Auxiliary calibration device and calibration method for assembling and adjusting optical machine
By using an optomechanical assembly and adjustment auxiliary calibration device, which combines a reference plane mirror and a laser structure, the problem of large space occupation and high difficulty caused by the large size of calibration equipment in the assembly and adjustment of optical systems is solved, achieving an efficient assembly and adjustment process and reducing costs.
Patent Information
- Application Number
- CN202511377876.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-25
- Publication Date
- 2025-12-05
AI Technical Summary
In the current optical system assembly and adjustment process, the calibration equipment is large in size, occupies a lot of space resources, and is difficult to assemble and adjust, resulting in high costs and long production cycles.
An optomechanical assembly and adjustment auxiliary calibration device is adopted, including a reference plane mirror, a calibration mirror mount assembly, a laser structure, and an adjustment assembly. The reference plane mirror and the laser structure are adjusted by an interferometer and a standard plane mirror respectively, and after positioning, it can replace large and expensive equipment for assembly and adjustment.
It reduces reliance on large and expensive equipment, lowers assembly and commissioning costs, improves assembly and commissioning efficiency, and alleviates the problems of space resource occupation and high assembly and commissioning difficulty.
Smart Images
Figure CN121069646A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of optical machine assembly and adjustment auxiliary equipment, and particularly to an optical machine assembly and adjustment auxiliary calibration device and method. BACKGROUND
[0002] In the assembly and adjustment process of an optical system, whether the optical axis of the light beam is collimated or not is one of the important indicators for determining the performance of the optical system, and generally needs to go through two processes of coarse adjustment and fine adjustment. Among them, there are the following methods for coarse adjustment: first, for an optical system that needs to be coaxial with the front and rear optical paths, the optical axis of the front optical path is usually calibrated first, and then the rear optical path element is adjusted and calibrated based on the calibrated optical axis. In the calibration process, a parallel light tube or an interferometer with a light source is used as a calibration device, the light beam is emitted to the assembly and adjustment optical path, a white paper sheet or other color developing card is placed on the surface of the optical element in the optical path, the position of the light spot on the element is observed, and the adjustment and repair of the optical element in the rear optical path are controlled based on the observation; second, an internal light source is used to hit back, the optical elements are sequentially installed in the optical path, and finally a beam analyzer is used to monitor the quality of the light spot in real time, and the accuracy of the position of the element is controlled based on the monitoring.
[0003] According to the above two assembly and adjustment schemes, a beam analyzer, a parallel light tube or an interferometer is needed to be used as a calibration device throughout the assembly and adjustment process. For batch assembly and adjustment products, the cost of using these valuable devices is extremely high, which easily causes waste of resources, affects the production cycle, and the devices have problems of large size, difficult assembly and adjustment, and large space resource occupation. SUMMARY
[0004] The present application aims to provide an optical machine assembly and adjustment auxiliary calibration device and method to alleviate the technical problems of large space resource occupation and difficult assembly and adjustment caused by the large size of the calibration device during assembly and adjustment in the prior art.
[0005] To achieve the above-mentioned purpose, the present application adopts the following technical solutions: In a first aspect, the present application provides an optical machine assembly and adjustment auxiliary calibration device, comprising a reference plane mirror, a calibration mirror seat assembly, a laser structure and an adjustment assembly; The calibration mirror seat assembly is arranged between the interferometer and the standard plane mirror, and the calibration mirror seat assembly is detachably connected with the corresponding plane; The calibration mirror seat assembly comprises a support plate, one side of the support plate is provided with the reference plane mirror vertically distributed, and the reference plane mirror is used for reflecting the light emitted by the interferometer; The one side of the support plate, which is away from the reference plane mirror, is connected with the laser structure through the adjusting assembly, the adjusting assembly is used for adjusting the emission angle of the laser structure, so that the laser emitted by the laser structure is shot on the standard plane mirror after passing through the cross target, and the light reflected by the standard plane mirror passes through the cross target again.
[0006] Further, the laser structure comprises a laser and a laser seat assembly, the laser is connected with the laser seat assembly; The laser seat assembly is connected with the support plate through the adjusting assembly, and the laser seat assembly is used for adjusting the angle through the adjusting assembly.
[0007] Further, the laser seat assembly comprises a base plate and a second sleeve, the base plate is in a triangular plate structure, and the three corners of the base plate are connected with the support plate through the corresponding adjusting assembly; The second sleeve is connected with the base plate, and the second sleeve is connected with the laser.
