Vacuum transfer device and in-situ atmosphere reaction observation system

Abstract

The invention relates to the technical field of in-situ atmosphere reaction observation, and discloses a vacuum transfer device and an in-situ atmosphere reaction observation system.The vacuum transfer device comprises a box body and a box cover, and a sealing cavity is defined between the box body and the box cover and used for containing a sample; the sealing assembly is arranged on the box body and / or the box cover and used for controlling the sealing cavity to be deflated or sealed. According to the vacuum transfer device provided by the invention, the vacuum transfer device carries the sample to be hermetically transferred from the reaction cavity of the reaction device to the sample cavity of the microscope, on one hand, the reaction gas can be prevented from contacting the internal environment of the microscope for a long time, the damage to the microscope is reduced, and the service life of the microscope is prolonged. On the other hand, sample distortion caused by contact between air and the sample can be avoided in the process of transferring the sample from the reaction cavity to the sample cavity, so that the accuracy of measured data is improved.

Description

Technical Field

[0001] This invention relates to the field of in-situ atmosphere reaction observation technology, and in particular to a vacuum transfer device and an in-situ atmosphere reaction observation system. Background Technology

[0002] In existing technologies, in-situ atmosphere reactions can be achieved in two ways: the first is to place the sample in a microscope and simultaneously introduce a reaction gas into the sample chamber of the microscope, observing the changes of the sample in the reaction gas in real time. In this method, the reaction gas will fill the entire environment inside the electron microscope, leading to contamination of the internal environment. In addition, some gases may damage or corrode internal electronic components.

[0003] The second method involves first observing the sample's state before the reaction under a microscope, then removing the sample and catalyzing it in an external atmosphere. After catalysis, the sample is transferred from the external atmosphere to a scanning electron microscope for observation of its post-reaction state. However, in this method, the sample is easily exposed to air during the transfer to the microscope after catalysis, leading to sample distortion and inaccurate measurement data. Summary of the Invention

[0004] This invention aims to address at least one of the technical problems existing in the prior art. To this end, this invention proposes a vacuum transfer device that, on the one hand, reduces damage to the microscope and extends its service life; on the other hand, it avoids air contact with the sample during the transfer process from the reaction chamber to the sample chamber, thus preventing sample distortion and improving the accuracy of measurement data.

[0005] The present invention also proposes an in-situ atmosphere reaction observation system, including the vacuum transfer device described above.

[0006] According to an embodiment of the present invention, a vacuum transfer device includes: a housing and a lid, wherein a sealed cavity is defined between the housing and the lid for placing a sample; and a sealing assembly disposed on the housing and / or the lid for controlling the release or sealing of the sealed cavity.

[0007] According to embodiments of the present invention, a vacuum transfer device defines a sealed cavity between a housing and a lid for placing a sample. A sealing assembly is disposed on the housing and / or lid to control the release or sealing of the sealed cavity. This achieves a sealed transfer of the sample from the reaction chamber of the reaction apparatus to the sample chamber of the microscope. On the one hand, this avoids prolonged contact of the reaction gas with the internal environment of the microscope, reducing damage to the microscope and extending its service life. On the other hand, it prevents air from contacting the sample during the transfer process from the reaction chamber to the sample chamber, thus avoiding sample distortion and improving the accuracy of the measurement data.

[0008] In some embodiments of the present invention, the box body and / or the box cover have a sealing hole, and the sealing assembly includes: a sealing part disposed in the sealing hole and connected to the hole wall of the sealing hole; a main body part movably inserted through the sealing part along the axial direction of the sealing hole, and the outer peripheral wall of the main body part has an exhaust groove, the exhaust groove being open to the side of the sealing cavity along the axial direction of the sealing hole.

[0009] In some embodiments of the present invention, the outer peripheral wall of the main body has a first limiting portion, the first limiting portion being used to abut against the inner wall of the sealing cavity, and the first limiting portion having a communication port communicating with the exhaust groove; and / or, the outer peripheral wall of the main body has a second limiting portion, the second limiting portion being used to abut against the outer wall surface of the box body and / or the outer wall surface of the box cover.

[0010] In some embodiments of the present invention, one end of the box body in the length or width direction and one end of the box lid in the length or width direction are rotatably connected.

[0011] In some embodiments of the present invention, the vacuum transfer device further includes: a first unlocking mechanism, which is disposed on and connected to the box body, for driving the box cover to rotate to open the box body.

