A silicon carbide cutting fluid supply device and a cutting method

Abstract

The application belongs to the technical field of semiconductor material processing, and discloses a silicon carbide cutting liquid supply device and a cutting method. The device comprises a collecting pool, the top of the collecting pool is movably provided with a stable adjusting assembly, the stable adjusting assembly comprises two groups of welding plates, triangular frames are welded and installed at the middle parts of the two ends of the two groups of welding plates, and welding frames are installed at the middle parts of the welding plates. Through the cooperation of the stable adjusting assembly, the clamping assembly and other structures, the side spraying structure is arranged in a suspended manner on the side of the clamping assembly, the spraying structure can be kept in a fixed state after contacting the top of the collecting pool in the process of pressing down, the spraying structure can move horizontally to a certain extent to adjust the position in the process of swinging, interference in the process of swinging is avoided, normal use of the device is ensured, the cutting gap in the process of material swinging is further directed to the spraying outlet area, and the cooling effect of the spraying wheel is improved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor material processing technology, specifically a silicon carbide cutting liquid supply device and cutting method. Background Technology

[0002] Silicon carbide is cut into wafers using a silicon carbide cutting device. The high-speed rotating cutting wire slowly cuts the silicon carbide upon contact. A lot of heat is generated during the cutting process. To avoid excessive temperature and reduced lifespan of the cutting wire, a continuous liquid supply is usually required. Cooling the cutting wire by the liquid flowing on its surface can effectively improve cutting efficiency.

[0003] For example, the invention disclosed in CN119388603A discloses a silicon carbide crystal cutting liquid supply device and a silicon carbide crystal cutting process, relating to the field of silicon carbide processing technology. The silicon carbide crystal cutting liquid supply device includes a liquid supply system, a control module, and a first liquid supply pipeline for spraying slurry onto the cutting wire mesh, and a second liquid supply pipeline for spraying slurry onto the silicon carbide crystal. The nozzle B of the second liquid supply pipeline is located obliquely above both sides of the cutting crystal. The radius of the silicon carbide crystal is R. The lateral distance from the nozzle B of the second liquid supply pipeline to the cutting center is R+20mm to R+200mm, and the vertical distance from the nozzle B of the second liquid supply pipeline to the cutting center is R+20mm to R+150mm. The first and second liquid supply pipelines are controlled independently by the control module, solving the problems of insufficient temperature control and inadequate abrasive supply in existing silicon carbide crystal cutting processes, which lead to poor cutting surface quality and low production efficiency.

[0004] In the existing technology, adding a liquid supply nozzle to the outside of the silicon carbide to increase the cooling of the silicon carbide can effectively solve the problem of insufficient temperature control during the cutting process. However, the nozzle structure fixed on both sides of the silicon carbide is fixed in position. During the silicon carbide cutting process, it will be in a swinging state. The swinging of the fixed side nozzle will contact the cutting line, causing interference.

[0005] Therefore, a silicon carbide cutting liquid supply device and cutting method are proposed to solve the problems mentioned in the background art. Summary of the Invention

[0006] To address the problems mentioned in the background section, the present invention provides a silicon carbide cutting liquid supply device and a cutting method.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a silicon carbide cutting liquid supply device, comprising a collection pool, wherein a stabilizing adjustment component is movably disposed on the top of the collection pool;

[0008] The stabilizing adjustment assembly includes two sets of welding plates. Triangular frames are welded and installed at the middle of both ends of the two sets of welding plates. A welding frame is installed in the middle of the welding plates. An adjusting slider is slidably arranged on the inner side of the welding frame. The bottom of the adjusting slider is elastically connected to the bottom of the inner side of the welding frame through a support spring. A fixed sleeve is welded and installed on one side of the adjusting slider. A rotating sleeve is rotatably arranged on the inner side of the fixed sleeve. A splicing prism is inserted into the inner side of the rotating sleeve. A connecting rod is welded and installed on the side of the splicing prism away from the rotating sleeve. A telescopic sleeve is movably arranged on the outer side of the end of the connecting rod away from the splicing prism.

