Fluorine ion cleaning method for overhauling guide blade

Abstract

The invention discloses a fluorine ion cleaning method for an overhaul guide blade, and belongs to the technical field of aero-engine repair. According to the method, the guide vane to be cleaned is placed in a reaction kettle of fluorine ion cleaning equipment, then air in the reaction kettle of the equipment is replaced by reducing gas through multiple times of replacement, and atmosphere needed by reaction is provided. Heating outside the reaction kettle, heating the interior of the reaction kettle to a certain temperature, maintaining a stable reaction environment, and introducing hydrogen fluoride gas to react with metal oxides on the surface of the guide vane and in the cracks; and the guide blades are repeatedly cleaned according to the circulation of gas introduction, stable pressure reaction and exhaust gas discharge. And after the reaction reaches a certain cycle, gas introduction and heating are stopped, the reaction kettle is rapidly cooled by a fan, and finally, the cleaning of the overhaul guide blade is completed. According to the method, metal oxides on the surface of the blade and in cracks can be thoroughly removed on the premise that base metal of the high-pressure turbine guide blade is not damaged.

Description

Technical Field

[0001] This invention belongs to the field of aero-engine repair technology and relates to a fluoride ion cleaning method for overhauling guide vanes. Background Technology

[0002] Many key components of aero-engines and gas turbines are made of nickel-based or cobalt-based precision-cast high-temperature alloys, including the guide stator blades and rotor blades of compressors and turbines, as well as high-temperature components of combustion chambers and turbines. These components inevitably suffer various forms of damage during long-term use. Due to the extremely complex internal working environment of aero-engines and gas turbines, components are subjected to the combined effects of high-temperature oxidation, thermal corrosion, and mechanical stress. High-temperature oxidation forms an oxide layer on the component surface, which gradually thickens and peels off over time, leading to the loss of the base material. Thermal corrosion occurs when the component surface reacts chemically with corrosive substances in the combustion gas at high temperatures, further accelerating component damage. Simultaneously, during frequent start-stop cycles and high-speed operation, components are subjected to alternating thermal and mechanical stresses, resulting in thermomechanical fatigue cracks. This damage not only affects the mechanical and aerodynamic properties of the components but also reduces engine output power, and in severe cases, can even jeopardize flight safety.

[0003] Among numerous critical components, high-pressure turbine guide vanes possess exceptional importance and complexity. Taking DZ40M material as an example, it is a directionally solidified cast cobalt-based superalloy widely used in the manufacture of high-pressure turbine guide vanes. This material exhibits unique high-temperature properties and microstructure, maintaining good strength and stability at high temperatures and guiding the combustion gas in a predetermined direction, thereby improving turbine efficiency. However, in actual use, high-pressure turbine guide vanes experience a series of common damage forms. High-temperature surface oxidation is one such example. Due to prolonged exposure to the high-temperature combustion gas environment, the blade surface reacts with oxygen to form an oxide layer, increasing surface roughness and affecting aerodynamic performance. Thermomechanical fatigue cracking is also a common problem. Under alternating thermal and mechanical stresses, cracks develop at stress concentration points. With increasing cycle count, these cracks gradually propagate, eventually leading to blade failure. Furthermore, surface ablation and loss of the base material are also significant issues. Particulate matter in the high-temperature combustion gas erodes and corrodes the blade surface, causing the base material to gradually erode, reducing the blade's strength and dimensional accuracy. When high-pressure turbine guide vanes undergo major overhauls, a large amount of residual aluminum, titanium, and other metal oxides remain on the surface and inside the cracks of the disassembled blades. These oxides are formed by the reaction of aluminum, titanium, and other elements on the blade surface with oxygen under high-temperature conditions. Their presence not only affects the appearance and dimensional accuracy of the blades but also seriously impacts subsequent repair work.

[0004] Currently, most repair shops primarily use mechanical grinding to remove oxides from metals such as aluminum and titanium. This involves mechanically grinding away the surface layer of the blade, the crack itself, and the surrounding base material. However, mechanical grinding is not only labor-intensive and time-consuming but can also severely damage the base material. If the oxides on the surface and within the cracks of high-pressure turbine guide vanes are not completely removed, the residual oxides will inhibit the flow and wettability of the liquid brazing material on the component surface during vacuum brazing repair, making the vacuum brazing repair work completely impossible.

