A punching device for a spray tray with a debris cleaning function

Abstract

The application discloses a punching device with a dreg cleaning function for a spraying disc, and relates to the technical field of spraying disc punching devices.The device comprises a machine case, a three-shaft feeding device, a bimodal partition support device and an electric drill bit.The first air cylinder drives the clamping device to descend and fix the spraying disc, thereby forming rigid clamping and fixing of the spraying disc in the vertical direction.The center area of the floating suction plate is communicated with the fan-shaped area to be processed through the adjusting assembly, and the center area and the processing area are adsorbed through the adsorption holes on the top of the floating suction plate by the air supply device, thereby forming flexible fixing of the horizontal plane of the spraying disc, avoiding slight deviation caused by the electric drill bit during processing, improving adsorption accuracy through regional local adsorption, and reducing the load of the air supply device.The flexible clamping cooperates with the rigid clamping, thereby improving clamping stability from multiple horizontal and vertical directions.

Description

Technical Field

[0001] This invention relates to the technical field of spray tray perforation devices, specifically a spray tray perforation device with debris cleaning function. Background Technology

[0002] Semiconductor spray trays are key components in core process equipment such as deposition and etching. During processing, semiconductor spray trays require drilling holes. The processing quality of the spray trays directly determines the performance, yield, and cost of chip manufacturing.

[0003] However, many problems exist in the processing. When the drill bit penetrates the workpiece and reaches the hole exit, because the lower part of the exit is suspended, some material at the exit is bent, stretched, or torn by the drill bit, resulting in curling or large burrs. The generated metal chips and burrs can also cause hole blockage. Furthermore, the drill bit will cause the spray plate to shift slightly during drilling, affecting the processing accuracy. In addition, traditional clamping mechanisms lack protection for the spray plate, making it easy to scratch. Summary of the Invention

[0004] The purpose of this invention is to provide a perforating device for a spray plate with a debris cleaning function, so as to solve the problems mentioned in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a drilling device for a spray disc with debris cleaning function, comprising a housing, a three-axis feed device mounted on the housing, an electric drill bit mounted on the three-axis feed device, and a dual-mode partition support device mounted inside the housing; the dual-mode partition support device includes a collection seat, which is installed inside the drilling device, an end platform mounted on the drilling device, a floating suction platform mounted on the end platform, the floating suction platform being connected to the collection seat via a connecting rod, a plurality of clamping devices mounted on the collection seat, an adjusting component mounted on the floating suction platform, the adjusting component engaging and transmitting power with the floating suction platform, and the clamping devices being slidably connected to the end platform.

[0006] The machine housing houses a control system for the entire drilling device. A groove is provided on the end plate, allowing the spray plate to engage during machining. A three-axis feed mechanism drives the electric drill bit in multiple directions. The control system pre-programs the movement path of the three-axis feed mechanism based on the hole position to be drilled. The electric drill bit then drills the spray plate. A spray system is mounted on the three-axis feed mechanism to spray water onto the drilling area during machining, lubricating and cooling the drill bit.

[0007] Furthermore, the clamping device includes a first cylinder mounted on a collecting seat, a limit block mounted on the output shaft of the first cylinder, a second cylinder mounted inside the limit block, a first rack mounted on the output shaft of the second cylinder, the first rack being slidably connected to the limit block, a deflecting chuck rotatably mounted inside the limit block, the deflecting chuck meshing with the first rack for transmission, a transmission gear rotatably mounted inside the limit block, and a sliding base mounted slidably inside the limit block, the sliding base meshing with the transmission gear for transmission, and the transmission gear meshing with the first rack for transmission.

[0008] In the initial state, the output shaft of the second cylinder drives the first rack to descend, and the first rack drives the deflection chuck to deflect, causing the end of the deflection chuck to rise; when the first rack descends, it synchronously drives the transmission gear to rotate, and the transmission gear drives the second rack to slide, and the second rack drives the pad block to extend out of the limit block.