[0012] In some embodiments of the present invention, the first unlocking mechanism includes: a driving member disposed on the box body; and a transmission assembly disposed on the box body, the transmission assembly being connected to the driving member and the box cover, wherein the driving member drives the box cover to rotate via the transmission assembly to open the box body.

[0013] In some embodiments of the present invention, the driving member is an elastic member, and the transmission assembly includes: a first connecting block rotatably connected to the box body; a second connecting block rotatably connected to the box cover; a slide rod, one end of which is connected to the first connecting block and the other end of which is movably inserted through the second connecting block; the driving member is connected to the first connecting block and is used to drive the first connecting block to rotate so that the box cover rotates to open the box body.

[0014] In some embodiments of the present invention, the vacuum transfer device further includes a locking assembly, a portion of which is disposed on the box body and another portion on the box lid, for locking when the box lid closes the box body.

[0015] In some embodiments of the present invention, the vacuum transfer device further includes a second unlocking mechanism disposed in the housing, the second unlocking mechanism being used to drive the locking assembly to unlock.

[0016] In some embodiments of the present invention, the locking assembly includes: a first lock and a second lock, the second lock being fixed to the lid, the first lock being rotatably disposed on the box body, the first lock having a locked position and an unlocked position, and a second unlocking mechanism for driving the first lock to rotate so that the first lock switches from the locked position to the unlocked position. In the locked position, the first lock and the second lock are engaged, and in the unlocked position, the first lock and the second lock are disengaged.

[0017] In some embodiments of the present invention, the latch assembly further includes: a first reset member, which is disposed on the housing and connected to the first latch, for driving the first latch to rotate so that the first latch switches from the unlocked position to the locked position.

[0018] In some embodiments of the present invention, the second unlocking mechanism includes: a third connecting block disposed on the housing; an unlocking rod movably passing through the third connecting block along the length direction of the unlocking rod; a locking assembly disposed on one side of the third connecting block along the length direction of the unlocking rod; and the unlocking rod being used to abut against the locking assembly to drive the locking assembly to unlock.

[0019] In some embodiments of the present invention, the second unlocking mechanism further includes a second reset member, which is disposed within the third connecting block and connected to the unlocking rod, for driving the unlocking rod to move in a direction away from the latch assembly.

[0020] In some embodiments of the present invention, the second unlocking mechanism further includes: a limiting member, the limiting member being sleeved outside the unlocking rod and connected to the unlocking rod, the limiting member being disposed on the side of the third connecting block facing the locking assembly and adapted to abut against the third connecting block.

[0021] In some embodiments of the present invention, the vacuum transfer device further includes a sample tray, which is disposed in the sealed cavity and connected to the box body for holding samples.

[0022] An in-situ atmosphere reaction observation system according to an embodiment of the present invention includes: a reaction device having a reaction chamber; a microscope having a sample chamber; and the aforementioned vacuum transfer device for sealingly transferring the sample from the reaction chamber of the reaction device to the sample chamber of the microscope.

[0023] According to an embodiment of the present invention, the in-situ atmosphere reaction observation system, by setting up the aforementioned vacuum transfer device, defines a sealed cavity between the housing and the lid for placing the sample; a sealing assembly is provided on the housing and / or the lid for controlling the release or sealing of the sealed cavity, realizing the sealed transfer of the sample carried by the vacuum transfer device from the reaction chamber of the reaction device to the sample chamber of the microscope. On the one hand, this avoids prolonged contact of the reaction gas with the internal environment of the microscope, reducing damage to the microscope and extending its service life. On the other hand, during the transfer of the sample from the reaction chamber to the sample chamber, air contact with the sample can be avoided, thus preventing sample distortion and improving the accuracy of the measurement data.

[0024] In some embodiments of the present invention, the in-situ atmosphere reaction observation system further includes: a displacement stage, which is movably disposed in the sample chamber and detachably connected to the housing.

[0025] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0026] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a perspective view of a vacuum transfer device according to an embodiment of the present invention, wherein the view shows the box being open; Figure 2 yes Figure 1 Enlarged view of point A in the middle; Figure 3 This is a perspective view of a vacuum transfer device according to an embodiment of the present invention, wherein the view shows the closed state of the housing; Figure 4 This is another perspective view of the vacuum transfer device according to an embodiment of the present invention, wherein the view shows the closed state of the housing; Figure 5 This is a cross-sectional view of the second unlocking mechanism of the vacuum transfer device according to an embodiment of the present invention; Figure 6 This is a cross-sectional view of an in-situ atmosphere reaction observation system according to an embodiment of the present invention.

