Novel thermocouple evaporation PVD vacuum cavity

Abstract

The invention relates to the technical field of vacuum evaporation, and discloses a novel thermocouple evaporation PVD vacuum cavity which comprises a tank body lower part and a tank body upper part. The bottom wall of the lower portion of the tank body is provided with a workpiece placing frame for placing workpieces, the upper portion of the tank body is connected with the lower portion through a hinge, and sealing and fixing are achieved through a tower buckle lock. A metal target material and a rotatable first permanent magnet are arranged on the inner wall of the upper portion of the tank body, and the inner wall of the whole cavity is made of a magnetizer material. During working, the upper tank body and the lower tank body are locked to form a vacuum environment, the metal target material is heated to release ions, and meanwhile the first permanent magnet regularly performs circular motion. Through cooperation of rotation of the first permanent magnet and the cavity wall of the magnetizer, a dynamically changing magnetic mirror field is formed in the vacuum cavity, the movement direction of metal ions is effectively guided, and the phenomena of escape and local accumulation of the ions to the cavity wall are reduced. By means of the design, metal particles can be attached to the surface of a workpiece more evenly, the overall uniformity of the coating thickness is remarkably improved, and meanwhile the utilization efficiency of metal materials is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum evaporation technology, specifically to a novel thermocouple evaporation PVD vacuum chamber. Background Technology

[0002] In the field of vacuum evaporation technology, physical vapor deposition (PVD) is a widely used method that involves heating a metal target to ionize the metal and depositing it on the workpiece surface. However, traditional evaporation equipment generally suffers from insufficient film uniformity. Because the trajectory of metal ions within the vacuum chamber is difficult to control during evaporation, the ion beam is susceptible to thermal convection and random scattering effects, leading to significant differences in deposition rates across different areas of the workpiece surface. This is especially pronounced when the chamber size increases or the workpiece structure becomes complex, further exacerbating the film thickness deviation between the edges and the center, severely impacting the consistency of coating quality. Existing technologies attempt to improve uniformity by optimizing the heat source layout or using static magnetic field confinement, but static magnetic fields struggle to achieve dynamic control of the ion beam, still resulting in problems such as uneven particle distribution and significant edge effects. Summary of the Invention

[0003] To solve or at least partially solve the above-mentioned technical problems, embodiments of this application provide a novel thermocouple evaporation PVD vacuum chamber.

[0004] This application provides a novel thermocouple evaporation PVD vacuum chamber, comprising:

[0005] The lower part of the tank body is provided with a workpiece placement rack on the bottom wall for placing workpieces;

[0006] The upper part of the tank body is connected by a hinge and locked to the lower part of the tank body by a tower lock;

[0007] The upper part of the tank body is provided with a metal target and a rotatable first permanent magnet on the inner wall facing the lower part of the tank body.

[0008] The inner walls of the cavities in the lower and upper parts of the tank are made of a magnetizing material;

[0009] During the vapor deposition process, the lower part and the upper part of the tank are locked together to form a vacuum cavity, the metal target is used to release metal ions, and the first permanent magnet moves in a regular circular motion.

[0010] Optionally, it also includes:

[0011] The first permanent magnet fixing component, wherein the first permanent magnet is fixed to the end of the first permanent magnet fixing component;

[0012] The servo motor is coaxially fixed with the first permanent magnet fixing component and is used to drive the first permanent magnet fixing component to rotate around the rotation axis.

[0013] Servo mounting bracket, used to secure the servo motor.

[0014] Optionally, the first permanent magnet fixing member is arranged at a uniform angle relative to the rotation axis.

[0015] Optionally, the first permanent magnet and the first permanent magnet fixing member are detachably connected.

[0016] Optionally, it also includes:

[0017] A vacuum tube is installed on the side wall of the lower part of the tank.

[0018] Optionally, an observation window is also provided on the upper part of the tank.

[0019] Optionally, a fixing device is also provided at the lower part of the tank.

[0020] Optionally, the lower part of the tank includes:

[0021] fixed outer cylinder;

[0022] The movable inner cylinder is nested inside the fixed outer cylinder, and the movable inner cylinder extends and retracts along the axial direction of the fixed outer cylinder.

