Shock absorber and damping system

Abstract

The application relates to a damper and a damping system, the damper comprising a bottom plate and a top plate which are oppositely spaced, a heating assembly arranged between the bottom plate and the top plate, a cooling medium inlet and a cooling medium outlet arranged outside the bottom plate, and a pipeline channel arranged inside the bottom plate, and the heating assembly is internally provided with a heat dissipation channel for the flow of the cooling medium, the inlet of the heat dissipation channel is connected with the cooling medium inlet through the pipeline channel, and the outlet of the heat dissipation channel is connected with the cooling medium outlet through the pipeline channel, so that the cooling medium outside the damper can be introduced through the cooling medium inlet, flow through the heat dissipation channel inside the heating assembly, and the heating assembly can be efficiently cooled, and then the cooling medium is discharged through the cooling medium outlet, so that a complete cooling circulation system is formed, the heat dissipation efficiency can be improved, the stability and reliability of the damper can be guaranteed, the heat dissipation demand of the damper when used in a closed space or a vacuum environment can be met, and the performance decline or fault caused by excessively high temperature can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision damping, in particular to a damper and a damping system. BACKGROUND

[0002] With the continuous improvement of the precision of super-precision machining equipment and measuring instruments, the vibration of the working environment tends to be of smaller amplitude and lower frequency, and thus more stringent requirements are put forward for the damping performance of the damping table. The traditional passive vibration isolation technology is composed of mass-spring-damper, and since there is an inherent contradiction between the low-frequency vibration transmission rate and the high-frequency vibration attenuation rate, it cannot meet the damping requirements of super-precision equipment. Therefore, it is urgent to develop new technologies and methods to improve this situation.

[0003] Active damping is an important technology to solve the above problems. An active damping system is generally composed of passive vibration isolation elements and active actuators, such as an active damper with an air spring and a voice coil motor in parallel, an active damper composed of a vibration isolation rubber and a piezoelectric ceramic, an active damper combined with an air spring and a pneumatic actuator, etc. Such active dampers can realize the functions of low-frequency suppression and high-frequency isolation.

[0004] However, the above active dampers have the problem of low heat dissipation efficiency. SUMMARY

[0005] The present application aims to provide a damper and a damping system to improve the heat dissipation efficiency of the damper, thereby ensuring the stability and reliability of the damper.

[0006] The present application provides a damper, which comprises a bottom plate, a top plate, a heat generating component, a cooling medium inlet and a cooling medium outlet; wherein the top plate is arranged in opposite and spaced relation to the bottom plate, the heat generating component is arranged between the bottom plate and the top plate, and the cooling medium inlet and the cooling medium outlet are arranged on the outer side of the bottom plate; and the inside of the bottom plate is provided with a pipeline passage, the inside of the heat generating component is provided with a heat dissipation passage for the flow of cooling medium, and the inlet of the heat dissipation passage is connected in communication with the cooling medium inlet through the pipeline passage, and the outlet of the heat dissipation passage is connected in communication with the cooling medium outlet through the pipeline passage.

[0007] The outer side wall of the bottom plate is provided with a window in the area corresponding to the pipeline channel, and the window is in communication with the space in the pipeline channel; and the damper further comprises a sealing plate fixed to the outer side wall of the bottom plate and sealing the window; the sealing plate has a first surface away from the bottom plate and a second surface towards the bottom plate, and the cooling medium inlet and the cooling medium outlet are provided on the first surface of the sealing plate, and at least one adapter inlet and at least one adapter outlet are provided on the second surface of the sealing plate, and the first shunt channel and the second shunt channel are arranged inside the sealing plate; the first shunt channel is in communication with the cooling medium inlet and each adapter inlet, the second shunt channel is in communication with the cooling medium outlet and each adapter outlet, and each adapter inlet and each adapter outlet are exposed in the pipeline channel.

[0008] The damper further comprises a sealing tube arranged outside the bottom plate, a first end of the sealing tube is in sealing connection with the first surface of the sealing plate, and the cooling medium inlet and the cooling medium outlet are exposed in the sealing tube; and when the damper is used in the closed chamber, a second end of the sealing tube is in sealing connection with the window provided on the side wall of the closed chamber, so as to realize the communication between the space in the sealing tube and the space outside the closed chamber.

[0009] The outer surface of the heat generating assembly is provided with an inlet connector and an outlet connector, the inlet connector is in communication with the inlet of the heat dissipation channel, and the outlet connector is in communication with the outlet of the heat dissipation channel; and the damper further comprises a first cooling medium conveying pipe and a second cooling medium conveying pipe; a first end of the first cooling medium conveying pipe is in communication with the cooling medium inlet, a second end of the first cooling medium conveying pipe is in communication with the inlet of the heat dissipation channel through the inlet connector after passing through the pipeline channel; a first end of the second cooling medium conveying pipe is in communication with the cooling medium outlet, and a second end of the second cooling medium conveying pipe is in communication with the outlet of the heat dissipation channel through the outlet connector after passing through the pipeline channel.

[0010] The heat generating assembly comprises a heat dissipation structure, the heat dissipation channel is arranged inside the heat dissipation structure, and the inlet connector and the outlet connector are arranged on the outer surface of the heat dissipation structure; and a heat dissipation window is provided on the bottom plate, the heat dissipation window is in communication with the space in the pipeline channel, the heat dissipation structure is in sealing connection with the heat dissipation window, and the inlet connector and the outlet connector are exposed in the pipeline channel.

[0011] The damper comprises a first heat generating assembly, the first heat generating assembly is a first motor assembly, the first motor assembly comprises a first stator and a first rotor, the first stator is fixed to the bottom plate, the first rotor is fixed to the top plate, the first rotor is configured to move in a first predetermined direction relative to the first stator, and the heat dissipation channel of the first motor assembly is arranged inside the first stator.

[0012] The damper comprises a second heat generating component, the second heat generating component is a second motor component, the second motor component comprises a second stator and a second mover, the second stator is fixed to the bottom plate, the second mover is fixed to the top plate, the second mover is configured to move relative to the second stator in a second predetermined direction, one of the second predetermined direction and the first predetermined direction is vertical, and the other is horizontal, and the heat dissipation channel of the second motor component is arranged in the interior of the second stator.

[0013] The damper comprises a third heat generating component, the third heat generating component is a cooking plate, the cooking plate comprises a heat dissipation support, a circuit board and a plurality of electronic components, the plurality of electronic components are mounted on one side of the circuit board, the heat dissipation support is arranged on the side of the circuit board on which the plurality of electronic components are mounted and at least partially covers the plurality of electronic components, and the heat dissipation channel of the cooking plate is arranged in the interior of the heat dissipation support.

[0014] The damper further comprises a damping cavity arranged between the bottom plate and the top plate, the top plate is connected to the damping cavity in a manner that the top plate is movable along the depth direction of the damping cavity, and the damping cavity is sealed to form a sealed cavity; and a side wall of the damping cavity is divided into at least one side wall segment along the depth direction of the damping cavity, and the at least one side wall segment comprises a target side wall segment, and the target side wall segment is a bellows.

[0015] The damper further comprises a damping cavity arranged between the bottom plate and the top plate, the top plate is connected to the damping cavity in a manner that the top plate is movable along the depth direction of the damping cavity, and the damping cavity is sealed to form a sealed cavity; and a side wall of the damping cavity is divided into at least one side wall segment along the depth direction of the damping cavity, and the at least one side wall segment comprises a target side wall segment, and the target side wall segment is a bellows.

