Electrophoretic magnetic particles, dielectric elastomer thin film, driver and preparation method thereof

Abstract

The application discloses an electrophoretic magnetic particle, a dielectric elastomer film, a driver and a preparation method thereof. The application comprises synthesis of the electrophoretic magnetic particle; the modified magnetic particle is dispersed in a dielectric elastomer prepolymer liquid, the spatial distribution of the magnetic particle is controlled by applying an electric field, and the film is cured by using an ultraviolet curing machine; a patterned light shielding mask is attached to the upper and lower surfaces of the mold to design a customizable deformation magnetic dielectric film. The application takes the magnetic particle as a single medium, controls the spatial distribution of the magnetic particle, realizes integrated design of multi-modal deformation and multi-mode control of the driver, does not need to introduce a traditional passive structure, has no interface layering damage risk, and is expected to prepare a non-symmetrical structure dielectric elastomer film in a large scale.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of soft robotic driving material, and particularly relates to a seamless asymmetric structure magnetic dielectric elastomer film, a driving device capable of customizable deformation and magnetic-electric dual control and a preparation method thereof. BACKGROUND

[0002] The dielectric elastomer driver is composed of a dielectric elastomer film and flexible electrodes coated on the upper and lower surfaces thereof. Under the action of an electric field, positive and negative charges gather on the upper and lower surfaces of the film and form Maxwell stress, thereby triggering reversible deformation of the elastomer film to realize conversion of electric energy into mechanical energy. High energy density, fast response speed, large deformation and light weight are its outstanding advantages. It has great application potential in the fields of bionic robot design, wearable sensing and monitoring system development, etc. In particular, in the field of soft robot design and preparation, dielectric elastomer is an important material basis for realizing lightweight, wearable and intelligent actuators in the future. In order to broaden the application range of the dielectric elastomer driver, improve the matching degree of the driving mode and the actual life motion mode, and improve the driving stability in complex environments, it is of great significance to design and prepare a dielectric elastomer film with multi-modal out-of-plane motion deformation and multi-mode control driving.

[0003] At present, the out-of-plane deformation of the dielectric elastomer driver mainly utilizes the introduction of an asymmetric structure, directly bonds the dielectric elastomer film to a passive layer, and utilizes the asymmetric deformation between the two to realize the out-of-plane deformation of the driver. In order to improve the out-of-plane output force of the dielectric elastomer, the passive layer material is usually selected from high modulus polymer films (PET film and BOPP film, etc.). However, due to the differences in mechanical properties, strain size, etc., the direct bonding of the flexible dielectric elastomer film and the high modulus passive layer usually has the problem of interface modulus mismatch. Especially in the long period of cyclic driving process, stress concentration at the soft-hard interface is easy to cause local peeling of the device or cause amplification of micro defects, and then cause electrical breakdown and make the device fail. Eliminating the interface between the traditional asymmetric structure films has important value for improving the out-of-plane execution stability and durability of the dielectric elastomer driver.

[0004] In addition, the dielectric elastomer driver based on the asymmetric structure can usually only produce simple bending motion, and the driving mode only relies on electric field control. At present, to realize multi-modal motion and multi-mode control of the dielectric elastomer driver needs to rely on complex structure and control circuit design, heterogeneous interface engineering and other technologies, which limits the large-scale application of the dielectric elastomer driver. The main difficulties in large-scale preparation of the long-life asymmetric structure dielectric elastomer driver with multi-modal deformation and multi-mode control are:

[0005] 1) The high-performance out-of-plane output of dielectric elastomer actuators requires a passive layer structure with high modulus, and the introduction of an interface layer increases the risk of device damage. On the basis of an asymmetric structure, there are still certain challenges in realizing seamless connection of soft / hard materials.

[0006] 2) The rich motion forms and control methods of dielectric elastomer actuators usually require the introduction of different elements, and the introduction of too many elements will increase the difficulty of preparing the actuator. How to realize the dual-phase design of the motion form and control method of the actuator through single element introduction is still a problem to be solved.

[0007] Currently, some research work is trying to solve these problems, such as designing a gradient interface layered structure to realize a smooth transition of soft and hard materials and improve the service life of the actuator. Or through patterned electrode design, realize the programmability of the out-of-plane deformation of the actuator.

