Combined special furnace crucible for synthesizing silicon carbide powder

The design of a combined crucible for a special furnace for silicon carbide powder synthesis solves the problems of local accumulation and thermal resistance differences during powder loading, achieves uniform laying of powder and stable synthesis in a high-temperature environment, improves the purity and consistency of the product, and reduces maintenance costs.

CN120819989APending Publication Date: 2025-10-21SHANDONG LIGUAN MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202511092110.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-05
Publication Date
2025-10-21

AI Technical Summary

Technical Problem

In the prior art, multi-layer stacked crucibles have problems such as local accumulation of powder, difference in thermal resistance and decreased product purity during the powder filling process. In addition, the existing integral leveling device destroys the sealing and combined structure of the multi-layer crucible and cannot meet the independent operation requirements of a single sub-crucible.

Method used

A combined crucible specially designed for silicon carbide powder synthesis is used. Through the synergistic effect of the spreading mechanism and the sliding fit between the clamping block and the support ring, the rotation resistance is reduced and the uniform diffusion of the powder is achieved. The design of the positioning block, stabilizing rod and graphite pad ensures the consistency of the distribution of temperature and concentration fields in each area, while providing a sealed and stable high-temperature environment.

Benefits of technology

It effectively avoids the problem of uneven powder layer thickness, improves the purity and crystal structure consistency of silicon carbide powder, reduces maintenance costs, and provides a clean and stable synthesis environment at high temperature, reducing product defects.

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Abstract

The invention belongs to the technical field of silicon carbide powder preparation, and particularly discloses a combined silicon carbide powder synthesis special furnace crucible which comprises a base plate, a mounting rod is connected to the middle of the lower end of the base plate, the upper end of the mounting rod penetrates and extends to the upper end of the base plate, and a supporting column is connected to the upper end of the mounting rod. First clamping grooves are evenly formed in the two sides of the supporting column, clamping blocks are evenly connected into the two first clamping grooves in a sliding mode, the clamping blocks are of an L-shaped structure, and sub-crucible bodies are connected to the lower portions of the outer walls of several clamping blocks and the lower portions of the outer walls of the other clamping blocks. According to the device, through the collaborative design of the precise spreading mechanism and a multi-layer stable sealing structure, uniform spreading, efficient synthesis and convenient operation of silicon carbide powder are achieved, and the powder synthesis quality and the production efficiency are remarkably improved.
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Description

Technical Field

[0001] The invention belongs to the technical field of silicon carbide powder preparation, and particularly relates to a combined special furnace crucible for synthesizing silicon carbide powder. Background Art

[0002] As a typical representative of the third-generation semiconductor materials, silicon carbide has irreplaceable application value in power electronics, microwave communications and other fields due to its excellent properties such as high hardness, high thermal conductivity and wide bandgap. The physical vapor transport method is currently the mainstream method for preparing high-purity silicon carbide polycrystalline powder. Its core process is to make high-purity silicon powder and carbon powder react in a crucible under high temperature environment to generate SiC powder. This process has extremely high requirements on the uniformity of the powder laying in the crucible. Uneven thickness of the powder layer will lead to differences in local reaction rates, which directly affects the purity and crystal structure consistency of the final product.

[0003] In the existing technology, multi-layer stacked crucibles are widely used because they can be flexibly combined according to the temperature field height. However, their powder filling process still has obvious limitations. Currently, the powder laying mainly relies on manual pouring, which not only easily leads to local accumulation of powder in the sub-crucible, causing differences in thermal resistance during high-temperature reactions and a decrease in product purity, but the existing integral leveling device will also destroy the sealing and combination structure of the multi-layer crucible, and cannot meet the needs of independent operation of a single sub-crucible. Summary of the Invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a combined crucible for a special furnace for synthesizing silicon carbide powder.

[0005] The lifting of the lifting policy 1 is to ensure that the lifting power of the lifting planar tube, the lifting power is 2.5-3.5 years that the lifting power is 4.1-5 forcing the lifting of the lifting planar tube to move upwards to the lifting position, so that the fuel tank can be kept in a state of low pressure and low energy. In the above technical solution, further, a stabilizing rod is connected to the lower end of the chassis corresponding to the lower part of the multiple positioning blocks, the upper ends of the multiple stabilizing rods extend through the interior of the chassis, positioning holes are opened on one side of the upper ends of the multiple positioning blocks, and the multiple stabilizing rods are respectively inserted into the multiple positioning holes, and mounting holes are opened at the upper end of the top plate corresponding to the multiple stabilizing rods.

