Linear motor adjustment system, electroplating apparatus and installation method thereof

Abstract

The application provides a linear motor adjusting system, an electroplating device and a mounting method thereof, relates to the technical field of electroplating, and solves the technical problem of low wafer transfer precision of a mechanical hand caused by uneven linear motors. The linear motor adjusting system comprises at least one linear motor adjusting mechanism corresponding to each linear motor module. After all or part of the linear motor modules are spliced to form a linear motor whole, the linear motor adjusting mechanism can adjust the position of the corresponding linear motor module in any one of the first direction, the second direction and the third direction, so that the adjacent two linear motor modules are aligned in the first direction, the second direction and the third direction, the mechanical hand can move horizontally and consistently, and the inclination and undulation movement do not occur, so that the motion performance and wafer transfer precision of the mechanical hand can be ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electroplating, and in particular to a linear motor adjusting system, an electroplating device, and a mounting method thereof. BACKGROUND

[0002] In the field of semiconductors, an electroplating process refers to a process of depositing a metal film on a substrate. In advanced packaging technology, an electroplating process is usually used to form copper pillars, solder joints, and other different structures on a substrate to realize interconnection of chips on the substrate.

[0003] An electroplating device is a semiconductor device for implementing an electroplating process. The electroplating device includes an electroplating cavity and a clamp, and further includes a robot capable of placing or taking out a substrate from the clamp. After the robot takes out the substrate from an EFEM (Equipment Front End Module) or a cleaning structure, the robot places the substrate in the clamp. After the clamp fixes the substrate, the substrate is immersed in an electroplating solution in the electroplating cavity to perform an electroplating process. After the electroplating process is completed, the robot takes out the substrate in the clamp.

[0004] The length of the electroplating device is usually about 3-5 meters. It can be understood that the sizes of electroplating devices of different manufacturers are different, and the length will naturally vary, but the length of a general electroplating device will not be less than 3 meters. The electroplating cavity and the clamp are distributed on a length of about 3-5 meters, and the wafer can be placed in the clamp by moving the robot to perform the above-mentioned electroplating process.

[0005] When the robot moves on a length of 3-5 meters, it must be ensured that the robot moves stably. Tilting and undulating movement or other unstable operation of the robot will affect the motion performance and wafer transfer accuracy of the robot, resulting in that the electroplating uniformity cannot meet the index requirements, thereby affecting the efficiency and process level of electroplating. SUMMARY

[0006] To solve the above technical problems, the present application is proposed. The embodiments of the present application provide a linear motor adjusting system, an electroplating device, and a mounting method thereof.

[0007] In a first aspect, an embodiment of the present application provides a linear motor adjusting system applied to an electroplating device, the electroplating device comprising a plurality of module sections capable of being assembled to form the electroplating device, and a plurality of linear motor modules corresponding to the module sections, the linear motor adjusting system comprising: at least one linear motor adjusting mechanism corresponding to each linear motor module, the linear motor adjusting mechanism being arranged at an end portion, a middle portion, or a position between the end portion and the middle portion of the linear motor module; wherein the linear motor modules are capable of being correspondingly spliced while being assembled to form a linear motor whole, the linear motor whole allowing a robot to reciprocate in a second direction; after any two adjacent linear motor modules are spliced to form all or part of the linear motor whole, the linear motor adjusting mechanism is capable of adjusting the position of the corresponding linear motor module in any one of a first direction, the second direction, and a third direction, so that the any two adjacent linear motor modules are all aligned in the first direction, the second direction, and the third direction, thereby making the linear motor whole completely consistent in the first direction, the second direction, and the third direction, and the first direction, the second direction, and the third direction intersect with each other.

[0008] In some embodiments, the number of module sections is three, the linear motor modules are arranged corresponding to the module sections in three, and each linear motor module is arranged corresponding to one or two linear motor adjusting mechanisms.

[0009] In some embodiments, the linear motor adjusting mechanism comprises: a rack assembly; a motor mounting plate arranged on one side of the rack assembly in the first direction, the motor mounting plate having at least one first threaded portion extending in the first direction; at least one first screwing piece screwed with the first threaded portion and abutting against the rack assembly; wherein the linear motor module can be mounted on the side of the motor mounting plate away from the rack assembly in the first direction, the linear motor module extending in the second direction, and the position of the linear motor module in the first direction can be adjusted by adjusting the first screwing piece.

[0010] In some embodiments, the number of first threaded portions is a plurality, and the number of first screwing pieces is a plurality; wherein the plurality of first threaded portions are arranged respectively at both ends of the motor mounting plate in the third direction, and / or the plurality of first threaded portions are arranged spaced apart in the second direction.

[0011] In some embodiments, the motor mounting plate has at least one first waist-shaped hole extending in the second direction; wherein the rack assembly comprises: a rack unit extending in the second direction; a transition plate arranged between the rack unit and the motor mounting plate, the transition plate having at least one second threaded portion extending in the first direction; and at least one second screwing piece comprising a first limiting portion and a third threaded portion, the first limiting portion abutting against the surface of the motor mounting plate away from the transition plate in the first direction, and the third threaded portion passing through the first waist-shaped hole and being screwed with the second threaded portion.

[0012] In some embodiments, the first waist-shaped hole is provided in a plurality of numbers, the second threaded part is provided in a plurality of numbers, and the second screwing piece is provided in a plurality of numbers; wherein the plurality of first waist-shaped holes are respectively arranged at two ends of the motor mounting plate in the third direction, and the plurality of second threaded parts are respectively arranged at two ends of the transition plate in the third direction; and / or the plurality of first waist-shaped holes are arranged at intervals in the second direction, and the plurality of second threaded parts are arranged at intervals in the second direction.