[0009] In the clamping state, the output shaft of the second cylinder drives the first rack to rise, and the first rack drives the deflection chuck end to deflect downward to a horizontal state; when the first rack rises, it synchronously drives the transmission gear to rotate, and the transmission gear drives the second rack to slide, and the second rack drives the pad block to retract to the limit block.

[0010] Before drilling, the control system first adjusts the clamping device to its initial state. At this time, several sliding base supports extend from the limiting blocks, and several deflecting clamps open and rise. The spray plate is placed on the extended pads through the external feeding mechanism. The pads form a rigid support for the spray plate. Then, the control system turns on the air supply device. According to the preset value, the control system causes the air supply device to deliver gas into the connection port. The gas enters the first collection cylinder from the connection port. As the gas continues to flow in, the airflow begins to spray out from the adsorption holes and anti-puncture holes and impact the bottom of the spray plate. The airflow travels along the spray plate... An air cushion is formed by bottom diffusion, which lifts the spray plate and provides flexible support. Several limiting blocks surround the spray plate to limit its movement and prevent it from swaying. Then, the control system puts the clamping device into a clamping state, the pads retract, and the rigid support is withdrawn. Subsequently, the control system reduces the air supply rate of the air supply device, gradually reducing the lifting force of the airflow on the spray plate. This allows the spray plate to slowly fall down along the limiting blocks into the groove of the end plate, achieving stable material feeding and avoiding collisions with the spray plate during loading.

[0011] After drilling is completed, the control system opens the electric valve, allowing the coolant and metal shavings in the first and second collection cylinders to flow into the collection seat, completing the recovery of coolant and metal shavings. Then, the control system closes the electric valve; the control system then controls the output shaft of the first cylinder to drive the limit block and sliding base onto the platform, disengaging the rigid clamping of the spray plate. Afterwards, the air supply device is turned on again, supplying air to the connection port. Due to the drilled holes in the processed spray plate, more gas will overflow, and the air supply device outputs a higher-speed airflow, causing the floating suction plate to lift the spray plate again via the air cushion, disengaging the spray plate from the groove of the end platform. The control system then controls the clamping device to return to its initial state, and after the pad extends, the air supply device is gradually shut off, allowing the spray plate to fall onto the pad, completing the unloading process.

[0012] Furthermore, the suction platform includes a suction plate, which is mounted on an end platform. A zone adjustment cylinder is rotatably installed inside the end platform. A first collection cylinder is installed at the bottom of the zone adjustment cylinder. The first collection cylinder is rotatably connected to the zone adjustment cylinder and is connected to a collection seat via a connecting rod. Several second collection cylinders are mounted on the suction plate. Both the first and second collection cylinders have openings at their bottom ends, and electric valves are installed on the openings. The first collection cylinder has a connection port, which is connected to an external air supply device via a pipe. An adjustment component is installed on the first collection cylinder, and the adjustment component meshes and drives with the zone adjustment cylinder.

[0013] The air supply device is used to input or extract airflow into the connection port through pipes. The connection port is also equipped with a correspondingly shaped shroud and filter to prevent metal shavings and coolant from being sucked in, and also to prevent the connection port from becoming clogged.

[0014] Furthermore, the partition adjustment cylinder includes an inner cylinder, which is rotatably mounted on the float suction plate. A toothed ring is installed at the bottom of the inner cylinder, which meshes with the adjustment component for transmission. The toothed ring is rotatably connected to the collection seat, and the inner cylinder is provided with adjustment holes.

[0015] Furthermore, the bottom end of the buoyancy plate is provided with an outer ring, which is connected to the end platform. The bottom end of the buoyancy plate is provided with an inner ring, which is rotatably connected to the inner cylinder. The inner ring is provided with several partition openings, and partition covers are installed on the partition openings. Several partitions are installed between the outer ring and the inner ring. The buoyancy plate is provided with several anti-puncture holes, which are consistent with the hole to be drilled, and the diameter of the anti-puncture holes is consistent with the diameter of the hole to be drilled. The buoyancy plate is provided with several adsorption holes, which are located in the gaps between the anti-puncture holes. The second collection cylinder is connected to the outer ring, the inner ring, and the partitions respectively, and the first collection cylinder is connected to the inner ring.

