Device and method for intelligently adjusting hydraulic balance of semiconductor PCW system
By introducing a water storage tank, water replenishment components, and balance adjustment components into the semiconductor PCW system, combined with buoyancy plates and tension rope sensors to monitor flow, and using hydraulic cylinders and electronically controlled valves to adjust hydraulic balance, the problems of hydraulic imbalance and energy waste are solved, and multi-temperature zone water supply and stable equipment operation are achieved.
Patent Information
- Application Number
- CN202511128121.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-13
- Publication Date
- 2025-11-25
AI Technical Summary
In semiconductor manufacturing, the process cooling water system suffers from hydraulic imbalance, leading to uneven equipment cooling and safety shutdowns. Furthermore, it results in significant energy waste in winter, and the demand for multiple temperature zones remains unmet.
It employs a water storage tank, water replenishment components, and a balance adjustment component. The water flow is monitored in real time through a buoyancy plate and tension rope sensor. The hydraulic balance is adjusted using hydraulic cylinders and electronically controlled valves. The cooling water temperature is adjusted by combining external low-temperature water and normal-temperature water to achieve multi-temperature zone water supply.
It achieves stability and precision in hydraulic balance, reduces the energy consumption of the chiller, adapts to the cooling needs of different semiconductor devices, and improves the adaptability and production efficiency of the equipment.
Smart Images
Figure CN121008541A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of PCW system technology, specifically to a semiconductor PCW system hydraulic balance intelligent adjustment device and method. Background Technology
[0002] In the semiconductor manufacturing industry, process cooling water systems (PCW) are critical infrastructure for maintaining constant temperature operation of core equipment such as lithography machines and etching machines. Since semiconductor production is extremely sensitive to temperature fluctuations (typically requiring ±0.3℃), PCW systems must ensure precise and stable cooling water flow and temperature. However, hydraulic imbalance is a common problem in complex pipe networks, with phenomena such as "water grabbing" and "flow shortage": branches closer to the water pump or with low local resistance experience flow overshoot (water grabbing) due to excessive pressure difference, while branches further away or with high resistance experience insufficient flow (flow shortage). This imbalance can lead to uneven equipment cooling or, in severe cases, trigger equipment shutdown, resulting in a decrease in wafer yield.
[0003] In addition, the process cooling water system (PCW) also has the following problems:
[0004] Winter energy consumption bottleneck: The chiller operates at full load all year round to produce low-temperature cooling water, but when the ambient temperature is low in winter, the external low-temperature water resources are not effectively utilized, resulting in a waste of 30-40% of the chiller's energy consumption.
[0005] The lack of demand for multi-temperature zones: Different semiconductor devices (such as ion implanters and chemical vapor deposition equipment) require cooling water at different temperatures, but existing systems lack the ability to generate multi-temperature zone cooling water in parallel.
[0006] In summary, there is an urgent need for an intelligent regulating device that can dynamically balance hydraulic distribution, integrate seasonal energy-saving strategies, and support multi-temperature zone water supply, in order to overcome the current technical bottlenecks of semiconductor PCW systems. Summary of the Invention
[0007] The purpose of this invention is to provide a smart hydraulic balance adjustment device and method for a semiconductor PCW system to solve the problems mentioned in the background art.
[0008] To achieve the above objectives, the present invention provides the following technical solution: a hydraulic balance intelligent adjustment device for a semiconductor PCW system, comprising a water storage tank, a water replenishment component, and a balance adjustment component. A water pump pipe is connected to the top of the water storage tank, and a water replenishment component is installed at the outer end of the water storage tank. An adjustment box is installed at the top outer end of the water replenishment component, and a hydraulic cylinder is installed at the outer end of the adjustment box. A balance adjustment component is installed at the top of the hydraulic cylinder. The balance adjustment component includes a balance box, an electrically controlled one-way inlet valve and an electrically controlled one-way outlet valve are installed at the bottom of the balance box, a tension spring is installed on the inner side of the top of the balance box, and a buoyancy plate is provided at the bottom end of the tension spring. A tension rope is provided between the buoyancy plate and the balance box, and a tension sensor is installed at the middle end of the tension rope. A water outlet pipe is connected to the outer end of the balance box, and a water inlet component is installed at the outer end of the balance box.
