Chip AOI detection equipment

Abstract

The invention relates to the technical field of product detection, in particular to chip AOI detection equipment which comprises an equipment bearing table, a moving mechanism, a longitudinal moving part, a transverse moving part and a turnover mechanism. After an operator moves the grabbing and clamping device to a required area through cooperation of the moving mechanism and the longitudinal moving part, the chip is moved to the grabbing and clamping area to be grabbed and clamped through the transferring device, then the surface of the chip continues to be continuously shot through the high-speed camera, and then the plane of the chip continues to be overturned through the overturning mechanism. In the overturning process, the high-speed camera can effectively shoot oblique cracks of multiple groups of chip planes and oblique planes of the chip, the detection precision is improved, meanwhile, all display surfaces of the chip can be rapidly overturned and shot, and the overturning device has good practicability and economical efficiency and is beneficial to popularization and use of equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of product detection, and particularly relates to a chip AOI detection device. BACKGROUND

[0002] Chip AOI detection, full name Automatic Optical Inspection, is a core quality detection technology in chip manufacturing and packaging. It automatically collects images of the surface or internal of the chip through an optical imaging system, combines image processing algorithms and artificial intelligence (AI) technology, and automatically identifies, judges and classifies the appearance, structure or circuit defects of the chip, finally replacing or assisting manual work to complete efficient and high-precision quality screening. Traditional AOI detection mainly uses a camera to shoot a flat contrast qualified product for identification, but since most chips are stacked in a multi-layer module structure, they are prone to diagonal cracks due to bending. The shooting accuracy of the flat surface cannot meet the actual needs, and the traditional chip clamping structure cannot accurately shoot the flat surface of all chips. It needs to replace the clamp, motion interference and other factors to affect the shooting effect. Only by adding a camera and changing the angle of the camera can the shooting effect be improved, but the efficiency is low, the cost is high, and the detection accuracy is affected. SUMMARY

[0003] In order to solve the above problems existing in the prior art, the present application aims to provide a chip AOI detection device which has a simple structure, can quickly flip the chip to realize shooting of all surfaces, and effectively identify diagonal cracks to improve detection accuracy.

[0004] The technical scheme adopted by the present application is as follows: a chip AOI detection device is installed on a device bearing table and comprises a moving mechanism, a longitudinal displacement plate is arranged on the moving mechanism, the moving mechanism is used to assist the longitudinal displacement plate to move horizontally, an activity plate is arranged on the longitudinal displacement plate, a longitudinal moving piece is arranged on the longitudinal displacement plate to facilitate the longitudinal movement of the activity plate, a turnover mechanism is arranged on the side of the activity plate away from the longitudinal displacement plate to clamp the chip and change the clamping position of the chip, a high-speed camera is arranged below the turnover mechanism to facilitate shooting of the clamped chip, and a horizontal moving piece is further arranged on the activity plate to move the position of the turnover mechanism. The turnover mechanism comprises two groups of rotating gears, the middle part of the opposite sides of the two groups of rotating gears is provided with a positioning long rod, the middle part of the positioning long rod is provided with a sliding long rod, the sliding long rod penetrates and is slidably connected to the positioning long rod, the opposite ends of the two groups of sliding long rods are provided with abutting blocks, the abutting blocks abut the clamped chip, the two sides of the positioning long rod are provided with connecting long rods, one side of the connecting long rod close to the clamped chip is provided with a wedge-shaped guide block, the two groups of wedge-shaped guide blocks are axially symmetrically distributed at the clamping center of the chip, the connecting long rod is further provided with a turnover piece, and the turnover piece cooperates with the abutting block to change the clamping plane of the chip.

[0005] In an embodiment, the moving mechanism comprises a moving beam, the moving beam is provided with a plurality of moving guide rails for guiding, the moving plate is slidably connected to the moving guide rails, the two ends of the moving beam are provided with two groups of moving motors, the rotating wheels of the two groups of moving motors are provided with a transmission belt wrapping the rotating wheels, the guiding direction of the transmission belt is the same as the axial direction of the moving guide rail, the moving plate is fixedly connected to part of the transmission belt, and the longitudinal moving piece is arranged between the longitudinal displacement plate and the moving plate.

