Modularized mechanical arm

Abstract

The invention relates to the technical field of semiconductor equipment, and provides a modular mechanical arm which comprises at least one arm body, and each arm body comprises an arm main body, a plurality of connecting rods and a plurality of connecting rods, the at least one suspension is arranged in the cavity and forms at least one bearing surface along the height direction of the cavity, and the suspension is detachably coupled with a reference wall in the walls or a wall opposite to the reference wall or a wall surrounding the peripheral side of the reference wall or integrally constructed with the reference wall or the wall surrounding the peripheral side of the reference wall; and the at least one belt wheel is arranged on the bearing surface in a rotatable manner. The belt wheels are independently installed on the suspension frame, the suspension frame is rigidly fixed in the cavity, vibration transmission in the transmission process is reduced, mechanical interference between the belt wheels in an existing structure is eliminated, and the conveying precision is improved. The suspension is rigidly fixed to the wall of the cavity, the overall rigidity of a transmission system is improved, radial loads generated by the tensioning force of the synchronous belt are effectively resisted, the angular deviation of a wheel shaft is reduced, and the positioning precision of the end effector is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more particularly to a modular robotic arm. Background Technology

[0002] In the semiconductor manufacturing field, wafer transfer robots are key automated equipment in the wafer processing process, and their motion accuracy and structural stability directly affect the wafer production efficiency and yield.

[0003] In existing technologies, the upper or lower arm of a wafer transfer robot often adopts an integrated structure design. To achieve independent operation of the upper arm, lower arm, and end effector, traditional robots have multi-stage transmission mechanisms installed in the upper arm and / or lower arm. The pulleys of the multiple stages are directly connected by bearings. When one pulley rotates, its vibration or displacement is transmitted to other pulleys through the bearings, aggravating transmission errors and affecting the stability of wafer transfer. Furthermore, the tension of the multi-stage synchronous belt accumulates step by step, causing the wheel bearings to be subjected to a large radial load, which can easily cause wheel axle angle deviation. After being amplified by the multi-stage transmission, this ultimately leads to a decrease in the positioning accuracy of the end effector.

[0004] In view of this, it is necessary to propose a modular robotic arm to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a modular robotic arm to solve the problem that the transmission accuracy of the end effector is affected by the connection between multiple pulleys in the existing arm through bearings.

[0006] This invention provides a modular robotic arm, comprising at least one arm body, the arm body including: The arm body has a chamber and a wall surrounding the chamber; At least one suspension is disposed in the cavity and forms at least one load-bearing surface along the height direction of the cavity. The suspension is detachably coupled to or integrally constructed with a reference wall in the wall, or a wall opposite to the reference wall, or a wall surrounding the periphery of the reference wall. At least one pulley is rotatably disposed on the bearing surface.

[0007] In one possible embodiment, for the case where the suspension is detachably coupled to the wall on the periphery of the reference wall, at least one fixing part is formed on the periphery of the suspension, and the wall on the periphery of the reference wall is provided with a groove corresponding to the fixing part, and the fixing part is detachably installed in the corresponding groove.

[0008] In one possible embodiment, for the case where the suspension is integrally constructed with the wall around the reference wall, at least one fixing part is formed on the periphery of the suspension, and the fixing part is integrally constructed with the wall around the reference wall.

[0009] In one possible embodiment, the side of the pulley away from the other wheel body with which it is driven is defined as the back side, and the suspension has at least one fixing point between itself and the wall, with at least one fixing point located on the end side of the suspension near the back side of its pulley.

[0010] In one possible embodiment, when there is one fixing point, the fixing point is located at the middle of the end side of the suspension near the back side of its pulley; or, there is at least one pair of fixing points, each pair of fixing points is symmetrically distributed around the periphery of the suspension, and one of the fixing points in each pair is located at the end side of the suspension near the back side of its pulley.

[0011] In one possible embodiment, the bearing surface is provided with an annular mounting body, and the pulley is rotatable around the mounting body.

[0012] In one possible embodiment, the pulley is connected to the mounting body via a first bearing. In one possible embodiment, the mounting body includes an annular support portion and an annular protrusion extending vertically from the outer periphery of the support portion, the protrusion and the support portion forming a limiting groove for mounting the first bearing.

[0013] In one possible embodiment, the suspension includes a frame body, the top and bottom surfaces of which are the two load-bearing surfaces of the suspension.