[0009] Preferably, limit guide rods are welded and installed on both sides and in the middle of the inside of the welding frame, the support spring is located outside the limit guide rod in the middle, and two sets of guide wheels are rotatably arranged on the side of the welding frame away from the fixed sleeve.

[0010] Preferably, an adjusting pressure assembly is movably provided on the inner side of the triangular frame. The adjusting pressure assembly includes a movable sealing plate, which is slidably disposed inside the triangular frame. The upper end of the movable sealing plate is movably connected to the top of the inner side of the triangular frame through several sets of tension springs. Several sets of connecting guide rods are installed on the top of the movable sealing plate, and the connecting guide rods movably pass through the inner side of the upper end of the triangular frame. A movable rod is welded to the end of the connecting guide rod away from the movable sealing plate. Limiting rings are installed on the side of both ends of the welded frame away from the triangular frame.

[0011] Preferably, a first steel wire rope is installed on the side of both ends of the movable rod near the welding frame. The first steel wire rope is movably arranged inside the limiting ring. A small winch is provided on the outer side of the end of the first steel wire rope. A large winch is fixedly installed on the side of the small winch near the welding plate.

[0012] Preferably, a rotating shaft is fixedly installed in the middle of the large winch and the small winch. The rotating shaft is rotatably disposed on the side of the welding plate away from the triangular frame. A second steel wire rope is wound around the outer side of the large winch and is located at the top of the guide wheel. A rotating ring is fixedly installed at the end of the second steel wire rope away from the large winch, and a limit shaft is rotatably disposed in the middle of the rotating ring. The limit shaft is fixedly installed on the side of the adjusting slider away from the fixed sleeve.

[0013] Preferably, four sets of supporting columns are installed at the bottom of the collection pool, and a gear transmission assembly is installed on one side of the upper end of the collection pool. A drive motor is installed at the input end of the gear transmission assembly, and a rotating roller is fixedly installed at the output end of the gear transmission assembly. Several sets of cutting lines are evenly arranged on the surface of the rotating roller.

[0014] Preferably, a filter storage tank is installed on the side of the collection tank away from the gear transmission assembly, and the filter storage tank and the collection tank are connected by several sets of guide pipes. A delivery pump assembly is installed on the top of the filter storage tank, and a cooler is connected to the side of the delivery pump assembly away from the collection tank through a pipe. A main guide pipe is installed on the front and back of the cooler.

[0015] Preferably, a diverter is installed at the top of the main pipe, and two sets of transmission hoses are installed at the top of the diverter. One set of transmission hoses has a lower liquid supply head installed at the end, and the two ends of the lower liquid supply head are fixedly connected to the collection pool through a fixing plate. The other set of transmission hoses has an upper liquid supply head installed at the end, and the upper liquid supply head is fixedly connected to the triangular frame.

[0016] Preferably, a swing connection assembly is provided above the collection pool, and a clamping assembly is provided at the bottom of the swing connection assembly. The telescopic sleeve is fixedly installed on the inner side of both ends of the clamping assembly, and the bottom of the clamping assembly clamps the processing material.

[0017] A silicon carbide cutting method:

[0018] S1. Attach the silicon carbide wafer to the blue film and load it onto the dicing frame, ensuring support;

[0019] S2. Wind the metal wire with diamond abrasive grains on its surface onto a precision spool, apply high tension and calibrate the wire path;

[0020] S3. The wafer is subjected to contact slurry grinding and cutting through a high-speed cutting line with a line speed of about 10-15m / s and coolant. At the same time, the feed rate is controlled, usually <1mm / min, to balance efficiency and reduce edge chipping.

[0021] S4. After cutting, the silicon slag is removed by rinsing. The adhesion of the blue film is reduced by UV irradiation, and finally the individual chips are separated.