[0016] The size of the partition opening matches the size of the adjustment hole. The outer ring connects to the end plate, and the outer ring and end plate are designed to be detachable. A filter screen is provided at the bottom of the shroud; the shroud and the filter screen work together to block metal shavings and coolant, preventing the partition opening from being blocked.

[0017] The floating suction plate is backed at the bottom of the spray plate to provide support for the spray plate. When the drill bit drills through the spray plate, the drill bit will enter the corresponding anti-burr hole. Since there is support at the bottom of the drill hole outlet, the drill bit tip and the hole wall of the anti-burr hole form a shearing force to cut off the material at the bottom, thereby significantly reducing or eliminating burrs.

[0018] The inner ring, outer ring, and partitions divide the bottom of the float plate into several distinct areas. The inner ring contains the central area, which is surrounded by several fan-shaped areas. The central area of ​​the inner ring faces the first collection cylinder, while the other areas each correspond to a separate second collection cylinder. The output shaft of the adjusting motor drives a gear ring to rotate via an adjusting gear. The gear ring then rotates the inner cylinder, thereby adjusting the position of the adjusting hole. When the adjusting hole aligns with one of the partition openings, the central area containing the inner ring connects with the corresponding fan-shaped area. Initially, the partition openings and adjusting holes are misaligned, the central area is not connected to other fan-shaped areas, and the electric valve is closed.

[0019] After loading, the control system activates the first cylinder, which lowers the limit block until the deflecting chuck fixes the spray plate in the end-plate groove, forming a rigid vertical clamping fixation. Then, the control system activates the adjusting motor, which drives the zone adjusting cylinder to rotate via the adjusting gear, aligning the zone adjusting holes with the zone openings within the processing area. At this point, the central area connects with the fan-shaped area to be processed. The control system then draws gas from the connection port through the air supply device. After the gas is drawn out, a negative pressure is created in the central area and the connected fan-shaped area. The floating suction plate, through the suction holes and anti-puncture holes at the top, adsorbs the central area and the area to be processed, forming a flexible fixation of the spray plate on the horizontal plane. This prevents slight displacement caused by the electric drill bit during processing, which would affect processing accuracy. Localized zone adsorption improves adsorption accuracy and reduces the load on the air supply device.

[0020] After the spray plate is fixed, the control system activates the three-axis feed device and the electric drill bit. The three-axis feed device drives the electric drill bit to drill holes in the area to be processed along a preset trajectory. When the spray plate is pierced, due to the negative pressure state in the fan-shaped or central area, external air enters through the puncture suppression holes and the drill holes, sucking the metal shavings and coolant remaining on the inner wall of the drill holes into the first or second collection cylinder. This achieves the collection of metal shavings and coolant while cleaning the puncture suppression holes and the drill holes. As the number of drill holes increases, the amount of external air entering increases. In order to maintain the adsorption force, the control system gradually increases the air extraction speed of the air supply device. Then, the previous operation is repeated to drill holes in each area.

[0021] Furthermore, the adjustment assembly includes an adjustment motor, which is mounted on the first collection cylinder. An adjustment gear is mounted on the output shaft of the adjustment motor, and the adjustment gear meshes with a gear ring for transmission.

[0022] Furthermore, the sliding base includes a pad block, which is slidably installed inside the limiting block. A second rack is symmetrically installed on the pad block, and the second rack meshes with the transmission gear for transmission. A through groove is provided between the second racks.

[0023] The through-slot is designed to facilitate the passage of the first rack and prevent structural interference between the sliding base and the first rack and second cylinder. Flexible pads are provided on the upper surface of the pad and the lower surface of the deflection chuck to prevent scratches on the spray disc.

[0024] Furthermore, the deflection chuck is provided with several toothed grooves, and the deflection chuck engages with the first rack through the toothed grooves for transmission.

