Accelerometer comprising mass and acceleration sensitive device associated with mass

CN120813844APending Publication Date: 2025-10-17SERCEL SAS
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Patent Information

Application Number
CN202480011229.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-02-07
Filing Date
2024-02-06
Publication Date
2025-10-17

AI Technical Summary

Technical Problem

Existing MEMS accelerometers have problems with high energy consumption and ineffective noise suppression when compensating for the influence of gravity, and traditional mechanical compensation solutions cannot dynamically adapt to changes in the orientation of the accelerometer.

Method used

A combination of a fixed stop system and a mobile stop device is adopted, and the elastically deformable connection device is adjusted by electrostatic force to achieve compensation of the restoring force of the exciting mass. The restoring force can be adjusted in different directions and at different values ​​to dynamically compensate for the influence of gravity.

Benefits of technology

The method realizes efficient compensation of gravity influence at low energy consumption, improves the measurement accuracy and sensitivity of the accelerometer, and adapts to the configuration of accelerometers with different orientations.

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Abstract

The invention relates to an accelerometer comprising: a support (2); an excitation mass (1) associated with an acceleration sensor having at least one acceleration sensitivity axis (As), the excitation mass being susceptible to forces caused by the acceleration to be measured and being susceptible to static forces such as gravity or inertial forces; and an elastically deformable connecting device (3) which connects the excitation mass (1) to the support (2). The accelerometer further comprises a fixed stop system (5) and a movable stop device (34), the movable stop device (34) being attached to the elastically deformable connecting device (3) or constituting part of the elastically deformable connecting device (3); and a movement system (4) configured to move the movable stop means (34) against the fixed stop system (5) to elastically deform the elastically deformable connecting means (3) in order to apply a restoring force (FR) to the excitation mass (1).
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Citation Information

Patent Citations

  • MEMS sensor structure comprising mechanically preloaded suspension springs

    WO2015185222A1