Water dripping device for electroplating equipment

Abstract

The invention discloses a water dripping device and electroplating equipment with the water dripping device.The water dripping device comprises a support, a water absorption assembly and a water dripping mechanism, the support is provided with a channel allowing a base material to penetrate through, the water absorption assembly is installed on the support and comprises a water absorption element, and the water absorption element is made of hydrophilic materials and used for being connected to the base material in a pressed mode; absorbing the residual solution on the base material; the water dripping mechanism is used for supplementing water to the water absorbing element so that the surface of the water absorbing element can be kept in a wet state. After the water dripping device is installed, water is conveyed to the water absorption element, the water absorption element is continuously kept in a wet state, the concentration of liquid medicine absorbed by the water absorption element can be diluted by the water, silver crystals are not prone to being generated, and the situation that the base material is scratched due to poor rotation caused by silver crystal hardening of the water absorption element is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electroplating, in particular to a water dripping device for an electroplating equipment. BACKGROUND

[0002] In a continuous multi-station surface treatment process, after the substrate completes the deposition of a certain plating zone, a small amount of liquid film containing metal ions is still attached to the surface of the substrate. If these liquid films are brought into the next plating zone, cross contamination of different chemical systems will occur, which will cause the composition of the plated layer to deviate or cause appearance defects. Therefore, the industry generally sets up a liquid film removal link between adjacent plating zones. A common practice is to make the substrate pass through a pair of elastic water absorbing elements, which absorb the liquid film by virtue of their hydrophilic properties. As the operation time is prolonged, the metal salt will gradually accumulate inside the water absorbing element, and metal microcrystals will be precipitated. This microcrystalline deposition layer not only greatly reduces the softness and resilience of the water absorbing element, but also causes local hardening protrusions. When the substrate passes through again, these hardened protrusions will scratch the newly formed plated layer, causing scratches, abrasions, and even metal layer peeling, which will cause appearance and functional defects and reduce product yield. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application proposes a water dripping device for an electroplating equipment, which can improve the crystallization hardening caused by the water absorbing sponge absorbing excessive silver-containing drug water, improve the product yield, and reduce the scrap cost.

[0004] The present application also proposes an electroplating equipment with the above-mentioned water dripping device.

[0005] The water dripping device for an electroplating equipment according to the first aspect embodiment of the present application comprises: a support provided with a passage for the substrate to pass through; a water absorbing assembly installed on the support, the water absorbing assembly comprising a water absorbing element made of a hydrophilic material and used for being pressed against the substrate to absorb the residual solution on the substrate; a water dripping mechanism for supplying water to the water absorbing element to keep the surface of the water absorbing element in a wet state.

[0006] The water dripping device for an electroplating equipment according to the embodiment of the present application has at least the following beneficial effects: after the water dripping device is installed, water is supplied to the water absorbing element to keep the water absorbing element in a wet state, and the drug water concentration absorbed by the water absorbing element is diluted by water, which is not easy to produce silver crystallization, thereby avoiding the situation that the water absorbing element is hard and scratches the substrate due to silver crystallization.

[0007] According to some embodiments of the present application, the support comprises a first side plate and a second side plate, the first side plate and the second side plate are respectively located on two sides of the base material, the water absorption assembly comprises a roller, one end of the roller is rotatably connected to the first side plate, and the other end of the roller is rotatably connected to the second side plate, and the water absorption element is sleeved on the roller.

[0008] According to some embodiments of the present application, the water dripping mechanism is arranged at the top end of the support, the water dripping mechanism is provided with water dripping holes, the water dripping holes are located above the water absorption element and are arranged in a spaced manner with the water absorption element.

[0009] According to some embodiments of the present application, the water dripping mechanism is provided with a water dripping cavity, the water dripping cavity is communicated with a plurality of water dripping holes, and the plurality of water dripping holes are arranged in a spaced manner along the length direction of the roller.

[0010] According to some embodiments of the present application, the water dripping mechanism is provided with a water guide cavity located between the water dripping cavity and the water dripping holes, the cross-sectional area of the water guide cavity gradually decreases from top to bottom, and the water dripping holes are communicated with the lower end of the water guide cavity.

[0011] According to some embodiments of the present application, the water dripping mechanism comprises a water supply pump and a water delivery pipe, and the water supply pump supplies water to the water dripping cavity through the water delivery pipe.

