High-stability pulsed bias power supply

Abstract

The invention relates to the technical field of power supplies, in particular to a high-stability pulse bias power supply which comprises a shell, a power supply assembly, an anti-interference assembly and a heat dissipation assembly, a carrier plate is arranged in the shell, the heat dissipation assembly comprises a circulation seat arranged on the carrier plate, a net plate is vertically mounted on the circulation seat, and a power supply is arranged on the net plate. The screen plate divides the carrier plate into a front area and a rear area, the power supply assembly is installed on the carrier plate and located in the rear area, the front end of the carrier plate is provided with a bent part bent towards the front area, the anti-interference assembly comprises a binding post arranged on the bent part, and the binding post is connected with the power supply assembly. Comprising a ferrite magnet ring which is installed on the bending part through a lifting type lifting seat, and part of airflow can be sprayed into the front area from the front end of the circulation seat and is guided into the lifting seat upwards through the bending part, so that the ferrite magnet ring is cooled, and the power supply of the power line is kept stable.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of power supply, in particular to a high-stable pulsed bias power supply. BACKGROUND

[0002] The pulsed bias power supply plays a key role in industrial applications (such as plasma processing, material surface modification, etc.), and the stability of its output pulse directly affects the process effect and equipment reliability. In order to suppress electromagnetic interference (EMI) and ensure the stability of the output pulse, the existing technology usually uses a ferrite magnetic ring (anti-interference magnetic ring) to filter the power supply output line. The ferrite magnetic ring uses its frequency selective impedance characteristic to allow the power supply fundamental frequency signal to pass through, while converting the energy of high-frequency interference signals into heat energy to consume, thereby effectively suppressing electromagnetic interference and improving the quality of pulse output.

[0003] However, the characteristic of the ferrite magnetic ring converting interference energy into heat energy (i.e. self-heating) inevitably leads to an increase in temperature. The temperature rise will significantly affect the permeability and loss characteristics of the ferrite magnetic ring (i.e. temperature drift phenomenon), which may change its filtering effect and even reduce the stability of the output pulse. SUMMARY

[0004] In order to solve the above problems, the present application provides the following technical solutions: A high-stable pulsed bias power supply, comprising a shell, a power supply assembly, an anti-interference assembly, and a heat dissipation assembly, wherein the shell is provided with a carrier plate inside, the heat dissipation assembly comprises a flow-through seat arranged on the carrier plate, a mesh plate is vertically installed on the flow-through seat, the mesh plate separates the carrier plate into a front area and a rear area, the power supply assembly is installed on the carrier plate and located in the rear area, the front end of the carrier plate is provided with a bent portion bent towards the front area, the anti-interference assembly comprises a terminal post arranged on the bent portion, and a ferrite magnetic ring is installed on the bent portion through a liftable hanger, the ferrite magnetic ring and the terminal post are located in the front area, the output line of the power supply assembly passes through the ferrite magnetic ring to connect the terminal post, and the heat dissipation assembly further comprises a fan arranged opposite to the rear end of the flow-through seat, the front end of the flow-through seat is communicated with the front area, and the rear end is communicated with the air inlet direction of the fan.

[0005] As a further preferred, the ferrite magnetic ring is located above the rear side of the terminal post.

[0006] As a further preferred, the hanging seat is provided with an open downward assembly cavity, the ferrite magnetic ring is assembled in the assembly cavity of the hanging seat from the open end upward, the rear end of the hanging seat is provided with a lead slot, the rear end of the ferrite magnetic ring communicates with the lead slot, when the output line of the power supply assembly penetrates into the ferrite magnetic ring, the output line passes through the lead slot, the first gap is left between the front end of the ferrite magnetic ring and the front side wall of the assembly cavity, and the first gap communicates with the front area upward and downward.

[0007] As a further preferred, the anti-interference component further comprises high-density sound-absorbing cotton installed at the front end of the hanging seat, and the end of the terminal post penetrating into the front area is provided with a clamping opening.

[0008] As a further preferred, the bottom end of the high-density sound-absorbing cotton reaches the open end of the hanging seat, and the top end of the high-density sound-absorbing cotton reaches the top surface of the hanging seat.

[0009] As a further preferred, the top end of the mesh plate is close to the bottom end of the hanging seat and leaves a second gap between the ferrite magnetic ring.

