Pneumatic driving apparatus, positioning apparatus, processing apparatus, and device manufacturing method

Abstract

A pneumatic actuator is provided with: an X guide that drives a body to be driven in the X direction by means of gas pressure; and a Y guide (132) that drives the driven body in a Y direction intersecting the X direction by means of gas pressure. A first drive pipe (128) is provided inside the X guide, and a first drive gas is supplied to the first drive pipe (128), said first drive gas generating a drive force in the X direction by the X guide. A second drive pipe (138) to which a second drive gas that generates a drive force in the Y direction by means of the Y guide (132) is supplied and a drive gas relay pipe (158) to which a first drive gas is supplied are provided inside the Y guide (132), and a second drive pipe (138) to which a second drive gas that generates a drive force in the Y direction by means of the Y guide (132) is supplied, and a second drive gas relay pipe (158) to which a second drive gas that generates a drive force in the Y direction by means of the Y guide (132) is supplied are provided inside the Y guide (132). The first drive gas is supplied to the first drive tube (128) through a drive gas relay tube opening (158A), which is an opening facing the first drive tube (128).

Description

Technical Field

[0001] This invention relates to a pneumatic drive device, etc. Background Technology

[0002] Patent Document 1 discloses a pneumatic actuator for use in a vacuum environment, comprising a slider driven along a predetermined movement direction by gas pressure in a pneumatic servo chamber and a guide member extending along the movement direction and guiding the slider. The slider can be suspended relative to the guide member and move smoothly via an air bearing formed by compressed air supplied via an air cushion between the outer periphery of the slider and the inner periphery of the guide member.

[0003] Previous technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent No. 6893170 Summary of the Invention

[0006] The technical problem to be solved by the invention

[0007] In the pneumatic actuators such as those described in Patent Document 1, a mechanism is required that supplies various parts with gas (hereinafter also referred to as driving gas) for generating the driving force of the slider or gas (hereinafter also referred to as suspending gas) for forming an air cushion and / or air bearing between the slider and the guide. Since the slider moves relative to the guide, a variable tube that can deform with the movement of the slider is used, for example, to supply various gases. However, not only is it required that the design consider that the variable tube does not obstruct the movement of the slider, but also, since the variable tube, as a movable or variable component, is prone to deterioration, frequent maintenance is required to prevent contamination of the vacuum environment.

[0008] The present invention was made in view of this situation, and its object is to provide a pneumatic drive device, etc., that can effectively supply driving gas.

[0009] means for solving technical problems

[0010] To address the aforementioned issues, a pneumatic drive device according to one embodiment of the present invention includes: a first drive shaft that drives a driven body along a first direction using gas pressure; and a second drive shaft that drives the driven body along a second direction intersecting the first direction using gas pressure. In the pneumatic drive device, the first drive shaft drives the driven body along the first direction using gas supplied through the interiors of the first and second drive shafts.

[0011] In this embodiment, the gas used to generate the driving force of the first drive shaft is effectively supplied through the interior of the first drive shaft and the interior of the second drive shaft.

[0012] Another embodiment of the present invention is a positioning device. This device positions the driven object using the aforementioned pneumatic drive device.

[0013] Another embodiment of the present invention is a processing device. This device performs a prescribed process on a driven body positioned by the aforementioned positioning device.

[0014] Another embodiment of the present invention is a device manufacturing method. This method manufactures a device through processing based on the aforementioned processing apparatus.

[0015] Furthermore, any combination of the above-mentioned constituent elements or their descriptions can be transformed into methods, apparatus, systems, storage media, computer programs, etc., and this invention is also included.

[0016] Invention Effects

[0017] According to the present invention, the driving gas can be supplied effectively. Attached Figure Description

[0018] Figure 1 This is a schematic three-dimensional view of a pneumatic actuator.

[0019] Figure 2 This is a cross-sectional view schematically showing the basic structure and function of the X actuator.

[0020] Figure 3 This is a schematic cross-sectional view of the X servo valve.

[0021] Figure 4 This is a cross-sectional view schematically showing the basic structure and function of a Y-actuator.

[0022] Figure 5 This is a cross-sectional view of the Y actuator taken along the ZX direction.

[0023] Figure 6 This is a side view showing the inner circumferential surface of the Y slider on the +X side (positive side in the X direction).

[0024] Figure 7 This is a side view showing the inner circumferential surface of the Y slider on the -X side (negative side in the X direction).

[0025] Figure 8 The diagram schematically shows the pressure in a cross-sectional view of the Y actuator along the ZX section. Detailed Implementation

[0026] Hereinafter, embodiments of the present invention (hereinafter also referred to as embodiments) will be described in detail with reference to the accompanying drawings. In the description and / or drawings, the same or equivalent constituent elements, components, processes, etc., are labeled with the same symbols, and repeated descriptions are omitted. The proportions or shapes of the illustrated parts are provided for convenience in simplifying the explanation and are not intended to be limiting unless specifically mentioned. The embodiments are merely examples and do not limit the scope of the present invention in any way. All features or combinations thereof described in the embodiments are not necessarily essential to the present invention.

[0027] Figure 1 This is a perspective view schematically showing a platform device as a positioning device according to an embodiment of the present invention, or a pneumatic actuator 100 as a pneumatic drive device. The pneumatic actuator 100 includes: an X actuator 120, which generates a driving force in the X direction as a first direction using gas pressure; and a Y actuator 130, which generates a driving force in the Y direction as a second direction intersecting the X direction using gas pressure.

[0028] The X actuator 120 includes an X guide 122 serving as a first drive axis, which linearly drives the X slider 124, which is the driven object, in the X direction. The Y actuator 130 includes a Y guide 132 serving as a second drive axis, which linearly drives the Y slider 134, the X guide 122, and the X slider 124, which are driven objects, in the Y direction. The X direction is the extension direction of the X guide 122, and the X slider 124 is guided by the X guide 122 and linearly driven in the X direction. The Y direction is the extension direction of the Y guide 132, and the Y slider 134 is guided by the Y guide 132 and linearly driven in the Y direction. In this embodiment, the X and Y directions are orthogonal to each other in the horizontal plane. At this time, the Z direction (the normal direction of the XY plane), which is orthogonal to the X and Y directions, is the vertical direction.

[0029] In this embodiment, a pair of Y actuators 130 are provided at both ends of the X actuator 120 in the X direction. Specifically, a pair of Y sliders 134 are fixed at both ends of the X guide 122 in the X direction. Furthermore, a pair of Y guides 132 are provided to guide the pair of Y sliders 134 along the Y direction. The X guide 122 and the pair of Y guides 132 are H-shaped when viewed from above. The pair of Y sliders 134 are linearly driven along the Y direction by the pair of Y actuators 130 in the same manner, so that their respective positions in the Y direction are equal to each other, that is, the extension direction of these connected X guides 122 is aligned with the X direction. Thus, the pair of Y actuators 130, the pair of Y guides 132, and the pair of Y sliders 134 are substantially the same, and therefore will not be distinguished in the following description unless necessary. Where a distinction is necessary, the side located in the X direction (…) Figure 1The components on the right side (as shown in the image) are designated as positive Y-actuator 130P, positive Y-guide 132P, and positive Y-slider 134P, which will be located on the negative side in the X direction ( Figure 1 The components on the left side of the diagram are designated as negative-side Y actuator 130N, negative-side Y guide 132N, and negative-side Y slider 134N.

[0030] A stage or worktable (not shown) can be mounted on the X-slider 124, which is the driven body. For example, a worktable can be fixed to the upper surface of the X-slider 124. Any workpiece or object to be processed, such as a semiconductor wafer, can be placed on the upper surface of such a worktable. In this case, the pneumatic actuator 100 constitutes part of a positioning device for positioning the workpiece placed on the worktable, which is the driven body, and further constitutes part of a processing apparatus for performing arbitrary processing on the workpiece positioned by the positioning device. Examples of processing apparatuses include semiconductor manufacturing apparatuses or FPD (Flat Panel Display) manufacturing apparatuses such as exposure apparatuses, ion implantation apparatuses, heat treatment apparatuses, ashing apparatuses, sputtering apparatuses, dicing apparatuses, inspection apparatuses, and cleaning apparatuses.