[0014] In one possible embodiment, the frame body is annular and extends inward along the inner periphery of the frame body to form a pair of symmetrically arranged transition portions, the transition portions and the mounting bodies are respectively arranged in a one-to-one correspondence, and the mounting bodies are disposed on the corresponding transition portions.

[0015] In one possible embodiment, for cases where the suspension is detachably coupled to or integrally constructed with the wall surrounding the reference wall, the modular robotic arm further includes a single wheel rotatably disposed on the reference wall; and / or, the modular robotic arm further includes a single wheel rotatably disposed on a wall opposite to the reference wall. The advantages of the modular robotic arm provided by this invention are as follows: 1. Each pulley is independently mounted on the suspension and the suspension is rigidly fixed in the cavity, which reduces vibration transmission during the transmission process, eliminates mechanical interference between pulleys in the existing structure, and improves transmission accuracy.

[0016] 2. The rigidity of the suspension and the chamber walls improves the overall rigidity of the transmission system, effectively resists the radial load generated by the synchronous belt tension, reduces wheel axle angle deviation, and improves the positioning accuracy of the end effector.

[0017] 3. At least one of the fixing points is located on the end side of the suspension near the back side of its pulley to counteract the force of the timing belt on the pulley of the suspension and improve the stability of the structure.

[0018] 4. By rationally setting the suspension structure, each suspension is equipped with at least two pulleys, ensuring that different pulleys are located at different transmission heights while achieving a compact spatial layout. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the modular robotic arm of the present invention.

[0020] Figure 2 This is a schematic diagram of the segmented body, pulleys, and single-unit wheels in the modular robotic arm of the present invention.

[0021] Figure 3 This is a cross-sectional view of the mid-end body and single wheel of the modular robotic arm of the present invention.

[0022] Figure 4 This is a schematic diagram of the suspension and pulleys in the modular robotic arm of the present invention.

[0023] Figure 5 This is a cross-sectional view of the suspension and pulleys in the modular robotic arm of the present invention.

[0024] Figure 6 This is a schematic diagram of the suspension in the modular robotic arm of the present invention.

[0025] Figure 7 This is a cross-sectional view of the suspension in the modular robotic arm of the present invention.

[0026] Figure 8 This is a schematic diagram of a pair of suspensions, pulleys, and timing belts of the modular robotic arm of the present invention.

[0027] Figure 9 This is a schematic diagram of the modular robotic arm of the present invention, showing that the arm body is a segmented structure.

[0028] Explanation of reference numerals: 100, arm body; 110, wall around the reference wall; 111, groove; 120, suspension; 121, frame body; 1211, bearing surface; 122, fixing part; 123, mounting body; 1231, support part; 1232, protrusion; 1233, limiting groove; 1234, gap; 124, transition part; 130, pulley; 131, wheel body; 1311, mounting groove; 132, sliding part; 133, back. Side face; 134, gap; 140, first bearing; 150, single wheel; 160, second bearing; 170, synchronous belt; 180, anchor point; 190, segment body; 191, connecting plate; 192, end body; 193, cover plate; 194, mating surface; 195, perforation; 196, insert block; 197, slot; 198, fixing hole; 200, actuation assembly; 210, first end effector; 220, second end effector. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] To address the problems existing in the prior art, embodiments of the present invention provide a modular robotic arm, see [link to previous document]. Figure 1 and Figure 2 The modular robotic arm includes at least one arm body 100, which comprises an arm main body, at least one suspension 120, and at least one pulley 130. The arm main body has a cavity and a wall surrounding the cavity. At least one suspension 120 is disposed within the cavity and forms at least one bearing surface 1211 along the height direction of the cavity. The suspension 120 is detachably coupled to or integrally constructed with a reference wall, a wall opposite to the reference wall, or a wall 110 surrounding the reference wall. The reference wall is the top or bottom wall of the cavity. The detachable coupling can be a fastener connection, a snap-fit ​​connection, etc. At least one pulley 130 is rotatably mounted on the bearing surface 1211.

