An auxiliary positioning device for vacuum chamber processing

Abstract

The application discloses an auxiliary positioning device for vacuum cavity processing, comprising a workbench, a positioning mechanism one and a positioning mechanism two; the positioning mechanism one is arranged at the front end position of the top surface of the workbench, and comprises a fixed frame one, a positioning ring, a movable ring one, a movable ring two and a screw rod and other components; through cooperation, the screw rod drives the movable ring one and the movable ring two to rotate, thereby driving the components inside the positioning ring to move, the vacuum cavity is clamped and fixed, the rear end of the positioning mechanism one is provided with the positioning mechanism two, the positioning mechanism two comprises a connection main plate, a driving motor, a fixed frame two and an unfolding mechanism and other components; through cooperation, the auxiliary support for the vacuum cavity can be realized, the clamping stability is improved, the device is suitable for irregularly-shaped vacuum cavities, the application range can be effectively expanded, the use effect is improved, and the processing operation of the vacuum cavity is facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum cavity processing, in particular to an auxiliary positioning device for vacuum cavity processing. BACKGROUND

[0002] A vacuum cavity is a sealed container used to maintain an internal vacuum state, widely used in semiconductor manufacturing, scientific research and other fields, by isolating external interference and providing a stable vacuum environment to meet the needs of precision processes.

[0003] In the production and processing of vacuum cavities, welding, drilling and other work operations are usually required on them, and before that, the vacuum cavities need to be fixed on the workbench.

[0004] However, some vacuum cavities have thin walls, poor rigidity and easy deformation, and some clamping positioning devices have fewer clamping points, resulting in limited clamping effect and poor positioning effect when clamping the vacuum cavity, and may cause the vacuum cavity to deform, making it difficult to meet the processing requirements. SUMMARY

[0005] The purpose of the present application is to provide an auxiliary positioning device for vacuum cavity processing to solve the problems raised in the background art.

[0006] In order to achieve the above purpose, the present application adopts the following technical scheme: an auxiliary positioning device for vacuum cavity processing, comprising a workbench, a set of positioning mechanism one is arranged at the front end of the top surface of the workbench, and a positioning mechanism two is arranged at the rear end of the positioning mechanism one.

[0007] The positioning mechanism one comprises a fixed frame one, a positioning ring, a movable ring one, a movable ring two and a screw rod, the bottom surface of the fixed frame one is connected with the top surface of the workbench at the front end, a set of positioning rings are arranged at the top end, the outer sides of the positioning rings are respectively connected with the movable ring one and the movable ring two, and the outer ends of the movable ring one and the movable ring two are connected through the screw rod.

[0008] By adopting the above technical scheme, the workbench provides support for the positioning mechanism one and the positioning mechanism two, so as to facilitate the positioning mechanism one and the positioning mechanism two to clamp the vacuum cavity, wherein the movable ring one and the movable ring two are connected through the screw rod to form a clamping structure that can be opened and closed, and rotating the screw rod can drive the movable ring one and the movable ring two to tighten or loosen, so as to firmly clamp the vacuum cavity in the positioning ring, prevent the vacuum cavity from moving during processing, ensure the stability and safety of the processing process, and adapt to vacuum cavities of different sizes and diameters, enhancing the versatility of the device.

[0009] Preferably, the outer middle end of the positioning ring is provided with an outer groove, the inner front and rear positions of the outer groove are respectively connected with movable ring one and movable ring two, the four inner ends of the positioning ring are respectively provided with a group of moving arms, the outer sides of the moving arms are respectively connected with a group of guide rods, and the inner ends of the moving arms are respectively extended to the inner end of the positioning ring and connected with a group of clamping plates.

[0010] Through the above technical scheme, the four groups of moving arms can be guided by the guide rods to move synchronously to the inner middle end of the positioning ring, and the outer side of the vacuum cavity can be clamped and fixed by the clamping plates, so that the automatic centering and rigid clamping of the vacuum cavity can be realized.

