6 As shown, the fixing part 131 extends toward the connecting platform 11 and passes through the connecting platform 11 to be slidably connected with the connecting platform 11. The side of the fixing part 131 away from the mounting platform 12 has a blocking end 1311, and an elastic structure 1312 is provided between the blocking end 1311 and the connecting platform 11. The adjusting part 132 has a receiving space 1321 with one end open. The receiving space 1321 is used to receive the blocking end 1311 and the elastic structure 1312. The end of the receiving space 132 away from the mounting platform 12 has a bottom wall, which presses against the blocking end 1311.

[0056] In this embodiment, the connecting platform 11 has annular grooves 112 on the side away from the mounting platform 12, the number of which is equal to the number of adjusting parts 132. These annular grooves 112 are threaded grooves and correspond one-to-one with the adjusting parts 132. The elastic structure 1312 is a cylindrical spring or a rubber pad, etc. Furthermore, to facilitate the deflection of the fixing part 131 relative to the connecting platform 11, refer to... Figure 6 As shown, the connecting platform 11 is provided with a sliding hole 113 with a vertical cross-section in the shape of an inverted isosceles trapezoid.

[0057] Specifically, by screwing on the corresponding fixing part 131, the fixing part 131 will apply pressure to the blocking end 1311, thereby changing the force state of the elastic structure 1312, causing the fixing part 131 to slide relative to the connecting platform 11, so as to adjust the position of the mounting platform 12.

[0058] Furthermore, in some examples, refer to Figure 1 , Figure 7 and Figure 8 As shown, the grinding needle fixture 1 also includes at least three guide rods 14 that are slidably connected to the connecting platform 11, and at least three guide rods 14 are not collinearly arranged. The end of the guide rod 14 away from the mounting platform 12 has an abutment end 141, and an elastic element 142 is provided between the abutment end 141 and the connecting platform 11.

[0059] In this embodiment, the elastic element 142 is a cylindrical spring.

[0060] By setting at least three guide rods 14 and corresponding elastic elements 142, the mounting platform 12 can move more smoothly relative to the connecting platform 11.

[0061] Furthermore, in some examples, refer to Figure 9 As shown, the fixing part 131 is a seat with a notch 133. The notch 133 is provided on the side of the fixing part 131 facing the adjusting part 132. The adjusting part 132 has a pushing end 134 on the side facing the fixing part 131. The pushing end 134 can enter and exit the fixing part 131 through the notch 133. The notch 133 facilitates the adjusting part 132 to push the fixing part 131, and also facilitates the assembly of the adjusting part 132 and the fixing part 131.

[0062] In this embodiment, the pushing end 134 is generally spherical, and correspondingly, the fixing part 131 has a spherical groove 136 that is adapted to the pushing end 134, thereby reducing the friction between the pushing end 134 and the fixing part 131, and making it easier for the adjusting part 132 to push the fixing part 131.

[0063] In some examples, refer to Figure 1 As shown, all adjusting members 13 are evenly distributed along the circumference of the connecting platform 11. By distributing the adjusting members 13 along the circumference of the connecting platform 11, the position of the mounting platform 12 can be adjusted more evenly by each adjusting member 13. In this embodiment, all adjusting parts 132 are evenly distributed along the circumference of the connecting platform 11, all fixing parts 131 are evenly distributed along the circumference of the mounting platform 12, and the axes of the connecting platform 11 and the mounting platform 12 are collinear.

[0064] In this embodiment, all adjusting members 13 and all guide rods 14 are equidistantly distributed along the same circumference to improve the balance and smoothness of the movement of the mounting platform 12.

[0065] In some examples, refer to Figure 1and Figure 2 As shown, the connecting platform 11 extends outward from its periphery with at least one mounting end 111 to facilitate mounting the connecting platform 11 onto the target device. In this embodiment, the target device is a probe station. There are eight mounting ends 111, which are evenly distributed along the periphery of the connecting platform 11. The mounting ends 111 are provided with a certain number of holes to mount the grinding needle fixture 1 onto the probe station through threaded parts.

[0066] In some examples, refer to Figure 1 As shown, a handle 15 is provided on the side of the connecting platform 11 away from the mounting platform 12. The handle 15 facilitates the handling staff in taking and putting away the grinding needle fixture 1 and in assembling and disassembling the grinding needle fixture 1.

[0067] It should be noted that the shape of the mounting head 10 can be arbitrary, as long as it can distribute multiple through channels 101 according to a certain pattern (the distribution position of the old probes on the upper part of the probe head).

