Water feeding and discharging and detecting integrated device

Abstract

The invention relates to the field of drainage control devices, in particular to a water feeding, drainage and detection integrated device which comprises a mounting seat for supporting, a connecting channel fixedly arranged at the center of the side end face of the mounting seat and a drainage connector fixedly arranged at the front portion of the mounting seat. And the drainage joint is used for drainage and diversion. The pneumatic drain valve device has the advantages of being compact in structure, excellent in sealing performance, reliable in operation, capable of achieving an automatic reset function and the like, is particularly suitable for the wafer electroplating technology with high requirements for drainage control precision and reliability, and can effectively improve the electroplating quality and the production efficiency.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of water drainage control devices, in particular to a water inlet and drainage and detection integrated device. BACKGROUND

[0002] In many industrial and civil occasions, effective drainage control of liquid is required. Traditional water drainage valves are mostly manually or electrically controlled, and have problems such as inconvenient operation, slow response, and being easily affected by the environment. A pneumatic water drainage valve is gradually widely applied due to its fast response, simple operation, high reliability and other advantages. However, the existing pneumatic water drainage valve still needs to be optimized in terms of structural design, and its sealing performance, service life and adaptability still have defects. In the process of wafer electroplating, the control precision and reliability of the water drainage system are also insufficient, and it is inconvenient to monitor the water resistance value in real time to ensure the electroplating quality. Therefore, a water inlet and drainage and detection integrated device is needed to solve the above problems. SUMMARY

[0003] The application aims to provide a water inlet and drainage and detection integrated device to solve the problems in the background.

[0004] To achieve the above-mentioned purpose, the application provides the following technical scheme: a water inlet and drainage and detection integrated device, comprising a mounting seat for support, a connecting channel is fixedly arranged at the center of the side end face of the mounting seat, and a water resistance device mounting hole is formed in the rear end face side of the mounting seat,

[0005] a water drainage joint is fixedly arranged at the front part of the mounting seat, and the water drainage joint is used for water drainage and flow guide;

[0006] a cylinder main body is threadedly connected at the rear part of the water drainage joint, two groups of air pipe joints for air guide are arranged at the upper end face of the cylinder main body, and a piston rod sealing ring is arranged at the inner end face of the cylinder main body close to the front opening;

[0007] a guide device is sealingly and slidingly arranged in the cylinder main body, the front part of the guide device is slidingly arranged in the water drainage joint, and the guide device is used for opening and closing the water drainage joint.

[0008] Preferably, the guide device comprises a cylinder piston, two groups of cylinder piston sealing rings are fixedly connected to the side end face of the cylinder piston, a cylinder head is arranged at the center of the front end face of the cylinder piston, a first O-shaped ring is fixedly connected to the front end face of the cylinder head, a spring is arranged at the center of the rear end face of the cylinder piston, a cylinder rear cover is fixedly arranged at the rear end face of the spring, a second O-shaped ring is fixedly connected to the side end face of the cylinder rear cover, and a clasp spring is arranged at the rear part of the cylinder rear cover.

[0009] Preferably, the drain joint comprises a joint shell, a threaded groove is opened at the bottom of the inner end face of the joint shell, and a positioning groove is opened at the top of the inner end face of the joint shell, and a drain groove is opened equidistantly at the side end face of the joint shell.

[0010] Preferably, the cylinder body is threaded and connected at the rear part of the joint shell through the threaded groove, which can effectively improve the convenience and stability of the subsequent butt joint of the cylinder body and the joint shell.

[0011] Preferably, the front part of the cylinder piston is integrally formed with a piston rod, and the piston rod is sealingly and slidingly connected with the piston rod sealing ring, which can effectively improve the air tightness of the sliding between the piston rod and the cylinder body.

[0012] Preferably, the rear cover of the cylinder is sealingly and fixedly connected with the rear part of the cylinder body through the second O-ring, and the rear part of the cylinder body is elastically and fixedly connected with the rear cover of the cylinder through the snap spring, the cylinder body is in a cylindrical structure, forms a cylinder chamber inside, the cylinder piston is installed in the cylinder chamber and can reciprocate up and down in the cylinder chamber, the outer side of the cylinder piston is provided with an annular groove, the cylinder piston sealing ring is installed in the annular groove, the rear cover of the cylinder is fixed by the snap spring, and the sealing between the cylinder piston and the cylinder body is ensured.

[0013] Preferably, the cylinder piston is sealingly and slidingly connected with the inner wall of the cylinder body through the two groups of cylinder piston sealing rings, which can effectively improve the stability of the reciprocating displacement of the cylinder piston inside the cylinder body.

[0014] Preferably, the cylinder head is sealed at the inner opening of the positioning groove through the first O-ring, the cylinder head is installed at one end of the cylinder body through the piston rod, is connected through threads, and is sealed through the first O-ring.

