Vacuum coating system for large-diameter laser reflecting lens

Abstract

The invention discloses a large-diameter laser reflector vacuum coating system, and relates to the technical field of vacuum coating systems, the large-diameter laser reflector vacuum coating system comprises a coating cabinet and a placement assembly arranged in the coating cabinet, the placement assembly comprises an axially rotating mounting rack, and a plurality of swing rods with the ends arranged on the mounting rack in a swing manner and arranged in a circumferential array, a placing seat for clamping a lens and forming a coating surface and a to-be-coated surface is movably arranged between any two adjacent swing rods, and the swing rods swing synchronously, so that the inclination angle of the placing seat is adjustable. According to the vacuum coating system for the large-diameter laser reflecting lens, the steam incident angle during clamping and fixing of the lens is adjusted according to the radian of the lens through the swing rod and the placement seat in the coating cabinet, so that the placement seat can be suitable for clamping and coating operation of the lenses with different radians, and the applicability of the device is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating system technology, specifically a vacuum coating system for large-aperture laser reflective lenses. Background Technology

[0002] As is well known, in vacuum coating systems, electronically specialized materials such as high-purity cobalt targets and nickel-platinum alloy targets are often used to coat large-aperture laser reflective lenses using physical vapor deposition technology. This significantly improves the lenses' wear resistance, weather resistance, optical performance, and functionality, meeting the special needs of high-end optical equipment.

[0003] For example, the invention patent with application publication number CN115786867B, application publication date of April 28, 2023, and titled "An Optical Lens Vacuum Coating Equipment and Usage Method", has a specific structure of vacuum coating equipment including an equipment base, a control cabinet on the top of the equipment base, a coating cabinet on one side of the control cabinet, and a vacuum pump connected between the rear side of the coating cabinet and the rear side of the control cabinet.

[0004] The shortcomings of existing technology lie in the fact that while the hood is fixedly installed at an angle inside the coating cabinet, and the lenses are clamped on a placement tray that is axially rotated on the hood, an evaporator is arranged below the hood to generate coating vapor, which rises and passes over the placement tray to coat the lens surface. However, the hood is fixedly installed, and its tilt angle cannot be adjusted, resulting in a fixed vapor incident angle for the lenses clamped on the placement tray. If coating is performed on lenses with different surface curvatures, the evaporator must be disassembled and reinstalled to adjust the vapor incident angle of the lenses. Consequently, when changing to coating different types of lenses with different surface curvatures, the machine must be shut down for maintenance before coating can continue, making the coating equipment unsuitable for various applications. Summary of the Invention

[0005] The purpose of this invention is to provide a vacuum coating system for large-aperture laser reflective lenses to overcome the aforementioned shortcomings of the prior art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a vacuum coating system for large-aperture laser reflective lenses, comprising a coating cabinet and a placement assembly disposed therein, the placement assembly comprising an axially rotatable mounting frame, and further comprising a plurality of swing rods with their ends swinging on the mounting frame and arranged in a circumferential array, wherein a placement seat is movably disposed between any two adjacent swing rods, which clamps the lens and forms a coating surface and a surface to be coated, and the swing rods swing synchronously so that the tilt angle of the placement seat is adjustable.

[0007] As a further description of the above technical solution: it also includes a flexible cover plate that is fixedly connected to two adjacent swing rods at both ends, and the swing rods swing and contract synchronously so that the inner side of the flexible cover plate deforms away from the coating surface of the placement seat.

[0008] As a further description of the above technical solution: an abutment is fixedly provided on the flexible cover plate, and the swing rod expands to its maximum stroke so that the abutment presses the placement seat to flip from a horizontal position to a vertical position. Then the swing rod swings and contracts so that the coated surface of the placement seat flips towards the flexible cover plate.

[0009] As a further description of the above technical solution: it also includes a ball cover that is slidably arranged on two adjacent swing rods, the ball cover and the placement seat slide synchronously in the axial direction, and the surface of the placement seat to be plated faces the inside of the ball cover.

[0010] As a further description of the above technical solution: the flexible cover plate is provided with an inner groove, the flexible cover plate is always squeezed by the spherical cover to form an arched part, and the inner side of the arched part and the spherical cover form an annular flow channel through the inner groove.

