IPA cleaning machine

Abstract

The invention relates to the technical field of semiconductor processing, in particular to an IPA cleaning machine which comprises a workbench and a conveying mechanism arranged at the top of the workbench. The three-axis displacement mechanism is arranged on the top of the workbench and located above the conveying mechanism. And the cleaning mechanism is installed on the three-axis displacement mechanism and used for cleaning the semiconductor on the top of the tray, the cleaning mechanism comprises a cleaning installation block and cleaning foam arranged on the cleaning installation block, and a foam replacement structure is arranged on the cleaning installation block and used for rapid disassembly and assembly of the cleaning foam. A semiconductor to be cleaned is conveyed through the horizontal conveying assembly, the semiconductor is jacked to a cleaning position through the jacking assembly, the tray is positioned through the positioning assembly, then the position of the cleaning mechanism is adjusted through the three-axis displacement mechanism, the semiconductor is cleaned through the cleaning mechanism, and the cleaning efficiency is improved. The method comprises the following steps: firstly, spraying a target product by using a spraying valve, and then wiping the product by using deionized cleaning cloth; and the product cleaning efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to an IPA cleaning machine. Background Art

[0002] The integrated circuit industry is the core of the information technology industry, playing a crucial role in promoting the digital and intelligent transformation and upgrading of the manufacturing industry. Semiconductor chips are the carriers of integrated circuits. During chip manufacturing, a large amount of particulate matter remains on the surface of semiconductor chips after chemical mechanical polishing, thus requiring post-processing such as cleaning and drying. Existing semiconductor cleaning processes typically use IPA (isopropyl alcohol) spraying. IPA is a colorless, flammable liquid with the characteristic pungent odor of alcohols.

[0003] In the semiconductor manufacturing and precision instrument processing industries, product cleanliness directly impacts product quality and performance. Traditional cleaning methods primarily include manual wiping, ultrasonic cleaning, and chemical solvent immersion. Manual wiping is highly reliant on manpower and inefficient, leading some manufacturers to utilize automated cleaning equipment. However, in existing processes, the contact between cleaning solutions and atomized gas particles in the workspace creates particulate contaminants. Consequently, these particulate contaminants adhere to the semiconductor chip surface after processing by existing automated cleaning equipment, affecting surface cleaning and drying effectiveness. Furthermore, after a period of use, existing automated cleaning equipment requires complete disassembly and replacement of the entire unit when the cleaning components in contact with the semiconductor chip surface become dirty, resulting in significant downtime and low replacement efficiency. Therefore, improvements are needed. Summary of the Invention

[0004] To address the problems of poor semiconductor surface cleaning performance and low efficiency in replacing cleaning components mentioned in the background art, this application provides an IPA cleaning machine.

[0005] The IPA cleaning machine provided in this application adopts the following technical solution: An IPA cleaning machine includes a workbench with a conveying mechanism on top. The conveying mechanism includes a tray for placing semiconductors to be cleaned and is used to convey the tray in both horizontal and vertical directions. The workbench is equipped with a three-axis displacement mechanism; the three-axis displacement mechanism is equipped with a cleaning mechanism for cleaning the semiconductors on the top of the tray. The cleaning mechanism includes a cleaning mounting block and a cleaning foam disposed thereon. The cleaning mounting block is equipped with a foam replacement structure. The foam replacement structure includes a support plate disposed inside the cleaning foam. Side wing plates are disposed on both sides of the top of the support plate. A disassembly and assembly transmission assembly is disposed on the top of the side wing plates. Locking assemblies are disposed on the cleaning mounting block and on both sides of the cleaning foam. The disassembly and assembly transmission assembly is used to drive the locking assemblies to fix or loosen the cleaning foam.

[0006] By adopting the above technical solution, the semiconductor to be cleaned is conveyed by a horizontal conveying component, lifted to the cleaning position by a lifting component, and positioned by a positioning component. Then, the position of the cleaning mechanism is adjusted by a three-axis displacement mechanism, and the semiconductor is cleaned by the cleaning mechanism. First, the target product is sprayed using a spray valve, and then the product is wiped with deionized cleaning foam; thus improving the cleaning efficiency of the product.

[0007] Optionally, the conveying mechanism includes a fixed conveying frame and an adjustable conveying frame disposed opposite to each other on the top of the worktable. The fixed conveying frame is fixed to the top of the worktable, and the adjustable conveying frame is slidably connected to the top of the worktable. The bottom ends of the adjustable conveying frame are threaded with first threaded rods, which are rotatably connected to the top of the worktable. A first motor is installed on the top of the worktable, and the output end of the first motor is fixedly connected to one of the first threaded rods. One end of each of the two first threaded rods is fixed with a first pulley, and the outer sides of the two first pulleys are connected with a first transmission belt. By adopting the above technical solution, the distance between the adjustable conveyor and the fixed conveyor can be adjusted by starting the first motor to accommodate the cleaning of semiconductors of different specifications and improve adaptability.

[0008] Optionally, a second motor is installed on the opposite side of both the fixed conveyor frame and the adjustable conveyor frame. Several drive sprockets are symmetrically rotatably connected to the opposite side of the fixed conveyor frame and the adjustable conveyor frame. Conveyor chains are connected to several sprockets on the same side. The output end of the second motor passes through the fixed conveyor frame or the adjustable conveyor frame and is fixedly connected to one of the drive sprockets on the same side. The tray is placed on top of the two conveyor chains, and several carriers are fixed on the tray. By adopting the above technical solution, the pallet is horizontally conveyed through the cyclical movement of the conveyor chain to reach the cleaning position, which can achieve continuous conveying and improve cleaning efficiency.