[0031] The X slider 124, the worktable, the workpiece, etc., which are driven objects, are linearly driven along the X guide 122 in the X direction, and are linearly driven along the Y guide 132 along the Y guide 132 integrally with the Y slider 134 and the X guide 122. That is, the X slider 124, the worktable, the workpiece, etc., which are driven objects, are guided by the X guide 122, which is the first drive axis, and the Y guide 132, which is the second drive axis, so that they can be freely driven along both the X and Y directions and positioned at any position in the XY plane (e.g., in the horizontal plane).

[0032] The pneumatic actuator 100 described above can be used in a vacuum environment, such as a vacuum chamber. Here, vacuum refers to a space filled with gas at a pressure lower than that of atmospheric pressure. Vacuum is classified according to pressure range as low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), and high vacuum (0.1 Pa to 100 kPa). -5 Pa), ultra-high vacuum (10 -5 (below Pa), etc.

[0033] The pneumatic actuator 100 of this embodiment can be used in any of the above-described vacuum environments, as well as in non-vacuum environments. However, as described later, the pneumatic actuator 100 of this embodiment avoids the use of variable tubes that pose a risk of contaminating the vacuum environment due to deterioration when supplying driving gas or suspending gas to the X actuator 120 and Y actuator 130. Therefore, the pneumatic actuator 100 of this embodiment is particularly preferred for use in lower-pressure vacuum environments where higher cleanliness is required.

[0034] Figure 2 This is a schematic cross-sectional view illustrating the basic structure and function of the X actuator 120. Specifically, it schematically shows the ZX section at the center of the X actuator 120 in the Y direction. The X actuator 120 includes an X servo valve 126, which supplies a first driving gas (air, etc.) at a pressure commanded by the controller 200 to the X guide 122 and the X slider 124. Specifically, the X servo valve 126 supplies and discharges the first driving gas between a first driving pipe 128 disposed inside the X guide 122 and a servo chamber 150 disposed in the X-direction central internal space of the X slider 124.

[0035] The servo chamber 150 is divided into: the positive side in the X direction ( ) by a pressure plate 123 fixed to the X guide 122. Figure 2 The positive side servo room 152 (right side) and the negative side in the X direction ( Figure 2 The negative-side servo chamber 154 (located on the left side of the X-axis) is included. The X-servo valve 126 includes: a positive-side X-servo valve 126P, which is located on the positive side in the X direction and between the positive-side servo chamber 152 and supplies and discharges the first driving gas; and a negative-side X-servo valve 126N, which is located on the negative side in the X direction and between the negative-side servo chamber 154 and supplies and discharges the first driving gas. The positive-side X-servo valve 126P is connected to the positive-side servo chamber 152 via a positive-side first driving pipe 128P, and the negative-side X-servo valve 126N is connected to the negative-side servo chamber 154 via a negative-side first driving pipe 128N. The positive-side X-servo valve 126P and the negative-side X-servo valve 126N control the supply and discharge of the first driving gas in the positive-side servo chamber 152 and the negative-side servo chamber 154 according to the valve core position described later.

[0036] The positive-side first drive pipe 128P and the negative-side first drive pipe 128N are disposed inside the X guide member 122, but as described later, they are connected to the drive gas relay pipes disposed inside the positive-side Y guide member 132P and the negative-side Y guide member 132N. Furthermore, the positive-side X servo valve 126P and the negative-side X servo valve 126N are disposed, for example, at the Y-direction ends of the positive-side Y guide member 132P and the negative-side Y guide member 132N, and are connected to their respective drive gas relay pipes. Thus, the positive-side X servo valve 126P supplies and discharges the positive-side first drive gas between itself and the positive-side servo chamber 152 via the positive-side drive gas relay pipe inside the positive-side Y guide member 132P and the positive-side first drive pipe 128P inside the X guide member 122. Similarly, the negative-side X servo valve 126N supplies and discharges the negative-side first driving gas between itself and the negative-side servo chamber 154 via the negative-side driving gas relay pipe inside the negative-side Y guide 132N and the negative-side first driving pipe 128N inside the X guide 122.

[0037] The controller 200 controls the positive X servo valve 126P and the negative X servo valve 126N to generate a pressure difference between the positive servo chamber 152 and the negative servo chamber 154. Using this pressure difference, the X slider 124 is driven along the X guide 122 in the X direction.

[0038] The positive-side X servo valve 126P and the negative-side X servo valve 126N are connected to the pump 146 via the positive-side air supply pipe 144P and the negative-side air supply pipe 144N, respectively. The pump 146 serves as the supply source of air (positive-side first driving gas and negative-side first driving gas). Furthermore, the positive-side X servo valve 126P and the negative-side X servo valve 126N discharge air (positive-side first driving gas and negative-side first driving gas) to the outside of the vacuum chamber (not shown) housing the pneumatic actuator 100 via the positive-side exhaust pipe 148P and the negative-side exhaust pipe 148N, respectively.

[0039] The positive-side first driving gas from pump 146 is supplied to the positive-side servo chamber 152 via the positive-side supply pipe 144P, the positive-side X servo valve 126P, the positive-side driving gas relay pipe inside the positive-side Y guide 132P, and the positive-side first driving pipe 128P inside the X guide 122. Similarly, the negative-side first driving gas from pump 146 is supplied to the negative-side servo chamber 154 via the negative-side supply pipe 144N, the negative-side X servo valve 126N, the negative-side driving gas relay pipe inside the negative-side Y guide 132N, and the negative-side first driving pipe 128N inside the X guide 122.

[0040] The positive first driving gas in the positive servo chamber 152 is discharged outside the vacuum chamber via the positive first driving pipe 128P inside the X guide 122, the positive driving gas relay pipe inside the positive Y guide 132P, the positive X servo valve 126P, and the positive exhaust pipe 148P. Similarly, the negative first driving gas in the negative servo chamber 154 is discharged outside the vacuum chamber via the negative first driving pipe 128N inside the X guide 122, the negative driving gas relay pipe inside the negative Y guide 132N, the negative X servo valve 126N, and the negative exhaust pipe 148N. Alternatively, the positive X servo valve 126P and the negative X servo valve 126N can also be located outside the vacuum chamber.

[0041] Figure 3This is a schematic cross-sectional view of the X servo valve 126 (positive X servo valve 126P or negative X servo valve 126N). As a three-way valve with three interfaces 168A, 168B, and 168C, the X servo valve 126 includes a main body 160, a valve core 162 disposed inside the main body 160, a motor 164, and a position sensor 166. The X servo valve 126 switches the connection object of interface 168C between interface 168A and interface 168B based on the position of the valve core 162. The valve core 162, disposed in the Z-direction flow path inside the main body 160, is driven in the Z-direction by the motor 164. The position sensor 166 detects the position of the valve core 162 in the Z-direction.

[0042] Of the two interfaces 168A and 168B arranged along the Z-axis on one side of the main body 160, interface 168A on the +Z side is connected to the exhaust pipe 148 (148P or 148N), and interface 168B on the -Z side is connected to the air supply pipe 144 (144P or 144N). Alternatively, interface 168A can be connected to the air supply pipe 144, and interface 168B can be connected to the exhaust pipe 148. Interface 168C, located on the other side of the main body 160, is connected to the first drive pipe 128 (128P or 128N) inside the X guide 122 via a drive gas relay pipe inside the Y guide 132 (132P or 132N).

[0043] The position measurement result of the valve core 162 detected by the position sensor 166 is supplied to the amplifier unit AU of the controller 200. The controller 200 controls the motor 164 based on the position of the valve core 162 detected by the amplifier unit AU. Under the control of the controller 200, the motor 164 controls the position of the valve core 162 in the Z direction, thereby switching the connection object of the interface 168C between the interface 168A and the interface 168B. When the interface 168C is connected to the interface 168A, the first driving gas in the servo chamber 150 is discharged to the outside of the vacuum chamber through the flow path between the two interfaces. And, when the interface 168C is connected to the interface 168B, the first driving gas supplied from the pump 146 is supplied to the servo chamber 150 through the flow path between the two interfaces.