[0011] As a further description of the above technical solution: the placement base is symmetrically fixedly provided with movable parts, the mounting part fixedly provided on the swing rod is provided with a horizontal sliding groove and a rotating groove that are connected, and a spiral groove is also provided in the mounting part. The first end of the spiral groove is vertical and connected to the rotating groove, and the second end of the spiral groove is horizontal and connected to the horizontal sliding groove.

[0012] As a further description of the above technical solution: a flexible stop is fixedly provided on the second end of the spiral groove, which allows the movable part to slide unidirectionally from the spiral groove into the horizontal slide groove.

[0013] As a further description of the above technical solution: a connecting part is symmetrically fixedly provided on the ball cover, and a sliding block is fixedly provided on the mounting part and slidably assembled on the connecting part, and the ball cover is driven to slide and remain in the middle between two adjacent swing rods.

[0014] As a further description of the above technical solution: it also includes a recovery tube fixedly installed in the mounting frame, the first end of the recovery tube being connected between two adjacent swing rods, and the first end of the recovery tube facing the inner side of the flexible cover plate.

[0015] As a further description of the above technical solution: it also includes a drive mechanism disposed in the mounting frame, the drive mechanism including a movable seat and a connecting rod at both ends respectively rotatably connected to the movable seat and the swing rod, the movable seat sliding axially to drive the swing rod to swing synchronously through the connecting rod.

[0016] In the above technical solution, the present invention provides a vacuum coating system for large-aperture laser reflective lenses. The system utilizes a swing rod and a placement seat in the coating cabinet to adjust the steam incident angle when clamping and fixing the lens according to the curvature of the lens. This makes the placement seat suitable for clamping and coating operations of lenses with different curvatures, thereby improving the applicability of the device. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0018] Figure 1 A schematic diagram of the overall structure is provided for the embodiments of the present invention;

[0019] Figure 2 This is a cross-sectional view of the placement component provided in an embodiment of the present invention;

[0020] Figure 3 This is a cross-sectional view of the structure at the fixing seat of the placement component provided in an embodiment of the present invention;

[0021] Figure 4 A schematic diagram of the structure of the swing rod of the placement component provided in an embodiment of the present invention;

[0022] Figure 5 A schematic diagram of the structure at the contact portion of the placement component provided in an embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram of the placement component provided in an embodiment of the present invention;

[0024] Figure 7 A schematic diagram of the mounting frame, swing rod, and flexible cover plate provided in an embodiment of the present invention;

[0025] Figure 8 This is an exploded structural diagram of the placement component provided in an embodiment of the present invention;

[0026] Figure 9 This is a schematic diagram of the structure of the swing rod, movable seat, and connecting rod provided in an embodiment of the present invention;

[0027] Figure 10 An exploded structural diagram of the placement seat, fixing seat, and spherical cover provided in an embodiment of the present invention;

[0028] Figure 11 Provided for embodiments of the present invention Figure 2 A magnified schematic diagram of the local structure at point A.

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. Coating cabinet; 11. Coating chamber; 12. Evaporation seat; 2. Placement component; 21. Mounting bracket; 22. Swing rod; 221. Mounting part; 222. Horizontal slide; 2221. Rotating groove; 223. Spiral groove; 224. Sliding block; 225. Rotating part; 23. Placement seat; 231. Movable part; 232. Support plate part; 24. Fixed seat; 241. Fixed groove; 3. Flexible cover plate; 31. Contact part; 32. Inner groove; 33. Arched part; 4. Ball cover; 41. Connecting part; 5. Drive mechanism; 51. Movable seat; 52. Connecting rod; 53. Drive cylinder; 6. Recovery pipe; 7. Flexible stop block. Detailed Implementation

[0031] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0032] Please see Figure 1-11 The present invention provides a technical solution: a vacuum coating system for large-aperture laser reflective lenses, including a coating cabinet 1 and a placement component 2 disposed therein. The placement component 2 includes a mounting frame 21 that is axially rotatable, and a plurality of swing rods 22 whose ends are oscillatingly disposed on the mounting frame 21 and arranged in a circumferential array. A placement seat 23 is movably disposed between any two adjacent swing rods 22, which clamps the lens and forms the coating surface and the surface to be coated. The swing rods 22 swing synchronously so that the tilt angle of the placement seat 23 is adjustable.