[0016] The damper further comprises a damping cavity arranged between the bottom plate and the top plate, the top plate is connected to the damping cavity in a manner that the top plate is movable along the depth direction of the damping cavity, and the damping cavity is sealed to form a sealed cavity; and a side wall of the damping cavity is divided into at least one side wall segment along the depth direction of the damping cavity, and the at least one side wall segment comprises a target side wall segment, and the target side wall segment is a bellows. BRIEF DESCRIPTION OF DRAWINGS

[0017] The technical solutions and other beneficial effects of the present application will become apparent from the following detailed description of specific embodiments of the present application, taken in conjunction with the accompanying drawings.

[0018] Figure 1is a perspective structural schematic view of a shock absorber provided by an embodiment of the present application;

[0019] Figure 2 is another perspective structural schematic view of a shock absorber provided by an embodiment of the present application;

[0020] Figure 3 is a perspective structural schematic view of a shock absorber after removing a sealing end cover provided by an embodiment of the present application;

[0021] Figure 4 is a perspective structural schematic view of a shock absorber after cutting provided by an embodiment of the present application;

[0022] Figure 5 is a perspective structural schematic view of a bottom plate provided by an embodiment of the present application;

[0023] Figure 6 is a perspective structural schematic view of a bottom plate after cutting provided by an embodiment of the present application;

[0024] Figure 7 is another perspective structural schematic view of a bottom plate provided by an embodiment of the present application;

[0025] Figure 8 is a perspective structural schematic view of a first motor assembly provided by an embodiment of the present application;

[0026] Figure 9 is a perspective structural schematic view of a first stator provided by an embodiment of the present application;

[0027] Figure 10 is a perspective structural schematic view of a first stator after cutting provided by an embodiment of the present application;

[0028] Figure 11 is a perspective structural schematic view of a second motor assembly provided by an embodiment of the present application;

[0029] Figure 12 is a perspective structural schematic view of a second stator provided by an embodiment of the present application;

[0030] Figure 13 is a perspective structural schematic view of a second stator after cutting provided by an embodiment of the present application;

[0031] Figure 14 is a perspective structural schematic view of a cooktop provided by an embodiment of the present application;

[0032] Figure 15 is another perspective structural schematic view of a cooktop provided by an embodiment of the present application;

[0033] Figure 16 is a perspective structural schematic view of a heat dissipation support provided by an embodiment of the present application;

[0034] Figure 17 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0035] Figure 18 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0036] Figure 19 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0037] Figure 20 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0038] Figure 21 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0039] Figure 22 is a schematic diagram of a sectional view of the heat dissipation support according to an embodiment of the present application;

[0040] Reference signs:

[0041] 10 - damper; 100 - damper cavity; 101 - side wall; 101A - target side wall segment / first target side wall segment; 101B - target side wall segment / second target side wall segment; 103 / 104 - opening; 100A - sealing cavity; 11 - bottom plate; 11A - accommodating groove; 111 - pipeline passage; 112 - through hole; 113A - first window; 113B - second window; 114A - first heat dissipation window; 114B - second heat dissipation window; 115 - inlet / outlet air window; 116 - internal heat dissipation window; 12 - top plate; 13A - cooling medium inlet; 13B - cooling medium outlet; 14 - inlet / outlet air port; 15 - first flange plate; 16 - sealing ring; 16A - first sealing ring; 16B - second sealing ring; 17 - second flange plate; 18 - sealing end cover; 18A - accommodating cavity; 31 - sealing plate; 32A - cooling medium inlet joint; 32B - cooling medium outlet joint; 33 - inlet / outlet air port joint; 34A / 34B / 34C - switching inlet; 35A / 35B / 35C - switching outlet; 36A / 36B / 36C - switching inlet joint; 37A / 37B / 37C - switching outlet joint; 41 - sealing tube; 42 - signal input / output structure; 200 - heat generating component / first heat generating component / first motor component; 211 - first stator; 2111 - heat dissipation structure / first stator support; 212 - first rotor; 201 - heat dissipation passage; 201A - inlet; 201B - outlet; 202 - inlet joint; 203 - outlet joint; 300 - heat generating component / second heat generating component / second motor component; 311 - second stator; 3111 - heat dissipation structure / second stator support; 312 - second rotor; 301 - heat dissipation passage; 301A - inlet; 301B - outlet; 302 - inlet joint; 303 - outlet joint; 400 - heat generating component / third heat generating component / conditioning plate; 410 - conditioning plate mounting support; 411 - heat dissipation structure / heat dissipation support; 412 - circuit board; 413 - electronic component; 401 - heat dissipation passage; 401A - inlet; 401B - outlet; 402 - inlet joint; 403 - outlet joint; 500 - built-in functional component. DETAILED DESCRIPTION

[0042] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. The examples of the embodiments are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application. In addition, it should be understood that the specific embodiments described herein are only used to explain the present application and cannot be used to limit the present application.

[0043] In the following description, a second component being connected to a first component can include embodiments in which the second component is directly connected to the first component and embodiments in which the second component is connected to the first component by way of an additional component such that the second component is not directly connected to the first component.

[0044] In the following description, a second component being connected to a first component can include embodiments in which the second component is directly connected to the first component and embodiments in which the second component is connected to the first component by way of an additional component such that the second component is not directly connected to the first component.

[0045] In describing the structure of the components, when a layer, a region is referred to as being "on" or "above" another layer, another region, it can mean directly on or above another layer, another region, or further including another layer or region therebetween. And, if the component is flipped, the layer, the region will be "under" or "below" another layer, another region. In addition, the features, structures or characteristics described hereinafter can be combined in any suitable manner in one or more embodiments.

[0046] In addition, the directional terms mentioned in the embodiments of the present application, such as [up], [down], [front], [back], [left], [right], [inward], [outward], [lateral] and the like, are only the directions of the reference drawings. Therefore, the directional terms used are used to illustrate and understand the embodiments of the present application, and not to limit the embodiments of the present application. In each drawing, similar elements are denoted by the same reference numerals. For the sake of clarity, each part in the drawings is not drawn to scale. In addition, some related parts can not be shown in the drawings.

[0047] The following embodiments will be described in detail below with specific examples. It should be noted that the sequence of the following embodiments is not intended to limit the preferred order of the embodiments.

[0048] Please refer to Figures 1 to 22 , the damper 10 includes a bottom plate 11, a top plate 12, a heat generating component 200 / 300 / 400, a cooling medium inlet 13A and a cooling medium outlet 13B. Among them, the top plate 12 is arranged in opposite spaced relationship with the bottom plate 11, the heat generating component 200 / 300 / 400 is a functional component having heat dissipation requirement in the working process of the damper 10, and the heat generating component 200 / 300 / 400 is arranged between the bottom plate 11 and the top plate 12. The cooling medium inlet 13A is configured to transport cooling medium into the damper 10, the cooling medium outlet 13B is configured to discharge the cooling medium in the damper 10, and the cooling medium inlet 13A and the cooling medium outlet 13B are arranged on the outside of the bottom plate 11, so as to facilitate the introduction and discharge of the cooling medium. Among them, the cooling medium can be cooling water or cooling gas.

[0049] And, the bottom plate 11 is internally provided with a pipeline passage 111, the heat generating assembly 200 / 300 / 400 is internally provided with a heat dissipation passage 201 / 301 / 401 for the circulation of cooling medium, and the inlet 201A / 301A / 401A of the heat dissipation passage 201 / 301 / 401 is connected with the cooling medium inlet 13A through the pipeline passage 111, and the outlet 201B / 301B / 401B of the heat dissipation passage 201 / 301 / 401 is connected with the cooling medium outlet 13B through the pipeline passage 111. In this way, the circulation of cooling medium in the damper 10 can be realized, so as to effectively take away the heat generated by the heat generating assembly 200 / 300 / 400 during the working process of the damper 10, and improve the stability and service life of the whole device.

[0050] Specifically, the above-mentioned damper 10 can further include a damping cavity 100, which is arranged between the bottom plate 11 and the top plate 12, and the top plate 12 is connected with the damping cavity 100 in a manner that can move along the depth direction of the damping cavity 100, and the damping cavity 100 is sealed to form a sealed cavity 100A.