[0012] According to some embodiments of the present application, the water supply pump intermittently supplies water to the water dripping cavity.

[0013] According to some embodiments of the present application, along the length direction of the roller, both ends of the water absorption element protrude from both sides of the base material.

[0014] According to some embodiments of the present application, the water absorption assembly comprises two groups of water absorption elements and rollers, and the two groups of water absorption elements and rollers are respectively used for pressing the upper side and the lower side of the base material.

[0015] The electroplating equipment according to the second aspect of the embodiments of the present application comprises: An electrolytic tank, the base material passes through the electrolytic tank; The water dripping device according to the first aspect of the embodiments of the present application is located at the end of the electrolytic tank, the base material passes through the channel, and the water absorption element is pressed to the base material.

[0016] The electroplating equipment according to the embodiments of the present application has at least the following beneficial effects: by adopting the water dripping device according to the first aspect of the embodiments of the present application, the water absorption element can be kept in a wet state, the water absorption element can be diluted by water, the water absorption element is not easy to produce silver crystals, and the water absorption element is not easy to be scratched due to the hardening of silver crystals.

[0017] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0018] The present application will be further described with reference to the drawings and examples, wherein: Figure 1 A schematic view of a water dripping device according to an embodiment of the present application; Figure 2 A schematic view of a water dripping device according to an embodiment of the present application; Figure 1 A schematic view of a water dripping mechanism; Figure 3 A schematic view of a water dripping mechanism; Figure 1 A schematic view of a water dripping mechanism; Figure 4 A schematic view of a water dripping mechanism; Figure 2 An enlarged view of A shown in the figure; Figure 5 A schematic view of a water dripping device according to another embodiment of the present application; Figure 6 A schematic view of a water dripping device according to another embodiment of the present application in a first state; Figure 7 A schematic view of a water dripping device according to another embodiment of the present application in a second state; Figure 6

[0019] Reference Signs: 100, bracket; 110, first side plate; 120, second side plate; 200, water absorbing assembly; 210, water absorbing element; 211, extension section; 220, roller; 300, water dripping mechanism; 310, housing; 311, water dripping hole; 312, water dripping cavity; 313, water guiding cavity; 320, water conveying pipe; 330, water guiding member; 340, water outlet; 350, rolling shaft; 360, gap; 400, base material. DETAILED DESCRIPTION

[0020] Embodiments of the present application are described in detail below with reference to the accompanying drawings, in which examples of the embodiments are shown, wherein the same or similar notations are used to denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0021] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as a limitation of the present application, which does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation. ​

[0022] In the description of the present application, the meaning of one or more is one or more, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, within, etc. are understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0023] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0024] Reference Figure 1 And Figure 4 The water dripping device of the embodiment of the present application comprises a support 100, a water absorbing assembly 200 and a water dripping mechanism 300. The support 100 is provided with a passage (not shown in the figure) for the base material 400 to pass through. The water absorbing assembly 200 is installed on the support 100. The water absorbing assembly 200 comprises a water absorbing element 210 made of a hydrophilic material and used for being press-connected to the base material 400 to absorb residual solution on the base material 400. The water dripping mechanism 300 is used for supplementing water to the water absorbing element 210 so that the surface of the water absorbing element 210 remains in a wet state. The support 100 is a basic bearing structure, providing an installation reference for the water absorbing assembly 200 and the water dripping mechanism 300, reserving a passage for the base material 400 (such as a strip or a belt in continuous electroplating) to pass through, and ensuring that the base material 400 can be stably transmitted along a preset path. The water absorbing assembly 200 is installed on the support 100. The core execution component of the water absorbing assembly 200 is the water absorbing element 210 made of a hydrophilic material (such as sponge or hydrophilic fiber material). By being press-connected to the surface of the base material 400, the water absorbing element 210 realizes the adsorption and removal of residual solution (such as plating solution after electroplating) on the surface of the base material 400 by using the hydrophilicity of the material and the contact pressure. The water dripping mechanism 300 is a water supplementing unit specially for supplementing water to the water absorbing element 210 and is a key component for maintaining the wet state of the water absorbing element 210.

