Solid-state laser radar, calibration method, electronic equipment and automobile

Abstract

The embodiment of the invention provides a solid-state laser radar, a calibration method, electronic equipment and an automobile, relates to the technical field of laser radars, and is used for improving the accuracy of a laser radar imaging result. The solid-state laser radar comprises a circuit board, a structural member, a transmitting unit, a receiving unit and a light guide structure, the structural member is located on one side of the circuit board. The transmitting unit comprises a laser chip and a transmitting end optical device, the laser chip is used for generating a detection laser beam, and the transmitting end optical device, the structural member and the circuit board are encircled to form a first cavity. The laser chip is located in the first cavity, and the transmitting end optical device is used for projecting a detection laser beam to a detection area. The receiving unit comprises a detector chip, and the detector chip is provided with a first detection area and a second detection area. The light guide structure is arranged on the structural member and is used for guiding stray light in the first cavity to the second detection area. The solid-state laser radar can be applied to automobiles and electronic equipment.

Description

Technical Field

[0001] This application relates to the field of lidar technology, and more particularly to a solid-state lidar, calibration method, electronic device, and automobile. Background Technology

[0002] LiDAR (Light Detection and Ranging) is a radar system that uses emitted laser beams to detect the position, velocity, and other characteristics of targets. It consists of a transmitter module and a receiver module. The transmitter module generates the detection laser beam that projects into the detection area, while the receiver module receives the echo laser beam reflected from the target object within the detection area. By analyzing the detection laser beam and the echo laser beam, parameters such as the distance, azimuth, height, velocity, attitude, and even shape of the target object in the detection area can be obtained, enabling the imaging of the detection area.

[0003] However, in actual use, the operating conditions of lidar can change due to factors such as the working environment and component aging. These changes can affect the accuracy of the lidar's imaging results of the detection area. Summary of the Invention

[0004] This application provides a solid-state lidar, a calibration method, an electronic device, and an automobile to improve the accuracy of lidar imaging results of the detection area.

[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:

[0006] In a first aspect, embodiments of this application provide a solid-state lidar, which includes a circuit board, a structural component, a transmitting unit, a receiving unit, and a light guide structure; wherein the structural component is fixedly mounted on one side of the circuit board.

[0007] The emitting unit includes a laser chip and an emitting optical device. The laser chip is electrically connected to a circuit board and is used to generate a probe laser beam. The emitting optical device is fixed to a structural component, and the structural component, circuit board, and emitting optical device together form a first cavity. The laser chip is located in the first cavity, and the emitting optical device is used to project the probe laser beam to a detection area located outside the first cavity.

[0008] The receiving unit includes a detector chip and a receiving optical device. The detector chip is electrically connected to a circuit board and has a first detection area and a second detection area. The receiving optical device is fixed to a structural component, and the structural component, circuit board, and receiving optical device together form a second cavity. The detector chip is located in the second cavity, and the receiving optical device is used to project the echo laser beam from the detection area onto the first detection area.

[0009] A light guide structure is installed on the structural component to guide stray light in the first cavity to the second detection area; wherein, the stray light is formed by the reflection of the detection laser beam by the emitting unit and the structural component.

[0010] In a solid-state lidar with the above structure, the detector chip is divided into a first detection area and a second detection area. The first detection area is used for imaging the detection region, and the second detection area is used for ranging and detecting stray light. A light-guiding structure is also provided to guide stray light from the first cavity to the second detection area. The stray light in the first cavity is formed by the reflection of the detection laser beam by the structure within the first cavity. Because the cavity surfaces of the emitting unit (such as the emitting optical device) and structural components in the first cavity have a certain reflectivity, during operation, most of the detection laser beam generated by the laser chip is projected to the detection region located outside the first cavity through the emitting optical device, while a small portion is reflected by the emitting unit and structural components, forming stray light within the first cavity.

[0011] The formation of stray light is unaffected by the object being measured in the detection area, and is only related to the transmitting unit and structural components of the solid-state lidar located in the first cavity. When the stray light in the first cavity is transmitted to the second detection area of ​​the detector chip through the light guide structure, the ranging result of the second detection area for the stray light is independent of the object being measured in the detection area, but is related to the operating conditions of the solid-state lidar. Changes in the operating conditions of the solid-state lidar will lead to changes in the stray light ranging result. Furthermore, changes in the operating conditions of the solid-state lidar affect both the stray light ranging result and the imaging result of the detection area, and these effects are correlated.

[0012] Therefore, the change in stray light ranging results can be used to characterize the change in the working conditions of the solid-state lidar; and when the solid-state lidar images the detection area, the imaging results of the first detection area can be calibrated based on the change in the stray light ranging results of the second detection area; that is, the deviation in the imaging results caused by the change in working conditions can be calibrated, thereby improving the reliability and accuracy of the solid-state lidar in imaging the detection area.

[0013] Furthermore, by adopting the above calibration scheme, it is not necessary to specify the specific factors affecting the changes in the operating conditions of the solid-state laser, or the influence of these factors on the imaging results. This allows for comprehensive calibration of various factors affecting the operating conditions of the solid-state lidar, thereby reducing calibration difficulty and improving the calibration efficiency of the solid-state lidar imaging results.

[0014] Furthermore, the first and second detection areas are different parts of the detection area within the same array chip. This design ensures good consistency in the operating conditions of the first and second detection areas, and the impact of changes in operating conditions on both areas is the same. Therefore, when using the changes in the ranging results of the second detection area for stray light to calibrate the imaging results of the first detection area on the detection region, a better calibration effect can be obtained.

[0015] In some embodiments, the light guide structure includes a connecting channel and a light guide element. The connecting channel is disposed on the structural element and connects a first cavity and a second cavity. The light guide element is connected to the structural element and is at least partially located in the second cavity.

[0016] The light guide has a light-inlet surface and a light-outlet surface. The light-inlet surface is opposite to the connecting channel, or located in the connecting channel, or located in the first cavity. The light guide receives stray light through the light-inlet surface. The light-outlet surface is directly opposite the second detection area, and stray light in the light guide is projected onto the second detection area through the light-outlet surface.

[0017] In the solid-state lidar provided in this application embodiment, the light guide structure is formed by combining a connecting channel and a light guide component, which can adapt to the structural characteristics of solid-state lidar and guide stray light while ensuring that the imaging function is not affected. It also has advantages such as simple structure and ease of implementation.

[0018] In some embodiments, the light guide includes a first part and a second part connected together; the first part extends in the connecting channel, and the light-incoming surface is the end face of the first part away from the second part; the second part is located in a second cavity and is above the detector chip; the light-outcoming surface is disposed on the second part. This design allows for a fixed connection between the light guide and the structural components through the cooperation of the first part and the connecting channel, ensuring the stability and reliability of the structure while guiding stray light.

[0019] In some embodiments, the structural component is provided with a light-blocking protrusion that contacts the edge portion of the light-incoming surface and blocks at least a portion of the contact position between the first part and the connecting channel. This design helps to prevent stray light in the first cavity from entering the second cavity through the contact position between the connecting channel and the first part, thus preventing stray light from being received by the first detection area of ​​the detector chip and affecting the detector chip's detection result of the echo laser beam (i.e., the imaging result). This helps to ensure the accuracy of the solid-state lidar's imaging result of the detection area.

[0020] In some embodiments, the light guide includes a second part, a first part, and a third part connected in sequence; the first part extends in the connecting channel; the second part is located in the second cavity and above the detector chip; the light-emitting surface is disposed on the second part; the third part is located in the first cavity, and the light-entering surface is disposed on the third part. This design allows for a further increase in the mating distance between the light guide and the connecting channel, thereby further improving the connection stability and reliability between the light guide and the structural components; additionally, it allows the light-entering surface of the light guide to be closer to the location where stray light is generated, which facilitates the transmission of more stray light through the light guide structure to the second detection area, improving the transmission efficiency of stray light; thus, it can improve the accuracy of stray light ranging results.

[0021] In some embodiments, a first concave-convex structure extending along the channel's through direction is provided on the channel wall of the connecting channel, and a second concave-convex structure is provided on the first portion; the first and second concave-convex structures are staggered. The staggered first and second concave-convex structures can form a labyrinth structure extending along the channel's through direction. This labyrinth structure design can extend the transmission path of stray light at the contact point between the first portion and the connecting channel, thereby achieving a light-blocking effect.

[0022] In some embodiments, the light guide is located in the second cavity, and the light-gathering surface of the light guide covers the channel opening that connects the connecting channel and the second cavity. In the solid-state lidar provided in this application embodiment, the light guide structure can adopt a variety of different structures to adapt to different application scenarios; and it has advantages such as simple structure and ease of implementation.

[0023] In some embodiments, the structural surface of the light guide includes a light-inlet surface, a light-outlet surface, and a connecting surface connecting the light-inlet surface and the light-outlet surface. The light guide also includes a light-shielding layer disposed on the outer side of the connecting surface. By providing a light-shielding layer on the outer side of the connecting surface, the light guide can achieve the effects of blocking and shielding light, preventing stray light from leaking out of the light guide and preventing external light from entering the interior of the light guide. This is beneficial to improving the accuracy of the solid-state lidar in measuring stray light distance, and thus improving the accuracy of the solid-state lidar imaging result calibration. At the same time, it helps to prevent stray light in the light guide from being received by the first detection area of ​​the detector chip, affecting the detector chip's detection result of the echo laser beam (i.e., the imaging result), thereby helping to ensure the accuracy of the solid-state lidar's imaging result of the detection area.

