System, method, and computer program product

Abstract

A system, method, and computer program product are provided. The system includes: a plurality of storage units each storing a data file; a plurality of acquisition units, each of which is detachably connected to any one of the plurality of storage units, and which acquires a data file from the storage unit; and a plurality of processing units provided in association with each of the plurality of acquisition units and performing data processing on the data file acquired by the corresponding acquisition unit, each of the plurality of acquisition units changing the allocation of each of the storage units to each of the processing units in accordance with the connection form between the plurality of storage units and the plurality of acquisition units.

Description

Technical Field

[0001] This invention relates to a system, method, and computer program product. Background Technology

[0002] Patent Document 1 describes an image sensor tester that “takes in the image signal output from the terminal that is in contact with the image sensor to be tested…and performs image processing…to determine whether it is good or bad” (Technical Solution 1 of Patent Document 1).

[0003] [Existing Technical Documents]

[0004] [Patent Literature]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 4-3686 Summary of the Invention

[0006] In a first aspect of the present invention, a system is provided, comprising: a plurality of storage units for storing data files; a plurality of acquisition units for detachably connecting to any one of the plurality of storage units and acquiring data files from the storage units; and a plurality of processing units for processing the data files acquired by the corresponding acquisition units, wherein each of the plurality of acquisition units changes the allocation of each storage unit to each processing unit according to the connection configuration between the plurality of storage units and the plurality of acquisition units.

[0007] The system may further include: a readout unit disposed in each of the plurality of storage units and having a plurality of output ports, for reading data files from the corresponding storage units and outputting them from the plurality of output ports; and an ingestion unit disposed in each of the plurality of acquisition units and having a plurality of input ports, for ingesting at least a portion of the data file output from any one of the output ports via the plurality of input ports, wherein each readout unit determines an input port that is linked to each of the plurality of output ports in the readout unit, and each ingestion unit determines an output port that is linked to each of the plurality of input ports in the ingestion unit.

[0008] In the system, each input port may be an input / output port capable of inputting / outputting data, and each input unit may define an output port and an input / output port that are linked to each of the plurality of input / output ports in the input unit.

[0009] In the system, if each readout unit is connected to any one of the input / output ports of another input unit for any one of the input ports of one input unit, and a portion of the output ports of the readout unit are connected to the input ports of one input unit and another portion of the output ports are connected to the input ports of the other input unit, then, based on user operation settings, individual data segments extracted from a single data file will be output from the portion of the output ports and the other portion of the output ports.

[0010] In any of the systems in which the readout unit has multiple output ports, each readout unit may output a common data file from the multiple output ports when the multiple output ports of the readout unit are connected to the input ports of the multiple acquisition units that are different from each other.

[0011] In any of the systems in which the readout unit has multiple output ports, each readout unit may output individual data segments extracted from a single data file from the multiple output ports, provided that the multiple output ports of the readout unit are linked to the input port of a common acquisition unit among the multiple acquisition units.

[0012] The system may further include a plurality of first communication units, which are connected to the storage units of each reference number among the plurality of storage units. The acquisition unit has a plurality of second communication units, which receive data files from the storage units of the reference number via the first communication units among the plurality of first communication units that are detachably connected.

[0013] In the system, each first communication unit and each second communication unit may be connected through multiple communication channels (lanes).

[0014] In any of the systems, the plurality of acquisition units may acquire data files from the storage unit via optical communication.

[0015] In any of the systems, the data processing performance of at least two of the plurality of processing units may be different from each other.

[0016] In any of the systems, the data file may contain image data, and the plurality of processing units may perform image processing on the image data contained in the data file.

[0017] In the system, the plurality of storage sections may each store a data file containing image data acquired from different camera elements.

[0018] In the system, each camera element may be a test element, and the system further includes a determination unit that determines the quality of the test element based on test results derived from image processing.

[0019] In a second aspect of the invention, a method is provided, comprising: an acquisition phase in which a plurality of acquisition devices acquire data files from storage devices, the plurality of acquisition devices being detachably connected to any one of a plurality of storage devices that respectively store the data files; and a processing phase in which a plurality of processing devices, each associated with any one of the plurality of acquisition devices, perform data processing on the data files acquired by the corresponding acquisition devices, wherein prior to the acquisition phase, each of the plurality of acquisition devices changes the allocation of each storage device to each processing device according to the connection configuration between the plurality of storage devices and the plurality of acquisition devices.

[0020] In a third aspect of the present invention, a computer program product is provided, which, when executed by a computer, enables the computer to function as the following units: a plurality of storage units, each storing a data file; a plurality of acquisition units, each detachably connected to any one of the plurality of storage units, for acquiring data files from the storage units; and a plurality of processing units, each associated with any one of the plurality of acquisition units, for processing the data files acquired by the corresponding acquisition unit, wherein each of the plurality of acquisition units changes the allocation of each storage unit to each processing unit according to the connection configuration between the plurality of storage units and the plurality of acquisition units.

[0021] Furthermore, the description of the invention does not list all the features required by the invention. Additionally, sub-combinations of these feature groups can also constitute an invention. Attached Figure Description

[0022] Figure 1 The structure of the test apparatus 10 and the test object 20 of the embodiment are shown together.

[0023] Figure 2 The structure of the capture module 200 and the image processing device 194 in the embodiment is shown.

[0024] Figure 3 The test procedure of the test apparatus 10 for the implementation method is shown.

[0025] Figure 4 An example showing the connection configuration between the storage unit 235 and the acquisition unit 265.

[0026] Figure 5 Another example of the connection configuration between the storage unit 235 and the acquisition unit 265.

[0027] Figure 6This is another example of the connection configuration between the storage unit 235 and the acquisition unit 265.

[0028] Figure 7 This is another example of the connection configuration between the storage unit 235 and the acquisition unit 265.

[0029] Figure 8 Examples of computer 2200 that demonstrate that various forms of the present invention can be implemented wholly or partially.

[0030] Explanation of icon numbers

[0031] 10: Test Apparatus

[0032] 20: Test subject

[0033] 100: Detection device

[0034] 102: Platform

[0035] 104: Probe Card

[0036] 106: Probe

[0037] 108: Light-shielding unit

[0038] 120: Connection Unit

[0039] 130: Performance Board

[0040] 140: High-fidelity test interface board

[0041] 150: Test head

[0042] 160, 160a, 160b, 160c, 160d: Test Modules

[0043] 170: Light source

[0044] 175: Lens tube

[0045] 180: Rotating device

[0046] 190: Mainframe

[0047] 192: System Controller

[0048] 194: Image processing device

[0049] 200: Capture Module

[0050] 210, 210-1~210-4: Capture Block

[0051] 220: Image data receiving unit

[0052] 230: Capture Unit

[0053] 231, 231-1, 231-2: Ports

[0054] 235, 235-1, 235-2, 235-3, 235-4, 235-5, 235-6, 235-7, 235-8: Storage Department

[0055] 240, 240a~240c: Memory bank

[0056] 250, 250-1, 250-2, 250-3, 250-4, 290, 290-1, 290-2, 290-3, 290-4, 290-5, 290-6, 290-7, 290-8: Signal Transmitters

[0057] 255: Module IF

[0058] 265, 265-1, 265-2, 265-3, 265-4: Acquisition Department

[0059] 270, 270-1~270-4: Image processing engine

[0060] 280, 280-1, 280-2, 280-3, 280-4: CAPIF

[0061] 281: Port

[0062] 285: Judgment Department

[0063] 2200: Computer

[0064] 2201: DVD-ROM

[0065] 2210: Host Controller

[0066] 2212: CPU

[0067] 2214: RAM

[0068] 2216: Graphics Controller

[0069] 2218: Display element

[0070] 2220: Input / Output Controller

[0071] 2222: Communication Interface

[0072] 2224: Hard Drive

[0073] 2226: DVD-ROM drive

[0074] 2230: ROM

[0075] 2240: Input / Output Chip

[0076] 2242: Keyboard

[0077] DUT: Component under test

[0078] G-1, G-2, G-3, G-4: Group

[0079] S300, S310, S320, S330, S340, S350, S360, S370: Steps Detailed Implementation

[0080] The present invention will now be described through embodiments thereof; however, these embodiments are not intended to limit the scope of the claims. Furthermore, the solutions described in the embodiments do not necessarily require all combinations of the features described herein.

[0081] Figure 1 The structure of the test apparatus 10 and the test object 20 of this embodiment are shown together. The test object 20 includes one or more components with circuits formed as the test object of the test apparatus 10, which are called the device under test (DUT). In this embodiment, the DUT is a photoelectric conversion element that detects light and converts it into an electrical signal. The DUT may be a camera element such as a complementary metal-oxide-semiconductor (CMOS) image sensor or other image sensor that converts the incident optical image into image data.

