Substrate transfer device and transfer method

Abstract

The invention relates to the technical field of semiconductors, and provides a substrate transfer device and a transfer method.The substrate transfer device comprises a storage table, a bearing table and a transfer table; a plurality of first material storage grooves are formed in the material storage table, and a plurality of second material storage grooves are formed in the bearing table; the substrate transfer device is configured in the mode that the material storage table moves to make contact with the transfer table and is positioned by the transfer table, so that the first material storage groove and the second material storage groove directly face each other in the first direction, and a set distance is formed between the substrate in the first material storage groove and the bearing table; the transfer table carries the material storage table to move relative to the bearing table in the first direction so as to transfer the substrates in the first material storage groove into the second material storage groove. According to the substrate transfer device, the phenomenon of wrong groove lamination in the substrate transfer process can be solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a substrate transfer device and a transfer method. BACKGROUND

[0002] In the field of semiconductor manufacturing, a variety of processes are involved, and between each process or within a process, the substrate is usually transferred from its storage component (such as a crystal box or a wafer rack) to the equipment of the process.

[0003] For example, in the material preparation process of the substrate (such as a wafer), polishing, cleaning and other processes are required. Before cleaning, the action of separating the substrate from the storage component needs to be completed, and the substrate needs to be transferred to the support. The transfer process is usually completed in the deionized water (DIW) of the water tank. Because the overflow flow of the DIW in the water tank is large, the DIW will impact the substrate, the storage component and the support, which on the one hand causes the deviation of the separation process of the substrate and the storage component, and on the other hand may cause the relative position of the storage component and the support to change, thereby causing the misalignment and stacking phenomenon in the cooperation process of the substrate and the support.

[0004] Therefore, a substrate transfer device and a transfer method are needed to solve the misalignment and stacking phenomenon in the above substrate transfer process. SUMMARY

[0005] The present application provides a substrate transfer device and a transfer method to solve the misalignment and stacking phenomenon in the above substrate transfer process.

[0006] The substrate transfer device comprises a storage table, a support and a transfer table. The storage table has a plurality of first storage grooves for storing substrates, the support is provided with a plurality of second storage grooves matched with the first storage grooves, and the transfer table is used to position and transfer the storage table. The substrate transfer device is configured to move the storage table to contact the transfer table and be positioned by the transfer table, so that the first storage grooves and the second storage grooves are opposite along a first direction, and the substrates in the first storage grooves have a set distance from the support; the transfer table carries the storage table to move relative to the support along the first direction to transfer the substrates in the first storage grooves to the second storage grooves.

[0007] Optionally, the support comprises a base, a storage part and a driving unit, the storage part is movably arranged on the base, the second storage grooves are arranged on the storage part, and the driving unit is used to drive the storage part to move relative to the base. The storage part is moved relative to the base to adjust the position of the second storage groove, so that each first storage groove is directly opposite each second storage groove along the first direction.

[0008] Optionally, the substrate transfer device further comprises a position detection device configured to detect the relative position error of the first storage groove and the second storage groove along the first direction. The position detection device is configured to drive the storage part to move relative to the base by the driving unit if the relative position error is greater than an error threshold, so that each first storage groove is directly opposite each second storage groove along the first direction.

[0009] Optionally, the storage table further comprises a position locking unit configured to lock the relative position of the base and the storage part.

[0010] Optionally, a through hollow area is provided on the storage table along the first direction, and the first storage groove is located on both sides of the hollow area. When the transfer table carrying the storage table moves relative to the support table along the first direction, the support table passes through the hollow area to transfer the substrate in the first storage groove to the second storage groove.

[0011] Optionally, a first positioning structure is provided on the storage table, and a second positioning structure is provided on the transfer table. When the storage table moves relative to the transfer table, the first positioning structure cooperates with the second positioning structure to position the storage table by the transfer table.

[0012] Optionally, the first positioning structure is a protrusion provided on the storage table, and the second positioning structure is a groove provided on the transfer table, and when the first positioning structure cooperates with the second positioning structure, the protrusion is inserted into the groove.

[0013] The present application also provides a transfer method, comprising the following steps: S1: The storage table moves to contact the transfer table and is positioned by the transfer table, so that the first storage groove is directly opposite the second storage groove along the first direction, and the substrate in the first storage groove has a set distance from the support table. S2: The transfer table carrying the storage table moves relative to the support table along the first direction to transfer the substrate in the first storage groove to the second storage groove.

