Substrate conveying apparatus, substrate conveying method, and recording medium

Abstract

The invention relates to a substrate conveying apparatus, a substrate conveying method, and a recording medium. The substrate transport apparatus includes: a robot that holds and transports a substrate; a camera that captures an image of the substrate held by the robot; and a storage unit. The robot includes: a robot arm including a plurality of link bodies; a manipulator fixed to one of the plurality of link bodies and holding the substrate; and a controller. And the camera is fixed on the connecting rod body for fixing the manipulator and faces the manipulator. The storage unit stores position information of a motor driving the link body of the robot received from the controller of the robot, and image information acquired by the camera.

Description

This application is a divisional application of the invention patent application with patent application number 202080085828.5 (international application date: December 4, 2020, and invention name: "image confirmation computer"). TECHNICAL FIELD

[0001] The present application relates to a substrate transport apparatus, a substrate transport method, and a recording medium. BACKGROUND

[0002] In the past, for example, a robot has been used for transporting a substrate such as a wafer. The robot of Patent Document 1 is provided with a controller that controls the movement of the robot. [Related Art Documents] [Patent Documents]

[0003] Patent Document 1: Japanese Patent Application Publication No. 2008-28134 SUMMARY Technical Problem to be Solved by the Invention

[0004] A robot can malfunction for various reasons. In such a case, maintenance work needs to be performed in accordance with the malfunction that has occurred. In a wafer processing apparatus or the like, in order to achieve high-level information management, it is often the case that data is restricted from being carried to other locations and communication with an external network is restricted. In this situation, it is required to quickly determine the cause of the robot malfunction and eliminate it.

[0005] In view of the above, the present application aims to, for example, enable an operator to quickly and properly grasp the situation when a robot malfunctions. Technical Solution to the Problem

[0006] The problem to be solved by the present application is as described above, and the means for solving the problem and its effects are described below.

[0007] According to the present application, an image confirmation computer of the following structure is provided. That is, the image confirmation computer is used for confirming an image related to the operation of a robot. The image confirmation computer includes a storage unit and a calculation unit. The storage unit is capable of storing information. The calculation unit outputs information based on the storage contents of the storage unit. The storage unit is used for storing position information of a motor and image information. The motor is used to drive a link body of the robot. The position information of the motor is received from a controller of the robot. The image information is capable of being acquired by a camera installed in the robot. The calculation unit displays a model area and an image area side by side on at least either of a local computer and a computer connected to the local computer. In the model area, a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics. The image is displayed in the image area.

[0008] By displaying the two areas side by side in this way, the operator can comprehensively and intuitively grasp the situation related to the operation of the robot. Thus, the operator can handle the situation smoothly and accurately. (EFFECT OF THE INVENTION)

[0009] According to the present application, the operator can quickly and well grasp the situation, for example, when the robot has a failure. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a plan cross-sectional view showing a part of a semiconductor processing apparatus to which an image confirmation computer of an embodiment of the present application is applied; Figure 2 is a side cross-sectional view showing a part of a semiconductor processing apparatus; Figure 3 is a schematic view illustrating a communication network built in a semiconductor processing apparatus; Figure 4 is a view showing a display example of a situation confirmation screen displayed on an image confirmation computer; Figure 5 is a view showing a display example of a log analysis screen displayed on a processing computer; Figure 6 is a view showing a display example of a failure processing support screen; and Figure 7 is a view showing a display example of an instruction screen. EXPLANATION OF REFERENCE NUMERALS 27 robot 44 controller (robot controller) 65 image confirmation computer 66 storage circuit (storage unit) 67 calculation circuit (calculation unit) 68 display (display unit) 72 model area 73 image area 74 log area DETAILED DESCRIPTION

[0011] Embodiments of the present application will be described below with reference to the drawings. Figure 1 is a plan view showing a part of a semiconductor processing apparatus 20 to which an embodiment of the present application is applied. Figure 2 is a side sectional view showing a part of the semiconductor processing apparatus 20. In Figure 1 and Figure 2 In Figs. 7 to 9, the state in which the robot 27 is moved in various ways is shown by two-dot chain lines.