[0009] Optionally, a lifting mounting frame is fixed at the top of the workbench and between the fixed conveyor frame and the adjustable conveyor frame. A lifting cylinder is installed at the bottom of the lifting mounting frame. The output end of the lifting cylinder passes through the lifting mounting frame and is fixed with a lifting plate. The lifting plate is slidably connected to the lifting mounting frame. Blocking cylinders are installed on both sides of one end of the lifting mounting frame. A blocking block is fixed at the output end of the blocking cylinder. Several blocking mounting boxes are installed on the side of the lifting mounting frame away from the blocking cylinder. A blocking wedge is rotatably connected to the inside of the blocking mounting box. An elastic element is provided between the blocking wedge and the blocking mounting box. The two ends of the elastic element abut against the blocking wedge and the blocking mounting box, respectively. By adopting the above technical solution, the pallet can be transported to a vertical cleaning position via the lifting component, ready for cleaning.

[0010] Optionally, a positioning cylinder is installed opposite to the top of the fixed conveyor frame and the adjustable conveyor frame. A positioning plate is fixed to the output end of the positioning cylinder, and the positioning plate is slidably connected to the top of the corresponding fixed conveyor frame or the adjustable conveyor frame. By adopting the above technical solution, the position of the tray is positioned using positioning components, preventing the tray from moving during the cleaning process and improving the accuracy of cleaning.

[0011] Optionally, crossbeams are fixed on both sides of the top of the worktable. The three-axis displacement mechanism includes a transverse drive electric cylinder installed on the top of one of the crossbeams. A transverse displacement plate is fixed to the output end of the transverse drive electric cylinder. The transverse displacement plate is slidably connected to the top of the other crossbeam. A longitudinal drive electric cylinder is installed on the transverse displacement plate. A longitudinal displacement plate is fixed to the output end of the longitudinal drive electric cylinder. The longitudinal displacement plate is slidably connected to the transverse displacement plate. A vertical drive electric cylinder is installed on the longitudinal displacement plate. A vertical displacement plate is installed to the output end of the vertical drive electric cylinder. The vertical displacement plate is slidably connected to the longitudinal displacement plate. By adopting the above technical solution, the three-degree-of-freedom displacement adjustment of the cleaning mechanism can be realized through the three-axis displacement mechanism, thus achieving multi-position cleaning in the horizontal plane.

[0012] Optionally, the cleaning mechanism includes an unwinding rod and a rewinding rod rotatably connected to both sides of the vertical displacement plate. An unwinding roller and a rewinding roller are respectively inserted into the outer sides of the unwinding rod and the rewinding rod. A third motor is mounted on the vertical displacement plate, and a drive pulley is fixed to the output end of the third motor. A transmission pulley is fixed to one end of the rewinding rod, and a second transmission belt is connected to the outer side of the drive pulley and the transmission pulley. An adjusting cylinder is mounted on the vertical displacement plate and located between the bottom of the unwinding roller and the rewinding roller. The cleaning mounting block is mounted on the output end of the adjusting cylinder. The cleaning foam is detachably installed inside the cleaning mounting block. Several tensioning guide rollers are rotatably connected to the vertical displacement plate on both sides of the top of the cleaning mounting block. After the cleaning cloth is unwound from the unwinding roller, it passes over the cleaning foam and the several tensioning guide rollers and is then wound onto the take-up roller. An antistatic ion spray gun is installed on the vertical displacement plate on one side of the adjusting cylinder. Spray valves are installed on the vertical displacement plate on both sides of the top of the cleaning mounting block. A pressure tank assembly is installed on the workbench. The output end of the pressure tank assembly is connected to the input end of the spray valve through a conduit. By adopting the above technical solution, the unwinding and rewinding of the cleaning cloth can be achieved through the setting of the unwinding and rewinding rollers. Waste cloth is collected while cleaning, which improves environmental protection and facilitates the subsequent treatment of waste cloth.

[0013] Optionally, the disassembly and assembly transmission assembly includes a drive rack fixed to the top of the side wing plate, a drive shaft rotatably connected to the middle of the inner side of the cleaning mounting block and above the support plate, a first gear that can mesh with the drive rack is fixed at both ends of the outer side of the drive shaft, a second gear is fixed at both ends of the drive shaft, and a third gear is meshed with the bottom of the second gear. The locking assembly includes a detachable cover plate that is screwed onto the cleaning mounting block and located on the opposite side of the two third gears. The third gear is rotatably connected to the corresponding detachable cover plate. An adjusting screw is threaded onto the inner side of the detachable cover plate. One end of the adjusting screw passes through the corresponding third gear and is rotatably connected to a positioning tooth plate. The positioning tooth plate has several horizontally arranged teeth on the side near the cleaning foam. Several guide rods are fixed on the side of the positioning tooth plate away from the cleaning foam. The positioning tooth plate is slidably connected to the inner side of the cleaning mounting block through the several guide rods. The end of the adjusting screw away from the positioning tooth plate extends out of the corresponding detachable cover plate and is fixed with an adjusting knob. By adopting the above technical solution and through the structural design of the foam replacement structure, it is easy to quickly disassemble and replace the cleaning foam, reduce downtime, and thus improve production efficiency.

[0014] Optionally, the adjusting screw has several locking grooves on its outer periphery, and the third gear has several locking strips on its inner side that match the locking grooves. The third gear engages with and slides with the adjusting screw through the cooperation of the locking strips and the locking grooves.

[0015] By adopting the above technical solution, the third gear can drive the adjusting screw to rotate when it rotates, and the third gear and the adjusting screw can be slidably connected. This reduces the complexity of the mechanical structure by using a simple structure to achieve a complex function.

[0016] Optionally, a roll changing mechanism is provided at one end of the workbench. The roll changing mechanism includes a support frame installed on the unwinding roller and the take-up roller. A spring is fixed at the bottom of the support frame, and a positioning rod abuts against the lower part of the spring. Several positioning holes are opened at the ends of the unwinding rod and the take-up rod. The bottom end of the positioning rod is inserted into the inner side of the corresponding positioning hole. A roll changing frame is rotatably connected to one end of the top of the workbench. A first roll changing rod and a second roll changing rod corresponding to the unwinding rod and the take-up rod are fixed at both ends of the roll changing frame near the unwinding rod and the take-up rod, respectively. Several insertion holes matching the positioning rod are opened on the ends of the first roll changing rod and the second roll changing rod away from the unwinding rod. A turntable is fixed in the middle of the side of the roll changing frame away from the first roll changing rod.