[0008] However, the current research only solves a single problem, and lacks effective strategies to solve the contradiction between the service life of the asymmetric structure dielectric elastomer actuator, multi-dimensional deformation and multi-phase driving. SUMMARY

[0009] In order to solve the problems in the background art, the present application provides a kind of electrophoretic magnetic particle, seamless asymmetric structure magnetic dielectric elastomer film, customizable deformation and magnetoelectric dual control actuator and its preparation method, solve the problem of the service life of the asymmetric structure dielectric elastomer actuator, and the technical problem that multi-dimensional deformation and multi-phase driving cannot be realized at the same time.

[0010] The technical scheme of the present application is:

[0011] The scheme of the present application includes: 1) synthesis of electrophoretic magnetic particles; 2) disperse modified magnetic particles in dielectric elastomer precursor solution, control the spatial distribution of magnetic particles by applying an electric field and use a UV curing machine to cure the film; 3) design customizable deformation magnetic dielectric film as actuator by pasting patterned light shielding mask on the upper and lower surfaces of the mold.

[0012] The first aspect of the present application provides a preparation method of electrophoretic magnetic particles.

[0013] The second aspect of the present application provides a seamless asymmetric structure dielectric elastomer film prepared based on the above magnetic particles.

[0014] The third aspect of the present application provides a preparation method of a customizable deformation and magnetoelectric dual control dielectric elastomer actuator.

[0015] I. A preparation method of electrophoretic magnetic particles, the method comprising:

[0016] 1) ultrasonic dispersion of magnetic particles to obtain a dispersion liquid;

[0017] 2) The dispersion liquid is mechanically stirred at a speed of 400 rpm / min, and the surfactant is added during the stirring process for reaction. After a reaction time of 4 hours, the magnetic particles with a negatively charged surface are obtained, and are separated by a magnet and washed with deionized water. After drying, the modified magnetic particles of the modified product are obtained, i.e. the electrophoretic magnetic particles.

[0018] In an exemplary embodiment, the magnetic particles are selected from one of ferrite (Fe3O4), neodymium iron boron (NdFeB), and carbonyl iron powder.

[0019] Preferably, the magnetic particles are carbonyl iron powder; more preferably, flaky carbonyl iron powder is used.

[0020] In an exemplary embodiment, the surfactant is an anionic surfactant or a cationic surfactant.

[0021] Preferably, the surfactant is an anionic surfactant; more preferably, sodium dodecyl sulfonate (SDS) is used.

[0022] In an exemplary embodiment, the ratio of the amount of the magnetic particles to the amount of the surfactant is 1:1 w / w%.

[0023] In an exemplary embodiment, the solvent of the dispersion liquid is deionized water.

[0024] II. A method for preparing a seamless asymmetric structure dielectric elastomer film based on electrophoretic magnetic particles, the method comprising:

[0025] 1) dispersing the electrophoretic magnetic particles of the modified magnetic particles in a dielectric elastomer precursor solution to form a magnetic particle doped mixed solution;

[0026] 2) injecting the magnetic particle doped mixed solution into a fixed mold, applying an electric field to control the spatial distribution of all the magnetic particles by electrophoresis, and using an ultraviolet curing machine to form a thin film, i.e. a seamless asymmetric structure dielectric elastomer film.

[0027] In an exemplary embodiment, the dielectric elastomer precursor solution is selected from a polyacrylic acid-based dielectric elastomer; preferably, a processable high-performance dielectric elastomer (PHDE) is used.

[0028] In an exemplary embodiment, the mass fraction of the magnetic particles in the dielectric elastomer precursor solution is 3-10 wt%, optionally 5 wt%.

[0029] In an exemplary embodiment of the step 2), the electric field is applied to make the electrophoretic magnetic particles close to the anode, and the electric field strength is set to 4 v / μm, and the electrophoresis time is 1 h.

[0030] In an exemplary embodiment, the main working wavelength of the ultraviolet curing machine is 365 nm, the power is 3kw, and the curing time is 100 s.