[0013] In some embodiments, the transition plate further has at least one second waist-shaped hole extending in the third direction, and the rack unit has at least one fourth threaded part extending in the first direction; wherein the linear motor adjusting mechanism further comprises: at least one third screwing piece, the third screwing piece comprising a second limiting part and a fifth threaded part, the second limiting part abutting against a surface of the transition plate away from the rack unit in the first direction, and the fifth threaded part penetrating through the second waist-shaped hole and being screwed with the fourth threaded part.

[0014] In some embodiments, the second waist-shaped hole is provided in a plurality of numbers, the fourth threaded part is provided in a plurality of numbers, and the third screwing piece is provided in a plurality of numbers; wherein the plurality of second waist-shaped holes are respectively arranged at two ends of the transition plate in the third direction, and the plurality of fourth threaded parts are arranged at intervals in the third direction; and / or the plurality of second waist-shaped holes are arranged at intervals in the second direction, and the plurality of fourth threaded parts are arranged at intervals in the second direction.

[0015] In some embodiments, the linear motor adjusting mechanism further comprises: a support plate arranged below the transition plate, the support plate having a vertical fixing plate and a horizontal fixing plate perpendicular to the vertical fixing plate, the vertical fixing plate being fixed to the rack unit, and the horizontal fixing plate being arranged at intervals with the lowermost part of the transition plate; a horizontal support piece arranged on the horizontal fixing plate, the horizontal support piece having at least one sixth threaded part extending in the third direction; a horizontal top plate parallel to the horizontal support piece and fixedly connected with the transition plate; and at least one fourth screwing piece, the fourth screwing piece penetrating through the horizontal fixing plate and being screwed with the sixth threaded part until abutting against the horizontal top plate, the fourth screwing piece allowing the horizontal top plate to move upwardly by moving upwardly in the sixth threaded part to apply a downward force to the horizontal top plate to drive the transition plate to move upwardly, so that the linear motor module moves upwardly correspondingly, or the fourth screwing piece allowing the horizontal top plate to move downwardly by moving downwardly in the sixth threaded part to drive the transition plate to move downwardly synchronously under the action of gravity, so that the linear motor module moves downwardly correspondingly.

[0016] In some embodiments, the movable range of the first screw joint relative to the first threaded part in the first direction is 0 mm-30 mm, so that the moving distance of the linear motor module in the first direction is 0 mm-30 mm; and / or, the movable range of the second screw joint in the first waist hole along the second direction is 0 mm-20 mm, so that the moving distance of the linear motor module in the second direction is 0 mm-20 mm; and / or, the movable range of the third screw joint in the second waist hole along the third direction is 0 mm-20 mm, so that the moving distance of the linear motor module in the third direction is 0 mm-20 mm.

[0017] In a second aspect, an embodiment of the present application provides an electroplating device, comprising: a robot configured to place a substrate into a clamp or take the substrate out of the clamp; a linear motor whole extending along a second direction, connected with the robot, configured to allow the robot to move linearly along the linear motor whole, the linear motor whole being spliced by a plurality of linear motor modules; and at least one linear motor adjusting system of any one of the first aspect, the linear motor adjusting system comprising at least one linear motor adjusting mechanism corresponding to each linear motor module, the linear motor adjusting mechanism being arranged at an end, a middle or a position between the end and the middle of the corresponding linear motor module, configured to adjust the position of the corresponding linear motor module in any one of a first direction, a second direction and a third direction, so that any two adjacent linear motor modules are all aligned in the first direction, the second direction and the third direction, so that the linear motor whole is completely consistent in the first direction, the second direction and the third direction, the first direction, the second direction and the third direction intersecting with each other.

[0018] In a third aspect, an embodiment of the present application provides a splicing method of a linear motor whole, the linear motor whole being applied to an electroplating device, the electroplating device comprising a plurality of module parts capable of being assembled to form the electroplating device, the linear motor whole being divided into linear motor modules corresponding to each module part, the linear motor modules being capable of being spliced while being assembled in the module parts to form the linear motor whole, the linear motor whole allowing a robot to reciprocate in a second direction; wherein the splicing method of the linear motor whole comprises: splicing all or part of the adjacent linear motor modules; detecting whether the linear motor modules need to be adjusted in a first direction, a second direction and a third direction, the first direction, the second direction and the third direction intersecting with each other; if yes, adjusting the corresponding linear motor modules in at least one direction which needs to be adjusted in the first direction, the second direction and the third direction by the linear motor adjusting mechanism in the linear motor adjusting system of any one of the first aspect, so that any two adjacent linear motor modules are completely consistent in the first direction, the second direction and the third direction.

[0019] In a fourth aspect, an embodiment of the present application provides a mounting method of an electroplating device, the electroplating device comprising a plurality of module sections capable of being assembled to form the electroplating device, the mounting method of the electroplating device comprising: assembling all or part of two adjacent module sections to form all or part of the connected module sections of the electroplating device; and using the splicing method of the linear motor whole in the third aspect to splice the linear motor modules correspondingly, so that the linear motor whole obtained after splicing is laid on all or part of the connected module sections of the electroplating device.