[0006] In an embodiment, the longitudinal moving piece comprises a plurality of sliding guide rails, the guiding direction of the sliding guide rails is perpendicular to the guiding direction of the moving guide rails, the moving plate is further provided with a driving motor and a positioning block, the positioning block is also provided with a rotating wheel, a moving belt wrapping the two groups of rotating wheels is arranged between the driving motor and the rotating wheel of the positioning block, the guiding direction of the moving belt is the same as the axial direction of the sliding guide rail, and the longitudinal displacement plate is fixedly connected to part of the moving belt.

[0007] In an embodiment, the transverse moving piece comprises two groups of connecting vertical plates, the connecting vertical plates are fixedly connected to the side end of the movable plate provided with the turnover mechanism, a guide rod is arranged between the two groups of connecting vertical plates, the rotating gear is provided with a buckling ring away from the opposite side, the buckling ring penetrates and is rotatably connected to the side cavity of the rotating gear, a supporting transverse sliding plate is further arranged on the buckling ring, and the guide rod penetrates and is slidably connected to the supporting transverse sliding plate.

[0008] In an embodiment, the middle part of the sliding long rod is provided with a thrust sliding plate, the sliding long rod penetrates and is fixedly connected to the thrust sliding plate, a thrust spring is arranged between the thrust sliding plate and the positioning long rod and penetrated by the sliding long rod, so as to flexibly clamp the chip.

[0009] In an embodiment, the connecting long rod is provided with a sliding long groove, one end of the thrust sliding plate penetrates and is slidably connected to the adjacent sliding long groove, the connecting long rod is provided with an expansion plate near one end of the adjacent rotating gear, the plane of the expansion plate is perpendicular to the plane of the adjacent rotating gear, the expansion plate is provided with a guide rail through groove, the guide rail through groove is provided with a constraint long rod, the constraint long rod penetrates and is slidably connected to the guide rail through groove, and the constraint long rod is fixedly connected to the opposite sides of the rotating gear.

[0010] In an embodiment, the guide rail through groove comprises a diagonal groove and a transverse groove, the diagonal groove is connected to the transverse groove, and the diagonal groove expands away from the connecting end of the transverse groove and away from the thrust spring.

[0011] In an embodiment, the middle part of the movable plate is provided with a rectangular groove, one side of the inner cavity of the rectangular groove is provided with an engagement rack, the setting direction of the engagement rack is the same as the moving direction of the movable plate, the buckle ring is further provided with a motor fixing frame, the motor fixing frame is further provided with an expansion motor, the rotating shaft of the expansion motor is provided with an expansion gear, and the expansion gear engages the engagement rack.

[0012] In an embodiment, a plurality of fixed sliding rods are further arranged between the two groups of connecting vertical plates, the middle part of each of the plurality of fixed sliding rods is provided with a sliding plate, the fixed sliding rod penetrates and is slidably connected to the sliding plate, the sliding plate is further connected to the adjacent motor fixing frame, the sliding plate is further provided with a connecting frame, and the connecting frame is connected to the high-speed camera and is used for cooperating with the movement of the high-speed camera to be placed on one side of the chip.

[0013] In an embodiment, the buckle ring is further provided with a connecting support plate, the connecting support plate is provided with a rotation motor, the rotating shaft of the rotation motor is provided with an engagement gear, and the engagement gear engages the adjacent rotating gear.

