Hall magnetic sensor chip

Abstract

The invention discloses a Hall magnetic sensor chip, which comprises a magnetic conductive part and a magnetic induction part, the magnetic induction part is L-shaped, the magnetic conductive part comprises a first magnetic conductive part which is arranged on one side of the magnetic induction part, and a second magnetic conductive part which is arranged on the other side of the magnetic induction part. The magnetic induction part comprises a first magnetic induction area, a second magnetic induction area, a third magnetic induction area between the first magnetic induction area and the second magnetic induction area, a first electrode and a second electrode, wherein the first electrode and the second electrode are arranged at the end of the L-shaped magnetic induction part, and working voltage is applied to the magnetic induction part through the first electrode and the second electrode. The L-shaped integrated magnetic induction part is arranged, so that the purpose of manufacturing the 3d Hall magnetic sensor chip in an integrated, miniaturized and low-cost manner is achieved.

Description

Technical Field

[0001] This application relates to the field of magnetic field distribution detection technology, specifically to a Hall magnetic sensor chip. Background Technology

[0002] Existing 3D Hall technology mainly involves the discrete integration of multiple packaged sensor chips with orthogonal mounting of the sensing axes, or the acquisition of three-dimensional signals by mounting three Hall chips on three sides and packaging them into a single device. These technologies suffer from problems such as mounting errors, low integration, low space utilization, large size, high manufacturing difficulty, and high cost.

[0003] In addition, current planar 3D technology uses magnetic conductors to twist the direction of previously undetectable parallel magnetic fields through the edge region. The mainstream technical solutions are roughly divided into two types: differential and non-differential. The differential solution requires more Hall magnetic sensor chips, and its corresponding module is larger. The non-differential solution requires the detection of magnetic fields in three directions and requires at least three Hall sensors placed in space. At least two of the Hall sensors need to deflect the magnetic fields in different directions on the plane through at least two magnetic conductors. This architecture has low space utilization and poor practicality. Furthermore, because the deflection effect of the magnetic conductors requires a considerable size to achieve a good effect, it is difficult to reduce its size.

[0004] Therefore, it is necessary to improve existing 3D Hall magnetic sensor chips. Summary of the Invention

[0005] To overcome the above-mentioned shortcomings, this application proposes a Hall magnetic sensor chip that can achieve integration, miniaturization, and reduce the manufacturing cost of 3D Hall chips.

[0006] To achieve the above objectives, this application adopts the following technical solution:

[0007] A Hall effect magnetic sensor chip, comprising:

[0008] The magnetically conductive part and the magnetically inductive part, wherein the thickness of the magnetically conductive part is between 20 and 200 micrometers;

[0009] The magnetic induction part is L-shaped, and the magnetically conductive part includes a first magnetically conductive part, which is disposed on one side of the magnetic induction part.

[0010] The magnetic induction unit includes a first magnetic induction region, a second magnetic induction region, a third magnetic induction region between the first magnetic induction region and the second magnetic induction region, and a first electrode and a second electrode disposed at the end of the L-shaped magnetic induction unit. A working voltage is applied to the magnetic induction unit through the first electrode and the second electrode.

[0011] Preferably, the first magnetically conductive portion protrudes from the magnetically inductive portion, and the width of the protruding portion is configured such that it is at least 0.3 times the width of the magnetically inductive portion in the same direction as the protruding portion.

[0012] Preferably, the Hall magnetic sensor chip includes a Hall signal electrode and a common ground electrode.

[0013] The common ground electrode is located at the center of the inner side of the L-shaped magnetic induction section.

[0014] The Hall signal electrode is disposed on the outside of the L-shaped magnetic induction part, and includes a first Hall signal electrode, a second Hall signal electrode, and a third Hall signal electrode.

[0015] The first Hall signal electrode is set along the x-direction, the second Hall signal electrode is set along the y-direction, and the third Hall signal electrode is set at a 45-degree angle to the x-direction, in order to detect the magnetic field in three directions.

[0016] Preferably, the third Hall signal electrode is disposed on the outer corner side of the L-shaped magnetic induction part and located on the side of the intercepted outer corner, with the interception angle between 35 and 55 degrees (e.g., 45°).

[0017] Preferably, the first magnetically conductive part is square, hexagonal, or octagonal, and its orthographic projection on the magnetically inductive part covers the central region of the L-shaped magnetically inductive region. The magnetically conductive body is constructed such that it partially covers the magnetically inductive region to which the first Hall signal electrode, the second Hall signal electrode, and the third Hall signal electrode are connected.