[0020] The linear motor adjusting system, the electroplating device and the mounting method thereof provided by the embodiments of the present application can adjust the position of the corresponding linear motor module in any one of the first direction, the second direction and the third direction by the at least one linear motor adjusting mechanism, so that any two adjacent linear motor modules are all aligned in the first direction, the second direction and the third direction, the robot can move horizontally consistently and will not move obliquely or undulate, so that the motion performance of the robot and the wafer transfer precision (i.e., the robot can accurately pick and place the substrate) can be ensured, the electroplating uniformity cannot meet the index requirement due to the inaccurate wafer transfer of the robot is avoided, so that the efficiency and the process level of the electroplating are affected, and meanwhile, the robot is also prevented from being damaged due to the undulating motion. BRIEF DESCRIPTION OF DRAWINGS

[0021] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which like reference characters refer to like parts throughout the figures. The accompanying drawings provide further understanding of the present application and form a part of the specification, illustrate embodiments of the present application and together with the description serve to explain the present application. The accompanying drawings are not intended to limit the present application. In the drawings:

[0022] Figure 1 Fig. 1 shows a structural schematic diagram of an electroplating device provided by an exemplary embodiment of the present application.

[0023] Figure 2 Fig. 2 shows an exploded view of a linear motor and a motor mounting plate provided by an exemplary embodiment of the present application.

[0024] Figure 3 Fig. 3 shows a partial schematic diagram of an electroplating device provided by an exemplary embodiment of the present application.

[0025] Figure 4 Fig. 4 shows a structural schematic diagram of a robot, a linear motor whole and a motor mounting plate provided by an exemplary embodiment of the present application.

[0026] Figure 5 Fig. 5 shows a partial schematic diagram of an electroplating device provided by an exemplary embodiment of the present application. Figure 3 Fig. 6 shows a partial enlarged view of the electroplating device in region A. Fig. 7 shows a partial enlarged view of the electroplating device in region B.

[0027] Figure 6 Fig. 3 shows a partial schematic view of a plating device according to another example embodiment of the present application.

[0028] Figure 7 Fig. 4 shows a schematic view of a plating device according to an example embodiment of the present application. Figure 6 Fig. 5 shows a partial enlarged view of the plating device shown in Fig. 4.

[0029] Figure 8 Fig. 6 shows a schematic view of a plating device according to another example embodiment of the present application.

[0030] Figure 9 Fig. 7 shows a flowchart of a splicing method of a linear motor according to an example embodiment of the present application.

[0031] Figure 10 Fig. 8 shows a flowchart of a mounting method of a plating device according to an example embodiment of the present application.

[0032] Reference signs:

[0033] 100, linear motor adjusting mechanism; 101, rack assembly; 1011, rack unit; 1012, transition plate; 10121, second waist hole; 1013, second screw member; 10131, first limiting part; 10132, third threaded part; 102, motor mounting plate; 1021, first waist hole; 103, first screw member; 104, third screw member; 1041, second limiting part; 105, horizontal top plate; 106, horizontal support member; 107, fourth screw member; 108, support plate; 1081, vertical fixing plate; 1082, horizontal fixing plate; 109, nut; 200, linear motor whole; 201, linear motor module; 300, mechanical hand; 400, plating device; 401, module subpart; 500, linear motor adjusting system. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] Figure 1 Fig. 1 shows a schematic view of a plating device according to an example embodiment of the present application, Figure 2 Fig. 2 shows an exploded view of a linear motor and a motor mounting plate according to an example embodiment of the present application, Figure 3 Fig. 3 shows a partial schematic view of a plating device according to another example embodiment of the present application.Figure 4 The diagram shown is a structural schematic of the robotic arm, linear motor assembly, and motor mounting plate provided in an exemplary embodiment of this application.

[0036] like Figures 1-4 As shown, this application embodiment provides a linear motor adjustment system 500 applied to an electroplating equipment 400. The electroplating equipment 400 includes multiple modular portions 401 that can be assembled to form the electroplating equipment 400, and a portion of linear motor modules 201 corresponding to each modular portion 401. The linear motor adjustment system 500 includes at least one linear motor adjustment mechanism 100 corresponding to each linear motor module 201. The linear motor adjustment mechanism 100 is disposed at the end, middle, or between the end and middle of the linear motor module 201. The linear motor modules 201 can be correspondingly spliced ​​together while the modular portions 401 are being assembled to form a linear motor assembly 200. The linear motor assembly 200 allows a robot arm 300 to reciprocate in a second direction (i.e., the X direction and the opposite direction of X in the figure). After any two adjacent linear motor modules 201 are spliced ​​together to form all or part of the linear motor whole 200, the linear motor adjustment mechanism 100 can adjust the position of the corresponding linear motor module 201 in any one of the first direction (i.e., the Y direction and the opposite direction of Y in the figure), the second direction, and the third direction (i.e., the Z direction and the opposite direction of Z in the figure) (the positions of multiple directions can also be adjusted), so that any two adjacent linear motor modules 201 are fully aligned in the first direction, the second direction, and the third direction, so that the linear motor whole 200 is completely consistent in the first direction, the second direction, and the third direction, and the first direction, the second direction, and the third direction intersect each other.

[0037] For example, the first direction is a horizontal direction, the second direction is another horizontal direction perpendicular to the first direction, and the third direction is a vertical direction.

[0038] In the above embodiments, by setting at least one linear motor adjustment mechanism 100 to adjust the position of the corresponding linear motor module 201 in any one of the first, second, and third directions, any two adjacent linear motor modules 201 are fully aligned in the first, second, and third directions. This enables the robot arm 300 to perform consistent horizontal movement without tilting or undulating. This ensures the motion performance and wafer transfer accuracy of the robot arm 300 (i.e., accurate picking and placing of substrates). It also prevents the electroplating uniformity from failing to meet the requirements due to the robot arm 300's inaccurate wafer transfer, thus affecting the efficiency and process level of electroplating. At the same time, it also prevents the robot arm 300 from being damaged due to undulating movement.