[0025] Compared with the prior art, the beneficial effects of the present invention are:

[0026] 1. During feeding, the state of the clamping device is adjusted to extend the pad, forming a rigid support for the spray plate. Then, gas is sprayed out through the anti-puncture holes and adsorption holes on the floating suction plate to form an air cushion at the bottom of the spray plate, achieving a flexible support effect. After the rigid support is withdrawn, the air supply rate is slowly reduced, so that the spray plate slowly falls down along the limit block into the groove of the end table, achieving the purpose of stable feeding and avoiding collisions with the spray plate during feeding.

[0027] 2. When unloading, the air cushion generated by the floating suction plate first lifts the spray plate, causing it to detach from the groove of the end plate. Then, the control clamping device is restored to its initial state. After the pad extends, the air supply device is gradually shut off, allowing the spray plate to fall onto the pad, thus achieving the purpose of unloading without damage.

[0028] 3. Use the floating suction plate to support the bottom of the spray plate. When the drill bit penetrates the spray plate, it will enter the corresponding anti-burr hole. The shearing force formed by the drill bit tip and the hole wall will cut off the material at the bottom, thus significantly reducing or eliminating burrs.

[0029] 4. The first cylinder lowers the clamping device to fix the spray plate, forming a rigid vertical clamping fixation. The adjusting assembly connects the central area of ​​the floating suction plate with the fan-shaped area to be processed. Air is drawn out by the air supply device, causing the floating suction plate to adsorb the central area and the area to be processed through the suction holes at the top, forming a flexible fixation of the spray plate horizontally. This avoids slight displacement caused by the electric drill bit during processing. Localized adsorption in specific areas improves adsorption accuracy and reduces the load on the air supply device. The combination of flexible and rigid clamping improves clamping stability in multiple directions, both horizontally and vertically.

[0030] 5. After the spray plate is punctured, the negative pressure in the fan-shaped or central area allows external air to enter through the puncture suppression hole and the drill hole, sucking the metal shavings and coolant remaining on the inner wall of the drill hole into the first or second collection cylinder, thus collecting the metal shavings and coolant while cleaning the puncture suppression hole and the drill hole. Attached Figure Description

[0031] Figure 1 This is a perspective view of the overall drilling device of the present invention;

[0032] Figure 2 The three-dimensional dual-modal partitioned support device of the present invention Figure 1 ;

[0033] Figure 3 The three-dimensional dual-modal partitioned support device of the present invention Figure 2 ;

[0034] Figure 4 This is a perspective view of the clamping device of the present invention;

[0035] Figure 5 This is a perspective view of the sliding base of the present invention;

[0036] Figure 6 This is a perspective view of the floating suction plate of the present invention;

[0037] Figure 7 This is a perspective view of the partition adjustment cylinder of the present invention;

[0038] Figure 8 This is a perspective view of the floating suction plate of the present invention.

[0039] In the diagram: 1. Chassis; 2. Three-axis feed device; 3. Dual-mode zoned support device; 4. Electric drill bit; 31. Collector base; 32. End platform; 33. Floating suction platform; 34. Clamping device; 35. Adjustment assembly; 341. First cylinder; 342. Limit block; 343. Second cylinder; 344. First rack; 345. Deflection chuck; 346. Sliding base; 347. Transmission gear; 3461. Through groove; 3462. Pad block; 3463. 331. Second rack; 332. Float suction plate; 333. Zone adjustment cylinder; 334. First collection cylinder; 335. Second collection cylinder; 336. Connection port; 337. Inner cylinder; 338. Adjustment hole; 339. Gear ring; 350. Adjustment motor; 351. Adjustment gear; 3312. Outer ring; 3313. Spur hole; 3314. Partition plate; 3315. Adsorption hole; 3316. Partition port; 3317. Inner ring. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] like Figures 1-8 As shown, the present invention provides a technical solution for a drilling device for a spray disc with debris cleaning function: it includes a housing 1, a three-axis feeding device 2 installed on the housing 1, an electric drill bit 4 installed on the three-axis feeding device 2, and a dual-mode partition support device 3 installed inside the housing 1; the dual-mode partition support device 3 includes a collection seat 31, which is installed inside the drilling device, an end platform 32 is installed on the drilling device, a floating suction platform 33 is installed on the end platform 32, the floating suction platform 33 is connected to the collection seat 31 through a connecting rod, a plurality of clamping devices 34 are installed on the collection seat 31, an adjusting component 35 is installed on the floating suction platform 33, the adjusting component 35 engages and drives the floating suction platform 33, and the clamping devices 34 are slidably connected to the end platform 32.