[0033] Preferred, such as Figure 1 As shown, the vacuum coating system includes at least one coating cabinet 1, with a coating chamber 11. A placement assembly 2 is installed inside the coating chamber 11, and an evaporation seat 12 is fixedly installed at the bottom of the coating chamber 11. An evaporator for evaporating the target material is fixedly mounted on the evaporation seat 12. A mounting frame 21 is rotatably mounted inside the coating chamber 11, and the ends of several swing rods 22 are swing-mounted on the mounting frame 21 so that the swing rods 22 can synchronously swing and expand or contract. A placement seat 23 is movably mounted between two adjacent swing rods 22. When the swing rods 22 are driven to swing and expand synchronously, they all swing towards a horizontal state. At this time, the swing rods 22 drive several placement seats 23 to move synchronously to reduce the tilt angle of the placement seats 23. The position of the evaporator on the evaporation seat 12 remains unchanged, always located vertically below the placement assembly 2. This reduces the vapor incident angle of the lens fixed on the placement seat 23. The vapor incident angle refers to the angle between the vapor particles emitted from the evaporation source and the normal to the lens surface.

[0034] In actual coating operations, the larger the curvature of the lens, the smaller the radius of curvature. When changing the lens with different curvature on the mounting base 23, the swing rod 22 can be rotated to expand or contract to move the mounting base 23 and change the tilt angle. In this way, the swing rod 22 and the mounting base 23 can be used to adjust the steam incident angle when the lens is clamped and fixed according to the curvature of the lens. This makes the mounting base 23 suitable for clamping and coating operations of lenses with different curvatures, improving the applicability of the device.

[0035] A fixed seat 24 is also coaxially rotatably mounted on the placement seat 23. A fixed groove 241 is provided through the fixed seat 24, in which the lens to be coated can be fixedly clamped. When the mounting frame 21 rotates to drive the swing rod 22 and the placement seat 23 to revolve around the circumference, the fixed seat 24 is still located on the placement seat 23 and rotates axially, driving the lens on the fixed seat 24 to rotate around the axis of the fixed seat 24. This realizes the planetary rotational movement of the clamped lens and improves the coating uniformity of the lens on the fixed seat 24.

[0036] The vacuum coating system should also include a vacuum pump group, a film thickness monitoring system, an environmental control system, and an automated control system. The other components of the vacuum coating system are common technical knowledge to those skilled in the art and will not be described again.

[0037] The mounting bracket 21 can be equipped with a drive motor and multiple gears to achieve synchronous swinging of the swing arm 22, or the drive motor can be equipped with gears and multiple connecting rods to achieve synchronous swinging of the swing arm 22. Alternatively, other drive methods known to those skilled in the art can be used as alternatives.

[0038] In the above technical solution, the swing rod 22 and the placement seat 23 in the coating cabinet 1 are used to adjust the steam incident angle when clamping and fixing the lens according to the curvature of the lens, so that the placement seat 23 can be used for clamping and coating operations of lenses with different curvatures, thereby improving the applicability of the device.

[0039] In another embodiment of the present invention, a flexible cover plate 3 is further provided, which is fixedly connected to two adjacent swing rods 22 at both ends. The swing rods 22 swing and contract synchronously, causing the inner side of the flexible cover plate 3 to deform away from the coating surface of the placement seat 23.

[0040] Preferred, such as Figure 7As shown, the flexible cover plate 3 is fan-shaped so that the two side ends of the flexible cover plate 3 are fixedly connected to two adjacent swing rods 22, and the inner side of the flexible cover plate 3 faces the placement seat 23, while the coating surface of the placement seat 23 faces away from the flexible cover plate 3, and the surface to be coated of the placement seat 23 faces the flexible cover plate 3. The flexible cover plate 3 itself has a certain elasticity so that when its two side ends are not pulled by the swing rods 22, the flexible cover plate 3 can deform and return to an arched shape so that the inner side of the flexible cover plate 3 deforms away from the placement seat 23. Therefore, when a lens needs to be coated, the swing rod 22 swings synchronously to adjust the tilt angle of the placement seat 23, making the placement seat 23 tilted. At this time, the pulling force of the two sides of the flexible cover plate 3 caused by the swing rod 22 decreases. The deformation of the flexible cover plate 3 causes its inner side to move away from the placement seat 23, so that the flexible cover plate 3 covers the top of the placement seat 23 for recycling coating vapor. Therefore, in the rising direction of the coating vapor, the inner side of the flexible cover plate 3 is located behind the coating surface of the placement seat 23, thereby preventing the coating vapor from carrying dust or impurity particles on the inner side of the flexible cover plate 3 to contact the coating surface of the placement seat 23 during the rising process, thereby reducing the contamination of the lens coating and improving the forming quality of the coating on the lens.