[0039] In some embodiments, such as Figure 1As shown, the number of module sections 401 is three, and the linear motor modules 201 are correspondingly provided with three module sections 401, and each linear motor module 201 is correspondingly provided with one or two linear motor adjusting mechanisms 100.

[0040] Exemplarily, the three module sections 401 are arranged in sequence along the second direction.

[0041] Exemplarily, the three module sections 401 along the second direction can be a first electroplating module section, a second electroplating module section, and a cleaning module section respectively, the first electroplating module section and the second electroplating module section are both configured to electroplate the substrate, and the cleaning module section is configured to clean the substrate before and after electroplating.

[0042] In actual application, more (such as 2 or more) linear motor adjusting mechanisms 100 can be provided for the linear motor module 201 with a longer length to accurately adjust the linear motor module 201 with a longer length, and fewer (such as 1) linear motor adjusting mechanisms 100 can be provided for the linear motor module 201 with a shorter length to reduce the cost.

[0043] Exemplarily, the number of linear motor adjusting mechanisms 100 is five, that is, one linear motor module 201 is provided with one, and the other two linear motor modules are both provided with two. It can be understood that the number of linear motor adjusting mechanisms 100 (including the total number and the number provided on a single linear motor module) can be appropriately set according to the splicing of the linear motor module 201, as long as the spliced linear motor whole 200 is completely consistent.

[0044] Since the linear motor whole 200 has a large volume and a heavy weight, it is difficult to install, transport and maintain the linear motor whole 200. In the above embodiment, the linear motor whole 200 is divided into three linear motor modules 201, which facilitates the installation, transportation and maintenance of the linear motor whole 200. By correspondingly providing one or two linear motor adjusting mechanisms 100 for the linear motor module 201, accurate adjustment of the linear motor module 201 can be achieved.

[0045] In order to ensure that the linear motor module 201 is aligned in three directions after splicing, the linear motor module 201 needs to be adjusted in three directions, and such an adjusting structure can have different design schemes. The specific structure of the linear motor adjusting system 500 described in the specification of the present application is only one of the technical solutions capable of adjusting in three directions, and any structure capable of adjusting the position of the linear motor module 201 in any one of the first direction, the second direction and the third direction is within the protection scope of the present embodiment.

[0046] Figure 5Fig. 1 shows a schematic view of a linear motor adjusting mechanism according to an example embodiment of the present application. Figure 3 Fig. 2 shows a partial enlarged view of the linear motor adjusting mechanism of Fig. 1 at region A. Figure 6 Fig. 3 shows a partial view of a linear motor adjusting mechanism according to another example embodiment of the present application. Figure 7 Fig. 4 shows a schematic view of a linear motor adjusting mechanism according to an example embodiment of the present application. Figure 6 Fig. 5 shows a partial enlarged view of the linear motor adjusting mechanism of Fig. 4 at region B. Figure 7 Fig. 6 shows a partial view of a linear motor adjusting mechanism according to an example embodiment of the present application.

[0047] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101. Figure 5 Figure 7 In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0048] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0049] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0050] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0051] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0052] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0053] In some embodiments, as shown in Fig. 1 and Fig. 2, the linear motor adjusting mechanism 100 comprises a rack assembly 101, a motor mounting plate 102 and at least one first screwing member 103. The motor mounting plate 102 is disposed on one side of the rack assembly 101 in a first direction, and the motor mounting plate 102 has at least one first threaded portion extending in the first direction. The first screwing member 103 is screwed with the first threaded portion and abuts against the rack assembly 101.

[0054] ​For example, there are 8 first threaded portions, of which 4 first threaded portions are disposed at one end of the motor mounting plate 102 in the third direction, and the other 4 first threaded portions are disposed at the other end of the motor mounting plate 102 in the third direction. The 4 first threaded portions disposed at the same end of the motor mounting plate 102 in the third direction are spaced apart along the second direction.

[0055] In the above embodiments, the position of the motor mounting plate 102 in the first direction can be stably adjusted by multiple first threaded portions and multiple first screw connectors 103, thereby stably adjusting the position of the linear motor module 201 in the first direction. Furthermore, by providing first threaded portions at both ends of the motor mounting plate 102 in the third direction, and / or by providing multiple first threaded portions along the second direction, the tilting posture of the linear motor module 201 can be adjusted.

[0056] In some embodiments, such as Figure 5 and Figure 7 As shown, the motor mounting plate 102 has at least one first oblong hole 1021 extending in a second direction. The frame assembly 101 includes a frame unit 1011 (i.e., a portion of the frame in the electroplating equipment 400), a transition plate 1012, and at least one second threaded member 1013. The frame unit 1011 extends in the second direction. The transition plate 1012 is disposed between the frame unit 1011 and the motor mounting plate 102, and the transition plate 1012 has at least one second threaded portion extending in a first direction. The second threaded member 1013 includes a first limiting portion 10131 and a third threaded portion 10132. The first limiting portion 10131 abuts against a surface of the motor mounting plate 102 away from the transition plate 1012 in the first direction, and the third threaded portion 10132 passes through the first oblong hole 1021 and is threaded to the second threaded portion.

[0057] For example, the transition plate 1012 has at least one second threaded hole extending in a first direction, and the second threaded portion is the thread within the second threaded hole.

[0058] For example, the second screw connector 1013 is a screw or bolt.