[0068] Furthermore, the mounting head 10 and the mounting stage 12 can be either spaced apart or fitted together. When the mounting head 10 and the mounting stage 12 are fitted together, to facilitate the contact of the needle tail of the new probe 6 with the simulation area 121, refer to... Figure 10 As shown, the mounting head 10 facing the mounting platform 12 typically has a through hole 106 that connects all the through channels 101, and the through hole 106 can accommodate the simulation area 121.

[0069] When there is a gap between the mounting head 10 and the mounting platform 12, this is taken as an example, not a limitation. Figure 4 As shown, the mounting head 10 includes an upper guide plate 102, a surrounding plate 103, and a lower guide plate 104 connected together, which together form a middle channel 105. The upper guide plate 102 has at least one upper channel 1021, and the lower guide plate 104 has at least one lower channel 1041. The upper channel 1021 and the lower channel 1041 form a through channel 101 with the middle channel 105. The through channel 101 is configured to pass through and fix the new probe 6.

[0070] By spacing the mounting head 10 and the mounting platform 12, it is convenient for the needle tail of the new probe 6 to abut against the simulation area 121, and it is also convenient to observe the needle tail of the new probe 6 to better adjust the position of the mounting platform 12. At the same time, multiple spaced through channels 101 are used to fix multiple new probes 6 separately.

[0071] Furthermore, in some examples, refer to Figure 4As shown, both the upper guide plate 102 and the lower guide plate 104 are provided with at least one mounting hole 1022, and the mounting holes 1022 on the two are one-to-one; the mounting platform 12 is provided with at least one fixing hole 122 corresponding to the mounting hole 1022 on the upper guide plate 102, and the corresponding fixing hole 122 and the mounting hole 1022 are connected by bolts 123.

[0072] By changing the length of bolt 123, the distance between mounting head 10 and mounting platform 12 can be flexibly adjusted to accommodate new probes 6 with different requirements. Using bolt 123 to connect fixing hole 122 and mounting hole 1022 is the most effective method, enabling quick assembly and disassembly. Other connection structures, such as interference fit structures, are easy to install but difficult to disassemble, and the probe is easily damaged during disassembly.

[0073] It is understandable that the number and distribution of the through channels 101 on the mounting head 10 can be flexibly adjusted according to the distribution of the old probes on the probe head, such as by designing different types of mounting heads 10, or by setting as many through channels 101 as possible on the same mounting head 10. Correspondingly, a certain number of fixing holes 122 are set on the mounting platform 12 to correspond to different specifications of mounting heads 10.

[0074] In some examples, refer to Figure 2 As shown, a gold-plated plate 16 is provided on the side of the mounting platform 12 facing the mounting head 10. The gold-plated plate 16 has raised dots distributed on it to form a simulated area 121.

[0075] By setting the gold-plated plate 16, the bump distribution on the PCB board of the probe head can be better simulated.

[0076] Example 2

[0077] Corresponding to Embodiment 1 above, refer to Figure 11 As shown in the embodiment of this application, a grinding device is also provided. The grinding device includes the above-mentioned probe grinding needle fixture 1, probe platform 2, and a moving mechanism 3 and an optical auxiliary mechanism 4 disposed on the probe platform 2. The connecting stage 11 is mounted on the moving mechanism 3, and the probe platform 2 is provided with a grinding layer 5. The moving mechanism 3 is used to drive the grinding needle fixture 1 to move and move closer to or away from the grinding layer 5 in the vertical direction. The optical auxiliary mechanism 4 is used to obtain the coordinates of the grinding needle fixture 1 and the head and tail of the new probe 6.

[0078] It should be noted that in this embodiment, the probe platform 2, the moving mechanism 3, and the optical auxiliary mechanism 4 all belong to the probe station. The specific working principle of the probe station is existing technology and will not be described in detail here.

[0079] In this embodiment, the abrasive layer 5 is sandpaper placed on the probe platform 2.

[0080] Specifically, before grinding the new probe 6, the connecting platform 11 is first installed on the moving mechanism 3, and then the mounting head 10 is fixed on the mounting platform 12. Next, according to the replacement position of the burnt probe, the new probe 6 is inserted into the simulated position on the mounting head 10. Then, the height of the new probe 6 is detected by the optical auxiliary mechanism 4, and the position of the mounting head 10 is changed by adjusting the corresponding adjustment component 13 so that the level of the simulated area 121 on the mounting head 10 meets the grinding requirements, so that the tips of all the new probes 6 are on the same horizontal plane. Then, the moving mechanism 3 drives the grinding needle fixture 1 to move directly above the grinding layer 5, and then drives the grinding needle fixture 1 to continuously approach and move away from the grinding layer 5 in the vertical direction to grind the tips of the new probe 6. During the grinding process, the optical auxiliary mechanism 4 will continuously acquire the coordinates of the tips and tails of the new probe 6, so as to stop grinding the new probe 6 after it reaches the target length.