[0031] III. A method for preparing a dielectric elastomer driver with customizable deformation and magnetoelectric dual control based on electrophoretic magnetic particles, the method comprising:

[0032] 1) dispersing the modified electrophoretic magnetic particles in the dielectric elastomer precursor solution to form a magnetic particle doped mixture;

[0033] 2) injecting the magnetic particle doped mixture into a fixed mold, first applying an electric field to control the migration of the electrophoretic magnetic particles to the positive direction in the first electrophoresis, forming a spatial distribution along the thickness direction;

[0034] 3) attaching a patterned and cut light shielding mask to the upper and lower surfaces of the fixed mold, and using the ultraviolet curing machine to expose and cure the part of the magnetic particle doped mixture that is not covered by the light shielding mask;

[0035] 4) removing the light shielding mask, applying an electric field to control the spatial distribution of the electrophoretic magnetic particles in the light shielding area, and then using the ultraviolet curing machine to expose and cure the remaining part, i.e. the entire magnetic particle doped mixture, to form a dielectric elastomer film;

[0036] 5) removing the dielectric elastomer film from the fixed mold, attaching a hollow mask to the upper and lower surfaces of the dielectric elastomer film obtained in step 3, and spraying flexible electrodes on the upper and lower surfaces of the dielectric elastomer film in the hollow part of the hollow mask;

[0037] 6) assembling the micro metal coil with the dielectric elastomer film obtained after spraying the flexible electrodes in step 5, i.e. fixing and connecting them to each other, and fixing the micro metal coil to the surface of the dielectric elastomer film to obtain a dielectric elastomer driver with customizable deformation and magnetoelectric dual control.

[0038] The fixed mold includes glass, ITO film, PET film, and rubber mold, the rubber mold has a through groove in the middle for injecting the magnetic particle doped mixture, and the two side surfaces of the rubber mold are sequentially stacked with PET film, ITO film, and glass; specifically, a layer of PET film is arranged on each of the upper and lower surfaces of the rubber mold, an ITO film is further arranged on the outer surface of each layer of PET film, and a glass is further arranged on the outer surface of each ITO film.

[0039] The rubber mold is used to load the magnetic particle doped mixture, the PET film is used as an insulating layer to prevent the magnetic particles from discharging with the electrodes, the ITO film is used as a conductive electrode, and the glass is used as a hard substrate.

[0040] In step 2), ITO film is arranged on the surface of the two glasses, and PET film is sealed on the surface of the ITO film; then rubber mold with through slot is placed on the surface of PET film of one of the glasses, and magnetic particle doped mixed solution is injected; the other glass is placed on the surface of the rubber mold, and the mold is fixed by using long tail clamp; electric field is applied to control the migration of the electrophoretic magnetic particles to the positive side in the first electrophoresis, so that the electrophoretic magnetic particles produce spatial distribution in the thickness direction in the mixed solution.

[0041] In step 3), two light-shielding masks are respectively attached to the surface of the glass on the outer surface of the fixed mold on both sides, and the above-mentioned ultraviolet curing machine is used to irradiate the magnetic particle doped mixed solution in the through slot after the ultraviolet light is sequentially transmitted through the blank pattern of the light-shielding mask, the glass, the ITO film and the PET film, and local exposure curing is performed.

[0042] In step 4), the light-shielding mask is removed, the electric field is applied to control the spatial distribution of the electrophoretic magnetic particles in the magnetic particle doped mixed solution which is not exposed and cured in the second electrophoresis, and then the above-mentioned ultraviolet curing machine is used to irradiate the whole magnetic particle doped mixed solution in the through slot after the ultraviolet light is sequentially transmitted through the glass, the ITO film and the PET film, and whole exposure curing is performed, so as to prepare and form the dielectric elastomer film in the through slot.

[0043] Finally, the glass, the ITO film and the PET film are removed, and the dielectric elastomer film is taken out from the through slot.

[0044] In an exemplary embodiment, in step 5), the material of the flexible electrode is dispersed by using isopropyl alcohol and water mixed solution to form a dispersion liquid, the volume ratio of isopropyl alcohol to water in the isopropyl alcohol and water mixed solution is 36:4 v / v%, the dispersion liquid is centrifuged, the supernatant is taken after centrifugation at a speed of 8000 rpm / min for 10 min, and the supernatant is sprayed on the surface of the dielectric elastomer film.

