A cof packaging substrate chemical activation processing device

Abstract

The application discloses a COF packaging substrate chemical activation treatment device, and belongs to the technical field of flexible substrate treatment. The device comprises an activation box for activation, a first supporting plate is mounted on the sidewall of the activation box and used for supporting and fixing, a lifting assembly is mounted on the first supporting plate, a regulation and control driving assembly is mounted at the lower end of the lifting assembly, a linear vibration assembly is movably mounted at the upper end of the regulation and control driving assembly, a rotating assembly is movably mounted at the lower end of the regulation and control driving assembly, and the rotating assembly and the linear vibration assembly are movably arranged in the activation box. The shaking of the linear vibration assembly and the rotating assembly can make bubbles separate, reduce the deposition of metal ions on the surface of the substrate, and avoid the conductive short circuit phenomenon in subsequent packaging. In the process of continuous rotation and rotation, all the substrates can contact the solution in different areas, so that the phenomenon of uneven activation of local substrates in low-concentration solution for a long time is avoided.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of flexible substrate processing, and particularly relates to a COF packaging substrate chemical activation treatment device. BACKGROUND

[0002] In the processing of flexible packaging substrates, chemical activation treatment is a key pre-process that determines the reliability of subsequent packaging. The essence is to solve the defects of strong inertness and weak interfacial adhesion of the flexible substrate surface through chemical means, to provide a high-stability, high-adhesion interface basis for subsequent adhesive bonding, metallization plating, multi-layer structure compounding and other processes.

[0003] With the development of COF packaging substrates in the direction of "multi-specification and high precision", the thickness of the substrates shows significant differentiation. Ultra-thin COF packaging substrates have developed rapidly due to the demand for wearable devices, but their shortcomings are also obvious. They have extremely low mechanical strength and weak wrinkle resistance and tear resistance. During activation treatment, the substrate is often placed statically. During the activation process, bubbles will form on the surface of the substrate. The bubbles attached to the surface of the substrate will hinder the contact of the solution, and metal ions can also deposit on the surface of the substrate. During subsequent packaging, short-circuiting phenomenon of conduction is prone to occur. Medium-thickness COF packaging substrates often have double-sided structures or complex topographies such as micro-channels and multiple pores due to the need to carry higher power or complex circuits, and have higher requirements for activation uniformity. The existing COF packaging substrate chemical activation devices are mostly designed for single-thickness substrates, and have poor adaptability, limited activation effect, and low efficiency. In addition, during the activation treatment of the packaging substrate, the substrate is fixed by a clamping device. During the activation process, the clamping device is prone to cause wrinkles or even tears on the substrate. SUMMARY

[0004] In view of the above, in order to overcome the defects of the prior art, the application provides a COF packaging substrate chemical activation treatment device, which at least partially solves the problems raised in the background art.

[0005] The technical scheme adopted by the application is as follows: a COF packaging substrate chemical activation treatment device, comprising an activation box for activation, a first support plate for supporting and fixing is installed on the side wall of the activation box, a lifting assembly is installed on the first support plate, a regulation and control driving assembly is installed at the lower end of the lifting assembly, a linear vibration assembly is movably installed at the upper end of the regulation and control driving assembly, a rotating assembly is movably installed at the lower end of the regulation and control driving assembly, and the rotating assembly and the linear vibration assembly are movably arranged in the activation box; the packaging substrate that needs to be chemically activated is selected according to the linear vibration assembly or the rotating assembly.

[0006] Preferably, the control driving assembly comprises a fixed disc, the fixed disc is arranged at the lower end of the lifting assembly, the inner side wall of the fixed disc is provided with side teeth, the side teeth are provided in multiple groups, the multiple groups of side teeth are arranged on the inner side wall of the fixed disc in a ring shape and at equal intervals, a rotating disc is movably arranged on the fixed disc, the rotating disc is arranged at the lower end of the side teeth, a driven gear is movably arranged on the rotating disc, the driven gear is provided in multiple groups, the multiple groups of driven gears are arranged on the rotating disc in a ring shape and at equal intervals, a driving gear is movably arranged on the rotating disc, the driving gear is arranged at the center position of the rotating disc, the driven gear is arranged outside the driving gear, and the driven gear is in meshing connection with the side teeth.