[0014] Optionally, the steps S1 and S2 further comprise the following steps: detecting a relative position error of the first storage tank and the second storage tank along the first direction, and adjusting the position of the second storage tank if the relative position error of the first storage tank and the second storage tank is greater than an error threshold, so that the position error is not greater than the error threshold.

[0015] Optionally, in the step S1, The storage platform is located above the transfer platform, and when the storage platform moves downward relative to the transfer platform, the storage platform is in contact with and positioned by the transfer platform. And / or, the storage platform is located above the support platform, the first direction is a vertical direction, and when the transfer platform carrying the storage platform moves downward relative to the support platform along the first direction, the substrate in the first storage tank is transferred into the second storage tank.

[0016] In summary, the substrate transfer device comprises a storage platform, a support platform and a transfer platform. The storage platform has a plurality of first storage tanks for storing substrates. The support platform is provided with a plurality of second storage tanks matched with the first storage tanks. The transfer platform is used for positioning and transferring the storage platform. The substrate transfer device is configured to: the storage platform moves into contact with the transfer platform and is positioned by the transfer platform, so that the first storage tank and the second storage tank are opposite along a first direction, and the substrate in the first storage tank has a set distance from the support platform; and the transfer platform carrying the storage platform moves relative to the support platform along the first direction to transfer the substrate in the first storage tank into the second storage tank.

[0017] In the substrate transfer device, during the substrate transfer process, the storage platform is first positioned in contact with the transfer platform. During this positioning process, the substrates stored in the storage platform do not come into contact with the support platform, so as to ensure that the substrates are still in the first storage tanks. At this time, the substrates will not be washed by the DIW and thus will not be unstable, effectively eliminating the influence of water flow during the transfer process and helping to improve the phenomenon of stacked substrates or misaligned tanks during the substrate transfer process. After the storage platform is positioned, the first storage tank and the second storage tank are opposite to each other to ensure the position accuracy, and then the support platform carrying the storage platform moves along the opposite direction to transfer the substrate from the first storage tank into the second storage tank, thereby ensuring the transfer accuracy of the substrate and further improving the phenomenon of stacked substrates or misaligned tanks during the substrate transfer process. Moreover, the substrate transfer operation is performed after the storage platform is positioned by the transfer platform, which can ensure the stability of the storage platform during the substrate transfer process and effectively prevent the instability phenomenon of the storage platform caused by the washing of water flow, thereby improving the stability and accuracy of the substrate transfer. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 FIG. 1 is a structural schematic diagram of a substrate transfer process of a substrate transfer device according to an embodiment of the present application. Figure 2 A top view of a substrate transfer device according to an embodiment of the present application; Figure 3 A structure diagram of a support platform according to an embodiment of the present application Figure 1 ; Figure 4 A structure diagram of a support platform according to an embodiment of the present application Figure 2 ; Figure 5 A structure diagram of a support platform according to an embodiment of the present application Figure 3 ; Figure 6 A structure diagram of a support platform according to an embodiment of the present application Figure 4 ; Figure 7 An adjusted state of a support platform according to an embodiment of the present application Figure 1 ; Figure 8 An adjusted state of a support platform according to an embodiment of the present application Figure 2 .

[0019] In the drawings: 10 - a storage platform; 11 - a first positioning structure; 20 - a support platform; 21 - a second storage groove; 211 - a middle groove; 212 - a side groove; 201 - a base; 202 - a storage part; 203 - a driving unit; 204 - a position locking unit; 205 - a sliding platform; 206 - a sliding groove; 207 - a supporting surface; 208 - a supporting part; 209 - a locking groove; 210 - a wedge block; 30 - a transfer platform; 31 - a second positioning structure; 40 - a substrate; a - a first direction. DETAILED DESCRIPTION

[0020] The substrate transfer device and the transfer method according to the present application will be further described in detail below in conjunction with the drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the drawings are all in a very simplified form and all use non-precise proportions, only for the purpose of facilitating and clarifying the description of the embodiments of the present application.

[0021] In the present application, "outer diameter" and "inner diameter" correspond to the diameter size for circular structures, and for non-circular structures, the inner diameter refers to the diameter of its inscribed circle, and the outer diameter refers to the diameter of its circumscribed circle; "axial direction" corresponds to the direction of the axis for cylindrical rods, and for non-cylindrical rods, the axial direction corresponds to the length direction of the rod.