[0008] Further, the standard mirror seat assembly further comprises a first sleeve and a mounting plate, the mounting plate is connected with the support plate, and the mounting plate is used for detachable connection with the plane; The first sleeve is connected with the support plate, and the first sleeve is connected with the corresponding adjusting assembly.
[0009] Further, the adjusting assembly comprises a locking screw, a fine adjustment male screw, an arc-shaped gasket and a fine adjustment mechanism, the arc-shaped gasket is connected with the first sleeve; One end of the fine adjustment male screw passes through the laser seat assembly and abuts against the arc-shaped gasket; The locking screw is connected with the first sleeve after passing through the fine adjustment male screw and the arc-shaped gasket in sequence; The fine adjustment mechanism is connected with the fine adjustment male screw, and the fine adjustment mechanism is used for adjusting the position of the laser seat assembly relative to the support plate.
[0010] Further, the fine adjustment mechanism comprises a fine adjustment female screw, a locking ring and a locking screw, the fine adjustment female screw is connected with the laser seat assembly through the locking ring; The fine adjustment female screw is threadedly connected with the fine adjustment male screw, and the fine adjustment female screw is used for adjusting the position of the laser seat assembly along the axial direction of the fine adjustment male screw; The locking screw is connected with the fine adjustment male screw through the fine adjustment female screw, so as to fix the locking screw relative to the fine adjustment male screw.
[0011] In a second aspect, the present application provides a calibration method of an optical mechanical assembly adjustment auxiliary calibration device, comprising: A standard plane mirror is arranged in front of the interferometer, and the angle of the standard plane mirror is adjusted so that the standard plane mirror presents 3-5 interference fringes in the interferometer; The optical mechanical assembly adjustment auxiliary calibration device is arranged between the interferometer and the standard plane mirror, and the reflecting surface of the reference plane mirror faces the interferometer, and the laser of the laser structure faces the standard plane mirror; The overall angle of the calibration mirror seat assembly is adjusted, and after the reference plane mirror presents 3-5 interference fringes on the interferometer, the optical mechanical assembly adjustment auxiliary calibration device is fixed; A cross target is arranged between the optical mechanical assembly adjustment auxiliary calibration device and the standard plane mirror; The corresponding adjustment assembly is adjusted to adjust the angle of the base plate of the laser structure; The laser is started, and the light spot of the laser is reflected on the standard plane mirror after passing through the hole of the cross target, and the reflected light can still pass through the hole of the cross target, and the edge of the cross target has no light cutting.
[0012] Further, a standard plane mirror is arranged in front of the interferometer, comprising: The standard plane mirror is arranged at a position 1000mm in front of the interferometer.
[0013] Further, a cross target is arranged between the optical mechanical assembly adjustment auxiliary calibration device and the standard plane mirror, comprising: A cross target with a line width of 1mm is placed at a position 500mm away from the standard plane mirror, and the distance between the laser and the standard plane mirror is not less than 510mm.
[0014] Further, the corresponding adjustment assembly is adjusted to adjust the angle of the base plate of the laser structure, comprising: The position of the base plate relative to the fine adjustment male screw is adjusted by rotating the fine adjustment female screw of the adjustment assembly; The fine adjustment female screw is locked by the locking screw to position the base plate relative to the fine adjustment male screw, and the adjustment assembly is sealed with glue.
[0015] The present application can achieve the following beneficial effects: The application provides an optical machine adjustment auxiliary calibration device, which comprises a reference plane mirror, a calibration mirror seat assembly, a laser structure and an adjusting assembly; the calibration mirror seat assembly is arranged between an interferometer and a standard plane mirror, and the calibration mirror seat assembly is detachably connected with the corresponding plane; the calibration mirror seat assembly comprises a support plate, one side of the support plate is provided with vertically distributed reference plane mirrors, and the reference plane mirrors are used for reflecting light emitted by the interferometer; the other side of the support plate away from the reference plane mirrors is connected with the laser structure through the adjusting assembly, and the adjusting assembly is used for adjusting the emission angle of the laser structure, so that the laser emitted by the laser structure is incident on the standard plane mirror after passing through a cross target, and the light reflected by the standard plane mirror passes through the cross target again.