[0015] Compared with the prior art, the beneficial effects of the present application are as follows:

[0016] 1. The pneumatic drain valve device of the present application has the advantages of compact structure, excellent sealing performance, reliable operation, automatic reset function, etc., and is particularly suitable for wafer electroplating processes with high requirements for drain control accuracy and reliability, and can effectively improve the electroplating quality and production efficiency.

[0017] 2. The structure of the present application is compact, the components are designed reasonably, the overall volume is small, and the device is easy to install and use, thereby improving the practical performance of the device.

[0018] 3. The present invention has excellent sealing performance. Through multiple sealing designs, including cylinder piston sealing ring, first O-ring, piston rod sealing ring and second O-ring, it effectively prevents gas and liquid leakage, thereby improving the reliability and service life of the device.

[0019] 4. This invention is reliable in operation, adopts pneumatic control, has a fast response speed, is easy to operate, and can adapt to different working conditions.

[0020] 5. The present invention has an automatic reset function. Through the design of the spring, the cylinder piston can automatically reset after the air pressure is lost, ensuring the timely closure of the drainage channel and preventing liquid backflow. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is an exploded view of the main body of the present invention;

[0023] Figure 2 This is a split side view of the main body of the invention;

[0024] Figure 3 This is a front view of the present invention;

[0025] Figure 4 For the purposes of this invention Figure 3 Sectional view of AA;

[0026] Figure 5 This is an exploded view of the guiding device of the present invention;

[0027] Figure 6 This is a schematic diagram of the guiding device of the present invention;

[0028] Figure 7 This is a schematic diagram of the drainage connector of the present invention.

[0029] In the diagram: 1-Cylinder body, 2-Cylinder piston, 3-Drain connector, 4-Cylinder head, 5-Cylinder rear cover, 6-Snap ring, 7-Spring, 8-First O-ring, 9-Piston rod seal, 10-Cylinder piston seal, 11-Second O-ring, 12-Air pipe connector, 13-Connecting channel, 14-Mounting base, 15-Guide device, 16-Water resistor mounting hole, 31-Connector housing, 32-Drain groove, 33-Alignment groove, 34-Thread groove. Detailed Implementation

[0030] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0031] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or devices.

[0032] The invention will be further described below with reference to the accompanying drawings.

[0033] Example 1

[0034] Please see Figures 1-7 An embodiment of the present invention provides an integrated device for water inlet, drainage and detection, including a mounting base 14 for support, a connecting channel 13 fixedly provided at the center of the side end face of the mounting base 14 to facilitate subsequent connection and flow guidance with an external water source, and a water resistor mounting hole 16 is provided on the side of the rear end face of the mounting base 14 for connecting with an external water resistor to facilitate subsequent detection operations of water inlet and drainage;

[0035] Drain connector 3 is fixedly installed at the front of mounting base 14. Drain connector 3 is used for drainage and flow diversion.

[0036] The cylinder body 1 is threaded to the rear of the drain connector 3. Two sets of air pipe connectors 12 for guiding air are provided on the upper end face of the cylinder body 1. The air pipe connectors 12 are used to connect to the air source. A piston rod sealing ring 9 is provided on the inner end face of the cylinder body 1 near the front opening.

[0037] The guide device 15 is slidably disposed inside the cylinder body 1, and the front part of the guide device 15 is slidably disposed inside the drain connector 3. The guide device 15 is used to open and close the drain connector 3.

[0038] The guide device 15 includes a cylinder piston 2. Two sets of cylinder piston sealing rings 10 are fixedly snapped onto the side end face of the cylinder piston 2. A cylinder head 4 is provided at the center of the front end face of the cylinder piston 2. A first O-ring 8 is fixedly snapped onto the front end face of the cylinder head 4. A spring 7 is provided at the center of the rear end face of the cylinder piston 2. A cylinder rear cover 5 is fixedly provided at the rear end face of the spring 7. The spring 7 is installed between the cylinder piston 2 and the cylinder rear cover 5 to provide a restoring force for the cylinder piston 2. When the air pressure disappears, the spring 7 pushes the cylinder piston 2 downward, so that the cylinder head 4 fits tightly with the inner hole of the drain connector 3, closing the drain channel. A second O-ring 11 is fixedly snapped onto the side end face of the cylinder rear cover 5. A retaining spring 6 is provided at the rear of the cylinder rear cover 5.

[0039] The drain connector 3 includes a connector housing 31. A threaded groove 34 is provided at the bottom of the inner end face of the connector housing 31, and an alignment groove 33 is provided at the top of the inner end face of the connector housing 31. Drainage grooves 32 are provided at equal intervals on the side end face of the connector housing 31.

[0040] The cylinder body 1 is threadedly connected to the rear of the connector housing 31 via the threaded groove 34, which can effectively improve the convenience and stability of subsequent docking between the cylinder body 1 and the connector housing 31.

[0041] The piston rod is integrally formed at the front of the cylinder piston 2, and the piston rod and the piston rod sealing ring 9 are sealed and slidably engaged, which can effectively improve the airtightness of the sliding between the piston rod and the cylinder body 1.

