Radio frequency tag, photon fusion antenna and preparation method thereof

By adopting a perovskite-RF energy harvesting system architecture and partitioned layout with common substrate integration, the high cost and large size of traditional RF energy harvesting solutions are solved, and a photonic fusion antenna with high-density integration and stable connection is realized, which meets the market demand of IoT tags.

CN121035581APending Publication Date: 2025-11-28ORANGE FRAME TECH (JIANGSU) CO LTD
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Patent Information

Application Number
CN202511490091.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-10-17
Publication Date
2025-11-28

AI Technical Summary

Technical Problem

Traditional single-RF energy harvesting solutions are insufficient to meet the communication sensitivity and multimodal sensing requirements of passive sensing tags. Furthermore, the introduction of perovskite modules increases cost and size, making it difficult to adapt to the market demand for IoT tag products.

Method used

The perovskite-RF energy harvesting system architecture adopts a common substrate integration, in which the RF antenna and the perovskite cell share the same substrate. A metal eutectic structure without interface defects is formed through a vapor deposition process, and physical isolation and high-density integration of the perovskite cell and the RF antenna are achieved by using partitioned layout and hermetic packaging technology.

Benefits of technology

It reduces production costs, lowers the area of ​​the photonic fusion antenna module, improves the connection stability between electrodes and external functional circuits, avoids near-field interference, and achieves high reliability and high density overall structural integration.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a radio frequency tag, a photon fusion antenna and a preparation method thereof. The photon fusion antenna comprises a dielectric substrate, a metal layer and a perovskite cell thin film layer. The metal layer comprises a radio frequency antenna printed on the dielectric substrate, an external functional circuit and a metal counter electrode deposited on the dielectric substrate through an evaporation process and connected with the external functional circuit; the perovskite cell thin film layer comprises a hole transport layer, a perovskite layer, an electron transport layer, a top electrode and a transparent conductive glass layer which are sequentially deposited layer by layer on the metal layer; and the perovskite cell thin film layer and the metal counter electrode form the perovskite cell. The photon fusion antenna adopts a common-substrate integrated perovskite-radio frequency energy acquisition system architecture, and the processing technology is a single-substrate continuous process, so that the assembly links can be reduced, the production cost is reduced, the total area of the photon fusion antenna module is compressed by 30-40%, and the high-density integration of the whole structure is realized.
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Description

Technical Field

[0001] This invention relates to the field of tag communication technology, specifically to an RFID tag, a photonic fusion antenna, and a method for fabricating the same. Background Technology

[0002] In next-generation Internet of Things (IoT) applications compliant with 3GPP Release-19 standards, traditional single-RF energy harvesting solutions are insufficient to meet the stringent requirements of passive sensing tags for communication sensitivity and multimodal sensing capabilities. Therefore, adopting an RF-optical dual-mode energy harvesting architecture has become an inevitable technical path for achieving highly reliable passive sensing systems. Currently, the optical energy harvesting unit in this architecture primarily uses perovskite battery modules. However, introducing perovskite modules increases the cost of passive sensing tags and the system-level package size. For IoT tag products, size sensitivity and cost sensitivity are core factors determining market competitiveness. Therefore, the current RF-optical dual-mode energy harvesting architecture is ill-suited to market demands. Summary of the Invention

[0003] Purpose of the invention: The present invention aims to provide an RFID tag, a photonic fusion antenna and a method for fabricating the same, in order to at least partially overcome the deficiencies of the prior art.

[0004] Summary of the Invention: To achieve the above objectives, the present invention proposes the following technical solution: In a first aspect, a photonic fusion antenna is provided, comprising: a dielectric substrate, a metal layer, and a perovskite solar cell thin film layer; The metal layer includes a radio frequency antenna printed on the dielectric substrate, an external functional circuit, and a metal counter electrode deposited on the dielectric substrate by a vapor deposition process and connected to the external functional circuit. The perovskite solar cell thin film layer includes a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer, which are sequentially deposited on the metal layer. The perovskite cell thin film layer and the metal counter electrode constitute a perovskite cell.

