Cleaning device and cleaning method for automatic carrier in overhead transportation system

Abstract

The invention discloses a cleaning device and a cleaning method of an automatic carrying trolley in an overhead transportation system, which are applied to the field of semiconductors, and the cleaning device of the automatic carrying trolley is arranged at a rail in the overhead transportation system and comprises a cleaning device shell and a dust collection box, the cleaning device shell and the dust collection box jointly form a cleaning cavity isolated from the outside. An opening for the automatic carrier to enter and exit is formed in the surface of the cleaning device shell; the track corresponds to the opening, so that the automatic carrying trolley enters or breaks away from the cleaning cavity through the opening; a plurality of air injection parts and / or a plurality of air suction parts are / is arranged in the cleaning cavity and used for removing particles on the surface of the automatic carrying trolley. According to the invention, the cleaning device is arranged at the rail in the overhead transportation system, particle cleaning can be carried out without putting the automatic carrying trolley off the line, the online time of the automatic carrying trolley system is improved, and meanwhile, the particles are removed through the air injection part and / or the air suction part, so that the cleaning efficiency of the automatic carrying trolley is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and in particular to a cleaning device and method for an automated guided vehicle (AGV) in an overhead transport system. Background Technology

[0002] In daily operation, existing OHT (Overhead Transport System) systems typically use rubber wheels. Friction between these wheels and the tracks generates a certain amount of particles, which settle on the automated guided vehicles (AGVs). If not cleaned promptly, these particles float in the air as the AVTs move, impacting the cleanliness of the wafer fabrication plant. The current solution involves periodically taking the OHT system offline, manually removing the AVTs from the workstation, and placing them on fixtures for manual cleaning. Each AVT cleaning takes approximately two hours to maintain the cleanliness of the wafer fabrication plant. However, this current method of cleaning the AVTs reduces the automation level of the OHT system, decreases its online time, increases wafer transport time, and consequently affects wafer delivery efficiency.

[0003] Therefore, how to provide a cleaning device that can improve the cleaning efficiency of automated guided vehicles (AGVs) in OHT systems and increase the online time of OHT systems while ensuring cleaning effectiveness is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a cleaning device and cleaning method for an automated guided vehicle (AGV) in an overhead transport system, which solves the problem that cleaning the AVT in the prior art reduces the automation level of the OHT system, reduces the online time of the OHT system, and leads to an increase in wafer transport time, thereby affecting the wafer transport efficiency.

[0005] To solve the above-mentioned technical problems, the present invention provides a cleaning device for an automated guided vehicle (AGV) in a top-mounted transport system. The cleaning device for the AAV is installed at the track in the top-mounted transport system and includes:

[0006] The cleaning device housing and the dust collection box together form a cleaning chamber isolated from the outside.

[0007] The surface of the cleaning device housing is formed with an opening for the automated guided vehicle to enter and exit; the track is arranged correspondingly to the opening so that the automated guided vehicle can enter or leave the cleaning chamber through the opening.

[0008] The cleaning chamber is equipped with several air jets and / or several air suction units for removing particles from the surface of the automated guided vehicle.

[0009] Optionally, the jet unit includes jet holes disposed on the inner surface of the cleaning device, and jet pipes connected to the jet holes; the jet pipes are located outside the cleaning device.

[0010] The suction unit includes a suction hole disposed on the inner surface of the cleaning device, and a suction pipe connected to the suction hole; the suction pipe is located outside the cleaning device.

[0011] Optionally, the opening includes an inlet for the automated guided vehicle to enter the cleaning chamber and an outlet for the automated guided vehicle to exit the cleaning chamber;

[0012] If the inlet is provided on one of the two opposite side surfaces of the cleaning device housing, then the outlet is provided on the other side surface.

[0013] In addition to the side surface with the inlet and the side surface with the outlet, each of the remaining side surfaces of the cleaning device housing has both an air jet hole and an air intake hole on its inner surface.

[0014] Optionally, in addition to the side surface with the inlet and the side surface with the outlet, the inner surface of each of the remaining side surfaces of the cleaning device housing is provided with multiple rows of air jet holes and multiple rows of air suction holes.

[0015] The multiple rows of jet holes and the multiple rows of air intake holes are arranged at intervals.

[0016] Optionally, the dust collection box is disposed at the bottom of the cleaning device;

[0017] The dust collection box has only an air intake hole on its top surface near the cleaning chamber, and the cleaning device housing has only an air jet hole on its top surface near the cleaning chamber.

[0018] Optionally, a position monitoring component may also be included to determine whether the automated guided vehicle has entered the cleaning chamber.

[0019] Optionally, a particle count monitoring component is also included to monitor the particle concentration in the cleaning chamber, so as to confirm that cleaning is completed when the particle concentration in the cleaning chamber is less than a preset threshold.

[0020] Optionally, the dust collection box is disposed at the bottom of the cleaning device;

[0021] The cleaning device housing has a notch at the bottom for detachable connection with the dust collection box.

[0022] The present invention also provides a cleaning method for an automated guided vehicle (AGV) in a top-mounted transport system, and a cleaning device for the AGV in the above-mentioned top-mounted transport system, comprising:

[0023] Obtain a cleaning start command, the cleaning start command indicating that the automated guided vehicle enters the cleaning chamber;

[0024] According to the cleaning start command, a plurality of jet nozzles and / or a plurality of suction nozzles provided in the cleaning chamber are activated to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0025] Obtain a cleaning end command, the cleaning end command indicating that the removal of particles from the surface of the automated guided vehicle is complete;

[0026] The cleaning end command is used to shut down the plurality of jet units and / or the plurality of suction units, and to detach the automated guided vehicle from the cleaning chamber.