[0009] Furthermore, the water replenishment component includes a water replenishment pipe, an electrically controlled valve is installed at the outer end of the water replenishment pipe, and a water passage pipe is connected to the end of the water replenishment pipe. A check valve is installed at the outer end of the water passage pipe, and a telescopic pipe is installed at the top end of the water passage pipe, with a connecting pipe at the top end of the telescopic pipe.
[0010] Furthermore, the water supply pipe is connected to the water storage tank and also to the water supply pipe.
[0011] Furthermore, the water pipe is connected to the connecting pipe via a telescopic pipe, and the connecting pipe is connected to the regulating box.
[0012] Furthermore, the regulating box and the balance box are connected in a sleeve, and the electrically controlled one-way water inlet valve and the electrically controlled one-way water outlet valve of the regulating box are connected to the inside of the balance box.
[0013] Furthermore, the tension spring is elastically connected to the buoyancy plate, and the height of the buoyancy plate changes with the liquid level in the balance tank.
[0014] Furthermore, the water inlet assembly includes a water inlet pipe, a water inlet seat is provided at the end of the water inlet pipe, and a first water passage groove is provided at the outer end of the water inlet seat. An electrically controlled rotating shaft is provided at the outer end of the water inlet seat, and a rotating sleeve is provided at the outer end of the electrically controlled rotating shaft. A second water passage groove is provided at the outer end of the rotating sleeve.
[0015] Furthermore, the first water channel is connected to the water inlet pipe via the water inlet seat, and the water inlet pipe is connected to the balance box.
[0016] Furthermore, the rotating sleeve is connected to the water inlet seat, and the rotating sleeve rotates with the electrically controlled rotating shaft.
[0017] A method for intelligent hydraulic balance regulation of a semiconductor PCW system, wherein the method is applied to an intelligent hydraulic balance regulation device for a semiconductor PCW system, the method comprising:
[0018] S1. The water pump pipe connects to the water pump, supplying low-temperature water refrigerated by the refrigeration unit into the storage tank for storage. When the production equipment requires cooling water, the electrically controlled rotating shaft operates, causing the rotating sleeve to rotate at the outer end of the water inlet seat, aligning the openings of the first and second water channels. The cooling water in the storage tank enters the water inlet pipe through these two channels and further flows into the balance box.
[0019] S2. The cooling water level rises inside the balance tank. Through the design of the buoyancy plate and tension spring, the liquid level can be monitored in real time. The buoyancy plate rises and falls with the liquid level. The electrical signal is obtained through the tension rope and tension sensor. The equipment can determine whether there is an abnormal flow in the water circuit.
[0020] S3. When the water flow rate is detected to be too low, the electrically controlled valve opens, and the cooling water in the storage tank enters the water supply pipe through the water replenishment pipe, and then enters the regulating tank through the telescopic pipe and the connecting pipe. The electrically controlled one-way water inlet valve opens, connecting the regulating tank and the balance tank, thereby replenishing the water source. If the replenishment amount is too large, the hydraulic cylinder moves the regulating tank downward to increase the space and avoid excessive water replenishment. If the replenishment amount is still too small, the regulating tank moves upward to reduce the space and increase the flow rate.
[0021] S4. When the water flow is too large, the electrically controlled one-way outlet valve opens, and the excess water in the balance tank enters the regulating tank for temporary storage through the electrically controlled one-way outlet valve, thereby ensuring the stability of the hydraulic balance regulation.
[0022] S5. In winter, the water pipe is connected to an external low-temperature water source. The low-temperature water enters the regulating tank through the water pipe, expansion pipe, and connecting pipe. The electrically controlled one-way water inlet valve opens, and the low-temperature water enters the balance tank and mixes with the chilled water in the storage tank, achieving low-temperature cooling without the need to prepare excessively low-temperature cooling water. In non-winter seasons, the water pipe is connected to an external ambient temperature water source. By adjusting the water flow rate of the water pipe, cooling water of different temperatures is prepared in the balance tank, thereby adapting to the production of semiconductor equipment with different cooling temperatures.