[0005] In summary, existing methods for repairing high-pressure turbine guide vanes cannot effectively address the problem of oxide removal, failing to meet the quality and reliability requirements for critical component repair in aero-engines and gas turbines. Therefore, there is an urgent need to develop a cleaning method for overhauling guide vanes to improve the quality and efficiency of vane repair and ensure the safe operation of aero-engines and gas turbines. Summary of the Invention

[0006] The purpose of this invention is to provide a fluoride ion cleaning method for overhauling guide vanes, so as to solve the technical problem that existing technologies are unable to efficiently remove metal oxides from the surface and cracks of the vanes.

[0007] To achieve the above objectives, the present invention employs the following technical solution: This invention provides a fluoride ion cleaning method for overhauling guide vanes, comprising the following steps: The guide vanes of the high-pressure turbine undergoing major repair are sandblasted to remove the protective coating on the surface, thus completing the pretreatment. The pretreated high-pressure turbine guide vanes are placed into the reaction vessel of the fluoride ion cleaning equipment, and a sealing and leak check is performed. After the leak inspection is passed, fluoride ion cleaning is carried out, and hydrogen fluoride is introduced into the reactor for circulation cleaning. After circulating cleaning, the temperature is raised and held for a preset time. Then the reactor is cooled and removed from the furnace, completing the cleaning of the overhaul guide vanes.

[0008] Furthermore, the sand blowing pressure is 0.15 MPa to 0.25 MPa, and the sand blowing distance is 200 mm to 350 mm.

[0009] Furthermore, the step of sandblasting the overhauled high-pressure turbine guide vanes to remove the protective coating and complete the pretreatment also includes: after sandblasting, using clean and dry compressed air to blow away residual sand particles and dust from the blades.

[0010] Furthermore, the step of placing the pretreated high-pressure turbine guide vanes into the reactor of the fluoride ion cleaning equipment and performing sealing and leak checks specifically includes: The pretreated high-pressure turbine guide vanes are placed on the reactor support of the fluoride ion cleaning equipment, and then the support is connected to the cover and transferred into the reactor and sealed. Perform a routine leak check on the equipment, then use argon to purge the air from the reactor while heating it to 760℃~820℃. Finally, use hydrogen to perform another leak check.

[0011] Furthermore, after the leak inspection is passed, the step of performing fluoride ion cleaning and circulating hydrogen fluoride into the reactor for cleaning specifically includes: After the leak inspection is passed, a fluoride ion cleaning procedure is carried out, and the temperature is raised to 960℃ to 980℃ for 30 to 70 minutes. During this period, the argon gas in the reactor is replaced with a reducing gas. After heating to 960℃~980℃, hold the temperature for 10min~40min, then introduce hydrogen fluoride into the reactor and begin circulating cleaning.

[0012] Furthermore, the reducing gas is hydrogen; the number of cycles for the cyclic cleaning is 4 to 6.

[0013] Furthermore, the circulating cleaning process is as follows: hydrogen fluoride gas is introduced, the pressure is stabilized to 740 torr to 780 torr for reaction, and the waste gas is discharged after the reaction is completed.

[0014] Furthermore, the process of cleaning the guide vanes by maintaining the temperature for a preset time after the cycle cleaning, then cooling the reactor before removing it from the furnace, and completing the cleaning steps of the overhaul guide vanes, specifically includes: After the cycle cleaning is completed, the temperature is raised to 1000℃ to 1020℃ in 15 to 40 minutes, and then kept at that temperature for 45 to 90 minutes until the program ends. After the process is completed, stop heating first, maintain the pressure of the reactor at 740 torr to 780 torr with hydrogen, and cool it with the furnace to 760°C to 820°C; Stop the hydrogen supply, introduce argon into the reactor to maintain the pressure inside the reactor to the preset pressure, and then quickly cool the reactor before removing it from the furnace to complete the cleaning of the overhaul guide vanes.

[0015] Furthermore, the preset pressure is 740 torr to 780 torr.

[0016] Furthermore, the process of rapidly cooling the reactor includes: using an exhaust fan to cool the reactor to below 80°C using air from outside the reactor.