[0027] Figure label: 100. In-situ atmosphere reaction observation system; 10. Vacuum transfer device; 1. Box body; 11. Sealed cavity; 12. Limiting rod; 13. Sealing ring; 2. Box lid; 21. Sealing hole; 3. Sealing assembly; 31. Sealing part; 32. Main body; 321. Exhaust groove; 322. First limiting part; 323. Second limiting part; 324. Communication port; 4. First unlocking mechanism; 41. Driving component; 42. Transmission assembly; 421. First connecting block; 422. Second connecting block; 423. Slide rod; 5. Locking assembly; 51. First lock; 52. Second lock; 53. First reset component; 6. Second unlocking mechanism; 61. Third connecting block; 62. Unlocking rod; 63. Second reset component; 64. Limiting component; 7. Sample tray; 8. Fourth connecting block; 20. Microscope; 201. Sample chamber; 202. Displacement stage; Detailed Implementation Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more. In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] The following is for reference. Figures 1-6 A vacuum transfer apparatus 10 according to an embodiment of the present invention is described.

[0030] like Figures 1-6 As shown, the vacuum transfer device 10 according to an embodiment of the present invention includes: a housing 1, a housing cover 2, and a sealing assembly 3.

[0031] Specifically, refer to Figures 1-4 A sealed cavity 11 is defined between the box body 1 and the box cover 2 for placing samples; a sealing component 3 is provided on the box body 1 and / or the box cover 2 (for example, in this invention, the sealing component 3 is provided on the box cover 2, but this invention is not limited to this, the sealing component 3 can also be provided on the box body 1) for controlling the release or sealing of the sealed cavity 11.

[0032] Understandably, the in-situ atmosphere reaction observation system 100 includes a reaction device and a microscope 20. The reaction device has a reaction chamber, and the microscope 20 has a sample chamber 201. The sample is first placed in the sample chamber 201 of the microscope 20 for observation. Then, the sample is placed in the sealed chamber 11, and the vacuum transfer device 10 is placed in the reaction chamber. The box 1 is opened, and the sample is exposed to the gas in the reaction chamber. After the reaction, the box 1 is closed, and the vacuum transfer device 10, which is filled with reaction gas, carries the sample to the sample chamber 201. The sample chamber 201 is evacuated, and the sealed chamber 11 is vented. Finally, the box 1 is opened in a vacuum environment to observe the state of the sample after the reaction.

[0033] Therefore, by using the vacuum transfer device 10 to carry the sample from the reaction chamber of the reaction device to the sample chamber 201 of the microscope 20 in a sealed manner, on the one hand, the reaction gas can be prevented from contacting the internal environment of the microscope 20 for a long time, reducing damage to the microscope 20 and extending its service life. On the other hand, during the transfer of the sample from the reaction chamber to the sample chamber 201, air contact with the sample can be avoided, which would cause sample distortion, thereby improving the accuracy of the measurement data.

[0034] Meanwhile, due to the setting of the sealing component 3, when the sample chamber 201 is evacuated, the sealed chamber 11 can be vented, thereby avoiding the occurrence of high pressure explosion when the box body 1 is opened, and improving safety.

[0035] Furthermore, such as Figure 1 As shown, a sealing ring 13 is provided between the box body 1 and the box cover 2 (wherein, the sealing ring 13 is provided at the box body 1 and / or the box cover 2), thereby further improving the sealing reliability of the sample during the transfer process, avoiding the sample from being distorted by air, and ensuring the accuracy of the measurement.

[0036] Furthermore, such as Figure 1As shown, the housing 1 and / or the lid 2 also have a fourth connecting block 8, which is connected to the housing 1 and / or the lid 2. The fourth connecting block 8 is adapted to be detachably connected to the quick sample changing mechanism of the microscope 20, thereby realizing the transfer of the sample carried by the vacuum transfer device 10 between the reaction chamber of the reaction device and the sample chamber 201 of the microscope 20. Of course, the transfer of the sample carried by the vacuum transfer device 10 between the reaction chamber of the reaction device and the sample chamber 201 of the microscope 20 can also be achieved directly by hand.

[0037] According to an embodiment of the present invention, the vacuum transfer device 10 defines a sealed cavity 11 between the housing 1 and the lid 2 for placing a sample. A sealing assembly 3 is disposed on the housing 1 and / or the lid 2 to control the venting or sealing of the sealed cavity 11. This achieves a sealed transfer of the sample from the reaction chamber of the reaction device to the sample chamber 201 of the microscope 20 using the vacuum transfer device 10. On the one hand, this avoids prolonged contact of the reaction gas with the internal environment of the microscope 20, reducing damage to the microscope 20 and extending its service life. On the other hand, it prevents air from contacting the sample during the transfer process from the reaction chamber to the sample chamber 201, thus avoiding sample distortion and improving the accuracy of the measurement data.