[0041] In another embodiment of the present invention, a contact part 31 is fixedly provided on the flexible cover plate 3. The swing rod 22 expands to its maximum stroke so that the contact part 31 presses the placement seat 23 to flip from a horizontal position to a vertical position. Then the swing rod 22 swings and contracts so that the coated surface of the placement seat 23 flips towards the flexible cover plate 3.

[0042] Preferred, such as Figure 10 As shown, a support plate 232 is welded and fixed onto the placement base 23, such as... Figure 8As shown, the contact part 31 and the flexible cover plate 3 are integrally formed. When the swing rod 22 swings and expands to the maximum stroke position, the swing rod 22 is horizontal to drive the placement seat 23 to move synchronously to a horizontal position. The swing rod 22 tensions and pulls the two sides of the flexible cover plate 3, causing the flexible cover plate 3 to be stretched and deformed towards the placement seat 23. At this time, the contact part 31 on the flexible cover plate 3 moves and abuts against the support plate part 232. The contact part 31 pushes the support plate part 232 to make the placement seat 23 flip from a horizontal position to a vertical position. Then, the swing rod 22 can be driven to swing and contract synchronously, so that the swing rod 22 can drive the placement seat 23 to continue to flip from a vertical position to an inclined position, and make the surface to be plated on the placement seat 23 flip to face the evaporation seat 12, thereby completing the flipping operation of the lens on the placement seat 23. The flipping of the placement seat 23 is divided into three movement stages using the contact part 31 and the swing rod 22. In the first stage, the placement seat 23 moves to a horizontal position following the swing rod 22. In the second stage, the placement seat 23 flips from a horizontal position to a vertical position under the influence of the flexible cover plate 3. Then, in the third stage, the placement seat 23 is driven by the swing rod 22 to flip from a vertical position to an inclined position, thus completing the flipping of the lens coating surface on the placement seat 23. This achieves a pause when the placement seat 23 flips the lens coating surface, both when it is in a horizontal or vertical position. This prevents the lens clamped on the placement seat 23 from shifting relative to the placement seat 23 due to gravity during the flipping process, thereby improving the clamping stability of the lens when the lens is flipped, preventing the coating position on the lens from shifting, and improving the coating uniformity of the lens.

[0043] Specifically, a telescopic cylinder can be installed on the swing rod 22 in conjunction with a connecting rod to enable the placement seat 23 to swing from a vertical state to an inclined state when the swing rod 22 swings and retracts, and the coated surface of the placement seat 23 flips to face the flexible cover plate 3. Alternatively, a drive motor can be used in conjunction with gears to enable the coated surface of the placement seat 23 to flip to face the flexible cover plate 3 when the swing rod 22 swings and retracts. Or other drive structures known to those skilled in the art that can achieve the same driving effect can be used as alternatives.

[0044] In another embodiment of the present invention, a ball cover 4 is slidably arranged on two adjacent swing rods 22. The ball cover 4 and the placement seat 23 slide synchronously in the axial direction, and the surface to be plated on the placement seat 23 faces the inside of the ball cover 4.

[0045] Preferred, such as Figure 8As shown, the spherical cover 4 is slidably disposed between two adjacent swing rods 22, and the placement seat 23 is located inside the spherical cover 4 so that the two maintain axial synchronous sliding. When lens coating is required, the coating surface of the placement seat 23 is tilted towards the evaporator 12, and the surface to be coated on the placement seat 23 faces the inside of the spherical cover 4 for protection. This prevents the surface of the lens facing the surface to be coated on the placement seat 23 from contacting the coating vapor, thus achieving shielding protection for the surface to be coated on the lens. When the swing rods 22 swing synchronously to expand or contract to adjust the tilt angle of the placement seat 23, the placement seat 23 slides in coordination with the two swing rods 22, and the spherical cover 4 also slides with the placement seat 23 so that the spherical cover 4 always covers the surface to be coated on the placement seat 23, completing the stable shielding protection for the surface to be coated on the placement seat 23.

