Improved piezoelectric displacement table ceramic control method based on sawtooth waves

Abstract

The invention discloses an improved piezoelectric displacement table ceramic control method based on sawtooth waves, and relates to the technical field of piezoelectric control. According to the method, sawtooth waves for driving the piezoelectric displacement table are smoothed, and peak signals in traditional sawtooth waves are eliminated, so that the problem that piezoelectric ceramics are damaged by the peak signals is solved, the displacement precision of the displacement table is improved, the working noise is reduced, and the service life of the piezoelectric ceramics is prolonged. According to the method, the corner of the sawtooth wave is processed through a specific smoothing algorithm, the sawtooth wave signal in smooth transition is generated, stable driving of piezoelectric ceramics is achieved, and the method has high practical value and popularization prospects.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of piezoelectric control, in particular to a piezoelectric displacement table ceramic control method based on an improved sawtooth wave. BACKGROUND

[0002] The piezoelectric displacement table is a device for realizing precise displacement control by using the inverse piezoelectric effect of piezoelectric ceramics, and has a wide application in the fields of precision manufacturing, microelectronic processing and biomedicine. At present, the piezoelectric displacement table is usually driven by a sawtooth wave signal, and the expansion and contraction of the piezoelectric ceramic are realized through the periodic change of the sawtooth wave, so as to drive the displacement table to produce displacement.

[0003] However, the traditional sawtooth wave has obvious mutations at the corners of the rising edge and the falling edge, and the mutations will produce a sharp peak signal. The existence of the sharp peak signal will bring many problems: on the one hand, the sharp peak signal will interfere with the normal work of the piezoelectric displacement table, leading to the decrease of the displacement precision of the displacement table and failing to meet the demand of high-precision control; on the other hand, the sharp peak signal has high energy, and long-term action on the piezoelectric ceramic will cause damage to the internal structure of the piezoelectric ceramic, shortening the service life of the piezoelectric ceramic; meanwhile, the sharp peak signal will also produce large electromagnetic interference and mechanical noise in the driving process, affecting the working environment and stability of the equipment.

[0004] Therefore, how to eliminate the sharp peak signal in the sawtooth wave, improve the control precision and stability of the piezoelectric displacement table and prolong the service life of the piezoelectric ceramic has become a technical problem to be solved by the technical personnel in the field. SUMMARY

[0005] In order to solve the above technical problems, the piezoelectric displacement table ceramic control method based on the improved sawtooth wave is provided, and the problems in the background technology are solved.

[0006] In order to achieve the above purposes, the technical scheme adopted by the application is: The piezoelectric displacement table ceramic control method based on the improved sawtooth wave comprises: An original sawtooth wave signal is obtained, and the original sawtooth wave signal is used to drive the piezoelectric ceramic of the piezoelectric displacement table; The corners of the original sawtooth wave signal are smoothed to eliminate the sharp peak signal at the corners, and a smoothed sawtooth wave signal is generated; The smoothed sawtooth wave signal is output to a piezoelectric ceramic driving circuit to drive the piezoelectric ceramic to work.

[0007] Preferably, the smoothing of the corners of the original sawtooth wave signal specifically comprises: The corner positions of the rising edge and the falling edge of the original sawtooth wave signal are determined, and a preset smoothing curve is used for transition at the corner positions.

[0008] Preferably, the preset smooth curve is a circular arc curve, and a radius of the circular arc curve is set according to a performance parameter of the piezoelectric displacement table and a control precision requirement.

[0009] Preferably, the preset smooth curve is a polynomial curve, and a coefficient of the polynomial is adjusted to realize smooth transition of the curve at the corner.

[0010] Preferably, the piezoelectric displacement table ceramic control method based on the improved sawtooth wave comprises the following steps:

[0011] Preferably, the filter algorithm is a low-pass filter algorithm, and is used for filtering high-frequency peak components at the corner of the original sawtooth wave signal.

[0012] Preferably, the curve fitting algorithm is used for fitting discrete data points at the corner of the original sawtooth wave signal, to generate a smooth transition curve.

[0013] Preferably, the method further comprises a step of verifying the generated smooth sawtooth wave signal, and whether the smooth processing effect meets the requirement is judged by detecting waveform parameters of the smooth sawtooth wave signal and performance parameters of the displacement table after driving the piezoelectric ceramic.

[0014] Preferably, the waveform parameters comprise an amplitude, a frequency and a smoothness of corner transition of the signal, and the performance parameters of the displacement table comprise displacement precision, working noise and service life change of the piezoelectric ceramic.