[0014] The chip AOI detection device has the advantages that the chip AOI detection device has a simple structure, can realize the flipping of the chip and the rapid full-surface shooting, can effectively identify the diagonal cracks and improve the detection precision, and the specific implementation method is as follows: The operator first starts the moving motor to drive the transmission belt to rotate, so that the moving plate moves horizontally on the moving guide rail, and then starts the driving motor to rotate the moving belt between the positioning blocks, so that the longitudinal displacement plate moves longitudinally, and after the overall structure of the flipping mechanism moves to the conveying area of the chip, the chip can be clamped. At this time, the two sets of expansion motors are started to drive the two sets of expansion gears to rotate in opposite directions. The meshing racks of the expansion gears push the motor fixing frame to move relatively, driving the sliding rods in the middle of the positioning rods on the rotating gears connected by the buckling ring to move relatively. Then, the abutting blocks on the two sets of sliding rods clamp the vertical chip abutting plane. At this time, the lower high-speed camera can take pictures. In the process of taking pictures, the meshing gears on the connecting support plate are started to drive the rotating gears to rotate along the axis of the buckling ring. In the process of rotation, the two sets of abutting blocks clamp the chip to rotate, so that the lower high-speed camera can clearly take pictures of the inclined plane and the front plane of the chip. When the chip inclined plane produces an inclined crack, the projection plane picture cannot be taken completely, and the detection accuracy is improved. Due to the abutting action of the two sets of abutting blocks, the chip cannot be taken on both sides, that is, the chip needs to be flipped to the edge for clamping. At this time, after the chip is rotated to the initial clamping position, the expansion motor is started to continue to drive the two sets of expansion gears to rotate in opposite directions. Due to the relative movement of the positioning rods, the constraint rods on the positioning rods pass through the inclined grooves from the horizontal grooves, so that the connection rods connected by the expansion plates arranged in opposite directions abut, and the connection rods on both sides of the sliding rod move close to each other. In the process of approaching, the connection rods provided with wedge-shaped guide blocks first touch the inclined two corners of the chip, generating four symmetrical support points on the chip, so that the chip will not fall off, and the chip is flipped along the clamping center of the abutting block. At the same time, the sliding plate connected by the two sets of abutting blocks resists the outward movement of the pushing force spring due to the extrusion of the pushing force spring. Since the abutting blocks are usually made of soft material, the connection rods will not affect the chip during clamping. After the chip is flipped to the horizontal position, the two sets of abutting blocks are clamped to the two sides of the chip, driving the expansion gears on the two sets of expansion motors to rotate in reverse, so that the constraint rods flow into the horizontal grooves from the inclined grooves, and the connection rods are separated from the shooting area of the chip. The high-speed camera can continue to rotate and shoot as described above. Since the high-speed camera is connected to the sliding plate through the connecting frame, the high-speed camera moves during the movement of the buckling ring. Since the shooting range of the high-speed camera is usually large, it will not affect the shooting accuracy of the chip, effectively reducing the positioning function of the high-speed camera, and simplifying the shooting difficulty. Then, according to the shooting results, the cooperation of the moving mechanism and the longitudinal moving piece moves the qualified products and unqualified products to different areas, facilitating collection and transportation.

[0015] The device has the advantages of simple structure, effective use of the moving clamping of the connection rod to flip the chip, auxiliary shooting of the chip by the high-speed camera, effective improvement of the detection accuracy, improvement of the detection efficiency, reduction of the cost, good practicability and economy, and facilitation of the promotion and use of the device. BRIEF DESCRIPTION OF DRAWINGS

[0016] The application will be further described in detail below in conjunction with the drawings and specific implementation methods.

[0017] Figure 1 is a schematic diagram of the three-dimensional structure of the application; Figure 2 is a schematic diagram of the three-dimensional structure of the application; Figure 3 is a schematic diagram of the three-dimensional structure of the longitudinal moving part of the application; Figure 4 is a schematic diagram of the three-dimensional structure of the transverse moving part of the application; Figure 5 is a schematic diagram of the three-dimensional structure of the turnover mechanism of the application; Figure 6 is a schematic diagram of the three-dimensional structure of the turnover mechanism of the application; Figure 7 is a schematic diagram of the three-dimensional structure of the turnover mechanism of the application.

[0018] BRIEF DESCRIPTION OF DRAWINGS: 1, device bearing table; 2, moving mechanism; 21, moving beam; 22, moving plate; 23, moving motor; 24, transmission belt; 25, moving guide rail; 3, longitudinal moving part; 31, longitudinal displacement plate; 32, drive motor; 33, moving belt; 34, positioning block; 35, sliding guide rail; 4, transverse moving part; 41, movable plate; 411, rectangular groove; 412, meshing rack; 42, connecting stand; 43, guide rod; 44, fixed sliding rod; 45, high-speed camera; 451, sliding plate; 452, connecting frame; 5, turnover mechanism; 51, rotating gear; 511, self-rotating motor; 512, connecting support plate; 513, meshing gear; 52, buckling ring; 521, motor fixing frame; 522, expansion motor; 523, expansion gear; 53, support transverse sliding plate; 54, positioning long rod; 541, sliding long rod; 542, abutting block; 543, thrust spring; 55, expansion plate; 551, oblique groove; 552, transverse groove; 554, constraint long rod; 56, connecting long rod; 561, sliding long groove; 562, wedge-shaped guide block; 57, thrust sliding plate; 6, chip. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the application more clear and explicit, the application will be further described in detail below in conjunction with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the application and are not used to limit the application, that is, the described examples are only a part of the examples of the application, but not all the examples. The components of the application embodiments generally described and shown in the drawings herein can be arranged and designed in various different configurations.

