A wafer multi-pad synchronous clamping and handling mechanism

Abstract

This invention discloses a wafer multi-pad synchronous clamping and handling mechanism, comprising: a crossbeam with a T-shaped guide groove at its bottom; multiple sliding units configured and slidably disposed in the guide groove, each set of sliding units including two T-shaped sliders connected by a linear actuator; a quick-connect mechanism including a base, a telescopic column, and a connecting seat, the base being fixedly installed on the bottom of the sliders, the telescopic column being fixedly installed on the bottom of the base, and the telescopic end of the telescopic column being connected to the connecting seat; a clamping mechanism installed on the bottom of the connecting seat for clamping wafer trays, and the quick-connect mechanism enabling a detachable rigid connection between the clamping mechanism and the sliders; and a clamping and changing station located on one side of the bottom of the crossbeam for storing, calibrating, and changing different types of the clamping mechanisms.

Description

Technical Field

[0001] This invention relates to the field of wafer tray handling technology, specifically a wafer multi-tray synchronous clamping and handling mechanism. Background Technology

[0002] Wafer manufacturing is a core component of the semiconductor industry, involving the high-frequency transfer of wafer trays between dozens or even hundreds of different process equipment. Automated material handling systems are crucial for automating this process and ensuring the efficient operation of the production line. Among these systems, synchronous clamping and handling mechanisms capable of simultaneously transporting multiple wafer trays are essential for improving the throughput efficiency of the entire production line.

[0003] Currently, traditional multi-tray handling mechanisms typically employ a rigid beam structure that fixes multiple grippers. While this structure is simple, it suffers from inherent rigidity: the number, type, and spacing of the grippers are fixed and cannot be replaced. Consequently, it cannot adapt to changes in production lines and the diversity of equipment. Generally, different models of equipment have different loading port spacings, and a single handling mechanism with a fixed spacing cannot serve multiple types of equipment. Therefore, multiple dedicated handling systems need to be configured for different equipment groups, resulting in higher costs and more complicated maintenance.

[0004] Therefore, it is necessary to provide a wafer multi-pad synchronous clamping and handling mechanism to solve the problems mentioned in the background art. Summary of the Invention

[0005] To achieve the above objectives, the present invention provides the following technical solution: a wafer multi-pad synchronous clamping and transport mechanism, comprising:

[0006] The crossbeam has a T-shaped guide groove at its bottom;

[0007] The sliding unit is configured in multiple sets and slidably disposed in the guide groove. Each set of the sliding unit includes two T-shaped sliders, and the two sliders are connected by a linear actuator.

[0008] A quick-connection mechanism includes a base, a telescopic column, and a connecting seat. The base is fixedly installed on the bottom of the slider, and the telescopic column is fixedly installed on the bottom of the base. The telescopic end of the telescopic column is connected to the connecting seat.

[0009] A clamping mechanism is installed at the bottom of the connector and is used to clamp the wafer tray, and the quick connection mechanism enables a detachable rigid connection between the clamping mechanism and the slider.

[0010] A clamping and changing station is located on one side of the bottom of the crossbeam and is used to store, calibrate, and replace different types of clamping mechanisms.

[0011] Furthermore, as a preferred embodiment, slots are provided on both sides and the top side of the guide groove, and positioning strips are fixedly installed in the slots;

[0012] Positioning blocks are hydraulically driven to slide on both sides and the top side of the slider. The positioning blocks slide along the slot and can slide to fit tightly against the positioning strip.

[0013] Furthermore, as a preferred embodiment, the clamping mechanism includes a clamping seat and two forked rods extending horizontally along the clamping seat.

[0014] Furthermore, as a preferred embodiment, the bottom of the connecting seat is provided with a wedge-shaped locking groove, and at least one pneumatic locking piston is slidably arranged around the wedge-shaped locking groove.

[0015] The clamping seat is fixedly provided with a connector, and the connector is fixedly provided with a wedge-shaped locking block that cooperates with the wedge-shaped locking groove. The wedge-shaped locking block has locking holes around its perimeter for the pneumatic locking piston to be inserted.

