Adsorption plate, fixing mechanism and membrane transfer device

Abstract

The invention provides an adsorption plate, a fixing mechanism and a membrane transfer device. The adsorption plate comprises an inner adsorption area and an outer adsorption area, the outer adsorption area is arranged around the inner adsorption area; wherein the inner adsorption area is provided with a plurality of adsorption subareas, and the adsorption subareas can be independently controlled. According to the adsorption plate, the fixing mechanism and the diaphragm transfer device, adjustment space is provided for the to-be-transferred diaphragm by means of the time difference of the suction force generated by the inner adsorption area and the outer adsorption area, precise and differentiated regulation and control of the adsorption force of different subareas can be achieved, and therefore the quality problem of wrinkles is solved, and the quality of the to-be-transferred diaphragm is improved. And the consistency and the production efficiency of products are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of diaphragm processing, and particularly to an adsorption plate, a fixing mechanism and a diaphragm transfer device. BACKGROUND

[0002] For the diaphragm type product in the prior art, the product is usually fixed by using a vacuum adsorption method in the process of peeling and transferring the diaphragm to be processed from a flexible substrate on which the diaphragm to be processed is installed and other processing processes.

[0003] However, since the diaphragm type product is relatively thin, the diaphragm is adsorbed on the adsorption plate at the moment of peeling and transferring, and wrinkles are extremely easy to occur. In particular, when the area of the diaphragm is large, the wrinkles are particularly obvious, which seriously affects the product quality and production efficiency.

[0004] In view of the above problems, the prior art needs to be improved. SUMMARY

[0005] Therefore, the embodiments of the present application aim to provide an adsorption plate, a fixing mechanism and a diaphragm transfer device to solve the problem that the diaphragm is easy to wrinkle in the process of peeling and transferring, thereby affecting the product quality and production efficiency.

[0006] In order to achieve the above-mentioned purpose, the present application provides an adsorption plate, which comprises: an inner adsorption area; and an outer adsorption area arranged around the inner adsorption area; wherein the inner adsorption area has a plurality of adsorption sub-zones, and the plurality of adsorption sub-zones can be independently controlled.

[0007] In some embodiments of the present application, the outer adsorption area has a plurality of first adsorption holes arranged at intervals; and / or the inner adsorption area has a plurality of second adsorption holes arranged at intervals; and / or the adsorption plate further comprises a partition segment, the partition segment being located between two adjacent adsorption sub-zones; each partition segment comprises a plurality of third adsorption holes, and the plurality of third adsorption holes are arranged at intervals.

[0008] In some embodiments of the present application, in two adjacent outer adsorption areas, the centers of every two adjacent three first adsorption holes are not on the same straight line; and / or in each adsorption sub-zone, the centers of every two adjacent three second adsorption holes are not on the same straight line; and / or in the partition segment, the centers of every two adjacent three third adsorption holes are not on the same straight line.

[0009] In some embodiments of the present application, the adsorption plate further comprises a plurality of air channels, one adsorption sub-zone corresponds to at least one air channel, and in each adsorption sub-zone, the air channel is in communication with a plurality of second adsorption holes.

[0010] In some embodiments of the present application, one of the adsorption sub-zones corresponds to a plurality of the air channels, and in each of the adsorption sub-zones, the plurality of the air channels are arranged in a spaced manner, and one of the air channels corresponds to a plurality of the second adsorption holes.

[0011] In some embodiments of the present application, the plurality of the second adsorption holes are arranged in an array, and one of the air channels is in communication with one column or one row of the second adsorption holes; and / or one of the air channels is in communication with at least two columns or at least two rows of the second adsorption holes.

[0012] In some embodiments of the present application, the adsorption plate further comprises a positioning identification hole, and each of the adsorption sub-zones has at least one of the positioning identification holes.

[0013] In some embodiments of the present application, the adsorption plate further has a first air outlet hole, and one of the first adsorption holes is in communication with a plurality of the first air outlet holes, and the plurality of the first air outlet holes corresponding to the same first adsorption hole are arranged in a spaced manner; and / or The adsorption plate further has a plurality of second air outlet holes, and one of the second adsorption holes is in communication with a plurality of the second air outlet holes, and the plurality of the second air outlet holes corresponding to the same second adsorption hole are arranged in a spaced manner.

[0014] In some embodiments of the present application, the plurality of the second air outlet holes corresponding to the same second adsorption hole are arranged in a uniform spaced manner.

[0015] In some embodiments of the present application, the adsorption plate further has a plurality of third air outlet holes, and one of the third adsorption holes is in communication with a plurality of the third air outlet holes, and the plurality of the third air outlet holes corresponding to the same third adsorption hole are arranged in a spaced manner.

[0016] In some embodiments of the present application, the plurality of the third air outlet holes corresponding to the same third adsorption hole are arranged in a uniform spaced manner.

[0017] In some embodiments of the present application, the third adsorption hole has a smaller pore size than the second adsorption hole; and / or the first adsorption hole has a smaller pore size than the second adsorption hole.

[0018] In some embodiments of the present application, the plurality of the segmentation sections are arranged in a crossed manner to divide the inner adsorption area into a plurality of adsorption sub-zones in a uniform manner.

[0019] In some embodiments of the present application, two of the plurality of the segmentation sections are arranged in a perpendicular manner.

[0020] In some embodiments of this application, one segment is arranged around another segment, and the adsorption partition is located between two adjacent segments; or the extension directions of multiple segments are arranged parallel to each other, and two adjacent segments are spaced apart, and the adsorption partition is located between two adjacent segments.

[0021] In some embodiments of this application, there are multiple external adsorption regions, one external adsorption region is arranged around another external adsorption region, and adjacent external adsorption regions are spaced apart.

[0022] In some embodiments of this application, the effective air outlet area of ​​the plurality of first air outlet holes corresponding to the same first adsorption hole in the outer adsorption region of the outer ring is greater than the effective air outlet area of ​​the plurality of first air outlet holes corresponding to the same first adsorption hole in the outer adsorption region of the inner ring.

[0023] In some embodiments of this application, the number of first air outlet holes corresponding to each first adsorption hole in the outer adsorption region of the outer ring is greater than the number of first air outlet holes corresponding to each first adsorption hole in the outer adsorption region of the inner ring; and / or the diameter of the first air outlet hole corresponding to each first adsorption hole in the outer adsorption region of the outer ring is greater than the diameter of the first air outlet hole corresponding to each first adsorption hole in the outer adsorption region of the inner ring.

[0024] In some embodiments of this application, the diameter of each of the first adsorption pores in the outer adsorption region of the outer ring is smaller than the diameter of each of the first adsorption pores in the outer adsorption region of the inner ring.

[0025] In some embodiments of this application, among the plurality of first vent holes corresponding to and connected to the same first adsorption pore in the outermost outer adsorption region, the first vent holes have at least two rows and / or two columns, and the effective venting area of ​​the first vent holes in the column / row farther away from the inner adsorption region is greater than the effective venting area of ​​the first vent holes in the column / row closer to the inner adsorption region.

[0026] In some embodiments of this application, in the outer adsorption region of the inner ring, among the plurality of first air outlets corresponding to and communicating with the same first adsorption hole, the centers of three adjacent first air outlets are not on the same straight line.

[0027] This application also provides a fixing mechanism, including: the adsorption plate as described above.

[0028] In some embodiments of this application, the fixing mechanism includes a pneumatic source located on the adsorption plate; the pneumatic source is connected to a first adsorption hole in the outer adsorption region; and / or the pneumatic source is connected to a second adsorption hole in the adsorption partition; and / or the pneumatic source is connected to a third adsorption hole in the segment.

[0029] In some embodiments of this application, the fixing mechanism further includes a plurality of control valves; the control valves are connected to the first adsorption hole; and / or the control valves correspond one-to-one with and are connected to the second adsorption hole; and / or the control valves are connected to the third adsorption hole; wherein, the control valves are used to control the pneumatic source to adsorb the first adsorption hole and / or the second adsorption hole and / or the third adsorption hole.

[0030] This application also provides a diaphragm transfer device, including: the fixing mechanism as described above.

[0031] This application provides an adsorption plate, a fixing mechanism, and a membrane transfer device. The adsorption plate includes an inner adsorption region and an outer adsorption region arranged around the inner adsorption region. The inner adsorption region has multiple adsorption zones, each of which can be independently controlled. By circumferentially arranging the outer adsorption region around the inner adsorption region, this application achieves sequential adsorption of different areas of the membrane to be transferred onto the adsorption wall. This utilizes the time difference in suction generated by the inner and outer adsorption regions to provide adjustment space for the membrane to be transferred, avoiding the quality problem of wrinkles caused by the entire membrane being simultaneously adsorbed onto the adsorption wall. This reduces rework and maintenance steps, improves product consistency, and increases production efficiency. Furthermore, by dividing the inner adsorption region into multiple adsorption zones and independently controlling the suction within each zone, this application achieves precise and differentiated control. This fundamentally solves the core pain point of membrane wrinkling during peeling and transfer, improving product quality and production efficiency, and giving the adsorption mechanism advantages such as adaptability to multiple scenarios, fault resistance, and ease of maintenance. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 A three-dimensional structural diagram of the fixing mechanism provided in some embodiments of this application.