[0017] By adopting the above technical solution, the unwinding roll and the take-up roll can be replaced simultaneously through the roll changing mechanism, thereby improving the replacement efficiency.

[0018] In summary, this application includes at least one of the following beneficial technical effects: This application uses a conveying mechanism to transport semiconductors to be cleaned. First, the semiconductors are lifted to the cleaning position and the tray is positioned. Then, the position of the cleaning mechanism is adjusted by a three-axis displacement mechanism, and the semiconductors are cleaned by the cleaning mechanism. First, the target product is sprayed using a spray valve, and then the product is wiped with a deionized cleaning cloth, thereby improving the cleaning efficiency of the product.

[0019] This application utilizes a foam replacement structure design to facilitate quick and easy disassembly and replacement of the cleaning foam. When removal is needed, the adjustment knob is turned counter-clockwise. Once the two indicator arrows align, the positioning toothed plate clamps the cleaning foam, preventing it from falling while allowing slight movement. The cleaning foam and support plate are then pulled out. During extraction, the drive rack engages, completely disengaging the positioning toothed plate from the cleaning foam for easy reinstallation. For reinstallation, the cleaning foam is placed on the support plate and inserted into the cleaning installation block. During insertion, the drive rack first contacts and engages with the first gear, rotating the adjustment screw. The driving positioning toothed plate gradually contacts the cleaning foam, applying pre-tension to prevent it from falling. The operator can then release the cleaning foam and simultaneously turn the adjustment knob with both hands, avoiding the need to drag the cleaning foam with one hand while adjusting the knob, thus improving the efficiency of cleaning foam replacement, reducing downtime, and ultimately increasing production efficiency.

[0020] This application, through the structural design of the roll changing mechanism, allows for the simultaneous replacement of the unwinding roll and the rewinding roll, improving replacement efficiency and convenience. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of an IPA cleaning machine according to an embodiment of this application.

[0022] Figure 2 This is a schematic diagram of the main view structure of an embodiment of this application.

[0023] Figure 3 This is a schematic diagram of the structure of the fixed conveyor frame, the adjustable conveyor frame, and the first threaded rod in an embodiment of this application.

[0024] Figure 4 This is a schematic diagram of the structure of the horizontal conveying component according to an embodiment of this application.

[0025] Figure 5 This is a schematic diagram of the lifting component in an embodiment of this application.

[0026] Figure 6 This is a structural schematic diagram of the three-axis displacement mechanism according to an embodiment of this application.

[0027] Figure 7 This is a schematic diagram of the cleaning mechanism in an embodiment of this application.

[0028] Figure 8 This is a schematic diagram of the antistatic ion spray gun and spray valve in an embodiment of this application.

[0029] Figure 9 This is a schematic diagram of the drive pulley, transmission pulley, and second transmission belt in an embodiment of this application.

[0030] Figure 10This is a schematic diagram of the structure of the cleaning mounting block and cleaning foam in an embodiment of this application.

[0031] Figure 11 This is a cross-sectional schematic diagram of the foam replacement structure in an embodiment of this application.

[0032] Figure 12 This is a cross-sectional axial view of the foam replacement structure according to an embodiment of this application.

[0033] Figure 13 This is a schematic diagram of the structure of the second and third gears in the embodiments of this application.

[0034] Explanation of reference numerals in the attached figures: 100. Conveying mechanism; 200. Three-axis displacement mechanism; 300. Cleaning mechanism; 400. Roll changing mechanism; 500. Workbench; 101. Fixed conveyor frame; 102. Adjustable conveyor frame; 103. First threaded rod; 104. First motor; 105. First pulley; 106. First transmission belt; 107. Second motor; 108. Conveyor chain; 109. Pallet; 110. Carrier; 111. Blocking cylinder; 12. Blocking block; 113. Lifting mounting bracket; 114. Lifting cylinder; 115. Lifting plate; 116. Blocking mounting box; 117. Blocking wedge; 118. Positioning cylinder; 119. Positioning plate; 201. Lateral drive cylinder; 202. Lateral displacement plate; 203. Longitudinal drive cylinder; 204. Longitudinal displacement plate; 205. Vertical drive cylinder; 206. Vertical displacement plate; 301. Unwinding rod; 302. Rewinding rod Insert rod; 303, unwinding roller; 304, take-up roller; 305, tension guide roller; 306, third motor; 307, drive pulley; 308, transmission pulley; 309, second transmission belt; 310, adjusting cylinder; 311, cleaning mounting block; 312, cleaning foam; 313, support plate; 314, spray valve; 315, drive rack; 316, first gear; 317, drive shaft; 318, second gear; 31 9. Third gear; 320. Adjusting screw; 321. Positioning toothed plate; 322. Adjusting knob; 323. Removable cover plate; 324. Side wing plate; 325. Guide rod; 326. Snap-fit ​​groove; 327. Antistatic ion spray gun; 328. Pressure tank assembly; 401. Roll changing frame; 402. First roll changing insert rod; 403. Second roll changing insert rod; 404. Support frame; 405. Positioning rod; 406. Spring; 408. Turntable. Detailed Implementation

[0035] To enable those skilled in the art to better understand the technical solution of this application, the following will be described in conjunction with the appendix. Figure 1-13 This application will now be described in further detail.