[0010] As a further preferred, the front and rear ends of the flow-through seat are provided with air ports, the air port at the front end enters the front area, the bent part is not only curved upward but also inclined backward, and the inclined surface of the bent part forms a first turbulent flow space between the air port at the front side and a second turbulent flow space between the vertical surface of the mesh plate.

[0011] As a further preferred, the upper part of the fan inhales air toward the upper side of the flow-through seat, and the lower part of the fan inhales air toward the air port at the rear end of the flow-through seat.

[0012] As a further preferred, the ferrite magnetic ring is sleeved with a lifting ring, the top of the hanging seat is provided with a threaded sleeve, a bolt is installed on the threaded sleeve, the lifting ring is installed at the bottom end of the bolt, so that a third gap is formed between the top of the ferrite magnetic ring and the top surface of the hanging seat under the connection of the bolt, and the lead slot communicates with the third gap.

[0013] The beneficial effects of the present application compared with the prior art are: 1. A ferrite core is positioned opposite the output end of the power supply unit. A fan is located behind it, providing airflow in two sections. The fan blows air towards the power supply unit; some air is directed onto the unit for cooling and stable power supply, while the remaining airflow enters the flow-through socket. This airflow is collected and then directed upwards onto the power supply unit for bottom cooling. Additionally, this airflow is also injected from the front of the flow-through socket into the front section, passing through the bend and guiding upwards into the mounting bracket to further cool the ferrite core and maintain stable power supply. Furthermore, regardless of whether the airflow is directed from above the flow-through socket towards the power supply unit or towards the bend, some airflow inevitably passes through the mesh of the stencil, particularly impacting the bend in the front section. Therefore, the stencil only partially blocks the airflow entering the bend, allowing the airflow entering the front section to be guided into the mounting bracket for further cooling of the ferrite core.

[0014] 2. The airflow is precisely directed and sprayed into the front area separated by the carrier plate through the specially designed opening structure at the front end of the flow seat. The bend in the front area not only provides installation space for the terminal block, but also cleverly acts as an airflow guide plate, forcibly guiding the airflow from the front end of the flow seat upward into the space inside the hanger. This more effectively filters out the heat generated during the anti-interference process of the ferrite magnetic ring, further improving the anti-interference effect. It constructs a high-efficiency, forced cooling path that directly reaches the ferrite magnetic ring body, specifically solving the core pain point of insufficient heat dissipation of the magnetic ring in the existing technology, which leads to temperature drift and thus affects the output. Attached Figure Description

[0015] Figure 1 A schematic diagram from a three-dimensional perspective of a highly stable pulse bias power supply provided for an embodiment of the present invention; Figure 2 A highly stable pulse bias power supply provided for embodiments of the present invention is composed of Figure 1 A schematic diagram from the front-side perspective; Figure 3 A highly stable pulse bias power supply provided for embodiments of the present invention is composed of Figure 2 A schematic diagram of section A after it has been cut open; Figure 4 A schematic diagram of the internal structure of a highly stable pulse bias power supply after removing the outer casing, provided for an embodiment of the present invention; Figure 5 A highly stable pulse bias power supply provided for embodiments of the present invention is composed of Figure 4 A diagram illustrating the upward-looking perspective; Figure 6 A highly stable pulse bias power supply provided for embodiments of the present invention is composed ofFigure 1 A schematic diagram showing the distribution of the airflow direction and flow state.

[0016] In the diagram: 1. Outer shell; 2. Carrier plate; 3. Flow seat; 4. Front area; 5. Rear area; 6. Bending section; 7. Terminal block; 8. Hanger; 9. Ferrite ring; 10. Fan; 11. Assembly cavity; 12. Lead wire groove; 13. First gap; 14. Mesh plate; 15. High-density sound-absorbing cotton; 16. Clamp; 17. Second gap; 18. Air inlet; 19. First turbulent space; 20. Second turbulent space; 21. Lifting ring; 22. Threaded sleeve; 23. Bolt; 24. Third gap. Detailed Implementation