[0044] exist Figure 2In this design, an air cushion 170, serving as a hydrostatic bearing, is formed between the outer peripheral surface of the X guide 122 and the inner peripheral surface of the X slider 124, allowing the X slider 124 to move smoothly along the X guide 122 in the X direction. The air cushion 170 is formed by continuously supplying a first suspending gas between the outer peripheral surface of the X guide 122 and the inner peripheral surface of the X slider 124. This first suspending gas is compressed air or the like, supplied through a first suspension tube 127 located inside the X guide 122, which serves as a first drive shaft. The X slider 124, suspended from the X guide 122 by the air cushion 170, can move smoothly without actually contacting the X guide 122.

[0045] Multiple air cushions 170 are positioned to clamp the servo chamber 150, which is located at the center of the X-axis slider 124, from both positive and negative sides in the X and / or Y directions. Additionally, in Figure 2 The servo chamber 150, schematically shown, actually extends throughout the X-direction travel of the X slider 124 and can also be clamped from both positive and negative sides in the Y-direction by a pair of air cushions 170 that also extend along the X-direction. Furthermore, multiple air cushions 170 are positioned to clamp the X guide 122 from both positive and negative sides in the Z-direction. By symmetrically arranging multiple air cushions 170 in the X and Z directions, rotation of the X slider 124 about the Y-axis can be effectively suppressed.

[0046] The first suspension tube 127 includes a positive first suspension tube 127P and a negative first suspension tube 127N. The positive first suspension tube 127P and the negative first suspension tube 127N are disposed inside the X guide 122, but as described later, they are connected to suspension gas relay tubes disposed inside the positive Y guide 132P and the negative Y guide 132N. These suspension gas relay tubes are connected to a pump (not shown) that is the same as the pump 146 that serves as the supply source of the first driving gas (the pump 146 may also be shared).

[0047] Thus, the first suspended gas from the positive side of the pump (not shown) is supplied to the air cushion 170 in the positive X direction via the positive suspended gas relay pipe inside the positive Y guide 132P and the first suspended pipe 127P inside the X guide 122. Similarly, the first suspended gas from the negative side of the pump (not shown) is supplied to the air cushion 170 in the negative X direction via the negative suspended gas relay pipe inside the negative Y guide 132N and the first suspended pipe 127N inside the X guide 122.

[0048] Alternatively, the first suspended gas can be supplied to the air cushions 170 on both the positive and negative sides from either the suspended gas relay pipe and the first suspended pipe 127 on the positive or negative side. For example, the first suspended gas from a pump (not shown) can also be supplied to the air cushions 170 on both the positive and negative sides via the positive suspended gas relay pipe inside the positive Y guide 132P and the positive first suspended pipe 127P inside the X guide 122. In this case, on the negative side where the first suspended gas is not supplied, all or part of the negative suspended gas relay pipe inside the negative Y guide 132N and at least part of the negative first suspended pipe 127N may not be provided.

[0049] In the pneumatic actuator 100 used within the vacuum chamber, it is essential to prevent the leakage of the first driving gas, such as compressed air, supplied to the servo chamber 150, or the first suspended gas, such as compressed air, supplied to the air cushion 170 into the vacuum chamber. Therefore, in this embodiment, exhaust channels 172, 174, and 176 are provided on the inner circumferential surface of the X-slider 124 to discharge the first driving gas in the servo chamber 150 and the first suspended gas in the air cushion 170 to the outside of the vacuum chamber. As shown, the exhaust channels 172, 174, and 176 are positioned to clamp the servo chamber 150 and the air cushion 170 from the positive and negative sides in the X and Y directions. In other words, the exhaust channels 172, 174, and 176 are located on the inner circumferential surface of the X-slider 124, further outward than the servo chamber 150 and the air cushion 170.

[0050] Exhaust channels 172, 174, and 176 are arranged from the inside or center outwards in a manner where the pressure decreases sequentially, that is, the vacuum level increases sequentially. For example, exhaust channel 172 is set to atmospheric pressure, exhaust channel 174 to low vacuum, and exhaust channel 176 to medium vacuum. Thus, exhaust channels 172, 174, and 176 with different pressures or vacuum levels are connected by multiple first exhaust pipes 129 located inside the X guide 122, which serves as the first drive shaft. Figure 2 (For convenience, only one is shown in the text) This is achieved. Specifically, the exhaust channel 172 is made to be at atmospheric pressure by opening the first exhaust pipe 129, which is connected to the atmosphere or air at atmospheric pressure, at a position opposite to the exhaust channel 172; the exhaust channel 174 is made to be at low vacuum by opening the first exhaust pipe 129, which is connected to a low vacuum pump (not shown), at a position opposite to the exhaust channel 174; and the exhaust channel 176 is made to be at medium vacuum by opening the first exhaust pipe 129, which is connected to a medium vacuum pump (not shown), at a position opposite to the exhaust channel 176.

[0051] Through the aforementioned multiple exhaust channels 172, 174, 176 and multiple first exhaust pipes 129, the first driving gas in the servo chamber 150 and the first suspended gas in the air cushion 170 are sequentially discharged to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). Therefore, leakage of the first driving gas in the servo chamber 150 and the first suspended gas in the air cushion 170 into the vacuum chamber can be effectively prevented.

[0052] The first exhaust pipe 129 includes a positive first exhaust pipe 129P and a negative first exhaust pipe 129N. The positive first exhaust pipe 129P and the negative first exhaust pipe 129N are located inside the X guide member 122, but as described later, they communicate with exhaust relay pipes located inside the positive Y guide member 132P and the negative Y guide member 132N. Therefore, the first exhaust pipe 129 discharges the first driving gas and the first suspended gas to the Y guide member 132, which serves as the second drive shaft and is equipped with exhaust relay pipes. The exhaust relay pipes in the Y guide member 132 are connected to the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to achieve the aforementioned atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176).

[0053] Thus, exhaust from exhaust sump 172 is discharged to the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside X guide 122 and the exhaust relay pipe for atmospheric pressure inside Y guide 132 (132P and / or 132N). Similarly, exhaust from exhaust sump 174 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside X guide 122, the exhaust relay pipe for low vacuum inside Y guide 132 (132P and / or 132N), and a low vacuum pump. Similarly, exhaust from exhaust sump 176 is discharged via the first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside X guide 122, the exhaust relay pipe for medium vacuum inside Y guide 132 (132P and / or 132N), and a medium vacuum pump.

[0054] Alternatively, exhaust from the exhaust channels 172, 174, and 176 on both the positive and negative sides can be achieved through the first exhaust pipe 129 and the exhaust relay pipe on either the positive or negative side. For example, exhaust from the exhaust channels 172, 174, and 176 on both the positive and negative sides can be achieved through the first exhaust pipe 129P on the positive side inside the X guide 122 and the positive exhaust relay pipe on the positive side inside the Y guide 132P. In this case, on the negative side where exhaust is not performed, at least a portion of the first exhaust pipe 129N on the negative side and all or part of the negative exhaust relay pipe on the negative side inside the Y guide 132N may not be provided.

[0055] Figure 4 This is a schematic cross-sectional view illustrating the basic structure and function of the Y-actuator 130. Specifically, it schematically shows the YZ section of the Y-actuator 130 at the center in the X direction. Figure 2 The X actuator 120 shown has the same structure labeled with the same symbols and repeated descriptions are omitted.

[0056] The Y actuator 130 includes a Y servo valve 136, which supplies a second driving gas (such as air) at a pressure commanded by the controller 200 to the Y guide 132 and the Y slider 134. Specifically, the Y servo valve 136 supplies and discharges the second driving gas between a second driving pipe 138 disposed inside the Y guide 132 and a servo chamber 150 disposed in the central internal space in the Y direction of the Y slider 134.