[0007] Further, a slot hole is arranged on the rotating disc, the slot hole penetrates the rotating disc, a connecting rod is movably arranged in the slot hole, the connecting rod penetrates the rotating disc, the connecting rod arranged at the upper end of the rotating disc is provided with a clamping piece, the clamping piece can be movably clamped between the teeth of the driving gear, and the height of the clamping piece is lower than the height of the driving gear.

[0008] Among them, the upper wall of the driving gear is provided with a sliding groove, the sliding groove comprises a groove and a convex groove, the groove and the convex groove are provided in multiple groups, and the number of the groove and the convex groove is the same, the groove and the convex groove are arranged at intervals, both ends of the groove are connected with the convex groove, both ends of the convex groove are also connected with the groove, and the groove and the convex groove form a ring structure, the inner side walls of the groove and the convex groove are both provided with a limiting groove, and one end of the linear vibration assembly is movably clamped in the sliding groove and the limiting groove.

[0009] Preferably, the linear vibration assembly is provided in multiple groups, the multiple groups of linear vibration assemblies are arranged on the fixed disc in a ring shape and at equal intervals, any group of linear vibration assemblies comprises a fixed block, a driving rod and a first mounting piece, the fixed block is arranged on the upper wall of the fixed disc, the fixed disc supports the fixed block, the upper end of the driving rod movably penetrates the fixed block, one end of the driving rod movably clamped on the fixed block is provided with a connecting piece, the connecting piece is provided with a limiting plate, the connecting piece is movably clamped in the sliding groove, the limiting plate is movably clamped in the limiting groove, and the first mounting piece is arranged at the lower end of the driving rod.

[0010] Among them, the rotating assembly is provided in multiple groups, the number of the multiple groups of rotating assemblies is the same as the number of the driven gears and the linear vibration assemblies, the multiple groups of rotating assemblies are respectively connected with the centers of the driven gears, any group of rotating assemblies comprises a rotating rod and a second mounting piece, the upper end of the rotating rod movably penetrates the rotating disc and is connected with the center of the driven gear, and the second mounting piece is arranged at the lower end of the rotating rod.

[0011] Preferably, a rotating roller is arranged at the lower end of the driving gear, the rotating roller movably penetrates the center of the rotating disc, the lower end of the rotating roller is arranged between the second mounting pieces, and a stirring piece is arranged on the rotating roller between the second mounting pieces.

[0012] The lifting assembly comprises a hydraulic rod and a placing piece, the fixed end of the hydraulic rod is arranged on the first support plate, the placing piece is installed on the movable end of the hydraulic rod, the lower end of the placing piece is provided with the second support plate, and the fixed disc is arranged at the lower end of the second support plate; the hydraulic rod drives the placing piece and the second support plate to move up and down.

[0013] Further, the regulating driving assembly further comprises a motor, the motor is arranged on the second support plate and at the lower end of the placing piece, the output shaft end of the motor is connected with the center of the driving gear, and the motor is matched with a speed reducer, so that the motor can rotate at low speed.

[0014] The first mounting piece is movably provided with a first baffle, the first baffle is movably connected to the end of the first mounting piece, a plurality of first storage compartments are arranged in the first mounting piece, and the first mounting piece, the first baffle and the first storage compartments are all provided with grids, so as to facilitate the flow of liquid; the second mounting piece is movably provided with a second baffle, the second baffle is movably connected to the end of the second mounting piece, a plurality of second storage compartments are arranged in the second mounting piece, and the second mounting piece, the second baffle and the second storage compartments are all provided with grids, so as to facilitate the flow of liquid; the substrates that need to be chemically activated are respectively placed in the first storage compartments or the second storage compartments.

[0015] After the above structure is adopted, the application has the following beneficial effects:

[0016] (1) Since bubbles will be formed on the surface of the substrate during the activation of the liquid and adhere to the surface of the substrate, hindering the contact of the solution, the shaking of the linear vibration assembly and the rotating assembly can both promote the bubbles to separate, and at the same time, the deposition of metal ions on the surface of the substrate is reduced, so as to avoid the phenomenon of short circuit of conduction during subsequent packaging.