[0017] The above and other embodiments and advantages of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0018] In one implementation, such as Figures 1-6 As shown: This embodiment provides a highly stable pulse bias power supply, including a housing 1, a power supply assembly (existing technology, such as a power supply assembly composed of a bridge rectifier circuit, an inverter circuit, a transformer, a filter circuit, and an air switch), an anti-interference assembly, and a heat dissipation assembly. The housing 1 is provided with a carrier plate 2. The heat dissipation assembly includes a flow seat 3 disposed on the carrier plate 2. A mesh plate 14 is vertically mounted on the flow seat 3. The mesh plate 14 divides the carrier plate 2 into a front area 4 and a rear area 5. The power supply assembly is mounted on the carrier plate 2 and located in the rear area 5. The front end of the carrier plate 2 is provided with a bent portion 6 that bends towards the front area 4. The anti-interference assembly includes a terminal 7 disposed on the bent portion 6 and a ferrite magnetic ring 9 mounted on the bent portion 6 via a liftable mounting bracket 8. The ferrite magnetic ring 9 and the terminal 7 are located in the front area 4. The output line of the power supply assembly passes through the ferrite magnetic ring 9 and connects to the terminal 7. The heat dissipation assembly also includes a fan 10 disposed relative to the rear end of the flow seat 3. The front end of the flow seat 3 communicates with the front area 4, and the rear end communicates with the air intake direction of the fan 10.

[0019] like Figure 1As shown, the lead terminals on the control panel are inserted backward into the front side of the bend 6 and connected to the lead-out end of the terminal 7. The power supply assembly is installed on the flow seat 3. When wiring, the power line on the output end of the power supply assembly is first passed through the ferrite ring 9 and then connected to the terminal 7. Then, the output end of the terminal 7 is connected to the control board. The power line is treated by the anti-interference of the ferrite ring 9, which makes the pulse fluctuation more stable when the pulse power supply is output. In addition, according to the working principle of the ferrite ring 9 (the ferrite ring 9 achieves electromagnetic interference suppression through frequency selective impedance characteristics, and the impedance inductive characteristics allow normal power to pass through; in the high-frequency range, it converts the energy generated by the interference signal into heat energy dissipation through the decrease of magnetic permeability and the increase of loss), the ferrite ring 9 will release heat outward. The temperature rise will inevitably cause the power supply to drift, affecting stability. Fan 10 blows air towards the power supply assembly. Part of the air blown onto the power supply assembly to dissipate heat and maintain stable power supply. Another part of the airflow blows into the flow seat 3. In addition to being collected by the flow seat 3 and acting upwards on the power supply assembly to dissipate heat from the bottom, this part of the airflow is also sprayed from the front end of the flow seat 3 into the front area 4, and guided upwards through the bending part 6 into the hanging bracket 8 to dissipate heat from the ferrite magnetic ring 9 and maintain stable power supply. In addition, regardless of whether the airflow blows from above the flow seat 3 onto the power supply assembly or onto the bending part 6, some airflow will inevitably pass through the mesh of the mesh plate 14 and travel back and forth, especially causing the airflow to be sprayed into the front area 4 and act on the bending part 6. Therefore, the mesh plate 14 only plays a certain (not absolute) role in blocking the airflow entering the bending part 6, allowing the airflow sprayed into the front area 4 from the above multiple channels to be guided into the hanging bracket 8 to further cool the ferrite magnetic ring 9 under the certain obstruction of the mesh plate 14.

[0020] The top of the mesh plate 14 is close to the bottom of the hanging base 8, and a second gap 17 is left between it and the ferrite magnetic ring 9. The function of the reserved second gap 17 is the same as the function of the mesh on the mesh plate 14, which allows the airflow to flow back and forth, increases the residence time of the airflow in the rear zone 5, and improves the heat dissipation efficiency of the power supply component.

[0021] like Figure 1 , Figure 5 As shown, the hanging base 8 has an assembly cavity 11 with the opening facing downwards. The ferrite magnetic ring 9 is assembled into the assembly cavity 11 of the hanging base 8 from the opening end upwards. The airflow is introduced into the assembly cavity 11 through the bending part 6. After being collected by the assembly cavity 11, the heat dissipation area is increased, which improves the heat dissipation efficiency of the ferrite magnetic ring 9. In order to stabilize the power supply of the power line, the performance of the ferrite magnetic ring 9 against electromagnetic interference is further improved.