[0016] Furthermore, preferably, at least one electrical socket is fixedly provided at the bottom of the connector;

[0017] An electrical plug that mates with the electrical socket is fixedly provided on the connector.

[0018] Furthermore, preferably, the protruding end of the pneumatic locking piston is wedge-shaped;

[0019] The end of the locking hole is wedge-shaped, which is the same as the shape of the protruding end of the pneumatic locking piston.

[0020] Furthermore, as a preferred embodiment, each of the sliders, connecting seats, and clamping seats is equipped with a position detection sensor;

[0021] A control unit is provided on the crossbeam, and the control unit is electrically connected to the linear actuator, the telescopic column, and the position detection sensors provided on the slider, the connecting seat, and the clamping seat.

[0022] A method for synchronous clamping and handling of wafers with multiple trays includes the following steps:

[0023] S1. The control unit calculates the corresponding specifications and quantity of the clamping mechanisms according to the type and port position of the target wafer processing equipment, and at the same time calculates the target position of each slider in the crossbeam;

[0024] S2. Use the quick connection mechanism to fix and snap together a corresponding number of clamping mechanisms and a corresponding number of sliders.

[0025] S3. The control unit adjusts the slider to the target position by controlling the extension and retraction of the linear actuator in each group of sliding units and the sliding of the positioning block on each slider according to recursive logic.

[0026] S4. After adjustment, the crossbeam drives the slider and clamping mechanism to move the wafer tray to the port of the corresponding wafer processing equipment.

[0027] The specific steps of the recursive logic include:

[0028] a. Lock all the sliders in the crossbeam to the crossbeam using the positioning block and positioning strip;

[0029] b. Select one of the sliders in the same group of sliding units as a reference and keep it locked, unlock the other slider in the same group, use the linear actuator to push the unlocked slider to the target position and lock it again;

[0030] c. Using the slider moved in step b as a new reference, repeat step b until all sliders in the beam have moved to the target position.

[0031] Compared with the prior art, the present invention provides a wafer multi-pad synchronous clamping and handling mechanism, which has the following advantages:

[0032] This invention enables a single handling system to adapt to handling tasks with different quantities, types, and layouts of wafer trays by changing the clamping mechanism and adjusting the spacing between the sliders. In other words, one handling system can replace multiple dedicated handling systems, effectively reducing equipment costs. Simultaneously, a quick-connect mechanism allows for rapid locking and unlocking of the sliders and clamping mechanisms, facilitating quick changeover of the clamping mechanisms. Furthermore, the quick-connect mechanism combines wedge positioning with pneumatic piston locking, ensuring a rigid connection and repeatability comparable to a single unit after connection, thus guaranteeing stability during handling. The grouped design of the sliders allows for synchronous adjustment of the positions of sliders in multiple sliding units, significantly reducing equipment waiting time and further enabling quick changeover of the clamping mechanisms. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0034] Figure 2 This is a schematic diagram of the connection structure between the crossbeam and the slider in this invention;

[0035] Figure 3 This is a schematic diagram of the internal structure of the crossbeam in this invention;

[0036] Figure 4 This is a schematic diagram of the connection structure between the slider and the clamping mechanism in this invention;

[0037] Figure 5 This is a schematic diagram of the clamping mechanism in this invention;

[0038] Figure 6 This is a schematic diagram of the quick-connect mechanism in this invention;

[0039] Figure 7 This is a schematic diagram of the system control of the present invention;

[0040] In the diagram: 1. Crossbeam; 11. Guide groove; 12. Slot; 13. Positioning bar; 2. Slider; 21. Linear actuator; 22. Positioning block; 3. Clamping mechanism; 31. Clamping seat; 311. Connecting joint; 312. Wedge locking block; 313. Locking hole; 314. Electrical plug; 32. Fork tooth rod; 4. Quick connection mechanism; 41. Base; 42. Telescopic column; 43. Connecting seat; 431. Wedge locking groove; 432. Pneumatic locking piston; 433. Electrical socket; 5. Clamping and changing station. Detailed Implementation

