Pipe connection device and semiconductor apparatus

Abstract

A pipe connection device and a semiconductor device, comprising an outer pipe and an inner sleeve arranged in an inner space of the outer pipe, a first connection part sealingly and movably arranged at a first end of the outer pipe, and a second connection part sealingly and movably arranged at a second end of the outer pipe, so that the first connection part and the second connection part can compensate for a positional deviation between a corresponding connection object of the first connection part and a corresponding connection object of the second connection part, and reduce mechanical stress caused by rigid connection of the pipe connection device with other components. In addition, when the pipe connection device is in operation, gas is transported from a first interface of the first connection part to a second interface of the second connection part through the inner sleeve, and because a gas transport channel is defined in an inner space of the inner sleeve, the transported gas is prevented from contacting the outer pipe. Thus, the pipe connection device improves vacuum sealing while compensating for installation errors.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the field of semiconductor equipment, and in particular, to a pipe connecting device and a semiconductor equipment. BACKGROUND

[0002] In the semiconductor manufacturing process, thin film deposition technology is a key link for building integrated circuit microstructure and realizing device function. Chemical vapor deposition (CVD) and atomic layer deposition (ALD) are widely used due to their excellent film uniformity and controllability. To ensure the quality and repeatability of thin film deposition, periodic cleaning of by-products attached to the inner wall of the reaction chamber is required. As an efficient online cleaning technology, the remote plasma source (RPS) generates high-density plasma outside to deliver active chemical species (such as fluorine atoms) to the reaction chamber, thereby removing contaminants in the chamber and achieving high yield of semiconductor devices.

[0003] To ensure the transmission efficiency of the plasma, the remote plasma source is usually installed above the reaction chamber, and the connecting pipe needs to meet the design requirements of short distance (usually less than 800 mm) and few corners to minimize the loss of active substances in the pipe wall. Currently, the pipe joint or pipe is generally made of hard aluminum pipe with good chemical compatibility. This is a rigid connection in structure, but it puts very high requirements on the installation accuracy of the pipe joint or pipe.

[0004] However, the hard aluminum pipe is a rigid structure. Therefore, the hard aluminum pipe cannot absorb and compensate the cumulative tolerance generated during manufacturing and installation. SUMMARY

[0005] The problem solved by embodiments of the present application is to provide a pipe connecting device and a semiconductor equipment, wherein the pipe connecting device includes a pipe joint or a pipe, which is used to compensate for installation errors while improving vacuum tightness.

[0006] To solve the above problems, embodiments of the present application provide a pipe connecting device, comprising: an outer pipe, comprising opposite first and second ends, the outer pipe having an internal space; an inner sleeve disposed in the internal space of the outer pipe, the inner sleeve comprising a third end and a fourth end, the third end being on the same side as the first end, and the fourth end being on the same side as the second end; a first connecting component sealingly and movably disposed at the first end of the outer pipe, the first connecting component comprising a first interface, the first interface being in communication with the third end of the inner sleeve for delivering gas to the inner sleeve; and a second connecting component sealingly and movably disposed at the second end of the outer pipe, the second connecting component comprising a second interface, the second interface being in communication with the fourth end of the inner sleeve for receiving gas from the inner sleeve.

[0007] Optionally, the first interface wraps an outer sidewall of the third end of the inner sleeve, and a radial gap is formed between the outer sidewall of the third end of the inner sleeve and an inner sidewall of the first interface; the pipeline connecting device further comprises a first sealing ring arranged in the radial gap between the outer sidewall of the third end of the inner sleeve and the inner sidewall of the first interface.

[0008] Optionally, the pipeline connecting device further comprises an annular groove arranged on the outer sidewall of the third end of the inner sleeve; and the first sealing ring is arranged in the annular groove.

[0009] Optionally, a linear diameter of the first sealing ring is smaller than an axial dimension of the annular groove.

[0010] Optionally, in the extending direction of the inner sleeve, the third end of the inner sleeve is spaced apart from a bottom end surface of the first interface.

[0011] Optionally, the first connecting component comprises a fifth end, and the first end of the outer pipe and the fifth end are spaced apart; the pipeline connecting device further comprises a second sealing ring between the first end of the outer pipe and the fifth end.

[0012] Optionally, the third end of the inner sleeve is exposed from the outer pipe and extends into the first interface of the first connecting component; the pipeline connecting device comprises a center clasp arranged around the outer sidewall of the inner sleeve, and the center clasp is located at the junction of the first connecting component and the outer pipe, and the second sealing ring is arranged on the center clasp.

[0013] Optionally, the pipeline connecting device further comprises a first clamp, and the first clamp comprises a first groove, and the first end of the outer pipe and the fifth end are embedded in the first groove.

[0014] Optionally, the second connecting component comprises a sixth end, and the sixth end and the second end of the outer pipe are spaced apart; the pipeline connecting device further comprises a third sealing ring arranged between the second end of the outer pipe and the sixth end; and the pipeline connecting device further comprises a second clamp, and the second clamp comprises a second groove, and the second end and the sixth end are embedded in the second groove.

[0015] Optionally, an annular protrusion is arranged on the outer sidewall of the fourth end of the inner sleeve, and the third sealing ring is arranged around the annular protrusion.

[0016] Optionally, the outer pipe comprises a corrugated pipe.

[0017] Optionally, the material of the outer tube comprises one or more of Hastelloy, nickel-based alloy and stainless steel; and the material of the inner sleeve comprises aluminum alloy.

[0018] Optionally, the inner sleeve is provided with at least one through hole in the tube wall, the through hole communicating the internal passage of the inner sleeve with the annular space between the inner sleeve and the outer tube.

[0019] Optionally, the diameter of the through hole is 0.1-1 mm.