[0006] In the above technical solution, further, multiple first stabilizing nuts are threadedly connected to the lower parts of the outer walls of the stabilizing rods, and multiple upper ends of the first stabilizing nuts are in contact with the lower end of the chassis; multiple second stabilizing nuts are threadedly connected to the upper parts of the outer walls of the stabilizing rods, and multiple lower ends of the second stabilizing nuts are in contact with the upper end of the top plate, so that multiple sub-crucible bodies can be fixedly clamped between the chassis and the top plate. In the above technical solution, further, graphite pads are connected to the bottom of the top plate and the lower ends of the multiple sub-crucible bodies, and positioning rings are connected to the middle of the upper ends and the middle of the lower ends of the multiple graphite pads. Positioning grooves are provided at the upper end of the chassis, the upper ends and lower ends of the multiple positioning blocks and the lower end of the top plate corresponding to the multiple positioning rings, and the multiple positioning rings are respectively inserted into the corresponding multiple positioning grooves. In the above technical solution, further, a first slide groove is opened on both sides of the upper end of the support column, and a first slider is slidably connected inside the two first slide grooves. The upper ends of the two first sliders are respectively connected to the two sides of the lower end of the support ring. The cross-sectional shapes of the first slide groove and the first slider are both convex structures to limit the sliding direction of the first slider in the first slide groove. The first slide groove is a semi-arc structure, and the extension angle of the first slide groove along the circumference of the upper end of the support column is 100 degrees, ensuring that the support ring can slide stably along this angle range.

[0007] In the above technical solution, further, the upper and lower parts of both sides of the inner wall of the support ring are connected with second sliders, and second sliding grooves are opened at the four second sliders on both sides of the outer wall of the support rod, and the multiple second sliders are respectively located in the corresponding multiple second sliding grooves and slide. The cross-sections of the second slider and the second sliding groove are both inverted convex structures, and the circumferential extension angle of the second sliding groove is adapted to the first sliding groove. The support ring can be rotated 90 degrees around the axis of the support rod through the coordinated sliding of the first slider and the second slider.

[0008] In the above technical solution, further, a first annular groove is provided on the lower part of both sides of the outer wall of the support ring, and the two clamping blocks are respectively located in the two first annular grooves and slide, and the upper part of one side of the clamping block is connected to a moving block, and one side of the moving block is embedded with a first ball, and a second annular groove is provided on one side of the inner wall of the two first annular grooves corresponding to the two moving blocks, and the two moving blocks are respectively located in the two second annular grooves, and one side of multiple first balls is respectively in contact with one side of the inner wall of the second annular groove, and a second ball is embedded in the middle part of the lower end of the clamping block, and the lower ends of multiple second balls are in contact with the upper end of the support column, which can reduce friction resistance when the sub-crucible body rotates.

[0009] In the above technical solution, further, a limiting hole is opened in the middle of the upper end of the support rod, a limiting rod is inserted into the limiting hole, the upper end of the limiting rod is connected to a limiting sleeve, and both sides of the upper end of the inner wall of the limiting sleeve are connected to limiting blocks, and the two limiting blocks are respectively inserted into the two second slots. The cross-sectional shape of the limiting hole and the cross-sectional shape of the limiting rod are both square structures, which can limit the support ring to prevent the support ring from changing its position when the sub-crucible body rotates to lay material on the outer wall of the support ring.

[0010] Compared with the prior art, the present invention has the following beneficial effects: Through the synergistic effect of the spreading mechanism, the sub-crucible body can achieve stable rotation through the sliding fit between the clamping block and the support ring. The first and second balls convert sliding friction into rolling friction, significantly reducing rotational resistance and allowing the powder to spread evenly under the action of centrifugal force. This design effectively avoids the uneven thickness of the powder layer caused by traditional manual spreading methods, ensuring consistent temperature and concentration field distribution in all areas during the reaction process, thereby improving the purity and crystal structure consistency of the silicon carbide powder.