[0046] When the swing rod 22 is driven to swing and expand to its maximum stroke, the contact part 31 on the flexible cover plate 3 pushes against the support plate part 232, causing the placement seat 23 to flip from a horizontal position to a vertical position. Then, the swing rod 22 swings and retracts synchronously, so that the swing rod 22 can drive the placement seat 23 to continue to flip from a vertical position to an inclined position, and cause the surface to be coated on the placement seat 23 to flip towards the evaporator seat 12. During this process, the placement seat 23 rotates so that the peripheral side of the placement seat 23 is always in contact with the inner wall of the spherical cover 4 for rotational movement. After the placement seat 23 is flipped, the original surface to be coated on the placement seat 23 faces the side of the evaporator seat 12 for coating operation, while the original coating surface of the placement seat 23 faces the inside of the spherical cover 4, thereby completing the masking and protection of the surface of the lens on the placement seat 23 to be coated.

[0047] In another embodiment of the present invention, the flexible cover plate 3 is provided with an inner groove 32, and the flexible cover plate 3 is always squeezed by the ball cover 4 to form an arched part 33. The inner side of the arched part 33 and the ball cover 4 form an annular flow channel through the inner groove 32.

[0048] Preferred, such as Figure 8As shown, an inner groove 32 is formed on the inner surface of the flexible cover plate 3 so that the inner groove 32 faces the placement seat 23, and the spherical cover 4 is located between the flexible cover plate 3 and the placement seat 23, so that the flexible cover plate 3 is always squeezed by the spherical cover 4 to form a partially spherical arched part 33. During the coating operation, the mounting frame 21 drives the swing rod 22, the placement seat 23 and the flexible cover plate 3 to rotate to improve the uniformity of the lens coating on the placement seat 23. Since the rotational linear velocity of the swing rod 22 and the flexible cover plate 3 at the end away from the mounting frame 21 is greater than the rotational linear velocity at the end closer to the mounting frame 21, the end closer to the mounting frame 21 has a greater rotational linear velocity than the end closer to the mounting frame 21. The coating vapor on the surface of the swing rod 22 and the flexible cover plate 3 will flow radially away from the mounting frame 21 due to the rotation of the swing rod 22 and the flexible cover plate 3. This reverse flow of coating vapor is prone to forming turbulence on the inner side of the flexible cover plate 3, which will affect the coating quality of the lens on the placement seat 23. However, by using the flexible cover plate 3 to always contact and compress with the ball cover 4 to form an arch 33, the reverse flow of coating vapor on the inner side of the flexible cover plate 3 is cut off, thereby reducing the turbulence intensity on the inner side of the flexible cover plate 3 and improving the coating stability of the lens on the placement seat 23.

[0049] Secondly, due to the presence of the inner groove 32, an annular flow channel is formed between the inner side of the arched part 33 and the spherical cover 4 through the inner groove 32. When the mounting frame 21 drives the swing rod 22 and the flexible cover plate 3 to rotate, the coating vapor near the inner side of the flexible cover plate 3 is still affected by the rotation of the flexible cover plate 3 and flows radially away from the mounting frame 21. This backflow of coating vapor is unavoidable, but through the inner groove 32 to form an annular flow channel, the backflow of coating vapor first enters the annular flow channel on the side near the mounting frame 21, and then the backflow of coating vapor splits into two streams on both sides of the annular flow channel towards the flexible cover plate 3 away from the mounting frame 21. The mounting bracket 21 moves forward synchronously on one side until the counter-current coating vapor is located in the annular flow channel at the end away from the mounting bracket 21 and encounters and impacts again. The counter-current coating vapor rushes out of the annular flow channel and sprays out towards the side of the flexible cover plate 3 facing away from the mounting bracket 21. Then, the inner side of the arched part 33 and the spherical cover 4 form an annular flow channel to guide the counter-current coating vapor on the inner side of the flexible cover plate 3 to be sprayed out, so that the counter-current coating vapor can be sprayed out away from the placement seat 23. This realizes that the position generated by the turbulence on the inner side of the flexible cover plate 3 is moved outward relative to the placement seat 23, further reducing the interference of turbulence on the coating quality of the lens on the placement seat 23.