[0020] The embodiment of the present application also provides a semiconductor device, comprising: a gas distribution block comprising an input end and a plurality of output ends in communication with the input end; a plurality of pipe connecting devices, a first connecting part of each of the pipe connecting devices corresponding to connect one output end of the gas distribution block; a process chamber in communication with the second connecting part of the pipe connecting device; and an angle valve between the process chamber and the second connecting part for controlling the passage or disconnection between the pipe connecting device and the process chamber.

[0021] Compared with the prior art, the technical scheme of the embodiment of the present application has the following advantages:

[0022] The pipe connecting device provided by the embodiment of the present application comprises an outer tube and an inner sleeve arranged in the internal space of the outer tube, and a first connecting part is sealingly and movably arranged at the first end of the outer tube, and a second connecting part is sealingly and movably arranged at the second end of the outer tube, so that the first connecting part and the second connecting part can respectively compensate for the positional deviation between the first connecting part and the corresponding connecting object and the second connecting part and the corresponding connecting object, absorb the alignment error caused by installation, improve the degree of freedom of installation and adaptation, and thus reduce the mechanical stress caused by the rigid connection of the pipe connecting device with other components, and improve the sealing connection reliability of the pipe connecting device. In addition, when the pipe connecting device is working, the gas is transported from the first interface of the first connecting part to the second interface of the second connecting part through the inner sleeve, because the gas transport passage is limited in the internal space of the inner sleeve, the transported gas is prevented from contacting the outer tube, so that the outer tube and the inner sleeve can be made of materials with different properties, and the stability of the chemical properties in the gas transport process is improved. Therefore, the pipe connecting device, through the double-layer structure of the outer tube and the inner sleeve and the sealing and movable connection at both ends, compensates for the installation error while improving the vacuum sealing property.

[0023] The semiconductor equipment provided by the embodiment of the present application is characterized in that: each first connecting part of the pipeline connecting device corresponds to the output end of one of the uniform gas blocks, the angle valve is located between the process chamber and the second connecting part, and is used for controlling the on-off of the pipeline connecting device and the process chamber, the first connecting part of the pipeline connecting device is connected with the uniform gas block, the pipeline connecting device is connected through the double-layer structure of the outer pipe and the inner sleeve and the movable connection at both ends, and the installation error is compensated, the vacuum sealing property is improved, the alignment problem between the pipeline connecting device and the uniform gas block and the angle valve caused by the accumulation of the machining and installation tolerances in the semiconductor equipment is solved, the stress damage risk between the pipeline connecting device and the uniform gas block and the angle valve is reduced, the installation and debugging of the pipeline in the multi-chamber are facilitated, the sealing of the gas conveying path from the uniform gas block to the angle valve is realized, and the clean gas is stably supplied to the process chamber downstream of the angle valve. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is the axonometric structure schematic diagram of the pipeline connecting device of the embodiment of the present application;

[0025] Figure 2 is the half-section structure schematic diagram of the pipeline connecting device of the embodiment of the present application;

[0026] Figure 3 is the schematic diagram of the outer pipe of the embodiment of the present application;

[0027] Figure 4 is the axonometric structure schematic diagram of the inner sleeve of the embodiment of the present application;

[0028] Figure 5 is the half-section structure schematic diagram of the inner sleeve of the embodiment of the present application;

[0029] Figure 6 is the half-section structure schematic diagram of the first clamp of the embodiment of the present application;

[0030] Figure 7 is the structure schematic diagram of the semiconductor equipment of the embodiment of the present application. DETAILED DESCRIPTION

[0031] As the background technology indicates, the rigid structure of hard aluminum tubing makes it unable to absorb and compensate for accumulated tolerances generated during the manufacturing and installation of equipment. When connecting a single remote plasma source to multiple reaction chambers, minute positional deviations between the ports can cause internal stress in the piping system, resulting in a "stressing" phenomenon. This stress acts on the flange sealing surface, easily causing deformation of the seals, compromising the airtightness of the vacuum system, and ultimately causing the equipment to fail the rigorous vacuum helium leak test. To solve this problem, the industry has considered using flexible components such as stainless steel bellows, but fluorine atoms generated by the remote plasma source are highly corrosive to stainless steel, causing the generation of metal particles and element precipitation, which in turn contaminates the wafer surface, leading to failure of subsequent VPD (vapor phase decomposition) metal contamination tests. Simultaneously, there is a lack of aluminum bellows products compatible with the process environment on the market. Therefore, developing an RPS piping connection device that can both compensate for installation errors to ensure vacuum sealing and resist plasma corrosion to avoid process contamination has become a pressing technical challenge in this field.

[0032] To address the aforementioned technical problems, the pipeline connection device provided in this embodiment of the invention includes an outer pipe and an inner sleeve disposed within the internal space of the outer pipe. A first connecting component is sealed and movably disposed at the first end of the outer pipe, and a second connecting component is sealed and movably disposed at the second end of the outer pipe. This allows the first and second connecting components to compensate for positional deviations between the connected objects corresponding to the first and second connecting components, absorbing alignment errors caused by installation, improving the freedom of installation and adaptation, and thereby reducing mechanical stress generated by rigid connections between the pipeline connection device and other components, thus improving the sealing reliability of the pipeline connection device. Furthermore, when the pipeline connection device is in operation, gas is transported from the first interface of the first connecting component through the inner sleeve to the second interface of the second connecting component. Because the gas transport channel is confined within the inner sleeve, contact between the transported gas and the outer pipe is avoided. This allows the outer pipe and the inner sleeve to be made of materials with different properties, ensuring the chemical stability of the gas during transport. Therefore, the pipeline connection device, through its double-layer structure of outer pipe fittings and inner sleeve, and its sealed and movable connection at both ends, can improve vacuum sealing while compensating for installation errors.

