Laminar flow clean room

Abstract

The invention relates to the technical field of clean rooms, in particular to a laminar flow clean room which comprises a wall body, a fixing ring is arranged in the wall body, an air suction groove is formed in the surface of the fixing ring, a fixing plate is fixed to the interior of the wall body through a screw rod, a connecting ring is fixed to the bottom of the fixing plate, a filter screen is arranged on the surface of the connecting ring, and an air outlet pipe is arranged in the filter screen. A connecting plate is fixed to the bottom of the filter screen, a cylinder is fixed to the surface of the lifting plate, a piston rod is arranged at the end of the cylinder, and an extension plate is arranged at the other end of the piston rod; the device has the beneficial effects that a cleaning ring moves on the surface of the filter screen, dust on the surface of the filter screen can be roughly cleaned, after a lifting ring and a lifting plate continuously descend, an inserting rod extends out of the interior of a sleeving pipe, a stress plate on the surface of the sleeving pipe continuously pulls a connecting rod at the end of a tension sensor, and the tension sensor is driven to rotate; and after the tension sensor detects the set tension, a worker is prompted through an electric signal.

Description

Technical Field

[0001] This invention relates to the field of cleanroom technology, specifically to a laminar flow cleanroom. Background Technology

[0002] A cleanroom is a well-sealed space where parameters such as air cleanliness, temperature, humidity, pressure, and noise are controlled as needed.

[0003] In existing technologies, vertical laminar flow cleanrooms use air blown down from high-efficiency filters on the ceiling, and contaminants are discharged from return air vents on the ground with the airflow. This is often used in scenarios with extremely high cleanliness requirements, such as semiconductor chip production and operating tables.

[0004] However, traditional air supply devices do not have a blockage detection device, so they need to be cleaned regularly by staff, which increases the workload of the staff. Summary of the Invention

[0005] The purpose of this invention is to provide a laminar flow cleanroom to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a laminar flow cleanroom, comprising: The wall has a fixed ring inside, and an air intake groove is opened on the surface of the fixed ring. A fixed plate is fixed inside the wall by screws. A connecting ring is fixed to the bottom of the fixed plate. A filter screen is installed on the surface of the connecting ring. An air outlet pipe is installed inside the filter screen. A lifting ring and a lifting plate are installed at the bottom of the connecting ring. A connecting plate is fixed to the bottom of the filter screen. A cylinder is fixed to the surface of the lifting plate. A piston rod is installed at the end of the cylinder. An extension plate is installed at the other end of the piston rod. The extension plate is fixed to the surface of the lifting ring. A spring is installed between the connecting plate and the lifting plate.

[0007] Preferably, the surface of the fixed plate has holes that connect to an air injection device, allowing air to enter the air outlet pipe through the surface of the fixed plate. The surface of the air outlet pipe has air outlet holes through which air is blown out. The air is blown out through the filter screen, which filters the air. The extension plate is fixed to the surface of the lifting ring, and the lifting ring moves with the extension plate. Both the lifting ring and the lifting plate are located outside the filter screen and can move outside the filter screen. A rubber ring is fixed to the inner wall of the lifting ring, and the rubber ring presses against the surface of the filter screen. The rubber ring moves up and down with the lifting ring and is always pressed against the surface of the filter screen.

[0008] Preferably, an L-shaped rod is fixed inside the lifting plate, and a through hole is opened on the surface of the connecting plate. The L-shaped rod is inserted into the through hole and can move up and down in the through hole. One end of the surface of the spring is connected to the surface of the connecting plate, and the other end is connected to the inside of the lifting plate. The spring has a pulling force on the lifting plate, so that the spring is close to the surface of the connecting plate. When the lifting plate descends, the spring is stretched.

[0009] Preferably, multiple sets of connecting rods are fixed to the end of the L-shaped rod, and a cleaning ring is fixed to the other end of the connecting rod. Both the connecting rod and the cleaning ring move with the L-shaped rod. A cleaning brush is provided on the surface of the cleaning ring, and the cleaning brush on the surface of the cleaning ring rests on the surface of the filter screen.

