Automatic patch suction nozzle quick replacement device and method

By combining the magnetic suction nozzle device with the gradient magnetic field generator, and utilizing Hall sensors and PID algorithms, the nozzle can be quickly replaced and compensated in real time. This solves the problem of insufficient verticality and positioning accuracy of traditional patch nozzles during replacement, and improves production efficiency and intelligent nozzle storage management.

CN120914156BActive Publication Date: 2026-03-0310TH RES INST OF CETC
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Patent Information

Application Number
CN202511431032.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-10-09
Publication Date
2026-03-03
Estimated Expiration
2045-10-09

AI Technical Summary

Technical Problem

Traditional surface mount nozzles suffer from problems such as difficulty in ensuring verticality, low replacement efficiency, insufficient positioning accuracy, and unintelligent storage management during replacement, which cannot meet the needs of high-frequency and multi-variety flexible production.

Method used

By combining a magnetic suction nozzle device with a gradient magnetic field generator, and using Hall effect sensor monitoring and PID algorithm adjustment, the device enables rapid nozzle replacement and real-time compensation. Combined with air film suspension technology and RFID identification, it achieves contactless storage and intelligent management.

Benefits of technology

It achieves convenient nozzle replacement and positioning accuracy and stability during operation, improves production efficiency, reduces mechanical wear, and avoids operational errors and positioning deviations.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application belongs to the technical field of semiconductor device processing, and particularly relates to an automatic patch suction nozzle quick replacement device and method. The technical scheme is as follows: an automatic patch suction nozzle quick replacement device, comprising a magnetic suction nozzle device and a control system, the magnetic suction nozzle device comprising a mounting base and a suction nozzle sleeved in the mounting base, a gradient magnetic field generating device being installed in the mounting base, a permanent magnet ring being installed on the suction nozzle, a spring being connected between the gradient magnetic field generating device and the permanent magnet ring, and a plurality of Hall sensors being installed on the mounting base, the Hall sensors and the gradient magnetic field generating device being electrically connected with the control system. The application provides an automatic patch suction nozzle quick replacement device and method, which can not only ensure the convenience of suction nozzle replacement, but also ensure the positioning accuracy and stability in the patch operation process.
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Description

Technical Field

[0001] This invention belongs to the field of semiconductor device processing technology, and specifically relates to an automatic placement nozzle quick-change device and method. Background Technology

[0002] In semiconductor packaging and electronic component mounting, the chip mounting nozzle is a core component of chip mounting equipment. Its function is to precisely mount the chip to a designated position on the substrate using negative pressure. Traditional nozzles are typically fixed to the end of the mounting head using a threaded mounting method, and are replaced via a rotation mechanism in the XZ plane. However, this structure has significant drawbacks in practical applications: First, during rotation replacement, it is difficult to ensure the perpendicularity of the nozzle to the bonding surface, resulting in uneven force when the nozzle end contacts the chip, which can easily cause stress concentration at the chip edge, leading to cracking or damage. Second, the threaded connection requires multiple manual tightening operations, resulting in low production changeover efficiency and making it difficult to meet the needs of high-frequency, multi-variety flexible production.

[0003] To address the nozzle perpendicularity issue, existing technologies often employ high-precision mechanical leveling mechanisms or visual compensation systems. For example, servo motors drive fine-tuning of the nozzle angle, or cameras provide real-time feedback on positional deviations. However, these solutions are structurally complex, require additional leveling time, and have limited dynamic response speed, failing to completely eliminate micron-level misalignment during high-speed placement. Regarding rapid nozzle replacement, some improvements attempt to replace threaded connections with snap-fit ​​or spring-locking structures. While this shortens disassembly and assembly time, mechanical wear leads to significant reductions in positioning accuracy, resulting in nozzle loosening or concentricity deviations after prolonged use. Furthermore, traditional nozzle storage often uses linearly arranged tray structures, requiring multi-axis robotic arms for handling during replacement. This not only occupies significant space but also extends changeover cycles due to long movement paths.