[0016] In the application, the reference plane mirror is mounted on one side of the support plate of the calibration mirror seat assembly in the vertical direction, and the other side of the support plate is connected with the laser structure through a plurality of, preferably three, adjusting assemblies. In use, the calibration mirror seat assembly is arranged between the interferometer and the standard plane mirror, and the reference plane mirror faces the interferometer, and the laser structure faces the standard plane mirror. In use, the reference plane mirror is first positioned by the interferometer, and then the cross target is arranged between the laser structure and the standard plane mirror, and the plurality of adjusting assemblies are adjusted, so that the laser emitted by the laser structure is incident on the standard plane mirror after passing through the cross target, and the light reflected by the standard plane mirror passes through the cross target again. At this time, the calibration of the optical machine adjustment auxiliary calibration device can be realized, and then the interferometer and the standard plane mirror can be removed, and the light beam of the laser structure can be used as a calibration light beam for subsequent adjustment of the rear optical path element, so as to replace the interferometer, the collimator and other large and valuable equipment in the system adjustment process.
[0017] Compared with the prior art, the optical machine adjustment auxiliary calibration device provided by the application adjusts the reference plane mirror and the laser structure through the interferometer and the standard plane mirror respectively, and then fixes the calibration mirror seat assembly after adjusting and positioning the reference plane mirror and the laser structure. After the optical machine adjustment auxiliary calibration device is fixed, the optical machine adjustment auxiliary calibration device can replace the interferometer, the collimator and other large and valuable equipment in the system adjustment process, reduces the dependence on such equipment in the adjustment process, and significantly improves the adjustment efficiency of the mass production system, and greatly reduces the cost of system adjustment.
[0018] In summary, the application at least alleviates the technical problems of large space resource occupation and large adjustment difficulty caused by large calibration equipment in the prior art. BRIEF DESCRIPTION OF DRAWINGS
[0019] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described in the following description are some embodiments of the present application, and all other drawings obtained by those of ordinary skill in the art without creative effort based on these drawings are within the scope of protection of the present application.
[0020] Figure 1 A perspective structural schematic diagram of the optical machine assembly and adjustment auxiliary calibration device provided by the embodiment of the present application is shown in the figure. Figure 2 A top view structural schematic diagram of the optical machine assembly and adjustment auxiliary calibration device provided by the embodiment of the present application is shown in the figure. Figure 3 A front view structural schematic diagram of the optical machine assembly and adjustment auxiliary calibration device provided by the embodiment of the present application is shown in the figure. Figure 4 A cross-sectional structural schematic diagram of A-A in the figure. Figure 3
[0021] Figure legend: 1-reference plane mirror; 2-calibration mirror seat assembly; 21-support plate; 22-first sleeve; 23-mounting plate; 24-stiffener; 3-laser; 4-laser seat assembly; 41-base plate; 42-second sleeve; 5-adjustment assembly; 51-locking screw; 52-fine adjustment male screw; 53-arc-shaped washer; 54-fine adjustment female screw; 55-locking pressure ring; 56-tightening screw. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, not all of the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.
[0024] It should be noted that: similar numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0025] In the description of this invention, it should be noted that the terms "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0026] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0027] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0028] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0029] Example 1 This embodiment provides an optical-mechanical assembly and adjustment auxiliary calibration device, referring to... Figure 1 , Figure 2 and Figure 3 The optomechanical assembly and calibration auxiliary device includes a reference plane mirror 1, a calibration mirror mount assembly 2, a laser structure, and an adjustment assembly 5. The calibration mirror mount assembly 2 is used to be positioned between the interferometer and the standard plane mirror, and is detachably connected to the corresponding plane. The calibration mirror mount assembly 2 includes a support plate 21, one side of which is provided with the vertically distributed reference plane mirror 1, which is used to reflect the light emitted by the interferometer. The side of the support plate 21 facing away from the reference plane mirror 1 is connected to the laser structure through the adjustment assembly 5. The adjustment assembly 5 is used to adjust the emission angle of the laser structure so that the laser emitted by the laser structure passes through the cross target and then hits the standard plane mirror, and the light reflected by the standard plane mirror passes through the cross target again.
[0030] The embodiment of the present application at least alleviates the technical problem of large space resource occupation and large adjustment difficulty caused by large volume of the calibration device during adjustment.
