Polishing process method for local non-full-aperture cylindrical mirror

Abstract

The invention provides a polishing process method for a local non-full-aperture cylindrical mirror, a first cylindrical surface and a plane are respectively formed on two opposite surfaces of the cylindrical mirror, an inner concave area is formed on one side of the plane, and the inner concave area comprises a second cylindrical surface and chord planes arranged on two opposite sides of the second cylindrical surface. Two ends of the second cylindrical surface and the edge of the chord plane are connected with the plane of the cylindrical mirror; the method comprises the steps that S1, the thickness and the edge thickness difference of a cylindrical mirror to be machined are detected; s2, a tool datum point and a workpiece datum point are calibrated through a tail end calibration tool and a reference tool respectively, and a tool coordinate system and a workpiece coordinate system are generated; s3, the cylindrical mirror to be machined is installed on the clamp, and the polishing tool is installed on the mechanical arm; s4, the moving track and attitude parameters of the polishing tool are calculated through the simulation tool; s5, the polishing tool is moved to make contact with the surface of the inwards-concave area; s6, the polishing program is operated, and polishing is conducted according to the moving track and the posture parameters; and S7, the polished cylindrical mirror is unloaded, and the surface shape precision and the shape and position size of the cylindrical mirror are measured.

Description

Technical Field

[0001] This disclosure generally relates to the field of optical component processing technology, and specifically to a polishing process method for a partially non-full-aperture cylindrical mirror. Background Technology

[0002] Cylindrical mirrors, as important optical components, are widely used in laser processing, optical imaging, optical communication, medical devices, and other fields. Their core function is to achieve beam focusing, collimation, deflection, or wavefront modulation through a cylindrically symmetric surface (one direction being a plane or a low-curvature generatrix, and the other direction being a high-curvature sagittal surface). As optical systems develop towards higher precision, miniaturization, and multifunctionality, the demand for locally cylindrical mirrors is increasingly prominent. These components require high-precision surface shape control only in specific areas (such as the edge annular region, the central circular region, or segmented regions), while the surface shape accuracy or surface roughness requirements for other areas are lower.

[0003] Traditional cylindrical mirror polishing processes mainly rely on classical polishing or specialized processing equipment. However, these methods have significant bottlenecks in achieving high-precision control in localized areas, making them unsuitable for emerging application demands. Classical polishing removes material through the relative motion between the polishing disc and the workpiece, as well as the chemical action of the abrasive. Its surface accuracy is highly dependent on the operator's experience. For localized cylindrical mirrors, the large difference in curvature between the sagittal and generatrical surfaces makes it difficult to uniformly control the pressure distribution of the polishing disc in localized areas, easily leading to "edge effects." Furthermore, classical polishing is inefficient and cannot meet the needs of mass production. Therefore, a precise and efficient polishing process for localized cylindrical mirrors is urgently needed. Summary of the Invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a polishing process for partially non-full-aperture cylindrical mirrors to solve the above problems.

[0005] This application provides a polishing process for a partially non-full-aperture cylindrical mirror, wherein the two opposite sides of the cylindrical mirror form a first cylindrical surface and a plane, wherein a concave region is formed on one side of the plane, the concave region includes a second cylindrical surface and chord surfaces disposed on opposite sides of the second cylindrical surface, and both ends of the second cylindrical surface and the edge of the chord surface are connected to the plane of the cylindrical mirror. The method includes: S1: Select the cylindrical mirror to be processed, and detect the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: After determining that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, the tool reference point and the workpiece reference point are calibrated by the end calibration tool and the reference tool respectively, and the tool coordinate system and the workpiece coordinate system are generated. S3: Mount the cylindrical mirror to be processed onto the fixture, and mount the polishing tool onto the robotic arm; S4: Obtain the shape parameters of the inner recessed area, and calculate the running track and attitude parameters of the polishing tool by a simulation tool; S5: Move the polishing tool to contact the surface of the inner recessed area; S6: Run the polishing program to polish according to the running track and the attitude parameters; S7: Unload the polished cylindrical mirror, and measure the surface shape precision and the size and position thereof According to the technical scheme provided in the embodiments of the present application, in step S1, the thickness and the thickness difference of the inner recessed area are measured by using an outside diameter micrometer when detecting the cylindrical mirror to be processed, and the size of the outer shape of the inner recessed area is detected by using a vernier caliper and a measuring instrument.