[0024] In some embodiments, the light guide structure further includes a first light-blocking structure, which is disposed between the light guide and the detector chip to seal and surround the stray light transmission area between the light-emitting surface and the second detection area. By setting the first light-blocking structure, the stray light transmission area between the light guide and the detector chip can be blocked and shielded; it can prevent stray light from leaking out and being received by the first detection area of ​​the detector chip during its transmission from the light guide to the second detection area in the detector chip, thus affecting the imaging results of the solid-state lidar; it can also prevent external light, such as the echo laser beam in the second cavity, from entering the second detection area of ​​the detector chip, thereby improving the accuracy of the detector chip in receiving and detecting stray light, improving the accuracy of the solid-state lidar in stray light ranging, and further improving the accuracy of the calibration of the solid-state lidar imaging results.

[0025] In some embodiments, the light guide structure includes a connecting channel and a light guide element. The connecting channel is disposed on the structural element and connects the first cavity and the second cavity. The light guide element is connected to the structural element and has a light guide channel. One end of the light guide channel is open and connected to the connecting channel, and the other end of the light guide channel is open and aligned with the second detection area in the detector chip. In the solid-state lidar provided in this application embodiment, the light guide structure can adopt various different structures to adapt to different application scenarios; and it has advantages such as simple structure and ease of implementation.

[0026] In some embodiments, the light guide structure includes a connecting channel and a light guide element. The connecting channel is disposed on the structural element and connects the first cavity and the second cavity. The light guide element contacts the structural element and the circuit board, and the light guide element, the structural element, and the circuit board together form the light guide channel, which connects the connecting channel and the second detection area in the detector chip. In the solid-state lidar provided in this application embodiment, the light guide structure can adopt a variety of different structures to adapt to different application scenarios; and it has advantages such as simple structure and ease of implementation.

[0027] In some embodiments, the detector chip has a detection region, and the first detection region and the second detection region are different parts of the detection region.

[0028] The detector chip includes a detector array and a readout circuit electrically connected to the detector array; the detector array includes multiple detector elements arranged in an array in the detection area, the multiple detector elements are arranged to form multiple detector rows and multiple detector columns, the detector row includes multiple detector elements arranged along the row direction, and the detector column includes multiple detector elements arranged along the column direction.

[0029] In the solid-state lidar provided in this application embodiment, the detector units in the first and second detection areas share the same readout circuit, and the circuit conditions are highly consistent, thereby making the calibration results more accurate when calibrating the imaging results of the solid-state lidar.

[0030] In some embodiments, the first detection area and the second detection area are different portions of the detection area arranged along the row direction; some detector units in the same detector row are located in the first detection area, and some detector units are located in the second detection area. With this design, the second detection area has detector units that are in the same detector row as any detector unit in the first detection area. That is, for any detector unit in the first detection area, there is always at least one detector unit in the second detection area that is connected to the same row scanning circuit as the detector unit in the first detection area, and is at the same distance from the column readout circuit; i.e., under the same circuit conditions. Using the aforementioned first and second detection areas enables more accurate calibration results when calibrating the imaging results of the solid-state lidar.

[0031] In some embodiments, the second detection area includes a plurality of first sub-detection areas arranged along the column direction, and the detector chip is further provided with an isolation structure between adjacent first sub-detection areas. This design is beneficial for partitioning and calibrating the imaging results of solid-state lidar, thereby further improving the accuracy of calibration; it is especially suitable for detector chips with large array size and non-ideal array consistency.

[0032] In some embodiments, the first detection area and the second detection area are spaced apart in the row direction. This design facilitates the isolation of the detector units in the first and second detection areas; furthermore, it provides an installation location for the first light-blocking structure when it is provided.

[0033] In some embodiments, the second detection region has fewer detector units in both the row and column directions than the first detection region, and the second detection region is embedded within the first detection region. This design helps to reduce the proportion of the second detection region in the detection region while ensuring the number of detector units in the first detection region, thereby improving the imaging effect of the solid-state lidar. Furthermore, the combination of the second and first detection regions forms a larger, regularly shaped array, which is beneficial for the fabrication of the detector chip and reduces the complexity of the manufacturing process.

[0034] In some embodiments, the second detection area has fewer detector units in both the row and column directions than the first detection area, and the second detection area is located outside the first detection area. This is beneficial for maintaining the integrity of the detector array in the first detection area, and also for the cooperation between the light guide structure and the detector chip; furthermore, the placement of the second detection area is more flexible and can adapt to different application scenarios.

[0035] In some embodiments, the laser in the laser chip is an edge-emitting laser or a vertical-cavity surface-emitting laser; and / or, the detector unit is an avalanche photodiode, a single-photon avalanche diode, or a silicon photomultiplier tube. The solid-state lidar provided in this application embodiment can employ various different types of lasers and detector units, adaptable to different solid-state lidar applications.

[0036] Secondly, this application also provides a calibration method for solid-state lidar as described in any of the above embodiments. The calibration method includes:

[0037] Obtain the reference ranging result of the solid-state lidar, as well as the current first ranging result and second ranging result;

[0038] The first ranging result is calibrated based on the difference between the second ranging result and the reference ranging result;

[0039] Among them, the reference ranging result is the ranging result of the second detection area of ​​the solid-state lidar on the stray light during the pre-calibration process; the first ranging result is the imaging result of the first detection area on the detection area obtained by the solid-state lidar; and the second ranging result is the ranging result of the second detection area on the stray light obtained by the solid-state lidar.

[0040] In the above calibration method, the imaging result of the first detection area on the detection area is calibrated by the change of stray light ranging result; that is, the deviation of the imaging result caused by the change of working conditions is calibrated, thereby improving the reliability and accuracy of the solid-state lidar in imaging the detection area.

[0041] Thirdly, embodiments of this application also provide an electronic device, which includes a processor and a solid-state lidar as described in any of the embodiments of the first aspect, wherein the solid-state lidar is electrically connected to the processor.

[0042] Fourthly, embodiments of this application also provide an automobile, which includes a vehicle body structure and a solid-state lidar as described in any of the embodiments of the first aspect, wherein the solid-state lidar is mounted on the vehicle body structure.

[0043] The technical effects that the electronic devices and automobiles provided in this application embodiment can achieve are the same as those that the solid-state lidar in any of the above embodiments can achieve, and will not be repeated here. Attached Figure Description

[0044] Figure 1 This is a schematic diagram of the structure of a solid-state lidar provided in an embodiment of this application;

[0045] Figure 2 for Figure 1Imaging principle diagram of solid-state lidar;

[0046] Figure 3 for Figure 1 A schematic diagram of the structure of a laser chip;

[0047] Figure 4 for Figure 1 A schematic diagram of the detector chip structure;

[0048] Figure 5 for Figure 1 A schematic diagram illustrating the division of the detection region in a detector chip;

[0049] Figure 6 for Figure 1 A schematic diagram of stray light propagation in a solid-state lidar system;

[0050] Figure 7 for Figure 1 A partial schematic diagram of the location of the light guide structure;

[0051] Figure 8 A schematic diagram illustrating the engagement of the first and second concave-convex structures provided in an embodiment of this application;

[0052] Figure 9 This is a schematic diagram of another solid-state lidar provided in an embodiment of this application;

[0053] Figure 10 for Figure 9 A partial schematic diagram of the location of the light guide structure;

[0054] Figure 11 This is a schematic diagram of the structure of another solid-state lidar provided in the embodiments of this application;

[0055] Figure 12 for Figure 11 Schematic diagram of the central light guide component;

[0056] Figure 13 This is a schematic diagram of another solid-state lidar provided in an embodiment of this application;

[0057] Figure 14 for Figure 13 A partial schematic diagram of the central light guide component;

[0058] Figure 15 A circuit diagram of the detector chip provided in an embodiment of this application;

[0059] Figure 16 This is a schematic diagram illustrating the division of the detection region in another detector chip provided in an embodiment of this application;

[0060] Figure 17This is a schematic diagram illustrating the division of the detection region in another detector chip provided in an embodiment of this application;

[0061] Figure 18 This is a schematic diagram illustrating the division of the detection region in another detector chip provided in an embodiment of this application;

[0062] Figure 19 A flowchart illustrating a calibration method provided in this application embodiment;

[0063] Figure 20 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application;

[0064] Figure 21 This is a schematic diagram of the structure of a car provided in an embodiment of this application. Detailed Implementation

[0065] The technical solutions of the embodiments of this application will now be described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them.

[0066] In the following embodiments of this application, the terms "first," "second," etc., are used for descriptive convenience only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0067] In the embodiments of this application, "upper", "lower", "left" and "right" are not limited to the orientation of the components in the accompanying drawings. It should be understood that these directional terms can be relative concepts, used for relative description and clarification, and can change accordingly depending on the orientation of the components in the accompanying drawings.