[0051] It should be noted that the vertical direction in the embodiments of the present application can refer to any direction perpendicular to the horizontal plane, and the horizontal direction in the embodiments of the present application can refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the above-mentioned damping cavity 100 can be parallel to the vertical direction.

[0052] In the present embodiment, as shown in Figure 4 In the above-mentioned damper 10, the damping cavity 100 can provide a sealed cavity 100A, which can be the damping cavity 100 directly or can be formed after the damping cavity 100 is sealed. Specifically, the air pressure in the sealed cavity 100A is adjustable, and when the top plate 12 moves along the depth direction of the damping cavity 100, the size of the sealed cavity 100A along the vertical direction can be reduced to increase the air pressure in the sealed cavity 100A, or the size of the sealed cavity 100A along the vertical direction can be increased to reduce the air pressure in the sealed cavity 100A. In this way, the air pressure in the sealed cavity 100A can change with the movement of the top plate 12 along the vertical direction, so as to realize the dynamic buffering and damping effect of the vertical vibration, and further improve the working stability and reliability of the damper 10.

[0053] Specifically, as shown in Figure 4 The top end of the above-mentioned damping cavity 100 can be provided with an opening 103, that is, the above-mentioned damping cavity 100 can be a cavity with an open top end, and the top end opening 103 of the damping cavity 100 is opposite to the top plate 12. And the top plate 12 is connected with the side wall 101 of the damping cavity 100 in a manner that can move along the depth direction of the damping cavity 100, and seals the top end opening 103 of the damping cavity 100.

[0054] In some embodiments, as shown in Figure 4 In order to seal the top end opening 103 of the damping cavity 100 by the top plate 12, the above-mentioned damper 10 can further include a first flange plate 15 fixed at the edge of the top end opening 103 of the damping cavity 100 and in the form of a circular ring. Moreover, the top plate 12 is fixed with the first flange plate 15 to realize the connection between the top plate 12 and the side wall 101 of the damping cavity 100.

[0055] Specifically, as shown in Figure 4 The connection between the top plate 12 and the first flange plate 15 can be provided with at least one sealing ring 16 located between the top plate 12 and the first flange plate 15 and capable of sealing the connection between the top plate 12 and the first flange plate 15 to ensure the sealing effect of the connection between the top plate 12 and the first flange plate 15.

[0056] In some examples, as shown in Figure 4 The connection between the top plate 12 and the first flange plate 15 can be provided with two sealing rings 16, namely a first sealing ring 16A and a second sealing ring 16B, wherein the first sealing ring 16A is sleeved outside the second sealing ring 16B and is arranged in a spaced manner with the second sealing ring 16B to further improve the sealing effect.

[0057] In some examples, the first flange plate 15 can be fixed on the top end surface of the side wall 101 of the damping cavity 100 by welding to realize the connection strength and sealing performance between the first flange plate 15 and the damping cavity 100. The top plate 12 can be fixedly connected with the first flange plate 15 by screws to ensure the stable and reliable connection structure and facilitate disassembly and maintenance.

[0058] In the above-mentioned embodiments, as shown in Figure 4 In the above-mentioned damper 10, the bottom end of the damping cavity 100 can be provided with an opening 104, that is, the above-mentioned damping cavity 100 can be a cavity with a bottom end opening. Moreover, the bottom end of the damping cavity 100 is connected with the bottom plate 11, and the bottom plate 11 seals the bottom end opening 104 of the damping cavity 100.

[0059] Specifically, as shown in Figure 4 In order to seal the bottom end opening 104 of the damping cavity 100 by the bottom plate 11, the above-mentioned damper 10 can further include a second flange plate 17 fixed at the edge of the bottom end opening 104 of the damping cavity 100 and in the form of a circular ring. Moreover, the second flange plate 17 is fixed with the bottom plate 11 to realize the connection between the bottom end of the damping cavity 100 and the bottom plate 11.

[0060] Exemplarily, at least one sealing ring can be arranged between the bottom plate 11 and the second flange plate 17, and can seal the connection between the bottom plate 11 and the second flange plate 17, so as to ensure the sealing effect of the connection between the bottom plate 11 and the second flange plate 17.

[0061] Exemplarily, the second flange plate 17 can be fixed on the bottom end face of the side wall 101 of the damping cavity 100 by welding, so as to realize the connection strength and sealing performance between the second flange plate 17 and the damping cavity 100. The second flange plate 17 can be fixedly connected with the bottom plate 11 by screws, so as to ensure the stable and reliable connection structure, and facilitate disassembly and maintenance.

[0062] In some specific embodiments, as shown in Figure 4 The side of the bottom plate 11 facing the top plate 12 can be provided with a receiving groove 11A corresponding to the bottom end opening 104 of the damping cavity 100, the receiving groove 11A being sealingly connected and communicating with the bottom end opening 104 of the damping cavity 100, so as to realize that the sealing cavity 100A is formed by the receiving groove 11A and the damping cavity 100.

[0063] Specifically, as shown in Figure 4 The inner bottom wall face of the receiving groove 11A can be provided with a through hole 112 penetrating the bottom wall of the receiving groove 11A. Accordingly, as shown in Figure 4 The shock absorber 10 can further include a sealing end cover 18 for covering the through hole 112 formed in the bottom plate 11, so as to ensure the sealing performance of the sealing cavity 100A. Specifically, the sealing end cover 18 is connected with the bottom plate 11 and seals the through hole 112.

[0064] In some examples, as shown in Figure 4 The sealing end cover 18 can be at least partially accommodated in the through hole 112 and connected with the bottom plate 11, and the sealing end cover 18 is spaced apart from the top plate 12. Specifically, as shown in Figure 4 The inner side wall of the through hole 112 can be provided with a first step face M1 opposite to the surface (i.e. the upper surface) of the sealing end cover 18 facing the damping cavity 100, and the edge region of the sealing end cover 18 can be fixed on the first step face M1, so as to realize the connection between the sealing end cover 18 and the bottom plate 11. Moreover, at least one sealing ring can be arranged between the edge region of the sealing end cover 18 and the first step face M1, so as to enhance the sealing performance between the sealing end cover 18 and the bottom plate 11, and ensure the sealing performance of the sealing cavity 100A.

[0065] In some specific embodiments, as shown in Figure 4As shown, the damper 10 can further include an internal functional assembly 500, which is arranged in the sealed cavity 100A and connected with the bottom plate 11.

[0066] Specifically, in the above-mentioned embodiment, the bottom plate 11 is provided with a receiving groove 11A on the side of the bottom plate 11 corresponding to the area of the bottom end opening 104 of the damping cavity 100, and the inner bottom wall surface of the receiving groove 11A is provided with a through hole 112. The through hole 112 can expose the internal functional assembly 500 in the sealed cavity 100A, so as to facilitate the maintenance and replacement of the internal functional assembly 500 in the sealed cavity 100A.

[0067] In some examples, the internal functional assembly 500 can include a mounting bracket 501 and a functional device mounted on the mounting bracket 501, wherein the functional device can include a speed sensor, a displacement sensor, etc. Specifically, as shown in Figure 4 As shown, the inner side wall of the through hole 112 can be provided with a second step surface M2, which is opposite to the surface (i.e. the upper surface) of the sealing end cover 18 facing the damping cavity 100, and the bottom end of the mounting bracket 501 of the internal functional assembly 500 can be fixed on the second step surface M2, and the top end of the mounting bracket 501 of the internal functional assembly 500 can extend to the internal space of the sealed cavity 100A after passing through the receiving groove 11A from the through hole 112.

[0068] In this way, not only can the sealing performance of the sealed cavity 100A be effectively ensured to reach the expected standard, but also the maintenance and replacement of the device inside the sealed cavity 100A can be facilitated, thereby providing a strong guarantee for the long-term stable operation of the damper 10.