[0011] Preferably, the right rear end of the movable ring one is connected with the screw through a group of connecting barrels one, and the upper and lower ends are respectively provided with a guide groove one corresponding to the guide rod.

[0012] Through the above technical scheme, the rotation of the screw can drive the movable ring one to rotate through the connecting barrel one, so that the movable ring one guides the guide rod and the upper and lower two groups of moving arms to move, and the accurate guidance of the moving arms and the clamping plates is realized.

[0013] Preferably, the front top end of the movable ring two is connected with the screw through a group of connecting barrels two, and the left and right ends are respectively provided with a guide groove two corresponding to the guide rod.

[0014] Through the above technical scheme, the rotation of the screw can drive the movable ring two to rotate through the connecting barrel two, so that the movable ring two guides the guide rod and the left and right two groups of moving arms to move, and the accurate guidance of the moving arms and the clamping plates is realized.

[0015] Preferably, the second positioning mechanism comprises a connecting main plate, a driving motor, a fixed frame two and an unfolding mechanism, the rear end of the connecting main plate is provided with a group of driving motors, the bottom end is connected with the top surface of the workbench through the fixed frame two, and the front end is connected with the unfolding mechanism.

[0016] Through the above technical scheme, the connecting main plate is connected with the top surface of the workbench through the fixed frame two, and the driving motor can drive the unfolding mechanism to move and unfold or retract.

[0017] Preferably, the unfolding mechanism comprises a rotating shaft, a rotating panel one and a rotating panel two, the left and right positions of the front middle end of the connecting main plate are respectively provided with a group of rotating shafts, the outer sides of the two groups of rotating shafts are respectively provided with a group of meshing rings near the front end, the front ends of the two groups of rotating shafts are respectively connected with a group of rotating panel ones, and the outer sides of the two groups of rotating panel ones are respectively provided with a group of rotating panel twos.

[0018] By adopting the technical scheme, the two groups of rotating shafts can rotate synchronously through the meshing rings, and only one group of rotating shafts needs to be driven, and the power can be automatically transmitted to the other group of rotating shafts through the meshing rings, so that the transmission structure is simplified, and the two groups of rotating shafts can drive the two groups of rotating panels one and the rotating panels two to move relatively, so that the rotating panels one and the rotating panels two are expanded synchronously and symmetrically.

[0019] Preferably, one group of linkage arms one is arranged at the positions where the rear end faces of the two groups of rotating panels one are close to the rotating shafts, the other ends of the linkage arms one are connected with one group of linkage arms two, the linkage arms two are connected with one group of linkage arms three at the ends away from the linkage arms one, the other ends of the linkage arms three are connected with one group of linkage arms four, and the linkage arms four are provided with arc-shaped arms at the ends away from the linkage arms three, and the other ends of the two groups of arc-shaped arms are connected with the rear end faces of the two groups of rotating panels two respectively.

[0020] By adopting the technical scheme, the linkage arms one, the linkage arms two, the linkage arms three and the linkage arms four form a multi-arm linkage structure, the linkage arms one are driven to rotate through the rotation of the rotating panels one, and finally the arc-shaped arms are pushed by the linkage arms four, so that the rotating panels two can move along the outside of the rotating panels one and cooperate with the rotating panels one, and can clamp and fix the irregularly-shaped vacuum cavity, and the application range is improved.

[0021] Preferably, the rotating panels one and the rotating panels two are arc-shaped, and the rotating panels two are attached to the outside of the rotating panels one and connected with the outside of the rotating panels one through the sliding grooves.

[0022] By adopting the technical scheme, the rotating panels two can move along the outside of the rotating panels one, and the rotating panels two are attached to the outside of the rotating panels one, forming an arc-shaped bracket, so that the support stability can be effectively improved, the bending resistance and the torsion resistance are strengthened, and the movement of the vacuum cavity caused by external force during the machining process can be avoided.

