Corrosion-resistant evaporation boat and preparation method thereof
By coating the surface of the evaporation boat with a dense AlN film and performing phosphorus modification treatment, the problems of easy corrosion and insufficient thermal shock resistance of the evaporation boat under high temperature environment are solved, achieving a dual improvement in corrosion resistance and thermal shock resistance.
Patent Information
- Application Number
- CN202511352288.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-22
- Publication Date
- 2025-11-07
AI Technical Summary
Existing evaporation boat materials are prone to corrosion at high temperatures and lack sufficient thermal shock resistance, making it difficult to simultaneously meet the dual requirements of corrosion resistance and thermal shock resistance.
A dense AlN film was deposited on the surface of the evaporation boat by chemical vapor deposition, and then phosphorus-modified on the surface. The film was pretreated with a phosphorus-modified carbon nanotube aqueous dispersion to enhance the adhesion and density of the AlN film.
It effectively reduces the corrosion of the evaporation boat by molten aluminum, extends the service life of the evaporation boat, and improves its thermal shock resistance in high-temperature environments.
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Abstract
Description
TECHNICAL FIELD
[0001] The application relates to the technical field of vacuum coating, in particular to a corrosion-resistant evaporation boat and a preparation method thereof. BACKGROUND
[0002] As a mature film forming technology, vacuum evaporation coating is widely used in industrial production, and an evaporation boat containing an aluminum source is an indispensable consumable core part in the technology. The performance of the evaporation boat is directly related to the evaporation effect, and meanwhile, the corrosion depth of a molten pool of the evaporation boat also has an important influence on cost control and efficiency improvement of production. Therefore, optimization of the performance of the evaporation boat to prolong the service life and improve the evaporation quality has become a focus of continuous attention in the industry.
[0003] At present, BN-TiB2-AlN composite conductive ceramic is generally used as the material system of the evaporation boat in the industry, but the system has obvious technical defects. On the one hand, in a high-temperature environment, the aluminum liquid can cause corrosion on the surface of the evaporation boat, which is one of the key factors leading to the shortening of the service life of the evaporation boat; on the other hand, in the vacuum evaporation process, the evaporation boat needs to undergo multiple cold and hot cycles, and the content of the BN phase directly determines the thermal shock resistance of the evaporation boat. However, reducing the content of the BN phase can reduce the corrosion problem of the aluminum liquid to a certain extent, but may have an adverse effect on the overall service life of the evaporation boat. This contradiction makes it difficult for the existing material system to meet the dual requirements of corrosion resistance and thermal shock resistance.
[0004] In view of the above, it is of practical significance to develop a corrosion-resistant evaporation boat and a preparation method thereof. SUMMARY
[0005] The application aims to provide a corrosion-resistant evaporation boat and a preparation method thereof to solve the problems in the prior art.
[0006] To achieve the above-mentioned purpose, the application provides the following technical scheme: A preparation method of a corrosion-resistant evaporation boat, comprising the following steps: placing a common evaporation boat in a vacuum reaction chamber, introducing an aluminum source and a nitrogen source after vacuumizing, setting the temperature to 800-1500 DEG C, depositing a layer of AIN dense film through chemical vapor deposition to obtain the corrosion-resistant evaporation boat.
[0007] More preferably, the aluminum source is trimethylaluminum, and the nitrogen source is ammonia.
[0008] More preferably, the common evaporation boat is pretreated, sprayed with a phosphorus-modified carbon nanometer water dispersion liquid to obtain a pretreated evaporation boat, and then subjected to chemical vapor deposition to coat the AIN dense film to obtain the corrosion-resistant evaporation boat.