[0017] Compared with the prior art, the present invention has the following beneficial effects: This invention discloses a fluoride ion cleaning method for overhauling guide vanes. Pre-treatment with sandblasting removes the surface protective coating, creating favorable conditions for subsequent cleaning. Circulating hydrogen fluoride in the reactor of a fluoride ion cleaning device effectively penetrates the surface and cracks of high-pressure turbine guide vanes, chemically reacting with metal oxides such as aluminum and titanium to completely dissolve and remove them. Compared to traditional mechanical grinding methods, this method significantly improves decontamination efficiency and can handle oxides in finer areas. This invention can thoroughly remove metal oxides from the surface and cracks of blades without damaging the high-temperature alloy base material of the engine's cast blades. It can replace traditional manual mechanical grinding processes, and the cleaned guide vanes require no additional treatment and can be directly repaired by vacuum brazing, reducing manpower and time consumption during the repair process.

[0018] Furthermore, this invention, through a cleaning cycle of gas introduction, pressure stabilization reaction, and exhaust gas discharge, can not only complete the cleaning of a single high-pressure turbine guide vane, but also support the cleaning of a large number of parts, making it suitable for industrial production. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a flowchart of a fluoride ion cleaning method for overhauling guide vanes according to the present invention. Detailed Implementation

[0021] To enable those skilled in the art to understand the features and effects of the present invention, the terms and expressions used in the specification and claims are explained and defined in general below. Unless otherwise specified, all technical and scientific terms used herein have the ordinary meaning understood by those skilled in the art regarding the present invention, and in case of conflict, the definitions in this specification shall prevail.

[0022] The theories or mechanisms described and disclosed herein, whether right or wrong, should not in any way limit the scope of the invention, that is, the contents of the invention can be implemented without being limited by any particular theory or mechanism.

[0023] In this document, all features defined by numerical ranges or percentage ranges, such as numerical values, quantities, contents, and concentrations, are for the sake of brevity and convenience only. Accordingly, descriptions of numerical ranges or percentage ranges should be considered as covering and specifically disclosing all possible sub-ranges and individual numerical values ​​(including integers and fractions) within those ranges.

[0024] In this article, unless otherwise specified, “contains,” “includes,” “containing,” “has,” or similar terms cover the meanings of “composed of” and “mainly composed of,” for example, “A contains a” covers the meanings of “A contains a and others” and “A contains only a.”

[0025] For the sake of brevity, not all possible combinations of the technical features in each implementation scheme or embodiment are described herein. Therefore, as long as there is no contradiction in the combination of these technical features, the technical features in each implementation scheme or embodiment can be combined arbitrarily, and all possible combinations should be considered within the scope of this specification.

[0026] The present invention will now be described in further detail with reference to the accompanying drawings: See Figure 1 This invention discloses a fluoride ion cleaning method for overhauling guide vanes, comprising the following steps: S1, Sandblasting is performed on the guide vanes of the high-pressure turbine during overhaul to remove the protective coating on the surface and complete the pretreatment; The surface of the overhauled high-pressure turbine guide vanes is coated with a protective coating. The presence of this coating not only affects the identification of crack morphology, but also affects the subsequent vacuum brazing repair of cracks. Therefore, the coating on the blade surface needs to be removed through pretreatment.

[0027] This step involves sandblasting the overhauled high-pressure turbine guide vanes with 60# alumina sand to remove the protective coating. A Φ8±2mm nozzle is used, with a sandblasting pressure set to 0.15~0.25MPa and a sandblasting distance maintained at 200~350mm. This process yields a pre-treatment product with a uniform, matte, rough, silver-gray surface. Clean, dry compressed air is then used to blow away any remaining sand and dust from the blades.

[0028] S2, the pretreated high-pressure turbine guide vanes are placed into the reaction vessel of the fluorine ion cleaning equipment, and a sealing and leak check is performed; S201. Place the pretreated high-pressure turbine guide vanes on the bottom layer of the reactor support of the 3038 fluoride ion cleaning equipment, near the central gas column. If the number of parts is large, place them layer by layer in the order of aligning the exhaust side with the gas column, first the inner side and then the outer side, first the lower layer and then the upper layer. Then transfer the support and cover to the reactor and seal it. S202, perform a routine leak check on the equipment, then use argon to replace the air in the reactor, during which heating is carried out and heated to (760~820)℃; after the temperature reaches (760~820)℃, use hydrogen to perform another leak check.

