A cleanroom intelligent air control device

Abstract

The application discloses a clean room intelligent air conditioning device, which comprises a clean room, a house entrance room arranged at the front side of the clean room, a gas treatment mechanism arranged on one side of the clean room, the gas treatment mechanism comprising a primary filter mechanism and a secondary filter mechanism which are communicated with each other, a main pipeline communicated with the secondary filter mechanism through a connecting pipe on one side of the secondary filter mechanism, and the main pipeline being communicated with a first branch pipeline and a second branch pipeline respectively. The application relates to the technical field of clean rooms, and the one-way air exhaust valve and the first electromagnetic valve are linked to control the air supply of the house entrance room to be automatically stopped after a person enters the clean room, clean gas is preferentially supplied to the clean room, high-pressure clean gas is reversely purified into the house entrance room through the one-way air exhaust valve, the "one gas two uses" is realized, and the gas treatment energy consumption is obviously reduced. The sterilization mechanism is formed by the conical structure of the air duct, the second reflecting film of the cone and the first reflecting film of the fan blade, multi-angle ultraviolet light reflection is formed, and the sterilization level of the gas is improved.

Description

Technical Field

[0001] This invention relates to the field of cleanroom technology, specifically to an intelligent air control device for cleanrooms. Background Technology

[0002] Cleanrooms serve as core production environments in fields such as microelectronics, biomedicine, and precision manufacturing, where air cleanliness directly impacts product quality and experimental accuracy. Traditional cleanroom air control systems primarily rely on air purification equipment with fixed airflow rates, using pre-filters, medium-efficiency filters, and high-efficiency filters to remove suspended particles from the air, combined with positive pressure design to prevent external contaminants from entering. However, existing technologies have significant drawbacks: First, cleanrooms typically require a separate buffer room (such as an entrance room) for personnel dust removal. This buffer room and the main cleanroom require independent air supply systems, resulting in high loads and energy consumption for gas handling equipment. For example, the buffer room may only be used briefly when personnel enter, but the air supply system must run continuously, leading to wasted clean gas. Second, traditional systems operate in a fixed mode, unable to dynamically adjust airflow and temperature / humidity parameters based on the actual usage of the cleanroom (such as the number of personnel and equipment start / stop). Under low-load conditions (such as unattended nighttime operation), the system still operates at full capacity, resulting in persistently high energy consumption and operating costs. Furthermore, although some cleanrooms are equipped with ultraviolet (UV) sterilization devices, the UV irradiation angle is singular, easily creating sterilization blind spots; and unreasonable airflow organization may lead to incomplete sterilization, affecting the stability of the sterile environment. Therefore, how to improve the utilization rate of clean gases, achieve intelligent dynamic control, and enhance sterilization effects have become key issues that urgently need to be addressed in cleanroom air control technology. Summary of the Invention

[0003] To address the shortcomings of existing technologies, this invention provides an intelligent air control device for cleanrooms, which solves the problems of low clean gas utilization, inability to control the gas, and poor sterilization effect in existing cleanrooms.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solution: a cleanroom intelligent air control device, comprising a cleanroom and an entrance room located in front of the cleanroom, wherein the cleanroom is provided with a second branch pipe and a second return air pipe, the entrance room is provided with a first branch pipe and a first return air pipe, a connecting ventilation opening is provided between the entrance room and the cleanroom, and a one-way exhaust valve is provided on the connecting ventilation opening;

[0005] A gas handling mechanism is provided on one side of the clean room, and a controller is provided on the gas handling mechanism; the gas handling mechanism includes a primary filtration mechanism and a secondary filtration mechanism that are interconnected. A fresh air inlet pipe is provided on one side of the primary filtration mechanism, and a main pipeline is connected to one side of the secondary filtration mechanism through a connecting pipe. The main pipeline is connected to a first branch pipe and a second branch pipe respectively; a first solenoid valve is provided on the first branch pipe.

[0006] Preferably, the primary filtration mechanism includes a first processing chamber and a second processing chamber. Both the first and second processing chambers are equipped with coarse filter elements and dehumidification modules from top to bottom. The tops of both the first and second processing chambers are connected to the secondary filtration mechanism through air guide pipes. The fresh air inlet pipe is connected to the first and second processing chambers through air supply pipe groups.