[0027] Optionally, the jetting section includes jet holes disposed on the inner surface of the cleaning device, and the suction section includes suction holes disposed on the inner surface of the cleaning device; in addition to the side surface where the inlet is disposed and the side surface where the outlet is disposed, each of the remaining side surfaces of the cleaning device housing has multiple rows of jet holes and multiple rows of suction holes disposed on its corresponding inner surface, and the multiple rows of jet holes and multiple rows of suction holes are arranged at intervals; the dust collection box is disposed at the bottom of the cleaning device, and the top surface of the dust collection box near the cleaning chamber has only suction holes, and the top surface of the cleaning device housing near the cleaning chamber has only jet holes;

[0028] The step of activating several jet nozzles and / or several suction nozzles installed in the cleaning chamber according to the cleaning start command, in order to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box, includes:

[0029] When the air jet on the first side surface is opened, the air jet on the second side surface is closed, and the air intake on the second side surface and the air intake on the top of the dust collection box near the surface of the cleaning chamber are opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box; the first side surface and the second side surface are two opposite side surfaces in the housing of the cleaning device;

[0030] When the jet hole on the second side surface is opened, the jet hole on the first side surface is closed, and the suction hole on the first side surface and the suction hole on the top of the dust collection box near the surface of the cleaning chamber are opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0031] When the air jet hole on the top of the cleaning device housing near the surface of the cleaning chamber is opened, the air intake hole on the first side surface, the air intake hole on the second side surface, and the air intake hole on the top of the dust collection box near the surface of the cleaning chamber are also opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0032] As can be seen, the cleaning device for the automated guided vehicle (AGV) in the overhead transport system provided by this invention is installed at the track of the overhead transport system. It includes a cleaning device housing and a dust collection box, which together form a cleaning chamber isolated from the outside. The surface of the cleaning device housing has an opening for the AVT to enter and exit. The track is correspondingly arranged with the opening, allowing the AVT to enter or exit the cleaning chamber through the opening. The cleaning chamber is equipped with several air jets and / or several suction units for removing particles from the surface of the AVT. By installing this cleaning device at the track of the overhead transport system, this invention eliminates the need to manually remove the AVT from the workstation. The AVT can enter the cleaning chamber of the cleaning device while still on the track for particle cleaning, thus improving the online time of the OHT system compared to existing cleaning methods. Furthermore, the opening on the surface of the cleaning device housing and the several air jets and / or suction units in the cleaning chamber to remove and collect particles into the dust collection box enhance the automation level of the OHT system, improving both cleaning effectiveness and the cleaning efficiency of the AVT in the OHT system.

[0033] In addition, the present invention also provides a cleaning method for an automated guided vehicle in a top-mounted transport system, which also has the above-mentioned beneficial effects. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a cleaning device for an automated guided vehicle in a top-mounted transport system, provided by an embodiment of the present invention.

[0036] Figure 2 This is a structural schematic diagram of the installation position of a cleaning device provided in an embodiment of the present invention;

[0037] Figure 3 A schematic diagram of the structure of a cleaning device for an automated guided vehicle in another overhead transport system provided in an embodiment of the present invention;

[0038] Figure 4 A flowchart illustrating a cleaning method for an automated guided vehicle (AGV) in a top-mounted transport system, provided by an embodiment of the present invention;

[0039] The attached figures are labeled as follows:

[0040] 1-Cleaning device, 10-Railway, 20-Cleaning device housing, 30-Dust collection box, 40-Cleaning chamber, 50-Automatic transport vehicle, 61-Air jet, 611-Air jet hole, 62-Suction unit, 621-Suction hole. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] Example 1:

[0043] Please refer to Figure 1 , Figure 1 This is a schematic diagram of a cleaning device for an automated guided vehicle (AGV) in a top-mounted transport system, provided by an embodiment of the present invention. The cleaning device 1 is installed at the track 10 of the top-mounted transport system and may include:

[0044] The cleaning device housing 20 and the dust collection box 30 together form a cleaning chamber 40 that is isolated from the outside.

[0045] The surface of the cleaning device housing 20 has an opening for the automatic transport vehicle 50 to enter and exit; the track 10 is provided corresponding to the opening so that the automatic transport vehicle 50 can enter or leave the cleaning chamber 40 through the opening.

[0046] The cleaning chamber 40 is provided with a number of air jets 61 and / or a number of air suction units 62 for removing particles from the surface of the automated guided vehicle 50.

[0047] In this embodiment, the automated guided vehicle 50 refers to an unmanned transport vehicle running on the overhead track 10. It primarily aims to improve the OHT system in the semiconductor field, optimizing the cleaning solution for the automated guided vehicle 50 (AGV) responsible for transporting wafers in the OHT system. However, the actual application of this solution is not limited to this. In this embodiment, the cleaning device 1 is installed on the track 10 of the overhead transport system, which can be referenced... Figure 2 , Figure 2This is a structural schematic diagram of the installation position of a cleaning device provided in an embodiment of the present invention. This embodiment does not limit the location of the cleaning device 1 on the track 10, but rather whether it is the original track 10 in the overhead transport system, or a branch track added on the basis of the original track 10 in the overhead transport system for the purpose of installing the cleaning device 1. In this embodiment, the cleaning device 1 can be installed on the existing track 10 of the overhead transport system. To minimize changes to the overhead transport system, the track 10 can be configured to enter and pass through the cleaning device 1 from one side and exit from the other side. By providing corresponding openings in the cleaning device 1, the normal operation of the original overhead transport system can be ensured. In addition, to ensure the airtightness of the cleaning device 1 and to avoid affecting the original operating efficiency of the overhead transport system due to the addition of the cleaning device 1, the cleaning device 1 can be installed on an additional branch track. When the automated guided vehicle 50 needs cleaning, it selects to enter the additional branch track at the branch intersection and enters the cleaning device 1 for cleaning. After cleaning, the automated guided vehicle 50 returns to the original track 10 of the overhead transport system from the branch track for normal operation, which helps to improve efficiency. Regardless of which method is used, compared to the existing method of manually cleaning the automated guided vehicle (AGV) 50 after it is taken off the production line when it needs cleaning, both methods save processing time, including time spent on the cleaning process itself and time spent on disassembling and installing the AAV 50. Furthermore, in this embodiment, guide rails or calibration mechanisms can be correspondingly provided at the opening of the cleaning device housing 20 to ensure that the AAV 50 can accurately enter the cleaning station without complex adjustments.

