Laser focusing system

Abstract

The invention provides a laser focusing system, and belongs to the technical field of laser processing. The invention provides a laser focusing system which comprises a laser module, a focusing module and a light deflection module. The laser module is used for emitting laser. The focusing module is arranged at the output end of the laser module and comprises a convex lens unit and a driving mechanism, and the driving mechanism is used for driving the convex lens unit to move so as to adjust the position of the focus of the convex lens unit. The light deflection module is arranged at the output end of the convex lens unit focusing module and used for adjusting the transmission path of the light output by the convex lens unit focusing module so that the light can be focused on the plane to be machined.

Description

Technical Field

[0001] This application belongs to the field of laser processing technology, and more specifically, relates to a laser focusing system. Background Technology

[0002] Lasers, as a highly concentrated light source with excellent directionality and monochromaticity, have wide applications in industrial production. Laser focusing systems, after focusing the laser beam, are widely used in engine manufacturing, precision instrument processing, metal surface rust removal and cutting, and even intricate crafts such as micro-carving and precision measurement.

[0003] However, existing laser focusing systems suffer from various problems. Traditional static focusing systems are limited by the fact that fixed-focal-length lens groups can only operate within a single depth of focus, failing to meet the processing needs of curved surfaces, multi-layered materials, or complex 3D structures. Achieving zoom through mechanical workpiece movement or laser head movement results in high system inertia and slow response speed (typically ≥100ms), making it difficult to meet the demands of high-speed dynamic processing (such as femtosecond laser processing). Current dynamic focusing technologies rely on galvanometers and telecentric lens groups, depending on galvanometer scanning combined with an F-theta lens. This results in a narrow depth of focus range (typically <1mm), and poor beam quality (M) over a large field of view. 2 The factor (of the zoom factor) deteriorates significantly. If a mechanical zoom lens group is used, the zoom is achieved by the axial movement of multiple lenses. The system is complex and bulky, and the wear of moving parts leads to poor long-term stability. Summary of the Invention

[0004] The purpose of this application is to provide a laser focusing system to solve the problems of existing focusing systems having large system inertia, slow response speed, poor long-term stability, and inability to adapt to the processing needs of curved surfaces, multi-layer materials, or complex 3D structures.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] This application provides a laser focusing system, which includes:

[0007] Laser module, used to emit laser light.

[0008] The focusing module, located at the output end of the laser module, includes a convex lens unit and a driving mechanism. The driving mechanism is used to drive the displacement of the convex lens unit to adjust the position of the focal point of the convex lens unit.

[0009] The light deflection module is located at the output end of the convex lens unit focusing module. It adjusts the transmission path of the light output from the convex lens unit focusing module so that the light is focused on the plane to be processed.

[0010] Building upon this foundation, the system achieves high-precision, fast-response 3D dynamic focusing through the collaborative design of a laser module, a convex lens dynamic focusing module, and a beam deflection module. The focusing module adjusts the focal point position in real time via axial displacement, overcoming the limitations of traditional fixed-focal-length systems; the beam deflection module enables rapid two-dimensional deflection of the beam. The combination of these two modules can adapt to the processing requirements of complex curved surfaces and multi-layered structures. This improves processing efficiency and accuracy, making it suitable for high-dynamic applications such as femtosecond laser processing.

[0011] In one possible design, the output end of the laser module is equipped with an optical fiber end cap, the diameter of which is greater than or equal to the diameter of the laser beam output from the laser module's optical fiber.

[0012] Based on this, by using an optical fiber end cap with a diameter greater than or equal to the laser beam diameter, thermal damage to the optical fiber end face caused by beam concentration can be effectively suppressed. At the same time, nonlinear effects (such as self-phase modulation) under high power are reduced, solving the problem of easy overheating and damage at the output end of traditional optical fibers and improving the power tolerance and long-term stability of the system.

[0013] In one possible design approach, the fiber end cap can be a planar end cap, a beveled end cap, or a spherical end cap.

[0014] Building upon this foundation, fiber end caps are available in various types, including planar, beveled, and spherical, allowing for flexible selection based on different laser output characteristics (such as beam divergence angle) and optical path design requirements. This enhances the system's compatibility with different fiber lasers and broadens its application range in various processing scenarios (such as focusing spot shape adjustment). Planar end caps offer a simple structure suitable for most conventional applications; beveled end caps reduce back reflections and improve system stability; and spherical end caps can pre-shape the beam, improving subsequent focusing effects.