[0034] Figure 2 for Figure 1 A bottom view of the suction plate of the fixing mechanism is shown.

[0035] Figure 3 This is a structural diagram of the internal adsorption region of the fixing mechanism of this application.

[0036] Figure 4 This is a structural diagram of the segmented parts of the fixing mechanism according to the first embodiment of this application.

[0037] Figure 5 This is a structural diagram of the external adsorption region.

[0038] Figure 6 for Figure 2 A magnified view of the details of A.

[0039] Figure 7 for Figure 2 A magnified view of the details of B.

[0040] Figure 8 for Figure 2 A magnified view of the details of C.

[0041] Figure 9 This is a structural diagram of the segmentation in the second embodiment of this application.

[0042] Figure 10 This is a structural diagram of the segmentation in the third embodiment of this application.

[0043] The attached figures are labeled as follows: 1. Pneumatic source; 2. Adsorption plate; 20. Adsorption wall; 21. First adsorption hole; 210. Outer adsorption area; 22. Second adsorption hole; 220. Inner adsorption area; 221. Adsorption partition; 23. Third adsorption hole; 230. Segment; 24. First air outlet; 25. Second air outlet; 26. Third air outlet; 27. Positioning identification hole; 28. Air passage. Detailed Implementation

[0044] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0045] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0046] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0047] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0048] Explanation and definition: The upper and lower positions of each component in the fixed mechanism are defined in the normal operating state of the fixed mechanism of this application.

[0049] like Figures 1 to 10 As shown, the fixed mechanism of this application will now be explained in detail.

[0050] The fixing mechanism in this application includes a pneumatic source 1 and an adsorption plate 2. The pneumatic source 1 is mounted on the adsorption plate 2, and the lower side wall of the adsorption plate 2 is configured as an adsorption wall 20 (e.g., ...). Figure 1 As shown, the adsorption wall 20 is adapted to the membrane to be transferred, and the adsorption wall 20 is provided with a plurality of first adsorption holes 21 and a plurality of second adsorption holes 22 arranged at intervals.

[0051] Specifically, multiple first adsorption pores 21 are arranged at intervals to form an outer adsorption region 210 (e.g., Figure 1 and Figure 5 (As shown). Each first adsorption hole 21 and each second adsorption hole 22 are respectively connected to the pneumatic source 1, and the multiple second adsorption holes 22 are arranged at intervals to form an inner adsorption region 220 (as shown). Figure 1 As shown in the figure, the outer adsorption region 210 is arranged around the inner adsorption region 220.

[0052] This scheme achieves the sequential adsorption of different regions on the membrane to be transferred onto the adsorption wall 20 by circumferentially arranging the outer adsorption region 210 around the inner adsorption region 220 on the adsorption wall 20.

[0053] In other words, by utilizing the time difference in the suction generated by the inner and outer adsorption regions, the membrane to be transferred is given room for adjustment, so as to avoid the quality problem of wrinkles caused by the entire area of ​​the membrane being simultaneously adsorbed on the adsorption wall 20, thereby improving product consistency and production efficiency.

[0054] In one embodiment, the adsorption plate 2 also has a plurality of third adsorption holes 23 (e.g., Figure 2 , Figure 4 , Figures 7 to 10 As shown, each of the third adsorption holes 23 is connected to the pneumatic source 1, and the third adsorption holes 23 are arranged to form multiple segmented sections 230.

[0055] Among them, multiple segmentation segments 230 are used to divide the inner adsorption region 220 into multiple adsorption partitions 221 (e.g. Figure 3 (As shown). In other words, the multiple adsorption zones 221 correspond to different parts of the membrane to be transferred.

[0056] In one embodiment, air passages (such as air channels) are provided at the locations corresponding to the multiple adsorption zones 221. Figure 6 (The dashed structure shown in the diagram) indicates that each air passage is connected to the pneumatic source.

[0057] Furthermore, in order to achieve separate adjustment of each adsorption zone 221, the scheme also includes multiple control valves, with each adsorption zone 221 connected to a corresponding control valve (not shown).

[0058] In other embodiments, the outer adsorption region 210 and the inner adsorption region 220 are each connected to a control valve.

[0059] The control valves can be closed or opened simultaneously, or opened or closed in batches, to achieve distributed adsorption in different areas of the membrane to be transferred and reduce wrinkles.

[0060] The control valve can complete this process using common circuit structures and software logic techniques in the prior art, which will not be described further in this application.

[0061] In one embodiment, the sizes of the first adsorption hole 21, the second adsorption hole 22, and the third adsorption hole 23 are flexibly set according to actual production.

[0062] In some cases, as shown in the scheme of this application, the pore size of the second adsorption pore 22 is substantially larger than that of the first adsorption pore 21, and the pore size of the first adsorption pore 21 is substantially larger than that of the third adsorption pore 23, so as to achieve the magnitude of the suction force corresponding to each region.

[0063] Furthermore, in other embodiments, the plurality of second adsorption pores 22 are evenly spaced apart; the plurality of first adsorption pores 21 are evenly spaced apart; and the plurality of third adsorption pores 23 are evenly spaced apart, further ensuring the consistency of adsorption force among the various external adsorption regions 210; the consistency of adsorption force among the various segmented sections 230; and the consistency of adsorption force among the various multiple adsorption partitions 221.

[0064] In one embodiment, please refer to Figure 4 Multiple segments 230 are arranged intersecting each other. Preferably, the multiple segments 230 are arranged orthogonally in pairs to evenly divide the inner adsorption region 220 into multiple adsorption zones 221, thereby increasing the area where the adsorption wall 20 generates a suction difference, providing more opportunities for adjustment of the membrane to be transferred, and avoiding the quality problem of wrinkles caused by the entire area of ​​the membrane to be transferred being simultaneously adsorbed on the adsorption wall.

[0065] In one embodiment, please refer to Figure 8 The adsorption plate 2 also has multiple first air outlet holes 24, and a first adsorption hole 21 is connected to multiple first air outlet holes 24. Multiple first air outlet holes 24 corresponding to the same first adsorption hole 21 are arranged at intervals.

[0066] Preferably, the multiple first air outlets 24 are evenly arranged.

[0067] In one embodiment, please refer to... Figure 8 There are multiple external adsorption regions 210, and each external adsorption region 210 is a ring of adsorption pores evenly spaced around the outer periphery of the inner adsorption region 220.

[0068] In one embodiment, please refer to... Figure 8 An external adsorption region 210 is arranged around another external adsorption region 210, and the two adjacent external adsorption regions 210 are spaced apart.

[0069] Optionally, the first adsorption holes 21 corresponding to the outer adsorption region 210 of the inner ring and the first adsorption holes 21 corresponding to the outer adsorption region 210 of the outer ring may be configured to correspond one-to-one or not correspond.

[0070] When the first adsorption hole 21 corresponding to the outer adsorption area 210 of the inner ring and the first adsorption hole 21 corresponding to the outer adsorption area 210 of the outer ring are in one-to-one correspondence, the outer adsorption areas 210 of the inner and outer rings can be flexibly adjusted by setting the size of their respective first adsorption holes 21 and the spacing between the first adsorption holes 21.

[0071] In one embodiment, the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is greater than the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0072] Furthermore, the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is larger than the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0073] In other embodiments, the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is greater than the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0074] Alternatively, the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is larger than the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring. The user can choose one of the two settings.

[0075] In one embodiment, please refer to... Figure 8 The adsorption plate 2 also has multiple second air outlet holes 25. One second adsorption hole 22 is connected to multiple second air outlet holes 25. Multiple second air outlet holes 25 corresponding to the same second adsorption hole 22 are arranged at intervals to enhance the adjustability of each area of ​​the membrane to be transferred during the adsorption process.

[0076] Preferably, the multiple second air outlets 25 are evenly arranged.

[0077] Please continue to refer to Figure 8 The adsorption plate 2 also has multiple third air outlets 26. A third adsorption hole 23 is connected to multiple third air outlets 26. Multiple third air outlets 26 corresponding to the same third adsorption hole 23 are arranged at intervals to enhance the adjustability of the segment 230 of the membrane to be transferred during the adsorption process.

[0078] Preferably, the multiple third air outlets 26 are evenly arranged.

[0079] Please see Figures 1 to 8 This application provides an adsorption plate 2, which includes: an inner adsorption region 220, including a plurality of adsorption partitions 221; each adsorption partition 221 has a plurality of spaced second adsorption holes 22; wherein the second adsorption holes 22 are in the plurality of adsorption partitions 221.