[0017] (2) When the driving gear rotates, it can drive the stirring piece to rotate, and the stirring piece can drive the solution to circulate from the center to the outside, so as to avoid the concentration of the activation liquid in the central area from suddenly decreasing due to reaction consumption; at the same time, the driving gear can also drive the rotating disc to rotate, so as to realize the revolution and rotation of the substrates in the second mounting piece, and in the process of continuous rotation and revolution, all the substrates can contact the solution in different areas, so as to avoid the phenomenon of uneven activation of the substrates in the local low-concentration solution.

[0018] (3) Linear vibration combined with rotation can destroy the static boundary layer on the surface of the substrate, especially for the porous PI substrate, which can more quickly promote the penetration of fresh solution.

[0019] (4) Since the first mounting piece and the second mounting piece are both provided with grids, the flow of liquid is facilitated, and the packaging substrate is not fixed by any clamping device, so as to avoid the damage to the substrate caused by clamping, and at the same time, the activation process is not hindered. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of the specification, illustrate embodiments of the application and are used to explain the application, but are not intended to limit the application.

[0021] Figure 1 A structure schematic view of a COF packaging substrate chemical activation treatment device according to the present application;

[0022] Figure 2 A partial enlarged view of A in FIG. 1; Figure 1

[0023] Figure 3 A structure schematic view of a regulating and driving assembly according to the present application;

[0024] Figure 4 A partial enlarged view of B in FIG. 2; Figure 3

[0025] A top view of a regulating and driving assembly according to the present application; Figure 5

[0026] A partial enlarged view of C in FIG. 3. Figure 6 Figure 5 In the drawings: 1, activation box, 2, first support plate, 3, lifting assembly, 4, regulating and driving assembly, 5, linear vibration assembly, 6, rotating assembly, 7, fixed disc, 8, side gear, 9, rotating disc, 10, driven gear, 11, driving gear, 12, connecting rod, 13, clamping piece, 14, groove, 15, protrusion, 16, limiting groove, 17, fixed block, 18, driving rod, 19, first mounting piece, 20, connecting piece, 21, rotating rod, 22, second mounting piece, 23, rotating roller, 24, stirring piece, 25, hydraulic rod, 26, placing piece, 27, motor, 28, first baffle, 29, first storage compartment, 30, second baffle, 31, second storage compartment, 32, second support plate. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0029] ​​It should be noted that, in this article, such as the first and second relationship terms are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0030] As shown in Figures 1-6 A COF packaging substrate chemical activation treatment device, including an activation tank 1 for activation, the activation tank 1 is provided with a first support plate 2 for supporting and fixing, the first support plate 2 is provided with a lifting assembly 3, the lifting assembly 3 is provided with a control driving assembly 4 at the lower end, the control driving assembly 4 is provided with a linear vibration assembly 5 movably at the upper end, the control driving assembly 4 is provided with a rotating assembly 6 movably at the lower end, the rotating assembly 6 and the linear vibration assembly 5 are movably arranged in the activation tank 1; the packaging substrate needs to be chemically activated, and the linear vibration assembly 5 or the rotating assembly 6 is selected according to the activation of the packaging substrate.

[0031] The control driving assembly 4 comprises a fixed disc 7, the fixed disc 7 is arranged at the lower end of the lifting assembly 3, the inner side wall of the fixed disc 7 is provided with a side gear 8, the side gear 8 is provided with a plurality of groups, the plurality of groups of the side gear 8 are arranged in a ring shape and uniformly spaced on the inner side wall of the fixed disc 7, the fixed disc 7 is movably provided with a rotating disc 9, the rotating disc 9 is arranged at the lower end of the side gear 8, the rotating disc 9 is movably provided with a driven gear 10, the driven gear 10 is provided with a plurality of groups, the plurality of groups of the driven gear 10 are arranged in a ring shape and uniformly spaced on the rotating disc 9, the rotating disc 9 is movably provided with a driving gear 11, the driving gear 11 is arranged at the center position of the rotating disc 9, the driven gear 10 is arranged outside the driving gear 11, and the driven gear 10 is connected with the side gear 8.