[0045] In step 6), the micro metal coil is distributed in front of and behind the dielectric elastomer film, is insulated from the flexible electrode, and is independently connected and controlled.

[0046] The dielectric elastomer driver prepared above can be controlled by electricity and magnetism, the spatial distribution of the magnetic particles is controlled by applying electric field electrophoresis, the spatial modulus distribution of the dielectric elastomer film is adjusted, and the multi-modal out-of-plane driving of the dielectric elastomer film and the dielectric elastomer driver is realized.

[0047] In an exemplary embodiment, the material of the flexible electrode is carbon nanotube (CNTs); preferably, single-walled carbon nanotube (SCNTs).

[0048] In an exemplary embodiment, the spray standard of the flexible electrode material is 100 kΩ to the surface resistance of the film.

[0049] In an exemplary embodiment, the micro metal coil material is a copper coil, the coil diameter is 6 mm, and the wire diameter is 0.1 mm.

[0050] In an exemplary embodiment, the micro metal coil is packaged after assembly using an organic silicone elastomer (Ecoflex-0030).

[0051] According to the above, the high-performance asymmetric structure dielectric elastomer driver is prepared, the interface instability problem is solved, and the movement form and control mode of the driver are enriched.

[0052] The beneficial effects of the present application are:

[0053] The present application uses magnetic particles as a single medium, realizes multi-modal out-of-plane driving of the dielectric elastomer film by regulating the spatial distribution of the magnetic particles. Compared with the traditional strategy, that is, by combining the non-drivable polymer film with the dielectric elastomer film to realize the out-of-plane deformation. The technical means provided by the present application has the following advantages, 1) the asymmetric structure dielectric elastomer film is designed by regulating the spatial aggregation distribution state of the magnetic particles. Without introducing the passive layer structure, the risk of interface delamination damage of the driver in long period operation is eliminated; 2) the magnetic response performance is introduced by doping magnetic particles. By utilizing the synergistic effect of electricity-magnetism, the multi-dimensional motion control of the dielectric elastomer driver can be realized, and the out-of-plane output performance of the dielectric elastomer driver is enhanced, including the deformation ability, the force output performance, etc.; 3) by using the injection molding / electrophoresis process, it is easier to realize the large-area preparation of the asymmetric structure dielectric elastomer film, which will help the industrial practical application of the dielectric elastomer film. BRIEF DESCRIPTION OF DRAWINGS

[0054] The accompanying drawings are used to provide an understanding of the technical scheme of the present application, and constitute a part of the specification, together with the embodiments of the present application, for explaining the technical scheme of the present application, and do not constitute a limitation on the technical scheme of the present application.

[0055] Figure 1 It is a preparation schematic diagram of the modified magnetic particles of the present application;

[0056] Figure 2 It is a Zeta potential diagram of the modified magnetic particles of the present application;

[0057] Figure 3 It is a Zeta potential diagram of the carbonyl iron powder used in the present application;

[0058] Figure 4 It is a mold schematic diagram used in the present application;

[0059] Figure 5 Schematic diagram for preparation of seamless asymmetric structure dielectric elastomer film of the present application;

[0060] Figure 6 Micrograph of seamless asymmetric structure dielectric elastomer film prepared in the present application;

[0061] Figure 7 Electrically driven deformation diagram of dielectric elastomer film prepared in the present application;

[0062] Figure 8 Endurance performance comparison diagram of dielectric elastomer film prepared in the present application;

[0063] Figure 9 Schematic diagram for preparation of customizable deformation dielectric elastomer film of the present application;

[0064] Figure 10 Electrically driven deformation diagram of customizable deformation dielectric elastomer film prepared in the present application;

[0065] Figure 11 Schematic diagram of dielectric elastomer driver assembled in the present application.

[0066] Figure 12 Physical diagram and performance test diagram of dielectric elastomer driver assembled in the present application. DETAILED DESCRIPTION

[0067] In order to make the purposes, technical solutions and advantages of the present application clearer and more understandable, the embodiments of the present application will be described in detail below.

