Vacuum testing apparatus and testing method

Abstract

This invention provides a vacuum testing device and method, relating to the technical field of vacuum sealing. The vacuum testing device includes: a housing with a vacuum chamber inside; a liquid nitrogen transmission assembly, including: a mounting base installed on the side of the housing; a liquid nitrogen transmission pipeline inserted into the vacuum chamber through the mounting base, both ends of the liquid nitrogen transmission pipeline including connecting sections extending through the mounting base and out of the housing, the connecting sections being suitable for receiving or discharging liquid nitrogen introduced from the outside; a stage installed on the liquid nitrogen transmission pipeline to hold the sample to be tested, the temperature of the stage being adjusted by the flow of liquid nitrogen in the liquid nitrogen transmission pipeline; and two sets of first sealing assemblies respectively fitted onto the connecting sections and pressed between the outer side of the connecting sections and the mounting base. The first sealing assemblies are configured to create a sealed testing environment in the vacuum chamber by expanding or contracting different parts when the temperature inside the vacuum chamber changes to above or below a predetermined temperature.

Description

Technical Field

[0001] This invention relates to the technical field of vacuum sealing, and more specifically, to a vacuum testing device and testing method. Background Technology

[0002] With the development of materials science, aerospace technology, semiconductor technology, and micro-electro-mechanical systems (MEMS), the demand for materials, integrated circuit chips, and high-performance sensors for applications in extreme environments (including vacuum, ultra-low temperatures (-40℃ to -196℃), and high temperatures) has increased significantly. The structure, properties, and operating states of such materials and devices under extreme conditions undergo nonlinear changes with environmental conditions. To accurately assess the reliability of such materials and devices in extreme environments and establish corresponding models, it is necessary to construct a testing system capable of accurately simulating the target extreme environment, while simultaneously achieving in-situ measurement and data analysis under multi-physics coupling conditions.

[0003] As a core component of such testing systems, the high and low temperature stage needs to operate in a wide temperature range (e.g., -196℃ to 260℃) and under vacuum (≤10℃). -3 Under MAR (Magnetic Resonance) conditions, it provides stable extreme environmental loading capability for the sample to be tested. However, the existing vacuum sealing devices of high and low temperature stages have shortcomings in terms of sealing effect of liquid nitrogen cryogenic pipeline and sealing efficiency, ease of operation and durability of shell sealing cover opening and closing mechanism. Summary of the Invention

[0004] To address at least one of the technical problems in the prior art, embodiments of the present invention provide a vacuum testing device and a testing method, which seals the vacuum chamber and provides a stable testing environment for the sample to be tested.

[0005] This invention provides a vacuum testing device, comprising: a housing having a vacuum chamber inside; a liquid nitrogen transmission assembly, comprising: a mounting base installed on the side of the housing; a liquid nitrogen transmission pipeline inserted into the vacuum chamber through the mounting base, both ends of the liquid nitrogen transmission pipeline including connecting sections extending through the mounting base and out of the housing, the connecting sections being adapted to receive or discharge liquid nitrogen introduced from the outside; a stage installed on the liquid nitrogen transmission pipeline to hold a sample to be tested, the temperature of the stage being adjusted by the flow of liquid nitrogen in the liquid nitrogen transmission pipeline; and two sets of first sealing assemblies respectively sleeved on the connecting sections and pressed between the outer side of the connecting sections and the mounting base, the first sealing assemblies being configured to create a sealed testing environment in the vacuum chamber by expanding or contracting at different locations when the temperature inside the vacuum chamber changes to above or below a predetermined temperature.

[0006] Optionally, the two sets of the first sealing components are respectively installed in two first mounting holes formed at intervals on the mounting base. Each set of the first sealing components includes: a first sealing element located inside the first mounting hole; and a first fixing element that cooperates with the mounting base to compress the first sealing element to deform it. The deformed first sealing element fills the gap between the outer side of the joint section and the first mounting hole.

[0007] Optionally, each of the first mounting holes has a protrusion that protrudes axially away from the vacuum chamber along the joint section, and each of the first seals includes: a first part that engages with the protrusion; and a second part that extends from the first part into the first fixing member; wherein, when the temperature inside the vacuum chamber drops below the predetermined temperature, the first part contracts and clamps the protrusion to prevent air from the external environment from entering the vacuum chamber.

[0008] Optionally, the radius of the second part extending into the first fixing member gradually decreases, and the vacuum testing device further includes a heating component configured to heat the stage; wherein, when the temperature inside the vacuum chamber rises above the predetermined temperature, the second part expands and hugs the outside of the connecting section through the first fixing member to prevent air from the external environment from entering the vacuum chamber.