[0022] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “joined,” and “set” on one element by another should be interpreted broadly, generally indicating only a connection, coupling, mating, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0023] This embodiment provides a substrate transfer device, including: a storage platform 10, a support platform 20, and a transfer platform 30.

[0024] Please refer to Figures 1 to 3 As shown, the storage platform 10 has a plurality of first storage slots (not shown in the figure), which are used to store the substrate 40.

[0025] The first storage slots on the storage platform 10 are arranged in parallel and at equal intervals, and each first storage slot is used to store a substrate 40. The first storage slots are located on the upper surface of the storage platform 10 and are vertically opened. The substrate 40 is in an upright position, and the lower half of the substrate 40 is inserted into the first storage slot.

[0026] Furthermore, the storage platform 10 has a vertically oriented hollow area in its center, with the first storage troughs located on both sides of the hollow area. For example, the storage platform 10 can be configured as an approximately trapezoidal box structure, wider at the top and narrower at the bottom, with the inner cavity of the storage platform 10 serving as the hollow area. The first storage troughs are formed on the side walls of the hollow area. When the substrate is in an upright position, the lowest point of the lower half of the substrate faces the hollow area, and the radial sides of the lowest point are respectively inserted into the first storage troughs on both sides of the hollow area. The storage platform 10 can adopt a structure consistent with existing equipment, which will not be described in detail here.

[0027] Please continue to refer to Figures 1 to 3 As shown, the initial position, the platform 20 is located below the storage platform 10. The platform 20 is provided with a plurality of second storage tank 21 matched with each first storage tank; each second storage tank 21 is parallel and equidistantly arranged, and each second storage tank 21 is used for storing a substrate (the stored substrate is transferred from the first storage tank). The second storage tank 21 is arranged on the upper surface of the platform 20 and vertically opened, and the substrate is vertically inserted into the second storage tank 21.

[0028] Along the vertical projection, the shape of the platform 20 is smaller than the shape of the hollow area on the storage platform 10. To ensure that the platform 20 can vertically pass through the hollow area.

[0029] Therefore, when the platform 20 passes through the hollow area of the storage platform 10 from bottom to top, the bottom position of the substrate stored on the storage platform 10 is first inserted into the second storage tank 21, and then as the platform 20 goes up, the substrate is lifted to separate the substrate from the storage platform 10, and the purpose of transferring the substrate from the first storage tank to the second storage tank 21 is achieved.

[0030] Please continue to refer to Figures 1 to 3 As shown, the transfer platform 30 is used for positioning and transferring the storage platform 10.

[0031] The transfer platform 30 can be driven by a driving device matched therewith, which can use existing devices, which will not be described here. The initial position of the transfer platform 30 is below the storage platform 10.

[0032] The upper surface of the storage platform 10 is provided with a first positioning structure 11, and the transfer platform 30 is provided with a second positioning structure 31. When the storage platform 10 moves vertically downward relative to the transfer platform 30, the first positioning structure 11 cooperates with the second positioning structure 31, so that the storage platform 10 is positioned by the transfer platform 30. The storage platform 10 can be driven by a driving device matched therewith, which uses existing devices, which will not be described here.

[0033] Combined Figure 3 As shown, in the embodiment, the first positioning structure 11 is a protrusion arranged on the storage platform 10, and the second positioning structure 31 is a groove arranged on the transfer platform 30. When the storage platform 10 moves vertically downward relative to the transfer platform 30, the protrusion is inserted into the groove, so that the first positioning structure 11 cooperates with the second positioning structure 31, and the storage platform 10 is positioned by the transfer platform 30.