[0031] In the embodiment of the present application, the reference flat mirror 1 is mounted on one side of the support plate 21 of the calibration mirror seat assembly 2 in the vertical direction, and the other side of the support plate 21 is connected with the laser structure through a plurality of, preferably three, adjustment assemblies 5. In use, the calibration mirror seat assembly 2 is arranged between the interferometer and the standard flat mirror, and the reference flat mirror 1 faces the interferometer, and the laser structure faces the standard flat mirror. In use, the reference flat mirror 1 is first positioned by the interferometer, and then a cross target is arranged between the laser structure and the standard flat mirror, and the plurality of adjustment assemblies 5 are adjusted so that the laser emitted by the laser structure passes through the cross target and is incident on the standard flat mirror, and the light reflected by the standard flat mirror passes through the cross target again. At this time, the positioning of the optical machine adjustment auxiliary calibration device can be completed, and then the interferometer and the standard flat mirror can be removed, and the subsequent adjustment of the rear optical path element can be performed using the light beam of the laser structure as the calibration light beam, so as to replace the interferometer, the collimator and other large and valuable devices in the system adjustment process.
[0032] Compared with the prior art, the optical machine adjustment auxiliary calibration device provided by the embodiment of the present application adjusts the reference flat mirror 1 and the laser structure through the interferometer and the standard flat mirror respectively, and then fixes the calibration mirror seat assembly 2 after adjusting and positioning the reference flat mirror 1 and the laser structure. After the optical machine adjustment auxiliary calibration device is fixed, the optical machine adjustment auxiliary calibration device can replace the interferometer, the collimator and other large and valuable devices in the system adjustment process, reduces the dependence on such devices during adjustment, and significantly improves the adjustment efficiency of mass production systems, and greatly reduces the cost of system adjustment work.
[0033] In the optional implementation of the present embodiment, referring to Figure 1 , Figure 2 and Figure 3 , the laser structure includes a laser 3 and a laser seat assembly 4, the laser 3 is connected with the laser seat assembly 4, the laser seat assembly 4 is connected with the support plate 21 through the adjustment assembly 5, and the laser seat assembly 4 is used to adjust the angle through the adjustment assembly 5.
[0034] Specifically, the laser seat assembly 4 is connected with the support plate 21 through three sets of adjustment assemblies 5, so as to adjust the angle of the laser seat assembly 4 through the adjustment assembly 5, and further adjust the angle of the laser 3 to meet the need of the laser emission angle of the laser 3.
[0035] Further, referring to Figure 1, the laser seat assembly 4 comprises a base plate 41 and a second sleeve 42, the base plate 41 is in the form of a triangular plate structure, and the three corners of the base plate 41 are connected with the support plate 21 through the corresponding adjusting assembly 5; the second sleeve 42 is connected with the base plate 41, and the second sleeve 42 is connected with the laser 3.
[0036] Specifically: the base plate 41 can be a triangular plate structure, and the three corners thereof can be rounded; and the base plate 41 is connected with the support plate 21 at each corner thereof through the corresponding adjusting assembly 5; by adjusting the corresponding adjusting assembly 5, the base plate 41 can be adjusted to a certain inclination angle, thereby meeting the requirement of adjusting the laser irradiation angle of the laser 3; and one end of the laser 3 is inserted into the second sleeve 42, so that the laser emitted by the emitting end of the laser 3 is emitted from the second sleeve 42, and the other end of the laser 3 can pass through the second sleeve 42 and the base plate 41 in turn, so as to be connected with the external power supply device.
[0037] In the alternative embodiment of the present embodiment, referring to Figure 1 , the calibration mirror seat assembly 2 further comprises a first sleeve 22 and a mounting plate 23, the mounting plate 23 is connected with the support plate 21, and the mounting plate 23 is used for detachable connection with a plane; the first sleeve 22 is connected with the support plate 21, and the first sleeve 22 is connected with the corresponding adjusting assembly 5.
[0038] Specifically: one side of the support plate 21 is provided with the first sleeve 22, the number and position of the first sleeve 22 are matched with the adjusting assembly 5, that is, the adjusting assembly 5 is detachably connected with the corresponding first sleeve 22; and the support plate 21 is connected with the mounting plate 23 along the vertical direction, the mounting plate 23 is connected with the plane of the external structure through bolts, and a reinforcing rib 24 is arranged between the mounting plate 23 and the support plate 21, so as to make the connection between the mounting plate 23 and the support plate 21 more stable.