[0029] S3, after the leak inspection is passed, fluoride ion cleaning is carried out, and hydrogen fluoride is introduced into the reactor for circulation cleaning. After the leak inspection is passed, the cleaning procedure begins, and the temperature is raised to 960-980°C in 30-70 minutes. During this period, hydrogen is used to replace the argon in the reactor. After the temperature is raised to 960-980°C, it is held for 10-40 minutes. Then, hydrogen fluoride is introduced into the reactor and a cleaning cycle of gas introduction, pressure stabilization reaction, and exhaust gas discharge is started. The cycle is repeated 4-6 times depending on the number of guide vanes to be cleaned. During the entire process, hydrogen is used to maintain the pressure of 740-780 torr in the reactor.

[0030] S4, after circulating cleaning, the temperature is raised and held for a preset time, and then the reactor is cooled before being taken out of the furnace, completing the cleaning of the overhaul guide vanes.

[0031] After circulating cleaning, the temperature is raised to 1000-1020°C in 15-40 minutes, and then held for 45-90 minutes until the program ends. During the entire program, hydrogen is used to maintain the pressure of 740-780 torr inside the reactor. After the program ends, heating is stopped first, hydrogen is used to maintain the pressure of the reactor and the reactor is cooled to 760-820°C. Then, hydrogen is stopped, argon is introduced into the reactor to maintain the pressure of 740-780 torr inside the reactor, and the reactor is rapidly cooled to below 80°C by means of air outside the reactor and exhaust fan.

[0032] Finally, the cleanliness of the guide vane surface was visually inspected, and a metallographic examination was performed on the inside of the crack. The cleaned part surface exhibited a bright metallic luster, and no obvious oxide residue was found in the metallographic examination inside the crack. The cleaning effect met the requirements of subsequent processes.

[0033] This invention targets residual metal oxides on the surface and inside cracks of high-pressure turbine guide vanes. Using hydrogen fluoride gas in a high-temperature, reducing atmosphere, the gas reacts chemically with the metal oxides, removing them from the surface and cracks. A fluoride ion cleaning process suitable for single and large-scale repair of DZ40M material guide vanes is developed. The guide vanes to be cleaned are placed in the reactor of a 3038 type fluoride ion cleaning device. The air inside the reactor is repeatedly replaced with a reducing gas to provide the necessary atmosphere for the reaction. The reactor is then heated externally to raise the internal temperature to a certain level and maintain a stable reaction environment. Hydrogen fluoride gas is then introduced to react with the metal oxides on the surface and inside cracks of the guide vanes. During this process, the guide vanes are repeatedly cleaned following a cycle of gas introduction, pressure stabilization reaction, and exhaust gas discharge. After a certain number of cycles, gas introduction and heating are stopped, and a fan is used to rapidly cool the reactor. The final product is a cleaned guide vane with completely removed metal oxides from the cracks, exhibiting a bright metallic luster. This invention can completely remove metal oxides from the surface and cracks of high-pressure turbine guide vanes without damaging the base material, successfully replacing the traditional manual mechanical grinding process and significantly reducing the amount of grinding work before and after component brazing repair.

[0034] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the invention, and these equivalent forms also fall within the scope defined by the appended claims.

[0035] The following examples use instruments and equipment conventional in the art. Experimental methods in the following examples, unless otherwise specified, are generally performed under conventional conditions or as recommended by the manufacturer. All raw materials used in the following examples are conventional commercially available products with specifications conventional in the art. In this specification and the following examples, unless otherwise specified, "%" refers to weight percentage, "parts" refers to parts by weight, and "ratio" refers to weight proportion.

[0036] Example 1: S1. Use 60# alumina sand to sandblast the guide vanes of the overhauled high-pressure turbine to remove the protective coating on the surface. Use a sandblasting nozzle with a diameter of 8±2mm, set the sandblasting pressure to 0.20MPa, and maintain a sandblasting distance of 200mm to obtain a pre-treatment product with a uniform, matte, rough silver-gray surface. Then, use clean, dry compressed air to blow away any remaining sand particles and dust from the blades.

[0037] S2, place the pretreated high-pressure turbine guide vanes onto the reactor support of the 3038 fluorine ion cleaning equipment, then transfer the support and sealing cap into the reactor and seal it; perform a routine leak check on the equipment, then use argon to replace the air in the reactor, heating is performed during this process, and after heating to 800℃, another leak check is performed using hydrogen.

