Measurement device

Abstract

A measurement device (1) is provided with: a detector (10) including an arm part housed in an inner space of a detector case (30) and attached so as to be able to swing around a swing center; a stylus part (14) provided with a stylus for measuring the surface of the object to be measured, the stylus part being attached to the arm part and attached so as to be able to swing integrally with the arm part in accordance with the shape of the surface of the object to be measured; a first temperature sensor that measures the temperature of the interior space; and a temperature correction unit (102) that corrects the measurement result of the object to be measured on the basis of the temperature of the interior space during measurement measured by the first temperature sensor.

Description

Technical Field

[0001] This invention relates to measuring apparatus, and more particularly to measuring apparatus for measuring the shape, roughness, or contour of the surface of an object to be measured. Background Technology

[0002] Measurement devices are known for measuring the shape, roughness, or contour of the surface of an object. For example, Patent Document 1 discloses a surface property measuring device that measures the surface property of the object by scanning and detecting minute up-and-down movements of a stylus protruding from the front end of a measuring arm against the surface of the object being measured. In the surface property measuring device described in Patent Document 1, the measuring arm is supported so that it can swing vertically (circular motion) about a rotation axis. Furthermore, a scale with graduations along the direction of the swing of the measuring arm is used to detect the rotation angle of the measuring arm based on the swing.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-003436

[0006] Patent Document 2: Japanese Patent Application Publication No. 2021-173719

[0007] Patent Document 3: Japanese Patent Application Publication No. 2002-071347 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] In the aforementioned measuring apparatus, when power is supplied to the detection head and substrate used to read the scale markings inside the measuring instrument (detector), the object supplied with the power becomes a heat source (heating element), causing a temperature fluctuation inside the detector. This results in the following problem: due to the temperature fluctuation inside the detector, the length of the arm near the detection head changes over time, thus affecting the measurement result.

[0010] Patent Document 2 discloses a method to suppress the influence of ambient temperature on measurement results by adjusting the coefficients of thermal expansion of the stylus, scale, and connecting parts of the measuring device in a manner that meets certain conditions. Furthermore, Patent Document 2 discloses a method to adjust the temperature expansion rate of the stylus by joining multiple components made of materials with different coefficients of thermal expansion to form the stylus, thereby meeting the aforementioned conditions. However, the method of adjusting the coefficient of thermal expansion of the stylus described in Patent Document 2 cannot sufficiently suppress variations in measurement results when temperature expansion occurs only in the area near the detection head in the arm.

[0011] Patent Document 3 discloses an example of placing a temperature detector near a displacement detector (Z-axis detector). The technology described in Patent Document 3 cannot adequately suppress variations in measurement results when temperature expansion occurs only in the portion near the detection head in the arm.

[0012] The present invention was made in view of the following circumstances, and its purpose is to provide a measuring device capable of suppressing the influence of temperature fluctuations caused by the internal heating element of the detector on the measurement results.

[0013] Methods for solving problems

[0014] To address the aforementioned issues, the measuring apparatus according to the first aspect of the present invention comprises: a detector including an arm portion housed within an inner enclosure of a detector housing and mounted in a manner capable of swinging about a swing center; a stylus portion having a stylus for measuring the surface of a measured object, the stylus portion being mounted to the arm portion and mounted in a manner capable of swinging integrally with the arm portion in accordance with the shape of the surface of the measured object; a first temperature sensor for measuring the temperature of the inner enclosure; and a temperature correction unit for correcting the measurement result of the measured object based on the temperature of the inner enclosure at the time of measurement measured by the first temperature sensor.

[0015] The measuring device according to the second aspect of the present invention is based on the first aspect, wherein the detector housing includes a heat insulation element for suppressing the conduction of heat from the inner enclosure to the stylus portion.

[0016] The measuring device according to the third aspect of the present invention is based on the first or second aspect, wherein an opening is formed in the detector housing for introducing air from the outside into the inner enclosure and dissipating heat from the inner enclosure.

[0017] The measuring device according to the fourth aspect of the present invention is based on any one of the first to third aspects, wherein the measuring device includes a second temperature sensor for measuring the temperature of the stylus portion, and the temperature correction unit corrects the measurement result of the object to be measured based on the temperature of the inner space at the time of measurement measured by the first temperature sensor and the temperature of the stylus portion at the time of measurement measured by the second temperature sensor.