[0080] This application achieves precise and differentiated control by dividing the internal adsorption region 220 into multiple adsorption zones 221 and independently controlling the suction force of the second adsorption pores 22 within each zone 221. This fundamentally solves the core pain point of membrane wrinkling during peeling and transport, improving product quality and production efficiency, while also giving the adsorption mechanism advantages such as adaptability to multiple scenarios, fault resistance, and ease of maintenance. Specifically, the independent control of the adsorption zones 221 has the following advantages: First, the independent control of adsorption zones 221 can avoid uneven stress caused by synchronous adsorption of the membrane. Specifically, this application solves the problems of wrinkles, compatibility and stability of the membrane to be transported during the adsorption process by precisely controlling the adsorption state as needed, while improving the flexibility and versatility of the solution. The independent control of adsorption zones can also support time-difference adsorption, that is, control the adsorption force of different adsorption zones to be generated in sequence (such as first activating the outer adsorption zone to fix the edge of the membrane, and then gradually activating the inner zone), providing time for the membrane to stretch and adjust, and avoiding wrinkles and warping caused by local tension differences (such as slight unevenness of the membrane itself and adsorption wall adhesion error) when all areas of the membrane are adsorbed at the same time. If a certain part of the membrane (such as the edge or corner) is prone to stretching and deformation due to excessive adsorption force, the adsorption force of the corresponding adsorption zone can be reduced separately (such as reducing the negative pressure), while other zones maintain normal adsorption force, which ensures that the overall adsorption is firm and avoids excessive local stress from damaging the membrane shape.

[0081] Secondly, the independent control of adsorption zones 221 allows the adsorption plate to adapt to diverse membrane requirements without structural modifications, improving its versatility. Specifically, for membranes with irregular shapes (such as notches or multiple protrusions) or uneven thickness, the adsorption zones in areas not covered by the membrane can be closed (to avoid negative pressure loss due to ineffective adsorption), activating only the zones actually covered by the membrane to ensure that the adsorption force is precisely applied to the membrane itself. For membranes of different materials, for example, thin and brittle membranes can have their corresponding zones reduced to prevent breakage, while thick and heavy membranes can have their corresponding zones increased to prevent detachment. There is no need to replace the adsorption plate; the requirements of different materials can be met simply by adjusting the adsorption force of each zone.

[0082] Third, independent control of adsorption zones can reduce the chain reaction of local failures and facilitate local debugging and maintenance. Specifically, if the suction of a certain adsorption zone fails due to airway blockage or control valve failure, it only affects the local membrane of the corresponding zone, while other zones can still adsorb normally, avoiding the entire membrane from falling off due to a single zone failure and reducing the risk of production interruption. When the adsorption effect is abnormal (such as repeated wrinkling of the membrane in a certain area), the suction and timing of the corresponding adsorption zone can be tested separately to quickly locate the fault point (such as airway blockage or control valve delay in that zone) without disassembling the entire adsorption mechanism, thus reducing maintenance costs.

[0083] Fourth, independent control of adsorption zones allows the adsorption mechanism to not only ensure stable transport but also support step-by-step positioning adjustments and adapt to the parallel transport of multiple membranes, enabling more precise operation and improving production efficiency. Specifically, if there is a slight shift in the membrane during the initial adsorption phase, the membrane position can be finely adjusted by shutting down one side of the adsorption zone while maintaining the suction of the opposite side (e.g., slightly pulling the membrane to align with the adsorption wall), eliminating the need for re-adsorption and saving adjustment time. If the adsorption plate covers multiple small-sized membranes (each membrane corresponding to an adsorption zone), the adsorption / release sequence of each zone can be independently controlled, achieving "simultaneous adsorption and separate release" (e.g., sequentially transporting different membranes to their corresponding workstations according to the production process), thus improving batch production efficiency.

[0084] In some embodiments of this application, in each adsorption partition 221, the centers of three adjacent second adsorption pores 22 are not on the same straight line.

[0085] In some embodiments of this application, the adsorption plate 2 further includes a plurality of air channels 28, and an adsorption partition 221 corresponds to at least one air channel 28. In each adsorption partition 221, the air channel 28 is connected to a plurality of second adsorption holes 22.

[0086] In some embodiments of this application, one adsorption partition 221 corresponds to multiple air channels 28. In each adsorption partition 221, multiple air channels 28 are distributed at intervals, and one air channel 28 corresponds to multiple second adsorption holes 22.

[0087] The function of air passage 28 is to provide an airflow transmission channel for the independent control of adsorption zone 221, and it is a key structure for avoiding membrane wrinkles and improving adsorption accuracy. Air passage 28 has the following functions: First, the air passage 28 connects the pneumatic source 1 and the adsorption zone 221, transmitting adsorption power. Specifically, the air passage 28 acts as an airflow bridge between the pneumatic source 1 and each adsorption zone 221, directly undertaking the core role of adsorption power transmission. Structurally, each adsorption zone 221 forms an independent airflow circuit with the pneumatic source 1 through a dedicated air passage 28, rather than all zones sharing a single channel. In terms of power transmission, the negative pressure (or positive pressure, depending on the adsorption principle) generated by the pneumatic source 1 (such as a vacuum pump, negative pressure generator, etc.) needs to be precisely delivered to the second adsorption hole 22 of the corresponding adsorption zone 221 through the air passage 28 to enable the adsorption zone 221 to generate suction. Without the air passage 28, the power of the pneumatic source 1 cannot be transmitted to the adsorption hole, and the adsorption function cannot be realized at all. In terms of adaptability, the air passage and the adsorption zone are "correspondingly set," which can match the positional distribution of different adsorption zones (such as when the inner adsorption area 220 is divided into multiple zones, the air passage needs to extend with the zone layout), ensuring that the adsorption hole of each zone can stably obtain airflow.

[0088] Secondly, the airway 28 is a way to achieve independent control of the adsorption zones. It can utilize the time difference between the inner and outer adsorption zones to adjust the membrane and solve the problem of membrane wrinkling. It supports zoned timing control: Since each adsorption zone 221 corresponds to at least one independent airway 28, control valves (such as conventional control valves like solenoid valves, not shown in the figure) can be added to the airway 28 to achieve different suction on / off timings for different zones. For example, the first adsorption zone can be controlled to generate suction through the airway 28 to fix the membrane edge, and then the second adsorption zone can be controlled to adsorb, providing the membrane with time to expand and adjust, avoiding wrinkles caused by synchronous adsorption. It also supports zoned suction adjustment: If the pneumatic source 1 can output different negative or positive pressure values, the independent airway 1 can enable each adsorption zone to obtain differentiated suction. For example, for areas where the membrane to be transported is thin and easily deformable, the corresponding adsorption zone can transmit a lower negative pressure through airway 1 to reduce membrane stretching and deformation caused by excessive suction, thereby further improving adsorption compatibility; avoid cross-zone airflow interference: if multiple adsorption zones 221 share the same airway, changes in airflow in one adsorption zone 221 (such as on / off, pressure fluctuations) will affect other adsorption zones, resulting in unstable adsorption force; while independent airway 28 can isolate the airflow loop of each zone, ensuring that the adsorption state (on / off, suction force) of each adsorption zone 221 is not affected by other adsorption zones, thus ensuring the accuracy of adsorption control.

[0089] Third, the airway 28 can also optimize airflow characteristics through structural design (such as pipe diameter, direction, and branching method) to ensure the adsorption effect. Specifically, to ensure uniform airflow within the adsorption zone: Multiple second adsorption holes 22 exist within the same adsorption zone 221. The air duct 28 can be designed as a main air duct + branch air duct structure (e.g., after the main air duct extends to the adsorption zone, fine branches connect to each adsorption hole), ensuring uniform distribution of negative or positive pressure within the adsorption zone. This prevents uneven suction of the second adsorption holes 22 from causing localized stress imbalance and wrinkling of the membrane. To reduce airflow loss: A reasonable air duct routing (e.g., shortening the distance from the pneumatic source 1 to the adsorption zone 221, reducing bends) can reduce pressure loss during airflow transmission, ensuring sufficient effective suction at the adsorption holes and preventing insufficient suction from causing the membrane to be poorly adsorbed and detached during transport. To adapt to complex zone layouts: When the inner adsorption area 220 is divided into irregular or scattered adsorption zones 221, the air duct 28 can flexibly conform to the layout of the adsorption zones 221, ensuring effective communication with the pneumatic source 1 regardless of the location of the adsorption zones 221, adapting to the adsorption needs of different membranes.

[0090] In some embodiments of this application, a plurality of second adsorption pores 22 are arrayed, and the second adsorption pores 22 in adjacent rows / columns are staggered.

[0091] In some embodiments of this application, an airway 28 is connected to a column or row of second adsorption holes 22. This design has the following advantages: First, it enables independent adjustment of column / row timing and suction force; specifically, each column / row corresponds to an independent airway 28, which can individually control the on / off time and suction force of all second adsorption holes 22 in that column / row. For example, if the membrane to be transported has easily wrinkled areas distributed in a column direction (such as the thin and fragile edges of certain columns corresponding to the membrane), the adsorption time of these columns can be delayed or their negative pressure value reduced through the independent airway 28, while other columns maintain normal adsorption, precisely avoiding local wrinkles, which is especially suitable for high-precision membranes with uneven thickness and sensitive materials (such as optical films and electronic screen films). Second, it has strong fault isolation and reduces the overall failure risk. If the airway of a certain column / row fails due to blockage, leakage, or other reasons, it only affects the adsorption holes of that column / row, while other columns / rows can still work normally. For example, if a malfunction occurs in one of the air ducts in the production line, only the control of that duct needs to be shut down, while other ducts continue adsorption. Although the adsorption force of the membrane decreases locally, it can still remain basically fixed, preventing the entire membrane from falling off due to a single malfunction and improving production continuity. Third, it can adapt to membranes with irregular column / row distributions; specifically, when the effective adsorption area of ​​the membrane is not uniformly distributed (e.g., some columns have membranes and some columns do not), independent air ducts can precisely activate the columns / rows covered by membranes and shut down the columns / rows without membranes, avoiding ineffective negative pressure loss and improving the energy utilization efficiency of the pneumatic source.

