Laser processing device

Abstract

The invention discloses a laser processing device, and relates to the technical field of laser welding, the laser processing device comprises a housing, a light emitting mechanism, a refraction mechanism and a shaping mechanism; a cavity is formed in the machine shell, and a light inlet and a light outlet are formed in the machine shell. The light-emitting mechanism is arranged outside the machine shell and used for emitting laser towards the light inlet. The refraction mechanism comprises a plurality of reflectors mounted in the cavity, the reflectors are arranged at intervals, and at least part of the reflectors face different directions, so that laser entering from the light inlet can be emitted from the light outlet after being sequentially reflected by the reflectors; the shaping mechanism comprises a diaphragm assembly and a focusing lens which are installed in the cavity, the diaphragm assembly and the focusing lens are arranged in the propagation direction of the laser, the diaphragm assembly is used for adjusting the light spot shape of the laser, and the focusing lens is used for adjusting the light spot size of the laser. And the spot size can reach the micron level.

Description

Technical Field

[0001] This invention relates to the field of laser welding technology, and in particular to a laser processing apparatus. Background Technology

[0002] In optical applications such as miniLED, microLED, general semiconductor, and semiconductor processing, the shape and size of light spots have a crucial impact on the performance and effect of various technologies. Currently, there are many different shapes and sizes of light spots on the market, such as common circular light spots, elliptical light spots, and rectangular light spots. However, there are still many limitations in the fine control of the size and shape of these light spots.

[0003] Taking laser processing as an example, in precision laser processing scenarios, especially for welding small electronic components and micro-nano structures, existing laser spots are difficult to meet both shape and size requirements at the same time, which greatly affects product yield. For example, when welding tiny chips on a mobile phone motherboard, the spacing between the solder joints is often at the sub-millimeter or even micrometer level. If a larger laser spot is used, it is very easy to cause short circuits or mis-soldering between adjacent solder joints due to the excessive coverage of the laser spot during the welding process, which greatly affects the performance and reliability of electronic products.

[0004] Therefore, how to obtain micron-sized, non-circular laser processing spots has become a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] The main objective of this invention is to provide a laser processing device that aims to obtain micron-level, non-circular laser processing spots.

[0006] To achieve the above objectives, the laser processing apparatus proposed in this invention includes a housing, a light-emitting mechanism, a refractive mechanism, and a shaping mechanism. The housing has a cavity with a light inlet and a light outlet. The light-emitting mechanism is located outside the housing and is used to emit laser light towards the light inlet. The refractive mechanism includes multiple mirrors installed in the cavity, which are arranged at intervals and at least some of them have different orientations, so that the laser light entering from the light inlet can be emitted from the light outlet after being reflected sequentially by the multiple mirrors. The shaping mechanism includes an aperture assembly and a focusing lens installed in the cavity, which are arranged along the direction of laser propagation. The aperture assembly is used to adjust the shape of the laser spot, and the focusing lens is used to adjust the size of the laser spot.

[0007] In one embodiment, the plurality of reflectors includes a first reflector, a second reflector, and a third reflector; the first reflector is inclined relative to the light inlet, and the side facing the light inlet is a first reflecting surface for reflecting laser light; the second reflector is located on the light-emitting side of the first reflector, and the side facing the first reflector is a second reflecting surface for reflecting laser light reflected by the first reflector; the third reflector is located on the light-emitting side of the second reflector, and is inclined relative to the light-emitting port, and the side facing the light inlet is a third reflecting surface for reflecting laser light reflected by the first reflector and emitted from the light-emitting port.

[0008] In one embodiment, the aperture assembly includes an aperture seat, an aperture structure, and an aperture driving structure; the aperture seat is installed on the inner wall of the cavity; the aperture structure includes multiple aperture assembly parts disposed on the aperture seat, the multiple aperture assembly parts can be combined to form a square aperture hole, and are movable relative to the aperture seat; the aperture driving structure drives and connects the multiple aperture assembly parts to drive the multiple aperture assembly parts to move, so that the size of the aperture hole can be adjusted.

[0009] In one embodiment, a plurality of aperture assemblies are movably disposed along the propagation direction of the laser; and / or, a focusing lens is movably disposed along the propagation direction of the laser.

[0010] In one embodiment, the light-emitting mechanism includes a laser source element, a housing, and an adjustment assembly. The laser source element is disposed outside the housing and is used to emit laser light. The housing is disposed between the laser source element and the housing and has a propagation channel. One end of the propagation channel corresponds to the laser source element, and the other end connects to the cavity of the housing. The adjustment assembly is disposed inside the propagation channel and includes a first optical element and a second optical element. The first optical element and the second optical element are arranged sequentially along the extension direction of the propagation channel and are rotatably mounted along the same axis to adjust the light intensity. The laser light emitted by the laser source element enters the cavity through the propagation channel and the first and second optical elements.