[0006] According to the technical scheme provided in the embodiments of the present application, in step S2, the end calibration tool and the reference tool are both cylindrical structures, and are designed as conical bodies at the front ends.

[0007] According to the technical scheme provided in the embodiments of the present application, in step S2, a micrometer is installed on the end calibration tool, which is used to detect the alignment accuracy of the end calibration tool and the reference tool.

[0008] According to the technical scheme provided in the embodiments of the present application, in step S3, the cylindrical mirror to be processed is accurately clamped on a clamp and matched with a workpiece reference point, and the polishing tool is accurately clamped on a manipulator and matched with a tool reference point.

[0009] According to the technical scheme provided in the embodiments of the present application, in step S4, when the running track of the polishing tool runs to the edge of the inner recessed area, the range of movement beyond the boundary is not more than one third of the caliber of the polishing tool.

[0010] According to the technical scheme provided in the embodiments of the present application, in step S4, the attitude range is limited according to the track range of the running track when calculating the attitude parameters.

[0011] According to the technical scheme provided in the embodiments of the present application, between steps S5 and S6, it further includes rotating the polishing tool after contact to confirm that there is no rotation jamming.

[0012] According to the technical scheme provided in the embodiments of the present application, in step S6, the feed speed of the polishing tool is set to 0.3-1 mm / s, the pressure is set to 0.1-0.5 MPa, the rotating speed is set to 500-800 rpm, and the single processing time is not greater than 30 min.

[0013] According to the technical scheme provided in the embodiments of the present application, in step S7, when the polished cylindrical mirror does not meet the requirements, the feed speed of the local running track is modified according to the surface shape detection feedback to trim the cylindrical mirror.

[0014] Compared with the prior art, the application has the beneficial effects that the cylindrical mirror polishing method provided by the application is based on a polishing processing method of a manipulator, utilizes the characteristics of high flexibility, high degree of freedom and high controllability of the manipulator, and realizes precise and efficient polishing processing of a local cylindrical mirror through high-precision positioning of the local cylindrical mirror, polishing track planning, surface shape error control and other means. The process method widens the designable form of the cylindrical mirror, develops a local cylindrical mirror polishing process based on a manipulator, reduces the labor and time cost, and further improves the processing stability and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0015] Other features, objects and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments made with reference to the accompanying drawings: Figure 1 A step flow chart of the polishing process method of the local non-full-aperture cylindrical mirror provided by the application is shown in Figure 2 A structural schematic diagram of the cylindrical mirror is shown in Figure 3 A cross-sectional schematic diagram of the cylindrical mirror shown in Figure 2 Figure 4 A cross-sectional schematic diagram of the cylindrical mirror shown in Figure 2 A cross-sectional schematic diagram of the cylindrical mirror shown in Figure 5 A structural schematic diagram of the end calibration tool and the reference tool is shown in

[0016] BRIEF DESCRIPTION OF DRAWINGS DETAILED DESCRIPTION

[0017] The application will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related application, and not to limit the application. In addition, it should be noted that only the parts related to the application are shown in the drawings for ease of description.

[0018] It should be noted that the embodiments in the application and the features in the embodiments can be combined with each other without conflict. The application will be described in detail below with reference to the accompanying drawings and embodiments.

