Substrate removal method and substrate transfer system

Abstract

The invention provides a substrate taking-out method and a substrate transfer system which are suitable for coping with substrates which are configured to be thin and are accommodated in accommodating containers with narrow intervals, and can improve control stability when the substrates are taken out. The substrate removal method includes: a first movement step of moving the robot and inserting the extension portion of the robot into the accommodation container from the opening portion of the accommodation container; a first detection step of determining a position of an edge portion of the substrate by a substrate detection unit of the robot; a first stopping step for stopping the movement of the robot; a calculation step for calculating the inclination of the substrate with respect to the robot on the basis of the detected position of the edge portion of the substrate; a correction step for correcting the position and orientation of the robot in a state in which the extended portion is located within the housing container, on the basis of the calculated inclination of the substrate; a substrate supporting step in which the substrate is supported by a substrate supporting part of the robot; and a removal step for removing the substrate from the storage container by moving the robot on which the substrate is supported.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate take-out method and a substrate transfer system. BACKGROUND

[0002] From the past, in the manufacturing field of a semiconductor or the like, there is a technology of taking out a substrate (for example, a wafer, a glass substrate, or the like) from a container that houses the substrate, carrying the substrate to various processing devices, and processing the carried substrate using an industrial substrate transfer robot provided in a substrate carrying device. The substrate transfer robot includes a robot arm and a robot hand mounted at the front end of the robot arm, and carries the substrate while holding the substrate by the robot hand. For example, as a substrate carrying method using the substrate transfer robot, various technologies are disclosed with respect to a substrate take-out method in which the robot hand is inserted into a container that houses a substrate, the substrate is supported from below, the substrate is lifted from a placement portion in the container, and the substrate is taken out from the container in conjunction with movement of the robot arm.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT DOCUMENTS

[0005] Patent Document 1: Japanese Patent Laid-Open No. 2001-135706 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In recent years, in the field of semiconductor devices, the integration of devices has increased, and on the other hand, the miniaturization of devices has also progressed. Along with this, as a packaging technology for devices having high integration, a method called panel level packaging (hereinafter, PLP) is becoming widespread. PLP is a method of manufacturing a plurality of semiconductor packages together by arranging a plurality of chips on a rectangular panel, and various industrial robots are used on a production line of semiconductor packages using PLP.

[0008] In a Front Opening Unified Pod (FOUP) that is a substrate accommodating container, slots (hereinafter referred to as grooves) at equal intervals are formed, and substrates are placed on each groove. However, there is a variation in the size (for example, the size in the horizontal direction) of the substrate, and for reasons such as the variation in the size of the substrate or the structure, cost, and the like, the FOUP is configured to have a margin in the horizontal direction (front and back, left and right) when the substrate is placed, and sometimes cannot be positioned. Therefore, due to the posture when the substrate is placed in the FOUP that is an accommodating container, or vibration at the time of conveyance, and the like, the substrate in the FOUP is sometimes placed inclined with respect to the FOUP on the horizontal plane (a case where the edge portion E1 and the edge portion E2 of the substrate are not parallel with respect to the inner wall surface of the accommodating container H; refer to Figure 7 ). Here, there are a portion (hereinafter referred to as a contactable region) that can be contacted by a substrate support portion of a robot, and a portion (hereinafter referred to as a non-contactable region) that cannot be contacted, on the lower surface of the substrate, but in a case where the substrate is accommodated in the accommodating container in a state inclined on the horizontal plane, the position of the contactable region also differs. Therefore, in a case where the robot supports the substrate in the inclined state at a fixed position (a fixed support position), the substrate support portion of the robot contacts the non-contactable region of the substrate, and there is a risk that damage or the attachment of particles will occur in the non-contactable region.

[0009] According to the foregoing, a substrate taking-out method that can avoid damage caused by the inclination of the substrate on the horizontal plane when taking out the substrate accommodated in the accommodating container, and a substrate transfer system that applies the substrate taking-out method are sought.

[0010] Therefore, the present application provides a substrate taking-out method that can improve the stability of control when taking out the substrate, and a substrate transfer system that applies the substrate taking-out method.

[0011] Technical means to solve the problem

[0012] To achieve the object, according to the present application, there is provided a substrate taking-out method for taking out a substrate placed at a prescribed position in a housing container having an opening portion on one side in a first direction by a hand provided in a substrate transfer robot, the substrate taking-out method characterized in that the hand includes a hand base, an extension provided portion extending from the hand base to one side in a second direction, a substrate detecting portion provided in the extension provided portion, and a substrate supporting portion provided in the extension provided portion, and is controlled by a control device, the substrate taking-out method including: a first moving step of moving the hand to the other side in the first direction to insert the extension provided portion into the housing container from the opening portion; a first detecting step of determining a position of at least one linear edge portion of the substrate based on a change in a detection state of the substrate by the substrate detecting portion in the first moving step; a first stopping step of stopping movement of the hand toward the other side in the first direction; a calculating step of calculating a tilt of the substrate with respect to the hand based on the position of the edge portion of the substrate detected in the first detecting step; a correcting step of correcting a position and posture of the hand based on the tilt of the substrate calculated in the calculating step; a substrate supporting step of supporting the substrate by the substrate supporting portion; and a taking-out step of moving the hand supporting the substrate to one side in the first direction to take out the substrate from the housing container, the correcting step being performed with the extension provided portion of the hand positioned in the housing container.

[0013] To achieve the object, according to the present application, there is provided a substrate transfer system including: a substrate transfer robot including a hand for supporting a substrate, and a moving mechanism holding the hand in a movable manner; a substrate transfer module in which the substrate transfer robot is provided inside; and a control device controlling the substrate transfer robot, the substrate transfer system characterized in that the hand of the substrate transfer robot includes a hand base, an extension provided portion extending from the hand base to one side in a second direction, a substrate detecting portion provided in the extension provided portion, and a substrate supporting portion provided in the extension provided portion, and is controlled by the control device, the control device controlling the substrate transfer robot by the substrate taking-out method and taking out a substrate placed at a prescribed position in a housing container by the hand.

[0014] Effects of the Invention

[0015] According to the present application, the substrate take-out method and the substrate transfer system using the same can correct the position and posture of the robot based on the inclination of the horizontal plane of the substrate housed in the accommodation container and take out the substrate after supporting the substrate. BRIEF DESCRIPTION OF DRAWINGS

[0016] [ Figure 1 ] is a perspective view showing a substrate transfer system according to an embodiment of the present application.

[0017] [ Figure 2 ] is a perspective view showing a substrate transfer robot included in the substrate transfer system shown in Figure 1

[0018] [ Figure 3 ] is an explanatory view of a container placed at a load port included in the substrate transfer system shown in Figure 1

[0019] [ Figure 4 ] is a plan view showing a contactable area and a non-contactable area of a substrate shown in Figure 2

[0020] [ Figure 5 ] is a perspective view showing a robot arm of a substrate transfer robot shown in Figure 1

[0021] [ Figure 6 ] is a plan view showing a robot arm taking out a substrate housed in a container shown in Figure 5

[0022] [ Figure 7 ] is a flowchart of a substrate take-out method applied to the robot arm shown in Figure 5

[0023] [ Figure 8 ] is a flowchart of a correction process of the substrate take-out method shown in Figure 7

[0024] [ Figure 9A ] ~ [ Figure 9F ] are plan views showing the relative positions of a container and a substrate of a robot arm corresponding to each process of the substrate take-out method shown in Figure 7 and Figure 8

[0025] [ Figure 10 ] is a plan view showing the relative positions of a container and a substrate of a robot arm corresponding to the substrate supporting process of the substrate take-out method in a modified example of the first embodiment.

[0026] [ Figure 11A ] ~ [ Figure 11D ​​​​​​​​] is with Figures 9A-9F The diagram shows a top view illustrating the relative positions of the robot's container and the substrate in each step of the substrate removal method in other variations of the first embodiment.

[0027] [ Figure 12A ]~[ Figure 12F [This is the second embodiment of the method] Figure 7 and Figure 8 The diagram shows a top view illustrating the relative positions of the robot's container and the substrate in each step of the substrate removal method. Detailed Implementation

[0028] Hereinafter, exemplary embodiments of the present invention will be shown in detail in the accompanying drawings. Figures 1-12F The flow of the robot arm 100, the substrate transport robot 30 equipped with the robot arm 100, the substrate transfer system 20 using the substrate transport robot 30, and the substrate removal method using the robot arm 100 to remove the substrate W will be described in combination. The positions and operations of the substrate transfer system 20, the substrate transport robot 30, and the container H for holding the substrate W will be described with reference to the left-right direction X, the front-back direction Y, and the up-down direction Z of the XYZ spatial coordinate system. The positions and operations of the robot arm 100 will be described with reference to the left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the XYZ spatial coordinate system. The left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the robot arm 100 may sometimes be consistent with the left-right direction X, the front-back direction Y, and the up-down direction Z, depending on the posture of the robot arm 100, but may also sometimes be tilted relative to the left-right direction X, the front-back direction Y, and the up-down direction Z. Furthermore, this is only one example of the present invention, and the present invention is not limited thereto.

[0029] First, refer to Figures 1-3The substrate transfer system 20 of the present embodiment, the substrate transfer robot 30 applied to the substrate transfer system 20, the robot hand 100 mounted to the substrate transfer robot 30, and the housing container H for housing the substrate W will be described. In the present embodiment, the substrate transfer system 20 includes the substrate transfer robot 30 including the robot hand 100, a substrate transfer module 22 in which the substrate transfer robot 30 is disposed, at least one load port CI disposed at one side (e.g., the front side) of the substrate transfer module 22, at least one processing device C2 disposed at the other side (e.g., the rear side) of the substrate transfer module 22, and a control section 24 that controls the substrate transfer robot 30. Here, the substrate transfer module 22 is, for example, an Equipment Front End Module (EFEM), the load port CI is a device for placing the housing container H (e.g., a FOUP) that houses the substrate W and opening and closing the door of the housing container H, and the processing device C2 is a device for processing the substrate W. The type of the processing device C2 can be selected according to the content of the process performed on the substrate W (e.g., a process required for a semiconductor manufacturing process such as ion implantation or etching). In other embodiments not shown, a load lock chamber can be further provided between the substrate transfer module 22 and the processing device C2. However, the present application is not limited thereto.