[0032] The rotating disc 9 is provided with a slot hole, the slot hole penetrates the rotating disc 9, the connecting rod 12 is movably arranged in the slot hole, the connecting rod 12 penetrates the rotating disc 9, the connecting rod 12 arranged at the upper end of the rotating disc 9 is provided with a clamping piece 13, the clamping piece 13 can be movably clamped between the teeth of the driving gear 11, and the height of the clamping piece 13 is lower than the height of the driving gear 11.

[0033] It should be noted that when the rotating disc 9 does not need to rotate with the driving gear 11, the clamping piece 13 does not contact the driving gear 11, and the driving gear 11 can rotate;

[0034] When the rotating disc 9 needs to rotate together with the driving gear 11, the clamping piece 13 is first lifted and then rotated, the clamping piece 13 is arranged at the upper end of the driving gear 11, after the clamping piece 13 is lowered, the clamping piece 13 can be clamped between the gear teeth of the driving gear 11, the connection of the driving gear 11 and the clamping piece 13 is realized, when the driving gear 11 rotates, the rotating disc 9 can be driven to rotate in the fixed disc 7 through the clamping piece 13, when the rotating disc 9 rotates, the driven gear 10 is driven to rotate, since the driven gear 10 is meshed with the gear teeth in the fixed disc 7, the fixed disc 7 is fixedly placed, in the rotating process, the driven gear 10 rotates by itself, when the rotating disc 9 rotates by 90 degrees, the driven gear 10 just rotates by 180 degrees.

[0035] The upper wall of the driving gear 11 is provided with a sliding groove, the sliding groove comprises a groove 14 and a convex groove 15, the groove 14 and the convex groove 15 are both provided with multiple groups, and the number of the groups is the same, the groove 14 and the convex groove 15 are arranged at intervals, the two ends of the groove 14 are connected with the convex groove 15, the two ends of the convex groove 15 are also connected with the groove 14, and the groove 14 and the convex groove 15 form an annular structure, the inner side walls of the groove 14 and the convex groove 15 are both provided with a limiting groove 16, and one end of the linear vibration assembly 5 is movably clamped in the sliding groove and the limiting groove 16.

[0036] The linear vibration assembly 5 is provided with multiple groups, multiple groups of the linear vibration assembly 5 are arranged on the fixed disc 7 in an annular and equal-interval manner, any group of the linear vibration assembly 5 comprises a fixed block 17, a driving rod 18 and a first mounting piece 19, the fixed block 17 is arranged on the upper wall of the fixed disc 7, and the fixed disc 7 supports the fixed block 17, the upper end of the driving rod 18 is movably penetrated through the fixed block 17, one end of the driving rod 18 movably clamped on the fixed block 17 is provided with a connecting piece 20, the connecting piece 20 is provided with a limiting plate, the connecting piece 20 is movably clamped in the sliding groove, and the limiting plate is movably clamped in the limiting groove 16, and the first mounting piece 19 is arranged at the lower end of the driving rod 18.

[0037] It should be noted that the rotation of the driving gear 11 can drive the rotation of the sliding groove thereon, that is, the rotation of the groove 14 and the convex groove 15, since the movement of the driving rod 18 is limited by the fixed block 17, when the groove 14 moves to the position of the connecting piece 20, the driving rod 18 moves in the direction close to the driving gear 11, and when the convex groove 15 moves to the position of the connecting piece 20, the driving rod 18 moves in the direction away from the driving gear 11.

[0038] The rotating assembly 6 is provided with multiple groups, the number of multiple groups of the rotating assembly 6 is the same as that of the driven gear 10 and the linear vibration assembly 5, multiple groups of the rotating assembly 6 are respectively connected with the centers of the driven gears 10, and any group of the rotating assembly 6 comprises a rotating rod 21 and a second mounting piece 22, the upper end of the rotating rod 21 is movably penetrated through the rotating disc 9 and connected with the center of the driven gear 10, and the second mounting piece 22 is arranged at the lower end of the rotating rod 21.