[0082] The test subject 20 can be a wafer with circuitry, integrated circuit (IC) / large-scale integrated circuit (LSI) chip circuits formed on the wafer, an IC / LSI chip monolithically formed from the wafer, or an IC / LSI package formed by packaging the IC / LSI chip, etc. In the example of this figure, the test apparatus 10 is equipped with a test subject 20 having multiple camera elements formed on it, and is used to test each camera element. The test apparatus 10 can test the camera elements one by one, or it can test two or more camera elements simultaneously.

[0083] The test apparatus 10 can be one example of a system, and in this embodiment, it is used as an example to perform an optical input test on the DUT. The test apparatus 10 can also be used to perform electrical tests on the DUT instead of this or on this basis. In this embodiment, the case of performing a shooting test on the DUT, which is an imaging element, using the test apparatus 10 will be described as an example.

[0084] The test apparatus 10 includes a detection device 100, a test head 150, a rotating device 180, and a mainframe 190. The detection device 100 has a stage 102, a probe card 104, and a connection unit 120.

[0085] The stage 102 holds the test object 20. The stage 102 may have a vacuum chuck or electrostatic chuck on its upper surface to fix the test object 20.

[0086] A probe card 104 is disposed above the stage 102. The probe card 104 includes one or more probes 106 and a light-shielding unit 108. One or more probes 106 are disposed on the stage 102 side of the probe card 104 and are connected to the electrodes of the DUT (Device Under Test) on the test object 20. On the side of the probe card 104 opposite to the stage 102, one or more connectors are included for connection to the connection unit 120. Each probe 106 is electrically connected to the performance plate 130 on the test head 150 side via the corresponding connector and the connection unit 120.

[0087] A light-shielding unit 108 is disposed on an opening provided on a probe card 104. The light-shielding unit 108 may have an opening and a light-shielding wall, wherein the opening allows test light to pass through to illuminate the DUT, and the light-shielding wall is disposed around the opening to block stray light.

[0088] A connection unit 120 is disposed above the probe card 104. The connection unit 120 has an opening for the test light to pass through. The connection unit 120 electrically connects one or more connectors of the probe card 104 to the performance board 130 of the test head 150. The probe card 104 and the connection unit 120 shown above can be replaced according to the type of test object 20 or DUT.

[0089] The test head 150 performs tests on the DUT (Device Under Test) 20, which is the test object, placed on the stage 102 of the probe device 100. The test head 150 includes a performance board 130, a high-fidelity test interface board (Hi-Fix) 140, one or more test modules 160a to 160d (also referred to as "test module 160"), a light source 170, and a lens barrel 175.

[0090] Performance board 130 and high-fidelity test interface board 140 are disposed on the side of test head 150 facing the connection unit 120. Performance board 130 and high-fidelity test interface board 140 have openings for the transmission of test light. Performance board 130 and high-fidelity test interface board 140 electrically connect the connection unit 120 to each test module 160, thereby electrically connecting the terminals of each test module 160 to the corresponding electrodes of the DUT via the connection unit 120, probe card 104, and each probe 106. Performance board 130 includes one or more connectors connected to the connection unit 120, and one or more connectors on the high-fidelity test interface board 140 side. High-fidelity test interface board 140 houses cables, etc., that connect the multiple terminals of the connectors on the high-fidelity test interface board 140 side of performance board 130 to the terminals of the corresponding test modules 160.

[0091] One or more test modules 160 are inserted into slots within the test head 150 and are detachably connected to the backplane (upper side) of the test head 150. Test modules 160 may also be referred to as "pinelectronics cards" or "tester boards," etc. Each test module 160 is electrically connected to the device under test (DUT) 20 via a high-fidelity test interface board 140 and performance board 130 mounted on the test head 150, and a connection unit 120 and probe card 104 mounted on the probe device 100. One or more test modules 160 input / output signals between themselves and the DUT, and check the signals input from the DUT, thereby testing the DUT.

[0092] At least one test module 160 transmits and receives signals between itself and the DUT, which serves as an imaging element, via an electrical signal line to set up the DUT and capture test light. At least one test module 160 acquires output data from the DUT and supplies its data file to the image processing device 194 within the mainframe 190. Additionally, at least one test module 160 can function as a power supply to the DUT. The data output from the DUT may include image data (for example, image data for each color such as RGB), and may also include metadata such as focus information. The size of the image data may vary depending on the type of DUT (for example, the number of pixels). Regarding the number of pixels of the DUT, it may be 32 megapixels, 48 ​​megapixels, 100 megapixels, 200 megapixels, etc., or a different number of pixels.

[0093] The light source 170 is disposed on the side of the test head 150 opposite to the side of the performance plate 130 and the high-fidelity test interface plate 140. The light source 170 emits test light to illuminate the DUT. The light source 170 can illuminate each DUT with test light of multiple emission patterns corresponding to multiple test items. Furthermore, the light of one emission pattern can be light that illuminates for a duration sufficient to capture an image through the DUT. The light of one emission pattern can correspond to one or more test items and can illuminate the DUT while performing the tests for the one or more test items. The light of multiple emission patterns can be light that illuminates for a duration sufficient to capture multiple images through the DUT. The light of multiple emission patterns can differ in intensity or wavelength depending on at least one of the illumination position and illumination time. The light of multiple emission patterns can correspond to one or more test items and can illuminate the DUT while performing the tests for the one or more test items.

[0094] The lens tube 175 is positioned within the range from the light source 170 to the performance plate 130, and guides the test light from the light source 170 to the opening of the performance plate 130.

[0095] The rotating device 180 holds the test head 150 in a manner that allows it to rotate around the rotation axis as a center. When testing the DUT, as shown in this figure, the rotating device 180 rotates and moves the test head 150 to the test position where the performance board 130 of the test head 150 is electrically connected to the connection unit 120 of the probe device 100. Furthermore, when installing or replacing the performance board 130 and the high-fidelity test interface board 140, or inserting or removing the test module 160, the rotating device 180 rotates and moves the test head 150 to a maintenance position where the surface of the test head 150 housing the performance board 130 and the high-fidelity test interface board 140 is on top.

[0096] The mainframe 190 is connected to the probe 100 and the test head 150. The mainframe 190 includes a system controller 192 and an image processing unit 194. The system controller 192 is connected to the probe 100, the test head 150, and the image processing unit 194, and controls the testing of the DUT. In response to receiving a signal from the probe 100 indicating that the DUT 20 has been brought into contact with one or more probes 106, the system controller 192 controls various parts of the test head 150, including one or more test modules 160, to perform the DUT test.

[0097] The system controller 192 can be a personal computer (PC), workstation, server computer, general-purpose computer, or other computer, or a computer system composed of multiple connected computers. This computer system is also a computer in a broad sense. Alternatively, the system controller 192 can be constructed within a computer using one or more executable virtual computer environments. Alternatively, the system controller 192 can also be a dedicated computer designed for experimental control, or dedicated hardware implemented using dedicated circuitry.

[0098] The image processing device 194 is connected to the system controller 192 and the test head 150. The image processing device 194 receives a data file containing image data from the test module 160 within the test head 150. The image data contained in the data file can be image data of an image captured by the DUT under test light, or image data of an image captured by the DUT in a state without light. The image processing device 194 processes the data file to determine the quality of the DUT. In this embodiment, as an example, the image processing device 194 can process the image data in the data file to determine whether the captured image meets the image quality standards of the imaging element of the DUT.

[0099] Furthermore, the image processing device 194 can be connected to one test head 150 as shown in this figure, or it can be connected to multiple test heads 150. When the image processing device 194 is connected to multiple test heads 150, the image processing device 194 receives image data from each DUT (Device Under Test) as the test subject from the multiple test heads 150 and checks the image data.

[0100] The image processing apparatus 194 can be a PC (personal computer), workstation, server computer, general-purpose computer, or other computer, or a computer system composed of multiple interconnected computers. Such a computer system is also a computer in a broad sense. Alternatively, the image processing apparatus 194 can be constructed within a computer using one or more executable virtual computer environments. Alternatively, the image processing apparatus 194 can be a dedicated computer designed for image processing, or dedicated hardware implemented using dedicated circuitry.

[0101] Figure 2 This illustrates the structure of the capture module 200 and the image processing apparatus 194 in this embodiment. The capture module 200 is configured as... Figure 1 The test module 160 (e.g., test module 160c) among the multiple test modules 160 shown functions to acquire output data from the DUT. The test head 150 may be equipped with one or more capture modules 200.