[0019] Reference should be made to Figures 1-5 ​The application provides a polishing process method of a local non-full-aperture cylindrical mirror, opposite surfaces of the cylindrical mirror form a first cylindrical surface 1 and a plane 2 respectively, wherein one side of the plane 2 is provided with a concave area 3, the concave area 3 comprises a second cylindrical surface 4 and chord surfaces 5 arranged on opposite sides of the second cylindrical surface 4, and both ends of the second cylindrical surface 4 and edges of the chord surfaces 5 are connected with the plane 2 of the cylindrical mirror; The method comprises: S1: selecting a cylindrical mirror to be processed, detecting the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: after judging that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, respectively marking tool reference points and workpiece reference points by using an end calibration tool 6 and a reference tool 7, and generating a tool coordinate system and a workpiece coordinate system; S3: installing the cylindrical mirror to be processed on a clamp and installing a polishing tool on a manipulator; S4: acquiring shape parameters of the concave area 3, and calculating a running track and an attitude parameter of the polishing tool by using a simulation tool; S5: moving the polishing tool to be in contact with the surface of the concave area 3; S6: running a polishing program and polishing according to the running track and the attitude parameter; S7: unloading the polished cylindrical mirror and measuring the surface shape precision and the shape and position size.

[0020] Specifically, the cylindrical mirror has two opposite surfaces, one of which is a first cylindrical surface 1, and the other of which is a plane 2. On one side of the plane 2, a concave area 3 is arranged, which is a region that needs to be polished with high precision. The concave area 3 is composed of two parts: one is a second cylindrical surface 4, that is, a curved surface with a certain curvature, which is the core processing part of the concave area 3; the other is a chord surface 5 arranged on opposite sides of the second cylindrical surface 4, which is used to connect the second cylindrical surface 4 and the plane 2 of the cylindrical mirror. Specifically, both ends of the second cylindrical surface 4 are smoothly connected with the plane 2, and the edges of the chord surface 5 are also connected with the plane 2, forming a complete local concave structure - this structure determines that the polishing process needs to be adapted to the curvature of the second cylindrical surface 4 and the transition characteristics of the chord surface 5, and only the concave area 3 needs to be processed with high precision, while other regions of the cylindrical mirror (such as the first cylindrical surface 1 and the non-concave part of the plane 2) do not need to be controlled with the same precision. In order to facilitate the description, the first cylindrical surface 1 is a cylindrical surface obtained by cutting a circular region on the side of a cylinder, and the second cylindrical surface 4 is a cylindrical surface obtained by cutting a rectangular region on the side of a cylinder.

[0021] Specifically, in step S1, first, a local non-full-bore cylindrical mirror to be processed is selected, and its basic parameter detection is performed, focusing on the thickness and edge thickness difference of the cylindrical mirror. The thickness mainly refers to the overall thickness of the cylindrical mirror and the thickness at the position of the inner concave area 3, and the edge thickness difference mainly refers to the thickness difference at different edge positions of the cylindrical mirror. The purpose of this step is to confirm whether the initial blank state of the cylindrical mirror to be processed meets the processing requirements, so as to avoid the subsequent processing from failing to achieve the expected precision due to excessive initial size deviation. If the thickness or edge thickness difference exceeds the processable range, the blank needs to be adjusted or replaced in advance to ensure the feasibility of processing.

[0022] In step S2, after confirming that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the processing requirements, coordinate system calibration is performed. Specifically, the tool reference point and the workpiece reference point are determined by the end calibration tool and the reference tool respectively; the polishing tool and the cylindrical mirror are positioned respectively, wherein the tool reference point is the spatial reference position of the polishing tool, and the workpiece reference point is the spatial reference position of the cylindrical mirror. Based on the two reference points, a tool coordinate system for describing the spatial position of the polishing tool and a workpiece coordinate system for describing the spatial position of the cylindrical mirror are generated. The establishment of the two coordinate systems provides a unified spatial reference for subsequent processing, ensuring that the movement of the polishing tool and the position of the cylindrical mirror can be accurately quantified, which is the basis for achieving positioning accuracy. The end calibration tool is installed on the robot, and the reference tool is installed on the threaded hole 10 of the workpiece disc 9.