[0042] The machine housing 1 houses a control system that controls the entire drilling device. The end plate 32 has a groove that allows the spray plate to fit within during machining. The three-axis feed device 2 drives the electric drill bit 4 to move in multiple directions. The control system pre-sets the movement path of the three-axis feed device 2 according to the hole position to be drilled. The electric drill bit 4 is used to drill the spray plate. A spray system is installed on the three-axis feed device 2 to spray the drilling area during machining, lubricating and cooling the drill bit.

[0043] The clamping device 34 includes a first cylinder 341, which is mounted on the collecting seat 31. A limit block 342 is mounted on the output shaft of the first cylinder 341. A second cylinder 343 is installed inside the limit block 342. A first rack 344 is mounted on the output shaft of the second cylinder 343. The first rack 344 is slidably connected to the limit block 342. A deflection chuck 345 is rotatably mounted inside the limit block 342. The deflection chuck 345 meshes with the first rack 344 for transmission. A transmission gear 347 is rotatably mounted inside the limit block 342. A sliding base 346 is slidably mounted inside the limit block 342. The sliding base 346 meshes with the transmission gear 347 for transmission. The transmission gear 347 meshes with the first rack 344 for transmission.

[0044] In the initial state, the output shaft of the second cylinder 343 drives the first rack 344 to descend, and the first rack 344 drives the deflection chuck 345 to deflect, causing the end of the deflection chuck 345 to rise; when the first rack 344 descends, it synchronously drives the transmission gear 347 to rotate, and the transmission gear 347 drives the second rack 3463 to slide, and the second rack 3463 drives the pad block 3462 to extend out of the limit block 342.

[0045] In the clamping state, the output shaft of the second cylinder 343 drives the first rack 344 to rise, and the first rack 344 drives the end of the deflection chuck 345 to deflect downward to a horizontal state; when the first rack 344 rises, it synchronously drives the transmission gear 347 to rotate, the transmission gear 347 drives the second rack 3463 to slide, and the second rack 3463 drives the pad block 3462 to retract the limit block 342.

[0046] The floating suction platform 33 includes a floating suction plate 331, which is mounted on an end platform 32. A partition adjustment cylinder 332 is rotatably mounted inside the end platform 32. A first collection cylinder 333 is mounted at the bottom of the partition adjustment cylinder 332. The first collection cylinder 333 is rotatably connected to the partition adjustment cylinder 332. The first collection cylinder 333 is connected to the collection seat 31 via a connecting rod. Several second collection cylinders 334 are mounted on the floating suction plate 331. Both the bottom of the first collection cylinder 333 and the second collection cylinder 334 are provided with openings. Each opening is equipped with an electric valve. The first collection cylinder 333 is provided with a connection port 3331. An air supply device is connected to the connection port 3331 via a pipe. An adjustment component 35 is mounted on the first collection cylinder 333. The adjustment component 35 engages and drives the partition adjustment cylinder 332.

[0047] The air supply device is used to input or extract airflow into or out of the connection port 3331 through a pipe. The connection port 3331 is also provided with a correspondingly shaped shroud 3315 and filter screen to prevent metal shavings and coolant from being sucked in, and also to prevent the connection port 3331 from becoming clogged.

[0048] The partition adjustment cylinder 332 includes an inner cylinder 3321, which is rotatably mounted on the float suction plate 331. A toothed ring 3323 is installed at the bottom of the inner cylinder 3321. The toothed ring 3323 meshes with the adjustment component 35 for transmission. The toothed ring 3323 is rotatably connected to the collection seat 31. An adjustment hole 3322 is provided on the inner cylinder 3321.