[0025] It can be understood that the water absorbing element 210 adsorbs residual solution on the surface of the base material 400 by relying on the hydrophilicity and the press-connected relationship, thereby avoiding the pollution caused by the residual solution being brought into subsequent processes. After absorbing the residual solution of the base material 400, the water absorbing element 210 will gradually become saturated. However, in the related art, the water dripping mechanism 300 is not provided, and the water absorbing element 210 cannot be supplemented with water in time. The water absorbing element 210 may be hardened due to the crystallization of metal ions (such as copper and silver ions) in the internal solution, thereby losing elasticity and being unable to flexibly rotate, and even scratching the surface of the base material 400 when rubbing against the base material 400.

[0026] Therefore, the function of the dripping mechanism 300 is to continuously replenish water to the water-absorbing element 210, so that the surface of the water-absorbing element 210 is always kept in a wet state. Specifically, the dripping mechanism 300 uniformly penetrates water into the water-absorbing element 210 by precisely controlling the water flow (such as micro-dripping, atomized spraying, etc.): on the one hand, the water dilutes the concentration of the solution adsorbed in the water-absorbing element 210, reducing the risk of metal ion crystallization; on the other hand, the wet water-absorbing element 210 can more efficiently continue to absorb the residual solution carried by the substrate 400, forming a virtuous cycle of "absorption-water replenishment-reabsorption".

[0027] It should be noted that, since the water-absorbing element 210 remains in a state of being pressed against the substrate 400, during the movement of the substrate 400, the water-absorbing element 210 will squeeze out a part of the liquid containing metal ions, and the squeezed-out liquid will fall into the lower liquid collecting tank for collection. Therefore, the water-absorbing element 210 is constantly repeating the process of squeezing out and reabsorbing new liquid, and will not appear the phenomenon of water saturation, which will not affect the absorption effect. It can be understood that in some embodiments, a driving wheel and an auxiliary wheel will also be provided on the conveying line of the substrate 400, the driving wheel is used to drive the substrate 400 to move in a predetermined direction, and the auxiliary wheel is used to maintain the movement direction of the substrate 400 to prevent deviation.

[0028] With reference to Figure 1 The bracket 100 includes a first side plate 110 and a second side plate 120, which are respectively located on both sides of the transmission path of the substrate 400 (i.e., the substrate 400 passes between the two plates). The water-absorbing assembly 200 includes a roller shaft 220, one end of which is rotatably connected to the first side plate 110, and the other end is rotatably connected to the second side plate 120, for example, the roller shaft 220 is rotatably connected to the first side plate 110 and the second side plate 120 through bearings or rotary joints respectively, to realize free rotation. The water-absorbing element 210 is sleeved on the roller shaft 220, that is, the inner hole of the water-absorbing element 210 is fixedly attached to the outer surface of the roller shaft 220, and rotates synchronously with the roller shaft 220, and dynamic water absorption is realized by rotating the roller shaft 220. The roller shaft 220 serves as a carrier for the water-absorbing element 210, which reduces friction with the substrate 400 by rotating, avoiding scratching the surface; at the same time, the substrate 400 can drive the roller shaft 220 to rotate passively when moving, so that the water-absorbing element 210 uniformly contacts the substrate 400.

[0029] The two ends of the roller 220 are supported by the two side plates to ensure the stability of the rotation of the roller 220 and avoid the inclination of the roller 220 due to uneven force. The synchronous rotation of the roller 220 and the water absorbing element 210 can form rolling contact between the water absorbing element 210 and the surface of the base material 400, which not only enhances the adsorption efficiency of the residual liquid on the surface of the base material 400 (continuous update of the contact area during rolling), but also reduces the frictional damage to the surface of the base material 400 by buffering the contact pressure through rotation. At the same time, the sleeved water absorbing element 210 is convenient to disassemble and replace, which reduces the maintenance cost in the later period.