[0020] The following detailed description of embodiments of the application in the accompanying drawings provides examples and is not intended to limit the scope of the application as claimed. Based on the embodiments of the application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the application.

[0021] The specific embodiments of the application are described below with reference to the accompanying drawings Figures 1-7 A chip 6 AOI detection device is mounted on a device carrier 1, which is mainly used for loading a variety of devices for such products, and uses a mechanical hand, a sensor, and a control system to process the chip 6. Since such products usually have complex functions, the general device carrier 1 is a bearing structure and does not belong to the invention point of the application, so it will not be described again. It includes a moving mechanism 2, a longitudinal displacement plate 31 provided on the moving mechanism 2, a moving mechanism 2 used to assist the longitudinal displacement plate 31 to move horizontally, a movable plate 41 provided on the longitudinal displacement plate 31, a longitudinal moving part 3 provided on the longitudinal displacement plate 31 to facilitate the longitudinal movement of the movable plate 41, a turnover mechanism 5 provided on the side away from the longitudinal displacement plate 31 of the movable plate 41 to clamp the chip 6 and change the clamping position of the chip 6, a high-speed camera 45 provided below the turnover mechanism 5 to facilitate the clamping of the chip 6, the chip 6 is a general term, usually a rectangular body with pins or solder joints, the high-speed camera 45 mainly shoots multiple lenses in a short time, which is a prior art, and the movable plate 41 is also provided with a horizontal moving part 4 to move the position of the turnover mechanism 5; In the implementation process, the chip 6 is usually transferred to the middle of the turnover mechanism 5 by a special grabbing, conveying structure or mechanical hand, which does not belong to the invention point of the application, so the figure is not drawn, and the above functions can be realized automatically or manually; The turnover mechanism 5 includes two sets of rotating gears 51, the middle part of the opposite sides of the two sets of rotating gears 51 is provided with a positioning long rod 54, the middle part of the positioning long rod 54 is provided with a sliding long rod 541, the sliding long rod 541 penetrates and is slidingly connected to the positioning long rod 54, the opposite ends of the two sets of sliding long rods 541 are provided with abutting blocks 542, the abutting blocks 542 are made of soft material, the abutting blocks 542 abut the clamped chip 6, the two sides of the positioning long rod 54 are provided with connecting long rods 56, one side of a connecting long rod 56 close to the clamped chip 6 is provided with a wedge-shaped guide block 562, the two sets of wedge-shaped guide blocks 562 are axially symmetrically distributed at the clamping center of the chip 6, and the connecting long rod 56 is also provided with a turnover part, which cooperates with the abutting block 542 to change the clamping plane of the chip 6.

[0022] Beneficially, the moving mechanism 2 comprises a moving beam 21, on which a plurality of moving guide rails 25 are arranged for guiding, the number of which is not unique and is determined according to the time condition, and a moving plate 22 is slidingly connected to the plurality of moving guide rails 25, and two groups of moving motors 23 are arranged at both ends of the moving beam 21, and a simple drawing method is adopted in the drawings, and the structure is mainly shown, and the two groups of moving motors 23 can be freely replaced by a group of moving motors 23 and rotating wheels, and a transmission belt 24 wrapping the two groups of rotating wheels is arranged between the rotating wheels of the two groups of moving motors 23, the guiding direction of the transmission belt 24 is the same as the axial direction of the moving guide rail 25, and the moving plate 22 is fixedly connected to part of the transmission belt 24, and the longitudinal moving part 3 is arranged between the longitudinal displacement plate 31 and the moving plate 22.