[0038] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the box body 1 and / or the box cover 2 have a sealing hole 21 (for example, in this invention, the sealing hole 21 is provided on the box cover 2, but this invention is not limited to this, the sealing hole 21 can also be provided on the box body 1). The sealing assembly 3 includes: a sealing part 31 and a main body part 32. The sealing part 31 is provided in the sealing hole 21 and is connected to the hole wall of the sealing hole 21. The main body part 32 is movably inserted through the sealing part 31 along the axial direction of the sealing hole 21. The outer peripheral wall of the main body part 32 has an exhaust groove 321. The exhaust groove 321 is open on the side facing the sealing cavity 11 along the axial direction of the sealing hole 21.

[0039] It is understood that the side of the exhaust groove 321 facing away from the sealing cavity 11 along the axial direction of the sealing hole 21 is spaced apart from the side of the main body 32 facing away from the sealing cavity 11. When the vacuum transfer device 10 is placed in the sample cavity 201 and evacuates the sample cavity 201, the gas pressure in the sealing cavity 11 is greater than the gas pressure in the sample cavity 201, thereby driving the main body 32 to move in the direction away from the sealing cavity 11. When the main body 32 moves to the point where at least a part of the exhaust groove 321 is located on the side of the sealing part 31 facing away from the sealing cavity 11, the gas in the sealing cavity 11 can be discharged through the exhaust groove 321, thereby achieving evacuation.

[0040] When it is necessary to seal the vacuum transfer device 10, press the end of the main body 32 away from the sealing cavity 11, and drive the main body 32 to move toward the sealing cavity 11. When the main body 32 moves to the point where the exhaust groove 321 is completely located on the side of the sealing part 31 facing the sealing cavity 11, the sealing cavity 11 is sealed.

[0041] With the above-mentioned setup, the gas inside the sealed cavity 11 can be automatically discharged during vacuuming without the need for an additional power unit, which simplifies the structure and the testing process.

[0042] Furthermore, such as Figure 1 and Figure 2 As shown, the exhaust grooves 321 are multiple ones spaced apart along the circumferential direction of the main body 32, for example in Figure 2 In the example shown, there are two exhaust slots 321, but the present invention is not limited to this. There can be more exhaust slots 321, such as 3, 4, 5 or 6.

[0043] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the outer peripheral wall of the main body 32 has a first limiting part 322, which abuts against the inner wall of the sealing cavity 11. This prevents the main body 32 from moving away from the sealing cavity 11 and detaching from the box body 1 and / or the box cover 2. The first limiting part 322 coincides with the axis of the sealing hole 21, and the diameter of the first limiting part 322 is larger than the diameter of the sealing hole 21.

[0044] Furthermore, such as Figure 2 As shown, the first limiting part 322 has a connecting port 324 that communicates with the exhaust groove 321, thereby allowing gas to be smoothly discharged through the exhaust groove 321. The connecting port 324 corresponds one-to-one with the multiple exhaust grooves 321.

[0045] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the outer peripheral wall of the main body 32 has a second limiting part 323, which is used to abut against the outer wall surface of the box body 1 and / or the outer wall surface of the box cover 2. This prevents the main body 32 from moving completely into the sealing cavity 11 in the direction toward the sealing cavity 11. The second limiting part 323 coincides with the axis of the sealing hole 21, and the diameter of the second limiting part 323 is larger than the diameter of the sealing hole 21. The second limiting part 323 is connected to the main body 32 by fasteners such as screws.

[0046] In some embodiments of the present invention, such as Figures 1-4As shown, one end of the box body 1 along its length or width is rotatably connected to one end of the lid 2 along its length or width. This allows the box body 1 and lid 2 to be connected together, preventing them from separating when opened. In this invention, the end of the box body 1 along its length or width and the end of the lid 2 along its length or width are rotatably connected by a pin. However, the invention is not limited to this; the box body 1 and lid 2 can also be rotatably connected by a hinge, disc spring, or other structure.

[0047] In some embodiments of the present invention, such as Figure 1 and Figure 3 As shown, the vacuum transfer device 10 further includes a first unlocking mechanism 4, which is disposed on and connected to the box body 1, and is used to drive the box cover 2 to rotate to open the box body 1. Thus, the box body 1 can be opened.