[0011] In one embodiment, the adjustment assembly further includes a driving member, a driving gear, and a driven gear; the driving member is mounted on the housing; the driving gear is connected to the output end of the driving member, and a first groove is formed on its end face for mounting a first optical element; the driven gear meshes with the driving gear, and a second groove is formed on its end face for mounting a second optical element.

[0012] In one embodiment, the first optical element and the second optical element are symmetrically arranged along a plane perpendicular to the laser propagation direction, and the driving gear and the driven gear have the same radius and number of teeth.

[0013] In one embodiment, the laser processing apparatus further includes a welding mechanism disposed outside the housing. The welding mechanism includes a first beam combiner and a monitoring device. The first beam combiner faces the light outlet and is inclined. The first beam combiner reflects the laser and transmits visible light and infrared light to reflect the adjusted laser onto the workpiece. The monitoring device is disposed outside the housing and is located on the side of the first beam combiner away from the housing. It emits a visible imaging beam toward the first beam combiner and receives the infrared beam emitted from the workpiece and the visible imaging beam reflected by the workpiece to measure the processing temperature and processing position of the workpiece.

[0014] In one embodiment, the monitoring device includes an imaging component, a temperature measuring element, and a second beam combiner; the imaging component emits a visible imaging beam and receives a visible imaging beam reflected by the workpiece; the temperature measuring element is disposed on the side of the first beam combiner away from the light outlet, for receiving an infrared beam emitted by the workpiece; the second beam combiner is disposed between the temperature measuring element and the first beam combiner, and the second beam combiner transmits the infrared beam and reflects visible light, for reflecting the visible imaging beam to the first beam combiner.

[0015] In one embodiment, the imaging assembly includes a light source assembly, an imaging element, and a third beam combiner; the light source assembly emits a visible imaging beam toward the second beam combiner; the imaging element receives the visible imaging beam reflected by the workpiece; the third beam combiner is disposed between the second beam combiner and the light source assembly, and the third beam combiner includes a transmissive surface close to the light source assembly and a reflective surface away from the light source assembly, for emitting a visible imaging beam through the light source assembly and reflecting the visible imaging beam reflected by the workpiece to the imaging element.

[0016] The technical solution of this invention uses a light-emitting device to emit laser light, and uses a housing and multiple reflectors inside the housing to reflect the laser light in the space inside the housing, thereby lengthening the laser light path. A shaping mechanism is set in the light path, in which an aperture assembly and a focusing lens are arranged sequentially to change the shape and size of the laser spot. The aperture assembly is set in the optical path before the focusing lens, changing the shape of the laser spot before scaling. An aperture of the same specification can make the spot smaller and avoid interference affecting the spot, so as to facilitate layout. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1A schematic diagram of a laser processing apparatus according to an embodiment of the present invention (with one end face of the housing removed). Figure 2 for Figure 1 A front view diagram of the structure; Figure 3 middle Figure 1 A schematic diagram of the aperture assembly structure; Figure 4 for Figure 3 A front view diagram of the structure; Figure 5 for Figure 3 Schematic diagram of the structure of the central aperture assembly; Figure 6 for Figure 3 Schematic diagram of the displacement detection device; Figure 7 for Figure 1 A schematic diagram of the overall structure of the aperture assembly; Figure 8 for Figure 1 A schematic diagram of the light-emitting mechanism in the middle; Figure 9 for Figure 8 A front view diagram of the structure; Figure 10 for Figure 1 Schematic diagram of the optical path structure; Figure 11 This is a schematic diagram of the optical path structure of another embodiment of the laser processing apparatus provided by the present invention.

[0019] Explanation of icon numbers: 100. Laser processing equipment; 1. Housing; 11. Cavity; 1A. Light inlet; 1B. Light outlet; 2. Light-emitting mechanism; 21. Laser source component; 22. Housing; 22A. Propagation channel; 23. Adjustment component; 231. First optical element; 232. Second optical element; 233. Driving component; 234. Driving gear; 235. Driven gear; 2A. Collimating lens group; 3. Refractive mechanism; 31. First reflecting mirror; 32. Second reflecting mirror; 33. Third reflecting mirror; 4. Shaping mechanism; 4A. Aperture assembly; 4B. Focusing lens; 41. Aperture seat; 411. First side end; 412. Second side end; 42. Aperture structure; 421. Aperture assembly; 4211. Aperture connection; 4212. Aperture forming part; 43. Driving structure; 43a. First driving structure; 4 3b. Second drive structure; 431. Drive motor; 432. Ball screw structure; 4321. Transmission screw; 4322. Drive nut; 433. Displacement detection device; 433A. Detection seat; 433B. Detection structure; 4331. Detection protrusion; 4332. Detection recess; 44. Alignment mark; 45. Aperture cover; 5. Welding mechanism; 5A. First beam combiner; 5B. Monitoring device; 51. Imaging assembly; 511. Light source assembly; 512. Imaging element; 513. Third beam combiner; 52. Temperature measuring element; 53. Second beam combiner; 53. Laser indicator assembly; 54. Fourth beam combiner; 55. Laser ranging assembly; 56. Fifth beam combiner; 6. Multi-segment achromatic lens group.