[0092] In some embodiments of this application, one airway 28 is connected to at least two columns or at least two rows of second adsorption holes 22. This design has the following advantages: First, it significantly reduces the number of airways and control components, lowering costs. Specifically, if the adsorption plate 2 contains 10 columns of second adsorption holes 22, using one airway 28 corresponding to two columns of second adsorption holes 22 requires only 5 airways and 5 control valves (such as solenoid valves), while 1 airway corresponding to one column of second adsorption holes 22 requires 10. The reduced number of airways reduces the difficulty of internal pipeline layout in the adsorption plate 2 (especially when the adsorption plate thickness is limited), and the reduced number of control valves reduces hardware costs and circuit complexity, making it suitable for standardized equipment in mass production. Second, it simplifies control logic and improves operational convenience. When multiple columns / rows share an airway, multiple columns / rows of second adsorption holes 22 can be activated synchronously with a single control signal, eliminating the need for separate timing programming for each column / row. For example, the middle 5 columns of the membrane have consistent characteristics (no differentiated control is required), and after sharing an airway, synchronous adsorption can be activated with a single button, reducing the operator's parameter setting workload and lowering the risk of misoperation. Third, it can adapt to the adsorption needs of large-area uniform membranes. Specifically, for membranes with flat surfaces and uniform materials (such as ordinary plastic films and metal sheets), the adsorption needs of different columns / rows are consistent (no time difference or suction difference is required). Multiple columns / rows sharing the same airway can meet the basic adsorption function, and will not waste resources due to excessive control, thus taking into account both practicality and economy.

[0093] In summary, the two methods of corresponding air channels 28 and second adsorption holes 22 can be used in conjunction. The specific method of coordination can be selected according to the actual situation. For example, in the core area, one air channel corresponds to one column / row of second adsorption holes 22: for highly sensitive areas of the membrane (such as edges and functional areas), fine control is used to ensure adsorption quality; in the non-core area, one air channel corresponds to multiple columns / rows of second adsorption holes 22: for flat areas of the membrane, polymerization control is used to reduce costs. This differentiated design allows the adsorption plate 2 to meet the stringent requirements of high-precision scenarios while also adapting to the needs of low-cost mass production, expanding the applicability of the solution and demonstrating the flexibility and practicality of the technical solution. In addition, the method of one air channel corresponding to one column / row of second adsorption holes 22 pursues extreme precision and solves the adsorption pain point of high-requirement membranes; the method of one air channel corresponding to multiple columns / rows of second adsorption holes 22 pursues high efficiency and economy and meets the practical needs of conventional scenarios. Together, they constitute an on-demand technical solution that avoids the high costs caused by fully independent (one-to-one) control and solves the insufficient precision caused by one-to-many control, ultimately serving the core goal of achieving stable and efficient adsorption in different scenarios.

[0094] In some embodiments of this application, the adsorption plate 2 further includes a positioning identification hole 27, and each adsorption partition 221 has at least one positioning identification hole 27.

[0095] In this embodiment, the positioning identification hole 27 is also disposed within the segment 230. Furthermore, the positioning identification hole 27 is disposed at a position near the outer adsorption area 210 of each adsorption partition 221 and segment 230.

[0096] Among them, the positioning and identification hole 27 can provide a precise benchmark for the initial alignment of the adsorption plate 2 and the membrane, monitor whether the membrane shifts or falls off during the adsorption process, ensure the safety of transportation, provide a unified positioning benchmark for the connection of multiple processes, and improve the overall process accuracy.

[0097] In some embodiments of this application, the adsorption plate 2 also has a plurality of second air outlet holes 25, and a second adsorption hole 22 is connected to a plurality of second air outlet holes 25, and the plurality of second air outlet holes 25 corresponding to the same second adsorption hole 22 are arranged at intervals.

[0098] In some embodiments of this application, a plurality of second air outlets 25 that are connected to the same second adsorption hole 22 are evenly spaced.

[0099] The second vent 25 has the following advantages: First, it can balance the airflow pressure within the second adsorption pore 22, avoiding adsorption failure caused by local airflow turbulence. Specifically, the core function of the second adsorption pore 22 is to adsorb the membrane through negative or positive pressure generated by the pneumatic source 1, while the second vent 25 can serve as an airflow regulation channel to solve the problem of uneven airflow distribution that may exist in a single adsorption pore. For example, it can alleviate sudden changes in negative pressure within the pore. When the pneumatic source 1 is started or stopped, the second adsorption pore 22 is prone to pressure fluctuations (such as local eddies) due to the instantaneous influx / extraction of airflow, which may cause the membrane to be deformed by the instantaneous suction impact, or the adsorption to loosen due to unstable pressure. The second vent 25 can divert part of the airflow, making the pressure change within the second adsorption pore 22 more gradual and reducing the impact on the membrane. It can also balance the negative pressure distribution within the pore. If the second adsorption pore 22 is deep or the pore diameter design is complex, the negative pressure at different locations of the second adsorption pore 22 may differ (such as strong negative pressure at the pore opening and weak negative pressure at the pore bottom), resulting in uneven local force on the membrane in contact with the second adsorption pore 22. The second vent 25 can guide airflow circulation, making the negative pressure inside the vent more uniform, ensuring that the area where the membrane contacts the adsorption pore is subjected to consistent force, and avoiding localized air leakage or excessive adsorption.

[0100] Second, it adapts to the adsorption requirements of thin and soft membranes and prevents the adsorption function from failing due to the membrane clogging the second adsorption hole 22. For thin and soft membranes to be transported, a single second adsorption hole 22 is prone to the problem of the membrane being sucked into the hole and blocking the channel. The second vent hole 25 can specifically solve this risk. For example, it forms an anti-clogging airflow barrier. When the membrane is adsorbed into the opening of the second adsorption hole 22, the second vent 25 can output a small amount of airflow (usually positive or weak negative pressure), forming an airflow buffer layer between the membrane and the opening of the second adsorption hole 22. This prevents the membrane from completely adhering to the opening of the second adsorption hole 22, which would cause channel blockage. It ensures that the negative or positive pressure of the main adsorption hole (second adsorption hole) can continuously act on the membrane, while preventing the membrane from being stuck in the opening of the second adsorption hole 22 due to blockage and causing wrinkles. It also assists the membrane in detaching from the adsorption hole. During the membrane release stage, the second vent 25 can output positive or negative pressure airflow in the opposite direction to help the membrane quickly separate from the second adsorption hole 22. This avoids adhesion problems caused by the membrane being too tightly attached to the orifice (such as residual negative pressure), ensuring that the membrane is accurately placed in the target position and improving transport efficiency.

[0101] Third, it enhances the environmental adaptability of the second adsorption pore 22 and reduces the impact of impurities on the adsorption function. In the production environment, the second adsorption pore 22 may suck in impurities such as dust and debris, affecting the stability of negative or positive pressure. The second vent 25 can play an auxiliary role in self-cleaning. For example, it can guide impurity particles. When the second adsorption pore 22 sucks in small impurities, the airflow from the second vent 25 can carry the impurities out with the airflow, reducing the risk of blockage caused by the accumulation of impurities in the second adsorption pore 22 and extending the maintenance cycle of the adsorption plate 2. It can also balance the pressure difference inside and outside the pore. If the second adsorption pore 22 is blocked by minor impurities, causing a drop in negative or positive pressure, the second vent 25 can supplement part of the negative or positive pressure by adjusting the airflow, or loosen the blockage by airflow disturbance, temporarily maintaining the adsorption function and avoiding membrane detachment due to local blockage.

[0102] In summary, the second vent 25 is a key supplement to the fine control of adsorption. The second vent 25 is not an independent adsorption functional structure, but rather solves the pain points in practical applications such as pressure fluctuations, membrane blockage, and the influence of impurities by optimizing the airflow characteristics of the second adsorption pore 22. It not only improves the adaptability to membranes of different textures (especially thin and soft membranes), but also enhances the stability and reliability of the adsorption process, ultimately serving the core goal of wrinkle-free, high-precision membrane transport.

[0103] In some embodiments of this application, the adsorption plate 2 further includes a segment 230, which is located between two adjacent adsorption partitions 221; each segment 230 includes a plurality of third adsorption holes 23, which are spaced apart.