[0038] S3, after the leak inspection is passed, the cleaning procedure is started and the temperature is raised to 960°C in 40 minutes. During this period, hydrogen is used to replace the argon in the reactor. After the temperature is raised to 960°C, it is kept at the temperature for 20 minutes. Then, hydrogen fluoride is introduced into the reactor and the cleaning cycle of gas introduction-stabilized pressure reaction-discharge of waste gas is started. Specifically, the cleaning cycle is carried out 4 times according to the number of guide vanes to be cleaned.

[0039] S4, after circulating cleaning, takes 30 minutes to heat to 1020℃, and then holds at that temperature for 60 minutes until the program ends; during the entire program operation, hydrogen is used to maintain a pressure of 750 torr inside the reactor; after the program ends, heating is stopped first, hydrogen is used to maintain the pressure inside the reactor and the reactor is cooled to 800℃, then hydrogen is stopped, argon is introduced into the reactor to maintain a pressure of 750 torr inside the reactor, and the reactor is rapidly cooled to below 80℃ by means of air outside the reactor and exhaust fan.

[0040] Example 2: S1. Use 60# alumina sand to sandblast the guide vanes of the overhauled high-pressure turbine to remove the protective coating on the surface. Use a sandblasting nozzle with a diameter of 8±2mm, set the sandblasting pressure to 0.15MPa, and maintain a sandblasting distance of 300mm to obtain a pre-treatment product with a uniform, matte, rough silver-gray surface. Then, use clean, dry compressed air to blow away any remaining sand particles and dust from the blades.

[0041] S2, place the pretreated high-pressure turbine guide vanes onto the reactor support of the 3038 fluorine ion cleaning equipment, then transfer the support and sealing cap into the reactor and seal it; perform a routine leak check on the equipment, then use argon to replace the air in the reactor, heating is performed during this process, and after heating to 760°C, another leak check is performed using hydrogen.

[0042] S3, after the leak inspection is passed, the cleaning procedure begins, and the temperature is raised to 970℃ in 50 minutes. During this period, hydrogen is used to replace the argon in the reactor. After the temperature is raised to 970℃, it is held for 30 minutes. Then, hydrogen fluoride is introduced into the reactor and the cleaning cycle of gas introduction-stabilized pressure reaction-discharge of waste gas is started. Specifically, the cleaning cycle is carried out 6 times depending on the number of guide vanes to be cleaned.

[0043] S4, after circulating cleaning, takes 20 minutes to heat to 1010℃, and then holds at that temperature for 70 minutes until the program ends; during the entire program operation, hydrogen is used to maintain a pressure of 770 torr inside the reactor; after the program ends, heating is stopped first, hydrogen is used to maintain the pressure inside the reactor and the reactor is cooled to 780℃, then hydrogen is stopped, argon is introduced into the reactor to maintain a pressure of 770 torr inside the reactor, and the reactor is rapidly cooled to below 80℃ by means of air outside the reactor and exhaust fan.

[0044] Example 3: S1. Use 60# alumina sand to sandblast the guide vanes of the overhauled high-pressure turbine to remove the protective coating on the surface. Use a sandblasting nozzle with a diameter of 8±2mm, set the sandblasting pressure to 0.25MPa, and maintain a sandblasting distance of 350mm to obtain a pre-treatment product with a uniform, matte, rough silver-gray surface. Then, use clean, dry compressed air to blow away any residual sand particles and dust from the blades.

[0045] S2, place the pretreated high-pressure turbine guide vanes onto the reactor support of the 3038 fluorine ion cleaning equipment, then transfer the support and sealing cap into the reactor and seal it; perform a routine leak check on the equipment, then use argon to replace the air in the reactor, heating is performed during this process, and after heating to 780℃, another leak check is performed using hydrogen.

[0046] S3, after the leak inspection is passed, the cleaning procedure begins, and the temperature is raised to 980℃ in 70 minutes. During this period, hydrogen is used to replace the argon in the reactor. After the temperature is raised to 980℃, it is held for 40 minutes. Then, hydrogen fluoride is introduced into the reactor and the cleaning cycle of gas introduction-stabilized pressure reaction-discharge of waste gas is started. Specifically, the cleaning cycle is carried out 5 times depending on the number of guide vanes to be cleaned.