[0031] Compared to the existing technology where pulleys are directly connected by bearings, in this embodiment, each pulley 130 is respectively mounted on a bearing surface 1211 at a different height on the suspension 120, with one pulley 130 mounted on each bearing surface 1211. This allows different pulleys 130 to be located at different transmission heights, achieving independent installation between the pulleys 130. During transmission, the vibration of the pulleys 130 is significantly reduced due to the rigid fixation of the suspension 120 and the independent mounting of the pulleys 130, thus eliminating mechanical interference between them and improving transmission accuracy.

[0032] In existing technologies, pulleys are stacked in multiple layers along the height direction via bearings, forming a multi-stage transmission mechanism. The tension of the multi-stage synchronous belt accumulates progressively and acts on the bearings between the pulleys, causing the bearings to bear a large radial load, which in turn leads to wheel axle angular displacement. In this embodiment, however, the suspension 120 is rigidly fixed to the chamber wall, and the tension of the synchronous belt 170 is distributed throughout the overall structure of the suspension 120 and the chamber wall through the pulleys 130, preventing it from being transmitted to other pulleys 130. This avoids the problem of progressively accumulating tension of the multi-stage synchronous belt 170, prevents pulley 130 from shifting due to large radial loads, and improves the positioning accuracy of the end effector.

[0033] The specific fixing method of suspension 120 will be explained in detail below.

[0034] In the first embodiment, see Figure 3 and Figure 4 In the case where the suspension 120 is detachably coupled to the wall 110 on the periphery of the reference wall, at least one fixing part 122 is formed on the periphery of the suspension 120. The wall 110 on the periphery of the reference wall has a groove 111 corresponding to the fixing part 122. The groove 111 is adapted to the fixing part 122, and the fixing part 122 is detachably installed in the corresponding groove 111. The fixing part 122 is confined in the groove 111, which can effectively support the fixing part 122 and provide stable support force, making the connection between the suspension 120 and the chamber wall more secure and able to withstand larger loads without loosening.

[0035] Further, see Figure 3 The groove 111 extends from the top of the wall 110 on the periphery of the reference wall to the middle of the wall 110 on the periphery of the reference wall; and / or, the groove 111 extends from the bottom of the wall 110 on the periphery of the reference wall to the middle of the wall 110 on the periphery of the reference wall, and the fixing part 122 is locked and fixed in the corresponding groove 111 by fasteners.

[0036] Furthermore, the inner wall of the groove 111 and the fixing part 122 are respectively provided with mounting holes. By passing fasteners through the mounting holes of the fixing part 122 and the groove 111, the fixing part 122 is locked and fixed in the groove 111. The fasteners are bolts, screws, etc.

[0037] In the second embodiment, where the suspension 120 is integrally constructed with the wall 110 on the periphery of the reference wall, at least one fixing part 122 is formed on the periphery of the suspension 120, and the fixing part 122 is integrally constructed with the wall 110 on the periphery of the reference wall. This integral construction design improves the overall integrity and rigidity of the structure, avoiding assembly errors caused by manufacturing processes.

[0038] In a preferred embodiment, see Figure 4 The width of the fixing part 122 in the horizontal direction gradually decreases from the end near the suspension 120 to the end away from the suspension 120, which facilitates the insertion of the small end of the fixing part 122 into the groove 111 and makes installation easier. Specifically, the fixing part 122 is triangular or trapezoidal in shape.

[0039] In the third embodiment, for the case where the suspension 120 is detachably coupled to or integrally constructed with the reference wall or the wall opposite to the reference wall, at least one fixing rod is provided on the periphery of the suspension 120 by means of detachable coupling or integral construction. The end of the fixing rod away from the suspension 120 is fixed to the reference wall or the wall opposite to the reference wall by means of detachable coupling or integral construction, so that the suspension 120 is suspended or supported in the cavity.

[0040] In one embodiment, see Figure 8 The side of the pulley 130 furthest from the other wheel connected to it in transmission is defined as the back side 133. The suspension 120 has at least one fixing point between itself and the wall. The at least one fixing point is located on the end side of the suspension 120 near the back side 133 of its pulley 130. The fixing point is the connection between the suspension 120 and the chamber wall. In the aforementioned embodiment, the fixing point is the fixing part 122.

[0041] During transmission, the synchronous belt 170 applies a force to the pulley 130, and the direction of this force is consistent with the direction of movement of the synchronous belt 170. After the force of the pulley 130 is transmitted to the suspension 120, the suspension 120 will also be subjected to a force consistent with the direction of movement of the synchronous belt 170. The back side 133 of the pulley 130, which is the side opposite to the direction of movement of the synchronous belt 170, is fixed at the end of the suspension 120 near the back side 133 of its pulley 130. This can effectively counteract the influence of tangential force on the suspension 120, thereby improving the stability of the suspension 120.