[0059] In the above embodiments, by adjusting the position of the motor mounting plate 102 relative to the transition plate 1012 in the second direction and locking the motor mounting plate 102 with the second screw 1013, the position of the linear motor module 201 in the second direction can be flexibly adjusted. This ensures that after the linear motor modules 201 are spliced, all the linear motor modules 201 can be completely aligned in the second direction.

[0060] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0061] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0062] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0063] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0064] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction. Figure 5 and Figure 7 In some embodiments, the transition plate 1012 further comprises at least one second waist-shaped hole 10121 extending in the third direction, and the rack unit 1011 comprises at least one fourth threaded part extending in the first direction. In some embodiments, the linear motor adjusting mechanism 100 further comprises at least one third screwing element 104, the third screwing element 104 comprises a second limiting part 1041 and a fifth threaded part, the second limiting part 1041 abuts against the surface of the transition plate 1012 away from the rack unit 1011 in the first direction, and the fifth threaded part passes through the second waist-shaped hole 10121 and is screwed with the fourth threaded part.

[0065] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0066] In some embodiments, the first waist-shaped hole 1021 is provided in plurality, the second threaded part is provided in plurality, and the second screwing element 1013 is provided in plurality. In some embodiments, the plurality of first waist-shaped holes 1021 are provided at two ends of the motor mounting plate 102 in the third direction, and the plurality of second threaded parts are provided at two ends of the transition plate 1012 in the third direction. In some embodiments, the plurality of first waist-shaped holes 1021 are provided in the second direction, and the plurality of second threaded parts are provided in the second direction.

[0067] In the above embodiment, the position of the linear motor module 201 in the third direction can be adjusted flexibly by adjusting the position of the transition plate 1012 relative to the rack unit 1011 in the third direction and locking the transition plate 1012 with the third screw member 104.

[0068] In some embodiments, as shown in Figure 5 and Figure 7 , the number of the second waist-shaped holes 10121 is multiple, the number of the fourth threaded portions is multiple, and the number of the third screw members 104 is multiple. Among them, the multiple second waist-shaped holes 10121 are respectively arranged at both ends of the transition plate 1012 in the third direction, and the multiple fourth threaded portions are arranged at intervals along the third direction; and / or, the multiple second waist-shaped holes 10121 are arranged at intervals along the second direction, and the multiple fourth threaded portions are arranged at intervals along the second direction.

[0069] Exemplarily, the number of the second waist-shaped holes 10121 is four, among which two second waist-shaped holes 10121 are arranged at one end of the transition plate 1012 in the third direction, and the other two second waist-shaped holes 10121 are arranged at the other end of the transition plate 1012 in the third direction, and the two second waist-shaped holes 10121 arranged at the same end of the transition plate 1012 in the third direction are arranged at intervals along the second direction; accordingly, the number of the fourth threaded portions is four, among which two fourth threaded portions are arranged at intervals along the third direction with the other two fourth threaded portions, and the two fourth threaded portions with the same position in the third direction are arranged at intervals along the second direction.

[0070] In the above embodiment, the position of the motor mounting plate 102 in the third direction can be adjusted stably by the multiple second waist-shaped holes 10121, the multiple fourth threaded portions, and the multiple third screw members 104.

[0071] In some embodiments, as shown in Figure 5 and Figure 7As shown, the linear motor adjusting mechanism 100 further comprises a support plate 108, a horizontal support 106, a horizontal top plate 105 and at least one fourth screwing member 107. The support plate 108 is arranged below the transition plate 1012, and the support plate 108 has a vertical fixing plate 1081 fixed to the rack unit 1011 and a horizontal fixing plate 1082 perpendicular to the vertical fixing plate 1081 and spaced from the lowermost transition plate 1012. The horizontal support 106 is arranged on the horizontal fixing plate 1082, and the horizontal support 106 has at least one sixth threaded portion extending in the third direction. The horizontal top plate 105 is parallel to the horizontal support 106 and fixedly connected to the transition plate 1012. The fourth screwing member 107 is screwed with the sixth threaded portion after passing through the horizontal fixing plate 1082 until abutting against the horizontal top plate 105. The fourth screwing member 107 allows moving upward in the sixth threaded portion to apply a downward force to the horizontal top plate 105 to drive the transition plate 1012 to move upward, so that the linear motor module 201 moves upward correspondingly, or the fourth screwing member 107 allows moving downward in the sixth threaded portion to drive the horizontal top plate 105 to move downward under the action of gravity to drive the transition plate 1012 to move downward correspondingly, so that the linear motor module 201 moves downward correspondingly.

[0072] Exemplarily, the horizontal support 106 has at least one sixth threaded hole extending in the third direction, and the sixth threaded portion is a thread in the sixth threaded hole.

[0073] Exemplarily, the fourth screwing member 107 is a screw or a bolt.

[0074] Exemplarily, the linear motor adjusting mechanism 100 further comprises at least one nut 109. The nut 109 is screwed with the fourth screwing member 107 and arranged between the horizontal support 106 and the horizontal top plate 105, and the nut 109 abuts against the horizontal support 106. By arranging the nut 109, the horizontal support 106 and the fourth screwing member 107 can be fastened.

[0075] In the above embodiment, by arranging the support plate 108, the horizontal support 106, the horizontal top plate 105 and the fourth screwing member 107, the position of the linear motor module 201 in the third direction can be adjusted flexibly, so that after the linear motor modules 201 are spliced, all the linear motor modules 201 can be completely aligned in the third direction.