[0041] Please see Figures 1 to 7 In this embodiment of the invention, a wafer multi-pad synchronous clamping and transport mechanism includes:

[0042] The crossbeam 1 has a T-shaped guide groove 11 at its bottom. In addition, the crossbeam 1 can span over the wafer processing equipment group through a support structure. This support structure is usually a gantry support frame and equipped with a three-dimensional motion mechanism to drive the crossbeam 1 to move.

[0043] The sliding unit is configured in multiple sets and slidably disposed in the guide groove 11. Each set of the sliding unit includes two T-shaped sliders 2, and the two sliders 2 are connected by a linear actuator 21. The linear actuator 21 can be of various types, such as a hydraulic telescopic cylinder, a pneumatic telescopic rod, or an electric push rod.

[0044] The quick connection mechanism 4 includes a base 41, a telescopic column 42 and a connecting seat 43. The base 41 is fixedly installed on the bottom of the slider 2. The telescopic column 42 is fixedly installed on the bottom of the base 41. The telescopic end of the telescopic column 42 is connected to the connecting seat 43.

[0045] The clamping mechanism 3 is installed at the bottom of the connecting seat 43 and is used to clamp the wafer tray. The quick connection mechanism 4 can realize the detachable rigid connection between the clamping mechanism 3 and the slider 2. It has various types, including but not limited to bottom fork-tooth type clamping device, side clamping type clamping device or special clamping device for non-standard trays.

[0046] The clamping and changing station 5 is located on one side of the bottom of the crossbeam 1 and is used to store, calibrate and change different types of clamping mechanisms 3.

[0047] During implementation, the crossbeam 1 is moved above the clamping and changing station 5. Then, the quick-connect mechanism 4 grabs the corresponding number and corresponding specifications and types of clamping mechanisms 3. Then, by fixing one slider 2 in the same group of sliding units and driving another slider 2 to slide through the linear driver 21, the spacing of all sliders 2 in the crossbeam 1 is adjusted, that is, the spacing between multiple clamping mechanisms 3 is adjusted to make it suitable for loading wafer processing equipment. The crossbeam 1 is moved to the wafer tray that needs to be transported, and the wafer tray is clamped by the clamping mechanism 3. Then, the crossbeam is moved to the wafer processing equipment and the wafer tray is placed in the loading port of the wafer processing equipment, completing one transport operation of the wafer tray.

[0048] After a handling operation is completed, when it is necessary to load different wafer processing equipment or to handle wafers of different models and specifications, the crossbeam 1 is moved back to the clamping and changing station 5, the old clamping mechanism 3 is removed, and a new clamping mechanism 3 of the corresponding number and specifications is replaced. The spacing between multiple sliders 2 is readjusted. While completing the rapid replacement of the clamping mechanism 3, the position of each clamping mechanism 3 is reconstructed. Thus, while ensuring ultra-high positioning accuracy and dynamic stability of wafer handling, the number and position of the clamping mechanism 3 can be continuously, rapidly, and online reconstructed. This solves the rigid bottleneck problem of the logistics system caused by product iteration and equipment upgrades in semiconductor production lines. In other words, one handling system can replace multiple dedicated handling systems, effectively saving equipment costs.

[0049] Additionally, it should be noted that a telescopic column 42 is provided between the base 41 and the connecting seat 43. The purpose of this is that the number of clamping mechanisms 3 connected to the slider 2 on the crossbeam 1 changes in real time according to the different wafer processing equipment and the different specifications of the wafers being transported. Therefore, when the slider 2 in multiple sliding units grips the clamping mechanism 3, there may be intermittent gripping. After gripping, the spacing between each slider 2 needs to be readjusted. At this time, the telescopic column 42 in the quick connection mechanism 4 that needs to grip the clamping mechanism 3 can be extended, while the telescopic column 42 in the quick connection mechanism 4 that does not grip the clamping mechanism 3 can be retracted. This allows the connecting seat 43 at the bottom of the telescopic column 42 to make way for the clamping mechanism 3, ensuring that the clamping mechanism 3 is not interfered with by the adjacent quick connection mechanism 4 when clamping the wafer tray. This ensures that the handling system can effectively handle the wafer tray in various situations.