[0023] Preferably, the ends close to the rotating shafts of the linkage arms two and the linkage arms four are connected with the front end face of the connecting main plate, and the linkage arms one and the linkage arms three are connected to the middle ends of the linkage arms two and the linkage arms four respectively.

[0024] Preferably, the ends close to the arc-shaped arms of the two groups of linkage arms four are designed as curved arms, and the bending directions are opposite.

[0025] By adopting the technical scheme, when the two groups of rotating panels two are recycled, the two groups of linkage arms four can be staggered and retracted into the rear ends of the two groups of rotating panels two, so that the mutual interference of the two groups of linkage arms four can be avoided.

[0026] Compared with the prior art, the beneficial effects of the present application are:

[0027] 1. The present application can realize double clamping of the vacuum cavity by respectively setting positioning mechanism one and positioning mechanism two at the front and rear positions of the top surface of the workbench, the automatic centering of the vacuum cavity is realized by positioning mechanism one, the vacuum cavity is corrected to the center position of positioning mechanism one, human error is reduced, positioning mechanism two provides accurate height support through the driving motor and the multi-link structure, which can effectively improve the clamping effect of the vacuum cavity, especially the irregularly shaped vacuum cavity, and enhance the versatility of the equipment and the production and processing efficiency;

[0028] 2. The present application is provided with positioning mechanism one at the front end position of the top surface of the workbench, positioning mechanism one includes fixed frame one, positioning ring, movable ring one, movable ring two and screw rod and other components, the rotation of the screw rod can drive movable ring one and movable ring two to rotate relatively, so as to realize the clamping and positioning of the vacuum cavity in the positioning ring, the vacuum cavity can be kept at the center position of the positioning ring, and through the multi-point clamping points, the external pressure on the vacuum cavity can be effectively reduced, the deformation of the outer side of the vacuum cavity caused by excessive pressure of bidirectional clamping during the clamping process can be avoided, and the production quality of the vacuum cavity can be effectively guaranteed;

[0029] 3. The present application is provided with positioning mechanism two at the rear end position of the top surface of the workbench, positioning mechanism two includes connection main plate, driving motor, fixed frame two and unfolding mechanism and other components, which can be driven by the driving motor to move the unfolding mechanism to clamp the vacuum cavity twice, the rotating panel one and the rotating panel two in the unfolding mechanism can compensate and support the vacuum cavity, and can adapt to vacuum cavities with different shapes, through cooperation with positioning mechanism one, the vacuum cavity can be kept in a horizontal position, which is beneficial to the machining operation of the vacuum cavity. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of the present application;

[0031] Figure 2 It is a structural schematic diagram of positioning mechanism one of the present application;

[0032] Figure 3 It is a front view structural schematic diagram of movable ring one of the present application;

[0033] Figure 4 It is a rear view structural schematic diagram of movable ring two of the present application;

[0034] Figure 5 It is a structural schematic diagram of positioning mechanism two of the present application;

[0035] Figure 6 It is an unfolding structural schematic diagram of positioning mechanism two of the present application;

[0036] Figure 7 It is a connection structural schematic diagram of linkage arm one of the present application;

[0037] Figure 8 It is the inside front view structure schematic diagram of the unfolding mechanism of the application.

[0038] In the figure: workbench-1, positioning mechanism one-2, positioning mechanism two-3, fixed frame one-21, positioning ring-22, movable ring one-23, movable ring two-24, screw-25, outer groove-221, moving arm-222, guide rod-223, clamping plate-224, connecting cylinder one-231, guide groove one-232, connecting cylinder two-241, guide groove two-242, connecting main plate-31, drive motor-32, fixed frame two-33, unfolding mechanism-34, rotating shaft-341, rotating panel one-342, rotating panel two-343, meshing ring-3411, linkage arm one-3421, linkage arm two-3422, linkage arm three-3423, linkage arm four-3424, arc-shaped arm-3425. DETAILED DESCRIPTION

[0039] In order to further explain the technical scheme of the application, the following specific embodiments are described in detail.