[0048] In this embodiment, the cleaning chamber 40 is composed of the cleaning device housing 20 and the dust collection box 30. The specific installation method of the cleaning device housing 20 and the dust collection box 30 is not limited. For example, the cleaning device housing 20 can be configured as a structure with an internal sealed space, meaning the cleaning device housing 20 itself forms a sealed space isolated from the outside, and the dust collection box 30 is placed inside the cleaning device housing 20, with the remaining sealed space serving as the cleaning chamber 40; alternatively, the dust collection box 30 itself can be configured as part of the outer shell of the cleaning device 1, forming a sealed space together with the cleaning device housing 20 as the cleaning chamber 40. It should be noted that in this embodiment, neither the cleaning device housing 20 nor the dust collection box 30 can guarantee a complete seal. The opening in the cleaning device housing 20 further challenges the structural sealing. This embodiment emphasizes the sealing space to isolate the cleaning chamber 40 from the outside, preventing particles removed during cleaning of the automated guided vehicle 50 from spreading outside the cleaning chamber 40, thus avoiding cleaning failure or limited effectiveness. Therefore, the sealing effect of the cleaning chamber 40 only needs to ensure that particles do not leak. In this embodiment, a detachable baffle can be provided corresponding to the opening in the cleaning device housing 20. This baffle opens when the automated guided vehicle 50, which needs to enter the cleaning chamber 40, arrives at the cleaning device 1, and remains closed under normal conditions. Alternatively, an openable door component can be provided, which can be an automatic door that opens when the automated guided vehicle 50 is detected approaching and closes when the automated guided vehicle 50 is not detected. Furthermore, this embodiment can additionally add a sealing strip to the cleaning device 1, particularly at the opening in the cleaning device housing 20. Alternatively, this embodiment can also provide an air curtain mechanism corresponding to the opening in the cleaning device housing 20 to enhance the isolation effect of the cleaning device 1. In addition, in this embodiment, the dust collection box 30 can be located at the bottom of the cleaning chamber 40, or in a lower area of ​​the cleaning chamber 40, to collect particles by gravity. The dust collection box 30 can be configured as a pull-out drawer-type structure, connected to the cleaning device housing 20 via guide rails. When the dust collection box 30 is full, the operator can pull it out for cleaning or replacement, after which it can be reused, simplifying maintenance. The dust collection box 30 itself can form part of the outer shell of the cleaning chamber 40 and is equipped with a filter, such as a HEPA filter, to prevent particles from flying away during extraction. The inner wall of the cleaning device housing 20 can be configured as a smooth, easy-to-clean structure, made of materials such as stainless steel or anodized aluminum, to ensure that the cleaning device housing 20 does not become a new source of contamination.

[0049] In this embodiment, the number of openings on the surface of the cleaning device housing 20 is not limited. To improve the sealing performance of the cleaning device 1, only one opening may be provided on the surface of the cleaning device housing 20. In this case, the automatic transport vehicle 50 can enter and exit the cleaning device 1 through this single opening. Alternatively, two openings may be provided on the surface of the cleaning device housing 20. In this case, the automatic transport vehicle 50 can enter the cleaning device 1 from one of the two openings and exit the cleaning device 1 from the other of the two openings. That is, the cleaning device housing 20 is similar to a tunnel structure. Alternatively, more openings may be provided on the surface of the cleaning device housing 20. In this case, the opening activation strategy can be set by the operator based on actual needs. In this embodiment, the track 10 is configured to correspond to the opening. That is, the track 10 can extend into the interior from the opening on one side of the cleaning device 1 and can further penetrate the cleaning chamber 40, exiting from the opening on the other side of the cleaning device 1. Since the track 10 enters the interior of the cleaning device 1, the cleaning device housing 20 is provided with a notch that matches the longitudinal section of the track 10, so that the track 10 is configured to correspond to the notch, ensuring the sealing of the cleaning chamber 40. Alternatively, the track 10 can also be connected to the edge of the opening in the cleaning device housing 20, and the automatic transport vehicle 50 can pass smoothly between the track 10 and the cleaning chamber 40 of the cleaning device 1. In this case, since the track 10 does not enter the interior of the cleaning chamber 40, the sealing of the cleaning chamber 40 can be ensured, while reducing the complexity of the overall device.

[0050] In this embodiment, the core components of the cleaning device 1, besides the formed cleaning chamber 40, are the air jet 61 and / or suction 62 disposed within the cleaning chamber 40. Preferably, the cleaning chamber 40 includes both a plurality of air jet 61 and a plurality of suction 62 to improve the removal effect on the surface of the automated guided vehicle 50. In this embodiment, the air jet 61 and suction 62 can be arranged alternately. The function of the air jet 61 is to blow up the particles, while the function of the suction 62 is to collect the blown particles and guide them into the dust collection box 30. In this embodiment, all the suction 62 and all the air jet 61 do not necessarily work simultaneously; they can work alternately by area and time sequence according to a preset program to avoid airflow turbulence and improve cleaning efficiency. In this embodiment, the specific shape of the cleaning device housing 20 is not limited. For example, the cleaning device housing 20 can be made into a square, prism, or other shapes.

[0051] Furthermore, in order to avoid the jet section 61 or the suction section 62 occupying too much space in the cleaning chamber 40, the jet section 61 may be provided with a jet hole 611 provided on the inner surface of the cleaning device 1, and a jet pipe connected to the jet hole 611; the jet pipe is located outside the cleaning device 1.

[0052] The suction unit 62 includes a suction hole 621 disposed on the inner surface of the cleaning device 1, and a suction pipe connected to the suction hole 621; the suction pipe is located outside the cleaning device 1.

[0053] In this embodiment, only the jet nozzle 611 in the jet section 61 and the suction nozzle 621 in the suction section 62 are located on the inner surface of the cleaning device 1. The suction pipe in the suction section 62, the jet pipe in the jet section 61, and other components such as air sources and negative pressure sources are all located outside the cleaning device 1. By isolating the main pipelines from the highly polluted environment of the cleaning chamber 40, high concentrations of particulate matter are prevented from entering and clogging the main pipelines, thus protecting the critical air system and extending the service life of the equipment. In this embodiment, maintenance work inside the cleaning chamber 40 mainly focuses on replacing the dust collection box 30 and cleaning the inner wall. Maintenance of the external main pipelines does not require entering or opening the cleaning chamber 40.

[0054] In this embodiment, the wall panel of the cleaning device housing 20 has a through opening. The aforementioned air jet port 611 or air intake port 621 passes through the wall panel of the cleaning device housing 20 via a short connecting nozzle or through a short channel pre-embedded inside the cleaning device 1, and is connected to the air jet pipe or air intake pipe located outside the cleaning device housing 20, realizing a modular and detachable connection between the internal air vents and the external pipeline. The air jet pipe located outside the cleaning device 1 can ultimately be connected to the factory's centralized air supply system or an air compressor unit specifically configured for the cleaning device 1. Correspondingly, the air intake pipe located outside the cleaning device 1 can ultimately be connected to a central dust collection system or a vacuum fan and filter unit specifically configured for the cleaning device 1.

[0055] This embodiment ensures sufficient size for the cleaning chamber 40 while avoiding an excessively large overall size of the cleaning device housing 20 that would occupy too much space. It achieves a balance between efficient cleaning and system reliability, significantly reducing the complexity and workload of daily maintenance. This embodiment does not limit the specific shapes of the air jet 611 and air intake 621. For example, the air jet 611 and air intake 621 can be circular, elliptical, slit-shaped, or other shaped openings. Preferably, the air jet 611 can be a nozzle structure to converge airflow, improving purging pressure and accuracy. The air intake 621 can be a trumpet-shaped or other gradually expanding guide port to increase the suction area and reduce airflow resistance. The layout area of ​​the air jet 611 and air intake 621 in this embodiment can be specifically designed according to the outline of the automated guided vehicle 50 and common contaminated areas. For example, the air jet 611 and air intake 621 can be densely arranged at positions corresponding to the running wheels, sides, and top of the automated guided vehicle 50, specifically in a matrix, staggered, or specific pattern arrangement.