[0007] Preferably, the air supply duct assembly includes an air supply branch pipe connected to the fresh air inlet pipe, and the air supply branch pipe is provided with a second air supply nozzle and a first air supply nozzle respectively communicating with the first treatment chamber and the second treatment chamber. A second solenoid valve is provided on the air supply branch pipe between the second air supply nozzle and the first air supply nozzle.

[0008] Preferably, the secondary filtration mechanism includes a housing, and a partition is provided inside the housing to divide the interior of the housing into an upper compartment and a lower compartment arranged vertically. An air vent is opened at the end of the partition away from the connection with the connecting pipe to allow the upper compartment and the lower compartment to communicate. A fine filter element is provided in the lower compartment.

[0009] Preferably, a heating component is provided at one end of the upper cavity near the connecting pipe. The heating component includes a mesh frame, on which a heater is provided to heat the gas entering the upper cavity.

[0010] Preferably, a sterilization mechanism is provided inside the main pipeline. The sterilization mechanism includes an ultraviolet sterilization lamp and an air guide duct arranged concentrically with the main pipeline. The ultraviolet sterilization lamp is vertically inserted into the air guide duct from the top.

[0011] Preferably, the air guide tube is a tapered tube that is wider at the top and narrower at the bottom, and multiple cones are arranged in a circumferential array on the inner wall of the tapered tube, with a second reflective film attached to each cone.

[0012] Preferably, the sterilization mechanism further includes a fan located above the air guide tube; the fan includes a drive mechanism and fan blades located at the output end of the drive mechanism, and each fan blade has a first reflective film attached to the side facing the air guide tube.

[0013] Preferably, each blade of the fan is bent to form a first bend, a second bend, and a third bend.

[0014] Preferably, each blade of the fan is a twisted curved surface.

[0015] The beneficial effects of the present invention are as follows: By using the intelligent air control device for cleanrooms provided by the present invention, the following technical effects are achieved compared with the prior art:

[0016] 1. Through the linkage control of the one-way exhaust valve and the first solenoid valve, the gas supply to the entrance room is automatically stopped after personnel enter the clean room, and all clean gas is given priority to the clean room. The high-pressure clean gas is then reversed through the one-way exhaust valve to purify the entrance room, realizing "one gas for two uses" and significantly reducing the energy consumption of gas treatment.

[0017] 2. The primary filtration mechanism adopts a dual-processing chamber design. Combined with the switching of the second solenoid valve, it can select single or dual-chamber operation according to the cleanroom usage status (manned / unmanned) to match the actual air flow requirements; the controller links the heater, fan and other components to achieve precise control of temperature, humidity and sterilization intensity.

[0018] 3. The sterilization mechanism uses the conical structure of the air duct, the second reflective film of the cone, and the first reflective film of the fan blade to form multi-angle ultraviolet reflection. Combined with the dynamic reflection effect of the rotating fan blade, it completely eliminates sterilization dead zones and improves the level of gas sterilization. Attached Figure Description

[0019] Figure 1 This is an isometric view of the present invention;

[0020] Figure 2 This is a right view of the present invention;

[0021] Figure 3 This invention relates to a gas processing mechanism;

[0022] Figure 4 This is a schematic diagram of the internal structure of the main pipeline of the present invention;

[0023] Figure 5 This is a three-dimensional structural diagram of the air guide tube of the present invention;

[0024] Figure 6 This is a top view of the fan of the present invention;

[0025] Figure 7 This is an isometric view of the fan blade of the present invention;

[0026] Figure 8 This is an isometric view of a single blade of the present invention;

[0027] Figure 9 This is a schematic diagram of the tip of a single blade of the present invention.