[0039] It should be noted that the rotating disc 9 can drive the rotating assembly 6 to move in a circular motion, and the driven gear 10 can also drive the rotating assembly 6 to rotate.

[0040] The rotating roller 23 is installed at the lower end of the driving gear 11 and movably penetrates the center of the rotating disc 9. The lower end of the rotating roller 23 is arranged between the second mounting members 22, and the stirring member 24 is arranged on the rotating roller 23 between the second mounting members 22.

[0041] It should be noted that the rotating of the driving gear 11 can drive the rotating roller 23 to rotate, and the rotating roller 23 drives the stirring member 24 to rotate.

[0042] The lifting assembly 3 comprises a hydraulic rod 25 and a placing member 26. The fixed end of the hydraulic rod 25 is arranged on the first supporting plate 2, and the placing member 26 is arranged on the movable end of the hydraulic rod 25. The second supporting plate 32 is arranged at the lower end of the placing member 26, and the fixed disc 7 is arranged at the lower end of the second supporting plate 32. The hydraulic rod 25 drives the placing member 26 and the second supporting plate 32 to move up and down.

[0043] The control driving assembly 4 further comprises a motor 27 arranged on the second supporting plate 32 and at the lower end of the placing member 26. The output shaft end of the motor 27 is connected with the center of the driving gear 11, and the motor 27 is provided with a speed reduction device, so that the motor 27 can rotate at a low speed. The motor 27 drives the driving gear 11 to rotate.

[0044] The first baffle 28 is movably arranged on the first mounting member 19. The first baffle 28 is movably connected to the end of the first mounting member 19. A plurality of first storage compartments 29 are arranged in the first mounting member 19. The first mounting member 19, the first baffle 28 and the first storage compartments 29 are all arranged in a grid structure, which facilitates the flow of liquid. The second baffle 30 is movably arranged on the second mounting member 22. The second baffle 30 is movably connected to the end of the second mounting member 22. A plurality of second storage compartments 31 are arranged in the second mounting member 22. The second mounting member 22, the second baffle 30 and the second storage compartments 31 are all arranged in a grid structure, which facilitates the flow of liquid. The substrates that need to be chemically activated are placed in the first storage compartments 29 or the second storage compartments 31.

[0045] The specific use is as follows:

[0046] When the packaged substrate is an ultra-thin flexible substrate, a single-sided structure substrate or a low-strength easily-degradable substrate, the linear vibration assembly 5 is selected for chemical activation treatment.

[0047] The hydraulic rod 25 drives the connection piece 20 and the second supporting plate 32 to move upwards, the second supporting plate 32 and the connection piece 20 drive the remaining devices to move upwards, the first mounting piece 19 is lifted, the first baffle 28 is taken off from the first mounting piece 19, the substrate to be chemically activated is gently put into the first storage grid 29 in sequence, and then the first baffle 28 is inserted into the first mounting piece 19, since the first mounting piece 19, the first baffle 28 and the first storage grid 29 are all provided with grids, the flow of liquid is facilitated, the encapsulated substrate is not fixed by any clamping device, damage to the substrate caused by clamping can be avoided, and the activation treatment is not hindered.

[0048] After installation, the hydraulic rod 25 drives the whole device to move downwards, so that the first mounting piece 19 is entirely soaked in the activation treatment solution, the clamping piece 13 is not in contact with the driving gear 11, the motor 27 slowly rotates to drive the driving gear 11 to rotate, the driving gear 11 drives the stirring piece 24 to stir the activation solution, so that the solution is more uniform, and meanwhile, the driving gear 11 can drive the sliding groove thereon to rotate, that is, the recess 14 and the protrusion 15 are rotated, since the movement of the driving rod 18 is limited by the fixing block 17, when the recess 14 moves to the position of the connection piece 20, the driving rod 18 moves towards the driving gear 11, when the protrusion 15 moves to the position of the connection piece 20, the driving rod 18 moves away from the driving gear 11, in the process of small-amplitude and slow vibration of the driving rod 18, the first mounting piece 19 can be small-amplitude and slowly vibrated, the uniformity of the solution is further improved, local over-reaction is avoided, and the reaction speed is improved.