[0010] Preferably, a plug rod is fixed inside the lifting plate, a sleeve is fixed at the bottom of the connecting plate, the plug rod is inserted into the sleeve, the plug rod can move inside the sleeve, a tension sensor is fixed on the inner wall of the lifting plate, a rubber strip is provided at the end of the tension sensor, a force plate is fixed on the surface of the sleeve, and the rubber strip at the end of the tension sensor is connected to the surface of the force plate.

[0011] Preferably, the connecting plate has a storage hole inside, the plug rod is inserted into the storage hole, the plug rod can move up and down in the storage hole, the end of the plug rod is fixed with a fixing rod, the fixing rod is located in the storage hole, the fixing rod can move up and down in the storage hole, the top of the storage hole has a fixing hole, the fixing rod can be inserted into the fixing hole and move up and down in the fixing hole.

[0012] Preferably, the surface of the fixing rod is provided with protrusions, and multiple sets of protrusions are provided. The protrusions move up and down with the fixing rod. The inside of the connecting plate is provided with an annular groove, and a rubber tube is provided in the annular groove. The inside of the rubber tube is hollow and connected to an inflation device. The inflation device can inject air into the inside of the rubber tube. After the rubber tube is filled with air, it expands. A limiting block is connected to the surface of the rubber tube. The limiting block is inserted between the annular groove and the fixing hole. The limiting block can be inserted into the inside of the fixing hole. After the rubber tube expands, it drives the limiting block to move.

[0013] Preferably, when the fixing rod is inserted into the fixing hole, the limiting block is inserted into the fixing hole. The limiting block can be inserted between the two sets of protrusions, and the limiting block is stuck between the protrusions, thus stabilizing the fixing rod in the fixing hole.

[0014] Preferably, the air in the air outlet pipe is ejected through the air outlet hole, and the air is filtered by the filter screen, so that the air enters the interior of the wall, and the air inside the wall is discharged through the air intake groove.

[0015] Preferably, when the fixing rod is fixed in the fixing hole, the position between the plug rod and the sleeve is relatively stable. The piston rod is driven to rise by the cylinder, and the piston rod drives the extension plate to rise. The lifting ring rises with the extension plate, and the distance between the lifting ring and the lifting plate increases, so that the bottom of the filter screen is exposed. The bottom of the filter screen is located in the gap between the lifting ring and the lifting plate, and the top of the filter screen is covered by the lifting ring. The air sprayed from the air outlet enters the interior of the wall after being filtered through the bottom of the filter screen.

[0016] Compared with the prior art, the beneficial effects of the present invention are: After prolonged use, dust accumulates on the surface of the filter screen, increasing the internal pressure. The lifting plate is compressed, stretching the spring. The lifting plate and lifting ring descend above the filter screen, exposing more of the screen and increasing the amount of filter material available for filtration, allowing for continued air filtration. As the lifting ring and lifting plate move across the filter screen, the cleaning ring on the L-shaped rod also moves relative to it, roughly cleaning the dust. As the lifting ring and lifting plate continue to descend, the connecting rod extends from inside the sleeve. The force plate on the sleeve continuously pulls the connecting rod at the end of the tension sensor. Once the tension sensor detects the set tension, it alerts the operator via an electrical signal. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the present invention.

[0018] Figure 2 This is a schematic diagram of the structure of the present invention from another perspective.

[0019] Figure 3 This is a schematic diagram of the fixing plate structure of the present invention.

[0020] Figure 4 This is a schematic diagram of the air outlet pipe structure of the present invention.

[0021] Figure 5 This is a schematic diagram of the internal structure of the lifting ring of the present invention.

[0022] Figure 6 This is a schematic cross-sectional view of the connecting plate of the present invention.

[0023] Figure 7 This is a schematic diagram of the cross-sectional structure of the lifting plate of the present invention.

[0024] Figure 8 for Figure 7 Enlarged schematic diagram of the structure at point A in the middle.

[0025] Figure 9 This is a schematic diagram of the tensile sensor structure of the present invention.

[0026] Figure 10 for Figure 9 Enlarged schematic diagram of the structure at point B.