[0023] Optionally, a suspended shock-absorbing frame is provided between the servo motor fixing component and the upper part of the tank body, and the suspended shock-absorbing frame is flexibly connected to the inner wall of the upper part of the tank body through four sets of springs;

[0024] A flexible coupling is provided between the first permanent magnet fixing component and the servo motor output shaft.

[0025] Optionally, it also includes:

[0026] The second permanent magnet is arranged in a ring around the upper side wall of the tank, and the second permanent magnet rotates synchronously and coaxially with the first permanent magnet.

[0027] The novel thermocouple evaporation PVD vacuum chamber provided in this application has the following advantages:

[0028] This application utilizes a rotatable first permanent magnet mounted on the upper part of the tank. This magnet undergoes regular circular motion in a vacuum environment, forming a magnetic mirror field on the inner wall of the cavity made of a magnetizing material. This allows ions released from the metal target to be continuously guided by the magnetic field during their movement. This design effectively confines the previously uncontrollable metal ions, guiding them along a more stable path to the workpiece surface, significantly reducing the likelihood of ions escaping to corners or colliding with the cavity wall. The number of metal particles received by each area of ​​the workpiece becomes more balanced, resulting in a uniform coating thickness at both the center and edges. Simultaneously, because the metal particles are concentrated and guided to the effective area, material waste is significantly reduced, allowing the same amount of target material to cover a larger workpiece area. The entire system has a simple and reliable structure. The regular rotation of the first permanent magnet is achieved through a mechanical structure, requiring no complex circuitry for stable operation. Even after prolonged use, there will be no significant deviation, ensuring consistent deposition results each time. The hinged connection between the upper and lower parts of the tank and the tower-lock design make opening and closing convenient, ensuring both sealing and easy maintenance, making the process more worry-free and effortless. Attached Figure Description

[0029] Figure 1 A front view of a novel thermocouple evaporation PVD vacuum chamber provided for embodiments of this application;

[0030] Figure 2 A top view of the lower part of a tank provided in an embodiment of this application;

[0031] Figure 3 A bottom view of the upper part of a tank provided in an embodiment of this application;

[0032] Figure 4 Another bottom view of the upper part of the tank provided in this application embodiment;

[0033] Figure 5 This is a schematic diagram of the structure of the first permanent magnet fixing component provided in an embodiment of this application;

[0034] Figure 6 Another top view of the lower part of the tank provided in this application embodiment;

[0035] Figure 7 A side view of the upper part of a tank provided in an embodiment of this application;

[0036] Figure 8 Another top view of the lower part of the tank provided in this application embodiment;

[0037] Figure 9 This is a schematic diagram of a first permanent magnet structure provided in an embodiment of this application;

[0038] Figure 10 This is a schematic diagram of a second permanent magnet structure provided in an embodiment of this application.

[0039] Figure Labels

[0040] 1. Lower part of the tank; 2. Tower lock; 3. Handle; 4. Upper part of the tank; 5. Hinge; 6. Vacuum tube; 7. Workpiece placement rack; 8. Servo motor fixing component; 9. First permanent magnet; 10. First permanent magnet fixing component; 11. Metal target; 12. Servo motor; 13. Observation window; 14. Fixing device; 15. Second permanent magnet; 101. Fixed outer cylinder; 102. Movable inner cylinder; 201. Suspended shock absorption frame; 202. Spring. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this application clearer, specific embodiments of this application will be described in further detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely for explaining this application and not for limiting it. It should also be noted that, for ease of description, only the parts relevant to this application are shown in the drawings, not all of them. Before discussing exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe operations (or steps) as sequential processes, many of these operations can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the operations can be rearranged. The process can be terminated when its operation is completed, but may also have additional steps not included in the drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, etc.

[0042] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0043] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0044] See Figure 1-5 This application provides a novel thermocouple evaporation PVD vacuum chamber, comprising:

[0045] The lower part 1 of the tank body is provided with a workpiece placement rack 7 for placing workpieces on the bottom wall of the lower part 1 of the tank body;

[0046] The upper part of the tank 4 is connected by a hinge 5 and locked to the lower part of the tank 1 by a tower lock 2;

[0047] A metal target 11 and a rotatable first permanent magnet 9 are provided on the inner wall of the upper part 4 of the tank facing the lower part of the tank.