[0040] Please refer to Figures 1-2 The application provides an auxiliary positioning device for vacuum cavity processing, which comprises a workbench 1, a group of positioning mechanism one 2 is arranged at the front end position of the top surface of the workbench 1, and a positioning mechanism two 3 is arranged at the rear end of the positioning mechanism one 2. The positioning mechanism one 2 comprises a fixed frame one 21, a positioning ring 22, a movable ring one 23, a movable ring two 24 and a screw 25. The bottom surface of the fixed frame one 21 is fixedly connected with the front end of the top surface of the workbench 1. A group of positioning rings 22 are installed at the top end of the fixed frame one 21. The movable ring one 23 and the movable ring two 24 are respectively installed at the outer front and rear positions of the positioning ring 22. The outer ends of the movable ring one 23 and the movable ring two 24 are connected through the screw 25. The screw 25 can drive the movable ring one 23 and the movable ring two 24 to move relatively by rotating.

[0041] Specifically, the workbench 1 provides support for the positioning mechanism one 2 and the positioning mechanism two 3, so as to facilitate the positioning mechanism one 2 and the positioning mechanism two 3 to clamp the vacuum cavity. The movable ring one 23 and the movable ring two 24 are connected through the screw 25 to form a clamping structure that can be opened and closed. Rotating the screw 25 can drive the movable ring one 23 and the movable ring two 24 to tighten or loosen, so as to firmly clamp the vacuum cavity in the positioning ring 22, prevent the vacuum cavity from moving during processing, and ensure the stability and safety of the processing process. In addition, the device can adapt to vacuum cavities of different sizes and diameters, thereby enhancing the versatility of the device.

[0042] Please refer to Figures 2-4The outer side of the positioning ring 22 is provided with an outer groove 221 in the middle end, and a group of movable ring one 23 and movable ring two 24 are respectively installed at the inner front and rear positions of the outer groove 221. The movable ring one 23 and the movable ring two 24 can rotate in the outer groove 221, and a group of moving arms 222 are slidably connected to the inner four ends of the positioning ring 22. The outer side of the moving arm 222 is connected to a group of guide rods 223. Among them, the guide rods 223 of the upper and lower two groups of moving arms 222 are arranged on the front end face, the guide rods 223 of the left and right two groups of moving arms 222 are arranged on the rear end face, the inner ends of the four groups of moving arms 222 extend to the inner end of the positioning ring 22 and are fixedly connected to a group of clamping plates 224, and the four groups of moving arms 222 can be clamped and fixed to the vacuum cavity through the clamping plate 224 when moving inward.

[0043] Specifically, the four groups of moving arms 222 can be guided by the guide rods 223 to move synchronously to the inner middle end of the positioning ring 22, and the outer side of the vacuum cavity can be clamped and fixed by the clamping plate 224, so as to realize the automatic centering and rigid clamping of the vacuum cavity.

[0044] Please refer to Figures 2-4 The rear right end of the movable ring one 23 is rotatably connected to a group of connecting barrels one 231, and is connected to the screw rod 25 through the connecting barrels one 231. The upper and lower ends are provided with guide grooves one 232 corresponding to the guide rods 223. The front top end of the movable ring two 24 is rotatably connected to a group of connecting barrels two 241, and is connected to the screw rod 25 through the connecting barrels two 241. The left and right ends are provided with guide grooves two 242 corresponding to the guide rods 223. The outer sides of the two ends of the screw rod 25 are provided with opposite external threads. The connecting barrels one 231 and the connecting barrels two 241 are provided with corresponding internal thread holes in the inner sides. The relative movement of the movable ring one 23 and the movable ring two 24 can be driven by rotating the screw rod 25, so as to drive the four groups of guide rods 223 and the moving arms 222 to move through the guide grooves one 232 and the guide grooves two 242, and realize the clamping or relaxation of the vacuum cavity.