[0023] In step S3, the cylindrical mirror to be processed is installed on a special clamp, and the clamp is installed on the threaded hole 10 position on the workpiece disc 9, ensuring that the cylindrical mirror is stable during processing. At the same time, the polishing tool is installed on the robot, so that the tool can move in multiple dimensions under the drive of the robot. The core of this step is to place the cylindrical mirror and the polishing tool in a physical position where processing can be performed, providing a hardware foundation for subsequent trajectory execution and polishing operation. The clamp needs to ensure that the position of the cylindrical mirror matches the workpiece coordinate system, and the robot needs to ensure the controllability of the movement of the polishing tool.

[0024] In step S4, the shape parameters of the inner concave area 3 are obtained, including the curvature radius of the second cylindrical surface 4, the extension angle of the chord surface 5, the boundary range of the inner concave area 3, etc. Data processing is performed using a simulation tool: on the one hand, the running track of the polishing tool is calculated, i.e. the path of the tool in space, to ensure that it can completely cover all the areas to be processed of the inner concave area 3; on the other hand, the attitude parameter is calculated, i.e. the spatial attitude of the tool during movement, such as the fitting angle of the tool with the second cylindrical surface and the chord surface, to adapt to the curved surface characteristics of the inner concave area 3. This step is the key to realizing local precise processing, and through pre-planning by the simulation tool, processing errors caused by mismatch between tool movement and inner concave area shape can be avoided.

[0025] In step S5, the polishing tool is moved by the manipulator until the polishing tool is in contact with the surface of the inner concave area 3. The purpose of this step is to establish the initial physical contact relationship between the tool and the surface to be processed, to confirm that the tool is in the starting position where polishing can be started, and to provide a physical starting reference for formal processing.

[0026] In step S6, the preset polishing program is run, and the polishing tool moves according to the running track calculated in step S4 and maintains the planned posture parameters for polishing. In this process, the tool removes material by relative motion with the surface of the inner concave area 3, and gradually processes the surface of the inner concave area 3 to the target requirement. The cooperation of the running track and the posture parameters ensures the accuracy and uniformity of the processing.

[0027] In step S7, after the polishing is completed, the cylindrical mirror is unloaded from the fixture, and the precision is detected: on the one hand, the surface accuracy of the inner concave area 3 is measured, and on the other hand, the shape and position dimensions are measured. Through measurement, it is verified whether the processing result meets the design requirements, and the basis is provided for subsequent possible trimming or qualification.

[0028] Further, in step S1, when detecting the cylindrical mirror to be processed, the thickness of the inner concave area 3 and the edge thickness difference are measured by using an outside diameter micrometer, and the outer shape size of the inner concave area 3 is measured by using a vernier caliper and a measuring instrument.

[0029] Specifically, in step S1, the detection of the cylindrical mirror to be processed needs to be completed by using specific tools to ensure that accurate initial parameters are obtained. Specifically, the thickness of the inner concave area 3 and the edge thickness difference are measured by using an outside diameter micrometer, and the outer shape size of the inner concave area 3 is measured by using a vernier caliper and a measuring instrument. The vernier caliper is used to measure the plane size of the inner concave area 3, such as the chord length of the second cylindrical surface 4, the width of the chord surface 5, and the projection range of the inner concave area 3 on the plane of the cylindrical mirror; the measuring instrument is used to obtain more detailed shape data, such as the relative position of the inner concave area 3 and the edge of the cylindrical mirror.

[0030] Further, in step S2, the end calibration tool 6 and the reference tool 7 are both cylindrical structures, and are designed as conical bodies at the front ends.

