Environment-friendly silicon carbide seed crystal treatment equipment

Abstract

The invention discloses environment-friendly silicon carbide seed crystal treatment equipment which comprises a driving motor, a driving cylinder, a water storage tank, a top plate and a bottom plate, wherein a first belt pulley is mounted at the output end of the driving motor; the driving cylinder is mounted on a U-shaped frame; the water storage tank is mounted on a base; a protective cover is installed at the upper end of the top plate in a sealed mode, an output shaft of the driving motor is rotationally connected with the protective cover through a third sealed bearing, and the output end of the driving cylinder is connected with the protective cover. A plurality of groups of splines are rotationally arranged on the top plate through first sealing bearings, the splines are spirally arranged, a second belt pulley is mounted at the upper end of each spline, and the first belt pulley and the second belt pulley are connected through a toothed belt; and a movable pipe is arranged on each spline in a sliding manner. According to the equipment, seed crystals are immersed in deionized water for micropore treatment so as to realize rough treatment on the surfaces of the seed crystals, the operation is convenient and simple, the safety is high, toxic waste liquid is not generated, and the equipment is environment-friendly.

Description

Technical Field

[0001] This invention relates to the field of seed crystal processing technology, and in particular to an environmentally friendly silicon carbide seed crystal processing device. Background Technology

[0002] When preparing silicon carbide crystals using the physical vapor phase method, seed crystals are usually bonded to the crucible with an adhesive. Before bonding the seed crystals, the bonding surface of the seed crystals is usually roughened, typically by etching, to ensure the bonding effect.

[0003] During the etching process, strong acids, strong alkalis, or oxidizing solutions (such as hydrofluoric acid and ferric chloride) are required, which can easily generate toxic waste liquid. Improper handling can pollute the environment and endanger the health of operators. Therefore, it is necessary to design a seed crystal processing equipment that does not generate toxic waste liquid and is environmentally friendly and safe to meet the requirements. Summary of the Invention

[0004] The purpose of this application is to provide an environmentally friendly silicon carbide seed crystal processing device to solve the technical problems mentioned above.

[0005] To achieve the above objectives, this application provides the following technical solution: an environmentally friendly silicon carbide seed crystal processing device, comprising a drive motor with a first pulley installed at the output end, a drive cylinder installed on a U-shaped frame, a water storage tank installed on the base, and a top plate and a bottom plate fixed by connecting columns; The top plate is sealed with a protective cover, and the drive motor is mounted on the protective cover. The output shaft of the drive motor is rotatably connected to the protective cover through a third sealed bearing, and the output end of the drive cylinder is connected to the protective cover. The top plate is rotatably provided with multiple sets of splines via a first sealed bearing, and the multiple sets of splines are arranged in a spiral shape. Each spline is equipped with a second pulley at its upper end, and the first pulley and the second pulley are connected by a toothed belt. Each spline is slidably provided with a movable tube, and the inner cavity of the movable tube is provided with a spline cavity adapted to the spline. The lower end of the movable tube passes through the central hole of the corresponding second sealing bearing. A limit strip is installed on the wall of the central hole of the second sealing bearing, and a movable groove adapted to the limit strip is provided on the outer wall of the corresponding movable tube. The second sealing bearing is mounted on the base plate. The upper end of the movable tube is provided with a blocking edge, and the lower end of the movable tube is equipped with a drill bit, and the outer surface of the drill bit is coated with abrasive particles. The water storage tank has a support plate at the bottom of its inner cavity, an overflow pipe on its outer wall, a drain pipe at the bottom, and valves on both the drain pipe and the overflow pipe.

[0006] As a preferred embodiment of this invention, a pressurization unit is also provided. When the seed crystal is immersed in deionized water, the extrusion unit makes the air pressure above the liquid surface of the sealed water tank greater than the atmospheric pressure.

[0007] In a preferred embodiment of this invention, the pressurizing unit includes an elastic sealing ring fixedly disposed on the outer edge of the top plate, the outer diameter of the elastic sealing ring being adapted to the inner diameter of the water storage tank. The diameter of the top plate is larger than the diameter of the bearing plate and the bottom plate.