[0042] In a first embodiment, when there is only one fixing point, the fixing point is located at the middle of the end side of the suspension 120 near the back side 133 of its pulley 130.

[0043] In the second specific embodiment, see Figure 8 There are at least one pair of fixing points, each pair of fixing points is symmetrically distributed around the periphery of the suspension 120, and one of the fixing points in each pair is located on the end side of the suspension 120 near the rear side 133 of its pulley 130. The symmetrically arranged fixing points form symmetrical support and fixation, effectively offsetting and dispersing the load of the suspension 120.

[0044] In the third specific embodiment, see Figure 6 The fixing points are multiple and evenly distributed along the periphery of the suspension 120, for example, at intervals of 180°, 90° or 60°. The load of the suspension 120 is evenly distributed to the chamber wall through the multiple evenly distributed fixing points.

[0045] The specific structure of suspension 120 will be explained in detail below.

[0046] In one embodiment, see Figure 5 and Figure 7 The bearing surface 1211 is provided with a ring-shaped mounting body 123, and the pulley 130 can rotate around the mounting body 123.

[0047] Further, see Figure 5 The pulley 130 is connected to the mounting body 123 via a first bearing 140. The first bearing 140 reduces friction, making the pulley 130 rotate more smoothly. Specifically, the first bearing 140 is a crossed roller bearing.

[0048] Furthermore, see Figure 5 , Figure 6 and Figure 7 The mounting body 123 includes an annular support portion 1231 and an annular protrusion 1232 extending vertically and formed on the outer periphery of the support portion 1231. The protrusion 1232 and the support portion 1231 enclose a limiting groove 1233 to install the first bearing 140.

[0049] In one specific embodiment, see Figure 5 The pulley 130 includes a ring-shaped, horizontally arranged wheel body 131 and a sliding portion 132 disposed around the outer periphery of the wheel body 131. The wheel body 131 has a mounting groove 1311 on the side near the mounting body 123 to mount the end of the first bearing 140, forming a gap 134 between the wheel body 131 and the protrusion 1232. The sliding portion 132 is arranged around the mounting body 123 and can rotate around it. The pulley 130 has a similar flat structure, and the installation between the pulley 130 and the mounting body 123 is compact, achieving a compact layout in the vertical space.

[0050] In one embodiment, see Figure 5 , Figure 6 and Figure 7 The suspension 120 includes a frame body 121, and the top and bottom surfaces of the frame body 121 are the two load-bearing surfaces 1211 of the suspension 120.

[0051] Further, see Figure 5 and Figure 7 The frame body 121 is annular and extends inward along its inner periphery to form a pair of symmetrically arranged transition portions 124. Each transition portion 124 corresponds to a mounting body 123, with the mounting body 123 positioned on the corresponding transition portion 124. The symmetrical arrangement of the pair of transition portions 124 and the pair of mounting bodies 123 on the frame body 121 results in a more balanced structural stress distribution and uniform load distribution.

[0052] Furthermore, see Figure 5 A gap 1234 is formed between a pair of mounting bodies 123 of the frame body 121. The pair of mounting bodies 123 are distributed at intervals of small gap 1234 in the vertical direction, so that the vertical distance between the two pulleys 130 mounted on the frame body 121 is neither too small nor too large, avoiding mutual interference and achieving a compact layout in the vertical space.

[0053] In one specific embodiment, see Figure 2 For cases where the suspension 120 is detachably coupled to or integrally constructed with the wall 110 surrounding the reference wall, the modular robotic arm also includes a single wheel 150 rotatably mounted on the reference wall. Specifically, the single wheel 150 is rotatably mounted on the reference wall via a second bearing 160.

[0054] In another specific embodiment, see Figure 2 The modular robotic arm also includes a single-unit wheel 150 rotatably mounted on a wall opposite to a reference wall. Specifically, the single-unit wheel 150 is rotatably mounted on the wall opposite to the reference wall via a second bearing 160.