[0034] In this embodiment, the protrusions and the recesses are cuboid structures. In other alternative embodiments, the protrusions can be provided in a conical or hemispherical structure, and the recesses are adapted to the shape of the protrusions. This arrangement makes the protrusions and the recesses more convenient to cooperate, i.e. even if there is a positional deviation (which is usually small) between the storage table 10 and the transfer table 30, resulting in a misalignment of the protrusions and the recesses, the structure of the protrusions and the recesses also allows the protrusions to be slid into the recesses, and the cooperation of the protrusions and the recesses achieves automatic correction of the position. In addition, in other alternative embodiments, The substrate transfer device is configured such that the storage table 10 moves along the first direction a (vertically) to contact the transfer table 30, at which time the first positioning structure 11 cooperates with the second positioning structure 31, and the storage table 10 is positioned by the transfer table 30, so that the first storage groove and the second storage groove 21 are directly opposite along the first direction a, and the substrate 40 in the first storage groove has a set distance from the support table 20 (the set distance can be set based on actual requirements to ensure that the substrate 40 does not contact the support table 20 at this time). The set distance ensures that when the storage table 10 is positioned, the bottom of the substrate 40 stored inside the storage table 10 will not be inserted into the second storage groove 21 inside, and also ensures that the substrate will not be lifted by the support table 20, reducing the influence of water flow on the substrate stability. Then the transfer table 30 carrying the storage table 10 moves relative to the support table 20 along the first direction a (vertically downward), the support table 20 passes through the hollow area, and the bottom of the substrate 40 stored in the storage table 10 is inserted into the second storage groove 21 of the support table 20, and the substrate is lifted by the support table 20 so that the substrate is separated from the storage table 10, to transfer the substrate in the first storage groove into the second storage groove 21.

[0035] The substrate transfer device described above, in the process of transferring the substrate, first positions the storage table 10 in contact with the transfer table 30, and in this positioning process, the substrate stored in the storage table 10 will not contact the support table 20, to ensure that the substrate is still in the first storage groove, and at this time the substrate will not be destabilized by the DIW, effectively eliminating the influence of water flow during the transfer process, and helping to improve the phenomenon of laminated substrates or misaligned grooves during the substrate transfer process. After the storage table 10 is positioned, the first storage groove and the second storage groove 21 are directly opposite, and then the support table 20 carrying the storage table 10 moves along the direction of the direct opposite, so that the substrate is transferred from the first storage groove into the second storage groove 21, to ensure the transfer accuracy of the substrate, and further improve the phenomenon of laminated substrates or misaligned grooves during the substrate transfer process. Moreover, the substrate transfer operation is performed after the storage table 10 is positioned by the transfer table 30, which can ensure the stability of the storage table 10 during the substrate transfer process, effectively preventing the destabilization of the storage table 10 caused by water flow, and further improving the substrate transfer stability and substrate transfer accuracy.

[0036] The above substrate transfer process adopts the sequence of first positioning (the storage table 10 first contacts and positions with the transfer table 30) and then transferring (the substrate then contacts with the support table 20). In contrast, the sequence of first transferring (the substrate first contacts with the support table 20) and then positioning (the storage table 10 then positions with the transfer table 30 and is transferred through the transfer table 30). In the transfer process, the storage table 10 is not positioned during the transfer of the substrate from the first storage groove to the second storage groove. If the storage table 10 only moves by the mechanical arm clamping, its stability is poor under the water flow, which can easily cause large positional deviation between the first storage groove and the second storage groove, and further cause the stacking or misplacement of the substrate. At the same time, the DIW flows in the second storage groove during the transfer process, which can wash the substrate and cause the instability of the substrate, further aggravating the stacking or misplacement of the substrate.

[0037] In combination with Figure 1 In the embodiment, the first positioning structure 11 (protrusion) is provided with two and is located at the horizontal radial two sides of the storage table 10, and the first positioning structure 11 (protrusion) is in L shape, one side of which is horizontally connected to the outside of the storage table 10, and the other side is vertically downward. The second positioning structure 31 (groove) is provided with two and is located on the upper surface of the transfer table 30, and the middle part of the transfer table 30 is also provided with a hollow area, and the two second positioning structures 31 are located on the two sides of the hollow area. The setting of the hollow area can also be passed through the support table 20 to prevent interference during the transfer of the substrate. When the storage table 10 contacts with the transfer table 30, the vertical edges of the two first positioning structures 11 are respectively inserted into the interiors of the two second positioning structures 31. In other alternative embodiments, the first positioning structure 11 can be provided as a groove structure, and the second positioning structure 31 can be provided as a protrusion structure, and the specific structural form of the first positioning structure 11 and the second positioning structure 31 can be adjusted based on actual needs.

[0038] In the embodiment, the transfer table 30 has the functions of positioning the storage table 10 and transferring the storage table 10. After the substrate is transferred to the support table 20, the mechanical arm sequentially transfers the wafer, and the storage table 10 is empty, at which time the storage table 10 needs to be transferred to the designated position through the transfer table 30. The specific driving structure of the transfer table 30 can be consistent with the existing structure, which will not be described here.