[0004] In recent years, magnetic connection technology has been widely used in industrial fixtures due to its ability to achieve rapid alignment without physical contact. However, when directly applied to chip mounting nozzles, ordinary magnetic structures suffer from drawbacks such as uncontrollable attraction force direction and weak shear resistance. When the nozzle is subjected to lateral forces (such as chip impact or high-speed inertia), it is prone to micro-displacement or tilting, leading to chip placement misalignment. Furthermore, existing nozzle storage solutions lack intelligent management methods, requiring manual verification of model numbers during product changeovers, which can easily result in mixed-material accidents due to operational errors. In high-speed precision manufacturing scenarios, mechanical friction between the nozzle and the storage location can also cause surface wear, potentially contaminating the chip or reducing positioning accuracy over long-term use. Summary of the Invention

[0005] In order to solve the above-mentioned problems in the prior art, the purpose of this invention is to provide an automatic placement nozzle quick change device and method, which can not only ensure the convenience of nozzle change, but also ensure the positioning accuracy and stability during the placement process.

[0006] The technical solution adopted in this invention is as follows:

[0007] An automatic patch nozzle quick-change device includes a magnetic suction nozzle device and a control system. The magnetic suction nozzle device includes a mounting base and a nozzle sleeved in the mounting base. A gradient magnetic field generator is installed in the mounting base. A permanent magnet ring is installed on the nozzle. A spring connects the gradient magnetic field generator and the permanent magnet ring. Several Hall sensors are installed on the mounting base. The Hall sensors and the gradient magnetic field generator are electrically connected to the control system.

[0008] The nozzle of this invention has a permanent magnet ring fixedly installed at its end, which cooperates with the gradient magnetic field generator installed in the mounting base to form a stable vertical adsorption force at the contact surface. The nozzle can be quickly adsorbed and replaced by controlling the activation of the gradient magnetic field generator. A spring provides an elastic connection between the nozzle and the mounting base, effectively buffering the impact force experienced by the nozzle during operation. Several Hall sensors are evenly distributed circumferentially on the side wall of the mounting base for real-time monitoring of the magnetic field distribution. When the Hall sensors detect a nozzle offset exceeding 30μm, the control system immediately uses a PID algorithm to dynamically adjust the current distribution of each electromagnet in the gradient magnetic field generator, achieving real-time compensation and adjustment of the magnetic field, thereby ensuring that the nozzle always maintains a precise vertical positioning.

[0009] This invention utilizes the synergistic effect of magnetic adsorption and mechanical elastic connection, and through feedback from a Hall sensor, the control system controls the current distribution of each electromagnet within the gradient magnetic field generator, thereby achieving real-time compensation and adjustment of the magnetic field. This ensures both the convenience of nozzle replacement and the positioning accuracy and stability during operation.

[0010] As a preferred embodiment of the present invention, the number of Hall sensors is three, and the three Hall sensors are evenly distributed circumferentially on the side wall of the mounting base.

[0011] As a preferred embodiment of the present invention, it further includes a multi-station storage device and a mounting work unit. The multi-station storage device includes a storage disk with a plurality of storage positions. The mounting work unit includes a multi-station rotary wheel with a plurality of magnetic suction nozzles mounted on the multi-station rotary wheel. The diameter of one circle containing the storage positions on the storage disk is the same as the diameter of the circle containing the plurality of magnetic suction nozzles on the multi-station rotary wheel.

[0012] The multi-station rotary wheel adopts a ring array arrangement, which can simultaneously accommodate multiple suction nozzles. A built-in gradient magnetic field generator enables rapid suction and replacement of the nozzles. The multi-station storage device adopts a circular layout design, with the diameter of one circle containing storage positions matching the diameter of several circles containing magnetic suction nozzles on the multi-station rotary wheel. This creates an optimized spatial arrangement between the multi-station storage device and the multi-station rotary wheel, allowing multiple nozzles to be loaded onto the multi-station rotary wheel at once, saving installation space and improving nozzle replacement efficiency.