[0056] Furthermore, in order to improve the effective utilization rate of the air jet vent 611 and the air suction vent 621, the dust collection box 30 can be set at the bottom of the cleaning device 1.

[0057] The top of the dust collection box 30, near the surface of the cleaning chamber 40, is provided with only an air intake 621, and the top of the cleaning device housing 20, near the surface of the cleaning chamber 40, is provided with only an air jet 611.

[0058] In this embodiment, the dust collection box 30 is located at the bottom of the cleaning device 1. The particles, detached from the automatic transport vehicle 50, fall into the dust collection box 30 due to gravity. If an air jet vent 611 is located on the top of the dust collection box 30 near the surface of the cleaning chamber 40, it will prevent particles from falling into the dust collection box 30. Similarly, if an air suction vent 621 is located on the top of the cleaning device housing 20 near the surface of the cleaning chamber 40, it will also prevent particles from falling into the dust collection box 30. To improve cleaning efficiency, this embodiment only provides an air intake vent 621 on the top surface of the dust collection box 30 facing the cleaning chamber 40, and only provides an air jet vent 611 on the top surface of the cleaning device housing 20 facing the cleaning chamber 40. This ensures that both the air jet vent 611 and the air intake vent 621 promote particle falling into the dust collection box 30, improving the cleaning effect on the automated guided vehicle 50. Simultaneously, it avoids leaving the air vents idle, increasing the effective utilization rate of the air jet vent 611 and the air intake vent 621. As can be clearly seen from the above description, by adjusting the placement of the air jet vent 611 and the air intake vent 621 in the cleaning chamber 40, a cleaning airflow is formed throughout the entire cleaning chamber 40. The ultimate goal of this cleaning airflow is to guide all agitated particles downwards to the dust collection box 30 at the bottom. Therefore, the blowing and suction operations located on the side walls, top, and bottom of the cleaning device 1 are all aimed at guiding the particles to the bottom.

[0059] In this embodiment, an air intake vent 621 is provided on the top of the dust collection box 30 near the surface of the cleaning chamber 40. At this time, the top of the dust collection box 30 also serves as the bottom of the cleaning chamber 40. The dust collection box 30 is no longer a passive collection container, but a functional component actively involved in the cleaning process; its top plate is actually a panel component with negative pressure adsorption function. The top of the dust collection box 30 can be a perforated plate or a panel with evenly distributed grid-like air intake vents 621. These vents are directly connected to the internal cavity of the dust collection box 30. When the negative pressure adsorption system outside the dust collection box 30 is working, a negative pressure is generated inside the dust collection box 30 to adsorb particulate matter in the cleaning chamber 40. Furthermore, the above structure forms a large-area, uniformly pressured negative pressure zone at the bottom of the cleaning chamber 40, which can efficiently capture particulate matter that settles due to the air intake vents 611 in the cleaning chamber 40 and its own weight, preventing secondary re-entrainment and improving the particulate matter collection efficiency. In this embodiment, by setting a structure that combines top-only air jetting and bottom-only air suction, a vertical airflow field is created in the cleaning chamber 40, driving the particles downward and avoiding the retention of particles due to the formation of a disordered air field in the chamber, thereby improving the cleaning efficiency and reliability of the particles.

[0060] Furthermore, in order to improve the automation level of the cleaning device 1, the cleaning device 1 may also include a position monitoring component for determining whether the automated guided vehicle 50 has entered the cleaning chamber 40.

[0061] This embodiment uses a position monitoring component to monitor the automated guided vehicle 50. By setting this position monitoring component, it can automatically acquire information about the automated guided vehicle 50 entering the cleaning chamber 40, and use this information to determine whether to initiate the cleaning operation for the automated guided vehicle 50. That is, the position monitoring component can be used to trigger the start of subsequent cleaning processes. This embodiment does not limit the specific structure of the position monitoring component, as long as it can promptly acquire information about the automated guided vehicle 50 reaching the designated position when it enters the cleaning chamber 40. Specifically, it can be set to acquire information about the automated guided vehicle 50 reaching the designated position when it enters the cleaning chamber 40 and reaches the cleaning station. For example, the position monitoring component can be configured as a positioning sensor, and the positioning sensor can be installed in the automated guided vehicle 50; or the position monitoring component can be configured as a camera component and an identification system that is communicatively connected to the camera component, and the camera component can be installed in the automated guided vehicle 50 or in the cleaning chamber 40; or the position monitoring component can also be configured as a photoelectric sensor, and the photoelectric sensor can be installed in the cleaning chamber 40 or at the entrance of the cleaning chamber 40, with a transmitter and a receiver, so that after the automated guided vehicle 50 reaches the designated position, the beam emitted by the transmitter is blocked, and the receiver determines that the automated guided vehicle 50 has reached the designated position.

[0062] In this embodiment, determining that the automated guided vehicle 50 has entered the cleaning chamber 40 specifically means that the entire body of the automated guided vehicle 50 has entered the cleaning chamber 40. Specifically, this embodiment may include a position monitoring component to detect whether the automated guided vehicle 50 has accurately stopped at the cleaning station within the cleaning chamber 40. This cleaning station ensures that the vehicle body of the automated guided vehicle 50 is in the optimal relative position with the surrounding air jets 611 and suction ports 621 to achieve the best cleaning effect. Therefore, monitoring the automated guided vehicle 50's arrival at the cleaning station is more critical and accurate than monitoring its entry into the cleaning chamber 40. In this embodiment, the position monitoring component can also be used for interlocking control. For example, once an automated guided vehicle 50 enters a cleaning station within the cleaning chamber 40, the system marks the cleaning station as "occupied" to prevent other automated guided vehicles 50 from entering, ensuring safety.

[0063] Furthermore, in order to improve the automation level of the device and enable the cleaning process to be automatically shut down, the cleaning device 1 mentioned above can be set up and may also include a particle count monitoring component for monitoring the particle concentration in the cleaning chamber 40, so as to confirm that the cleaning is completed when the particle concentration in the cleaning chamber 40 is less than a preset threshold.