[0030] Specifically, the substrate transfer module 22 includes a frame 22a, the substrate transfer robot 30 disposed inside the frame 22a, a moving body 22b that moves the substrate transfer robot 30, and a guide structure 22c for guiding the movement of the substrate transfer robot 30. The frame 22a is disposed between the load port CI and the processing device C2 (or the load lock chamber), connecting the load port CI and the processing device C2 (or the load lock chamber). The moving body 22b, the guide structure 22c, and the components such as the substrate transfer robot 30 are disposed inside the frame 22a. The moving body 22b is mounted to the guide structure 22c (e.g., a slide rail structure, a conveyor belt driving device, or the like) for guiding the movement in the left-right direction X and is freely movable in the frame 22a by the guide structure 22c. The substrate transfer robot 30 is mounted to the moving body 22b and is movable (slidable) in the left-right direction X by the moving body 22b and the guide structure 22c. Thus, the substrate transfer robot 30 freely accesses any one of the load port CI and the processing device C2 (or the load lock chamber).

[0031] Additionally, the substrate transport robot 30 includes a robotic arm 100 for supporting the substrate W, and a moving mechanism (e.g., including an arm 32, a main body 34, and an arm drive 36) for holding the robotic arm 100 in a freely movable manner. The main body 34 is mounted on the moving body 22b and moves in the left-right direction X via the moving body 22b and the guide structure 22c. The arm 32 is mounted on the upper end of the main body 34 in a manner that allows it to extend, retract, and rotate relative to the main body 34 in a horizontal plane (an imaginary horizontal plane formed by the left-right direction X and the front-back direction Y), and also to move up and down in the vertical direction Z. The arm drive 36 is, for example, a motor or transmission mechanism built into the main body 34, which provides driving force to the arm 32, but it can also be mounted on the outside of the main body 34. The robotic arm 100 is mounted on the front end of the arm 32. Therefore, the substrate transport robot 30 not only moves in the left and right direction X via the main body 34 and the moving body 22b and the guide structure 22c, but also drives the arm 32 via the arm drive unit 36, thereby enabling the robot arm 100 to move freely (lifting, rotating, moving forward and backward).

[0032] As an example, the substrate W is, for instance, a glass substrate for a PLP, housed in a receiving container H for housing the substrate W. The FOUP, serving as the receiving container H, for example, has multi-level (e.g., 12-level) grooves S. Figure 3 As shown, substrates W are placed in each of the multi-level grooves S, thereby accommodating multiple substrates W. The grooves S protrude from the inner wall of the container H and are plate members that support the two ends of the substrates W in the left-right direction X. Furthermore, the number of substrates W accommodated in the container H can be appropriately selected, and the present invention is not limited thereto. Additionally, a FOUP serving as the container H is placed at the load port C1. By opening the door of the container H using the load port C1, the substrates W accommodated in the container H face the interior of the frame 22a of the substrate transfer module 22. After opening the door of the container H, the substrate transfer robot 30 moves the arm member 32 via the arm drive 36, and moves the robot arm 100 to below the corresponding substrate W. Then, by supporting the substrate W using the substrate support 140 of the robot arm 100 and moving the robot arm 100 to the outside of the container H, the substrate W is removed from the container H and moved into the interior of the frame 22a. Therefore, the control device 24 of the substrate transport module 20 can control the substrate transport robot 30 through the substrate removal method described later, and remove the substrate W placed in the designated position in the receiving container H by the manipulator 100.

[0033] In other embodiments not shown, the moving body 22b and the guide structure 22c and the like provided in the frame 22a of the substrate transfer module 22 can be omitted, and the substrate transfer robot 30 can be fixed to the frame 110 (for example, the main body portion 34 of the substrate transfer robot 30 can be fixed to the lower portion of the frame 110). In this case, the substrate transfer robot 30 itself cannot move relative to the substrate transfer module 22, but can transfer the substrate W between the load port CI and the processing device C2 using the extension and retraction of the arm portion 32 having a plurality of joints, the lifting, and the rotation around the main body portion 34. The specific structure and the arrangement relationship of the substrate transfer module 22, the load port CI, and the processing device C2 of the substrate transfer system 20, or the specific structure of the substrate transfer robot 30 can be adjusted as needed. The present application is not limited thereto.

[0034] Next, referring to Figure 4 The shape of the substrate W will be described. Figure 4 is a view of the substrate W observed from below (for example, a view when the side indicated by the arrow is observed from the opposite side of the side indicated by the arrow in the upward and downward direction Z), and the substrate W is a rectangular plate having a thickness. Here, the bottom surface of the substrate W has Figure 2 The substrate support portion 140 of the robot 100 or Figure 3 The slot S of the housing container H and the like of the robot 100 can have a contactable contactable region Rl and a non-contactable non-contactable region R2. In the present embodiment, four non-contactable regions R2 are provided on the bottom surface of the substrate W, and the contactable region Rl is provided so as to cover the periphery of each of the non-contactable regions R2. Figure 4 However, in other embodiments not shown, the number, size, relative position, and the like of the contactable region Rl and the non-contactable region R2 can be different depending on the type or size of the substrate W. The present application is not limited thereto.

[0035] Next, referring to Figures 5-6The specific structure of the robotic arm 100 in this embodiment and its operation for removing the substrate W will be described. In this embodiment, the robotic arm 100 can be used to remove a substrate W placed at a predetermined position in a receiving container H having an opening O on one side of a first direction (here, the side opposite to the side indicated by the arrow in the front-rear direction Y1). The robotic arm 100 of the substrate transport robot 30 includes a hand base 110, an extension portion 120 extending from the hand base 110 to one side of a second direction (here, the side indicated by the arrow in the front-rear direction Y1), a substrate detection portion 130 provided in the extension portion 120, and a substrate support portion 140 provided in the extension portion 120, and is controlled by a control device 24. That is, the substrate removal method described later controls the robotic arm 100 of the substrate transport robot 30 by the control device 24, and removes the substrate W stored in the receiving container H from the opening O by the robotic arm 100 of the substrate transport robot 30.

[0036] Specifically, the robotic arm 100 is, for example, mounted on the arm 32 of the substrate transport robot 30, and transports the substrate W while holding it in place, based on the movement of the arm 32. The base 110 of the robotic arm is connected to the arm 32. Figure 2 As shown, the extension portion 120 extends from the hand base 110 to one side in the second direction (the side indicated by the arrow in the front-rear direction Y1). In this embodiment, two extension portions 120, separated in a third direction orthogonal to the second direction (here, the left-right direction X1), extend from the hand base 110, and the robot hand 100 is configured in a generally Y-shape. A substrate support portion 140 is provided in the extension portion 120 to support the substrate W from the lower surface of the substrate W. As an example, multiple substrate support portions 140 are provided in the extension portion 120. For example, the substrate support portion 140 includes a first substrate support portion 140A, a second substrate support portion 140B, and a third substrate support portion 140C. The first substrate support portion 140A is provided on one side in the second direction of the extension portion 120 (the side indicated by the arrow in the front-rear direction Y1), i.e., the front end side. The second substrate support portion 140B is disposed on the other side of the extension portion 120 in the second direction (here, the side opposite to the side indicated by the arrow in the front-rear direction Y1), i.e., the base end side. The third substrate support portion 140C is disposed between the first substrate support portion 140A and the second substrate support portion 140B in the extension direction of the extension portion 120, i.e., the second direction (front-rear direction Y1). In this embodiment, the first substrate support portion 140A, the second substrate support portion 140B, and the third substrate support portion 140C are respectively disposed in the two extension portions 120. In addition, in this embodiment, as Figure 4As shown, the lower surface of the substrate W has a contactable area R1 and a non-contactable area R2. Here, regarding the substrate support 140, when the robot 100 and the substrate W are in an appropriate positional relationship (for example, when the relative position or posture of the robot 100 relative to the substrate W is a predetermined position or posture), all the substrate support portions 140 are arranged such that they only contact the contactable area R1 of the substrate W in the substrate support process after the correction process described later.

[0037] Furthermore, the robotic arm 100 can also be provided with a limiting part 150 as needed, which is used to limit the position of the substrate W supported on the extension part 120. For example, a first limiting part 150A is provided on one side of the extension part 120 in the second direction (the side indicated by the arrow in the front-rear direction Y1), i.e., the front end side, and a second limiting part 150B is provided on the other side of the extension part 120 in the second direction (the side opposite to the side indicated by the arrow in the front-rear direction Y1), i.e., the base end side. Thus, when the substrate support part 140 supports the substrate W, the first limiting part 150A can abut against the end face of the substrate W on the other side of the first direction (the side indicated by the arrow in the front-rear direction Y), and the second limiting part 150B can abut against the end face of one side of the first direction of the substrate W (here, the side opposite to the side indicated by the arrow in the front-rear direction Y). These substrate support parts 140 and limiting parts 150 are provided on the upper surface 122 of the extension part 120 in a way that allows them to be folded or unfolded. Figure 5 As shown, the drive unit 160, which is provided in the hand base 110 or the extended mounting portion 120, can be driven. As an example, the drive source of the drive unit 160 is provided in the hand base 110 via a mounting plate 124. However, the number and position of the substrate support portions 140, the presence or absence of the limiting portions 150 and the drive unit 160, or the type and mounting position of the drive unit 160 can be adjusted as needed. The present invention is not limited thereto.