[0031] Specifically, in step S2, when calibrating the tool reference point and the workpiece reference point, the end calibration tool 6 and the reference tool 7 used are designed in a specific structure to ensure the accuracy of calibration. The main bodies of the end calibration tool 6 and the reference tool 7 are cylindrical structures, which facilitate maintaining a stable posture during installation and use, and reduce positioning deviations caused by irregular shapes of the tools. The front ends of the two tools are designed as conical structures. The tips of the cones have positioning advantages and can achieve high-precision alignment through point contact. During calibration, the conical tip of the end calibration tool 6 can form a precise contact point with the conical tip of the reference tool 7, which is the core reference for positioning the reference point. This design greatly reduces the problem of reference point ambiguity caused by a large contact surface or a complex shape, making the coordinate determination of the tool reference point and the workpiece reference point more accurate.

[0032] Further, in step S2, a micrometer 8 is installed on the end calibration tool 6 for detecting the alignment accuracy of the end calibration tool 6 and the reference tool 7.

[0033] Specifically, in step S2, to ensure accurate alignment of the tool reference point and the workpiece reference point and improve the calibration accuracy of the tool coordinate system and the workpiece coordinate system, a micrometer 8 is installed on the end calibration tool 6, which is used to detect the alignment accuracy of the end calibration tool 6 and the reference tool 7 in real time. During positioning, the end calibration tool 6 is installed on the robot, and the reference tool 7 is fixed at the position of the threaded hole 10 of the workpiece disc 9. The installation of the two tools needs to ensure that the tips of the front conical bodies are on the same vertical line. By monitoring the alignment state through the micrometer 8, the spatial position deviation of the two reference points can be quantitatively fed back, ensuring that the tips of the end calibration tool 6 and the reference tool 7 completely coincide on the vertical line.

[0034] Further, in step S3, the to-be-processed cylindrical mirror is precisely clamped on the jig and matched with the workpiece reference point, and the polishing tool is precisely clamped on the robot and matched with the tool reference point.

[0035] Specifically, in step S3, the clamping operation needs to strictly achieve the matching of the to-be-processed cylindrical mirror and the workpiece reference point, and the matching of the polishing tool and the tool reference point, to ensure that their positions in the physical space are consistent with the coordinate system parameters calibrated in step S2, laying a foundation for accurate positioning in subsequent processing.

[0036] The clamping process of the to-be-processed cylindrical mirror is as follows: the cylindrical mirror is placed on a special jig, and its position is adjusted through the positioning structure of the jig, so that the pre-set workpiece reference point (such as the feature point at the edge of the inner recess area 3 or the marker point on the plane 2) on the cylindrical mirror completely corresponds to the workpiece reference point calibrated in step S2, i.e., the coordinates of the two in the workpiece coordinate system coincide, ensuring that the spatial position of the cylindrical mirror is accurately bound with the workpiece coordinate system.

[0037] The clamping of the polishing tool needs to be completed by the robot: the polishing tool is installed on the end effector of the robot, fixed by mechanical connection structure, the installation angle and position of the tool are adjusted, the center of the polishing tool or the preset tool reference point is aligned with the tool reference point calibrated in step S2, that is, the coordinates of the tool reference point in the tool coordinate system are consistent with the coordinates of the tool reference point, so as to ensure that the motion reference of the polishing tool is completely matched with the tool coordinate system.

[0038] Further, in step S4, the running track of the polishing tool is limited to a range not more than one third of the aperture of the polishing tool when the polishing tool runs to the edge of the inner recess area 3.

[0039] Specifically, in step S4, when the running track of the polishing tool is calculated by the simulation tool, special attention should be paid to the motion boundary control of the polishing tool when approaching the edge of the inner recess area 3, so as to ensure that the range of the tool beyond the boundary of the inner recess area 3 is not more than one third of the aperture of the tool itself, so as to avoid excessive processing of non-target areas or edge effects. The inner recess area 3 is composed of the second cylindrical surface 4 and the chord surface 5, and its edge is connected with the plane 2 of the cylindrical mirror to form a clear processing boundary. When the simulation tool generates the running track, the boundary range of the to-be-processed area is first determined according to the three-dimensional model of the inner recess area 3, and then the motion path of the tool is planned to ensure that the main body of the track completely covers the to-be-processed area of the second cylindrical surface 4 and the chord surface 5.