[0039] In the embodiment, the storage table 10, the support table 20 and the transfer table 30 are vertically arranged, the first direction a corresponds to the vertical direction, and therefore the support table 20 and the transfer table 30 move along the vertical direction. In other alternative embodiments, the relative positional relationship and the relative movement direction of the storage table 10, the support table 20 and the transfer table 30 can be adjusted based on actual needs.

[0040] Further, the bearing platform 20 comprises a base 201, a storage part 202 and a driving unit 203, the storage part 202 is movably arranged on the base 201, the second storage groove is arranged on the storage part 202, and the driving unit 203 is used for driving the storage part 202 to move relative to the base 201. When the storage part 202 moves relative to the base 201, the position of the second storage groove is adjusted, so that each first storage groove and each second storage groove 21 are opposite along the first direction a.

[0041] In combination Figures 4 to 6 As shown in the embodiment, the base 201 is a cuboid structure as a whole, and the position locking unit 204 is arranged on the base 201. The inside of the base 201 is provided with a sliding table 205 along the length direction.

[0042] The middle part of the base 201 is provided with a sliding groove 206, and the sliding table 205 is slidably arranged in the sliding groove 206. In addition, the upper part of the base 201 is provided with a through groove in communication with the sliding groove 206, and the sliding table 205 is connected with the storage part 202 through a middle piece penetrating through the through groove. Therefore, when the sliding table 205 linearly slides in the sliding groove 206, the storage part 202 is driven to linearly move. The bottom of the storage part 202 is attached to the top of the base 201.

[0043] The driving unit 203 can be used to drive the sliding table 205 to move and further drive the storage part 202 to move. Figure 4 and Figure 5 The driving unit 203 comprises a knob, and further comprises a gear and a rack structure. The knob is in transmission cooperation with the gear, the gear is engaged with the rack, and the rack is fixed to the sliding table 205. Therefore, when the knob is rotated, the gear is driven to rotate, the rack is driven to linearly move through the rotation of the gear, and further the sliding table 205 is driven to linearly move in the sliding groove 206. In addition, in order to ensure the adjustment accuracy, two gears can be arranged. A small gear is connected with the knob, the small gear is engaged with a large gear, and the large gear is engaged with the rack, so as to form a larger transmission ratio. At this time, the rotation of the knob can realize the accurate adjustment of the positions of the rack, the sliding table 205 and the storage part 202. Preferably, one rotation of the knob changes the displacement of the storage part 202 by 0.1mm, and further realizes the precision of the position adjustment of the first storage groove.

[0044] In combination Figure 7 and Figure 8 As shown in the embodiment, the position adjustment of the storage part 202 to the left is realized by counterclockwise rotation of the knob, and the position adjustment of the storage part 202 to the right is realized by clockwise rotation of the knob.

[0045] In other alternative embodiments, the driving unit 203 can also adopt hydraulic structure or linear motor to achieve linear driving of the sliding table 205. Or the driving unit 203 can also adopt the way of worm gear cooperating with rack, in which the worm is connected with the knob, the worm engages with the turbine, and the turbine also engages with the rack to achieve greater transmission ratio. The specific form of the driving unit 203 can be adjusted based on actual needs.

[0046] Please continue to refer to Figure 5 As shown, in the embodiment, the cross section of the sliding table 205 is approximately dovetail-shaped with the top larger than the bottom, and the top position has a protrusion. The sliding groove 206 is shaped to match the cross section of the sliding table 205, so that the sliding table 205 is adapted to cooperate with the sliding groove 206 to ensure the single degree of freedom linear motion of the sliding table 205. The inclined surface structure of the sliding groove 206 and the wedge effect of the sliding table 205 distribute the load to a larger contact surface, which can withstand a larger radial force. In other alternative embodiments, the sliding table 205 and the sliding groove 206 can be provided in a rectangular structure or other structures. The specific structure of the sliding table 205 and the sliding groove 206 can be adjusted based on actual needs.