[0069] In the above-mentioned embodiment, as shown in Figure 4 and Figure 1 As shown, the damper 10 can further include a first motor assembly 200. The first motor assembly 200 includes a first stator 211 and a first rotor 212, wherein one of the first stator 211 and the first rotor 212 is connected with the bottom plate 11, and the other is connected with the top plate 12. And the first rotor 212 can be configured to move relative to the first stator 211 in a first predetermined direction to realize the active damping function of the damper 10. Wherein, the first predetermined direction can include horizontal and vertical, that is, the first rotor 212 can move relative to the first stator 211 in the horizontal direction, and also can move relative to the stator 211 in the vertical direction. In some examples, the first motor assembly 200 can be a bidirectional motor.

[0070] Specifically, in the aforementioned shock absorber 10, the first motor assembly 200 can correspond to a heating component 200, denoted as the first heating component 200. Furthermore, the first stator 211 of the first motor assembly 200 is fixed to the base plate 11, the first mover 212 of the first motor assembly 200 is fixed to the top plate 12, and the heat dissipation channel 201 of the first motor assembly 200 is located inside the first stator 211 (e.g., Figure 8 As shown in the figure, this allows the heat generated by the first stator 211 to be dissipated in a timely manner, thereby ensuring the stability and reliability of the first motor assembly 200 during operation.

[0071] In some specific embodiments, such as Figure 10 and Figure 1 As shown, the vibration damper 10 may further include a second motor assembly 300. The second motor assembly 300 includes a second stator 311 and a second mover 312, wherein one of the second stator 311 and the second mover 312 is connected to the base plate 11, and the other is connected to the top plate 12. Furthermore, the second mover 312 can be configured to move relative to the second stator 311 in a second predetermined direction to achieve the active vibration damping function of the vibration damper 10. The second predetermined direction is different from the first predetermined direction; for example, one of the second predetermined direction and the first predetermined direction can be horizontal, and the other can be vertical. Specifically, the first motor assembly 200 and the second motor assembly 300 can be a horizontal motor and a vertical motor, respectively.

[0072] Specifically, in the aforementioned shock absorber 10, the second motor assembly 300 can correspond to a heating element 300, denoted as the second heating element 300. Furthermore, the second stator 311 of the second motor assembly 300 is fixed to the base plate 11, the second mover 312 of the second motor assembly 300 is fixed to the top plate 12, and the heat dissipation channel 301 of the second motor assembly 300 is located inside the second stator 311 (e.g., Figure 11 (as shown), so that the heat generated by the second stator 311 can be dissipated in a timely manner, thereby ensuring the stability and reliability of the second motor assembly 300 during operation.

[0073] In the above embodiments, such as Figure 13 as well as Figures 3 to 4 As shown, the above-mentioned shock absorber 10 may also include a conditioning plate 400. The conditioning plate 400 may include a heat dissipation bracket 411, a circuit board 412 and a plurality of electronic components 413. The plurality of electronic components 413 are mounted on one side of the circuit board 412. The heat dissipation bracket 411 is disposed on the side of the circuit board 412 on which the plurality of electronic components 413 are mounted, and at least partially covers the plurality of electronic components 413 to dissipate heat from the plurality of electronic components 413.

[0074] For example, such asFigures 14 to 17 As shown, the aforementioned conditioning plate 400 can include a conditioning plate mounting bracket 410 for fixing the conditioning plate 400 to a suitable position inside or outside the damper 10 to ensure its stability during operation. The heat dissipation bracket 411 is tightly connected with the circuit board 412 through a heat-conducting material, so as to quickly conduct and diffuse the heat generated by the electronic components 413, thereby improving the overall heat dissipation efficiency. In addition, the surface of the heat dissipation bracket 411 is designed with multiple heat dissipation fins to increase the contact area with air and further improve the heat dissipation performance. In actual application, the multiple electronic components 413 on the circuit board 412 are kept at an appropriate distance to prevent heat concentration and further improve the heat dissipation effect.

[0075] Specifically, in the aforementioned damper 10, the conditioning plate 400 can correspond to one heating component 400, denoted as a third heating component 400. And, as shown in Figures 14 to 17 As shown, the heat dissipation channel 401 of the conditioning plate 400 is arranged inside the heat dissipation bracket 411, so as to facilitate the timely dissipation of the heat generated by the electronic components 413 in the conditioning plate 400, thereby ensuring the stability and reliability of the conditioning plate 400 during operation.

[0076] In some specific embodiments, as shown in Figure 17 As shown in the aforementioned damper 10, the conditioning plate 400 can be arranged inside the sealed cavity 100A to prevent external environment from interfering with the conditioning plate 400. Specifically, as shown in Figure 4 As shown, the conditioning plate 400 (such as the conditioning plate mounting bracket 410) can be connected directly below the built-in functional component 500, so as to facilitate the signal transmission and electrical connection between the built-in functional component 500 and the conditioning plate 400.

[0077] In some examples, as shown in Figure 4 As shown, the aforementioned sealed end cover 18 can have a receiving cavity 18A with one end open and one end sealed, and the opening of the receiving cavity 18A is opposite to the top plate 12. The aforementioned conditioning plate 400 (such as the conditioning plate mounting bracket 410) can be connected directly below the built-in functional component 500 along one vertical end (i.e. the top end), and the other vertical end (i.e. the bottom end) of the aforementioned conditioning plate 400 can be accommodated in the receiving cavity 18A. In addition, the opening of the receiving cavity 18A and the bottom end opening 104 of the aforementioned damping cavity 100 are connected through the through hole 112 formed on the aforementioned bottom plate 11, so that the receiving cavity 18A inside the sealed end cover 18 and the internal space of the damping cavity 100 are connected, and the aforementioned sealed cavity 100A is composed of the receiving cavity 18A, the receiving groove 11A and the damping cavity 100.

[0078] In the aforementioned embodiments, as shown in Figure 4As shown, in the above shock absorber 10, the number of heat generating components 200 / 300 / 400 can be at least one, and each heat generating component 200 / 300 / 400 is internally provided with an independent heat dissipation channel 201 / 301 / 401, and each heat dissipation channel 201 / 301 / 401 is isolated from each other to avoid heat cross interference, thereby improving the overall thermal management efficiency and operation stability of the shock absorber 10.

[0079] Specifically, the above shock absorber 10 can include one or more of the above first heat generating component 200, second heat generating component 300 and third heat generating component 400, for example, can include the above first heat generating component 200, second heat generating component 300 and third heat generating component 400 at the same time. And the heat dissipation channel 201 / 301 / 401 inside each heat generating component 200 / 300 / 400 forms an independent and parallel cooling passage between the cooling medium inlet 13A and the cooling medium outlet 13B. In this way, not only the cooling efficiency is improved, but also the reliability of the system is enhanced. When a certain heat generating component 200 / 300 / 400 fails, it does not affect the normal cooling operation of other components.

[0080] Specifically, the inlet 201A of the heat dissipation channel 201 inside the first heat generating component 200 is connected with the cooling medium inlet 13A, and the outlet 201B of the heat dissipation channel 201 inside the first heat generating component 200 is connected with the cooling medium outlet 13B, so as to realize the flow of the cooling medium from the inlet 201A of the heat dissipation channel 201 into the heat dissipation channel 201 and then out of the outlet 201B of the heat dissipation channel 201.

[0081] The inlet 301A of the heat dissipation channel 301 inside the second heat generating component 300 is connected with the cooling medium inlet 13A, and the outlet 301B of the heat dissipation channel 301 inside the second heat generating component 300 is connected with the cooling medium outlet 13B, so as to realize the flow of the cooling medium from the inlet 301A of the heat dissipation channel 301 into the heat dissipation channel 301 and then out of the outlet 301B of the heat dissipation channel 301.