[0018] Preferably, the magnetic conductive part is provided with a gap, the width of which is between 10 and 200 micrometers.

[0019] Preferably, the Hall magnetic sensor chip further includes a second magnetic conductive part and a third magnetic conductive part, the second magnetic conductive part and the third magnetic conductive part are respectively disposed on the side of the magnetic induction part away from the first magnetic conductive part, and the second magnetic conductive part protrudes from the first magnetic induction area, and the third magnetic conductive part protrudes from the second magnetic induction area.

[0020] Preferably, the projections of the second magnetic conductive part and the third magnetic conductive part onto the first magnetic conductive part overlap with the first magnetic conductive part.

[0021] Preferably, the area of ​​the overlapping region is at least 10% of the area of ​​their respective magnetic induction regions.

[0022] Preferably, in the x-direction, the length of the third magnetically conductive part protruding from the second magnetic induction region is more than 0.2 times the length of the second magnetic induction region, and in the y-direction, the third magnetically conductive part does not protrude from the second magnetic induction region;

[0023] In the y-direction, the length of the second magnetically conductive part protruding from the first magnetic induction area is more than 0.2 times the length of the first magnetic induction area, and in the x-direction, the second magnetically conductive part does not protrude from the first magnetic induction area.

[0024] Beneficial effects

[0025] Compared with the prior art, the Hall magnetic sensor chip of this application optimizes the structure of the magnetic induction part into an integrated L-shape, and with the corresponding Hall signal electrode and the matching first magnetic part (or the first magnetic part, the second magnetic part and the third magnetic part), the 3D Hall magnetic sensor chip can be integrated into a space of conventional Hall size, so as to achieve the purpose of miniaturization and low cost of manufacturing small planar 3D Hall chips. Attached Figure Description

[0026] The accompanying drawings are provided to illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this application.

[0027] Figure 1 This is a schematic diagram of the structure of the magnetic induction unit according to an embodiment of this application;

[0028] Figure 2 This is a top view schematic diagram of the Hall magnetic sensor chip according to an embodiment of this application;

[0029] Figure 3 for Figure 2 A cross-sectional view at B-B' and a schematic diagram of the direction of the horizontal magnetic field lines;

[0030] Figure 4 This is a schematic diagram showing a first magnetically conductive part having a gap according to an embodiment of this application;

[0031] Figure 5 This is a schematic diagram showing that the first magnetically conductive part of another embodiment of this application has a gap;

[0032] Figure 6 This is a top view schematic diagram of a Hall magnetic sensor chip according to another embodiment of this application;

[0033] Figure 7 for Figure 6 A schematic diagram showing the first, second, and third magnetically conductive parts stacked on the magnetic induction unit;

[0034] Figure 8 This is a top view schematic diagram of a Hall magnetic sensor chip according to another embodiment of this application. Detailed Implementation

[0035] The above-described solution will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of this application. The implementation conditions used in the embodiments may be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not specified are generally those in routine experiments.

[0036] In this application, the terms "upper," "lower," "inner," "middle," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0037] As described in the background section, the mainstream technical solutions for planar 3D sensors can be roughly divided into two types: differential and non-differential. Differential solutions require more Hall sensors, resulting in larger modules. Non-differential solutions require magnetic fields in three directions, necessitating at least three Hall sensors placed in space. At least two of these Hall sensors need to deflect the magnetic fields in different directions on the plane through at least two magnetic conductors. This approach has low space utilization and poor practicality. Furthermore, the deflection effect of the magnetic conductors requires considerable size to achieve a good result, making it difficult to reduce the size of the sensor.

[0038] To this end, the applicant improves existing sensors and proposes a novel Hall magnetic sensor chip structure that integrates a 3D Hall magnetic sensor chip into a space the size of a conventional Hall sensor, achieving the goal of miniaturization and low-cost fabrication of a small planar 3D Hall chip.