[0102] The capture module 200 includes one or more capture blocks 210 (referred to as "capture blocks 210-1 to 210-4" in this example), one or more signal transmitters 250 (referred to as "signal transmitters 250-1 to 250-2" in this example), and a module interface (IF) 255. In this figure, a capture module 200 includes four capture blocks 210-1 to 210-4 and two signal transmitters 250-1 to 250-2, but the number of these can vary depending on the capture module 200.

[0103] Each capture block 210 is provided corresponding to one or more DUTs (Distributed Under Tests) used as test subjects. The capture block 210 is electrically connected to the DUT used as test subjects and acquires output data from the DUT. The capture block 210 includes an image data receiving unit 220, a capture unit 230, and a storage unit 235.

[0104] The image data receiving unit 220 is electrically connected to the DUT (Distributed Under Test) as the test subject. The image data receiving unit 220 receives output data from the DUT. The image data receiving unit 220 can receive output data containing image data captured by the DUT. The image data receiving unit 220 has an image input interface suitable for the image output interface installed in the DUT as the test subject. The image data receiving unit 220 can be a PHY chip or PHY board conforming to physical layer (PHY) standards such as Mobile Industry Processor Interface (MIPI, registered trademark). In this case, the image data receiving unit 220 can receive image data from the DUT having an interface conforming to such a PHY standard.

[0105] The capture unit 230 is connected to the image data receiving unit 220 and the storage unit 235. The capture unit 230 receives output data from the DUT from the image data receiving unit 220 and temporarily stores it in the storage unit 235 as a data file. The capture unit 230 can obtain identification information of the emission pattern during image data capture from the system controller 192, include the identification information of the test item corresponding to the emission pattern in the data file, and store it in the storage unit 235. The capture unit 230 can sequentially receive multiple output data containing multiple captured images of the DUT under the same or different test light, and store them in the storage unit 235.

[0106] The capture unit 230 can be an example of a readout unit, and can be provided in each of the multiple storage units 235 to read data files from the corresponding storage unit 235. In this figure, as an example, the capture unit 230 is provided outside the storage unit 235 with a different structure. The capture unit 230 can have multiple ports 231 (ports 231-1 to 231-2 in this example). Each port 231 can be an output port, and the capture unit 230 can output the read data file from the multiple ports 231. In this embodiment, as an example, the multiple ports 231-1 and 231-2 of a capture unit 230 are connected to different signal transmitters 250-1 and 250-2, but they can also be connected to a common signal transmitter 250. The capture unit 230 can, in response to a request from the image processing device 194, read a data file stored in the storage unit 235 and transmit it from port 231 to the image processing device 194 via the signal transmitter 250. Details will be described later, but the capture unit 230 can transmit a single data file to the image processing device 194 from ports 231-1 and 231-2 respectively, or it can transmit individual data segments acquired from a single data file to the image processing device 194 from ports 231-1 and 231-2 respectively. The data segments transmitted from port 231-1 and 231-2 may be different.

[0107] The capture unit 230 can aggregate multiple read data files through calculations and send them to the image processing device 194 as the data file to be inspected. For example, the capture unit 230 can generate the data file to be inspected by calculating the total, average, maximum, minimum or other statistical quantities of each corresponding pixel in the multiple data files, or by performing pre-specified filtering on the multiple image data. The capture unit 230 can temporarily store intermediate data in the storage unit 235, which is intermediate data in the process of calculating the data file to be inspected based on the image data of the multiple captured images.

[0108] Storage unit 235 stores data files. In the test apparatus 10 of this embodiment, by including at least one of multiple test modules 160 in the test head 150 and multiple capture blocks 210 in the capture module 200 which functions as the test module 160, multiple storage units 235 (also referred to as "storage units 235-1 to storage units 235-4" for distinguishing them by the capture blocks 210-1 to 210-4 that include the storage units 235) can be provided. The multiple storage units 235 can store data files obtained from different DUTs respectively.

[0109] The storage unit 235 may have one or more memory banks 240a to 240c (also referred to as "memory banks 240"). One or more memory banks 240 are connected to the capture unit 230. Each memory bank 240 may be a memory element or memory module such as Dynamic Random Access Memory (DRAM) or Static Random Access Memory (SRAM). Each memory bank 240 may include two or more memory elements or memory modules.

[0110] One or more signal transmitters 250 are connected to the output ports 231 of one or more capture units 230, and are connected to the storage unit 235 via the capture unit 230. Here, in the test apparatus 10 of this embodiment, multiple signal transmitters 250 (e.g., "signal transmitter 250-1 to signal transmitter 250-2" in the example of this figure) can be provided by including multiple test modules 160 in the test head 150 and at least one of multiple signal transmitters 250 in the capture module 200 which functions as the test module 160. Each signal transmitter 250 may be an example of a first communication unit, and may be connected to a reference number of storage units 235 among the multiple storage units 235 in the test apparatus 10 (e.g., four storage units 235 included in one capture module 200 in this figure). Furthermore, the reference number may be a number other than 4, and may be 2 for example.

[0111] Signal transmitter 250 is detachably connected to signal transmitter 290 (described later) within the image processing device 194 connected in opposite directions via a communication cable, and transmits and receives signals such as electrical or optical signals between itself and signal transmitter 290. Each signal transmitter 250 can be connected to a single signal transmitter 290. The communication cable may include multiple communication channels. Thus, each signal transmitter 250 and each signal transmitter 290 can be connected through multiple communication channels, and serial communication can also be performed in parallel on each communication channel. The number of communication channels may be the same as the base number, i.e., the number of storage units 235 connected to the signal transmitter 250; in this embodiment, for example, it may be four. Thus, the signal transmitter 250 can communicate data files for each storage unit 235 on a separate communication channel. The signal transmitter 250 and signal transmitter 290 may be optical transceivers of the Quad Small Form-factor Pluggable (QSFP) standard, etc. When signal transmitters 250 and 290 are QSFP standard optical transceivers, signal transmitter 250 is connected to the opposite signal transmitter 290 via a 4-channel optical fiber.

[0112] Module IF 255 is connected to each capture block 210 and other circuits within capture module 200, as well as system controller 192. Module IF 255 enables control of the circuits within capture module 200 by system controller 192 through relaying access from system controller 192 to the circuits within capture module 200.

[0113] The image processing apparatus 194 includes a plurality of acquisition units 265 (in this example, there are four "acquisition units 265-1 to 265-4" as a reference number), a plurality of image processing engines 270 (in this example, there are four "image processing engines 270-1 to 270-4" as a reference number), and a determination unit 285.

[0114] Multiple acquisition units 265 are detachably connected to any one of the multiple storage units 235, and acquire data files from the storage unit 235. In this embodiment, as an example, each acquisition unit 265 can be detachably connected to any one of the multiple signal transmitters 250 in the test apparatus 10, and then detachably connected to each storage unit 235 connected to the signal transmitter 250, acquiring data files from each storage unit 235.

[0115] Each acquisition unit 265 has multiple signal transmitters 290 and one or more CAPIF (capture interface) 280. As an example in this figure, each acquisition unit 265 has two signal transmitters 290 and one CAPIF 280. The test apparatus 10 includes a total of eight signal transmitters 290 (also referred to as "signal transmitters 290-1 to signal transmitters 290-8") and a total of four CAPIFs 280 (also referred to as "CAPIF 280-1 to CAPIF 280-4").

[0116] Each signal transmitter 290 is connected to any corresponding CAPIF 280. Each signal transmitter 290 is detachably connected to any signal transmitter 250 in any capture module 200 via a communication cable, and transmits and receives electrical or optical signals between itself and the signal transmitter 250. Each signal transmitter 290 may be an example of a second communication unit, and can receive data files from the storage unit 235 of the reference number (four in this example) connected to the signal transmitter 250 via a plurality of detachably connected signal transmitters 250-1 to 250-2. Each signal transmitter 290 can perform optical communication with the signal transmitter 250, thereby allowing each acquisition unit 265 to acquire data files from the storage unit 235 via optical communication. Each acquisition unit 265 can supply the acquired data files to the corresponding CAPIF 280.

[0117] In this embodiment, each signal transmitter 290 can be detachably connected to a single signal transmitter 250. Thus, each signal transmitter 290 can be connected to the reference data acquisition unit 230 and, further, to the reference data storage unit 235 via a single signal transmitter 250. Each signal transmitter 290 can be connected to each signal transmitter 250 via the reference data communication channel, and can also receive data files in a separate communication channel for each storage unit 235.

[0118] Each signal transmitter 290 can be detachably connected to a single other signal transmitter 290 (see below). Figure 6 When two signal transmitters 290 are interconnected, data files can be sent from one signal transmitter 290 to the other in each communication channel, or data files can be sent from one signal transmitter 290 to the other in some communication channels, and from the other signal transmitter 290 to one signal transmitter 290 in the remaining communication channels. This communication configuration can be controlled by the CAPIF 280 connected to the signal transmitter 290.

