Pressure sensor packaging structure and packaging method

Abstract

The invention discloses a pressure sensor packaging structure and a packaging method, relates to the technical field of microstructure packaging, and aims to solve the technical problem that a domestic absolute pressure sensor packaging structure is difficult to package, the pressure sensor packaging structure comprises a base mechanism used for installing a pressure sensor, the base mechanism comprises a hexagonal block A, a hexagonal block B, a movable mechanism and a film mechanism, and a rod body for transmitting pressure to the pressure sensor is fixedly arranged at the bottom end of the membrane mechanism. According to the invention, a mechanical structure mode is utilized, so that the plurality of movable mechanisms eccentrically move and then form a vacuum reference cavity with the gap of the cylindrical cavity, and the absolute pressure sensor can be packaged by matching with a common pressure sensor, so that a bonding process and an absolute pressure MEMS chip of the traditional absolute pressure sensor packaging are avoided; packaging of the absolute pressure sensor is simplified, packaging of the pressure sensor packaging structure in China is facilitated, and the technical problem that packaging of the absolute pressure sensor in China is difficult is solved.

Description

Technical Field

[0001] This invention relates to the field of microstructure packaging technology, and more specifically, to a pressure sensor packaging structure and packaging method. Background Technology

[0002] Absolute pressure sensors measure pressure values ​​relative to a vacuum reference and are widely used in aerospace, meteorological monitoring, medical equipment, industrial control, automotive electronics, and other fields. Their core feature is the presence of a vacuum reference chamber to ensure that measurements are unaffected by fluctuations in ambient atmospheric pressure.

[0003] Traditional vacuum cavities rely on wafer-level bonding, such as silicon-glass anodic bonding and silicon-silicon direct bonding, which require high-precision equipment. Domestic equipment and process maturity are insufficient. Furthermore, absolute pressure MEMS chips, such as SOI silicon-based sensors, mainly rely on foreign manufacturers. Sensors manufactured using bonding processes are prone to vacuum attenuation due to mismatch in the thermal expansion coefficients of the packaging materials or micro-leakage, resulting in zero-point drift. The cavity is sealed by bonding, and once leakage or drift occurs, it is impossible to re-vacuum or adjust. In view of this, we propose a pressure sensor packaging structure and packaging method. Summary of the Invention

[0004] The purpose of this invention is to provide a pressure sensor packaging structure and packaging method to solve the technical problem of difficult packaging of absolute pressure sensors in China.

[0005] To solve the above technical problems, the present invention provides the following technical solution: a pressure sensor packaging structure, including a base mechanism for mounting the pressure sensor, the base mechanism including a hexagonal block A, a circular cavity A opened at the top of the hexagonal block A, and a plurality of radial grooves evenly spaced in an annular pattern opened at the top of the circular cavity A;

[0006] The top of the hexagonal block A is rotatably provided with a hexagonal block B, the bottom of the hexagonal block B is provided with a circular cavity B, and the top of the circular cavity B is provided with several oblique guide grooves at equal intervals in a ring shape.

[0007] The gap between the circular cavity B and the circular cavity A forms a cylindrical cavity. Several movable mechanisms are arranged in a ring at equal intervals inside the cylindrical cavity. Two adjacent movable mechanisms are slidably connected, and the two ends of the movable mechanisms are respectively movably connected to the centripetal groove and the inclined guide groove.

[0008] The top of the hexagonal block B has a through groove that communicates with the circular cavity B. A membrane mechanism is provided in the through groove, and a rod that transmits pressure to the pressure sensor is fixed at the bottom of the membrane mechanism.

[0009] When the bottom end of the movable mechanism is located at the centripetal end of the centripetal groove, the rod, the membrane mechanism, and several movable mechanisms are in close contact to form a sealed structure.

[0010] When the bottom end of the movable mechanism is located at the eccentric end of the centripetal groove, several movable mechanisms and the cylindrical cavity gap form a vacuum reference cavity.

[0011] Preferably, the outer surface of the hexagonal block A is provided with a threaded groove A, a plurality of air holes A are uniformly arranged on the threaded groove A, the bottom end of the hexagonal block A is provided with a threaded groove B, the top end of the threaded groove B is provided with a mounting half groove A matched with the top structure of the pressure sensor, and the mounting half groove A is in communication with the circular cavity A.

[0012] Preferably, the base mechanism further comprises a threaded ring, the threaded ring is threadedly connected to the threaded groove B, a rotating groove is arranged at the top end of the inner edge surface of the threaded ring, a rotating block is arranged on the rotating groove, the rotating block is in rotating cooperation with the rotating groove, the cross section of the rotating block is in T-shaped structure, a mounting half groove B matched with the bottom structure of the pressure sensor is arranged on the rotating block, and a hexagonal block C is fixedly arranged at the bottom end of the threaded ring.

[0013] Preferably, the outer surface of the hexagonal block B is provided with a threaded groove C, a protective ring is threadedly connected to the threaded groove C, and the protective ring is in threaded cooperation with the threaded groove A.