[0038] Furthermore, a substrate detection unit 130 is provided in the extended mounting section 120 to detect the presence or absence of a substrate in the upper part of the substrate detection unit 130. The substrate detection unit 130 can determine the position of the edge E of the substrate W based on the switching of the detection status when the substrate detection unit 130 passes below the edge of the substrate W. Here, regarding the substrate W, a rectangular substrate (e.g., approximately rectangular) is used as an example, but a polygonal substrate (e.g., hexagonal) can also be used. The substrate W only needs to have at least one straight edge E. Figure 6As shown, in a state where the substrate W is placed in the accommodation container H, the substrate W has an edge portion E1 corresponding to one side of the first direction of the accommodation container H (the side opposite to the side indicated by the arrow of the front-rear direction Y) and close to the opening portion O, and an edge portion E2 corresponding to the other side of the first direction (the side indicated by the arrow of the front-rear direction Y) and far from the opening portion O. In this regard, the substrate transfer robot 30 moves the robot hand 100 to the other side of the first direction of the accommodation container H (the side indicated by the arrow of the front-rear direction Y) and inserts the extension portion 120 into the accommodation container H from the opening portion O, whereby the position of either one of the edge portions E1 and E2 is determined by the substrate detection portion 130 passing below the substrate W. The inclination of the substrate W with respect to the robot hand 100 is calculated based on the determined position of either one of the edge portions E1 and E2 of the substrate W, and the position and posture of the robot hand 100 are corrected based on the calculated inclination of the substrate W. Next, the substrate W is supported by the substrate support portion 140, and the robot hand 100 supporting the substrate W is moved to one side of the first direction (the side opposite to the side indicated by the arrow of the front-rear direction Y) to take out the substrate W from the accommodation container H. The following examples are given to describe the positions of the substrate detection portion 130 provided in the extension portion 120.

[0039] In the present embodiment as the first embodiment, the substrate detection portion 130 includes a first substrate detection portion 130a and a second substrate detection portion 130b. Here, the first substrate detection portion 130a and the second substrate detection portion 130b are respectively provided on one side of the second direction (the side indicated by the arrow of the front-rear direction Y1) of the two extension portions 120, i.e., the front end side (the side of the extension portion 120 away from the hand base portion 110). That is, the first substrate detection portion 130a is provided in the extension portion 120 on the other side of the third direction (the side opposite to the side indicated by the arrow of the left-right direction X1) of the two extension portions 120, and the second substrate detection portion 130b is provided in the extension portion 120 on one side of the third direction (here, the side indicated by the arrow of the left-right direction X1). In addition, the first substrate detection portion 130a and the second substrate detection portion 130b respectively provided on the front end side of the two extension portions 120 are provided side by side (without offset) in the third direction (the left-right direction X1). However, as shown in the modification example described later, the second substrate detection portion 130b can be further provided separately (i.e., offset) from the first substrate detection portion 130a on one side of the second direction (the side indicated by the arrow of the front-rear direction Y1). Or, only one substrate detection portion 130 can be provided on the front end side of the extension portion 120 on one side of the second direction (the side indicated by the arrow of the front-rear direction Y1). Figure 10 As shown, in a state where the substrate W is placed in the accommodation container H, the substrate W has an edge portion E1 corresponding to one side of the first direction of the accommodation container H (the side opposite to the side indicated by the arrow of the front-rear direction Y) and close to the opening portion O, and an edge portion E2 corresponding to the other side of the first direction (the side indicated by the arrow of the front-rear direction Y) and far from the opening portion O. In this regard, the substrate transfer robot 30 moves the robot hand 100 to the other side of the first direction of the accommodation container H (the side indicated by the arrow of the front-rear direction Y) and inserts the extension portion 120 into the accommodation container H from the opening portion O, whereby the position of either one of the edge portions E1 and E2 is determined by the substrate detection portion 130 passing below the substrate W. The inclination of the substrate W with respect to the robot hand 100 is calculated based on the determined position of either one of the edge portions E1 and E2 of the substrate W, and the position and posture of the robot hand 100 are corrected based on the calculated inclination of the substrate W. Next, the substrate W is supported by the substrate support portion 140, and the robot hand 100 supporting the substrate W is moved to one side of the first direction (the side opposite to the side indicated by the arrow of the front-rear direction Y) to take out the substrate W from the accommodation container H. The following examples are given to describe the positions of the substrate detection portion 130 provided in the extension portion 120.

[0040] In the second embodiment (refer toFigures 12A-12F In the example shown, the substrate detection section 130 includes a first substrate detection section 130a and a second substrate detection section 130b. The first substrate detection section 130a and the second substrate detection section 130b are each disposed on the base end side (the side of the extension section 120 closer to the base 110) of the two extension sections 120. Similarly, the first substrate detection section 130a and the second substrate detection section 130b, which are each disposed on the base end side of the two extension sections 120, can be disposed side by side in the third direction (the left-right direction X1) (without being offset), or can be offset in the second direction in an embodiment not shown, or only one substrate detection section 130 can be disposed on the base end side. The present application is not limited in this way.

[0041] Here, the orientation of the opening O of the housing container H, the relative positions of the edge portions E1 and E2 of the substrate W placed in the housing container H, and the direction of movement when the robot hand 100 is inserted into the housing container H are defined with reference to the first direction (the front-rear direction Y), and the extension direction of the extension section 120 of the robot hand 100 and the position of the substrate detection section 130 disposed in the extension section 120 are defined with reference to the second direction (the front-rear direction Y1). It is preferable that the first direction (the front-rear direction Y) and the second direction (the front-rear direction Y1) be parallel at least when the robot hand 100 is inserted into the housing container H. That is, as shown in the example shown in FIG. 1, the first direction (the front-rear direction Y) and the second direction (the front-rear direction Y1) are preferably parallel. Figure 6As shown, the front-rear direction Y coincides with the front-rear direction Y1. Thus, the robot hand 100 inserts the extension providing portion 120 extending to one side of the second direction (the side indicated by the arrow of the front-rear direction Y1) toward the other side of the first direction (the side indicated by the arrow of the front-rear direction Y) from the opening portion O into the housing container H, and determines the position of either one of the edge portion E1 corresponding to one side of the first direction of the substrate W (the side opposite to the side indicated by the arrow of the front-rear direction Y) and the edge portion E2 corresponding to the other side of the first direction (the side indicated by the arrow of the front-rear direction Y) by the substrate detection portion 130 provided on the second direction side (the front end side or the second direction side opposite to the side indicated by the arrow of the front-rear direction Y1) of the extension providing portion 120, and calculates the inclination of the substrate W with respect to the robot hand 100 based on the determined position of either one of the edge portion E1 and the edge portion E2 of the substrate W. After the position and the posture of the robot hand 100 are corrected based on the calculated inclination of the substrate W, the second direction (the front-rear direction Y1) of the robot hand 100 as a reference is not limited to be parallel to the first direction (the front-rear direction Y) as a reference of the housing container H. The second direction (the front-rear direction Y1) of the robot hand 100 after the correction is preferably parallel to the center line L of the substrate W in the placed state (as described later). Here, the center line L is a line orthogonal to the edge portion E1 and the edge portion E2, and connecting the edge portion E1 and the edge portion E2.

[0042] As for the position of the substrate detection portion 130 provided on the extension providing portion 120, in the first embodiment (refer to FIG. 1), the substrate detection portion 130 is provided on the second direction side (the front end side) of the extension providing portion 120, and includes a first substrate detection portion 130a and a second substrate detection portion 130b provided separately in a third direction (the left-right direction X1) orthogonal to the second direction (the front-rear direction Y1). Figures 5-6 As for the position of the substrate detection portion 130 provided on the extension providing portion 120, in the first embodiment (refer to FIG. 1), the substrate detection portion 130 is provided on the second direction side (the front end side) of the extension providing portion 120, and includes a first substrate detection portion 130a and a second substrate detection portion 130b provided separately in a third direction (the left-right direction X1) orthogonal to the second direction (the front-rear direction Y1). Figures 12A-12FIn the example shown, the substrate detection section 130 is provided on the base end side of the second direction of the extension section 120 (the side opposite to the side indicated by the arrow of the front-rear direction Y1), and includes a first substrate detection section 130a and a second substrate detection section 130b provided separately in a third direction (left-right direction X1) orthogonal to the second direction (front-rear direction Y1). In addition, the substrate W has a first edge portion E1 corresponding to one side of the first direction of the housing container H (the side opposite to the side indicated by the arrow of the front-rear direction Y1) and located near the opening portion O, and a second edge portion E2 corresponding to the other side of the first direction (the side indicated by the arrow of the front-rear direction Y1) and located away from the opening portion O. Therefore, there are different parts in the operation of each process of the substrate extraction method with respect to the position of the substrate detection section 130 and the position of the predetermined edge portion E to be detected, and the substrate extraction method of the present application is described below through several examples.

[0043] Referring to Figure 7 With Figure 8The substrate removal method in this embodiment will be described. The substrate removal method is a substrate removal method in which a substrate W placed at a predetermined position within a receiving container H having an opening O on one side of a first direction (the side opposite to the side indicated by the arrow in the forward / backward direction Y) is removed by a robot arm 100 provided on a substrate transport robot 30, and includes the following steps: First movement step S01: The robot arm 100 is moved to the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y), and the extension part 120 is inserted from the opening O under the substrate W in the receiving container H. First detection step S02: In the first movement step S01, the position of at least one linear edge E (either edge E1 or edge E2) of the substrate W is determined based on the change in the detection status of the substrate W by the substrate detection unit 130. First stop step S03: The movement of the robot arm 100 toward the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) is stopped. Calculation Step S04: Based on the position of the edge E (either edge E1 or edge E2) of the substrate W detected in the first detection step S02, the tilt of the substrate W relative to the robot arm 100 is calculated. Correction Step S05: Based on the position of the edge E determined in the first detection step S02 and the tilt of the substrate W calculated in the calculation step S04, the position and posture of the robot arm 100 are corrected. Substrate Support Step S06: The substrate support portion 140 abuts against the lower part of the substrate W, and the robot arm 100 supports the substrate W. Removal Step S07: The robot arm 100, supporting the substrate W, is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the forward / backward direction Y) to remove the substrate W from the receiving container H. In addition, the correction process S05 includes: a tilt correction process S051, which corrects the posture of the robot arm 100; a second movement process S052, which moves the robot arm 100 such that the substrate detection unit 130 provided on the front end side moves toward the edge E2 of the substrate W; and a second stop process S053, which stops the movement of the robot arm 100 in the second movement process S052 after the tilt correction process S051 is completed, when the substrate support unit 130 is below the substrate W and the substrate detection unit 130 detects the position of the substrate W.