[0009] More preferably, the preparation method of the phosphorus-modified carbon nanometer water dispersion liquid is as follows: Step 1: graphene oxide and carboxylated nanotubes are sequentially added to water for dispersion, wet grinding, washing, and drying to obtain carbon nanomaterials; Step 2: the carbon nanomaterials are added to water for dispersion for 20-30 min, and phosphoric acid and urea are added and ultrasonically dispersed for 20-30 min, and stirred at 40-50 DEG C for 7-10 h, and then the temperature is continuously increased to 90-100 DEG C and stirred for 5-7 h, and then washed and dried to obtain phosphorus-modified carbon nanomaterials; Step 3: the phosphorus-modified carbon nanomaterials are added to water for dispersion for 20-30 min, and filtered, and then freeze-dried at a temperature of -40 to -20 DEG C for 60-70 h to obtain carbon nanomaterials after freeze treatment; Step 4: the carbon nanomaterials after freeze treatment are added to water and ultrasonically dispersed for 20-30 min to obtain a phosphorus-modified carbon nanomaterial water dispersion.
[0010] More preferably, in the raw material of the carbon nanomaterials, the mass ratio of graphene oxide to carboxylated nanotubes is (1-2):(1-3).
[0011] More preferably, in the raw material of the phosphorus-modified carbon nanomaterials, 2-5 parts of carbon nanomaterials, 8-12 parts of phosphoric acid, and 0.1-0.5 parts of urea are used.
[0012] More preferably, the concentration of the phosphorus-modified carbon nanomaterial water dispersion is 1-3 wt%.
[0013] More preferably, the carboxyl content of the carboxylated carbon nanotubes is 0.1-2.6 wt%.
[0014] A preparation method of a corrosion-resistant evaporation boat.
[0015] Compared with the prior art, the application has the following beneficial effects: 1. The corrosion-resistant evaporation boat of the application is prepared by chemical vapor deposition (CVD) to prepare AIN dense films on the surface of the evaporation boat substrate, which effectively reduces the corrosion of the aluminum liquid to the evaporation boat.
[0016] 2. In the present application, the ordinary evaporation boat is further pretreated using a phosphorus-modified carbon nanomaterial water dispersion, which can reduce the AIN nucleation energy barrier and make the AIN dense films more easily grow on the surface of the phosphorus-modified carbon nanomaterial; at the same time, the phosphorus modification roughens the surface of the carbon nanomaterial, increases the specific surface area, provides more physical anchoring sites for AIN deposition, forms a mechanical interlocking structure, and enhances the interface effect between the two; therefore, the pretreated evaporation boat provides conditions for AIN film formation, and the AIN dense films plated finally have better crystallinity and adhesion, which effectively enhances the corrosion resistance of the evaporation boat; Meanwhile, during the whole corrosion resistance process, the phosphorus element of phosphoric acid, graphene oxide and carbon nanotubes form a stable composite structure through chemical bonding, which has both the flexibility of carbon nanotubes and the rigidity of graphene oxide, fills the coating gap, and can buffer thermal stress through deformation, reduce crack generation, and prolong the diffusion path of corrosion medium, reduce the permeability, and improve the density and mechanical strength of the coating; phosphorus doping effectively enhances the thermal stability of carbon nanomaterials, prevents high-temperature collapse, ensures the structural stability of the AIN dense film attached to the substrate, optimizes the interface compatibility, and makes the AIN film and the evaporation boat substrate more firmly combined, even if the corrosion medium erodes, the film layer is not easy to peel off from the substrate; and the phosphorus-modified carbon nanomaterials contain rich phosphorus groups, even when the AIN dense film is damaged and exposed, the phosphorus groups in the phosphorus-modified carbon nanomaterials can react with Al 3+ and form a passivation film to cover the damaged area, inhibit electrochemical corrosion, and further enhance corrosion resistance. DETAILED DESCRIPTION
[0017] The technical solutions in the embodiments of the present application will be described below. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.
[0018] It should be noted that the following parts are by weight, and there is no special restriction on the purchase of all raw materials involved in the present application. It should be noted that the carboxylated carbon nanotube (model: C835710; carboxyl content: 2wt%; provided by Shanghai Maikelin Biotechnology Co., Ltd.), and other reagents are commercially available.
[0019] Example 1: A preparation method of a corrosion-resistant evaporation boat, the specific steps are as follows: Put the ordinary evaporation boat into the vacuum reaction chamber, after vacuumizing, introduce trimethylaluminum and ammonia, set the temperature to 800℃, and coat AIN dense film by chemical vapor deposition reaction to obtain a corrosion-resistant evaporation boat.