[0027] In the diagram: 1. Wall; 2. Fixing ring; 3. Suction groove; 4. Fixing plate; 5. Connecting ring; 6. Filter screen; 7. Lifting ring; 8. Lifting plate; 9. Exhaust pipe; 10. Exhaust hole; 11. Connecting plate; 12. Extension plate; 13. Piston rod; 14. Cylinder; 16. Through hole; 17. L-shaped rod; 18. Spring; 19. Cleaning ring; 20. Connecting rod; 21. Rubber ring; 22. Sleeve; 23. Insertion rod; 24. Tension sensor; 25. Force plate; 26. Fixing hole; 27. Circular groove; 28. Rubber tube; 29. ​​Protrusion; 30. Fixing rod; 31. Storage hole; 32. Limiting block. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the present invention clear and complete, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of the present invention, and are merely illustrative of the embodiments of the present invention. They are not intended to limit the embodiments of the present invention. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Please see Figures 1 to 10 The present invention provides a technical solution: Example 1: A laminar flow cleanroom includes: a wall 1, a fixing ring 2 inside the wall 1, an air suction groove 3 on the surface of the fixing ring 2, a fixing plate 4 fixed inside the wall 1 by screws, a connecting ring 5 fixed to the bottom of the fixing plate 4, a filter screen 6 on the surface of the connecting ring 5, an air outlet pipe 9 inside the filter screen 6, a lifting ring 7 and a lifting plate 8 at the bottom of the connecting ring 5, a connecting plate 11 fixed to the bottom of the filter screen 6, a cylinder 14 fixed to the surface of the lifting plate 8, and a piston rod 13 at the end of the cylinder 14. An extension plate 12 is provided at the other end of the piston rod 13. The extension plate 12 is fixed to the surface of the lifting ring 7. A spring 18 is provided between the connecting plate 11 and the lifting plate 8. When the lifting plate 8 is squeezed, the spring 18 is stretched, and the lifting plate 8 and the lifting ring 7 descend on the surface of the filter screen 6, exposing more of the filter screen 6. This increases the amount of filter screen 6 used for filtration, allowing the air to continue to be filtered. When the lifting ring 7 and the lifting plate 8 move on the surface of the filter screen 6, the cleaning ring 19 on the surface of the L-shaped rod 17 also moves relative to the surface of the filter screen 6.