[0015] Preferably, slopes of rising edges and falling edges of the smooth sawtooth wave signal are consistent with slopes of rising edges and falling edges of the original sawtooth wave signal.

[0016] Compared with the prior art, the piezoelectric displacement table ceramic control method based on the improved sawtooth wave has the following beneficial effects: 1. Eliminate peak signals: by smoothing the corner of the original sawtooth wave, the peak signals in the traditional sawtooth wave are effectively eliminated, the damage of the peak signals to the piezoelectric ceramic is avoided, and the service life of the piezoelectric ceramic is prolonged.

[0017] 2. Improve displacement precision: the smooth sawtooth wave signal is more stable, the interference of signal mutation to displacement control is reduced, the displacement precision of the piezoelectric displacement table is significantly improved, and higher precision control requirements can be met.

[0018] 3. Reduce working noise: the elimination of the peak signals reduces electromagnetic interference and mechanical vibration in the driving process, thereby reducing the noise of the piezoelectric displacement table during work, and improving the working environment of the equipment.

[0019] 4. Maintain original performance: In the process of smoothing the sawtooth wave, the slope of the rising edge and the falling edge is kept unchanged, ensuring that the displacement speed and displacement range of the displacement table are not affected, and maintaining the original working performance of the equipment.

[0020] 5. Wide application range: The smoothing method adopted by the application has flexibility, and appropriate smoothing curve and processing algorithm can be selected according to different performance parameters and control accuracy requirements of the piezoelectric displacement table, which is suitable for various application scenarios. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The piezoelectric displacement table ceramic control method based on the improved sawtooth wave is shown in the figure. DETAILED DESCRIPTION

[0022] The following description is used to disclose the application so that those skilled in the art can implement the application. The preferred embodiments in the following description are only as examples, and other obvious modifications can be thought of by those skilled in the art.

[0023] Embodiment 1 Please refer to Figure 1 The piezoelectric displacement table ceramic control method based on the improved sawtooth wave includes: S101, obtaining an original sawtooth wave signal, the original sawtooth wave signal is used to drive the piezoelectric ceramic of the piezoelectric displacement table; S102, smoothing the corner of the original sawtooth wave signal, eliminating the sharp peak signal at the corner, and generating a smoothed sawtooth wave signal; S103, outputting the smoothed sawtooth wave signal to the piezoelectric ceramic driving circuit to drive the piezoelectric ceramic to work.

[0024] Embodiment 1 The piezoelectric displacement table ceramic control method based on the improved sawtooth wave is provided, and the original sawtooth wave is smoothed by using a circular arc curve, and the specific steps are as follows: (1) obtaining an original sawtooth wave signal, the frequency of the original sawtooth wave signal is 1kHz, the amplitude is 50V, and the original sawtooth wave signal is used to drive the piezoelectric ceramic of the Newport-AG-LS25-27P piezoelectric displacement table.

[0025] (2) determining the corner position of the rising edge and the falling edge of the original sawtooth wave signal, setting the radius of the circular arc curve to 1V corresponding to the time length according to the performance parameters and control accuracy requirements of the piezoelectric displacement table. The corner position is transitioned by using the circular arc curve. The corner of the original sawtooth wave signal is smoothed. In the processing process, a low-pass filtering algorithm is used to filter out the high-frequency sharp peak component at the corner, and then a curve fitting algorithm is used to generate a smooth transition curve, and finally a smoothed sawtooth wave signal is obtained.

[0026] (3) The generated smooth sawtooth wave signal is output to the piezoelectric ceramic driving circuit to drive the piezoelectric ceramic.

[0027] (4) The smooth sawtooth wave signal is verified, and the amplitude is 50V, the frequency is 1kHz, the corner transition is smooth, and there is no obvious peak signal. After the smooth sawtooth wave signal is used to drive the piezoelectric displacement table, the displacement precision of the displacement table is improved from ±0.5μm to ±0.2μm, the working noise is reduced by 30%, and the service life is improved by 20%.

[0028] Example 2 The embodiment provides a piezoelectric displacement table ceramic control method based on an improved sawtooth wave, which adopts a polynomial curve to smooth the original sawtooth wave, and the specific steps are as follows: (1) An original sawtooth wave signal is obtained, the frequency of the original sawtooth wave signal is 500Hz, the amplitude is 30V, and the original sawtooth wave signal is used to drive the piezoelectric ceramic of a Zeyu Technology MF30-40A piezoelectric displacement table.