[0028] Explanation of reference numerals in the diagram: 1. Cleanroom; 2. Entrance room; 3. Primary filtration system; 4. Fresh air inlet duct; 5. Secondary filtration system; 6. Main duct; 7. First branch duct; 8. First solenoid valve; 9. Second branch duct; 10. First return air duct; 11. Second return air duct; 12. One-way exhaust valve; 13. Controller; 14. First treatment compartment; 15. Second treatment compartment; 16. Connecting pipe; 17. Grid frame; 18. Heater; 19. Air outlet; 20. Fine filter element; 21. Partition; 2 2. Upper compartment; 23. Lower compartment; 24. Air duct; 25. Coarse filter element; 26. Dehumidification module; 27. Air supply branch pipe; 28. First air supply nozzle; 29. ​​Second air supply nozzle; 30. Second solenoid valve; 31. Fan; 311. Fan blade; 3111. First bend; 3112. Second bend; 3113. Third bend; 312. Drive mechanism; 313. First reflective film; 32. Ultraviolet sterilization lamp; 33. Air duct; 34. Cone; 35. Second reflective film. Detailed Implementation

[0029] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Various changes can be made to the implementation schemes as long as the effects of the present invention can be achieved.

[0031] Those skilled in the art can connect the components in this case sequentially. The specific connection and operation sequence should refer to the working principle described below. The detailed connection methods are well-known technologies in the field. The working principle and process are mainly described below.

[0032] like Figure 1 As shown in the figure, this application embodiment proposes a cleanroom intelligent air control device, including a cleanroom 1 and an entrance room 2 located in front of the cleanroom 1. The cleanroom 1 is equipped with an electric door at the connection with the entrance room 2, and a connecting vent is provided on the wall between the entrance room 2 and the cleanroom 1. A one-way exhaust valve 12 is provided on the connecting vent. The one-way exhaust valve 12 can allow the gas in the cleanroom 1 to be discharged into the entrance room 2 and prevent the gas in the entrance room 2 from entering the cleanroom 1.

[0033] In addition, a second branch pipe 9, a second return air pipe 11, and an exhaust pipe are installed on the top shelf of clean room 1. The second branch pipe 9 fills clean gas into clean room 1, and the second return air pipe 11 is used to exhaust the gas in clean room 1 and return it to the fresh air inlet pipe 4. The gas in clean room 1 near the equipment operating area is discharged through the exhaust pipe. In addition, a first branch pipe 7 and a first return air pipe 10 are installed on the entrance room 2. The first branch pipe 7 fills clean gas into entrance room 2, and the first return air pipe 10 is used to exhaust the gas in entrance room 2 and return it to the fresh air inlet pipe 4.

[0034] In one embodiment, the purpose of the one-way exhaust valve 12 is to allow the experimenter to enter the cleanroom 1 after being cleaned by clean gas in the entrance chamber 2, without needing to replenish the entrance chamber 2 with clean gas. The supply of clean gas to the entrance chamber 2 through the first branch pipe 7 can be stopped, allowing all the clean gas to be supplied to the cleanroom 1, thus increasing the air pressure in the cleanroom 1 for a short time. At this time, the clean gas in the cleanroom 1 is discharged into the entrance chamber 2 through the one-way exhaust valve 12. This arrangement improves the utilization rate of clean gas. The clean gas generated by the gas treatment mechanism is preferentially supplied to the cleanroom 1 for use, and then enters the entrance chamber 2 through the one-way exhaust valve 12 to purify the gas in the entrance chamber 2. This method allows for the control of the supply of clean gas to the cleanroom 1 and the entrance chamber 2, improving the utilization effect of the clean gas.

[0035] like Figure 1 and Figure 2 As shown, a gas handling mechanism is provided on one side of the cleanroom 1, and a controller 13 is provided on the gas handling mechanism. The gas handling mechanism includes a primary filtration mechanism 3 and a secondary filtration mechanism 5 that are interconnected. A fresh air inlet pipe 4 is provided on one side of the primary filtration mechanism 3. It should be noted that the exhaust pipe mentioned above is connected to the fresh air inlet pipe 4. In addition, a main pipe 6 is connected to one side of the secondary filtration mechanism 5 through a connecting pipe 16. The main pipe 6 is connected to a first branch pipe 7 and a second branch pipe 9 respectively. A first solenoid valve 8 is provided on the first branch pipe 7. The first solenoid valve 8 is electrically connected to the controller 13 to control the opening and closing of the first solenoid valve 8. The first solenoid valve 8 controls the amount of clean gas supplied from the first branch pipe 7 to the entrance room 2. For example, when the experimental personnel enter the cleanroom 1 from the entrance room 2, the first solenoid valve 8 closes, causing the first branch pipe 7 to stop supplying gas to the entrance room 2.