[0018] Invention Effects

[0019] According to the present invention, by providing a detector housing, heat conduction from the detector to the stylus portion can be suppressed. Furthermore, the measurement results of the object being measured can be corrected based on the temperature of the inner space of the detector housing at the time of measurement, as measured by the first temperature sensor. Thus, the influence of temperature fluctuations caused by the heating element inside the detector on the measurement results can be suppressed. Attached Figure Description

[0020] Figure 1 This is a diagram illustrating a measuring apparatus according to an embodiment of the present invention.

[0021] Figure 2 This is a block diagram illustrating the control system of a measuring device according to an embodiment of the present invention.

[0022] Figure 3 This is a magnified side view (partial cross-sectional view) of the detector.

[0023] Figure 4 This is a graph used to illustrate the effect of temperature changes in the detector.

[0024] Figure 5 This is a graph showing an example of the calculated results of the error in the detector (Z-axis) indication accuracy.

[0025] Figure 6 This is a diagram illustrating an example of temperature correction.

[0026] Figure 7 This is a flowchart illustrating the steps of measuring the object W using the measuring apparatus. Detailed Implementation

[0027] Hereinafter, embodiments of the measuring device according to the present invention will be described with reference to the accompanying drawings.

[0028] [Measuring device]

[0029] Figure 1 This is a diagram illustrating a measuring device according to an embodiment of the present invention. In the following description, a three-dimensional orthogonal coordinate system is used, in which the XY plane is set as the horizontal plane and the Z direction is set as the vertical direction (vertical direction).

[0030] The measuring device 1 is a device for measuring the shape, roughness, or contour of the surface of the object to be measured, W, which is set on the object to be measured (hereinafter referred to as the stage) 50.

[0031] like Figure 1 As shown, a stage 50 is mounted on a platform 52, and the surface of the stage 50 (the mounting surface of the object W to be measured) is parallel to the XY plane. A column (Z-axis) 54 extending substantially perpendicularly to the surface of the stage 50 is mounted on the platform 52. A carriage (X-axis) 56 is mounted on the column 54, and the carriage 56 can move along the column 54 in the Z direction by means of an actuator (not shown).

[0032] A detector 10 is mounted on a slide 56, and the detector 10 can move relative to the slide 56 in the X direction by means of an actuator (not shown). A scale 58 for detecting the X-direction position of the detector 10 is mounted on the slide 56. The scale 58 is, for example, a linear scale (linear position scale) with scale graduations formed along its length.

[0033] It should be noted that in this embodiment, the detector 10 is designed to be movable relative to the column 54, but the present invention is not limited to this. For example, it may be designed to be able to move the column 54 relative to the stage 50 in the X direction, or it may be designed to be able to move the stage 50 relative to the column 54 in the X or Z direction. That is, any structure that allows the measurement object W disposed on the stage 50 and the detector 10 to move relative to each other in the XZ direction is acceptable.

[0034] Alternatively, the detector 10 may be able to move relative to the measurement object W disposed on the stage 50 not only in the X direction but also in the Y direction.

[0035] like Figure 1 As shown, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0036] The stylus portion 14 is fixed in a generally straight line with the arm portion 16, and the stylus portion 14 and the arm portion 16 are mounted on the fixing portion 26 in a manner that allows them to swing together around the swing axis 20. The mounting angle of the detector 10 relative to the slide 56 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the structure formed by mounting the stylus portion 14 to the arm portion 16 will also be referred to as the swing portion 18.

[0037] It should be noted that the structure of the swing part 18 is not limited to Figure 1 The example shown is generally a straight line. For example, the stylus part 14 or the arm part 16 may have an L-shaped bend, and the stylus part 14 and the arm part 16 may be mounted in a generally parallel manner.

[0038] A stylus 12 is provided at the front end of the stylus part 14. The stylus 12 extends downward (in the -Z direction) in the figure. If the stylus 12 is brought into contact with the surface of the object to be measured, which is placed on the stage 50, with a specified pressure, the height and unevenness of the surface of the object to be measured, which is placed on the stage 50, will swing the swing part 18 and the surface of the object to be measured, which is placed at the contact position, with the swing axis 20 as the center.

[0039] It should be noted that the structure of the stylus part 14 is not limited to Figure 1 The example shown. For example, the stylus portion 14 can be a T-shaped stylus with the stylus positioned vertically in the figure, or the stylus protruding downwards in the figure by a certain amount. Figure 1 The example shown is a longer L-shaped stylus.