[0064] In this embodiment, the particle count monitoring component is essentially a particulate sensor or dust particle counter used to monitor the concentration of particles in the cleaning chamber 40. Specifically, it monitors the concentration of particles that are blown up and suspended in the cleaning chamber 40 by the airflow during the cleaning process. In this embodiment, the sampling port of the particle count monitoring component is positioned to accurately reflect the overall particle concentration within the cleaning chamber 40. A preferred installation location is in the middle of the side wall of the cleaning chamber 40 or near the suction port 621, but it must avoid interference from direct airflow at the jet port 611 to ensure representative sampling. Furthermore, one or more of the aforementioned particle count monitoring components can be used. In this embodiment, the preset threshold can be a threshold pre-set by the operator in the control system based on cleaning standards and requirements. This threshold is typically determined based on the cleanliness level standards of the semiconductor industry or the specific requirements of the factory for the automated guided vehicle 50 after cleaning. For example, it can be set to confirm cleaning completion when the concentration of particles ≥0.5μm is below 100 particles / cubic meter for 10 consecutive seconds. This application further allows for a setting where the particle concentration within the cleaning chamber 40 is below a preset threshold for a specified duration before confirming cleaning completion. This component can determine whether cleaning of the automated guided vehicle 50 is complete based on objective data, completely replacing the subjective and unreliable method of traditional manual observation. The aforementioned particle count monitoring component can be connected to the main control system. When the particle concentration data monitored in real time by the particle count monitoring component is consistently below the preset threshold, it will send a "cleaning achieved" signal to the main control system. Upon receiving the "cleaning achieved" signal, the main control system can perform the following operations: ① immediately terminate the running automatic cleaning program (stop air jetting and suction); ② confirm cleaning completion via indicator lights or system logs; ③ release the occupancy of the cleaning station, allowing the automated guided vehicle 50 to leave the cleaning chamber 40 and automatically resume operation, while simultaneously allowing the next automated guided vehicle 50 to enter. In this embodiment, the particle count monitoring component ensures that the cleaning effect of each automated guided vehicle 50 reaches a quantifiable and uniform high standard, fundamentally guaranteeing the cleanliness of the factory workshop environment. This avoids the problems of over-cleaning (the cleaning time is up, but the area is already clean, wasting resources and time) or under-cleaning (the cleaning time is up, but the area is not clean enough). On-demand cleaning is achieved, optimizing cleaning time while ensuring quality, further improving the utilization rate of the automated guided vehicle 50, and enhancing the automation level of the cleaning device 1.

[0065] Furthermore, in order to improve the replacement and cleaning speed of the dust collection box 30 and simplify daily maintenance, the dust collection box 30 can be set at the bottom of the cleaning device 1;

[0066] The cleaning device housing 20 has a notch formed at the bottom for detachable connection with the dust collection box 30.

[0067] In this embodiment, the dust collection box 30 is positioned at the bottom of the cleaning device 1, facilitating easy pulling, disassembly, and installation. Its location conforms to the natural posture of the human body, making replacement easier for maintenance personnel. Furthermore, since particulate matter naturally settles under gravity, the bottom is the final collection point. Placing the dust collection box 30 at the bottom of the cleaning device 1 is the most efficient collection method. Combined with the detachable design, this achieves spatial unity between collection and cleaning functions. The notch at the bottom of the cleaning device housing 20 is a structural mounting opening. The shape and size of this mounting opening match the external contour of the dust collection box 30, ensuring that the dust collection box 30 can be precisely inserted into the notch. This embodiment does not limit the specific method of detachable connection between the dust collection box 30 and the notch. For example, a guide rail pull-out connection can be used, specifically by setting guide rails or slide rails on both sides or the bottom of the notch, and correspondingly by setting grooves or pulleys on both sides or the bottom of the dust collection box 30. The dust collection box 30 is precisely pushed into the notch via the guide rails or slide rails until it reaches the working position. Furthermore, a sealing strip, such as a rubber sealing strip or a brush sealing strip, can be provided around the perimeter where the dust collection box 30 contacts the notch. When the dust collection box 30 is fully pushed into place, the sealing strip is compressed, thereby achieving a sealed isolation between the cleaning chamber 40 and the outside, preventing the leakage of unfiltered air and particles. Additionally, a positioning pin, a snap-fit, or a locking handle can be provided to lock the dust collection box 30 when it is pushed all the way in, ensuring it is in the correct working position and will not accidentally come off during equipment operation. Furthermore, in this embodiment, the dust collection box 30 and the aforementioned notch can also be connected by a snap-fit ​​connection or a flange connection.

[0068] The cleaning device 1 of the automated guided vehicle 50 in the overhead transport system provided in this embodiment of the invention is installed at the track 10 in the overhead transport system. It includes a cleaning device housing 20 and a dust collection box 30. The cleaning device housing 20 and the dust collection box 30 together form a cleaning chamber 40 isolated from the outside. An opening for the automated guided vehicle 50 to enter and exit is formed on the surface of the cleaning device housing 20. The track 10 is arranged corresponding to the opening so that the automated guided vehicle 50 can enter or leave the cleaning chamber 40 through the opening. A plurality of air jets 61 and / or a plurality of air suctions 62 are provided in the cleaning chamber 40 for removing particles from the surface of the automated guided vehicle 50. This invention, by installing the cleaning device 1 at the track 10 of the overhead transport system, eliminates the need to manually remove the automated guided vehicle 50 from the workstation. The automated guided vehicle 50 can enter the cleaning chamber 40 within the cleaning device 1 while still on the track 10 for particle cleaning. Compared to existing cleaning methods, this increases the online time of the OHT system. Furthermore, openings are provided on the surface of the cleaning device housing 20, and several jet nozzles 61 and / or suction nozzles 62 are installed in the cleaning chamber 40 to remove particles and collect them in the dust collection box 30. This improves the automation level of the OHT system, enhancing both cleaning effectiveness and the cleaning efficiency of the automated guided vehicle 50 within the OHT system.

[0069] Furthermore, in this embodiment of the invention, by placing only the jet nozzle 611 in the jet section 61 and the suction nozzle 621 in the suction section 62 on the inner surface of the cleaning device 1, while placing the suction pipe in the suction section 62, the jet pipe in the jet section 61, and other components such as air sources and negative pressure sources on the outside of the cleaning device 1, the jet section 61 or the suction section 62 avoids excessive occupation of the space of the cleaning chamber 40. By isolating the main pipelines from the highly polluted environment of the cleaning chamber 40, high concentrations of particulate matter are prevented from entering and clogging the main pipelines, thus protecting the critical air system and extending the service life of the equipment. The dust collection box 30 is also provided. The bottom of the cleaning device 1 and the top of the dust collection box 30 near the surface of the cleaning chamber 40 are provided with only an air suction hole 621, and the top of the cleaning device housing 20 near the surface of the cleaning chamber 40 are provided with only an air jet hole 611, which improves the effective utilization rate of the air jet hole 611 and the air suction hole 621. The cleaning device 1 is equipped with a position monitoring component and a particle count monitoring component, which improves the automation level of the cleaning device 1. By setting the dust collection box 30 at the bottom of the cleaning device 1 and detachably connecting it to the notch formed at the bottom of the cleaning device housing 20, it is easy to perform operations such as pulling, disassembly and installation. The position conforms to the natural posture of the human body, making it easy for maintenance personnel to replace with less effort.