[0020] Example 2: A preparation method of a corrosion-resistant evaporation boat, the specific steps are as follows: Put the ordinary evaporation boat into the vacuum reaction chamber, after vacuumizing, introduce trimethylaluminum and ammonia, set the temperature to 800℃, and coat AIN dense film by chemical vapor deposition reaction to obtain a corrosion-resistant evaporation boat.
[0021] Example 3: A preparation method of a corrosion-resistant evaporation boat, the specific steps are as follows: Put the ordinary evaporation boat into the vacuum reaction chamber, after vacuumizing, introduce trimethylaluminum and ammonia, set the temperature to 1500℃, carry out chemical vapor deposition, plate a layer of AIN dense film, get the corrosion-resistant evaporation boat.
[0022] Example 4: Based on example 2, the ordinary evaporation boat is pretreated, the steps are as follows: I. Preparation of phosphorus modified carbon nanometer water dispersion liquid: Step 1: Add 1.5 parts of graphene oxide and 2 parts of carboxylated nanotube to water in sequence, disperse, wet mill, wash, and dry to obtain carbon nanometer material; Step 2: Add 3.5 parts of carbon nanometer material to water, disperse for 20 min, add 10 parts of phosphoric acid and 0.3 parts of urea, ultrasonic disperse for 25 min, stir at 45℃ for 8.5 h, continue to heat to 95℃, stir for 6 h, wash, dry to obtain phosphorus modified carbon nanometer material; Step 3: Add 3.5 parts of phosphorus modified carbon nanometer material to water and disperse for 25 min, filter, freeze dry at a temperature of-40℃ for 65 h to obtain carbon nanometer material after freeze treatment; Step 4: Add 3.5 parts of carbon nanometer material after freeze treatment to water, ultrasonic disperse for 25 min to obtain phosphorus modified carbon nanometer water dispersion liquid.
[0023] II. Preparation of pretreated evaporation boat: spray the phosphorus modified carbon nanometer water dispersion liquid on the ordinary evaporation boat, set the spraying pressure to 0.2 MPa, the nozzle distance to 15 cm, the single spraying thickness to 0.3 μm, stand for 5 min after each spraying, repeat for 2 times; under nitrogen environment, increase the temperature from room temperature to 120℃ at a rate of 5℃ / min, keep for 20 min, continue to heat to 200℃, keep for 40 min, cool to room temperature to obtain the pretreated evaporation boat.
[0024] III. Preparation of corrosion-resistant evaporation boat: put the pretreated evaporation boat into the vacuum reaction chamber, after vacuumizing, introduce trimethylaluminum and ammonia, set the temperature to 1200℃, carry out chemical vapor deposition, plate a layer of AIN dense film, get the corrosion-resistant evaporation boat.
[0025] In this example, the concentration of the phosphorus modified carbon nanometer water dispersion liquid is 2wt%.
[0026] Example 5: Based on example 2, the ordinary evaporation boat is pretreated, the steps are as follows: I. Preparation of phosphorus modified carbon nanometer water dispersion liquid: Step 1: Add 1 part of graphene oxide and 1 part of carboxylated nanotube to water in sequence, disperse, wet mill, wash, and dry to obtain carbon nanometer material; Step 2: 2 parts of carbon nanomaterials were added to water and dispersed for 20 min, 8 parts of phosphoric acid and 0.1 part of urea were added, and ultrasonic dispersion was performed for 20 min, stirring was performed at 40℃ for 7 h, the temperature was continuously increased to 90℃, and stirring was performed for 5 h, and then washing, drying were performed to obtain phosphorus modified carbon nanomaterials; Step 3: 2 parts of phosphorus modified carbon nanomaterials were added to water and dispersed for 20 min, and then filtered, and freeze-drying was performed at a temperature of -30℃ for 60 h to obtain carbon nanomaterials after freeze treatment; Step 4: 2 parts of carbon nanomaterials after freeze treatment were added to water, and ultrasonic dispersion was performed for 20 min to obtain a phosphorus modified carbon nanomaterial water dispersion.
