End effector, robot and transfer device with adapted convex surface

Abstract

The application provides a convex surface adapting end effector, a manipulator and a conveying device, the convex surface adapting end effector comprises an extension piece, a suction accessory and a plurality of sealing pieces, the suction accessory comprises a suction main body, an auxiliary heating assembly and a plurality of suction assemblies, the material of the suction assembly is a memory alloy which expands when heated and shrinks when cooled, when the temperature of the auxiliary heating assembly rises, the suction assembly expands, when the temperature of the auxiliary heating assembly drops, the suction assembly shrinks, the state of the suction assembly can be controlled by controlling the temperature of the auxiliary heating assembly, so that the lengths of the plurality of suction assemblies are different, so that the lower surface of the wafer after deformation in a high-temperature environment can be adapted, and wafer falling is avoided, and the material of the sealing piece is a flexible material with a melting point greater than or equal to 150 DEG C, the sealing property between the suction assembly and the wafer can be improved, and gaps between the suction assembly and the wafer when the suction assembly is deformed due to temperature can be avoided.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an end effector, a robotic arm, and a conveying device adapted to a convex surface. Background Technology

[0002] In semiconductor manufacturing, the use of robotic arms to move wafers between different process cavities and between wafer boats is a crucial step. However, the wafers inside the process cavities operate at high temperatures, and at these high temperatures, the wafers have low rigidity and are very prone to deformation.

[0003] When using a vacuum-adhesive robotic arm to handle wafers, the arm's suction cups typically adhere to the center of the wafer's lower surface. While the center of the high-temperature wafer is held in place, the edges lack support. Under the influence of gravity, the edges deform downwards, causing the wafer to arch upwards in the center, especially noticeable with thinned wafers. When the high-temperature wafer deforms, it is very easy for it to detach from the suction cups.

[0004] Therefore, it is necessary to provide a new type of end effector, robot, and conveying device adapted to convex surfaces to solve the above-mentioned problems existing in the prior art. Summary of the Invention

[0005] The purpose of this invention is to provide an end effector, robot, and conveying device adapted to convex surfaces, which is suitable for wafers that deform due to high temperatures, and greatly reduces the risk of wafer detachment.

[0006] To achieve the above objectives, the end effector adapted to the convex surface of the present invention includes:

[0007] An extension member has a vacuum channel inside along the extension direction, and an interface for communicating with the vacuum channel is provided on the upper side of one end of the extension member.

[0008] An adsorption element includes an adsorption body, an auxiliary heating component, and several adsorption components. The adsorption body is disc-shaped, with a first connection port on one circular surface. The adsorption component connects to the extension component, and the first connection port is connected to the mating interface. Several second connection ports are provided on the other circular surface of the adsorption body, each communicating with the first connection port. The number of adsorption components is the same as the number of second connection ports. Each adsorption component includes a communicating first opening and a second opening. A portion of the adsorption component is embedded within the second connection port, and the adsorption component is seamlessly connected to the second connection port. The first opening communicates with the second connection port, and the second opening faces upwards. The auxiliary heating component is connected to all the adsorption components and is used to heat different adsorption components at the same or different temperatures.

[0009] A plurality of sealing elements, the same number as the adsorption assembly, are disposed on the second opening;

[0010] The material of the adsorption component is a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands, causing the second opening to move away from the extension. When the temperature of the auxiliary heating component decreases, the adsorption component contracts, causing the second opening to move closer to the extension. The material of the sealing component is a flexible material with a melting point greater than or equal to 150°C.

[0011] The beneficial effects of the end effector adapted to the convex surface are as follows: the material of the adsorption component is a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands; when the temperature of the auxiliary heating component decreases, the adsorption component contracts. By controlling the temperature of the auxiliary heating component, the state of the adsorption component can be controlled, thereby allowing the lengths of several adsorption components to be different, thus adapting to the lower surface of the wafer after deformation in a high-temperature environment, thereby preventing the wafer from falling off. Furthermore, the material of the sealing component is a flexible material with a melting point greater than or equal to 150°C, which can increase the sealing performance between the adsorption component and the wafer, preventing gaps from appearing between the adsorption component and the wafer when the adsorption component deforms due to temperature.