[0036] Reference Figure 1-13This application provides an IPA cleaning machine, including a workbench 500, a conveying mechanism 100 on the top of the workbench 500, the conveying mechanism 100 including a tray 109 for placing semiconductors to be cleaned, and the conveying mechanism 100 for conveying the tray 109 in the horizontal and vertical directions. A three-axis displacement mechanism 200 is provided on the workbench 500; a cleaning mechanism 300 for cleaning the semiconductors on the top of the tray 109 is installed on the three-axis displacement mechanism 200. The cleaning mechanism 300 includes a cleaning mounting block 311 and a cleaning foam 312 disposed thereon. The cleaning mounting block 311 is provided with a foam replacement structure. The foam replacement structure includes a support plate 313 disposed inside the cleaning foam 312. Side wing plates 324 are fixedly installed on both sides of the top of the support plate 313. The top of the side wing plates 324 is provided with a disassembly and assembly transmission assembly to facilitate quick disassembly and assembly of the cleaning foam 312. A locking assembly is provided on the cleaning mounting block 311 and on both sides of the cleaning foam 312. The disassembly and assembly transmission assembly is connected to the locking assembly to drive the locking assembly to fix or release the cleaning foam 312.

[0037] The semiconductor to be cleaned is transported by a conveying mechanism, first lifted to the cleaning position, then the tray 109 is positioned, and then the position of the cleaning mechanism 300 is adjusted by a three-axis displacement mechanism 200, and the semiconductor is cleaned by the cleaning mechanism 300.

[0038] Reference Figure 3-4 The conveying mechanism 100 includes a fixed conveyor frame 101 and an adjustable conveyor frame 102 disposed on both sides of the top of the workbench 500. The fixed conveyor frame 101 is fixed to the top of the workbench 500, and the adjustable conveyor frame 102 is slidably connected to the top of the workbench 500. Two first threaded rods 103 are rotatably disposed on the top of the workbench 500, and both ends of the adjustable conveyor frame 102 are threadedly connected to the two first threaded rods 103 respectively. A first motor 104 is mounted on the top of the workbench 500, and the output end of the first motor 104 is fixedly connected to one of the first threaded rods 103. One end of each of the two first threaded rods 103 is fixed with a first pulley 105, and the two first pulleys 105 are connected by a first transmission belt 106.

[0039] When it is necessary to adjust the distance between the fixed conveyor frame 101 and the adjustable conveyor frame 102, the first motor 104 drives the corresponding first threaded rod 103 to rotate, and drives another first threaded rod 103 to rotate synchronously through the first pulley 105 and the first transmission belt 106, thereby driving the adjustable conveyor frame 102 to move away from or closer to the fixed conveyor frame 101, so as to adjust the distance between the fixed conveyor frame 101 and the adjustable conveyor frame 102.

[0040] Reference Figure 3-4The horizontal conveying assembly includes two second motors 107, one of which is mounted on a fixed conveyor frame 101 and the other on an adjustable conveyor frame 102. Multiple drive sprockets are rotatably connected to both the fixed and adjustable conveyor frames 101 and 102, respectively. A conveyor chain 108 is also provided on each of the two conveyor frames. The multiple drive sprockets on each conveyor frame are connected via the respective conveyor chains 108. The output end of each second motor 107 passes through the side wall of the conveyor frame and is fixedly connected to one of the drive sprockets. A tray 109 is placed on top of the two conveyor chains 108, and several carriers 110 are fixed on the tray 109.

[0041] When the pallet 109 is horizontally conveyed, the second motor 107 starts and drives the conveyor chain 108 to move through several drive sprockets. The cyclical movement of the conveyor chain 108 drives the pallet 109 to move, thereby conveying it horizontally.

[0042] Reference Figure 5 The lifting assembly includes a lifting mounting frame 113 fixed to the top of the workbench 500 and located between the fixed conveyor frame 101 and the adjustable conveyor frame 102. A lifting cylinder 114 is installed at the bottom of the lifting mounting frame 113. The output end of the lifting cylinder 114 passes through the lifting mounting frame 113 and is fixed with a lifting plate 115. The lifting plate 115 is slidably connected to the lifting mounting frame 113. Blocking cylinders 111 are installed on both sides of one end of the lifting mounting frame 113. A blocking block 112 is fixed at the output end of the blocking cylinder 111. Several blocking mounting boxes 116 are installed on the side of the lifting mounting frame 113 away from the blocking cylinder 111. A blocking wedge 117 is rotatably connected to the inside of the blocking mounting box 116. An elastic element is provided between the blocking wedge 117 and the blocking mounting box 116. The two ends of the elastic element abut against the blocking wedge 117 and the blocking mounting box 116 respectively.

[0043] When the horizontal conveying assembly transports the pallet 109 to near the blocking block 112, the blocking cylinder 111 is activated, causing the blocking block 112 to rise, thus blocking the pallet 109. At the same time, the pallet 109 moves from the blocking wedge 117 toward the blocking block 112. When the pallet 109 passes the blocking wedge 117, it will press it down. When the pallet 109 is abutted by the blocking block 112, the blocking wedge 117 disengages from the bottom of the pallet 109 and is ejected by the elastic element, so that its end face abuts the other end of the pallet 109 to perform horizontal lateral positioning. Subsequently, the lifting cylinder 114 is activated, causing the lifting plate 115 to rise, and the lifting plate 115 lifts the pallet 109 and transports it upward.

[0044] Reference Figure 4The positioning assembly includes two positioning cylinders 118 respectively mounted on the top of the fixed conveyor frame 101 and the adjustable conveyor frame 102. A positioning plate 119 is fixed to the output end of each positioning cylinder 118, and the positioning plate 119 is slidably connected to the top of the corresponding fixed conveyor frame 101 or adjustable conveyor frame 102. When the pallet 109 is transported vertically between the two positioning plates 119, the positioning cylinders 118 are activated, causing the two positioning plates 119 to move closer together and clamp the pallet 109 for positioning.