[0008] As a preferred embodiment of this invention, a height self-adjusting unit is also provided, which can adjust the height of the bearing disk for seed crystals of the same diameter but different thicknesses.

[0009] As a preferred embodiment of this invention, the height self-adjusting unit includes a telescopic rod, a slider slidably disposed at the bottom of the inner cavity of the water storage tank, and a movable toothed plate fixedly disposed at the lower end of the bearing plate; A linear spring is provided around the telescopic rod, and the upper and lower ends of the linear spring and the telescopic rod are respectively fixedly connected to the bottom of the inner cavity of the bearing plate and the water storage tank. The upper end of the slider is fixed with a fixed tooth plate that is adapted to the moving tooth plate. The side end of the slider is movably connected to a vertically set vertical rod through a connecting rod. The vertical rod slides through the inner wall of the water storage tank and is provided with a limit block. The left end of the slider is connected to the water storage tank through a connecting spring.

[0010] In a preferred embodiment of this invention, multiple sets of rotatable limiting wheels are arranged spirally along the top plate, and the multiple sets of limiting wheels are spaced apart and abut against the outer wall of the toothed belt.

[0011] In a preferred embodiment of this invention, the upper ends of the bearing discs are connected in pairs to each other and are threaded with multiple sets of fastening screws.

[0012] In summary, the technical effects and advantages of this invention are as follows: The present invention has a reasonable structure. This equipment immerses the seed crystal in deionized water to perform microporous treatment to achieve roughening treatment of the seed crystal surface. It is convenient and simple to operate, has high safety, does not produce toxic waste liquid and is environmentally friendly. In this invention, a pressurizing unit is provided to increase the air pressure above the deionized water, thereby increasing the compressive stress of the deionized water on the seed crystal. This can improve the local compressive strength of the seed crystal, inhibit crack propagation, and the compressive stress can partially offset the tensile stress generated by drilling, reducing the risk of seed crystal breakage. In this invention, a height self-adjusting unit is provided, which can ensure that the upper surface of the seed crystal is kept at a certain height from the liquid surface for seed crystals of different thicknesses. This helps to maintain a relatively constant water pressure environment during the drilling process. Stable water pressure plays an important role in controlling drilling depth, reducing thermal stress during drilling, and improving drilling quality. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 for Figure 1 A magnified schematic diagram of the central part of the structure; Figure 3 for Figure 2 Schematic diagram of the partial split structure in the middle; Figure 4 for Figure 3 Schematic diagram of the middle spline structure; Figure 5 for Figure 3 Schematic diagram of the second sealed bearing structure; Figure 6 This is a schematic diagram of the toothed belt and the first and second pulleys. Figure 7 for Figure 2 A schematic diagram of a partial cross-sectional structure of the middle shell.

[0015] In the diagram: 1. Base; 2. U-shaped frame; 3. Drive cylinder; 4. Water storage tank; 401. Overflow pipe; 402. Drain pipe; 403. Bearing plate; 5. Protective cover; 6. Drive motor; 7. Top plate; 8. Bottom plate; 9. Connecting column; 10. First pulley; 11. Second pulley; 12. Spline; 13. First sealed bearing; 14. Movable pipe; 15. Blocking edge; 16. Second sealed bearing; 17. Drill bit; 18. Limiting strip; 19. Elastic sealing ring; 20. Toothed belt; 21. Telescopic rod; 22. Moving toothed plate; 23. Fastening screw; 24. Slider; 25. Connecting rod; 26. Limiting block; 27. Linear spring; 28. Limiting wheel; 29. ​​Vertical rod; 30. Connecting spring; 31. Fixed toothed plate. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Example: Reference Figure 1-6 An environmentally friendly silicon carbide seed crystal processing device is shown, including a drive motor 6 with a first pulley 10 installed at the output end, a drive cylinder 3 installed on a U-shaped frame 2, a water storage tank 4 installed on a base 1, and a top plate 7 and a bottom plate 8 fixed by a connecting column 9. The top plate 7 is sealed with a protective cover 5, and the drive motor 6 is mounted on the protective cover 5. The output shaft of the drive motor 6 is rotatably connected to the protective cover 5 through a third sealed bearing, and the output end of the drive cylinder 3 is connected to the protective cover 5. Multiple sets of splines 12 are rotatably arranged on the top plate 7 via the first sealed bearing 13, and the multiple sets of splines 12 are arranged in a spiral shape. A second pulley 11 is installed at the upper end of each spline 12, and the first pulley 10 and the second pulley 11 are connected by a toothed belt 20. Each spline 12 is slidably provided with a movable tube 14, and the inner cavity of the movable tube 14 is provided with a spline cavity adapted to the spline 12. The lower end of the movable tube 14 passes through the center hole of the corresponding second sealing bearing 16. A limit strip 18 is installed on the wall of the center hole of the second sealing bearing 16, and a movable groove adapted to the limit strip 18 is provided on the outer wall of the corresponding movable tube 14. The second sealing bearing 16 is installed on the base plate 8. The upper end of the movable tube 14 is provided with a blocking edge 15, and the lower end of the movable tube 14 is equipped with a drill bit 17, and the outer surface of the drill bit 17 is coated with abrasive particles. The water storage tank 4 has a support plate 403 at the bottom of its inner cavity, an overflow pipe 401 on its outer wall, a drain pipe 402 at the bottom of its bottom, and valves on both the drain pipe 402 and the overflow pipe 401.