[0023] This invention provides an intelligent hydraulic balance adjustment device and method for a semiconductor PCW system, which has the following beneficial effects:
[0024] 1. In this invention, after the cooling water is stored in the balance tank, its liquid level reflects the flow status of the inlet pipe. The buoyancy plate rises and falls with the liquid level, and the tension spring provides positioning support without affecting the floating. When the liquid level rises, the buoyancy plate moves up, causing the tension rope to loosen. At this time, the detection value of the tension sensor decreases. When the liquid level falls, the buoyancy plate moves down, causing the tension rope to tighten and the detection value to increase. Through this change in tension signal, the equipment can accurately determine abnormal water flow.
[0025] 2. When the water flow rate is too low, the electric control valve opens, and the cooling water from the storage tank is injected into the regulating tank through the water supply pipe, water passage pipe, telescopic pipe, and connecting pipe. At the same time, the electric control one-way water inlet valve opens to replenish water to the balance tank. The hydraulic cylinder drives the regulating tank to rise and fall to adjust the water replenishment efficiency. When it moves down, it increases the volume between itself and the balance tank to buffer excessive water replenishment. When it moves up, it decreases the volume to accelerate water replenishment. When the water flow rate is too high, the electric control one-way water outlet valve opens to discharge the excess water in the balance tank into the regulating tank for temporary storage, thereby maintaining hydraulic balance.
[0026] 3. In winter, the water pipe is connected to an external low-temperature water source. The water flows through the telescopic pipe and the connecting pipe into the regulating box. The electrically controlled one-way water inlet valve is opened to inject low-temperature water into the balance box and mix with the cooling water in the storage tank, reducing the load on the refrigeration unit. If the flow rate is too low, the water supply pipe is opened to replenish water, and the check valve prevents backflow. If the flow rate is too high, the electrically controlled rotating shaft rotates to reduce the overlap between the second water channel and the first water channel to adjust the flow rate. This operation is applicable in both winter and non-winter seasons. The hydraulic cylinder moves the regulating box down and opens the valve to allow the cold water in the balance box to flow into the regulating box for thorough mixing, eliminating local temperature differences. In non-winter seasons, the water pipe is connected to normal temperature water. Adjusting the water flow can allow different balance boxes to produce cooling water at different temperatures, making it suitable for multi-element semiconductor equipment. Attached Figure Description
[0027] Figure 1 This is a schematic diagram of the overall structure of a semiconductor PCW system hydraulic balance intelligent adjustment device according to the present invention;
[0028] Figure 2 This is a schematic diagram of the internal structure of the regulating box of the intelligent hydraulic balance regulating device for a semiconductor PCW system according to the present invention;
[0029] Figure 3 This is a schematic diagram of the internal structure of the balance box of the intelligent hydraulic balance regulating device for a semiconductor PCW system according to the present invention.
[0030] Figure 4 This is a schematic diagram of the internal structure of the water storage tank of the intelligent hydraulic balance regulating device for a semiconductor PCW system according to the present invention.
[0031] Figure 5 This is a schematic diagram of the water inlet component structure of a semiconductor PCW system hydraulic balance intelligent adjustment device according to the present invention;
[0032] Figure 6 This is a schematic cross-sectional view of the overall structure of the intelligent hydraulic balance adjustment device for a semiconductor PCW system according to the present invention.