[0009] Optionally, the mounting base is provided with a first groove, and the liquid nitrogen transfer assembly further includes a second seal disposed in the first groove. The mounting base contacts the side of the housing and squeezes the second seal to deform, thereby forming a sealed test environment inside the vacuum chamber.

[0010] Optionally, the vacuum testing device further includes: a cover, which is closable and can be placed on top of the housing; and a rotating assembly, which is rotatably mounted on the housing. The rotating assembly includes: a rotating shaft, which is adapted to drive the cover to switch between an open state and a closed state around the axis of the rotating shaft. The cover is spirally raised around the axis of the rotating shaft under the drive of the rotating shaft to form the open state, which is detached from the housing. The cover is spirally lowered around the axis of the rotating shaft under the drive of the rotating shaft to form the closed state, which is in contact with the housing.

[0011] Optionally, a second mounting hole is provided on the housing along a direction perpendicular to the plane of the cover, the rotating shaft is rotatably mounted in the second mounting hole, a second groove is provided on the rotating shaft along the circumferential direction, the second groove extends along the axial direction of the rotating shaft, and the rotating assembly further includes a guide shaft that extends radially into the second groove to provide guidance for the rotating shaft to drive the cover to spirally rise or spirally fall.

[0012] Optionally, a third groove is provided on the surface of the housing that contacts the cover. The vacuum testing device further includes a third sealing member disposed in the third groove, so that when the cover descends in a spiral manner, it contacts the housing and the third sealing member is squeezed and deformed, thereby forming a sealed testing environment inside the vacuum chamber.

[0013] Optionally, the cover has a first through hole located above the sample to be tested. The vacuum testing device further includes: a window disposed in the first through hole for observing the sample to be tested; a fourth groove disposed on the cover along the circumference of the window; a fourth sealing member disposed in the fourth groove; and a pressure cap disposed above the fourth sealing member to press the fourth sealing member against the fourth groove, thereby creating a sealed testing environment inside the vacuum chamber.

[0014] Another embodiment of the present invention provides a testing method applicable to the aforementioned vacuum testing apparatus. The testing method includes: opening the cover axially around a rotating shaft and placing the sample to be tested on a stage; closing the cover axially around the rotating shaft and evacuating the vacuum chamber inside the housing using an external vacuum pump until the vacuum level inside the vacuum chamber is no greater than 10. -3 mbar; The temperature of the above-mentioned stage is adjusted using a liquid nitrogen transfer component or a heating component, and the above-mentioned sample to be tested is observed and tested.

[0015] According to an embodiment of the present invention, a vacuum testing device and method are provided. The housing contains a vacuum chamber. The liquid nitrogen transmission assembly includes a mounting base, a liquid nitrogen transmission pipeline, a stage, and two sets of first sealing assemblies. The mounting base is installed on the side of the housing. The liquid nitrogen transmission pipeline is inserted into the vacuum chamber through the mounting base. Both ends of the liquid nitrogen transmission pipeline include connecting sections extending through the mounting base and out of the housing. The connecting sections are suitable for receiving or discharging liquid nitrogen introduced from the outside. The stage is installed on the liquid nitrogen transmission pipeline to hold the sample to be tested. The temperature of the stage is adjusted by the flow of liquid nitrogen in the liquid nitrogen transmission pipeline. The two sets of first sealing assemblies are respectively sleeved on the connecting sections and pressed between the outer side of the connecting sections and the mounting base. The first sealing assemblies are configured to maintain a seal in the vacuum chamber by expanding or contracting at different locations when the temperature inside the vacuum chamber changes above or below a predetermined temperature, thus providing a stable testing environment for the sample to be tested. Attached Figure Description

[0016] Figure 1 This is a perspective view of a vacuum testing apparatus according to an embodiment of the present invention;

[0017] Figure 2This is an exploded view of a liquid nitrogen transport assembly according to an embodiment of the present invention;

[0018] Figure 3 This is a perspective view of a first sealing element according to an embodiment of the present invention;

[0019] Figure 4 This is an exploded view of a housing component according to an embodiment of the present invention;

[0020] Figure 5 This is a perspective view of a rotating shaft according to an embodiment of the present invention;

[0021] Figure 6 This is a partial cross-sectional view of a vacuum testing apparatus according to an embodiment of the present invention;

[0022] Figure 7 yes Figure 6 A magnified view of a section at point A in the middle;

[0023] Figure 8 This is a cross-sectional view of a vacuum testing apparatus according to an embodiment of the present invention;

[0024] Figure 9 yes Figure 6 Cross-sectional view in the GG direction;

[0025] Figure 10 yes Figure 9 A magnified view of a section at point B in the middle;

[0026] Figure 11 This is a flowchart of a testing method according to an embodiment of the present invention.