[0036] In a preferred embodiment, such as Figure 3As shown, the primary filtration mechanism 3 includes a first processing chamber 14 and a second processing chamber 15. Both the first and second processing chambers 14 and 15 are equipped with coarse filter elements 25 and dehumidification modules 26 from top to bottom. The dehumidification module 26 is a duct dehumidifier. The fresh air inlet pipe 4 is connected to the first and second processing chambers 14 and 15 respectively through the air supply duct assembly. The dual-processing-chamber design (first processing chamber 14 and second processing chamber 15) allows for the use of either a single or two processing chambers depending on the actual usage of the cleanroom 1. For example, when personnel are conducting experiments in the cleanroom 1, both processing chambers operate simultaneously, increasing the airflow supply. When the cleanroom 1 is unoccupied, only a single processing chamber can be used to provide a normal airflow. This method allows for the regulation of the gas supply within the cleanroom 1 according to actual usage.

[0037] Furthermore, the tops of both the first processing chamber 14 and the second processing chamber 15 are connected to the secondary filtration mechanism 5 via air ducts 24. The secondary filtration mechanism 5 is a fine filtration mechanism that performs secondary filtration on the gas filtered by the coarse filter element 25.

[0038] like Figure 3 As shown, the air supply duct assembly includes an air supply branch pipe 27 connected to the fresh air inlet pipe 4. The air supply branch pipe 27 is equipped with a second air supply nozzle 29 and a first air supply nozzle 28 that communicate with the first treatment chamber 14 and the second treatment chamber 15, respectively. A second solenoid valve 30 is installed on the air supply branch pipe 27 between the second air supply nozzle 29 and the first air supply nozzle 28. In order to enable the dual treatment chambers to be switched at any time, this embodiment supplies gas to the first treatment chamber 14 and the second treatment chamber 15 through the second air supply nozzle 29 and the first air supply nozzle 28, respectively. When both treatment chambers need to work at the same time, the second solenoid valve 30 is in the open state, so that the gas in the air supply branch pipe 27 is supplied to the first treatment chamber 14 and the second treatment chamber 15 at the same time. When only one treatment chamber needs to work, the second solenoid valve 30 is closed, and the gas in the air supply branch pipe 27 is supplied to the second treatment chamber 15 only through the first air supply nozzle 28.

[0039] like Figure 3 As shown, the secondary filtration mechanism 5 includes a housing, and a partition 21 is provided inside the housing. The partition 21 divides the interior of the housing into an upper partition 22 and a lower partition 23 arranged vertically. An air vent 19 is opened on the end of the partition 21 away from the connection with the connecting pipe 16, which allows the upper partition 22 and the lower partition 23 to communicate. A fine filter element 20 is provided in the lower partition 23. The gas that enters the lower partition 23 through the air guide pipe 24 is filtered by the fine filter element 20 and then enters the upper partition 22 through the air vent 19, and then flows out through the connecting pipe 16 and the main pipe 6.

[0040] like Figure 3As shown, a heating component is provided in the upper cavity 22 near one end of the connecting pipe 16. The heating component includes a mesh frame 17, on which a heater 18 is provided to heat the gas entering the upper cavity 22. The heater 18 is a resistance wire that can heat the filtered clean gas.

[0041] like Figure 4 As shown, a sterilization mechanism is installed inside the main pipeline 6. The sterilization mechanism includes an ultraviolet sterilization lamp 32 and an air guide duct 33 arranged concentrically with the main pipeline 6. The ultraviolet sterilization lamp 32 is vertically inserted into the air guide duct 33 at the top. When the clean gas passes through the main pipeline 6, it passes through the air guide duct 33 and concentrates the gas around the ultraviolet sterilization lamp 32. At this time, the clean gas heated by the ultraviolet sterilization lamp 32 is sterilized.

[0042] like Figure 5 As shown, the air duct 33 is a conical tube that is wider at the top and narrower at the bottom. Multiple cones 34 are arranged in a circumferential array on the inner wall of the conical tube, and a second reflective film 35 is attached to each cone 34. When the irradiation light generated by the ultraviolet sterilization lamp 32 shines into the air duct 33, it can pass through the second reflective film 35 on the surface of the multiple cones 34 to form irregular multi-directional reflection, thereby increasing the sterilization effect of the ultraviolet sterilization lamp 32 on the clean gas.