[0033] In the diagram: 1. Water storage tank; 2. Water pump pipe; 3. Water supply assembly; 301. Water supply pipe; 302. Electrically controlled valve; 303. Water inlet pipe; 304. Check valve; 305. Telescopic pipe; 306. Connecting pipe; 4. Regulating box; 5. Hydraulic cylinder; 6. Balance adjustment assembly; 601. Balance box; 602. Electrically controlled one-way water inlet valve; 603. Electrically controlled one-way water outlet valve; 604. Tension spring; 605. Buoyancy plate; 606. Tension rope; 607. Tension sensor; 7. Water outlet pipe; 8. Water inlet assembly; 801. Water inlet pipe; 802. Water inlet seat; 803. First water inlet trough; 804. Electrically controlled rotating shaft; 805. Rotating sleeve; 806. Second water inlet trough. Detailed Implementation
[0034] Please see Figures 1 to 6 This invention provides a technical solution: a hydraulic balance intelligent adjustment device and method for a semiconductor PCW system, comprising a water storage tank 1, a water replenishment component 3, and a balance adjustment component 6. A water pump pipe 2 is connected to the top of the water storage tank 1, and the water replenishment component 3 is installed at the outer end of the water storage tank 1. An adjustment box 4 is installed at the top outer end of the water replenishment component 3, and a hydraulic cylinder 5 is installed at the outer end of the adjustment box 4. The balance adjustment component 6 is installed at the top of the hydraulic cylinder 5. The balance adjustment component 6 includes a balance box 601, an electrically controlled one-way inlet valve 602 and an electrically controlled one-way outlet valve 603 are installed at the bottom of the balance box 601, a tension spring 604 is installed on the inner side of the top of the balance box 601, and a buoyancy plate 605 is provided at the bottom end of the tension spring 604. A tension rope 606 is provided between the buoyancy plate 605 and the balance box 601. The tension rope 606 has a tension sensor 607 installed at the middle end, the balance box 601 is connected to a water outlet pipe 7 at the outer end, and a water inlet assembly 8 is installed at the outer end of the balance box 601. The water inlet assembly 8 includes a water inlet pipe 801, a water inlet seat 802 at the end of the water inlet pipe 801, a first water channel 803 at the outer end of the water inlet seat 802, an electrically controlled rotating shaft 804 at the outer end of the electrically controlled rotating shaft 804, a rotating sleeve 805 at the outer end of the rotating sleeve 805, a second water channel 806 at the outer end of the rotating sleeve 805, the first water channel 803 is connected to the water inlet pipe 801 through the water inlet seat 802, and the water inlet pipe 801 is connected to the balance box 601. The rotating sleeve 805 is sleeved and connected to the water inlet seat 802, and the rotating sleeve 805 rotates with the electrically controlled rotating shaft 804.
[0035] The specific operation is as follows: the water pump pipe 2 can be connected to an external water pump. When the water pump is working, it can input the low-temperature water, which has been cooled by the refrigeration machine, into the water storage tank 1 for storage. In semiconductor manufacturing, key production equipment such as lithography machines, etching machines, and ion implanters generate a large amount of heat during operation. The PCW system needs to provide these devices with stable, precisely temperature-controlled cooling water to ensure they operate at optimal temperatures. When the production equipment requires cooling water, the electrically controlled rotating shaft 804 operates, causing the rotating sleeve 805 to rotate at the outer end of the water inlet seat 802. The openings of the first water channel 803 and the second water channel 806 can overlap. At this time, the cooling water in the water storage tank 1 can enter the water inlet pipe 801 through the first water channel 803 and the second water channel 806. The water inlet pipe 801 is connected to the balance box 601, which allows the cooling water to enter the balance box 601. After the liquid level of the cooling water in the balance box 601 rises, it will be level with the height of the water outlet pipe 7. At this time, the cooling water can flow out from the water outlet pipe 7. The end of the water outlet pipe 7 is connected to the production equipment. Through the above operations, the cooling water can be used to cool the semiconductor manufacturing production equipment.