[0082] The inlet 401A of the heat dissipation channel 401 inside the third heat generating component 400 is connected with the cooling medium inlet 13A, and the outlet 401B of the heat dissipation channel 401 inside the third heat generating component 400 is connected with the cooling medium outlet 13B, so as to realize the flow of the cooling medium from the inlet 401A of the heat dissipation channel 401 into the heat dissipation channel 401 and then out of the outlet 401B of the heat dissipation channel 401.

[0083] In some embodiments, as Figures 1 to 17 As shown, in the above shock absorber 10, the outer side wall of the bottom plate 11 can be provided with a first window 113A corresponding to the area of the pipeline channel 111, and the first window 113A is connected with the space in the pipeline channel 111. And, asFigures 5 to 7 And to Figure 1 As shown, the aforementioned vibration damper 10 may further include a sealing plate 31. The sealing plate 31 is fixed to the outer wall of the base plate 11 and seals the first window 113A opened on the outer wall of the base plate 11. Exemplarily, the sealing plate 31 can cover the first window 113A and form a sealed structure with the base plate 11 to ensure that the space inside the pipeline channel 111 is isolated from the external environment of the vibration damper 10. Specifically, the sealing plate 31 can be designed as a sealing flange so that the sealing plate 31 can fit tightly against the outer wall of the base plate 11 and be fixedly connected by bolts or other fasteners, thereby forming a reliable sealing barrier at the first window 113A and improving the overall sealing reliability of the vibration damper 10.

[0084] Specifically, such as Figures 18 to 22 As shown, the sealing plate 31 has a first surface facing away from the base plate 11 and a second surface facing the base plate 11. A cooling medium inlet 13A and a cooling medium outlet 13B are located on the first surface of the sealing plate 31. At least one transition inlet 34A / 34B / 34C and at least one transition outlet 35A / 35B / 35C are located on the second surface of the sealing plate 31. The sealing plate 31 has a first diversion channel 38A and a second diversion channel 38B inside. The first diversion channel 38A connects the cooling medium inlet 13A to each transition inlet 34A / 34B / 34C, and the second diversion channel 38B connects the cooling medium outlet 13B to each transition outlet 35A / 35B / 35C. Each transition inlet 34A / 34B / 34C and each transition outlet 35A / 35B / 35C can be exposed within the pipe channel 111 to facilitate the heat dissipation channels 201 / 301 / 301 / 301 inside each heat-generating component 200 / 300 / 400. The inlets 201A / 301A / 401A of 401 are connected to the cooling medium inlet 13A via their respective transition inlets 34A / 34B / 34C. Simultaneously, the outlets 201B / 301B / 401 of the heat dissipation channels 201 / 301 / 401 inside each heat-generating component 200 / 300 / 400 are connected to the cooling medium outlet 13B via their respective transition outlets 35A / 35B / 35C, thereby enabling the cooling medium to... The cooling medium flows in from the cooling medium inlet 13, and is then diverted to each transfer inlet 34A / 34B / 34C, and flows to the heat dissipation channels 201 / 301 / 401 inside each heat-generating component 200 / 300 / 400. At the same time, the cooling medium flowing out from the heat dissipation channels 201 / 301 / 401 inside each heat-generating component 200 / 300 / 400 merges into the cooling medium outlet 13B after reaching each transfer outlet 35A / 35B / 35C.

[0085] Specifically, in the above-described damper 10, each heat generating component 200 / 300 / 400 corresponds to one adapter inlet 34A / 34B / 34C and one adapter outlet 35A / 35B / 35C. For example, the above-described first heat generating component 200 can correspond to the adapter inlet 34B and the adapter outlet 35B, the above-described second heat generating component 300 can correspond to the adapter inlet 34C and the adapter outlet 35C, and the above-described third heat generating component 400 can correspond to the adapter inlet 34A and the adapter outlet 35A.

[0086] Specifically, as shown in Figures 20 to 22 , Figure 1 and Figure 5 , the outer side wall surface of the bottom plate 11 can also be provided with a second window 113B in the region corresponding to the pipeline channel 111, and the second window 113B is in communication with the space in the pipeline channel 111. Moreover, the damper 10 can also include a signal input and output structure 42 fixed to the outer side wall surface of the bottom plate 11 and sealing the second window 113B formed in the outer side wall surface of the bottom plate 11. Exemplarily, the signal input and output structure 42 can cover the second window 113B and form a sealed structure with the bottom plate 11 to ensure that the space in the pipeline channel 111 is isolated from the environment outside the damper 10.

[0087] The signal input and output structure 42 is used for the input and output of signals to facilitate communication or connection with external devices, such as the exchange of electrical signals or data through cables, optical fibers or other transmission media. Exemplarily, the signal input and output structure 42 can be an electrical flange.

[0088] In some specific embodiments, as shown in Figure 6 , in the above-described damper 10, the outer surface of each heat generating component 200 / 300 / 400 can be provided with an inlet connector 202 / 302 / 402 and an outlet connector 203 / 303 / 403, wherein the inlet connector 202 / 302 / 402 is in communication with the inlet 201A / 301A / 401A of the heat dissipation channel 201 / 301 / 401, and the outlet connector 203 / 303 / 403 is in communication with the outlet 201B / 301B / 401B of the heat dissipation channel 201 / 301 / 401. As shown in Figures 8 to 17 , the damper 10 can also include at least one adapter inlet connector 36A / 36B / 36C and at least one adapter outlet connector 37A / 37B / 37C. The at least one adapter inlet connector 36A / 36B / 36C is connected to the at least one adapter inlet 34A / 34B / 34C one by one. The at least one adapter outlet connector 37A / 37B / 37C is connected to the at least one adapter outlet 35A / 35B / 35C one by one.

[0089] Specifically, in the above-mentioned damper 10, the outer surface of each heat generating component 200 / 300 / 400 can be provided with an inlet connector 202 / 302 / 402 and an outlet connector 203 / 303 / 403. For example, the outer surface of the above-mentioned first heat generating component 200 can be provided with an inlet connector 202 and an outlet connector 203, and the inlet connector 202 and the outlet connector 203 are respectively connected to the inlet 201A and the outlet 201B of the heat dissipation channel 201 in the first heat generating component 200. The outer surface of the above-mentioned second heat generating component 300 can be provided with an inlet connector 302 and an outlet connector 303, and the inlet connector 302 and the outlet connector 303 are respectively connected to the inlet 301A and the outlet 301B of the heat dissipation channel 301 in the second heat generating component 300. The outer surface of the above-mentioned third heat generating component 400 can be provided with an inlet connector 402 and an outlet connector 403, and the inlet connector 402 and the outlet connector 403 are respectively connected to the inlet 401A and the outlet 401B of the heat dissipation channel 401 in the third heat generating component 400.

[0090] And, in specific implementation, the above-mentioned damper 10 can further include at least one first cooling medium conveying pipe (not shown in the figure) and at least one second cooling medium conveying pipe (not shown in the figure). Wherein, one end (i.e. the first end) of the at least one first cooling medium conveying pipe is connected to the above-mentioned at least one adapter inlet connector 36A / 36B / 36C one by one, so as to realize that the first end of the at least one first cooling medium conveying pipe is respectively connected to the cooling medium inlet 13A. The other end (i.e. the second end) of the at least one first cooling medium conveying pipe is connected to the inlet connector 202 / 302 / 402 of the above-mentioned at least one heat generating component 200 / 300 / 400 after passing through the pipeline passage 111, so as to realize that the second end of the at least one first cooling medium conveying pipe is respectively connected to the inlet 201A / 301A / 401A of the heat dissipation channel 201 / 301 / 401 inside each heat generating component 200 / 300 / 400. One end (i.e. the first end) of the at least one second cooling medium conveying pipe is connected to the above-mentioned at least one adapter outlet connector 37A / 37B / 37C one by one, so as to realize that the first end of the at least one second cooling medium conveying pipe is respectively connected to the cooling medium outlet 13B. The other end (i.e. the second end) of the at least one second cooling medium conveying pipe is connected to the outlet connector 203 / 303 / 403 of the above-mentioned at least one heat generating component 200 / 300 / 400 after passing through the pipeline passage 111, so as to realize that the second end of the at least one second cooling medium conveying pipe is respectively connected to the outlet 201B / 301B / 401B of the heat dissipation channel 201 / 301 / 401 inside each heat generating component 200 / 300 / 400.