[0011] The support ring and support column, through the adaptive structure of the clamping slot and the slide, achieves stable switching between the sub-crucible body and the synthesis position. The multi-layer sub-crucible body can be assembled by stacking the positioning blocks, stabilizing rods and graphite pads layer by layer, which not only meets the needs of different batches of powder materials, but also facilitates the replacement of individual sub-crucible layers, reducing maintenance costs. In addition, the combination of L-shaped clamping blocks and convex and inverted convex slides ensures the stability of the structural connection and provides convenient loading and unloading operations. The fit between the positioning ring and the positioning groove, and the connection between the stabilizing rod and the positioning hole limit the relative displacement of each component in the radial and axial directions, ensuring that the multi-layer sub-crucible does not shift during the high-temperature synthesis process; the graphite pad achieves interlayer sealing under the action of clamping force, effectively blocking the intrusion of external impurities and preventing the leakage of internal reaction gas, providing a clean and stable high-temperature environment for the synthesis of silicon carbide powder, and reducing product defects caused by environmental fluctuations. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure proposed by the present invention; Figure 2 This is a schematic diagram of the installation structure of the sub-crucible body and the support ring proposed in the present invention; Figure 3 A cross-sectional view of the support rod proposed by the present invention; Figure 4 This is a schematic diagram of the structure for opening the positioning holes proposed in the present invention; Figure 5 This is a schematic diagram of the installation structure of the card block proposed in the present invention; Figure 6 This is a schematic diagram of the installation structure of the second slider proposed in the present invention; Figure 7 This is a schematic diagram of the installation structure of the limit block proposed in the present invention; Figure 8 This is a schematic diagram of the structure of the positioning groove proposed in the present invention; Figure 9 This is a schematic diagram of the opening structure of the first chute proposed in the present invention; Figure 10 This is a schematic diagram of the structure of the second annular groove proposed in the present invention.

[0013] In the figure: 1. chassis; 2. mounting rod; 3. support column; 4. first slot; 5. clamping block; 6. sub-crucible body; 7. positioning block; 8. stabilizing rod; 9. positioning hole; 10. top plate; 11. graphite pad; 12. positioning ring; 13. positioning slot; 14. support rod; 15. first slide slot; 16. first slider; 17. support ring; 18. second slider; 19. second slide slot; 20. second clamping slot; 21. first annular groove; 22. moving block; 23. second annular groove; 24. limiting hole; 25. limiting rod; 26. limiting sleeve; 27. limiting block. DETAILED DESCRIPTION

[0014] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0015] like Figures 1-10The crucible of a combined silicon carbide powder synthesis furnace shown in the figure includes a chassis 1, a mounting rod 2 is connected to the middle of the lower end of the chassis 1, the upper end of the mounting rod 2 extends through the upper end of the chassis 1, and the upper end of the mounting rod 2 is connected to a support column 3. First card slots 4 are evenly opened on both sides of the support column 3, and a card block 5 is evenly and slidably connected inside the two first card slots 4. The shape of the card block 5 is an L-shaped structure. The lower part of the outer wall of multiple card blocks 5 is connected to a sub-crucible body 6, and multiple sub-crucible bodies 6 are sleeved on the card blocks 5 on both sides of the inner wall. The outer wall of the support column 3 and the outer walls of the multiple sub-crucible bodies 6 are circumferentially connected with positioning blocks 7, one of the sub-crucible bodies 6 is connected with a top plate 10, and the middle part of the upper end of the support column 3 is connected with a material spreading mechanism, which includes a support rod 14 and a support ring 17. The support ring 17 is sleeved on the outer wall of the support rod 14, and second slots 20 are respectively provided on both sides of the support ring 17 corresponding to the two first slots 4. The shape of the second slot 20 is adapted to the shape of the first slot 4, so that the block 5 can be sleeved into the interior of the support ring 17. The mounting rod 2 serves as the bottom supporting member of the entire device, providing stable vertical support for the upper structure. The support column 3 is coaxially arranged with the mounting rod 2 to form the central supporting skeleton of the device. The L-shaped block 5 can simultaneously realize vertical and horizontal limiting. The L-shaped block 5 can simultaneously realize vertical and horizontal limiting. The connection between the block 5 and the sub-crucible body 6 adopts a rigid fixing method to ensure that the two move synchronously. An adaptive gap is left between the sub-crucible body 6 and the support column 3, which is convenient for the installation and disassembly of the sub-crucible body 6 and can ensure a certain coaxiality. The positioning block 7 is arranged along the sub-crucible body. 6 is evenly distributed on the outer wall, further enhancing the structural stability of the sub-crucible body 6. The top plate 10 seals and vertically compresses the uppermost sub-crucible body 6. The spreading mechanism can achieve uniform spreading of powder. The support rod 14 provides central support for the support ring 17, and the support ring 17 serves as a temporary bearing structure when spreading the sub-crucible body 6. The support ring 17 and the support rod 14 are in a relatively rotatable matching relationship. The design of the first card slot 4 and the second card slot 20 enables the card block 5 to switch smoothly between the first card slot 4 and the second card slot 20, providing a structural basis for the position conversion of the sub-crucible body 6.