[0027] In the accompanying drawings, the meanings of the reference numerals are as follows:

[0028] 1. Shell;

[0029] 101. Mounting surface;

[0030] 102. Second mounting hole;

[0031] 103. The third groove;

[0032] 2. Cover;

[0033] 200. Fourth groove;

[0034] 201. First through hole;

[0035] 3. Mounting bracket;

[0036] 30. First mounting hole;

[0037] 301. Protrusion;

[0038] 302. First groove;

[0039] 4. Liquid nitrogen transfer pipeline;

[0040] 41. Connecting paragraphs;

[0041] 5. Storage table;

[0042] 6. First sealing element;

[0043] 60. Second through hole;

[0044] 61. Part Two;

[0045] 62. Part One;

[0046] 7. First fastener;

[0047] 70. Third through hole;

[0048] 8. Second sealing element;

[0049] 9. Shaft;

[0050] 90. Second groove;

[0051] 10. Guide shaft;

[0052] 11. Third sealing element;

[0053] 12. Window slats;

[0054] 13. Fourth sealing element;

[0055] 14. Capping;

[0056] 15. Mounting slot;

[0057] 16. Limiting components;

[0058] 17. The sixth groove;

[0059] 18. Flange;

[0060] 19. Fourth fastener;

[0061] 20. Second fastener;

[0062] 21. Third fastener. Detailed Implementation

[0063] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the invention for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0064] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0065] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0066] When using expressions such as "at least one of A, B, and C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.). When using expressions such as "at least one of A, B, or C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0067] Existing small vacuum sealing devices employ a single-sided ferrule sealing structure made of PTFE, which is insufficient to meet the vacuum sealing requirements of high and low temperature stages with wide temperature ranges (e.g., -196℃ to 260℃) in liquid nitrogen cryogenic pipelines. Regarding the sealing efficiency, ease of operation, and durability of the shell sealing cover opening and closing mechanism, existing small vacuum sealing devices mostly use bolt-fastened or push-pull type sealing covers. Bolt-fastening relies on the pressure of the bolt against atmospheric pressure for sealing, which is cumbersome, and bolts are prone to loss and loosening over time, affecting the vacuum sealing effect of the small vacuum sealing device. Push-pull type sealing covers rely on atmospheric pressure to adsorb the cover plate for vacuum sealing, which is difficult to achieve high vacuum levels, and the sealing performance is prone to degradation under frequent opening and closing.

[0068] To address the performance degradation of vacuum seals under wide temperature ranges (e.g., -196℃ to 260℃), according to one aspect of the invention, a vacuum testing device is provided. The device includes a housing and a liquid nitrogen transmission assembly. The housing contains a vacuum chamber. The liquid nitrogen transmission assembly includes a mounting base, a liquid nitrogen transmission pipeline, a stage, and two sets of first sealing assemblies. The mounting base is installed on the side of the housing. The liquid nitrogen transmission pipeline is inserted into the vacuum chamber through the mounting base. Both ends of the pipeline include connecting sections extending through the mounting base and out of the housing. These connecting sections are suitable for receiving or discharging liquid nitrogen introduced from the outside. The stage is installed on the liquid nitrogen transmission pipeline to hold the sample to be tested. The temperature of the stage is adjusted by the flow of liquid nitrogen in the pipeline. The two sets of first sealing assemblies are respectively fitted onto the connecting sections and pressed between the connecting sections and the mounting base. The first sealing assemblies are configured to maintain a seal within the vacuum chamber by expanding or contracting at different locations when the temperature inside the vacuum chamber changes above or below a predetermined temperature, thus providing a stable testing environment for the sample.

[0069] Figure 1 This is a perspective view of a vacuum testing apparatus according to an embodiment of the present invention.

[0070] A vacuum testing apparatus is provided according to an embodiment of the present invention, such as... Figure 1As shown, the vacuum testing device includes a housing 1 and a liquid nitrogen transfer assembly. The liquid nitrogen transfer assembly includes a mounting base 3, a liquid nitrogen transfer pipeline 4, a stage, and two sets of first sealing assemblies. The mounting base 3 is installed on the side of the housing 1. The liquid nitrogen transfer pipeline 4 is inserted into the vacuum chamber through the mounting base 3. Both ends of the liquid nitrogen transfer pipeline 4 include connecting sections that extend out of the housing 1 through the mounting base 3. The connecting sections are suitable for receiving or discharging liquid nitrogen introduced from the outside. The stage is installed on the liquid nitrogen transfer pipeline 4 to hold the sample to be tested. The temperature of the stage is adjusted by the flow of liquid nitrogen in the liquid nitrogen transfer pipeline 4. The two sets of first sealing assemblies are respectively sleeved on the connecting sections and pressed between the outer side of the connecting sections and the mounting base 3. The first sealing assemblies are configured to create a sealed testing environment in the vacuum chamber by expanding or contracting at different parts when the temperature in the vacuum chamber changes to above or below a predetermined temperature.