[0012] Optionally, at the same temperature, adsorption components that are equidistant from the center of the adsorption body have the same height, and adsorption components that are closer to the center of the adsorption body have a higher height. The auxiliary heating component includes a plurality of heating wires, the number of which is the same as the number of adsorption components. The heating wires are arranged around the outside of the corresponding adsorption components, and the heating wires are not interconnected. When heating the corresponding adsorption components through the plurality of heating wires, the heating of the corresponding adsorption components is carried out sequentially from the nearest to the farthest from the center of the adsorption body, and the farther away from the center of the adsorption body, the lower the heating temperature of the heating wire.

[0013] Optionally, the end effector adapted to the convex surface further includes a plurality of conductive wires, the number of which is the same as the number of heating wires. The conductive wires are connected to the corresponding heating wires. The extension member has a conductive wire receiving groove inside along the extension direction, and the plurality of conductive wires are received in the conductive wire receiving groove.

[0014] Optionally, the end effector adapted to the convex surface further includes a plurality of auxiliary shrinking members, the number of which is the same as the number of adsorption components. The auxiliary shrinking members are disposed on the other side of the adsorption body and connected to the corresponding adsorption components, and are used to assist the adsorption components in shrinking when the environment cools down.

[0015] Optionally, the auxiliary shrinking member includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption assembly. When the ambient temperature is room temperature, the spring is in its natural state.

[0016] The present invention also provides a robotic arm, comprising:

[0017] The connector includes a rotating assembly having an air guide hole; and,

[0018] The end effector adapted to the convex surface is fixedly connected to the rotating assembly, and the vacuum channel is connected to the air guide hole.

[0019] Optionally, the connector further includes a cylindrical hollow shell with an arc-shaped opening along the central axis. The cylindrical hollow shell contains two annular plates. The upper and lower edges of the arc-shaped opening are respectively fixedly connected to one of the annular plates. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

[0020] Optionally, the rotating assembly is in the shape of a cylindrical tube, with its upper end face slidably and sealingly connected to the upper annular channel, and its lower end face slidably and sealingly connected to the lower annular channel.

[0021] Optionally, the connector further includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with the air guide hole.

[0022] Optionally, the air guide component includes a central tube, a connecting tube, a base, and several fixing rods. One end of the central tube is sealed, one end of the connecting tube is connected to the central tube, and the other end of the connecting tube is connected to the air guide hole. The base is cylindrical, with its upper end face slidably sealed to the outer wall of the other end of the central tube, and its lower end face sealed. The central tube is connected to the base, and the base is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

[0023] Optionally, the air guide further includes a bearing, the inner ring of which is fitted around one end of the central tube and is fixedly connected to the outer wall of the central tube, and the outer ring of which is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

[0024] Optionally, the air guide further includes a driven member, which is arranged around the outside of the central tube. The manipulator further includes a drive unit, which includes a drive member. The drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the driven member to rotate through the transmission member.

[0025] Optionally, the robotic arm further includes a vacuum generating unit, which includes a vacuum generating component that is connected to the chassis via a connecting pipe.

[0026] The present invention also provides a transmission device, comprising:

[0027] The robotic arm; and,

[0028] The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of an end effector adapted to a convex surface in some embodiments of the present invention;

[0030] Figure 2 As shown in some embodiments of the present invention Figure 1 A schematic diagram of the cross-sectional structure of part A of the end effector adapted to the convex surface along the a-a' section line.

[0031] Figure 3This is a schematic diagram of the structure of the robotic arm in some embodiments of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of the rotating component in some embodiments of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of the annular plate in some embodiments of the present invention;

[0034] Figure 6 This is a schematic diagram of the air guide component in some embodiments of the present invention.