[0039] The Hall effect magnetic sensor chip includes a magnetically conductive part and a magnetically sensing part. The magnetically sensing part is L-shaped. The magnetically conductive part includes a first magnetically conductive part disposed on one side of the magnetically sensing part. The magnetically sensing part includes a first magnetically sensing region, a second magnetically sensing region, a third magnetically sensing region located between the first and second magnetically sensing regions, and a first electrode and a second electrode disposed at the end of the L-shaped magnetically sensing part. An operating voltage is applied through the first and second electrodes. By designing and setting up an integrated L-shaped single magnetically sensing part in this way, miniaturization and reduced manufacturing costs are achieved. The area of ​​the first magnetically sensing region is the same as the area of ​​the second magnetically sensing region. The Hall magnetic sensor chip also includes three Hall signal electrodes and a common ground electrode. The common ground electrode is located at the center of the inner side of the L-shaped magnetic induction section. The Hall signal electrodes are located on the outer side of the L-shaped magnetic induction section and include a first Hall signal electrode, a second Hall signal electrode, and a third Hall signal electrode. The first Hall signal electrode is positioned along the x-direction, the second Hall signal electrode is positioned along the y-direction, and the third Hall signal electrode is positioned at a 45-degree angle to the x-direction (i.e., detecting the magnetic field in the z-direction), used to detect the magnetic field / magnetic field strength in three directions. The third Hall signal electrode is located at the outer corner of the L-shaped magnetic induction section, on the side of the intercepted outer corner, with an intercept angle between 35-55° (the angle with the x-direction, such as 45°). The direction of the magnetic field is changed by the magnetically conductive part.

[0040] Next, we will combine the appendix Figures 1-8 This application describes the Hall magnetic sensor chip proposed in this application.

[0041] like Figure 1 This is a schematic diagram of the structure of the magnetic induction unit according to an embodiment of this application; Figure 2 This is a top view schematic diagram of the Hall magnetic sensor chip according to an embodiment of this application.

[0042] The Hall effect magnetic sensor chip 100 includes a first magnetically conductive part 120 and a magnetic induction part 110. The magnetic induction part 110 is L-shaped. The first magnetically conductive part 120 is disposed on one side of the magnetic induction part 110. The magnetic induction part 110 includes a first magnetic induction region 111, a second magnetic induction region 112, a third magnetic induction region 113 between the first magnetic induction region 111 and the second magnetic induction region 112, and a first electrode 110a and a second electrode 110b disposed at the ends of the L-shaped magnetic induction part. A working voltage is applied through the first electrode 110a and the second electrode 110b, and current flows through the magnetic induction part 110. By designing and setting up an integrated L-shaped single magnetic induction part in this way, miniaturization and reduced manufacturing costs are achieved. The area of ​​the first magnetic induction region 111 is the same as the area of ​​the second magnetic induction region 112.

[0043] The first magnetically conductive portion 120 can be square, hexagonal, or octagonal. Its orthographic projection onto the magnetic induction portion 110 covers the central region of the L-shaped magnetic induction portion, and the magnetically conductive body is constructed such that it covers the portion of the magnetic induction area where the first Hall signal electrode, the second Hall signal electrode, and the third Hall signal electrode are connected. In other embodiments, the first magnetically conductive portion can be any positive even-numbered polygon. In this embodiment, the first magnetically conductive portion 120 is square, protruding from the magnetic induction portion, and is constructed such that the width of the protruding portion is more than 0.3 times the width of the magnetic induction portion in the same direction as the protruding portion. For example, if the first magnetically conductive portion 120 is square, its first side 120a and second side 120b (including a third side opposite to the first side 120a and a fourth side opposite to the second side 120b), the distance h2 (width of the protruding portion) of the first side 120a (which is parallel or approximately parallel to the y-direction) protruding from the edge of the magnetic induction portion 110 is the first... The width h1 of the magnetic induction region 111 is more than 0.3 times (e.g., 0.3 times, 0.4 times, 0.5 times) the width (length in the x direction), and the distance h3 (i.e., the width of the protruding part) of its second side 120b (which is parallel or approximately parallel to the x direction) protruding from the edge of the magnetic induction part 110 is more than 0.3 times (e.g., 0.3 times, 0.4 times, 0.5 times) the width (length in the y direction) of the width h4 of the second magnetic induction region 112. This design can reduce the interference of the first magnetic conductive part (also called the magnetic focusing part) on the z-axis Hall magnetic field.