[0104] Among them, the segmented section 230 and the third adsorption pore 23 are the core structures for achieving refined zoning control and enhanced adsorption function in the adsorption area within the adsorption plate 2. The two work together to support the goal of avoiding membrane wrinkles and improving adsorption stability, and their specific functions are as follows: The function of the segmentation section 230 is to construct the physical boundaries for independent control of the zones. The segmentation section 230 is the basic structure for achieving zoned management of the inner adsorption region 220. Its core function is to clearly define the boundaries of each adsorption zone 221 through physical separation, providing a prerequisite for independent control. Specifically, firstly, the segmentation section 230 can clearly define the physical boundaries of the zones, avoiding cross-zone airflow interference. The segmentation section 230 (such as protrusions, sealing ribs, or airway isolation structures) divides the inner adsorption region 220 into multiple independent adsorption zones 221, blocking airflow communication between different adsorption zones 221. Without the segmentation section 230, the adsorption pores of each adsorption zone 221 may form airflow crosstalk through gaps in the adsorption wall surface (such as negative pressure leakage from one zone to adjacent zones), leading to independent control failure (such as when the first adsorption zone is activated, the second adsorption zone also passively generates weak suction). The segmentation section 230 ensures the independent operation of the airflow system (such as airways and adsorption pores) of each adsorption zone 221 through physical isolation, guaranteeing the accuracy of zone opening / closing and suction adjustment. Second, the segmentation 230 can be adapted to the local characteristics of the membrane to achieve targeted adsorption. Specifically, the layout of the segmentation 230 can be designed according to the structural characteristics of the membrane to be transported (such as easily wrinkled areas or stress-sensitive regions), so that each adsorption zone precisely corresponds to a specific part of the membrane. For example, the central area of ​​the membrane is relatively flat and can be divided into one large zone; the edges and corners are easily wrinkled and can be divided into multiple smaller zones through the segmentation. This precise correspondence between the zone and the membrane part allows subsequent adsorption control to formulate differentiated strategies for the needs of different parts of the membrane (such as the edges needing to be adsorbed and fixed first, while the center can be adsorbed later), structurally supporting the realization of time-difference adsorption. Third, the segment 230 can enhance the structural stability and durability of the adsorption plate 2. The segment itself (such as the raised ribs) can enhance the overall structural strength of the adsorption plate 2. Especially when the area of ​​the adsorption plate 2 is large or the adsorption holes are densely distributed, the segment 230 can reduce the deformation of the adsorption plate 2 caused by negative pressure (such as the central depression), ensuring that the adsorption wall 20 always remains flat and avoiding uneven membrane adhesion and wrinkles caused by the deformation of the adsorption plate 2.

[0105] The function of the third adsorption pore 23 is to enhance the adsorption capacity of each adsorption zone, supplement the adsorption details, and improve the membrane adhesion effect. The third adsorption pore 23 is a supplementary and reinforcing structure for the adsorption function within each adsorption zone, working synergistically with the second adsorption pore 22 to improve the uniformity and reliability of adsorption. Specifically, firstly, by adding the third adsorption pore 23 within the segment 230, the number of adsorption points near the adsorption zone 221 can be increased based on the second adsorption pore 22, increasing the adsorption point density of the adsorption plate 2, making the contact between the membrane and the adsorption wall of the adsorption plate 1 more uniform, and improving the tightness of membrane adhesion. For example, if a certain adsorption zone corresponds to a large flat area of ​​the membrane, relying on only a few second adsorption pores may cause the membrane to be partially suspended (especially when the membrane is thin), while the dense distribution of the third adsorption pore 23 can form multi-point uniform adsorption, ensuring that the membrane adheres to the adsorption wall as a whole, avoiding local bulging and wrinkles. Secondly, the third adsorption pore 23 can adapt to the local adsorption needs of the membrane, achieving fine control. The third adsorption pore 23 can be designed with differentiated parameters (such as pore size and distribution density) according to the adsorption needs of different locations within the partition (e.g., stronger suction is needed to fix the membrane near the edge of the segment 230, while the suction in the central area can be slightly weaker), and coordinate with the independent control logic of the adsorption partition 221. For example, the third adsorption pore near the membrane wrinkling risk point can be preferentially activated through an independent airway to fix the membrane locally in advance, further refine the adsorption sequence, and enhance the anti-wrinkle effect. Thirdly, the third adsorption pore 23 can improve fault tolerance and ensure adsorption reliability. If some of the second adsorption pores 22 within the adsorption partition 221 fail due to blockage or malfunction, the third adsorption pore 23 can serve as a backup adsorption point to maintain basic adsorption function, avoiding membrane detachment within the partition due to the failure of a single adsorption pore. This dual adsorption pore system improves the fault resistance of the adsorption system, especially in continuous production scenarios, reducing downtime maintenance caused by adsorption pore failure and ensuring production efficiency.

[0106] In summary, the segmented section 230 is the physical basis for the independent control of the adsorption zone 221, achieving precise isolation of the control unit through boundary division; the third adsorption pore 23 is a reinforcement and supplement to the zoned adsorption function, improving the adsorption effect by increasing the density and flexibility of adsorption points. The combination of the two enables the inner adsorption region 220 to achieve both independent temporal control of the zones (solving the wrinkle problem) and ensure uniform and reliable adsorption within the zones (solving the adhesion problem), thereby improving the membrane transfer quality and production efficiency.

[0107] In some embodiments of this application, the adsorption plate 2 also has a plurality of third air outlet holes 26, and a third adsorption hole 23 is connected to a plurality of third air outlet holes 26, and the plurality of third air outlet holes 26 corresponding to the same third adsorption hole 23 are arranged at intervals.

[0108] The function of setting the third air outlet 26 in the third adsorption hole 23 is similar to the function of setting the second air outlet 25 in the second adsorption hole 22, and will not be described in detail here.

[0109] In some embodiments of this application, a plurality of third air outlets 26 that are connected to the same third adsorption hole 23 are evenly spaced.

[0110] In some embodiments of this application, the diameter of the third adsorption pore 23 is smaller than the diameter of the second adsorption pore 22; and / or the centers of three adjacent third adsorption pores 23 are not on the same straight line.

[0111] Please see Figure 7 and Figure 8 In some embodiments of this application, multiple segments 230 are arranged to intersect each other.

[0112] The intersecting arrangement of multiple segments 230 (such as "cross-shaped" or "grid-shaped") offers the following advantages: First, the partitioning is flexible and adaptable to irregularly shaped / multi-region membranes. Specifically, the intersecting segments can form irregular or polygonal adsorption partitions (such as grid-shaped, L-shaped, or polygonal partitions), precisely matching irregularly shaped membranes with protrusions, notches, or multifunctional areas. For example, if the membrane to be transported contains a central functional area, an edge sealing area, and a corner avoidance area, the intersecting segments can correspond each functional area to an independent adsorption partition, achieving precise control of one area corresponding to one membrane functional area and avoiding mutual interference of adsorption forces between different functional areas. Second, the adsorption partition density is controllable, balancing precision and efficiency. Specifically, the number of partitions can be flexibly controlled by adjusting the intersecting angle (such as 30°, 45°, or 90°) and the spacing between the segments. If the membrane is prone to wrinkling and requires high-precision control, it can be densely cross-divided to form multiple small zones; if the membrane is flat and does not require excessive control, the number of cross-divisions can be reduced to form fewer large zones, balancing control precision and operational complexity (the fewer adsorption zones 221, the fewer airways / valve assemblies need to be controlled). Third, it has strong resistance to membrane shift; specifically, the zones formed by cross-division are nested with each other. When a membrane in a certain adsorption zone 221 experiences a slight shift, the adsorption force of adjacent cross-division zones can form a bidirectional constraint (such as lateral shift being limited by the adsorption force of the zones on both sides of the longitudinal segment), reducing the risk of overall membrane shift, which is especially suitable for thin membranes that are soft and easily stretched.

[0113] In some embodiments of this application, multiple segments 230 are arranged orthogonally in pairs to uniformly divide the inner adsorption region 220 into multiple adsorption partitions 221.

[0114] The second embodiment of the segmented structure of the fixing mechanism of this application will now be explained.

[0115] Please refer to Figure 9 One segment 230 is arranged around another segment 230, and an adsorption partition 221 is arranged between two adjacent segments 230.

[0116] At this point, each adsorption partition 221 is divided into annular cross-sectional shapes.

[0117] The second embodiment is identical to the first embodiment except for the above-mentioned structural differences, and will not be described again here.

[0118] The arrangement of one segment 230 surrounding another segment 230 (such as concentric circles or nested rectangles) has the following advantages: First, the partition boundaries are regular, adapting to symmetrical membranes such as circles / rings. Specifically, the partitions formed by the surrounding segmentation are symmetrical in shape, such as concentric rings or nested rectangles, perfectly matching membranes with symmetrical structures such as circles, rings, and squares. For example, if the membrane to be transported is a circular optical membrane, a central area, an inner ring area, and an outer ring area can be formed through concentric circle segments. Each ring partition corresponds to a different radius region of the membrane, and the adsorption sequence can be progressive from the outside to the inside or from the inside to the outside, avoiding central wrinkles caused by synchronous adsorption of symmetrical membranes. Second, the airflow path is simple, and independent control has high stability. Specifically, the partition boundaries of the surrounding segmentation are closed curves, and the air channels 28 of adjacent adsorption partitions 221 can be arranged in a ring along the segment 230 (such as each ring partition corresponding to an independent ring air channel). There is no cross-entanglement between the air channels 28, the negative pressure transmission path is short and has good isolation, and there is almost no cross-regional airflow interference. The reliability of independent on / off switching and suction adjustment of the partitions is extremely high. Third, the processing and maintenance are easy; specifically, the segment 230 is a regular closed shape (such as a circle, rectangle, etc.), which can be achieved by rotary cutting, stamping and forming during mold processing, and the accuracy is easy to guarantee; during maintenance, if a certain annular partition is faulty (such as airway blockage), the corresponding annular airway can be directly checked, without disassembling complex cross structures, and the fault location and repair efficiency is high.