[0048] The inner walls of the cavities in the lower part 1 and the upper part 4 of the tank are made of magnetizing material;

[0049] During the vapor deposition process, the lower part 1 and the upper part 4 of the tank lock together to form a vacuum cavity, the metal target 11 is used to release metal ions, and the first permanent magnet 9 moves in a regular circular motion.

[0050] Specifically, the novel thermocouple evaporation PVD vacuum chamber mainly comprises two main parts: a lower part 1 and an upper part 4. The lower part 1 has an overall cylindrical structure, with a disc-shaped workpiece holder 7 welded to the central area of ​​the bottom wall for fixing the workpiece. The upper part 4 is connected to the rear side of the lower part 1 by two sets of hinges 5, allowing the upper part 4 to be flipped upwards and opened. The front edge of the upper part 4 is fitted with a metal latch and latch 2 at the corresponding positions on the lower part 1, which locks the chamber when it is closed, ensuring good sealing of the chamber.

[0051] A metal target 11 is fixedly installed in the central area of ​​the inner wall of the upper part 4 of the tank, and is connected to an external power source via wires to achieve the heating function. A rotatable first permanent magnet 9 is also provided; the first permanent magnet 9 can be made of strongly magnetic neodymium iron boron material and is cylindrical in shape. During the vapor deposition process, the first permanent magnet 9 moves in a circular trajectory. It is particularly noteworthy that the entire inner wall of the lower part 1 and the upper part 4 of the tank is made of a magnetizing material, which works synergistically with the magnetic field generated by the first permanent magnet 9.

[0052] In specific operation, first open the tower lock 2, flip the upper part 4 of the tank upwards, and place the workpiece steadily into the slot of the workpiece placement rack 7. Then, place a small piece of metal raw material on the surface of the metal target 11, close the tank, and tighten the tower lock 2 to form a sealed space. A vacuum is achieved using a vacuum pump, and the working procedure is started after the pressure gauge shows that a vacuum state has been reached. Under the action of the current, the metal target 11 gradually heats up to incandescence, and the metal material begins to evaporate to form an ion flow. At the same time, the first permanent magnet 9 rotates at a uniform speed, forming a continuously changing magnetic field environment (magnetic mirror field) with the cooperation of the magnetic cavity wall.

[0053] Under the influence of a dynamic magnetic field, metal ions change their direction of motion, effectively guiding previously scattered particles towards the workpiece surface. Experiments have shown that this design significantly improves coating uniformity, achieving complete coverage even for complex-shaped workpiece recesses. Metal material consumption is significantly reduced compared to traditional equipment, allowing for the coating of more workpieces with the same weight of target material. The entire operation is simple and smooth; hinge 5 makes opening and closing the tank easy and effortless, and the click of the latch 2 clearly indicates that the seal is in place.

[0054] In some implementations, it also includes:

[0055] The first permanent magnet fixing member 10, the first permanent magnet 9 is fixed to the end of the first permanent magnet fixing member 10;

[0056] The servo motor 12 is coaxially fixed with the first permanent magnet fixing member 10 and is used to drive the first permanent magnet fixing member 10 to rotate around the rotation axis;

[0057] Servo mounting bracket 8 is used to fix servo 12.

[0058] Specifically, the first permanent magnet fixing component 10 is designed as a three-pronged aluminum alloy bracket, with each of the three ends secured to a first permanent magnet 9 via countersunk bolts. A shaft hole is provided at the center of the first permanent magnet fixing component 10, allowing for a coaxial rigid connection with the output shaft of the servo motor 12 via a flat key. This layout ensures that the first permanent magnet 9 maintains symmetrical balance during rotation, preventing vibration due to weight deviation. The servo motor 12 can be a waterproof and dustproof stepper motor, with pre-drilled screw holes at the top and bottom of its housing to match the threaded holes on the inner wall of the servo motor fixing component 8.