[0044] Here, via the robotic arm 100 of the first embodiment ( Figures 5-6 As shown), a substrate removal method in which a substrate detection unit 130, located at the front end of the extension setting section 120, detects the edge E2 of the substrate W located away from the opening O and corrects for tilting, thereby removing the substrate. Figures 9A-9F (As shown) will be explained here. To explain the detection of the substrate detection unit 130, we will start from... Figures 9A-9D The robot arm 100 shown omits components such as the base plate support 140, but is not limited to this. First, asFigure 9A As shown, in the first moving step S01, the robot 100 is moved to the other side in the first direction (the side indicated by the arrow of the front-rear direction Y) to insert the extension providing portion 120 under the substrate W in the accommodation container H from the opening portion O. Here, it is preferable to control the robot 100 so that the first direction (the front-rear direction Y) of the accommodation container H and the second direction (the front-rear direction Y1) of the robot 100 become parallel when the robot 100 is inserted into the accommodation container H. In addition, the first detecting step S02 determines the position of the edge portion E2 of the substrate W in accordance with a change in the detection state of the substrate W by the substrate detecting portion 130 in the first moving step S01. That is, the first detecting step S02 is performed when the substrate detecting portion 130 provided to the extension providing portion 120 passes under the edge portion E2 of the substrate W while the robot 100 is moving in the first moving step S01. In addition, as shown, in the first stopping step S03, the movement of the robot 100 toward the other side in the first direction (the side indicated by the arrow of the front-rear direction Y) is stopped. That is, the first moving step S01 ends when the first stopping step S03 is performed. Figure 9B As shown, in the first moving step S01, the robot 100 is moved to the other side in the first direction (the side indicated by the arrow of the front-rear direction Y) to insert the extension providing portion 120 under the substrate W in the accommodation container H from the opening portion O. Here, it is preferable to control the robot 100 so that the first direction (the front-rear direction Y) of the accommodation container H and the second direction (the front-rear direction Y1) of the robot 100 become parallel when the robot 100 is inserted into the accommodation container H. In addition, the first detecting step S02 determines the position of the edge portion E2 of the substrate W in accordance with a change in the detection state of the substrate W by the substrate detecting portion 130 in the first moving step S01. That is, the first detecting step S02 is performed when the substrate detecting portion 130 provided to the extension providing portion 120 passes under the edge portion E2 of the substrate W while the robot 100 is moving in the first moving step S01. In addition, as shown, in the first stopping step S03, the movement of the robot 100 toward the other side in the first direction (the side indicated by the arrow of the front-rear direction Y) is stopped. That is, the first moving step S01 ends when the first stopping step S03 is performed.

[0045] Specifically, in the first moving step S01, the robot 100 is moved to the other side in the first direction (the side indicated by the arrow of the front-rear direction Y) to insert the extension providing portion 120 under the substrate W, and the substrate detecting portion 130 provided to the front end side of the extension providing portion 120 is caused to protrude from under the substrate W, thereby causing the substrate detecting portion 130 to pass under the edge portion E2 of the substrate W. That is, the extension providing portion 120 is moved until the substrate detecting portion 130 provided to the front end side of the extension providing portion 120 protrudes from the edge portion E2 of the substrate W. In this case, in the first detecting step S02, it is determined that the detection state of the substrate W by the substrate detecting portion 130 has changed in accordance with switching of the detection signals before and after the substrate detecting portion 130 passes under the edge portion E2 of the substrate W, and the position of the edge portion E2 is determined. For example, in the first detecting step S02, the position of the edge portion E2 on the other side in the first direction of the substrate W on the movement path of the substrate detecting portion 130 is determined in accordance with switching from ON to OFF of the detection signals before and after the substrate detecting portion 130 passes under the edge portion E2 of the substrate W on the other side in the first direction (the state in which the substrate detecting portion 130 determines that there is the substrate W to the state in which it determines that there is not the substrate W). In addition, in the first stopping step S03, the movement of the robot 100 is stopped at the position where the substrate detecting portion 130 protrudes from under the substrate W to the other side in the first direction (the side indicated by the arrow of the front-rear direction Y). The operations from the first moving step S01 to the first stopping step S03 are as shown in FIG. 6. Figures 9A-9BThe first detection process S02 is executed between the first movement process S01 and the first stop process S03. As an example, the timing of execution of the first stop process S03 is immediately after the position of the edge portion E2 is determined by the first detection process S02, but can be set to a timing at which the movement of the robot 100 has passed a predetermined time after the position of the edge portion E2 is determined by the first detection process S02, or a timing at which the robot 100 has moved a predetermined distance after the position of the edge portion E2 is determined by the first detection process S02. The present application is not limited thereto.

[0046] After the first stop process S03, the calculation process S04 and the correction process S05 are executed while the extended portion 120 of the robot 100 is positioned in the accommodation container H and below the substrate W. Specifically, the calculation process S04 calculates the inclination of the substrate W with respect to the robot 100 based on the position of the edge portion E2 of the substrate W detected in the first detection process S02. As an example, in the calculation process S04, the direction and the amount of inclination of the substrate W on the horizontal plane are calculated. In the correction process S05, the position and the posture of the robot 100 are corrected based on the inclination of the substrate W calculated in the calculation process S04. In the correction process S05, the correction is performed while the extended portion 120 of the robot 100 is positioned in the accommodation container H. That is, the position and the posture of the robot 100 are corrected while the robot 100 inserted into the accommodation container H is positioned in the accommodation container H.

[0047] As an example, in the present embodiment, the first substrate detection portion 130a and the second substrate detection portion 130b as the substrate detection portion 130 are provided side by side at the front end portion of the extended portion 120 of the robot 100. Therefore, as shown in FIG. 6, in the case where the substrate W placed in the accommodation container H has an inclination with respect to the robot 100, the first substrate detection portion 130a and the second substrate detection portion 130b pass below the edge portion E2 of the substrate W at different timings or positions. Figure 9B As an example, in the present embodiment, the first substrate detection portion 130a and the second substrate detection portion 130b as the substrate detection portion 130 are provided side by side at the front end portion of the extended portion 120 of the robot 100. Therefore, as shown in FIG. 6, in the case where the substrate W placed in the accommodation container H has an inclination with respect to the robot 100, the first substrate detection portion 130a and the second substrate detection portion 130b pass below the edge portion E2 of the substrate W at different timings or positions. Figure 7As shown, the first detection process S02 includes: a third detection process S021, which determines the position of the edge E2 of the substrate W located on the moving path of the first substrate detection unit 130a based on the change in the detection status of the substrate W by the first substrate detection unit 130a; and a fourth detection process S022, which determines the position of the edge E2 of the substrate W located on the moving path of the second substrate detection unit 130b based on the change in the detection status of the substrate W by the second substrate detection unit 130b. For example, in the third detection step S021, the position of the edge E2 of the substrate W on the other side of the first direction is detected by switching the detection signal of the first substrate detection unit 130a passing under the edge E2 of the substrate W on the other side of the first direction from on to off (switching from having substrate W to not having substrate W). In the fourth detection step S022, the position of the edge E2 of the substrate W on the other side of the first direction is detected by switching the detection signal of the second substrate detection unit 130b passing under the edge E2 of the substrate W on the other side of the first direction from on to off (switching from having substrate W to not having substrate W). Then, in the first stop step S03, after the third and fourth detection steps are completed, the movement of the robot 100 in the first movement step S02 to the other side of the first direction is stopped at the position where the first substrate detection unit 130a and the second substrate detection unit 130b protrude from under the substrate W.

[0048] Therefore, as Figure 9B As shown, when the position of the edge E2 on the moving path of the first substrate detection unit 130a, determined in the third detection step S021, is set as the first edge position P1, and the position of the edge E2 on the moving path of the second substrate detection unit 130b, determined in the fourth detection step S022, is set as the second edge position P2, in step S04, based on the first distance information corresponding to the difference D1 in the second direction (front-back direction Y1) with respect to the first edge position P1 and the second edge position P2, and the second distance information corresponding to the separation distance D2 in the third direction (left-right direction X1) between the first substrate detection unit 130a and the second substrate detection unit 130b, the direction and amount of tilt of the substrate W relative to the robot arm 100 are calculated (e.g., Figure 9B The tilt angle θ is shown. Then, in the correction process S05, the tilt correction process S01 is performed. Figure 9C As shown), based on the direction and amount of tilt calculated in calculation process S04, the robot arm 100 is rotated clockwise or counterclockwise on the horizontal plane, as follows. Figure 9CAs shown in FIG. 9, the posture is corrected in a manner that the third direction of the robot hand 100 becomes parallel to the edge portion E2 of the substrate W. In addition, at this time, in the case where the rectangular-shaped substrate W is used, the second direction (the front-rear direction Y1) of the robot hand 100 becomes parallel to the center line L of the substrate W. Here, the center line L is a line orthogonal to the edge portion E1 and the edge portion E2, and connecting the edge portion E1 and the edge portion E2.

[0049] The movement of the robot hand 100 in the second movement process S052 is shown in FIG. 10. Figure 9D In the second movement process S052, the robot hand 100 is moved in a manner that the substrate detection portion 130 in the state of protruding from the edge portion E2 of the substrate W is moved to the lower side of the substrate W. For example, in the case shown in FIG. 10, the robot hand 100 is moved in a direction parallel to the second direction (the front-rear direction Y1 as the extending direction of the extension portion 120 of the robot hand 100), but can be moved to one side of the first direction (the opposite side of the side indicated by the arrow of the front-rear direction Y1), and in addition, can include a case other than the linear movement. In addition, the tilt correction process S051 and the second movement process S052 are simultaneously performed or are sequentially performed in the order of first performing the tilt correction process S051 (FIG. 9) and then performing the second movement process S052 (FIG. 10). In the case where the tilt correction process S051 and the second movement process S052 are simultaneously performed, the rotation in the tilt correction process S051 of the robot hand 100 and the movement in the second movement process S052 of the robot hand 100 are simultaneously performed (the movement of the robot hand 100 is combined with the movement of the substrate detection portion 130). Then, as shown in FIG. 11, in the second stop process S053, the movement of the robot hand 100 to the opening portion O of the housing container H is stopped in the state where the substrate detection portion 130 is positioned on the lower side of the substrate W. That is, at the timing when the second stop process S053 is performed, the second movement process S052 is ended. Figure 9D Figure 9C Figure 9D Figure 9C Figure 9D Figure 9D

[0050] ​​​​​​As an example of the execution means of the second stop process S053, the second moving process S052 further includes a second detection process S0521 in which the substrate detection section 130 detects a change in the detection state of the substrate W. That is, in the second detection process S0521, the substrate detection section 130 passes below the edge portion E2 on the other side in the first direction (one side indicated by the arrow of the front-back direction Y) of the substrate W, and the position of the edge portion E2 on the other side in the first direction of the substrate W is determined from the switching of the detection signal from off to on (switching from a state in which the substrate detection section 130 determines that there is no substrate W to a state in which the substrate detection section 130 determines that there is a substrate W). Then, in the second stop process S053, after the substrate detection section 130 passes below the edge portion E2 on the other side in the first direction of the substrate W in the second detection process S0521 and the detection signal switches from off to on (switches from no substrate W to substrate W), the movement of the robot 100 in the second moving process S052 is stopped.