[0005] As an alternative embodiment of the photonic fusion antenna described in the first aspect, the surface of the dielectric substrate is divided into a central region and an annular encapsulation boundary region surrounding the central region; the perovskite solar cell is deposited on the central region of the dielectric substrate surface; and the radio frequency antenna and the external functional circuit are printed on the annular encapsulation boundary region.

[0006] Specifically, during the encapsulation of the photonic fusion antenna, an encapsulation material is used to encapsulate it along the annular encapsulation boundary region. The encapsulation wall formed by the encapsulation material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

[0007] As an alternative embodiment of the photonic fusion antenna described in the first aspect, the metal counter electrode maintains an insulating distance from the radio frequency antenna.

[0008] Secondly, a method for fabricating a photonic fusion antenna is provided, including: Metal trace patterns for radio frequency antennas and external functional circuits are printed on a dielectric substrate. A metal counter electrode is deposited on the dielectric substrate by vapor deposition, and the metal counter electrode achieves lattice-level continuous growth during the deposition process, thereby forming a metal eutectic structure with the external functional circuit without interface defects, so as to realize the connection between the metal counter electrode and the external functional circuit. A hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer are sequentially deposited on the metal layer consisting of the radio frequency antenna, the external functional circuit, and the metal counter electrode. The hole transport layer, the perovskite layer, the electron transport layer, the top electrode, and the transparent conductive glass layer constitute a perovskite solar cell thin film layer, and the perovskite solar cell thin film layer and the metal counter electrode constitute a perovskite solar cell.

[0009] As an optional implementation of the method described in the second aspect, the method further includes: The surface of the dielectric substrate is divided into a central region and an annular packaging boundary region surrounding the central region; When printing the metal trace patterns of the radio frequency antenna and the external functional circuit, the metal trace patterns of the radio frequency antenna and the external functional circuit are printed in the annular package boundary area. When depositing the perovskite cell, the perovskite cell is deposited on the central region of the surface of the dielectric substrate.

[0010] Specifically, the method further includes: The photonic fusion antenna is packaged by using a packaging material along the annular packaging boundary area. The packaging wall formed by the packaging material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

[0011] As an alternative implementation of the method described in the second aspect, the metal electrode pair and the radio frequency antenna maintain an insulating distance.

[0012] Thirdly, an RFID tag is provided, which includes the aforementioned photonic fusion antenna.

[0013] Beneficial effects: Compared with the prior art, the photonic fusion antenna proposed in this invention has the following beneficial effects: 1. The photonic fusion antenna of this invention adopts a co-substrate integrated perovskite-RF energy harvesting system architecture, meaning that the RF antenna and perovskite solar cell share a single substrate. Compared to the traditional discrete design of the perovskite-RF energy harvesting system architecture (i.e., the perovskite solar cell and RF antenna are set up independently), this co-substrate integrated perovskite-RF energy harvesting system architecture can save on substrate costs. Furthermore, by adopting the co-substrate integrated perovskite-RF energy harvesting system architecture, the fabrication process of the photonic fusion antenna is changed from the traditional discrete device processing (i.e., fabricating independent perovskite solar cells and RF antennas separately and then assembling them together) to a single-substrate continuous process, which can reduce assembly steps, thereby reducing production costs, and further compressing the total area of ​​the photonic fusion antenna module by 30-40%, achieving high-density integration of the overall structure.

[0014] 2. In the photonic fusion antenna of the present invention, the metal counter electrode of the perovskite cell is directly deposited on the dielectric substrate and connected to the external functional circuit, which improves the stability and reliability of the connection point between the electrode and the external functional circuit.

[0015] 3. In the photonic fusion antenna described in this invention, a partitioned layout strategy is adopted to divide the surface of the dielectric substrate into a central region and an annular packaging boundary region surrounding the central region. The perovskite solar cell is deposited on the central region of the dielectric substrate surface, and the radio frequency antenna and external functional circuits are printed on the annular packaging boundary region, thereby achieving physical isolation between the perovskite solar cell and the radio frequency antenna and avoiding near-field interference.

[0016] 4. In the photonic fusion antenna of the present invention, the transparent conductive glass layer on the top layer of the perovskite cell forms a double-sided substrate sandwich structure with the dielectric substrate, and the hermetic encapsulation of the perovskite active layer is achieved by combining the encapsulation material.