[0033] To make the above-mentioned objects, features and advantages of the embodiments of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Figure 1 This is an isometric structural schematic diagram of the pipeline connection device according to an embodiment of the present invention; Figure 2 This is a half-sectional structural schematic diagram of the pipeline connection device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the outer tubing in an embodiment of the present invention. Figure 4This is an isometric structural diagram of the inner sleeve according to an embodiment of the present invention; Figure 5 This is a half-sectional structural diagram of the inner sleeve in an embodiment of the present invention.

[0034] refer to Figure 1 and Figure 2 , Figure 2 yes Figure 1 A cross-sectional view of the present invention shows that an embodiment of the present invention provides a pipe connection device 10, including: an outer pipe fitting 100 (such as...). Figure 3 As shown), including opposing first ends 100a and second ends 100b, the outer tube 100 has an internal space 101 (as shown). Figure 3 As shown); Inner sleeve 200 (as shown) Figure 4 As shown), it is disposed in the internal space 101 of the outer tube fitting 100. The inner sleeve 200 includes a third end 200a and a fourth end 200b. The third end 200a is on the same side as the first end 100a, and the fourth end 200b is on the same side as the second end 100b. A first connecting component 300 is sealed and movably disposed at the first end 100a of the outer tube fitting 100. The first connecting component 300 includes a first interface 301 (e.g., ...). Figure 2 As shown), the first interface 301 communicates with the third end 200a of the inner sleeve 200, and the first interface 301 wraps around the outer wall of the third end 200a of the inner sleeve 200, for supplying gas to the inner sleeve 200; the second connecting component 400 is sealed and movably disposed at the second end 100b of the outer tube 100, and the second connecting component 400 includes a second interface 401 (as shown). Figure 2 As shown), the second interface 401 is connected to the fourth end 200b of the inner sleeve 200 and is used to receive gas from the inner sleeve 200.

[0035] The pipeline connection device 10 provided in this embodiment of the invention includes an outer pipe fitting 100 and an inner sleeve 200 disposed in the internal space 101 of the outer pipe fitting 100. A first connecting component 300 is sealed and movably disposed at the first end 100a of the outer pipe fitting 100, and a second connecting component 400 is sealed and movably disposed at the second end 100b of the outer pipe fitting 100. This allows the first connecting component 300 and the second connecting component 400 to compensate for positional deviations between the connecting objects corresponding to the first connecting component 300 and the connecting objects corresponding to the second connecting component 400, respectively. This absorbs alignment errors caused by installation, improves the freedom of installation and adaptation, and reduces the mechanical stress generated by the rigid connection of the pipeline connection device 10 with other components, thereby improving the sealing connection reliability of the pipeline connection device 10. Furthermore, when the pipeline connection device 10 is in operation, gas is transported from the first interface 301 of the first connecting component 300 through the inner sleeve 200 to the second interface 401 of the second connecting component 400. Because the gas transport channel is confined inside the inner sleeve 200, the transported gas is prevented from contacting the outer pipe fitting 100, thereby allowing the outer pipe fitting 100 and the inner sleeve to be made of materials with different properties, improving the stability of the chemical properties during gas transport. Therefore, the pipeline connection device 10, through the double-layer structure of the outer pipe fitting 100 and the inner sleeve, and the sealed and movable connection at both ends, improves vacuum sealing while compensating for installation errors.

[0036] In some embodiments, the outer tube 100 includes opposing first end 100a and second end 100b, and the outer tube 100 has an internal space 101.

[0037] The outer pipe fitting 100 is the external structure of the pipe connection device 10. The internal space 101 of the outer pipe fitting 100 is used to accommodate the inner sleeve 200, thereby forming a double-layer pipe structure. In addition, the first end 100a of the outer pipe fitting 100 is connected to the first connecting component 300, and the second end 100b of the outer pipe fitting 100 is connected to the second connecting component 400, thereby forming the external boundary of the pipe connection device 10 and providing a structural foundation and a sealed environment for the inner sleeve 200.

[0038] In some embodiments, both the first end 100a and the second end 100b of the outer pipe fitting 100 include a flange structure, such as a KF-standard flange. The first end 100a of the outer pipe fitting 100 is connected to the first connecting component 300 via the KF-standard flange, and the second end 100b of the outer pipe fitting 100 is connected to the second connecting component 400 via the KF-standard flange.

[0039] In some embodiments, the outer tubing 100 includes a bellows.

[0040] The outer pipe fitting 100 is made of corrugated pipe. The corrugated pipe wall has the characteristics of tensile, compressive and bending deformation in the axial and radial directions. It can compensate for the alignment error caused by processing or installation between the first end 100a and the first connecting component 300, and the second end 100b and the second connecting component 400 of the outer pipe fitting 100, eliminate the mechanical stress caused by rigid connection, and improve the sealing performance of the pipe connection device 10.

[0041] As an example, the bellows in the outer fitting 100 and the flange structure of the first end 100a and the second end 100b in the outer fitting 100 are integral structures, or the two are welded together.

[0042] It should be noted that when the corrugated pipe is forced to bend or change length due to alignment error, the inner sleeve 200 can move adaptively in the outer pipe fitting 100, reducing the stress on the outer pipe fitting 100, so that the pipe connection device 10 can meet certain installation deviations.

[0043] In some embodiments, the outer tube 100 is made of one or more of Hastelloy, nickel-based alloys (such as the INCONEL series), and stainless steel (such as 316L).

[0044] Hastelloy, nickel-based alloys, or stainless steel have excellent chemical stability and mechanical strength, which enables the outer tube 100, as a vacuum boundary, to withstand atmospheric pressure and mechanical deformation, while also being resistant to small amounts of corrosive gas leaking from the inner sleeve 200 seal, thus improving the service life of the outer tube 100.