[0030] With reference to Figures 1 to 4 The water dripping mechanism 300 is arranged at the top end of the support 100, and the water dripping mechanism 300 is provided with a shell 310, and the shell 310 is provided with a water dripping hole 311. The water dripping hole 311 is located above the water absorbing element 210 and is arranged in a spaced manner with the water absorbing element 210. The water dripping mechanism 300 is arranged at the top end of the support 100, which not only facilitates the realization of natural liquid dripping by using gravity, but also avoids the spatial interference between the water dripping mechanism 300 and the transmission path of the base material 400, the water absorbing assembly 200 and other components, and is also conducive to simplifying the pipeline layout (such as connecting the water source from the top). The water dripping hole 311 is the key channel for water output, and the size and number of the hole diameter can be designed according to the water supplement demand (for example, by controlling the hole diameter to realize trace and uniform dripping), so as to ensure that the water is output in the form of drops rather than columns or mist, and to reduce the splashing of water. The water dripping hole 311 is limited to be directly above the water absorbing element 210 and is kept spaced from the water absorbing element 210 (i.e. not in direct contact). The advantages of this design are: on the one hand, water droplets can fall on the water absorbing element 210 under the action of gravity, ensuring the directionality of water supplement; on the other hand, the spaced arrangement can avoid mechanical friction between the water dripping mechanism 300 and the rotating water absorbing element 210, which not only protects the structural integrity of the water dripping hole 311, but also prevents the water absorbing element 210 from being hindered from rotating due to contact, and reduces the splashing of the plated liquid residue on the water absorbing element 210 to the water dripping hole 311 to cause blockage.

[0031] With reference to Figure 4The shell 310 is also provided with a drip cavity 312 communicating with a plurality of drip holes 311 arranged along the length direction of the roller 220. The drip cavity 312 communicates with the plurality of drip holes 311 as an internal passage, so that the external water source can first deliver water to the drip cavity 312, and then uniformly distribute the water to each drip hole 311 from the drip cavity 312, avoiding the water pressure fluctuation and uneven flow caused by directly connecting the water source to a single hole, ensuring that the water output of each drip hole 311 remains consistent. Since the water-absorbing element 210 is cylindrical and extends along the length direction of the roller 220, its contact area with the base material 400 is a long strip parallel to the axis of the roller 220, and the drip holes 311 distributed in this direction can uniformly drip water on the full length of the water-absorbing element 210, avoiding local water shortage or excess, and ensuring that the water-absorbing element 210 maintains a stable wet state as a whole.

[0032] Referring to Figure 4 The shell 310 is also provided with a water guide cavity 313 between the drip cavity 312 and the drip holes 311, the cross-sectional area of the water guide cavity 313 gradually decreases from top to bottom, and the drip holes 311 communicate with the lower end of the water guide cavity 313. That is, the cross-sectional area of the water guide cavity 313 gradually decreases from top to bottom (similar to a funnel or conical structure), the upper end communicates with the drip cavity 312 (receives water flow from the drip cavity 312), and the lower end directly communicates with the drip holes 311. The larger cross-sectional area at the top can smoothly receive water flow from the drip cavity 312, avoiding turbulence or splashing caused by water flow impact, and the gradually reduced cross-section at the bottom can form a gathering effect on the water flow, improving the directionality of the water flow through the cross-sectional area contraction, ensuring that the water flow accurately converges into the drip holes 311 at the lower end, reducing water loss or flow deviation. The setting of the water guide cavity 313 is equivalent to adding an "airflow regulation link" before the water flow enters the drip holes 311, which not only realizes the orderly transition of water flow through morphological constraints, but also optimizes the stability and directionality of water flow through cross-section changes, ultimately ensuring that the water droplets output by the drip holes 311 are uniform in size and accurate in dropping position, providing more controllable water replenishment effect for the water-absorbing element 210, and avoiding the problem of local over-wetting or water shortage caused by turbulent water flow.

[0033] Referring to Figure 1The water dripping mechanism 300 includes a water supply pump (not shown in the figure) and a water delivery pipe 320. The water supply pump supplies water to the water dripping cavity 312 through the water delivery pipe 320. As a positive water supply device, the water supply pump is different from natural gravity water supply. It can control water pressure and flow through mechanical power to achieve precise control of the water supply amount of the water dripping cavity 312 (such as adjusting the pump power according to the demand of the sponge wetness to change the water supply amount per unit time), solving the problem of unstable water pressure and difficult flow adjustment in gravity water supply. The water supply pump is connected to the water dripping cavity 312 through the water delivery pipe 320. The water delivery pipe 320 is a channel for water flow transmission and can be flexibly laid according to the equipment layout (such as using a flexible hose to adapt to the spatial position difference between the support 100 and the water supply pump), ensuring that the water flow is stably delivered from the pump body to the water dripping cavity 312, avoiding leakage or pressure loss in the middle.