[0023] Beneficially, the longitudinal moving part 3 comprises a plurality of sliding guide rails 35, the number of which is determined according to the actual condition, and through the arrangement of the two groups of moving structures, the detection position can be freely replaced, and the detection or classification and placement of the detected product is facilitated, the guiding direction of the sliding guide rail 35 is perpendicular to the guiding direction of the moving guide rail 25, and the moving plate 22 is further provided with a driving motor 32 and a positioning block 34, and the positioning block 34 is also provided with a rotating wheel, and a moving belt 33 wrapping the two groups of rotating wheels is arranged between the driving motor 32 and the rotating wheel of the positioning block 34, which mainly cooperates with the rotating wheel on the driving motor 32 to support the moving belt 33, and the guiding direction of the moving belt 33 is the same as the axial direction of the sliding guide rail 35, and the longitudinal displacement plate 31 is fixedly connected to part of the moving belt 33.

[0024] Beneficially, the transverse moving part 4 comprises two groups of connecting vertical plates 42, which are fixedly connected to the side end of the movable plate 41 provided with the turnover mechanism 5, and a guide rod 43 is arranged between the two groups of connecting vertical plates 42, a buckle ring 52 is arranged on the side away from the opposite side of the rotating gear 51, the buckle ring 52 penetrates into and is rotatably connected to the inner cavity side of the rotating gear 51, and a supporting transverse sliding plate 53 is further arranged on the buckle ring 52, the guide rod 43 penetrates and is slidingly connected to the supporting transverse sliding plate 53, which facilitates supporting the rotating gear 51, a sliding long rod 541 is arranged in the middle of the sliding long rod 541, and the sliding long rod 541 penetrates and is fixedly connected to the thrust sliding plate 57, and a thrust spring 543 penetrated by the sliding long rod 541 is arranged between the thrust sliding plate 57 and the positioning long rod 54, which is used for flexibly clamping the chip 6.

[0025] Specifically, the connecting long rod 56 is provided with a sliding long slot 561, one end of the thrust sliding plate 57 penetrates and is slidably connected to the adjacent sliding long slot 561, the end of the connecting long rod 56 close to the adjacent rotating gear 51 is provided with an expansion plate 55, the plane of the expansion plate 55 is perpendicular to the plane of the adjacent rotating gear 51, the expansion plate 55 is provided with a guide rail through slot, the guide rail through slot is provided with a constraint long rod 554, the constraint long rod 554 penetrates and is slidably connected to the guide rail through slot, both ends of the constraint long rod 554 are fixedly connected to the opposite sides of the rotating gear 51, the two constraint long rods 554 on the rotating gear 51 are parallel to each other, specifically, the guide rail through slot includes an inclined slot 551 and a transverse slot 552, the inclined slot 551 is connected to the transverse slot 552, and the connection end of the inclined slot 551 away from the transverse slot 552 is inclined away from the thrust spring 543, and presents a bent line structure.

[0026] In implementation, the expansion motor 522 is started to continue to drive the two sets of expansion gears 523 to rotate oppositely, because the relative movement of the positioning long rod 54 drives the constraint long rod 554 on the positioning long rod 54 to pass through the inclined slot 551 from the transverse slot 552, so that after the expansion plate 55 connected to the connecting long rod 56 oppositely abuts, the connecting long rods 56 on both sides of the sliding long rod 541 move close to each other, in the process of moving close, the connecting long rod 56 provided with the wedge-shaped guide block 562 first touches the chip 6 obliquely at two corners, generates four sets of symmetrical support points on the chip 6, so that the chip 6 cannot fall off, makes the chip 6 flip along the clamping center of the abutting block 542, and at the same time resists the two sets of abutting blocks 542 connected to the thrust sliding plate 57 to extrude the thrust spring 543 to move outward. Because the abutting block 542 is usually made of soft material, it will not affect the chip 6 in the process of clamping by the connecting long rod 56, until the chip 6 is flipped to be horizontal, the two sets of abutting blocks 542 are transposed and clamped to both sides of the chip 6, that is, the expansion gears 523 on the two sets of expansion motors 522 are driven to rotate reversely, so that the constraint long rod 554 flows from the inclined slot 551 to the transverse slot 552, and the connecting long rod 56 is separated from the shooting area of the chip 6, so that the high-speed camera 45 can continue to rotate and shoot as described above.