[0035] Explanation of reference numerals in the attached figures:

[0036] 10. End effector adapted to convex surface; 11. Extension; 111. Vacuum channel; 112. Connecting interface; 113. Conductive wire receiving groove; 12. Adsorption component; 121. Adsorption body; 1211. First connection port; 1212. Second connection port; 122. Adsorption assembly; 1221. First opening; 1222. Second opening; 123. Auxiliary heating assembly; 13. Sealing component; 14. Conductive wire; 20. Connector; 21. Rotating assembly; 22. Air vent; 23. Cylindrical hollow shell; 24. Arc-shaped opening; 25. Annular plate; 251. Upper ring channel; 201. Central tube; 202. Connecting tube; 203. Chassis; 204. Fixing rod; 205. Bearing. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0038] To address the problems existing in the prior art, embodiments of the present invention provide an end effector adapted to a convex surface. (Refer to...) Figure 1 and Figure 2The end effector 10 adapted to the convex surface includes an extension 11, an adsorption component 12, and several sealing components 13. The extension 11 has a vacuum channel 111 inside along its extension direction, and an interface 112 communicating with the vacuum channel 111 is formed on the upper side of one end of the extension 11. The adsorption component 12 includes an adsorption body 121, an auxiliary heating component 123, and several adsorption components 122. The adsorption body 121 is disc-shaped, and a first connection port 1211 is formed on one circular surface of the adsorption body 121. The adsorption component 12 is connected to the extension 11, and the first connection port 1211 is connected to the interface 112. Several second connection ports 1212 are formed on the other circular surface of the adsorption body 121, and each of the second connection ports 1212 communicates with the first connection port 1211. The number of components 122 is the same as the number of second connection ports 1212. Each adsorption component 122 includes a first opening 1221 and a second opening 1222 that are connected. The adsorption component 122 is partially embedded in the second connection port 1212 and is seamlessly connected to the second connection port 1212. The first opening 1221 is connected to the second connection port 1212 and the second opening 1222 faces upward. The auxiliary heating component 123 is connected to all the adsorption components 122 and is used to heat different adsorption components 122 at the same or different temperatures. A number of sealing members 13 are the same as the number of adsorption components 122, and the sealing members 13 are disposed on the second opening 1222.

[0039] Refer to 1 and Figure 2 The extension 11 is elongated and can be cylindrical or prismatic. The adsorption component 122 is cylindrical. The sealing component 13 is funnel-shaped. The small end of the sealing component 13 is provided with an annular groove (not shown in the figure), and the central axis of symmetry of the annular groove coincides with the central axis of symmetry of the sealing component 13. The edge of the second opening 1222 is embedded in the annular groove. The small end of the sealing component 13 communicates with the second opening 1222, and the large end of the sealing component 13 faces upward.

[0040] In some embodiments, the adsorption component is made of a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands, moving the second opening away from the extension; when the temperature of the auxiliary heating component decreases, the adsorption component contracts, moving the second opening closer to the extension. The sealing component is made of a flexible material with a melting point greater than or equal to 150°C. The melting point of the sealing component material is 200°C, 300°C, 600°C, etc.

[0041] The adsorption component is made of a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands; when the temperature of the auxiliary heating component decreases, the adsorption component contracts. By controlling the temperature of the auxiliary heating component, the state of the adsorption component can be controlled, thereby allowing the lengths of several adsorption components to be different. This adapts to the lower surface of the wafer after deformation in a high-temperature environment, thus preventing the wafer from falling off. Furthermore, the sealing component is made of a flexible material with a melting point greater than or equal to 150°C, which increases the sealing between the adsorption component and the wafer, preventing gaps from appearing between the adsorption component and the wafer when the adsorption component deforms due to temperature.

[0042] In some embodiments, the material of the adsorption component includes any one of nickel-titanium alloy, copper-based shape memory alloy, iron-based shape memory alloy, etc., and the material of the sealing component includes any one of polytetrafluoroethylene (PTEF), high-performance polyimide (VESPEL), etc.