[0045] The inner sleeve 200 is disposed in the internal space 101 of the outer tube 100. The inner sleeve 200 includes a third end 200a and a fourth end 200b. The third end 200a is on the same side as the first end 100a, and the fourth end 200b is on the same side as the second end 100b.

[0046] The inner sleeve 200 is disposed within the internal space 101 of the outer pipe fitting 100. The internal channel 201 of the inner sleeve 200 is used to transport process gas, meaning that the process gas is confined within the inner sleeve 200 and isolated from the inner wall of the outer pipe fitting 100. This allows the inner sleeve 200 and the outer pipe fitting 100 to be made of different materials, enabling the outer pipe fitting 100 to provide mechanical stress compensation while the inner sleeve 200 provides chemical protection.

[0047] It should be noted that the inner sleeve 200 is a hollow tubular component, and the outer diameter of the inner sleeve 200 is smaller than the inner diameter of the outer tube 100, forming an annular space 206 between the inner sleeve 200 and the outer tube 100 (e.g., Figure 2 (As shown).

[0048] like Figure 2 As shown, the first interface 301 encloses the third end 200a of the inner sleeve 200 (e.g., Figure 4 The outer wall of the inner sleeve 200 (as shown) has a radial gap 102 between the outer wall of the third end 200a of the inner sleeve 200 and the inner wall of the first interface 301. Figure 2 (as shown); the pipeline connection device 10 further includes: a first sealing ring 103, disposed in the radial gap 102 between the outer wall of the third end 200a of the inner sleeve 200 and the inner wall of the first interface 301.

[0049] A radial gap 102 exists between the third end 200a of the inner sleeve 200 and the first interface 301, allowing the third end 200a of the inner sleeve 200 a certain amount of free movement within the radial range, which can compensate for the radial displacement caused by the bending deformation of the outer pipe fitting 100. Furthermore, the first sealing ring 103 provided in the radial gap 102 can dynamically seal the radial gap 102 between the outer wall of the inner sleeve 200 and the inner wall of the first interface 301 when the third end 200a of the inner sleeve 200 moves radially, preventing process gas from entering the annular space 206 between the inner sleeve 200 and the outer pipe fitting 100, thereby protecting the outer pipe fitting 100 from corrosion.

[0050] As an example, the inner sleeve 200 is coaxially disposed in the internal space 101 of the outer tube 100.

[0051] As an example, the first sealing ring 103 includes an O-ring.

[0052] As an example, the inner sleeve 200 has a radial gap 102 of 2 mm to 4 mm between the third end 200a and the first interface 301, so that the inner sleeve 200 has a radial range of motion of 1 mm to 2 mm.

[0053] As an example, the material of the first sealing ring 103 includes a high-fluorinated polymer or a perfluoropolymer material (such as FKM or FFKM).

[0054] High-fluorine polymers or perfluoropolymers are chemically inert to highly reactive free radicals such as fluorine atoms. Therefore, when the first sealing ring 103 is exposed to corrosive process gases delivered from a remote plasma source, it can resist chemical erosion, ensuring long-term sealing reliability and protecting the outer pipe fitting 100 from corrosion.

[0055] In some embodiments, the inner sleeve 200 is a rigid sleeve, which allows the process gas to flow smoothly in a stable manner, avoiding changes in flow velocity due to deformation of the inner sleeve, and also giving the pipeline connection device 10 a certain degree of rigidity. Furthermore, the third end 200a of the inner sleeve 200 is rigid, providing stable support and a sealing reference for the first sealing ring 103. The first sealing ring 103 has a good sealing effect and can prevent the process gas from entering the annular space 206.

[0056] As an example, the inner sleeve 200 is made of aluminum alloy.

[0057] The inner sleeve 200 is made of aluminum alloy. When the aluminum alloy is exposed to a fluorine-containing plasma environment, it can form a dense and chemically stable aluminum fluoride passivation film. This passivation film acts as a protective film to prevent fluorine atoms from reacting further with the aluminum alloy, thereby making the inner sleeve 200 resistant to corrosive process gases. This avoids the generation of metal particles and elemental contamination due to the corrosion of the inner sleeve 200 wall, which is beneficial to maintaining the high cleanliness of the semiconductor process environment.

[0058] In some embodiments, the pipe connection device 10 further includes: an annular groove 202 (e.g., Figure 5 As shown), it is disposed on the outer wall of the third end 200a of the inner sleeve 200; the first sealing ring 103 (as shown) Figure 2 As shown, it is disposed in the annular groove 202.

[0059] The annular groove 202 on the outer wall of the third end 200a of the inner sleeve 200 provides axial positioning for the first sealing ring 103, which is used for positioning the first sealing ring 103 during assembly and operation. Concealing the first sealing ring 103 in the annular groove 202 also limits and protects it, making it less prone to twisting or dislodging when subjected to radial compression and axial movement, thus helping to maintain the stability and reliability of the dynamic seal.

[0060] As an example, the cross-section of the annular groove 202 is rectangular or trapezoidal.

[0061] It should be noted that the third end 200a of the inner sleeve 200 and the first sealing ring 103 in the annular groove 202 are jointly disposed in the first interface 301 of the first connecting component 300. The outer surface of the first sealing ring 103 contacts the inner wall of the first interface 301, and the inner surface of the first sealing ring 103 contacts the outer wall surface of the annular groove 202, forming a dynamic seal.

[0062] When the outer tube 100 is radially offset, the inner sleeve 200 moves accordingly. The radial gap 102 provides radial movement space for the inner sleeve 200. The first sealing ring 103 adapts to the change through its own elastic deformation, fills the gap, and maintains the sealing effect.