[0048] For example in Figure 3 In the example shown, when the lid 2 is rotated clockwise, the box body 1 can be opened, and when the lid 2 is rotated counterclockwise, the box body 1 can be closed.

[0049] In some embodiments of the present invention, such as Figure 1 and Figure 3 As shown, the first unlocking mechanism 4 includes a driving component 41 and a transmission assembly 42. The driving component 41 is mounted on the box body 1; the transmission assembly 42 is mounted on the box body 1 and is connected to the driving component 41 and the box cover 2. The driving component 41 drives the box cover 2 to rotate through the transmission assembly 42 to open the box body 1. Thus, the box cover 2 is opened.

[0050] In some embodiments of the present invention, such as Figure 1 and Figure 3 As shown, the driving component 41 is an elastic component, and the transmission assembly 42 includes: a first connecting block 421, a second connecting block 422, and a slide rod 423. The first connecting block 421 is rotatably connected to the box body 1; the second connecting block 422 is rotatably connected to the box cover 2; one end of the slide rod 423 is connected to the first connecting block 421, and the other end is movably inserted through the second connecting block 422. The driving component 41 is connected to the first connecting block 421 and is used to drive the first connecting block 421 to rotate so that the box cover 2 rotates to open the box body 1.

[0051] Understandably, the driving component 41 drives the first connecting block 421 to rotate, thereby driving the slide rod 423 to rotate, and causing the second connecting block 422 to move away from the first connecting block 421 while rotating, thus driving the lid 2 to open the box body 1. When the lid 2 closes the box body 1, the driving component 41 is in a stretched state, exhibiting a tendency to contract, thus automatically driving the first connecting block 421 to rotate without the need for additional power devices. This avoids electromagnetic fields generated by electric or pneumatic sources that could disrupt sample measurement, improving measurement accuracy and precision, and increasing the success rate of experiments.

[0052] For example in Figure 3 In the example shown, the lid 2 closes the box body 1, the drive member 41 has a tendency to retract, thereby driving the first connecting block 421 to rotate clockwise, thereby driving the slide bar 423 to rotate clockwise, thereby driving the second connecting block 422 to rotate clockwise, while moving away from the first connecting block 421, thereby driving the lid 2 to rotate clockwise and open the box body 1.

[0053] Furthermore, such as Figure 1 and Figure 3 As shown, the box body 1 and / or the box cover 2 have a limiting rod 12 (which can be a ball screw). Along the axial direction of the drive member 41, the first connecting block 421 is disposed between the limiting rod 12 and the drive member 41. The limiting rod 12 is adapted to stop against the slide rod 423. The limiting rod 12 is used to limit and buffer the box cover 2 after it rotates a certain angle, thereby preventing the box cover 2 from rotating too large an angle. At the same time, it can also prevent the box cover 2 from shaking when adjusting its position in the sample cavity 201.

[0054] In some embodiments of the present invention, such as Figure 1 and Figure 4 As shown, the vacuum transfer device 10 also includes a locking assembly 5, with one part of the locking assembly 5 disposed on the box body 1 and the other part disposed on the box cover 2, for locking when the box cover 2 closes the box body 1. Thus, the locking assembly 5 achieves locking when the box cover 2 closes the box body 1, improving the sealing performance of the sealing cavity 11.

[0055] In some embodiments of the present invention, such as Figure 1 , Figure 4 and Figure 5 As shown, the vacuum transfer device 10 further includes a second unlocking mechanism 6, which is located on the box body 1 and is used to drive the locking assembly 5 to unlock. This allows the lid 2 to open the box body 1. Furthermore, through cooperation with the first unlocking mechanism 4, the lid 2 can automatically open the box body 1.

[0056] In some embodiments of the present invention, such as Figure 1 and Figure 4As shown, the locking assembly 5 includes a first locking buckle 51 and a second locking buckle 52. The second locking buckle 52 is fixed to the lid 2, and the first locking buckle 51 is rotatably disposed on the box body 1. The first locking buckle 51 has a locked position and an unlocked position. The second unlocking mechanism 6 is used to drive the first locking buckle 51 to rotate so that the first locking buckle 51 switches from the locked position to the unlocked position. In the locked position, the first locking buckle 51 and the second locking buckle 52 are engaged, and in the unlocked position, the first locking buckle 51 and the second locking buckle 52 are separated.