[0022] like Figure 4As shown, a lead wire groove 12 is provided at the rear end of the hanger 8. The rear end of the ferrite magnetic ring 9 is connected to the lead wire groove 12. The output wire of the power supply component enters through the lead wire groove 12, passes through the ferrite magnetic ring 9, and exits from the front end of the ferrite magnetic ring 9. A first gap 13 is left between the front end of the ferrite magnetic ring 9 and the front side wall of the assembly cavity 11. The first gap 13 is connected vertically to the front area 4. Figure 6 As shown, the airflow injected into the front area 4 is blocked by the mesh plate 14 and then flows upward through the first gap 13 into the assembly cavity 11. The heat generated by the ferrite magnetic ring 9 during anti-interference operation is cooled down and then carried out backward through the lead wire groove 12. The rear end of the outer shell 1 is provided with a heat dissipation window, and the heat is carried out outward through the heat dissipation window. After the power cord exits from the front end of the ferrite magnetic ring 9, it also enters the front area 4 downward through the first gap 13 and then connects to the input terminal of the terminal 7. The power cord is completely immersed in the cooling environment, which reduces the temperature drift of the power supply and effectively filters out the high frequency and interference on the output pulse waveform.

[0023] Air inlets 18 are provided at both the front and rear ends of the flow seat 3. The air inlet 18 at the front end enters the front zone 4. The bent part 6 bends upward and tilts backward at the same time. The tilted surface of the bent part 6 not only forms a first turbulent space 19 (the lower part of the front zone 4) with the air inlet 18 on the front side, but also forms a second turbulent space 20 (the upper part of the front zone 4) with the vertical surface of the mesh plate 14, which accelerates the flow speed of the air in the front zone 4 and increases the probability of entering the hanging seat 8. The fan 10 is pressed... Figure 1 The fan 10 is configured such that its upper part extends above the flow seat 3 to allow air to enter from the upper side of the flow seat 3 (for cooling the power supply components). The lower part of the fan 10 draws air into the air inlet 18 at the rear of the flow seat 3, causing some airflow to be guided through the flow seat 3 and injected into the first turbulence space 19. After passing through the first turbulence space 19, the airflow flows into the second turbulence space 20. After being processed by the turbulence of the two turbulence spaces, this portion of airflow is divided into... Figure 6 The two parts are shown. One part of the airflow passes through the mesh of the mesh plate 14 and is sprayed backward toward the rear area 5, serving the heat dissipation of the current component from the front to the rear. The other part of the airflow is blocked by the solid surface of the mesh plate 14 and flows turbulently through the first gap 13 into the assembly cavity 11 of the hanger 8, providing comprehensive cooling for the ferrite magnetic ring 9. Figure 1 , Figure 6It is known that the volume of the first turbulent space 19 is larger than that of the second turbulent space 20, and there is a variable diameter area at the connection between the first turbulent space 19 and the second turbulent space 20. Therefore, when the airflow is injected into the first turbulent space 19 and then ejected from the first turbulent space 19 into the second turbulent space 20, the discharge velocity will be increased, thereby increasing the speed at which the airflow enters the assembly cavity 11. Another part of the airflow generated by the fan 10 is specially guided to the front area 4 through the front end of the flow seat, and with the help of the acceleration and guiding effect of the first turbulent space 19 and the second turbulent space 20, it is effectively guided into the internal space of the hanging seat 8, and precisely and directly blown onto the ferrite magnetic ring 9. This targeted airflow path design significantly enhances the heat dissipation efficiency of the magnetic ring and minimizes its operating temperature. A high-efficiency, forced cooling path directly reaching the body of the ferrite magnetic ring 9 is constructed, specifically solving the core pain point of insufficient heat dissipation of the magnetic ring in the prior art, which leads to temperature drift and thus affects the output.

[0024] The specific installation structure of the ferrite ring 9 is as follows: Figure 1 , Figure 5 As shown, a lifting ring 21 is fitted around the outside of the ferrite magnetic ring 9, and a threaded sleeve 22 is installed on the top of the hanging base 8. A bolt 23 is installed on the threaded sleeve 22, and the lifting ring 21 is installed at the bottom of the bolt 23, so that a third gap 24 is formed between the upper part of the ferrite magnetic ring 9 and the top surface of the hanging base 8 under the connection of the bolt 23. The lead wire groove 12 communicates with the third gap 24.

[0025] The interference suppression component also includes high-density sound-absorbing cotton 15 installed at the front end of the hanger 8. A clamp 16 is provided at one end of the terminal 7 extending into the front area 4. The bottom end of the high-density sound-absorbing cotton 15 reaches the opening end of the hanger 8, and the top end of the high-density sound-absorbing cotton 15 reaches the top surface of the hanger 8. The output end of the power cord is connected to the clamp 16 and the terminal 7 to allow power flow, enabling current to be output to the electrical appliance through the front end of the terminal 7. The high-density sound-absorbing cotton 15 reduces noise, particularly against the airflow injected into the hanger 8, thus improving stability.