[0043] In some embodiments, at the same temperature, adsorption components that are equidistant from the center of the adsorption body have the same height, and adsorption components that are closer to the center of the adsorption body have a higher height. The auxiliary heating component includes a plurality of heating wires, the number of which is the same as the number of adsorption components. The heating wires are arranged around the outside of the corresponding adsorption components, and the heating wires are not interconnected. When heating the corresponding adsorption components through the plurality of heating wires, the heating of the corresponding adsorption components is carried out sequentially from the nearest to the farthest from the center of the adsorption body, and the farther away from the center of the adsorption body, the lower the heating temperature of the heating wire.

[0044] Reference Figure 2 The end effector adapted to the convex surface further includes a plurality of conductive wires 14, the number of which is the same as the number of heating wires. The conductive wires 14 are connected to the corresponding heating wires. The extension member 11 has a conductive wire receiving groove 113 inside along the extension direction, and the plurality of conductive wires 14 are received in the conductive wire receiving groove 113.

[0045] In some embodiments, the end effector adapted to the convex surface further includes a plurality of auxiliary shrinking members, the number of which is the same as the number of adsorption components. The auxiliary shrinking members are disposed on the other side of the adsorption body and connected to the corresponding adsorption components, and are used to assist the adsorption components in shrinking when the environment cools down.

[0046] After the adsorption component adsorbs the wafer, it is affected by the pressure of the wafer. When the adsorption component shrinks, it may shift. Through the influence of the auxiliary shrinking component, the adsorption component can deform in a preset direction to avoid shifting during shrinkage and ensure the safety of the wafer during the handling process.

[0047] In some embodiments, the auxiliary shrinking member includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption assembly. When the ambient temperature is room temperature, the spring is in its natural state.

[0048] In some embodiments, the auxiliary shrinkage member includes two springs, a first spring and a second spring. One end of the first spring is fixedly connected to a first point on the extension assembly, and the other end of the first spring is fixedly connected to a second point on the adsorption assembly. One end of the second spring is fixedly connected to a third point on the extension assembly, and the other end of the second spring is fixedly connected to a fourth point on the adsorption assembly. The first and third points are symmetrical about the axis of the adsorption assembly, and the second and fourth points are also symmetrical about the axis of the adsorption assembly.

[0049] In other embodiments, the auxiliary shrinking member includes a hollow cylindrical structure, one end of which is connected to the extension member, and the adsorption member is partially disposed within the hollow cylindrical structure.

[0050] The present invention also provides a robotic arm, as shown in the figure. Figure 2 , Figure 3 and Figure 4 The robotic arm includes a connector 20 and an end effector 10 adapted to the convex surface. The connector 20 includes a rotating assembly 21 with an air guide hole 22. The end effector 10 adapted to the convex surface is fixedly connected to the rotating assembly 21, and the vacuum channel 111 communicates with the air guide hole 22.

[0051] Reference Figure 3 and Figure 5 The connector 20 further includes a cylindrical hollow shell 23. The cylindrical hollow shell 23 has an arc-shaped opening 24 along the direction of the central axis. The cylindrical hollow shell 23 has two annular plates 25 inside. The upper edge and lower edge of the arc-shaped opening 24 are respectively fixedly connected to one of the annular plates 25. An upper annular channel 251 is provided on the lower surface of the annular plate 25 fixedly connected to the upper edge of the arc-shaped opening 24, and a lower annular channel is provided on the upper surface of the annular plate 25 fixedly connected to the lower edge of the arc-shaped opening 24.

[0052] Reference Figure 4 and Figure 5 The rotating component 21 is in the shape of a cylindrical tube. The upper end face of the rotating component 21 is slidably and sealingly connected to the upper annular channel 251, and the lower end face of the rotating component 21 is slidably and sealingly connected to the lower annular channel.

[0053] In some embodiments, the rotating assembly is further provided with a wire through hole, which is connected to the conductive wire receiving groove, and the conductive wire extends through the wire through hole into the cylindrical hollow shell.