[0015] In one possible design, the axial displacement of the convex lens unit is linearly related to the displacement of the focal point of the convex lens unit. The axial displacement of the convex lens unit is the displacement of the convex lens unit in the direction of light transmission.

[0016] Based on this, the axial displacement of the convex lens is linearly related to the focal displacement, making focal position control simpler and more direct. The focal position can be accurately controlled by precisely adjusting the displacement of the convex lens, without the need for complex nonlinear correction algorithms, thus reducing the complexity of the control system and improving the accuracy and repeatability of focal adjustment.

[0017] In one possible design, when the axial displacement range of the convex lens unit is -2mm to 2mm, the displacement range of the focal point of the convex lens unit is -5mm to 5mm.

[0018] Based on this, when the axial displacement of the convex lens is ±2mm, the focal displacement reaches ±5mm, achieving a large focal depth range with a small lens stroke. This not only reduces the motion burden on the drive mechanism and extends its service life, but also meets the demand for a wide focal depth in complex 3D processing of multi-layer materials, curved surface structures, etc., thus improving the system's adaptability to diverse workpieces.

[0019] In one possible design approach, the displacement resolution of the drive mechanism is less than or equal to 0.1µm, and the response time of the drive mechanism is less than or equal to 1ms.

[0020] Based on this, the drive mechanism has a displacement resolution of ≤0.1um and a response time of ≤1ms. Compared with traditional mechanical movement (response ≥100ms), it significantly improves the speed and accuracy of focus adjustment, which can meet the needs of high-speed dynamic processing (such as femtosecond laser processing) for fast and precise focusing, and effectively improve processing efficiency and precision.

[0021] In one possible design approach, the drive mechanism employs a piezoelectric ceramic driver or a voice coil motor.

[0022] Building upon this foundation, the piezoelectric ceramic actuator offers nanometer-level resolution (up to 0.01 μm) and microsecond-level response, making it suitable for ultra-high precision machining; the voice coil motor provides longer stroke (up to ±5 mm) and higher speed, suitable for large-scale dynamic machining. Both solutions eliminate mechanical transmission backlash, meeting the drive mechanism's requirements for displacement resolution (≤0.1 μm) and response time (≤1 ms), ensuring the stability and reliability of the convex lens unit's displacement adjustment, and avoiding the accuracy degradation problem caused by wear of moving parts in traditional mechanical zoom lens assemblies.

[0023] In one possible design, the laser focusing system also includes a controller, and the focusing module is equipped with a displacement sensor. Both the drive mechanism and the displacement sensor are connected to the controller. The displacement sensor monitors the displacement of the convex lens unit, and the controller controls the drive mechanism to move the convex lens unit based on the data fed back from the displacement sensor.

[0024] Based on this, the displacement sensor monitors the displacement of the convex lens in real time and feeds it back to the controller to form a closed-loop control. This can correct the adjustment error of the drive mechanism in real time, ensure the displacement accuracy of the convex lens, and thus ensure that the focal position positioning accuracy is ≤1um. This solves the problem of focal offset caused by component drift during long-term use and improves the long-term stability of the system.

[0025] In one possible design, the light deflection module includes an X-axis galvanometer and a Y-axis galvanometer, and the light focused by the focusing module is reflected onto the plane to be processed through the X-axis galvanometer and the Y-axis galvanometer.

[0026] Based on this, the combination of X-axis and Y-axis galvanometers enables rapid scanning of the beam in a two-dimensional plane. With the dynamic focus adjustment of the focusing module, the beam focusing position can be flexibly controlled in three-dimensional space, enabling complex trajectories and large-area processing. This solves the problem of limited scanning range of traditional single-axis galvanometers and enhances the system's adaptability to complex processing scenarios.

[0027] In one possible design, the convex lens unit is a plano-convex lens and / or a biconvex lens.

[0028] Based on this, the flexible selection or combination of plano-convex lenses (suitable for focusing after collimation) and biconvex lenses (with strong light-gathering ability) can optimize the focusing effect according to the characteristics of the laser beam (such as divergence angle and power density), ensuring that the beam can form a high-quality focus under different processing requirements (such as spot size and energy concentration), thus improving the system's adaptability to different laser parameters. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of a laser focusing system provided in an embodiment of this application;

[0031] Figure 2 A schematic diagram showing the focal positions of convex lens units at different locations in a laser focusing system provided in this application embodiment;

[0032] Figure 3 This is a schematic diagram illustrating the relationship between a first spacing and a second spacing in a laser focusing system provided in an embodiment of this application.