[0022] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0023] This invention, through the coordination of stabilizing adjustment components and clamping components, allows the side spray structure to be suspended on the side of the clamping component. During the downward pressing process, the spray structure remains fixed after contacting the top of the collection pool. Simultaneously, during the swinging process, the spray structure can move laterally to a certain extent to adjust its position, avoiding interference during the swinging process and ensuring normal operation of the device. The triangular frame can be connected by a welding plate, and the welding frame also provides restraint for the inner structure. The support spring pushes the adjusting slider upward. During the downward pressing of the clamping component and the processing material, the welding frame will first contact the collection pool, preventing the triangular frame of the spray from contacting the cutting line. At the same time, as the clamping component continues to move downward, it will drive the adjusting slider to move downward along the limit guide rod, connecting the spray structure to the main body to avoid movement interference. Furthermore, during the swinging process, it will drive the spray device to move laterally for fine adjustment, preventing the spray structure from contacting the processing material, effectively solving the problem of movement interference of the spray structure. At the same time, during the material swinging process, the cutting gap will be further directed towards the spray outlet area, improving the cooling effect of the spray wheel.

[0024] This invention utilizes a combination of adjustable pressurizing components and stabilizing components to increase pressure by narrowing the outlet area of ​​the triangular frame during the downward pressing process. This pressurization further injects liquid into the gaps of the silicon carbide, enhancing the cooling effect. The downward pressing of the adjusting slider allows the rotating ring to move the second steel wire rope downwards, pulling the large winch to rotate. Simultaneously, the small winch drives the first steel wire rope to pull the movable rod for adjustment. The movable rod, in conjunction with the connecting guide rod, pushes the movable sealing plate to slide along the inner side of the triangular frame, thereby reducing the area of ​​the triangular frame opening. By controlling the flow rate and narrowing the spray nozzle, the spray impact force is effectively increased, thus injecting liquid into the gaps of the processed material to achieve a cooling effect. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 This is a schematic diagram of the stabilization adjustment component structure of the present invention;

[0027] Figure 3 This is a schematic diagram of the triangular frame cross-sectional structure of the present invention;

[0028] Figure 4 This is a schematic cross-sectional view of the pressure regulating component of the present invention;

[0029] Figure 5 For the present invention Figure 4 Enlarged cross-sectional structural diagram at point C;

[0030] Figure 6For the present invention Figure 4 Enlarged structural diagram at point D;

[0031] Figure 7 For the present invention Figure 1 Enlarged structural diagram at point B;

[0032] Figure 8 For the present invention Figure 1 Enlarged structural diagram at point A in the middle.

[0033] In the diagram: 100, collection pool; 101, supporting column; 102, gear transmission assembly; 103, drive motor; 104, rotating roller; 105, cutting line;

[0034] 200. Filtered liquid storage tank; 201. Guide pipe; 202. Transfer pump assembly; 203. Cooler; 204. Main pipe; 205. Diverter; 206. Transfer hose; 207. Lower liquid supply head; 208. Upper liquid supply head; 209. Fixing plate;

[0035] 001. Adjustable pressurization component; 300. Triangular frame; 301. Tension spring; 302. Movable sealing plate; 303. Connecting guide rod; 304. Movable rod; 305. Limiting ring;

[0036] 400. Rotating ring; 401. First wire rope; 402. Small winch; 403. Large winch; 404. Rotating shaft; 405. Second wire rope; 406. Limiting shaft;

[0037] 002. Stabilizing and adjusting component; 500. Fixing sleeve; 501. Welding plate; 502. Welding frame; 503. Limiting guide rod; 504. Support spring; 505. Adjusting slider; 506. Guide wheel; 507. Rotating sleeve; 508. Connecting rod; 509. Splicing block; 510. Telescopic sleeve;

[0038] 600. Processing material; 601. Clamping assembly; 602. Swinging connection assembly. Detailed Implementation