[0014] Preferably, limit arc grooves are arranged at both ends of the inclined guide groove, and the inclined guide groove and the two limit arc grooves form a functional guide groove in communication.

[0015] Preferably, the movable mechanism comprises a movable block, a sealing gasket matched in shape with the movable block is fixedly arranged on the surface of the movable block, the sealing gasket is in sliding connection with the bottom end of the circular cavity A and the top end of the circular cavity B at both ends thereof respectively, the side surface of the sealing gasket is in sliding connection with the movable block adjacent thereto, movable columns are fixedly arranged at both ends of the movable block, and the two movable columns are in movable connection with the functional guide groove and the centripetal groove respectively; the sealing gasket is made of conductive expanded rubber material, and a polytetrafluoroethylene coating layer is coated on the surface of the sealing gasket.

[0016] Preferably, an adaptive groove is arranged at the top end of the movable block.

[0017] When the movable column is located at the centripetal end of the centripetal groove, the plurality of adaptive grooves are in communication to form an adaptive cavity matched with the bottom end of the membrane mechanism.

[0018] Preferably, the eccentric end of the movable block is arc-shaped to fit the cylindrical cavity, and the arc surface of the movable block is fitted with the surface of the cylindrical cavity when the movable block is located at the eccentric end of the centripetal groove.

[0019] Preferably, the film mechanism comprises a film ring, the film ring is fixed on the through groove, the bottom end of the film ring is provided with a round block, the top end of the round block is fitted with the shape of the film ring, the center position of the top end of the round block is fixedly connected with the film ring through a column body, the round block is slidably connected with the through groove, and the bottom end of the round block is fixedly provided with a circular truncated cone block; the adaptive cavity is fitted with the shape of the circular truncated cone block, and the rod body is fixedly arranged at the bottom end of the circular truncated cone block.

[0020] Preferably, a plurality of gradient grooves are arranged in the circular truncated cone block in a ring shape at equal intervals, the opening of the gradient groove gradually increases along the centripetal direction, a sealing block is movably arranged on the gradient groove, the eccentric end of the sealing block is fitted with the surface of the circular truncated cone block, a sliding groove is communicated with the centripetal end of the gradient groove, a sliding block is slidably arranged on the sliding groove, the sliding block is fixedly connected with the sealing block, the sliding block is elastically connected with the sliding groove through a spring, a plurality of air grooves are uniformly arranged on the surface of the sliding block, and a plurality of branch air holes B are arranged at the centripetal end of the sliding groove and are communicated with the outside through a main air hole.

[0021] A packaging method of a pressure sensor, which is suitable for the packaging structure of the pressure sensor, comprises the following steps:

[0022] S1: installing a common pressure sensor;

[0023] An insulating shell is arranged on the common pressure sensor, and the common pressure sensor is arranged in the installation half groove A and filled with a filling sealant.

[0024] S2: according to the position of the installation half groove B and the bottom of the common pressure sensor, the rotating block is sent into the threaded groove B, the threaded ring is screwed with the threaded groove B by rotating the hexagonal block C, so that the rotating block is in contact with the top end of the threaded groove B, and the installation half groove B provides support for the common pressure sensor.

[0025] S3: adjusting a reference vacuum cavity;

[0026] S3.1: adjusting the position of the protective ring;

[0027] The protective ring is rotated to be separated from the threaded groove A, so that the hexagonal block B can be rotated relative to the hexagonal block A.

[0028] S3.2: adjusting the position of the hexagonal block B;

[0029] The hexagonal block B is rotated by using a rotating device, the movable mechanism moves along the eccentric direction, and the movable mechanism is located in the limiting arc groove at the eccentric end until the movable column is in contact with the cylindrical cavity and forms a vacuum reference cavity; the gas in the gap between the movable mechanism and the cylindrical cavity is pushed by the movable mechanism and flows out along the air hole A.

[0030] S3.3: Isolation and protection;

[0031] By the auxiliary medium, the air hole A is blocked, the gas in the air hole A is discharged, and the protection ring is screwed with the threaded groove A by rotating the protection ring, so that the hexagonal block A is fixed relative to the hexagonal block B, the misoperation is prevented, and the external air pressure is borne, and the stress of the movable mechanism is reduced;

[0032] S4: Resetting of the vacuum cavity;

[0033] The protection ring is rotated, so that the protection ring is separated from the threaded groove A;

[0034] The hexagonal block B is rotated by using a rotating device, the movable mechanism is moved from the eccentric end to the centripetal end, the movable block extrudes the circular truncated cone block, so that the circular truncated cone block drives the circular block to slide along the through groove until the top end of the circular block is in close contact with the bottom end of the membrane ring, at this time, the rod body, the membrane mechanism and the plurality of movable mechanisms are in close contact to form a sealed structure, and in this process, the gas pushes the sealing block, so that the gas is discharged to the outside from the gap between the sealing block and the tapered groove, the gas groove, the branch air hole B and the main air hole in sequence, and the steps S3.2 and S3.3 are repeated to reset the vacuum degree of the vacuum reference cavity.