[0119] Each CAPIF (Capture Interface) 280 is an interface device for communicatively connecting the image processing engine 270 to the capture block 210 within the capture module 200, and can connect to any one of the image processing engines 270. Each CAPIF 280 can be mounted on a peripheral bus such as PCI Express (Peripheral Component Interconnect Express) (registered trademark) of the image processing engine 270. Each CAPIF 280 is connected to two signal transmitters 290 respectively, and communicates with the capture unit 230 and then with the storage unit 235 via a signal transmitter 250 that is detachably connected to these signal transmitters 290.

[0120] Each CAPIF 280 can be an example of an acquisition unit, provided in each of a plurality of acquisition units 265, and can acquire at least a portion of the data file output from any port 231 of any capture unit 230. In this figure, as an example, each CAPIF 280 is provided as part of the acquisition unit 265 inside the acquisition unit 265.

[0121] Each CAPIF 280 may have multiple ports 281 connected to a signal transmitter 290. Each port 281 may be an input port, and the CAPIF 280 may receive data via multiple ports 281. Receiving data from a CAPIF 280 may mean supplying the received data to the image processing engine 270 corresponding to that CAPIF 280. Each CAPIF 280 may have a reference number of ports 281 for each connected signal transmitter 290; in this figure, eight ports 281 are used as an example. The reference number of ports 281 for each signal transmitter 290 may be connected to a reference number of communication channels contained in a communication cable that is detachably connected to the signal transmitter 290. Each CAPIF 280 may receive data files from a separate port 281 for each storage unit 235. Each CAPIF 280 may supply the received data serially to the image processing engine 270 or supply the received data in parallel to the image processing engine 270.

[0122] Each port 281 can also be an input / output port capable of data input / output. In this case, each port 281 can selectively function as either an input port or an output port depending on the connection configuration. As an example in this embodiment, when the signal transmitters 290 are connected to each other, two of the four ports 281 connected to each of these signal transmitters 290 can function as input ports, and the remaining two ports 281 can function as output ports. When at least one port 281 is an input / output port, the CAPIF 280 can be pre-set via user operation through the system controller 192, etc., to receive data files from one port 281 and output data files from another port 281. In a CAPIF 280, if a data file input from one port 281 is output from another port 281, the data file can be transferred from one CAPIF 280 to another.

[0123] Each of the above-mentioned acquisition units 265 changes the allocation of each storage unit 235 to each image processing engine 270 according to the connection configuration between the multiple storage units 235 and the multiple acquisition units 265 included in the test apparatus 10 (in this embodiment, for example, the connection configuration between signal transmitters 250 and 290). Changing the allocation of each storage unit 235 to each image processing engine 270 can mean changing the correspondence between data files stored in each storage unit 235 and the image processing engine 270 that performs image processing on the image data of the data files. Each acquisition unit 265, by determining each capture unit 230 linked to the other via signal transmitters 290 and 250, can allocate the storage unit 235 connected to the determined capture unit 230 to the corresponding image processing engine 270. Furthermore, "linking" can mean that a computer or communication device (or its ports, connectors, or adapters) is connected to another computer or communication device via cable or wireless means, enabling communication. Each of the multiple acquisition units 265 can supply data files from each storage unit 235, which is detachably connected via signal transmitters 290 and 250, to the corresponding image processing engine 270.

[0124] Each image processing engine 270 is an example of a processing unit, and is respectively associated with any one of the plurality of acquisition units 265, performing data processing on the data file acquired by the corresponding acquisition unit 265. Each image processing engine 270 can be associated with any acquisition unit 265 and can perform image processing on the image data contained in the data file. Each image processing engine 270 can perform image processing on image data captured with a light emission pattern corresponding to the test item, corresponding to the test item. In this embodiment, as an example, each image processing engine 270 can perform image processing corresponding to the test item shown by the identification information contained in the data file.

[0125] Here, image processing can refer to the process of extracting certain information from image data. For example, image processing can be the process of calculating the average pixel value, the process of calculating a sensitivity index of the DUT, the process of calculating a uniformity index of pixel values, the process of calculating a noise characteristic index of the DUT, the process of calculating the standard deviation of pixel values ​​in at least a portion of the image data, or the process of detecting points or lines with unintended pixel values. The image processing engine 270 can supply data representing the result of image processing to the determination unit 285.

[0126] The data processing performance of at least two of the multiple image processing engines 270 can differ from each other. Therefore, by changing the connection configuration of the signal transmitters 250 and 290, and consequently the connection configuration of the storage unit 235 and the acquisition unit 265, a storage unit 235 for storing large amounts of data can be allocated to the image processing engine 270 with high processing performance, and a storage unit 235 for storing small amounts of data can be allocated to the image processing engine 270 with low processing performance. As an example, processing performance can be at least one of clock frequency, thermal design power, power efficiency, memory capacity, and memory bandwidth.

[0127] The image processing engine 270 may be a computer unit including a central processing unit (CPU), memory, and input / output devices, and may include external storage devices as needed. Alternatively, the image processing engine 270 may be an image processing accelerator such as a graphics processing unit (GPU) mounted on the computer unit. The image processing engine 270 may, for example, be one or more image processing accelerators mounted on a peripheral bus such as PCI Express (registered trademark). Alternatively, the image processing engine 270 may be a dedicated computer or dedicated circuit designed specifically for image processing of the experimental apparatus 10.

[0128] The determination unit 285 determines the quality of the DUT based on test results derived from the image processing results. The determination unit 285 can derive test results for test items corresponding to the image processing from data representing the image processing results. The determination unit 285 can perform predetermined calculations on the image processing results (e.g., comparison with a benchmark value) to derive test results (e.g., pass / fail). The determination unit 285 can determine the quality of the DUT based on whether the test results of each test item meet a pre-set pass / fail benchmark (e.g., a benchmark where all test results are pass). The determination unit 285 can perform a determination for each DUT.

[0129] also, Figure 1 and Figure 2The structure of the test apparatus 10 shown is an example. The test apparatus 10 can adopt a structure corresponding to the test method (wafer test, chip test, IC / LSI test, etc.), the type of test (functional test, parameter test, etc.), and the scale of the test. In addition, for example, the image processing device 194 can be set at a location separated from the main body of the test apparatus 10 instead of being configured in the mainframe 190, and connected to the main body of the test apparatus 10 via a communication network. The image processing device 194 can also be implemented by a cloud server that can communicate with the main body of the test apparatus 10 via the Internet. In addition, the storage unit 235, the capture unit 230, and the signal transmitter 250 may not be built into the capture module 200, and the acquisition unit 265 and the image processing engine 270 may not be built into the image processing device 194.

[0130] Based on the experimental apparatus 10 described above, the allocation of each storage unit 235 to each image processing engine 270 is changed according to the connection configuration between the storage unit 235 and the acquisition unit 265, which are detachably connected to the storage unit 235. Therefore, by changing the connection configuration between the storage unit 235 and the acquisition unit 265, the allocation of the storage unit 235 to the image processing engine 270 can be flexibly changed, and thus the allocation of data files can be flexibly changed.

[0131] Furthermore, since the data processing performance of the at least two image processing engines 270 is different from each other, by changing the connection configuration of the multiple storage units 235 and the multiple acquisition units 265, data processing of each data file can be performed using the image processing engine 270 which has suitable data processing performance.

[0132] Furthermore, since multiple image processing engines 270 perform image processing on the image data contained in the data file, the allocation of the image processing engines 270 performing image processing can be flexibly changed for each data file by changing the connection configuration of the multiple storage units 235 and the multiple acquisition units 265.

[0133] Furthermore, since data files containing image data acquired from different camera elements are stored in multiple storage units 235 respectively, the allocation of the image processing engine 270 for image processing can be flexibly changed for each camera element that generates the data file.

[0134] Furthermore, the acquisition unit 265 receives data files from the storage units 235 of the reference number via a detachable signal transmitter 250 that is connected to one of the plurality of signal transmitters 250 that are respectively connected to the storage units 235 of each reference number (four in this embodiment). Therefore, the data files of the plurality of storage units 235 can be supplied to a single image processing engine 270 for data processing.

[0135] Furthermore, since multiple signal transmitters 250 and multiple signal transmitters 290 are connected through multiple communication channels, the communication of data files can be accelerated.

[0136] Furthermore, since multiple acquisition units 265 acquire data files from multiple storage units 235 via optical communication, the communication speed of the data files can be increased.

[0137] Furthermore, the quality of the camera element used as a DUT can be determined based on the test results derived from image processing, thus allowing for testing of the camera element.