[0045] Reference Figure 6 A crossbeam is fixed on both sides of the top of the workbench 500 and above the conveying mechanism 100. The three-axis displacement mechanism 200 includes a transverse drive electric cylinder 201 installed on the crossbeam at the top of the workbench 500. A transverse displacement plate 202 is fixed to the output end of the transverse drive electric cylinder 201. The transverse displacement plate 202 is slidably connected to the top of another crossbeam. A longitudinal drive electric cylinder 203 is installed on the transverse displacement plate 202. A longitudinal displacement plate 204 is fixed to the output end of the longitudinal drive electric cylinder 203. The longitudinal displacement plate 204 is slidably connected to the transverse displacement plate 202. A vertical drive electric cylinder 205 is installed on the longitudinal displacement plate 204. A vertical displacement plate 206 is installed to the output end of the vertical drive electric cylinder 205. The vertical displacement plate 206 is slidably connected to the longitudinal displacement plate 204.

[0046] When the lateral drive cylinder 201 is activated, it can drive the lateral displacement plate 202 to move laterally in the horizontal direction. When the longitudinal drive cylinder 203 is activated, it can drive the longitudinal displacement plate 204 to move longitudinally in the horizontal direction. When the vertical drive cylinder 205 is activated, it can drive the vertical displacement plate 206 to move vertically in the vertical direction. This enables three-degree-of-freedom adjustment of the cleaning mechanism 300, so as to facilitate multi-position cleaning work in the space.

[0047] Reference Figure 7-9The cleaning mechanism 300 includes an unwinding rod 301 and a winding rod 302 rotatably connected to both sides of a vertical displacement plate 206. An unwinding roller 303 and a winding roller 304 are respectively inserted into the outer sides of the unwinding rod 301 and the winding rod 302. A third motor 306 is mounted on the vertical displacement plate 206. A drive pulley 307 is fixed to the output end of the third motor 306. A transmission pulley 308 is fixed to one end of the winding rod 302. The drive pulley 307 and the transmission pulley 308 are connected by a second transmission belt 309. An adjusting cylinder 310 is mounted on the vertical displacement plate 206 between the bottom of the unwinding roller 303 and the winding roller 304. A cleaning mounting block 311 is mounted on the output end of the adjusting cylinder 310. A cleaning foam 312 is also mounted. The cleaning cloth is detachably mounted on the cleaning mounting block 311. Several tensioning guide rollers 305 are rotatably connected to the vertical displacement plate 206 on both sides of the top of the cleaning mounting block 311. After the cleaning cloth is unwound from the unwinding roller 303, it passes over the cleaning foam 312 and several tensioning guide rollers 305 and is then wound onto the take-up roller 304. In use, the cleaning cloth is wound around the outside of the unwinding roller 303. The free end of the cleaning cloth passes over the tensioning guide roller 305 and passes over the bottom of the cleaning foam 312 and is then connected to the outer periphery of the take-up roller 304.

[0048] An antistatic ion spray gun 327 is installed on the vertical displacement plate 206 and on one side of the regulating cylinder 310. Spray valves 314 are installed on the vertical displacement plate 206 and on both sides of the top of the cleaning mounting block 311. A pressure tank group 328 is installed on the workbench 500. The output end of the pressure tank group 328 is connected to the input end of the spray valve 314 through a conduit.

[0049] When cleaning is performed, the third motor 306 starts and drives the drive pulley 307 to rotate, which in turn drives the transmission pulley 308 to rotate via the second transmission belt 309. The rotation of the transmission pulley 308 drives the take-up roller 304 to rotate and continuously wind the cleaning cloth, so that the cleaning cloth is continuously unwound from the unwind roller 303. This ensures that the cleaning cloth is always clean, and at the same time, the waste cloth after cleaning can be wound up to prevent secondary contamination of the semiconductor.

[0050] The spray valve 314 is supplied with high-pressure fluid by the pressure tank assembly 328. The working principle of the pressure tank supplying high-pressure fluid is existing technology and will not be elaborated here. It is equipped with a flow meter to ensure that the spray volume is the same each time. Before wiping with a new section of the cleaning cloth, the anti-static ion spray gun 327 is activated to remove static electricity. In use, spray first through the spray valve 314, then wipe with the cleaning cloth, and then move to the new product for the same operation.

[0051] Reference Figure 10-13The disassembly and assembly of the transmission assembly includes a drive rack 315 fixed to the top of the side wing plate 324, a drive shaft 317 rotatably connected to the inner middle of the cleaning mounting block 311 and above the support plate 313, a first gear 316 that can mesh with the drive rack 315 is fixed at both ends of the outer side of the drive shaft 317, a second gear 318 is fixed at both ends of the drive shaft 317, and a third gear 319 is meshed at the bottom of the second gear 318; The locking assembly includes a disassembly cover plate 323 that is mounted on the cleaning mounting block 311 by screws and is located on the opposite side of the two third gears 319. The third gears 319 are rotatably connected to the corresponding disassembly cover plate 323. An adjusting screw 320 is threadedly connected to the inner side of the disassembly cover plate 323. One end of the adjusting screw 320 passes through the corresponding third gear 319 and is rotatably connected to a positioning tooth plate 321. The positioning tooth plate 321 has several teeth arranged laterally on the side near the cleaning foam 312. Several guide rods 325 are fixed on the side of the positioning tooth plate 321 away from the cleaning foam 312. The positioning tooth plate 321 is slidably connected to the inner side of the cleaning mounting block 311 through the several guide rods 325. The end of the adjusting screw 320 away from the positioning tooth plate 321 extends out of the corresponding disassembly cover plate 323 and is fixed with an adjusting knob 322.

[0052] The adjusting screw 320 has several locking grooves 326 axially formed on its outer periphery, and the third gear 319 has several locking strips that match the locking grooves 326 on its inner side. The third gear 319 is engaged with the adjusting screw 320 and slidably connected through the engagement of the locking strips and the locking grooves 326.