[0068] In the embodiments of this application, unless the context otherwise requires, the term "comprising" is interpreted as open and encompassing throughout the specification and claims, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "exemplarily," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this application. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0069] As used herein, “about,” “approximately,” or “approximately” includes the stated value and the average value within an acceptable range of deviation from the given value, wherein the acceptable range of deviation is determined by a person skilled in the art taking into account the measurement under discussion and the error associated with the measurement of the given quantity (i.e., the limitations of the measurement system).

[0070] As used herein, “parallel,” “perpendicular,” and “equal” include the described situation and situations that are similar to the described situation, within an acceptable range of deviation, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, “parallel” includes absolute parallelism and approximate parallelism, where an acceptable range of deviation for approximate parallelism may be, for example, within 5°; “perpendicular” includes absolute perpendicularity and approximate perpendicularity, where an acceptable range of deviation for approximate perpendicularity may also be, for example, within 5°; “equal” includes absolute equality and approximate equality, where an acceptable range of deviation for approximate equality may be, for example, a difference between the two equals being less than or equal to 5% of either one.

[0071] It should be understood that when a layer or element is referred to as being on another layer or substrate, it can mean that the layer or element is directly on the other layer or substrate, or that there is an intermediate layer between the layer or element and the other layer or substrate.

[0072] Exemplary embodiments are described in this application with reference to cross-sectional views and / or plan views and / or equivalent circuit diagrams, which are idealized exemplary drawings. In the drawings, the thickness of layers and regions is enlarged for clarity. Therefore, variations in shape relative to the drawings are contemplated due to, for example, manufacturing techniques and / or tolerances. Thus, exemplary embodiments should not be construed as being limited to the shapes of the regions shown herein, but rather include shape deviations due to, for example, manufacturing processes. For example, etched regions shown as rectangular would typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to show the actual shapes of the regions of the device, nor are they intended to limit the scope of the exemplary embodiments.

[0073] This application provides a solid-state lidar, such as... Figure 1 As shown, the solid-state lidar 1 includes a circuit board 4, a structural component 15, a transmitting unit 2, a receiving unit 3, and a light guiding structure 7. The circuit board 4, also known as a printed circuit board (PCB), is a board-shaped structure that carries electronic components. This board-shaped structure also integrates a circuit structure adapted to the solid-state lidar 1.

[0074] The structural component 15 is fixedly mounted on one side of the circuit board 4 and has a first through cavity and a second through cavity arranged side by side in the first direction X. Both the first through cavity and the second through cavity penetrate the structural component 15 along the second direction Y. The first direction X is parallel to the circuit board 4, and the second direction Y is perpendicular to the circuit board 4. The first direction X and the second direction Y are perpendicular to each other. The structural component 15 can be made of materials with certain strength and protective properties, such as metal or plastic. It can be a single-piece structure or a combination of at least two separate structures.

[0075] When structural component 15 is fixedly connected to circuit board 4, circuit board 4 blocks the openings of the first and second through-cavities near circuit board 4. The openings of the first and second through-cavities away from circuit board 4 are the first opening and the second opening, respectively. The first and second openings face the same side. The first through-cavity communicates with the outside through the first opening, and the second through-cavity communicates with the outside through the second opening. The first and second through-cavities are used to install the transmitting unit 2 and the receiving unit 3, respectively (see the description below).

[0076] Please continue to refer to this. Figure 1 The transmitting unit 2 is installed in the first through cavity and includes a laser chip 5, a driver chip 6, and a transmitting optical device 17. Among them, such as... Figure 3 As shown, the laser chip 5 is an array chip with a laser array 51. The laser array 51 includes multiple lasers 53 arranged in an array. The lasers 53 can be laser diodes (LDs), vertical-cavity surface-emitting lasers (VCSELs), or edge-emitting lasers (EELs), etc., devices capable of generating laser beams. Each laser 53 in the laser array 51 can generate a probe laser beam P1 when it is working (please refer to...). Figure 2 The area where the laser array 51 in the laser chip 5 is located is also called the light source area 52. From another perspective, the laser array 51 is set in the light source area 52.

[0077] The driver chip 6 integrates a driving circuit for controlling the operation of the laser array 51 in the laser chip 5. Both the laser chip 5 and the driver chip 6 are electrically connected to the circuit board 4. For example, the laser chip 5 and the driver chip 6 can be mounted on the circuit board 4 using surface mount technology (SMT). Both the laser chip 5 and the driver chip 6, electrically connected to the circuit board 4, are located in a first through-cavity, and the driver chip 6 controls the operation of the laser chip 5 through the circuit structure on the circuit board 4.

[0078] like Figure 1 As shown, the emitting optical device 17 in the emitting unit 2 is fixedly mounted on the structural component 15 and is located in the first through cavity. The emitting optical device 17, located in the first through cavity, is situated on the light-emitting side of the laser chip 5 and blocks the first opening. The structural component 15, the circuit board 4, and the emitting optical device 17 together form a first cavity 16, in which the laser chip 5, the driver chip 6, and the emitting optical device 17 in the emitting unit 2 are all located. The structural component 15 and the circuit board 4 forming the first cavity 16, along with the emitting unit 2, are generally referred to as the emitting module.

[0079] Please also refer to Figure 1 and Figure 2 The probe laser beam P1 generated by the laser chip 5 illuminates the transmitting optical device 17. The transmitting optical device 17 projects the probe laser beam P1 onto the outside of the first cavity 16, illuminating the detection area of ​​the solid-state lidar 1. The transmitting optical device 17 may include a projection lens 18, which can collimate the probe laser beam P1 and adjust the light spot. The transmitting optical device 17 may include a diffusion structure 19, such as a homogenizer, diffraction grating, and microlens array, which can achieve a homogenizing effect by diffusing the probe laser beam P1 through the diffusion structure 19.

[0080] As can be seen from the above description, the transmitting unit 2 can generate a detection laser beam P1 that illuminates the detection area of ​​the solid-state lidar 1. When the detection laser beam P1 illuminates the object being measured in the detection area, it is reflected by the object to form an echo laser beam P2, which is received and detected by the receiving unit 3.

[0081] Please continue to refer to this. Figure 1 In the solid-state lidar 1 provided in this application embodiment, the receiving unit 3 is installed in the second through cavity and includes a detector chip 10 and a receiving optical device 12. The detector chip 10 is electrically connected to the circuit board 4. For example, the detector chip 10 can be mounted on the circuit board 4 using SMT technology.

[0082] In this embodiment, as Figure 4As shown, the detector chip 10 is an array chip with a detector array 110. The detector array 110 includes multiple detector units 111 arranged in an array. The detector units 111 can be photodetectors such as charge-coupled devices (CCDs), avalanche photodiodes (APDs), single-photon avalanche diodes (SPADs), and silicon photomultipliers (SiPMs). Each detector unit 111 in the detector array 110 can convert optical signals into electrical signals to achieve the purpose of receiving and detecting incident light. The area where the detector array 110 is located in the detector chip 10 is also called the detection region 120. From another perspective, the detector array 110 is set in the detection region 120.

[0083] like Figure 1 As shown, the receiving optical device 12 in the receiving unit 3 is fixedly mounted on the structural member 15 and is located in the second through cavity. The receiving optical device 12, located in the second cavity 11, is situated on the light-incoming side of the detector chip 10 and blocks the second opening. The structural member 15, the circuit board 4, and the receiving optical device 12 together form the second cavity 11, and both the detector chip 10 and the receiving optical device 12 in the receiving unit 3 are located in the second cavity 11. The structural member 15 portion forming the second cavity 11, the circuit board 4 portion, and the receiving unit 3 are generally collectively referred to as the receiving module.

[0084] Please also refer to Figure 1 and Figure 2 The receiving optical device 12 is used to project signal light from different positions outside the second cavity 11, such as echo laser beams P2 at different positions in the detection area, onto different positions in the detection area 120 of the detector chip 10, that is, onto different detector units 111 in the detector array 110. The receiving optical device 12 may include an imaging lens 14, which can realize functions such as focusing the echo laser beam P2 and adjusting the light spot. The receiving optical device 12 may include a filter 13, which is used to allow the echo laser beam P2 to pass normally and block stray light outside the spectral band of the echo laser beam P2 from passing through. It can be seen that by setting a filter 13 in the receiving optical device 12, stray light outside the echo laser beam P2 can be avoided, thereby improving the accuracy of the detection results of the echo laser beam P2 by the detector chip 10.

[0085] like Figure 1 and Figure 2As shown, when the solid-state lidar 1 provided in this embodiment is working, the control transmitting unit 2 generates a detection laser beam P1 projected onto the detection area of ​​the solid-state lidar 1. After the detection laser beam P1 illuminates the object being measured in the detection area, it is reflected to form an echo laser beam P2. The receiving unit 3 is used to receive and detect the echo laser beam P2. By calculating the time difference between the emitted detection laser beam P1 and the detected echo laser beam P2, the time of flight (TOF) of the laser beam can be obtained. The distance information related to the object being measured in the detection area can be obtained through this time of flight, thus achieving the purpose of ranging. By combining the ranging results of different detector units 111 in the detector chip 10, three-dimensional point cloud data in the detection area can be obtained, thus achieving the purpose of imaging the detection area.