[0047] S4, after circulating cleaning, takes 15 minutes to heat to 1000℃, and then holds at that temperature for 80 minutes until the program ends; during the entire program operation, hydrogen is used to maintain a pressure of 780 torr inside the reactor; after the program ends, heating is stopped first, hydrogen is used to maintain the pressure inside the reactor and the reactor is cooled to 760℃, then hydrogen is stopped, argon is introduced into the reactor to maintain a pressure of 780 torr inside the reactor, and the reactor is rapidly cooled to below 80℃ by means of air outside the reactor and exhaust fan.

[0048] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for fluoride ion cleaning of guide vanes during major overhaul, characterized in that, Includes the following steps: The guide vanes of the high-pressure turbine undergoing major repair are sandblasted to remove the protective coating on the surface, thus completing the pretreatment. The pretreated high-pressure turbine guide vanes are placed into the reaction vessel of the fluoride ion cleaning equipment, and a sealing and leak check is performed. After the leak inspection is passed, fluoride ion cleaning is carried out, and hydrogen fluoride is introduced into the reactor for circulating cleaning. After circulating cleaning, the temperature is raised and held for a preset time. Then the reactor is cooled and removed from the furnace, completing the cleaning of the overhaul guide vanes.

2. The fluoride ion cleaning method for overhauled guide vanes according to claim 1, characterized in that, The blowing pressure is 0.15 MPa to 0.25 MPa, and the blowing distance is 200 mm to 350 mm.

3. The fluoride ion cleaning method for overhauled guide vanes according to claim 1, characterized in that, The step of sandblasting the guide vanes of the high-pressure turbine during overhaul to remove the protective coating and complete the pretreatment also includes: after sandblasting, using clean and dry compressed air to blow away residual sand particles and dust from the blades.

4. The fluoride ion cleaning method for overhauled guide vanes according to claim 1, characterized in that, The steps of placing the pretreated high-pressure turbine guide vanes into the reactor of the fluoride ion cleaning equipment and performing sealing and leakage checks specifically include: The pretreated high-pressure turbine guide vanes are placed on the reactor support of the fluoride ion cleaning equipment, and then the support is connected to the cover and transferred into the reactor and sealed. Perform a routine leak check on the equipment, then use argon to purge the air from the reactor while heating it to 760℃~820℃. Finally, use hydrogen to perform another leak check.

5. The fluoride ion cleaning method for overhauled guide vanes according to claim 1, characterized in that, After the leak inspection is passed, the steps of performing fluoride ion cleaning and circulating hydrogen fluoride into the reactor for cleaning specifically include: After the leak inspection is passed, a fluoride ion cleaning procedure is carried out, and the temperature is raised to 960℃ to 980℃ for 30 to 70 minutes. During this period, the argon gas in the reactor is replaced with a reducing gas. After heating to 960℃~980℃, hold the temperature for 10min~40min, then introduce hydrogen fluoride into the reactor and begin circulating cleaning.

6. The fluoride ion cleaning method for overhauled guide vanes according to claim 5, characterized in that, The reducing gas is hydrogen; the number of cycles for the cyclic cleaning is 4 to 6.

7. The fluoride ion cleaning method for overhauled guide vanes according to claim 5, characterized in that, The cyclic cleaning process is as follows: hydrogen fluoride gas is introduced, the pressure is stabilized to 740 torr to 780 torr for reaction, and the waste gas is discharged after the reaction is completed.

8. The fluoride ion cleaning method for overhauled guide vanes according to claim 1, characterized in that, The process of cleaning the guide vanes by maintaining the temperature for a preset time after cyclic cleaning, then cooling the reactor before removing it from the furnace, completes the cleaning steps for the overhauled guide vanes. Specifically, this includes: After the cycle cleaning is completed, the temperature is raised to 1000℃ to 1020℃ in 15 to 40 minutes, and then kept at that temperature for 45 to 90 minutes until the program ends. After the process is completed, stop heating first, maintain the pressure of the reactor at 740 torr to 780 torr with hydrogen, and cool it with the furnace to 760°C to 820°C; Stop the hydrogen supply, introduce argon into the reactor to maintain the pressure inside the reactor to the preset pressure, and then quickly cool the reactor before removing it from the furnace to complete the cleaning of the overhaul guide vanes.

9. A fluoride ion cleaning method for overhauling guide vanes according to claim 8, characterized in that, The preset pressure is 740 torr to 780 torr.

10. A fluoride ion cleaning method for overhauling guide vanes according to claim 8, characterized in that, The process of rapidly cooling the reactor includes: using an exhaust fan to cool the reactor to below 80°C using air from outside the reactor.

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