[0057] The servo chamber 150 is divided into two sides in the Y direction by a pressure plate 123 fixed to the Y guide 132: the positive side and the negative side. Figure 4 The positive side servo room 152 (right side) and the negative side in the Y direction ( Figure 4 The negative servo chamber 154 (left side) is located in the Y-direction. The Y-servo valve 136 includes: a positive Y-servo valve 136P, located on the positive side in the Y direction and supplying and discharging a second driving gas between itself and the positive servo chamber 152; and a negative Y-servo valve 136N, located on the negative side in the Y direction and supplying and discharging a second driving gas between itself and the negative servo chamber 154. The positive Y-servo valve 136P is connected to the positive servo chamber 152 via a positive second driving pipe 138P, and the negative Y-servo valve 136N is connected to the negative servo chamber 154 via a negative second driving pipe 138N. The structures of the positive Y-servo valve 136P and the negative Y-servo valve 136N are similar to those of the positive Y-servo valve 136P and the negative Y-servo valve 136N. Figure 3 The X servo valve 126 shown has the same structure. It controls the supply and discharge of the second driving gas in the positive servo chamber 152 and the negative servo chamber 154 according to the position of the valve core.

[0058] The controller 200 controls the positive Y servo valve 136P and the negative Y servo valve 136N to generate a pressure difference between the positive servo chamber 152 and the negative servo chamber 154. Using this pressure difference, the Y slider 134 is driven along the Y guide 132 in the Y direction.

[0059] The positive-side second drive pipe 138P and the negative-side second drive pipe 138N are disposed inside the Y-guide 132. Furthermore, the positive-side Y servo valve 136P and the negative-side Y servo valve 136N are disposed, for example, at both ends of the Y-direction of the Y-guide 132, and are connected to the positive-side second drive pipe 138P and the negative-side second drive pipe 138N, respectively. Thus, the positive-side Y servo valve 136P supplies and discharges positive-side second drive gas between itself and the positive-side servo chamber 152 via the positive-side second drive pipe 138P inside the Y-guide 132. Similarly, the negative-side Y servo valve 136N supplies and discharges negative-side second drive gas between itself and the negative-side servo chamber 154 via the negative-side second drive pipe 138N inside the Y-guide 132.

[0060] As mentioned above Figure 2 The first drive pipe 128, used for supplying and discharging the first drive gas for X-direction drive between the X actuator 120 and the servo chamber 150, is described above. Figure 4 The drive gas relay pipe 158 disposed inside the Y guide 132 is connected. Furthermore, the X servo valve 126 is disposed at at least one end of the Y guide 132 on both the positive and negative sides, and connected to the drive gas relay pipe 158. In the example shown, the X servo valve 126 disposed at the positive end of the Y guide 132 can be connected to both the first drive gas relay pipe 158 extending from the positive end of the Y guide 132 towards the negative side, and the second drive gas relay pipe 158 extending from the negative end of the Y guide 132 towards the positive side.

[0061] In the illustrated example, the positive end of the Y guide 132 is equipped with a positive Y servo valve 136P for Y-direction drive and an X servo valve 126 for X-direction drive. The X servo valve 126 supplies and discharges the first drive gas between the X actuator 120 and the servo chamber 150 via the drive gas relay pipe 158 inside the Y guide 132 and the first drive pipe 128 inside the X guide 122. Thus, inside the Y guide 132, which serves as the second drive shaft, the supply and discharge of the second drive gas for Y-direction drive via the second drive pipe 138, and the supply and discharge or relay of the first drive gas for X-direction drive via the drive gas relay pipe 158 are simultaneously performed.

[0062] The positive-side Y servo valve 136P and the negative-side Y servo valve 136N are connected to a pump 146, which serves as a supply source of air (positive-side second driving gas and negative-side second driving gas), via positive-side air supply pipe 144P and negative-side air supply pipe 144N, respectively. This pump 146 can be connected to... Figure 2The pump 146 shown for the X actuator 120 may be the same or different. Furthermore, the positive-side Y servo valve 136P and the negative-side Y servo valve 136N discharge air (positive-side second drive gas and negative-side second drive gas) to the outside of the vacuum chamber (not shown) housing the pneumatic actuator 100 via the positive-side exhaust pipe 148P and the negative-side exhaust pipe 148N, respectively. Alternatively, the positive-side Y servo valve 136P and the negative-side Y servo valve 136N may also be located outside the vacuum chamber.

[0063] The positive-side second driving gas from pump 146 is supplied to the positive-side servo chamber 152 via the positive-side air supply pipe 144P, the positive-side Y servo valve 136P, and the positive-side second driving pipe 138P inside the Y guide 132. Similarly, the negative-side second driving gas from pump 146 is supplied to the negative-side servo chamber 154 via the negative-side air supply pipe 144N, the negative-side Y servo valve 136N, and the negative-side second driving pipe 138N inside the Y guide 132.

[0064] The positive second driving gas in the positive servo chamber 152 is discharged to the outside of the vacuum chamber via the positive second driving pipe 138P, the positive Y servo valve 136P, and the positive exhaust pipe 148P inside the Y guide 132. Similarly, the negative second driving gas in the negative servo chamber 154 is discharged to the outside of the vacuum chamber via the negative second driving pipe 138N, the negative Y servo valve 136N, and the negative exhaust pipe 148N inside the Y guide 132.

[0065] An air cushion 170, serving as a hydrostatic bearing, is formed between the outer peripheral surface of the Y-guide 132 and the inner peripheral surface of the Y-slider 134, allowing the Y-slider 134 to move smoothly along the Y-direction of the Y-guide 132. The air cushion 170 is formed by continuously supplying a second suspension gas between the outer peripheral surface of the Y-guide 132 and the inner peripheral surface of the Y-slider 134. This second suspension gas is compressed air or the like, supplied through a second suspension tube 137 located inside the Y-guide 132, which serves as a second drive shaft. The Y-slider 134, suspended from the Y-guide 132 by the air cushion 170, can move smoothly without actually contacting the Y-guide 132.

[0066] Multiple air cushions 170 are positioned to clamp the servo chamber 150, which is located at the center of the Y-direction of the Y-slider 134, from both positive and negative sides in the Y and / or X directions. Additionally, in Figure 4 The servo chamber 150, schematically shown, actually extends throughout the Y-direction travel of the Y-slider 134 and can also be clamped from both positive and negative sides in the X-direction by a pair of air cushions 170 that also extend along the Y-direction. Furthermore, multiple air cushions 170 are positioned to clamp the Y-guide 132 from both positive and negative sides in the Z-direction. By symmetrically arranging multiple air cushions 170 in the Y and Z directions, rotation of the Y-slider 134 about the X-axis can be effectively suppressed.

[0067] The second suspension tube 137 includes a positive second suspension tube 137P and a negative second suspension tube 137N. The positive second suspension tube 137P and the negative second suspension tube 137N are disposed inside the Y guide 132. These second suspension tubes 137 are connected to a pump (not shown) that is the same as the pump 146, which serves as the supply source for the second driving gas, and also serves as the supply source for the second suspended gas (pump 146 may be shared). Thus, the positive second suspended gas from the pump (not shown) is supplied to the positive air cushion 170 in the Y direction via the positive second suspension tube 137P inside the Y guide 132. Similarly, the negative second suspended gas from the pump (not shown) is supplied to the negative air cushion 170 in the Y direction via the negative second suspension tube 137N inside the Y guide 132.

[0068] Alternatively, a second suspended gas can be supplied from either the positive or negative side of the second suspension pipe 137 to the air cushions 170 on both sides. For example, the second suspended gas from a pump (not shown) can be supplied to the air cushions 170 on both sides via the positive side second suspension pipe 137P inside the Y guide 132. In this case, on the negative side where no second suspended gas is supplied, at least a portion of the negative side second suspension pipe 137N may not be provided.

[0069] As mentioned above Figure 2 The first suspension tube 127, which supplies the first suspension gas to the air cushion 170 in the X actuator 120, is in conjunction with... Figure 4 A suspension gas relay pipe 157 is disposed inside the Y guide 132. This suspension gas relay pipe 157 is connected to a pump (not shown) (or a shared pump 146) that serves as the supply source of the first suspension gas. The first suspension gas from the pump (not shown) is supplied to the air cushion 170 in the X actuator 120 via the suspension gas relay pipe 157 inside the Y guide 132 and the first suspension pipe 127 inside the X guide 122. Thus, inside the Y guide 132, which serves as the second drive shaft, the supply of the second suspension gas for suspending the Y slider 134 via the second suspension pipe 137 and the supply or relay of the first suspension gas for suspending the X slider 124 via the suspension gas relay pipe 157 are simultaneously carried out.