[0039] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] like Figures 1 to 8 As shown, the present invention provides a silicon carbide cutting liquid supply device, including a collection pool 100, and a stabilizing adjustment component 002 is movably disposed on the top of the collection pool 100;

[0041] The stabilizing adjustment component 002 includes two sets of welding plates 501. Triangular frames 300 are welded and installed at the middle of both ends of the two sets of welding plates 501. A welding frame 502 is installed in the middle of the welding plate 501. An adjusting slider 505 is slidably arranged on the inner side of the welding frame 502. The bottom of the adjusting slider 505 is elastically connected to the bottom of the inner side of the welding frame 502 through a support spring 504. A fixing sleeve 500 is welded and installed on one side of the adjusting slider 505. A rotating sleeve 507 is rotatably arranged on the inner side of the fixing sleeve 500. A splicing prism 509 is spliced ​​and inserted into the inner side of the rotating sleeve 507. A connecting rod 508 is welded and installed on the side of the splicing prism 509 away from the rotating sleeve 507. A telescopic sleeve 510 is movably arranged on the outer side of the end of the connecting rod 508 away from the splicing prism 509.

[0042] Limiting guide rods 503 are welded and installed on both sides and in the middle of the inside of the welding frame 502. The support spring 504 is located outside the middle limiting guide rod 503. Two sets of guide wheels 506 are rotatably arranged on the side of the welding frame 502 away from the fixed sleeve 500.

[0043] Using the above scheme: the collection pool 100 provides an installation position and constraint for the internal structure and can collect the processing liquid. The welding plate 501 connects the welding frame 502 and the triangular frame 300. The triangular frame 300 provides space to ensure the liquid can be sprayed normally through the opening facing the processing material 600. The welding frame 502 provides constraint for the internal structure. The support spring 504 pushes the adjusting slider 505 to slide along the limiting guide rod 503. The limiting guide rod 503 can... The adjustment slider 505 is restricted to effectively increase the stability of sliding. The fixed sleeve 500 can restrict the rotating sleeve 507, so that the rotating sleeve 507 can be rotated and adjusted inside. The connecting rod 508 can insert the splicing block 509 into the inside of the rotating sleeve 507. After insertion, the splicing effect can be achieved. The telescopic sleeve 510 is a telescopic structure. With the help of the internal spring, the connecting rod 508 can slide and adjust along the inside of the telescopic sleeve 510. The guide wheel 506 can provide support for the second wire rope 405.

[0044] like Figure 3 , Figure 4 and Figure 6As shown, an adjusting pressure assembly 001 is movably provided on the inner side of the triangular frame 300. The adjusting pressure assembly 001 includes a movable sealing plate 302, which is slidably disposed inside the triangular frame 300. The upper end of the movable sealing plate 302 is movably connected to the top of the inner side of the triangular frame 300 through several sets of tension springs 301. Several sets of connecting guide rods 303 are installed on the top of the movable sealing plate 302, and the connecting guide rods 303 movably pass through the inner side of the upper end of the triangular frame 300. A movable rod 304 is welded to the end of the connecting guide rod 303 away from the movable sealing plate 302. Limiting rings 305 are installed on the side of the welding frame 502 away from the triangular frame 300 at both ends.

[0045] The first wire rope 401 is installed on the side of the movable rod 304 near the welding frame 502 at both ends. The first wire rope 401 is movably set inside the limiting ring 305. A small winch 402 is set on the outer side of the end of the first wire rope 401. A large winch 403 is fixedly installed on the side of the small winch 402 near the welding plate 501.

[0046] A rotating shaft 404 is fixedly installed in the middle of the large winch 403 and the small winch 402. The rotating shaft 404 is rotatably positioned on the side of the welding plate 501 away from the triangular frame 300. A second steel wire rope 405 is wound around the outside of the large winch 403, and the second steel wire rope 405 is located on the top of the guide wheel 506. A rotating ring 400 is fixedly installed at the end of the second steel wire rope 405 away from the large winch 403, and a limit shaft 406 is rotatably positioned in the middle of the rotating ring 400. The limit shaft 406 is fixedly installed on the side of the adjusting slider 505 away from the fixed sleeve 500.