[0050] In another embodiment of the present invention, a movable part 231 is symmetrically fixedly arranged on the placement base 23, and a mounting part 221 fixedly arranged on the swing rod 22 is provided with a horizontal sliding groove 222 and a rotating groove 2221 that are connected to each other. A spiral groove 223 is also provided in the mounting part 221. The first end of the spiral groove 223 is vertical and connected to the rotating groove 2221, and the second end of the spiral groove 223 is horizontal and connected to the horizontal sliding groove 222.

[0051] Preferably, the movable part 231 is welded and fixed to the placement base 23. For example... Figure 11 As shown, the mounting part 221 is integrally formed with the swing rod 22, and the swing rod 22 is provided with a horizontal sliding groove 222, a rotating groove 2221 and a spiral groove 223. The rotating groove 2221 is connected to the end of the horizontal sliding groove 222, and the right end of the spiral groove 223 is the first end and the left end is the second end, so that the right end opening of the spiral groove 223 is vertical and connected to the rotating groove 2221, and the left end opening of the spiral groove 223 is horizontal and connected to the horizontal sliding groove 222. The movable part 231 is movably assembled in the horizontal sliding groove 222, the rotating groove 2221 and the spiral groove 223.

[0052] When the placement seat 23 needs to be coated, the movable part 231 is located in the horizontal slide groove 222 so that the placement seat 23 is parallel to the plane formed by the two swing rods 22. This allows the swing rods 22 to drive the placement seat 23 to adjust its tilt angle. When the swing rods 22 swing and expand to their maximum stroke, the movable part 231 of the placement seat 23 moves into the rotating groove 2221, allowing the placement seat 23 to be flipped. The contact part 31 on the flexible cover plate 3 pushes against the support plate part 232, causing the placement seat 23 to flip from a horizontal position to a vertical position. At this time, the movable part 231 is aligned with the first end opening of the spiral groove 223. Then, the swing rods 22 can be driven to swing and retract synchronously, allowing the movable part 231 to move into the spiral groove 223 and move back to the horizontal slide groove 222 along the spiral groove 223, thus completing the flipping operation of the placement seat 23 and realizing the flipping of the lens coating on the placement seat 23. No additional driving component is needed to realize the flipping of the lens coating on the placement seat 23, which is convenient for practical use.

[0053] In another embodiment of the present invention, a flexible stop 7 is fixedly provided on the second end of the spiral groove 223, which allows the movable part 231 to slide unidirectionally from the spiral groove 223 into the horizontal groove 222.

[0054] Preferred, such as Figure 11As shown, a flexible stop 7 is fixedly installed inside the second end of the spiral groove 223. The flexible stop 7 is glued to the spiral groove 223. The side of the flexible stop 7 facing the second end of the spiral groove 223 is a guide slope so that the movable part 231 can be deformed by pressing the flexible stop 7 along the spiral groove 223 and then enter the horizontal slide groove 222. The side of the flexible stop 7 facing the horizontal slide groove 222 is a blocking slope, so that when the movable part 231 is sliding horizontally in the horizontal slide groove 222, it is difficult for the movable part 231 to enter the spiral groove 223 due to the horizontal slide groove 222. Thus, the presence of the flexible stop 7 ensures the sliding stability of the movable part 231 in the horizontal slide groove 222. When the swing rod 22 swings synchronously to adjust the tilt angle of the placement seat 23, it can prevent the movable part 231 from accidentally entering the spiral groove 223 and causing the placement seat 23 to flip over, thereby improving the stability of the placement seat 23 when adjusting the tilt angle.

[0055] In another embodiment of the present invention, a connecting part 41 is symmetrically fixedly provided on the ball cover 4, and a sliding block 224 is fixedly provided on the mounting part 221 and slidably assembled on the connecting part 41, and the ball cover 4 is driven to slide and remain in the middle between two adjacent swing rods 22.

[0056] Preferred, such as Figure 10 As shown, the connecting part 41 and the ball cover 4 are welded and fixedly connected, and the sliding block 224 and the mounting part 221 are welded and fixedly connected. The sliding block 224 and the connecting part 41 are slidably assembled so that the ball cover 4 is slidably arranged between two adjacent swing rods 22. An elastic element is also provided in the connecting part 41 to drive the ball cover 4 to slide and be held in the middle between the two adjacent swing rods 22. Then, the ball cover 4 drives the placement seat 23 to slide synchronously and be held in the middle between the two adjacent swing rods 22. This achieves the placement seat 23 being centrally arranged between the two adjacent swing rods 22, thereby improving the rotational symmetry of the swing rods 22 and the placement seat 23 arranged on the mounting frame 21, improving the stability of the placement assembly 2 when the whole rotates, and improving the coating forming quality of the lens on the placement seat 23.