[0054] The upper and lower edges of the arc-shaped opening are respectively fixedly connected to an annular plate. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening. The upper and lower annular channels are similar to double sleeves, which can realize the sliding sealing connection between the annular plate and the rotating assembly, thereby preventing gas in the cylindrical hollow shell from contaminating the cavity inside the process chamber and also preventing gas in the process chamber from entering the cylindrical hollow shell.

[0055] In some embodiments, a sealing ring is provided between the upper annular channel and the upper end face of the rotating assembly to enhance the sealing between the upper annular channel and the rotating assembly; a sealing ring is provided between the lower annular channel and the lower end face of the rotating assembly to enhance the sealing between the lower annular channel and the rotating assembly.

[0056] In some embodiments, the connector further includes an air guide, which is disposed within the cylindrical hollow housing and communicates with the air guide hole.

[0057] Reference Figure 3 and Figure 6 The air guiding component includes a central tube 201, a connecting tube 202, a base 203, and several fixing rods 204. One end of the central tube 201 is sealed, one end of the connecting tube 202 is connected to the central tube 201, and the other end of the connecting tube 202 is connected to the air guiding hole. The base 203 is cylindrical. The upper end face of the base 203 is slidably and sealingly connected to the outer wall of the other end of the central tube 201. The lower end face of the base 203 is sealed. The central tube 201 is connected to the base 203. The base 203 is fixedly connected to the inner wall of the cylindrical hollow shell 23 through the fixing rods 204.

[0058] Reference Figure 3 and Figure 6The air guide component also includes a bearing 205, the inner ring of which is fitted around one end of the central tube 201 and is fixedly connected to the outer wall of the central tube 201. The outer ring of the bearing 205 is fixedly connected to the inner wall of the cylindrical hollow shell 23 through the fixing rod 204.

[0059] In some embodiments, the air guide further includes a follower, which is disposed around the central tube. The manipulator further includes a drive unit, which includes a drive member. The drive member is connected to the follower via a transmission member. The drive member is used to provide driving force to drive the follower to rotate via the transmission member.

[0060] In some embodiments, the robotic arm further includes a vacuum generating unit, which includes a vacuum generating element connected to the chassis via a connecting pipe.

[0061] In some embodiments, the robotic arm further includes a lifting mechanism, with the connecting member fixedly connected to the lifting mechanism. The lifting mechanism is used to move the connecting member in the vertical direction. The lifting mechanism can be a cylinder or a motor-driven slide rail mechanism, etc., and can be implemented using several existing technologies, which will not be described in detail here.

[0062] The present invention also provides a conveying device, including the aforementioned robotic arm and a control unit. The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm. Specifically, the control unit controls the lifting mechanism, controls whether the vacuum generating unit evacuates, and controls the current in the conductive wire to control the heating temperature of the auxiliary heating component. The control unit can be a motion controller or a programmable logic controller (PLC).

[0063] The present invention also provides a semiconductor system including the aforementioned transfer device. Of course, the semiconductor system also includes other semiconductor devices, such as etching equipment, deposition equipment, cleaning equipment, crystal boats, etc., which will not be described in detail here.