[0045] Specifically, the rotation of the screw rod 25 can drive the movable ring one 23 and the movable ring two 24 to rotate through the connecting barrels one 231 and the connecting barrels two 241, so that the movable ring one 23 and the movable ring two 24 can guide the guide rods 223 and the moving arms 222 to move through the guide grooves one 232 and the guide grooves two 242, respectively, to realize the accurate guidance of the moving arms 222 and the clamping plates 224.

[0046] Please refer to Figure 1 , Figure 5 And Figure 6, positioning mechanism two 3 includes a connecting main plate 31, a drive motor 32, a fixed frame two 33 and an unfolding mechanism 34, a group of drive motors 32 is installed at the rear end of the connecting main plate 31, the bottom end of the connecting main plate 31 is connected with the top surface of the workbench 1 through the fixed frame two 33, and the front end is connected with the unfolding mechanism 34, the drive motor 32 can drive the unfolding mechanism 34 to move and unfold or recover, wherein the unfolding mechanism 34 includes a rotating shaft 341, a rotating panel one 342 and a rotating panel two 343, a group of rotating shafts 341 is rotatably connected to the left and right positions of the front middle end of the connecting main plate 31, the rear end of the left end rotating shaft 341 extends through and is fixedly connected with the front end of the driving shaft of the drive motor 32 at the rear end of the connecting main plate 31, the drive motor 32 can drive the left end rotating shaft 341 to rotate, and a group of meshing rings 3411 is fixedly connected to the positions close to the front end outside the two groups of rotating shafts 341, a group of convex teeth that mesh with each other is fixedly connected outside the two groups of meshing rings 3411, the synchronous relative rotation of the two groups of rotating shafts 341 can be realized, a group of rotating panel ones 342 is fixedly connected to the front ends of the two groups of rotating shafts 341, a group of rotating panel twos 343 contacts a group of rotating panel ones 342 outside the two groups of rotating panel ones 342, further, the rotating panel one 342 and the rotating panel two 343 are arc-shaped, and the rotating panel two 343 is attached to the outside of the rotating panel one 342, a “T”-shaped sliding groove is formed in the outside of the rotating panel one 342, a sliding plate corresponding to the sliding groove is arranged in the inside of the rotating panel two 343, the rotating panel two 343 is connected with the outside of the rotating panel one 342 through the sliding groove and the sliding plate, the rotating panel two 343 can move along the outside of the rotating panel one 342, and the rotating panel two 343 is attached to the outside of the rotating panel one 342 to form an arc-shaped bracket, which can effectively improve the supporting stability and strengthen the bending resistance and torsion resistance, so that the movement of the vacuum cavity caused by external force during processing can be avoided.

[0047] Specifically, the two groups of rotating shafts 341 can realize synchronous rotation through the meshing rings 3411 that mesh with each other, only one group of rotating shafts 341 needs to be driven, and the power can be automatically transmitted to the other group of rotating shafts 341 through the meshing rings 3411, so that the transmission structure is simplified, and the two groups of rotating shafts 341 can drive the two groups of rotating panel ones 342 and the rotating panel two 343 at the left and right ends to move relatively, so that the rotating panel one 342 and the rotating panel two 343 are synchronously and symmetrically unfolded.