[0013] As a preferred embodiment of the present invention, the inner surface of the storage compartment is coated with a diamond-like carbon film. Each storage compartment's inner surface is coated with a diamond-like carbon film, which has excellent wear resistance and can reduce the coefficient of friction to below 0.1.

[0014] As a preferred embodiment of the present invention, an RFID radio frequency identification module is provided at the bottom of the storage compartment, and the RFID radio frequency identification module is electrically connected to the control system. An independent RFID radio frequency identification module is provided at the bottom of the storage compartment for storing and identifying the specification parameter information of the corresponding suction nozzle.

[0015] As a preferred embodiment of the present invention, the storage disk is provided with a gas channel communicating with the storage compartment, and the gas channel is connected to an air pump via a pipe. To completely avoid mechanical contact between the suction nozzle and the inner wall of the storage compartment, the present invention innovatively adopts air film suspension technology. This technology continuously delivers compressed air into the storage compartment through the air pump, forming a stable air film isolation layer between the suction nozzle and the inner wall of the storage compartment, thereby achieving true zero-contact storage.

[0016] As a preferred embodiment of the present invention, the mounting work unit includes a frame, a worktable and a mounting frame connected to the frame, a multi-station storage device mounted on the worktable, and a mounting work station also provided on the worktable; an ejector mechanism is mounted on the lower side of the mounting frame, and a multi-station rotary wheel is connected to the output end of the ejector mechanism.

[0017] When changing a nozzle, the control system moves the mounting bracket to the position of the multi-station storage device, then drives the ejector mechanism to extend, and drives the multi-station rotary wheel to rotate, so that the existing nozzles on the multi-station rotary wheel correspond to the empty storage positions of the multi-station storage device; the control system de-energizes the gradient magnetic field generator, and the nozzle falls into the storage position of the multi-station storage device; then drives the multi-station rotary wheel to rotate, so that the nozzle to be used is inserted into the corresponding magnetic suction nozzle device; the control system energizes the gradient magnetic field generator, realizing rapid nozzle replacement.

[0018] During chip mounting, the control system controls the lifting and lowering of the ejector mechanism and the rotation of the multi-station rotary wheel to pick up the chip to be mounted through the suction nozzle and then mount the chip to the designated position on the substrate at the mounting station.

[0019] As a preferred embodiment of the present invention, a dual-frequency laser interferometer for monitoring the axial deflection angle of the nozzle is also installed on the worktable. The dual-frequency laser interferometer is electrically connected to the control system. To ensure mounting accuracy, the present invention specifically includes a dual-frequency laser interferometer for real-time monitoring of the axial deflection angle of the nozzle. When the dual-frequency laser interferometer detects a nozzle perpendicularity deviation exceeding 0.005°, the control system immediately performs automatic compensation by adjusting the magnetic field distribution of the gradient magnetic field generator to ensure that the nozzle always maintains a precise vertical position.

[0020] As a preferred embodiment of the present invention, the ejection mechanism is a linear drive module, which is electrically connected to the control system.

[0021] A method for quick replacement of an automatic patch nozzle includes the following steps:

[0022] The control system energizes each electromagnet of the gradient magnetic field generator, which in turn attracts the permanent magnet ring.

[0023] The nozzle uses negative pressure to pick up the chip to be mounted;

[0024] After the nozzle picks up the chip, it is then placed in the designated position.

[0025] The Hall sensor monitors the magnetic field distribution in real time. When the Hall sensor detects that the nozzle offset exceeds 30μm, the control system dynamically adjusts the current distribution of each electromagnet in the gradient magnetic field generator through the PID algorithm to achieve real-time compensation and adjustment of the magnetic field.