[0040] A scale 22 is fixed to the fixing part 26 in a manner opposite to the base end of the arm part 16. The fixing part 26 is a component that connects the swing center 20C of the swing shaft 20 to the scale 22 (limiting the distance between the swing center 20C of the swing shaft 20 and the scale 22).

[0041] The scale 22 is, for example, a linear scale (linear position scale) in the shape of a straight line, with scale graduations formed along the length direction of the scale 22. The scale 22 is installed in such a way that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the swing part 18.

[0042] The scale head 24 is fixed to the base end of the arm 16 and can swing integrally with the swinging part 18. The scale head 24 is a device for reading the scale (hereinafter referred to as the indicated value) at the opposite position of the scale 22 fixed to the fixing part 26. There is no particular limitation on the type of scale head 24. For example, a photoelectric sensor for reading the scale of the scale 22 or a non-contact sensor equipped with an imaging element and an illumination source (such as an LED (Light-Emitting Diode)) can be used as the scale head 24.

[0043] The reading value of the scale 22 read by the scale head 24 is output to the control device 100 (refer to...). Figure 2 ).

[0044] The control device 100 controls the actuators installed on the column 54 and the slide 56 to move the object to be measured W relative to the stylus 12 of the detector 10, while obtaining readings of the scale 22 at each position on the surface of the object to be measured W. Thus, the shape, roughness, or contour of the surface of the object to be measured W can be measured.

[0045] It should be noted that in this embodiment, the scale 22 is fixed to the fixing part 26 and the scale head 24 is fixed to the base end of the arm part 16, but the present invention is not limited to this. For example, the scale head 24 may also be fixed to the fixing part 26 and the scale 22 may be fixed to the base end of the arm part 16. In addition, the scale 22 is not limited to a linear scale; for example, it may be an arc scale (angle scale) formed in an arc shape along the swing direction of the arm part 16.

[0046] Figure 2 This is a block diagram showing the control system of measuring device 1. (For example...) Figure 2 As shown, the control device 100 includes a control unit 102, an input unit 104, and a display unit 106.

[0047] The control unit 102 includes a processor (e.g., a CPU (Central Processing Unit) or MPU (Micro-Processing Unit)) and a memory (e.g., ROM (Read Only Memory), RAM (Random Access Memory)) for controlling various parts of the measuring device 1. The control unit 102 outputs control signals for controlling the control device 100 and the measuring device 1, as well as control signals for controlling actuators that move the detector 10, based on operation inputs from the input unit 104.

[0048] The control unit 102 has the function of detecting the type of the measuring unit when a part of the constituent component (measuring unit) such as the stylus part 14 or the detector 10 of the measuring device 1 is replaced, and a temperature correction function based on the type of the measuring unit and the temperature during calibration and measurement. The control unit 102 is an example of a temperature correction unit.

[0049] The control unit 102 accepts the reading value of the scale 22 based on the scale head 24, and performs calculations on the shape, roughness, or contour of the surface of the object W to be measured based on the reading value of the scale 22.

[0050] The input unit 104 is a device for receiving operation input from the operator, and includes, for example, a keyboard, mouse, touch panel, etc.

[0051] Display unit 106 is a device for displaying images, such as an LCD (Liquid Crystal Display). Display unit 106 displays, for example, a GUI (Graphical User Interface) for operating the control device 100, the measuring device 1, and the actuator, as well as measurement results such as the shape, roughness, or contour of the surface of the object W being measured.

[0052] The memory 108 is a device that stores the control program for the measuring device 1 and the data of the measurement results, such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive).

[0053] The detector drive mechanism 60 includes an X-axis drive unit and a Z-axis drive unit (e.g., actuators) for moving the detector 10 in the X and Z directions, respectively. Figure 1 (Illustration omitted).

[0054] [Structure of detector 10]

[0055] Figure 3 This is a side view (cross-sectional view of detector housing 30) showing detector 10 in magnified form.

[0056] like Figure 3 As shown, in the detector 10 of this embodiment, the fixing part 26 on which the swing part 18 is installed is disposed inside the detector housing 30 (hereinafter also referred to as the inner enclosure space), and the stylus part 14 is exposed to the outside from the opening 32 formed in the detector housing 30.