[0033] The following are the labeling elements in the figure:

[0034] 110-Laser module; 120-Focusing module; 130-Light deflection module; 140-Planet to be processed; 121-Convex lens unit; 131-X-axis galvanometer; 132-Y-axis galvanometer. Detailed Implementation

[0035] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0036] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0037] It should be understood that the terminology used in the description of the various examples herein is for the purpose of describing the particular examples only and is not intended to be restrictive. As used in the description of the various examples, the singular forms “a” and “the” are intended to include the plural forms as well, unless the context explicitly indicates otherwise.

[0038] In the embodiments of this application, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of a single item or a plurality of items. For example, at least one of a, b, or c can represent: a, b, c, ab, ac, bc, or abc, where a, b, and c can be a single item or multiple items.

[0039] It should also be understood that, in this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a sliding connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0040] It should also be understood that the term “comprising” (also referred to as “includes”, “including”, “comprises” and / or “comprising”) as used in this specification specifies the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0041] It should be understood that the terms "an embodiment," "another embodiment," and "a possible design" used throughout the specification mean that a specific feature, structure, or characteristic related to an embodiment or implementation is included in at least one embodiment of this application. Therefore, phrases such as "in one embodiment of this application," "in another embodiment of this application," and "a possible design" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0042] To address the aforementioned technical problems, embodiments of this application provide a laser focusing system. (Reference) Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of a laser focusing system provided in an embodiment of this application. Figure 2 This is a schematic diagram showing the focal positions of convex lens units at different locations in a laser focusing system provided in an embodiment of this application.

[0043] like Figure 1 and Figure 2 As shown, this application embodiment provides a laser focusing system, which includes a laser module 110, a focusing module 120, and a light deflection module 130. The laser module 110 emits a laser beam. The focusing module 120 is located at the output end of the laser module 110 and includes a convex lens unit 121 and a driving mechanism. The driving mechanism drives the displacement of the convex lens unit 121 to adjust the position of its focal point. The light deflection module 130 is located at the output end of the focusing module 121 and adjusts the transmission path of the light output from the focusing module 121, focusing the light onto the plane 140 to be processed.

[0044] The laser focusing system of this embodiment includes a laser module 110, a focusing module 120, and a light deflection module 130 connected in sequence.

[0045] The laser module 110 serves as the core of the light source, with its output end connected to the input end of the focusing module 120, allowing the emitted laser light to directly strike the focusing module 120. The output end of the focusing module 120 is connected to the input end of the light deflection module 130, and the focused light light is transmitted to the light deflection module 130. The output optical path of the light deflection module 130 points towards the plane 140 to be processed, and the adjusted light light is finally focused on the surface of the workpiece.

[0046] The laser module 110 uses a single-mode or multi-mode fiber laser to provide the laser beam required for processing. The focusing module 120 includes a convex lens unit 121 (such as a plano-convex lens or a biconvex lens) and a driving mechanism, which can drive the convex lens unit 121 to move along the optical axis.

[0047] like Figure 2 As shown, Figure 2 The diagram shows that when the convex lens unit 121 is in different positions, the focal point corresponding to the convex lens unit 121 is also in different positions. Therefore, by driving the convex lens unit 121 to move along the optical axis through the driving mechanism, the position of the convex lens can be changed, and the focal point position can be adjusted in real time, overcoming the limitation of traditional static focusing, which can only work at a single depth of focus.

[0048] The beam deflection module 130 is composed of high-precision reflective mirrors. By deflecting the mirrors, the beam transmission path is changed, enabling the beam to scan rapidly in a two-dimensional plane.

[0049] This system achieves a response time of ≤1ms through the synergy of "dynamic focusing + two-dimensional scanning". It not only overcomes the slow response problem of traditional mechanically moving workpieces, but also overcomes the bottleneck of narrow focal depth of existing galvanometer + telecentric lens groups. It can adapt to the processing needs of complex 3D structures such as curved surfaces and multi-layer materials, and is especially suitable for high-precision scenarios such as laser 3D printing and micro-nano processing.

[0050] In one embodiment of this application, the output end of the laser module 110 is provided with an optical fiber end cap, the diameter of which is greater than or equal to the diameter of the laser beam output by the optical fiber of the laser module 110.