[0026] The beneficial effects of this invention are as follows:

[0027] This invention utilizes the synergistic effect of magnetic adsorption and mechanical elastic connection, and through feedback from a Hall sensor, the control system controls the current distribution of each electromagnet within the gradient magnetic field generator, thereby achieving real-time compensation and adjustment of the magnetic field. This ensures both the convenience of nozzle replacement and the positioning accuracy and stability during operation. Attached Figure Description

[0028] Figure 1 This is a cross-sectional view of the magnetic suction nozzle device;

[0029] Figure 2 This is a 3D view of the magnetic suction nozzle device;

[0030] Figure 3 This is a top view of the magnetic suction nozzle device;

[0031] Figure 4 This is a schematic diagram of the structure of a multi-station storage device;

[0032] Figure 5 This is a cross-sectional view of the internal structure of the storage bit;

[0033] Figure 6 This is a schematic diagram of the overall structure of the device of the present invention.

[0034] In the diagram: 1-Magnetic suction nozzle device; 2-Multi-station storage device; 3-Placement work unit; 11-Mounting base; 12-Suction nozzle; 13-Gradient magnetic field generator; 14-Permanent magnet ring; 15-Spring; 16-Hall sensor; 21-Storage disk; 22-Storage position; 23-Diamond-like carbon film; 24-RFID radio frequency identification module; 25-Air pump; 31-Multi-station rotary wheel; 32-Frame; 33-Workbench; 34-Mounting frame; 35-Placement work station; 36-Ejection mechanism; 37-Dual-frequency laser interferometer; 121-Suction air duct. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the invention can be combined with each other.

[0037] The ideal technology of this invention should meet the following core requirements: First, it ensures the dynamic perpendicularity of the nozzle 12 to the bonding surface through non-contact connection, avoiding efficiency loss caused by mechanical leveling; second, it adopts a modular storage design to achieve second-level replacement of the nozzle 12, while eliminating physical wear during the replacement process; third, it integrates intelligent recognition and compensation mechanisms to adapt to diverse chip mounting processes. Based on the above industry pain points, this invention proposes an innovative automatic chip mounting nozzle rapid replacement device and method. Through the synergistic design of a magnetic structure and a rotary storage system, it breaks through traditional technical bottlenecks and provides an efficient and reliable solution for high-precision chip mounting.

[0038] like Figure 6As shown, the automatic placement nozzle quick change device of this embodiment includes a magnetic suction nozzle device 1, a control system, a multi-station storage device 2, and a placement working unit 3. The multi-station storage device 2 includes a storage disk 21 with a plurality of storage slots 22. The placement working unit 3 includes a multi-station rotary wheel 31, and a plurality of magnetic suction nozzle devices 1 are mounted on the multi-station rotary wheel 31.

[0039] Specifically, such as Figures 1-3 As shown, the magnetic suction nozzle device 1 includes a mounting base 11 and a suction nozzle 12 fitted inside the mounting base 11. A gradient magnetic field generator 13 is installed inside the mounting base 11, and a permanent magnet ring 14 is installed on the suction nozzle 12. A spring 15 connects the gradient magnetic field generator 13 and the permanent magnet ring 14. Several Hall sensors 16 are installed on the mounting base 11. The Hall sensors 16 and the gradient magnetic field generator 13 are electrically connected to the control system. The suction nozzle 12 is provided with a suction air passage 121.

[0040] The suction nozzle 12 of this invention has a permanent magnet ring 14 fixedly installed at its end, which cooperates with the gradient magnetic field generator 13 installed in the mounting base 11 to form a stable vertical adsorption force at the contact surface. The suction nozzle 12 can be quickly adsorbed and replaced by controlling the activation of the gradient magnetic field generator 13. The suction nozzle 12 and the mounting base 11 are elastically connected by a spring 15, which effectively buffers the impact force on the suction nozzle 12 during operation. Several Hall sensors 16 are evenly distributed circumferentially on the side wall of the mounting base 11 for real-time monitoring of the magnetic field distribution. When the Hall sensor 16 detects that the offset of the suction nozzle 12 exceeds 30μm, the control system immediately uses a PID algorithm to dynamically adjust the current distribution of each electromagnet in the gradient magnetic field generator 13, achieving real-time compensation and adjustment of the magnetic field, thereby ensuring that the suction nozzle 12 always maintains a precise vertical positioning state.