[0020] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0022] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0023] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0024] In precision laser processing scenarios, especially for welding small electronic components and micro / nano structures, existing laser spots are unable to simultaneously meet shape and size requirements, which greatly affects product yield. For example, when welding tiny chips on a mobile phone motherboard, the spacing between solder joints is often at the sub-millimeter or even micrometer level. If a larger laser spot is used, it is very easy to cause short circuits or mis-soldering between adjacent solder joints due to the excessive coverage of the laser spot during the welding process, which greatly affects the performance and reliability of electronic products.

[0025] Based on this, the present invention proposes a laser processing apparatus 100. Please refer to [link / reference needed]. Figure 1 and Figure 2 In one embodiment of the present invention, the laser processing apparatus 100 proposed by the present invention includes a housing 1, a light-emitting mechanism 2, a refractive mechanism 3, and a shaping mechanism 4; the housing 1 forms a cavity 11, with a light inlet 1A and a light outlet 1B; the light-emitting mechanism 2 is disposed outside the housing 1 and is used to emit laser light toward the light inlet 1A; the refractive mechanism 3 includes a plurality of reflectors installed in the cavity 11, the plurality of reflectors are arranged at intervals, and at least some of the reflectors are oriented differently, so that the laser light entering from the light inlet 1A can be emitted from the light outlet 1B after being reflected sequentially by the plurality of reflectors; and the shaping mechanism 4 includes an aperture assembly 4A and a focusing lens 4B installed in the cavity 11, the aperture assembly 4A and the focusing lens 4B are arranged along the propagation direction of the laser, the aperture assembly 4A is used to adjust the shape of the laser spot, and the focusing lens 4B is used to adjust the size of the laser spot.

[0026] The technical solution of the present invention uses a light-emitting mechanism 2 to emit laser light, and uses a housing 1 and multiple reflectors inside the housing 1 to make the laser light reflect in the space inside the housing 1, thereby lengthening the laser light path. A shaping mechanism 4 is set in the light path. An aperture assembly 4A and a focusing lens 4B arranged sequentially in the shaping mechanism 4 change the shape and size of the laser light spot, respectively. The aperture assembly 4A is set in the optical path before the focusing lens 4B. The shape and size of the laser light spot are changed before scaling to avoid interference affecting the light spot and facilitate layout.

[0027] The system includes multiple reflectors, including a first reflector 31, a second reflector 32, and a third reflector 33. The first reflector 31 is inclined relative to the light inlet 1A, with its side facing the light inlet 1A serving as the first reflecting surface to reflect the laser. The second reflector 32 is located on the light-emitting side of the first reflector 31, with its side facing the first reflector 31 serving as the second reflecting surface to reflect the laser reflected by the first reflector 31. The third reflector 33 is located on the light-emitting side of the second reflector 32, inclined relative to the light outlet 1B, with its side facing the light inlet 1A serving as the third reflecting surface to reflect the laser reflected by the first reflector 32, allowing it to exit through the light outlet 1B. This arrangement of the first reflector 31, second reflector 32, and third reflector 33 causes the laser to be reflected multiple times within the housing 1, thus extending the laser path within a limited space and providing ample space for the shaping mechanism 4.

[0028] Furthermore, the focusing lens 4B can be movably set along the laser propagation direction to achieve precise adjustment of the laser spot size, ensuring that the spot size is appropriate, avoiding short circuits or mis-soldering, and improving welding quality and product reliability.

[0029] Specifically, please refer to Figures 3 to 5 The aperture assembly 4A includes an aperture seat 41, an aperture structure 42, and an aperture driving structure. The aperture seat 41 is mounted on the inner wall of the cavity 11. The aperture structure 42 includes multiple aperture assembly parts 421 disposed on the aperture seat 41. The multiple aperture assembly parts 421 can be combined to form a square aperture and are movable relative to the aperture seat 41. The aperture driving structure drives and connects the multiple aperture assembly parts 421 to drive the multiple aperture assembly parts 421 to move, so that the size of the aperture can be adjusted. By setting the aperture seat 41 to install the aperture structure 42 and the driving structure, and by setting multiple aperture assembly parts 421 to form a square aperture, and by setting the driving structure to drive the multiple aperture assembly parts 421 to move, the laser can be shaped into a square and the size of the aperture can be adjusted to adjust the size of the laser as needed to adapt to the workpiece being welded.