[0047] Using the above scheme: the movable sealing plate 302 can slide stably inside the triangular frame 300. During the sliding process, adjusting the size of the opening of the triangular frame 300 facilitates the tension spring 301 to pull the movable sealing plate 302 back to its original position. Connecting the guide rod 303 and the movable rod 304 ensures that the position of the movable sealing plate 302 can be changed normally by pulling. The limiting ring 305 can restrict the first wire rope 401. The rotating shaft 404 is used to fix the large winch 403 and the small winch 402 and can provide the ability for both winches to rotate. The second wire rope 405 can pull the large winch 403 to rotate and adjust during the pressing of the adjusting slider 505. The limiting shaft 406 can provide the rotating ring 400 with the ability to rotate and adjust, ensuring stable rotation for adjustment.

[0048] like Figure 1 , Figure 7 and Figure 8As shown, four sets of support columns 101 are installed at the bottom of the collection pool 100, and a gear transmission assembly 102 is installed on one side of the upper end of the collection pool 100. A drive motor 103 is installed at the input end of the gear transmission assembly 102, and a rotating roller 104 is fixedly installed at the output end of the gear transmission assembly 102. Several sets of cutting lines 105 are evenly arranged on the surface of the rotating roller 104.

[0049] A filter storage tank 200 is installed on the side of the collection tank 100 away from the gear transmission assembly 102, and the filter storage tank 200 and the collection tank 100 are connected by several sets of guide pipes 201. A transfer pump assembly 202 is installed on the top of the filter storage tank 200, and a cooler 203 is connected to the side of the transfer pump assembly 202 away from the collection tank 100 through a pipe. A main guide pipe 204 is installed on the front and back of the cooler 203.

[0050] A diverter 205 is installed on the top of the main pipe 204, and two sets of transmission hoses 206 are installed on the top of the diverter 205. One set of transmission hoses 206 has a lower liquid supply head 207 installed at the end, and the two ends of the lower liquid supply head 207 are fixedly connected to the collection tank 100 through the fixing plate 209. The other set of transmission hoses 206 has an upper liquid supply head 208 installed at the end, and the upper liquid supply head 208 is fixedly connected to the triangular frame 300.

[0051] A swing connection assembly 602 is provided above the collection pool 100, and a clamping assembly 601 is provided at the bottom of the swing connection assembly 602. The telescopic sleeve 510 is fixedly installed on the inner side of both ends of the clamping assembly 601, and the bottom of the clamping assembly 601 clamps the processing material 600.

[0052] Using the above scheme: the support column 101 provides support for the collection tank 100, which in turn enables the drive motor 103 to drive the gear transmission assembly 102 to rotate. The gears inside the gear transmission assembly 102 drive the two sets of rotating rollers 104 to rotate synchronously, thereby causing the cutting line 105 to rotate rapidly to cut the processing material 600. The filtration and storage tank 200 collects and filters the liquid through the guide pipe 201, and the transfer pump assembly 202 guides the liquid into the cooler 203 for cooling, and then distributes it... The liquid is injected into the main conduits 204 on both sides. After passing through the distributor 205, it will be diverted again into the two sets of transmission hoses 206. The liquid can be sprayed out through the lower liquid supply head 207 to cool the cutting line 105. The swing connection assembly 602 needs to be adjusted by an external swing drive structure. The clamping assembly 601, in which the clamping structure is controlled by an external PLC controller, has a robotic arm at the bottom of the clamping assembly clamping the processing material to ensure that the processing material 600 can be pushed to contact the cutting line 105 for cutting.