[0053] It should be noted that the drive rack 315 is only fixed to one end of the top of the side wing plate 324, and when the cleaning foam 312 is fully installed inside the cleaning mounting block 311, the drive rack 315 and the first gear 316 are not engaged and are in a disengaged state.

[0054] When it is necessary to remove the cleaning foam 312 from the inside of the cleaning mounting block 311, first, turn the adjusting knobs 322 on both sides counterclockwise with both hands simultaneously. This will cause the adjusting knobs 322 to drive the adjusting screws 320 to rotate. When the adjusting screws 320 rotate counterclockwise, since they are threadedly connected to the corresponding disassembly cover 323, the adjusting screws 320 will move outwards as they rotate, thereby gradually loosening the top of the cleaning foam 312 from the positioning teeth 321 on both sides. The disassembly cover 323 and the adjusting knobs 322 are pre-marked with indicator arrows. When the adjusting knobs 322 are turned counterclockwise until the two indicator arrows are aligned, the positioning teeth 321 will hold the cleaning foam 312 in place, preventing it from falling off while allowing it to move slightly. Then, release the adjusting knobs 322 and pull the cleaning foam 312 and the support plate 313 out from the inside of the cleaning mounting block 311. During the extraction process, the drive rack 315 will contact the first gear 316. At this time, the chamfer of the first gear 316 is exactly matched with the chamfer of the drive rack 315 and meshes with it. Then, as the cleaning foam 312 and the support plate 313 are pulled outward, the drive rack 315 will drive the first gear 316 to rotate. The first gear 316 drives the second gear 318 to rotate through the transmission shaft 317, which in turn drives the third gear 319 to rotate, thereby causing the adjusting screw 320 to rotate counterclockwise. This allows the positioning toothed plate 321 to completely disengage from the cleaning foam 312 during the extraction process, so as to facilitate the subsequent installation of the cleaning foam 312.

[0055] When it is necessary to install the cleaning foam 312 inside the cleaning mounting block 311, the cleaning foam 312 is placed over the outside of the support plate 313, and then the cleaning foam 312 and the support plate 313 are inserted into the inside of the cleaning mounting block 311. During the insertion process, the drive rack 315 will first contact and mesh with the first gear 316. As the insertion continues, the drive rack 315 drives the first gear 316 to rotate, and through the first gear 316, it sequentially drives the transmission shaft 317, the second gear 318, the third gear 319, and the adjusting screw 320 to rotate. When the adjusting screw 320 rotates, it will drive the positioning toothed plate. The 321 moves inward and gradually contacts the cleaning foam 312, generating a certain pre-tightening force. When the cleaning foam 312 is fully inserted into the inner side of the cleaning mounting block 311, the clamping force provided by the positioning tooth plates 321 on both sides can prevent the cleaning foam 312 from falling off. Then, the operator can release the cleaning foam 312 and simultaneously rotate the adjustment knob 322 with both hands to move the positioning tooth plates 321 closer to the cleaning foam 312 and clamp it. This avoids having to drag the cleaning foam 312 with one hand while adjusting the adjustment knob 322 with the other, and allows for simultaneous adjustment of both adjustment knobs 322, improving the efficiency of replacing the cleaning foam 312.

[0056] Reference Figure 6 and Figure 8A winding mechanism 400 is provided on the workbench 500. The winding mechanism 400 includes a support frame 404 mounted on the unwinding roller 303 and the take-up roller 304. A spring 406 is fixed to the bottom of the support frame 404, and a positioning rod 405 abuts against the bottom of the spring 406. Several positioning holes are opened at the ends of the unwinding rod 301 and the take-up rod 302. The bottom end of the positioning rod 405 is inserted into the inner side of the corresponding positioning hole. A winding frame 4 is rotatably connected to one end of the top of the workbench 500. 01. At both ends of the roll changer 401, near the unwinding rod 301 and the winding rod 302, there are respectively a first roll changer 402 and a second roll changer 403 corresponding to the unwinding rod 301 and the winding rod 302. The first roll changer 402 and the second roll changer 403 are provided with several insertion holes that match the positioning rod 405 on the end away from the unwinding rod 301. A turntable 408 is fixed in the middle of the side of the roll changer 401 away from the first roll changer 402. When the clean cleaning cloth on the unwind roller 303 runs out, the unwind roller 303 and the take-up roller 304 need to be replaced. At this time, the operator rotates the turntable 408, causing the roll changing frame 401 to rotate, so that the first roll changing rod 402 and the second roll changing rod 403 are in a horizontal state, leaving the first roll changing rod 402 and the second roll changing rod 403 near the cleaning mechanism 300 empty. At the same time, the new unwind roller 303 and the take-up roller 304 to be replaced are respectively inserted into the first roll changing rod 402 and the second roll changing rod 403 at the end away from the cleaning mechanism 300. Then, the horizontal drive cylinder 201, the vertical drive cylinder 203, and the vertical drive cylinder 205 are activated to move the unwind rod 301 and the take-up rod 302 to a position opposite to the first roll changing rod 402 and the second roll changing rod 403, and close to the first roll changing rod 402 and the second roll changing rod 303. 3. At this point, the first rewinding rod 402 and the unwinding rod 301 are collinear, and the take-up roller 304 is collinear with the take-up rod 302. Then, the operator moves the positioning rod 405 upwards to disengage it from the inside of the unwinding rod 301 and the take-up rod 302. Then, while moving the positioning rod 405, the operator pulls the unwinding roller 303 and the take-up roller 304, inserting them into the first rewinding rod 402 and the second rewinding rod 403 respectively, and then releases the positioning rod 405, so that the positioning rod 405 is inserted into the insertion hole to position the unwinding roller 303 and the take-up roller 304. Then, the operator rotates the turntable 408 180 degrees, and then installs the new unwinding roller 303 and the new take-up roller 304 located on the first rewinding rod 402 and the second rewinding rod 403 onto the corresponding unwinding rod 301 and the take-up roller 302.