[0034] It can be understood that the water supply pump supplies water to the water dripping cavity 312 intermittently. “Intermittent water supply” means that the water supply pump does not continuously deliver water flow to the water dripping cavity 312, but starts and stops or adjusts the output power according to a predetermined period (such as a cycle of “work X seconds - stop Y seconds”) to make the water flow enter the water dripping cavity 312 in a non-continuous manner. This mode is different from continuous water supply and can more accurately match the actual water demand of the water absorption element 210. It avoids the problem of over-supply of water in the water dripping cavity 312 caused by continuous water supply, which in turn causes excessive dripping of the water dripping hole 311, prevents the water absorption element 210 from being saturated with water and seeping onto the surface of the substrate 400, and affects the subsequent electroplating process. According to the humidity change of the water absorption element 210, the intermittent period is dynamically adjusted (such as shortening the stop time and increasing the water supply frequency when the sponge is detected to be dry, and prolonging the stop time when it is wet), realizing “on-demand water replenishment” and reducing water resource waste. In combination with the buffering effect of the water dripping cavity 312 and the water guide cavity 313, intermittent water supply can make the water flow entering the water dripping hole 311 more easily form uniform water droplets, avoiding the possible dripping disorder (such as water droplets connected into a line) under continuous high pressure.

[0035] It should be noted that in some other embodiments, the water supply pump and the water delivery pipe 320 can not be provided, a water dripping cavity 312 with a larger volume is designed to store more water, and a control valve is provided to control the water outlet amount of the water dripping cavity 312 and the opening and closing time points of the water dripping cavity 312.

[0036] Referring to Figure 5, along the length direction of the roller 220, both ends of the water absorption element 210 protrude from both sides of the base material 400. That is, the total length of the water absorption element 210 is greater than the width of the base material 400, and the excess part forms an extension section 211. This size design breaks the conventional idea that the water absorption element 210 is equal in width to the base material 400, and reserves a dedicated space for water discharge. When the water absorption element 210 is in extrusion contact with the surface of the base material 400, the water it absorbs (including replenished water and absorbed residual liquid) will migrate to the area with less stress under the action of extrusion pressure. Since the covered area of the base material 400 is tightly extruded, and the extension sections 211 on both sides are not in contact with the base material 400 and the extrusion pressure is weak, the water will naturally converge to the extension sections 211 at both ends and flow out (similar to the principle that when a sponge is extruded, water flows out from the edges). Actively guiding excess water to the outside of the base material 400 avoids the residual water on the contact area between the base material 400 and the water absorption element 210, preventing the water from being carried into the subsequent electroplating tank with the base material 400, causing contamination of the plating solution. Reducing the accumulation of water in the water absorption element 210 reduces the risk of crystallization of residual liquid solutes (such as silver ions) in the water absorption element 210 due to local water saturation. The drainage process of the extension section 211 can also carry away part of the absorbed residual liquid solutes, which is equivalent to "dynamic cleaning" of the water absorption element 210, reducing the content of metal ions in the water absorption element 210 and prolonging its effective service life.

[0037] Referring to Figure 1 , the water absorption assembly 200 includes two groups of water absorption elements 210 and rollers 220, and the two groups of water absorption elements 210 and rollers 220 are respectively used to press the upper side and the lower side of the base material 400. The water absorption assembly 200 adopts a "double-group symmetric" design, including two groups of independent water absorption elements 210 and matching rollers 220 - that is, each group is supported by a roller 220, and the water absorption element 210 is sleeved on the surface of the roller 220, forming two "water absorption units" that can rotate independently. From the spatial layout, the two groups of water absorption units are respectively arranged on the "upper side" and the "lower side" of the base material 400: one group is located above the transmission path of the base material 400, and its water absorption element 210 is in pressure contact with the upper surface of the base material 400; the other group is located below the transmission path of the base material 400, and its water absorption element 210 is in pressure contact with the lower surface of the base material 400. This "up-down pressure" layout ensures that both sides of the base material 400 can be in close contact with the water absorption element 210. Through synchronous contact on both sides, the absorption and removal of residual solution (such as electroplating solution) on both sides of the base material 400 are completed at one time, avoiding incomplete cleaning on one side and bringing residual liquid into subsequent processes. The pressure of the two groups of water absorption elements 210 can form a mutually balanced clamping force, which can not only enhance the adhesion to the surface of the base material 400 to improve the absorption efficiency, but also assist the base material 400 to maintain stability during transmission, reducing the deviation or wrinkles caused by unilateral stress.