[0070] Example 2:

[0071] The cleaning device for the automated guided vehicle in the top-mounted transport system provided in this embodiment of the invention differs from that in Embodiment 1 above in that:

[0072] The openings include an inlet for the automated guided vehicle 50 to enter the cleaning chamber 40 and an outlet for the automated guided vehicle 50 to exit the cleaning chamber 40.

[0073] If one of the two opposing side surfaces of the cleaning device housing 20 has an inlet, then the other side surface has an outlet.

[0074] In addition to the side surface with the inlet and the side surface with the outlet, each of the remaining side surfaces of the cleaning device housing 20 has an air jet hole 611 and an air intake hole 621 on its corresponding inner surface.

[0075] In this embodiment, by setting the opening to include an inlet and an outlet, with the inlet located on one of the two opposite side surfaces of the cleaning device housing 20 and the outlet located on the other side of the two opposite side surfaces of the cleaning device housing 20, the tunnel-like structure allows the automated guided vehicle 50 to enter the cleaning chamber 40 at a constant speed from one end. After cleaning, it can exit directly from the other end without turning around or reversing, seamlessly returning to operation. This improves cleaning efficiency, reduces the dwell time of the automated guided vehicle 50 at the cleaning station, avoids the complex operation and space required for the automated guided vehicle 50 to turn around within the chamber, achieves online through-process cleaning, improves the smoothness of the cleaning process, and reduces the impact on the overall material handling system.

[0076] In this embodiment, the sides where the inlet and outlet of the cleaning device 1 are located cannot have functional holes because vehicles need to pass through. Therefore, in order to achieve comprehensive cleaning without dead angles, all other available side inner surfaces are fully utilized, typically including two side surfaces, which means the cleaning device 1 can be set into a square shape. In this embodiment, by setting air jet holes 611 and air suction holes 621 on the same side surface, the essence is that it can improve the flexibility of the control system in controlling several air jet holes 611 and several air suction holes 621 for cleaning. Specifically, it can intelligently control the air jet holes 611 and air suction holes 621 on the same side surface to work in shifts and alternately, or it can control the air jet holes 611 and air suction holes 621 on different side surfaces to work together, thereby improving cleaning efficiency and effect, especially suitable for removing firmly attached particles.

[0077] Furthermore, to improve cleaning effectiveness, you can refer to... Figure 3 , Figure 3This is a schematic diagram of the structure of a cleaning device for an automated guided vehicle in an overhead transport system provided by an embodiment of the present invention. It can be configured such that, in addition to the side surface with the inlet and the side surface with the outlet, each of the remaining side surfaces of the cleaning device housing 20 has multiple rows of air jet holes 611 and multiple rows of air suction holes 621 simultaneously provided on its inner surface.

[0078] The multiple rows of jet nozzles 611 and the multiple rows of air intake nozzles 621 are arranged at intervals.

[0079] In this embodiment, multiple rows of jet holes 611 and multiple rows of suction holes 621 are simultaneously provided on a single side surface, and these rows are arranged at intervals. This improves the uniformity of the jet holes 611 and suction holes 621 arrangement, preventing them from concentrating in one place. Furthermore, each row of jet holes 611 generates a denser and stronger airflow impact, enhancing the ability to remove stubborn particles. Each row of suction holes 621 provides a stronger negative pressure suction capacity, ensuring that blown particles are quickly captured, preventing secondary re-entrainment, and forming a locally efficient airflow unit. In this embodiment, the holes in the same row can be arranged along the same straight line, or they can be staggered rather than strictly aligned, to further improve the uniformity of airflow and coverage. This embodiment refers to... Figure 3 In the middle, the Oun air vent 611 and the air intake vent 621 are arranged in a row.

[0080] The cleaning device 1 of the automated guided vehicle 50 in the overhead transport system provided by the present invention, by setting the opening to include an inlet and an outlet, with the inlet located on one of the two opposite side surfaces of the cleaning device housing 20 and the outlet located on the other of the two opposite side surfaces of the cleaning device housing 20, allows the automated guided vehicle 50 to drive out of the cleaning chamber 40 without turning around or reversing after cleaning, and seamlessly return to operation. This improves cleaning efficiency, reduces the dwell time of the automated guided vehicle 50 at the cleaning station, avoids the complex operation and space required for the automated guided vehicle 50 to turn around in the chamber, realizes online through-process cleaning, improves the smoothness of the cleaning process, and reduces the impact on the overall material handling system. Furthermore, in this embodiment of the invention, multiple rows of jet holes 611 and multiple rows of suction holes 621 are simultaneously provided on a single side surface, and the multiple rows of jet holes 611 and multiple rows of suction holes 621 are arranged at intervals. On the one hand, this can improve the uniformity of the layout of jet holes 611 and suction holes 621, avoid the jet holes 611 or suction holes 621 being concentrated in one place, and reduce cleaning dead zones. On the other hand, each row of jet holes 611 generates a denser and stronger airflow impact, improving the ability to remove stubborn particles. Each row of suction holes 621 can provide a stronger negative pressure suction capability, ensuring that the blown particles are quickly captured and preventing secondary re-entrainment, forming a localized high-efficiency airflow unit.

[0081] In one feasible embodiment, the cleaning device of the automated guided vehicle in the above-mentioned overhead transport system is installed at the track of the overhead transport system, and may specifically include the following structure:

[0082] The cleaning device housing, dust collection box, position monitoring component, and particle count monitoring component together form a cleaning chamber isolated from the outside.

[0083] The surface of the cleaning device housing has openings for the entry and exit of automated guided vehicles (AGVs), and tracks are provided corresponding to the openings. The openings include an inlet for the AAV to enter the cleaning chamber and an outlet for the AAV to exit the cleaning chamber. If one of the two opposite side surfaces of the cleaning device housing has an inlet, then the other side surface has an outlet.

[0084] The cleaning chamber is equipped with several air jets and / or several air suction units for removing particles from the surface of the automated guided vehicle.