[0057] It is understood that the first latch 51, the second latch 52, and the second unlocking mechanism 6 are located on the same side of the box body 1, which facilitates the locking of the first latch 51 and the second latch 52, and also facilitates the second unlocking mechanism 6 to drive the first latch 51 to rotate. The first latch 51 has a pushing part, which is located on one side of the second unlocking mechanism 6 and is adapted to cooperate with the second unlocking mechanism 6. The second unlocking mechanism 6 drives the first latch 51 to rotate through the pushing part, thereby driving the first latch 51 and the second latch 52 to separate, achieving unlocking, and allowing the box lid 2 to open the box body 1.

[0058] For example in Figure 4 In the example shown, the second unlocking mechanism 6 drives the first latch 51 to rotate counterclockwise by the pushing part, thereby separating the first latch 51 and the second latch 52 and unlocking the device.

[0059] In some embodiments of the present invention, such as Figure 1 and Figure 4 As shown, the locking assembly 5 further includes a first reset member 53, which is disposed on the housing 1 and connected to the first latch 51. The first reset member 53 drives the first latch 51 to rotate, thereby switching the first latch 51 from the unlocked position to the locked position. The first reset member 53 can be an elastic element, thus eliminating the need for an additional power source. This avoids electromagnetic fields generated by electric or pneumatic sources from interfering with sample measurement, improving measurement accuracy and precision, and increasing the success rate of experiments.

[0060] The setting of the first reset component 53 realizes the reset of the first latch 51, thereby achieving automatic locking of the first latch 51 and the second latch 52, eliminating the need for manual locking and simplifying the locking process. For example, in Figure 4 In the example shown, the first reset member 53 drives the first latch 51 to rotate clockwise, thereby enabling the first latch 51 and the second latch 52 to engage and lock.

[0061] In some embodiments of the present invention, such as Figure 1 , Figure 4 and Figure 5As shown, the second unlocking mechanism 6 includes a third connecting block 61 and an unlocking rod 62. The third connecting block 61 is disposed on the housing 1. The unlocking rod 62 is movably inserted through the third connecting block 61 along the length direction of the unlocking rod 62. The locking assembly 5 is disposed on one side of the third connecting block 61 along the length direction of the unlocking rod 62. The unlocking rod 62 is used to abut against the locking assembly 5 to drive the locking assembly 5 to unlock.

[0062] Understandably, the third connecting block 61 allows the unlocking lever 62 to be stably mounted on the housing 1. Both ends of the unlocking lever 62 protrude from the third connecting block 61 along its length. The end of the unlocking lever 62 facing the locking assembly 5 is adapted to abut against the locking assembly 5 to drive the locking assembly 5 to unlock, while the end of the unlocking lever 62 away from the locking assembly 5 is adapted to input power.

[0063] The end of the unlocking lever 62 that is away from the locking assembly 5 can be operated by hand using a vacuum glove, or by applying force through a stop against the inner wall of the sample chamber 201. The stop between the unlocking lever 62 and the inner wall of the sample chamber 201 can be achieved by adjusting the position of the housing 1 using a sample position adjustment mechanism within the sample chamber 201, such as a displacement stage 202. This eliminates the need for additional electrical devices, thus avoiding electromagnetic fields generated by electric or pneumatic sources that could disrupt sample measurements, improving measurement accuracy and precision, and increasing the success rate of experiments.

[0064] Furthermore, such as Figure 1 and Figure 4 As shown, the latch assembly 5 includes a first latch 51 and a second latch 52, wherein the unlocking lever 62 is used to stop against the first latch 51 to drive the first latch 51 to rotate, thereby driving the first latch 51 and the second latch 52 to separate and unlock.

[0065] In some embodiments of the present invention, such as Figure 1 , Figure 4 and Figure 5 As shown, the second unlocking mechanism 6 further includes a second reset member 63, which is disposed within the third connecting block 61 and connected to the unlocking rod 62, for driving the unlocking rod 62 to move in a direction away from the locking assembly 5. The second reset member 63 can be an elastic element, thus eliminating the need for an additional power source, thereby avoiding electromagnetic fields generated by electric or pneumatic sources that could disrupt sample measurement, improving measurement accuracy and precision, and increasing the success rate of experiments.

[0066] Understandably, the second reset component 63 drives the unlocking lever 62 to move away from the latch assembly 5, thereby enabling the latch assembly 5 to return to the locked state.