[0018] In use, after placing the seed crystal on the support plate 403, deionized water is added directly to the water storage tank 1. After the deionized water overflows from the overflow pipe 410, the valve on it is closed (at this time, the seed crystal is completely submerged in the deionized water). Then, the control cylinder 3 drives the drill bit 17 downwards, causing the lower end of the drill bit 17 to contact the bonding surface of the seed crystal under its own gravity. The movable tube 14 carrying the drill bit 17 moves vertically upwards along the spline 12 for a certain distance and then stops. At this point, only the drill bit part is submerged in the deionized water. The drive motor 6 drives multiple splines 12 to rotate simultaneously through the cooperation of the toothed belt 20, the first pulley 10, and the second pulley 11, which in turn drives multiple drill bits 17 to rotate simultaneously to drill microholes on the surface of the seed crystal (during drilling, the gravity of the movable scraper 14 will drive the drill bits 17 to move downwards and drill microholes to a certain depth). When the adhesive penetrates into the hole and solidifies, it will form a "mechanical anchoring" structure, which will enhance the adhesion of the adhesive and thus enhance the bonding effect between the seed crystal and the crucible cover. After drilling is completed, each component returns to its original position. Drilling with the seed crystal in deionized water can effectively reduce the heat generated during the drilling process, reduce the risk of cracking of the seed crystal due to thermal stress, and at the same time, water can also act as a lubricant, reduce the wear of the drill bit 17, and extend the tool life. The drill bit 17 is designed to be movable and can move up and down. Even when the seed crystal bonding surface is uneven or rough, the extrusion pressure between the drill bit 17 and each seed crystal is consistent, and microholes with consistent depth are drilled. Since the drill bit 17 is movable, it can come into contact with the bonding surface of the seed crystal at different heights without causing pressure damage to the bonding surface (the weight of the movable tube 14 is small and will not cause pressure damage to the surface of the seed crystal). This equipment immerses the seed crystal in deionized water to drill holes, thereby roughening the surface of the seed crystal. It is easy and simple to operate, highly safe, and does not produce toxic waste liquid, making it environmentally friendly.

[0019] It should be noted that: First, the toothed belt 20, the first pulley 10 and the second pulley 11 work together to drive multiple splines 12 to rotate simultaneously, which can drill multiple microholes of the same depth at the same time; Second, low-speed drilling is used; Third, the surface of the drill bit 17 is made of diamond particles.

[0020] As a preferred embodiment of this invention, a pressurization unit is also provided. After the seed crystal is immersed in deionized water, the pressure above the liquid surface of the sealed water tank 4 is made greater than atmospheric pressure by the squeezing unit.

[0021] By pressurizing the deionized water through a pressurization unit, the air pressure above the deionized water is increased, thereby increasing the compressive stress of the deionized water on the seed crystal. This can improve the local compressive strength of the seed crystal, inhibit crack propagation, and the compressive stress can partially offset the tensile stress generated by drilling, reducing the risk of seed crystal breakage.