[0027] II. Preparation of a pretreated evaporation boat: The phosphorus modified carbon nanomaterial water dispersion was sprayed onto a common evaporation boat, the spraying pressure was set to 0.2 MPa, the nozzle distance was 15 cm, the single spraying thickness was 0.3 μm, and after each spraying, the evaporation boat was placed for 5 min, and the process was repeated twice; under a nitrogen environment, the temperature was increased to 120℃ at a rate of 5℃ / min, and maintained for 20 min, and then the temperature was continuously increased to 200℃, and maintained for 40 min, and then cooled to room temperature to obtain a pretreated evaporation boat.
[0028] III. Preparation of a corrosion-resistant evaporation boat: The pretreated evaporation boat was placed in a vacuum reaction chamber, vacuum was drawn, trimethylaluminum and ammonia were introduced, the temperature was set to 1200℃, and chemical vapor deposition was performed to coat a dense AIN film, thereby obtaining a corrosion-resistant evaporation boat.
[0029] In this embodiment, the concentration of the phosphorus modified carbon nanomaterial water dispersion was 1 wt%.
[0030] Example 6: Based on Example 2, a common evaporation boat was pretreated, and the steps were as follows: I. Preparation of a phosphorus modified carbon nanomaterial water dispersion: Step 1: 2 parts of graphene oxide and 3 parts of carboxylated nanotubes were added to water in sequence, dispersed, wet-milled, washed, and dried to obtain carbon nanomaterials; Step 2: 5 parts of carbon nanomaterials were added to water and dispersed for 30 min, 12 parts of phosphoric acid and 0.5 parts of urea were added, ultrasonic dispersion was performed for 30 min, stirring was performed at 50℃ for 10 h, the temperature was continuously increased to 100℃, and stirring was performed for 7 h, and then washing, drying were performed to obtain phosphorus modified carbon nanomaterials; Step 3: 5 parts of phosphorus modified carbon nanomaterials were added to water and dispersed for 30 min, and then filtered, and freeze-drying was performed at a temperature of -20℃ for 70 h to obtain carbon nanomaterials after freeze treatment; Step 4: 5 parts of carbon nanomaterials after freeze treatment were added to water, and ultrasonic dispersion was performed for 30 min to obtain a phosphorus modified carbon nanomaterial water dispersion.
[0031] II. Preparation of a pretreated evaporation boat: the phosphorus modified carbon nanometer water dispersion liquid is sprayed onto a common evaporation boat, the spraying pressure is set to 0.2 MPa, the nozzle distance is 15 cm, the single spraying thickness is 0.3 μm, each spraying is placed for 5 min, and the process is repeated twice; under a nitrogen environment, the temperature is raised from room temperature to 120 °C at a rate of 5 °C / min, maintained for 20 min, continuously raised to 200 °C, maintained for 40 min, and cooled to room temperature to obtain a pretreated evaporation boat.
[0032] III. Preparation of a corrosion-resistant evaporation boat: the pretreated evaporation boat is placed in the interior of a vacuum reaction chamber, after vacuumizing, trimethylaluminum and ammonia are introduced, the temperature is set to 1200 °C, chemical vapor deposition is performed, a layer of AIN dense film is plated, and a corrosion-resistant evaporation boat is obtained.
[0033] In this embodiment, the concentration of the phosphorus modified carbon nanometer water dispersion liquid is 3 wt%.