[0047] Please continue to refer to Figure 5 As shown, in the embodiment, the upper surface of the storage part 202 has an upwardly enlarged recess, the two side slopes of the recess serve as the supporting surfaces 207, and the bottom of the recess has an upwardly protruding supporting part 208, which is lower than the supporting surfaces 207. In combination with Figure 6 As shown, the second storage groove 21 includes a middle groove 211 and two side grooves 212, wherein the middle groove 211 is opened on the upper surface of the supporting part 208, and the two side grooves 212 are respectively opened on the two supporting surfaces 207. Moreover, the middle groove 211 and the two side grooves 212 are opposite along the width direction of the storage part 202. In addition, the second storage groove 21 is provided with multiple groups and arranged along the length direction of the storage part 202.

[0048] When the substrate is stored in the second storage groove 21, the lower half of the substrate is inserted into the middle groove 211 at the lowest position, and the positions on the two sides of the lowest position are respectively inserted into the two side grooves 212, so as to ensure the stable support of the substrate.

[0049] In other alternative embodiments, the upper surface of the storage part 202 can be provided in a circular arc shape, and then the second storage groove 21 can be provided in an arc-shaped groove. The specific structure of the storage part 202 and the shape of the second storage groove 21 can be adjusted based on actual needs.

[0050] Please continue to refer to Figure 5The position locking unit 204 is used to lock the relative position of the base 201 and the storage part 202. The position locking unit 204 comprises a knob. The position locking unit 204 further comprises a screw rod, the knob is connected with the screw rod, the screw rod is threadedly connected with the base 201, one end of the screw rod is located in the sliding groove 206, and the screw rod is abutted against the side of the sliding table 205 by screwing, so that the sliding table 205 is locked, and the position of the storage part 202 is locked.

[0051] As shown in Figure 5 The side of the sliding table 205 is in an inclined structure, and a locking groove 209 is formed in one side wall of the sliding groove 206. A wedge-shaped block 210 is stored in the locking groove 209, the inclined surface of the wedge-shaped block 210 is in conformal contact with the side of the sliding table 205, and one end of the screw rod is abutted against the right-angled side of the wedge-shaped block 210. Therefore, when the knob of the position locking unit 204 is screwed, the screw rod pushes the wedge-shaped block 210 to press against the side of the sliding table 205, so that the sliding table 205 is locked.

[0052] In other alternative embodiments, the position locking unit 204 can be a hydraulic structure or a linear motor, and the specific structure of the position locking unit 204 can be adjusted based on actual needs.

[0053] The abutment 20 described above can be applied to substrate transfer of various slot machines, and has a wide range of applications.

[0054] Further, the substrate transfer device further comprises a position detection device, and the position detection device is used to detect the relative position error of the first storage groove and the second storage groove 21 along the first direction a; The position detection device is configured to: if the relative position error of the first storage groove and the second storage groove 21 is greater than an error threshold, drive the storage part 202 to move relative to the base 201 through the driving unit 203, so that each first storage groove and each second storage groove 21 are directly opposite along the first direction a.

[0055] The position detection device is provided for position correction of the first storage groove and the second storage groove 21. For example, when the storage table 10 and the abutment 20 are positioned, the positions of the first storage groove and the second storage groove 21 still have deviations. At this time, the error signal is sent to the driving unit 203 through the position detection device, the driving unit 203 is actuated to drive the storage part 202 to move, so that the relative position error of the first storage groove and the second storage groove 21 is not greater than the error threshold, and the position correction of the first storage groove and the second storage groove 21 is realized.

[0056] The position detection device can be a distance sensor, which is arranged on the storage table 10. When the storage table 10 is positioned on the support table 20, the distance sensor detects the distance between the storage table 10 and the support table 20 along the arrangement direction of the first storage groove and the second storage groove 21, and converts the distance into the relative position relationship between the first storage groove and the second storage groove 21, so as to determine the position accuracy of the two, and then realize the real-time adjustment of the position.

[0057] In other alternative embodiments, the position detection device can detect the relative position error between the first storage groove and the second storage groove 21 through image recognition.

[0058] Further, the embodiment also provides a transfer method, which comprises the following steps: S1: The storage table 10 is moved to contact the transfer table 30, and is positioned by the transfer table 30, so that the first storage groove and the second storage groove 21 are opposite along the first direction a, and the substrate in the first storage groove has a set distance from the support table 20.