[0022] It should be noted that the atmospheric pressure above the deionized water is 1.3 to 1.6 times the normal atmospheric pressure. If the value is too small, the effect of suppressing breakage will be poor, and if the value is too large, it may cause the material to yield or generate new cracks.

[0023] As a preferred embodiment of this example, Figure 2 As shown, the pressurization unit includes an elastic sealing ring 19 fixedly installed on the outer edge of the top plate 7, and the outer diameter of the elastic sealing ring 19 is adapted to the inner diameter of the water storage tank 4. The diameter of the top plate 7 is larger than the diameter of the bearing plate 403 and the bottom plate 8.

[0024] During use, as the drive cylinder 3 drives the drill bit 17 to move downward, its elastic sealing ring 19 will come into contact with the inner wall of the water storage tank 4 during the descent, and will compress the air between the deionized water and the top plate 7, thereby increasing the air pressure above the deionized water.

[0025] As a preferred embodiment of this invention, a height self-adjusting unit is also provided, which can adjust the height of the carrier disk 403 for seed crystals of the same diameter but different thicknesses.

[0026] To ensure that the upper surface of the seed crystal is at a certain height relative to the liquid surface, a height self-adjustment unit is set up for seed crystals of different thicknesses. The height of the upper surface of the seed crystal relative to the liquid surface is changed by changing the height of the support plate 403.

[0027] It is important to note the following: First, the height should be set between 3 and 5 cm to maintain a stable height between the upper surface of the seed crystal and the liquid surface. This helps to maintain a relatively constant water pressure environment during drilling. Stable water pressure plays an important role in controlling drilling depth, reducing thermal stress during drilling, and improving drilling quality. Second, since the liquid surface height is consistent, the height of the bearing plate 403 can be adjusted for seed crystals of different thicknesses. The height at which the top plate 7 is lowered by the drive cylinder 3 remains constant, ensuring the consistency of the air pressure above the liquid surface.

[0028] As a preferred embodiment of this example, Figure 7 As shown, the height self-adjusting unit includes a telescopic rod 21, a slider 24 slidably disposed at the bottom of the inner cavity of the water storage tank 4, and a movable toothed plate 22 fixedly disposed at the lower end of the bearing plate 403. A linear spring 27 is provided around the telescopic rod 21, and the upper and lower ends of the linear spring 27 and the telescopic rod 21 are respectively fixedly connected to the bottom of the inner cavity of the bearing plate 403 and the water storage tank 4. The upper end of the slider 24 is fixed with a fixed tooth plate 31 that is adapted to the moving tooth plate 22. The side end of the slider 24 is movably connected to the vertically set vertical rod 29 through the connecting rod 25. The vertical rod 29 slides through the inner wall of the water storage tank 4 and is provided with a limit block 26. The left end of the slider 24 is connected to the water storage tank 4 through the connecting spring 30.

[0029] In use, the seed crystal can be placed directly on the support plate 403. Due to the gravity of the seed crystal itself, the support plate 403 will compress the linear spring 27 and automatically move downward to adjust the height. After the height is adjusted, deionized water is added, and the top plate 7 moves downward. The top plate 7 moves downward and contacts and squeezes the upper end of the vertical rod 29, causing the vertical rod 29 to move downward. Finally, the moving tooth plate 22 and the fixed tooth plate 31 are inserted, and the support plate 403 is positioned (the height of the support plate 403 is limited to prevent the weight of the drill bit 17 and the moving tube 14 from affecting the height of the seed crystal, and the weight of the seed crystal after drilling will change, thus affecting the height of the seed crystal. Therefore, the seed crystal needs to be positioned first). At this time, the air pressure at the upper end of the liquid surface reaches the set range, and the drill bit 17 contacts the upper end of the seed crystal to perform drilling. After drilling is completed, the top plate 7 moves upward to return to its original position. At this time, the vertical rod 29 can return to its original position through the elastic force of the connecting spring 30 and the cooperation of the connecting rod 25.

[0030] As a preferred embodiment of this invention, the top plate 7 is provided with a plurality of rotating limit wheels 28 arranged in a spiral pattern, and the plurality of limit wheels 28 are spaced apart and abut against the outer wall of the toothed belt 20.