[0034] Comparative Example 1: based on Example 4, no carboxylated carbon nanotubes are added to the phosphorus modified carbon nanometer water dispersion liquid, and the steps are as follows: I. Preparation of a phosphorus modified carbon nanometer water dispersion liquid: Step 1: 1.5 parts of graphene oxide is added to water for dispersion, washing, and drying to obtain a carbon nanometer material; Step 2: 1.5 parts of the carbon nanometer material is added to water for dispersion for 20 min, 10 parts of phosphoric acid and 0.3 parts of urea are added, ultrasonic dispersion is performed for 25 min, stirring is performed at 45 °C for 8.5 h, the temperature is continuously raised to 95 °C, stirring is performed for 6 h, washing and drying are performed to obtain a phosphorus modified carbon nanometer material; Step 3: 1.5 parts of the phosphorus modified carbon nanometer material is added to water for dispersion for 25 min, filtration, and freeze-drying at a temperature of -40 °C for 65 h to obtain a freeze-treated carbon nanometer material; Step 4: 1.5 parts of the freeze-treated carbon nanometer material is added to water for ultrasonic dispersion for 25 min to obtain a phosphorus modified carbon nanometer water dispersion liquid.
[0035] II. Preparation of a pretreated evaporation boat: the phosphorus modified carbon nanometer water dispersion liquid is sprayed onto a common evaporation boat, the spraying pressure is set to 0.2 MPa, the nozzle distance is 15 cm, the single spraying thickness is 0.3 μm, each spraying is placed for 5 min, and the process is repeated twice; under a nitrogen environment, the temperature is raised from room temperature to 120 °C at a rate of 5 °C / min, maintained for 20 min, continuously raised to 200 °C, maintained for 40 min, and cooled to room temperature to obtain a pretreated evaporation boat.
[0036] III. Preparation of a corrosion-resistant evaporation boat: the pretreated evaporation boat is placed in the interior of a vacuum reaction chamber, after vacuumizing, trimethylaluminum and ammonia are introduced, the temperature is set to 1200 °C, chemical vapor deposition is performed, a layer of AIN dense film is plated, and a corrosion-resistant evaporation boat is obtained.
[0037] In the present comparative example, the concentration of the phosphorus-modified carbon nanometer aqueous dispersion is 2wt%.
[0038] Comparative Example 2: Based on Example 4, no graphene oxide is added to the phosphorus-modified carbon nanometer aqueous dispersion, and the steps are as follows: I. Preparation of phosphorus-modified carbon nanometer aqueous dispersion: Step 1: 2 parts of carboxylated nanotubes are sequentially added to water for dispersion, washing, and drying to obtain carbon nanometer materials; Step 2: 2 parts of carbon nanometer materials are added to water for dispersion for 20 min, 10 parts of phosphoric acid and 0.3 parts of urea are added, ultrasonic dispersion is performed for 25 min, stirring is performed at 45℃ for 8.5 h, the temperature is continuously increased to 95℃, stirring is performed for 6 h, washing and drying are performed to obtain phosphorus-modified carbon nanometer materials; Step 3: 2 parts of phosphorus-modified carbon nanometer materials are added to water for dispersion for 25 min, filtration is performed, and freeze-drying is performed at a temperature of -40℃ for 65 h to obtain carbon nanometer materials after freeze treatment; Step 4: 2 parts of carbon nanometer materials after freeze treatment are added to water for ultrasonic dispersion for 25 min to obtain a phosphorus-modified carbon nanometer aqueous dispersion.
[0039] II. Preparation of pretreated evaporation boat: The phosphorus-modified carbon nanometer aqueous dispersion is sprayed onto a common evaporation boat, the spraying pressure is set to 0.2 MPa, the nozzle distance is 15 cm, the single spraying thickness is 0.3 μm, the evaporation boat is allowed to stand for 5 min after each spraying, and the spraying is repeated twice; under a nitrogen environment, the temperature is increased to 120℃ at a rate of 5℃ / min, and the temperature is maintained for 20 min, the temperature is continuously increased to 200℃, and the temperature is maintained for 40 min, and the temperature is cooled to room temperature to obtain a pretreated evaporation boat.
[0040] III. Preparation of corrosion-resistant evaporation boat: The pretreated evaporation boat is placed inside a vacuum reaction chamber, after vacuumizing, trimethylaluminum and ammonia gas are introduced, the temperature is set to 1200℃, chemical vapor deposition is performed, a layer of AIN dense film is plated, and a corrosion-resistant evaporation boat is obtained.