[0057] The elastic element can be replaced by any elastic object known to those skilled in the art, such as a spring, elastic plate, or balloon.

[0058] In another embodiment of the present invention, a recycling tube 6 is fixedly disposed in the mounting frame 21. The first end of the recycling tube 6 is connected to the space between two adjacent swing rods 22, and the first end of the recycling tube 6 faces the inner side of the flexible cover plate 3.

[0059] Preferred, such as Figure 3 and Figure 6As shown, the first end of the recovery pipe 6 is connected to the mounting bracket 21, and the first end of the recovery pipe 6 is located between two adjacent swing rods 22 facing the inner side of the flexible cover plate 3. When the coating vapor rises, the coating vapor can first move to contact the lens on the placement seat 23 to realize the coating operation, and then the coating vapor continues to rise to float along the inner side of the flexible cover plate 3 towards the first end of the recovery pipe 6. Subsequently, the coating vapor can be sucked and recovered through the recovery pipe 6 to realize the recovery and reuse of the coating vapor. Secondly, during the swing expansion of the swing rods 22, the swing rods 22 pull the two sides of the flexible cover plate 3 to drive the flexible cover plate 3 to deform and move closer to the placement seat 23. During the deformation of the flexible cover plate 3, it can also push the coating vapor located inside the flexible cover plate 3 into the recovery pipe 6, thereby improving the recovery rate of the coating vapor.

[0060] The other end of the recovery pipe 6 is connected to the overspray metal vapor recovery device, thereby realizing the recovery and reuse of metal target vapor. The overspray metal vapor recovery device is common knowledge to those skilled in the art and will not be described in detail here.

[0061] In another embodiment of the present invention, a drive mechanism 5 is provided in the mounting frame 21. The drive mechanism 5 includes a movable seat 51 and a connecting rod 52 at both ends that are rotatably connected to the movable seat 51 and the swing rod 22, respectively. The movable seat 51 slides axially to drive the swing rod 22 to swing synchronously through the connecting rod 52.

[0062] Preferred, such as Figure 4 As shown, a drive cylinder 53 is also provided inside the mounting bracket 21, and the movable seat 51 is axially slidably disposed inside the mounting bracket 21, as shown. Figure 9 As shown, one end of the connecting rod 52 is rotatably mounted on the movable seat 51, and the other end of the connecting rod 52 is rotatably connected to the rotating part 225 of the swing rod 22. The end of the swing rod 22 is rotatably mounted on the mounting bracket 21. The movable seat 51 can be driven to slide axially by the drive cylinder 53. The movable seat 51 drives the swing rods 22 to swing synchronously through several connecting rods 52, thereby completing the synchronous swing expansion or contraction of the swing rods 22 and improving the swing synchronization and stability among the swing rods 22.

[0063] The drive cylinder 53 and its control program are common technical knowledge to those skilled in the art, and will not be described in detail here.

[0064] Working principle:

[0065] When different curvature lenses are clamped on the placement seat 23, the tilt angle can be changed by rotating and expanding or contracting the swing rod 22. In this way, the steam incident angle when the lens is clamped and fixed can be adjusted according to the curvature of the lens.

[0066] When the coating operation is performed, the evaporator on the evaporator seat 12 sublimates the metal target to produce coating vapor. When the mounting bracket 21 rotates to drive the swing rod 22 and the placement seat 23 to revolve around the circumference, the fixed seat 24 is still located on the placement seat 23 and rotates axially to drive the lens on the fixed seat 24 to rotate around the axis of the fixed seat 24, so that the lens moves to be coated.

[0067] When the coating on one side of the lens is completed, the swing rod 22 swings and expands to its maximum stroke position. The swing rod 22 is horizontal, which drives the placement seat 23 to move synchronously to a horizontal position. The swing rod 22 tensions and pulls the two sides of the flexible cover plate 3, causing the flexible cover plate 3 to be stretched and deformed towards the placement seat 23. At this time, the contact part 31 on the flexible cover plate 3 moves and contacts the support plate part 232. The contact part 31 pushes the support plate part 232, causing the placement seat 23 to flip from a horizontal position to a vertical position. Then, the swing rod 22 can be driven to swing and contract synchronously, so that the swing rod 22 can drive the placement seat 23 to continue to flip from a vertical position to an inclined position. The surface to be coated on the placement seat 23 is flipped to face the evaporator seat 12, thus completing the flipping operation of the lens on the placement seat 23. The original coated surface of the placement seat 23 faces the inside of the spherical cover 4, thus completing the masking and protection of the coated surface of the lens on the placement seat 23.