[0031] The limiting wheel 28 ensures that the toothed belt 20 is stably engaged with each pulley, which is beneficial to the stable operation of the equipment.

[0032] In a preferred embodiment of this invention, the upper ends of the bearing disk 403 are connected in pairs with threaded fastening screws 23.

[0033] After placing the seed crystal on the carrier plate 403, the seed crystal can be fixed by rotating the fastening screw 23.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An environmentally friendly silicon carbide seed crystal processing device, characterized in that: It includes a drive motor (6) with a first pulley (10) installed at the output end, a drive cylinder (3) installed on a U-shaped frame (2), a water storage tank (4) installed on a base (1), and a top plate (7) and a bottom plate (8) fixed by a connecting column (9). The top plate (7) is sealed with a protective cover (5), and the drive motor (6) is mounted on the protective cover (5). The output shaft of the drive motor (6) is rotatably connected to the protective cover (5) through a third sealed bearing. The output end of the drive cylinder (3) is connected to the protective cover (5). The top plate (7) is rotatably provided with multiple sets of splines (12) via a first sealed bearing (13), and the multiple sets of splines (12) are arranged in a spiral shape. Each spline (12) is equipped with a second pulley (11) at its upper end, and the first pulley (10) and the second pulley (11) are connected by a toothed belt (20). Each spline (12) is slidably provided with a movable tube (14), and the inner cavity of the movable tube (14) is provided with a spline cavity adapted to the spline (12). The lower end of the movable tube (14) passes through the center hole of the corresponding second sealing bearing (16). A limit strip (18) is installed on the wall of the center hole of the second sealing bearing (16), and a movable groove adapted to the limit strip (18) is provided on the outer wall of the movable tube (14). The second sealing bearing (16) is installed on the base plate (8). The upper end of the movable tube (14) is provided with a blocking edge (15), and the lower end of the movable tube (14) is equipped with a drill bit (17), and the outer surface of the drill bit (17) is covered with abrasive particles. The water storage tank (4) has a support plate (403) at the bottom of its inner cavity, an overflow pipe (401) on its outer wall, a drain pipe (402) at the bottom of its bottom, and valves on both the drain pipe (402) and the overflow pipe (401).

2. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 1, characterized in that: A pressurization unit is also provided. When the seed crystal is immersed in deionized water, the pressure above the liquid surface of the sealed water tank (4) is made greater than atmospheric pressure by the squeezing unit.

3. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 2, characterized in that: The pressurization unit includes an elastic sealing ring (19) fixedly disposed on the outer edge of the top plate (7), the outer diameter of the elastic sealing ring (19) being adapted to the inner diameter of the water storage tank (4); The diameter of the top plate (7) is greater than the diameter of the bearing plate (403) and the bottom plate (8).

4. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 3, characterized in that: It is also equipped with a height self-adjustment unit, which can adjust the height of the carrier disk (403) for seed crystals of the same diameter but different thicknesses.

5. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 4, characterized in that: The height self-adjusting unit includes a telescopic rod (21), a slider (24) slidably disposed at the bottom of the inner cavity of the water storage tank (4), and a movable toothed plate (22) fixedly disposed at the lower end of the bearing plate (403). A linear spring (27) is provided around the telescopic rod (21), and the upper and lower ends of the linear spring (27) and the telescopic rod (21) are respectively fixedly connected to the bottom of the inner cavity of the bearing plate (403) and the water storage tank (4). The upper end of the slider (24) is fixed with a fixed tooth plate (31) that is adapted to the moving tooth plate (22). The side end of the slider (24) is movably connected to the vertically set vertical rod (29) through the connecting rod (25). The vertical rod (29) slides through the inner wall of the water storage tank (4) and a limit block (26) is provided. The left end of the slider (24) is connected to the water storage tank (4) through the connecting spring (30).

6. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 1, characterized in that: The top plate (7) is provided with a plurality of rotating limit wheels (28) arranged in a spiral shape, and the plurality of limit wheels (28) are spaced apart and abut against the outer wall of the toothed belt (20).

7. The environmentally friendly silicon carbide seed crystal processing equipment according to claim 1, characterized in that: The upper ends of the bearing plate (403) are opposite each other and threadedly connected to multiple sets of fastening screws (23).

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