[0059] The servo motor mounting component 8 can be a cast iron base with heat dissipation fins, and a flange structure extends from the bottom of the base. This flange is fixed to the inner top wall of the upper part 4 of the tank by bolts, and the installation position avoids the heat radiation area of ​​the metal target material 11. When the servo motor 12 is powered on, the output shaft drives the first permanent magnet mounting component 10 to rotate at a constant speed, and the first permanent magnet 9 performs a circular motion accordingly. The entire transmission structure is simple and reliable. The aluminum alloy first permanent magnet mounting component 10 reduces the rotational load, while the cast iron servo motor mounting component 8 effectively absorbs the weak vibrations during operation. During maintenance, only the flange bolts need to be removed to remove the entire rotating mechanism, which is convenient for cleaning or component replacement.

[0060] In some embodiments, the first permanent magnet fixing member 10 is arranged at a uniform angle relative to the rotation axis.

[0061] Specifically, the first permanent magnet fixing component 10 adopts a trident-shaped structure with extension arms of uniform length, extending outward at equal angles from the central shaft hole. Each extension arm has a standard interface machined at its end, and the first permanent magnets 9 are installed using fasteners of the same specification, ensuring that all first permanent magnets 9 are equidistant from the center of rotation. This layout allows for a natural and balanced weight distribution of the rotating components, preventing additional wobbling during rotation. During installation, the first permanent magnets 9 require paired counterweight adjustments to minimize the weight difference at the three corners. When the servo motor 12 drives the rotating shaft, the force is uniform in all directions, causing the first permanent magnets 9 to move smoothly around the axis. In actual operation, the rotation trajectory is smooth and rounded, and the magnetic field changes are stable and continuous, which is beneficial for the formation of a uniformly distributed field of metal ions within the cavity.

[0062] In some embodiments, the first permanent magnet 9 is detachably connected to the first permanent magnet fixing member 10.

[0063] Specifically, the first permanent magnet 9 and the first permanent magnet fixing component 10 adopt a modular connection structure. Each extension arm of the first permanent magnet fixing component 10 has a standard screw hole machined at its end, with copper conductive contacts embedded inside the screw hole. The first permanent magnet 9 is equipped with a screw, and a neodymium iron boron magnetic core is embedded at its bottom. During installation, simply tightening the screw on the first permanent magnet 9 simultaneously achieves physical fixation and circuit connection. Disassembly is achieved by simply unscrewing the first permanent magnet 9. This design allows for the selection of first permanent magnets 9 of different sizes or magnetic forces according to requirements; for example, large-volume magnets are used to achieve strong magnetic field effects, while small-volume magnets are used for fine coating experiments. The replacement process requires no tools and has ample operating space, allowing for relatively easy and independent magnet switching.

[0064] In some implementations, it also includes:

[0065] Vacuum tube 6 is installed on the side wall of the lower part 1 of the tank.

[0066] Specifically, the vacuum tube 6 can be a short stainless steel tube with increased wall thickness, vertically welded to the middle of the right side wall of the lower part 1 of the tank. This installation area avoids the range of motion of the hinge 5 and the tower lock 2, so it will not interfere with the opening and closing action during operation. The outer end of the vacuum tube 6 can be machined into a standard flange interface, with a matching sealing gasket pre-installed in the flange groove. When vacuuming is required, align the vacuum pump hose connector with the flange opening, push it in, and rotate the ferrule nut half a turn to complete the quick connection. The flange interface edge is engraved with anti-slip texture, making it less prone to slippage when tightened by hand.

[0067] In some implementations, it also includes:

[0068] Handle 3 is fixed to the upper part of the tank 4.

[0069] Specifically, handle 3 can be made of cast aluminum in one piece, with a sandblasted surface and a non-slip rubber layer. Thermal grease is applied to the bottom of handle 3 where it contacts the can, ensuring heat is evenly dissipated and preventing localized overheating. The rubber layer can be dyed bright yellow to improve device visibility and quickly identify the opening / closing position. The overall weight is kept within a reasonable range, preventing a noticeable downward drag when opening / closing the can with one hand. Routine cleaning can be achieved by wiping with a damp cloth to keep the surface clean.

[0070] In some embodiments, the upper part 4 of the tank is also provided with an observation window 13.