[0091] Through the above structural design, the cooling medium enters the vibration damper 10 from the cooling medium inlet 13A and is then transported via the first cooling medium delivery pipe to the inlets 201A / 301A / 401A of the heat dissipation channels 201 / 301 / 401 inside each heat-generating component 200 / 300 / 400, thereby effectively cooling the heat-generating components. After completing its heat dissipation function, the cooling medium is transported via the outlets 201B / 301B / 401B of the heat dissipation channels 201 / 301 / 401 to the cooling medium outlet 13B through the second cooling medium delivery pipe, achieving a circulating flow of the cooling medium. This structural design is reasonable, which helps to improve the overall heat dissipation efficiency and enhances the stability and reliability of equipment operation. In addition, to ensure the sealing and stability of the cooling medium during transportation, high-performance seals are installed at each connection point to effectively prevent leakage of the cooling medium. Furthermore, the cooling medium delivery pipeline is made of high-strength, corrosion-resistant materials to ensure its stability and durability during long-term operation. The aforementioned structural design not only improves the overall sealing of the cooling system but also enhances its operational reliability under high-temperature and high-pressure environments. Furthermore, the flow path of the cooling medium has been optimized, reducing flow resistance and improving cooling efficiency. This structural design fully considers practicality and safety, providing a strong guarantee for the long-term stable operation of the equipment.

[0092] In some specific embodiments, such as Figures 18 to 22 As shown, the aforementioned vibration damper 10 may further include a sealing tube 41, which is located on the outside of the base plate 11. Specifically, one end of the sealing tube 41 (hereinafter referred to as the first end) is sealed to the first surface of the sealing plate 41, and both the cooling medium inlet 13A and the cooling medium outlet 13B are exposed inside the sealing tube 41. This allows the cooling medium outside the vibration damper 10 to be transferred to the cooling medium inlet 13A through the space inside the sealing tube 41, and simultaneously allows the cooling medium discharged from the cooling medium outlet 13B to be transferred to the outside of the vibration damper 10 through the space inside the sealing tube 41. Furthermore, when the vibration damper 10 is used in a sealed chamber, the other end of the sealing tube 41 (hereinafter referred to as the second end) is sealed to a window opened on the side wall of the sealed chamber, so as to connect the space inside the sealing tube 41 with the space outside the sealed chamber. The sealed chamber may specifically be a vacuum chamber or a chamber with specific gas pressure or gas composition requirements to meet the usage requirements under different working conditions.

[0093] Therefore, by arranging the sealing pipe 41, the heat generated by the damper 10 during operation in the sealed chamber can be effectively transferred to the outside of the sealed chamber and dissipated by the external cooling system, thereby meeting the heat dissipation requirements of the damper 10 when used in a sealed space or a vacuum environment, reducing the problem of excessive temperature due to the inability to discharge heat in a sealed space or a vacuum environment, and further reducing the performance of the damper 10 or causing failure. At the same time, the arrangement of the sealing pipe 41 can also effectively prevent the leakage of the internal environment of the sealed chamber, thereby ensuring the sealing performance of the entire device. In addition, this structure also has the advantages of convenient installation and maintenance, which is beneficial to improve the operability and practicality of the device.

[0094] In particular, the connection between the first end of the sealing pipe 41 and the sealing plate 41 can adopt a flange structure, and a high-performance sealing ring is used for sealing to ensure the sealing performance and structural strength of the connection part. The connection between the sealing pipe 41 and the sealing plate 41 adopts a flange structure design, and is effectively sealed by a high-performance sealing ring to ensure the sealing performance and structural strength of the connection part. At the same time, the connection between the second end of the sealing pipe 41 and the window formed on the side wall of the sealed chamber can also adopt a flange structure, and a high-performance sealing ring is used for sealing to ensure that the overall structure is leak-proof.

[0095] In some examples, the above-mentioned sealing pipe 41 can be a bellows, which has good flexibility and compensation ability, and can effectively absorb the slight displacement and vibration generated by the damper 10 during operation, thereby further improving the stability and sealing performance of the system. The material of the bellows can be selected from stainless steel or other corrosion-resistant and high-temperature-resistant high-performance materials to meet the use requirements in different working conditions.

[0096] In some examples, as shown in Figures 1 to 3 The damper 10 can further include a cooling medium inlet joint 32A and a cooling medium outlet joint 32B, which are connected to the cooling medium inlet 13A and the cooling medium outlet 13B respectively and are exposed in the sealing pipe 41 to facilitate the input and output of the cooling medium.

[0097] In some examples, as shown in Figures 18 to 22 The damper 10 can further include an air inlet and outlet 14, which communicates the internal space of the sealed chamber 100A with the external space and is used for inflating or deflating the sealed chamber 100A, thereby adjusting the air pressure in the sealed chamber 100A. By adjusting the air pressure in the sealed chamber 100A, the movement state of the top plate 12 can be further adjusted, thereby improving the performance of the damper 10.

[0098] Specifically, the gas inlet / outlet port 14 can be arranged on the outer side of the bottom plate 11 to facilitate connection with an external gas source or a vacuum device, so as to realize accurate control of the air pressure inside the sealed cavity 100A. For example, as shown in Figures 18 to 22 the gas inlet / outlet port 14 can be arranged on the first surface of the sealing plate 31 away from the bottom plate 11, and the gas inlet / outlet port 14 penetrates the sealing plate 31 and is exposed in the pipeline channel 111 inside the bottom plate 11, so as to facilitate the communication between the gas inlet / outlet port 14 and the space inside the sealed cavity 100A through the pipeline channel 111.

[0099] For example, as shown in Figures 18 to 22 the above-described damper 10 can further include a gas inlet / outlet port connector 33 connected with the gas inlet / outlet port 14 and exposed in the sealed tube 41, so as to facilitate the input and output of the gas. Specifically, as shown in Figures 18 to 22 in the above-described embodiment in which the sealed cavity 100A is formed by the accommodation groove 11A and the damping cavity 100, the inner side wall of the accommodation groove 11A can be provided with a gas inlet / outlet window 115 corresponding to the region of the pipeline channel 111, and the gas inlet / outlet window 115 is in communication with the space in the pipeline channel 111, so as to facilitate the entry and exit of the gas into or out of the sealed cavity 100A through the gas inlet / outlet port 14. Through the design of the gas inlet / outlet window 115, the gas flow efficiency can be further improved, the air pressure inside the sealed cavity 100A can be quickly adjusted, the motion response of the top plate 12 can be effectively controlled, and the adaptability and stability of the damper 10 under complex working conditions can be enhanced.

[0100] In some specific embodiments, as shown in Figure 7 in the above-described damper 10, each heat generating component 200 / 300 / 400 can include a heat dissipation structure 2111 / 3111 / 411, and in each heat generating component 200 / 300 / 400, the heat dissipation channel 201 / 301 / 401 is arranged inside the heat dissipation structure 2111 / 3111 / 411, and the inlet connector 202 / 302 / 402 and the outlet connector 203 / 303 / 403 are arranged on the outer surface of the heat dissipation structure.