[0040] Further, in step S4, the attitude range is limited according to the track range of the running track when the attitude parameters are calculated.

[0041] Specifically, in step S4, when the attitude parameters of the polishing tool are calculated, the track range of the running track should be taken as the constraint boundary to ensure that the attitude adjustment of the tool always adapts to the curved surface characteristics of the inner recess area 3 and does not exceed the safe motion range, so as to avoid interference with the non-processing area of the cylindrical mirror.

[0042] The track range of the inner recess area 3 is a three-dimensional space path jointly defined by the boundaries of the second cylindrical surface 4 and the chord surface 5, and the spatial coordinate boundary of this range has been clearly defined by the simulation tool when planning the track. The calculation of the attitude parameters needs to be based on the curved surface characteristics of each point on the track to determine the fitting angle of the polishing tool and the curved surface, so as to ensure that the effective contact area of the tool and the processing surface is uniform.

[0043] Further, between steps S5 and S6, the polishing tool is also rotated after contact to confirm that there is no rotation jamming.

[0044] Specifically, in step S5, when the polishing tool moves into contact with the inner recess surface, a key operation is added before the polishing process is formally started in step S6: the polishing tool is driven to rotate, and its rotation state is observed to confirm that there is no jamming or obstruction, so as to ensure that the tool can maintain a stable motion posture during subsequent polishing. Because the inner recess 3 is composed of the second cylindrical surface 4 and the chord surface 5, and there is a specific curvature change on the surface, the contact point between the polishing tool and the inner recess 3 surface may present different stress states due to the curved surface form. After the contact in step S5 is completed, the polishing tool is controlled by the manipulator to rotate at a preset low speed, at which time the rotation fluency of the tool is monitored through visual observation or sensor feedback: if the tool rotates with jamming, abnormal noise or speed drop, it indicates that the tool may have local contact that is too tight, an inappropriate posture angle, etc. with the inner recess 3 surface; if the rotation is smooth and there is no obvious resistance, it indicates that the contact state of the tool with the inner recess surface is good, and the posture parameters meet the processing requirements.

[0045] Further, in step S6, the feed speed of the polishing tool is set to 0.3-1 mm / s, the pressure is set to 0.1-0.5 MPa, and the rotation speed is set to 500-800 rpm; the single processing time is not greater than 30 min.

[0046] Specifically, in step S6, the operating parameters of the polishing tool need to be strictly set according to the preset range, including the feed speed, the pressure, the rotation speed and the single processing time, so as to adapt to the curved surface characteristics of the local non-full-bore cylindrical mirror inner recess 3 and achieve precise and efficient polishing processing.

[0047] Further, in step S7, when the polished cylindrical mirror does not meet the requirements, the feed speed of the local operating trajectory is modified according to the surface shape detection feedback to trim the cylindrical mirror.

[0048] Specifically, in step S7, if the polished cylindrical mirror does not meet the requirements, the feed speed of the local operating trajectory is modified according to the surface shape detection feedback to trim the cylindrical mirror. The detection device obtains the surface shape accuracy and geometric dimension data of the inner recess 3, and locates the areas with accuracy out of tolerance, such as the curvature deviation of the second cylindrical surface 4 and the insufficient flatness of the chord surface 5. For the areas with insufficient material removal, the feed speed is reduced to increase the processing time; for the areas with excessive polishing, the feed speed is increased to reduce the contact time. During trimming, other parameters remain unchanged, and only the local feed speed is fine-tuned. After completion, the detection is performed again until the requirements are met. This strategy can efficiently compensate for errors and improve process flexibility and precision control capability.