[0030] In one embodiment of the present invention, a plurality of aperture assembly parts 421 are movably arranged along the propagation direction of the laser. Thus, by the linear movement of the plurality of aperture assembly parts 421, the aperture can be enlarged or reduced, thereby allowing the aperture structure 42 to adjust the size of the laser. Specifically, four aperture assembly parts 421 are provided, arranged in a rectangular shape. The side length of the light spot is controlled by the movement of every two aperture assembly parts 421, achieving adjustable length and width of the light spot.

[0031] It is understood that the aperture assembly 421 can be moved in various ways. In other embodiments, each aperture assembly 421 can also be rotatably mounted on the aperture seat 41 around the axial direction of the aperture hole, as long as the size of the aperture hole can be adjusted. The present invention does not limit this.

[0032] There are various ways to drive the multiple aperture assembly parts 421 to move. For example, the multiple aperture assembly parts 421 can be driven separately by multiple driving devices, or they can be driven simultaneously by the same driving device. The present invention does not limit this. Specifically, in this embodiment, the driving structure includes multiple driving structures corresponding to the multiple aperture assembly parts 421. The multiple driving structures drive and connect the multiple aperture assembly parts 421 to drive the aperture assembly parts 421 to move. In this way, by setting multiple driving structures to drive the multiple aperture assembly parts 421 to move separately, each aperture assembly part 421 can move independently to avoid mutual interference, thereby helping to improve the reliability of the aperture assembly 4A.

[0033] In order to drive the aperture assembly 421 to move, in this embodiment, please refer to Figure 3 and Figure 4 Each of the aforementioned drive structures includes a drive motor 431 and a ball screw structure 432. The drive motor 431 is disposed on the aperture seat 41. The ball screw structure 432 includes a transmission screw 4321 and a drive nut 4322 sleeved on the transmission screw 4321. The transmission screw 4321 drives and connects to the drive motor 431, and the drive nut 4322 connects to the aperture assembly 421. Thus, by setting the drive motor 431, driving force is provided. By setting the ball screw structure 432, on the one hand, the rotation of the drive motor 431 can be converted into linear motion. On the other hand, because the ball screw has high precision and low friction, the use of the ball screw structure 432 helps to accurately control the displacement of the aperture assembly 421, thereby ensuring the accuracy and stability of the aperture adjustment.

[0034] It is understood that there are various ways to connect the aperture assembly 421 and the drive nut 4322. The aperture assembly 421 can be connected to the drive nut 4322 by welding, bolts, etc., and the present invention does not limit this. Specifically, in this embodiment, the aperture assembly 421 is detachably installed on the drive nut 4322. Thus, the detachable connection method facilitates the disassembly and assembly of the aperture assembly 421 so as to adjust the aperture assembly 421 as needed. Furthermore, there are various detachable connection methods, such as snap-fit ​​connection or screw connection, and the present invention does not limit this.

[0035] Furthermore, the drive structure also includes a guide rail and a guide sleeve that cooperate with each other for guidance. The guide rail and the guide sleeve are respectively disposed on the aperture seat 41 and the drive nut 4322. In this way, by setting the guide rail and the guide sleeve, the drive nut 4322 can move in a straight line, thereby helping to improve the stability of the movement of the drive nut 4322.

[0036] To accurately locate the position of the aperture assembly 421, in this embodiment, please refer to... Figure 3 , Figure 4 and Figure 6 The driving structure also includes a displacement detection device 433 disposed between the aperture seat 41 and the driving structure, for detecting the position of the aperture assembly 421. Thus, by setting the displacement detection device 433, the position of the aperture assembly 421 can be accurately positioned, thereby helping to ensure the accuracy of the aperture adjustment.

[0037] To control the travel of the aperture assembly 421, in this embodiment, the displacement detection device 433 includes a detection seat 433A and two detection structures 433B. The detection seat 433A is located on the drive nut 4322, and the two detection structures 433B are located at opposite ends of the detection seat 433A. Each detection structure 433B includes a detection protrusion 4331 and a detection recess 4332 located on the detection seat 433A and the aperture seat 41, respectively. The detection protrusion 4331 engages with the recess of the mating part to detect the displacement of the detection seat 433A. Thus, through... The detection seat 433A is designed to facilitate the connection of the drive nut 4322, allowing the detection device to move together with the aperture assembly 421. It also facilitates the installation of two detection structures 433B to detect the displacement at both ends of the detection seat 433A, preventing the aperture from becoming too large or too small. Furthermore, the detection protrusion 4331 and the detection recess 4332 both detect the movement of the detection seat 433A and restrict its movement, preventing the aperture assembly 421 from exceeding its travel range.

[0038] It is understood that there are various ways to connect the detection seat 433A and the drive nut 4322. The detection seat 433A can be directly installed on the drive nut 4322, or indirectly installed on the drive nut 4322, etc., as long as the detection seat 433A can move synchronously with the aperture assembly 421. This invention does not limit this. Specifically, in this embodiment, the detection seat 433A is detachably installed on the aperture assembly 421. Thus, the detachable connection method facilitates the disassembly and assembly of the detection seat 433A, so as to adjust the detection seat 433A as needed. Furthermore, there are various detachable connection methods, such as snap-fit ​​connection or screw connection, etc. This invention does not limit this.