[0043] like Figure 4 As shown, the sterilization mechanism also includes a fan 31, located above the air duct 33, for drawing clean gas from the secondary filtration mechanism 5 into the first branch pipe 7 and the second branch pipe 9; as Figure 6 and Figure 7 As shown, the fan 31 includes a drive mechanism 312 and fan blades 311 disposed at the output end of the drive mechanism 312. The drive mechanism 312 is a servo motor. Each blade of the fan blade 311 has a first reflective film 313 attached to the side facing the air guide duct 33. The first reflective film 313 attached to each blade of the fan blade 311 enables the fan blade 311 to reflect the irradiation light of the ultraviolet sterilization lamp 32 into the air guide duct 33 when the fan blade 311 is rotating continuously. Since the fan blade 311 is rotating, it provides irregular light reflection, which enhances the sterilization effect of the ultraviolet sterilization lamp 32 on the clean gas.

[0044] like Figure 8 and Figure 9As shown, each blade of the fan blade 311 is bent to form a first bent portion 3111, a second bent portion 3112, and a third bent portion 3113 that are continuously bent. By designing the blades as a continuously bent structure, multiple folds are formed without affecting the suction power, which enhances the light-reflecting surface of the fan blade 311 and improves the reflection effect. In addition, each blade of the fan blade 311 is a twisted curved surface, so that the head and tail of each blade are set in different directions, so that the first bent portion 3111, the second bent portion 3112, and the third bent portion 3113 on the head and tail ends reflect light in different directions, further improving the reflection effect.

[0045] Working principle: Outdoor fresh air enters the air supply duct group through the fresh air inlet pipe 4 and is diverted by the second solenoid valve 30; when the second solenoid valve 30 is open, the gas simultaneously enters the second treatment chamber 15 through the first air nozzle 28 and the first treatment chamber 14 through the second air nozzle 29, forming a two-chamber simultaneous operation mode; when the second solenoid valve 30 is closed, the gas only enters the second treatment chamber 15 through the first air nozzle 28, forming a single-chamber operation mode; in the treatment chamber, the gas passes from bottom to top through the dehumidification module 26 to reduce humidity and the coarse filter element 25 to remove large dust particles, and then enters the lower compartment 23 of the secondary filtration mechanism 5 through the air guide pipe 24, is filtered by the fine filter element 20, and enters the upper compartment 22 through the air outlet 19 of the partition 21, where the heater 18 heating wire heats the gas;

[0046] Clean gas enters the main pipe 6, passes through the air guide 33, and is irradiated by the ultraviolet sterilization lamp 32. At the same time, the first reflective film 313 of the fan blade 311 and the second reflective film 35 of the cone 34 inside the air guide 33 reflect ultraviolet light in multiple directions to enhance the sterilization effect.

[0047] After sterilization, the clean gas is diverted through the main pipe 6 to the first branch pipe 7, which enters the entrance room 2, and the second branch pipe 9, which enters the clean room 1. The first branch pipe 7, controlled by the first solenoid valve 8, supplies clean gas to the entrance room 2 to purge dust from personnel. The exhaust gas is returned to the fresh air inlet pipe 4 via the first return air pipe 10 for recirculation. The second branch pipe 9 continuously supplies clean gas to the clean room 1 to maintain positive pressure. The exhaust gas from the equipment operation area is discharged to the fresh air inlet pipe 4 via the exhaust pipe, and the remaining gas is returned via the second return air pipe 11. After the experimental personnel complete the dust removal in the entrance room 2, the controller 13 closes the first solenoid valve 8, stopping the gas supply to the entrance room 2. All the clean gas enters the clean room 1 via the second branch pipe 9, causing a short-term increase in air pressure. The high-pressure gas in the clean room 1 is discharged into the entrance room 2 through the one-way exhaust valve 12 to purify the air in the entrance room and avoid waste of clean gas.

[0048] The basic principles, main features, and advantages of the present invention have been described above. However, the above description is only a specific embodiment of the present invention, and the technical features of the present invention are not limited thereto. Any other embodiments derived by those skilled in the art without departing from the technical solution of the present invention should be covered within the patent scope of the present invention.