[0101] Specifically, as shown in Figures 8 to 17 for the first motor component 200 as the first heat generating component 200, the first stator support 2111 contained in the first stator 211 of the first motor component 200 can be used as the heat dissipation structure 2111 for arranging the heat dissipation channel 201, the inlet connector 202 and the outlet connector 203 of the first motor component 200. In actual application, by reasonably optimizing the design of the heat dissipation channel 201 inside the first stator support 2111, the flow efficiency of the cooling medium in the heat dissipation channel 201 can be further improved, so as to enhance the heat dissipation effect, reduce the working temperature of the first motor component 200, and improve the operation safety and service life of the equipment.

[0102] And, in particular implementation, as shown in the drawings, Figures 8 to 10 the bottom plate 11 can be provided with a first heat dissipation window 114A, which is in communication with the space in the pipeline channel 111, and the heat dissipation structure 2111 of the first heat generating component 200 is sealingly connected with the first heat dissipation window 114A, and the inlet joint 202 and the outlet joint 203 of the first heat generating component 200 are exposed in the pipeline channel 111, so that the cooling medium can smoothly flow into and out of the heat dissipation channel 201 inside the heat dissipation structure 2111, ensuring that the heat generated during the operation of the first heat generating component 200 is promptly discharged, thereby achieving efficient heat dissipation of the first heat generating component 200, and this design not only meets the optimization demand of the overall space layout of the shock absorber, but also provides reliable guarantee for long-term stable operation of the equipment.

[0103] Specifically, as shown in the drawings, Figures 5 to 7 for the second motor component 300 as the second heat generating component 300, the second stator support 3111 contained in the second stator 311 of the second motor component 300 can be used as the heat dissipation structure 3111 of the second heat generating component 300, for setting the heat dissipation channel 301, the inlet joint 302 and the outlet joint 303 of the second heat generating component 300. In actual application, by reasonably optimizing the design of the heat dissipation channel 301 inside the second stator support 3111, the flow efficiency of the cooling medium in the heat dissipation channel 301 can be further improved, thereby enhancing the heat dissipation effect, reducing the working temperature of the second motor component 300, and improving the operation safety and service life of the equipment.

[0104] And, in particular implementation, as shown in the drawings, Figures 11 to 13 the bottom plate 11 can be provided with a second heat dissipation window 114B, for example, the outer side wall surface of the bottom plate 11 can be provided with the second heat dissipation window 114B, which is in communication with the space in the pipeline channel 111, and the heat dissipation structure 3111 of the second heat generating component 300 is sealingly connected with the second heat dissipation window 114B, and the inlet joint 302 and the outlet joint 303 of the second heat generating component 300 are exposed in the pipeline channel 111, so that the cooling medium can smoothly flow into and out of the heat dissipation channel 301 inside the heat dissipation structure 3111, ensuring that the heat generated during the operation of the second heat generating component 300 is promptly discharged, thereby achieving efficient heat dissipation of the second heat generating component 300, and this design not only meets the optimization demand of the overall space layout of the shock absorber, but also provides reliable guarantee for long-term stable operation of the equipment.

[0105] Specifically, as shown in the drawings, Figures 5 to 7As shown, for the hob 400 as the third heat generating component 400, the heat dissipation support 411 contained in the hob 400 can be used as the heat dissipation structure 411 of the third heat generating component 400, for setting the heat dissipation channel 401, the inlet joint 402 and the outlet joint 403 of the third heat generating component 400. In actual application process, by reasonably optimizing the design of the heat dissipation channel 401 inside the heat dissipation support 411, the flow efficiency of the cooling medium in the heat dissipation channel 401 can be further improved, so as to enhance the heat dissipation effect, reduce the working temperature of the hob 400, and improve the operation safety and service life of the equipment.

[0106] And, in the above-mentioned embodiment in which the hob 400 is arranged in the sealed cavity 100A, and the sealed cavity 100A is sealed by the accommodating groove 11A and the damping cavity 100, as shown in Figures 14 to 17 As shown, the inner side wall surface of the accommodating groove 11A can be provided with an internal heat dissipation window 116 corresponding to the area of the pipeline channel 111, and the internal heat dissipation window 116 is in communication with the space inside the pipeline channel 111, so that the cooling medium can smoothly flow into and out of the heat dissipation channel 401 inside the heat dissipation structure 411, and the heat generated during the operation of the third heat generating component 400 can be discharged in time, so as to realize high-efficiency heat dissipation of the third heat generating component 400. Moreover, this design not only meets the optimization requirement of the overall space layout of the damper 10, but also provides reliable guarantee for long-term stable operation of the equipment.

[0107] It should be noted that in the present embodiment, by forming the pipeline channel inside the bottom plate 11, and arranging the first window 113A, the second window 113B, the first heat dissipation window 114A, the second heat dissipation window 114B, the air inlet and outlet window 115 and the internal heat dissipation window 116 on the bottom plate 11, the first cooling medium conveying pipe and the second cooling medium conveying pipe for conveying the cooling medium into the heat dissipation channels 201 / 301 / 401 of the heat generating components 200 / 300 / 400, and the air pipe for conveying the gas into the sealed cavity 100A can be all arranged inside the bottom plate 11, forming a separate system, without affecting the installation of other devices and parts. In addition, by uniformly planning the cooling medium conveying path and the gas conveying path, the assembly efficiency is improved, and the later maintenance and repair is facilitated.

[0108] In the above-mentioned embodiment, as shown in Figure 7As shown, in the above damper 10, the side wall 101 of the damping cavity 100 can be divided into at least one side wall section along the depth direction of the damping cavity 100, and the at least one side wall section includes a target side wall section, and the target side wall section is a bellows. In some examples, the side wall 101 of the damping cavity 100 can be divided into one side wall section along the depth direction (i.e. vertical direction) of the damping cavity 100, that is, the side wall 101 of the damping cavity 100 is the target side wall section, in other words, the side wall 101 of the damping cavity 100 can be a bellows. In other examples, as shown in the above, the side wall 101 of the damping cavity 100 can be divided into a plurality of side wall sections along the depth direction (i.e. vertical direction) of the damping cavity 100, and the plurality of side wall sections include two target side wall sections 101A / 101B, i.e. a first target side wall section 101A and a second target side wall section 101B, wherein the first target side wall section 101A can be specifically a side wall section located at the top end of the side wall 101 of the damping cavity 100, and the second target side wall section 101B can be specifically a side wall section located at the bottom end of the side wall 101 of the damping cavity 100. Figure 4 Figure 4

[0109] In this way, by setting the side wall 101 of the damping cavity 100 or the part thereof along the vertical direction as a bellows, the size of the side wall 101 of the damping cavity 100 along the vertical direction can be adjusted, and the air pressure in the sealed cavity 100A will change with the size of the side wall 101 of the damping cavity 100 along the vertical direction, specifically, when the size of the side wall 101 of the damping cavity 100 along the vertical direction is reduced, the air pressure in the sealed cavity 100A will be increased, and when the size of the side wall 101 of the damping cavity 100 along the vertical direction is increased, the air pressure in the sealed cavity 100A will be reduced, thereby absorbing vibration energy and improving the damping effect. In addition, the bellows structure has good axial expansion, which can adapt to the vertical movement of the top plate 12 above the damping cavity 100 without damaging the sealing of the sealed cavity 100A, further ensuring the sealing reliability of the sealed cavity 100A.

[0110] In addition, the design scheme of setting the side wall 101 of the damping cavity 100 or the part thereof along the vertical direction as a bellows in the present embodiment can avoid the use of a sealing film, thereby avoiding the problem of failure of the sealing film in a vacuum environment, and further improving the applicability and reliability of the damper 10 in a vacuum environment.

[0111] In the above embodiment, the above damper 10 can be used as a damping table for damping of semiconductor equipment and / or precision equipment such as precision machine tools.