[0055] By setting a suspension 120 on the wall 110 around the reference wall to install a pulley 130, and setting a single wheel 150 on the reference wall and / or the wall opposite to the reference wall, the internal space is fully utilized to meet the requirements of multi-wheel layout and to achieve a compact layout in vertical space.

[0056] In one embodiment, see Figure 8 and Figure 9 The suspension 120 consists of at least one pair, with each pair of suspensions 120 located at both ends of the arm 100, namely the power input end and the power output end. The pulleys 130 of each pair of suspensions 120 are arranged in a one-to-one correspondence, and the corresponding two pulleys 130 in each pair of suspensions 120 are wound with a synchronous belt 170.

[0057] In another embodiment, the suspension 120 is located at one end of the arm 100, i.e., the power input end or the power output end.

[0058] In another embodiment, there are at least two suspensions 120, which are distributed at vertical intervals.

[0059] In one specific embodiment, see Figure 8 The synchronous belt 170 is an open-loop belt. Two anchor points 180 are provided on the circumferential side of the pulley 130 and the circumferential side of the single pulley 150. A pair of open-loop belts are wound on the pulley 130, and the ends of the open-loop belts are fixed to the circumferential side of the corresponding pulley 130 through the anchor points 180; and / or, a pair of open-loop belts are wound on the single pulley 150, and the ends of the open-loop belts are fixed to the circumferential side of the corresponding single pulley 150 through the anchor points 180.

[0060] The specific structure of the main body of the arm will be explained in detail below.

[0061] In one embodiment, see Figure 1 , Figure 2 as well as Figure 9 The arm body 100 has a segmented structure and includes at least two detachably connected segments 190. Each segment 190 has a segmented chamber inside and an opening on the side facing the adjacent segment 190. A connecting plate 191 is provided at the opening, and the segment 190 is detachably connected to the adjacent segment 190 through the connecting plate 191. For example, the connecting plate 191 is a connecting flange.

[0062] The arm 100 features a segmented structure design. By replacing segments 190 of varying lengths, the structural dimensions of the arm 100 can be adjusted to accommodate different wafer sizes or workstation layouts. This eliminates the need for a complete redesign and reprocessing of the arm, increasing structural flexibility, reducing material costs and production cycles, and adapting to the rapid iteration demands of flexible manufacturing. If a portion of the arm 100 is damaged, only the damaged segment 190 needs to be replaced, rather than the entire arm 100, significantly reducing maintenance time and spare parts costs.

[0063] Further, see Figure 2 The segment 190 located at the end of the arm body includes an end body 192 and a cover plate 193. The end body 192 has segmented chambers and an opening at the top, and the cover plate 193 is fastened to the opening.

[0064] In some embodiments, two adjacent segments 190 are joined by regular or irregular surfaces.

[0065] In some embodiments, at least one mating surface 194 of at least one segment 190 is trapezoidal in shape.

[0066] In one embodiment, see Figure 2 , Figure 3 as well as Figure 9 The joint surface 194 of each segment 190 is provided with through holes 195 for the synchronous belt 170 to pass through. According to the installation path of the transmission belt of the arm 100, through holes 195 are provided on the joint surface 194 of each segment 190 to ensure that after each segment 190 is assembled, the synchronous belt 170 can pass through each segment 190 for winding.

[0067] Further, see Figure 2 , Figure 3 as well as Figure 9 Each segment 190 has a pair of perforations 195 on its mating surface 194, with the pair of perforations 195 located on both sides near the width of the arm body. Specifically, the perforations 195 are strip-shaped holes.

[0068] In one embodiment, the mating surface 194 of the segment 190 is provided with a connector, and the connectors of two adjacent mating surfaces 194 are connected to limit the relative displacement of the two segment 190 in the vertical and horizontal directions.

[0069] Further, see Figure 2 , Figure 3 as well as Figure 9 In the two adjacent mating surfaces 194, one of the connectors is a plug 196, and the other connector is a slot 197 that is adapted to the plug 196. The slot 197 may or may not penetrate the corresponding mating surface 194.

[0070] Furthermore, see Figure 2 and Figure 9 The connector is located at the center of the mating surface 194. The shape and size of the connector are not limited here and can be flexibly set according to actual process requirements. For example, the connector is rectangular.

[0071] In one embodiment, two adjacent segments 190 are fixedly connected by fasteners.