[0027] Beneficially, the middle of the movable plate 41 is provided with a rectangular groove 411, one side of the inner cavity of the rectangular groove 411 is provided with an engagement rack 412, the engagement rack 412 is arranged in the same direction as the moving direction of the movable plate 41, the fastening ring 52 is further provided with a motor fixing frame 521, the motor fixing frame 521 is further provided with an expansion motor 522, the rotating shaft of the expansion motor 522 is provided with an expansion gear 523, the expansion gear 523 engages the engagement rack 412, specifically, a plurality of fixed slide rods 44 are further arranged between the two groups of connecting vertical plates 42, the middle of the plurality of fixed slide rods 44 is provided with a sliding plate 451, the fixed slide rod 44 penetrates and is slidingly connected to the sliding plate 451, the sliding plate 451 is further connected to the adjacent motor fixing frame 521, the sliding plate 451 is further provided with a connecting frame 452, and the connecting frame 452 is connected to the high-speed camera 45, so as to cooperate with the movement of the high-speed camera 45 to be placed on one side of the chip 6.

[0028] Specifically, the fastening ring 52 is further provided with a connecting support plate 512, the connecting support plate 512 is provided with a self-rotating motor 511, the rotating shaft of the self-rotating motor 511 is provided with an engagement gear 513, and the engagement gear 513 engages the adjacent rotating gear 51. By rotating the rotating gear 51 to drive the above-mentioned part of the structure to rotate, the chip 6 is grabbed by the high-speed camera 45 in a rotating manner during the rotation process, and the inclined angle is effectively used to shoot part of the inclined crack, so as to improve the detection accuracy of the equipment.

[0029] Working principle of the application: The operator first starts the moving motor 23 to drive the transmission belt 24 to rotate, so that the moving plate 22 moves transversely on the moving guide rail 25, and continues to start the driving motor 32 to rotate the moving belt 33 between the positioning blocks 34, so that the longitudinal displacement plate 31 moves longitudinally, so that the overall structure of the turnover mechanism 5 moves to the conveying area of the chip 6, and then the chip 6 can be grabbed. At this time, the two groups of expansion motors 522 are started to drive the two groups of expansion gears 523 to rotate in opposite directions, the engagement rack 412 engaged by the expansion gear 523 pushes the motor fixing frame 521 to move relatively, drives the sliding long rod 541 in the middle of the positioning long rod 54 of the rotating gear 51 connected to the fastening ring 52 to move relatively, and then the abutting blocks 542 on the two groups of sliding long rods 541 clamp the vertical chip 6 abutting plane, at this time, the lower high-speed camera 45 can shoot, in the shooting process, the engagement gear 513 on the connecting support plate 512 is started to drive the rotating gear 51 to rotate along the axis of the fastening ring 52, in the rotating process, the two groups of abutting blocks 542 clamping the chip 6 rotate, so that the lower high-speed camera 45 can clearly shoot the inclined plane photos and the front photos of the plurality of chips 6, which can avoid that when the inclined plane of the chip 6 produces an inclined crack, the projection plane photo cannot be shot completely, and improve the detection precision; Due to the abutting effect of the two groups of abutting blocks 542, the chip 6 cannot be shot on both sides, that is, the chip 6 needs to be flipped to the edge clamping, at this time, after the chip 6 is rotated to the initial clamping position, the expansion motor 522 is started to continue to drive the two groups of expansion gears 523 to rotate oppositely, due to the relative movement of the positioning long rod 54 driving the constraint long rod 554 on the positioning long rod 54 to pass through the oblique groove 551 from the transverse groove 552, the connection long rod 56 connected with the oppositely arranged expansion plates 55 abuts, the connection long rods 56 on both sides of the sliding long rod 541 move close to each other, in the process of moving close, the connection long rod 56 provided with the wedge-shaped guide block 562 first touches the oblique two corners of the chip 6, generating four symmetrical support points on the chip 6, so that the chip 6 cannot fall off, and the chip 6 is flipped along the clamping center of the abutting block 542, while resisting the pushing force of the two groups of abutting blocks 542 connected with the pushing force spring 543, the pushing force spring 543 moves outward, due to the abutting block 542 being usually made of soft material, the chip 6 is not affected in the clamping process of the connection long rod 56, until the chip 6 is flipped to be horizontal, the two groups of abutting blocks 542 are clamped to the two sides of the chip 6, that is, the expansion gears 523 on the two groups of expansion motors 522 are reversely rotated, so that the constraint long rod 554 flows into the transverse groove 552 from the oblique groove 551, and the connection long rod 56 is separated from the shooting area of the chip 6, so that the high-speed camera 45 can continue to rotate and shoot as described above; Due to the fact that the high-speed camera 45 is connected to the sliding plate 451 through the connecting frame 452, the high-speed camera 45 moves in the process of the buckle ring 52 moving, and due to the fact that the shooting range of the high-speed camera 45 is usually large, the shooting accuracy of the chip 6 is not affected, the positioning function of the high-speed camera 45 is effectively reduced, and the shooting difficulty is simplified. Then, according to the shooting result, the cooperation of the moving mechanism 2 and the longitudinal moving piece 3 moves the qualified products and unqualified products to different areas, facilitating collection and transfer.