[0049] In the description of this invention, each embodiment focuses on its differences from other embodiments, and similar or identical parts between embodiments can be referred to interchangeably. As the apparatus disclosed in the embodiments corresponds to the methods disclosed in the embodiments, the description is relatively simple, and relevant parts can be referred to the method section.

[0050] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A clean room intelligent air conditioning device, comprising a clean room (1), an entrance room (2) arranged on the front side of the clean room (1), a second branch pipe (9) and a second return air pipe (11) arranged on the clean room (1), a first branch pipe (7) and a first return air pipe (10) arranged on the entrance room (2), characterized in that: The communication air vent is provided between the entrance room (2) and the clean room (1), and a one-way exhaust valve (12) is arranged on the communication air vent. A gas treatment mechanism is arranged on one side of the clean room (1), and a controller (13) is arranged on the gas treatment mechanism; the gas treatment mechanism comprises a first filter mechanism (3) and a second filter mechanism (5) which are communicated with each other, a fresh air inlet pipe (4) is arranged on one side of the first filter mechanism (3), the second filter mechanism (5) is communicated with a main pipe (6) through a connecting pipe (16) on one side, and the main pipe (6) is communicated with a first branch pipe (7) and a second branch pipe (9) respectively; a first electromagnetic valve (8) is arranged on the first branch pipe (7). The first filter mechanism (3) comprises a first treatment bin (14) and a second treatment bin (15), and a coarse filter element (25) and a dehumidification module (26) are arranged in the first treatment bin (14) and the second treatment bin (15) from top to bottom; the first treatment bin (14) and the second treatment bin (15) are communicated with the second filter mechanism (5) through air guide pipes (24) on the top; the fresh air inlet pipe (4) is communicated with the first treatment bin (14) and the second treatment bin (15) through a plurality of air supply pipes. The air supply pipe group comprises a wind supply branch pipe (27) connected with the fresh air inlet pipe (4), the wind supply branch pipe (27) is provided with a second air supply nozzle (29) and a first air supply nozzle (28) communicated with the first treatment bin (14) and the second treatment bin (15) respectively, and a second electromagnetic valve (30) is arranged on the wind supply branch pipe (27) between the second air supply nozzle (29) and the first air supply nozzle (28). The second filter mechanism (5) comprises a shell, a partition plate (21) is arranged in the shell, the partition plate (21) divides the shell into an upper partition cavity (22) and a lower partition cavity (23) arranged in sequence, an air port (19) for communicating the upper partition cavity (22) and the lower partition cavity (23) is formed in the partition plate (21) away from one end connected with the connecting pipe (16); a fine filter element (20) is arranged in the lower partition cavity (23). A sterilization mechanism is arranged in the main pipe (6), the sterilization mechanism comprises an ultraviolet sterilization lamp (32) and an air guide cylinder (33) concentrically arranged with the main pipe (6), and the ultraviolet sterilization lamp (32) is vertically inserted into the air guide cylinder (33) on the top of the air guide cylinder (33); The air guide cylinder (33) is a tapered cylinder which is wide on the top and narrow on the bottom, a plurality of cones (34) are arranged on the inner wall of the tapered cylinder in a circumferential array, and a second reflective film (35) is attached to each cone (34); The sterilization mechanism further comprises a fan (31) arranged above the air guide cylinder (33); the fan (31) comprises a driving mechanism (312) and a fan blade (311) arranged on the output end of the driving mechanism (312), and a first reflective film (313) is attached to one side of each blade of the fan blade (311) facing the air guide cylinder (33).

2. The cleanroom intelligent air conditioning device according to claim 1, wherein: The upper partition cavity (22) is provided with a heating assembly close to one end of the connecting pipe (16), the heating assembly comprises a net rack (17), and the net rack (17) is provided with a heater (18) for heating the gas entering into the upper partition cavity (22).

3. A clean room intelligent air conditioning device according to claim 2, characterized in that: Each blade of the fan leaf (311) is bent to form a first bending part (3111), a second bending part (3112) and a third bending part (3113) which are continuously bent.

4. A clean room intelligent air conditioning device according to claim 3, wherein: Each blade of the fan leaf (311) is a twisted curved surface.

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