[0119] The third embodiment of the segmented structure of the fixing mechanism of this application will now be explained.

[0120] Please refer to Figure 10 The multiple segments 230 extend in parallel directions and are spaced apart from each other. At this time, each adsorption zone 221 is divided into long strips.

[0121] The third embodiment is identical to the first embodiment except for the above-mentioned structural differences, and will not be described again here.

[0122] The parallel extension directions of multiple segments 230 (such as parallel straight line segments or parallel curve segments) have the following advantages: First, the structure is extremely simple, with significant advantages in processing and cost. Specifically, the parallel segments are straight lines / curves extending in the same direction (such as horizontal parallel or vertical parallel). During mold processing, this can be achieved through linear cutting, pultrusion molding, etc., without the need for complex intersecting or surrounding structures. This results in high processing efficiency, low cost, and suitability for standardized adsorption plates for mass production. Second, the partitions have a uniform shape, adapting to long strip / rectangular regular membranes. Specifically, the partitions formed by parallel division have a uniform shape such as long strips or rectangles, which can efficiently adapt to regular membrane shapes such as long strip membranes, rectangular membranes, and sheet membranes. For example, if the membrane to be transferred is a long strip flexible screen, multiple long strip partitions can be formed through vertical parallel division. The adsorption sequence can progress from left to right, ensuring that the long strip membrane gradually expands during adsorption and avoiding lateral wrinkles. Third, the airway layout is simple and easy to automate. Specifically, each parallel partition corresponds to a straight airway in the same direction (such as the airway of each long partition extending parallel to the partition). The airways can be concentrated on one side of the adsorption plate (such as the top / bottom), and the connection with the control valve is linearly arranged, which makes it easy for the automated control system to activate in sequence (such as the first partition, the third partition, the third partition, etc.). The control logic is simple and the program failure is not easy to occur.

[0123] The essence of the three segmentation methods of segment 230 is the balance between membrane morphology adaptability and structural / control complexity. There is no absolute superiority or inferiority. The selection should be based on the specific morphology of the membrane to be transported, the adsorption control precision requirements, and the production cost budget. If multiple membranes need to be compatible, multiple segmentation methods can be combined.

[0124] Of course, in other embodiments, the segmentation method of segment 230 is not limited to the above three types, and can be designed according to the actual situation.

[0125] This application also provides an adsorption plate 2, which includes: an inner adsorption region 220; a plurality of spaced second adsorption holes 22; an outer adsorption region 210 having a plurality of spaced first adsorption holes 21 and surrounding the inner adsorption region 220; and a first air outlet 24, wherein a first adsorption hole 21 is correspondingly connected to a plurality of first air outlets 24, and the plurality of first air outlets 24 correspondingly connected to the same first adsorption hole 21 are spaced apart.

[0126] This application achieves sequential adsorption of different areas of the membrane to be transferred onto the adsorption wall by circumferentially arranging the outer adsorption area around the inner adsorption area. In other words, it utilizes the time difference in the adsorption force generated by the inner and outer adsorption areas to provide adjustment space for the membrane to be transferred, thereby avoiding the quality problem of wrinkles caused by the entire area of ​​the membrane being simultaneously adsorbed onto the adsorption wall. This reduces the number of rework and maintenance steps, improves product consistency, and increases production efficiency.

[0127] The function of multiple spaced first air outlet holes 24 arranged in the outer adsorption region 210 of the adsorption plate 2, which are connected to the same first adsorption hole 21, is roughly similar to the function of multiple spaced second air outlet holes 25 arranged in the inner adsorption region 220 of the adsorption plate 2, which are connected to the same second adsorption hole 22. They will not be described in detail here.

[0128] In some embodiments of this application, there are multiple external adsorption regions 210, one external adsorption region 210 is arranged around another external adsorption region 210, and adjacent external adsorption regions 210 are spaced apart.

[0129] The design of multiple outer adsorption regions 210 arranged in a surrounding and spaced manner aims to enhance the adsorption control precision and adaptability at the membrane edge through a multi-level peripheral adsorption structure. Simultaneously, it works synergistically with the inner adsorption regions 220 to further address membrane wrinkling issues and improve transport stability. Specific benefits include: First, it can achieve multi-level sequential adsorption at the edges, gradually fixing the membrane from the periphery to the center, avoiding edge wrinkles. Specifically, multiple outer adsorption regions are arranged around each other (such as inner outer adsorption region, middle outer adsorption region, and outer outer adsorption region), which can form a multi-level sequential adsorption from the outside to the inside or from the inside to the outside. For example, the outermost outer adsorption region is activated first to fix the outermost edge of the membrane, and then the middle and inner outer adsorption regions are activated in sequence, providing a gradually tightening adjustment space for the membrane edge, avoiding wrinkles caused by uneven instantaneous force (such as slight curling of the edge itself) when a single outer adsorption region adsorbs simultaneously. For special membranes with stepped structures or multi-layered stacking at the edges (such as composite membranes with flanged edges), the outer adsorption regions of different layers can accurately correspond to different edge levels of the membrane, ensuring that each level can be targeted for adsorption, avoiding local suspension or wrinkles caused by complex edge structures.

[0130] Secondly, it can enhance the adsorption stability of the membrane edge, preventing the edge from lifting or falling off during transport. Specifically, the adjacent outer adsorption areas are spaced apart, forming multiple edge constraints, which significantly improves the fixation effect of the membrane edge. For example, if the membrane edge lifts due to local blockage or insufficient negative pressure in a single outer adsorption area, the outer adsorption areas of adjacent layers can still provide adsorption force, forming redundant fixation. For example, if a point in the outer adsorption area fails, the corresponding position in the inner adsorption area of ​​the middle layer can still adsorb the membrane, preventing the entire edge from falling off. The spaced outer adsorption areas can cover the transition area of ​​the membrane edge (such as the gradient area from the membrane edge to the middle). Through the superposition of adsorption forces of multiple layers, the membrane edge adheres more tightly to the adsorption wall, which is especially suitable for membranes with soft texture and easily deformable edges (such as silicone membranes and thin paper membranes).

[0131] Third, it can adapt to the adsorption needs of membranes of different sizes, improving the versatility of the adsorption plate. Specifically, multiple surrounding outer adsorption areas can be selectively activated to adapt to membranes of different diameters / sizes without the need to replace the adsorption plate. For example, for small-sized membranes, only the inner outer adsorption area needs to be activated to meet the edge fixing requirements, while the outer outer adsorption area can be closed (to avoid ineffective negative pressure loss). For large-sized membranes, the inner, middle, and outer outer adsorption areas can be activated simultaneously to ensure that the entire edge of the large-sized membrane can be uniformly adsorbed, avoiding the problem of insufficient edge adsorption force due to the membrane being too large. This design, which allows one plate to adapt to multiple sizes, reduces the time cost of replacing the adsorption plate and improves the production line's ability to quickly switch between membranes of different specifications.

[0132] Fourth, it can form an internal and external synergistic control with the inner adsorption region 220 to optimize the overall adsorption logic. Specifically, the combination of multiple outer adsorption regions 210 and inner adsorption regions 220 can construct a more refined internal and external layer composite adsorption strategy: for example, first activate the outermost outer adsorption region to fix the outermost edge of the membrane, then activate the inner adsorption region to fix the center of the membrane, and finally activate the middle outer adsorption region to tighten the transition zone between the edge and the center. Through stepwise adsorption from the edge to the center to the transition zone, the membrane can be fully expanded from the periphery to the center, completely avoiding wrinkles caused by overall synchronous adsorption. When there is a difference in the sensitivity of the membrane to force between the edge and the center (such as the edge being afraid of tension and the center requiring strong adsorption), the suction force of a certain outer adsorption region can be adjusted separately (such as reducing the outer ring suction force and increasing the inner ring suction force), which, in conjunction with the control logic of the inner adsorption region, can achieve differentiated needs of gentle edge fixation and firm center adsorption.

[0133] In summary, this application achieves refined temporal control of the membrane edge through multi-level surround, enhances adsorption redundancy and stability through interval setting, improves the adaptability of multi-size membranes through selective activation, and finally, in conjunction with the inner adsorption region, constructs a full-dimensional adsorption control system from the edge to the center and from the outer layer to the inner layer. This not only solves the complex edge adsorption problem that cannot be covered by a single outer adsorption region, but also expands the applicable scenarios of the adsorption plate, which is conducive to improving the membrane transport quality and production efficiency.