[0038] It should be noted that when the base material 400 has a through hole, the moisture of the upper water absorption unit can fall onto the lower water absorption unit through the through hole, thereby supplementing the moisture of the lower water absorption element 210 and keeping it in a wet state. Of course, the two groups of water absorption elements 210 can be maintained in a wet state by independent water replenishment.

[0039] With reference to Figure 5 In other embodiments, the water outlet end of the water dripping mechanism 300 is also provided with a plurality of flexible water guide members 330 made of a hydrophobic material. The water guide members 330 are in contact with the water absorption element 210 and can guide the water flow to the water absorption element 210. The plurality of water guide members 330 can disperse the water flow, making the humidifying effect of the water absorption element 210 more uniform. In addition, since the water guide members 330 are flexible, they can reduce the resistance when the water absorption element 210 rotates, and can also clean the metal crystals remaining on the surface of the water absorption element 210 to some extent.

[0040] With reference to Figure 6 And Figure 7 In other embodiments, the water dripping mechanism 300 is provided with a water outlet 340 and a rolling shaft 350. The cross section of the rolling shaft 350 is elliptical, and the rolling shaft 350 is rotationally arranged to be able to press the water absorption element 210 or be separated from the water absorption element 210. For example, when the rolling shaft 350 is rotated to have a long axis arranged along the vertical direction, it can press the water absorption element 210. When the rolling shaft 350 is rotated to have a short axis arranged along the vertical direction, the rolling shaft 350 is arranged to be spaced apart from the water absorption element 210. The rolling shaft 350 can also cooperate with the water outlet 340 to achieve the functions of water outlet and water closing. For example, when the rolling shaft 350 is rotated to have a long axis arranged along the vertical direction, the rolling shaft 350 has a large gap 360 with the side wall of the water outlet 340, and the water flow can flow out of the gap 360 and enter the water absorption element 210 to supplement the water absorption element 210. When the rolling shaft 350 is rotated to have a short axis arranged along the vertical direction, the rolling shaft 350 abuts against the side wall of the water outlet 340, which is in line contact and has a sealing effect, and the water outlet 340 has no liquid flowing out.

[0041] Specifically, with reference to Figure 6 The water dripping device is in a first state, at which time the rolling shaft 350 is rotated to have a long axis arranged along the vertical direction, and the rolling shaft 350 abuts against the water absorption element 210 to press the water absorption element 210, so that a part of the liquid containing metal ions in the water absorption element 210 is squeezed out. At the same time, the rolling shaft 350 has a large gap 360 with the side wall of the water outlet 340, and the water outlet 340 can supply water to supplement the water absorption element 210, thereby better diluting the liquid medicine of the water absorption element 210 and reducing its concentration.

[0042] With reference to Figure 7When the water dripping device is in the second state, the rolling shaft 350 rotates to the short shaft arranged in the vertical direction, and the rolling shaft 350 is spaced apart from the water absorbing element 210, without extrusion effect on the water absorbing element 210. At the same time, the rolling shaft 350 abuts against the side wall of the water outlet 340, and the water outlet 340 can be closed.

[0043] It can be understood that, in the process of the water dripping device being converted from the first state to the second state, the extrusion effect of the rolling shaft 350 on the water absorbing element 210 gradually weakens, and at the same time, the gap 360 between the rolling shaft 350 and the side wall of the water outlet 340 gradually decreases, and the water flow also decreases, so that the water discharge amount of the water absorbing element 210 is consistent with the water supplement amount.

[0044] In some embodiments, the rolling shaft 350 is configured in a shape that the arrangement direction of the rolling shaft 350 is consistent with the arrangement direction of the water absorbing element 210, and the rolling shaft 350 is symmetrically twisted and extended from the middle oval to both ends, so that when the rolling shaft 350 rotates, the extrusion point of the water absorbing element 210 is one at the beginning and in the middle, and then changes to two, and the positions of the extrusion points gradually move towards both ends, so as to realize the migration of water in the water absorbing element 210 to both ends, and the water is discharged at the extension section 211, and at the same time, part of the adsorbed residual liquid solute can be removed in the water discharge process of the extension section 211, so as to reduce the content of metal ions in the water absorbing element 210 and the probability of precipitation of metal microcrystals.