[0070] Exhaust channels 172, 174, and 176 are provided on the inner circumferential surface of the Y-slider 134 to discharge the second driving gas in the servo chamber 150 and the second suspended gas in the air cushion 170 to the outside of the vacuum chamber. As shown in the figure, the exhaust channels 172, 174, and 176 are positioned to clamp the servo chamber 150 and the air cushion 170 from the positive and negative sides in the Y and X directions. In other words, the exhaust channels 172, 174, and 176 are located on the inner circumferential surface of the Y-slider 134, further outward than the servo chamber 150 and the air cushion 170.

[0071] Exhaust channels 172, 174, and 176 are arranged from the inside or center outwards in a manner where the pressure decreases sequentially, i.e., the vacuum level increases sequentially. For example, exhaust channel 172 is set to atmospheric pressure, exhaust channel 174 to low vacuum, and exhaust channel 176 to medium vacuum. Thus, exhaust channels 172, 174, and 176 with different pressures or vacuum levels are connected by multiple second exhaust pipes 139 located inside the Y-guide 132, which serves as the second drive shaft. Figure 4 (For convenience, only one is shown in the text) This is achieved by opening a second exhaust pipe 139, which is connected to the atmosphere or air at atmospheric pressure, at a position opposite to the exhaust slot 172, thereby making the exhaust slot 172 atmospheric pressure; opening a second exhaust pipe 139, which is connected to a low vacuum pump (not shown), at a position opposite to the exhaust slot 174, thereby making the exhaust slot 174 low vacuum; and opening a second exhaust pipe 139, which is connected to a medium vacuum pump (not shown), at a position opposite to the exhaust slot 176, thereby making the exhaust slot 176 medium vacuum.

[0072] Through the multiple exhaust channels 172, 174, 176 and multiple second exhaust pipes 139, the second driving gas in the servo chamber 150 and the second suspended gas in the air cushion 170 are sequentially discharged to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). Therefore, leakage of the second driving gas in the servo chamber 150 and the second suspended gas in the air cushion 170 into the vacuum chamber can be effectively prevented.

[0073] The second exhaust pipe 139 includes a positive second exhaust pipe 139P and a negative second exhaust pipe 139N. The positive second exhaust pipe 139P and the negative second exhaust pipe 139N are disposed inside the Y guide member 132. These second exhaust pipes 139 are connected to the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to achieve the above-mentioned atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176).

[0074] Thus, exhaust gas from exhaust duct 172 is discharged to the atmosphere via the second exhaust pipe 139 (139P and / or 139N) inside the Y guide 132 at atmospheric pressure. Similarly, exhaust gas from exhaust duct 174 is discharged via the second exhaust pipe 139 (139P and / or 139N) inside the Y guide 132 at low vacuum and by a low vacuum pump. Similarly, exhaust gas from exhaust duct 176 is discharged via the second exhaust pipe 139 (139P and / or 139N) inside the Y guide 132 at medium vacuum and by a medium vacuum pump.

[0075] Alternatively, exhaust from the exhaust channels 172, 174, and 176 on both the positive and negative sides can be achieved through the second exhaust pipe 139 on either the positive or negative side. For example, exhaust from the exhaust channels 172, 174, and 176 on both the positive and negative sides can be achieved through the second exhaust pipe 139P on the positive side inside the Y-guide 132. In this case, at least a portion of the negative side second exhaust pipe 139N may not be provided on the negative side where exhaust is not performed.

[0076] As mentioned above Figure 2 The first exhaust pipe 129, which discharges the first driving gas and the first suspended gas from the exhaust slots 172, 174, and 176 in the X actuator 120, and in... Figure 4 The exhaust relay pipe 159, which is located inside the Y-guide 132, is connected. This exhaust relay pipe 159 is used to achieve the aforementioned atmospheric pressure ( Figure 2 The exhaust channel 172 in the middle), low vacuum ( Figure 2 The exhaust channel 174 in the middle, the vacuum ( Figure 2 The exhaust duct 176 in the middle is connected to the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively.

[0077] Thus, the exhaust gas (first driving gas and first suspended gas) from the exhaust channel 172 in the X actuator 120 is discharged to the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside the X guide 122 and the exhaust relay pipe 159 for atmospheric pressure inside the Y guide 132. Similarly, the exhaust gas (first driving gas and first suspended gas) from the exhaust channel 174 in the X actuator 120 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside the X guide 122, the exhaust relay pipe 159 for low vacuum inside the Y guide 132, and the low vacuum pump. Similarly, exhaust gas (first driving gas and first suspended gas) from exhaust slot 176 in X actuator 120 is discharged via first exhaust pipe 129 (129P and / or 129N) for intermediate vacuum inside X guide 122, exhaust relay pipe 159 for intermediate vacuum inside Y guide 132, and intermediate vacuum pump.

[0078] As described above, inside the Y-guide 132, which serves as the second drive shaft, exhaust (atmospheric pressure / low vacuum / medium vacuum) from the Y-actuator 130 via the second exhaust pipe 139 and exhaust (atmospheric pressure / low vacuum / medium vacuum) from the X-actuator 120 via the exhaust relay pipe 159 are performed simultaneously. Furthermore, in Figure 4For convenience, the second exhaust pipe 139 and the exhaust relay pipe 159 are shown separately. However, since the purpose of exhaust (atmospheric pressure / low vacuum / medium vacuum) is the same, the second exhaust pipe 139 and the exhaust relay pipe 159 can also be integrally formed (the low vacuum pump or medium vacuum pump connected to the second exhaust pipe 139 and the exhaust relay pipe 159 can also be shared). To illustrate this, the second exhaust pipe 139 and / or the exhaust relay pipe 159 will be referred to as second exhaust pipe 139 / 159 as needed below.

[0079] Figure 5 This is a cross-sectional view taken along the ZX section, which is part of the Y actuator 130 and the X guide 122. Figure 6 This is a side view showing the inner circumferential surface of the +X side of the Y slider 134 (opposite to the Y guide 132). Figure 7 This is a side view showing the inner circumferential surface of the Y slider 134 on the -X side (opposite to the Y guide 132). Figure 5 show Figure 6 and Figure 7 The VV section at the center of the Y direction.

[0080] like Figure 5 As shown, the Y-slider 134 is arranged to surround the rectangular Y-guide 132 from all four sides. Inside the Y-guide 132, which serves as the second drive shaft, are nine tubes that all extend along the Y direction. Specifically, the second drive pipe 138, which is supplied with the second drive gas to generate the Y-direction driving force of the Y actuator 130, the drive gas relay pipe 158, which is supplied with the first drive gas to generate the X-direction driving force of the X actuator 120, the auxiliary gas pipe 156 (described later), the second suspension pipe 137, which is supplied with the second suspension gas to suspend the Y slider 134 from the Y guide 132, the suspension gas relay pipe 157, which is supplied with the first suspension gas to suspend the X slider 124 from the X guide 122, and the two atmospheric opening pipes 139A / 159A in the second exhaust pipes 139 / 159 that discharge the first suspension gas, the second suspension gas, the first drive gas, and the second drive gas, which are open to the atmosphere, the low vacuum pipe 139L / 159L connected to the low vacuum pump, and the medium vacuum pipe 139M / 159M connected to the medium vacuum pump, extend in the Y-direction inside the Y guide 132. Considering the balance of pressure applied from the Y guide 132 to the Y slider 134, the above nine tubes are symmetrically arranged in the X and / or Z directions.