[0049] When the encapsulated substrate is a medium-high-thickness high-strength substrate, a double-sided structure substrate or a porous complex structure substrate, the rotating assembly 6 is selected for chemical activation treatment.

[0050] The hydraulic rod 25 drives the connection piece 20 and the second supporting plate 32 to move upwards, the second supporting plate 32 and the connection piece 20 drive the remaining devices to move upwards, the second mounting piece 22 is lifted, the second baffle 30 is taken off from the second mounting piece 22, the substrate to be chemically activated is gently put into the second storage grid 31 in sequence, and then the second baffle 30 is inserted into the second mounting piece 22, since the second mounting piece 22, the second baffle 30 and the second storage grid 31 are all provided with grids, the flow of liquid is facilitated, the encapsulated substrate is not fixed by any clamping device, damage to the substrate caused by clamping can be avoided, and the activation treatment is not hindered.

[0051] At this time, the rotating disc 9 and the driving gear 11 need to be rotated together, the clamping piece 13 is lifted first and then rotated, the clamping piece 13 is arranged at the upper end of the driving gear 11, after the clamping piece 13 is put down, the clamping piece 13 can be clamped between the gear teeth of the driving gear 11, so that the connection between the driving gear 11 and the clamping piece 13 is realized.

[0052] After installation, the hydraulic rod 25 drives the overall device to move down, so that the second mounting 22 is immersed in the activation treatment solution as a whole, the motor 27 slowly rotates to drive the driving gear 11 to rotate, the driving gear 11 drives the stirring piece 24 to stir the activation solution, so that the solution is more uniform, and at the same time, the driving gear 11 can drive the sliding groove on it to rotate when rotating, when the groove 14 moves to the position of the connecting piece 20, the driving rod 18 moves towards the driving gear 11, when the convex groove 15 moves to the position of the connecting piece 20, the driving rod 18 moves away from the driving gear 11, and in the process of small amplitude and slow vibration of the driving rod 18, the first mounting 19 can be small amplitude and slow vibration, and in the process of vibration of the first mounting 19, the solution can be shaken, further improving the uniformity of the solution.

[0053] Moreover, the driving gear 11 can drive the rotating disc 9 to rotate in the fixed disc 7 through the clamping piece 13 when rotating, the rotating disc 9 drives the driven gear 10 to rotate when rotating, since the driven gear 10 is engaged with the internal gear of the fixed disc 7, the fixed disc 7 is fixedly placed, and in the process of rotation, the driven gear 10 rotates by itself, when the rotating disc 9 rotates by 90 degrees, the driven gear 10 just rotates by 180 degrees, the rotating disc 9 can drive the rotating assembly 6 to make circular motion when rotating, and at the same time, the driven gear 10 can also drive the rotating assembly 6 to rotate by itself when rotating by itself, so as to facilitate the activation treatment of the base material, in the process of continuous rotation and rotation, all the base materials can contact the solution in different areas, avoiding that the local base material is in low-concentration solution for a long time, and the phenomenon of uneven activation occurs.

[0054] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents. In general, if a person skilled in the art is inspired by it, without departing from the purpose of the present application, without creative design, similar structural modes and embodiments of the technical solutions should belong to the protection scope of the present application.