[0049] The bottom end of the float plate 331 is provided with an outer ring 3311, which is connected to the end platform 32. The bottom end of the float plate 331 is provided with an inner ring 3317, which is rotatably connected to the inner cylinder 3321. The inner ring 3317 is provided with several partition openings 3316, and a partition cover 3315 is installed on the partition openings 3316. Several partition plates 3313 are installed between the outer ring 3311 and the inner ring 3317. The float plate 331 is provided with... There are several anti-puncture holes 3312, which are aligned with the hole to be drilled, and the diameter of the anti-puncture holes 3312 is aligned with the diameter of the hole to be drilled. The floating suction plate 331 is provided with several adsorption holes 3314, which are located in the gaps between the anti-puncture holes 3312. The second collecting cylinder 334 is connected to the outer ring 3311, the inner ring 3317 and the partition plate 3313 respectively. The first collecting cylinder 333 is connected to the inner ring 3317.

[0050] The dimensions of the partition opening 3316 match the dimensions of the adjustment hole 3322. The outer ring 3311 is connected to the end plate 32, and the outer ring 3311 and the end plate 32 are designed to be detachable. A filter screen is provided at the bottom of the shroud 3315. The shroud 3315 and the filter screen work together to block metal shavings and coolant, preventing the partition opening 3316 from being blocked.

[0051] The floating suction plate 331 is backed against the bottom of the spray plate to provide support for the spray plate. When the drill bit drills through the spray plate, the drill bit will enter the corresponding anti-burr hole 3312. Since there is support at the bottom of the drill hole outlet, the drill bit tip and the hole wall of the anti-burr hole 3312 form a shearing force to cut off the material at the bottom, thereby significantly reducing or eliminating burrs.

[0052] The inner ring 3317, outer ring 3311, and partition 3313 divide the bottom of the float plate 331 into several different areas. The inner ring 3317 contains the central area, and the inner ring 3317 within the central area surrounds several fan-shaped areas. The central area of ​​the inner ring 3317 is directly opposite the first collection cylinder 333, while the other areas correspond individually to the second collection cylinder 334. The output shaft of the adjusting motor 351 drives the gear ring 3323 to rotate via the adjusting gear 352. The gear ring 3323 drives the inner cylinder 3321 to rotate, thereby adjusting the position of the adjusting hole 3322. When the adjusting hole 3322 corresponds to one of the partition openings 3316, the central area containing the inner ring 3317 is connected to the fan-shaped area at that location. In the initial state, the partition opening 3316 and the adjusting hole 3322 are misaligned, the central area is not connected to other fan-shaped areas, and the electric valve is closed.

[0053] The adjustment assembly 35 includes an adjustment motor 351, which is mounted on the first collection cylinder 333. An adjustment gear 352 is mounted on the output shaft of the adjustment motor 351, and the adjustment gear 352 meshes with the gear ring 3323 for transmission.

[0054] The sliding base 346 includes a pad 3462, which is slidably installed in the limiting block 342. A second rack 3463 is symmetrically installed on the pad 3462. The second rack 3463 meshes with the transmission gear 347 for transmission. A through groove 3461 is provided between the second racks 3463.

[0055] The through slot 3461 is designed to facilitate the passage of the first rack 344 and prevent structural conflict between the sliding base 346 and the first rack 344 and the second cylinder 343. Flexible pads are provided on the upper surface of the pad block 3462 and the lower surface of the deflection chuck 345 to prevent scratches on the spray disc.

[0056] The deflection chuck 345 is provided with several toothed grooves, and the deflection chuck 345 engages with the first rack 344 through the toothed grooves for transmission.