[0081] exist Figure 5 In the example, the second drive tube 138 is positioned approximately at the center of the Y-guide 132. For example... Figure 5The schematic diagram shows that the second drive pipe 138 branches into branch pipes 188 in the +Z and -Z directions at the center of the Y direction of the Y guide 132, and leads to the servo chambers 150 in each direction (in... Figure 5 (Not shown in the figure). To achieve balance in the X and Z directions when the Y actuator 130 is driven in the Y direction through the servo chamber 150, the second drive tube 138 is preferably positioned at the center of the Y guide 132 in both the X and Z directions. Furthermore, to avoid interference with the branch tube 188 positioned at the center of the Y guide 132 in the X direction, the eight tubes other than the second drive tube 138 are arranged with four on the +X side and four on the -X side, symmetrically positioned relative to the branch tube 188.

[0082] The driving gas relay pipe 158 and the auxiliary gas pipe 156 are located at approximately the same position in the Z direction, on the +X side and -X side respectively, and are symmetrically arranged with respect to the branch pipe 188 at the center of the X direction of the Y guide 132.

[0083] The driving gas relay pipe 158 supplies the first driving gas to the first driving pipe 128 through an opening (i.e., driving gas relay pipe opening 158A) that extends towards the interior of the first driving pipe 128, which serves as the first driving axis. Here, a small gap of approximately several μm exists between the Y guide 132 and the Y slider 134, based on a hydrostatic bearing. Therefore, a portion of the first driving gas discharged from the driving gas relay pipe opening 158A in the +X direction does not enter the first driving pipe opening 128A of the first driving pipe 128, but instead flows into the gap between the Y guide 132 and the Y slider 134, thus pressing the Y slider 134 in the +X direction. However, even in this case, the auxiliary gas pipe 156 described later can allow auxiliary gas of the same pressure to flow from the auxiliary pipe opening 156A on the side opposite to the driving gas relay pipe opening 158A in the X direction into the same gap in the -X direction, thus effectively balancing the +X direction pressure generated by the driving gas relay pipe 158 and the -X direction pressure generated by the auxiliary gas pipe 156.

[0084] And, as Figure 6As shown, a first drive groove 128B, including a first drive tube opening 128A and extending along the Y direction, is provided on the inner peripheral surface of the Y slider 134 on the +X side. The first drive groove 128B extends to include the movable range of the drive gas relay tube opening 158A in the Y direction when the Y slider 134 moves relative to the Y guide 132. As a result, the drive gas relay tube opening 158A faces the first drive groove 128B regardless of the position of the Y slider 134 in the Y direction. In other words, even if the position of the drive gas relay tube opening 158A of the Y guide 132 changes in the Y direction due to the movement of the Y slider 134, the drive gas relay tube opening 158A must be located somewhere within the first drive groove 128B. Therefore, the first drive gas discharged from the drive gas relay tube opening 158A in the +X direction enters the first drive tube opening 128A at approximately the center of the Y direction via the first drive groove 128B. However, when the first driving gas enters the first driving slot 128B from the opening 158A of the driving gas relay pipe, it will press the Y slider 134 in the +X direction.

[0085] As described above, the first driving gas discharged from the driving gas relay pipe opening 158A of the Y guide 132 in the +X direction presses the Y slider 134 in the +X direction. The auxiliary gas pipe 156, which is symmetrically arranged with respect to the branch pipe 188 relative to the driving gas relay pipe 158, is provided to apply pressure in the -X direction to the Y slider 134 to at least partially counteract the pressure in the +X direction applied to the Y slider 134 by the driving gas relay pipe 158.

[0086] An auxiliary gas, such as compressed air, with a pressure substantially equal to that of the first driving gas supplied to the driving gas relay pipe 158, is supplied to the auxiliary gas pipe 156. The auxiliary gas pipe 156 discharges the auxiliary gas in the -X direction to the outside of the Y guide 132 through an opening (i.e., auxiliary pipe opening 156A) on the opposite side of the driving gas relay pipe opening 158A in the X direction. The auxiliary pipe opening 156A on the -X side is symmetrically arranged with respect to the driving gas relay pipe opening 158A on the +X side. In other words, the Y-direction and Z-direction positions of the auxiliary pipe opening 156A and the driving gas relay pipe opening 158A are substantially equal to each other.

[0087] like Figure 7As shown, an auxiliary groove 156B extending in the Y direction is provided on the inner circumferential surface of the Y slider 134 on the -X side. The shape of the auxiliary groove 156B on the -X side is substantially the same as the shape of the first drive groove 128B symmetrically arranged on the +X side. The extension of the auxiliary groove 156B includes the movable range in the Y direction of the auxiliary tube opening 156A when the Y slider 134 moves relative to the Y guide 132 in the Y direction. As a result, the auxiliary tube opening 156A opens towards the auxiliary groove 156B regardless of the position of the Y slider 134 in the Y direction. In other words, even if the position of the auxiliary tube opening 156A of the Y guide 132 changes in the Y direction due to the movement of the Y slider 134, the auxiliary tube opening 156A must be located somewhere within the auxiliary groove 156B. Therefore, the auxiliary gas discharged from the auxiliary tube opening 156A in the -X direction enters the auxiliary groove 156B. Furthermore, when the auxiliary gas enters the auxiliary tank 156B from the auxiliary pipe opening 156A, it will press the Y slider 134 in the -X direction.

[0088] As described above, since the auxiliary gas discharged from the auxiliary pipe opening 156A of the Y guide 132 in the -X direction presses the Y slider 134 in the -X direction, it can at least partially offset the pressure in the +X direction applied to the Y slider 134 by the first driving gas discharged from the driving gas relay pipe opening 158A of the Y guide 132 in the +X direction. In particular, since the pressures of the auxiliary gas and the first driving gas are substantially equal, and the structures of the auxiliary groove 156B and the first driving groove 128B, which bear these gas pressures, are substantially equal, the pressure in the +X direction generated by the driving gas relay pipe 158 and the pressure in the -X direction generated by the auxiliary gas pipe 156 can be effectively balanced.

[0089] The suspended gas relay pipe 157 and the second suspended pipe 137 are located at approximately the same position in the Z direction, on the +X side and -X side respectively, and are symmetrically arranged with respect to the branch pipe 188 line at the center of the X direction of the Y guide 132.

[0090] The first suspended gas is supplied to the first suspended tube 127 through an opening (i.e., the suspended gas relay tube opening 157A) of the first suspended tube 127 extending inward toward the X guide 122, which serves as the first drive shaft. Here, a small gap of approximately several μm exists between the Y guide 132 and the Y slider 134, based on a hydrostatic bearing. Therefore, a portion of the first suspended gas discharged from the suspended gas relay tube opening 157A in the +X direction does not enter the first suspended tube opening 127A of the first suspended tube 127, but instead flows into the gap between the Y guide 132 and the Y slider 134, thus pressing the Y slider 134 in the +X direction. However, even in this case, the second suspension tube 137 described later can also allow the second suspended gas at the same pressure to flow from the second suspension tube opening 137A on the side opposite to the suspension gas relay tube opening 157A in the X direction to the same gap in the -X direction, thus effectively achieving a balance between the pressure in the +X direction generated by the suspension gas relay tube 157 and the pressure in the -X direction generated by the second suspension tube 137.

[0091] And, as Figure 6 As shown, a groove (i.e., a first suspension groove 127B) is provided on the inner peripheral surface of the Y slider 134 on the +X side, including a first suspension tube opening 127A and extending along the Y direction. The first suspension groove 127B extends to include the movable range of the suspension gas relay tube opening 157A in the Y direction when the Y slider 134 moves relative to the Y guide 132. As a result, the suspension gas relay tube opening 157A faces the first suspension groove 127B regardless of the position of the Y slider 134 in the Y direction. In other words, even if the position of the suspension gas relay tube opening 157A of the Y guide 132 changes in the Y direction due to the movement of the Y slider 134, the suspension gas relay tube opening 157A must be located somewhere within the first suspension groove 127B. Therefore, the first suspended gas discharged from the suspension gas relay tube opening 157A in the +X direction enters the first suspension tube opening 127A at approximately the center of the Y direction via the first suspension groove 127B. However, when the first suspended gas enters the first suspended tank 127B from the opening 157A of the suspended gas relay pipe, it will press the Y slider 134 in the +X direction.