[0030] Example 2: Based on Example 1, the surface of the fixing plate 4 is provided with holes, which are connected to an air injection device, allowing air to enter the air outlet pipe 9 through the surface of the fixing plate 4. The surface of the air outlet pipe 9 is provided with air outlet holes 10, from which air is blown out. The air is then blown out through the filter screen 6, which filters the air. The extension plate 12 is fixed to the surface of the lifting ring 7, which moves with the extension plate 12. Both the lifting ring 7 and the lifting plate 8 are located outside the filter screen 6, allowing them to move outside the filter screen 6. A rubber ring 21 is fixed to the inner wall of the lifting ring 7, and the rubber ring 21 rests against the surface of the filter screen 6. 21 As the lifting ring 7 moves up and down and is always held against the surface of the filter screen 6, the air in the air outlet pipe 9 is ejected through the air outlet 10. The filter screen 6 filters the air, allowing the air to enter the interior of the wall 1. The air inside the wall 1 is discharged through the air intake groove 3. The fixing plate 4 is fixed inside the wall 1. The air enters the interior of the air outlet pipe 9 and is blown out from the air outlet 10. The surface of the connecting ring 5 is provided with a filter screen 6. The filter screen 6 filters the air, allowing the air to enter the interior of the wall 1. The air inside the wall 1 is discharged through the air intake groove 3. After long-term use, dust settles on the surface of the filter screen 6, which increases the pressure inside the filter screen 6. An L-shaped rod 17 is fixed inside the lifting plate 8. A through hole 16 is opened on the surface of the connecting plate 11, and the L-shaped rod 17 is inserted into the through hole 16, allowing it to move up and down within the through hole 16. One end of the surface of the spring 18 is connected to the surface of the connecting plate 11, and the other end is connected to the inside of the lifting plate 8. The spring 18 exerts a pulling force on the lifting plate 8, causing it to approach the surface of the connecting plate 11. When the lifting plate 8 descends, the spring 18 is stretched. A plug-in rod 23 is fixed inside the lifting plate 8, and a sleeve 22 is fixed to the bottom of the connecting plate 11. The plug-in rod 23 is inserted into the inside of the sleeve 22, allowing it to move within the sleeve 22. A tension sensor is fixed to the inner wall of the lifting plate 8. The tension sensor 24 has a rubber strip at its end. A force plate 25 is fixed to the surface of the sleeve tube 22. The rubber strip at the end of the tension sensor 24 is connected to the surface of the force plate 25. A receiving hole 31 is provided inside the connecting plate 11. The insertion rod 23 is inserted into the receiving hole 31 and can move up and down in the receiving hole 31. A fixing rod 30 is fixed to the end of the insertion rod 23. The fixing rod 30 is located in the receiving hole 31 and can move up and down in the receiving hole 31. A fixing hole 26 is provided at the top of the receiving hole 31. The fixing rod 30 can be inserted into the fixing hole 26 and move up and down in the fixing hole 26. A protrusion 29 is provided on the surface of the fixing rod 30. 9 is equipped with multiple sets of protrusions 29 that move up and down with the fixing rod 30. The connecting plate 11 has an annular groove 27 inside, within which a rubber tube 28 is installed. The interior of the rubber tube 28 is hollow and connected to an inflation device. The inflation device injects air into the rubber tube 28, causing it to expand. A limiting block 32 is connected to the surface of the rubber tube 28, inserting between the annular groove 27 and the fixing hole 26. The limiting block 32 can be inserted into the fixing hole 26. When the rubber tube 28 expands, it moves the limiting block 32. When the fixing rod 30 is inserted into the fixing hole 26, the limiting block 32 is also inserted into the fixing hole 26. The positioning block 32 can be inserted between the two sets of protrusions 29. The limiting block 32 is stuck between the protrusions 29, stabilizing the fixing rod 30 in the fixing hole 26. When the fixing rod 30 is fixed in the fixing hole 26, the position between the insertion rod 23 and the sleeve tube 22 is relatively stable. The piston rod 13 is driven to rise by the cylinder 14. The piston rod 13 drives the extension plate 12 to rise. The lifting ring 7 rises with the extension plate 12. The distance between the lifting ring 7 and the lifting plate 8 increases, exposing the bottom of the filter screen 6. The bottom of the filter screen 6 is located in the gap between the lifting ring 7 and the lifting plate 8. The top of the filter screen 6 is covered by the lifting ring 7. The air ejected from the air outlet 10 enters the interior of the wall 1 after being filtered through the bottom of the filter screen 6.

[0031] Multiple sets of connecting rods 20 are fixed to the end of the L-shaped rod 17. A cleaning ring 19 is fixed to the other end of the connecting rod 20. Both the connecting rod 20 and the cleaning ring 19 move with the L-shaped rod 17. A cleaning brush is provided on the surface of the cleaning ring 19. The cleaning brush on the surface of the cleaning ring 19 rests on the surface of the filter screen 6. When the lifting ring 7 and the lifting plate 8 move on the surface of the filter screen 6, the cleaning ring 19 on the surface of the L-shaped rod 17 also moves relative to the surface of the filter screen 6. By moving the cleaning ring 19 on the surface of the filter screen 6, the dust on the surface of the filter screen 6 can be roughly cleaned. When the lifting ring 7 and the lifting plate 8 continue to descend, the insertion rod 23 extends out from the inside of the sleeve tube 22. The force plate 25 on the surface of the sleeve tube 22 continuously pulls the connecting rod at the end of the tension sensor 24.