[0042] The cylinder rear cover 5 is sealed and fixed to the rear of the cylinder body 1 by the second O-ring 11, and the rear of the cylinder body 1 is elastically fixed to the cylinder rear cover 5 by the snap ring 6. The cylinder body 1 has a cylindrical structure and forms a cylinder chamber inside. The cylinder piston 2 is installed in the cylinder chamber and can move up and down in the cylinder chamber. The outer side of the cylinder piston 2 is provided with an annular groove, and the cylinder piston sealing ring 10 is installed in the annular groove. The cylinder rear cover 5 is fixed by the snap ring 6 to ensure the seal between the cylinder piston 2 and the cylinder body 1.

[0043] The cylinder piston 2 is sealed and slidably connected to the inner wall of the cylinder body 1 through two sets of cylinder piston sealing rings 10, which can effectively improve the stability of the cylinder piston 2 moving back and forth inside the cylinder body 1.

[0044] The cylinder head 4 seals the internal opening of the alignment groove 33 through the first O-ring 8. The cylinder head 4 is installed at one end of the cylinder body 1 through the piston rod and is connected by threads, and is also sealed by the first O-ring 8.

[0045] Working principle: When the pneumatic drain valve device is working, compressed air enters the cylinder chamber through the air pipe connector 12, pushing the cylinder piston 2 to move upward. The cylinder head 4 leaves the alignment groove 33. At this time, the drain channel of the mounting base 14 is opened, and the accumulated water is discharged through the drain groove 32. When it is necessary to close the drain channel, the air source is cut off, the air pressure in the cylinder chamber disappears, the spring 7 pushes the cylinder piston 2 to move downward, and the cylinder head 4 is tightly fitted with the inner hole of the alignment groove 33, thus closing the drain channel. At the same time, the water resistance value fixed at the rear of the mounting base 14 through the water resistance mounting hole 16 can monitor the water resistance value in real time, providing important data support for wafer electroplating quality control.

[0046] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An integrated device for water inlet, drainage, and detection, comprising a mounting base (14) for support, a connecting channel (13) fixedly disposed at the center of the side end face of the mounting base (14), and a water resistance mounting hole (16) opened on the side of the rear end face of the mounting base (14), characterized in that: Drain connector (3), the drain connector (3) is fixedly installed at the front of the mounting base (14), the drain connector (3) is used for drainage and flow guidance; The cylinder body (1) is threaded to the rear of the drain connector (3). Two sets of air pipe connectors (12) for guiding air are provided on the upper end face of the cylinder body (1), and a piston rod sealing ring (9) is provided on the inner end face of the cylinder body (1) near the front opening. The guide device (15) is sealed and slidably disposed inside the cylinder body (1), and the front part of the guide device (15) is slidably disposed inside the drain connector (3). The guide device (15) is used to open and close the drain connector (3).

2. The integrated inlet / outlet and detection device according to claim 1, characterized in that: The guide device (15) includes a cylinder piston (2), two sets of cylinder piston sealing rings (10) are fixedly snapped onto the side end face of the cylinder piston (2), and a cylinder head (4) is provided at the center of the front end face of the cylinder piston (2). A first O-ring (8) is fixedly snapped onto the front end face of the cylinder head (4). A spring (7) is provided at the center of the rear end face of the cylinder piston (2), and a cylinder rear cover (5) is fixedly provided at the rear end face of the spring (7). A second O-ring (11) is fixedly snapped onto the side end face of the cylinder rear cover (5), and a retaining ring (6) is provided at the rear of the cylinder rear cover (5).

3. The integrated inlet / outlet and detection device according to claim 2, characterized in that: The drain connector (3) includes a connector housing (31), a threaded groove (34) is provided at the bottom of the inner end face of the connector housing (31), an alignment groove (33) is provided at the top of the inner end face of the connector housing (31), and drain grooves (32) are provided at equal intervals on the side end face of the connector housing (31).

4. The integrated inlet / outlet and detection device according to claim 3, characterized in that: The cylinder body (1) is threadedly connected to the rear of the connector housing (31) via the threaded groove (34).

5. The integrated inlet / outlet and detection device according to claim 3, characterized in that: The piston rod is integrally formed at the front of the cylinder piston (2), and the piston rod is sealed and slidably engaged with the piston rod sealing ring (9).

6. The integrated inlet / outlet and detection device according to claim 3, characterized in that: The cylinder rear cover (5) is sealed and fixed to the rear part of the cylinder body (1) by the second O-ring (11), and the rear part of the cylinder body (1) is elastically fixed to the cylinder rear cover (5) by the snap ring (6).

7. The integrated inlet / outlet and detection device according to claim 3, characterized in that: The cylinder piston (2) is connected to the inner wall of the cylinder body (1) by two sets of cylinder piston sealing rings (10).

8. The integrated inlet / outlet and detection device according to claim 3, characterized in that: The cylinder head (4) seals the internal opening of the alignment groove (33) through the first O-ring (8).

Images