[0053] The working principle and usage process of this invention are as follows: The liquid inside the filter storage tank 200 is extracted by the delivery pump assembly 202. After extraction, it is cooled by the cooler 203. Then, the cooler 203 diverts the liquid into the inside of the main pipe 204. The diverter 205 then injects the liquid into the lower liquid supply head 207 and the upper liquid supply head 208 respectively. The internal structure of the liquid supply head is used to evenly expand the flow area of ​​the liquid. Under the guidance of the lower liquid supply head 207, the liquid flows to the cutting line 105 for cooling.

[0054] An external drive device controls the swing connection assembly 602, clamping assembly 601, and processing material 600 to move downward and rotate. Through cooperation, they swing and contact the cutting line 105. The drive motor 103 drives two sets of rotating rollers 104 to rotate synchronously through the gear transmission assembly 102. The rotation drives the cutting line 105 to cut the swinging processing material 600. At the same time, the upper liquid supply head 208 introduces cooling liquid into the triangular frame 300 and flows out through the opening of the triangular frame 300 toward the processing material 600 to cool the processing material 600.

[0055] During the downward movement, the clamping component 601 and the stabilizing adjustment component 002 will move downward synchronously. During the downward movement, they will always remain horizontal under the action of gravity. When the welding plate 501 approaches the area of ​​the triangular frame 300 and contacts the top of the collection pool 100, the stabilizing adjustment component 002 will stop moving downward. The clamping component 601 will continue to move downward, which will drive the adjusting slider 505 to move downward steadily along the limiting guide rod 503 through the connecting rod 508.

[0056] During the downward movement, the rotating ring 400 will pull the second steel wire rope 405, which will drive the large winch 403 to rotate. During the rotation, the rotating shaft 404 will synchronously control the small winch 402 to rotate. During the rotation, the first steel wire rope 401 will be slowly pulled to slide along the inner side of the limiting ring 305. At the same time, the end of the sliding will pull the movable rod 304. During the movement, the movable rod 304 will push the movable sealing plate 302 to move along the adjustment cavity inside the triangular frame 300. The gradual adjustment of the end of the movable sealing plate 302 will reduce the size of the drain port of the triangular frame 300. While ensuring that the liquid supply remains unchanged, reducing the drain port will increase the liquid pressure. When the processing material 600 moves down to a certain extent, the cutting will have a certain depth. The pressurized liquid can rush into the gap to cool the inside during the rotation of the processing material 600.

[0057] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0058] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide cutting liquid supply device, comprising a collection tank (100), characterized in that: A stabilizing adjustment component (002) is movably provided on the top of the collection pool (100); The stabilizing adjustment component (002) includes two sets of welding plates (501). Triangular frames (300) are welded and installed at the middle of both ends of the two sets of welding plates (501). A welding frame (502) is installed in the middle of the welding plate (501). An adjusting slider (505) is slidably arranged on the inner side of the welding frame (502). The bottom of the adjusting slider (505) is elastically connected to the bottom of the inner side of the welding frame (502) through a support spring (504). A fixed sleeve (500) is welded and installed on one side of the adjusting slider (505). A rotating sleeve (507) is rotatably arranged on the inner side of the fixed sleeve (500). A splicing prism block (509) is spliced ​​and inserted into the inner side of the rotating sleeve (507). A connecting rod (508) is welded and installed on the side of the splicing prism block (509) away from the rotating sleeve (507). A telescopic sleeve (510) is movably arranged on the outer side of the end of the connecting rod (508) away from the splicing prism block (509). Limiting guide rods (503) are welded and installed on both sides and in the middle of the inside of the welding frame (502). The supporting spring (504) is located outside the limiting guide rod (503) in the middle. Two sets of guide wheels (506) are rotatably arranged on the side of the welding frame (502) away from the fixed sleeve (500). An adjusting pressure assembly (001) is movably provided on the inner side of the triangular frame (300). The adjusting pressure assembly (001) includes a movable sealing plate (302), which is slidably disposed inside the triangular frame (300). The upper end of the movable sealing plate (302) is movably connected to the top of the inner side of the triangular frame (300) through several sets of tension springs (301). Several sets of connecting guide rods (303) are installed on the top of the movable sealing plate (302), and the connecting guide rods (303) movably pass through the inner side of the upper end of the triangular frame (300). A movable rod (304) is welded to the end of the connecting guide rod (303) away from the movable sealing plate (302). Limiting rings (305) are installed on the side of both ends of the welded frame (502) away from the triangular frame (300). The movable rod (304) has a first steel wire rope (401) installed on one side of the two ends near the welding frame (502). The first steel wire rope (401) is movably arranged inside the limiting ring (305). A small winch (402) is provided on the outer side of the end of the first steel wire rope (401). A large winch (403) is fixedly installed on the side of the small winch (402) near the welding plate (501). A rotating shaft (404) is fixedly installed in the middle of the large winch (403) and the small winch (402). The rotating shaft (404) is rotatably disposed on the side of the welding plate (501) away from the triangular frame (300). A second steel wire rope (405) is wound around the outside of the large winch (403) and is located on the top of the guide wheel (506). A rotating ring (400) is fixedly installed at the end of the second steel wire rope (405) away from the large winch (403). A limit shaft (406) is rotatably disposed in the middle of the rotating ring (400). The limit shaft (406) is fixedly installed on the side of the adjusting slider (505) away from the fixed sleeve (500).