[0076] In some embodiments, the movable range of the first screw member 103 relative to the first threaded portion in the first direction is 0 mm-30 mm, so that the moving distance of the linear motor module 201 in the first direction is 0 mm-30 mm; and / or, the movable range of the second screw member 1013 in the first waist-shaped hole 1021 in the second direction is 0 mm-20 mm, so that the moving distance of the linear motor module 201 in the second direction is 0 mm-20 mm; and / or, the movable range of the third screw member 104 in the second waist-shaped hole 10121 in the third direction is 0 mm-20 mm, so that the moving distance of the linear motor module 201 in the third direction is 0 mm-20 mm.

[0077] For example, the first screw member 103 can be moved 10 mm, 20 mm or 30 mm relative to the first threaded portion in the first direction.

[0078] For example, the second screw member 1013 can be moved 3 mm, 10 mm or 15 mm in the first waist-shaped hole 1021 in the second direction.

[0079] For example, the third screw member 104 can be moved 8 mm, 15 mm or 20 mm in the second waist-shaped hole 10121 in the third direction.

[0080] In the above embodiments, by making the movable range of the first screw member 103 relative to the first threaded portion in the first direction be 0 mm-30 mm, and / or, making the movable range of the second screw member 1013 in the first waist-shaped hole 1021 in the second direction be 0 mm-20 mm, and / or, making the movable range of the third screw member 104 in the second waist-shaped hole 10121 in the third direction be 0 mm-20 mm, the linear motor module 201 can be adjusted in a larger range in the first direction, and / or, in the second direction, and / or, in the third direction, so that any two adjacent linear motor modules 201 can be aligned in the first direction, and / or, in the second direction, and / or, in the third direction. In actual applications, the movable range of the first screw member 103 relative to the first threaded portion in the first direction, the movable range of the second screw member 1013 in the first waist-shaped hole 1021 in the second direction, and the movable range of the third screw member 104 in the second waist-shaped hole 10121 in the third direction can be increased or decreased according to actual conditions.

[0081] Figure 8 Fig. 2 shows a structural schematic diagram of an electroplating apparatus provided by another exemplary embodiment of the present application.

[0082] Based on the same concept, as Figure 8As shown, the embodiment of the present application also provides an electroplating device 400, which comprises the manipulator 300, the linear motor whole 200 and the linear motor adjusting system 500 in the above embodiment. The manipulator 300 is configured to place or take out the substrate from the clamp. The linear motor whole 200 extends along the second direction, is connected with the manipulator 300 and is configured to allow the manipulator 300 to move linearly along the linear motor whole 200. The linear motor whole 200 is spliced by a plurality of linear motor modules 201. The linear motor adjusting system 500 comprises at least one linear motor adjusting mechanism 100 corresponding to each linear motor module 201. The linear motor adjusting mechanism 100 is arranged at the end, the middle or the position between the end and the middle of the corresponding linear motor module 201 and is configured to adjust the position of the corresponding linear motor module 201 in any one of the first direction, the second direction and the third direction, so that any two adjacent linear motor modules 201 are aligned in the first direction, the second direction and the third direction, so that the linear motor whole 200 is completely consistent in the first direction, the second direction and the third direction, and the first direction, the second direction and the third direction intersect with each other.

[0083] Figure 9 As shown, the embodiment of the present application also provides an electroplating device 400, which comprises the manipulator 300, the linear motor whole 200 and the linear motor adjusting system 500 in the above embodiment. The manipulator 300 is configured to place or take out the substrate from the clamp. The linear motor whole 200 extends along the second direction, is connected with the manipulator 300 and is configured to allow the manipulator 300 to move linearly along the linear motor whole 200. The linear motor whole 200 is spliced by a plurality of linear motor modules 201. The linear motor adjusting system 500 comprises at least one linear motor adjusting mechanism 100 corresponding to each linear motor module 201. The linear motor adjusting mechanism 100 is arranged at the end, the middle or the position between the end and the middle of the corresponding linear motor module 201 and is configured to adjust the position of the corresponding linear motor module 201 in any one of the first direction, the second direction and the third direction, so that any two adjacent linear motor modules 201 are aligned in the first direction, the second direction and the third direction, so that the linear motor whole 200 is completely consistent in the first direction, the second direction and the third direction, and the first direction, the second direction and the third direction intersect with each other.

[0084] Based on the same concept, the embodiment of the present application also provides a splicing method of the linear motor whole 200 applied to the electroplating device 400. The electroplating device 400 comprises a plurality of module parts 401 capable of being assembled to form the electroplating device 400. The linear motor whole 200 is divided into linear motor modules 201 corresponding to each module part 401. The linear motor modules 201 can be spliced while being assembled in the module parts 401 to form the linear motor whole 200. The linear motor whole 200 allows the manipulator 300 to move back and forth in the second direction. As shown, Figure 9 As shown, the splicing method of the linear motor whole comprises the following steps 901-904.

[0085] Step 901, splice all or part of the adjacent linear motor modules.

[0086] Step 902, detect whether the linear motor module needs to be adjusted in the first direction, the second direction and the third direction.

[0087] The first direction, the second direction and the third direction intersect with each other.

[0088] If yes, execute step 903; if no, execute step 904.

[0089] Specifically, if the linear motor module needs to be adjusted in at least one of the first direction, the second direction and the third direction, step 903 is performed; if the linear motor module does not need to be adjusted in the first direction, the second direction and the third direction, step 904 is performed.

[0090] Exemplarily, when detecting whether the linear motor module needs to be adjusted in the first direction, the second direction and the third direction, the detection can be performed by using a micrometer. Specifically, the contact of the micrometer can be made to slide along the plurality of surfaces (such as the upper surface / lower surface, the front surface / back surface and the left side surface / right side surface) of the linear motor as a whole, and the reading of the micrometer is observed in real time. If the reading of the micrometer changes greatly, it indicates that the linear motor module needs to be adjusted in at least one of the first direction, the second direction and the third direction.