[0050] In this embodiment, slots 12 are provided on both sides and the top side of the guide groove 11, and positioning strips 13 are fixedly installed in the slots 12;

[0051] Positioning blocks 22 are hydraulically driven to slide on both sides and the top side of the slider 2. The positioning blocks 22 slide along the slot 12 and can slide to fit tightly against the positioning strip 13.

[0052] It should be noted that the positioning strip 13 and the positioning block 22 can be regarded as a friction lock that can be frictionally locked together. During the locking process, the positioning blocks 22 located in three directions of the slider 2 will extend and fit with the positioning strip 13 to lock together. During the fitting process, the positioning blocks 22 will apply a reaction force to the slider 2, and this reaction force will apply a pushing force to the slider 2 in three directions, so that the slider 2 will not have relative displacement during the locking process. After locking, the slider 2 will be completely fixed on the crossbeam 1. Thus, when the slider 2 in the same set of sliding units is fixed and another slider 2 is driven to slide, the fixed slider 2 will not have relative slippage, thereby making the position adjustment of the slider 2 more accurate and eliminating the need for secondary calibration, thereby realizing the rapid adjustment of the position of the slider 2 and the clamping mechanism 3.

[0053] In this embodiment, the clamping mechanism 3 includes a clamping seat 31 and two fork-tooth rods 32 extending horizontally along the clamping seat 31.

[0054] In this embodiment, a wedge-shaped locking groove 431 is provided at the bottom of the connecting seat 43, and at least one pneumatic locking piston 432 is slidably arranged around the wedge-shaped locking groove 431.

[0055] A coupling 311 is fixedly provided on the clamping seat 31, and a wedge-shaped locking block 312 that cooperates with the wedge-shaped locking groove 431 is fixedly provided on the coupling 311. Locking holes 313 are opened around the wedge-shaped locking block 312 for the pneumatic locking piston 432 to be inserted, and the pneumatic locking piston 432 is in a locked state when it is depressurized.

[0056] In practice, the wedge-shaped locking groove 431 on the connecting seat 43 can be aligned with the wedge-shaped locking block 312 on the clamping seat 31. Then, the connecting seat 43 is pressed down, so that the wedge-shaped locking block 312 slides into the wedge-shaped locking groove 431. During the sliding process, the connecting seat 43 and the mating head 311 can be further positioned. After the wedge-shaped locking block 312 has completely slid into the wedge-shaped locking groove 431, the pneumatic locking piston 432 is driven to slide into the locking hole 313, so that the wedge-shaped locking block 312 is completely locked. This achieves a rigid connection between the connecting seat 43 and the clamping seat 31, thereby achieving the micron-level repeatability positioning accuracy and vibration resistance required for wafer handling while the clamping mechanism 3 can be quickly replaced.

[0057] In this embodiment, at least one electrical socket 433 is fixedly provided at the bottom of the connector 43;

[0058] An electrical plug 314 that mates with the electrical socket 433 is fixedly provided on the connector 311.

[0059] In this embodiment, the protruding end of the pneumatic locking piston 432 is wedge-shaped;

[0060] The end of the locking hole 313 is wedge-shaped, which is the same as the shape of the protruding end of the pneumatic locking piston 432.

[0061] In this embodiment, each of the slider 2, connecting seat 43 and clamping seat 31 is equipped with a position detection sensor. The position detection sensor can be a grating ruler reading head or a laser rangefinder sensor, which can detect the absolute position of the slider 2, connecting seat 43 and clamping seat 31 relative to the crossbeam 1.