[0016] The lower end of the chassis 1 corresponds to the lower part of the multiple positioning blocks 7, and the upper ends of the multiple stabilizing bars 8 extend through the interior of the chassis 1. Positioning holes 9 are provided on one side of the upper ends of the multiple positioning blocks 7, and the multiple stabilizing bars 8 are respectively inserted into the interior of the multiple positioning holes 9. The upper end of the top plate 10 corresponds to the multiple stabilizing bars 8 and has mounting holes. The lower part of the outer wall of the multiple stabilizing bars 8 is threadedly connected with a first stabilizing nut. The upper ends of the multiple first stabilizing nuts are in contact with the lower end of the chassis 1, and the upper part of the outer wall of the multiple stabilizing bars 8 is threadedly connected with a second stabilizing nut. The lower end of the second stabilizing nut contacts the upper end of the top plate 10, and the multiple sub-crucible bodies 6 can be fixedly clamped between the bottom plate 1 and the top plate 10. A graphite pad 11 is connected to the bottom of the top plate 10 and the lower ends of the multiple sub-crucible bodies 6. The middle parts of the upper ends and the middle parts of the lower ends of the multiple graphite pads 11 are connected to positioning rings 12. The upper end of the bottom plate 1, the upper ends and lower ends of the multiple positioning blocks 7 and the lower end of the top plate 10 are respectively provided with positioning grooves 13 corresponding to the multiple positioning rings 12. The multiple positioning rings 12 are respectively inserted into the corresponding multiple positioning grooves 13; Stabilizing rods 8 are distributed circumferentially along the chassis 1, providing lateral restraint for the entire device from the bottom. The interlocking engagement of the stabilizing rods 8 with the positioning holes 9 restricts horizontal displacement of the sub-crucible body 6. The mounting holes provide passageways for the stabilizing rods 8 to pass through the top plate 10. A first stabilizing nut abuts against the bottom end of the chassis 1, securing the lower end of the stabilizing rods 8 to the chassis 1. A second stabilizing nut abuts against the upper end of the top plate 10, cooperating with the first stabilizing nut to vertically clamp the entire stacked structure, ensuring a tight fit between the layers. The graphite pads 11, made of high-temperature-resistant graphite, maintain stability in high-temperature environments while also providing a sealing and cushioning function, preventing wear and tear caused by direct contact between adjacent components. The interlocking engagement of the positioning rings 12 with the positioning grooves 13 further precisely defines the relative position of the graphite pads 11 and adjacent components, ensuring that the pads 11 accurately perform their sealing and cushioning functions while enhancing the integrity of the entire device.