[0051] This embodiment details the fiber optic end cap design of the laser module 110. The fiber optic end cap is directly integrated into the output end of the laser module 110 (connected to the fiber end face), and its diameter is designed to be greater than or equal to the diameter of the laser beam output from the fiber.

[0052] The function of fiber optic end caps is to disperse beam energy: traditional fiber optic output ends are prone to thermal damage, such as end-face melting, due to beam concentration; and at high power, they are susceptible to nonlinear effects, such as self-phase modulation. End caps, by increasing the beam cross-section, reduce the power density per unit area, effectively suppressing these problems. For example, when the fiber output beam diameter is 5mm, using a 6mm diameter end cap can make the beam edge energy more uniform, avoid localized overheating at the end face, significantly improve the system's power tolerance and long-term stability, and adapt to high-power laser processing scenarios.

[0053] In one embodiment of this application, the fiber end cap is a planar end cap, a beveled end cap, or a spherical end cap.

[0054] The fiber optic end cap can be a planar end cap, a beveled end cap, or a spherical end cap, all of which are integrated into the output end of the laser module 110. It should be noted that this embodiment only lists some shapes of the end cap, and those skilled in the art can also select other shapes of end caps according to their needs.

[0055] Planar end caps have a simple structure and are suitable for conventional beam output scenarios, ensuring the beam travels along its original direction. They are suitable for processing where there are no special requirements for the optical path direction, such as planar cutting. Beveled end caps, where the end face forms a certain angle with the optical axis, can change the beam exit angle, allowing for optical path adjustment without additional reflectors, simplifying the system structure, and are suitable for space-constrained processing equipment. Spherical end caps have a certain curvature, allowing for preliminary focusing or collimation of the beam, assisting subsequent focusing modules in optimizing the focusing effect. They are suitable for scenarios requiring pre-shaping of the beam, such as the fine focusing in micro-nano fabrication. The selection of multiple end cap types enhances the system's adaptability to different optical path designs and broadens its application range.

[0056] In one embodiment of this application, the axial displacement of the convex lens unit 121 is linearly related to the displacement of the focal point of the convex lens unit 121. The axial displacement of the convex lens unit 121 is the displacement of the convex lens unit 121 in the light transmission direction.

[0057] The linear relationship between the axial displacement of the convex lens unit 121 and its focal point is related to the design of the convex lens unit 121. In one example of this application, the focal length of the end cap is 45.4 mm, and the focal length of the convex lens unit 121 is 39.7 mm. Therefore, the focal point position and the lens spacing satisfy the formula y = -2.684x + 242.989. Here, x represents the distance between the convex lens unit 121 and the end cap, and y represents the distance between the focal point position of the convex lens unit 121 and the lens.

[0058] refer to Figure 3 , Figure 3 This is a schematic diagram illustrating the relationship between a first spacing and a second spacing in a laser focusing system provided as an embodiment of this application. Figure 3 As shown, the first spacing is the distance between the convex lens unit 121 and the end cap, and the second spacing is the distance between the focal position of the convex lens unit 121 and the lens. The first and second spacings have a linear relationship, and their curve is a straight line in the coordinate system. The axial displacement of the convex lens unit 121 is the change in the distance between the convex lens unit 121 and the end cap; therefore, the axial displacement of the convex lens unit 121 is also linearly related to the displacement of the focal point of the convex lens unit 121.

[0059] The convex lens unit 121 moves along the light transmission direction (axial direction), and its axial displacement is linearly related to the focal displacement. For example, when the convex lens moves 1 mm away from the fiber end cap along the axial direction, the focal point moves 2.684 mm away from the lens; when it moves 1 mm in the opposite direction, the focal point moves 2.684 mm in the opposite direction, and the ratio between the two is constant.

[0060] This linear relationship simplifies focus control. Traditional dynamic focusing requires complex algorithms to correct nonlinear errors, while this design, through linear correspondence, only requires precise control of the convex lens displacement to accurately adjust the focus position, reducing the complexity of the control system. At the same time, the linear relationship ensures the repeatability of focus adjustment (error ≤1µm after multiple adjustments), improving machining accuracy, and is especially suitable for multi-layer structure machining that requires frequent depth-of-focus adjustments.

[0061] In one embodiment of this application, when the axial displacement range of the convex lens unit 121 is -2mm to 2mm, the displacement range of the focal point of the convex lens unit 121 is -5mm to 5mm.