[0063] In some embodiments, the wire diameter of the first sealing ring 103 is smaller than the axial dimension of the annular groove 202.

[0064] The diameter of the first sealing ring 103 is smaller than the axial dimension of the annular groove 202, meaning that axial movement space is reserved for the first sealing ring 103 within the annular groove 202. When the inner sleeve 200 experiences axial relative displacement with respect to the first connecting component 300 due to the expansion and contraction of the outer pipe component 100, the first sealing ring 103 can slide or roll freely axially within the annular groove 202, allowing the pipe connection device 10 to compensate for axial installation errors.

[0065] It should be noted that the wire diameter of the first sealing ring 103 is smaller than the axial dimension of the annular groove 202 and works together with the radial clearance 102 to improve the degree of freedom of the first end 100a of the outer tube 100 and the third end 200a of the inner sleeve 200.

[0066] like Figure 4 and Figure 5 As shown, at least one through hole 205 is provided on the tube wall of the inner sleeve 200, and the through hole 205 connects to the internal channel 201 of the inner sleeve 200 (e.g., Figure 5 (as shown) the annular space 206 between the inner sleeve 200 and the outer tube 100 (as shown) Figure 2 (As shown).

[0067] The through hole 205 connects the internal channel 201 of the inner sleeve 200 with the annular space 206 between the inner sleeve 200 and the outer pipe fitting 100, providing a evacuation path for the annular space 206. Therefore, when evacuating the pipe connection device 10, residual gas in the annular space 206 can be extracted along with the gas in the internal channel 201 of the inner sleeve 200. This avoids the annular space 206 becoming sealed and forming a vacuum dead zone, which helps improve the vacuum limit of the pipe connection device 10. Furthermore, during high-sensitivity helium leak detection, it avoids the virtual leak background signal caused by the slow release of residual gas in the annular space 206, thus improving the accuracy and reliability of vacuum leak detection.

[0068] When the vacuuming operation is started on the inner sleeve 200, due to the presence of the through hole 205, a pressure difference is generated between the annular space 206 and the internal channel 201, which drives the gas molecules in the annular space 206 to enter the internal channel 201 through the through hole 205 and are eventually extracted by the vacuum pump.

[0069] As an example, the diameter of the through hole 205 is 0.1 mm to 1 mm. The diameter of the through hole 205 should not be too small, so that the through hole will not fail due to manufacturing tolerances or blockage by small particles; the diameter of the through hole 205 should not be too large, so as to prevent excessive process gas from entering the annular space 206 during gas delivery, thereby protecting the outer tube 100.

[0070] A first connecting component 300 is movably and sealingly disposed at the first end 100a of the outer tube 100. The first connecting component 300 includes a first interface 301, which communicates with the third end 200a of the inner sleeve 200 and is used to supply gas to the inner sleeve 200.

[0071] The first connecting component 300 serves as the floating end of the pipeline connection device 10. The first connecting component 300 is movably and sealingly disposed at the first end 100a of the outer tube 100, ensuring that even when the outer tube 100 undergoes flexible deformation, the first connecting component 300 can still maintain a sealed connection with external pipelines, such as the output end of a remote plasma source. Furthermore, the first interface 301 provides an inlet for external gas to enter the internal channel 201 of the inner sleeve 200, preventing process gas from directly contacting the outer tube 100. Therefore, the third end 200a of the inner sleeve 200, housed within the first interface 301, forms the basis for deformation stress compensation by the floating end, facilitating the compensation of radial and axial alignment errors generated during installation.

[0072] As an example, the first interface 301 of the first connecting member 300 is a hole or cavity with an inner diameter, capable of accommodating the third end 200a of the inner sleeve 200.

[0073] like Figure 2 As shown, in the extending direction of the inner sleeve 200, the third end 200a of the inner sleeve 200 is spaced apart from the bottom end face 301a of the first interface 301.

[0074] The third end 200a of the inner sleeve 200 is spaced apart from the bottom end face 301a of the first interface 301, allowing relative axial displacement between the third end 200a of the inner sleeve 200 and the first connecting component 300. When the outer pipe fitting 100 changes its axial length due to installation errors or thermal expansion and contraction, the inner sleeve 200 can expand and contract axially, avoiding stress interference or structural interference, thus improving the adaptability of the pipe connection device 10 to installation tolerances.

[0075] Furthermore, the gap between the third end 200a of the inner sleeve 200 and the bottom end face 301a of the first interface 301 is a key feature for the "floating" of the inner sleeve 200, which is compatible with the axial expansion, contraction, or bending of the outer pipe fitting 100. When the outer pipe fitting 100 is compressed, the third end 200a of the inner sleeve 200 moves closer to the bottom end face 301a of the first interface 301, and the compression gap is consumed; when the outer pipe fitting 100 is stretched, the third end 200a of the inner sleeve 200 moves away from the bottom end face 301a of the first interface 301, and the stretching length of the outer pipe fitting 100 is consumed, improving the connection reliability of the pipe connection device 10.

[0076] As an example, in the extending direction of the inner sleeve 200, the distance between the third end 200a of the inner sleeve 200 and the bottom end face 301a of the first interface 301 ranges from 5 mm to 10 mm.

[0077] In some embodiments, the first connecting member 300 includes a fifth end 300a, and the first end 100a of the outer tube 100 and the fifth end 300a are spaced apart; the pipe connection device 10 further includes: a second sealing ring 104 (e.g., Figure 2 As shown), it is located between the first end 100a and the fifth end 300a of the outer tube 100.

[0078] The fifth end 300a of the first connecting component 300 is spaced apart from the first end 100a of the outer tube 100, and the second sealing ring 104 is disposed in this space, so that the annular space 206 is isolated from the external environment.