[0062] A control unit is provided on the crossbeam 1. The control unit is electrically connected to the linear actuator 21, the telescopic column 42, and the position detection sensors provided on the slider 2, the connecting seat 43, and the clamping seat 31.

[0063] It should be noted that the control unit is configured to adjust the absolute position of sliders 2 in all sliding units by controlling the extension and retraction of the linear actuator 21 and following the recursive logic of "fixing one slider 2 in the same group of sliding units and driving another slider 2 to slide". At the same time, during the adjustment process, the position information of slider 2 can be fed back in real time by the position sensor set in slider 2. The control unit can receive this information and perform closed-loop control on the linear actuator 21 to achieve precise adjustment of the position of slider 2, thereby ensuring that all clamping mechanisms 3 can accurately reach the target position.

[0064] A method for synchronous clamping and handling of wafers with multiple trays includes the following steps:

[0065] S1. The control unit calculates the corresponding specifications and quantity of the clamping mechanism 3 according to the type and port position of the target wafer processing equipment, and at the same time calculates the target position of each slider 2 in the crossbeam 1.

[0066] S2. The quick connection mechanism 4 is used to fix and snap together the corresponding number of clamping mechanisms 3 and the corresponding number of sliders 2.

[0067] S3. The control unit adjusts the slider 2 to the target position by controlling the extension and retraction of the linear actuator 21 in each group of sliding units and the sliding of the positioning block 22 on each slider 2 according to recursive logic.

[0068] S4. After adjustment, the crossbeam 1 drives the slider 2 and clamping mechanism 3 to move the wafer tray to the port of the corresponding wafer processing equipment.

[0069] The specific steps of the recursive logic include:

[0070] a. Lock all the sliders 2 in the crossbeam 1 to the crossbeam 1 through the positioning block 22 and the positioning strip 13;

[0071] b. Select one of the sliders 2 in the same group of sliding units as a reference and keep it locked, unlock the other slider 2 in the same group, and use the linear driver 21 to push the unlocked slider 2 to the target position and lock it again.

[0072] c. Using the slider 2 moved in step b as a new reference, repeat step b until all sliders 2 in the crossbeam 1 have moved to the target position.

[0073] In other words, the sliding adjustment of slider 2 adopts the adjustment mode of "group linkage and recursive adjustment", which simplifies the complex multi-axis synchronous precision position control problem into a series of single-axis sequential control problems. This greatly reduces the algorithm complexity and hardware cost of the control unit, and makes later maintenance convenient.

[0074] In summary, this invention enables a single handling system to adapt to handling tasks involving different quantities, types, and layouts of wafer trays by replacing the clamping mechanism 3 and adjusting the spacing between the sliders 2. This means one handling system can replace multiple dedicated handling systems, effectively reducing equipment costs. Furthermore, the quick-connect mechanism 4 allows for rapid locking and unlocking of the sliders 2 and clamping mechanism 3, facilitating quick replacement of the clamping mechanism 3. The quick-connect mechanism 4 employs a combination of wedge positioning and pneumatic piston locking, ensuring that the connection between the sliders 2 and clamping mechanism 3 achieves a rigid connection and repeatability comparable to a single unit, guaranteeing stability during handling. The grouped design of the sliders 2 allows for synchronous adjustment of the positions of sliders 2 in multiple sliding units, significantly reducing equipment waiting time and further enabling quick replacement of the clamping mechanism 3.

[0075] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A wafer multi-cassette synchronous clamping and carrying mechanism, characterized in that, It includes: Crossbeam (1), the bottom is provided with a T-shaped guide slot (11); Sliding unit, configured with multiple groups and slidingly arranged in the guide slot (11), each group of sliding units includes two T-shaped sliders (2), and the two sliders (2) are connected by a linear driver (21); Quick connecting mechanism (4), including base (41), telescopic column (42) and connecting seat (43), the base (41) is fixedly installed on the bottom of the slider (2), the base (41) is fixedly installed with telescopic column (42) at the bottom, the telescopic end of the telescopic column (42) is connected with the connecting seat (43); Clamping mechanism (3), installed at the bottom of the connecting seat (43) and used for clamping wafer tray, and the quick connecting mechanism (4) can realize the detachable rigid connection between the clamping mechanism (3) and the slider (2); Clamping and replacing station (5), arranged on one side of the bottom of the crossbeam (1) and used for storing, calibrating and replacing different types of clamping mechanism (3).

2. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 1, characterized in that, The two sides and the top side of the guide slot (11) are provided with clamping grooves (12), and the clamping grooves (12) are fixedly installed with positioning strips (13); The two sides and the top side of the slider (2) are provided with positioning blocks (22) through hydraulic drive sliding, the positioning blocks (22) are slidingly arranged along the clamping grooves (12), and the positioning blocks (22) can be slidingly attached to the positioning strips (13).

3. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 2, characterized in that, The clamping mechanism (3) includes clamping seat (31) and two fork tooth rods (32) extending horizontally along the clamping seat (31).

4. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 3, characterized in that, The bottom of the connecting seat (43) is provided with a wedge-shaped locking groove (431), and at least one pneumatic locking piston (432) is slidingly arranged around the wedge-shaped locking groove (431); The butt joint (311) is fixedly arranged on the clamping seat (31), the wedge-shaped locking block (312) matched with the wedge-shaped locking groove (431) is fixedly arranged on the butt joint (311), and the locking hole (313) for inserting the pneumatic locking piston (432) is formed around the wedge-shaped locking block (312).

5. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 4, characterized in that, At least one electrical socket (433) is fixedly arranged at the bottom of the connecting seat (43); The electrical plug (314) matched with the electrical socket (433) is fixedly arranged on the butt joint (311).

6. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 4, characterized in that, The protruding end of the pneumatic locking piston (432) is wedge-shaped; The end of the locking hole (313) is wedge-shaped, which is the same as the shape of the protruding end of the pneumatic locking piston (432).

7. The wafer multi-cassette synchronous clamping and carrying mechanism according to claim 3, characterized in that, Position detection sensors are embedded in each of the slider (2), connecting seat (43) and clamping seat (31); The crossbeam (1) is provided with a control unit, and the control unit is electrically connected with the linear driver (21), telescopic column (42) and position detection sensor arranged on the slider (2), connecting seat (43) and clamping seat (31).

8. A method for synchronously clamping and carrying a wafer multi-tray, which employs a wafer multi-tray synchronously clamping and carrying mechanism as claimed in claim 7, characterized in that, It includes the following steps: S1, the control unit calculates the corresponding specifications and quantities of the clamping mechanisms (3) according to the type and port position of the target wafer processing equipment, and calculates the target positions of each sliding block (2) in the cross beam (1); S2, the corresponding number of clamping mechanisms (3) are fixedly connected with the corresponding number of sliding blocks (2) by using the quick connection mechanism (4); S3, the control unit adjusts the sliding blocks (2) to the target positions by controlling the extension and retraction of the linear drivers (21) in each group of sliding units and the sliding of the positioning blocks (22) on each sliding block (2) according to the recursive logic; S4, after the adjustment is completed, the cross beam (1) drives the sliding blocks (2) and clamping mechanisms (3) to carry the wafer tray to be carried to the port of the corresponding wafer processing equipment.

9. The method of claim 8, wherein, The recursive logic includes the following steps: a, lock all sliding blocks (2) in the cross beam (1) through the positioning blocks (22), positioning bars (13) and cross beam (1); b, select one sliding block (2) in the same group of sliding units as the reference and keep it locked, unlock the other sliding block (2) in the same group, and use the linear driver (21) to push the unlocked sliding block (2) to slide to the target position and lock it again; c, take the moved sliding block (2) in step b as the new reference, repeat step b until all sliding blocks (2) in the cross beam (1) are moved to the target position.

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