[0039] The number of aperture assembly parts 421 can vary, including two or three, and this invention does not limit this. Specifically, in this embodiment, four aperture assembly parts 421 are provided, and correspondingly, four driving structures are provided. Thus, by providing four aperture assembly parts 421, the four sides of the square aperture can be adjusted respectively, so as to enlarge or reduce the aperture while keeping the center of the aperture unchanged.

[0040] Furthermore, the aperture seat 41 has a first side end 411 and a second side end 412 opposite to each other in the axial direction of the aperture hole. The four driving structures include two first driving structures 43a and two second driving structures 43b. The two first driving structures 43a are disposed on the first side end 411, and the two second driving structures 43b are disposed on the second side end 412. In this way, the four driving structures are respectively disposed on both sides of the aperture seat 41, so as to make full use of the installation space of the aperture seat 41, thereby helping to reduce the overall size of the aperture assembly 4A. Of course, in other embodiments, the four driving structures may also be disposed on the same side of the aperture seat 41, etc., and the present invention does not limit this.

[0041] Further, see Figure 4 The two first driving structures 43a are arranged in the left-right direction, and the two second driving structures 43b are arranged in the front-back direction. On the one hand, the four driving structures can be evenly distributed along the circumference of the aperture seat 41, and on the other hand, they can be adapted to the four sides of the aperture hole, thereby improving the space utilization of the aperture seat 41.

[0042] In one embodiment of the present invention, the aperture assembly 421 includes an aperture connecting part 4211 and an aperture forming part 4212. One end of the aperture connecting part 4211 is driven to be connected to the driving structure, and the other end extends along the axial direction of the aperture hole. One end of the aperture forming part 4212 is disposed at the other end of the aperture connecting part 4211, and the other end extends along the radial direction of the aperture hole. Thus, by providing the aperture connecting part 4211, the aperture forming part 4212 is connected to the driving nut 4322, so that the aperture forming part 4212 can move synchronously with the driving nut 4322. By providing the aperture forming part 4212, a square aperture hole is formed by combination.

[0043] Furthermore, the thickness of the aperture forming portion 4212 gradually increases from the center of the aperture towards its periphery. Since the laser is used for welding, it has high power and generates a lot of heat, which will cause different heating on both sides of the aperture forming portion 4212. Therefore, the thickness of the aperture forming portion 4212 is gradually set so that the part of the aperture forming portion 4212 closer to the aperture is thinner and the part farther away from the aperture is thicker. This allows the heat to spread quickly on both sides of the aperture forming portion 4212, making the aperture forming portion 4212 heated evenly, and also ensures the strength of the aperture forming portion 4212, so that the aperture forming portion 4212 is not easily deformed by external forces due to insufficient strength.

[0044] In one embodiment of the present invention, please refer to Figure 7The aperture assembly 4A further includes an aperture cover 45 disposed on the aperture seat 41. Thus, by providing the aperture cover 45, the aperture structure 42 and the driving structure are hidden inside the aperture cover 45, thereby protecting the aperture assembly 4A.

[0045] To facilitate the positioning of the aperture assembly 421, in one embodiment of the present invention, as shown in the figure, the aperture assembly further includes an alignment mark 44 disposed on the aperture seat 41. Thus, by setting the alignment mark 44, the position of the aperture assembly 421 can be located on the aperture seat 41, thereby facilitating the quick installation of the aperture assembly 421 onto the aperture seat 41.

[0046] Please see Figure 8 and Figure 9 In one embodiment of the present invention, the light-emitting mechanism 2 includes a laser light source 21, a housing 22, and an adjustment component 23. The laser light source 21 is disposed outside the housing 1 and is used to emit laser light. The housing 22 is disposed between the laser light source 21 and the housing 1 and has a propagation channel 22A. One end of the propagation channel 22A corresponds to the laser light source 21, and the other end is connected to the cavity 11 of the housing 1. The adjustment component 23 is disposed inside the propagation channel 22A and includes a first optical element 231 and a second optical element 232. The first optical element 231 and the second optical element 232 are arranged sequentially along the extension direction of the propagation channel 22A and are rotatably installed along the same axis to adjust the light intensity. The laser light emitted by the laser light source 21 enters the cavity 11 through the propagation channel 22A and the first optical element 231 and the second optical element 232.