[0086] However, in the actual use of the solid-state lidar 1, due to changes in the operating environment and device aging, the operating conditions of the solid-state lidar 1 may change, such as changes in temperature, humidity, air pressure, illumination, and operating voltage. These changes in operating conditions will cause deviations in the ranging results of the detector unit 111 in the detector chip 10, thereby affecting the reliability and accuracy of the solid-state lidar 1 in imaging the detection area.

[0087] To improve the above problems, such as Figure 5 As shown, the solid-state lidar 1 provided in this embodiment divides the detection area 120 in the detector chip 10 into a first detection area 121 and a second detection area 122. The first detection area 121 and the second detection area 122 are different parts of the detection area 120, each including a number of detector units 111. The detector units 111 in the first detection area 121 are used to receive and detect the echo laser beam P2 projected from the receiving optical device 12, that is, to realize the function of imaging the detection area. The detector units 111 in the second detection area 122 are used to receive and detect stray light P3 (which can be referred to in the following description) to obtain the ranging result related to stray light P3. The ranging principle of stray light P3 is the same as the ranging principle of laser beam, and will not be repeated here.

[0088] Please also refer to Figure 1 , Figure 5 and Figure 6 The solid-state lidar 1 provided in this application embodiment is also provided with a light guide structure 7, which is disposed on the structural component 15 and is used to guide stray light P3 in the first cavity 16 to the second detection area 122 of the detector chip 10 in the second cavity 11.

[0089] The stray light P3 in the first cavity 16 mentioned in this article is formed by the reflection of the probe laser beam P1 by the structure in the first cavity 16. Since the cavity surfaces of the emitting unit 2 (such as the emitting optical device 17) and the structural component 15 in the first cavity 16 have a certain reflectivity, during operation, most of the probe laser beam P1 generated by the laser chip 5 will be projected to the detection area located outside the first cavity 16 through the emitting optical device 17, and a small portion will be reflected by the emitting unit 2 and the structural component 15, forming stray light P3 in the first cavity 16.

[0090] The formation of stray light P3 is unaffected by the object being measured in the detection area, and is only related to the emitting unit 2 and structural component 15 in the first cavity 16 of the solid-state lidar 1. When the stray light P3 in the first cavity 16 is transmitted to the second detection area 122 of the detector chip 10 through the light guide structure 7, the ranging result of the detector unit 111 in the second detection area 122 for the stray light P3 is unrelated to the object being measured in the detection area, but is related to the operating conditions of the solid-state lidar 1. Changes in the operating conditions of the solid-state lidar 1 will lead to changes in the ranging result for stray light P3. Therefore, changes in the ranging result for stray light P3 can be used to characterize changes in the operating conditions of the solid-state lidar 1. Changes in the operating conditions of the solid-state lidar 1 affect both the ranging result for stray light P3 and the imaging result of the detection area, and the effects on both are correlated.

[0091] Based on the above characteristics, in the solid-state lidar 1 provided in this application embodiment, the ranging result of the detector unit 111 in the second detection area 122 for the stray light P3 is calibrated according to the change in the ranging result of the detector unit 111 in the second detection area 122 for the measured object in the detection area, that is, the imaging result of the first detection area 121 for the detection area is calibrated. This design enables the solid-state lidar 1 to calibrate the imaging result deviation caused by changes in operating conditions when imaging the detection area, thereby improving the reliability and accuracy of the imaging result of the solid-state lidar 1 for the detection area.

[0092] Furthermore, the solid-state lidar 1 provided in this embodiment utilizes the change in the ranging result of stray light P3 to characterize the change in the operating conditions of the solid-state lidar 1, and uses this as a reference to calibrate the impact of the change in operating conditions on the imaging results of the solid-state lidar 1. By adopting the above scheme, it is possible to achieve comprehensive calibration of various factors affecting the changes in operating conditions without needing to clearly define the specific factors influencing the changes in operating conditions and the influence law of these specific factors on the imaging results. This helps to reduce the calibration difficulty and improve the calibration efficiency of the imaging results of the solid-state lidar 1.

[0093] Furthermore, the detector unit 111 used for imaging the detection area is located in the first detection region 121, and the detector unit 111 used for ranging stray light P3 is located in the second detection region 122. Both the first detection region 121 and the second detection region 122 are located in the receiving unit 3 and are different parts of the detection region 120 in the same array chip. The operating conditions of the detector units 111 in the first detection region 121 and the second detection region 122 are consistent, and changes in operating conditions have the same effect on the detector units 111 in the first detection region 121 and the second detection region 122. Therefore, when using the change in the ranging result of the detector unit 111 in the second detection region 122 for stray light P3 to calibrate the imaging result of the detector unit 111 in the first detection region 121 for the detection area, a better calibration effect can be obtained.

[0094] In this embodiment, as Figure 1 and Figure 7 As shown, the light guiding structure 7 in the solid-state lidar 1 includes a connecting channel 8 and a light guide component 9. The connecting channel 8 is disposed between the first cavity 16 and the second cavity 11, serving to connect the first cavity 16 and the second cavity 11. The connecting channel 8 is a straight channel formed by the opening slot on the structural component 15 and the circuit board 4. This straight channel extends along a first direction X, which is the channel penetration direction of the connecting channel 8. The two ends of the connecting channel 8 in the first direction X are a first channel opening that penetrates the first cavity 16 and a second channel opening that penetrates the second cavity 11, respectively.

[0095] The light guide 9 is a waveguide structure used to transmit stray light P3, partly located in the connecting channel 8 and partly located in the second cavity 11; that is, the structural member 15 extends from the second cavity 11 into the connecting channel 8 through the second channel opening. In this paper, the portions of the light guide 9 located in the connecting channel 8 and the second cavity 11 are defined as the first portion 96 and the second portion 97, respectively, and the first portion 96 and the second portion 97 are connected.

[0096] The first part 96 extends along the first direction X in the connecting channel 8, including a mounting part 94 and a connecting part 95 connected in the first direction X. The connecting part 95 is closer to the second part 97 than the mounting part 94, and the mounting part 94 extends deeper into the connecting channel 8 from the opening of the second channel than the connecting part 95. In the first part 96, the mounting part 94 is thicker and the connecting part 95 is thinner. It should be noted that the thickness of the structure in this document refers to the size of the structure in the direction perpendicular to the length extension; for the first part 96 in this embodiment, the thickness refers to the size of the first part 96 in the direction perpendicular to the first direction X. The thicker mounting part 94 in the first part 96 is press-fitted with the connecting channel 8, and the light guide 9 and the structural member 15 are fixedly connected through the press-fit of the mounting part 94 and the connecting channel 8. In some other embodiments, the thicker mounting portion 94 in the first part 96 has a clearance fit or transition fit with the connecting channel 8, and the light guide 9 and the structural component 15 are fixedly connected by adhesive, raised groove structure, or threaded structure provided between the mounting portion 94 and the connecting channel 8. Therefore, it can be seen that in this embodiment, the light guide 9 can be fixedly connected to the structural component 15 through the fit between the first part 96 and the connecting channel 8.

[0097] Please continue to refer to this. Figure 7 The end face of the mounting portion 94 away from the connecting portion 95 in the first direction X is the light-incoming surface 91 of the light guide 9, which is exposed in the connecting channel 8. Stray light P3 from the first cavity 16 enters the connecting channel 8 through the first channel opening, and the light-incoming surface 91 of the light guide 9 allows the stray light P3 in the connecting channel 8 to enter the light guide 9. The end face of the mounting portion 94 opposite to the light-incoming surface 91 in the first direction X is the connecting end face; the thinner connecting portion 95 in the first part 96 is connected to the connecting end face of the mounting portion 94 and is located at a higher position away from the circuit board 4 along the second direction Y of the connecting end face. The connecting portion 95 extends from the mounting portion 94 in the connecting channel 8 along the first direction X to a position flush with the second channel opening; that is, with the support of the mounting portion 94, there is a certain gap between the connecting portion 95 and the circuit board 4, and the connecting portion 95 is suspended at a certain height above the circuit board 4.

[0098] The second portion 97 is connected to the end of the connecting portion 95 away from the mounting portion 94, and its thickness is the same as or equivalent to that of the connecting portion 95. The second portion 97 extends from the first portion 96 along the first direction X toward the side where the detector chip 10 is located. When it extends to a position directly above or near directly above the detector chip 10, the second portion 97 bends toward the side of the second direction Y that is closer to the detector chip 10, until the end face of the second portion 97 away from the first portion 96 is directly opposite the second detection area 122 in the detector chip 10. The end face of the second portion 97 may contact the surface of the detector chip 10, or it may maintain a certain gap with the surface of the detector chip 10. In some other embodiments, the second portion 97 may start from the first portion 96 and extend along the first direction X toward the detector chip 10 while simultaneously extending along the second direction Y toward the detector chip 10, until the end face of the second portion 97 away from the first portion 96 is directly opposite the second detection area 122 in the detector chip 10.