[0017] A first chute 15 is provided on both sides of the upper end of the support column 3, and a first slider 16 is slidably connected inside the two first chute 15. The upper ends of the two first sliders 16 are respectively connected to the two sides of the lower end of the support ring 17. The cross-sectional shapes of the first chute 15 and the first slider 16 are both convex structures to limit the sliding direction of the first slider 16 in the first chute 15. The first chute 15 is a semi-arc structure. The extension angle of the first chute 15 along the circumference of the upper end of the support column 3 is 100 degrees, ensuring that the support ring 17 can slide stably along this angle range. The inner wall of the support ring 17 The upper and lower parts of both sides are connected to second sliders 18, and second slide grooves 19 are opened at the four second sliders 18 on both sides of the outer wall of the support rod 14. The multiple second sliders 18 are respectively located in the corresponding multiple second slide grooves 19 and slide. The cross-sections of the second sliders 18 and the second slide grooves 19 are both inverted convex structures. The circumferential extension angle of the second slide groove 19 is adapted to the first slide groove 15. The support ring 17 can be rotated 90 degrees around the axis of the support rod 14 through the coordinated sliding of the first slider 16 and the second slider 18. The lower part of the outer wall of the support ring 17 on both sides is provided with a second slide groove 19. An annular groove 21, two clamping blocks 5 are respectively located in the two first annular grooves 21 and slide therein, a moving block 22 is connected to the upper part of one side of the clamping block 5, and a first ball is embedded on one side of the moving block 22. A second annular groove 23 is opened at one side of the inner wall of the two first annular grooves 21 corresponding to the two moving blocks 22, and the two moving blocks 22 are respectively located in the two second annular grooves 23. One side of the plurality of first balls is in contact with one side of the inner wall of the second annular groove 23, and a second ball is embedded in the middle of the lower end of the clamping block 5. The lower ends of the plurality of second balls are in contact with the upper end of the support column 3, which can be rotated on the sub-crucible body. 6 reduces friction resistance when rotating. A limiting hole 24 is provided in the middle of the upper end of the support rod 14. A limiting rod 25 is inserted into the limiting hole 24. The upper end of the limiting rod 25 is connected to a limiting sleeve 26. Both sides of the upper end of the inner wall of the limiting sleeve 26 are connected to limiting blocks 27. The two limiting blocks 27 are respectively inserted into the two second slots 20. The cross-sectional shape of the limiting hole 24 and the cross-sectional shape of the limiting rod 25 are both arranged in a square structure, which can limit the support ring 17 and prevent the support ring 17 from changing its position when the sub-crucible body 6 rotates to lay material on the outer wall of the support ring 17; The first slider 16 and the first slide groove 15 slide together to provide a lower guide for the rotation of the support ring 17. The convex structure can prevent the first slider 16 from escaping from the first slide groove 15, ensuring the stability of the sliding process. The second slider 18 and the second slide groove 19 slide together to provide an upper guide for the rotation of the support ring 17, and cooperate with the first slider 16 and the first slide groove 15 at the bottom to jointly ensure the coaxiality of the support ring 17 during rotation. The inverted convex structure also prevents the second slider 18 from escaping from the second slide groove 19, thereby enhancing the reliability of the structural connection. The first annular groove 21 To provide a trajectory for the rotation of the clamping block 5, the setting of the first ball converts the sliding friction between the moving block 22 and the second annular groove 23 into rolling friction, and the second ball converts the sliding friction between the clamping block 5 and the support column 3 into rolling friction, and works together with the first ball to significantly reduce the resistance of the sub-crucible body 6 during rotation, making the operation more labor-saving. The square structure of the limit hole 24 cooperates with the limit rod 25 to limit the relative rotation between the two, and then the position of the support ring 17 is fixed by plugging the limit block 27 into the second clamping groove 20, providing a guarantee for the stable rotation and material laying of the sub-crucible body 6.