[0057] It should be noted that a limiting structure for the rotation of the roll changer 401 can be provided on the top of the workbench 500, such as an arc-shaped groove, so that the rotation angle of the roll changer 401 is 180 degrees.

[0058] The working principle of the IPA cleaning machine provided in this application is as follows: In use, the staff first places the semiconductor to be cleaned onto the carrier 110. Then, the second motor 107 starts and drives the conveyor chain 108 through several drive sprockets. The cyclical movement of the conveyor chain 108 drives the pallet 109 to move, thereby conveying it horizontally. When the horizontal conveying assembly transports the pallet 109 to near the blocking block 112, the blocking cylinder 111 is activated, causing the blocking block 112 to rise, thus blocking the pallet 109. At the same time, the pallet 109 moves from the blocking wedge 117 toward the blocking block 112. When the pallet 109 passes the blocking wedge 117, it will press it down. When the pallet 109 is abutted by the blocking block 112, the blocking wedge 117 disengages from the bottom of the pallet 109 and is ejected by the elastic element, so that its end face abuts the other end of the pallet 109 to perform horizontal lateral positioning. Then, the lifting cylinder 114 is activated, causing the lifting plate 115 to rise, and the lifting plate 115 lifts the pallet 109 and transports it upward. When the pallet 109 is transported vertically between the two positioning plates 119, the positioning cylinder 118 is activated to drive the two positioning plates 119 to move closer and clamp the pallet 109 to position it. During cleaning, the horizontal drive cylinder 201, the vertical drive cylinder 203, and the vertical drive cylinder 205 are activated to move the spray valve 314 to the top of the semiconductor to be cleaned. Then, the spray valve 314 sprays the semiconductor. Subsequently, the horizontal drive cylinder 201, the vertical drive cylinder 203, and the vertical drive cylinder 205 are activated to move the cleaning foam 312 to the top of the semiconductor after spraying. The cleaning foam 312 can provide soft support for the cleaning cloth and prevent damage to the electronic components to be cleaned. Then, the third motor 306 is activated to drive the drive pulley 307 to rotate, which in turn drives the transmission pulley 308 to rotate through the second transmission belt 309. The rotation of the transmission pulley 308 drives the take-up roller 304 to rotate and continuously wind the cleaning cloth, so that the cleaning cloth is continuously unwound from the unwind roller 303, thereby cleaning the semiconductor. Before replacing the cleaning cloth with a new section for wiping, the anti-static ion spray gun 327 is activated to remove static electricity.

[0059] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. An IPA cleaning machine, characterized in that: Includes a workbench (500), the top of which is provided with a conveying mechanism (100), the conveying mechanism (100) includes a tray (109) for placing semiconductors to be cleaned, the conveying mechanism (100) is used to convey the tray (109) in the horizontal and vertical directions; The workbench (500) is provided with a three-axis displacement mechanism (200); the three-axis displacement mechanism (200) is equipped with a cleaning mechanism (300) for cleaning the semiconductor on the top of the tray (109). The cleaning mechanism (300) includes a cleaning mounting block (311) and a cleaning foam (312) disposed thereon. The cleaning mounting block (311) is provided with a foam replacement structure. The foam replacement structure includes a support plate (313) disposed inside the cleaning foam (312). Side wing plates (324) are provided on both sides of the top of the support plate (313). The top of the side wing plate (324) is provided with a disassembly and assembly transmission assembly. Locking assemblies are provided on the cleaning mounting block (311) and on both sides of the cleaning foam (312). The disassembly and assembly transmission assembly is used to drive the locking assembly to fix or loosen the cleaning foam (312).

2. The IPA cleaning machine according to claim 1, characterized in that: The conveying mechanism (100) includes a fixed conveying frame (101) and an adjustable conveying frame (102) disposed opposite to each other on the top of the workbench (500). The fixed conveying frame (101) is fixed on the top of the workbench (500), and the adjustable conveying frame (102) is slidably connected to the top of the workbench (500). The bottom ends of the adjustable conveying frame (102) are threaded with first threaded rods (103), and the first threaded rods (103) are rotatably connected to the top of the workbench (500). A first motor (104) is installed on the top of the workbench (500). The output end of the first motor (104) is fixedly connected to one of the first threaded rods (103). One end of each of the two first threaded rods (103) is fixed with a first pulley (105), and the outer sides of the two first pulleys (105) are connected with a first transmission belt (106).

3. An IPA cleaning machine according to claim 2, characterized in that: A second motor (107) is installed on the opposite side of the fixed conveyor frame (101) and the adjustable conveyor frame (102). Several drive sprockets are symmetrically rotatably connected to the opposite side of the fixed conveyor frame (101) and the adjustable conveyor frame (102). Conveyor chains (108) are connected to several sprockets on the same side. The output end of the second motor (107) passes through the fixed conveyor frame (101) or the adjustable conveyor frame (102) and is fixedly connected to one of the drive sprockets on the same side. The tray (109) is placed on top of the two conveyor chains (108). Several carriers (110) are fixed on the tray (109).

4. An IPA cleaning machine according to claim 3, characterized in that: A lifting mounting frame (113) is fixed on the top of the workbench (500) and located between the fixed conveyor frame (101) and the adjustable conveyor frame (102). A lifting cylinder (114) is installed at the bottom of the lifting mounting frame (113). The output end of the lifting cylinder (114) passes through the lifting mounting frame (113) and is fixed with a lifting plate (115). The lifting plate (115) is slidably connected to the lifting mounting frame (113). Obstructions are installed on both sides of one end of the lifting mounting frame (113). The cylinder (111) has a blocking block (112) fixed at its output end. The lifting mounting bracket (113) has several blocking mounting boxes (116) installed on the side away from the blocking cylinder (111). A blocking wedge (117) is rotatably connected to the inside of the blocking mounting box (116). An elastic element is provided between the blocking wedge (117) and the blocking mounting box (116). The two ends of the elastic element abut against the blocking wedge (117) and the blocking mounting box (116) respectively.