[0068] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A vacuum coating system for large-aperture laser reflective lenses, comprising a coating cabinet (1) and a placement assembly (2) disposed therein, wherein the placement assembly (2) includes a mounting bracket (21) rotatably disposed in the axial direction, characterized in that, It also includes several swing rods (22) with their ends swinging on the mounting frame (21) and arranged in a circular array. Between any two adjacent swing rods (22), there is a mounting seat (23) that clamps the lens and forms the coating surface and the surface to be coated. The swing rods (22) swing synchronously so that the tilt angle of the mounting seat (23) is adjustable.

2. The vacuum coating system for a large-aperture laser reflective lens according to claim 1, characterized in that, It also includes a flexible cover plate (3) that is fixedly connected to two adjacent swing rods (22) at both ends. The swing rods (22) swing and contract synchronously, causing the inner side of the flexible cover plate (3) to deform away from the coating surface of the placement seat (23).

3. The vacuum coating system for a large-aperture laser reflective lens according to claim 2, characterized in that, The flexible cover plate (3) is fixedly provided with an abutment part (31). The swing rod (22) expands to its maximum stroke so that the abutment part (31) squeezes the placement seat (23) from a horizontal position to a vertical position. Then the swing rod (22) swings and contracts so that the coating surface of the placement seat (23) flips towards the flexible cover plate (3).

4. The vacuum coating system for a large-aperture laser reflective lens according to claim 3, characterized in that, It also includes a ball cover (4) that is slidably arranged on two adjacent swing rods (22), the ball cover (4) and the placement seat (23) sliding synchronously in the axial direction, and the surface to be plated of the placement seat (23) facing the inside of the ball cover (4).

5. The vacuum coating system for a large-aperture laser reflective lens according to claim 4, characterized in that, The flexible cover plate (3) has an inner groove (32). The flexible cover plate (3) is always squeezed by the ball cover (4) to form an arch (33). The inner side of the arch (33) and the ball cover (4) form an annular flow channel through the inner groove (32).

6. The vacuum coating system for a large-aperture laser reflective lens according to claim 4, characterized in that, The placement base (23) is symmetrically fixed with a movable part (231). The mounting part (221) fixed on the swing rod (22) is provided with a horizontal sliding groove (222) and a rotating groove (2221) that are connected. The mounting part (221) is also provided with a spiral groove (223). The first end of the spiral groove (223) is vertical and connected to the rotating groove (2221). The second end of the spiral groove (223) is horizontal and connected to the horizontal sliding groove (222).

7. The vacuum coating system for a large-aperture laser reflective lens according to claim 6, characterized in that, A flexible stop (7) is fixedly provided on the second end of the spiral groove (223) so that the movable part (231) slides unidirectionally from the spiral groove (223) into the horizontal groove (222).

8. The vacuum coating system for a large-aperture laser reflective lens according to claim 6, characterized in that, The ball cover (4) is symmetrically fixed with a connecting part (41), and the mounting part (221) is fixed with a sliding block (224) that is slidably assembled on the connecting part (41), and the ball cover (4) is driven to slide and remain in the middle between two adjacent swing rods (22).

9. A vacuum coating system for a large-aperture laser reflective lens according to claim 2, characterized in that, It also includes a recycling tube (6) fixedly installed in the mounting bracket (21), the first end of which is connected to the space between two adjacent swing rods (22), and the first end of the recycling tube (6) faces the inner side of the flexible cover plate (3).

10. A vacuum coating system for a large-aperture laser reflective lens according to claim 1, characterized in that, It also includes a drive mechanism (5) set in the mounting bracket (21), the drive mechanism (5) includes a movable seat (51) and a connecting rod (52) that is rotatably connected to the movable seat (51) and the swing rod (22) at both ends respectively. The movable seat (51) slides axially to drive the swing rod (22) to swing synchronously through the connecting rod (52).

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