[0062] The axial displacement range of the convex lens unit 121 is designed to be -2mm to 2mm ("-" indicates movement towards the fiber end cap, and "+" indicates movement away from the fiber end cap), corresponding to a focal displacement range of -5mm to 5mm.

[0063] This design achieves "small stroke, large depth of focus". Traditional mechanical zoom requires a 5mm lens movement to adjust the focal length within a 10mm range, while this design optimizes convex lens parameters (such as radius of curvature) so that the lens only needs to move 4mm (±2mm) to cover a depth of focus range of 10mm (±5mm). This not only reduces the motion burden on the drive mechanism, which helps extend its service life, but also meets the processing requirements of multi-layer materials (such as the interlayer height difference in 3D printing) and curved workpieces (such as different curvatures on an arc surface), achieving a wide range of depth of focus coverage within a limited lens stroke.

[0064] In one embodiment of this application, the displacement resolution of the drive mechanism is less than or equal to 0.1 μm, and the response time of the drive mechanism is less than or equal to 1 ms.

[0065] In this embodiment, the drive mechanism connects to and drives the convex lens unit 121, with a displacement resolution ≤0.1µm and a response time ≤1ms. Traditional mechanical drives (such as lead screws) have a displacement resolution of approximately 1µm and a response time ≥100ms, which cannot meet the requirements of high-speed dynamic processing (such as the rapid focusing of femtosecond laser processing). The high precision and fast response characteristics of this drive mechanism enable micro-nano-level adjustment and instantaneous response of the focus. For example, when processing microstructures with a precision of 0.5µm, the 0.1µm resolution ensures accurate focus positioning; during rapid switching processing of multi-layer structures, the 1ms response time avoids heat accumulation caused by excessively long processing intervals between layers, effectively improving processing efficiency and precision.

[0066] In one embodiment of this application, the drive mechanism employs a piezoelectric ceramic driver or a voice coil motor.

[0067] The drive mechanism uses a piezoelectric ceramic driver or a voice coil motor, which is directly connected to the convex lens unit 121 to drive its axial movement.

[0068] Piezoelectric ceramic actuators utilize the inverse piezoelectric effect, achieving a displacement resolution of 0.01µm and a response time of ≤0.5ms, making them suitable for ultra-high precision machining (such as micro / nano lithography). Voice coil motors, driven by electromagnetic force, offer a wider displacement range and a response time of ≤1ms, making them suitable for machining processes requiring larger strokes (such as layer thickness adjustment in 3D printing). Compared to traditional lead screws, both exhibit no mechanical wear, resulting in minimal accuracy degradation over long-term use. This solves the stability problem caused by wear in mechanical zoom lens assemblies, ensuring the long-term reliability of the system.

[0069] In one embodiment of this application, the laser focusing system further includes a controller, and a displacement sensor is also provided in the focusing module 120. Both the drive mechanism and the displacement sensor are connected to the controller. The displacement sensor monitors the displacement of the convex lens unit 121, and the controller controls the drive mechanism to drive the convex lens unit 121 to move according to the data fed back by the displacement sensor.

[0070] A displacement sensor (e.g., a capacitive displacement sensor) is installed inside the focusing module 120 to monitor the real-time displacement of the convex lens unit 121. The controller is connected to both the displacement sensor and the drive mechanism to form a closed-loop control.

[0071] During operation, the controller sends displacement commands to the drive mechanism, driving the convex lens unit 121 to move. The displacement sensor detects the actual displacement in real time and feeds it back to the controller. If there is a deviation (e.g., the commanded movement is 1mm, but the actual movement is 0.99mm), the controller immediately adjusts the drive signal to correct the deviation. This closed-loop control ensures that the displacement accuracy of the convex lens is ≤1µm, thereby guaranteeing the accuracy of the focal position. It solves the problem of focal shift caused by temperature drift and component aging during long-term use, significantly improving the long-term stability of the system and making it suitable for the consistency processing requirements in mass production.

[0072] In one embodiment of this application, the light deflection module 130 includes an X-axis galvanometer 131 and a Y-axis galvanometer 132. The light focused by the focusing module 120 is reflected onto the plane 140 to be processed through the X-axis galvanometer 131 and the Y-axis galvanometer 132.

[0073] The light deflection module 130 includes an X-axis galvanometer and a Y-axis galvanometer, which are arranged sequentially along the light transmission direction: the light output by the focusing module 120 first enters the X-axis galvanometer, is reflected and then enters the Y-axis galvanometer, and finally is reflected onto the plane 140 to be processed.