[0036] Please see Figures 1 to 6 The water replenishment component 3 includes a water replenishment pipe 301, an electrically controlled valve 302 installed at the outer end of the water replenishment pipe 301, and a water passage pipe 303 connected to the end of the water replenishment pipe 301. A check valve 304 is installed at the outer end of the water passage pipe 303, and a telescopic pipe 305 is installed at the top end of the water passage pipe 303. A connecting pipe 306 is installed at the top end of the telescopic pipe 305. The water replenishment pipe 301 is connected to the water storage tank 1, and the water replenishment pipe 301 is connected to the water passage pipe 303. The water passage pipe 303 is connected to the connecting pipe 306 through the telescopic pipe 305, and the connecting pipe 306 is connected to the regulating tank 4. The regulating tank 4 is sleeved and connected to the balance tank 601. The electrically controlled one-way inlet valve 602 and the electrically controlled one-way outlet valve 603 of the regulating tank 4 are connected to the inside of the balance tank 601. The tension spring 604 is elastically connected to the buoyancy plate 605, and the height of the buoyancy plate 605 changes with the liquid level in the balance tank 601.
[0037] The specific operation is as follows: In complex water pipe networks, branches closer to the water pump or with low resistance tend to receive excessive flow, while branches farther away or with high resistance tend to have insufficient flow. Since semiconductor manufacturing is a precision manufacturing process, excessive or insufficient water flow can easily affect product quality. Cooling water is first stored in the balance tank 601. The water level inside the balance tank 601 reflects the current flow status of the inlet pipe 801. Because the buoyancy plate 605 rises and falls with the liquid level, the tension spring 604 can position the buoyancy plate 605 without affecting its normal rise and fall. When the buoyancy plate 605 is at a high liquid level, the tension rope 606 has lower tension, resulting in a smaller tension value sensed by the tension sensor 607. Conversely, a larger tension value is sensed when the buoyancy plate is at a lower liquid level. This design... The device can easily determine whether there is an abnormal flow in the corresponding water circuit by acquiring the electrical signal of the tension sensor 607. This allows the device to efficiently and accurately detect whether the water flow is abnormal. When the water flow is too low, the electrically controlled valve 302 at the outer end of the water supply pipe 301 opens, allowing the cooling water inside the water storage tank 1 to enter the water supply pipe 303 through the water supply pipe 301. Since the water supply pipe 303 is connected to the regulating box 4 through the telescopic pipe 305 and the connecting pipe 306, the cooling water can enter the regulating box 4. At this time, the electrically controlled one-way water inlet valve 602 opens, enabling the regulating box 4 to connect with the balance box 601 to replenish the water source. In addition, if the water supply is too large, the hydraulic cylinder 5 drives the regulating box 4 to move downward, enabling the regulating box 4 to connect with the balance box. The space between 601 increases instantaneously, preventing excessive water replenishment from affecting semiconductor production. Similarly, if the water replenishment is still too small, the hydraulic cylinder 5 moves the regulating tank 4 upward, increasing the water flow due to the reduced space between the regulating tank 4 and the balance tank 601, thus ensuring sufficient water replenishment. If the water flow is too large, the electrically controlled one-way outlet valve 603 opens, allowing excess water in the balance tank 601 to enter the regulating tank 4 for temporary storage. These operations ensure the stability of the equipment's hydraulic balance regulation. Furthermore, in winter, the water pipe 303 can connect to an external low-temperature water source, allowing the low-temperature water to enter the regulating tank 4 through the water pipe 303, the telescopic pipe 305, and the connecting pipe 306. By opening the electrically controlled one-way inlet valve 602, low-temperature water can enter the balance tank 601 and mix with the chilled water inside the storage tank 1. This design allows the refrigeration unit to achieve low-temperature refrigeration without preparing excessively low-temperature cooling water, which reduces the load on the refrigeration unit in winter. Furthermore, if the flow rate of the chilled water circuit is too low, water can still be replenished by opening the water supply pipe 301. The check valve 304 effectively prevents backflow. If the flow rate is too high, the electrically controlled rotating shaft 804 drives the rotating sleeve 805 to rotate, reducing the opening size of the second water channel 806 and the first water channel 803, thereby adjusting the flow rate of the chilled water circuit. The operation of adjusting the water volume by rotating the rotating sleeve 805 is also possible.It can also be used for hydraulic balance adjustment outside of winter, which further improves the accuracy and stability of the equipment's hydraulic balance adjustment. Furthermore, by lowering the regulating tank 4 via the hydraulic cylinder 5, and simultaneously opening the electrically controlled one-way water inlet valve 602, the chilled water in the balance tank 601 can flow into the regulating tank 4 to mix with the low-temperature water. This improves the mixing effect of the chilled water and the low-temperature water, preventing localized temperature differences from affecting the cooling effect when the water cools the semiconductor. Additionally, in non-winter use, the water pipe 303 can be connected to an external ambient temperature water source. By adjusting the water flow rate of the water pipe 303, different temperatures of cooling water can be prepared in different balance tanks 601. This allows the equipment to adapt to the production of semiconductor equipment with different cooling temperatures, greatly expanding its adaptability.