[0092] As described above, the first suspended gas discharged from the suspension gas relay pipe opening 157A of the Y guide 132 in the +X direction presses the Y slider 134 in the +X direction. The second suspension pipe 137, which is symmetrically arranged with respect to the branch pipe 188 with the suspension gas relay pipe 157, is provided to apply pressure in the -X direction to the Y slider 134 to at least partially counteract the pressure in the +X direction applied to the Y slider 134 by the suspension gas relay pipe 157.

[0093] A second suspended gas, such as compressed air, with a pressure substantially equal to that of the first suspended gas supplied to the suspended gas relay pipe 157, is supplied to the second suspension pipe 137. The second suspension pipe 137 discharges the second suspended gas in the -X direction to the outside of the Y guide 132 from an opening (i.e., the second suspension pipe opening 137A) on the side opposite in the X direction to the suspension gas relay pipe opening 157A. The second suspension pipe opening 137A on the -X side is symmetrically arranged with respect to the suspension gas relay pipe opening 157A on the +X side. In other words, the Y-direction and Z-direction positions of the second suspension pipe opening 137A and the suspension gas relay pipe opening 157A are substantially equal to each other.

[0094] like Figure 7 As shown, a second suspension groove 137B, extending in the Y direction, is provided on the inner circumferential surface of the Y slider 134 on the -X side. The shape of the second suspension groove 137B on the -X side is substantially the same as that of the first suspension groove 127B symmetrically arranged on the +X side. The extension of the second suspension groove 137B includes the movable range in the Y direction of the second suspension tube opening 137A when the Y slider 134 moves relative to the Y guide 132 in the Y direction. As a result, the second suspension tube opening 137A faces the second suspension groove 137B regardless of the position of the Y slider 134 in the Y direction. In other words, even if the position of the second suspension tube opening 137A of the Y guide 132 changes in the Y direction due to the movement of the Y slider 134, the second suspension tube opening 137A must be located somewhere within the second suspension groove 137B. Therefore, the second suspended gas discharged from the second suspension tube opening 137A in the -X direction enters the second suspension groove 137B. Furthermore, when the second suspended gas enters the second suspended tank 137B from the second suspended tube opening 137A, it will press the Y slider 134 along the -X direction.

[0095] As described above, since the second suspended gas discharged from the second suspension tube opening 137A of the Y guide 132 in the -X direction presses against the Y slider 134 in the -X direction, the pressure in the +X direction exerted on the Y slider 134 by the first suspended gas discharged from the suspension gas relay tube opening 157A of the Y guide 132 in the +X direction can at least partially offset. In particular, since the pressures of the second and first suspended gases are substantially equal, and the structures of the second suspension tank 137B and the first suspension tank 127B, which bear these gas pressures, are substantially equal, the balance between the +X direction pressure generated by the suspension gas relay tube 157 and the -X direction pressure generated by the second suspension tube 137 can be effectively achieved.

[0096] In addition, such as Figure 5The diagram illustrates that the second suspended gas, entering the second suspended trough 137B from the second suspended tube opening 137A, is distributed to multiple air cushions 170 on the inner circumferential surfaces of the Y slider 134 on the +X, -X, +Z, and -Z sides via one or more suspended gas distribution holes 137C located on the bottom surface (-X side) of the second suspended trough 137B. Here, since the air cushions 170 on the +X and -X sides are directly opposite each other in the X direction, the second suspended gas ejected from each Y guide 132 substantially counteracts the X-direction pressure on the Y slider 134. Similarly, since the two air cushions 170 on the +Z side and the two air cushions 170 on the -Z side are directly opposite each other in the Z direction, the second suspended gas ejected from each Y guide 132 substantially counteracts the Z-direction pressure on the Y slider 134.

[0097] Two atmospheric opening pipes 139A / 159A, open to the atmosphere, are located at approximately the same position in the Z direction, on the +X and -X sides respectively, and are symmetrically arranged with respect to the branch pipe 188 line at the center of the Y guide 132 in the X direction. Furthermore, to prevent the atmospheric pressure pipes 172A extending from each atmospheric opening pipe 139A / 159A along the +Z and -Z directions from interfering with the other pipes 137, 156, 139L / 159L, 157, 158, and 139M / 159M in the Y guide 132, each atmospheric opening pipe 139A / 159A is positioned further inside in the X direction than these other pipes.

[0098] Each atmospheric opening pipe 139A / 159A, through atmospheric pressure pipes 172A extending to the +X, -X, +Z, and -Z sides respectively, depressurizes the exhaust grooves 172 on the inner circumferential surfaces of the Y-slider 134 to atmospheric pressure via atmospheric pressure pipes 172A extending to the +X, -X, +Z, and -Z sides respectively. For example... Figure 6 and Figure 7 As shown, exhaust grooves 172 are formed on the inner circumferential surfaces of the Y-slider 134 in a manner that surrounds various gas supply portions. Specifically, the exhaust grooves 172 are formed to respectively surround: the air pad 170 to which the second suspended gas is supplied ( Figure 6 and Figure 7 ), the first drive pipe opening 128A and the first drive groove 128B supplied with the first drive gas ( Figure 6 ), the first suspension pipe opening 127A and the first suspension tank 127B supplied with the first suspension gas ( Figure 6 ), Auxiliary tank 156B supplied with auxiliary gas ( Figure 7 ), the second suspension tank 137B to which the second suspension gas is supplied ( Figure 7 Through such exhaust channels 172, various gases supplied to the inner circumferential surfaces of the Y slider 134 are effectively discharged to the atmosphere.

[0099] Furthermore, in order to create a similar venting groove 172 in the X slider 124 ( Figure 2 It also achieves the same atmospheric pressure exhaust, along with the first exhaust pipe 129 extending inside the X guide 122, which serves as the first drive shaft. Figure 5 ) Connecting atmospheric pressure opening 172B ( Figure 6 An exhaust groove 172 is located approximately at the center of the Y direction in the inner circumferential surface of the Y slider 134 on the +X side. Through this atmospheric pressure opening 172B, the first exhaust pipe 129 of the X guide 122 and the exhaust groove 172 of the X slider 124 are depressurized to atmospheric pressure.

[0100] The low vacuum tubes 139L / 159L connected to the low vacuum pump and the medium vacuum tubes 139M / 159M connected to the medium vacuum pump are located at approximately the same position in the Z direction, on the +X side and -X side respectively, and are symmetrically arranged with respect to the branch tube 188 line at the center in the X direction of the Y guide 132.

[0101] The low vacuum tubes 139L / 159L, through the low vacuum tube 174A extending along the -X side, depressurize the exhaust grooves 174 located on the +X, -X, +Z, and -Z sides of the Y slider 134 to a low vacuum level. For example... Figure 6 and Figure 7 As shown, the exhaust grooves 174 are formed on each inner circumferential surface of the Y-slider 134 in a manner that surrounds the exhaust grooves 172 that are open to the atmosphere. Through such exhaust grooves 174, low-vacuum exhaust can be achieved after atmospheric pressure exhaust from the exhaust grooves 172.

[0102] Furthermore, in order to create a similar venting groove 174 in the X slider 124 ( Figure 2 It also achieves the same low-vacuum exhaust, along with the first exhaust pipe 129 extending inside the X guide 122, which serves as the first drive shaft. Figure 5 ) Connecting low vacuum opening 174B ( Figure 6 The exhaust groove 174 is located approximately at the center of the Y direction in the inner circumferential surface of the Y slider 134 on the +X side. Through this low vacuum opening 174B, the first exhaust pipe 129 of the X guide 122 and the exhaust groove 174 of the X slider 124 are depressurized to a low vacuum.

[0103] The intermediate vacuum tubes 139M / 159M, through the intermediate vacuum tube 176A extending along the +X side, depressurize the exhaust grooves 176 on the inner circumferential surfaces of the Y slider 134 on the +X, -X, +Z, and -Z sides to intermediate vacuum. For example... Figure 6 and Figure 7 As shown, the exhaust grooves 176 are formed on each inner circumferential surface of the Y-slider 134 in a manner that surrounds the low-vacuum exhaust grooves 174. Through such exhaust grooves 176, medium-vacuum exhaust can be achieved following the low-vacuum exhaust of the exhaust grooves 174.