[0051] In addition, the second detection process S0521 further includes a fifth detection process S0522 in which the position of the edge portion E2 of the substrate W on the moving path of the first substrate detection section 130a is determined from a change in the detection state of the substrate W by the first substrate detection section 130a, and a sixth detection process S0523 in which the position of the edge portion E2 of the substrate W on the moving path of the second substrate detection section 130b is determined from a change in the detection state of the substrate W by the second substrate detection section 130b. For example, in the fifth detection process S0522, the position of the edge portion E2 on the other side in the first direction of the substrate W is detected from the switching of the detection signal from off to on (switching from no substrate W to substrate W) before and after the first substrate detection section 130a passes below the edge portion E2 on the other side in the first direction of the substrate W, and it is detected whether the first substrate detection section 130a passes through the edge portion E2 of the substrate W and returns to below the substrate W. In the sixth detection process S0523, the position of the edge portion E2 on the other side in the first direction of the substrate W is detected from the switching of the detection signal from off to on (switching from no substrate W to substrate W) before and after the second substrate detection section 130b passes below the edge portion E2 on the other side in the first direction of the substrate W, and it is detected whether the second substrate detection section 130b passes through the edge portion E2 of the substrate W and returns to below the substrate W. In addition, the position of the edge portion E2 determined in the fifth detection process S0522 is set as a third edge portion position P3, and the position of the edge portion E2 determined in the sixth detection process S0523 is set as a fourth edge portion position P4 Figure 9DIn the case where the inclination correction completion confirmation process S0524 is performed, the inclination correction process S051 can further include a second detection process S0521 in which the position of the edge E2 of the substrate W is detected. In this case, the inclination correction completion confirmation process S0524 can be performed based on the difference between the third edge position P3 and the fourth edge position P4 in the moving direction of the second moving process S052.

[0052] As another example, in the calculation process S04, the first stop position is calculated further based on the position of the edge E2 of the substrate W detected in the first detection process S02. In the second stop process S053, the movement in the second moving process S052 is stopped when the robot 100 reaches the first stop position. In this case, the second detection process S0521 can be omitted. Therefore, the timing of the execution of the second stop process S053 (i.e., the position of the robot 100 when the second moving process S052 is ended) can be determined using the substrate detection unit 130 and by the second detection process S0521, or can be determined by the calculation process S04. The present application is not limited thereto.

[0053] When described in detail, in the inclination correction process S051 of the robot 100 for correcting the inclination of the substrate W, the robot 100 is rotated so that the edge E2 on the other side of the first direction of the substrate W becomes parallel to the third direction (i.e., the left-right direction X1 as the width direction of the extension unit 120) of the robot 100. Therefore, in the robot 100 after the inclination correction process S051, the distance from the first substrate detection unit 130a to the edge E2 of the substrate W is equal to the distance from the second substrate detection unit 130b to the edge E2 of the substrate W. In particular, since the first substrate detection unit 130a and the second substrate detection unit 130b are arranged side by side at positions separated in the third direction, in the inclination correction completion confirmation process S0524, it is preferable that the position of the edge E2 of the substrate W determined by the first substrate detection unit 130a (i.e., the third edge position P3) coincides with the position of the edge E2 of the substrate W determined by the second substrate detection unit 130b (i.e., the fourth edge position P4) in the moving direction of the second moving process S052, and it is determined that the inclination correction is completed.

[0054] Therefore, in the inclination correction completion confirmation process S0524, whether the correction of the inclination of the robot 100 with respect to the substrate W is completed is determined based on whether the position in the moving direction of the second moving process S052 of the third edge portion position P3 based on the first substrate detection section 130a and the fourth edge portion position P4 based on the second substrate detection section 130b coincide (i.e., the difference between the third edge portion position P3 and the fourth edge portion position P4 becomes 0). Therefore, it is preferable to execute the inclination correction completion confirmation process S0524 during the second moving process S052. That is, with respect to the inclination correction process S051 and the second moving process S052, the second detection process S0521 (divided into the fifth detection process S0522 and the sixth detection process S0523 in the case of having two substrate detection sections 130) and the inclination correction completion confirmation process S0524 are executed in the order of first executing the inclination correction process S051 and then executing the second moving process S052, during which the second moving process S052 of the robot 100 is executed. Then, the movement in the second moving process S052 of the robot 100 is stopped in the second stop process S053.

[0055] In addition, a modification of the first embodiment is illustrated in Figure 10 In the modification of the first embodiment, the second substrate detection section 130b is further provided separately (i.e., offset) from the first substrate detection section 130a on one side of the second direction (the side on which the extension section 120 extends from the hand base 110 and the side indicated by the arrow of the front-rear direction Y1). Figure 10 is a view showing the state in the second stop process S053 of the modification of the first embodiment, and Figure 9DCorrespondingly. In the aforementioned case, during the tilt correction process S051 of the robot 100 for correcting the tilt of the substrate W, the robot 100 is rotated such that the edge E2 on the other side of the first direction of the substrate W is parallel to the third direction of the robot 100 (the left-right direction X1, which is the width direction of the extended setting portion 120). Therefore, during the second movement process S052, as the robot 100 moves toward the opening O of the receiving container H, either the offset first substrate detection portion 130a or the second substrate detection portion 130b passes below the edge E2 of the substrate W first. Therefore, in the second stop process S053, it is preferable to stop the movement of the robot 100 in the second movement process S052 at a position where either the first substrate detection portion 130a or the second substrate detection portion 130b detects the substrate W and the other does not detect the substrate W. That is, the substrate support 140 can be determined to have returned to below the substrate W by detecting the substrate W using either the first substrate detection unit 130a or the second substrate detection unit 130b, and the second stop step S053 can be executed to stop the movement of the robot arm 100. Thus, when supporting and transporting the substrate W (described later), the offset of the substrate W relative to the robot arm 100 in one side of the second direction and the other side of the second direction can be detected. Where the first substrate detection unit 130a and the second substrate detection unit 130b are offset, the second stop step S053 can be executed after both the first substrate detection unit 130a and the second substrate detection unit 130b have passed below the substrate W and detected the substrate W. The present invention is not limited to this.

[0056] As mentioned above, such as Figure 4 As shown, the lower surface of the substrate W has a contactable area R1 and a non-contactable area R2. Here, the substrate support 140 uses the correction process S05 to correct the position and posture of the robot 100 to achieve an appropriate positional relationship. Therefore, in the substrate support process S06, all substrate support parts 140 only contact the contactable area R1 of the substrate W. Next, the substrate W can be supported by the substrate support 140 and removed from the receiving container H. Specifically, as... Figure 9EAs shown, in the substrate support process S06, the substrate W is supported by the substrate support portion 140. For example, the substrate support portion 140, which is movable and provided in the extension setting portion 120 (provided on the upper surface 122 of the extension setting portion 120 in a way that can be stored or unfolded), is unfolded until it contacts the lower surface of the substrate W; or, the robot arm 100 is moved along the vertical direction Z until the substrate support portion 140, which is fixed and provided in the extension setting portion 120, contacts the lower surface of the substrate W, and the substrate W is supported by the substrate support portion 140. At this time, the substrate support portion 140 only contacts the contactable area R1 of the substrate W to support the substrate W (e.g., Figure 9E (As shown). Then, the substrate support 140 or the robot 100 is further moved along the vertical direction Z to lift the substrate W from the groove S of the receiving container H, thereby releasing the substrate W from contact with the receiving container H. Here, the substrate W is placed in the receiving container H in a loading posture on the groove S of the receiving container H, which serves as a loading member. In the substrate support process S06, the robot 100 is operated in a manner that lifts the substrate W upward from the groove S, which serves as a loading member, while maintaining the loading posture, without disrupting the relative position between the substrate W and the corrected robot 100.

[0057] Then, as Figure 9F As shown, in the removal process S07, the robot arm 100 supporting the substrate W is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y) to remove the substrate W from the receiving container H. Here, in the removal process S07, while the substrate W, lifted by the substrate support 140, is maintained in a loading posture, the robot arm 100 is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y), and the substrate W is removed from the receiving container H through the opening O facing one side in the first direction. Therefore, Figure 7 , Figure 8 , Figures 9A-9F , Figure 10 The substrate removal method and the substrate transfer system 20 using the substrate removal method, after correcting the position and posture of the robot 100 based on the tilt of the substrate W, allow the substrate support portion 140 of the robot 100 to contact and support the contactable area of ​​the substrate W. This allows the substrate W to be removed from the receiving container H while being supported, thus avoiding damage caused by the tilt of the substrate W. Furthermore, since the correction of the position and posture of the robot 100 based on the tilt of the substrate W is performed while the extension portion 120 of the robot 100 is within the receiving container H, a large-scale movement of the robot 100 before removing the substrate W is unnecessary. This improves the control stability during substrate removal and shortens the removal time.