[0032] The fixing plate 4 is fixed inside the wall 1. Air enters the air outlet pipe 9 and is blown out from the air outlet 10. A filter screen 6 is provided on the surface of the connecting ring 5. The filter screen 6 filters the air, allowing it to enter the interior of the wall 1. The air inside the wall 1 is discharged through the air intake groove 3. After long-term use, dust settles on the surface of the filter screen 6, increasing the pressure inside the filter screen 6. When the lifting plate 8 is squeezed, the spring 18 is stretched. The lifting plate 8 and the lifting ring 7 descend on the surface of the filter screen 6, exposing more of the filter screen 6. This increases the number of filter screens 6 used for filtration, allowing the air to continue to be filtered. As the lifting ring 7 and the lifting plate 8 move on the surface of the filter screen 6, the cleaning ring 19 on the surface of the L-shaped rod 17 also moves relative to the surface of the filter screen 6. By moving the cleaning ring 19 on the surface of the filter screen 6, the dust on the surface of the filter screen 6 can be roughly cleaned. As the lifting ring 7 and the lifting plate 8 continue to descend, the plug rod 23 extends from the inside of the sleeve tube 22. The force plate 25 on the surface of the sleeve tube 22 continues to pull the tension. The connecting rod at the end of sensor 24, after the tension sensor 24 detects the set tension, prompts the operator to clean the dust on the surface of filter screen 6 via an electrical signal. The electrical signal also drives the inflation device to force air into the rubber tube 28. The rubber tube 28 expands in the annular groove 27, and after expansion, it presses against the limiting block 32, causing the limiting block 32 to move. The limiting block 32 inserts into the fixing hole 26 and abuts against the surface of the fixing rod 30. Because the surface of the fixing rod 30 has multiple sets of protrusions... 29. The limiting block 32 is held between the protrusions 29, stabilizing the fixing rod 30 in the fixing hole 26, so that the positions of the lifting ring 7 and the lifting plate 8 are fixed. The piston rod 13 is driven to extend by the cylinder 14. After the piston rod 13 extends out of the cylinder 14, it holds the extension plate 12, so that the extension plate 12 drives the lifting ring 7 to rise. After the lifting ring 7 rises, it covers the dusty filter screen 6, so that the clean filter screen 6 at the bottom is exposed, so that the filter screen 6 can still filter until the staff cleans the filter screen 6.

[0033] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A laminar flow cleanroom, characterized in that: include: The wall (1) has a fixing ring (2) inside it. The surface of the fixing ring (2) has an air intake groove (3). The wall (1) has a fixing plate (4) fixed inside it by a screw. The bottom of the fixing plate (4) has a connecting ring (5). The surface of the connecting ring (5) has a filter screen (6). The inside of the filter screen (6) has an air outlet pipe (9). The bottom of the connecting ring (5) has a lifting ring (7) and a lifting plate (8). The bottom of the filter screen (6) has a connecting plate (11). The surface of the lifting plate (8) has a cylinder (14). The end of the cylinder (14) has a piston rod (13). The other end of the piston rod (13) has an extension plate (12). The extension plate (12) is fixed on the surface of the lifting ring (7). A spring (18) is provided between the connecting plate (11) and the lifting plate (8).

2. The laminar flow cleanroom according to claim 1, characterized in that: The surface of the fixed plate (4) is provided with holes, which are connected to an air injection device, so that air enters the air outlet pipe (9) through the air on the surface of the fixed plate (4). The surface of the air outlet pipe (9) is provided with an air outlet hole (10), from which air is blown out. Air is blown out from the filter screen (6), which filters the air. The extension plate (12) is fixed on the surface of the lifting ring (7), and the lifting ring (7) moves with the extension plate (12). The lifting ring (7) and the lifting plate (8) are both located outside the filter screen (6). The lifting ring (7) and the lifting plate (8) can move outside the filter screen (6). A rubber ring (21) is fixed on the inner wall of the lifting ring (7), and the rubber ring (21) is held against the surface of the filter screen (6). The rubber ring (21) moves up and down with the lifting ring (7) and is always held against the surface of the filter screen (6).

3. A laminar flow cleanroom according to claim 2, characterized in that: An L-shaped rod (17) is fixed inside the lifting plate (8). A through hole (16) is opened on the surface of the connecting plate (11). The L-shaped rod (17) is inserted into the through hole (16). The L-shaped rod (17) can move up and down in the through hole (16). One end of the surface of the spring (18) is connected to the surface of the connecting plate (11), and the other end is connected to the inside of the lifting plate (8). The spring (18) has a pulling force on the lifting plate (8), so that the spring (18) is close to the surface of the connecting plate (11). When the lifting plate (8) descends, the spring (18) is stretched.