[0057] The working principle of this invention is as follows: Before drilling, the control system first adjusts the clamping device 34 to its initial state. At this time, several sliding base supports 346 extend from the limiting blocks 342, and several deflecting clamps 345 open and rise. The spray plate is placed on the extended pads 3462 by the external feeding mechanism. The pads 3462 form a rigid support for the spray plate. Then, the control system turns on the air supply device. According to the preset value, the control system causes the air supply device to deliver gas into the connection port 3331. The gas enters the first collection cylinder 333 from the connection port 3331. As the gas flows in continuously, the airflow begins to spray out from the adsorption hole 3314 and the anti-puncture hole 3312. The airflow impacts the bottom of the spray plate, spreading along the bottom to form an air cushion that lifts the spray plate, providing flexible support. Several limiting blocks 342 surround the spray plate to limit its movement and prevent it from swaying. Then, the control system puts the clamping device 34 into a clamping state, causing the pads 3462 to retract and the rigid support to be withdrawn. Subsequently, the control system reduces the air supply rate of the air supply device, gradually reducing the lifting force of the airflow on the spray plate. This allows the spray plate to slowly fall down along the limiting blocks 342 into the groove of the end plate 32, achieving stable unloading and preventing the spray plate from being bumped during loading.

[0058] After the material is loaded, the control system activates the first cylinder 341, which drives the limit block 342 to descend until the deflection chuck 345 tilts downward to fix the spray plate in the groove of the end plate 32, forming a rigid clamping fixation of the spray plate in the vertical direction. Then, the control system activates the adjusting motor 351, which drives the partition adjusting cylinder 332 to rotate via the adjusting gear 352, aligning the partition adjusting hole 3322 with the partition opening 3316 in the area to be processed. At this time, the central area is connected to the fan-shaped area to be processed. The control system causes the air supply device to extract gas into the connection port 3331. After the gas is extracted, a negative pressure is formed in the central area and the connected fan-shaped area. The floating suction plate 331, through the suction hole 3314 and the anti-puncture hole 3312 at the top, adsorbs the central area and the area to be processed, forming a flexible fixation of the spray plate on the horizontal plane. This avoids slight displacement caused by the electric drill bit 4 during processing, which would affect the processing accuracy. Partial adsorption in different areas improves adsorption accuracy and reduces the load on the air supply device.

[0059] After the spray plate is fixed, the control system starts the three-axis feed device 2 and the electric drill bit 4. The three-axis feed device 2 drives the electric drill bit 4 to drill holes in the area to be processed along the preset trajectory. When the spray plate is pierced, due to the negative pressure state in the fan-shaped or central area, external air enters through the puncture suppression hole 3312 and the drill hole, sucking the metal shavings and coolant remaining on the inner wall of the drill hole into the first collection cylinder 333 or the second collection cylinder 334. This achieves the collection of metal shavings and coolant while cleaning the puncture suppression hole 3312 and the drill hole. As the number of drill holes increases, the amount of external air entering increases. In order to maintain the adsorption force, the control system gradually increases the air extraction speed of the air supply device. Then, the previous operation is repeated to drill holes in each area.

[0060] After drilling is completed, the control system opens the electric valve, allowing the coolant and metal shavings in the first collection cylinder 333 and the second collection cylinder 334 to flow into the collection seat 31, completing the recovery of the coolant and metal shavings. Then, the control system closes the electric valve; the control system controls the output shaft of the first cylinder 341 to drive the limit block 342 and the sliding base 346 onto the platform, disengaging the rigid clamping of the spray plate. Then, the air supply device is turned on again, supplying air to the connection port 3331. Due to the drilled holes in the processed spray plate, more gas will overflow, and the air supply device outputs a higher-speed airflow, causing the floating suction plate 331 to lift the spray plate again through the air cushion, causing the spray plate to detach from the groove of the end platform 32. The control system controls the clamping device 34 to return to its initial state, and after the pad block 3462 extends, the air supply device is gradually closed, causing the spray plate to fall onto the pad block 3462, completing the unloading process.