[0085] The jet section includes jet holes disposed on the inner surface of the cleaning device and jet pipes connected to the jet holes; the jet pipes are located outside the cleaning device. The suction section includes suction holes disposed on the inner surface of the cleaning device and suction pipes connected to the suction holes; the suction pipes are located outside the cleaning device.

[0086] In addition to the side surface with the inlet and the side surface with the outlet, the inner surface of each remaining side surface of the cleaning device housing is provided with multiple rows of air jet holes and multiple rows of air suction holes; the multiple rows of air jet holes and multiple rows of air suction holes are arranged at intervals.

[0087] The dust collection box is located at the bottom of the cleaning device; the cleaning device housing has a notch at the bottom for detachable connection with the dust collection box; the top of the dust collection box has only an air intake hole near the surface of the cleaning chamber, and the top of the cleaning device housing has only an air jet hole near the surface of the cleaning chamber.

[0088] The position monitoring component is used to determine whether the automated guided vehicle has entered the cleaning chamber, and the particle count monitoring component is used to monitor the particle density in the cleaning chamber so that cleaning is confirmed to be completed when the particle density in the cleaning chamber is less than a preset threshold.

[0089] The following describes a cleaning method for an automated guided vehicle (AGV) in a top-mounted transport system, as provided by an embodiment of the present invention. The cleaning method for the AGV in a top-mounted transport system described below can be referred to in correspondence with the cleaning device for the AGV in a top-mounted transport system described above.

[0090] Please refer to the details. Figure 4 , Figure 4 A flowchart illustrating a cleaning method for an automated guided vehicle (AGV) in an overhead transport system, provided by an embodiment of the present invention, is included. This method, used in the aforementioned cleaning device for the AGV in the overhead transport system, may include:

[0091] S101: Obtain the cleaning start command. The cleaning start command indicates that the automated guided vehicle enters the cleaning chamber.

[0092] In this embodiment, the execution entity is the control system. The control system can collect information in real time whether the automated guided vehicle (AGV) has entered the cleaning chamber. After the AGV enters the cleaning chamber, the control system interprets this event as a cleaning start command. In this embodiment, the AGV entering the cleaning chamber requires that the entire AGV is completely located at the cleaning station and in a cleanable state, which is a necessary condition for triggering the cleaning operation. In this embodiment, a cleaning cycle for the AGV can be set so that each AGV automatically enters the cleaning device after completing this cleaning cycle.

[0093] S102: According to the cleaning start command, several jet units and / or several suction units installed in the cleaning chamber are opened to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0094] In this embodiment, the activation operation is not a simple power-on process, but rather the execution of a preset cleaning program that may include timing and logic. The specific content of this timing and logic-based cleaning program is not limited here, as long as it can complete the cleaning process for the automated guided vehicle. For example, some of the jetting and suction units can be activated first, run for a period of time, and then be shut down. The activated jetting and suction units are located on different side surfaces to avoid gas turbulence that could cause particles to remain suspended in the cleaning chamber. In this embodiment, the suction unit can be activated first to establish a negative pressure environment, and then the jetting unit can be activated to prevent particulate matter from escaping.

[0095] S103: Obtain the cleaning end command. The cleaning end command indicates that the removal of particles from the surface of the automated guided vehicle is complete.

[0096] This embodiment does not limit the method for indicating the completion of particle removal from the surface of the automated guided vehicle (AGV). For example, the cleaning operation can be set to last only a specified time, after which the system confirms the cleaning is complete. Alternatively, the completion of cleaning can be determined based on the amount of particles remaining on the AGV surface; cleaning is confirmed to be complete when the amount of particles remaining on the AGV surface is less than a preset value. Alternatively, the completion of cleaning can be determined based on the concentration of suspended particles in the cleaning chamber; cleaning is confirmed to be complete when the concentration of suspended particles in the cleaning chamber is less than a preset threshold. In this embodiment, a cleaning end command is generated after the control system confirms the cleaning is complete.

[0097] S104: Close several jet units and / or several suction units according to the cleaning end command, and remove the automated guided vehicle from the cleaning chamber.

[0098] In this embodiment, after confirming that cleaning is completed, the control system can change the status of the cleaning station, for example, from "occupied" to "idle", and send a "cleaning completed, permission to leave" signal to the host computer of the top-mounted transport system. Then, the control or scheduling department of the top-mounted transport system controls the automatic transport vehicle to start the motor and drive out of the cleaning chamber. This cleaning device allows the automatic transport vehicle to leave, rather than actively driving it away.

[0099] Furthermore, to improve cleaning efficiency, the aforementioned air jet section can include air jet holes on the inner surface of the cleaning device, and the air suction section can include air suction holes on the inner surface of the cleaning device. In addition to the side surface with the inlet and the side surface with the outlet, each remaining side surface of the cleaning device housing has multiple rows of air jet holes and multiple rows of air suction holes on its corresponding inner surface, arranged at intervals. The dust collection box is located at the bottom of the cleaning device, and the top surface of the dust collection box facing the cleaning chamber has only air suction holes, while the top surface of the cleaning device housing facing the cleaning chamber has only air jet holes.

[0100] The process of activating several jet nozzles and / or several suction nozzles installed in the cleaning chamber according to the cleaning start command to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box may include the following steps:

[0101] When the jet nozzle on the first side surface is opened, the jet nozzle on the second side surface is closed, and the suction port on the second side surface and the suction port on the top of the dust collection box near the surface of the cleaning chamber are opened to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box; the first side surface and the second side surface are two opposite side surfaces in the housing of the cleaning device.

[0102] When the jet nozzle on the second side surface is opened, the jet nozzle on the first side surface is closed, and the suction nozzle on the first side surface and the suction nozzle on the top of the dust collection box near the surface of the cleaning chamber are opened to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0103] When the air jet on the top surface of the cleaning device housing facing the cleaning chamber is opened, the air intake on the first side surface, the air intake on the second side surface, and the air intake on the top surface of the dust collection box facing the cleaning chamber are also opened to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

[0104] The improved method in this embodiment is implemented on a highly optimized device, and the control method is closely coupled and complementary to these specific structures. The multiple rows of spaced-apart holes provide the physical basis for zoned control. The structure of only airflow from the top and only air intake from the bottom (dust collection box) establishes the dominant direction of the vertical airflow. The method mainly involves establishing a strong, unidirectional horizontal airflow within the cleaning chamber. The high-speed airflow from the air outlets on the first side surface impacts the side of the automated guided vehicle, stripping particles and blowing them to the opposite side. At this time, air intake holes open on the second side surface in the direction of airflow travel to efficiently capture and remove the blown-in particles. Simultaneously, the air intake holes at the bottom also work, capturing particles falling due to gravity or airflow disturbance. Crucially, the air outlets on the second side surface are closed to prevent the two opposing airflows from colliding and canceling each other out, forming a vortex in the middle of the cleaning chamber, which would cause particles to remain and be unable to be removed. This method, through time-sharing control, completely avoids this interference. Both sides of the automated guided vehicle may have particulate matter attached to them. By alternately blowing and capturing from both sides, the air jets on the second side surface and the corresponding air suction holes on the first side surface can be opened to ensure that both sides of the vehicle are thoroughly and efficiently cleaned.