[0134] In some embodiments of this application, the effective air outlet area of ​​the plurality of first air outlet holes 24 corresponding to the same first adsorption hole 21 in the outer adsorption region 210 of the outer ring is greater than the effective air outlet area of ​​the plurality of first air outlet holes 24 corresponding to the same first adsorption hole 21 in the outer adsorption region 210 of the inner ring.

[0135] The “effective air outlet area” here refers to the total cross-sectional area of ​​multiple first air outlets 25 connected to the same first adsorption hole 21 that can effectively participate in air exchange during actual airflow transmission.

[0136] In this application, the effective air outlet area of ​​the multiple first air outlet holes 25 connected to the same first adsorption hole 21 in the outer adsorption region 210 of the outer ring is greater than the effective air outlet area of ​​the multiple first air outlet holes 25 connected to the same first adsorption hole 21 in the inner ring. This allows the outer adsorption regions 210 of the inner and outer rings to precisely match their respective functional positioning of fixing the membrane edge and the auxiliary bonding transition area through differentiated airflow capabilities. Specific advantages are as follows: First, the large effective air outlet area of ​​the outer adsorption region 210, which connects to the same first adsorption hole 21, enhances the edge-priority fixation capability and prevents the membrane from shifting or falling off. Specifically, the outer adsorption region is the first line of defense when the membrane contacts the adsorption plate 2. The core requirement is to quickly and firmly fix the membrane edge. A larger effective air outlet area directly meets this core requirement by improving airflow capacity. First, it improves the adsorption response speed and achieves edge-priority adsorption. The larger the effective air outlet area, the greater the airflow. When the pneumatic source starts and generates negative or positive pressure, the first air outlet of the outer ring can draw in airflow more quickly, rapidly forming a strong adsorption force at the membrane edge, and completing the membrane edge fixation earlier than the inner ring. This sequential adsorption, with the outer ring adsorbing first and the inner ring adsorbing later, allows the membrane edges to be flattened first, providing a fixed reference for subsequent inner ring adsorption and preventing adsorption misalignment caused by overall membrane shift. Secondly, it enhances edge adsorption force, adapting to large / heavy membranes. For large membranes (such as large-area flexible screens) or slightly heavier membranes (such as composite material membranes), the edge requires stronger adsorption force to resist inertial forces during transport (such as centrifugal force when the adsorption plate moves). A larger effective air outlet area allows the first air outlet 25 of the outer ring to obtain greater negative pressure, forming a stronger gripping force and ensuring the membrane edge firmly adheres to the adsorption wall, preventing lifting or detachment during transport due to weak edge adsorption. Thirdly, it reduces the impact of airflow loss in the outer adsorption area 210 of the outer ring, ensuring adsorption reliability. Specifically, the outer adsorption area is close to the edge of the adsorption plate, and negative pressure leakage may occur due to uneven membrane edges or gaps between the adsorption wall and the membrane. A larger effective air outlet area can compensate for leakage loss through a larger airflow. Even if there is a small amount of leakage, it can still ensure that the membrane edge has sufficient effective suction and avoid adsorption failure due to leakage. It is especially suitable for scenarios where there are minor defects on the membrane edge in the production environment.

[0137] Secondly, the small effective air outlet area of ​​the multiple first air outlets 25 connected to the same first adsorption hole 21 in the outer adsorption region 210 can avoid excessive stretching of the transition area and prevent wrinkles from forming on the membrane. The outer adsorption region of the inner ring is located between the outer adsorption region and the inner adsorption region of the outer ring. Its core requirement is to assist in the bonding of the membrane transition area, rather than to forcefully fix it. Therefore, this core requirement can be achieved by using a smaller effective air outlet area and a gentle airflow. First, a smaller effective air outlet area can reduce the adsorption force of the outer adsorption region of the inner ring, avoiding stretching and deformation of the transition area. Specifically, the inner ring is close to the middle of the membrane, at which point the edge of the membrane has been fixed by the outer ring. If the effective air outlet area of ​​the inner ring is too large and the adsorption force is too strong, it will forcibly stretch the membrane transition area (the area between the edge and the center), causing wrinkles in the transition area due to the difference in tension between the inside and outside. A smaller effective air outlet area can reduce the airflow in the outer adsorption region of the inner ring, reduce the adsorption force, and allow the adsorption force of the outer adsorption region of the inner ring to only play an auxiliary bonding role, gradually flattening the transition area along the fixed edge of the outer adsorption region of the outer ring, avoiding excessive stretching. Secondly, it reduces the interference of airflow from the inner ring's outer adsorption area on the fixed outer ring's outer adsorption area. Specifically, an excessively large effective air outlet area means that strong airflow generated by negative or positive pressure may impact the fixed outer ring membrane through the gap between the membrane and the adsorption wall. For example, when strong airflow is drawn into the inner ring's outer adsorption area, it may cause slight local movement of the outer ring membrane, damaging the established edge fixing reference. A smaller effective air outlet area allows for a smoother airflow in the inner ring's outer adsorption area, preventing interference with the fixed outer ring membrane and ensuring the stability of the adsorption process. Thirdly, it adapts to the fragile characteristics of thin and soft membranes, preventing membrane damage. For thin and soft membranes (such as ultrathin optical membranes, biomedical membranes, etc.), the transition zone material is more fragile, and strong adsorption force can easily cause membrane tearing. The multiple first air outlets 25 connected to the same first adsorption hole 21 have a smaller effective air outlet area, forming a gentle adsorption force. This ensures the transition zone fits well while avoiding damage to the membrane structure due to excessive suction force, balancing adsorption reliability and membrane protection.

[0138] Third, the small effective exhaust area of ​​the multiple first exhaust holes 25 connected to the same first adsorption hole 21 in the outer adsorption region 210 allows for a differentiated design of inner and outer rings within the outer adsorption region 210, achieving functional synergy and optimizing the overall adsorption logic. This difference in effective exhaust area between the inner and outer rings of the multiple first exhaust holes 25 connected to the same first adsorption hole 21 in the outer adsorption region 210 is not an isolated design, but rather a combination of the multi-layered outer adsorption region structure, forming a synergistic effect of strong outer ring fixation and wrinkle-resistant inner ring. Specifically, firstly, it features dual adaptation of timing and suction power: the large effective air outlet area of ​​the outer ring supports early and strong suction, while the small effective air outlet area of ​​the inner ring supports late and gentle suction. The two work together to form a gradual adsorption from the edge to the transition zone, completely avoiding overall wrinkles caused by simultaneous adsorption of the diaphragm. Secondly, it offers efficient energy utilization: there is no need to configure the inner ring with the same airflow capacity as the outer ring. The small effective air outlet area can reduce the negative pressure loss of the inner ring (e.g., no need to excessively extract airflow), reducing the energy consumption of the pneumatic source and balancing functionality and economy. Thirdly, it offers adaptability to multiple scenarios: whether it is a large-size diaphragm (relying on the strong fixation of the outer ring), a thin and soft diaphragm (relying on the gentle adsorption of the inner ring), or a diaphragm with uneven edges (the large air outlet area of ​​the outer ring compensates for leakage), this design can improve the versatility of the adsorption plate through differentiated airflow capacity adaptation.

[0139] In summary, the essence of this design is to ensure a one-to-one correspondence between the airflow capacity and functional positioning of the outer and inner ring adsorption areas: the outer ring achieves edge-priority fixation through a large effective air outlet area, solving the problem of membrane misalignment / detachment; the inner ring achieves a smooth fit in the transition zone through a small effective air outlet area, solving the problem of wrinkles / damage. Together, they construct a reliable fixation + precise protection outer ring adsorption system, which is beneficial for improving the quality of membrane transport.

[0140] In some embodiments of this application, the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is greater than the number of first air outlet holes 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0141] In some embodiments of this application, the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is larger than the diameter of the first air outlet 24 corresponding to each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0142] In some embodiments of this application, the diameter of each first adsorption hole 21 of the outer adsorption region 210 of the outer ring is smaller than the diameter of each first adsorption hole 21 of the outer adsorption region 210 of the inner ring.

[0143] In some embodiments of this application, in two adjacent external adsorption regions 210, the centers of the three adjacent first adsorption pores 21 are not on the same straight line.

[0144] In some embodiments of this application, among the plurality of first vent holes 24 in the outermost outer adsorption region 210 that are connected to the same first adsorption hole 21, the first vent holes 24 have at least two rows and / or two columns, and the effective venting area of ​​the column / row of first vent holes 24 that is far away from the inner adsorption region 220 is greater than the effective venting area of ​​the column / row of first vent holes 24 that is close to the inner adsorption region 220.

[0145] In some embodiments of this application, among the plurality of first air outlets 24 that are connected to the same first adsorption hole 21, the centers of three adjacent first air outlets 24 are not on the same straight line.

[0146] Please see Figures 1 to 8 This application provides an adsorption plate 2, which includes an inner adsorption region 220 and an outer adsorption region 210. The outer adsorption region 210 is arranged around the inner adsorption region 220. The inner adsorption region 220 has multiple adsorption partitions 221, and the multiple adsorption partitions 221 can be controlled independently.