[0071] According to an embodiment of the present invention, a mounting surface 101 is provided on the side of the housing 1, and the mounting base 3 is threadedly connected to the mounting surface 101 of the housing 1 by two sets of spaced second fasteners 20, the second fasteners 20 being bolts.

[0072] According to an embodiment of the present invention, the liquid nitrogen transmission pipeline 4 may include a main body and two connecting sections. The main body and the two connecting sections may be integrally formed. Alternatively, the main body may be disposed within a vacuum chamber. The two connecting sections extend from the housing 1 through the mounting base 3 in the form of sleeves and connect to both ends of the main body within the vacuum chamber.

[0073] According to an embodiment of the present invention, liquid nitrogen is introduced or discharged through the junction section, and circulates in the liquid nitrogen transmission pipeline 4 to regulate the temperature of the stage. The first sealing component is configured to maintain a seal even when the temperature inside the vacuum chamber changes above or below a predetermined temperature, due to expansion or contraction at different locations, thus providing a stable testing environment for the sample. Simultaneously, the vacuum testing device meets the design requirements of miniaturization and portability.

[0074] Figure 2 This is an exploded view of a liquid nitrogen transport assembly according to an embodiment of the present invention. Figure 3 This is a perspective view of a first seal according to an embodiment of the present invention. Figure 6 This is a partial cross-sectional view of a vacuum testing apparatus according to an embodiment of the present invention.

[0075] According to embodiments of the present invention, such as Figure 2 and Figure 6As shown, two sets of first sealing assemblies are respectively installed in two first mounting holes 30 formed at intervals on the mounting base 3. Each set of first sealing assemblies includes a first sealing element 6 and a first fixing element 7. The first sealing element 6 is located inside the first mounting hole 30. The first fixing element 7 cooperates with the mounting base 3 to compress the first sealing element 6, causing it to deform. The deformed first sealing element 6 fills the gap between the outer side of the joint section and the first mounting hole 30.

[0076] According to an embodiment of the present invention, two first mounting holes 30 are arranged at intervals and both extend in a direction perpendicular to the mounting surface 101.

[0077] According to embodiments of the present invention, such as Figure 3 As shown, the first seal 6 has a second through hole 60 along the axial direction of the joint section to allow the joint section to pass through. Figure 2 and Figure 6 As shown, the first fastener 7 has a third through hole 70 along the axial direction of the connecting section to allow the connecting section to pass through the protrusion of the mounting base 3.

[0078] According to an embodiment of the present invention, the first seal 6 may be made of polytetrafluoroethylene material.

[0079] According to an embodiment of the present invention, the first fixing member 7 is threadedly connected to the mounting base 3, which compresses the first sealing member 6 into the first mounting hole 30 and causes deformation. The deformed first sealing member 6 fills the gap between the outer side of the joint section and the first mounting hole 30, thereby keeping the vacuum chamber sealed.

[0080] Figure 7 yes Figure 6 A magnified view of a portion of point A in the middle.

[0081] According to embodiments of the present invention, such as Figure 2 , Figure 3 and Figure 7 As shown, each first mounting hole 30 has a protrusion 301 extending axially away from the vacuum chamber along the connecting section 41, and each first seal 6 includes a first part 62 and a second part 61. The first part 62 engages with the protrusion 301. The second part 61 extends from the first part 62 into the first retainer 7. When the temperature inside the vacuum chamber drops below a predetermined temperature, the first part 62 contracts, clamping the protrusion 301 to prevent air from the external environment from entering the vacuum chamber.

[0082] According to embodiments of the present invention, such as Figure 2 , Figure 3 and Figure 7As shown, each first mounting hole 30 has a protrusion 301 protruding axially away from the vacuum chamber along the connecting section 41. The first part 62 has a fifth groove extending axially along the connecting section 41, such that the protrusion 301 is embedded in the fifth groove. When the temperature inside the vacuum chamber drops below a predetermined temperature, the fifth groove contracts and clamps the protrusion 301, filling the gap between the outer side of the connecting section 41 and the inner wall of the protrusion 301, thus preventing air from the external environment from entering the vacuum chamber.