[0068] The present application will be further described in detail below in combination with specific examples, but the examples should not be understood as limiting the present application.

[0069] The embodiments of the present application are as follows:

[0070] The case of Example 1 is:

[0071] As shown in Figure 1 , a preparation of electrophoretic magnetic particles includes the following steps:

[0072] 1) 1 g of carbonyl iron powder was placed in 100 mL of deionized water and ultrasonically dispersed for 1 h, and a mechanical stirrer was used to stir the dispersion at a speed of 400 rpm / min to prevent the magnetic particles from depositing, to obtain a dispersion;

[0073] 2) 1 g of sodium dodecyl sulfate SDS was slowly added to the dispersion in step 1), and the reaction was stirred at 400 rpm / min at 25 °C for 4 h to obtain carbonyl iron powder with a surface charge, which is the reaction product;

[0074] 3) The reaction product was separated by using a magnet, washed with deionized water three times, and dried in a 60 ℃ oven. The modified product was obtained by grinding, which was the electrophoretic magnetic particles.

[0075] The test case of this example is that the magnetic particles are ultrasonically dispersed in deionized water, and the Zeta potential value of the magnetic particles is measured by a Zeta potential analyzer.

[0076] The test results are as shown in Figure 2 , the Zeta potential value of the SDS modified magnetic particles in the water dispersion medium is -17 V.

[0077] As can be seen from the above, the surface electronegativity of the magnetic particles can be significantly enhanced by modifying the carbonyl iron powder with sodium dodecyl sulfate SDS.

[0078] Comparative Example 1

[0079] The difference between Comparative Example 1 and Example 1 is that the surface of the magnetic particles is not treated with a surfactant. As shown in Figure 3 , the Zeta potential value of the unmodified carbonyl iron powder in the same dispersion medium is only -6 V.

[0080] The case of Example 2 is:

[0081] As shown in Figure 4 , the preparation of a seamless asymmetric structure dielectric elastomer film includes the following steps:

[0082] 1) Mix 1 g of modified carbonyl iron powder with 20 g of PHDE solution, and shake the mixture using a shaker for 12 h to form a magnetic particle doped mixed solution;

[0083] 2) As shown in Figure 4 , the glass substrate, ITO conductive film (surface resistance 10 Ω), PET film (thickness 10 μm) and hollow silica gel sheet (thickness 100 μm and 200 μm) are assembled according to Figure 4 to form a fixed mold, and the magnetic particle doped mixed solution is injected into the hollow channel part of the hollow silica gel sheet, and the metal clamps are clamped around;

[0084] 3) As shown in Figure 5 , connect the DC power supply to the upper and lower surfaces of the fixed mold, and power on to generate an electric field of 5 v / μm for electrophoresis for 1 h, so that the electrophoretic magnetic particles form a spatial distribution along the thickness direction;

[0085] 4) As shown in Figure 5 , the mold after electrophoresis is placed in a UV curing machine (Version RX400-1, 365 nm, 3kW, Ergu, China) for UV exposure, so that it is cured and formed;

[0086] 5) After the end of the curing molding, the fixed mold is placed in the 80 ℃ hot table to heat slowly demolding, and a seamless asymmetric structure dielectric elastomer film is obtained.

[0087] The test case of the embodiment is: using a high-power microscope to observe the cross section of the dielectric elastomer film. The static / dynamic electro- deformation performance of the dielectric elastomer film is tested by a single-armed beam experiment.

[0088] The test result is: as shown in Figure 6 , a significant layered structure, i.e. a pure elastomer layer and a magnetic particle aggregation layer, can be observed at the cross section of the dielectric elastomer film. As shown in Figure 7 , under an electric field of 16 V / μm, the dielectric elastomer film can be bent and deformed into a circular ring shape. And under a high-frequency dynamic electric field, the seamless asymmetric structure dielectric elastomer film has better cycle durability.

[0089] As can be seen from the above, by electrophoretically regulating the spatial distribution of magnetic particles, a seamless asymmetric structure dielectric elastomer film can be prepared, and the film has significant bending deformation performance and good durability.