[0079] In some embodiments, the material of the second sealing ring 104 includes a high-fluorine polymer or a perfluoropolymer material (such as FKM or FFKM).

[0080] The chemical inertness of high-fluorine polymers or perfluorinated polymers to highly reactive free radicals such as fluorine atoms allows the second sealing ring 104 to resist chemical corrosion even when exposed to corrosive process gases, thus ensuring long-term sealing reliability and protecting the outer pipe 100 from corrosion.

[0081] like Figure 2 As shown, the third end 200a of the inner sleeve 200 protrudes from the outer pipe fitting 100 and extends into the first interface 301 of the first connecting component 300; the pipe connection device 10 includes: a central retaining ring 203, which is arranged around the outer side wall of the inner sleeve 200, and the central retaining ring 203 is located at the junction of the first connecting component 300 and the outer pipe fitting 100, and the second sealing ring 104 is disposed on the central retaining ring 203.

[0082] The central retaining ring 203 is disposed on the outer side wall of the inner sleeve 200 and located at the junction of the first connecting component 300 and the outer tube 100. It is used to bear the load and axially position the second sealing ring 104. In other words, the central retaining ring 203 provides support and radial limit for the second sealing ring 104 to form a stable seal.

[0083] As an example, a groove is provided on the radially outer side wall of the central retaining ring 203, the groove being used to accommodate the second sealing ring 104.

[0084] It should be noted that the first interface 301 is the outlet of the remote plasma source (RPS).

[0085] In some embodiments, the first connecting component 300 is a connector for connection, including a KF type flange interface.

[0086] The KF type flange interface features simple structure, convenient disassembly and assembly, and reliable sealing, enabling the first connecting component 300 to cooperate with various vacuum components that also adopt the KF standard interface, such as the first end 100a of the outer pipe fitting 100, so that the first connecting component 300 and the outer pipe fitting 100 are sealed by the second sealing ring 104.

[0087] like Figure 6 As shown, the pipeline connection device 10 further includes: a first clamp 105, the first clamp 105 including a first groove 1051, the first end 100a and the fifth end 300a of the outer pipe fitting 100 are embedded in the first groove 1051.

[0088] The first clamp 105 is a fastener. When the first clamp 105 is tightened, the first groove 1051 of the first clamp 105 is simultaneously embedded with the first end 100a of the outer pipe fitting 100 and the fifth end 300a of the first connecting component 300. The circumferential pressure generated when the first clamp 105 is tightened simultaneously presses the two flanges, the central retaining ring 203 and the second sealing ring 104 together tightly, so that the second sealing ring 104 has a sealing function.

[0089] As an example, the first clamp 105 includes a hinged or split metal ring. The contour of the first groove 1051 of the first clamp 105 matches the outer edge of the flange interface of the first end 100a and the fifth end 300a, covering the outside of the fifth end 300a flange of the first connecting member 300 and the outside of the first end 100a flange of the outer pipe fitting 100. The first clamp 105 is tightened by a screw or lever mechanism. The inclined surface of the first groove 1051 on the inner side of the first clamp 105 compresses the conical surface of the flange, forcing the two flange faces to come closer to each other, converting the radial contraction force into a strong axial clamping force.

[0090] As an example, the first groove 1051 is V-shaped or wedge-shaped.

[0091] It should be noted that the first connecting component 300 and the third end 200a of the inner sleeve 200 form a dynamic shaft hole sealing structure.

[0092] The dynamic shaft hole sealing structure formed between the first connecting component 300 and the inner sleeve 200 not only plays a sealing role, but also allows relative axial and radial movement between the first connecting component 300 and the inner sleeve 200.

[0093] It should be noted that during radial displacement, the third end 200a of the inner sleeve 200 moves within the first interface 301, and the first sealing ring 103 is compressed and deformed to maintain the seal between the first connecting component 300 and the third end 200a of the inner sleeve 200. During axial displacement, the inner sleeve 200 slides within the first interface 301, and the first sealing ring 103 rolls or slides within the annular groove 202. The first sealing ring 103 is always in contact with the inner wall of the first interface 301 and the outer wall of the annular groove 202, so that the annular space 206 can remain sealed while relative movement occurs.

[0094] The second connecting component 400 is movably and sealingly disposed at the second end 100b of the outer tube 100. The second connecting component 400 includes a second interface 401, which communicates with the fourth end 200b of the inner sleeve 200 and is used to receive gas from the inner sleeve 200.

[0095] The second connecting component 400 forms a movable and sealed connection at the second end 100b of the outer tube 100. The second interface 401 of the second connecting component 400 is connected to the fourth end 200b of the inner sleeve 200. The second interface 401 serves as the gas outlet end of the pipeline connection device 10 and is the airflow path between the inner sleeve 200 and the process chamber, so that the process gas delivered from the inner sleeve 200 can be stably introduced into the process chamber.

[0096] In some embodiments, the second connecting component 400 is a connector for connection, including a KF type flange interface.

[0097] It should be noted that the second connecting component 400 includes a sixth end 400a, which is spaced apart from the second end 100b of the outer pipe fitting 100; the pipe connection device 10 further includes: a third sealing ring 107 (e.g., Figure 2 As shown), it is disposed between the second end 100b and the sixth end 400a of the outer pipe fitting 100; the pipe connection device 10 further includes: a second clamp 106 (as shown) Figure 2 As shown), the second clamp 106 includes a second groove, and the second end 100b and the sixth end 400a are embedded in the second groove.