[0071] Specifically, the observation window 13 can be made of single-layer fused silica glass, maintaining good light transmittance at high temperatures without deformation. Its edges are pre-fitted with expansion compensation grooves to accommodate thermal expansion and contraction of the cavity. The observation window 13 can be positioned on the top wall of the upper part 4 of the tank, directly facing the core reaction zone between the metal target 11 and the workpiece placement rack 7. During the vapor deposition process, the glow discharge state of metal ions and the deposition process on the workpiece surface can be directly monitored visually, facilitating timely identification of abnormal discharges or localized overheating. A detachable light shield is screwed onto the outer edge of the frame, allowing clear observation of particle movement trajectories within the cavity even in strong light conditions. The quartz surface is coated with an anti-metal adhesion coating, requiring only a soft cloth wipe to restore light transmittance after long-term use.

[0072] In some embodiments, a fixing device 14 is also provided at the lower part 1 of the tank.

[0073] Specifically, the fixing device 14 may include symmetrically distributed cast iron bases, each with an anti-slip rubber pad on its bottom surface. During operation, the rotation of the first permanent magnet 9 and the airflow from the vacuum pump will generate combined vibrations. The fixing device 14 absorbs high-frequency vibrations through the mass inertia of the cast iron bases, while the rubber pads filter low-frequency swaying. In actual operation, the entire device remains stable, with no relative displacement between the lower part 1 of the tank and the operating platform, effectively preventing vacuum seal failure due to micro-movements. After long-term use, only periodic checks of the rubber pad elasticity are needed to ensure that the cushioning performance does not decrease. In addition, screw holes can be provided on the cast iron bases, allowing the entire device to be fixed to the ground, further reducing the impact of vibration.

[0074] In some embodiments, the lower part 1 of the tank includes:

[0075] Fixed outer cylinder 101;

[0076] The movable inner cylinder 102 is nested inside the fixed outer cylinder 101, and the movable inner cylinder 102 extends and retracts along the axial direction of the fixed outer cylinder 101.

[0077] Specifically, the lower part 1 of the tank body consists of a fixed outer cylinder 101 and a movable inner cylinder 102. The movable inner cylinder 102 is fitted inside the fixed outer cylinder 101. The outer wall of the inner cylinder can be provided with equidistantly distributed guide strips that slide in conjunction with corresponding grooves on the inner wall of the fixed outer cylinder 101. Several circular positioning holes are evenly distributed on the top edge of the movable inner cylinder 102. A spring-loaded pin device is installed at the corresponding position on the fixed outer cylinder 101. When the movable inner cylinder 102 moves to the target height, the pin automatically engages with the hole. A rotating adjusting ring is fitted on the lower outer side of the fixed outer cylinder 101. The inner wall of the adjusting ring is machined with a trapezoidal thread that meshes with the external thread of the fixed outer cylinder 101. Rotation of the ring allows the movable inner cylinder 102 to rise and fall.

[0078] A sealing system is installed between the inner and outer cylinders, which can use two annular gaskets of different materials. The inner gasket is made of black fluororubber with a circular cross-section, tightly filling the gap between the movable inner cylinder 102 and the fixed outer cylinder 101. The outer gasket is a corrugated silicone ring, covering the flange joint to prevent dust.

[0079] In actual operation, rotating the adjusting ring counterclockwise causes the movable inner cylinder 102 to descend smoothly. A height scale can be set at the transparent observation window on the cylinder wall. The height scale can then be confirmed through the observation window. Once the space meets the workpiece size requirements, the adjusting ring is tightened clockwise. The adjusting ring emits a continuous sound as it rotates, and a clear click occurs when the spring pin engages the positioning hole. At this point, the movable inner cylinder 102 and the fixed outer cylinder 101 form a stable connection, and the sealing gasket is evenly compressed, resulting in elastic deformation. Workpieces of different sizes can achieve a uniform coating, especially slender workpieces, which can achieve complete coverage even within the shrinkage cavity.

[0080] In some embodiments, a suspended shock-absorbing frame 201 is provided between the servo motor mounting member 8 and the upper part of the tank 4, and the suspended shock-absorbing frame 201 is flexibly connected to the inner wall of the upper part of the tank 4 by four sets of springs 202.

[0081] A flexible coupling is provided between the first permanent magnet fixing component 10 and the output shaft of the servo motor 12.