[0017] It should be noted that the photonic fusion antenna fabrication method and radio frequency tag described in this invention also have the above-mentioned beneficial effects. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the existing perovskite-RF energy harvesting system architecture.

[0019] Figure 2 This is a schematic diagram of the structure of a photonic fusion antenna according to an embodiment.

[0020] Figure 3 This is a schematic flowchart illustrating a method for fabricating a photonic fusion antenna according to an embodiment.

[0021] Figure 4 This is a schematic diagram of a dielectric substrate surface partitioning according to an embodiment.

[0022] Figure 5 This is a schematic diagram of the structure of a perovskite solar cell involved in an embodiment.

[0023] Figure 6 This is a schematic diagram of the structure of an RFID tag according to an embodiment. Detailed Implementation

[0024] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. However, it should be understood that the present invention can be implemented in various forms. The exemplary and non-limiting embodiments shown in the drawings and described below are not intended to limit the invention to the specific embodiments illustrated.

[0025] It should be understood that, where technically feasible, the technical features listed above for different embodiments can be combined with each other to form other embodiments within the scope of this invention. Furthermore, the specific examples and embodiments described in this invention are non-limiting, and corresponding modifications can be made to the structures, steps, and order described above without departing from the protection scope of this invention.

[0026] Please refer to Figure 1 , Figure 1 A schematic diagram of a prior art perovskite-RF energy harvesting system architecture is shown. Figure 1 As shown, in existing perovskite-RF energy harvesting system architectures, the RF antenna and perovskite cell are separate components. Therefore, during production, the RF antenna and perovskite cell need to be fabricated independently, and then the pins of the RF antenna and the electrodes of the perovskite cell are soldered to the functional circuitry of the energy management module.

[0027] In this discrete design, both the RF energy harvesting module and the perovskite cell module require independent packaging structures and support substrates, resulting in significant dimensional redundancy (typical label thickness exceeding 3mm) and material waste (substrate cost alone accounts for 35%~40% of the total cost). This leads to... Figure 1 The perovskite-RF energy harvesting system architecture shown is large in size, has high production costs, and is not easy to promote.

[0028] This embodiment aims to... Figure 1 The perovskite-RF energy harvesting system architecture shown is improved to at least partially address its technical problems. In view of this, this embodiment provides an RF tag, a photonic fusion antenna, and a method for fabricating the same.

[0029] Please refer to Figure 2 , Figure 2A schematic diagram of a photonic fusion antenna is shown. Figure 2 As shown, the photonic fusion antenna described in this embodiment includes a dielectric substrate, a metal layer, and a perovskite solar cell thin film layer. The metal layer includes a radio frequency antenna printed on the dielectric substrate, external functional circuitry, and a metal counter electrode deposited on the dielectric substrate via a vapor deposition process and connected to the external functional circuitry. The perovskite solar cell thin film layer includes a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer, deposited sequentially on top of the metal layer. Specifically, the electron transport layer may include mesoporous C... 60 -BCP and tin oxide. The perovskite cell thin film layer and the metal counter electrode constitute a perovskite cell.

[0030] The aforementioned photonic fusion antenna includes a perovskite solar cell and a radio frequency (RF) antenna. The perovskite solar cell is used to harvest light energy and convert it into electrical energy, while the RF antenna is used to harvest electromagnetic wave energy. The aforementioned external functional circuitry can be an energy management module (such as...) for implementing power management. Figure 1 As shown, this energy management module converts the energy collected by the perovskite solar cell and RF antenna into the required voltage / current to power the external circuitry connected to the photonic fusion antenna. For example, in a passive RFID tag using the aforementioned photonic fusion antenna, in addition to the photonic fusion antenna, it may also include communication modules, microprocessors, and other power circuitry. In this case, the energy management module converts the collected energy into the corresponding voltage / current to power these power modules.

[0031] The aforementioned dielectric substrate can be a flexible substrate such as non-woven fabric, paper fiber, or polyimide film (PI film), or a rigid conductive oxide substrate.

[0032] The metal trace patterns of the aforementioned RF antenna and external functional circuits can be printed on the dielectric substrate using a mask sputtering process.

[0033] like Figure 5 As shown, the perovskite solar cell described above has a multilayer structure, including a metal counter electrode, a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer. The top electrode is the negative electrode, and the metal counter electrode is a pair of positive and negative electrodes, with the negative electrode connected to the top electrode.