[0138] Figure 3 The test procedure of the test apparatus 10 according to this embodiment is shown. In step 300 (S300), the test apparatus 10 is configured according to the DUT. Specifically, the rotating device 180 rotates and moves the test head 150 to the maintenance position. A light source 170 corresponding to the DUT is mounted on the test head 150. Various test modules 160 selected according to the type and quantity of the DUT are inserted into the test head 150 from the upper surface side at the maintenance position. On each signal transmitter 250 of the capture module 200, which is a test module 160, any one of the signal transmitters 290 of the image processing device 194 is connected by the user in any connection configuration. In addition, a high-fidelity test interface board 140 and a performance board 130 corresponding to the DUT are mounted and fixed on the upper surface of the test head 150. A probe card 104 and a connection unit 120 corresponding to the DUT are mounted on the detection device 100. After the test apparatus 10 is configured, the rotating device 180 rotates and moves the test head 150 to the test position.

[0139] Here, when signal transmitters 250 and 290 are connected, each of the multiple acquisition units 265 can change the allocation of each storage unit 235 to each image processing engine 270 according to the connection configuration between the multiple storage units 235 and the multiple acquisition units 265. Each of the multiple acquisition units 265 can change the allocation in the current test process relative to the allocation in the previous test process, and the allocation can also be changed according to the changed connection configuration whenever the connection configuration changes.

[0140] Each capture unit 230 can identify a port 281 that is linked to each of the plurality of ports 231 in the capture unit 230 (in this embodiment, for example, a port 281 linked via signal transmitters 250 and 290). Similarly, each CAPIF 280 can identify a port 231 that is linked to each of the plurality of ports 281 in the CAPIF 280 (in this embodiment, for example, a port 231 linked via signal transmitters 290 and 250). When port 281 is an input / output port, each CAPIF 280 can identify ports 231 and 281 that are linked to each of the plurality of ports 281 in the CAPIF 280. The link can be confirmed by outputting a doorbell signal from each port and receiving an ACK signal from the output destination port. The doorbell signal and the ACK signal can respectively assign inherent identification information to ports 231 and 281, and each port 231, 281 can determine the linked counterpart based on the identification signals. When the ports 281 are interconnected via signal transmitters 290, a doorbell signal can be output from one port 281 to another port 281, and an ACK signal can be returned from the other port 281. Similarly, a doorbell signal can be output from one port 281 to another port 281, and an ACK signal can be returned from one port 281. These two ports 281 can be ports 281 located in separate CAPIFs 280. With the ports 281 linked, for each CAPIF 280, user operation via system controller 192 or similar can be used to configure which port 281 receives the data file from and which port 281 receives the data file from outputting it from the other port 281. Thus, a data file input from one port 281 in any CAPIF 280 can be output from the other port 281 and transmitted to the other CAPIF 280.

[0141] In S310, the detection device 100 connects one or more DUTs (Device Under Test) formed on the test object 20 to the probe card 104 of the testing device 10. Specifically, the detection device 100 transports and places the test object 20 onto the stage 102. After aligning the DUTs on the test object 20 with the probe card 104 by moving the stage 102 in the horizontal direction (also referred to as the "XY direction"), the detection device 100 moves the stage 102 upward in the vertical direction (also referred to as the "Z direction") to electrically connect each electrode of the DUT to each probe 106 of the probe card 104.

[0142] In S320, the light source 170 emits test light under the control of the system controller 192. The test light passes through the lens tube 175, the high-fidelity test interface board 140, the performance board 130, the connection unit 120, and the probe card 104. Thus, the test apparatus 10 illuminates the DUT with test light.

[0143] In S330, the test module 160, which controls the DUT, is controlled by the system controller 192 to instruct the DUT to perform image capture settings and capture images of the test light. Thus, the DUT captures an image of the test light.

[0144] In S340, the test module 160, used to control the DUT, is controlled by the system controller 192 to output image data or metadata of the captured images from the DUT. The capture block 210 within the capture module 200 acquires the output data from the DUT. When multiple captured images are aggregated for testing, the test apparatus 10 repeats the processing from S320 to S340 while changing at least one of the light intensity, color, or emission pattern of the test light as needed. The capture block 210 within the capture module 200 sequentially receives the data files of each captured image and aggregates them.

[0145] In S350, the image processing device 194 receives and examines a data file containing image data acquired by the capture module 200, thereby testing the DUT.

[0146] Specifically, each acquisition unit 265 acquires a data file from a storage unit 235 that is detachably connected via signal transmitters 250 and 290, and supplies it to the corresponding image processing engine 270. Each acquisition unit 265 can acquire a data file from the corresponding storage unit 235 if a new data file is stored there. By repeating this operation of S350 via S360 or S370 (described later), multiple acquisition units 265 that are detachably connected to any one of the storage units 235 storing data files output from the DUT can acquire data files from the storage unit 235.

[0147] When each capture unit 230 of the data file sending source is connected to a port 281 of a plurality of different acquisition units 265 at a plurality of ports 231 in the capture unit 230, a common data file can be output from the plurality of ports 231. In this case, a single data file can be supplied from a single capture unit 230 to each of the individual acquisition units 265.

[0148] When each capture unit 230 connects to a port 281 of a common acquisition unit 265 among multiple acquisition units 265 at multiple ports 231 in the capture unit 230 (see below) Figure 4, Figure 5 The capture unit 230 can output individual data segments extracted from a single data file from the multiple ports 231. In this case, the individual data segments output from each port 231 can be synthesized after being acquired by a common acquisition unit 265 to reproduce the original data file, or a single data file can be supplied from a single capture unit 230 to a single acquisition unit 265. Each capture unit 230 can divide the data file to generate data segments. As an example, when generating two data segments, 2n bits (where n is an integer) of data can be divided into a first half of n bits and a second half of n bits, or it can be divided into a data segment containing an odd-numbered bit and a data segment containing an even-numbered bit. Each data segment can be assigned the identification information of the original data file. Each capture unit 230 can output data segments from the multiple ports 231 depending on whether the multiple ports 231 are linked to a port 281 of the common acquisition unit 265. Based on or instead of this, each capture unit 230 may also output data segments from the multiple ports 231, depending on the situation where multiple ports 231 are linked to port 281 of a common acquisition unit 265, and according to settings based on user operations via system controller 192, etc. The data segments can be combined by CAPIF 280 to reproduce the data file. CAPIF 280 can temporarily store one of the two data segments generated from a data file internally, and perform combination based on the acquisition of the other data segment. Furthermore, the combination of data segments can also be performed by image processing engine 270.

[0149] Each capture unit 230 may link any port 281 of one CAPIF 280 (also referred to as "first CAPIF 280") to any port 281 of another CAPIF 280 (also referred to as "second CAPIF 280"), and may link a portion of the ports 231 (also referred to as "first ports 231") of the capture unit 230 to ports 281 of the first CAPIF 280, and another portion of the ports 231 (also referred to as "second ports 231") to ports 281 of the second CAPIF 280 (see below) Figure 6Alternatively, based on user-operated settings, individual data segments extracted from a single data file can be output from both the first port 231 and the second port 231. Each capture unit 230 can be configured via user operation through the system controller 192, etc., to output individual data segments extracted from a single data file from both ports 231. In this case, one data segment output from the first port 231 can be supplied to the first CAPIF 280, while another data segment output from the second port 231 can be transmitted from the second CAPIF 280 and supplied to the first CAPIF 280, or each data segment extracted from a data file can be collected to the first CAPIF 280. Furthermore, one data segment output from the second port 231 can be supplied to the second CAPIF 280, while another data segment output from the first port 231 can be transmitted from the first CAPIF 280 and supplied to the second CAPIF 280, or each data segment extracted from a data file can be collected to the second CAPIF 280. In these cases, individual data segments extracted from a data file can be synthesized after being acquired by CAPIF 280 to reproduce a single data file. Thus, a single data file can be supplied from a single capture unit 230 to a single acquisition unit 265.

[0150] The image processing engine 270 performs data processing on the data file acquired from the acquisition unit 265 according to a predetermined algorithm, such as an experimental procedure (image processing is an example in this embodiment). By repeating this operation of S350 via S360 or S370 as described later, multiple image processing engines 270, each associated with any one of the acquisition units 265, can perform data processing on the data file acquired by the corresponding acquisition unit 265.

[0151] Then, the determination unit 285 determines the quality of the DUT based on the test results derived from the image processing results. The determination unit 285 can determine the quality of the DUT by judging whether the image processing results for the captured image meet the image quality standards. In addition, the test apparatus 10 can perform electrical tests on the DUT in addition to optical input tests.