[0035] Preferably, in steps S3.2 and S4, the rotating device comprises a base box and a conductive mechanism, a lifting structure is fixedly arranged at the top end of the base box, a speed reduction rotating mechanism is fixedly arranged at the movable end of the lifting structure, a fixed seat is arranged below the rotating end of the speed reduction rotating mechanism, the fixed seat is fixedly connected with the top end of the base box, a hexagonal groove is arranged at the top end of the fixed seat, and an installation groove is arranged in the hexagonal groove;

[0036] The conductive mechanism comprises a power supply, a conductive ring A and a conductive ring B, the power supply is arranged on one side of the fixed seat and is fixedly connected with the top end of the base box, the conductive ring A is rotatably arranged on the rotating end of the speed reduction rotating mechanism, the top end of the conductive ring A is fixedly connected with the movable end of the lifting structure through a plurality of connecting rods, the conductive ring A is connected with the positive electrode of the power supply through a wire A, the conductive ring B is fixedly arranged on the installation groove, the conductive ring B is connected with a wire B, the wire B penetrates out of the fixed seat and is connected with the negative electrode of the power supply, and the gap between the conductive ring B and the installation groove forms a placing cavity matched with the hexagonal block A.

[0037] The beneficial effects of the application are:

[0038] 1、The utility model discloses a mechanical structure mode makes several movable mechanism eccentric movement with the cylindrical cavity gap constitutes vacuum reference cavity, and the cooperation adopts ordinary pressure sensor to complete absolute pressure sensor package, avoids traditional absolute pressure sensor package's bonding technology and absolute pressure MEMS chip, makes the absolute pressure sensor's package simple, and the domestic pressure sensor package structure is packaged, solves the domestic absolute pressure sensor package difficult technical problem.

[0039] 2、The utility model discloses still be equipped with limit arc groove at both ends of the inclined guide groove, when the movable post is moved to the limit arc groove, the position of several movable mechanisms is preliminarily limited, facilitating subsequent operation, preventing the position of movable mechanism from changing due to external force, especially when several movable mechanisms and the cylindrical cavity gap constitute the vacuum reference cavity, preventing the gas pressure from causing the movable mechanism to automatically move, and ensuring the preliminary stability of the vacuum reference cavity.

[0040] 3、The utility model discloses still be equipped with limit arc groove at both ends of the inclined guide groove, when the movable post is moved to the limit arc groove, the position of several movable mechanisms is preliminarily limited, facilitating subsequent operation, preventing the position of movable mechanism from changing due to external force, especially when several movable mechanisms and the cylindrical cavity gap constitute the vacuum reference cavity, preventing the gas pressure from causing the movable mechanism to automatically move, and ensuring the preliminary stability of the vacuum reference cavity.

[0041] 4、The utility model discloses still be equipped with limit arc groove at both ends of the inclined guide groove, when the movable post is moved to the limit arc groove, the position of several movable mechanisms is preliminarily limited, facilitating subsequent operation, preventing the position of movable mechanism from changing due to external force, especially when several movable mechanisms and the cylindrical cavity gap constitute the vacuum reference cavity, preventing the gas pressure from causing the movable mechanism to automatically move, and ensuring the preliminary stability of the vacuum reference cavity.

[0042] 5、The utility model discloses still be equipped with limit arc groove at both ends of the inclined guide groove, when the movable post is moved to the limit arc groove, the position of several movable mechanisms is preliminarily limited, facilitating subsequent operation, preventing the position of movable mechanism from changing due to external force, especially when several movable mechanisms and the cylindrical cavity gap constitute the vacuum reference cavity, preventing the gas pressure from causing the movable mechanism to automatically move, and ensuring the preliminary stability of the vacuum reference cavity. SHEET DESCRIPTION

[0043] Figure 1 It is the whole structure schematic diagram of the utility model.

[0044] Figure 2 Fig. 1 is a schematic diagram of the overall structure of the present application;

[0045] Figure 3 Fig. 2 is a schematic diagram of the structure of part A of the present application; Figure 2

[0046] Figure 4 Fig. 3 is a schematic diagram of the structure of part B of the present application; Figure 3

[0047] Figure 5 Fig. 4 is a schematic diagram of the structure of part of the present application;

[0048] Figure 6 Fig. 5 is a schematic diagram of the hexagonal block B of the present application;

[0049] Figure 7 Fig. 6 is a schematic diagram of the moving mechanism of the present application; Figure 1

[0050] Figure 8 Fig. 7 is a schematic diagram of the moving mechanism of the present application; Figure 2

[0051] Figure 9 Fig. 8 is a schematic diagram of the disassembled structure of the film mechanism of the present application;

[0052] Figure 10 Fig. 9 is a schematic diagram of the structure of the rotating device of the present application;

[0053] Figure 11 Fig. 10 is a schematic diagram of the part structure of the rotating device of the present application.