[0034] When a perovskite solar cell is deposited on a dielectric substrate with printed radio frequency antennas and external functional circuits using a vapor deposition process, a metal counter electrode is deposited first. This allows the metal counter electrode to achieve continuous lattice-level growth during deposition, thereby forming a defect-free metal eutectic structure with the external functional circuits, thus enabling the connection between the metal counter electrode and the external functional circuits. This completes the aforementioned metal layer, which includes the radio frequency antenna, external functional circuits, and the metal counter electrode.

[0035] Next, a perovskite solar cell thin film is deposited on the metal layer, specifically by sequentially depositing a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer on the metal layer. The perovskite solar cell thin film and the metal counter electrode together constitute the perovskite solar cell.

[0036] It should be noted that the metal electrode and the RF antenna are not connected; the RF antenna is connected to the external functional circuitry during the printing process. The metal electrode is typically made of copper, but it is understood that the material of the metal electrode can be chosen adaptably according to requirements, and this embodiment does not impose any limitations on this.

[0037] A double-sided substrate sandwich structure is formed between the transparent conductive glass layer on top of the perovskite solar cell and the dielectric substrate. At this time, only the exposed part between the transparent conductive glass layer and the dielectric substrate needs to be encapsulated to obtain the above-mentioned photonic fusion antenna.

[0038] Please refer to Figure 4 In one alternative implementation, the surface of the dielectric substrate can be divided into a central region and an annular packaging boundary region surrounding the central region. The perovskite solar cell is deposited on the central region of the dielectric substrate surface, while the RF antenna and external functional circuitry are printed on the annular packaging boundary region. Microstrip topology optimization ensures that the radiator of the RF antenna maintains an insulating distance from the metal counter electrode of the perovskite solar cell, avoiding efficiency degradation caused by near-field coupling.

[0039] During the packaging process, the photonic fusion antenna is packaged using packaging material along the annular packaging boundary area. The packaging wall formed by the packaging material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

[0040] The above is the photonic fusion antenna provided in this embodiment. This photonic fusion antenna has at least the following technical effects: 1. The photonic fusion antenna adopts a co-substrate integrated perovskite-RF energy harvesting system architecture, meaning the RF antenna and perovskite solar cell share a single substrate. Compared to the traditional discrete design of the perovskite-RF energy harvesting system architecture (i.e., the perovskite solar cell and RF antenna are set up independently), this co-substrate integrated perovskite-RF energy harvesting system architecture can save on substrate costs. Furthermore, with the co-substrate integrated perovskite-RF energy harvesting system architecture, the fabrication process of the photonic fusion antenna is changed from traditional discrete device processing (i.e., fabricating independent perovskite solar cells and RF antennas separately and then assembling them together) to a single-substrate continuous process. This reduces assembly steps, thereby reducing production costs, and further compresses the total area of ​​the photonic fusion antenna module by 30-40%, achieving high-density integration of the overall structure.

[0041] 2. In the photonic fusion antenna, the metal counter electrode of the perovskite solar cell is directly deposited on the dielectric substrate and connected to the external functional circuit, which improves the stability and reliability of the connection point between the electrode and the external functional circuit.

[0042] 3. In the photonic fusion antenna, a partitioned layout strategy is adopted to divide the surface of the dielectric substrate into a central region and a ring-shaped packaging boundary region surrounding the central region. The perovskite solar cell is deposited on the central region of the dielectric substrate surface, while the RF antenna and external functional circuitry are printed on the ring-shaped packaging boundary region. This achieves physical isolation between the perovskite solar cell and the RF antenna and avoids near-field interference.

[0043] 4. In the photonic fusion antenna, the transparent conductive glass layer on the top of the perovskite cell forms a double-sided substrate sandwich structure with the dielectric substrate, and the hermetic encapsulation of the perovskite active layer is achieved by combining the encapsulation material.

[0044] Corresponding to the aforementioned photonic fusion antenna, this embodiment also provides a method for fabricating a photonic fusion antenna. Please refer to... Figure 3 , Figure 3 A schematic flowchart illustrating a method for fabricating a photonic fusion antenna is shown. Figure 3 As shown, the method includes steps S300 to S304: S300: Printed metal trace patterns for radio frequency antennas and external functional circuits on a dielectric substrate.