[0152] In S360, the testing device 10 determines whether the test of the DUT, which is the test subject, has ended. If the test of the DUT has not ended (S360 "NO"), the testing device 10 moves the process to S320, and performs the test processing from S320 to S350 for the next test item. In the test processing from S320 to S350 for the next test item, the same test module 160 can continue to be used, or a different test module 160 can be used. If the test of the DUT has ended (S360 "YES"), the testing device 10 moves the process to S370.

[0153] In S370, the testing apparatus 10 determines whether the testing of all DUTs of the test object 20 has been completed. If the testing of all DUTs has not been completed (S370 "No"), the testing apparatus 10 proceeds to S310, performing the testing processes from S310 to S360. In the testing processes of S310 to S360 for a new DUT, the same testing module 160 can be used, or a different testing module 160 can be used. If the testing of all DUTs has been completed (S370 "Yes"), the testing apparatus 10 ends the testing process of the test object 20. Furthermore, the detection device 100 can remove the completed test object 20 and place the next test object 20 on the stage 102. Accordingly, the testing apparatus 10 can perform the testing process shown in this figure on the next test object 20.

[0154] Based on the above operations, the capture unit 230 provided in each storage unit 235 determines the port 281 that is linked to each of the plurality of ports 231 in the capture unit 230, and the CAPIF 280 provided in each acquisition unit 265 determines the port 231 that is linked to each of the plurality of ports 281 in the CAPIF 280. Therefore, the connection object can be reliably determined for each of the plurality of ports 231 and the plurality of ports 281.

[0155] Furthermore, each port 281 provided in the acquisition unit 265 is an input / output port capable of data input / output, and each CAPIF 280 defines a port 231 and a port 281 that are linked to each of the plurality of ports 281 in the CAPIF 280. Therefore, a port 281 of one CAPIF 280 can be connected to a port 281 of another CAPIF 280, using a port 281 of one CAPIF 280 as port 281 and a port 281 of another CAPIF 280 as port 231 to enable data communication. Therefore, the allocation of the storage unit 235 to the image processing engine 270 can be changed more flexibly.

[0156] Furthermore, when multiple ports 231 in the capture unit 230 are linked to ports 281 of different acquisition units 265, a common data file is output from the multiple ports 231. Therefore, a single data file can be output to each individual acquisition unit 265, and each individual image processing engine 270 can perform data processing on it.

[0157] Furthermore, when multiple ports 231 in the capture unit 230 are linked to a common port 281 of the acquisition unit 265, individual data segments extracted from a single data file are output from the multiple ports 231. Therefore, individual data segments in a data file can be output from multiple ports 231 to the common acquisition unit 265, thereby shortening the communication time of the data file.

[0158] Furthermore, when any port 281 of the first CAPIF 280 is linked to any port 281 of the second CAPIF 280, and the first port 231 of the multiple output ports 231 in the capture unit 230 is linked to a port 281 of the first CAPIF 280, and the second port 231 is linked to a port 281 of the second CAPIF 280, the individual data segments extracted by the capture unit 230 from a single data file are output from the first port 231 and the second port 231. Therefore, individual data segments in a data file can be output from multiple ports 231 to a common acquisition unit 265, thereby shortening the communication time of the data file.

[0159] Furthermore, the operation is described as follows: in S300, each acquisition unit 265 changes the allocation of each storage unit 235 to each image processing engine 270 according to the connection configuration between the multiple storage units 235 and the multiple acquisition units 265. However, whenever processing in S310 or S320 is performed, the allocation of each storage unit 235 to each image processing engine 270 may also be changed according to the connection configuration between the multiple storage units 235 and the multiple acquisition units 265.

[0160] Next, the connection configuration between the storage unit 235 and the acquisition unit 265 will be described. Furthermore, as will be discussed later... Figures 4-7 For the sake of simplicity, the illustration of the capture module 200 has been simplified. In addition, only a portion of the ports 231 are labeled, while the labels for the other ports 231 are omitted.

[0161] Figure 4This figure shows an example of the connection configuration between the storage unit 235 and the acquisition unit 265. In the example shown in this figure, each acquisition module 200 includes four sets of storage units 235 and acquisition units 230, as well as two signal transmitters 250 (also referred to as "signal transmitters 250-1 to signal transmitters 250-2"). The image processing device 194 includes four sets of acquisition units 265 and an image processing engine 270.

[0162] Each capture module 200's four sets of storage units 235 and capture units 230 are divided into two groups G (also referred to as "group G-1 to group G-2"). The two storage units 235 of group G-1 are connected to signal transmitters 250-1 via capture units 230, and the two storage units 235 of group G-2 are connected to signal transmitters 250-2 via capture units 230. Signal transmitters 250-1 and 250-2 are detachably connected to the signal transmitters 290 of each acquisition unit 265. Thus, each group G's two storage units 235 are detachably connected to one acquisition unit 265, and an image processing engine 270 corresponding to the acquisition unit 265 is assigned to each of the two storage units 235. Then, the data files read from these two storage units 235 are supplied to the image processing engine 270, which is the target of the assignment.

[0163] In the example shown in this figure, the two ports 231 of each capture unit 230 are linked to a common port 281 of the CAPIF 280. Therefore, each capture unit 230 can split a single data file read from the storage unit 235 into two data segments and output them from their respective ports 231. In this case, the CAPIF 280 or the image processing engine 270 combines the two data segments to reproduce the original data file.

[0164] Each image processing engine 270 of the image processing apparatus 194 performs image processing on each data file read from the two storage units 235 of each group G, and supplies the results to the determination unit 285. Furthermore, in the example of this figure, one of the two signal transmitters 290 of each acquisition unit 265 may not be connected to the signal transmitters 250 and 290.

[0165] Figure 5 This is another example of the connection configuration between the storage unit 235 and the acquisition unit 265. In the example shown in this figure, a capture module 200 includes eight sets of storage units 235 and capture units 230, as well as four signal transmitters 250 (also referred to as "signal transmitters 250-1 to signal transmitters 250-4"), and the image processing device 194 includes four sets of acquisition units 265 and an image processing engine 270.

[0166] Each capture module 200's eight storage units 235 and capture units 230 are divided into two groups G (also referred to as "group G-1 to group G-2"), each consisting of four groups. The four storage units 235 of group G-1 are connected to signal transmitters 250-1 and 250-2 via capture units 230, respectively. The four storage units 235 of group G-2 are connected to signal transmitters 250-3 and 250-4 via capture units 230, respectively. Two signal transmitters 250-1 and 250-2, and two signal transmitters 250-3 and 250-4, are detachably connected to the signal transmitters 290 of each acquisition unit 265. Thus, each group G's four storage units 235 are detachably connected to one acquisition unit 265, and an image processing engine 270 corresponding to each acquisition unit 265 is assigned to each of the four storage units 235. Then, the data files read from these four storage units 235 are supplied to the image processing engine 270, which is the object of allocation.

[0167] In the example shown in this figure, the two ports 231 of each capture unit 230 are linked to a common port 281 of the CAPIF 280. Therefore, each capture unit 230 can split a single data file read from the storage unit 235 into two data segments and output them from their respective ports 231. In this case, the CAPIF 280 or the image processing engine 270 combines the two data segments to reproduce the original data file.

[0168] Each image processing engine 270 of the image processing apparatus 194 performs image processing on each data file read from the four storage units 235 of each group G, and supplies the results to the determination unit 285.

[0169] Figure 6This is another example of the connection configuration between the storage unit 235 and the acquisition unit 265. In the example of this figure, a capture module 200 includes eight sets of storage units 235 (also referred to as "storage units 235-1 to storage units 235-8") and a capture unit 230, as well as four signal transmitters 250 (also referred to as "signal transmitters 250-1 to signal transmitters 250-4"). The image processing device 194 includes four sets of acquisition units 265 (also referred to as "acquisition units 265-1 to acquisition units 265-4") and an image processing engine 270 (also referred to as "image processing engine 270-1 to image processing engine 270-4"). Acquisition unit 265-1 has two signal transmitters 290 (also referred to as "signal transmitters 290-1 to 290-2") and CAPIF 280-1; acquisition unit 265-2 has two signal transmitters 290 (also referred to as "signal transmitters 290-3 to 290-4") and CAPIF 280-2; acquisition unit 265-3 has two signal transmitters 290 (also referred to as "signal transmitters 290-5 to 290-6") and CAPIF 280-3; acquisition unit 265-4 has two signal transmitters 290 (also referred to as "signal transmitters 290-7 to 290-8") and CAPIF 280-4. Each CAPIF 280 has eight ports 281. Furthermore, in the description of this figure, the eight ports 281 of each CAPIF 280 are referred to sequentially from the top of the figure as the first port 281 to the eighth port 281.