[0072] Further, see Figure 2 , Figure 3 as well as Figure 9 The mating surface 194 of the segment 190 is provided with fixing holes 198. A fastener passes through the fixing holes 198 of two segments 190 to achieve a fixed connection between the segments 190. The fasteners are bolts, screws, etc. There are several fixing holes 198, spaced apart around the connector.

[0073] In one embodiment, see Figure 1The multi-segment robotic arm also includes an execution component 200 rotatably disposed at the end of the at least one arm body 100 in the extension direction. The execution component 200 includes a first end effector 210 and a second end effector 220. The coordinated rotation of at least one arm body 100 and the execution component 200 realizes the radial extension or retraction action.

[0074] In the description of this invention, it should be understood that the terms “comprising” and “having” as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0075] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0076] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0077] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways. Unless otherwise defined, the technical or scientific terms used herein should be understood in their ordinary sense by one of ordinary skill in the art to which this invention pertains.

Claims

1. A modular robotic arm, characterized in that, include: At least one arm body (100), said arm body (100) comprising: The arm body has a chamber and a wall surrounding the chamber; At least one suspension (120) is disposed in the cavity and forms at least one bearing surface (1211) along the height direction of the cavity. The suspension (120) is detachably coupled to or integrally constructed with a reference wall in the wall, or a wall opposite to the reference wall, or a wall (110) surrounding the reference wall. At least one pulley (130) is rotatably disposed on the bearing surface (1211).

2. The modular robotic arm according to claim 1, characterized in that, In the case where the suspension (120) is detachably coupled to the wall (110) on the periphery of the reference wall, at least one fixing part (122) is formed on the periphery of the suspension (120), and the wall (110) on the periphery of the reference wall is provided with a groove (111) corresponding to the fixing part (122), and the fixing part (122) is detachably installed in the corresponding groove (111).

3. The modular robotic arm according to claim 1, characterized in that, In the case where the suspension (120) is integrally constructed with the wall (110) on the periphery of the reference wall, at least one fixing part (122) is formed on the periphery of the suspension (120), and the fixing part (122) is integrally constructed with the wall (110) on the periphery of the reference wall.

4. The modular robotic arm according to any one of claims 1-3, characterized in that, The side of the pulley (130) away from the other wheel body with which it is driven is defined as the back side (133), and the suspension (120) has at least one fixing point between itself and the wall, at least one of the fixing points being located on the end side of the suspension (120) near the back side (133) of its pulley (130).

5. The modular robotic arm according to claim 4, characterized in that, When there is only one fixing point, the fixing point is located at the middle of the end side (133) of the suspension (120) near the back side (133) of its pulley (130); or, The fixing points are at least one pair, each pair of fixing points is symmetrically distributed around the periphery of the suspension (120), and one of the fixing points in each pair is located on the end side of the suspension (120) near the back side (133) of its pulley (130).

6. The modular robotic arm according to claim 1, characterized in that, The bearing surface (1211) is provided with an annular mounting body (123), and the pulley (130) can rotate around the mounting body (123).

7. The modular robotic arm according to claim 6, characterized in that, The pulley (130) is connected to the mounting body (123) via a first bearing (140).

8. The modular robotic arm according to claim 7, characterized in that, The mounting body (123) includes an annular support portion (1231) and an annular protrusion (1232) extending vertically outward from the outer periphery of the support portion (1231). The protrusion (1232) and the support portion (1231) enclose a limiting groove (1233) to install the first bearing (140).

9. The modular robotic arm according to any one of claims 6-8, characterized in that, The suspension (120) includes a frame body (121), the top and bottom surfaces of which are the two bearing surfaces (1211) of the suspension (120).

10. The modular robotic arm according to claim 9, characterized in that, The frame body (121) is annular and extends inward along the inner periphery of the frame body (121) to form a pair of symmetrically arranged transition portions (124). The transition portions (124) and the mounting bodies (123) are arranged in a one-to-one correspondence. The mounting bodies (123) are located on the corresponding transition portions (124).

11. The modular robotic arm according to any one of claims 1-3 and 6-8, characterized in that, For cases where the suspension (120) is detachably coupled to or integrally constructed with the wall (110) surrounding the reference wall, the modular robotic arm further includes a single wheel (150) rotatably mounted on the reference wall; and / or, The modular robotic arm also includes a single wheel (150) rotatably mounted on a wall opposite the reference wall.

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