[0057] As described above, the scale head 24 includes an illumination source for illuminating the scale when reading the scale 22, which serves as a heating element in the detector 10. The detector housing 30 suppresses the conduction of heat emitted from the heating element in the detector 10 to the outside of the detector housing 30. That is, since the arm portion 16 is housed within the inner space of the detector housing 30, it is affected by temperature changes within the inner space of the detector housing 30. In contrast, the stylus portion 14 is exposed to the outside of the detector housing 30 and is less affected by temperature changes within the inner space of the detector housing 30. Thus, temperature expansion caused by conduction from the heating element in the detector 10 to the stylus portion 14 can be suppressed.

[0058] There are no particular limitations on the material of the detector housing 30; for example, it can be made of metal. A heat-insulating member can be provided on at least one of the inner and outer surfaces of the detector housing 30. Alternatively, the detector housing 30 itself can be formed of a heat-insulating member. As the heat-insulating member, materials such as resin (e.g., containing a porous layer), polyurethane, rubber, carbon fiber, glass wool, or slag wool, or a heat-insulating member made of a metal membrane (e.g., aluminum) with a porous layer can be used. This further improves the suppression effect of heat conduction.

[0059] Furthermore, there are no particular limitations on the shape of the detector housing 30, as long as it has a shape that can accommodate at least the portion that will become the heat source. Figure 3 In the example shown, the detector housing 30 is generally cuboid in shape, but it can also be, for example, cylindrical, cylindrical, or polyhedral in shape.

[0060] exist Figure 3 In the example shown, in the detector housing 30, in addition to the opening 32 for the stylus portion 14, openings 34 and 36 are also formed. Openings 34 and 36 are located diagonally on the lower (lower surface) and upper (upper surface) of the generally cuboid-shaped detector housing 30, respectively. Heated air (AIR) inside the detector housing 30 flows out through the upper opening 36. Conversely, external air (AIR) is introduced (flows in) through the lower opening 34 and circulates throughout the detector housing 30. This allows heat to be expelled from inside the detector housing 30, thus suppressing the accumulation and rise of temperature inside the detector housing 30.

[0061] Preferably, one of the openings 34 and 36 is located at the upper part (+Z side) of the inner space of the detector housing 30, and the other is located near or below the scale head 24, which serves as a heating element. This allows air to flow evenly inside the detector housing 30, thereby dissipating internal heat.

[0062] In this embodiment, the illumination source of the scale head 24 is exemplified as a heating element in the detector 10, but the type of heating element is not limited to this. The circuit board or drive mechanism in the detector 10 can also serve as a heating element; therefore, openings can be provided as long as they correspond to the positions of these heating elements. That is, the number and arrangement of openings are not limited. Figure 3 Examples.

[0063] It should be noted that the detector housing 30 only needs to suppress heat conduction towards the stylus portion 14. Therefore, the openings 34 and 36 are preferably configured to prevent heated air from flowing towards the stylus portion 14. The openings 34 and 36 may also be formed, for example, on a surface of the detector housing 30 other than the surface opposite to the stylus portion 14.

[0064] [Temperature Correction]

[0065] like Figure 3 As shown, the measuring device 1 includes temperature sensors 80 and 82. Temperature sensors 80 and 82 are examples of a first temperature sensor and a second temperature sensor, respectively.

[0066] Temperature sensor 80 is disposed within the inner enclosure of detector housing 30 to measure the temperature of the inner enclosure of detector housing 30 or the temperature of the space near scale 22. Temperature sensor 82 is disposed outside detector housing 30 to measure the temperature of stylus portion 14 or the ambient temperature of stylus portion 14. In this embodiment, the temperature measured by temperature sensor 80 is used to perform temperature correction of the measurement result of the measured object W.

[0067] It should be noted that, in Figure 3 In the example shown, temperature sensor 80 is mounted on the fixing part 26, and temperature sensor 82 is mounted near the stylus part 14, but the configuration of temperature sensors 80 and 82 is not limited to this. Alternatively, as temperature sensor 80, a radiation temperature sensor or color temperature sensor for measuring the temperature of scale 22 or scale head 24 can also be used. Similarly, as temperature sensor 82, a radiation temperature sensor or color temperature sensor for measuring the temperature of stylus part 14 can also be used.

[0068] Figure 4 This is a graph used to illustrate the effect of temperature changes in detector 10. Figure 4 In the diagram, the reference temperature T0 (20°C in one example) and the swing portion 18 (stylus portion 14 and arm portion 16) at the temperature during measurement are simplified using solid and dashed lines, respectively. The stylus 12 is shorter than the swing portion 18 and can be ignored, so it is omitted.