[0090] Comparative Example 2:

[0091] The difference between Comparative Example 2 and Example 2 is that an adhesive is used to combine the non-actuable passive layer film with the dielectric elastomer film to form a traditional asymmetric structure dielectric elastomer driver with an interface. As shown in Figure 8 , the traditional asymmetric structure dielectric elastomer film is prone to peeling between the main layer and the passive layer due to high-frequency bending deformation in long-period operation, thereby causing electrical breakdown.

[0092] The case of Example 3 is:

[0093] As shown in Figure 9 , the preparation of the deformable dielectric elastomer film includes the following steps:

[0094] 1) The mixed solution is injected into the fixed mold according to the same step 3) of Example 2, and the first electrophoresis is performed according to the same step 3) of Example 2.

[0095] 2) The light-shielding mask is laser cut according to the set pattern, and the cut-out light-shielding mask is attached to the upper and lower surfaces of the fixed mold, i.e. the outer surface of the glass, and then placed in the ultraviolet curing machine curing exposure area;

[0096] 3) After removing the light-shielding mask, the spatial distribution of the remaining electrophoretic magnetic particles is regulated by applying an electric field for the second time, so that an interlaced spatial distribution is formed.

[0097] 4) The solidified mold at the end of electrophoresis is placed in the above-mentioned ultraviolet curing machine for complete curing molding, and the dielectric elastomer film is obtained by demolding according to step 5) of Example 2;

[0098] 5) The patterned hollow PET mask is attached to the surface of the dielectric elastomer film, and SCNTs dispersion liquid is sprayed to the surface with a surface resistance of 100 kΩ;

[0099] The test case of this embodiment is to test the electrically driven deformation of the dielectric elastomer film by a high-voltage power supply.

[0100] The test result is that, as shown in Figure 10 , the dielectric elastomer film can realize torsional deformation under the action of an electric field.

[0101] As can be seen from the above, by controlling the electrophoresis and photocrosslinking regions, the deformation ability of the dielectric elastomer film can be realized.

[0102] The case of Example 4 is:

[0103] As shown in Figure 11 , the preparation of the magnetoelectric dual-controlled dielectric elastomer driver includes the following steps:

[0104] 1) A micro copper coil with a diameter of 6 mm is prepared using Ecoflex - 0030 (curing agent / crosslinking agent = 1:1 v / v%);

[0105] 2) The dielectric elastomer film after spraying SCNTs obtained in steps 4 and 5) of Example 3 and the coil of step 1) are assembled to obtain a dielectric elastomer driver with customized deformation ability and magnetic / electric dual control.

[0106] The test case of this embodiment is to test the adsorption performance of the assembled negative pressure type dielectric elastomer suction cup to the object. The test result is that, as shown in Figure 12 , the assembled negative pressure type dielectric elastomer suction cup can realize adsorption to the target object under the synergistic action of electricity / magnetism. As can be seen from the above, the introduction of magnetic response function on the basis of electric response can effectively improve the driving performance of the dielectric elastomer.

[0107] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and those of ordinary skill in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A method of fabricating a customizable, morphing and magnetoelectrically dual-controlled dielectric elastomer actuator, characterized by: The preparation method of the dielectric elastomer driver comprises: 1) dispersing electrophoretic magnetic particles in a dielectric elastomer precursor solution to form a magnetic particle doped mixture; 2) injecting the magnetic particle doped mixture into a fixed mold, first applying an electric field to control the migration of the electrophoretic magnetic particles to the positive direction in the first electrophoresis to form a spatial distribution along the thickness direction; 3) attaching a patterned cutting light shielding mask to the upper and lower surfaces of the fixed mold, and using a UV curing machine to expose and cure the part not covered by the light shielding mask through the light shielding mask; 4) remove the light shielding mask, apply an electric field to control the spatial distribution of the electrophoretic magnetic particles that were shielded by the light shielding mask in the second electrophoresis, and then use the above-mentioned UV curing machine to expose and cure the remaining part, that is, to cure the entire magnetic particle doped mixture, so as to form a dielectric elastomer film; 5) remove the dielectric elastomer film from the fixed mold, attach a hollow mask to the upper and lower surfaces of the dielectric elastomer film obtained in step 4), and spray flexible electrodes on the upper and lower surfaces of the dielectric elastomer film at the hollow part of the hollow mask; 6) assemble the micro metal coil with the dielectric elastomer film after spraying the flexible electrode in step 5) to obtain a dielectric elastomer driver with customized deformation ability and magnetic-electric dual control; The electrophoretic magnetic particles are prepared by the following method: 1) ultrasonic dispersion of magnetic particles to obtain a dispersion liquid; 2) mechanical stirring of the dispersion liquid, and adding a surfactant during stirring to react, obtaining negatively charged magnetic particles after a period of reaction, and separating and washing with deionized water using a magnet, and drying to obtain modified magnetic particles, that is, electrophoretic magnetic particles.