2. The silicon carbide cutting liquid supply device according to claim 1, characterized in that: The bottom of the collection pool (100) is equipped with four sets of support columns (101), and a gear transmission assembly (102) is installed on one side of the upper end of the collection pool (100). A drive motor (103) is installed at the input end of the gear transmission assembly (102), and a rotating roller (104) is fixedly installed at the output end of the gear transmission assembly (102). Several sets of cutting lines (105) are evenly arranged on the surface of the rotating roller (104).

3. The silicon carbide cutting liquid supply device according to claim 1, characterized in that: A filter storage tank (200) is installed on the side of the collection tank (100) away from the gear transmission assembly (102), and the filter storage tank (200) and the collection tank (100) are connected by a number of guide pipes (201). A delivery pump assembly (202) is installed on the top of the filter storage tank (200), and a cooler (203) is connected to the side of the delivery pump assembly (202) away from the collection tank (100) through a pipe. A main pipe (204) is installed on the front and back of the cooler (203).

4. The silicon carbide cutting liquid supply device according to claim 3, characterized in that: A diverter (205) is installed on the top of the main pipe (204), and two sets of transmission hoses (206) are installed on the top of the diverter (205). One set of transmission hoses (206) is equipped with a lower liquid supply head (207) at the end, and the two ends of the lower liquid supply head (207) are fixedly connected to the collection pool (100) through a fixing plate (209). The other set of transmission hoses (206) is equipped with an upper liquid supply head (208) at the end, and the upper liquid supply head (208) is fixedly connected to the triangular frame (300).

5. The silicon carbide cutting liquid supply device according to claim 1, characterized in that: A swing connection assembly (602) is provided above the collection pool (100), and a clamping assembly (601) is provided at the bottom of the swing connection assembly (602). The telescopic sleeve (510) is fixedly installed on the inner side of both ends of the clamping assembly (601), and the bottom of the clamping assembly (601) clamps the processing material (600).

6. A silicon carbide cutting method, the method being implemented based on a silicon carbide cutting liquid supply device according to any one of claims 1-5, characterized in that: S1. Attach the silicon carbide wafer to the blue film and load it onto the dicing frame, ensuring support; S2. Wind the metal wire with diamond abrasive grains on its surface onto a precision spool, apply high tension and calibrate the wire path; S3. The wafer is subjected to contact slurry grinding and cutting by a high-speed cutting line with a linear speed of 10-15m / s and coolant. At the same time, the feed rate is controlled to be <1mm / min to balance efficiency and reduce edge chipping. S4. After cutting, the silicon slag is removed by rinsing. The adhesion of the blue film is reduced by UV irradiation, and finally the individual chips are separated.

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