[0044] The Hall magnetic sensor chip also includes three Hall signal electrodes and a common ground electrode DGND. The common ground electrode DGND is located at the center of the inner side of the L-shaped magnetic sensing part. The Hall signal electrodes are located on the outer side of the L-shaped magnetic sensing part and include a first Hall signal electrode 112a, a second Hall signal electrode 111a, and a third Hall signal electrode 113a. The first Hall signal electrode 112a is positioned relative to the common ground electrode along the y-direction, the second Hall signal electrode 111a is positioned relative to the common ground electrode along the x-direction, and the third Hall signal electrode 113a is positioned at a 45° angle relative to the common ground electrode to detect the magnetic field / magnetic field strength in three directions. The third Hall signal electrode 113a is located at the outer corner of the L-shaped magnetic sensing part and is located on the side of the intercepted outer corner, with the intercept angle between 35-55° (the angle with the x-direction, preferably 45°).

[0045] For a better option, see [link to previous section]. Figure 4 A slit 121 is provided on the first magnetically conductive part 120, the width of which is between 80 and 500 micrometers. The slit 121 can enhance the magnetic saturation threshold by appropriately cutting the first magnetically conductive part 120. To avoid signal errors along the z-axis due to magnetic saturation, the slit 121 is inclined on the first magnetically conductive part 120 (e.g., the slit 121 is inclined at a 45° angle to one side of the first magnetically conductive part 120).

[0046] As Figure 4 For variations of the implementation method, see [link to implementation details]. Figure 5 The gap 221 is L-shaped.

[0047] As Figure 1 For variations of the implementation method, see Figure 6 and Figure 7 The Hall magnetic sensor chip also includes a second magnetic conductive part 130 and a third magnetic conductive part 140, which are disposed on the same side of the magnetic induction part 110 away from the first magnetic conductive part 120.

[0048] The second magnetically conductive portion 130 protrudes from the first magnetic induction region 111, and the third magnetically conductive portion protrudes from the second magnetic induction region. Preferably, the projections of the second and third magnetically conductive portions onto the first magnetically conductive portion overlap with the first magnetically conductive portion, and the area of ​​the overlapping region accounts for at least 10% of the area of ​​their respective magnetic induction regions. Preferably, the materials of the first magnetically conductive portion 120, the second magnetically conductive portion 130, and the third magnetically conductive portion 140 are all selected from ferrite or nanocrystalline magnetic materials, and their thickness is between 20 and 200 micrometers. The first, second, and third magnetically conductive portions (collectively referred to as magnetically conductive portions) are non-conductive. They can be fabricated first and then bonded with adhesive, or they can be directly grown on the Hall wafer by photolithography sputtering to form the designed shape.

[0049] By setting a second and a third magnetically conductive part, which overlap with the first magnetically conductive part above them on the horizontal plane and are located in the central region of the Hall zone, the direction of the magnetic field in the horizontal direction is such that... Figure 7 As shown on the right, the combined effect of the upper and lower magnetic conductors (the first magnetic conductor 120, the second magnetic conductor 130, and the third magnetic conductor 140) significantly enhances the conversion efficiency from a horizontal magnetic field to a vertical magnetic field, thus increasing the sensitivity of the Hall device to a horizontal magnetic field. The sensitivity can be increased by 2-5 times.

[0050] As Figure 6 For variations of the implementation method, see Figure 8 In this configuration, the lower edge of the third magnetically conductive portion 140 does not protrude beyond the magnetic induction portion 110 in the y-direction, and the second magnetically conductive portion 130 does not protrude beyond the magnetic induction portion 110 in the x-direction (the orthographic projections of the second magnetically conductive portion 130 and the third magnetically conductive portion 140 onto the magnetic induction portion 110 are within the outline of the magnetic induction portion 110). In the x-direction, the length h8 by which the third magnetically conductive portion 140 protrudes beyond the second magnetic induction region is at least 0.2 times the length h6 of the second magnetic induction region, and in the y-direction, the third magnetically conductive portion 140 does not protrude beyond the second magnetic induction region.

[0051] In the y-direction, the length h7 of the second magnetically conductive part 130 protruding from the first magnetic induction region is more than 0.2 times the length h5 of the first magnetic induction region, and in the x-direction, the second magnetically conductive part does not protrude from the first magnetic induction region.

[0052] This application provides a planar 3D Hall chip, which includes the Hall magnetic sensor chip described above.

[0053] The Hall chip measures magnetic field strength. When the total 3D magnetic field strength or individual magnetic field components are needed, the following calculation process can be used.