[0083] According to an embodiment of the present invention, the predetermined temperature can be room temperature (25°C ± 3°C). When the temperature inside the vacuum chamber drops below 25°C, the fifth groove hugs the protrusion 301, which can prevent air from the external environment from entering the vacuum chamber.

[0084] According to an embodiment of the present invention, when the temperature inside the vacuum chamber decreases from 25°C to -196°C, the first seal 6 shrinks by approximately 2.8% to 3.3%.

[0085] According to embodiments of the present invention, such as Figure 3 and Figure 7 As shown, the radius of the second part 61 extending into the first fixing member 7 gradually decreases. The vacuum testing device also includes a heating component configured to heat the stage. When the temperature inside the vacuum chamber rises above a predetermined temperature, the second part 61 expands and clamps the outer side of the connecting section 41 through the first fixing member 7 to prevent air from the external environment from entering the vacuum chamber.

[0086] According to an embodiment of the present invention, the heating component can be a heater, and the heating component can be disposed below the platform. When the temperature inside the vacuum chamber rises above a predetermined temperature, the predetermined temperature can be room temperature (25℃±3℃). The second part 61 expands, so that the outer surface of the second part 61 is in close contact with the inner wall of the first fixing member 7, and is held tightly to the outside of the connecting section 41 by the first fixing member 7, so as to prevent the air of the external environment from entering the vacuum chamber, thereby forming a sealed test environment inside the vacuum chamber.

[0087] According to an embodiment of the present invention, when the temperature inside the vacuum chamber rises from 25°C to 260°C, the first seal 6 expands by approximately 2.5% to 3%.

[0088] According to an embodiment of the present invention, when the temperature inside the vacuum chamber drops below a predetermined temperature, the first part 62 contracts and clamps the protrusion 301; when the temperature inside the vacuum chamber rises above the predetermined temperature, the second part 61 expands and clamps the outer side of the connecting section 41 through the first fixing member 7. This ensures that the connecting section 41 of the liquid nitrogen transmission pipeline 4 and the mounting base 3 meet the requirements for vacuum sealing under a wide range of temperature changes inside the vacuum chamber, thus providing a stable testing environment for the sample to be tested.

[0089] According to embodiments of the present invention, such as Figure 2 and Figure 7 As shown, the mounting base 3 has a first groove 302. The liquid nitrogen transfer assembly also includes a second seal 8, which is disposed in the first groove 302. The mounting base 3 contacts the side of the housing 1 and squeezes the second seal 8 to deform, so that the interior of the vacuum chamber forms a sealed test environment.

[0090] According to embodiments of the present invention, such as Figure 1 , Figure 2 and Figure 7 As shown, a first groove 302 is provided on the side of the mounting base 3 near the mounting surface 101. The first groove 302 is configured to surround the mounting base 3. The second seal 8 is disposed in the first groove 302. The mounting base 3 contacts the mounting surface 101 of the housing 1 and squeezes the second seal 8 to deform it, so as to press the second seal 8 against the first groove 302, so that a sealed test environment is formed inside the vacuum chamber.

[0091] According to an embodiment of the present invention, the second seal 8 may be an O-ring.

[0092] Figure 4 This is an exploded view of a housing component according to an embodiment of the present invention.

[0093] According to embodiments of the present invention, such as Figure 4 As shown, the vacuum testing device also includes a cover 2 and a rotating assembly. The cover 2 is closable and covers the top of the housing 1. The rotating assembly is rotatably mounted on the housing 1. The rotating assembly includes a rotating shaft 9. The rotating shaft 9 is suitable for driving the cover 2 to switch between an open state and a closed state around the axis of the rotating shaft 9. Under the drive of the rotating shaft 9, the cover 2 spirally rises around the axis of the rotating shaft 9 to form an open state that is detached from the housing 1. Under the drive of the rotating shaft 9, the cover 2 spirally descends around the axis of the rotating shaft 9 to form a closed state that is in contact with the housing 1.

[0094] According to embodiments of the present invention, such as Figure 2 and Figure 4As shown, a mounting surface 101 is provided on the side of the housing 1, and a mounting groove 15 is provided on the mounting surface 101. The liquid nitrogen transmission pipeline 4 passes through the mounting groove 15 from the mounting base 3 and is inserted into the vacuum chamber.

[0095] According to an embodiment of the present invention, the cover 2 is closable and covers the top of the housing 1, and the plane in which the cover 2 is located (e.g., Figure 4 The plane enclosed by the X and Y directions in the middle) and the mounting surface 101 (as shown in the figure) Figure 4 The plane bounded by the Y and Z directions is perpendicular to each other. Figure 4 The X, Y, and Z directions are orthogonal to each other.