[0047] Lasers typically exhibit a Gaussian energy distribution, meaning high energy at the center and low energy at the edges. When converting them into non-circular spots, problems such as edge energy attenuation, insufficient corner energy, or energy fluctuations within the spot can easily occur. Therefore, ensuring a uniform energy distribution across the entire area during laser beam shaping is challenging, affecting the laser processing effect and quality. Based on this, in one embodiment of the present invention, the light-emitting mechanism 2 further includes a collimating lens group 2A, disposed between the laser source element 21 and the adjustment component 23, for collimating the laser. Thus, the laser first passes through the collimating lens group 2A and is then collimated to form a collimated laser. This collimated laser then passes through the aperture assembly 4A to form a flat-top laser, i.e., a laser with a uniform energy distribution across the entire area, thereby improving processing quality.

[0048] Laser power is generally controlled by voltage output, but voltage-controlled laser power is unstable. Therefore, in one embodiment of the present invention, the adjustment component 23 further includes a driving element 233, a driving gear 234, and a driven gear 235. The driving element 233 is mounted on the housing 22. The driving gear 234 is connected to the output end of the driving element 233, and its end face has a first groove for mounting a first optical element 231. The driven gear 235 meshes with the driving gear 234, and its end face has a second groove for mounting a second optical element 232. In this way, the voltage is stabilized, and the laser power is adjusted by the rotation of the two optical elements to maintain stable and continuously adjustable laser power. Furthermore, the meshing transmission of the driving gear 234 and the driven gear 235 enables synchronous adjustment of the first optical element 231 and the second optical element 232, ensuring uniform distribution of laser spot energy and improving laser processing accuracy.

[0049] The first optical element 231 includes a first lens and a dielectric reflective film on the surface of the first lens, which can reduce the light intensity passing through the first optical element 231, thereby enabling the first optical element 231 to perform the function of adjusting the laser power. The second optical element 232 includes a second lens and a dielectric reflective film on the surface of the second lens, which can reduce the light intensity passing through the second optical element 232, thereby enabling the second optical element 232 to perform the function of adjusting the laser power.

[0050] In one embodiment of the present invention, the first optical element 231 and the second optical element 232 are symmetrically arranged along a plane perpendicular to the laser propagation direction, and the driving gear 234 and the driven gear 235 have the same radius and number of teeth. Thus, through precise symmetrical design and synchronous adjustment mechanism, the energy uniformity of the laser spot is further optimized, effectively avoiding energy deviation caused by element asymmetry, thereby significantly improving the overall stability and precision of laser processing and ensuring high-quality processing results.

[0051] Please see Figure 1 and Figure 10In one embodiment of the present invention, the laser processing apparatus 100 further includes a welding mechanism 5 disposed outside the housing 1. The welding mechanism 5 includes a first beam combiner 5A and a monitoring device 5B. The first beam combiner 5A faces the light outlet 1B and is inclined. The first beam combiner 5A reflects the laser and transmits visible light and infrared light to reflect the adjusted laser onto the workpiece. The monitoring device 5B is disposed outside the housing 1 and is located on the side of the first beam combiner 5A away from the housing 1. It is used to emit a visible imaging beam toward the first beam combiner 5A and receive the infrared beam emitted from the workpiece and the visible imaging beam reflected by the workpiece to measure the processing temperature and processing position of the workpiece. Thus, the processing laser passes through the housing 1 to the first beam combiner 5A, and is reflected by the first beam combiner 5A to the position of the product to be processed. The visible imaging beam emitted by the monitoring device 5B passes through the first beam combiner 5A to the product to be processed, and the visible imaging beam reflected by the product to the monitoring device 5B. The monitoring device 5B determines the processing position through imaging. During welding, the product to be processed generates high temperature and emits infrared rays. The infrared rays pass through the first beam combiner 5A to the monitoring device 5B. The monitoring device 5B determines the temperature of the processing position of the product to be processed through the infrared rays. The laser processing device 100 moves according to the determined processing position, and the adjustment component 23 controls the laser power according to the temperature of the processing position of the product to be processed. In this way, through real-time monitoring and feedback adjustment, the temperature and position are precisely controlled during the laser processing, further improving the processing efficiency and the quality of the finished product, and achieving the goal of high-efficiency and high-precision laser processing.

[0052] Among them, beam combiners utilize optical coating technology to form specific films on optical lenses to achieve their selective reflection and transmission characteristics of light of different wavelengths.

[0053] Furthermore, a multi-segment achromatic lens group 6 is provided on the side of the first beam combiner 5A near the workpiece to eliminate chromatic aberration between the laser, the visible imaging beam, and the infrared beam. Thus, through the precise calibration of the multi-segment achromatic lens group 6, the purity and consistency of the beam are ensured, further improving the accuracy and stability of laser processing, enabling fine processing of complex workpieces, and meeting high-standard processing requirements.