[0099] The end face of the second part 97 is the light-emitting surface 92 of the light guide 9. As can be seen from the above description, the light-emitting surface 92 is positioned directly opposite the second detection area 122 in the detector chip 10. Stray light P3 in the light guide 9 can be emitted through the light-emitting surface 92 and illuminate the second detection area 122. The detector unit 111 in the second detection area 122 can receive and detect the stray light P3 emitted from the light-emitting surface 92 of the light guide 9, so as to achieve the purpose of ranging the stray light P3.

[0100] In this paper, the surface portion of the light guide 9 excluding the light-inlet surface 91 and the light-outlet surface 92 is referred to as the connecting surface, which is used to connect the light-inlet surface 91 and the light-outlet surface 92. In this embodiment, the connecting surface includes the outer peripheral surface of the mounting portion 94 and the connecting portion 95 in the first portion 96, the portion of the connecting end face of the mounting portion 94 not covered by the connecting portion 95, and the outer peripheral surface of the second portion 97. The light guide 9 may also include a light-shielding layer 93 disposed on the outside of the connecting surface. The light-shielding layer 93 is formed by coating or wrapping the outside of the connecting surface with a light-shielding material such as black glue. By providing a light-shielding layer 93 on the outside of the connecting surface, the light guide 9 can achieve the effect of blocking and shielding light, which can prevent stray light P3 from leaking out of the light guide 9 and also prevent external light from entering the interior of the light guide 9. This is beneficial to improving the accuracy of the detector chip 10 in receiving and detecting stray light P3, improving the accuracy of the solid-state lidar 1 in ranging stray light P3, and further improving the accuracy of the imaging result calibration of the solid-state lidar 1. At the same time, it helps to prevent stray light P3 in the light guide 9 from being received by the first detection area 121 of the detector chip 10, which would affect the detection result (i.e., imaging result) of the echo laser beam P2 by the detector chip 10, thus helping to ensure the accuracy of the imaging result of the solid-state lidar 1 on the detection area.

[0101] In this embodiment, the light guide structure 7 may further include a first light-blocking structure disposed between the light guide 9 and the detector chip 10. The first light-blocking structure is disposed around the outer periphery of the end of the second part 97, that is, around the outer periphery of the light-emitting surface 92 on the second part 97. The first light-blocking structure is also in contact with the surface of the detector chip 10 and surrounds the second detection area 122 in the detector chip 10. The first light-blocking structure is used to seal and surround the stray light P3 transmission area between the light guide 9 and the detector chip 10, thereby achieving the effect of blocking and shielding light; it can prevent stray light P3 from leaking out during the transmission of stray light P3 from the light guide 9 to the second detection area 122 in the detector chip 10, and can also prevent external light, such as the echo laser beam P2 in the second cavity 11, from entering the second detection area 122 of the detector chip 10, thereby improving the accuracy of the detector chip 10 in receiving and detecting stray light P3, improving the accuracy of the solid-state lidar 1 in ranging stray light P3, and further improving the accuracy of the imaging result calibration of the solid-state lidar 1. At the same time, it helps to prevent stray light P3 in the light guide 9 from being received by the first detection area 121 of the detector chip 10, which would affect the detection result (i.e., imaging result) of the echo laser beam P2 by the detector chip 10, thus helping to ensure the accuracy of the imaging result of the solid-state lidar 1 on the detection area.

[0102] As can be seen from the description of the light guide structure 7, the light guide structure 7 provided in the above embodiment can ensure that stray light P3 in the first cavity 16 can reach the second detection area 122 of the detector chip 10 through the light guide structure 7, preventing stray light P3 from entering the first detection area 121 and affecting the ranging result of the detector chip 10 for the echo laser beam P2, that is, affecting the imaging effect of the solid-state lidar 1. At the same time, it can also prevent other signal light, such as the echo laser beam P2 in the second cavity 11, from entering the second detection area 122 of the detector chip 10 and affecting the accuracy of the ranging result of the detector chip 10 for stray light P3. It can be seen that by setting the light guide structure 7, the solid-state lidar 1 can achieve isolation between the ranging detection of stray light P3 and the imaging function of the detection area, which is beneficial for the solid-state lidar 1 to improve the calibration accuracy while ensuring a good imaging effect.

[0103] Please continue to refer to this. Figure 7The structural component 15 can also have a light-blocking protrusion 151 extending into the connection channel 8 on the channel wall of the connection channel 8. The light-blocking protrusion 151 contacts the edge of the light-incoming surface 91 in the light guide 9 and blocks the contact position between the first part 96 and the connection channel 8. The blocking structure can partially or completely block the contact position between the first part 96 and the connection channel 8. The light-blocking protrusion 151 can achieve the light-blocking effect, which helps to prevent stray light P3 in the first cavity 16 from entering the second cavity 11 through the contact position between the connection channel 8 and the first part 96. This helps to prevent stray light P3 in the light guide 9 from being received by the first detection area 121 of the detector chip 10, thus affecting the detection result of the detector chip 10 on the echo laser beam P2, thereby helping to ensure the imaging effect of the solid-state lidar 1.

[0104] like Figure 8 As shown, in order to prevent stray light P3 in the first cavity 16 from entering the second cavity 11 through the contact position between the first part 96 and the connecting channel 8, a first concave-convex structure 20 and a second concave-convex structure 21 can be respectively provided on the channel wall of the connecting channel 8 and the first part 96. The first concave-convex structure 20 and the second concave-convex structure 21 are staggered to form a labyrinth structure extending in the first direction X. By adopting the labyrinth structure design, the transmission path of stray light P3 when it is transmitted at the contact position between the first part 96 and the connecting channel 8 can be extended, thereby achieving the effect of blocking light.

[0105] In some embodiments, the mounting portion 94 extends in the connecting channel 8 along a first direction X and extends away from the end face of the second portion 97 to a position flush with the first channel opening of the connecting channel 8; that is, the first portion 96 extends from the second portion 97 in the connecting channel 8 along the first direction X and extends to a position flush with the first channel opening of the connecting channel 8. The end face of the first portion 96 away from the second portion 97, i.e., the light-gathering surface 91, is flush with the structural surface of the structural member 15 at the location.

[0106] In this case, the structural member 15 may also be provided with a light-blocking protrusion 151 on the outside of the connecting channel 8. The light-blocking protrusion 151 contacts the edge of the light-incoming surface 91 and blocks the contact position between the first part 96 and the connecting channel 8 on the light-incoming side of the light-incoming surface 91. The connecting channel 8 and the first part 96 may also be provided with an interlocking first concave-convex structure 20 and a second concave-convex structure 21, referring to the above embodiment.

[0107] In the above embodiment, the connecting channel 8 is a straight channel extending along the first direction X, formed by the structural member 15 and the circuit board 4, and the end face of the second part 97 in the light guide 9 is used as a light-emitting surface 92. In this case, the mounting part 94 and the connecting part 95 of the first part 96 in the light guide 9, as well as the second part 97, adopt a design with different thicknesses, and the second part 97 is bent above the detector chip 10; however, the solid-state lidar 1 provided in the embodiments of this application is not limited to this.

[0108] For example, when the connecting channel 8 adopts the design in the above embodiment, and the end face of the second part 97 is made into a smooth surface 92, the thickness and setting position of the mounting part 94 and the second part 97 in the first part 96 can remain unchanged, and the connecting part 95 can be designed to gradually transition from large to small in thickness as it moves from the mounting part 94 toward the second part 97 along the first direction X; or, the thickness and setting position of the second part 97 can remain unchanged, and the first part 96 can be designed to be the same thickness as the mounting part 94 in the above embodiment along the first direction X.

[0109] For example, when the connecting channel 8 adopts the design in the above embodiment, the light guide 9 can be designed to have the same thickness as the mounting portion 94 in the above embodiment along the first direction X. The portion of the outer peripheral surface of the light guide 9 that faces the second detection area 122 in the detector chip 10 is used as the light-emitting surface 92. For the light guide 9 with the above structure, the light guide structure 7 can still provide a first light-blocking structure between the light guide 9 and the detector chip 10. The first light-blocking structure is provided around the outer periphery of the light-emitting surface 92 on the second portion 97, that is, it is provided on the outer peripheral surface of the light guide 9 opposite to the detector chip 10.

[0110] For example, the connecting channel 8 can be formed separately as structural component 15 and is located at a certain height from the circuit board 4. In this case, the light guide 9 can refer to the design of the light guide 9 in the above embodiment; or, the first part 96 of the light guide 9 can be designed with the same thickness as the mounting part 94 in the above embodiment along the first direction X, and the second part 97 bends from the first part 96 toward the detector chip 10 until the end face of the second part 97 away from the first part 96 is directly opposite the second detection area 122; the second part 97 can also be designed with the same thickness as the first part 96.

[0111] This application also provides another solid-state lidar 1, such as... Figure 9 and Figure 10As shown, the difference between the solid-state lidar 1 in this embodiment and the solid-state lidar 1 in the above embodiments lies in the light guide structure 7. In this embodiment, the light guide structure 7 includes a connecting channel 8 and a light guide 9. A portion of the light guide 9 is located in the second cavity 11, a portion is located in the connecting channel 8, and a portion is located in the first cavity 16; that is, the light guide 9 extends from the second cavity 11 into the first cavity 16 through the connecting channel 8. In this document, the portions of the light guide 9 located in the connecting channel 8, the second cavity 11, and the first cavity 16 are defined as the first portion 96, the second portion 97, and the third portion 98, respectively; the second portion 97, the first portion 96, and the third portion 98 are connected sequentially. The description of the second portion 97 can be referred to the description of the second portion 97 in the above embodiments. In this embodiment, the end face of the second portion 97 away from the first portion 96 is the light emitting surface 92, which is located directly above the second detection area 122 in the detector chip 10.