[0045] The embodiment of the present application also provides a kind of electroplating equipment, including electrolytic cell and the dripping device of above-mentioned embodiment, substrate 400 passes through electrolytic cell.A kind of electroplating equipment, including electrolytic cell and the dripping device of above-mentioned embodiment, substrate 400 passes through electrolytic cell;Dripping device is located at the end of electrolytic cell, substrate 400 passes through passageway, water absorbing element 210 is pressed to substrate 400.Dripping device is located at the end of electrolytic cell, substrate 400 passes through passageway, water absorbing element 210 is pressed to substrate 400.After substrate 400 is completed electroplating from electrolytic cell, it will directly enter the processing range of dripping device.Specifically, substrate 400 is exported after electrolytic cell, passes through the passageway on the support 100 of dripping device, when this time, the water absorbing element 210 of dripping device and substrate 400 surface keep the state of pressing joint, this layout ensures that substrate 400 can be immediately cleaned surface residual plating solution after leaving electrolytic cell, before entering next process.Using the water absorbing element 210 of dripping device and the residual plating solution of substrate 400 surface are promptly adsorbed, avoid plating solution with substrate 400 diffusion to other areas of equipment or take into subsequent tank, prevent plating solution pollution and waste.Through the water supply mechanism of dripping device, ensure that water absorbing element 210 always keep wet soft, both can efficiently remove residual liquid, also can avoid to cause scratch to the plating layer that substrate 400 surface just forms, protect plating layer integrity.Residual liquid processing and electroplating process are directly connected, form " just plating just clean " continuous production mode, adapt the efficient production demand of continuous electroplating, reduce the quality fluctuation caused by process interval (such as residual liquid dry crystallization).

[0046] The above detailed description of the embodiments of the present application is combined with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present application.

Claims

1. A dripping device for electroplating equipment, characterized in that, include: The support has channels through which the substrate passes; A water-absorbing assembly is mounted on the bracket. The water-absorbing assembly includes a water-absorbing element made of a hydrophilic material and is used to press against the substrate to absorb residual solution on the substrate. The dripping mechanism is used to replenish the water-absorbing element with water, so that the surface of the water-absorbing element remains moist.

2. The dripping device for electroplating equipment according to claim 1, characterized in that, The bracket includes a first side plate and a second side plate, which are located on both sides of the substrate. The water-absorbing assembly includes a roller, one end of which is rotatably connected to the first side plate and the other end of which is rotatably connected to the second side plate. The water-absorbing element is sleeved on the roller.

3. The dripping device for electroplating equipment according to claim 2, characterized in that, The dripping mechanism is located at the top of the bracket, and the dripping mechanism has dripping holes located above the water-absorbing element and spaced apart from the water-absorbing element.

4. The dripping device for electroplating equipment according to claim 3, characterized in that, The dripping mechanism is provided with a dripping cavity, which is connected to a plurality of dripping holes, which are spaced apart along the length of the roller.

5. The dripping device for electroplating equipment according to claim 4, characterized in that, The dripping mechanism has a water guiding cavity located between the dripping cavity and the dripping hole. The cross-sectional area of ​​the water guiding cavity gradually decreases from top to bottom, and the dripping hole is connected to the lower end of the water guiding cavity.

6. The dripping device for electroplating equipment according to claim 4, characterized in that, The dripping mechanism includes a water supply pump and a water delivery pipe, and the water supply pump supplies water to the dripping cavity through the water delivery pipe.

7. The dripping device for electroplating equipment according to claim 6, characterized in that, The water supply pump intermittently supplies water to the drip chamber.

8. The dripping device for electroplating equipment according to claim 2, characterized in that, Along the length of the roller, both ends of the absorbent element protrude from both sides of the substrate.

9. The dripping device for electroplating equipment according to claim 8, characterized in that, The water-absorbing assembly includes two sets of water-absorbing elements and rollers, which are respectively used to press the upper and lower sides of the substrate.

10. Electroplating equipment, characterized in that, include: Electrolytic cell, through which the substrate passes; The dripping device according to any one of claims 1 to 9, wherein the dripping device is located at the end of the electrolytic cell, the substrate passes through the channel, and the water-absorbing element is pressed against the substrate.

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