[0058] Further, in the first embodiment, an example of the substrate take-out method when the substrate detection section 130 provided on the front end side of the extension section 120 detects the edge portion E2 of the substrate W located at a position apart from the opening portion O is described, but as shown in Figures 11A-11D , the substrate take-out method when the substrate detection section 130 provided on the front end side of the extension section 120 detects the edge portion E1 of the substrate W located at a position close to the opening portion O can also be used. Here, in order to describe the operation at the time of detection by the substrate detection section 130, Figures 11A-11D , the robot 100 shown in FIG. 1 omits members such as the substrate support section 140, but is not limited thereto. As shown in Figure 11A , in the first moving step S01, the robot 100 is caused to move to the other side in the first direction (one side indicated by the arrow of the front-rear direction Y) to insert the extension section 120 into the housing container H from the opening portion O. Here, in the first moving step S01 of the present embodiment, the same operation as in the first moving step S01 of the first embodiment shown in Figure 9A , can be performed. Further, in the first detecting step S02, the position of the edge portion E1 of the substrate W is determined based on the change in the detection state of the substrate W by the substrate detection section 130 in the first moving step S01. Then, as shown in Figure 11B , in the first stopping step S03, the movement of the robot 100 to the other side in the first direction (one side indicated by the arrow of the front-rear direction Y) is stopped after the first detecting step S02.

[0059] Specifically, as shown in Figure 11AAs shown, in the first moving step S01, the extension providing portion 120 is inserted under the substrate W toward the other side of the first direction (the side indicated by the arrow of the front-rear direction Y), and the substrate detection portion 130 provided on the front end side of the extension providing portion 120 passes under the edge portion E1 of the substrate W. In this case, in the first detecting step S02, based on the switching of the detection signals before and after the substrate detection portion 130 passes under the edge portion E1 of the substrate W, it is determined that the detection state of the substrate detection portion 130 with respect to the substrate W has changed, and the position of the edge portion E1 is determined. For example, in the first detecting step S02, based on the switching of the detection signals from off to on before and after the substrate detection portion 130 passes under the edge portion E1 on one side of the first direction of the substrate W (the switching of the state in which the substrate detection portion 130 determines that there is no substrate W to the state in which the substrate detection portion 130 determines that there is a substrate W), the position of the edge portion E1 on one side of the first direction of the substrate W on the moving path of the substrate 130 is determined. The first detecting step S02 corresponding to the edge portion E1 of the substrate W here can use the same detection method as the detection method of the first detecting step S02 corresponding to the edge portion E2 of the substrate W described above (for example, including the third detecting step S021 based on the first substrate detection portion 130a and the fourth detecting step S022 based on the second substrate detection portion 130b). In addition, as shown in FIG. 6, in the first detecting step S02, the substrate detection portion 130 can be inserted under the substrate W, and the detection signals before and after the substrate detection portion 130 passes under the edge portion E1 of the substrate W can be detected. Figure 11B As shown, in the first stopping step S03, the movement of the robot hand 100 is stopped at the position where the substrate detection portion 130 is located under the substrate W (the substrate detection portion 130 does not protrude from under the substrate W, and the state in which the substrate detection portion 130 determines that there is a substrate W). The operations from the first moving step S01 to the first stopping step S03 change as shown in FIG. 5, and the first detecting step S02 is performed between the first moving step S01 and the first stopping step S03. As an example, the first stopping step S03 can be performed at the time point when the movement of the robot hand 100 has passed a predetermined time after the position of the edge portion E1 is determined by the first detecting step S02, or at the time point when the robot hand 100 has moved a predetermined distance after the position of the edge portion E1 is determined by the first detecting step S02. In addition, in other embodiments not shown, in the first stopping step S03, the robot hand 100 can be moved to the position where the substrate detection portion 130 protrudes from under the substrate W as shown in FIG. 6. The present application is not limited thereto. Figures 11A-11B As shown, in the first stopping step S03, the movement of the robot hand 100 is stopped at the position where the substrate detection portion 130 is located under the substrate W (the substrate detection portion 130 does not protrude from under the substrate W, and the state in which the substrate detection portion 130 determines that there is a substrate W). The operations from the first moving step S01 to the first stopping step S03 change as shown in FIG. 5, and the first detecting step S02 is performed between the first moving step S01 and the first stopping step S03. As an example, the first stopping step S03 can be performed at the time point when the movement of the robot hand 100 has passed a predetermined time after the position of the edge portion E1 is determined by the first detecting step S02, or at the time point when the robot hand 100 has moved a predetermined distance after the position of the edge portion E1 is determined by the first detecting step S02. In addition, in other embodiments not shown, in the first stopping step S03, the robot hand 100 can be moved to the position where the substrate detection portion 130 protrudes from under the substrate W as shown in FIG. 6. The present application is not limited thereto. Figure 9B As shown, in the first stopping step S03, the movement of the robot hand 100 is stopped at the position where the substrate detection portion 130 is located under the substrate W (the substrate detection portion 130 does not protrude from under the substrate W, and the state in which the substrate detection portion 130 determines that there is a substrate W). The operations from the first moving step S01 to the first stopping step S03 change as shown in FIG. 5, and the first detecting step S02 is performed between the first moving step S01 and the first stopping step S03. As an example, the first stopping step S03 can be performed at the time point when the movement of the robot hand 100 has passed a predetermined time after the position of the edge portion E1 is determined by the first detecting step S02, or at the time point when the robot hand 100 has moved a predetermined distance after the position of the edge portion E1 is determined by the first detecting step S02. In addition, in other embodiments not shown, in the first stopping step S03, the robot hand 100 can be moved to the position where the substrate detection portion 130 protrudes from under the substrate W as shown in FIG. 6. The present application is not limited thereto.

[0060] In addition, in the calculation process S04, the tilt of the substrate W relative to the robot arm 100 is calculated based on the position of the edge E1 of the substrate W detected in the first detection process S02. In the correction process S05, the position and posture of the robot arm 100 are corrected based on the tilt of the substrate W calculated in the calculation process S04, and includes: a tilt correction process S051 to correct the posture of the robot arm 100; a second movement process S052 to move the robot arm 100 such that the substrate detection unit 130 provided on the front end side moves toward the edge E2 of the substrate W; and a second stop process S053 to stop the movement of the robot arm 100 in the second movement process S052 after the tilt correction process S051 is completed, when the substrate support 130 is below the substrate W and the substrate detection unit 130 detects the position of the substrate W.

[0061] As an example, such as Figure 11C As shown, in the tilt correction process S051, the posture of the robot 100 on the horizontal plane is corrected based on the tilt direction and tilt amount calculated in the calculation process S04. For example, the posture of the robot 100 is corrected so that the edge E1 on one side of the first direction of the substrate W is parallel to the third direction of the robot 100 (for example, the robot 100 is rotated in a plane formed by the left-right direction X and the front-back direction Y). The tilt correction process S051 corresponding to the edge E1 of the substrate W can also adopt the same method as the tilt correction process S051 corresponding to the edge E2 of the substrate W described above (for example, the tilt correction completion confirmation process S0524 is performed in the second movement process S052). In addition, as Figure 11D As shown, in the second moving process S052, the robot arm 100 is moved such that the substrate detection section 130 located below the substrate W moves towards the edge E2 of the substrate W. For example, in Figure 11D In this case, the robot arm 100 is moved in a direction parallel to the second direction (the forward / backward direction Y1, which is the extension direction of the extension portion 120 of the robot arm 100), but it can also move to one side of the first direction (the side opposite to the side indicated by the arrow in the forward / backward direction Y). Figure 11D As shown, in the second stopping step S053, the movement of the robot arm 100 in the second moving step S052 is stopped. Here, the execution time of the second stopping step S053 can be set as, for example, when the robot arm 100 reaches the first stopping position calculated in step S04 based on the position of the edge E1 of the substrate W. The present invention is not limited to this.

[0062] Therefore, by means of Figures 11A-11D After correcting the position and posture of the robot arm 100 tilting the substrate W in the previous process, the above-described process can be performed. Figure 9E The substrate support process S06 shown is...Figure 9F The substrate W is taken out from the housing container H while being supported by the same means as the substrate support process S06 and the take-out process S07 shown in the first embodiment. Figures 11A-11D The edge portion detected by the substrate detection portion 130 provided at the front end side of the extension provided portion 120 is different, and the same means as described above can be adopted. Figure 9E The substrate W is taken out from the housing container H while being supported by the same means as the substrate support process S06 and the take-out process S07 shown in the first embodiment. Figure 9F The substrate W is taken out from the housing container H while being supported by the same means as the substrate support process S06 and the take-out process S07 shown in the first embodiment.

[0063] Accordingly, in the first embodiment in which the substrate detection portion 130 is provided at the front end portion of the extension provided portion 120 of the robot 100, either one of the edge portion E1 and the edge portion E2 of the substrate W can be detected in the first detection process S02. In addition, in the case where the edge portion E2 is detected, the stop position of the first stop process S03 is the position at which the substrate detection portion 130 protrudes from the substrate W, and the moving direction of the second moving process S052 is the direction in which the substrate detection portion 130 protruding from the substrate W returns to the lower side of the substrate W toward the opening portion O of the housing container H (for example, toward one side of the first direction). In contrast, in the case where the edge portion E1 is detected, the stop position of the first stop process S03 can be the position at which the substrate detection portion 130 is located at the lower side of the substrate W (not protruding), or can be the position at which the substrate detection portion 130 protrudes from the substrate W. In addition, the moving direction of the second moving process S052 can be the direction in which the substrate detection portion 130 located at the lower side of the substrate W moves toward the other side of the first direction, or can be the direction in which the substrate detection portion 130 protruding from the substrate W returns to the lower side of the substrate W. The present application is not limited thereto.