[0104] Furthermore, in order to create a similar venting groove 176 in the X slider 124 ( Figure 2 It also achieves the same mid-vacuum exhaust, with the first exhaust pipe 129 extending inside the X guide 122, which serves as the first drive shaft. Figure 5 ) Connecting vacuum opening 176B ( Figure 6 The exhaust groove 176 is located approximately at the center in the Y direction of the inner circumferential surface on the +X side of the Y slider 134. Through this intermediate vacuum opening 176B, the first exhaust pipe 129 of the X guide 122 and the exhaust groove 176 of the X slider 124 are depressurized to intermediate vacuum.

[0105] According to the above embodiment, various gases are supplied and discharged from the X guide 122, which serves as the first drive shaft, via the Y guide 132, which serves as the second drive shaft. Therefore, it is not necessary to use easily deteriorated movable parts such as variable tubes for supplying and discharging gases from the X guide 122 and / or the X slider 124, thereby reducing the risk of vacuum environment contamination or the frequency of maintenance operations.

[0106] And, as Figure 8 Zhongyu Figure 5 Similarly, it is schematically shown that since the pressure (schematically indicated by arrows) applied to the Y slider 134 by the various gases supplied via the Y guide 132 is balanced in both the X and Z directions, the Y slider 134 can be smoothly driven along the Y direction. Furthermore, in this embodiment, pressure balance in the X and Z directions between the Y guide 132 and the Y slider 134 is achieved using various gases, but it is also possible to replace a portion of these gases (e.g., auxiliary gas supplied via auxiliary gas pipe 156) with a means that generates a non-contact repulsive force, such as a magnet with the same poles.

[0107] The present invention has been described above based on embodiments. Various modifications may exist for the combinations of constituent elements or processes in the exemplary embodiments, and these modifications are included within the scope of the present invention, as will be apparent to those skilled in the art.

[0108] Furthermore, the structure, function, and purpose of each device and method described in the embodiments can be implemented using hardware resources, software resources, or a combination of both. Hardware resources include, for example, processors, ROMs, RAMs, and various integrated circuits. Software resources include, for example, operating systems, applications, and other programs.

[0109] Industrial availability

[0110] This invention relates to a pneumatic drive device, etc.

[0111] Symbol Explanation

[0112] 100-Pneumatic actuator, 120-X actuator, 122-X guide, 124-X slider, 127-First suspension tube, 127A-First suspension tube opening, 127B-First suspension groove, 128-First drive tube, 128A-First drive tube opening, 128B-First drive groove, 129-First exhaust pipe, 130-Y actuator, 132-Y guide, 134-Y slider, 137-Second suspension tube, 137A-Second suspension tube opening, 137B-Second suspension groove, 137C-Suspension gas distribution hole, 138-Second drive tube, 139-Second exhaust pipe, 139A-Atmospheric opening pipe 139L - Low vacuum tube, 139M - Medium vacuum tube, 156 - Auxiliary gas tube, 156A - Auxiliary tube opening, 156B - Auxiliary tank, 157 - Suspended gas relay tube, 157A - Suspended gas relay tube opening, 158 - Driving gas relay tube, 158A - Driving gas relay tube opening, 159 - Exhaust relay tube, 170 - Air cushion, 172 - Exhaust tank, 172A - Atmospheric pressure tube, 172B - Atmospheric pressure opening, 174 - Exhaust tank, 174A - Low vacuum tube, 174B - Low vacuum opening, 176 - Exhaust tank, 176A - Medium vacuum tube, 176B - Medium vacuum opening, 188 - Branch tube.

Claims

1. A pneumatic drive device, comprising: The first drive shaft uses gas pressure to drive the driven body along a first direction; and The second drive shaft uses gas pressure to drive the driven body along a second direction that intersects the first direction. In the pneumatic drive device. The first drive shaft drives the driven body along the first direction by gas supplied through the first drive shaft and the interior of the second drive shaft.

2. The pneumatic drive device according to claim 1, wherein, A first drive tube is provided inside the first drive shaft, and the first drive tube is supplied with a first drive gas that generates the driving force of the first drive shaft in the first direction. A second drive tube and a drive gas relay tube are provided inside the second drive shaft. The second drive tube is supplied with a second drive gas that generates a driving force in the second direction of the second drive shaft. The drive gas relay tube is supplied with the first drive gas and supplies the first drive gas to the first drive tube through the drive gas relay tube opening, which is an opening facing the first drive tube.

3. The pneumatic drive device according to claim 2, comprising: The slider, which is driven along the second drive shaft, integrally with the first drive shaft, in the second direction. The slider has a first drive tube opening on its opposite surface to the second drive shaft, which serves as the opening for the first drive tube.

4. The pneumatic drive device according to claim 3, wherein, The slider has a first drive groove on its opposite surface to the second drive shaft. The first drive groove includes the opening of the first drive tube and extends along the second direction. The opening of the driving gas relay pipe faces the opening of the first driving slot, regardless of the position of the slider in the second direction.

5. The pneumatic drive device according to claim 3 or 4, wherein, An auxiliary gas pipe is provided inside the second drive shaft. The auxiliary gas pipe discharges auxiliary gas to the outside of the second drive shaft through an auxiliary pipe opening that is an opening on the opposite side of the opening of the drive gas relay pipe in the first direction.

6. The pneumatic drive device according to claim 5, wherein, The slider has an auxiliary groove extending along the second direction on its opposite surface to the second drive shaft. The auxiliary tube opening faces the auxiliary slot opening regardless of the position of the slider in the second direction.

7. The pneumatic drive device according to claim 5, wherein, The pressure of the auxiliary gas discharged from the auxiliary pipe opening is substantially equal to the pressure of the first driving gas discharged from the driving gas relay pipe opening.

8. The pneumatic drive device according to claim 3 or 4, wherein, A first suspension tube is provided inside the first drive shaft, and the first suspension tube is supplied with a first suspension gas to suspend the driven body from the first drive shaft. A second suspension tube and a suspension gas relay tube are provided inside the second drive shaft. The second suspension tube is supplied with a second suspension gas that suspends the slider from the second drive shaft. The suspension gas relay tube is supplied with the first suspension gas and supplies the first suspension gas to the first suspension tube through the suspension gas relay tube opening, which is an opening facing the first suspension tube.

9. The pneumatic drive device according to claim 8, wherein, The second suspension tube discharges the second suspended gas to the outside of the second drive shaft through the second suspension tube opening, which is an opening on the opposite side of the opening of the suspended gas relay tube in the first direction.

10. The pneumatic drive device according to claim 9, wherein, The slider has the following features on its opposite surface to the second drive shaft: an opening of the first suspension tube, and a groove including the first suspension tube opening and extending along the second direction, i.e., a first suspension groove. The opening of the suspended gas relay pipe faces the opening of the first suspension trough regardless of the position of the slider in the second direction.

11. The pneumatic drive device according to claim 10, wherein, The slider has a groove extending along the second direction, namely the second suspension groove, on its surface opposite to the second drive shaft. The opening of the second suspension tube faces the opening of the second suspension groove, regardless of the position of the slider in the second direction.

12. The pneumatic drive device according to claim 8, wherein, A first exhaust pipe is provided inside the first drive shaft to discharge the first suspended gas to the second drive shaft. The second drive shaft is provided with a second exhaust pipe that discharges the second suspended gas to the outside of the second drive shaft, and an exhaust relay pipe that discharges the first suspended gas from the first exhaust pipe to the outside of the second drive shaft.

13. The pneumatic drive device according to claim 12, wherein, The second exhaust pipe and the exhaust relay pipe are the same pipe.

14. A positioning device for positioning the driven body by a pneumatic drive device according to any one of claims 1 to 4.

15. A processing apparatus that performs a prescribed processing on the driven body positioned by the positioning device of claim 14.

16. A method for manufacturing a device, wherein the device is manufactured by means of the processing performed by the processing apparatus of claim 15.

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