[0054] Explanation of the reference numerals in the figures:

[0055] 1, hexagonal block A; 11, circular cavity A; 12, centripetal groove; 13, threaded groove A; 14, air hole A; 15, threaded groove B; 16, mounting half-groove A;

[0056] 2, hexagonal block B; 20, threaded groove C; 21, circular cavity B; 22, inclined guide groove; 23, through groove; 24, protective ring; 25, limiting arc groove;

[0057] 3, moving mechanism; 31, moving block; 32, sealing gasket; 33, moving column; 34, adaptive groove;

[0058] 4, film mechanism; 41, film ring; 42, circular block; 43, column; 44, circular truncated cone block; 440, spring; 441, gradual change groove; 442, sealing block; 443, sliding groove; 444, sliding block; 445, air groove; 446, branch air hole B; 447, main air hole;

[0059] 5, rod body;​​​​

[0060] 6. Threaded ring; 61. Rotary groove; 62. Rotary block; 63. Mounting half-groove B; 64. Hexagonal block C;

[0061] 7. Rotating equipment; 70. Conductive mechanism; 71. Base box; 72. Lifting structure; 73. Deceleration rotating mechanism; 74. Fixed seat; 75. Hexagonal slot; 76. Mounting slot; 701. Power supply; 702. Conductive ring A; 703. Conductive ring B; 704. Connecting rod; 705. Wire A; 706. Wire B. Detailed Implementation

[0062] like Figures 1 to 9 As shown, the present invention relates to a pressure sensor packaging structure, including a base mechanism for mounting the pressure sensor. The base mechanism includes a hexagonal block A1, a circular cavity A11 is formed at the top of the hexagonal block A1, and a plurality of radial grooves 12 are formed at equal intervals in an annular shape at the top of the circular cavity A11.

[0063] Hexagonal block A1 has a hexagonal block B2 rotatably mounted on its top end. Hexagonal block B2 has a circular cavity B21 at its bottom end. The top end of the circular cavity B21 has several oblique guide grooves 22 arranged in a ring at equal intervals.

[0064] The gap between the circular cavity B21 and the circular cavity A11 forms a cylindrical cavity. Several movable mechanisms 3 are provided in a ring at equal intervals inside the cylindrical cavity. Two adjacent movable mechanisms 3 are slidably connected, and the two ends of the movable mechanism 3 are respectively movably connected to the radial groove 12 and the inclined guide groove 22.

[0065] The top of the hexagonal block B2 has a through groove 23 that communicates with the circular cavity B21. A membrane mechanism 4 is provided in the through groove 23. A rod 5 that transmits pressure to the pressure sensor is fixed at the bottom of the membrane mechanism 4.

[0066] When the bottom end of the movable mechanism 3 is located at the centripetal end of the centripetal groove 12, the rod 5, the membrane mechanism 4 and several movable mechanisms 3 are in close contact to form a closed structure.

[0067] When the bottom end of the movable mechanism 3 is located at the eccentric end of the centripetal groove 12, the gap between the movable mechanisms 3 and the cylindrical cavity forms a vacuum reference cavity.

[0068] In the embodiment of the present application, the hexagonal block A1 is provided with a threaded groove A13 on the outer surface, a plurality of air holes A14 are uniformly arranged on the threaded groove A13, a threaded groove B15 is arranged at the bottom end of the hexagonal block A1, an installation half-groove A16 adapted to the top structure of the pressure sensor is arranged at the top end of the threaded groove B15, and the installation half-groove A16 is communicated with the circular cavity A11. Through the above arrangement, the rotating hexagonal block B2 changes the gap position between the centripetal groove 12 and the inclined guide groove 22, the movable mechanism 3 moves along the eccentric direction or the centripetal direction, and when the movable mechanism 3 moves along the eccentric direction, the gas in the gap between the movable mechanism 3 and the cylindrical cavity is pushed by the movable mechanism 3 and flows out along the air hole A14.

[0069] In the embodiment of the present application, the base mechanism further comprises a threaded ring 6, the threaded ring 6 is threadedly connected to the threaded groove B15, a rotating groove 61 is arranged at the top end of the inner edge surface of the threaded ring 6, a rotating block 62 is arranged on the rotating groove 61, the rotating block 62 is rotationally matched with the rotating groove 61, the rotating block 62 is in T-shaped structure in cross section, an installation half-groove B63 adapted to the bottom structure of the pressure sensor is arranged on the rotating block 62, and a hexagonal block C64 is fixedly arranged at the bottom end of the threaded ring 6.

[0070] In the embodiment of the present application, the outer surface of the hexagonal block B2 is provided with a threaded groove C20, and a protective ring 24 is threadedly connected to the threaded groove C20, and the protective ring 24 is threadedly matched with the threaded groove A13.