[0096] According to an embodiment of the present invention, a third mounting hole is provided on the rotating shaft 9, extending radially along the rotating shaft 9. An extension portion extending in the Z direction is formed on the periphery of the cover 2. A fourth through hole is provided on the side of the extension portion near the rotating shaft 9. The third fixing member 21 is radially inserted into the third mounting hole through the fourth through hole and threadedly connected to the third mounting hole to fix the cover 2 to the rotating shaft 9. The rotating shaft 9 can drive the cover 2 to switch between an open state and a closed state around the axial direction of the rotating shaft 9.

[0097] Figure 5 This is a perspective view of a rotating shaft according to an embodiment of the present invention. Figure 8 This is a cross-sectional view of a vacuum testing apparatus according to an embodiment of the present invention.

[0098] According to embodiments of the present invention, such as Figure 4 and Figure 8 As shown, a second mounting hole 102 is provided on the housing 1 along a direction perpendicular to the plane of the cover 2, and the rotating shaft 9 is rotatably mounted in the second mounting hole 102, as shown. Figure 4 and Figure 5 As shown, a second groove 90 is provided on the circumferential axis of the rotating shaft 9. The rotating assembly also includes a guide shaft 10, which extends radially into the second groove 90 to provide guidance for the rotating shaft 9 to drive the cover 2 to spirally rise or spirally fall.

[0099] According to an embodiment of the present invention, the second mounting hole 102 extends along the Z direction, the guide shaft 10 is threadedly connected to the housing 1, and extends through the housing 1 into the second groove 90 along the radial direction of the rotating shaft 9, so as to provide guidance for the rotating shaft 9 to drive the cover 2 to spirally rise or spirally fall.

[0100] According to an embodiment of the present invention, the fourth fastener 19 is sleeved on the outside of the guide shaft 10 and threadedly connected to the guide shaft 10.

[0101] According to an embodiment of the present invention, a fourth mounting hole is provided on the housing 1 in a direction perpendicular to the plane of the cover 2. The fourth mounting hole extends in the Z direction. The limiting member 16 is installed in the fourth mounting hole. The cover 2 is provided with an opening. The opening on the cover 2 is suitable for the cover 2 to spirally descend around the axis of the rotating shaft 9 under the drive of the rotating shaft 9, forming a closed state in contact with the housing 1. At this time, the flange 18 of the extension part is engaged with the sixth groove 17 on the housing 1, and the limiting member 16 is threadedly connected to the fourth mounting hole on the housing 1, restricting the axial movement of the cover 2 around the rotating shaft 9, and preventing the position of the cover 2 relative to the housing 1 from shifting.

[0102] According to embodiments of the present invention, such as Figure 4 and Figure 5 As shown, the limiting member 16 is rotated and loosened from the fourth mounting hole on the housing 1. The cover 2 can spirally rise around the axis of the rotating shaft 9 under the drive of the rotating shaft 9. The guide shaft 10 slides in the second groove 90 to provide guidance for the rotating shaft 9 to drive the cover 2 to spirally rise. At this time, there is a gap between the cover 2 and the housing 1, forming an open state that is separated from the housing 1.

[0103] According to an embodiment of the present invention, the limiting member 16 locks the cover 2 with the opening on the cover 2, which solves the problem of the cumbersome operation of the existing shell sealing cover which uses multiple bolts to fasten it. Moreover, the limiting member 16 is not easy to loosen after long-term use, and can maintain the sealing effect in the vacuum chamber.

[0104] Figure 9 yes Figure 6 Cross-sectional view in the GG direction, Figure 10 yes Figure 9 A magnified view of a section at point B in the middle.

[0105] According to embodiments of the present invention, such as Figure 4 , Figure 9 and Figure 10 As shown, a third groove 103 is provided on the surface of the housing 1 that contacts the cover 2. The vacuum testing device also includes a third sealing element 11, which is disposed in the third groove 103. When the cover 2 descends in a spiral manner, it is squeezed and deformed by contacting the housing 1, so that a sealed testing environment is formed inside the vacuum chamber.