[0064] Next, by Figures 12A-12FWith respect to the substrate take-out method related to the second embodiment, the substrate detection section 130 is provided on the other side (the side opposite to the side indicated by the arrow of the front-rear direction Y1) of the second direction of the extension-provided section 120, that is, the base end side (the side of the extension-provided section 120 close to the hand base 110), and includes the first substrate detection section 130a and the second substrate detection section 130b provided separately in the third direction (the left-right direction X1) orthogonal to the second direction (the front-rear direction Y1). In this case, the substrate detection section 130 provided on the base end side of the extension-provided section 120 is difficult to pass the edge portion E2 of the substrate W away from the opening section O, and thus, it is not preferable to detect the edge portion E2 of the substrate W away from the opening section O by the substrate detection section 130 provided on the base end side of the extension-provided section 120, but it is not excluded. It is preferable that the substrate detection section 130 provided on the base end side of the extension-provided section 120 passes below the edge portion E1 close to the opening section O, and thus, the position of the edge portion E1 of the substrate W close to the opening section O is determined by the substrate detection section 130 provided on the base end side of the extension-provided section 120. Here, in order to describe the detection by the substrate detection section 130, the substrate detection section 130 provided on the base end side of the extension-provided section 120 is described as passing below the edge portion E1 close to the opening section O, but it is not excluded. Figures 12A-12D The substrate support section 140 and the like are omitted from the robot 100 shown in FIG. 10, but are not limited thereto. First, as shown in FIG. 11, in the first moving process S01, the robot 100 is moved to the other side (the side indicated by the arrow of the front-rear direction Y) of the first direction, and the extension-provided section 120 is inserted into the housing container H from the opening section O. Here, the same operation as the first moving process S01 shown in FIG. 10 can be performed in the first moving process S01 of the present embodiment. In addition, the first detection process S02 determines the position of the edge portion E1 of the substrate W according to the change in the detection of the substrate W by the substrate detection section 130 in the first moving process S01. Then, as shown in FIG. 12, in the first stopping process S03, the movement of the robot 100 toward the other side (the side indicated by the arrow of the front-rear direction Y) of the first direction is stopped. Figure 12A Figure 9A Figure 12B

[0065] Specifically, as shown in FIG. 13, in the second moving process S11, the robot 100 is moved to the other side (the side indicated by the arrow of the front-rear direction Y) of the first direction, and the extension-provided section 120 is inserted into the housing container H from the opening section O. Here, the same operation as the first moving process S01 shown in FIG. 10 can be performed in the second moving process S11 of the present embodiment. In addition, the second detection process S12 determines the position of the edge portion E1 of the substrate W according to the change in the detection of the substrate W by the substrate detection section 130 in the second moving process S11. Then, as shown in FIG. 14, in the second stopping process S13, the movement of the robot 100 toward the other side (the side indicated by the arrow of the front-rear direction Y) of the first direction is stopped. Figure 12A ​​​As shown, in the first moving step S01, the robot arm 100 is moved toward the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) and the extension setting part 120 is inserted under the substrate W, so that the substrate detection part 130 provided on the base end side of the extension setting part 120 passes under the edge E1 of the substrate W. In this case, in the first detection step S02, based on the switching of the detection signal before and after the substrate detection part 130 passes under the edge E1 of the substrate W, it is determined that the detection status of the substrate detection part 130 on the substrate W has changed, and the position of the edge E1 is determined. For example, in the first detection step S02, based on the switching of the detection signal before and after the substrate detection part 130 passes under the edge E1 of the substrate W located on one side of the first direction from off to on (the switching of the substrate detection part 130 determining that the substrate W is not present to the determination that the substrate W is present), the position of the edge E1 located on one side of the first direction of the substrate W on the moving path of the substrate detection part 130 is determined. The first detection process S02 corresponding to the edge E1 of the substrate W may further include a third detection process S021 utilizing the first substrate detection unit 130a and a fourth detection process S022 utilizing the second substrate detection unit 130b. Additionally, as... Figure 12B As shown, in the first stop step S03, the movement of the robot arm 100 is stopped at a location where the substrate detection unit 130 is located below the substrate W. The operations from the first movement step S01 to the first stop step S03 are as follows: Figures 12A-12B The process changes as shown, and the first detection step S02 is performed between the first moving step S01 and the first stopping step S03. Regarding the timing of the first stopping step S03, as an example, it is immediately after the position of the edge portion E1 is determined by the first detection step S02. Alternatively, it can be set at a point where a predetermined time has elapsed since the position of the edge portion E1 was determined by the first detection step S02, or at a point where the robot arm 100 has moved a predetermined distance since the position of the edge portion E1 was determined by the first detection step S02. The present invention is not limited to these methods.

[0066] After the first stop step S03, while keeping the extension portion 120 of the robot arm 100 within the receiving container H and below the substrate W, the calculation step S04 and the correction step S05 are performed. Specifically, in the calculation step S04, the tilt of the substrate W relative to the robot arm 100 is calculated based on the position of the edge E1 of the substrate W detected in the first detection step S02. As an example, in the calculation step S04, the direction and amount of tilt on the horizontal plane of the substrate W are calculated. Furthermore, in the correction process S05, the position and posture of the robot 100 are corrected based on the tilt of the substrate W calculated in the calculation process S04, and include: a tilt correction process S051, correcting the posture of the robot 100; a second movement process S052, moving the robot 100 such that the substrate detection unit 130 provided on the base end side moves toward the edge E1 of the substrate W; and a second stop process S053, stopping the movement of the robot 100 in the second movement process S052 after the tilt correction process S051 is completed, with the substrate support unit 130 located below the substrate W and the substrate detection unit 130 detecting the position of the substrate W. In the correction process S05, correction is performed while the extension part 120 of the robot 100 is located within the receiving container H. That is, the position and posture of the robot 100 are corrected while the robot 100 inserted into the receiving container H is located within the receiving container H.

[0067] As an example, such as Figure 12C As shown, in the tilt correction process S051, the posture of the robot 100 on the horizontal plane is corrected based on the tilt direction and tilt amount calculated in the calculation process S04. For example, the posture of the robot 100 is corrected so that the edge E1 on one side of the first direction of the substrate W is parallel to the third direction (left-right direction X1) of the robot 100 (for example, the robot 100 is rotated in the plane formed by the left-right direction X and the front-back direction Y). Next, as Figure 12DAs shown, in the second moving step S052, the robot 100 is caused to move in a direction toward the opening portion O of the housing container H, and in the second stopping step S053, the movement of the robot 100 in the direction toward the opening portion O is stopped in a state where the substrate detection portion 130 is positioned in the vicinity of the edge portion El of the substrate W and it is determined that the substrate W is present. For example, the robot 100 is caused to move along a linear route to one side in the first direction (for example, a side opposite to the side indicated by the arrow of the front-rear direction Y), and it is also possible to include a case other than the linear movement in the first direction (the front-rear direction Y, and parallel to the groove S in which the substrate W is placed in the housing container H), the second direction (the front-rear direction Yl, and parallel to the extending direction of the extension provided portion 120 of the robot 100), or the linear movement. In addition, the tilt correction step S051 and the second moving step S052 are executed simultaneously or in the order of first executing the tilt correction step S051 ( Figure 12C ), and then executing the second moving step S052 ( Figure 12D ). Then, as shown in Figure 12D , in the second stopping step S053, the movement of the robot 100 in the direction toward the opening portion O of the housing container H is stopped. That is, at the time point when the second stopping step S053 is executed, the second moving step S052 is ended.

[0068] In addition, in the second moving step S052 of the second embodiment, after the completion of the tilt correction step S051 shown in Figure 12C , the robot 100 is caused to move in a direction toward the opening portion O. In this process, the substrate detection portion 130 passes below the edge portion El of the substrate W, detects the position of the edge portion El of the substrate W by detecting the switching from the ON to the OFF of the detection signal (the switching from the presence of the substrate W to the absence of the substrate W), and then stops the movement of the robot 100 in the direction toward the opening portion O. Then, the robot 100 is caused to start moving again in a direction toward the other side in the first direction (the side indicated by the arrow of the front-rear direction Y), the substrate detection portion 130 passes below the edge portion El of the substrate W, detects the position of the edge portion El of the substrate W by detecting the switching from the OFF to the ON of the detection signal (the switching from the absence of the substrate W to the presence of the substrate W), and then stops the movement of the robot 100 in the direction toward the other side in the first direction. In this way, in the second moving step S052 after the tilt correction step S051 in the case of the second embodiment, the robot 100 is returned (moved in the direction toward the opening portion O) or advanced (moved in the direction toward the other side in the first direction), and it is possible to stop the robot 100 in a state where the substrate detection portion is positioned in the vicinity of the edge portion El and the presence of the substrate W is detected as shown in Figure 12D .

[0069] Further, as another embodiment, there is a case where the first stop position is calculated based on the position of the edge portion E1 detected in the first moving process S01, and the second moving process S052 is stopped when the robot 100 reaches the first stop position. In detail, in the calculation process S04, the first stop position where the substrate detection portion 130 is positioned in the vicinity of the edge portion E1 of the substrate W and is in a state where the substrate W is determined to be present is calculated further based on the position of the edge portion E1 of the substrate W detected in the first moving process S01, and in the second stop process S053, the movement in the second moving process S052 is stopped when the robot 100 reaches the first stop position. In the case, the second detection process S0521 (including the fifth detection process S0522 using the first substrate detection portion 130a and the sixth detection process S0523 using the second substrate detection portion 130b) described above can be omitted. Therefore, the timing of execution of the second stop process S053 (i.e., the position of the robot 100 when the second moving process S052 ends) can be determined by the second detection process S0521 (using the substrate detection portion 130) or by the calculation process S04. The present application is not limited thereto. Further, the correction process S05 corresponding to the edge portion E1 of the substrate W here can also employ a means including the inclination correction completion confirmation process S0524.