5. An IPA cleaning machine according to claim 4, characterized in that: Positioning cylinders (118) are installed opposite to the top of the fixed conveyor frame (101) and the adjustable conveyor frame (102). A positioning plate (119) is fixed to the output end of the positioning cylinder (118). The positioning plate (119) is slidably connected to the top of the corresponding fixed conveyor frame (101) or the adjustable conveyor frame (102).

6. An IPA cleaning machine according to claim 5, characterized in that: The workbench (500) has crossbeams fixed on both sides of its top. The three-axis displacement mechanism (200) includes a transverse drive cylinder (201) installed on the top of one of the crossbeams. A transverse displacement plate (202) is fixed to the output end of the transverse drive cylinder (201). The transverse displacement plate (202) is slidably connected to the top of the other crossbeam. A longitudinal drive cylinder (203) is installed on the transverse displacement plate (202). A longitudinal displacement plate (204) is fixed to the output end of the longitudinal drive cylinder (203). The longitudinal displacement plate (204) is slidably connected to the transverse displacement plate (202). A vertical drive cylinder (205) is installed on the longitudinal displacement plate (204). A vertical displacement plate (206) is installed to the output end of the vertical drive cylinder (205). The vertical displacement plate (206) is slidably connected to the longitudinal displacement plate (204).

7. An IPA cleaning machine according to claim 6, characterized in that: The cleaning mechanism (300) includes an unwinding rod (301) and a winding rod (302) rotatably connected to both sides of the vertical displacement plate (206). An unwinding roller (303) and a winding roller (304) are respectively inserted into the outer sides of the unwinding rod (301) and the winding rod (302). A third motor (306) is mounted on the vertical displacement plate (206). A drive pulley (307) is fixed to the output end of the third motor (306). A transmission pulley (308) is fixed to one end of the winding rod (302). A second transmission belt (309) is connected to the outer side of the drive pulley (307) and the transmission pulley (308). An adjusting cylinder (310) is mounted on the vertical displacement plate (206) and located between the bottom of the unwinding roller (303) and the winding roller (304). The cleaning mounting block (311) is mounted on the adjusting cylinder (310). At the output end of the cleaning foam (312), the cleaning foam (312) is detachably installed inside the cleaning mounting block (311). Several tensioning guide rollers (305) are rotatably connected on the vertical displacement plate (206) and on both sides of the top of the cleaning mounting block (311). After the cleaning cloth is unwound from the unwinding roller (303), it passes around the cleaning foam (312) and several tensioning guide rollers (305) and is then wound onto the winding roller (304). An antistatic ion spray gun (327) is installed on the vertical displacement plate (206) and on one side of the adjusting cylinder (310). Spray valves (314) are installed on the vertical displacement plate (206) and on both sides of the top of the cleaning mounting block (311). A pressure tank group (328) is installed on the workbench (500). The output end of the pressure tank group (328) is connected to the input end of the spray valve (314) through a conduit.

8. An IPA cleaning machine according to claim 7, characterized in that: The disassembly and assembly transmission assembly includes a drive rack (315) fixed to the top of the side wing plate (324), a drive shaft (317) rotatably connected to the inner middle of the cleaning mounting block (311) and above the support plate (313), a first gear (316) that can mesh with the drive rack (315) is fixed at both ends of the outer side of the drive shaft (317), a second gear (318) is fixed at both ends of the drive shaft (317), and a third gear (319) is meshed at the bottom of the second gear (318). The locking assembly includes a disassembly cover plate (323) mounted on the cleaning mounting block (311) by screws and located on the opposite side of the two third gears (319). The third gears (319) are rotatably connected to the corresponding disassembly cover plate (323). An adjusting screw (320) is threadedly connected to the inner side of the disassembly cover plate (323). One end of the adjusting screw (320) passes through the corresponding third gear (319) and is rotatably connected to a positioning tooth plate (321). The plate (321) is provided with several teeth on the side near the cleaning foam (312). The positioning tooth plate (321) is fixed with several guide rods (325) on the side away from the cleaning foam (312). The positioning tooth plate (321) is slidably connected to the inner side of the cleaning mounting block (311) through several guide rods (325). The adjusting screw (320) extends out of the corresponding disassembly cover plate (323) at the end away from the positioning tooth plate (321) and is fixed with an adjusting knob (322).

9. An IPA cleaning machine according to claim 8, characterized in that: The adjusting screw (320) has several locking grooves (326) on its outer periphery, and the third gear (319) has several locking strips that match the locking grooves (326) on its inner side. The third gear (319) is engaged with the adjusting screw (320) and slidably connected through the engagement of the locking strips with the locking grooves (326).

10. An IPA cleaning machine according to claim 9, characterized in that: The workbench (500) is provided with a winding mechanism (400) at one end. The winding mechanism (400) includes a support frame (404) installed on the unwinding roller (303) and the take-up roller (304). A spring (406) is fixed at the bottom of the support frame (404). A positioning rod (405) abuts against the lower part of the spring (406). Several positioning holes are opened at the ends of the unwinding rod (301) and the take-up rod (302). The bottom end of the positioning rod (405) is inserted into the inner side of the corresponding positioning hole. A winding frame (405) is rotatably connected to the top end of the workbench (500). 1) The two ends of the roll changing frame (401) near the unwinding rod (301) and the winding rod (302) are respectively fixed with a first roll changing rod (402) and a second roll changing rod (403) corresponding to the unwinding rod (301) and the winding rod (302). The first roll changing rod (402) and the second roll changing rod (403) are provided with a plurality of insertion holes that match the positioning rod (405) on the end away from the unwinding rod (301). A turntable (408) is fixed in the middle of the side of the roll changing frame (401) away from the first roll changing rod (402).

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