[0082] Specifically, the servo motor mounting component 8 of the vacuum chamber adopts a completely new installation method, with the mounting base of the suspended shock-absorbing frame 201 welded to the inner top wall of the upper part 4 of the tank. Hanging arms extending from the four corners of the suspended shock-absorbing frame 201 connect to springs 202. The other end of the springs 202 is fixed to the upper part 4 of the tank, forming a flexible suspension structure. This installation allows the vibrations generated by the servo motor 12 during operation to be absorbed and converted by the springs 202, preventing direct transmission to the tank wall. A flexible coupling 203 connects the output shaft of the servo motor 12 to the permanent magnet mounting component 10, compensating for axial misalignment during installation.

[0083] When the servo motor 12 is powered on, the initial vibration generated by the rotation of the motor rotor is first absorbed by the damping rubber of the flexible coupling. When the remaining vibration energy is transmitted to the suspended shock-absorbing frame 201, the spring 202 undergoes elastic deformation, converting the mechanical energy into heat energy for release. The low-frequency vibration generated when the vacuum pump is working is also filtered by the spring 202.

[0084] This design makes the equipment operate more smoothly and reliably. Occasional vacuum leaks that used to occur during the coating process have been largely eliminated, and the lifespan of the sealing rings has been significantly extended. During the vapor deposition process, the operator can focus more intently on observing the coating process, no longer disturbed by the equipment's humming noise.

[0085] This stable operating characteristic is suitable for long-term continuous coating operations, avoiding interference from sudden vibrations during observation. Although the overall structure adds a few parts, the reduced maintenance frequency actually saves on management costs.

[0086] In some implementations, it also includes:

[0087] The second permanent magnet 15 is arranged around the side wall of the upper part 4 of the tank. The second permanent magnet 15 rotates synchronously and coaxially with the first permanent magnet 9.

[0088] Specifically, a second permanent magnet 15 can be added to the inner sidewall of the upper part of the vacuum chamber. These permanent magnets are distributed in a ring on the sidewall area of ​​the chamber, forming a complementary structure with the first permanent magnet 9 originally installed in the top area of ​​the chamber. The second permanent magnet 15 can be made of the same neodymium iron boron material as the first permanent magnet 9 at the top, and is fixed on a rotatable ring track by a non-magnetic alloy bracket. The rotation axis of the second permanent magnet 15 coincides with that of the first permanent magnet 9 at the top, and it maintains an appropriate distance from the workpiece surface throughout the movement.

[0089] Two control schemes can be used to achieve coordinated motion of the two permanent magnets. In the single-servo scheme, the output shaft of the top servo penetrates the tank wall through a magnetohydrodynamic seal, and an active bevel gear is installed at the extended shaft end. This gear meshes with a horizontal steering gear set, and the output shaft of the steering gear is connected to a ring track drive wheel. When the top servo rotates, the power is redirected by the bevel gear and drives the ring track to move, achieving synchronous rotation of the two sets of permanent magnets. The dual-servo scheme adds a miniature waterproof servo to the side wall of the tank, which directly drives the ring track through a short shaft. The speed matching of the two sets of permanent magnets is achieved through control circuit programming.

[0090] During operation, the first permanent magnet 9 at the top rotates in the horizontal plane to form the main magnetic field, while the second permanent magnet 15 on the side wall moves along a circular track to generate an auxiliary magnetic field. Guided by these dual magnetic fields, metal ions exhibit a spiral trajectory, significantly improving the coverage effect, particularly on the sidewalls and recessed areas of the workpiece. This enhances the uniformity of the coating on workpieces with complex structures, especially for specimens with deep holes or grooves, where a continuous film can be formed even on the inner walls of the holes. The utilization rate of metal materials is significantly improved, allowing for a greater number of workpieces to be processed with the same weight of target material.

[0091] The equipment operation process remains simple. After activating the vacuum system, simply turn on the servo control switch, and the two sets of permanent magnets will begin to operate in tandem. During maintenance, the slide can be cleaned by unscrewing the track end cover, and the permanent magnet modules can be quickly replaced via a snap-fit ​​design.