[0045] The dielectric substrate described above can be a flexible substrate such as non-woven fabric, paper fiber, or polyimide film (PI film), or a rigid conductive oxide substrate. It should be noted that the material of the dielectric substrate can be selected according to requirements, and this embodiment does not impose any limitations on this.

[0046] The aforementioned external functional circuits can be energy management modules (such as...) used to implement power management. Figure 1 As shown, this energy management module converts the collected electrical energy into the required voltage / current to power the external circuits connected to the photonic fusion antenna. For example, in a passive RFID tag using the aforementioned photonic fusion antenna, in addition to the photonic fusion antenna, it may also include communication modules, microprocessors, and other power circuits. In this case, the energy management module converts the collected electrical energy into the corresponding voltage / current to power these power modules.

[0047] When printing the metal trace patterns for the RF antenna and external functional circuits, the RF antenna can be connected to the external functional circuits.

[0048] S302: A metal counter electrode is deposited on a dielectric substrate through a vapor deposition process, and the metal counter electrode achieves lattice-level continuous growth during the deposition process, thereby forming a metal eutectic structure with external functional circuits without interface defects, so as to realize the connection between the metal counter electrode and the external functional circuits.

[0049] The perovskite solar cell's metal electrodes are crystallized into a single unit at the atomic level with the metal traces of the external functional circuitry on the dielectric substrate through a vapor deposition process. Then, the double-sided substrate clamping structure, consisting of the transparent conductive glass layer on top of the perovskite solar cell and the dielectric substrate, is encapsulated through a packaging process, ensuring a stable electrical connection between the perovskite solar cell's output electrodes and the metal traces of the external functional circuitry.

[0050] S304: A hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer are sequentially deposited on a metal layer consisting of a radio frequency antenna, an external functional circuit, and a metal counter electrode.

[0051] The hole transport layer, perovskite layer, electron transport layer, top electrode, and transparent conductive glass layer mentioned above constitute the perovskite solar cell thin film layer. The perovskite solar cell thin film layer and the metal counter electrode together constitute the perovskite solar cell.

[0052] For example Figure 5 Taking the perovskite solar cell structure shown as an example, the perovskite solar cell includes a metal counter electrode, a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer. The top electrode is the negative electrode of the perovskite solar cell, and the metal counter electrode contains a pair of positive and negative electrodes, with the negative electrode connected to the top electrode.

[0053] Optionally, when depositing the above layers, the deposition rate of the hole transport layer is 0.1~0.5 Å / s and the thickness is 5~30 nm; the deposition rate of the perovskite layer is 10~100 Å / s and the thickness is 500~700 nm; the deposition rate of the electron transport layer is 1~5 Å / s and the thickness is 5~10 nm; and the deposition rate of the transparent conductive glass layer is 0.5~2 Å / s and the thickness is 70~100 nm.

[0054] The key feature of this process is its diverse substrate compatibility, aiming to achieve high-conformity, high-quality perovskite thin films / devices on various substrates using vacuum deposition technology. Throughout the process, the perovskite layer can undergo an additional annealing treatment at 100–150 °C to react the deposited organic / inorganic components and generate a polycrystalline perovskite thin film. No additional treatment is required for other functional layers. By precisely controlling the vacuum level, deposition rate, and substrate temperature, uniform growth of the perovskite layer and its associated functional layers can be achieved at the atomic scale.

[0055] In one alternative embodiment, during the fabrication of the photonic fusion antenna, a high-uniformity spin coating process can be used to achieve continuous film formation of m²-scale perovskite solar cell thin film layers on a dielectric substrate. Then, through a photolithography process, the m²-scale perovskite master mold is cut into mm²-scale commercial devices along a preset cutting path.

[0056] In one alternative embodiment, the surface of the dielectric substrate can be further divided into a central region and an annular package boundary region surrounding the central region. When printing the metal trace patterns for the RF antenna and external functional circuitry, the metal trace patterns for the RF antenna and external functional circuitry are printed in the annular package boundary region. When depositing the perovskite cell (including a metal counter electrode, a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer), the perovskite cell is deposited on the central region of the dielectric substrate surface, and the metal counter electrode is kept at an insulating distance from the RF antenna.