[0105] In this embodiment, when the air jet at the top of the cleaning device housing, which is close to the surface of the cleaning chamber, is opened, a strong vertical airflow is created from top to bottom. The airflow blown from the top air jet impacts the roof of the automated guided vehicle, thereby stripping off the particles and blowing them down. The blown-down particles will scatter in all directions, so it is necessary to open the air intakes on the two side surfaces and the bottom air intake to ensure that no matter which direction the particles are blown, they can be quickly sucked away and finally collected into the dust collection box at the bottom, so as to achieve efficient collection and prevent the particles from being scattered again.

[0106] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to in the method section.

[0107] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0108] Finally, it should be noted that in this document, relationships such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0109] The cleaning device and cleaning method for an automated guided vehicle in a top-mounted transportation system provided by the present invention have been described in detail above. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A cleaning device for an automated guided vehicle (AGV) in a top-mounted transport system, characterized in that, The cleaning device of the automated guided vehicle is installed on the track of the overhead transport system, including: The cleaning device housing and the dust collection box together form a cleaning chamber isolated from the outside. The surface of the cleaning device housing is formed with an opening for the automatic transport trolley to enter and exit; the track is arranged correspondingly to the opening so that the automatic transport trolley can enter or leave the cleaning chamber through the opening. The cleaning chamber is equipped with several air jets and / or several air suction units for removing particles from the surface of the automated transport vehicle.

2. The cleaning device for the automatic transport trolley in the top-mounted transport system according to claim 1, characterized in that, The jet unit includes jet holes disposed on the inner surface of the cleaning device, and jet pipes connected to the jet holes; the jet pipes are located outside the cleaning device. The suction unit includes a suction hole disposed on the inner surface of the cleaning device, and a suction pipe connected to the suction hole; the suction pipe is located outside the cleaning device.

3. The cleaning device for the automatic transport trolley in the top-mounted transport system according to claim 2, characterized in that, The opening includes an inlet for the automated guided vehicle to enter the cleaning chamber and an outlet for the automated guided vehicle to exit the cleaning chamber; If the inlet is provided on one of the two opposite side surfaces of the cleaning device housing, then the outlet is provided on the other side surface. In addition to the side surface with the inlet and the side surface with the outlet, each of the remaining side surfaces of the cleaning device housing has both an air jet hole and an air intake hole on its inner surface.

4. The cleaning device for the automated guided vehicle in the top-mounted transport system according to claim 3, characterized in that, In addition to the side surface with the inlet and the side surface with the outlet, the inner surface of each of the remaining side surfaces of the cleaning device housing is provided with multiple rows of air jet holes and multiple rows of air suction holes. The multiple rows of jet holes and the multiple rows of air intake holes are arranged at intervals.

5. The cleaning device for the automated guided vehicle in the top-mounted transport system according to claim 2, characterized in that, The dust collection box is located at the bottom of the cleaning device; The dust collection box has only an air intake hole on its top surface near the cleaning chamber, and the cleaning device housing has only an air jet hole on its top surface near the cleaning chamber.

6. The cleaning device for the automated guided vehicle in the top-mounted transport system according to claim 1, characterized in that, It also includes a position monitoring component for determining whether the automated guided vehicle has entered the cleaning chamber.

7. The cleaning device for the automated guided vehicle in the top-mounted transport system according to claim 1, characterized in that, It also includes a particle count monitoring component, used to monitor the particle concentration in the cleaning chamber, so as to confirm that cleaning is completed when the particle concentration in the cleaning chamber is less than a preset threshold.

8. The cleaning device for the automated guided vehicle in the top-mounted transport system according to claim 1, characterized in that, The dust collection box is located at the bottom of the cleaning device; The cleaning device housing has a notch at the bottom for detachable connection with the dust collection box.

9. A cleaning method for an automated guided vehicle (AGV) in an overhead transport system, characterized in that, A cleaning device for an automated guided vehicle in the overhead transport system of claim 1, comprising: Obtain a cleaning start command, the cleaning start command indicating that the automated guided vehicle enters the cleaning chamber; According to the cleaning start command, a plurality of jet nozzles and / or a plurality of suction nozzles provided in the cleaning chamber are activated to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box. Obtain a cleaning end command, the cleaning end command indicating that the removal of particles from the surface of the automated guided vehicle is complete; The cleaning end command is used to shut down the plurality of jet units and / or the plurality of suction units, and to detach the automated guided vehicle from the cleaning chamber.

10. The cleaning method for the automated guided vehicle in the top-mounted transport system according to claim 9, characterized in that, The jetting section includes jet holes disposed on the inner surface of the cleaning device, and the suction section includes suction holes disposed on the inner surface of the cleaning device; in addition to the side surface where the inlet is disposed and the side surface where the outlet is disposed, each of the remaining side surfaces of the cleaning device housing has multiple rows of jet holes and multiple rows of suction holes disposed on its corresponding inner surface, and the multiple rows of jet holes and multiple rows of suction holes are arranged at intervals; the dust collection box is disposed at the bottom of the cleaning device, and the top surface of the dust collection box near the cleaning chamber has only suction holes disposed, and the top surface of the cleaning device housing near the cleaning chamber has only jet holes disposed; The step of activating several jet nozzles and / or several suction nozzles installed in the cleaning chamber according to the cleaning start command, in order to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box, includes: When the air jet on the first side surface is opened, the air jet on the second side surface is closed, and the air intake on the second side surface and the air intake on the top of the dust collection box near the surface of the cleaning chamber are opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box; the first side surface and the second side surface are two opposite side surfaces in the housing of the cleaning device; When the jet hole on the second side surface is opened, the jet hole on the first side surface is closed, and the suction hole on the first side surface and the suction hole on the top of the dust collection box near the surface of the cleaning chamber are opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box. When the air jet hole on the top of the cleaning device housing near the surface of the cleaning chamber is opened, the air intake hole on the first side surface, the air intake hole on the second side surface, and the air intake hole on the top of the dust collection box near the surface of the cleaning chamber are also opened, so as to remove particles from the surface of the automated guided vehicle and collect them into the dust collection box.

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