[0170] The eight storage units 235 and the capture unit 230 of the capture module 200 are divided into four groups G (also referred to as "groups G-1 to G-4") in units of two groups. The two storage units 235-1 and 235-2 of group G-1 and the two storage units 235-3 and 235-4 of group G-2 are connected to the signal transmitters 250-1 and 250-2 via the capture unit 230, respectively. The two storage units 235-5 and 235-6 of group G-3 and the two storage units 235-7 and 235-8 of group G-4 are connected to the signal transmitters 250-3 and 250-4 via the capture unit 230, respectively.

[0171] Signal transmitters 250-1 and 250-2 are detachably connected to signal transmitters 290-1 and 290-3 of each acquisition unit 265-1 and acquisition unit 265-2. A total of eight ports 281 connected to these two signal transmitters 290-1 and 290-3 (i.e., the first port 281 to the fourth port 281 in CAPIF 280-1 and the first port 281 to the fourth port 281 in CAPIF 280-2) can be used as input ports.

[0172] The other two signal transmitters 290-2 and 290-4 in acquisition units 265-1 and 265-2 are connected to each other in a detachable manner. Of the four ports 281 connected to signal transmitter 290-2 (i.e., the fifth to eighth ports 281 in CAPIF 280-1), ports 281-281 can be input ports, and ports 281-281 can be output ports. Similarly, of the four ports 281 connected to signal transmitter 290-4 (i.e., the fifth to eighth ports 281 in CAPIF 280-2), ports 281-281 can be output ports, and ports 281-281 can be input ports.

[0173] CAPIF 280-1, through user operation via system controller 192, can be configured to receive data files from ports 281 (first, second, fifth, and sixth ports) of the CAPIF 280-1 (first to eighth ports), and output data files received from ports 281 (third and fourth ports) of the CAPIF 280-1 from ports 281 (seventh and eighth ports). CAPIF 280-2, through user operation via system controller 192, can be configured to receive data files from ports 281 (third, fourth, seventh, and eighth ports) of the CAPIF 280-2 (first to eighth ports), and output data files received from ports 281 (first and second ports) of the CAPIF 280-2 from ports 281 (fifth and sixth ports). Furthermore, in this figure, the data files read from storage units 235-1 to 235-4 are supplied to four ports 281 respectively connected to signal transmitters 290-1 and 290-3 (i.e., the first port 281 to the fourth port 281 in CAPIF 280-1 and the first port 281 to the fourth port 281 in CAPIF 280-2). Thus, CAPIF 280-1 can take in data files read from the two storage units 235-1 and 235-2 of group G-1, and transmit data files read from the two storage units 235-3 and 235-4 of group G-2 to CAPIF 280-2. Similarly, CAPIF 280-2 can take in data files read from the two storage units 235-3 and 235-4 of group G-2, and transmit data files read from the two storage units 235-1 and 235-2 of group G-1 to CAPIF 280-1. As a result, the two storage units 235 and one acquisition unit 265 of each group G are connected in a detachable manner, and an image processing engine 270 corresponding to the acquisition unit 265 is assigned to the two storage units 235. Then, the data files read from the two storage units 235 are supplied to the image processing engine 270 that is the object of the assignment.

[0174] In the example shown in the diagram, ports 281 through 281 of CAPIF 280-2 are linked to ports 281 through 281 of CAPIF 280-1. Furthermore, one port 231 of each capture unit 230 in groups G-1 and G-2 is linked to ports 281 through 4 of CAPIF 280-1, and the other port 231 is linked to ports 281 through 4 of CAPIF 280-2. Therefore, each capture unit 230 in groups G-1 and G-2 can be configured to output individual data segments extracted from a single data file from both ports 231. Therefore, a data segment output from the first port 231 can be supplied to CAPIF 280-1, while another data segment output from the second port 231 can be transmitted from CAPIF 280-2 and supplied to CAPIF 280-1, or data segments extracted from a data file can be collected into CAPIF 280-1. Based on this, a data segment output from the second port 231 can be supplied to CAPIF 280-2, while another data segment output from the first port 231 can be transmitted from CAPIF 280-1 and supplied to CAPIF 280-2, or data segments extracted from a data file can be collected into CAPIF 280-2. In this case, CAPIF 280 or the image processing engine 270 combines the two data segments to reproduce the original data file.

[0175] Each image processing engine 270 of the image processing apparatus 194 performs image processing on the data files read from the two storage units 235 of each group G, and supplies the results to the determination unit 285.

[0176] Furthermore, the connection destinations of signal transmitters 250-3 to 250-4 are omitted in this figure, but the connection of signal transmitters 250-3 to 250-4 and signal transmitters 290-5 to 290-8 can be made in the same manner as the connection of signal transmitters 250-1 to 250-2 and signal transmitters 290-1 to 290-4.

[0177] Figure 7 This is another example of the connection configuration between the storage unit 235 and the acquisition unit 265. In the example shown in this figure, a capture module 200 includes eight sets of storage units 235 and capture units 230, as well as four signal transmitters 250 (also referred to as "signal transmitters 250-1 to signal transmitters 250-4"), and the image processing apparatus 194 includes four sets of acquisition units 265 (also referred to as "acquisition units 265-1 to acquisition units 265-4") and an image processing engine 270.

[0178] Each capture module 200's eight storage units 235 and capture unit 230 are divided into two groups G (also referred to as "group G-1 to group G-2"), each consisting of four groups. The four storage units 235 of group G-1 are connected to signal transmitters 250-1 and 250-2, respectively, while the four storage units 235 of group G-2 are connected to signal transmitters 250-3 and 250-4, respectively. Signal transmitter 250-1 is detachably connected to one of the signal transmitters 290 of the acquisition unit 265-1, and signal transmitter 250-3 is detachably connected to the other signal transmitter 290 of the acquisition unit 265-1. Thus, eight storage units 235 are detachably connected to one acquisition unit 265, and an image processing engine 270 corresponding to the acquisition unit 265 is assigned to each of the eight storage units 235. Then, the data files read from these eight storage units 235 are supplied to the image processing engine 270, which is the object of allocation.

[0179] Each image processing engine 270 of the image processing apparatus 194 performs image processing on each data file read from the eight storage units 235 and supplies the results to the determination unit 285. Furthermore, in this example, the signal transmitter 290 may not be connected to signal transmitters 250-2 and 250-4. Although the connection destination of the signal transmitters 290 to the acquisition units 265-2 to 265-4 is not shown, they may be connected to the signal transmitters 250 of other capture modules 200 in the same way as the signal transmitter 290 of the acquisition unit 265-1.

[0180] Furthermore, in the above embodiments, it was described that the data file contains image data, but it can also be configured not to contain image data. In this case, the test apparatus 10 may include a processing unit that processes the data file instead of the image processing engine 270.

[0181] Various embodiments of the present invention can be described with reference to flowcharts and block diagrams, where blocks may represent: (1) a stage of an operation being executed, or (2) a segment of a device having the function of performing an operation. Specific stages and segments may be constructed as follows: dedicated circuitry, programmable circuitry supplied together with computer-readable instructions stored on a computer-readable medium, and / or a processor supplied together with computer-readable instructions stored on a computer-readable medium. Dedicated circuitry may contain digital and / or analog hardware circuitry, or integrated circuits (ICs) and / or discrete circuitry. Programmable circuitry may contain reconfigurable hardware circuitry, including logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, flip-flops, registers, field-programmable gate arrays (FPGAs), and memory components such as programmable logic arrays (PLAs).

[0182] A computer-readable medium can contain any tangible element capable of storing instructions executable by a suitable device. As a result, a computer-readable medium having instructions stored therein constitutes a product containing executable instructions necessary to create the operations specified in a flowchart or block diagram. Examples of computer-readable media include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, etc. More specific examples of computer-readable media may include: floppy disks, diskettes, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), electrically erasable programmable read-only memory (EEPROM), static random access memory (SRAM), compact disc read-only memory (CD-ROM), digital video disc (DVD), Blu-ray discs, memory sticks, integrated circuit cards, etc.

[0183] Computer-readable instructions may comprise any source code or object code described in any combination of one or more programming languages, including assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, status setting data, or object-oriented programming languages ​​such as Smalltalk, Java, and C++, and conventional sequential programming languages ​​such as the "C" programming language or similar programming languages.

[0184] Compared to the processor or programmable circuitry of a programmable data processing device such as a general-purpose computer, a special-purpose computer, or another computer, computer-readable instructions can be provided locally or via a wide area network (WAN) such as a local area network (LAN) or the Internet, and executing computer-readable instructions creates the means required to perform the operations specified in a flowchart or block diagram. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, and microcontrollers.