[0038] In summary, this intelligent hydraulic balance adjustment device and method for a semiconductor PCW system, when in use, firstly, the water pump pipe 2 can be connected to the water pump outside the equipment. When the water pump is working, it can input the low-temperature water that has been cooled by the refrigeration machine into the water storage tank 1 for storage. In semiconductor manufacturing, key production equipment such as lithography machines, etching machines, and ion implanters generate a lot of heat during operation. The PCW system needs to provide these devices with stable and temperature-controlled cooling water to ensure that they can operate at the optimal temperature. When the production equipment needs cooling water, the electrically controlled rotating shaft 804 works, which can make the rotating sleeve 805 rotate at the outer end of the water inlet seat 802, so that the slots of the first water channel 803 and the second water channel 806 can overlap.
[0039] Then, the cooling water in the water storage tank 1 can enter the water inlet pipe 801 through the first water channel 803 and the second water channel 806. The water inlet pipe 801 is connected to the balance box 601, which allows the cooling water to enter the balance box 601. After the liquid level of the cooling water in the balance box 601 rises, it will be level with the height of the water outlet pipe 7. At this time, the cooling water can flow out from the water outlet pipe 7. The end of the water outlet pipe 7 is connected to the production equipment. Through the above operations, the cooling water can be used to cool the semiconductor manufacturing production equipment.
[0040] In the complex water pipe network, branches closer to the water pump or with low resistance tend to receive excessive flow, while branches farther away or with high resistance tend to have insufficient flow. Since semiconductor manufacturing is a precision manufacturing process, both excessive and insufficient water volume can easily affect product quality. Cooling water is first stored in the balance tank 601. The water volume in the balance tank 601 reflects the current flow status of the inlet pipe 801. As the buoyancy plate 605 rises and falls with the liquid level, the tension spring 604 can position the buoyancy plate 605 without affecting its normal rise and fall. When the buoyancy plate 605 is at a high liquid level, the tension rope 606 has a lower tension, and the tension sensor 607 senses a smaller tension value. Conversely, the sensed tension value is larger. Through this design, the equipment can easily determine whether there is an abnormal flow in the corresponding water circuit by acquiring the electrical signal of the tension sensor 607. This enables the equipment to efficiently and accurately detect whether the water circuit has an abnormal flow.
[0041] Then, when the water flow is too low, the electrically controlled valve 302 at the outer end of the water supply pipe 301 opens, allowing the cooling water inside the water storage tank 1 to enter the water supply pipe 303 through the water supply pipe 301. Since the water supply pipe 303 is connected to the regulating tank 4 through the telescopic pipe 305 and the connecting pipe 306, this allows the cooling water to enter the regulating tank 4. At this time, the electrically controlled one-way water inlet valve 602 opens, enabling the regulating tank 4 to connect with the balance tank 601 to replenish the water source. In addition, if the water supply is too large, the hydraulic cylinder 5 drives the regulating tank 4 to move downwards, enabling the regulating tank 4 to connect with the balance tank 601. The space between the balance tanks 601 increases instantaneously, which can prevent excessive water replenishment from affecting semiconductor production. Similarly, if the water replenishment is still too small, the hydraulic cylinder 5 drives the regulating tank 4 to move upward. The water body will increase its flow rate due to the reduced space between the regulating tank 4 and the balance tank 601, thereby ensuring sufficient water replenishment. When there is excessive flow in the water circuit, the electrically controlled one-way outlet valve 603 opens, and the excess water in the balance tank 601 can enter the regulating tank 4 for temporary storage through the electrically controlled one-way outlet valve 603. Through the above operations, the stability of the hydraulic balance regulation of the equipment can be guaranteed.