[0057] Furthermore, when encapsulating the photonic fusion antenna, the encapsulation material is used to encapsulate it along the annular encapsulation boundary area. The encapsulation wall formed by the encapsulation material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

[0058] The aforementioned encapsulation materials can be selected according to specific needs; for example, UV-cured epoxy resin can be used for sealing.

[0059] This embodiment also provides an RFID tag, which is a passive tag and includes the aforementioned photonic fusion antenna. For example... Figure 6 As shown, in addition to the aforementioned photonic fusion antenna, the radio frequency antenna also includes modules such as an energy management module, a wireless communication module, and an MCU. The radio frequency antenna in the photonic fusion antenna is used to collect electromagnetic wave energy, the perovskite solar cell in the photonic fusion antenna is used to collect light energy and convert it into electrical energy, and the energy management module is used to convert the energy collected by the perovskite solar cell and the radio frequency antenna into the required voltage / current, thereby powering the wireless communication module, MCU, and other modules.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the inventive concept, and these all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent application should be determined by the appended claims.

Claims

1. A photonic fusion antenna, characterized in that, include: Dielectric substrate, metal layer and perovskite cell thin film layer; The metal layer includes a radio frequency antenna printed on the dielectric substrate, an external functional circuit, and a metal counter electrode deposited on the dielectric substrate by a vapor deposition process and connected to the external functional circuit. The perovskite solar cell thin film layer includes a hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer, which are deposited sequentially on the metal layer. The perovskite cell thin film layer and the metal counter electrode constitute a perovskite cell.

2. The photonic fusion antenna according to claim 1, characterized in that, The surface of the dielectric substrate is divided into a central region and an annular packaging boundary region surrounding the central region; the perovskite solar cell is deposited on the central region of the dielectric substrate surface; the radio frequency antenna and the external functional circuit are printed on the annular packaging boundary region.

3. The photonic fusion antenna according to claim 2, characterized in that, During the encapsulation process, the photonic fusion antenna is encapsulated using an encapsulation material along the annular encapsulation boundary region. The encapsulation wall formed by the encapsulation material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

4. The photonic fusion antenna according to claim 1, characterized in that, The metal counter electrode maintains an insulating distance from the radio frequency antenna.

5. A method for fabricating a photonic fusion antenna, characterized in that, include: Metal trace patterns for radio frequency antennas and external functional circuits are printed on a dielectric substrate. A metal counter electrode is deposited on the dielectric substrate by vapor deposition, and the metal counter electrode achieves lattice-level continuous growth during the deposition process, thereby forming a metal eutectic structure with the external functional circuit without interface defects, so as to realize the connection between the metal counter electrode and the external functional circuit. A hole transport layer, a perovskite layer, an electron transport layer, a top electrode, and a transparent conductive glass layer are sequentially deposited on the metal layer consisting of the radio frequency antenna, the external functional circuit, and the metal counter electrode. The hole transport layer, the perovskite layer, the electron transport layer, the top electrode, and the transparent conductive glass layer constitute a perovskite solar cell thin film layer, and the perovskite solar cell thin film layer and the metal counter electrode constitute a perovskite solar cell.

6. The method according to claim 5, characterized in that, The method further includes: The surface of the dielectric substrate is divided into a central region and an annular packaging boundary region surrounding the central region; When printing the metal trace patterns of the radio frequency antenna and the external functional circuit, the metal trace patterns of the radio frequency antenna and the external functional circuit are printed in the annular package boundary area. When depositing the perovskite cell, the perovskite cell is deposited on the central region of the surface of the dielectric substrate.

7. The method according to claim 6, characterized in that, The method further includes: The photonic fusion antenna is packaged by using a packaging material along the annular packaging boundary area. The packaging wall formed by the packaging material, together with the transparent conductive glass layer and the dielectric substrate, constitutes a sealed cavity.

8. The method according to claim 5, characterized in that, The metal counter electrode maintains an insulating distance from the radio frequency antenna.

9. An RFID tag, characterized in that, The radio frequency tag includes a photonic fusion antenna as described in any one of claims 1 to 4.

Citation Information

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