[0049] The above description is only the preferred embodiment of the present application and the explanation of the technical principles. It should be understood by those skilled in the art that the scope of the protection of the present application is not limited to the technical solutions formed by the specific combinations of the above technical features. It should also cover other technical solutions formed by the combinations of the above technical features or their equivalent features without departing from the concept of the present application. For example, the technical solutions formed by the mutual replacements of the above features and the technical features disclosed in the present application (but not limited to) with similar functions.

Claims

1. A polishing process method for a partial non-full-aperture cylindrical mirror, characterized in that, The opposite two sides of the cylindrical mirror form a first cylindrical surface (1) and a plane (2) respectively, wherein one side of the plane (2) forms a concave area (3), the concave area (3) comprises a second cylindrical surface (4) and chord surfaces (5) arranged on the opposite two sides of the second cylindrical surface (4), and the two ends of the second cylindrical surface (4) and the edges of the chord surfaces (5) are connected with the plane (2) of the cylindrical mirror; The method comprises: S1: selecting a cylindrical mirror to be processed, detecting the thickness and edge thickness difference of the cylindrical mirror to be processed; S2: after judging that the thickness and edge thickness difference of the cylindrical mirror to be processed meet the requirements, respectively calibrating tool reference points and workpiece reference points by using an end calibration tool (6) and a reference tool (7), and generating a tool coordinate system and a workpiece coordinate system; S3: installing the cylindrical mirror to be processed on a clamp and installing a polishing tool on a manipulator; S4: obtaining shape parameters of the concave area (3), calculating a running track and an attitude parameter of the polishing tool by using a simulation tool; S5: moving the polishing tool to contact the surface of the concave area (3); S6: running a polishing program and polishing according to the running track and the attitude parameter; S7: unloading the polished cylindrical mirror and measuring the surface shape precision and the shape and size.

2. The method of polishing a partial-aperture cylindrical lens according to claim 1, wherein, In step S1, an outside diameter micrometer is used to measure the thickness and edge thickness difference of the concave area (3), and a vernier caliper and a measuring instrument are used to measure the outer shape size of the concave area (3) when detecting the cylindrical mirror to be processed.

3. The method of polishing a partial-aperture cylindrical lens according to claim 2, wherein, In step S2, the end calibration tool (6) and the reference tool (7) are both cylindrical structures, and are designed as conical bodies at the front ends.

4. The method of polishing a partial-aperture cylindrical lens according to claim 3, wherein, In step S2, a micrometer (8) is installed on the end calibration tool (6) to detect the alignment accuracy of the end calibration tool (6) and the reference tool (7).

5. The method of polishing a partial-aperture cylindrical lens according to claim 4, wherein, In step S3, the cylindrical mirror to be processed is accurately clamped on the clamp and matched with the workpiece reference points, and the polishing tool is accurately clamped on the manipulator and matched with the tool reference points.

6. The method of polishing a partial-aperture cylindrical lens according to claim 5, wherein, In step S4, when the polishing tool runs to the edge of the concave area (3), the range of motion exceeding the boundary is not more than one third of the aperture of the polishing tool.

7. The method of polishing a partial-aperture cylindrical lens according to claim 6, wherein, In step S4, the attitude range is limited according to the track range of the running track when calculating the attitude parameter.

8. The method of polishing a partial-aperture cylindrical lens according to claim 7, wherein, Between steps S5 and S6, the polishing tool is also rotated after contact to confirm that there is no rotation jamming.

9. The method of polishing a partial-aperture cylindrical lens according to claim 8, wherein, In step S6, the feed speed of the polishing tool is set to 0.3-1 mm / s, the pressure is set to 0.1-0.5 MPa, and the rotating speed is set to 500-800 rpm; the single processing time is not more than 30 min.

10. The method of polishing a partial-aperture cylindrical lens according to claim 9, wherein, In step S7, when the polished cylindrical mirror does not meet the requirements, the feed speed of the local running track is modified according to the surface shape detection feedback to trim the cylindrical mirror.

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