[0061] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A perforating device for a spray disc with debris cleaning function, characterized in that: The drilling device includes a housing (1), on which a three-axis feed device (2) is installed, and an electric drill bit (4) is installed on the three-axis feed device (2). A dual-mode partition support device (3) is installed inside the housing (1). The dual-mode partition support device (3) includes a collection seat (31), which is installed inside the drilling device. An end platform (32) is installed on the housing (1), and a floating suction platform (33) is installed on the end platform (32). The floating suction platform (33) is connected to the collection seat (31) via a connecting rod. Several clamping devices (34) are installed on the collection seat (31), and an adjustment component (35) is installed on the floating suction platform (33). The adjustment component (35) meshes with the floating suction platform (33), and the clamping device (34) is slidably connected to the end platform (32). The floating suction platform (33) includes a floating suction plate (331), which is mounted on an end platform (32). A partition adjustment cylinder (332) is rotatably installed inside the end platform (32). A first collection cylinder (333) is installed at the bottom of the partition adjustment cylinder (332). The first collection cylinder (333) is rotatably connected to the partition adjustment cylinder (332). The first collection cylinder (333) is connected to the collection seat (31) via a connecting rod. Several second collection cylinders (334) are installed on the floating suction plate (331). The bottom ends of the first collection cylinder (333) and the second collection cylinder (334) are provided with openings. Electric valves are installed on the openings. A connection port (3331) is provided on the first collection cylinder (333). An air supply device is connected to the connection port (3331) via a pipe. An adjustment component (35) is installed on the first collection cylinder (333). The adjustment component (35) meshes and drives with the partition adjustment cylinder (332). The partition adjustment cylinder (332) includes an inner cylinder (3321), which is rotatably mounted on the float plate (331). A toothed ring (3323) is installed at the bottom of the inner cylinder (3321). The toothed ring (3323) meshes with the adjustment component (35) for transmission. The toothed ring (3323) is rotatably connected to the collection seat (31). An adjustment hole (3322) is provided on the inner cylinder (3321). The bottom end of the float plate (331) is provided with an outer ring (3311), which is connected to the end platform (32). The bottom end of the float plate (331) is provided with an inner ring (3317), which is rotatably connected to the inner cylinder (3321). The inner ring (3317) is provided with several partition openings (3316), and a partition cover (3315) is installed on the partition openings (3316). Several partitions (3313) are installed between the outer ring (3311) and the inner ring (3317). 31) The plate is provided with a plurality of anti-puncture holes (3312), the anti-puncture holes (3312) are consistent with the hole to be drilled, the hole diameter of the anti-puncture holes (3312) is consistent with the hole diameter to be drilled, the floating suction plate (331) is provided with a plurality of adsorption holes (3314), the adsorption holes (3314) are located in the gap of the anti-puncture holes (3312), the second collecting cylinder (334) is connected to the outer ring (3311), the inner ring (3317) and the partition plate (3313) respectively, and the first collecting cylinder (333) is connected to the inner ring (3317).

2. The perforation device for a spray disc with debris cleaning function according to claim 1, characterized in that: The clamping device (34) includes a first cylinder (341), which is mounted on the collecting seat (31). A limit block (342) is mounted on the output shaft of the first cylinder (341). A second cylinder (343) is installed inside the limit block (342). A first rack (344) is mounted on the output shaft of the second cylinder (343). The first rack (344) is slidably connected to the limit block (342). A deflection chuck (345) is rotatably mounted inside the limit block (342). The deflection chuck (345) meshes with the first rack (344). A transmission gear (347) is rotatably mounted inside the limit block (342). A sliding base (346) is slidably mounted inside the limit block (342). The sliding base (346) meshes with the transmission gear (347). The transmission gear (347) meshes with the first rack (344).

3. The perforation device for a spray disc with debris cleaning function according to claim 1, characterized in that: The adjustment assembly (35) includes an adjustment motor (351), which is mounted on the first collection cylinder (333). An adjustment gear (352) is mounted on the output shaft of the adjustment motor (351), and the adjustment gear (352) meshes with a gear ring (3323) for transmission.

4. The perforating device for a spray disc with debris cleaning function according to claim 2, characterized in that: The sliding base (346) includes a pad (3462), which is slidably installed in the limiting block (342). A second rack (3463) is symmetrically installed on the pad (3462). The second rack (3463) meshes with the transmission gear (347) for transmission. A through groove (3461) is provided between the second racks (3463).

5. A perforating device for a spray disc with debris cleaning function according to claim 2, characterized in that: The deflection chuck (345) is provided with several toothed grooves, and the deflection chuck (345) engages with the first rack (344) through the toothed grooves for transmission.

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