[0026] The above orientation references do not represent the specific orientations of each component in this implementation scheme. This implementation scheme is only for the convenience of describing the scheme and to make relative descriptions based on the orientations of the references. In reality, the specific orientations of each component are based on their actual installation and use, as well as the orientation descriptions that are customary to those skilled in the art. This is hereby stated.

[0027] The specific embodiments described above further illustrate the inventive purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the scope of protection of the present invention. In particular, it should be noted that any modifications, equivalent substitutions, or improvements made by those skilled in the art within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A highly stable pulse bias power supply, characterized in that, The device includes a housing (1), a power supply assembly, an anti-interference assembly, and a heat dissipation assembly. The housing (1) contains a carrier plate (2). The heat dissipation assembly includes a flow seat (3) disposed on the carrier plate (2). A mesh plate (14) is vertically mounted on the flow seat (3), dividing the carrier plate (2) into a front section (4) and a rear section (5). The power supply assembly is mounted on the carrier plate (2) and located within the rear section (5). The front end of the carrier plate (2) has a bend (6) that bends towards the front section (4). The anti-interference assembly includes a... The terminal (7) placed on the bent portion (6) includes a ferrite magnetic ring (9) mounted on the bent portion (6) via a hanger (8). The ferrite magnetic ring (9) and the terminal (7) are located in the front area (4). The output line of the power supply assembly passes through the ferrite magnetic ring (9) and connects to the terminal (7). The heat dissipation assembly also includes a fan (10) disposed opposite to the rear end of the flow seat (3). The front end of the flow seat (3) communicates with the front area (4), and the rear end communicates with the air intake direction of the fan (10).

2. The highly stable pulse bias power supply according to claim 1, characterized in that, The ferrite ring (9) is located above and behind the terminal (7).

3. The highly stable pulse bias power supply according to claim 2, characterized in that, The hanging base (8) has an assembly cavity (11) with the opening facing downward. The ferrite ferromagnetic ring (9) is assembled in the assembly cavity (11) of the hanging base (8) from the opening end upward. The rear end of the hanging base (8) has a lead wire groove (12). The rear end of the ferrite ferromagnetic ring (9) is connected to the lead wire groove (12). When the output line of the power supply component passes through the ferrite ferromagnetic ring (9), it passes through the lead wire groove (12). A first gap (13) is left between the front end of the ferrite ferromagnetic ring (9) and the front side wall of the assembly cavity (11). The first gap (13) is connected to the front area (4) vertically.

4. The highly stable pulse bias power supply according to claim 3, characterized in that, The anti-interference component also includes high-density sound-absorbing cotton (15) installed at the front end of the hanger (8), and the end of the terminal (7) extending into the front area (4) is provided with a clamp (16).

5. The highly stable pulse bias power supply according to claim 4, characterized in that, The bottom end of the high-density sound-absorbing cotton (15) reaches the opening end of the hanging seat (8), and the top end of the high-density sound-absorbing cotton (15) reaches the top surface of the hanging seat (8).

6. The highly stable pulse bias power supply according to claim 5, characterized in that, The top of the mesh plate (14) is close to the bottom of the hanging base (8) and there is a second gap (17) between it and the ferrite ring (9).

7. The highly stable pulse bias power supply according to claim 6, characterized in that, The flow seat (3) has air inlets (18) at both ends. The air inlet (18) at the front end enters the front area (4). The bending part (6) bends upward and tilts backward. The inclined surface of the bending part (6) forms a first turbulent space (19) with the air inlet (18) at the front and a second turbulent space (20) with the vertical surface of the mesh plate (14).

8. The highly stable pulse bias power supply according to claim 7, characterized in that, The upper part of the fan (10) intakes air towards the upper side of the flow seat (3), and the lower part of the fan (10) intakes air towards the air inlet (18) at the rear end of the flow seat (3).

9. The highly stable pulse bias power supply according to claim 8, characterized in that, The ferrite ferromagnetic ring (9) is fitted with a lifting ring (21), and a threaded sleeve (22) is installed on the top of the lifting base (8). A bolt (23) is installed on the threaded sleeve (22). The lifting ring (21) is installed at the bottom end of the bolt (23) such that, under the connection of the bolt (23), a third gap (24) is formed between the upper outer surface of the ferrite ferromagnetic ring (9) and the top surface of the lifting base (8). The lead groove (12) communicates with the third gap (24).

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