[0041] In the present comparative example, the concentration of the phosphorus-modified carbon nanometer aqueous dispersion is 2wt%.
[0042] Comparative Example 3: Based on Example 4, the phosphorus-modified carbon nanometer aqueous dispersion is not subjected to phosphorus modification, and the steps are as follows: I. Preparation of carbon nanometer aqueous dispersion: Step 1: 1.5 parts of graphene oxide and 2 parts of carboxylated nanotubes are sequentially added to water for dispersion, wet grinding, washing, and drying to obtain carbon nanometer materials; Step 2: 3.5 parts of carbon nanometer materials are added to water for dispersion for 25 min, filtration is performed, and freeze-drying is performed at a temperature of -40℃ for 65 h to obtain carbon nanometer materials after freeze treatment; Step 3: 3.5 parts of the carbon nanomaterial after the freeze treatment were added to water and ultrasonically dispersed for 25 min to obtain a carbon nanomaterial water dispersion.
[0043] II. Preparation of a pretreated evaporation boat: The carbon nanomaterial water dispersion was sprayed onto a common evaporation boat, the spraying pressure was set to 0.2 MPa, the nozzle distance was 15 cm, the single spraying thickness was 0.3 μm, and after each spraying, the evaporation boat was allowed to stand for 5 min, and the process was repeated twice; under a nitrogen atmosphere, the temperature was raised from room temperature to 120 °C at a rate of 5 °C / min, and maintained for 20 min, then the temperature was further raised to 200 °C and maintained for 40 min, and then the temperature was cooled to room temperature to obtain a pretreated evaporation boat.
[0044] III. Preparation of a corrosion-resistant evaporation boat: The pretreated evaporation boat was placed in a vacuum reaction chamber, vacuum was applied, then trimethylaluminum and ammonia were introduced, the temperature was set to 1200 °C, and chemical vapor deposition was performed to coat a dense AIN film to obtain a corrosion-resistant evaporation boat.
[0045] In the present comparative example, the concentration of the carbon nanomaterial water dispersion was 2 wt%.
[0046] Performance test 1: The corrosion-resistant evaporation boats prepared in the examples and comparative examples were placed in a molten pool for corrosion experiments, the temperature was set to 160 °C, 180 °C, and 200 °C, respectively, the unwinding length was 10000 m, and the corrosion depth of the evaporation boat was detected, and the specific data are shown below:
[0047] Performance test 2: The corrosion-resistant evaporation boats prepared in the examples and comparative examples were placed in a molten pool for corrosion experiments, the temperature was set to 180 °C, and the unwinding length was 10000 m, 20000 m, and 30000 m, respectively, and the corrosion depth of the evaporation boat was detected, and the specific data are shown below:
[0048] Conclusion: From the performance test 1 data can be known, in the same implementation examples 1~3, under the condition of unwinding meters, with the increase of temperature, the corrosion depth of the evaporation boat slowly intensified, because the evaporation boat surface covered with a layer of AIN dense film, can further prevent the infiltration effect of aluminum liquid in the evaporation boat, thereby delaying the erosion of aluminum liquid to the evaporation boat, improve the service life of the evaporation boat; further, the implementation examples 4~6 on the ordinary evaporation boat pretreatment coated with a layer of phosphorus modified carbon nanometer water dispersion, the corrosion depth of AIN dense film is reduced, wherein the phosphorus modified carbon nanometer water dispersion can provide a stable adhesion basis for AIN dense film, prevent cracking, and promote the formation of AIN dense film; at the same time, the phosphorus modified carbon nanometer material, graphene oxide and nanofiber tube can be inserted in the sheet layer, fill the gap, hinder the diffusion of corrosive medium, its contains rich phosphorus group when the coating damage exposed, can generate passivation film cover the damaged area, delay the corrosion process, so the corrosion depth of the evaporation boat is reduced; and, from the performance test 2 data, it can be seen that at the temperature of 180℃, with the continuous increase of unwinding meters, the effect of evaporation boat delaying aluminum liquid infiltration is more and more obvious, compared with the implementation examples 1~3, the evaporation boat of the implementation examples 4~6 has a slower corrosion depth growth, greatly prolonging the service life of the evaporation boat.