[0071] In the embodiment of the present application, the two ends of the inclined guide groove 22 are provided with limiting arc grooves 25, and the inclined guide groove 22 and the two limiting arc grooves 25 form a functional guide groove in communication.

[0072] In the embodiment of the present application, the movable mechanism 3 comprises a movable block 31, a sealing gasket 32 in shape adapted to the movable block 31 is fixedly arranged on the surface of the movable block 31, the two ends of the sealing gasket 32 are respectively slidably connected with the bottom end of the circular cavity A11 and the top end of the circular cavity B21, the side surface of the sealing gasket 32 is slidably connected with the movable block 31 adjacent thereto, movable columns 33 are fixedly arranged at the two ends of the movable block 31, and the two movable columns 33 are movably connected with the functional guide groove and the centripetal groove 12 respectively.

[0073] In the embodiment of the present application, the sealing gasket 32 is made of conductive expansion rubber material, and a polytetrafluoroethylene coating layer is coated on the surface of the sealing gasket. Through the above arrangement, when the movable column 33 moves into the limiting arc groove 25, the positions of the plurality of movable mechanisms 3 are preliminarily limited, which is convenient for subsequent operation and prevents the position of the movable mechanism 3 from being changed due to external factors, especially when the plurality of movable mechanisms 3 and the gap of the cylindrical cavity form a vacuum reference cavity, the movable mechanism 3 is prevented from being automatically moved by air pressure, the preliminary stability of the vacuum reference cavity is ensured, the conductive expansion rubber material expands after being electrified, the polytetrafluoroethylene coating layer is adapted to high temperature and high pressure environment, has low friction coefficient, and is corrosion resistant, and the service life of the pressure sensor packaging structure is ensured.

[0074] In the embodiment of the present application, the top end of the movable block 31 is provided with an adaptive groove 34. When the movable column 33 is located at the centripetal end of the centripetal groove 12, the adaptive grooves 34 are connected to form an adaptive cavity adapted to the bottom end of the membrane mechanism 4. The adaptive grooves 34 are connected to form an adaptive cavity adapted to the bottom end of the membrane mechanism 4, so as to ensure the airtightness of the closed structure formed by the rod body 5, the membrane mechanism 4 and the plurality of movable mechanisms 3.

[0075] In the embodiment of the present application, the eccentric end of the movable block 31 is an arc surface structure adapted to the cylindrical cavity. When the movable column 33 is located at the eccentric end of the centripetal groove 12, the arc surface is attached to the surface of the cylindrical cavity. Through the above arrangement, when the plurality of movable mechanisms 3 are in contact with the cylindrical cavity and form a vacuum reference cavity, the gas in the cylindrical cavity is pushed out to the outside of the cylindrical cavity. At this time, the auxiliary medium blocks the air hole A14, discharges the gas in the air hole A14, and rotates the protective ring 24 to make the protective ring 24 screw with the threaded groove A13, so that the hexagonal block A1 and the hexagonal block B2 are relatively fixed, preventing accidental touch and helping to withstand external air pressure, reducing the stress on the movable mechanism 3 and prolonging the service life.

[0076] In the embodiment of the present application, the membrane mechanism 4 includes a membrane ring 41, the membrane ring 41 is fixedly arranged on the through groove 23, the bottom end of the membrane ring 41 is provided with a circular block 42, the top end of the circular block 42 is adapted to the shape of the membrane ring 41, the top end of the circular block 42 is fixedly connected with the membrane ring 41 through a column body 43, the circular block 42 is slidingly connected with the through groove 23, and the bottom end of the circular block 42 is fixedly provided with a circular truncated cone block 44; the adaptive cavity is adapted to the shape of the circular truncated cone block 44, and the rod body 5 is fixedly arranged at the bottom end of the circular truncated cone block 44.

[0077] In the embodiment of the present application, a plurality of gradient grooves 441 are evenly and annularly arranged in the circular truncated cone block 44, the opening of the gradient groove 441 gradually increases along the centripetal direction, the sealing block 442 is movably arranged on the gradient groove 441, the eccentric end of the sealing block 442 is matched with the surface shape of the circular truncated cone block 44, the centripetal end of the gradient groove 441 is connected with the sliding groove 443, the sliding block 444 is slidably arranged on the sliding groove 443, the sliding block 444 is fixedly connected with the sealing block 442, the sliding block 444 is elastically connected with the sliding groove 443 through the spring 440, a plurality of air grooves 445 are evenly arranged on the surface of the sliding block 444, a plurality of branch air holes B 446 are arranged at the centripetal end of the sliding groove 443, and the plurality of branch air holes B 446 are connected with the outside through the main air hole 447. Through the above arrangement, when the vacuum degree of the vacuum reference cavity decreases, the movable mechanism 3 moves from the eccentric end to the centripetal end, the movable block 31 extrudes the circular truncated cone block 44, the circular truncated cone block 44 drives the circular block 42 to slide along the through groove 23, and the top end of the circular block 42 is in close contact with the bottom end of the membrane ring 41. At this time, the rod body 5, the membrane mechanism 4 and the plurality of movable mechanisms 3 are in close contact to form a sealed structure. During the process, the gas pushes the sealing block 442, so that the gas is sequentially discharged to the outside from the gap between the sealing block 442 and the gradient groove 441, the air groove 445, the branch air hole B 446 and the main air hole 447, and the vacuum degree of the vacuum reference cavity is reset.