[0112] The first part 96 includes a mounting portion 94 and a connecting portion 95 connected in the first direction X. The mounting portion 94 is thicker, and the connecting portion 95 is thinner. The light guide 9 and the structural member 15 are fixedly connected through the cooperation of the mounting portion 94 and the connecting channel 8 in the first part 96. One end of the connecting portion 95 is connected to the mounting portion 94 in the first direction X, and the other end is connected to the second part 97; for details about the connecting portion 95, please refer to the description of the connecting portion 95 in the above embodiments.

[0113] The mounting portion 94 extends along the first direction X from the connecting portion 95 to a position flush with the first channel opening of the connecting channel 8. The third portion 98 is connected to the end face of the mounting portion 94 away from the connecting portion 95 along the first direction X. The thickness of the third portion 98 can be the same as or equivalent to that of the mounting portion 94. The end face of the third portion 98 away from the first portion 96 is the light-inlet surface 91 of the light guide 9. Stray light P3 in the first cavity 16 can enter the light guide 9 through the light-inlet surface 91, be transmitted in the light guide 9, and then be emitted from the light-outlet surface 92, and then projected onto the second detection area 122 of the detector chip 10. The detector unit 111 in the second detection area 122 can receive and detect the stray light P3 emitted from the light guide 9.

[0114] The light guide structure 7 may also include a light shielding layer 93 disposed on the outside of the connecting surface in the light guide 9. Here, the connecting surface includes the outer peripheral surface of the mounting part 94 and the connecting part 95 in the first part 96, the part of the connecting end surface of the mounting part 94 that is not covered by the connecting part 95, the outer peripheral surface of the second part 97, and the outer peripheral surface of the third part 98.

[0115] The connection channel 8 and the first part 96 can also be provided with an interlocking first concave-convex structure 20 and a second concave-convex structure 21, referring to the above embodiment.

[0116] In some embodiments, the first portion 96 includes a first connecting portion, a mounting portion 94, and a second connecting portion sequentially connected in a first direction X. The first connecting portion connects the second portion 97 and the mounting portion 94, and the second connecting portion connects the third portion 98 and the mounting portion 94. In this embodiment, the mounting portion 94 can be described with reference to the description of the mounting portion 94 in the above embodiments, and the first connecting portion and the second connecting portion in this embodiment can refer to the description of the connecting portion 95 in the above embodiments. Accordingly, the third portion 98 can be designed with the same thickness as the second connecting portion 95.

[0117] In some embodiments, the first portion 96 along the first direction X may be designed to be the same thickness as the mounting portion 94 in the above embodiments, and the third portion 98 may be designed to be the same thickness as the first portion 96.

[0118] In some embodiments, the connecting channel 8 can be formed separately as a structural member 15 and is disposed at a certain height from the circuit board 4. The first part 96, the second part 97, and the third part 98 of the light guide 9 can be designed with the same thickness as the mounting part 94 in the above embodiments.

[0119] This application also provides another solid-state lidar 1, such as Figure 11 and Figure 12 As shown, the difference between the solid-state lidar 1 in this embodiment and the solid-state lidar 1 in the above embodiment lies in the light guide structure 7. In this embodiment, the light guide structure 7 includes a connecting channel 8 and a light guide 9. The connecting channel 8 can be formed separately by the structural component 15 and is set at a certain height from the circuit board 4. All the light guides 9 are set in the second cavity 11. Here, the light guide 9 can refer to the description of the second part 97 in the above embodiment. The light guide 9 is connected to the structural component 15. The end face of the light guide 9 away from the structural component 15 is the light emitting surface 92. The end face of the light guide 9 close to the structural component 15 blocks the second channel opening of the connecting channel 8. The end face of the light guide 9 opposite to the second channel opening is divided into the light receiving surface 91 of the light guide 9. The stray light P3 in the first cavity 16 is transmitted to the light receiving surface 91 of the light guide 9 through the connecting channel 8, and then enters the light guide 9 through the light receiving surface 91. After being transmitted in the light guide 9, it is emitted from the light emitting surface 92 and then illuminates the second detection area 122 in the detector chip 10.

[0120] The light guide structure 7 may also include a light shielding layer 93 disposed on the outer side of the connecting surface in the light guide 9, where the connecting surface is the outer peripheral surface of the light guide 9.

[0121] In some embodiments, the light guide structure 7 further includes a second light blocking structure, which is disposed around the end of the light guide 9 near the structural member 15 and surrounds the outer periphery of the second channel opening, for sealing the mating position of the connecting channel 8 and the light-incoming surface 91, thereby sealing and surrounding the stray light P3 transmission area between the light guide 9 and the connecting channel 8.

[0122] This application also provides another solid-state lidar 1, such as... Figure 13 and Figure 14 As shown, the difference between the solid-state lidar 1 in this embodiment and the solid-state lidar 1 in the above embodiments lies in the light guide structure 7. In this embodiment, the light guide structure 7 includes a connecting channel 8 and a light guide element 9. The light guide element 9 is a tubular structure with a light guide channel 99, and the two ends of the light guide channel 99 are a third opening and a fourth opening, respectively. The light guide element 9 is connected to the structure. The third opening in the light guide channel 99 is opposite to the connecting channel 8, and is used to allow stray light P3 in the connecting channel 8 to enter the light guide channel 99. The fourth opening is directly opposite to the second detection area 122 in the detector chip 10, and is used to project the stray light P3 in the light guide channel 99 onto the second detection area 122.

[0123] In some embodiments, the light guide channel 99 can be formed by the light guide 9, the structural member 15 and the circuit board 4.

[0124] In the above embodiments, the connecting channels 8 are all straight channels extending along the first direction X, but the embodiments provided in this application are not limited to this. For example, the connecting channel 8 can also be a channel that bends and extends between the first cavity 16 and the second cavity 11, such as a serpentine channel. The light guide 9 can extend in the connecting channel 8 along the extension direction of the channel's through direction. Regarding other features of the light guide 9, adaptive adjustments can be made with reference to the above embodiments.

[0125] In the solid-state lidar 1 provided in this embodiment, the light guide structure 7 is used to guide stray light P3 in the first cavity 16 to the second detection area 122 of the detector chip 10 in the second cavity 11. The detector chip 10 is used to receive and detect the stray light P3 and the echo laser beam P2. Figure 4 As shown, the solid-state lidar 1 provided in this embodiment uses a detector chip 10 including a detector array 110. The detector array 110 includes multiple detector units 111 arranged in multiple rows and columns in the detection area 120. The detector array 110 arranged in multiple rows and columns includes multiple detector rows 130 and multiple detector columns 140. The detector rows 130 include multiple detector units 111 arranged along the row direction, and the detector columns 140 include multiple detector units 111 arranged along the column direction.

[0126] Please refer to Figure 15The detector chip 10 also includes a readout circuit 150, which is electrically connected to the detector array 110. The readout circuit 150 reads out the electrical signals of the detector units 111 in the detector array 110, i.e., reads out the detection results of the detector units 111. For example, the readout circuit 150 includes a row scanning circuit section 151 and a column readout circuit section 152. The row scanning circuit section 151 includes multiple row scanning circuits electrically connected to the detector rows 130 in the detector array 110. The column readout circuit section 152 is electrically connected to the detector columns 140 in the detector array 110 and includes multiple column readout circuits 150 electrically connected to the detector columns 140 in the detector array 110. When the detector chip 10 is operating, the row scanning circuits in the row scanning circuit section 151 are controlled to perform scanning according to scanning rules, thereby achieving the purpose of scanning the detector array 110 rows. When a row scanning circuit is turned on, the column readout circuit 150 in the column readout circuit section 152 can read the detection results of each detector unit 111 in the detector row 130 connected to the row scanning circuit; thus, by scanning the rows of the detector array 110, the purpose of reading out the detection results of the detector units 111 in the entire detector array 110 can be achieved.

[0127] As can be seen from the above description of the detector chip 10, in the solid-state lidar 1 provided in this application embodiment, the detection area 120 of the detector chip 10 is divided into a first detection area 121 and a second detection area 122.

[0128] In this embodiment, as Figure 5 and Figure 15 As shown, the first detection area 121 and the second detection area 122 in the detection area 120 are arranged along the row direction. That is, the first detection area 121 and the second detection area 122 are different parts of the detection area 120 arranged adjacent to each other in the row direction. Combining this with the above description of the detector array 110, it can be seen that in the detector array 110, some detector units 111 in adjacent detector columns 140 are located in the first detection area 121, and other detector units 111 in adjacent detector columns 140 are located in the second detection area 122. Some detector units 111 in the same detector row 130 are located in the first detection area 121, and other detector units 111 are located in the second detection area 122. The second detection area 122 has detector units 111 that are in the same detector row 130 as any detector unit 111 in the first detection area 121. In other words, for any detector unit 111 in the first detection area 121, there is always at least one detector unit 111 in the second detection area 122. This detector unit 111 is connected to the same row scanning circuit as the detector unit 111 in the first detection area 121, and is at the same distance from the column readout circuit 150; that is, it is under the same circuit conditions.