[0069] The distance from the front end of the stylus part 14 to the swing center 20C at the reference temperature T0 is set as L1, and the distance from the swing center 20C to the base end of the arm part 16 is set as L2. In addition, the indicated value of the scale 22 when the reference temperature is T0 and the measurement height is Z is set as Z2.

[0070] It should be noted that, in Figure 4 The connection between the stylus part 14 and the arm part 16 is omitted, but as... Figure 3As shown, distance L1 is equivalent to the sum of the length of the stylus portion 14 and the length of the portion from the front end of the arm portion 16 to the swing center 20C, and distance L2 is equivalent to the sum of the lengths of the portion from the swing center 20C of the arm portion 16 to the base end.

[0071] As described above, in this embodiment, the arm 16 included in the inner enclosure space of the detector housing 30 expands due to temperature changes within the detector housing 30. The temperature change (rise) of the inner enclosure space of the detector housing 30, as measured by the temperature sensor 80, is T. 80 (>T0), the temperature change (rise) of the stylus part 14 measured by the temperature sensor 82 is T. 82 When (>T0), the swing part 18 is as follows Figure 4 The expansion is shown by the dashed line. The temperature T after the expansion is... 80 and T 82 The distance from the stylus part 14 to the swing center 20C is set as L1a, and the distance from the swing center 20C to the base end of the arm part 16 is set as L2a.

[0072] At this time, the indicated value Z2a when the height is Z in the measuring device 1 after temperature expansion is expressed by the following formula.

[0073] Z2a=(L1*L2a) / (L2*L1a)*Z2

[0074] According to the above formula, under the condition of the same measured height Z, the temperature T after thermal expansion is... 80 and T 82 The indicated value Z2a at the reference temperature T0 is proportional to the indicated value Z2 at the reference temperature T0. Therefore, the indicated value Z2a after temperature expansion can be expressed by the constant C using the following formula.

[0075] Z2a=Z2×C …(1)

[0076] Here, the distances L1 and L2 at the reference temperature T0 are known. Furthermore, the distance L2a after the temperature change can be determined based on the temperature T. 80 The difference from the reference temperature T0 (T 80 The distance L1a after temperature change is calculated based on the temperature T and the thermal expansion rate of the arm 16. 82 The difference from the reference temperature T0 (T 82 -T0) and the length of the stylus 14 after thermal expansion calculated from the thermal expansion rate of the stylus 14, and the length of the stylus 14 after thermal expansion based on temperature T 80 The difference from the reference temperature T0 (T 80 -T0) and the sum of the lengths of the arm 16 after temperature expansion (calculated by the temperature expansion rate of the arm 16) and the portion of the arm 16 on the left side of the swing center 20C in the figure.

[0077] As mentioned above, the constant C is determined by the temperature T at which the object W is measured. 80 and T 82 The determined value. The temperature T during this measurement. 80 and T 82 Each constant C is stored in memory 108 as a temperature correction parameter (temperature correction coefficient).

[0078] When measuring the object W, the control unit 102 acquires the temperature T measured by temperature sensors 80 and 82 respectively. 80 and T 82 And read the temperature T from memory 108 80 and T 82 The corresponding temperature correction factor C. Then, the control unit 102 uses the temperature T at the time of measurement. 80 and T 82 The corresponding temperature correction factor C and temperature T 80 and T 82 The indication value Z2, which excludes the influence of temperature expansion of the stylus part 14 and the arm part 16, is calculated from the indication value Z2a. Here, the indication value Z2 can be calculated, for example, using the relationship Z2=Z2a / C (refer to formula (1)).

[0079] According to this embodiment, the temperature T at the time of measurement is measured by temperature sensors 80 and 82, respectively. 80 and T 82 The temperature correction parameter C is obtained from the memory 108, which can correct the measurement results of the object W.

[0080] It should be noted that, in the case of a measuring device where the stylus part 14 or the detector 10 can be replaced, the constant C is related to the constituent components of the measuring device 1 used in the measurement (e.g., the type of stylus part 14 or detector 10). In this case, the constant C can be prepared in advance according to the constituent components of the measuring device 1 used in the measurement, and stored in the memory 108 in a manner that establishes an association with information about the constituent components.

[0081] Furthermore, in this embodiment, two temperature sensors 80 and 82 are provided for temperature measurement of the inner enclosure space of the detector housing 30 and the stylus portion 14, but the present invention is not limited thereto. For example, it is assumed that the temperature change on the side of the stylus portion 14, which is open to the outside air, is smaller than the temperature change in the inner enclosure space, and the temperature expansion of the stylus portion 14 has a relatively small impact on the measurement results. Therefore, the temperature sensor 82 on the stylus portion 14 side can be omitted, and only the temperature expansion in the inner enclosure space can be considered.