[0106] According to embodiments of the present invention, such as Figure 4 , Figure 5 , Figure 9 and Figure 10As shown, the third groove 103 is configured to surround the cover 2, and the third seal 11 is disposed in the third groove 103. When the cover 2 spirally descends around the axis of the rotating shaft 9, the guide shaft 10 slides in the second groove 90, providing guidance for the spiral descent of the cover 2 driven by the rotating shaft 9, so that the cover 2 contacts the housing 1. Then, the limiting member 16 is threadedly connected to the fourth mounting hole on the housing 1. At this time, under vacuum conditions, under the combined action of external atmospheric pressure and the pre-tightening force between the limiting member 16 and the fourth mounting hole, the third seal 11 is squeezed and deformed, so that a sealed test environment is formed inside the vacuum chamber. Even when the cover 2 is frequently opened and closed, the high vacuum degree and sealing effect inside the vacuum chamber can be guaranteed.

[0107] According to an embodiment of the present invention, the third seal 11 may be an O-ring.

[0108] According to embodiments of the present invention, such as Figure 4 and Figure 9 As shown, the cover 2 has a first through hole 201 located above the sample to be tested. The vacuum testing device also includes a window 12, a fourth sealing element 13, and a pressure cap 14. The window 12 is positioned at the first through hole 201 for observing the sample to be tested. A fourth groove 200 is formed on the cover 2 along the circumference of the window 12. The fourth sealing element 13 is positioned in the fourth groove 200. The pressure cap 14 is positioned above the fourth sealing element 13 to press the fourth sealing element 13 against the fourth groove 200, thereby creating a sealed testing environment inside the vacuum chamber.

[0109] According to an embodiment of the present invention, the pressure cap 14 is provided with two loading and unloading holes, which are arranged symmetrically along the radial direction of the pressure cap 14. The pressure cap 14 is threadedly connected to the cover body 2 to tightly press the fourth sealing member 13 into the fourth groove 200, so that a sealed test environment is formed inside the vacuum chamber.

[0110] According to an embodiment of the present invention, when the window slat 12 needs to be replaced, the operator can disassemble the pressure cap 14 through the two mounting and dismounting holes on the pressure cap 14, which can reduce the phenomenon of accidental disassembly or loosening of the window slat 12, thereby ensuring the sealing effect in the vacuum chamber. After the window slat 12 is replaced, the operator can manually screw the pressure cap 14 into the first through hole 201 on the cover body 2 without using other tools.

[0111] Figure 11 This is a flowchart of a testing method according to an embodiment of the present invention.

[0112] According to another embodiment of the invention, such as Figure 2 , Figure 4 and Figure 11As shown, a test method is provided, applicable to the above-mentioned vacuum test device. The test method includes the following steps S1 to S3.

[0113] Step S1: Open the cover 2 axially around the rotating shaft 9 and place the sample to be tested on the stage 5.

[0114] According to an embodiment of the present invention, when the vacuum chamber inside the housing 1 is in an atmospheric environment (normal pressure) and the temperature is stable at room temperature (25℃±3℃), the limiting member 16 is rotated and loosened from the fourth mounting hole on the housing 1, and then the cover 2 is opened axially around the rotating shaft 9, and the sample to be tested is placed on the stage 5.

[0115] Step S2: Close the cover 2 axially around the rotating shaft 9, and use an external vacuum pump to evacuate the vacuum chamber inside the housing 1 until the vacuum level inside the vacuum chamber is no greater than 10. -3 mbar.

[0116] Step S3: Adjust the temperature of the stage 5 using the liquid nitrogen transfer component or the heating component, and observe and test the sample to be tested.

[0117] According to an embodiment of the present invention, based on a preset target temperature (e.g., -196°C or +260°C) by an external controller, the controller can control the liquid nitrogen transfer component to execute a cooling command and dynamically adjust the flow rate of liquid nitrogen through a PID algorithm to achieve stable control of the cooling of the platform 5. Alternatively, the controller can control the heating component to execute a heating command and dynamically adjust the heating power of the heating component through a PID algorithm to achieve stable control of the heating of the platform 5.

[0118] According to embodiments of the present invention, the vacuum testing device, when used in conjunction with a probe station, can be used to test the electrical properties of the sample. When used in conjunction with a confocal microscope, the surface morphology of the sample can be observed. When used in conjunction with a Raman spectrometer, the chemical composition and lattice vibrations of the sample can be analyzed. When used in conjunction with different devices, the vacuum testing device can simultaneously acquire characteristic data of the sample under multi-physics coupling in extreme environments.

[0119] The embodiments of the present invention have been described above. However, these embodiments are merely illustrative and not intended to limit the scope of the invention. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the invention, and all such substitutions and modifications should fall within the scope of the invention.