[0012] The semiconductor processing apparatus 20 performs a predetermined process on a wafer 24 as a processing target substrate. In the present embodiment, the wafer 24 is a semiconductor wafer. As the process applied to the wafer 24, various kinds of processings such as a heat treatment, an impurity introduction processing, a thin film formation processing, a photolithography processing, a cleaning processing, a planarization processing, and the like can be exemplified. A substrate processing other than the above-mentioned substrate processing can also be performed in the semiconductor processing apparatus 20.

[0013] The semiconductor processing apparatus 20 is provided with a wafer processing device 22 and a wafer transfer device 23. The semiconductor processing apparatus 20 is defined in advance by, for example, SEMI standards. SEMI is an abbreviation of Semicondutor Equipment and Materials International. In this case, for example, a front opening unified pod (FOUP) 25 and a pod opener 26 for opening and closing the FOUP 25 conform to the standards of E47.1, E15.1, E57, E62, E63, E84, and the like of the SEMI standards. However, the configuration of the semiconductor processing apparatus 20 can be different from the SEMI standards.

[0014] A processing space 30 filled with a predetermined gas is formed on the wafer processing device 22. The wafer processing device 22 performs the above-mentioned process on the wafer 24 in the processing space 30. The wafer processing device 22 is provided with, in addition to a processing device main body that performs the process on the wafer 24, a processing space forming portion that forms the processing space 30, a conveyance device that conveys the wafer 24 in the processing space 30, and an adjustment device that controls the gas that fills the environment in the processing space 30. The adjustment device is realized by, for example, a fan filter unit.

[0015] The wafer transfer device 23 removes the unprocessed wafer 24 from the wafer transfer cassette 25 and supplies it to the wafer processing apparatus 22. It then removes the processed wafer 24 from the wafer processing apparatus 22 and reassembles it back into the wafer transfer cassette 25. The wafer transfer device 23 functions as an equipment front-end module (EFEM). In the semiconductor processing apparatus 20, the wafer transfer device 23 serves as an interface for the transfer of the wafer 24 between the wafer transfer cassette 25 and the wafer processing apparatus 22. While moving between the space within the wafer transfer cassette 25 and the processing space 30 of the wafer processing apparatus 22, the wafer 24 passes through a high-purity preparation space 29 filled with a predetermined ambient gas.

[0016] The preparation space 29 is a closed space with contamination control measures in place. In the preparation space 29, airborne fine particles are controlled below a defined purity level, and environmental conditions such as temperature, humidity, and pressure are managed as needed. In this embodiment, both the processing space 30 and the preparation space 29 are maintained at a predetermined purity level in a manner that does not adversely affect the processing of the wafer 24. This purity level may, for example, be CLASS 1 as defined by ISO (International Organization for Standardization).

[0017] Robot 27 functions as a wafer transfer robot. In this embodiment, robot 27 is implemented as a horizontal multi-joint robot of the SCARA (Selective Compliance Assembly Robot Arm) type. Robot 27 is configured within preparation space 29.

[0018] like Figure 2 As shown, robot 27 includes a base 41, a robot arm 42, an up-down drive actuator 43a, a horizontal drive actuator 43b, and a controller 44.

[0019] The base 41 functions as a base component supporting the robotic arm 42. The robotic arm 42 is mounted on the base 41.

[0020] The robotic arm 42 has a linkage structure comprising multiple links sequentially connected in a direction from the base end toward the front end. A manipulator 45 is provided at the front end of the robotic arm 42. The manipulator 45 is capable of holding or releasing the wafer 24. Various methods can be used to hold the wafer 24 using the manipulator 45, such as placing the wafer 24 on the manipulator 45, clamping the wafer 24 with the manipulator 45, or adsorbing the wafer 24 onto the manipulator 45 using negative pressure.

[0021] The up-down drive actuator 43a displaces the robot arm 42 in the up-down direction. The up-down drive actuator 43a is configured as, for example, an electric motor. By moving the robot arm 42 in the up-down direction, the height of the robot hand 45 can be changed.

[0022] The horizontal drive actuator 43b rotates each link body of the robot arm 42 about the corresponding joint axis. The horizontal drive actuator 43b is configured as, for example, an electric motor. By rotating each link body about the joint axis in the up-down direction, the robot hand 45 can be moved in the horizontal plane.