[0129] The detector chip 10 designed above ensures that the operating conditions of the detector units 111 in the first detection area 121 and the second detection area 122 are as similar as possible. This includes device characteristics such as device structure, readout circuit 150, connection relationship with readout circuit 150, and aging conditions; as well as environmental characteristics such as temperature, pressure, and humidity. This guarantees consistency in the operating conditions of the detector units 111 in the first and second detection areas 121 and ensures that the detector units 111 in the first and second detection areas 121 are affected by changes in operating conditions in the same way. With this design, when calibrating the imaging results of the detector units 111 in the first detection area 121 on the detection region using the changes in the ranging results of the stray light P3 measured by the detector units 111 in the second detection area 122, a better calibration effect can be achieved.

[0130] Furthermore, the detector chip 10 designed as described above can reduce the extent of modifications required to the detector chip 10. When the light guide structure 7 is designed with a first light-blocking structure, the first light-blocking structure can directly contact the detector unit 111 in the detector chip 10. When the detector chip 10 is working, the detector unit 111 in the area covered by the first light-blocking structure can be controlled to not work, or the detection results of the detector unit 111 in the area covered by the first light-blocking structure can be ignored.

[0131] In some embodiments, such as Figure 16 As shown, the first detection area 121 and the second detection area 122 in the detection area 120 are arranged at intervals along the row direction. That is, the detection area 120 also includes a detection area interval 123 located between the first detection area 121 and the second detection area 122. The detection area interval 123 extends along the column direction in the detection area 120 and has a certain width in the row direction. The first detection area 121, the detection area interval 123, and the second detection area 122 are different parts of the detection area 120 arranged sequentially in the row direction.

[0132] For ease of description, this paper defines the two sides of the detection interval 123 along the row direction as the first side and the second side, respectively. Figure 16 Taking the orientation shown as an example, the row direction is the horizontal direction, the first side is the right side of the detection zone interval 123, and the second side is the left side of the detection zone interval 123.

[0133] Please continue to refer to this. Figure 16The first detection area 121 is located on the first side of the detection area interval 123, including all detector units 111 on the first side, that is, including the detector units 111 in all detector columns 140 of the detector array 110 located on the first side. The second detection area 122 is located on the second side of the detection area interval 123, including all detector units 111 on the second side, that is, including the detector units 111 in all detector columns 140 of the detector array 110 located on the second side. The detector chip 10 does not have detector units 111 in the detection area interval 123, but the portion of the readout circuit 150 located in the first detection area 121 and the portion located in the second detection area 122 are still connected through the detection area interval 123. This design allows the detector units 111 in the first detection area 121 and the second detection area 122 to share the same readout circuit 150.

[0134] By setting a detection area interval 123 between the first detection area 121 and the second detection area 122, the detector chip 10 facilitates the isolation of the detector unit 111 in the first detection area 121 and the second detection area 122. On the other hand, it can provide an installation position for the first light-blocking structure when the first light-blocking structure is set.

[0135] In some embodiments, such as Figure 17 As shown, when the first detection area 121 and the second detection area 122 are different portions of the detection area 120 arranged in the row direction (including adjacent arrangement and spaced arrangement), the second detection area 122 can be further divided into multiple first sub-detection areas 1221 arranged in the column direction. Each first sub-detection area 1221 includes one or more detector elements 111 in the detector row 130. An isolation structure 22 can also be provided between the detector elements 111 in adjacent first sub-detection areas 1221. Correspondingly, the first detection area 121 is divided into multiple second sub-detection areas 1211 in the column direction, and the first sub-detection areas 1221 and the second sub-detection areas 1211 are aligned in the column direction. It should be noted that alignment in the column direction here means that the detector elements 111 contained in the first sub-detection area 1221 and the second sub-detection area 1211 belong to the same detector row 130 in the detector array 110.

[0136] This design facilitates the partitioned calibration within the first detection area 121. Specifically, by analyzing the variation in the ranging results of stray light P3 measured by detector units 111 in the first sub-detection area 1221, the ranging results of detector units 111 in the second sub-detection area 1211 (aligned in the column direction) measured by the object in the detection area are calibrated. This further improves the accuracy of the solid-state lidar 1 calibration. It is particularly suitable for detector chips 10 with large array sizes and non-ideal array consistency. Furthermore, by setting an isolation structure 22 between detector units 111 in adjacent first sub-detection areas 1221, mutual interference between detector units 111 in adjacent first sub-detection areas 1221 can be avoided, ensuring the accuracy of the solid-state lidar 1 calibration.

[0137] In some embodiments, such as Figure 18 As shown in sections (a) and (b), the second detection area 122 is a small region within the detection area 120, and the number of detector units 111 in both the row and column directions of the second detection area 122 is less than that of the first detection area 121. This design helps to reduce the proportion of the second detection area 122 in the detection area 120, while ensuring the number of detector units 111 in the first detection area 121, thereby improving the imaging effect of the solid-state lidar 1.

[0138] like Figure 18 As shown in section (a), the second detection region 122 can be embedded in the first detection region 121, forming a larger, regularly shaped array together. This design facilitates the fabrication of the detector chip 10 and reduces the complexity of the manufacturing process.

[0139] like Figure 18 As shown in section (b), the second detection area 122 can also be located outside the first detection area 121. This design helps maintain the integrity of the detector array 110 in the first detection area 121 and also facilitates the cooperation between the light guide structure 7 and the detector chip 10. At the same time, it makes the placement of the second detection area 122 more flexible. For example, the second detection area 122 can be placed at a position far away from the first detection area 121, which can adapt to different application scenarios.

[0140] This application also provides a calibration method for a solid-state lidar 1, which can be applied to the solid-state lidar 1 mentioned in the above embodiments, such as... Figure 19 As shown, the calibration method 100 includes:

[0141] Step S100: Obtain the reference ranging result of the solid-state lidar, as well as the current first ranging result and second ranging result.

[0142] The reference ranging result is the ranging result of the detector unit 111 in the second detection area 122 of the solid-state lidar 1 for stray light P3 during the pre-calibration process. Pre-calibration here refers to the calibration of the solid-state lidar 1 before the start of the current imaging task. During pre-calibration, it is necessary to calibrate the imaging results of the first detection area 121 on the detection region, and the ranging results of the second detection area 122 for stray light P3. Based on this, a correlation can be established between the ranging results of the solid-state lidar 1 for stray light P3 and the imaging results of the detection region; thus, when the ranging results for stray light P3 change, the imaging results of the detection region can be calibrated.

[0143] Pre-calibration needs to be performed under fixed operating conditions, such as the usage of the solid-state lidar 1 (corresponding to device aging and operating voltage fluctuations, etc.) and the surrounding environment (temperature, air pressure, light intensity, humidity, etc.). Pre-calibration can be performed before shipment, and the reference ranging results generated during pre-calibration are stored in a storage device for calibration reference. The reference ranging results can be the average value obtained by the solid-state lidar 1 through multiple tests during the pre-calibration process.

[0144] In step S100, the first ranging result is the imaging result of the detector unit 111 in the first detection area 121 on the detection area currently obtained by the solid-state lidar 1; the second ranging result is the ranging result of the detector unit 111 in the second detection area 122 on the stray light P3 currently obtained by the solid-state lidar 1.

[0145] For a solid-state lidar 1 capable of zonal calibration, the second detection area 122 includes multiple first sub-detection areas 1221, and the first detection area 121 includes multiple second sub-detection areas 1211. The reference ranging result in step S100 is the ranging result of the detector unit 111 in one first sub-detection area 1221 for stray light P3 during the pre-calibration process of the solid-state lidar 1. The second ranging result is the ranging result of the detector unit 111 in the same first sub-detection area 1221 for stray light P3 currently obtained by the solid-state lidar 1. The first ranging result is the imaging result of the detector unit 111 in the second sub-detection area 1211 aligned with the aforementioned first sub-detection area 1221 for the detection area currently obtained by the solid-state lidar 1.

[0146] Step S200: Based on the difference between the second ranging result and the reference ranging result, calibrate the first ranging result.

[0147] As described above regarding the solid-state lidar 1, changes in the ranging result of stray light P3 can characterize changes in the operating conditions of the solid-state lidar 1. By utilizing these changes in the ranging result of stray light P3, the imaging result of the detector unit 111 in the first detection area 121 can be calibrated. Therefore, in step S200, based on the difference between the second ranging result and the reference ranging result, it can be determined whether the current operating conditions of the solid-state lidar 1 have changed compared to the pre-calibrated operating conditions. When the current operating conditions of the solid-state lidar 1 change, the difference between the second ranging result and the reference ranging result can be used to calibrate the first ranging result, thereby improving the reliability and imaging accuracy of the solid-state lidar 1.