[0041] This invention achieves real-time compensation and adjustment of the magnetic field by using the synergistic effect of magnetic adsorption and mechanical elastic connection, and by controlling the current distribution of each electromagnet in the gradient magnetic field generator 13 through feedback from the Hall sensor 16. This ensures both the convenience of replacing the nozzle 12 and the positioning accuracy and stability during operation.

[0042] The number of Hall sensors 16 is three, and the three Hall sensors 16 are evenly distributed in the circumferential direction of the side wall of the mounting base 11, that is, the three Hall sensors 16 are distributed at 120° intervals.

[0043] Furthermore, such as Figure 4As shown, the diameter of the circle containing one ring of storage positions 22 on the storage disk 21 is the same as the diameter of the circle containing several magnetic suction nozzle devices 1 on the multi-station rotary wheel 31. The multi-station rotary wheel 31 adopts a ring array arrangement, which can simultaneously accommodate multiple suction nozzles 12. The built-in gradient magnetic field generator 13 enables the rapid adsorption and replacement of suction nozzles 12. The multi-station storage device 2 adopts a circular layout design, and the diameter of the circle containing one ring of storage positions 22 is the same as the diameter of the circle containing several magnetic suction nozzle devices 1 on the multi-station rotary wheel 31. Thus, the multi-station storage device 2 and the multi-station rotary wheel 31 form a spatially optimized fit. Multiple suction nozzles 12 can be loaded onto the multi-station rotary wheel 31 at one time, which saves equipment installation space and improves the suction nozzle 12 replacement efficiency.

[0044] like Figure 5 As shown, the inner surface of the storage slot 22 is coated with a diamond-like carbon film 23. The inner surface of each storage slot 22 is coated with a diamond-like carbon film 23, which has excellent wear resistance and can reduce the coefficient of friction to below 0.1.

[0045] An RFID radio frequency identification module 24 is provided at the bottom of the storage compartment 22, and the RFID radio frequency identification module 24 is electrically connected to the control system. An independent RFID radio frequency identification module 24 is provided at the bottom of the storage compartment 22 for storing and identifying the specification parameter information of the corresponding suction nozzle 12.

[0046] The storage disk 21 is provided with a gas channel communicating with the storage position 22, and the gas channel is connected to an air pump 25 through a pipe. In order to completely avoid mechanical contact between the suction nozzle 12 and the inner wall of the storage position 22, the present invention innovatively adopts air film suspension technology. This technology continuously delivers compressed air into the storage position 22 through the air pump 25, forming a stable air film isolation layer between the suction nozzle 12 and the inner wall of the storage position 22, thereby achieving true zero-contact storage.

[0047] The structural design of the multi-station storage device 2 not only effectively solves the problem of nozzle 12 wear caused by traditional storage methods, but also realizes intelligent management of nozzle 12 through RFID identification technology, providing a reliable guarantee for fast and accurate nozzle 12 replacement.

[0048] Specifically, such as Figure 6 As shown, the mounting work unit 3 includes a frame 32, on which a worktable 33 and a mounting frame 34 are connected. A multi-station storage device 2 is installed on the worktable 33, and a mounting work station 35 is also provided on the worktable 33. An ejector mechanism 36 is installed on the lower side of the mounting frame 34, and a multi-station rotary wheel 31 is connected to the output end of the ejector mechanism 36.