[0059] Specifically, as shown in Figure 1 , the storage table 10 is moved to contact the transfer table 30 along the first direction a (vertically), and at this time, the first positioning structure 11 cooperates with the second positioning structure 31, and the storage table 10 is positioned by the transfer table 30, so that the first storage groove and the second storage groove 21 are opposite along the first direction a, and the substrate in the first storage groove has a set distance from the support table 20 (the set distance can be set based on actual needs to ensure that the substrate does not contact the support table 20 at this time). The setting of the set distance ensures that when the storage table 10 is positioned, the bottom of the substrate stored in the storage table 10 will not be inserted into the second storage groove 21, and also ensures that the substrate will not be lifted by the support table 20 to ensure the stability of the substrate.

[0060] S2: The transfer table 30 carries the storage table 10 to move relative to the support table 20 along the first direction a to transfer the substrate in the first storage groove into the second storage groove 21.

[0061] Specifically, as shown in Figure 1 , the transfer table 30 carries the storage table 10 to move relative to the support table 20 along the first direction a (vertically downward), the support table 20 passes through the hollow area of the storage table 10, the bottom of the substrate stored in the storage table 10 is inserted into the second storage groove 21 of the support table 20, and the substrate is lifted by the support table 20 to separate the substrate from the storage table 10, so as to transfer the substrate in the first storage groove into the second storage groove 21.

[0062] The substrate transfer method, in the process of transferring the substrate, first makes the storage table 10 contact and position with the transfer table 30, and in the positioning process, the substrate stored in the storage table 10 will not contact with the support table 20, so as to ensure that the substrate is still in the first storage groove, and at this time, the substrate will not be washed by the DIW to cause instability, which helps to improve the phenomenon of stacking or mis-slotting in the substrate transfer process. After the storage table 10 is positioned, the first storage groove and the second storage groove 21 are ensured to be opposite, and then the support table 20 carries the storage table 10 to move along the opposite direction, so that the substrate is transferred from the first storage groove to the second storage groove 21, thereby ensuring the transfer accuracy of the substrate and further improving the phenomenon of stacking or mis-slotting in the substrate transfer process.

[0063] Further, the steps S1 and S2 further include the following steps: Detecting the relative position error of the first storage groove and the second storage groove 21 along the first direction a, and if the relative position error of the first storage groove and the second storage groove 21 is greater than the error threshold, adjusting the position of the second storage groove so that the position error is not greater than the error threshold.

[0064] Specifically, the relative position error of the first storage groove and the second storage groove 21 can be detected by a position detection device. The position detection device can be, for example, a distance sensor, which can be arranged on the storage table 10. When the storage table 10 is positioned with the support table 20, the distance sensor detects the distance between the storage table 10 and the support table 20 along the arrangement direction of the first storage groove and the second storage groove 21. Specifically, the distance between the set position of the storage table 10 and the set position on the support table 20 can be detected. When the first storage groove and the second storage groove 21 are opposite, the distance between them is the standard distance. When the distance between them deviates greatly from the standard distance, it is considered that there is a deviation in the relative position of the first storage groove and the second storage groove 21. Therefore, the distance between the storage table 10 and the support table 20 can be converted into the relative position relationship of the first storage groove and the second storage groove 21, and further converted into the relative position error of the first storage groove and the second storage groove 21. The position error is compared with the error threshold to judge the position accuracy of the two, and then the position is adjusted in real time.

[0065] When the storage table 10 is positioned with the support table 20, the positions of the first storage groove and the second storage groove 21 have a deviation. At this time, the error signal is sent to the driving unit 203 (at this time, the driving unit 203 needs to use an electric device such as a motor or a hydraulic cylinder) through the position detection device to drive the storage part 202 to move, so as to correct the positions of the first storage groove and the second storage groove 21.

[0066] Through the above steps, the correction of the first storage groove and the second storage groove 21 before the substrate transfer is realized, so as to ensure the position accuracy in the transfer process and further improve the phenomenon of stacking or mis-slotting in the substrate transfer process.

[0067] In other alternative embodiments, the above position detection process can also be performed before step S1 or after step S2. For example, the relative positions of the first and second material storage grooves 21 can be detected before the positioning of the material storage table 10 and the transfer table 30, and the position correction can be performed. Alternatively, after step S2, when the material storage table 10 is transferred to the designated position by the transfer table 30, the relative position detection between the material storage table 10 and the support table 20 model can be performed on the testing machine table to detect the relative positions of the first and second material storage grooves 21 and perform the position correction. At this time, the correction process is after the substrate transfer process, so the correction is convenient for manual intervention.