[0039] Further, referring to Figure 4 , the adjusting assembly 5 comprises a locking screw 51, a fine adjustment male screw 52, an arc-shaped gasket 53 and a fine adjustment mechanism, the arc-shaped gasket 53 is connected with the first sleeve 22; one end of the fine adjustment male screw 52 passes through the laser seat assembly 4 and abuts against the arc-shaped gasket 53; the locking screw 51 is connected with the first sleeve 22 after passing through the fine adjustment male screw 52 and the arc-shaped gasket 53 in sequence; the fine adjustment mechanism is connected with the fine adjustment male screw 52, and the fine adjustment mechanism is used for adjusting the position of the laser seat assembly 4 relative to the support plate 21.
[0040] Specifically, the first sleeve 22 is provided with a hole, and an arc-shaped gasket 53 is arranged in the hole of the first sleeve 22. One end of the arc-shaped gasket 53 is inserted into the hole of the first sleeve 22, and the other end is provided with a concave arc-shaped structure. One end of the fine adjustment male screw 52 is provided with a convex arc-shaped structure, so that the end of the fine adjustment male screw 52 is attached to the arc-shaped gasket 53. The locking screw 51 is sequentially threaded through the fine adjustment male screw 52 and the arc-shaped gasket 53 and connected with the first sleeve 22, so as to fix the fine adjustment male screw 52 relative to the first sleeve 22. The fine adjustment mechanism and the laser seat assembly 4 are connected with the fine adjustment male screw 52. The position of the laser seat assembly 4 and the fine adjustment male screw 52 can be changed through the fine adjustment mechanism, so as to adjust the position of the laser seat assembly 4 relative to the fine adjustment male screw 52.
[0041] Further, referring to Figure 4 , the fine adjustment mechanism includes a fine adjustment female screw 54, a locking ring 55 and a locking screw 56. The fine adjustment female screw 54 is connected with the laser seat assembly 4 through the locking ring 55. The fine adjustment female screw 54 is threadedly connected with the fine adjustment male screw 52. The fine adjustment female screw 54 is used to adjust the position of the laser seat assembly 4 along the axial direction of the fine adjustment male screw 52. The locking screw 56 is connected with the fine adjustment male screw 52 through the fine adjustment female screw 54, so as to fix the locking screw 56 relative to the fine adjustment male screw 52.
[0042] Specifically, in use, one side of the fine adjustment female screw 54 can be connected with the laser seat assembly 4 through the locking ring 55, that is, the locking ring 55 and the fine adjustment female screw 54 are connected through, for example, a plug-in manner, so that the base plate 41 of the laser seat assembly 4 is clamped between the locking ring 55 and the fine adjustment female screw 54. The locking screw 56 passes through the side wall of the fine adjustment female screw 54 perpendicularly. The locking screw 56 is threadedly connected with the side wall of the fine adjustment female screw 54, and the locking screw 56 is connected with the fine adjustment male screw 52, so as to fix the fine adjustment female screw 54 relative to the fine adjustment male screw 52, and then to position the fine adjustment female screw 54, so as to determine the angle of the laser 3 connected with the laser seat assembly 4.
[0043] Embodiment Two The embodiment provides a calibration method of an optical machine adjustment auxiliary calibration device, which comprises the following steps: A standard mirror is arranged in front of the interferometer, and the angle of the standard mirror is adjusted so that the standard mirror presents 3-5 interference fringes in the interferometer; the optical machine adjustment auxiliary calibration device is arranged between the interferometer and the standard mirror, and the reflecting surface of the reference mirror 1 faces the interferometer, and the laser 3 of the laser structure faces the standard mirror; the overall angle of the calibration mirror seat assembly 2 is adjusted so that the reference mirror 1 presents 3-5 interference fringes in the interferometer, and then the optical machine adjustment auxiliary calibration device is fixed; a cross target is arranged between the optical machine adjustment auxiliary calibration device and the standard mirror; the corresponding adjustment assembly 5 is adjusted to adjust the angle of the base plate 41 of the laser structure; the laser 3 is started, and the light spot of the laser 3 is reflected on the standard mirror after passing through the hole of the cross target, and the reflected light can still pass through the hole of the cross target, and there is no cut light at the edge of the cross target.