[0074] The X-axis galvanometer controls the beam to scan horizontally (X-direction), while the Y-axis galvanometer controls the scanning vertically (Y-direction). Together, they achieve rapid trajectory scanning within a two-dimensional plane (such as straight lines, arcs, and complex shapes). Combined with the dynamic depth-of-focus adjustment (Z-direction) of the focusing module 120, the system can flexibly control the focal point position in three-dimensional space, achieving three-dimensional machining through "X / Y plane scanning + Z-axis depth-of-focus adjustment." For example, when machining curved workpieces, the X / Y galvanometers control the beam spot to move along the surface contour, and the focusing module 120 adjusts the focal depth in real time to match the surface curvature, solving the problem that traditional single galvanometers cannot adapt to three-dimensional structures.

[0075] In one embodiment of this application, the convex lens unit 121 is a plano-convex lens and / or a biconvex lens.

[0076] The convex lens unit 121 can be a plano-convex lens, a biconvex lens, or a combination of both. A plano-convex lens has one flat side and one convex side, suitable for focusing parallel or collimated light, such as a beam collimated by an optical fiber end cap. Its flat side facing the beam's incident direction reduces aberrations, making it suitable for scenarios requiring low-aberration focusing, such as the uniform molten pool in laser welding. A biconvex lens has convex surfaces on both sides, providing stronger light-gathering capabilities, suitable for focusing divergent light, such as divergent beams directly output from an optical fiber. It can shorten the focusing distance, making it suitable for space-constrained processing equipment. When used in combination (e.g., a plano-convex lens + biconvex lens), both low aberrations and strong light-gathering capabilities can be balanced, optimizing the focal energy distribution and adapting to processing requirements with different beam characteristics (such as divergence angle and power density), thus improving system flexibility.

[0077] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0078] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0079] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the scope of protection of this application includes the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of this application.

[0080] This document uses specific examples to illustrate the working principle and implementation method of the laser focusing system of this application. The above description of the embodiments is only for the purpose of helping to understand the specific settings and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation method and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

[0081] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A laser focusing system, characterized in that, The laser focusing system includes: Laser module, used to emit laser light; A focusing module, located at the output end of the laser module, includes a convex lens unit and a driving mechanism. The driving mechanism is used to drive the displacement of the convex lens unit to adjust the position of the focal point of the convex lens unit. A light deflection module is located at the output end of the focusing module of the convex lens unit to adjust the transmission path of the light output by the focusing module of the convex lens unit so that the light is focused on the plane to be processed.

2. The laser focusing system as described in claim 1, characterized in that, The output end of the laser module is provided with an optical fiber end cap, the diameter of which is greater than or equal to the diameter of the laser beam output by the optical fiber of the laser module.

3. The laser focusing system as described in claim 2, characterized in that, The fiber end cap can be a planar end cap, a beveled end cap, or a spherical end cap.

4. The laser focusing system as described in any one of claims 1 to 3, characterized in that, The axial displacement of the convex lens unit is linearly related to the displacement of the focal point of the convex lens unit; The axial displacement of the convex lens unit is the displacement of the convex lens unit in the direction of light transmission.

5. The laser focusing system as described in claim 4, characterized in that, When the axial displacement range of the convex lens unit is -2mm to 2mm, the displacement range of the focal point of the convex lens unit is -5mm to 5mm.

6. The laser focusing system as described in claim 1, characterized in that, The displacement resolution of the drive mechanism is less than or equal to 0.1µm, and the response time of the drive mechanism is less than or equal to 1ms.

7. The laser focusing system as described in claim 6, characterized in that, The drive mechanism employs a piezoelectric ceramic driver or a voice coil motor.

8. The laser focusing system as described in claim 1, characterized in that, The laser focusing system also includes a controller, and the focusing module is also equipped with a displacement sensor. Both the driving mechanism and the displacement sensor are connected to the controller. The displacement sensor monitors the displacement of the convex lens unit, and the controller controls the drive mechanism to drive the convex lens unit to move according to the data fed back by the displacement sensor.

9. The laser focusing system as described in claim 1, characterized in that, The light deflection module includes an X-axis galvanometer and a Y-axis galvanometer. The light focused by the focusing module is reflected onto the plane to be processed through the X-axis galvanometer and the Y-axis galvanometer.

10. The laser focusing system as described in claim 1, characterized in that, The convex lens unit is a plano-convex lens and / or a biconvex lens.

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