[0078] It is worth mentioning that the spring 440 provides elastic force and external pressure, and the sealing block 442 realizes sealing with the gradient groove 441, so that the gradient groove 441 can only exhaust but cannot intake.

[0079] A packaging method of a pressure sensor is suitable for the packaging structure of the pressure sensor, and includes the following steps.

[0080] S1: install the ordinary pressure sensor;

[0081] The ordinary pressure sensor is mounted on the insulating shell and is installed in the installation half groove A16, and the filling sealant is filled;

[0082] S2: according to the position of the installation half groove B63 and the bottom of the ordinary pressure sensor, the rotating block 62 is sent into the threaded groove B15, the threaded ring 6 is screwed with the threaded groove B15 by rotating the hexagonal block C64, so that the rotating block 62 is in contact with the top end of the threaded groove B15, and the installation half groove B63 provides support for the ordinary pressure sensor;

[0083] S3: adjust the reference vacuum cavity;

[0084] S3.1: adjust the position of the protective ring 24;

[0085] The protective ring 24 is rotated to be separated from the threaded groove A13, so that the hexagonal block B2 can be rotated relative to the hexagonal block A1;

[0086] S3.2: Position adjustment of hexagonal block B2;

[0087] The rotating device 7 is used to rotate the hexagonal block B2, and the movable mechanism 3 moves along the eccentric direction until the movable column 33 is located in the limiting arc groove 25 at the eccentric end, and the movable mechanism 3 contacts the cylindrical cavity and forms the vacuum reference cavity, and the gas in the gap between the movable mechanism 3 and the cylindrical cavity is pushed by the movable mechanism 3 and flows out along the air hole A14;

[0088] S3.3: Isolation and protection;

[0089] The air hole A14 is blocked by the auxiliary medium, the gas in the air hole A14 is discharged, and the rotating protection ring 24 is used to make the protection ring 24 screw with the threaded groove A13, so that the hexagonal block A1 and the hexagonal block B2 are relatively fixed, the accidental touch is prevented, the external air pressure is borne, and the stress of the movable mechanism 3 is reduced;

[0090] S4: Resetting of the vacuum cavity;

[0091] The rotating protection ring 24 is used to make the protection ring 24 and the threaded groove A13 disengaged;

[0092] The rotating device 7 is used to rotate the hexagonal block B2, and the movable mechanism 3 moves from the eccentric end to the centripetal end, the movable block 31 extrudes the circular truncated cone block 44, so that the circular truncated cone block 44 drives the circular block 42 to slide along the through groove 23 until the top end of the circular block 42 is in close contact with the bottom end of the membrane ring 41, at this time, the rod body 5, the membrane mechanism 4 and the movable mechanism 3 are in close contact to form a sealed structure, and in the process, the gas pushes the sealing block 442, so that the gas is discharged to the outside in sequence from the gap between the sealing block 442 and the gradual change groove 441, the air groove 445, the branch air hole B446 and the main air hole 447, the steps S3.2 and S3.3 are repeated, and the vacuum degree of the vacuum reference cavity is reset.

[0093] In the embodiment of the application, in steps S3.2 and S4, the rotating device 7 comprises a base box 71 and a conductive mechanism 70, the top end of the base box 71 is fixedly provided with a lifting structure 72, the movable end of the lifting structure 72 is fixedly provided with a speed reduction rotating mechanism 73 matched with the hexagonal block B2, a fixed seat 74 is arranged below the rotating end of the speed reduction rotating mechanism 73, the fixed seat 74 is fixedly connected with the top end of the base box 71, a hexagonal groove 75 is arranged at the top end of the fixed seat 74, and a mounting groove 76 is arranged in the hexagonal groove 75;

[0094] The conductive mechanism 70 comprises a power supply 701, a conductive ring A 702 and a conductive ring B 703, the power supply 701 is arranged on one side of the fixing base 74 and is fixedly connected with the top end of the base box 71, the conductive ring A 702 is rotatably arranged on the rotating end of the speed reduction rotating mechanism 73, the top end of the conductive ring A 702 is fixedly connected with the movable end of the lifting structure 72 through a plurality of connecting rods 704, the conductive ring A 702 is connected with the positive electrode of the power supply 701 through a wire A 705, the conductive ring B 703 is fixedly arranged on the mounting groove 76, the conductive ring B 703 is connected with a wire B 706, the wire B 706 passes through the fixing base 74 and is connected with the negative electrode of the power supply 701, and the gap between the conductive ring B 703 and the mounting groove 76 forms a placing cavity matched with the hexagonal block A1.