[0068] In the above detection method, the material storage table 10 is located above the transfer table 30, and when the material storage table 10 moves downward relative to the transfer table 30, the material storage table 10 contacts the transfer table 30. The material storage table 10 is located above the support table 20, the first direction a is a vertical direction, and the transfer table 30 carrying the material storage table 10 moves downward relative to the support table 20 along the first direction a.

[0069] This arrangement helps to simplify the movement of each component in the substrate transfer process, improve the substrate transfer efficiency, and facilitate the positioning of the first and second material storage grooves 21.

[0070] Each embodiment in the specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between each embodiment can be referred to each other.

[0071] The above description is only a description of the preferred embodiments of the present application, and does not limit the scope of the present application. Any modification or modification made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A substrate transfer device, comprising: The substrate transfer device comprises: a storage platform, a supporting platform and a transfer platform; the storage platform is provided with a plurality of first storage grooves for storing substrates; the supporting platform is provided with a plurality of second storage grooves matched with the first storage grooves; the transfer platform is used for positioning and transferring the storage platform; the substrate transfer device is configured to: the storage platform moves to contact the transfer platform and is positioned by the transfer platform, so that the first storage grooves and the second storage grooves face each other in a first direction, and the substrates in the first storage grooves have a set distance from the supporting platform; the transfer platform carries the storage platform to move relative to the supporting platform in the first direction to transfer the substrates in the first storage grooves to the second storage grooves.

2. The substrate transfer apparatus of claim 1, wherein the supporting platform comprises a base, a storage part and a driving unit, the storage part is movably arranged on the base, the second storage grooves are arranged on the storage part, and the driving unit is used for driving the storage part to move relative to the base; when the storage part moves relative to the base, the position of the second storage grooves is adjusted so that each of the first storage grooves and each of the second storage grooves face each other in the first direction.

3. The substrate transfer device of claim 2, wherein, the substrate transfer device further comprises a position detection device for detecting the relative position error of the first storage grooves and the second storage grooves in the first direction; the position detection device is configured to: if the relative position error is greater than an error threshold, drive the storage part to move relative to the base by the driving unit so that each of the first storage grooves and each of the second storage grooves face each other in the first direction.

4. The substrate transfer apparatus of claim 2, wherein the storage platform further comprises a position locking unit for locking the relative position of the base and the storage part.

5. The substrate transfer apparatus of claim 1, wherein a through hollow area is arranged on the storage platform in the first direction, and the first storage grooves are located on both sides of the hollow area; when the transfer platform carries the storage platform to move relative to the supporting platform in the first direction, the supporting platform passes through the hollow area to transfer the substrates in the first storage grooves to the second storage grooves.

6. The substrate transfer apparatus of claim 1, wherein a first positioning structure is arranged on the storage platform, and a second positioning structure is arranged on the transfer platform; when the storage platform moves relative to the transfer platform, the first positioning structure cooperates with the second positioning structure to position the storage platform by the transfer platform.

7. The substrate transfer apparatus of claim 6, wherein the first positioning structure is a protrusion arranged on the storage platform, the second positioning structure is a groove arranged on the transfer platform, and when the first positioning structure cooperates with the second positioning structure, the protrusion is inserted into the groove.

8. A transfer method based on the substrate transfer apparatus according to any one of claims 1 or 7, characterized by, the steps comprise: S1: the storage platform moves to contact the transfer platform and is positioned by the transfer platform, so that the first storage grooves and the second storage grooves face each other in a first direction, and the substrates in the first storage grooves have a set distance from the supporting platform; S2: the transfer platform carries the storage platform to move relative to the supporting platform in the first direction to transfer the substrates in the first storage grooves to the second storage grooves.

9. The transfer method according to claim 8, wherein, the steps S1 and S2 further comprise the following steps: Detecting a relative position error of the first storage tank and the second storage tank along the first direction, if the relative position error of the first storage tank and the second storage tank is greater than an error threshold, adjusting the position of the second storage tank so that the position error is not greater than the error threshold.

10. The transfer method of claim 8, wherein, In the step S1: The storage table is located above the transfer table, and when the storage table moves downward relative to the transfer table, the storage table is in contact with and positioned by the transfer table; And / or, the storage table is located above the support table, the first direction is a vertical direction, and when the transfer table carrying the storage table moves downward relative to the support table along the first direction, the substrate in the first storage tank is transferred to the second storage tank.

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