[0030] In the description of the present application, it should be pointed out that, unless otherwise specified and limited, the terms "installation", "connection", "connection" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] The above is only an example and description of the structure of the present application, and those skilled in the art can make various modifications or supplements or adopt similar ways to replace the described specific embodiments, as long as they do not deviate from the structure of the invention or the scope defined by the claims of the present application, which shall belong to the protection scope of the present application.

Claims

1. A chip AOI inspection device, mounted on a device carrier (1), characterized in that: The invention comprises a moving mechanism (2), wherein a longitudinal displacement plate (31) is provided on the moving mechanism (2), and the moving mechanism (2) is used to assist the longitudinal displacement plate (31) in lateral movement, and a movable plate (41) is provided on the longitudinal displacement plate (31), and a longitudinal moving member (3) is provided on the longitudinal displacement plate (31) to facilitate the longitudinal movement of the movable plate (41), and a flip mechanism (5) is provided on the side of the movable plate (41) away from the longitudinal displacement plate (31) to clamp a chip and change the chip clamping position, and a high-speed camera (45) is provided below the flip mechanism (5) to facilitate photographing the clamped chip, and a lateral moving member (4) is also provided on the movable plate (41) to adjust the position of the flip mechanism (5); The flip mechanism (5) comprises two groups of rotating gears (51), and a positioning rod (54) is provided in the middle of the opposite sides of the two groups of rotating gears (51), and a sliding rod (541) is provided in the middle of the positioning rod (54), and the sliding rod (541) passes through and is slidably connected to the positioning rod (54), and abutment blocks (542) are provided at the opposite ends of the two groups of sliding rods (541), and the abutment blocks (542) abut against the clamped chip, and connecting rods (56) are provided on both sides of the positioning rod (54), and one of the connecting rods (56) is provided with a wedge-shaped guide block (562) on the side close to the clamped chip, and the two groups of wedge-shaped guide blocks (562) are axially symmetrically distributed about the clamping center of the chip, and a flip piece is also provided on the connecting rod (56), and the flip piece cooperates with the abutment block (542) to change the clamping plane of the chip.

2. The chip AOI inspection equipment according to claim 1, characterized in that: The moving mechanism (2) comprises a moving crossbeam (21), on which a plurality of moving guide rails (25) for guiding are provided. The moving plate (22) is slidably connected to the plurality of moving guide rails (25). Two groups of moving motors (23) are provided at both ends of the moving crossbeam (21). A transmission belt (24) wrapping the two groups of rotating wheels is provided between the rotating wheels of the two groups of the moving motors (23). The guiding direction of the transmission belt (24) is the same as the axial direction of the moving guide rails (25). The moving plate (22) is fixedly connected to a portion of the transmission belt (24). The longitudinal moving member (3) is provided between the longitudinal displacement plate (31) and the moving plate (22).