[0147] This application achieves sequential adsorption of different areas of the membrane to be transferred onto the adsorption wall by circumferentially arranging the outer adsorption area around the inner adsorption area. This utilizes the time difference in suction generated by the inner and outer adsorption areas to provide adjustment space for the membrane, avoiding the quality problem of wrinkles caused by the entire membrane being simultaneously adsorbed onto the adsorption wall. This reduces rework and maintenance steps, improves product consistency, and increases production efficiency. Furthermore, by dividing the inner adsorption area into multiple adsorption zones and independently controlling the suction of the second adsorption pores within each zone, this application achieves precise and differentiated control. This fundamentally solves the core pain point of membrane wrinkling during peeling and transfer, improving product quality and production efficiency, while also giving the adsorption mechanism advantages such as adaptability to multiple scenarios, fault resistance, and ease of maintenance.

[0148] This application also provides a fixing mechanism, including: the adsorption plate 2 as described above.

[0149] In some embodiments of this application, the fixing mechanism includes a pneumatic source 1, which is located on the adsorption plate 2; the pneumatic source 1 is connected to the first adsorption hole 21 of the outer adsorption region 210; and / or the pneumatic source 1 is connected to the second adsorption hole 22 of the adsorption partition 221; and / or the pneumatic source 1 is connected to the third adsorption hole 23 of the segment 230.

[0150] In some embodiments of this application, the fixing mechanism further includes a plurality of control valves (not shown in the figure); the control valves are connected to the first adsorption hole 21; and / or the control valves are one-to-one corresponding to and connected to the second adsorption hole 22; and / or the control valves are connected to the third adsorption hole 23; wherein, the control valves are used to control the adsorption of the pneumatic source 1 on the first adsorption hole 21 and / or the second adsorption hole 22 and / or the third adsorption hole 23.

[0151] According to another aspect of this application, a diaphragm transfer device is proposed, which includes the fixing mechanism of any of the above embodiments.

[0152] The diaphragm transfer device also includes a drive component for moving the fixing mechanism, such as a linear drive motor or a transmission component.

[0153] Compared with the prior art, the adsorption structure of this application is more refined, which can solve the problem of wrinkles between the various parts of the membrane to be transferred without increasing the manufacturing cost.

[0154] Furthermore, it avoids rework and maintenance caused by an increase in defective products, thus improving production efficiency. On the other hand, the automated, fixed structure improves product consistency.

[0155] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0156] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0157] The above are merely preferred embodiments of this application, intended only to aid in understanding the technical solutions and core ideas of this application, and are not intended to limit this application in any way. Those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions in the embodiments of this application.

Claims

1. An adsorption plate, characterized in that, include: Internal adsorption region; and An outer adsorption region is formed around the inner adsorption region; The internal adsorption region has multiple adsorption zones, and each of the multiple adsorption zones can be controlled independently.

2. The adsorption plate as described in claim 1, characterized in that, The external adsorption region has a plurality of spaced-apart first adsorption pores; and / or The internal adsorption region has a plurality of spaced-apart second adsorption pores; and / or The adsorption plate further includes a segment, which is located between two adjacent adsorption zones; each segment includes a plurality of third adsorption holes, which are spaced apart.

3. The adsorption plate as described in claim 2, characterized in that, In two adjacent external adsorption regions, the centers of the three first adsorption pores adjacent to each other are not on the same straight line; and / or In each of the adsorption zones, the centers of any three adjacent second adsorption pores are not on the same straight line; and / or In the segmented section, the centers of the three adjacent third adsorption pores are not on the same straight line.

4. The adsorption plate as described in claim 2, characterized in that, The adsorption plate also includes a plurality of air channels, and each adsorption partition corresponds to at least one air channel. In each adsorption partition, the air channel is connected to a plurality of second adsorption holes.

5. The adsorption plate as described in claim 4, characterized in that, One of the adsorption zones corresponds to multiple air channels. In each adsorption zone, multiple air channels are distributed at intervals, and one air channel corresponds to multiple second adsorption pores.

6. The adsorption plate as described in claim 5, characterized in that, Multiple arrays of the second adsorption pores are distributed, and one of the air passages is connected to a column or row of the second adsorption pores; and / or One of the air passages is in communication with at least two columns or at least two rows of the second adsorption pores.

7. The adsorption plate according to any one of claims 1-6, characterized in that, The adsorption plate also includes positioning identification holes, and each adsorption partition has at least one positioning identification hole.

8. The adsorption plate according to any one of claims 2-6, characterized in that, The adsorption plate further has a first air outlet, one first adsorption hole corresponding to and connected to a plurality of first air outlets, and the plurality of first air outlets corresponding to and connected to the same first adsorption hole are arranged at intervals; and / or The adsorption plate also has a plurality of second air outlet holes, one second adsorption hole being connected to a plurality of second air outlet holes, and the plurality of second air outlet holes corresponding to the same second adsorption hole being arranged at intervals.

9. The adsorption plate as described in claim 8, characterized in that, Multiple second air outlets, which are connected to the same second adsorption pore, are evenly spaced.

10. The adsorption plate according to any one of claims 2-6, characterized in that, The adsorption plate also has a plurality of third air outlets, one of the third adsorption holes being connected to a plurality of the third air outlets, and the plurality of the third air outlets corresponding to the same third adsorption hole being arranged at intervals.

11. The adsorption plate as described in claim 10, characterized in that, Multiple third air outlet holes, which are connected to the same third adsorption hole, are evenly spaced.

12. The adsorption plate as described in claim 2, characterized in that, The diameter of the third adsorption pore is smaller than the diameter of the second adsorption pore; and / or The diameter of the first adsorption pore is smaller than that of the second adsorption pore.

13. The adsorption plate as described in claim 2, characterized in that, The multiple segments are arranged to intersect each other, so as to uniformly divide the inner adsorption region into multiple adsorption zones.

14. The adsorption plate as described in claim 13, characterized in that, The multiple segments are arranged orthogonally in pairs.

15. The adsorption plate as described in claim 2, characterized in that, One of the segmented segments is arranged around another segmented segment, and the adsorption partition is located between two adjacent segmented segments; or The multiple segments extend in parallel directions and are spaced apart from each other, with the adsorption partition located between two adjacent segments.

16. The adsorption plate as described in claim 8, characterized in that, The number of external adsorption regions is multiple, with one external adsorption region surrounding another external adsorption region, and adjacent external adsorption regions are spaced apart.

17. The adsorption plate as described in claim 16, characterized in that, The effective air outlet area of ​​the plurality of first air outlet holes corresponding to the same first adsorption hole in the outer adsorption region of the outer ring is greater than the effective air outlet area of ​​the plurality of first air outlet holes corresponding to the same first adsorption hole in the outer adsorption region of the inner ring.

18. The adsorption plate as described in claim 17, characterized in that, The number of first air outlet holes corresponding to each first adsorption hole in the outer adsorption region of the outer ring is greater than the number of first air outlet holes corresponding to each first adsorption hole in the outer adsorption region of the inner ring; and / or The diameter of the first air outlet corresponding to each of the first adsorption holes in the outer adsorption region of the outer ring is larger than the diameter of the first air outlet corresponding to each of the first adsorption holes in the outer adsorption region of the inner ring.

19. The adsorption plate as described in claim 16, characterized in that, The diameter of each of the first adsorption pores in the outer adsorption region of the outer ring is smaller than the diameter of each of the first adsorption pores in the outer adsorption region of the inner ring.

20. The adsorption plate as described in claim 16, characterized in that, In the outermost outer adsorption region, among the plurality of first vent holes corresponding to and connected to the same first adsorption pore, the first vent holes have at least two rows and / or two columns, and the effective venting area of ​​the first vent holes in the column / row farther away from the inner adsorption region is greater than the effective venting area of ​​the first vent holes in the column / row closer to the inner adsorption region.

21. The adsorption plate as described in claim 16, characterized in that, In the outer adsorption region of the inner ring, among the multiple first air outlets that are connected to the same first adsorption hole, the centers of three adjacent first air outlets are not on the same straight line.

22. A fixing mechanism, characterized in that, include: The adsorption plate as described in any one of claims 1-21.

23. The fixing mechanism as described in claim 22, characterized in that, The fixing mechanism includes a pneumatic source, which is located on the adsorption plate; The pneumatic source is connected to the first adsorption pore of the external adsorption region; and / or The pneumatic source is connected to the second adsorption pore of the adsorption zone; and / or The pneumatic source is connected to the third adsorption hole of the segment.

24. The fixing mechanism as described in claim 23, characterized in that, The fixing mechanism also includes multiple control valves; The control valve is connected to the first adsorption orifice; and / or The control valve corresponds one-to-one with and is connected to the second adsorption orifice; and / or The control valve is connected to the third adsorption hole; The control valve is used to control the pneumatic source to adsorb the first adsorption hole and / or the second adsorption hole and / or the third adsorption hole.

25. A diaphragm transfer device, characterized in that, include: The fixing mechanism as described in any one of claims 22 to 24.

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