[0185] Figure 8 Examples of computer 2200 that can be wholly or partially implemented in various forms of the present invention are shown. A program installed on computer 2200 enables computer 2200 to function as an operation of a device associated with an embodiment of the present invention or one or more segments of said device; or, to execute said operation or said one or more segments, and / or to enable computer 2200 to execute a process or stage of an embodiment of the present invention. Such a program can be executed by computer 2200 via CPU 2212 to perform specific operations associated with some or all of the blocks in the flowcharts and block diagrams described in this specification.

[0186] The computer 2200 of this embodiment includes a CPU 2212, RAM 2214, a graphics controller 2216, and a display element 2218, which are interconnected via a host controller 2210. The computer 2200 also includes input / output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card driver, which are connected to the host controller 2210 via an input / output controller 2220. The computer also includes conventional input / output units such as a ROM 2230 and a keyboard 2242, which are connected to the input / output controller 2220 via an input / output chip 2240.

[0187] The CPU 2212 operates according to the program stored in the ROM 2230 and RAM 2214, thereby controlling the various units. The graphics controller 2216 acquires image data generated by the CPU 2212 from the frame buffer provided in RAM 2214 or itself, and the image data can be displayed on the display element 2218.

[0188] Communication interface 2222 communicates with other electronic components via a network. Hard disk drive 2224 stores programs and data to be used by CPU 2212 within computer 2200. DVD-ROM drive 2226 reads programs or data from DVD-ROM 2201 and provides programs or data to hard disk drive 2224 via RAM 2214. IC card drive reads programs and data from IC card and / or writes programs and data to IC card.

[0189] ROM 2230 stores boot programs to be executed by computer 2200 at startup, and / or programs dependent on the hardware of computer 2200. Input / output chip 2240 can also connect various input / output units to input / output controller 2220 via parallel ports, serial ports, keyboard ports, mouse ports, etc.

[0190] The program is provided via a computer-readable medium such as a DVD-ROM 2201 or an IC card. The program is read from the computer-readable medium and installed on a hard disk drive 2224, RAM 2214, or ROM 2230, which are also examples of computer-readable media, and executed by the CPU 2212. The information processing described within these programs is read into the computer 2200, causing cooperation between the program and the various types of hardware resources. The apparatus or method can be configured to perform information manipulation or processing based on the use of the computer 2200.

[0191] For example, when communication is performed between computer 2200 and external components, CPU 2212 executes the communication program loaded in RAM 2214, and based on the processing described in the communication program, it can perform communication processing on the commands of communication interface 2222. Under the control of CPU 2212, communication interface 2222 reads transmission data stored in the transmission buffer processing area provided in the recording medium such as RAM 2214, hard disk drive 2224, DVD-ROM 2201, or IC card, and sends the read transmission data to the network, or writes received data received from the network into the receive buffer processing area provided on the recording medium, etc.

[0192] In addition, CPU 2212 can read all or necessary portions of files or databases stored in external recording media such as hard disk drive 2224, DVD-ROM drive 2226 (DVD-ROM 2201), and IC cards into RAM 2214, and perform various types of processing on the data in RAM 2214. CPU 2212 then writes the processed data back to the external recording media.

[0193] Various types of information, such as programs, data, tables, and databases, can be stored in the recording medium and processed. The CPU 2212 can execute various types of processing described in this disclosure on data read from RAM 2214, including various types of operations, information processing, conditional judgments, conditional branches, unconditional branches, and information retrieval / replacement specified by a sequence of instructions, and write the results back to RAM 2214. Furthermore, the CPU 2212 can retrieve information from files, databases, etc., within the recording medium. For example, when multiple entries with attribute values ​​of a first attribute each associated with an attribute value of a second attribute are stored in the recording medium, the CPU 2212 retrieves entries from the multiple entries that meet the conditions specified by the attribute value of the first attribute, and reads the attribute value of the second attribute stored in those entries. Thus, the attribute value of the second attribute associated with the first attribute that satisfies predetermined conditions can be obtained.

[0194] The programs or software modules described above can be stored on computer 2200 or on a computer-readable medium near computer 2200. Alternatively, a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable medium, thereby providing the program to computer 2200 via the network.

[0195] The present invention has been described above using embodiments, but the scope of the present invention is not limited to the scope described in the embodiments. Those skilled in the art will understand that various modifications or improvements can be made to the embodiments. As will be apparent from the claims, such modifications or improvements can also be included within the scope of the present invention.

[0196] It should be noted that the execution order of actions, sequences, steps, and stages in the apparatus, systems, programs, and methods shown in the claims, specification, and drawings can be implemented in any order unless specifically stated as "before" or "before," and unless the output of the previous process is used in the subsequent process. The action flow in the claims, specification, and drawings is described using terms such as "firstly," "secondly," etc., for convenience, but this does not imply that the actions must be performed in the stated order.

Claims

1. A system comprising: Multiple storage units, each storing data files; Multiple acquisition units are each detachably connected to any one of the multiple storage units to acquire data files from the storage unit; as well as Multiple processing units are respectively configured in association with any one of the multiple acquisition units, and perform data processing on the data files acquired by the corresponding acquisition unit. Each of the plurality of acquisition units changes the allocation of each storage unit to each processing unit according to the connection configuration between the plurality of storage units and the plurality of acquisition units.

2. The system according to claim 1, further comprising: A readout unit is provided in each of the plurality of storage units and has a plurality of output ports, for reading data files from the corresponding storage unit and outputting them from the plurality of output ports; as well as An input unit is provided in each of the plurality of acquisition units and has a plurality of input ports, through which at least a portion of a data file output from any one of the output ports is acquired. Each readout unit identifies the input port that is linked to each of the plurality of output ports in the readout unit. Each input section determines an output port that is linked to each of the plurality of input ports in the input section.

3. The system according to claim 2, wherein each input port is an input / output port capable of data input / output. Each input section defines an output port and an input / output port that are linked to each of the plurality of input / output ports in the input section.

4. The system according to claim 3, wherein each readout unit, when any one of the input / output ports of one of the input units is linked to any one of the input / output ports of another input unit, and a portion of the output ports of the readout unit is linked to the input ports of the one input unit and another portion of the output ports is linked to the input ports of the other input unit, outputs individual data segments extracted from a single data file from the portion of the output ports and the other portion of the output ports according to a user operation setting.

5. The system according to claim 2, wherein each readout unit outputs a common data file from the plurality of output ports when the plurality of output ports of the readout unit are connected to the input ports of the plurality of acquisition units that are different from each other.

6. The system of claim 2, wherein each readout unit outputs individual data segments extracted from a single data file from the plurality of output ports when the plurality of output ports of the readout unit are linked to the input port of a common acquisition unit of the plurality of acquisition units.

7. The system according to claim 1 further includes a plurality of first communication units, wherein the plurality of first communication units are connected to the storage unit of each reference number among the plurality of storage units. The acquisition unit has a plurality of second communication units, which receive data files from the storage unit of the reference number via a first communication unit that is detachably connected to one of the plurality of first communication units.

8. The system according to claim 7, wherein each first communication unit and each second communication unit are connected through multiple communication channels.

9. The system of claim 1, wherein the plurality of acquisition units acquire data files from the storage unit via optical communication.

10. The system of claim 1, wherein the data processing performance of at least two of the plurality of processing units is different from that of each other.

11. The system according to any one of claims 1 to 10, wherein the data file comprises image data, The multiple processing units perform image processing on the image data contained in the data file.

12. The system of claim 11, wherein the plurality of storage portions respectively store data files containing image data acquired from different camera elements.

13. The system according to claim 12, wherein each camera element is an element to be tested. The system also includes a decision unit. The determination unit determines the quality of the tested component based on the test results derived from the image processing results.

14. A method comprising: During the acquisition phase, multiple acquisition devices acquire data files from storage devices, and the multiple acquisition devices are respectively connected to any one of the multiple storage devices that store the data files in a detachable manner. as well as In the processing phase, multiple processing devices, each associated with any one of the plurality of acquisition devices, perform data processing on the data files acquired by the corresponding acquisition device. Prior to the acquisition phase, each of the multiple acquisition devices changes the allocation of each storage device to each processing device according to the connection configuration between the multiple storage devices and the multiple acquisition devices.

15. A computer program product, executed by a computer, causes the computer to function as the following components: Multiple storage units, each storing data files; Multiple acquisition units are respectively connected to any one of the multiple storage units in a detachable manner to acquire data files from the storage unit; and Multiple processing units are respectively configured in association with any one of the multiple acquisition units, and perform data processing on the data files acquired by the corresponding acquisition unit. Each of the plurality of acquisition units changes the allocation of each storage unit to each processing unit according to the connection configuration between the plurality of storage units and the plurality of acquisition units.

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