[0048] Please refer to Figures 6-8, the other end of the linkage arm one 3421 is connected with a set of linkage arm two 3422, the end of the linkage arm two 3422 away from the linkage arm one 3421 is hinged with a set of linkage arm three 3423, the other end of the linkage arm three 3423 is connected with a set of linkage arm four 3424, wherein, the end of the linkage arm two 3422 and the linkage arm four 3424 close to the rotating shaft 341 are connected with the front end surface of the connection main plate 31, the linkage arm one 3421 and the linkage arm three 3423 are respectively connected to the middle end of the linkage arm two 3422 and the linkage arm four 3424, which can limit the rotation path of the linkage arm two 3422 and the linkage arm four 3424, further, the end of the left and right two sets of linkage arm four 3424 close to the arc-shaped arm 3425 is designed as a curved arm, and the bending directions are opposite, when the left and right two sets of rotating panel two 343 are recycled, the two sets of linkage arm four 3424 can be staggered back into the rear end of the two sets of rotating panel two 343, which can avoid the mutual interference of the left and right two sets of linkage arm four 3424, the end of the linkage arm four 3424 away from the linkage arm three 3423 is hinged with the arc-shaped arm 3425, the other end of the two sets of arc-shaped arms 3425 is respectively connected with the rear end surface of the left and right two sets of rotating panel two 343, which can drive the two sets of rotating panel two 343 to move along the outside of the rotating panel one 342.

[0049] Specifically, the linkage arm one 3421, the linkage arm two 3422, the linkage arm three 3423 and the linkage arm four 3424 form a multi-arm linkage structure, the rotation of the rotating panel one 342 drives the rotation of the linkage arm one 3421, and finally pushes the arc-shaped arm 3425 through the linkage arm four 3424, so that the rotating panel two 343 can move along the outside of the rotating panel one 342, and cooperate with the rotating panel one 342 to clamp and fix the irregularly shaped vacuum cavity, and improve the application range.

[0050] The application provides an auxiliary positioning device for vacuum cavity processing, which realizes double clamping of the vacuum cavity through positioning mechanism one 2 and positioning mechanism two 3 arranged at the front and rear positions of the top surface of the workbench 1, realizes automatic centering of the vacuum cavity through positioning mechanism one 2, corrects the vacuum cavity to the center position of positioning mechanism one 2, reduces human error, and positioning mechanism two 3 provides accurate height support through the driving motor 32 and the multi-link structure, which can effectively improve the clamping effect of the vacuum cavity, especially the irregularly shaped vacuum cavity, and enhance the versatility and production and processing efficiency of the equipment; positioning mechanism one 2 arranged at the front end position of the top surface of the workbench 1 includes a fixed frame one 21, a positioning ring 22, a movable ring one 23, a movable ring two 24 and a screw 25, and the rotation of the screw 25 can drive the movable ring one 23 and the movable ring two 24 to rotate relatively, so as to realize the clamping and positioning of the vacuum cavity in the positioning ring 22, keep the vacuum cavity at the center position of the positioning ring 22, and effectively reduce the external pressure on the vacuum cavity through the multi-point clamping points, which can avoid the deformation of the outer side of the vacuum cavity due to excessive pressure of the double clamping in the clamping process, and effectively ensure the production quality of the vacuum cavity; positioning mechanism two 3 arranged at the rear end position of the top surface of the workbench 1 includes a connection main plate 31, a driving motor 32, a fixed frame two 33 and an unfolding mechanism 34, which can be driven by the driving motor 32 to drive the unfolding mechanism 34 to move, and the vacuum cavity is clamped twice, the rotating panel one 342 and the rotating panel two 343 in the unfolding mechanism 34 can compensate and support the vacuum cavity, and can adapt to vacuum cavities with different shapes, through cooperation with positioning mechanism one 2, the vacuum cavity can be kept in a horizontal position, which is beneficial to the machining of the vacuum cavity.