Claims

1. A vacuum testing device, characterized by, The application relates to a vacuum testing device. The vacuum testing device comprises: a shell, which has a vacuum chamber inside; a liquid nitrogen transmission assembly, which comprises: a mounting seat, which is mounted on the side of the shell; a liquid nitrogen transmission pipeline, which is inserted into the vacuum chamber from the mounting seat, and both ends of the liquid nitrogen transmission pipeline comprise joint sections which extend out of the shell through the mounting seat and are suitable for receiving or discharging liquid nitrogen from the outside; a placing table, which is mounted on the liquid nitrogen transmission pipeline to carry a sample to be tested, and the temperature of the placing table is adjusted by the flow of liquid nitrogen in the liquid nitrogen transmission pipeline; two groups of first sealing assemblies, which are respectively mounted in two spaced first mounting holes of the mounting seat, each first mounting hole has a protruding part which protrudes away from the vacuum chamber along the axial direction of the joint section, and the two groups of first sealing assemblies are configured to form a sealed test environment in the vacuum chamber by expansion or contraction of different parts when the temperature in the vacuum chamber changes above or below a predetermined temperature, each group of first sealing assemblies comprises: a first part which has a fifth groove extending along the axial direction of the joint section to be matched with the protruding part; a second part; a first fixing member which is matched with the mounting seat to extrude the first part and the second part to deform, the deformed first part and the second part are filled in the gap between the outside of the joint section and the first mounting hole, and the second part extends into the first fixing member from the first part; 2. The vacuum testing device of claim 1, wherein, wherein, when the temperature in the vacuum chamber decreases below the predetermined temperature, the first part contracts to tightly hold the protruding part to block air from the outside environment into the vacuum chamber. The radius of the second part extending into the first fixing member gradually decreases, and the vacuum testing device further comprises: a temperature increasing assembly which is configured to heat the placing table; 3. The vacuum testing device of claim 1, wherein, wherein, when the temperature in the vacuum chamber increases above the predetermined temperature, the second part expands to tightly hold the outside of the joint section through the first fixing member to block air from the outside environment into the vacuum chamber. A first groove is formed in the mounting seat, and the liquid nitrogen transmission assembly further comprises:

4. The vacuum testing device of claim 3, wherein, a second sealing member which is arranged in the first groove, and the mounting seat is contacted with the side of the shell to extrude the second sealing member to deform, so that the inside of the vacuum chamber forms a sealed test environment. The vacuum testing device further comprises: a cover which is openably and closably arranged above the shell; a rotating assembly which is rotatably mounted on the shell, and the rotating assembly comprises:

5. The vacuum testing device of claim 4, wherein, a rotating shaft which is suitable for driving the cover to rotate around the axial direction of the rotating shaft between an open state and a closed state, the cover spirally rises around the axial direction of the rotating shaft under the driving of the rotating shaft to form the open state in which the cover is separated from the shell, and the cover spirally descends around the axial direction of the rotating shaft under the driving of the rotating shaft to form the closed state in which the cover is contacted with the shell. A second mounting hole is formed in the shell along a direction perpendicular to the plane in which the cover is arranged, the rotating shaft is rotatably mounted in the second mounting hole, a second groove is formed in the rotating shaft along the circumferential direction, and the second groove extends along the axial direction of the rotating shaft, and the rotating assembly further comprises: A guide shaft extends into the second groove in the radial direction of the rotating shaft to guide the rotating shaft to rotate the cover in a spiral upward or downward direction.

6. The vacuum testing device of claim 5, wherein, A third groove is formed on the surface of the shell that is in contact with the cover, and the vacuum testing device further comprises: A third sealing member is arranged in the third groove to be deformed by being pressed by the shell when the cover is rotated in a downward spiral direction, so that the interior of the vacuum chamber forms a sealed testing environment.

7. The vacuum testing device of claim 4, wherein, A first through hole is formed on the cover above the sample to be tested, and the vacuum testing device further comprises: A window sheet is arranged in the first through hole to observe the sample to be tested, and a fourth groove is formed on the cover in the circumferential direction of the window sheet; A fourth sealing member is arranged in the fourth groove; A gland is arranged above the fourth sealing member to press the fourth sealing member in the fourth groove, so that the interior of the vacuum chamber forms a sealed testing environment.

8. A test method characterized by, The testing method is suitable for the vacuum testing device as claimed in any one of claims 1-7, and the testing method comprises: Opening the cover in the axial direction of the rotating shaft, placing the sample to be tested on the platform; The cover is closed around the axis of the rotating shaft, and the vacuum chamber inside the shell is vacuumized by an external vacuumizing device until the vacuum degree in the vacuum chamber is not greater than 10 -3 mbar. Adjusting the temperature of the platform by using a liquid nitrogen transmission assembly or a temperature increasing assembly, and observing and testing the sample to be tested.

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