[0029] (2) The corner positions of the rising edge and the falling edge of the original sawtooth wave signal are determined, a cubic polynomial curve is selected as a smooth curve, and the curve is smoothly transitioned at the corner by adjusting the coefficients of the polynomial. In the processing process, a low-pass filtering algorithm and a curve fitting algorithm are combined to smooth the corners of the original sawtooth wave signal, and a smooth sawtooth wave signal is generated.

[0030] (3) The generated smooth sawtooth wave signal is output to the piezoelectric ceramic driving circuit to drive the piezoelectric ceramic.

[0031] (4) The smooth sawtooth wave signal is verified, and the amplitude is 30V, the frequency is 500Hz, and the corner transition is smooth. After driving the displacement table, the displacement precision is improved from ±1μm to ±0.3μm, the working noise is reduced by 25%, and the service life of the piezoelectric ceramic is expected to be extended by 30%.

[0032] In summary, the present application effectively eliminates the sharp peak signal in the traditional sawtooth wave by smoothing the corner of the original sawtooth wave, avoids the damage of the sharp peak signal to the piezoelectric ceramic, prolongs the service life of the piezoelectric ceramic, and the smoothed sawtooth wave signal is more stable, reduces the interference of signal mutation to displacement control, significantly improves the displacement accuracy of the piezoelectric displacement stage, and can meet the control demand of higher precision; the elimination of the sharp peak signal reduces the electromagnetic interference and mechanical vibration in the driving process, thereby reducing the noise of the piezoelectric displacement stage during work, improving the working environment of the equipment, maintaining the slope of the rising edge and the falling edge unchanged in the process of smoothing the sawtooth wave, ensuring that the displacement speed and displacement range of the displacement stage are not affected, and maintaining the original working performance of the equipment; the smoothing method adopted by the present application has flexibility, and appropriate smoothing curve and processing algorithm can be selected according to different performance parameters and control accuracy requirements of the piezoelectric displacement stage, and is suitable for various application scenarios.

[0033] The basic principles, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection required by the present application is defined by the appended claims and their equivalents.

Claims

1. A ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement, characterized in that, include: Acquire the raw sawtooth wave signal, which is used to drive the piezoelectric ceramic of the piezoelectric displacement stage; The corners of the original sawtooth wave signal are smoothed to eliminate the spike signals at the corners and generate a smooth sawtooth wave signal. The smooth sawtooth wave signal is output to the piezoelectric ceramic driving circuit to drive the piezoelectric ceramic to work.

2. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improved version according to claim 1, characterized in that, The smoothing process at the corners of the original sawtooth wave signal specifically includes: Determine the corner positions of the rising and falling edges of the original sawtooth wave signal, and use a preset smooth curve to transition at the corner positions.

3. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement according to claim 2, characterized in that, The preset smooth curve is a circular arc curve, and the radius of the circular arc curve is set according to the performance parameters and control accuracy requirements of the piezoelectric displacement stage.

4. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement according to claim 2, characterized in that, The preset smooth curve is a polynomial curve, and the curve achieves a smooth transition at the corner by adjusting the coefficients of the polynomial.

5. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improved version according to claim 1, characterized in that, The original sawtooth wave signal is smoothed at the corners using a digital signal processing algorithm, which includes a filtering algorithm and a curve fitting algorithm.

6. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement according to claim 5, characterized in that, The filtering algorithm is a low-pass filtering algorithm, used to filter out the high-frequency spike components at the corners of the original sawtooth wave signal.

7. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improved version according to claim 5, characterized in that, The curve fitting algorithm is used to fit discrete data points at the corners of the original sawtooth wave signal to generate a smooth transition curve.

8. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improved version according to claim 1, characterized in that, It also includes a step of verifying the generated smooth sawtooth wave signal, which determines whether the smoothing effect meets the requirements by detecting the waveform parameters of the smooth sawtooth wave signal and the performance parameters of the displacement stage after driving the piezoelectric ceramic.

9. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement according to claim 8, characterized in that, The waveform parameters include the signal amplitude, frequency, and smoothness of corner transitions; the displacement stage performance parameters include displacement accuracy, operating noise, and lifespan variation of the piezoelectric ceramic.

10. The ceramic control method for a piezoelectric displacement stage based on a sawtooth wave improvement according to claim 1, characterized in that, The slopes of the rising and falling edges of the smooth sawtooth wave signal are consistent with the slopes of the rising and falling edges of the original sawtooth wave signal.

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