[0049] When replacing the suction nozzle 12, the control system controls the mounting bracket 34 to move the position of the multi-station storage device 2, and then drives the ejection mechanism 36 to extend, driving the multi-station rotary wheel 31 to rotate, so that the existing suction nozzle 12 on the multi-station rotary wheel 31 corresponds to the empty storage position 22 of the multi-station storage device 2; the control system controls the gradient magnetic field generator 13 to be de-energized, and the suction nozzle 12 falls into the storage position 22 of the multi-station storage device 2; then drives the multi-station rotary wheel 31 to rotate, so that the suction nozzle 12 to be used is inserted into the magnetic suction nozzle device 1 at the corresponding position, and the control system controls the gradient magnetic field generator 13 to be energized, so as to realize the quick replacement of the suction nozzle 12.

[0050] During chip mounting, the control system controls the lifting of the ejector mechanism 36 and the rotation of the multi-station rotary wheel 31 to adsorb the chip to be mounted through the negative pressure of the suction channel 121 of the suction nozzle 12, and then mounts the chip to the designated position on the substrate on the mounting work station 35.

[0051] Furthermore, a dual-frequency laser interferometer 37 is also installed on the worktable 33 to monitor the axial deflection angle of the nozzle 12. The dual-frequency laser interferometer 37 is electrically connected to the control system. To ensure mounting accuracy, this invention specifically includes a dual-frequency laser interferometer 37 for real-time monitoring of the axial deflection angle of the nozzle 12. When a perpendicularity deviation exceeding 0.005° is detected, the system immediately performs automatic compensation by adjusting the magnetic field distribution of the gradient magnetic field generator 13 to ensure that the nozzle 12 always maintains a precise vertical position.

[0052] The ejection mechanism 36 is a linear drive module, which is electrically connected to the control system. This invention uses a Z-axis servo motor to precisely control the lifting and lowering motion of the ejector rod, achieving accurate positioning of the nozzle 12 from the storage position 22 to the mounting position 35.

[0053] The overall structural design of this invention, through modular layout and intelligent control, realizes integrated collaborative operation of nozzle storage, replacement and positioning, which significantly improves production efficiency while ensuring mounting accuracy.

[0054] The automatic patch nozzle quick replacement method of this embodiment includes the following steps:

[0055] S1: The control system controls the mounting bracket 34 to move the position of the multi-station storage device 2, and then drives the ejection mechanism 36 to extend, driving the multi-station rotary wheel 31 to rotate, so that the existing suction nozzle 12 on the multi-station rotary wheel 31 corresponds to the empty storage position 22 of the multi-station storage device 2; the control system controls the gradient magnetic field generator 13 to be de-energized, and the suction nozzle 12 falls into the storage position 22 of the multi-station storage device 2.

[0056] S2: Drive the multi-station rotary wheel 31 to rotate, lower the ejection mechanism 36, and insert the suction nozzle 12 to be used into the magnetic suction nozzle device 1 at the corresponding position; control system controls each electromagnet of gradient magnetic field generator 13 to be energized, and gradient magnetic field generator 13 attracts permanent magnet ring 14.

[0057] S3: The control system controls the lifting of the ejection mechanism 36 and the rotation of the multi-station rotary wheel 31 to adsorb the chip to be mounted through the negative pressure of the suction channel 121 of the nozzle 12.

[0058] S4: After the nozzle 12 picks up the chip, it is then placed on the designated position on the substrate at the placement work station 35.

[0059] During chip transfer and mounting, Hall sensor 16 monitors the magnetic field distribution in real time. When Hall sensor 16 detects that the offset of nozzle 12 exceeds 30μm, the control system dynamically adjusts the current distribution of each electromagnet in gradient magnetic field generator 13 through PID algorithm to achieve real-time compensation and adjustment of the magnetic field.

[0060] The dual-frequency laser interferometer 37 monitors the axis deflection angle of the nozzle 12 in real time. When the verticality deviation exceeds 0.005°, the control system immediately performs automatic compensation by adjusting the magnetic field distribution of the gradient magnetic field generator 13 to ensure that the nozzle 12 always maintains a precise vertical state.