[0092] Both configurations effectively prevent contact between the workpiece and moving parts, with a transparent protective cover around the rotating parts ensuring safety. This design particularly enhances the ability to handle irregularly shaped workpieces. Gear parts, which previously struggled to achieve uniform coating, now show significantly reduced differences in film thickness between the tooth tip and root. The uniformity of the film layer on the sidewalls of cylindrical workpieces is significantly improved, resolving the edge effect problem commonly found in rotary coating equipment. The equipment's adaptability is enhanced, allowing for comparative experiments on coating effects under different magnetic field configurations.

[0093] In some implementations, the shapes of the first permanent magnet and the second permanent magnet can be improved to further enhance the beneficial effects.

[0094] Specifically, the first permanent magnet 9 installed on the upper part 4 of the tank can adopt a hexagonal prism structure. This hexagonal prism magnet has more edges than a traditional cylinder, and each edge is slightly rounded to avoid sharp corners. The six sides of the hexagonal prism form a natural magnetic field enhancement zone, and stronger magnetic lines of force gather at the edges when the first permanent magnet 9 rotates. Experiments have shown that this structure allows more metal particles to be attracted to the edge areas of the workpiece, especially the corners of square workpieces where the coating thickness is more uniform.

[0095] The second permanent magnet 15 can be designed as a frustum, with the bottom diameter slightly larger than the top diameter to form a gentle slope. Figure 10 Figures (a) and (b) illustrate two different configurations, where the top and bottom surfaces can be circular or polygonal, depending on the intended purpose. The sides and bottom of the frustum are at a specific angle, with the inclined surfaces guiding the magnetic field towards the workpiece area. When the second permanent magnet 15 runs along the circular track, the conical structure generates a gradient of magnetic field strength. This variation causes metal ions to exhibit a helical motion trajectory in the vertical direction, significantly increasing the amount of metal deposited at the bottom of the deep hole in the workpiece.

[0096] The surfaces of the two permanent magnets can be specially textured. The first permanent magnet 9 has finely engraved grid patterns on its six sides, with the grid intersections forming microscopic bumps. These bumps generate localized magnetic field disturbances during operation, increasing the probability of charged particle collisions. The second permanent magnet 15 has its conical surface sandblasted to form a uniform rough layer, reducing the dissipation of magnetic field lines. During the vacuum coating process, it can be observed that the textured magnets exhibit brighter and more concentrated ion glow around them.

[0097] Furthermore, the internal material structure of the magnets can be improved. The first permanent magnet 9 has star-shaped silicon steel sheets embedded in a neodymium iron boron matrix, with the edges of the steel sheets extending to the corners. This composite structure allows the magnetic field distribution to more closely approximate the workpiece contour, significantly improving the boundary clarity of square workpieces after coating. The second permanent magnet 15 has copper-aluminum alloy heat sinks embedded in the bottom of a frustum, with the heat sink's dendritic structure extending into the heat dissipation groove. This results in a slow temperature rise after continuous operation, avoiding the risk of high-temperature demagnetization.

[0098] During installation, the facets of the first permanent magnet 9 and the conical surface of the second permanent magnet 15 maintain a specific orientation. When the two sets of permanent magnets rotate in tandem, the strong magnetic field of the facets and the guiding magnetic field of the conical surfaces complement each other. During the vapor deposition process, it can be clearly seen that there is no difference in brightness on the surface of complex workpieces, and the metal coating is smooth. Maintenance personnel only need to wipe the facets and conical surfaces with a soft cloth, and the textured structure does not easily retain metal dust.

[0099] In some embodiments, the workpiece placement rack 7 can employ a composite frame structure to adapt to the magnetic mirror field environment. Specifically, the main frame can be welded from non-magnetic titanium alloy tubing, with the tubing cross-section designed as a hexagonal honeycomb pattern. This structure ensures support strength while avoiding interference with the magnetic field generated by the rotating first permanent magnet 9. The frame surface is covered with an insulating ceramic coating, which is sandblasted to form a fine texture. The textured layer effectively prevents metal ions from depositing on the frame surface, reducing the frequency of periodic cleaning. Adjustable-height support columns are installed at the four corners of the frame, with turntables with limiting grooves at the top of the columns.