[0082] [Example of temperature correction]

[0083] Figure 5 This is a graph showing an example of the calculated results of the error in the detector (Z-axis) indication accuracy. Figure 5 The horizontal axis represents the stylus travel (travel position Z2 at reference temperature T0), and the vertical axis represents the detector (Z-axis) indicating accuracy (Z2a-Z2). Figure 5 The figure shows the temperature T. 80 The graphs show the calculation results relative to the reference temperature T0, varying by ±10℃. The slope (C-1) of each graph corresponds to the temperature correction parameter C. It should be noted that, for simplicity, the temperature T of the stylus part 14 is... 82 Assume that there is no change relative to the reference temperature T0.

[0084] In this embodiment, such as Figure 6 As shown, by using the temperature correction parameter C for temperature correction, the detector indication accuracy (Z2a-Z2) is zero. This suppresses the influence of ambient temperature on the measurement results.

[0085] [Temperature Correction Method]

[0086] Figure 7 This is a flowchart showing the steps of measuring the object W in the measuring apparatus 1.

[0087] During the measurement, firstly, as... Figure 1 The object to be measured, W, is set on the stage 50 of the measuring device 1 as shown (step S10).

[0088] Next, the surface shape of the object to be measured, W, is measured by the measuring device 1 (step S12). The control unit 102 obtains the measurement result of the surface shape of the object to be measured, W, and the temperature T of the stylus portion 14 at the time of measurement, which is measured by the temperature sensors 80 and 82. 80 and the temperature T of the inner enclosure space of the detector housing 30 82 (Step S14).

[0089] Next, the control unit 102 determines the temperature T at the time of measurement. 80 and T 82 The temperature correction parameters are obtained from the memory 108, and the measurement results of the object W are corrected and saved using the temperature correction parameters (step S16).

[0090] In step S16, the temperature T during the measurement is used. 80 and T 82 The corresponding temperature correction factor C and temperature T 80 and T 82 The indicated value Z2a is used to calculate the indicated value Z2, which excludes the influence of temperature expansion of the stylus part 14 and the arm part 16. Therefore, the temperature T during measurement can be calculated with good accuracy. 80and T 82 The measurement results of the target substance W are as follows.

[0091] In the above embodiments, the temperature correction for the measurement results of the measured object W has been explained, but the above temperature correction can also be applied to the measurement results of the calibrator when calibrating the measuring device 1.

[0092] Explanation of reference numerals in the attached figures

[0093] 1… Measuring device; 10… Detector; 12… Stylus; 14… Stylus part; 16… Arm part; 18… Swing part; 20… Swing shaft; 22… Scale; 24… Scale head; 26… Fixing part; 30… Detector housing; 50… Measured object setting part; 52… Platform; 54… Column; 56… Slide; 58… Scale; 60… Detector drive mechanism; 80, 82… Temperature sensor; 100… Control device; 102… Control unit; 104… Input unit; 106… Display unit; 108… Memory.

Claims

1. A measuring device comprising: The detector includes an arm housed within an inner enclosure of the detector housing and mounted in a manner capable of swinging about a pivot center; The stylus part is provided with a stylus for measuring the surface of the object being measured. The stylus part is mounted on the arm and is mounted in a manner that allows it to swing integrally with the arm in accordance with the shape of the surface of the object being measured. A first temperature sensor measures the temperature of the inner enclosure space; as well as The temperature correction unit corrects the measurement result of the object to be measured based on the temperature of the enclosed space at the time of measurement, as measured by the first temperature sensor.

2. The measuring device according to claim 1, wherein, The detector housing includes a heat insulation element for suppressing the conduction of heat from the inner enclosure to the stylus portion.

3. The measuring device according to claim 1, wherein, The detector housing has an opening for introducing air from the outside into the inner enclosure and for dissipating heat from the inner enclosure.

4. The measuring apparatus according to any one of claims 1 to 3, wherein, The measuring device includes a second temperature sensor for measuring the temperature of the stylus portion. The temperature correction unit corrects the measurement result of the object to be measured based on the temperature of the inner space at the time of measurement measured by the first temperature sensor and the temperature of the stylus portion at the time of measurement measured by the second temperature sensor.

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