[0148] In some embodiments, for a solid-state lidar 1 capable of zone calibration, during the process of the readout circuit 150 in the detector chip 10 reading out the detection results in a line-scan manner, the imaging results of the first detection area 121 in the detector chip 10 can be calibrated simultaneously according to the steps S100 and S200 described above; after the detection results of the first detection area 121 are read out, the zone calibration of the first detection area 121 can also be completed synchronously. This design is beneficial to improving the calibration efficiency of the imaging results calibration of the solid-state lidar 1.

[0149] like Figure 20 As shown, this application embodiment also provides an electronic device 200, which can be a mobile phone, tablet computer, desktop computer, laptop computer, handheld computer, notebook computer, ultra-mobile personal computer (UMPC), netbook, as well as cellular phone, personal digital assistant (PDA), augmented reality (AR) device, virtual reality (VR) device, smart TV, game console, projection device, etc. This application embodiment does not impose any special restrictions on the specific type of the electronic device 200.

[0150] The electronic device 200 employs the solid-state LiDAR 1 mentioned in the above embodiments, which is electrically connected to the processor 210 in the electronic device 200. Through the solid-state LiDAR 1, the electronic device 200 can realize functions such as face recognition, distance detection, and human-computer interaction; in the electronic device 200 with a shooting function, the solid-state LiDAR 1 can realize functions such as image-assisted focusing and 3D modeling.

[0151] like Figure 21 As shown in the figure, this application embodiment provides a car 300, which can be used as a vehicle. Figure 21 The sedan shown can also be a sport utility vehicle (SUV), a multi-purpose vehicle (MPV), a truck, a bus, or an engineering vehicle, etc. In terms of energy type, the vehicle 300 can be an electric vehicle, a fuel vehicle, or a hybrid vehicle, such as a pure electric vehicle, a range-extended electric vehicle, a hybrid electric vehicle, a fuel cell vehicle, or a new energy vehicle. This application embodiment does not specifically limit the type of vehicle 300.

[0152] like Figure 21 As shown, the vehicle 300 includes a body structure 310 and the solid-state LiDAR 1 mentioned in the above embodiments. The solid-state LiDAR 1 is mounted on the body structure 310; it can be mounted at any location on the top, side, front, and rear of the body structure 310. For example, the solid-state LiDAR 1 can be mounted on the front bumper, door, roof, and rear bumper of the body structure 310. In the vehicle 300, one or more solid-state LiDARs 1 can be provided.

[0153] The Automotive 300 uses a solid-state lidar 1 to perform field-of-view detection and imaging of the vehicle's surrounding environment, thereby providing reference for driver control, assisted driving, automatic parking, and other functions.

[0154] The technical effects that the electronic device 200 and automobile 300 provided in this application embodiment can achieve are the same as those that the solid-state lidar 1 in any of the above embodiments can achieve, and will not be repeated here.

[0155] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A solid-state lidar, characterized in that, include: Circuit board; A structural component, which is fixedly mounted on one side of the circuit board; The transmitting unit includes a laser chip and a transmitting optical device. The laser chip is electrically connected to the circuit board and is used to generate a detection laser beam. The transmitting optical device is fixed on the structural component. The structural component, the circuit board, and the transmitting optical device together form a first cavity. The laser chip is located in the first cavity, and the transmitting optical device is used to project the detection laser beam to a detection area located outside the first cavity. The receiving unit includes a detector chip and a receiving optical device. The detector chip is electrically connected to the circuit board and has a first detection area and a second detection area. The receiving optical device is fixed on the structural component, and the structural component, the circuit board, and the receiving optical device together form a second cavity. The detector chip is located in the second cavity, and the receiving optical device is used to project the echo laser beam in the detection area onto the first detection area. as well as A light guide structure is disposed on the structural component and is used to guide stray light in the first cavity to the second detection area; The stray light is formed by the reflection of the detection laser beam by the emitting unit and the structural component.

2. The solid-state lidar according to claim 1, characterized in that, The light guide structure includes a connecting channel and a light guide component. The connecting channel is disposed on the structural component and connects the first cavity and the second cavity. The light guide is connected to the structural component and is at least partially located in the second cavity; The light guide has a light-inlet surface and a light-outlet surface. The light-inlet surface is opposite to the connecting channel, or located in the connecting channel, or located in the first cavity. The light guide receives stray light through the light-inlet surface. The light-emitting surface is directly opposite the second detection area, and stray light in the light guide is projected onto the second detection area through the light-emitting surface.

3. The solid-state lidar according to claim 2, characterized in that, The light guide includes a first part and a second part connected together; The first portion extends in the connection channel, and the light-receiving surface is the end face of the first portion away from the second portion; The second part is located in the second cavity and above the detector chip; the light-emitting surface is disposed on the second part.

4. The solid-state lidar according to claim 3, characterized in that, The structural component is provided with a light-blocking protrusion, which contacts the edge of the light-incoming surface and blocks at least part of the contact position between the first part and the connecting channel.

5. The solid-state lidar according to claim 2, characterized in that, The light guide includes a second part, a first part, and a third part connected in sequence; The first portion extends in the connection channel; The second part is located in the second cavity and is positioned above the detector chip; The light-emitting surface is disposed on the second part; The third part is located in the first cavity, and the light-gathering surface is disposed on the third part.

6. The solid-state lidar according to any one of claims 3 to 5, characterized in that, The connecting channel wall is provided with a first concave-convex structure extending in the channel's through direction, and the first part is provided with a second concave-convex structure; the first concave-convex structure and the second concave-convex structure are staggered and matched.

7. The solid-state lidar according to claim 2, characterized in that, The light guide is located in the second cavity, and the light-incoming surface of the light guide covers the channel opening that connects the connecting channel and the second cavity.

8. The solid-state lidar according to any one of claims 2 to 7, characterized in that, The structural surface of the light guide includes the light-inlet surface, the light-outlet surface, and a connecting surface connecting the light-inlet surface and the light-outlet surface. The light guide also includes a light-shielding layer disposed on the outside of the connecting surface.

9. The solid-state lidar according to any one of claims 2 to 8, characterized in that, The light guide structure further includes a first light blocking structure, which is disposed between the light guide and the detector chip to seal and surround the stray light transmission area between the light emitting surface and the second detection area.

10. The solid-state lidar according to claim 1, characterized in that, The light guide structure includes a connecting channel and a light guide component. The connecting channel is disposed on the structural component and connects the first cavity and the second cavity. The light guide is connected to the structural component, and the light guide has a light guiding channel; One end of the light guide channel is connected to the connecting channel, and the other end of the light guide channel is directly opposite the second detection area in the detector chip.

11. The solid-state lidar according to claim 1, characterized in that, The light guide structure includes a connecting channel and a light guide component. The connecting channel is disposed on the structural component and connects the first cavity and the second cavity. The light guide is in contact with the structural component and the circuit board. The light guide, the structural component and the circuit board together form a light guide channel, which connects the connection channel and the second detection area in the detector chip.

12. The solid-state lidar according to any one of claims 1 to 11, characterized in that, The detector chip has a detection area, and the first detection area and the second detection area are different parts of the detection area; The detector chip includes a detector array and a readout circuit electrically connected to the detector array. The detector array includes multiple detector units arranged in the detector area. The multiple detector units are arranged to form multiple detector rows and multiple detector columns. The detector row includes multiple detector units arranged along the row direction, and the detector column includes multiple detector units arranged along the column direction.

13. The solid-state lidar according to claim 12, characterized in that, The first detection area and the second detection area are different portions of the detection area arranged along the row direction; Some detector units in the same detector row are located in the first detection area, and some detector units are located in the second detection area.

14. The solid-state lidar according to claim 13, characterized in that, The second detection area includes a plurality of first sub-detection areas arranged along the column direction, and the detector chip is further provided with an isolation structure between adjacent first sub-detection areas.

15. The solid-state lidar according to claim 13 or 14, characterized in that, The first detection area and the second detection area are spaced apart in the row direction.

16. The solid-state lidar according to claim 12, characterized in that, The second detection area has fewer detector units in both the row direction and the column direction than the first detection area; The second detection area is embedded within the first detection area, or the second detection area is located outside the first detection area.

17. The solid-state lidar according to any one of claims 12 to 16, characterized in that, The laser in the laser chip is an edge-emitting laser or a vertical-cavity surface-emitting laser; And / or, the detector unit is an avalanche photodiode, a single-photon avalanche diode, or a silicon photomultiplier tube.

18. A calibration method, characterized in that, For a solid-state lidar according to any one of claims 1 to 17, the calibration method comprises: Obtain the reference ranging result of the solid-state lidar, as well as the current first ranging result and second ranging result; The first ranging result is calibrated based on the difference between the second ranging result and the reference ranging result; Wherein, the reference ranging result is the ranging result of the second detection area of ​​the solid-state lidar on stray light during the pre-calibration process, the first ranging result is the imaging result of the first detection area on the detection region currently obtained by the solid-state lidar, and the second ranging result is the ranging result of the second detection area on stray light currently obtained by the solid-state lidar.

19. An electronic device, characterized in that, include: processor; as well as The solid-state lidar as described in any one of claims 1 to 17, wherein the solid-state lidar is electrically connected to the processor.

20. A car, characterized in that, include: Vehicle body structure; as well as The solid-state lidar as described in any one of claims 1 to 17, wherein the solid-state lidar is mounted on the vehicle body structure.

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