[0095] According to the above arrangement, when the hexagonal block B2 needs to be rotated, the pressure sensor packaging structure is placed in the placing cavity, so that the hexagonal block A1 is in contact with the conductive ring B703, the lifting structure 72 is controlled through an external control mechanism, so that the rotating end of the speed reduction rotating mechanism 73 is inserted into the hexagonal block B2, at this time, the hexagonal block A1, the plurality of movable mechanisms 3 and the hexagonal block B2 form a conductor, the power supply 701 returns to the power supply 701 through the wire A 705, the conductive ring 7, the rotating end of the speed reduction rotating mechanism 73, the conductor and the wire B 706 in sequence, a series circuit is formed, the sealing gasket 32 is expanded, the sealing effect is improved, so that the plurality of movable mechanisms 3 are in contact with the cylindrical cavity and form a vacuum reference cavity with better vacuum degree.

[0096] The embodiments of the present application are preferred embodiments, but are not limited thereto, and those skilled in the art can easily understand the spirit of the present application according to the above embodiments, and make different inferences and changes, as long as they do not deviate from the spirit of the present application, they are within the protection scope of the present application.

Claims

1. A pressure sensor package structure, characterized by, Including the base mechanism for installing pressure sensor, the base mechanism includes hexagonal block A, the hexagonal block A top end is equipped with circular cavity A, the circular cavity A top end is equipped with a plurality of centripetal grooves in annular equal interval, The hexagonal block B is rotationally arranged on the top end of the hexagonal block A, the bottom end of the hexagonal block B is equipped with circular cavity B, and the top end of the circular cavity B is equipped with a plurality of inclined guide grooves in annular equal interval, The circular cavity B and the circular cavity A gap constitute a cylindrical cavity, a plurality of movable mechanisms are arranged in annular equal interval in the cylindrical cavity, adjacent two movable mechanisms are slidably connected, and the movable mechanisms are movably connected with the centripetal grooves and the inclined guide grooves at both ends, The top end of the hexagonal block B is equipped with a through groove in communication with the circular cavity B, and a film mechanism is arranged in the through groove, and a rod body for transmitting pressure to the pressure sensor is fixedly arranged at the bottom end of the film mechanism, When the bottom end of the movable mechanism is located at the centripetal end of the centripetal groove, the rod body, the film mechanism and a plurality of movable mechanisms are in close contact to form a sealed structure, When the bottom end of the movable mechanism is located at the eccentric end of the centripetal groove, a plurality of movable mechanisms and the cylindrical cavity gap constitute a vacuum reference cavity.

2. The pressure sensor package structure of claim 1, wherein, The outer surface of the hexagonal block A is equipped with a threaded groove A, a plurality of air holes A are uniformly arranged on the threaded groove A, the bottom end of the hexagonal block A is equipped with a threaded groove B, the top end of the threaded groove B is equipped with a mounting half groove A matched with the top structure of the pressure sensor, and the mounting half groove A is in communication with the circular cavity A.

3. The pressure sensor package structure of claim 2, wherein, The base mechanism further comprises a threaded ring, the threaded ring is threadedly connected to the threaded groove B, the inner edge surface of the threaded ring is equipped with a rotating groove at the top end, a rotating block is arranged on the rotating groove, the rotating block is rotationally matched with the rotating groove, the cross section of the rotating block is in T-shaped structure, the rotating block is equipped with a mounting half groove B matched with the bottom structure of the pressure sensor, and the bottom end of the threaded ring is fixedly provided with a hexagonal block C.

4. The pressure sensor package structure of claim 3, wherein, The outer surface of the hexagonal block B is equipped with a threaded groove C, and a protective ring is threadedly connected to the threaded groove C, and the protective ring is threadedly matched with the threaded groove A; Both ends of the inclined guide groove are provided with a limiting arc groove, and the inclined guide groove is communicated with the two limiting arc grooves to form a functional guide groove.

5. The pressure sensor package structure of claim 4, wherein, The movable mechanism comprises a movable block, a sealing gasket matched with the movable block is fixedly arranged on the surface of the movable block, the sealing gaskets are slidably connected with the bottom end of the circular cavity A and the top end of the circular cavity B at both ends respectively, the sealing gaskets are slidably connected with the adjacent movable blocks on the side surface, and the movable blocks are fixedly provided with movable columns at both ends, and the movable columns are movably connected with the functional guide groove and the centripetal groove respectively. Among them, the sealing gasket is made of conductive expanded rubber material, and the surface of the sealing gasket is coated with a polytetrafluoroethylene coating.

6. The pressure sensor package structure of claim 5, wherein, The top end of the movable block is equipped with an adaptive groove, when the movable column is located at the centripetal end of the centripetal groove, a plurality of adaptive grooves are communicated to form an adaptive cavity matched with the bottom end of the film mechanism, The eccentric end of the movable block is an arc surface structure matched with the cylindrical cavity, and when the movable column is located at the eccentric end of the centripetal groove, the arc surface is attached to the surface of the cylindrical cavity.