[0070] Thereby, after the position and the posture of the robot 100 with respect to the inclination of the substrate W are corrected by the processes from Figures 12A-12D , the substrate support process S06 shown in Figure 12E and the substrate extraction process S07 shown in Figure 12F can be performed while the substrate W is supported. Figure 12E The substrate support process S06 shown in Figure 12F and the substrate extraction process S07 shown in Figure 9E can employ the same means (the position of the substrate detection portion 130 is different) as the substrate support process S06 shown in Figure 9F and the substrate extraction process S07 shown in Figures 9A-11D . That is, the substrate detection portion 130 provided on the front end side of the extension portion 120 can detect the edge portion E (either one of the edge portion E1 and the edge portion E2) as a basis for correction by the processes from Figures 12A-12F .The substrate detection section 130 can be provided at the tip end of the extension section 120 (first embodiment), or at the base end of the extension section 120 (second embodiment). In other embodiments not shown, the substrate detection section 130 can be provided at multiple positions of the tip end and the base end of the extension section 120, or between the tip end and the base end. As long as the substrate detection section 130 passes through the position of at least one linear edge E (either edge El or edge E2) of the substrate W, the position of the edge E (either edge El or edge E2) is determined, and the position and posture of the robot 100 are corrected based on the inclination of the substrate W, and then the substrate support section 140 of the robot 100 contacts the area of the substrate W that can be contacted, the substrate W can be supported while being taken out from the housing container H. The present application is not limited to this.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not limited thereto. The present application is described in detail with reference to the embodiments, but those skilled in the art will certainly understand that the technical solutions described in the embodiments can still be modified or replaced by equivalent parts or all of the technical features, but these modifications or replacements do not deviate from the essence of the corresponding technical solutions and are within the scope of the technical solutions of the embodiments of the present application.

[0072] Industrial applicability

[0073] The substrate taking-out method and the substrate transfer system using the same can improve the control stability when taking out the substrate and shorten the time when taking out the substrate W.

[0074] Explanation of reference numerals

[0075] 20: substrate transfer system

[0076] 22: substrate transfer module

[0077] 22a: frame

[0078] 22b: moving body

[0079] 22c: guide structure

[0080] 24: control section

[0081] 30: substrate transfer robot

[0082] 32: arm section

[0083] 34: main body portion

[0084] 36: arm driving portion

[0085] 100: robot

[0086] 110: hand base

[0087] 120: extension portion

[0088] 122: upper surface

[0089] 124: mounting plate

[0090] 130: substrate detecting portion

[0091] 130a: first substrate detecting portion

[0092] 130b: second substrate detecting portion

[0093] 140: substrate supporting portion

[0094] 140A: first substrate supporting portion

[0095] 140B: second substrate supporting portion

[0096] 140C: third substrate supporting portion

[0097] 150: restricting portion

[0098] 150A: first restricting portion

[0099] 150B: second restricting portion

[0100] 160: driving portion

[0101] C1: load port

[0102] C2: processing device

[0103] D1: difference

[0104] D2: distance

[0105] E: edge portion

[0106] E1: edge portion

[0107] E2: edge portion

[0108] H: containing container

[0109] L: center line

[0110] O: opening portion

[0111] P1: first edge portion position

[0112] P2: second edge portion position

[0113] P3: third edge portion position

[0114] P4: fourth edge portion position

[0115] S: slot

[0116] S01: first moving step

[0117] S02: first detecting step

[0118] S021: third detecting step

[0119] S022: fourth detecting step

[0120] S03: first stopping step

[0121] S04: calculating step

[0122] S05: correcting step

[0123] S051: inclination correcting step

[0124] S052: second moving step

[0125] S0521: second detecting step

[0126] S0522: fifth detecting step

[0127] S0523: sixth detecting step

[0128] S0524: inclination correcting completion confirming step

[0129] S06: substrate supporting step

[0130] S07: taking-out step

[0131] W: substrate

[0132] X: left-right direction

[0133] X1: left-right direction

[0134] Y: front-rear direction

[0135] Y1: front-rear direction

[0136] Z: up-down direction

[0137] Z1: up-down direction

[0138] θ: inclination angle

Claims

1. A substrate take-out method of taking out a substrate placed at a prescribed position in a housing container having an opening portion on one side in a first direction by a hand provided in a substrate transfer robot, the substrate take-out method characterized by, the hand including a hand base, an extension provided portion extending from the hand base to one side in a second direction, a substrate detection portion provided in the extension provided portion, and a substrate support portion provided in the extension provided portion, and being controlled by a control device, the substrate take-out method including: a first movement process of moving the hand to the other side in the first direction to insert the extension provided portion into the housing container from the opening portion; a first detection process of determining a position of at least one linear-shaped edge portion of the substrate based on a change in a detection state of the substrate by the substrate detection portion in the first movement process; a first stop process of stopping movement of the hand toward the other side in the first direction; a calculation process of calculating a tilt of the substrate with respect to the hand based on the position of the edge portion of the substrate detected in the first detection process; a correction process of correcting a position and posture of the hand based on the tilt of the substrate calculated in the calculation process; a substrate support process of supporting the substrate by the substrate support portion; and a take-out process of moving the hand supporting the substrate to one side in the first direction to take out the substrate from the housing container, in the correction process, correction is performed in a state where the extension provided portion of the hand is located in the housing container.

2. The substrate take-out method according to claim 1, characterized in that, the correction process includes: a tilt correction process of correcting the posture of the hand; a second movement process of moving the hand with the substrate detection portion toward the edge portion of the substrate in the first direction; and a second stop process of stopping movement of the hand in the second movement process after completion of the tilt correction process, in a state where the substrate support portion is located below the substrate and the substrate detection portion detects the position of the substrate.

3. The substrate take-out method according to claim 2, characterized in that, in the first movement process, the substrate detection portion is caused to pass below the edge portion of the substrate by moving the extension provided portion below the substrate toward the other side in the first direction, in the first detection process, it is determined that the detection state of the substrate detection portion by the substrate has changed based on switching of detection signals before and after the substrate detection portion passes below the edge portion of the substrate to determine the position of the edge portion.

4. The substrate take-out method according to claim 3, characterized in that, in the first stop process, movement of the hand is stopped at a position where the substrate detection portion protrudes from below the substrate toward the other side in the first direction, in the second movement process, the hand is moved toward the opening portion of the housing container, ​ ​ In the second stop process, after the substrate detection section passes under the edge portion on the other side in the first direction of the substrate and the detection signal switches from off to on, movement of the robot in the second movement process is stopped.

5. The substrate take-out method according to claim 4, wherein In the first detection process, the position of the edge portion on the other side in the first direction of the substrate is detected based on switching of the detection signal from on to off before and after the substrate detection section passes under the edge portion on the other side in the first direction of the substrate.

6. The substrate take-out method according to claim 2, wherein In the calculation process, a direction and an amount of tilt in a horizontal plane of the substrate are calculated, In the tilt correction process, the posture of the robot in the horizontal plane is corrected based on the calculated direction and amount of tilt.

7. The substrate take-out method according to claim 2, wherein The second movement process further includes a second detection process, In the second detection process, a change in the detection state of the substrate detection section with respect to the substrate is detected, In the second stop process, movement of the robot in the second movement process is stopped after the second detection process.

8. The substrate take-out method according to claim 2, wherein In the calculation process, a first stop position is further calculated based on the position of the edge portion of the substrate, In the second stop process, movement in the second movement process is stopped when the robot reaches the first stop position.

9. The substrate take-out method according to claim 2, wherein The tilt correction process and the second movement process are performed simultaneously or in the order of first performing the tilt correction process and then performing the second movement process.

10. The substrate take-out method according to claim 2, wherein In the tilt correction process, the posture of the robot is corrected in such a manner that the edge portion on one side or the other side in the first direction of the substrate is parallel to a third direction orthogonal to the second direction of the robot.

11. The substrate take-out method according to claim 1, wherein The substrate is placed in a placement posture on a placement member of the accommodation container in the accommodation container, In the substrate support process, the substrate is lifted upward from the placement member while being maintained in the placement posture, In the take-out process, the robot is moved to one side in the first direction while maintaining the substrate lifted by the substrate support section in the placement posture, to take out the substrate from the accommodation container.

12. The substrate take-out method according to claim 2, wherein The substrate detection section includes a first substrate detection section and a second substrate detection section disposed separately from the first substrate detection section in a third direction orthogonal to the second direction, The first detection process includes: a third detecting step of determining a position of the edge portion of the substrate based on a change in a detection state of the substrate by the first substrate detecting section; and a fourth detecting step of determining a position of the edge portion of the substrate based on a change in a detection state of the substrate by the second substrate detecting section, the position of the edge portion determined in the third detecting step is regarded as a first edge portion position, the position of the edge portion determined in the fourth detecting step is regarded as a second edge portion position, in the calculating step, based on first distance information corresponding to a difference in the second direction between the first edge portion position and the second edge portion position, and second distance information corresponding to a distance apart in the third direction between the first substrate detecting section and the second substrate detecting section, a direction and an amount of inclination of the substrate with respect to the third direction of the robot are calculated.

13. The substrate taking-out method according to claim 12, wherein in the first stopping step, the movement of the robot in the other side of the first direction in the first moving step is stopped at a position where both the first substrate detecting section and the second substrate detecting section protrude from below the substrate, with respect to the inclination correcting step and the second moving step, the inclination correcting step is performed first, and then the second moving step is performed in this order, the second moving step further includes: a fifth detecting step of determining a position of the edge portion of the substrate based on a change in a detection state of the substrate by the first substrate detecting section; and a sixth detecting step of determining a position of the edge portion of the substrate based on a change in a detection state of the substrate by the second substrate detecting section, the position of the edge portion determined in the fifth detecting step is regarded as a third edge portion position, the position of the edge portion determined in the sixth detecting step is regarded as a fourth edge portion position, the correcting step further includes an inclination correction completion confirming step in which, based on a difference between the third edge portion position and the fourth edge portion position, it is determined that the inclination correction of the robot with respect to the substrate has been completed.

14. The substrate taking-out method according to claim 12, wherein the second substrate detecting section is further provided separately from the first substrate detecting section on one side of the second direction, in the second stopping step, the movement of the robot in the second moving step is stopped at a position where one of the first substrate detecting section and the second substrate detecting section detects the substrate, and the other does not detect the substrate.

15. A substrate transfer system comprising: a substrate carrying robot including a robot for supporting a substrate, and a moving mechanism for holding the robot in a movable manner; a substrate carrying module in which the substrate carrying robot is provided inside; and a control device for controlling the substrate carrying robot, the substrate transfer system is characterized in that, ​ The substrate transfer robot includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided at the extension portion, and a substrate support portion provided at the extension portion, and is controlled by the control device, The control device controls the substrate transfer robot and takes out a substrate placed at a prescribed position in a housing container using the hand by the substrate taking-out method according to any one of claims 1 to 14.

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