Claims

1. A COF packaging substrate chemical activation treatment device, comprising an activation tank for activation, a first support plate is mounted on the side wall of the activation tank for support and fixation, a lifting assembly is mounted on the first support plate, a regulation driving assembly is mounted at the lower end of the lifting assembly, a linear vibration assembly is movably mounted on the upper end of the regulation driving assembly, a rotating assembly is movably mounted on the lower end of the regulation driving assembly, and the rotating assembly and the linear vibration assembly are movably arranged in the activation tank. The regulation driving assembly comprises a fixed disc, the fixed disc is arranged at the lower end of the lifting assembly, a side gear is arranged on the inner side wall of the fixed disc, a plurality of side gears are arranged, and the plurality of side gears are arranged in a ring shape and uniformly spaced on the inner side wall of the fixed disc, a rotating disc is movably arranged on the fixed disc, the rotating disc is arranged at the lower end of the side gear, a driven gear is movably arranged on the rotating disc, a plurality of driven gears are arranged, and the plurality of driven gears are arranged in a ring shape and uniformly spaced on the rotating disc, a driving gear is movably arranged on the rotating disc, the driving gear is arranged at the center position of the rotating disc, the driven gear is arranged outside the driving gear, and the driven gear is connected in mesh with the side gear. A sliding groove is arranged on the upper wall of the driving gear, the sliding groove comprises a groove and a convex groove, a plurality of grooves and a plurality of convex grooves are arranged, and the number of the grooves and the convex grooves is the same, the grooves and the convex grooves are arranged at intervals, limit grooves are arranged on the inner side walls of the grooves and the convex grooves, and one end of the linear vibration assembly is movably clamped in the sliding groove and the limit groove. The linear vibration assembly comprises a plurality of groups, the plurality of linear vibration assemblies are arranged in a ring shape and uniformly spaced on the fixed disc, any one of the linear vibration assemblies comprises a fixed block, a driving rod and a first mounting piece, the fixed block is arranged on the upper wall of the fixed disc, the upper end of the driving rod is movably penetrated through the fixed block, one end of the driving rod movably clamped on the fixed block is provided with a connecting piece, and a limiting plate is arranged on the connecting piece. The rotating assembly comprises a plurality of groups, the number of the plurality of rotating assemblies is the same as the number of the driven gears and the linear vibration assemblies, the plurality of rotating assemblies are respectively connected with the centers of the driven gears, any one of the rotating assemblies comprises a rotating rod and a second mounting piece, the upper end of the rotating rod is movably penetrated through the rotating disc and connected with the center of the driven gear, and the second mounting piece is arranged at the lower end of the rotating rod. A rotating roller is mounted at the lower end of the driving gear, the rotating roller is movably penetrated through the center of the rotating disc, the lower end of the rotating roller is arranged between the second mounting pieces, and a stirring piece is arranged on the rotating roller between the second mounting pieces.

2. The COF encapsulation substrate chemical activation processing device according to claim 1, wherein, A slot hole is arranged on the rotating disc, the slot hole penetrates through the rotating disc, a connecting rod is movably arranged in the slot hole, the connecting rod penetrates through the rotating disc, a clamping piece is arranged on the connecting rod arranged at the upper end of the rotating disc, and the clamping piece can be movably clamped between the teeth of the driving gear.

3. The COF encapsulation substrate chemical activation processing apparatus according to claim 2, wherein, The connecting piece is movably clamped in the sliding groove, the limiting plate is movably clamped in the limit groove, and the first mounting piece is arranged at the lower end of the driving rod.

4. The COF encapsulation substrate chemical activation processing apparatus according to claim 3, wherein, The lifting assembly comprises a hydraulic rod and a placing piece, a fixed end of the hydraulic rod is arranged on the first support plate, the placing piece is installed on a movable end of the hydraulic rod, a lower end of the placing piece is installed with the second support plate, and the fixed disc is arranged on a lower end of the second support plate.

5. The COF encapsulation substrate chemical activation processing apparatus according to claim 4, wherein, The control driving assembly further comprises a motor, the motor is arranged on the second support plate and the lower end of the placing piece, and an output shaft end of the motor is connected with the center of the driving gear.

6. The COF encapsulation substrate chemical activation processing apparatus according to claim 5, wherein, A first baffle is movably installed on the first mounting piece, the first baffle is movably connected to the end of the first mounting piece, a plurality of first storage compartments are arranged in the first mounting piece, and the first mounting piece, the first baffle and the first storage compartments are all arranged in a grid manner; a second baffle is movably installed on the second mounting piece, the second baffle is movably connected to the end of the second mounting piece, a plurality of second storage compartments are arranged in the second mounting piece, and the second mounting piece, the second baffle and the second storage compartments are all arranged in a grid manner.

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