[0044] Specifically: first, a standard mirror is placed in front of the interferometer at a position of about 1000mm, and the angle of the standard mirror is adjusted; then, the optical machine adjustment auxiliary calibration device is arranged between the relatively distributed interferometer and the standard mirror, the reference mirror 1 is adjusted through the interferometer first, and then the angle of the laser 3 is corrected by the cross target and the standard mirror, and the correction method can be to adjust the angle of the base plate 41 of the laser structure; the laser 3 is started, and the light spot of the laser 3 is reflected on the standard mirror after passing through the hole of the cross target, and the reflected light can still pass through the hole of the cross target, and there is no cut light at the edge of the cross target, and the calibration accuracy can be calculated in this state, and the formula is θ=arctan(0.5 / 500)≈0.001rad. That is, the maximum deviation angle of the normal line of the reference mirror 1 after calibration and the laser beam of the laser 3 is 1mrad. Finally, the laser 3 is fixed by adjusting the adjusting assembly 5, and after the laser 3 and the laser seat assembly 4 are fixed, the adjusting assembly 5 can be locked and fixed by the way of sealing with glue.
[0045] Further, the standard mirror is arranged in front of the interferometer, including: the standard mirror is arranged at a position of 1000mm in front of the interferometer.
[0046] Specifically: the standard mirror is arranged at a position of 1000mm in front of the interferometer. The optical machine adjustment auxiliary calibration device is positioned by the interferometer and the standard mirror to realize the effect of not needing to be recalibrated when used again after positioning once.
[0047] In the optional implementation manner of the embodiment, a cross target is arranged between the optical machine adjustment auxiliary calibration device and the standard mirror, including: a cross target with a line width of 1mm is placed at a position of 500mm from the standard mirror, and the distance between the laser 3 and the standard mirror is not less than 510mm.
[0048] Specifically, the laser is limited to pass through the cross target to achieve that the maximum deviation angle between the normal of the calibrated reference mirror 1 and the laser beam of the laser 3 is 1 mrad, which meets the requirement of the precision of the optical-mechanical assembly and adjustment auxiliary calibration device.
[0049] In the optional implementation of the embodiment, the corresponding adjusting assembly 5 is adjusted to adjust the angle of the base plate 41 of the laser structure, including: adjusting the position of the base plate 41 relative to the fine adjustment male screw 52 by rotating the fine adjustment female screw 54 of the adjusting assembly 5; locking the fine adjustment female screw 54 by the set screw 56 to position the base plate 41 relative to the fine adjustment male screw 52, and sealing the adjusting assembly 5 with glue.
[0050] Specifically, the adjusting assembly 5 is provided with three sets, and the three sets of adjusting assembly 5 are respectively located at the three corners of the triangular plate-shaped base plate 41. The fine adjustment male screw 52 of the corresponding adjusting assembly 5 is adjusted, and then the length of the fine adjustment male screw 52 screwed into the corresponding first sleeve 22 is different, so that the lengths of the fine adjustment male screws 52 corresponding to the three corners of the base plate 41 screwed into the first sleeve 22 are different, and then the base plate 41 is inclined. Therefore, the laser 3 connected with the second sleeve 42 realizes the function of angle adjustment.
[0051] Finally, it should be noted that each of the embodiments in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same and similar parts of each embodiment can be referred to. The above embodiments in the specification are used to illustrate the technical solutions of the present application, but not to limit them. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to some or all of the technical features. The modification or replacement does not change the essence of the corresponding technical solution, which is still within the scope of the technical solutions of the embodiments of the present application.
Claims
1. An optical machine adjustment auxiliary calibration device, characterized in that, The device comprises a reference plane mirror (1), a calibration mirror seat assembly (2), a laser structure and an adjusting assembly (5); The calibration mirror seat assembly (2) is arranged between the interferometer and the standard plane mirror, and the calibration mirror seat assembly (2) is detachably connected with the corresponding plane; The calibration mirror seat assembly (2) comprises a support plate (21), one side of the support plate (21) is provided with the reference plane mirror (1) arranged vertically, and the reference plane mirror (1) is used for reflecting the light emitted by the interferometer; The other side of the support plate (21) is connected with the laser structure through the adjusting assembly (5), the adjusting assembly (5) is used for adjusting the emission angle of the laser structure, so that the laser emitted by the laser structure passes through the cross target and is incident on the standard plane mirror, and the light reflected by the standard plane mirror passes through the cross target again.
2. The optical machine adjustment auxiliary calibration device according to claim 1, wherein, The laser structure comprises a laser (3) and a laser seat assembly (4), and the laser (3) is connected with the laser seat assembly (4); The laser seat assembly (4) is connected with the support plate (21) through the adjusting assembly (5), and the laser seat assembly (4) is used for adjusting the angle through the adjusting assembly (5).