[0018] Working principle: With the chassis 1 as the reference, the graphite pad 11 is first placed on the upper end of the chassis 1. The positioning ring 12 at the lower end of the graphite pad 11 is precisely fitted into the positioning groove 13 at the upper end of the chassis 1 to complete the initial positioning of the graphite pad 11, providing a sealing and buffering foundation for the subsequent placement of the sub-crucible body 6; Before installation, first rotate the support ring 17 90 degrees so that the first clamping groove 4 of the support column 3 and the second clamping groove 20 of the support ring 17 are not in the same plane. Then, the sub-crucible body 6 is sleeved on the outside of the support ring 17, and the two clamping blocks 5 are respectively clamped into the inside of the second clamping groove 20 of the support ring 17. At this time, the lower end of the L-shaped clamping block 5 on the inner wall of the sub-crucible body 6 contacts the upper end of the support column 3, and the second ball at the lower end of the clamping block 5 rolls in contact with the upper end of the support column 3, thereby temporarily fixing the sub-crucible body 6 along the support ring 17; After adding the silicon powder and carbon powder mixture into the sub-crucible body 6, the stability of the material spreading is ensured by a limiting mechanism: the limiting rod 25 is inserted into the limiting hole 24 of the support rod 14, and the limiting block 27 of the limiting sleeve 26 is inserted into the second slot 20 of the support ring 17. The limiting rod 25 with a square structure cooperates with the limiting hole 24 to limit the circumferential displacement of the support ring 17, providing a stable reference for the rotation of the sub-crucible body 6. The sub-crucible body 6 is moved, driving the clamping block 5 and the moving block 22 to rotate in the first annular groove 21 and the second annular groove 23 of the support ring 17, respectively: the upper end of the clamping block 5 slides along the first annular groove 21, and the first ball on one side of the moving block 22 contacts the inner wall of the second annular groove 23, significantly reducing the rotational friction resistance; during the rotation process, the powder is diffused circumferentially toward the sub-crucible body 6 under the action of centrifugal force, achieving uniform laying and avoiding local accumulation; After the material is laid, remove the limiting rod 25 and the limiting sleeve 26, rotate the support ring 17 so that the second slot 20 and the first slot 4 of the support column 3 are at the same horizontal plane, and the clamping block 5 slides from the second slot 20 into the first slot 4. The sub-crucible body 6 is separated from the support ring 17 and directly sleeved on the outside of the support column 3, completing the precise positioning in the axial and circumferential directions; During the downward movement of the sub-crucible body 6, the two clamping blocks 5 slide down through the first clamping groove 4, and then the stabilizing rod 8 on the chassis 1 is sequentially inserted into the positioning hole 9 and the positioning groove 13 of the positioning block 7, further limiting the radial deviation of the sub-crucible body 6; at the same time, the positioning ring 12 at the upper end of the lower graphite pad 11 is engaged with the positioning groove 13 at the lower end of the positioning block 7 of the sub-crucible body 6, achieving a stable interlayer connection between the sub-crucible body 6 and the graphite pad 11; The graphite pads 11 are stacked in the order of first and then the sub-crucible bodies 6: the positioning ring 12 at the lower end of each layer of graphite pads 11 is engaged with the positioning groove 13 at the upper end of the positioning block 7 of the lower sub-crucible, and the upper end positioning ring 12 is clamped into the positioning groove 13 below the multiple positioning blocks 7 on the outer wall of the upper sub-crucible body 6, providing a positioning reference. The layer-by-layer positioning structure ensures the consistency of the multi-layer sub-crucible bodies 6 in the axial and radial directions; After the multi-layer sub-crucible and graphite pad 11 are stacked, the top plate 10 is positioned by the stabilizing rod 8, and the lower part of the first stabilizing nut and the upper part of the second stabilizing nut on the outer wall of the stabilizing rod 8 are tightened so that the sub-crucible body 6 is clamped and fixed between the chassis 1 and the top plate 10. The graphite pad 11 is slightly deformed under the action of pressure, filling the gap between the layers to achieve sealing, providing a stable and enclosed space for the synthesis of silicon carbide powder in a high-temperature environment, and preventing external impurities from invading and internal reaction gas leakage.

[0019] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. Various changes and improvements are possible without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the invention as claimed.

Claims

1. A combined crucible for a special furnace for synthesizing silicon carbide powder, comprising a chassis (1), characterized in that: The middle part of the lower end of the chassis (1) is connected to a mounting rod (2), the upper end of the mounting rod (2) extends through the upper end of the chassis (1), the upper end of the mounting rod (2) is connected to a support column (3), first card slots (4) are evenly provided on both sides of the support column (3), and card blocks (5) are evenly slidably connected inside the two first card slots (4), and the shape of the card blocks (5) is set in an L-shaped structure. The lower parts of the outer walls of the plurality of card blocks (5) are connected to sub-crucible bodies (6), and the plurality of sub-crucible bodies (6) are sleeved on the outer wall of the support column (3) through the card blocks (5) on both sides of the inner wall. The outer wall of the crucible body (6) is circumferentially connected with a positioning block (7), one of the sub-crucible bodies (6) is connected with a top plate (10), and the middle part of the upper end of the support column (3) is connected with a material spreading mechanism, and the material spreading mechanism includes a support rod (14) and a support ring (17), and the support ring (17) is sleeved on the outer wall of the support rod (14). The support ring (17) has two second card slots (20) on both sides corresponding to the two first card slots (4), and the shape of the second card slot (20) is adapted to the shape of the first card slot (4), so that the card block (5) can be sleeved into the inside of the support ring (17).

2. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: The lower end of the chassis (1) is connected to a stabilizing rod (8) corresponding to the lower portion of the plurality of positioning blocks (7). The upper ends of the plurality of stabilizing rods (8) extend through the interior of the chassis (1). Positioning holes (9) are provided on one side of the upper ends of the plurality of positioning blocks (7). The plurality of stabilizing rods (8) are respectively plugged into the interior of the plurality of positioning holes (9). The upper end of the top plate (10) is provided with mounting holes corresponding to the plurality of stabilizing rods (8).

3. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 2, characterized in that: The lower parts of the outer walls of the plurality of stabilizing rods (8) are threadedly connected with first stabilizing nuts, and the upper ends of the plurality of first stabilizing nuts are in contact with the lower end of the bottom plate (1). The upper parts of the outer walls of the plurality of stabilizing rods (8) are threadedly connected with second stabilizing nuts, and the lower ends of the plurality of second stabilizing nuts are in contact with the upper end of the top plate (10), so that the plurality of sub-crucible bodies (6) can be fixedly clamped between the bottom plate (1) and the top plate (10).

4. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: A graphite pad (11) is connected to the bottom of the top plate (10) and the lower ends of the multiple sub-crucible bodies (6); the middle parts of the upper ends and the middle parts of the lower ends of the multiple graphite pads (11) are connected to positioning rings (12); the upper end of the chassis (1), the upper ends and lower ends of the multiple positioning blocks (7) and the lower end of the top plate (10) are respectively provided with positioning grooves (13) corresponding to the multiple positioning rings (12); the multiple positioning rings (12) are respectively inserted into the corresponding multiple positioning grooves (13).

5. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: A first slide groove (15) is provided on both sides of the upper end of the support column (3), and a first slider (16) is slidably connected inside the two first slide grooves (15). The upper ends of the two first sliders (16) are respectively connected to the two sides of the lower end of the support ring (17). The cross-sectional shapes of the first slide groove (15) and the first slider (16) are both convex structures to limit the sliding direction of the first slider (16) in the first slide groove (15). The first slide groove (15) is a semi-arc structure. The extension angle of the first slide groove (15) along the circumference of the upper end of the support column (3) is 100 degrees, ensuring that the support ring (17) can slide stably along this angle range.

6. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: The upper and lower parts of both sides of the inner wall of the support ring (17) are connected with second sliders (18), and second slide grooves (19) are respectively opened at the four second sliders (18) on both sides of the outer wall of the support rod (14). The plurality of second sliders (18) are respectively located in the corresponding plurality of second slide grooves (19) for sliding. The cross sections of the second sliders (18) and the second slide grooves (19) are both inverted convex structures. The circumferential extension angle of the second slide groove (19) is adapted to the first slide groove (15). The support ring (17) can be rotated 90 degrees around the axis of the support rod (14) through the coordinated sliding of the first slider (16) and the second slider (18).

7. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: The lower part of both sides of the outer wall of the support ring (17) is provided with a first annular groove (21), the two clamping blocks (5) are respectively located in the two first annular grooves (21) and slide, the upper part of one side of the clamping block (5) is connected with a moving block (22), one side of the moving block (22) is embedded with a first ball, the inner wall of the two first annular grooves (21) is provided with a second annular groove (23) corresponding to the two moving blocks (22), the two moving blocks (22) are respectively located in the two second annular grooves (23), one side of the plurality of first balls is in contact with one side of the inner wall of the second annular groove (23), the middle part of the lower end of the clamping block (5) is embedded with a second ball, the lower ends of the plurality of second balls are in contact with the upper end of the support column (3), and the friction resistance can be reduced when the sub-crucible body (6) rotates.

8. The combined crucible for a special furnace for synthesizing silicon carbide powder according to claim 1, characterized in that: A limiting hole (24) is provided in the middle of the upper end of the support rod (14), a limiting rod (25) is inserted into the limiting hole (24), the upper end of the limiting rod (25) is connected to the limiting sleeve (26), both sides of the upper end of the inner wall of the limiting sleeve (26) are connected to limiting blocks (27), and the two limiting blocks (27) are respectively inserted into the inside of the two second slots (20), and the cross-sectional shape of the limiting hole (24) and the cross-sectional shape of the limiting rod (25) are both arranged in a square structure, which can limit the support ring (17) and prevent the support ring (17) from changing position when the sub-crucible body (6) rotates and lays material on the outer wall of the support ring (17).