[0112] ​As can be seen, the damper provided by the embodiment comprises a bottom plate, a top plate, a heat generating component, a cooling medium inlet and a cooling medium outlet, wherein the top plate is arranged opposite and spaced apart from the bottom plate, the heat generating component is arranged between the bottom plate and the top plate, and the cooling medium inlet and the cooling medium outlet are arranged on the outer side of the bottom plate; and the bottom plate is internally provided with a pipeline channel, and the heat generating component is internally provided with a heat dissipation channel for the flow of the cooling medium, and the inlet of the heat dissipation channel is connected in communication with the cooling medium inlet through the pipeline channel, and the outlet of the heat dissipation channel is connected in communication with the cooling medium outlet through the pipeline channel, so that the cooling medium outside the damper can be introduced through the cooling medium inlet, flow through the heat dissipation channel in the heat generating component (such as a motor, a regulating plate, etc.) which has a heat dissipation requirement in the damper, and then be discharged through the cooling medium outlet, forming a complete cooling circulation system, which not only can significantly improve the heat dissipation efficiency of the damper, guarantee the stability and reliability of the damper, but also can meet the heat dissipation requirement of the damper when used in a closed space or a vacuum environment, and reduce the performance decline or fault occurrence caused by excessively high temperature.

[0113] The damper system provided by the embodiment of the present application comprises the damper of any of the above embodiments.

[0114] Specifically, in the damper system, the damper comprises a bottom plate, a top plate, a heat generating component, a cooling medium inlet and a cooling medium outlet, wherein the top plate is arranged opposite and spaced apart from the bottom plate, the heat generating component is arranged between the bottom plate and the top plate, and the cooling medium inlet and the cooling medium outlet are arranged on the outer side of the bottom plate. And the bottom plate is internally provided with a pipeline channel, and the heat generating component is internally provided with a heat dissipation channel for the flow of the cooling medium, and the inlet of the heat dissipation channel is connected in communication with the cooling medium inlet through the pipeline channel, and the outlet of the heat dissipation channel is connected in communication with the cooling medium outlet through the pipeline channel.

[0115] Specifically, the damper system can further comprise a load, and the load can be fixed above the top plate of the damper, so as to realize the damping of the load.

[0116] For example, the load can be a semiconductor device, a precision machine tool or other precision equipment.

[0117] In some embodiments, the number of dampers included in the damper system can be multiple (such as at least three), and the damper system can further comprise a workbench arranged above the multiple dampers, so that the height of the workbench at the positions of the dampers can be detected by a sensor, and based on the detection result of the sensor, the output of the motor and / or the air inlet and outlet of the sealed cavity in the damper can be controlled, so that the workbench can always be in a horizontal state.

[0118] It should be noted that the damping system provided by the embodiments of the present application can achieve the beneficial effects of any one of the dampers provided by the embodiments of the present application, which are described in detail in the foregoing embodiments and will not be described here again.

[0119] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A damper characterized by, The heat generating component, the cooling medium inlet and the cooling medium outlet are arranged on the outer side of the bottom plate; The top plate is arranged opposite to the bottom plate, the heat generating component is arranged between the bottom plate and the top plate, and the cooling medium inlet and the cooling medium outlet are arranged on the outer side of the bottom plate; The bottom plate is internally provided with a pipeline channel, the heat generating component is internally provided with a heat dissipation channel for the flow of the cooling medium, and the inlet of the heat dissipation channel is connected with the cooling medium inlet through the pipeline channel, and the outlet of the heat dissipation channel is connected with the cooling medium outlet through the pipeline channel; The outer side wall surface of the bottom plate is provided with a window corresponding to the area of the pipeline channel, and the window is connected with the space in the pipeline channel; The sealing plate is fixed on the outer side wall surface of the bottom plate and seals the window; The sealing plate has a first surface away from the bottom plate, and the cooling medium inlet and the cooling medium outlet are arranged on the first surface of the sealing plate.

2. The damper of claim 1, wherein The sealing plate has a second surface facing the bottom plate, and at least one adapter inlet and at least one adapter outlet are arranged on the second surface of the sealing plate, and the sealing plate is internally provided with a first shunt channel and a second shunt channel; The first shunt channel connects the cooling medium inlet with each adapter inlet, the second shunt channel connects the cooling medium outlet with each adapter outlet, and each adapter inlet and each adapter outlet are exposed in the pipeline channel.

3. The damper of claim 2, wherein The shock absorber further comprises a sealing tube arranged on the outer side of the bottom plate, a first end of the sealing tube is sealingly connected with the first surface of the sealing plate, and the cooling medium inlet and the cooling medium outlet are exposed in the sealing tube; When the shock absorber is used in a closed chamber, a second end of the sealing tube is sealingly connected with a window arranged on the side wall of the closed chamber, so as to realize the connection between the space in the sealing tube and the space outside the closed chamber.

4. The damper of claim 1, wherein The outer surface of the heat generating component is provided with an inlet connector and an outlet connector, the inlet connector is connected with the inlet of the heat dissipation channel, and the outlet connector is connected with the outlet of the heat dissipation channel; The shock absorber further comprises a first cooling medium conveying pipe and a second cooling medium conveying pipe, a first end of the first cooling medium conveying pipe is connected with the cooling medium inlet, a second end of the first cooling medium conveying pipe passes through the pipeline channel and is connected with the inlet of the heat dissipation channel through the inlet connector; A first end of the second cooling medium conveying pipe is connected with the cooling medium outlet, and a second end of the second cooling medium conveying pipe passes through the pipeline channel and is connected with the outlet of the heat dissipation channel through the outlet connector.

5. The damper of claim 4, wherein The heat generating component comprises a heat dissipation structure, and the heat dissipation channel is arranged in the interior of the heat dissipation structure, and the inlet connector and the outlet connector are arranged on the outer surface of the heat dissipation structure; And, a heat dissipation window is formed on the bottom plate, the heat dissipation window is in communication with a space in the pipeline channel, and the heat dissipation structure is in sealing connection with the heat dissipation window, and the inlet joint and the outlet joint are exposed in the pipeline channel.

6. The damper of claim 1, wherein The damper comprises a first heat generating component, which is a first motor component, the first motor component comprising a first stator and a first mover, wherein the first stator is fixed with the bottom plate, the first mover is fixed with the top plate, the first mover is configured to move in a first predetermined direction relative to the first stator, and the heat dissipation channel of the first motor component is arranged inside the first stator.

7. The damper of claim 6, wherein The damper comprises a second heat generating component, which is a second motor component, the second motor component comprising a second stator and a second mover, wherein the second stator is fixed with the bottom plate, the second mover is fixed with the top plate, the second mover is configured to move in a second predetermined direction relative to the second stator, one of the second predetermined direction and the first predetermined direction is vertical, and the other is horizontal, and the heat dissipation channel of the second motor component is arranged inside the second stator.

8. The damper of claim 1, wherein The damper comprises a third heat generating component, which is a conditioning plate, the conditioning plate comprising a heat dissipation support, a circuit board and a plurality of electronic components, wherein the plurality of electronic components are mounted on one side of the circuit board, the heat dissipation support is arranged on the side of the circuit board on which the plurality of electronic components are mounted and at least partially covers the plurality of electronic components, and the heat dissipation channel of the conditioning plate is arranged inside the heat dissipation support.

9. The damper of claim 1, wherein The damper further comprises a damping cavity arranged between the bottom plate and the top plate, the top plate is connected with the damping cavity in a manner that it can move along the depth direction of the damping cavity, and the damping cavity is sealed to form a sealed cavity. And, the side wall of the damping cavity is divided into at least one side wall segment along the depth direction of the damping cavity, and the at least one side wall segment comprises a target side wall segment, the target side wall segment being a bellows.

10. A vibration damping system, characterized by, The damper comprises the damper according to any one of claims 1 to 9.

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