[0023] The controller 44 controls the up-down drive actuator 43a and the horizontal drive actuator 43b in accordance with a predetermined motion program or a movement instruction input by a user, and moves the robot hand 45 toward a predetermined position. As shown in Figure 3 The controller 44 includes a storage circuit 46, an arithmetic circuit 47, and an output device 48. The storage circuit 46 stores a predetermined program and various data. The arithmetic circuit 47 performs arithmetic processing in accordance with the program. The output device 48 outputs a control signal to the up-down drive actuator 43a and the horizontal drive actuator 43b in accordance with the result of the arithmetic processing by the arithmetic circuit 47. The storage circuit 46 is realized by, for example, a RAM, a ROM, and an HDD, or the like. The arithmetic circuit 47 is realized by, for example, a CPU.

[0024] As shown in Figure 3 The semiconductor processing apparatus 20 includes a high-order controller 61. The high-order controller 61 transmits an instruction to perform a semiconductor processing step to various devices that constitute the semiconductor processing apparatus 20.

[0025] The high-order controller 61 is connected to the controller 44 included in the robot 27 in a wired or wireless manner. The high-order controller 61 transmits an instruction to the controller 44 in such a manner that the robot 27 performs a desired action at a desired time. The controller 44 controls the robot 27 in accordance with the instruction received from the high-order controller 61.

[0026] In the case where a certain failure occurs, the controller 44 transmits information about the failure to the high-order controller 61. The program by which the controller 44 controls the robot 27 is constituted by a plurality of modules. Here, a module refers to a portion of a program by which a certain action unit is realized by the robot 27. As the action unit, for example, an action of placing a wafer 24 held by a robot hand 45 at a predetermined position, and an action of holding the wafer 24 placed at a predetermined position by the robot hand 45, or the like can be cited, but is not limited thereto.

[0027] The up-down drive actuator 43a and the horizontal drive actuator 43b are each configured as an electric motor. The electric motor is a publicly known configuration, and although not shown, includes a motor drive circuit, a motor main body, a rotational position sensor, and a current sensor. The motor main body includes a stator, a rotor, and an output shaft. The controller 44 supplies a current to the motor drive circuit via a power supply circuit in a manner in which the electric motor performs a desired operation. As a result, the output shaft of the electric motor rotates in accordance with the current flowing therethrough.

[0028] The current flowing through the motor drive circuit is determined by a target value of the operation of the electric motor and a measured value of the operation. As the target value of the operation of the electric motor, for example, a target value related to a rotational position, a rotational speed, or a rotational acceleration can be cited. Likewise, as the measured value, for example, a measured value related to a rotational position, a rotational speed, or a rotational acceleration can be cited. In the control of the current flowing through the motor drive circuit, a control rule such as a feedback control rule or an application control rule can also be used.

[0029] A camera 62 is fixed to a link body in the robot arm 42 in which the robot hand 45 is fixed. As shown in FIG. 1, the camera 62 is connected to an image confirmation computer 65 via a network. The image confirmation computer 65 can be, for example, a mobile terminal, a personal computer, or the like. Figure 3

[0030] A camera 63 is provided on the semiconductor processing apparatus 20 to take an image of the robot 27. The camera 63 is connected to the controller 44 in a wired or wireless manner.

[0031] In a case in which some kind of abnormality occurs in the robot 27 and there is a need to troubleshoot, an operator can operate some computer to acquire information for processing. The computer can also be referred to as a processing computer 70. In the present embodiment, the high-level controller 61 functions as the processing computer 70.

[0032] The image confirmation computer 65 includes a storage circuit (storage section) 66 and an arithmetic circuit (arithmetic section) 67. The storage circuit 66 is implemented by, for example, a RAM, a ROM, an HDD, or the like. The arithmetic circuit 67 is implemented by, for example, a CPU.

[0033] Information such as that shown in (1) to (6) below is stored in the storage circuit 66 of the image confirmation computer 65 and the storage circuit 46 of the controller 44 (hereinafter, simply referred to as a storage circuit). These storage operations can be performed continuously, or can be performed intermittently and dispersedly.