[0067] In some embodiments of the present invention, such as Figure 1 , Figure 4 and Figure 5As shown, the second unlocking mechanism 6 further includes a limiting member 64, which is sleeved on and connected to the unlocking rod 62. The limiting member 64 is located on the side of the third connecting block 61 facing the locking assembly 5 and is adapted to abut against the third connecting block 61. The limiting member 64 can be a snap ring or similar structure.

[0068] Understandably, by setting the limiting member 64, when the limiting member 64 stops against the third connecting block 61, the unlocking rod 62 can be restricted from continuing to move toward the side away from the locking assembly 5, thereby preventing the unlocking rod 62 from disengaging from the third connecting block 61 and ensuring the reliability of the unlocking rod 62's installation on the box 1.

[0069] In some embodiments of the present invention, such as Figure 1 As shown, the vacuum transfer device 10 further includes a sample tray 7, which is disposed in the sealed cavity 11 and connected to the housing 1, for holding samples. The sample tray 7 is detachably connected to the sample, thereby achieving sample fixation and installation.

[0070] The following is for reference. Figure 6 An in-situ atmosphere reaction observation system 100 according to an embodiment of the present invention is described.

[0071] like Figure 6 As shown, the in-situ atmosphere reaction observation system 100 according to an embodiment of the present invention includes: a microscope 20, a reaction device and the aforementioned vacuum transfer device 10. The reaction device has a reaction chamber; the microscope 20 has a sample chamber 201; and the vacuum transfer device 10 is used for the sealed transfer of a sample from the reaction chamber of the reaction device to the sample chamber 201 of the microscope 20.

[0072] Understandably, the in-situ atmosphere reaction observation system 100 includes a reaction device and a microscope 20. The reaction device has a reaction chamber, and the microscope 20 has a sample chamber 201. The sample is first placed in the sample chamber 201 of the microscope 20 for observation. Then, the sample is placed in the sealed chamber 11, and the vacuum transfer device 10 is placed in the reaction chamber. The box 1 is opened, and the sample is exposed to the gas in the reaction chamber. After the reaction, the box 1 is closed, and the vacuum transfer device 10, which is filled with reaction gas, carries the sample to the sample chamber 201. The sample chamber 201 is evacuated, and the sealed chamber 11 is vented. Finally, the box 1 is opened in a vacuum environment to observe the state of the sample after the reaction.

[0073] Therefore, by using the vacuum transfer device 10 to carry the sample from the reaction chamber of the reaction device to the sample chamber 201 of the microscope 20 in a sealed manner, on the one hand, the reaction gas can be prevented from contacting the internal environment of the microscope 20 for a long time, reducing damage to the microscope 20 and extending its service life. On the other hand, during the transfer of the sample from the reaction chamber to the sample chamber 201, air contact with the sample can be avoided, which would cause sample distortion, thereby improving the accuracy of the measurement data.

[0074] According to an embodiment of the present invention, the in-situ atmosphere reaction observation system 100, by setting the aforementioned vacuum transfer device 10, defines a sealed cavity 11 between the housing 1 and the lid 2 for placing samples; a sealing assembly 3 is disposed on the housing 1 and / or the lid 2 for controlling the release or sealing of the sealed cavity 11, thereby realizing the sealed transfer of the sample carried by the vacuum transfer device 10 from the reaction chamber of the reaction device to the sample cavity 201 of the microscope 20. On the one hand, this avoids prolonged contact of the reaction gas with the internal environment of the microscope 20, reducing damage to the microscope 20 and improving its service life. On the other hand, during the transfer of the sample from the reaction chamber to the sample cavity 201, air contact with the sample can be avoided, thus preventing sample distortion and improving the accuracy of the measurement data.

[0075] In some embodiments of the present invention, such as Figure 6 As shown, the in-situ atmosphere reaction observation system 100 also includes a displacement stage 202, which is movably disposed in the sample chamber 201 and detachably connected to the housing 1. It can be understood that after the displacement stage 202 is connected to the housing 1, it can move the housing 1 within the sample chamber 201, thereby adjusting it to a suitable observation position, facilitating the alignment of the microscope 20 lens with the sample.

[0076] Furthermore, such as Figure 1 , Figure 4 and Figure 5 As shown, the vacuum transfer device 10 includes a second unlocking mechanism 6, which comprises a third connecting block 61 and an unlocking rod 62. The end of the unlocking rod 62 facing away from the locking assembly 5 can be operated by hand using a vacuum glove, or by applying force through contact with the inner wall of the sample chamber 201. The contact between the unlocking rod 62 and the inner wall of the sample chamber 201 can be achieved by adjusting the position of the housing 1 using the displacement stage 202. This eliminates the need for additional electrical devices, thus avoiding electromagnetic fields generated by electric or pneumatic sources that could disrupt sample measurement, improving measurement accuracy and precision, and increasing the success rate of experiments.