[0051] The above only describes the preferred examples of the application and is not used to limit the application, although the application is described in detail with reference to the foregoing examples, those skilled in the art can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement for part of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. An auxiliary positioning device for vacuum chamber processing, characterized by: Including work platform (1), the work platform (1) top surface front end position is equipped with a set of positioning mechanism one (2), the positioning mechanism one (2) rear end is equipped with positioning mechanism two (3); The positioning mechanism one (2) includes fixed frame one (21), positioning ring (22), movable ring one (23), movable ring two (24) and screw rod (25), the fixed frame one (21) bottom surface is connected with the work platform (1) top surface front end, and the top end is equipped with a set of positioning ring (22), and the outer side of positioning ring (22) is connected with movable ring one (23) and movable ring two (24) respectively, the outer end of movable ring one (23) and movable ring two (24) is connected through screw rod (25). The positioning mechanism two (3) includes connection mainboard (31), drive motor (32), fixed frame two (33) and unfolding mechanism (34), the connection mainboard (31) rear end is equipped with a set of drive motor (32), and the bottom end is connected with the work platform (1) top surface through fixed frame two (33), and the front end is connected with unfolding mechanism (34). The unfolding mechanism (34) includes rotating shaft (341), rotating panel one (342) and rotating panel two (343), the connection mainboard (31) front middle end left and right positions are equipped with a set of rotating shaft (341), the outer side of two sets of rotating shaft (341) is equipped with a set of meshing ring (3411) near the front end, and the front end of two sets of rotating shaft (341) is connected with a set of rotating panel one (342), and the outer side of two sets of rotating panel one (342) is equipped with a set of rotating panel two (343). The rear end surface of two sets of rotating panel one (342) is equipped with a set of linkage arm one (3421) near the rotating shaft (341), one end of linkage arm one (3421) is connected with a set of linkage arm two (3422), one end of linkage arm two (3422) away from linkage arm one (3421) is equipped with a set of linkage arm three (3423), the other end of linkage arm three (3423) is connected with a set of linkage arm four (3424), one end of linkage arm four (3424) away from linkage arm three (3423) is equipped with arc-shaped arm (3425), and the other end of two sets of arc-shaped arm (3425) is connected with the rear end surface of left and right sets of rotating panel two (343) respectively.

2. An auxiliary positioning device for vacuum chamber processing as defined in claim 1, wherein: The outer side middle end of positioning ring (22) is equipped with outer groove (221), the inner front and rear positions of outer groove (221) are connected with movable ring one (23) and movable ring two (24) respectively, the inner four ends of positioning ring (22) are equipped with a set of moving arm (222), the outer side of moving arm (222) is connected with a set of guide rod (223), and the inner end of moving arm (222) extends to the inner end of positioning ring (22) and is connected with a set of clamping plate (224).

3. An auxiliary positioning device for vacuum chamber processing as defined in claim 2, wherein: The rear right end of movable ring one (23) is connected with screw rod (25) through a set of connecting barrel one (231), and the upper and lower ends are equipped with guide groove one (232) corresponding to guide rod (223).

4. The auxiliary positioning device for vacuum chamber processing of claim 2, wherein: The front top end of the movable ring two (24) is connected with the screw rod (25) through a set of connecting tubes two (241), and the left and right ends are respectively provided with a guide slot two (242) corresponding to the guide rod (223).

5. An auxiliary positioning device for vacuum chamber processing as defined in claim 1, wherein: The rotating panel one (342) and the rotating panel two (343) are both arc-shaped, the rotating panel two (343) is attached to the outer side of the rotating panel one (342), and is connected with the outer side of the rotating panel one (342) through a sliding groove.

6. An auxiliary positioning device for vacuum chamber processing as defined in claim 1, wherein: The one end of the linkage arm two (3422) and the linkage arm four (3424) close to the rotating shaft (341) is connected with the front end surface of the connecting main plate (31), and the linkage arm one (3421) and the linkage arm three (3423) are respectively connected to the middle end of the linkage arm two (3422) and the linkage arm four (3424).

7. An auxiliary positioning device for vacuum chamber processing as defined in claim 6, wherein: The one end of the linkage arm four (3424) of the left and right groups close to the arc-shaped arm (3425) is designed as a curved arm, and the bending directions are opposite.

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