2. The preparation method of the dielectric elastomer driver with customizable deformation and magnetic-electric dual control according to claim 1, wherein: The fixed mold comprises glass, ITO film, PET film and rubber mold, the rubber mold is provided with a through groove in the middle for injecting the magnetic particle doped mixture, and the two side surfaces of the rubber mold are sequentially stacked with PET film, ITO film and glass from outside to inside; a layer of PET film is arranged on the upper and lower surfaces of the rubber mold, and ITO film and glass are arranged on the outer surfaces of each layer of PET film; In step 2), ITO film is arranged on the surfaces of the two glasses, and PET film is sealed and covered on the surface of the ITO film; then the rubber mold with the through groove is placed on the PET film surface of one of the glasses and the magnetic particle doped mixture is injected; the other glass is covered on the surface of the rubber mold and the mold is fixed using a long tail clamp; An electric field is applied to control the migration of the electrophoretic magnetic particles to the positive side in the first electrophoresis, so that the electrophoretic magnetic particles produce a spatial distribution along the thickness direction in the mixture.

3. The preparation method of the dielectric elastomer driver with customizable deformation and magnetic-electric dual control according to claim 1, wherein: In the step 3), two light-shielding masks are respectively attached to the surfaces of the glass on the outer surfaces of the two sides of the fixed mold, and the ultraviolet light is emitted by the ultraviolet curing machine to irradiate the magnetic particle doped mixed solution in the through groove after sequentially penetrating the light-shielding mask, the glass, the ITO film and the PET film, so as to perform local exposure curing.

4. The preparation method of the dielectric elastomer driver with customizable deformation and dual magnetic and electric control according to claim 1, characterized in that: In the step 4), the light-shielding mask is removed, an electric field is applied to perform second electrophoretic regulation on the spatial distribution of the electrophoretic magnetic particles in the magnetic particle doped mixed solution which is not exposed and cured, and then the ultraviolet light is emitted by the ultraviolet curing machine to irradiate the whole magnetic particle doped mixed solution in the through groove after sequentially penetrating the glass, the ITO film and the PET film, so as to perform whole exposure curing, and further to prepare the dielectric elastomer film in the through groove.

5. The preparation method of the dielectric elastomer driver with customizable deformation and dual magnetic and electric control according to claim 1, characterized in that: In the step 5), the material of the flexible electrode is dispersed to form a dispersion liquid by using an isopropyl alcohol and water mixed solution, the volume ratio of isopropyl alcohol to water in the isopropyl alcohol and water mixed solution is 36:4 v / v%, the dispersion liquid is centrifuged to take the supernatant, the centrifugal speed is 8000 rpm / min, and the time is 10 min, and then the supernatant is sprayed on the surface of the dielectric elastomer film. In the step 6), the micro metal coils are distributed in front of and behind the dielectric elastomer film and are mutually insulated from the flexible electrode and independently connected and controlled.

6. The preparation method of the dielectric elastomer driver with customizable deformation and dual magnetic and electric control according to claim 1, characterized in that: The magnetic particles are selected from one of ferroferric oxide and carbonyl iron powder; The surfactant is an anionic surfactant or a cationic surfactant; The use amount ratio of the magnetic particles to the surfactant is 1:1 w / w%; The solvent of the dispersion liquid is deionized water.

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