4. A laminar flow cleanroom according to claim 3, characterized in that: The L-shaped rod (17) has multiple sets of connecting rods (20) fixed at its end. The other end of the connecting rod (20) is fixed with a cleaning ring (19). The connecting rod (20) and the cleaning ring (19) move with the L-shaped rod (17). The surface of the cleaning ring (19) is provided with a cleaning brush. The cleaning brush on the surface of the cleaning ring (19) rests on the surface of the filter screen (6).

5. A laminar flow cleanroom according to claim 4, characterized in that: The lifting plate (8) is fixed with a plug rod (23) inside. The bottom of the connecting plate (11) is fixed with a sleeve (22). The plug rod (23) is inserted into the sleeve (22). The plug rod (23) can move inside the sleeve (22). The inner wall of the lifting plate (8) is fixed with a tension sensor (24). The end of the tension sensor (24) is provided with a rubber strip. The surface of the sleeve (22) is fixed with a force plate (25). The rubber strip at the end of the tension sensor (24) is connected to the surface of the force plate (25).

6. A laminar flow cleanroom according to claim 5, characterized in that: The connecting plate (11) has a storage hole (31) inside. The plug rod (23) is inserted into the storage hole (31). The plug rod (23) can move up and down in the storage hole (31). The end of the plug rod (23) is fixed with a fixing rod (30). The fixing rod (30) is located in the storage hole (31). The fixing rod (30) can move up and down in the storage hole (31). The top of the storage hole (31) has a fixing hole (26). The fixing rod (30) can be inserted into the fixing hole (26) and move up and down in the fixing hole (26).

7. A laminar flow cleanroom according to claim 6, characterized in that: The surface of the fixing rod (30) is provided with protrusions (29), and there are multiple sets of protrusions (29). The protrusions (29) move up and down with the fixing rod (30). The inside of the connecting plate (11) is provided with an annular groove (27). A rubber tube (28) is provided in the annular groove (27). The inside of the rubber tube (28) is empty. An inflation device is connected to the inside of the rubber tube (28). The inflation device can inject air into the inside of the rubber tube (28). After the air is injected into the inside of the rubber tube (28), it expands. A limiting block (32) is connected to the surface of the rubber tube (28). The limiting block (32) is inserted between the annular groove (27) and the fixing hole (26). The limiting block (32) can be inserted into the inside of the fixing hole (26). After the rubber tube (28) expands, it drives the limiting block (32) to move.

8. A laminar flow cleanroom according to claim 7, characterized in that: When the fixing rod (30) is inserted into the fixing hole (26), the limiting block (32) is inserted into the fixing hole (26). The limiting block (32) can be inserted between the two sets of protrusions (29). The limiting block (32) is stuck between the protrusions (29), stabilizing the fixing rod (30) in the fixing hole (26). The inflation device blows air into the interior of the rubber tube (28). The rubber tube (28) expands in the annular groove (27). After the rubber tube (28) expands, it squeezes the limiting block (32), causing the limiting block (32) to move.

9. A laminar flow cleanroom according to claim 8, characterized in that: The air in the air outlet pipe (9) is ejected through the air outlet hole (10), and the filter screen (6) filters the air so that the air enters the interior of the wall (1). The air inside the wall (1) is discharged through the air intake groove (3), and the surface of the connecting ring (5) is provided with a filter screen (6).

10. A laminar flow cleanroom according to claim 9, characterized in that: When the fixing rod (30) is fixed in the fixing hole (26), the position between the plug rod (23) and the sleeve (22) is relatively stable. The piston rod (13) is driven to rise by the cylinder (14). The piston rod (13) drives the extension plate (12) to rise. The lifting ring (7) rises with the extension plate (12). The distance between the lifting ring (7) and the lifting plate (8) increases, so that the bottom of the filter screen (6) is exposed. The bottom of the filter screen (6) is located in the gap between the lifting ring (7) and the lifting plate (8). The top of the filter screen (6) is covered by the lifting ring (7). The air sprayed out of the air outlet (10) enters the interior of the wall (1) after being filtered through the bottom of the filter screen (6).

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