[0049] From the data in performance test 1 and performance test 2, it can be seen that, compared with comparative examples 1~3, the implementation example 4 does not add carboxylated carbon nanotubes, and the corrosion depth at 180℃ and 200℃ is significantly improved. Because carboxylated carbon nanotubes can enhance the density and adhesion of the coating, the absence of carboxylated carbon nanotubes reduces the bonding force between the AIN dense film and the evaporation boat, thereby reducing the interfacial defects and making it prone to interlayer peeling, thereby exacerbating corrosion. The absence of graphene oxide reduces the bonding force between the evaporation boat and the carbon nanometer material, reduces the interfacial action between the film layers, weakens the corrosion resistance barrier effect, and increases the corrosion depth. The absence of phosphorus modification reduces the oxidation resistance and corrosion resistance of the material. The above shows that the synergistic effect of carboxylated carbon nanotubes, graphene oxide and phosphorus modification can effectively improve the density and crystallization of the AIN dense film and delay the corrosion of the aluminum liquid to the evaporation boat.
[0050] Finally, it should be noted that: the above only describes the preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent replacements to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A method of making a corrosion resistant evaporation boat, characterized by: The method comprises the following steps: The common evaporation boat is placed in the vacuum reaction chamber, and after vacuumizing, the aluminum source and the nitrogen source are introduced, the temperature is set to 800-1500 DEG C, a layer of AIN dense film is plated by chemical vapor deposition, and the corrosion-resistant evaporation boat is obtained.
2. The method of claim 1, wherein the method further comprises: The aluminum source is trimethylaluminum; and the nitrogen source is ammonia. 3. The method of claim 1, wherein the method further comprises: The common evaporation boat is pretreated, the phosphorus modified carbon nanometer water dispersion liquid is sprayed, the pretreated evaporation boat is obtained, then the chemical vapor deposition is carried out, the AIN dense film is plated, and the corrosion-resistant evaporation boat is obtained. 4. The method of claim 3, wherein the method further comprises: The preparation method of the phosphorus modified carbon nanometer water dispersion liquid is as follows: Step 1: graphene oxide and carboxylated nanotubes are added into water in sequence, dispersed, wet-milled, washed, and dried to obtain carbon nanometer materials; Step 2: the carbon nanometer materials are added into water, dispersed for 20-30 min, phosphoric acid and urea are added, ultrasonic dispersed for 20-30 min, stirred at 40-50 DEG C for 7-10 h, continuously heated to 90-100 DEG C, stirred for 5-7 h, washed, dried, and the phosphorus modified carbon nanometer materials are obtained; Step 3: the phosphorus modified carbon nanometer materials are added into water and dispersed for 20-30 min, filtered, and freeze-dried at a temperature of-40--20 DEG C for 60-70 h to obtain the carbon nanometer materials after freeze treatment; Step 4: the carbon nanometer materials after freeze treatment are added into water, ultrasonic dispersed for 20-30 min, and the phosphorus modified carbon nanometer water dispersion liquid is obtained.
5. The method of claim 4, wherein the method further comprises: forming a protective layer on the surface of the evaporation boat. The mass ratio of graphene oxide to carboxylated nanotubes in the raw material of the carbon nanometer materials is (1-2):(1-3).
6. The method of claim 4, wherein the method further comprises: In the raw material of the phosphorus modified carbon nanometer materials, 2-5 parts of carbon nanometer materials, 8-12 parts of phosphoric acid, and 0.1-0.5 parts of urea are used by weight.
7. The method of claim 4, wherein the method further comprises: The concentration of the phosphorus modified carbon nanometer water dispersion liquid is 1-3 wt%.
8. The method of claim 4, wherein the method further comprises: The carboxyl content of the carboxylated carbon nanotubes is 0.1-2.6 wt%.
9. A corrosion-resistant evaporation boat prepared by the preparation method of the corrosion-resistant evaporation boat according to any one of claims 1-8.