[0091] Step 903: The linear motor adjustment mechanism in the linear motor adjustment system in the above embodiment is used to adjust the linear motor module in at least one direction which needs to be adjusted in the first direction, the second direction and the third direction, so that any two adjacent linear motor modules are kept consistent in the first direction, the second direction and the third direction.

[0092] After step 903 is performed, step 904 can be performed.

[0093] Step 904: The next installation step is performed.

[0094] Exemplarily, the next installation step is to install a moving mechanism moving in the third direction on the mover assembly of the linear motor as a whole 200.

[0095] It can be understood that the specific structure of the linear motor adjustment mechanism 100 described in the foregoing embodiment is only one of the structure schemes that can realize the adjustment of the linear motor module 201. Other similar structure designs, as long as they can realize the structure design of adjusting the position of the linear motor module 201 in any one of the first direction, the second direction and the third direction, are also within the scope of the embodiment. Therefore, in step 903, "the linear motor adjustment mechanism in the linear motor adjustment system in the above embodiment is used to adjust the linear motor module in at least one direction which needs to be adjusted in the first direction, the second direction and the third direction" also includes: the linear motor module 201 is adjusted in at least one direction which needs to be adjusted in the first direction, the second direction and the third direction by using other structures which can adjust the position of the linear motor module 201 in any one of the first direction, the second direction and the third direction.

[0096] Figure 10 A flowchart of an installation method of an electroplating equipment provided by an exemplary embodiment of the present application is shown.

[0097] Based on the same concept, the application further provides a method for installing the electroplating equipment, the electroplating equipment 400 comprises a plurality of module sections 401 capable of being assembled to form the electroplating equipment 400, as shown in the figure, the method for installing the electroplating equipment comprises the following steps 1001 and 1002. Figure 10

[0098] The step 1001 assembles all or part of two adjacent module sections to form all or part of the connected module sections of the electroplating equipment.

[0099] The step 1002 corresponds to the splicing of the linear motor module by using the splicing method of the whole linear motor in the above embodiment, and the whole linear motor obtained after splicing is laid on all or part of the connected module sections of the electroplating equipment.

[0100] The above describes the basic principles of the application in combination with specific embodiments, but it needs to be pointed out that the advantages, advantages, effects and the like mentioned in the application are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-haves of each embodiment of the application. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the application which must be implemented by using the above specific details.

[0101] The block diagram of the device, apparatus, equipment and system involved in the application is only an illustrative example and is not intended to require or imply the connection, arrangement and configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment and systems can be connected, arranged and configured in any way. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0102] It also needs to be pointed out that in the device, equipment and method of the application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombination should be considered as the equivalent solutions of the application.

[0103] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the application. Therefore, the application is not intended to be limited to the aspects shown herein, but is to be accorded the full scope consistent with the principles and novel features disclosed herein.​

[0104] The foregoing description has been presented for the purposes of illustration and description. Furthermore, the description is not intended to limit the embodiments of the application to the forms disclosed herein. Although the example aspects and embodiments have been discussed with reference to the above example, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations.

Claims

1. A linear motor adjustment system applied to an electroplating apparatus, the electroplating apparatus comprising a plurality of module sections capable of being assembled to form the electroplating apparatus, and a part of linear motor modules corresponding to each of the module sections, characterized in that, include: At least one linear motor adjustment mechanism is provided corresponding to each of the linear motor modules, and the linear motor adjustment mechanism is located at the end, middle or between the end and middle of the linear motor module; The linear motor module can be assembled in the corresponding parts of the module to form a complete linear motor, which allows the robot to move back and forth in the second direction. After any two adjacent linear motor modules are spliced ​​together to form all or part of the linear motor as a whole, the position of the corresponding linear motor module can be adjusted in any one of the first direction, the second direction, and the third direction by the linear motor adjustment mechanism, so that any two adjacent linear motor modules are fully aligned in the first direction, the second direction, and the third direction, so that the linear motor as a whole is completely consistent in the first direction, the second direction, and the third direction, and the first direction, the second direction, and the third direction intersect each other.

2. The linear motor adjustment system of claim 1, wherein, There are three module divisions, and three linear motor modules are provided corresponding to the module divisions. Each linear motor module is provided with one or two linear motor adjustment mechanisms.

3. A linear motor adjustment system according to claim 1 or 2, characterised in that, The linear motor adjustment mechanism includes: Rack components; A motor mounting plate is disposed on one side of the frame assembly in a first direction, the motor mounting plate having at least one first threaded portion extending along the first direction; At least one first screw connector is screwed to the first threaded portion and abuts against the frame assembly; The linear motor module can be installed on the side of the motor mounting plate away from the frame assembly in the first direction. The linear motor module extends in the second direction, and its position can be adjusted in the first direction by adjusting the first screw connector.

4. The linear motor adjustment system of claim 3, wherein, There are multiple first threaded portions and multiple first screw-in components; The plurality of first threaded portions are respectively disposed at both ends of the motor mounting plate in the third direction, and / or the plurality of first threaded portions are spaced apart along the second direction.