[0034] (1) Information related to images obtained by the cameras 62, 63 ​(2) Information related to signals received by the controller 44 from the higher-order controller 61 and signals transmitted by the controller 44 to the higher-order controller 61 (communication log information) (3) Information related to programs executed by the controller 44 for controlling the robot 27 (4) Information related to current values, positions, speeds, accelerations (including negative accelerations. The same applies hereinafter), position deviations, speed deviations, and acceleration deviations of motors possessed by the robot 27 (5) Information related to output signals from various sensors (e.g., light projection / shading sensors, piston position sensors of pneumatic actuators, pressure sensors, valve position sensors of electromagnetic valves) mounted on the robot 27 (6) Information related to input signals to various machines (e.g., electromagnetic valves) mounted on the robot 27

[0035] Among them, the current value of the motor is measured by a current sensor provided in a motor drive circuit. The position of the motor can be obtained from a measured value of a rotational position sensor provided in the motor. The speed and acceleration of the motor can be obtained by time-differentiating the measured value of the rotational position sensor. The position deviation, speed deviation, and acceleration deviation can be obtained by calculating the difference between the position, speed, and acceleration and target position, target speed, and target acceleration.

[0036] A Web server application and a database application are installed in advance in the controller 44, and a program is stored in the storage circuit 46.

[0037] However, the robot 27 can malfunction for some reason. In this case, the image confirmation computer 65 can display a situation confirmation screen 71 as shown in Figure 4 Fig. 8, according to the contents stored in the storage circuit 66. The situation confirmation screen 71 has a model area 72, an image area 73, a log area 74, and a graph area 75.

[0038] In the model area 72, a two-dimensional and three-dimensional model for reproducing the posture of the robot 27 at a certain time is displayed by computer graphics. The posture of the displayed model is calculated based on the position of the motor stored in the storage circuit 66. A search bar 72a is provided in the lower part of the model area 72, and a slider, a reproduction key, a pause key, and a reverse reproduction key are provided on the search bar 72a. Thus, the motion of the robot 27 can be reproduced in the display of the model area 72, or the motion of the robot 27 can be stopped at a certain time. Even when the actual robot 27 is located, for example, behind the camera 63 and cannot be imaged, the operator can easily grasp the posture of the robot 27 by referring to the display content of the model area 72.

[0039] In the image area 73, an imaged image obtained by the camera 62 and stored in the storage circuit 66 is displayed. The reproduction position of the image can be designated by the search bar 72a. Thus, the reproduction of the model motion in the model area 72 and the reproduction of the animation in the image area 73 can be synchronized.

[0040] In the log area 74, a communication log stored in the storage circuit 66 is displayed. Information related to the program executed for controlling the robot 27 can also be displayed in the log area 74.

[0041] In the graph area 75, information related to the current value, position, speed, acceleration, position deviation, speed deviation, and acceleration deviation of the motor stored in the storage circuit 66 is displayed in different graphs, respectively. In the graph area 75, the information related to the motor is displayed in different graphs, respectively. Figure 4 In the illustrated example, a line graph is displayed in which each value is taken on the vertical axis and the time is taken on the horizontal axis. A vertical straight line (time graph) is displayed in each graph of the graph area 75. The position of the straight line corresponds to the time at the point in time displayed in the model area 72 and the image area 73.

[0042] When a certain failure occurs in the robot 27, the information stored in the storage circuit 66 within a predetermined time range including the time when the failure occurs (for example, a range from several seconds before the time when the failure occurs to several seconds after the time when the failure occurs) is displayed as a display object on the status confirmation screen 71.

[0043] When the reproduction key is pressed on the search bar 72a, the information of the display object can be reproduced in the model area 72 and the image area 73. Similarly, when the reverse reproduction key is pressed, the information of the display object is reverse-reproduced. When the pause key is pressed, the reproduction / reverse reproduction is paused, and if the pause key is pressed again, the pause is released. The search bar 72a can also include a key for performing a well-known fast-forward operation / reverse operation.