7. The pressure sensor package structure of claim 6, wherein, The film mechanism comprises a film ring, the film ring is fixed on the through groove, the bottom end of the film ring is provided with a round block, the top end of the round block is matched with the shape of the film ring, the center position of the top end of the round block is fixedly connected with the film ring through a column body, the round block is in sliding connection with the through groove, and the bottom end of the round block is fixedly provided with a circular truncated cone block. The adaptive cavity is matched with the shape of the circular truncated cone block, and the rod body is fixedly arranged at the bottom end of the circular truncated cone block.

8. The pressure sensor package structure of claim 7, wherein, A plurality of gradient grooves are arranged in the circular truncated cone block in a ring shape at equal intervals, the opening of the gradient groove gradually increases along the centripetal direction, a sealing block is movably arranged on the gradient groove, the eccentric end of the sealing block is matched with the shape of the surface of the circular truncated cone block, a sliding groove is connected to the centripetal end of the gradient groove, a sliding block is slidably arranged on the sliding groove, the sliding block is fixedly connected with the sealing block, the sliding block is elastically connected with the sliding groove through a spring, a plurality of air grooves are uniformly arranged on the surface of the sliding block, a branch air hole B is arranged at the centripetal end of the sliding groove, and a plurality of branch air holes B are connected with the outside through a main air hole.

9. A method of packaging a pressure sensor suitable for use in a pressure sensor package structure as claimed in claim 8, characterised by, The method comprises the following steps: S1: installing a common pressure sensor; An insulating shell is arranged on the common pressure sensor, and the common pressure sensor is arranged in the installation half groove A and filled with pouring glue; S2: according to the position of the installation half groove B and the bottom of the common pressure sensor, the rotating block is sent into the threaded groove B, the threaded ring is screwed with the threaded groove B by rotating the hexagonal block C, so that the rotating block is in contact with the top end of the threaded groove B, and the installation half groove B provides support for the common pressure sensor; S3: adjusting the reference vacuum cavity; S3.1: adjusting the position of the protective ring; The protective ring is rotated to be separated from the threaded groove A, so that the hexagonal block B can be rotated relative to the hexagonal block A; S3.2: adjusting the position of the hexagonal block B; The hexagonal block B is rotated by using a rotating device, the movable mechanism moves along the eccentric direction, and the movable mechanism is in contact with the cylindrical cavity and constitutes a vacuum reference cavity when the movable column moves to the limit arc groove at the eccentric end. The gas in the gap between the movable mechanism and the cylindrical cavity is pushed by the movable mechanism and flows out along the air hole A; S3.3: isolation and protection; The air hole A is blocked by the auxiliary medium, the gas in the air hole A is discharged, and the protective ring is screwed with the threaded groove A by rotating the protective ring, so that the hexagonal block A is relatively fixed with the hexagonal block B, the misoperation is prevented, the external air pressure is borne, and the stress on the movable mechanism is reduced; S4: resetting the vacuum cavity; The protective ring is rotated to be separated from the threaded groove A; The hexagonal block B is rotated by using a rotating device, the movable mechanism moves from the eccentric end to the centripetal end, the movable block extrudes the circular truncated cone block, the circular truncated cone block drives the round block to slide along the through groove until the top end of the round block is in close contact with the bottom end of the film ring. At this time, the rod body, the film mechanism and the movable mechanism are in close contact to form a sealed structure. In this process, the gas pushes the sealing block, so that the gas is discharged to the outside in sequence from the gap between the sealing block and the gradient groove, the air groove, the branch air hole B and the main air hole. Repeat steps S3.2 and S3.3 to reset the vacuum degree of the vacuum reference cavity.

10. The method of packaging a pressure sensor of claim 9, wherein, Step S3.2 and step S4, the rotating device includes a base box and a conductive mechanism, the top of the base box is fixedly provided with a lifting structure, the movable end of the lifting structure is fixedly provided with a deceleration rotating mechanism, the rotating end of the deceleration rotating mechanism is provided below with a fixed seat, the fixed seat is fixedly connected with the top of the base box, the top of the fixed seat is provided with a hexagonal groove, the hexagonal groove is provided with an installation groove; The conductive mechanism includes a power supply, a conductive ring A and a conductive ring B, the power supply is arranged on one side of the fixed seat and is fixedly connected with the top of the base box, the conductive ring A is rotatably arranged on the rotating end of the deceleration rotating mechanism, the top of the conductive ring A is fixedly connected with the movable end of the lifting structure through a plurality of connecting rods, the conductive ring A is connected with the positive electrode of the power supply through a wire A, the conductive ring B is fixedly arranged on the installation groove, the conductive ring B is connected with a wire B, the wire B passes out of the fixed seat and is connected with the negative electrode of the power supply, the gap between the conductive ring B and the installation groove constitutes a placing cavity matched with the hexagonal block A.

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