[0054] In one embodiment of the present invention, the monitoring device 5B includes an imaging component 51, a temperature measuring element 52, and a second beam combiner 53; the imaging component 51 emits a visible imaging beam and receives a visible imaging beam reflected by the workpiece; the temperature measuring element 52 is disposed on the side of the first beam combiner 5A away from the light outlet 1B, and is used to receive an infrared beam emitted by the workpiece; the second beam combiner 53 is disposed between the temperature measuring element 52 and the first beam combiner 5A, and the second beam combiner 53 transmits the infrared beam and reflects visible light, so as to reflect the visible imaging beam to the first beam combiner 5A. In this way, the infrared light passing through the first beam combiner 5A passes through the second beam combiner 53 again to reach the temperature measuring element 52. The visible imaging beam emitted by the imaging component 51 is reflected by the second beam combiner 53 back to the first beam combiner 5A. After passing through the first beam combiner 5A, it reaches the surface of the workpiece. The visible imaging beam reflected from the surface of the workpiece passes through the first beam combiner 5A and is reflected again by the second beam combiner 53 into the imaging component 51. Through multi-level precise optical path control and real-time data feedback, the stability and consistency of laser processing are ensured, further improving processing accuracy and efficiency, and realizing the fine processing requirements of the workpiece. In addition, the monitoring device 5B, which is coaxially set with the housing 1, can move synchronously with the housing 1, avoiding redundant design.

[0055] In one embodiment of the present invention, the imaging component 51 includes a light source component 511, an imaging element 512, and a third beam combiner 513; the light source component 511 emits a visible imaging beam toward the second beam combiner 53; the imaging element 512 receives the visible imaging beam reflected by the workpiece; the third beam combiner 513 is disposed between the second beam combiner 53 and the light source component 511, and the third beam combiner 513 includes a transmissive surface close to the light source component 511 and a reflective surface away from the light source component 511, for emitting a visible imaging beam through the light source component 511 and reflecting the visible imaging beam reflected by the workpiece to the imaging element 512. Thus, by setting the third beam combiner 513 as a one-way lens to separate the outgoing and incoming paths of the visible imaging beam, independent control of the imaging beam is ensured, optical path interference is avoided, imaging clarity is improved, the visual monitoring effect during laser processing is further optimized, and the stability and reliability of the overall processing system are enhanced. Furthermore, the coaxially set monitoring device 5B can achieve synchronous movement with the housing 1 and housing 22, ensuring the real-time performance and accuracy of monitoring data, improving the dynamic control capability during processing, avoiding the maintenance difficulty caused by the complexity of the mechanical structure, reducing the system failure rate, extending the service life of the equipment, and improving production efficiency.

[0056] Please see Figure 11In one embodiment of the present invention, the monitoring device 5B is further provided with a laser ranging component 55 and a laser pointing component 53, which are added to the optical path structure of the monitoring device 5B through a fourth beam combiner 54 and a fifth beam combiner 56. The laser ranging component 55 accurately measures the distance from the laser processing device 100 to the workpiece to be processed, and the laser pointing component 53 calibrates the processing position to ensure processing accuracy. Specifically, the laser ranging component 55 emits a ranging beam, which is reflected to the workpiece by the beam combiner. The reflected beam returns to the ranging component to calculate the distance data. The laser pointing component 53 emits an pointing beam to calibrate the processing area, improving operational convenience. The collaborative work of multiple components achieves high-precision and high-efficiency laser processing to meet the requirements of complex processes.

[0057] In this embodiment, the laser light source 21, the laser ranging component 55, and the laser indicating component 53 emit lasers with different wavelengths, and specific films are formed on the first beam combiner 5A, the fourth beam combiner 54, and the fifth beam combiner 56 to achieve transmission or reflection of the three types of lasers.

[0058] Specifically, the first beam combiner 5A is used to transmit ranging laser, indicator laser, infrared light and visible light, and reflect processing laser; the fourth beam combiner 54 is used to transmit ranging laser and reflect indicator laser and visible light; the fifth beam combiner 56 is used to reflect ranging laser and indicator laser.

[0059] It should be noted that the second beam combiner 53 and the third beam combiner 513 need to achieve laser transmission. Taking the third beam combiner 513 as an example, it needs to achieve both unidirectional transmission of visible light and bidirectional transmission of laser. Based on this, the third beam combiner 513 includes a lens body and a high-reflectivity film facing the light source assembly 511. The lens body is made of a material that can transmit laser, such as glass.

[0060] The second beam combiner 53 can be used to transmit infrared light and reflect visible light and laser light. In one embodiment, a λ / 4 multilayer film with alternating TiO2 / SiO2 is used to reflect visible light and laser light, and the lens body of the second beam combiner 53 is made of a full-band material, such as glass; in another embodiment, a near-infrared optical element, such as silicon, is used.

[0061] Since the reflectivity of the high-reflectivity film depends on the incident direction, its design is usually aimed at reflecting light incident from the air side, thus enabling unidirectional transmission of visible light and reflection of visible light from the lens body toward the light source assembly 511.