3. The chip AOI inspection equipment according to claim 2, characterized in that: The longitudinal moving member (3) includes a plurality of sliding guide rails (35), the guiding direction of the sliding guide rails (35) is perpendicular to the guiding direction of the moving guide rails (25), the moving plate (22) is further provided with a driving motor (32) and a positioning block (34), the positioning block (34) is also provided with a rotating wheel, a moving belt (33) wrapped around two groups of rotating wheels is provided between the driving motor (32) and the rotating wheel of the positioning block (34), the guiding direction of the moving belt (33) is the same as the axial direction of the sliding guide rails (35), and the longitudinal displacement plate (31) is fixedly connected to a portion of the moving belt (33).

4. The chip AOI inspection equipment according to claim 1, characterized in that: The transverse moving member (4) includes two groups of connecting vertical plates (42), the connecting vertical plates (42) are fixedly connected to the side ends of the movable plate (41) provided with a flip mechanism (5), a guide rod (43) is provided between the two groups of connecting vertical plates (42), the rotating gear (51) is provided with a buckle ring (52) away from the opposite side, the buckle ring (52) is passed through and rotatably connected to the inner cavity side of the rotating gear (51), and a supporting transverse slide (53) is also provided on the buckle ring (52), and the guide rod (43) passes through and is slidably connected to the supporting transverse slide (53).

5. The chip AOI inspection equipment according to claim 4, characterized in that: A thrust sliding plate (57) is provided in the middle of the sliding long rod (541), and the sliding long rod (541) passes through and is fixedly connected to the thrust sliding plate (57). A thrust spring (543) passed through by the sliding long rod (541) is provided between the thrust sliding plate (57) and the positioning long rod (54) for flexibly clamping the chip.

6. The chip AOI inspection equipment according to claim 5, characterized in that: The connecting long rod (56) is provided with a sliding long groove (561), one end of the thrust sliding plate (57) is passed through and slidably connected to the adjacent sliding long groove (561), and the end of the connecting long rod (56) close to the adjacent rotating gear (51) is provided with an expansion plate (55), the plane of the expansion plate (55) is perpendicular to the plane of the adjacent rotating gear (51), and the expansion plate (55) is provided with a guide rail through-groove, and a constraint long rod (554) is provided in the guide rail through-groove, and the constraint long rod (554) passes through and is slidably connected to the guide rail through-groove, and the two ends of the constraint long rod (554) are fixedly connected to the opposite sides of the rotating gear (51), and the two groups of constraint long rods (554) on the rotating gear (51) are parallel to each other.

7. The chip AOI inspection equipment according to claim 6, characterized in that: The guide rail through-groove comprises an oblique groove (551) and a transverse groove (552), wherein the oblique groove (551) is connected to the transverse groove (552), and the oblique groove (551) is obliquely expanded away from the thrust spring (543) in a direction away from the connecting end of the transverse groove (552).

8. The chip AOI inspection equipment according to claim 4, characterized in that: A rectangular groove (411) is provided in the middle of the movable plate (41), and a meshing rack (412) is provided on one side of the inner cavity of the rectangular groove (411). The setting direction of the meshing rack (412) is the same as the moving direction of the movable plate (41). A motor fixing frame (521) is also provided on the buckle ring (52), and an expansion motor (522) is also provided on the motor fixing frame (521). An expansion gear (523) is provided on the rotating shaft of the expansion motor (522), and the expansion gear (523) meshes with the meshing rack (412).

9. The chip AOI inspection equipment according to claim 8, characterized in that: A plurality of fixed slide bars (44) are provided between the two groups of connecting vertical plates (42), a sliding plate (451) is provided in the middle of the plurality of fixed slide bars (44), the fixed slide bars (44) pass through and are slidably connected to the sliding plate (451), the sliding plate (451) is also connected to the adjacent motor fixing frame (521), a connecting frame (452) is also provided on the sliding plate (451), the connecting frame (452) is connected to the high-speed camera (45), and is used to cooperate with the mobile high-speed camera (45) to be placed on one side of the chip.

10. The chip AOI inspection equipment according to claim 4, characterized in that: The buckle ring (52) is further provided with a connecting support plate (512), the connecting support plate (512) is provided with a rotating motor (511), the rotating shaft of the rotating motor (511) is provided with a meshing gear (513), and the meshing gear (513) meshes with the adjacent rotating gear (51).

Images