[0098] The sixth end 400a of the second connecting component 400 and the second end 100b of the outer tube 100 are spaced apart to provide a receiving space for the third sealing ring 107. The second end 100b and the sixth end 400a are embedded in the second groove, so that the second clamp 106 can clamp the sixth end 400a and the second end 100b, thereby applying a uniform compressive force to the third sealing ring 107 and forming a sealed connection between the outer tube 100 and the second connecting component 400.

[0099] As an example, the second groove is a V-shaped groove or a trapezoidal groove. The sixth end 400a of the second connecting component 400 and the second end 100b of the outer tube 100 both include KF specification flanges, and the outer edges of the sixth end 400a and the second end 100b are machined into a tapered shape to match the V-shaped groove or trapezoidal groove of the second groove of the second clamp 106.

[0100] It should be noted that the outer wall of the fourth end 200b of the inner sleeve 200 is provided with an annular protrusion 204 (e.g., Figure 2 As shown in the figure, the third sealing ring 107 is arranged around the annular protrusion 204.

[0101] The annular protrusion 204 on the outer wall of the fourth end 200b of the inner sleeve 200 is used to provide support and axial positioning for the third sealing ring 107.

[0102] As an example, the surface of the annular protrusion 204 includes a groove for receiving a third sealing ring 107 to further define the axial position of the sealing ring.

[0103] It should be noted that the inner sleeve 200 and the annular protrusion 204 are an integral structure.

[0104] The inner sleeve 200 and the annular protrusion 204 are an integral structure, meaning that the annular protrusion 204 is directly processed from the base material of the inner sleeve 200, which gives the annular protrusion 204 and the inner sleeve 200 high structural strength and dimensional accuracy.

[0105] As an example, the material of the third sealing ring 107 includes a high-fluorine polymer or a perfluoropolymer. The use of a high-fluorine polymer or perfluoropolymer material for the third sealing ring 107 helps it resist corrosion from corrosive gases and improves its lifespan.

[0106] It should be noted that the inner diameter of the third sealing ring 107 matches the groove contour of the annular protrusion 204, which can stably install the third sealing ring 107 on the annular protrusion 204.

[0107] As an example, the second clamp 106 is a fastener, such as a chain clamp or bolt clamp in a KF flange system. The second clamp 106 has a second V-shaped or U-shaped groove inside.

[0108] During the tightening process, an annular protrusion 204 with a third sealing ring 107 is positioned between the sixth end 400a and the second end 100b. Then, the flanges of the sixth end 400a and the second end 100b are inserted into the second groove of the second clamp 106. The second clamp 106 is tightened by a screw or lever mechanism; the second groove of the second clamp 106 presses against the outer edges of the sixth end 400a and the second end 100b, forcing the two flange faces closer together and converting the radial contraction force into a strong axial clamping force.

[0109] It should be noted that the second interface 401 (e.g.) Figure 2 (As shown) is the inlet of the process chamber. The second interface 401 is used to deliver the process gas generated by the remote plasma source to the process chamber.

[0110] It should also be noted that the pipeline connection device 10 is configured in an asymmetrical connection form, with one end of the second connection component 400 being fixedly connected and one end of the first connection component 300 being movably connected through the radial gap 102 and the axial interval.

[0111] When the pipeline connection device 10 is working, the fixed connection of the second connecting component 400 provides a fixed reference for the inner sleeve 200, and the movable connection of the first connecting component 300 can move freely within the preset radial gap 102 and axial interval. This allows the inner rigid sleeve 200 to adapt to the deformation when the outer pipe fitting 100 is stretched, compressed or bent due to absorbing installation errors, thereby avoiding mechanical stress in the pipeline connection device 10 and improving the reliability of the pipeline connection.

[0112] Correspondingly, such as Figure 7 As shown, this embodiment of the invention also provides a semiconductor device, including a gas equalization block 20, which includes an input terminal and a plurality of output terminals connected to the input terminal; a pipeline connection device 10, wherein the number of pipeline connection devices 10 is plurality of, and a first connection component 300 of each pipeline connection device 10 is correspondingly connected to one output terminal of the gas equalization block 20; a process chamber, which is connected to the second connection component 400 in the pipeline connection device 10; and an angle valve 30, located between the process chamber and the second connection component 400, for controlling the passage or disconnection between the pipeline connection device 10 and the process chamber.

[0113] In the semiconductor equipment provided by this embodiment of the invention, the first connecting component 300 of each pipeline connection device 10 is connected to the output end of one gas equalization block 20. Angle valve 30 is located between the process chamber and the second connecting component 400, and is used to control the passage or disconnection between the pipeline connection device 10 and the process chamber. The first connecting component 300 of the pipeline connection device 10 is connected to the gas equalization block 20. The pipeline connection device 10 is connected by a double-layer structure of outer tube 100 and inner sleeve, and is sealed and movable at both ends. While compensating for installation errors, it improves vacuum sealing performance. It can solve the alignment problem between the pipeline connection device 10 and the gas equalization block 20 and the angle valve 30 caused by the accumulation of processing and installation tolerances in the semiconductor equipment. It reduces the risk of stress damage between the pipeline connection device 10 and the gas equalization block 20 and the angle valve 30. It is beneficial to simplify the installation and debugging of pipelines in multi-chambers, and ensure the sealing of the gas delivery path from the gas equalization block 20 to the angle valve 30, so as to stably supply clean gas to the process chamber downstream of the angle valve 30.

[0114] The gas distribution block 20 is used to receive process gas provided by a remote plasma source, and then distributes the process gas to multiple output ends through an internal flow path, thereby simultaneously providing process gas to multiple parallel pipeline connection devices 10, thus realizing the simultaneous or selective gas supply from the remote plasma source to multiple process chambers.

[0115] In some embodiments, the gas equalization block 20 is a one-piece metal or alloy block, such as made of corrosion-resistant aluminum alloy or stainless steel.