[0042] Then, in winter, the water pipe 303 can be connected to an external low-temperature water source. The low-temperature water source can enter the regulating tank 4 through the water pipe 303, the telescopic pipe 305, and the connecting pipe 306. By opening the electrically controlled one-way inlet valve 602, the low-temperature water source can enter the balance tank 601 and mix with the chilled water inside the storage tank 1. This design allows the refrigeration unit to achieve low-temperature refrigeration without preparing excessively low-temperature cooling water, which reduces the load on the refrigeration unit in winter. Furthermore, if the flow rate of the chilled water circuit is too low at this time... Water can still be replenished by opening the water supply pipe 301. The use of the check valve 304 can effectively prevent water backflow. When the water flow is too large, the rotating sleeve 805 can be rotated by the electric control shaft 804, which can reduce the opening size of the second water channel 806 and the first water channel 803, thereby adjusting the flow of the cooling water circuit. The operation of rotating the sleeve 805 to adjust the water volume can also be used for hydraulic balance adjustment in non-winter seasons, which further improves the hydraulic balance adjustment accuracy and stability of the equipment.
[0043] Finally, the hydraulic cylinder 5 drives the regulating tank 4 to move downwards, and at the same time, the electrically controlled one-way water inlet valve 602 opens, allowing the cooling water in the balance tank 601 to flow into the regulating tank 4 and mix with the low-temperature water. This improves the mixing effect of the cooling water and the low-temperature water, and avoids the local temperature difference affecting the cooling effect when the water cools the semiconductor. In addition, when used outside of winter, the water pipe 303 can be connected to the ambient temperature water source. By adjusting the water flow rate of the water pipe 303, cooling water of different temperatures can be prepared in different balance tanks 601. This allows the equipment to adapt to the production of semiconductor equipment with different cooling temperatures, which greatly improves the adaptability of the equipment.
[0044] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0045] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.
Claims
1. A smart hydraulic balance regulating device for a semiconductor PCW system, characterized in that, The system includes a water storage tank (1), a water replenishment component (3), and a balance adjustment component (6). The top of the water storage tank (1) is connected to a water pump pipe (2), and the water replenishment component (3) is installed at the outer end of the water storage tank (1). An adjustment box (4) is installed at the top outer end of the water replenishment component (3), and a hydraulic cylinder (5) is installed at the outer end of the adjustment box (4). The balance adjustment component (6) is installed at the top of the hydraulic cylinder (5). The balance adjustment component (6) includes a balance box (601), and an electrical control unit is installed at the bottom of the balance box (601). The balance box (601) is equipped with a water inlet valve (602) and an electrically controlled one-way water outlet valve (603). A tension spring (604) is installed on the inner top of the balance box (601), and a buoyancy plate (605) is installed at the bottom end of the tension spring (604). A tension rope (606) is installed between the buoyancy plate (605) and the balance box (601), and a tension sensor (607) is installed at the middle end of the tension rope (606). A water outlet pipe (7) is connected to the outer end of the balance box (601), and a water inlet assembly (8) is installed at the outer end of the balance box (601).
2. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 1, characterized in that, The water replenishment component (3) includes a water replenishment pipe (301), an electric control valve (302) is installed at the outer end of the water replenishment pipe (301), and a water supply pipe (303) is connected to the end of the water replenishment pipe (301). A check valve (304) is installed at the outer end of the water supply pipe (303), and a telescopic pipe (305) is installed at the top end of the water supply pipe (304). A connecting pipe (306) is installed at the top end of the telescopic pipe (305).
3. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 2, characterized in that, The water supply pipe (301) is connected to the water storage tank (1), and the water supply pipe (301) is connected to the water supply pipe (303).
4. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 2, characterized in that, The water pipe (303) is connected to the connecting pipe (306) via the telescopic pipe (305), and the connecting pipe (306) is connected to the regulating box (4).
5. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 1, characterized in that, The regulating box (4) is connected to the balance box (601) in a sleeve, and the electrically controlled one-way water inlet valve (602) and electrically controlled one-way water outlet valve (603) of the regulating box (4) are connected to the inside of the balance box (601).
6. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 5, characterized in that, The tension spring (604) is elastically connected to the buoyancy plate (605), and the height of the buoyancy plate (605) varies with the liquid level in the balance tank (601).
7. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 1, characterized in that, The water inlet assembly (8) includes a water inlet pipe (801), a water inlet seat (802) is provided at the end of the water inlet pipe (801), and a first water passage groove (803) is provided at the outer end of the water inlet seat (802). An electrically controlled rotating shaft (804) is provided at the outer end of the water inlet seat (802), and a rotating sleeve (805) is provided at the outer end of the electrically controlled rotating shaft (804). A second water passage groove (806) is provided at the outer end of the rotating sleeve (805).
8. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 7, characterized in that, The first water channel (803) is connected to the water inlet pipe (801) through the water inlet seat (802), and the water inlet pipe (801) is connected to the balance box (601).
9. The intelligent hydraulic balance regulating device for a semiconductor PCW system according to claim 7, characterized in that, The rotating sleeve (805) is sleeved and connected to the water inlet seat (802), and the rotating sleeve (805) rotates with the electrically controlled rotating shaft (804).
10. A method for intelligent hydraulic balance adjustment in a semiconductor PCW system, characterized in that, The intelligent hydraulic balance regulation method for a semiconductor PCW system is applied to an intelligent hydraulic balance regulation device for a semiconductor PCW system. The method includes: S1. The water pump pipe (2) is connected to the water pump, and the low-temperature water cooled by the refrigeration machine is input into the water storage tank (1) for storage. When the production equipment needs cooling water, the electric control shaft (804) works, so that the rotating sleeve (805) rotates at the outer end of the water inlet seat (802), so that the slots of the first water channel (803) and the second water channel (806) overlap. The cooling water in the water storage tank (1) enters the water inlet pipe (801) through these two water channels and flows further into the balance box (601). S2. The cooling water level rises inside the balance tank (601). Through the design of the buoyancy plate (605) and tension spring (604), the real-time monitoring of the water level is realized. The buoyancy plate (605) rises and falls with the water level. Through the tension rope (606) and tension sensor (607), the electrical signal is obtained, and the equipment can determine whether there is an abnormal flow in the water circuit. S3. When the water flow rate is detected to be too low, the electric control valve (302) opens, and the cooling water in the water storage tank (1) enters the water supply pipe (303) through the water supply pipe (301), and enters the regulating box (4) through the telescopic pipe (305) and the connecting pipe (306). The electric control one-way water inlet valve (602) opens, realizing the connection between the regulating box (4) and the balance box (601), thereby replenishing the water source. If the water replenishment is too large, the hydraulic cylinder (5) drives the regulating box (4) to move down to increase the space to avoid excessive water replenishment. If the water replenishment is still too small, the regulating box (4) moves up to reduce the space to increase the flow rate. S4. When the water flow is too large, the electrically controlled one-way outlet valve (603) opens, and the excess water in the balance box (601) enters the regulating box (4) for temporary storage through the electrically controlled one-way outlet valve (603), thereby ensuring the stability of the hydraulic balance regulation. S5. In winter, the water pipe (303) is connected to an external low-temperature water source. The low-temperature water enters the regulating tank (4) through the water pipe (303), the telescopic pipe (305), and the connecting pipe (306). The electrically controlled one-way water inlet valve (602) is opened, and the low-temperature water source enters the balance tank (601) and mixes with the cooling water in the water storage tank (1) to achieve low-temperature cooling without the need to prepare cooling water at excessively low temperatures. In non-winter seasons, the water pipe (303) is connected to an external normal-temperature water source. By adjusting the water flow rate of the water pipe (303), cooling water at different temperatures is prepared in the balance tank (601) to adapt to the production of semiconductor equipment with different cooling temperatures.