[0062] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A laser processing apparatus, characterized in that, The laser processing device includes: The housing has a cavity and is equipped with a light inlet and a light outlet. A light-emitting mechanism, disposed on the outside of the housing, is used to emit laser light toward the light inlet; A refractive mechanism includes a plurality of mirrors mounted within the cavity, the mirrors being spaced apart and at least some of them having different orientations, so that laser light entering through the light inlet can exit through the light outlet after being sequentially reflected by the plurality of mirrors; and, The shaping mechanism includes an aperture assembly and a focusing lens installed in the cavity. The aperture assembly and the focusing lens are arranged along the propagation direction of the laser. The aperture assembly is used to adjust the shape of the laser spot, and the focusing lens is used to adjust the size of the laser spot.

2. The laser processing apparatus as described in claim 1, characterized in that, The plurality of reflectors includes: The first reflector is inclined relative to the light inlet, and the side facing the light inlet is the first reflective surface, which is used to reflect the laser. The second reflector is located on the light-emitting surface side of the first reflector, with its side facing the first reflector serving as the second reflecting surface, used to reflect the laser light reflected by the first reflector; and, The third reflector is located on the light-emitting side of the second reflector and is inclined relative to the light-emitting port. The side facing the light-in port is the third reflective surface, which is used to reflect the laser light reflected by the first reflector and emitted from the light-emitting port.

3. The laser processing apparatus as described in claim 1, characterized in that, The aperture assembly includes: An aperture seat is installed on the inner wall of the cavity; An aperture structure includes a plurality of aperture assembly parts disposed on the aperture seat, the plurality of aperture assembly parts being capable of being combined to form a square aperture hole, and being movable relative to the aperture seat; and, An aperture driving structure drives multiple aperture assemblies to move, thereby making the size of the aperture adjustable.

4. The laser processing apparatus as described in claim 3, characterized in that, The plurality of aperture assembly sections are movably disposed along the propagation direction of the laser; and / or, The focusing lens is movably positioned along the propagation direction of the laser.

5. The laser processing apparatus as described in claim 1, characterized in that, The light-emitting mechanism includes: A laser source element is disposed outside the housing to emit the laser; A housing, disposed between the laser source element and the casing, has a propagation channel, one end of which corresponds to the laser source element, and the other end which connects to the cavity of the casing; and, An adjustment component is disposed within the propagation channel. The adjustment component includes a first optical element and a second optical element. The first optical element and the second optical element are arranged sequentially along the extension direction of the propagation channel and are rotatably mounted along the same axis to adjust the light intensity. The laser emitted by the laser source device enters the cavity through the propagation channel and the first and second optical elements.

6. The laser processing apparatus as described in claim 5, characterized in that, The adjustment component further includes: The driving component is mounted on the housing; A drive gear, connected to the output end of the drive component, has a first groove on its end face for mounting the first optical element; and... The driven gear meshes with the driving gear, and a second groove is provided on its end face. The first groove is used to install the second optical element.

7. The laser processing apparatus as described in claim 6, characterized in that, The first optical element and the second optical element are symmetrically arranged along a plane perpendicular to the laser propagation direction, and the driving gear and the driven gear have the same radius and number of teeth.

8. The laser processing apparatus as described in claim 1, characterized in that, The laser processing apparatus further includes a welding mechanism disposed outside the housing, the welding mechanism comprising: A first beam combiner, facing the light outlet and angled, reflects the laser light while transmitting visible and infrared light, thereby reflecting the adjusted laser light onto the workpiece. A monitoring device is disposed outside the housing and located on the side of the first beam combiner mirror away from the housing. It is used to emit a visible imaging beam toward the first beam combiner mirror and receive an infrared beam emitted from the workpiece and a visible imaging beam reflected from the workpiece, in order to measure the processing temperature and processing position of the workpiece.

9. The laser processing apparatus as described in claim 8, characterized in that, The monitoring device includes: An imaging component emits the visible imaging beam and receives the visible imaging beam reflected by the workpiece. A temperature measuring element is disposed on the side of the first beam combiner mirror opposite to the light outlet, for receiving the infrared beam emitted by the workpiece; and, The second beam combiner is disposed between the temperature measuring element and the first beam combiner. The second beam combiner transmits infrared light and reflects visible light, so as to reflect the visible imaging light beam back to the first beam combiner.

10. The laser processing apparatus as described in claim 9, characterized in that, The imaging component includes: The light source assembly emits the visible imaging beam toward the second beam combiner; An imaging element that receives a visible imaging beam reflected from the workpiece; and, A third beam combiner is disposed between the second beam combiner and the light source assembly. The third beam combiner includes a transmissive surface close to the light source assembly and a reflective surface away from the light source assembly, for transmitting a visible imaging beam through the light source assembly and reflecting the visible imaging beam reflected by the workpiece to the imaging component.

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