[0061] This invention is not limited to the above-described optional embodiments. Anyone can derive other various forms of products under the guidance of this invention. However, regardless of any changes made in their shape or structure, any technical solution that falls within the scope of the claims of this invention shall be protected by this invention.

Claims

1. An automatic patch nozzle quick-change device, characterized in that: The device includes a magnetic suction nozzle device (1) and a control system. The magnetic suction nozzle device (1) includes a mounting base (11) and a suction nozzle (12) fitted inside the mounting base (11). A gradient magnetic field generator (13) is installed inside the mounting base (11). A permanent magnet ring (14) is installed on the suction nozzle (12). A spring (15) connects the gradient magnetic field generator (13) and the permanent magnet ring (14). Several Hall sensors (16) are installed on the mounting base (11). The Hall sensors (16) and the gradient magnetic field generator (13) are electrically connected to the control system. The number of Hall sensors (16) is three, and the three Hall sensors (16) are evenly distributed in the circumferential direction on the side wall of the mounting base (11).

2. The automatic patch nozzle quick-change device according to claim 1, characterized in that: It also includes a multi-station storage device (2) and a mounting work unit (3). The multi-station storage device (2) includes a storage disk (21) with several storage positions (22) on it. The mounting work unit (3) includes a multi-station rotary wheel (31) with several magnetic suction nozzles (1) mounted on it. The diameter of the circle containing one of the storage positions (22) on the storage disk (21) is the same as the diameter of the circle containing several magnetic suction nozzles (1) on the multi-station rotary wheel (31).

3. The automatic patch nozzle quick-change device according to claim 2, characterized in that: The inner surface of the storage location (22) is coated with a diamond-like carbon film (23).

4. The automatic patch nozzle quick-change device according to claim 2, characterized in that: An RFID radio frequency identification module (24) is provided at the bottom of the storage position (22), and the RFID radio frequency identification module (24) is electrically connected to the control system.

5. The automatic patch nozzle quick-change device according to claim 2, characterized in that: The storage disk (21) is provided with a gas channel communicating with the storage position (22), and the gas channel is connected to an air pump (25) through a pipe.

6. The automatic patch nozzle quick-change device according to claim 2, characterized in that: The mounting work unit (3) includes a frame (32), on which a workbench (33) and a mounting frame (34) are connected. A multi-station storage device (2) is installed on the workbench (33), and a mounting work station (35) is also provided on the workbench (33). An ejector mechanism (36) is installed on the lower side of the mounting frame (34), and a multi-station rotary wheel (31) is connected to the output end of the ejector mechanism (36).

7. The automatic patch nozzle quick-change device according to claim 6, characterized in that: The workbench (33) is also equipped with a dual-frequency laser interferometer (37) for monitoring the axis deflection angle of the suction nozzle (12), and the dual-frequency laser interferometer (37) is electrically connected to the control system.

8. The automatic patch nozzle quick-change device according to claim 6, characterized in that: The ejection mechanism (36) is a linear drive module, which is electrically connected to the control system.

9. A method for quick replacement of an automatic placement nozzle, using the automatic placement nozzle quick replacement device according to any one of claims 1 to 8, characterized in that: Includes the following steps: The control system controls each electromagnet of the gradient magnetic field generator (13) to be energized, and the gradient magnetic field generator (13) attracts the permanent magnet ring (14). The nozzle (12) uses negative pressure to adsorb the chip to be mounted; After the nozzle (12) adsorbs the chip, the chip is then mounted in the designated position; The Hall sensor (16) monitors the magnetic field distribution in real time. When the Hall sensor (16) detects that the offset of the nozzle (12) exceeds 30μm, the control system dynamically adjusts the current distribution of each electromagnet in the gradient magnetic field generator (13) through the PID algorithm to achieve real-time compensation and adjustment of the magnetic field.

Citation Information

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