[0054] Let the horizontal magnetic field strength be B. 水 Let the angle between the magnetic field and the x-axis be α, and the perpendicular magnetic field strength be Bz. Then:

[0055] Va=kaBsinα-k1Bz

[0056] Vb=kbBcosα-k2Bz

[0057] Vc = -k0Bz

[0058] Where ka, k1, k b k1 and k2 are the voltage induction coefficients of Hall A and Hall B to the horizontal (xy-axis) magnetic field and the vertical (z-axis) magnetic field, respectively, and k0 is the voltage induction coefficient of Hall C to the vertical component of the magnetic field. These coefficients can be obtained through calibration.

[0059] but:

[0060] V b / k b -V c k2 / k0k b =B 水 cosα=Bx,

[0061] V a / k a -V c k1 / k0k a =B 水 sinα=By,

[0062] -V c / k0=Bz

[0063] This gives us the three components of the magnetic field, and also the horizontal magnetic field:

[0064]

[0065] The total magnetic field strength is expressed by the formula: get.

[0066] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be used to limit the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit and essence of this application should be included within the scope of protection of this application.

Claims

1. A Hall magnetic sensor chip, characterized in that, include: Magnetic conductive part and magnetic induction part, The magnetic induction part is L-shaped, and the magnetically conductive part includes a first magnetically conductive part, which is disposed on one side of the magnetic induction part. The magnetic induction unit includes a first magnetic induction region, a second magnetic induction region, a third magnetic induction region between the first magnetic induction region and the second magnetic induction region, and a first electrode and a second electrode disposed at the end of the L-shaped magnetic induction unit. A working voltage is applied to the magnetic induction unit through the first electrode and the second electrode.

2. The Hall magnetic sensor chip as described in claim 1, characterized in that, The first magnetically conductive portion protrudes from the magnetically inductive portion, and is configured such that the width of the protruding portion is at least 0.3 times the width of the magnetically inductive portion in the same direction as the protruding portion.

3. The Hall magnetic sensor chip as described in claim 1 or 2, characterized in that, Including Hall signal electrodes and common ground electrodes, The common ground electrode is located at the center of the inner side of the L-shaped magnetic induction section. The Hall signal electrode is disposed on the outside of the L-shaped magnetic induction part, and includes a first Hall signal electrode, a second Hall signal electrode, and a third Hall signal electrode. The first Hall signal electrode is set along the x-direction, the second Hall signal electrode is set along the y-direction, and the third Hall signal electrode is set at a 45-degree angle to the x-direction, in order to detect the magnetic field in three directions.

4. The Hall magnetic sensor chip as described in claim 3, characterized in that, The third Hall signal electrode is disposed at the outer corner of the L-shaped magnetic induction part and is located on the side of the intercepted outer corner, with the interception angle between 35 and 55 degrees.

5. The Hall magnetic sensor chip as described in claim 3, characterized in that, The first magnetically conductive part is square, hexagonal or octagonal, and its orthographic projection on the third magnetic induction region covers the central region of the L-shaped magnetic induction region. The magnetically conductive body is constructed to connect the first Hall signal electrode, the second Hall signal electrode and the third Hall signal electrode to the corresponding first magnetic induction region and second magnetic induction region.

6. The Hall magnetic sensor chip as described in claim 1, characterized in that, The magnetic conductive part has a slit, the width of which is between 10 and 200 micrometers.

7. The Hall magnetic sensor chip as described in claim 1, characterized in that, The magnetically conductive part further includes a second magnetically conductive part and a third magnetically conductive part. The second magnetic conductive part and the third magnetic conductive part are respectively disposed on the side of the magnetic induction part away from the first magnetic conductive part, and the second magnetic conductive part protrudes from the first magnetic induction area, and the third magnetic conductive part protrudes from the second magnetic induction area.

8. The Hall magnetic sensor chip as described in claim 7, characterized in that, The orthographic projections of the second magnetic conductive part and the third magnetic conductive part onto the first magnetic conductive part overlap with the first magnetic conductive part.

9. The Hall magnetic sensor chip as described in claim 8, characterized in that, The area of ​​the overlapping region shall be at least 10% of the area of ​​its respective magnetic induction region.

10. The Hall magnetic sensor chip as described in claim 7, characterized in that, In the x-direction, the length of the third magnetically conductive part protruding from the second magnetic induction area is more than 0.2 times the length of the second magnetic induction area, and in the y-direction, the third magnetically conductive part does not protrude from the second magnetic induction area; In the y-direction, the length of the second magnetically conductive part protruding from the first magnetic induction area is more than 0.2 times the length of the first magnetic induction area, and in the x-direction, the second magnetically conductive part does not protrude from the first magnetic induction area.

Images