[0064] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An end effector adapted to a convex surface, characterized in that, include: An extension member has a vacuum channel inside along the extension direction, and an interface for communicating with the vacuum channel is provided on the upper side of one end of the extension member. An adsorption component includes an adsorption body, an auxiliary heating component, and several adsorption components. The adsorption body is disc-shaped, and a first connection port is provided on one circular surface of the adsorption body. The adsorption component is connected to the extension component, and the first connection port is connected to the docking port. Several second connection ports are provided on the other circular surface of the adsorption body, and each of the several second connection ports is connected to the first connection port. The number of adsorption components is the same as the number of second connection ports. Each adsorption component includes a first opening and a second opening that are connected. The adsorption component is partially embedded in the second connection port, and the adsorption component is seamlessly connected to the second connection port. The first opening is connected to the second connection port, and the second opening faces upward. The auxiliary heating component is connected to all the adsorption components and is used to heat different adsorption components at the same or different temperatures. as well as, A plurality of sealing elements, the same number as the adsorption assembly, are disposed on the second opening; The end effector adapted to the convex surface also includes a number of auxiliary shrinking members. The number of auxiliary shrinking members is the same as the number of adsorption components. The auxiliary shrinking members are disposed on the other side of the adsorption body and connected to the corresponding adsorption components, and are used to assist the adsorption components in shrinking when the environment cools down. The auxiliary shrinking component includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption component. When the ambient temperature is room temperature, the spring is in its natural state. The material of the adsorption component is a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands, causing the second opening to move away from the extension. When the temperature of the auxiliary heating component decreases, the adsorption component contracts, causing the second opening to move closer to the extension. The material of the sealing component is a flexible material with a melting point greater than or equal to 150°C.

2. The end effector adapted to a convex surface according to claim 1, characterized in that, At the same temperature, adsorption components that are equidistant from the center of the adsorption body have the same height. Adsorption components that are closer to the center of the adsorption body are taller. The auxiliary heating component includes several heating wires, the number of which is the same as the number of adsorption components. The heating wires are arranged around the outside of the corresponding adsorption components and are not interconnected. When heating the corresponding adsorption components through the heating wires, the heating of the corresponding adsorption components is carried out sequentially from the nearest to the farthest from the center of the adsorption body. The farther away from the center of the adsorption body, the lower the heating temperature of the heating wire.

3. The end effector adapted to a convex surface according to claim 2, characterized in that, The end effector adapted to the convex surface further includes a plurality of conductive wires, the number of which is the same as the number of heating wires. The conductive wires are connected to the corresponding heating wires. The extension member has a conductive wire receiving groove inside along the extension direction, and the plurality of conductive wires are received in the conductive wire receiving groove.

4. A robotic arm, characterized in that, include: The connector includes a rotating assembly having an air guide hole; and, The end effector adapted to a convex surface as described in any one of claims 1 to 3, wherein the end effector adapted to a convex surface is fixedly connected to the rotating assembly, and the vacuum channel is connected to the air guide hole.

5. The robotic arm according to claim 4, characterized in that, The connector also includes a cylindrical hollow shell with an arc-shaped opening along the central axis. The cylindrical hollow shell contains two annular plates. The upper and lower edges of the arc-shaped opening are respectively fixedly connected to one of the annular plates. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

6. The robotic arm according to claim 5, characterized in that, The rotating assembly is in the shape of a cylindrical tube. The upper end face of the rotating assembly is slidably and sealed to the upper annular channel, and the lower end face of the rotating assembly is slidably and sealed to the lower annular channel.

7. The robotic arm according to claim 5 or 6, characterized in that, The connector also includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with the air guide hole.

8. The robotic arm according to claim 7, characterized in that, The air guide component includes a central tube, a connecting tube, a base plate, and several fixing rods. One end of the central tube is sealed, one end of the connecting tube is connected to the central tube, and the other end of the connecting tube is connected to the air guide hole. The base plate is cylindrical, with its upper end face slidably sealed to the outer wall of the other end of the central tube, and its lower end face sealed. The central tube is connected to the base plate, and the base plate is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

9. The robotic arm according to claim 8, characterized in that, The air guide component also includes a bearing, the inner ring of which is fitted around one end of the central tube and is fixedly connected to the outer wall of the central tube. The outer ring of the bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

10. The robotic arm according to claim 8, characterized in that, The air guide also includes a driven member, which is arranged around the outside of the central tube. The manipulator also includes a drive unit, which includes a drive member. The drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the driven member to rotate through the transmission member.

11. The robotic arm according to claim 8, characterized in that, The robotic arm also includes a vacuum generating unit, which includes a vacuum generating component that is connected to the chassis via a connecting pipe.

12. A conveying device, characterized in that, include: The robotic arm as described in any one of claims 4 to 11; as well as, The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm.

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