[0077] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0078] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A vacuum transfer device, characterized in that, include: A box body and a box lid, wherein a sealed cavity is defined between the box body and the box lid for placing samples; A sealing assembly, disposed on the box body and / or the box cover, is used to control the venting or sealing of the sealing cavity. The sealing assembly includes a sealing part and a main body. The sealing part is disposed in the sealing hole and connected to the hole wall of the sealing hole. The main body is movably inserted through the sealing part along the axial direction of the sealing hole. The outer peripheral wall of the main body has an exhaust groove, which is open to the side of the sealing cavity along the axial direction of the sealing hole. A sample tray, which is located in the sealed cavity and connected to the box body, is used to hold samples.

2. The vacuum transfer device according to claim 1, characterized in that, The outer peripheral wall of the main body has a first limiting part, which is used to stop against the inner wall of the sealing cavity, and the first limiting part has a communication port that communicates with the exhaust groove. And / or, the outer peripheral wall of the main body has a second limiting part, which is used to stop against the outer wall surface of the box body and / or the outer wall surface of the box lid.

3. The vacuum transfer device according to claim 1, characterized in that, One end of the box body along its length or width direction is rotatably connected to one end of the box lid along its length or width direction. The vacuum transfer device further includes: a first unlocking mechanism, which is disposed on and connected to the box body, and is used to drive the box lid to rotate to open the box body. The first unlocking mechanism includes: A driving component, wherein the driving component is disposed on the housing; A transmission assembly is disposed on the box body, and the transmission assembly is connected to the drive member and the box cover. The drive member drives the box cover to rotate through the transmission assembly to open the box body.

4. The vacuum transfer device according to claim 3, characterized in that, The driving component is an elastic component, and the transmission assembly includes: A first connecting block is rotatably connected to the box body; The second connecting block is rotatably connected to the box cover; A sliding rod, one end of which is connected to the first connecting block, and the other end which is movably inserted through the second connecting block. The driving component is connected to the first connecting block and is used to drive the first connecting block to rotate so that the lid rotates to open the box.

5. The vacuum transfer device according to claim 1, characterized in that, Also includes: A locking assembly, wherein a portion of the locking assembly is disposed on the box body and another portion is disposed on the box lid, for locking when the box lid is closed to the box body; A second unlocking mechanism is located in the housing and is used to drive the latch assembly to unlock.

6. The vacuum transfer device according to claim 5, characterized in that, The locking assembly includes a first latch and a second latch, wherein the second latch is fixed to the lid, and the first latch is rotatably mounted on the box body. The first latch has a locked position and an unlocked position. The second unlocking mechanism is used to drive the first latch to rotate so that the first latch switches from the locked position to the unlocked position. In the locked position, the first latch and the second latch are engaged. In the unlocked position, the first latch and the second latch are disengaged.

7. The vacuum transfer device according to claim 6, characterized in that, The locking assembly also includes: A first reset element is disposed on the housing and connected to the first latch, and is used to drive the first latch to rotate so that the first latch switches from the unlocked position to the locked position.

8. The vacuum transfer device according to claim 5, characterized in that, The second unlocking mechanism includes: The third connecting block is disposed on the box body; An unlocking rod is movably inserted through the third connecting block along its length. The locking assembly is located on one side of the third connecting block along the length of the unlocking rod. The unlocking rod is used to abut against the locking assembly to drive the locking assembly to unlock.

9. The vacuum transfer device according to claim 8, characterized in that, The second unlocking mechanism also includes: The second reset component is disposed within the third connecting block and connected to the unlocking rod, and is used to drive the unlocking rod to move in a direction away from the latch assembly; A limiting member is sleeved outside the unlocking rod and connected to the unlocking rod. The limiting member is located on the side of the third connecting block facing the locking assembly and is adapted to abut against the third connecting block.

10. An in-situ atmosphere reaction observation system, characterized in that, include: A reaction apparatus, wherein the reaction apparatus has a reaction chamber; A microscope having a sample chamber; The vacuum transfer apparatus according to any one of claims 1-9 is used for the sealed transfer of the sample from the reaction chamber of the reaction apparatus to the sample chamber of the microscope; A displacement stage is movably disposed in the sample chamber and detachably connected to the housing.

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