[0116] As an example, the gas equalizer 20 has a gas path, with its input end connected to the airflow path and its output end connected to the airflow path.

[0117] As an example, the gas equalizer 20 has one input terminal 21 and multiple output terminals. The number of output terminals is determined according to the number of process chambers to be connected. For example, in a four-chamber application, the gas equalizer 20 has one input terminal and four output terminals.

[0118] It should also be noted that each output end includes a standard flange interface for corresponding connection to the first connection component 300 of a pipeline connection device 10, so that the gas distribution block 20 can deliver the process gas supplied from the input end to multiple process chambers through multiple pipeline connection devices 10.

[0119] It should be noted that each pipeline connection device 10 adopts a double-layer coaxial structure. Its first connection component 300 is connected to the output end of the gas equalization block 20 to receive the process gas from the gas equalization block 20, and the second connection component 400 of the pipeline connection device 10 is connected to the process chamber through the angle valve 30.

[0120] When there is an axial, radial, or angular positional deviation between the output end of the gas distribution block 20 and the inlet end of the downstream angle valve 30, each pipeline connection device 10 can absorb the alignment error through the flexible deformation of its outer pipe fitting 100 and the floating design of its inner sleeve 200. Specifically, the deformation of the outer pipe fitting 100 compensates for the overall alignment error, while the inner sleeve 200 ensures that the process gas remains unobstructed and unaffected by stress even when the outer pipe fitting 100 deforms. An independent pipeline connection device 10 is provided in each gas branch, allowing each branch to independently compensate for alignment errors.

[0121] It should be noted that the process gas delivered by the pipeline connection device 10 enters the process chamber after being controlled by the angle valve 30.

[0122] As an example, the angle valve 30 is sealed to the second connecting part 400 of the pipeline connection device 10, for example, by welding or by a flange interface. The output end of the gas equalizer 20 is sealed to the first connecting part 300 of the pipeline connection device 10, for example, by welding or by a flange interface.

[0123] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A pipe connection device, characterized in that, include: An outer tube includes opposing first and second ends, the outer tube having an internal space; An inner sleeve is disposed in the internal space of the outer tube. The inner sleeve includes a third end and a fourth end. The third end is on the same side as the first end, and the fourth end is on the same side as the second end. A first connecting component, sealed and movably disposed at the first end of the outer tube, includes a first interface communicating with the third end of the inner sleeve for supplying gas to the inner sleeve; the first interface wraps around the outer sidewall of the third end of the inner sleeve, and a radial gap exists between the outer sidewall of the third end of the inner sleeve and the inner sidewall of the first interface; the pipeline connection device further includes a first sealing ring disposed in the radial gap between the outer sidewall of the third end of the inner sleeve and the inner sidewall of the first interface; the first connecting component includes a fifth end, with the first end and the fifth end of the outer tube spaced apart; the pipeline connection device further includes a second sealing ring located between the first end and the fifth end of the outer tube. A second connecting component, sealed and movably disposed at the second end of the outer tube, includes a second interface communicating with the fourth end of the inner sleeve for receiving gas from the inner sleeve; the second connecting component also includes a sixth end spaced apart from the second end of the outer tube; the pipe connection device further includes a third sealing ring disposed between the second end and the sixth end of the outer tube; the pipe connection device further includes a second clamp, which includes a second groove into which the second end and the sixth end are embedded.

2. The pipeline connection device as described in claim 1, characterized in that, The pipeline connection device further includes: An annular groove is provided on the outer wall of the third end of the inner sleeve; The first sealing ring is disposed in the annular groove.

3. The pipeline connection device as described in claim 2, characterized in that, The diameter of the first sealing ring is smaller than the axial dimension of the annular groove.

4. The pipeline connection device as described in claim 1, characterized in that, In the extending direction of the inner sleeve, the third end of the inner sleeve is spaced apart from the bottom end face of the first interface.

5. The pipeline connection device as described in claim 1, characterized in that, The third end of the inner sleeve protrudes from the outer tube and extends into the first interface of the first connecting component; The pipeline connection device includes: a central retaining ring, which is arranged around the outer wall of the inner sleeve, and the central retaining ring is located at the junction of the first connecting component and the outer pipe fitting, and a second sealing ring is arranged on the central retaining ring.

6. The pipeline connection device as described in claim 1, characterized in that, The pipeline connection device further includes: a first clamp, the first clamp including a first groove, wherein the first end and the fifth end of the outer pipe are embedded in the first groove.

7. The pipeline connection device as described in claim 1, characterized in that, The outer wall of the fourth end of the inner sleeve is provided with an annular protrusion, and the third sealing ring is arranged around the annular protrusion.

8. The pipeline connection device as described in claim 1, characterized in that, The outer tubing includes a corrugated pipe.

9. The pipeline connection device as described in claim 1, characterized in that, The outer tubing is made of one or more of Hastelloy, nickel-based alloys, and stainless steel; the inner sleeve is made of aluminum alloy.

10. The pipeline connection device as described in claim 1, characterized in that, The inner sleeve has at least one through hole on its tube wall, which connects the internal channel of the inner sleeve with the annular space between the inner sleeve and the outer tube.

11. The pipeline connection device as described in claim 10, characterized in that, The diameter of the through hole is 0.1 mm to 1 mm.

12. A semiconductor device, characterized in that, include: A gas equalization block includes an input end and multiple output ends connected to the input end; The pipeline connection device as described in any one of claims 1 to 11 is a plurality of pipeline connection devices, and the first connection component of each pipeline connection device is connected to the output end of one of the gas equalization blocks; The process chamber is connected to the second connecting component in the pipeline connection device; An angle valve, located between the process chamber and the second connecting component, is used to control the passage or disconnection between the pipeline connection device and the process chamber.

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