[0100] A porous ceramic panel with uniform thickness and a microporous array can be laid in the central area of ​​the turntable. These micropores create negative pressure adsorption in a vacuum environment, causing the thin workpiece to adhere tightly to the panel surface. A ring-shaped magnetic strip, made of permalloy, is placed at the edge of the panel, forming a magnetic field path with the magnetizing material of the tank. When the first permanent magnet 9 rotates, the magnetic strip guides the magnetic lines of force to penetrate the edge of the workpiece, solving the problem of thinner edge films in traditional coating processes.

[0101] The workpiece placement rack 7 can be equipped with foldable shielding baffles along its edges. These baffles are made of aluminum-silicon carbide composite material, with an arc-shaped surface tilted towards the center. When the vapor deposition process begins, the baffles automatically rise, effectively blocking scattered ions from impacting the tank wall. The inner side of the baffles is coated with a yttrium oxide layer, which emits electrons at high temperatures to suppress abnormal discharge. An angle sensor is integrated into the hinge at the bottom of the baffles, automatically adjusting the tilt angle according to the workpiece height.

[0102] During operation, the appropriate mode can be selected based on the workpiece shape. When placing a flat workpiece, it is directly adsorbed onto the porous ceramic panel, and the magnetic strip automatically aligns with the workpiece edge. For workpieces with special shapes, magnetic positioning blocks can be used, with arrayed magnetic particles embedded on the bottom surface of the positioning blocks. All modes ensure that the center of the workpiece coincides with the rotation axis of the first permanent magnet 9, which is crucial for the uniform distribution of the magnetic mirror field.

[0103] The above description is merely a preferred embodiment and the technical principles employed in this application. This application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions that can be made by those skilled in the art will not depart from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of this application, the scope of which is determined by the scope of the claims.

Claims

1. A novel thermocouple evaporation PVD vacuum chamber, characterized in that, include: The lower part (1) of the tank body is provided with a workpiece placement rack (7) for placing workpieces on the bottom wall of the lower part (1); The upper part (4) of the tank body is connected by a hinge (5) and locked to the lower part (1) of the tank body by a tower lock (2); The upper part (4) of the tank body is provided with a metal target (11) and a rotatable first permanent magnet (9) on the inner wall facing the lower part of the tank body; The inner walls of the cavities of the lower part (1) and the upper part (4) of the tank are made of magnet material; During the vapor deposition process, the lower part (1) and the upper part (4) of the tank lock each other to form a vacuum cavity, the metal target (11) is used to release metal ions, and the first permanent magnet (9) moves in a regular circular motion.

2. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, Also includes: The first permanent magnet fixing member (10) is fixed to the end of the first permanent magnet fixing member (10); The servo motor (12) is coaxially fixed with the first permanent magnet fixing member (10) and is used to drive the first permanent magnet fixing member (10) to rotate around the rotation axis. Servo mounting bracket (8) is used to fix the servo (12).

3. The novel thermocouple evaporation PVD vacuum chamber according to claim 2, characterized in that, The first permanent magnet fixing member (10) is arranged at a uniform angle relative to the rotation axis.

4. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, The first permanent magnet (9) is detachably connected to the first permanent magnet fixing member (10).

5. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, Also includes: A vacuum tube (6) is disposed on the side wall of the lower part (1) of the tank body.

6. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, An observation window (13) is also provided on the upper part (4) of the tank.

7. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, The lower part (1) of the tank is also provided with a fixing device (14).

8. The novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, The lower part (1) of the tank includes: Fixed outer cylinder (101); The movable inner cylinder (102) is nested inside the fixed outer cylinder (101), and the movable inner cylinder (102) extends and retracts along the axial direction of the fixed outer cylinder (101).

9. A novel thermocouple evaporation PVD vacuum chamber according to claim 2, characterized in that, A suspension damping frame (201) is provided between the servo motor fixing component (8) and the upper part of the tank (4). The suspension damping frame (201) is flexibly connected to the inner wall of the upper part of the tank (4) through four sets of springs (202). A flexible coupling is provided between the first permanent magnet fixing member (10) and the output shaft of the servo motor (12).

10. A novel thermocouple evaporation PVD vacuum chamber according to claim 1, characterized in that, Also includes: The second permanent magnet (15) is arranged around the side wall of the upper part (4) of the tank body. The second permanent magnet (15) rotates synchronously and coaxially with the first permanent magnet (9).

Images