[0081] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0082] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0083] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A grinding needle fixture for a probe, characterized in that, The grinding needle fixture (1) includes a connecting platform (11), a mounting platform (12), and a mounting head (10). The connecting platform (11) and the mounting platform (12) are movably connected by at least three adjusting members (13), and there is a gap between the connecting platform (11) and the mounting platform (12). At least three of the adjusting members (13) are not collinear. The adjusting members (13) are configured to change the position of the mounting platform (12). The mounting head (10) is mounted on the mounting platform (12). The mounting platform (12) has a simulation area (121) on the side facing the mounting head (10). The simulation area (121) is used to simulate the bumps on the PCB board that abut against the old probe. At least one new probe (6) can penetrate the mounting head (10) and be fixed on the mounting head (10). After the new probe (6) is passed through the mounting head (10), the tail of the new probe (6) abuts against the bumps on the simulation area (121). The adjusting member (13) includes a fixing part (131) and an adjusting part (132). The fixing part (131) and the adjusting part (132) are movably connected. All the fixing parts (131) are installed on the mounting platform (12), and at least three of the fixing parts (131) are not collinear. All the adjusting parts (132) are threadedly connected to the connecting platform (11). After the adjustment part (132) is turned, the adjustment part (132) moves linearly relative to the connecting platform (11), thereby causing the fixing part (131) connected to it to move non-linearly relative to the connecting platform (11) to change the position of the mounting platform (12). The grinding needle fixture (1) further includes at least three guide rods (14) that are slidably connected to the connecting platform (11), and at least three of the guide rods (14) are not collinear. Each guide rod (14) passes through the connecting platform (11) and is connected to the mounting platform (12). The end of the guide rod (14) away from the mounting platform (12) has an abutment end (141), and an elastic element (142) is provided between the abutment end (141) and the connecting platform (11). The fixing part (131) is a seat with a notch (133). The notch (133) is provided on the side of the fixing part (131) facing the adjusting part (132). The adjusting part (132) has a pushing end (134) on the side facing the fixing part (131). The pushing end (134) can enter and exit the fixing part (131) through the notch (133).

2. The probe grinding needle fixture according to claim 1, characterized in that, All the adjustment elements (13) are evenly distributed along the circumference of the connecting platform (11); And / or, The connecting platform (11) has at least one mounting end (111) extending outward from its periphery; And / or, The connecting platform (11) has a handle (15) on the side away from the mounting platform (12).

3. The probe grinding needle fixture according to claim 1, characterized in that, There is a gap between the mounting head (10) and the mounting platform (12). The mounting head (10) includes an upper guide plate (102), a surrounding plate (103), and a lower guide plate (104) connected together, which together form a middle channel (105). The upper guide plate (102) has at least one upper channel (1021), and the lower guide plate (104) has at least one lower channel (1041). The upper channel (1021) and the lower channel (1041) form a through channel (101) with the middle channel (105). The through channel (101) is configured to pass through and fix the new probe (6).

4. The probe grinding needle fixture according to claim 3, characterized in that, The upper guide plate (102) and the lower guide plate (104) are each provided with at least one mounting hole (1022), and the mounting holes (1022) on the two are in one-to-one correspondence; The mounting platform (12) has at least one fixing hole (122) corresponding to the mounting hole (1022) on the upper guide plate (102), and the corresponding fixing hole (122) is connected to the mounting hole (1022) by bolts (123).

5. The probe grinding needle fixture according to claim 1, characterized in that, The mounting platform (12) has a gold-plated plate (16) on the side facing the mounting head (10), and the gold-plated plate (16) has protrusions distributed on it to form the simulated area (121).

6. A grinding apparatus comprising a grinding needle fixture for a probe as described in any one of claims 1-5, characterized in that, The grinding device also includes a probe platform (2), a moving mechanism (3) and an optical auxiliary mechanism (4) disposed on the probe platform (2), the connecting platform (11) is mounted on the moving mechanism (3), and the probe platform (2) is provided with a grinding layer (5); The moving mechanism (3) is used to drive the grinding needle fixture (1) to move and move closer to or further away from the grinding layer (5) in the vertical direction. The optical auxiliary mechanism (4) is used to obtain the coordinates of the head and tail of the grinding needle fixture (1) and the new probe (6).

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