3. The optical machine adjustment auxiliary calibration device according to claim 2, wherein, The laser seat assembly (4) comprises a base plate (41) and a second sleeve (42), the base plate (41) is in the form of a triangular plate, and the three corners of the base plate (41) are connected with the support plate (21) through the corresponding adjusting assembly (5); The second sleeve (42) is connected with the base plate (41), and the second sleeve (42) is connected with the laser (3).
4. The optical machine adjustment auxiliary calibration device according to claim 2, wherein, The calibration mirror seat assembly (2) further comprises a first sleeve (22) and a mounting plate (23), the mounting plate (23) is connected with the support plate (21), and the mounting plate (23) is used for detachable connection with the plane; The first sleeve (22) is connected with the support plate (21), and the first sleeve (22) is connected with the corresponding adjusting assembly (5).
5. The optical machine adjustment auxiliary calibration device according to claim 4, wherein, The adjusting assembly (5) comprises a locking screw (51), a fine adjustment screw (52), an arc-shaped gasket (53) and a fine adjustment mechanism, the arc-shaped gasket (53) is connected with the first sleeve (22); One end of the fine adjustment screw (52) penetrates through the laser seat assembly (4) and abuts against the arc-shaped gasket (53); The locking screw (51) penetrates through the fine adjustment screw (52) and the arc-shaped gasket (53) in sequence and is connected with the first sleeve (22); The fine adjustment mechanism is connected with the fine adjustment screw (52), and the fine adjustment mechanism is used for adjusting the position of the laser seat assembly (4) relative to the support plate (21).
6. The optical machine adjustment auxiliary calibration device according to claim 5, wherein, The fine adjustment mechanism comprises a fine adjustment female screw (54), a locking ring (55) and a locking screw (56), the fine adjustment female screw (54) is connected with the laser seat assembly (4) through the locking ring (55); The fine adjustment female screw (54) is threadedly connected with the fine adjustment male screw (52), and the fine adjustment female screw (54) is used for adjusting the position of the laser seat assembly (4) along the axial direction of the fine adjustment male screw (52); The adjusting screw (56) is connected with the fine adjustment female screw (54) and the fine adjustment male screw (52) through the fine adjustment female screw (54), so as to fix the adjusting screw (56) relative to the fine adjustment male screw (52).
7. The method of claim 1, wherein the method further comprises: Comprise: A standard mirror is arranged in front of the interferometer, and the angle of the standard mirror is adjusted so that the standard mirror presents 3-5 interference fringes in the interferometer; The optical machine adjustment auxiliary calibration device is arranged between the interferometer and the standard mirror, and the reflecting surface of the reference mirror (1) faces the interferometer, and the laser (3) of the laser structure faces the standard mirror; The overall angle of the calibration mirror seat assembly (2) is adjusted, and after the reference mirror (1) presents 3-5 interference fringes on the interferometer, the optical machine adjustment auxiliary calibration device is fixed; A cross target is arranged between the optical machine adjustment auxiliary calibration device and the standard mirror; The corresponding adjustment assembly (5) is adjusted to adjust the angle of the base plate (41) of the laser structure; The laser (3) is started, and the light spot of the laser (3) is reflected on the standard mirror after passing through the hole of the cross target, and the reflected light can still pass through the hole of the cross target, and the edge of the cross target has no light cutting.
8. The method of claim 7, wherein the method further comprises: A standard mirror is arranged in front of the interferometer, comprising: The standard mirror is arranged at a position 1000mm in front of the interferometer.
9. The method of claim 7, wherein the method further comprises: A cross target is arranged between the optical machine adjustment auxiliary calibration device and the standard mirror, comprising: A cross target with a line width of 1mm is placed at a position 500mm away from the standard mirror, and the distance between the laser (3) and the standard mirror is not less than 510mm.
10. The method of claim 7, wherein the method further comprises: The corresponding adjustment assembly (5) is adjusted to adjust the angle of the base plate (41) of the laser structure, comprising: The position of the base plate (41) relative to the fine adjustment male screw (52) is adjusted by rotating the fine adjustment female screw (54) of the adjustment assembly (5); The fine adjustment female screw (54) is locked by the adjusting screw (56) to position the base plate (41) relative to the fine adjustment male screw (52), and the adjustment assembly (5) is sealed with glue.