5. The linear motor adjustment system of claim 3, wherein, The motor mounting plate has at least one first oblong hole extending along the second direction; The rack assembly includes: The rack unit extends along the second direction; A transition plate is disposed between the frame unit and the motor mounting plate, the transition plate having at least one second threaded portion extending along the first direction; At least one second screw connector, the second screw connector including a first limiting portion and a third threaded portion, the first limiting portion abutting against the surface of the motor mounting plate away from the transition plate in the first direction, the third threaded portion passing through the first oblong hole and screwed to the second threaded portion.

6. The linear motor adjustment system of claim 5, wherein, There are multiple first oblong holes, multiple second threaded portions, and multiple second screw-in components; The first waist-shaped holes are arranged at two ends of the motor mounting plate in a third direction, and the second threaded portions are arranged at two ends of the transition plate in the third direction. The first waist-shaped holes are arranged at two ends of the motor mounting plate in a third direction, and the second threaded portions are arranged at two ends of the transition plate in the third direction.

7. The linear motor adjustment system of claim 5, wherein, The transition plate further comprises at least one second waist-shaped hole extending in a third direction, and the rack unit comprises at least one fourth threaded portion extending in the first direction. The linear motor adjusting mechanism further comprises: The third threaded member comprises a second limiting portion and a fifth threaded portion, the second limiting portion is in abutment with the surface of the transition plate away from the rack unit in the first direction, and the fifth threaded portion passes through the second waist-shaped hole and is screwed with the fourth threaded portion.

8. The linear motor adjustment system of claim 7, wherein, The number of the second waist-shaped holes is plural, the number of the fourth threaded portions is plural, and the number of the third threaded members is plural. The first waist-shaped holes are arranged at two ends of the motor mounting plate in a third direction, and the second threaded portions are arranged at two ends of the transition plate in the third direction. The first waist-shaped holes are arranged at two ends of the motor mounting plate in a third direction, and the second threaded portions are arranged at two ends of the transition plate in the third direction.

9. The linear motor adjustment system of claim 7, wherein, The linear motor adjusting mechanism further comprises: The support plate is arranged below the transition plate, and comprises a vertical fixing plate and a horizontal fixing plate perpendicular to the vertical fixing plate, the vertical fixing plate is fixed to the rack unit, and the horizontal fixing plate is arranged in a spaced manner with the lowermost part of the transition plate. The horizontal support member comprises at least one sixth threaded portion extending in the third direction. The horizontal top plate is parallel to the horizontal support member and is fixedly connected with the transition plate. The fourth threaded member is screwed with the sixth threaded portion after passing through the horizontal fixing plate, and is in abutment with the horizontal top plate, the fourth threaded member allows the sixth threaded portion to move upward to apply a downward force to the horizontal top plate to drive the transition plate to move downward, so that the linear motor module moves downward correspondingly, or the fourth threaded member allows the sixth threaded portion to move downward to drive the transition plate to move upward synchronously under the action of gravity, so that the linear motor module moves upward correspondingly.

10. The linear motor adjustment system of claim 7, wherein, The movable range of the first threaded member relative to the first threaded portion in the first direction is 0 mm-30 mm, so that the moving distance of the linear motor module in the first direction is 0 mm-30 mm. The movable range of the second threaded member in the first waist-shaped hole in the second direction is 0 mm-20 mm, so that the moving distance of the linear motor module in the second direction is 0 mm-20 mm. And / or, the movable range of the third screw element in the second waist hole in the third direction is 0 mm~20 mm, so that the moving distance of the linear motor module in the third direction is 0 mm~20 mm.

11. An electroplating apparatus, characterized by, Comprise: A robot configured to place a substrate into a gripper or take the substrate out of the gripper; A linear motor whole extending in a second direction, connected with the robot, configured to allow the robot to move linearly along the linear motor whole, the linear motor whole being spliced by a plurality of linear motor modules; At least one linear motor adjusting system according to any one of claims 1~10, the linear motor adjusting system comprising at least one linear motor adjusting mechanism corresponding to each of the linear motor modules, the linear motor adjusting mechanism being arranged at the end, middle or between the end and middle of the corresponding linear motor module, configured to adjust the position of the corresponding linear motor module in any one of the first direction, the second direction and the third direction, so that any two adjacent linear motor modules are completely aligned in the first direction, the second direction and the third direction, so that the linear motor whole is completely consistent in the first direction, the second direction and the third direction, the first direction, the second direction and the third direction intersecting with each other.

12. A method of assembling a linear motor unit for use in an electroplating apparatus, the electroplating apparatus comprising a plurality of module sections that can be assembled to form the electroplating apparatus, the method comprising: The linear motor whole is divided into linear motor modules corresponding to each of the module sections, the linear motor modules being capable of being assembled and spliced at the same time to form the linear motor whole, the linear motor whole allowing the robot to move reciprocally in the second direction; The splicing method of the linear motor whole comprises: Splicing all or part of the adjacent linear motor modules; Detecting whether the linear motor modules need to be adjusted in the first direction, the second direction and the third direction, the first direction, the second direction and the third direction intersecting with each other; If yes, adjusting the corresponding linear motor module in at least one direction of the first direction, the second direction and the third direction by the linear motor adjusting mechanism of the linear motor adjusting system according to any one of claims 1~10, so that any two adjacent linear motor modules are completely consistent in the first direction, the second direction and the third direction.

13. A method of installing an electroplating apparatus comprising a plurality of module sections that can be assembled to form the electroplating apparatus, characterized by, The installation method of the electroplating equipment comprises: Assembling all or part of the adjacent module sections to form all or part of the connected module sections of the electroplating equipment; Splicing the linear motor modules by using the splicing method of the linear motor whole according to claim 12, so that the linear motor whole obtained after splicing is laid on all or part of the connected module sections of the electroplating equipment.

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