[0044] In the case of reproducing the information of the display object, the movement of the robot 27 reproduced is displayed in the model area 72, and the photographic image of the camera 62 is dynamically displayed in the image area 73. At the time of reproduction, the communication log is displayed in the log area 74, and the graph is displayed in the graph area 75. In the log area 74, the log history at the time indicated by the search bar 72a is displayed. This log history is sequentially recorded with the time in synchronization with the reproduction. In the graph area 75, the time graph in each graph moves horizontally in synchronization with the reproduction.

[0045] With the above configuration, the operator can quickly determine the cause of the failure and deal with it from various angles by operating the image confirmation computer 65 at the time of the failure.

[0046] In the example, the information stored in the storage circuit 66 in a predetermined time range before and after the failure is generated is displayed as the display object on the condition confirmation screen 71. Instead of this, the information stored in the action unit or module executed in the controller 44 at the time of the failure can be displayed as the display object on the condition confirmation screen 71.

[0047] The model area 72 and the image area 73 are arranged side by side in proximity to each other on the same condition confirmation screen 71. Thus, the operator can comprehensively and intuitively understand the condition in which the failure is generated from the information of the two areas.

[0048] The condition of the robot 27 as a whole can be obtained from the model area 72, and the detailed condition of the periphery of the front end of the robot hand 45 can be obtained from the image area 73. Thus, the information of the two-dimensional or three-dimensional model displayed in the model area 72 and the information of the photographic image displayed in the image area 73 can complement each other. In this sense, it is also advantageous to display the two images side by side.

[0049] In addition, since the addition of the log history in the log area 74 is performed at the time coinciding with the time of displaying the model area 72 and the image area 73, the operator does not get confused in grasping the condition.

[0050] Since the model area 72 and the image area 73 are arranged adjacent to each other, the operator can easily grasp the model image and the photographic image as unified information. Thus, the following configuration can be provided: even if the reproduction / stop of the image in the image area 73 is performed by the search bar 72a of the model area 72, it is difficult to generate a sense of disharmony.

[0051] In Figure 4In the example of FIG. 7, the model area 72 is disposed on the left side and the image area 73 is disposed on the right side. However, the left and right sides can be reversed. In addition, the model area 72 and the image area 73 can be arranged vertically.

[0052] Next, a log analysis screen 81 that can be displayed on a display of the processing computer 70 (for example, the display 68 shown in FIG. 6) by the controller 44 will be described with reference to FIG. 8. Figure 5 Figure 3

[0053] In the case where a certain failure occurs in the robot 27, a communication log that describes the contents of the communication around the time of the failure is information that is very valuable in determining the cause of the failure and the like. However, the communication log generally contains contents that are highly relevant to the failure and contents that are less relevant to the failure, and in many cases, the contents that are less relevant to the failure occupy a larger portion. Thus, there is a risk that the contents that are highly relevant to the failure can be buried and difficult to find.

[0054] Therefore, in the present embodiment, in the log analysis screen 81 that is output to the processing computer 70 by the controller 44, there is a function of extracting and displaying the contents that are highly relevant to the failure even in the communication log. Thus, it is possible to easily determine the cause of the failure and perform processing. The processing computer 70 can function as a terminal of the controller 44.

[0055] Specifically, in each line of the communication log, a communication code that shows the type of communication is described. In the storage circuit 46 of the controller 44, information of the communication codes that are highly relevant to the failure in the communication log is stored in advance in association with information that determines the type of failure (for example, a failure code). In the case where the operator instructs to extract the communication log, the communication log is filtered so that only the types of communication that are highly relevant to the failure code are displayed, and is output to the processing computer 70 from the controller 44.

[0056] In the case where the communication log is displayed in such a limited range in the processing computer 70, the controller 44 can simultaneously and centrally display, for example, the following information (1) to (5). The operator can more easily understand the situation from this log analysis screen 81.

[0057] (1) A failure explanation area 82. In the display contents of the failure explanation area 82, there are included, for example, the date and time of the occurrence of the failure, the failure code, and a summary of the failure. (2) A detailed log area 83. In the display contents of the detailed log area 83, there are included the communication logs extracted as described above from a predetermined time before the occurrence of the failure to the time of the occurrence of the failure. ​​(3) Action position area 84. In the action position area 84, a value to show the posture of the robot 27 at the time of the occurrence of a fault is displayed in the form of a position measured in the motor or a target value. (4) Program state area 85. In the program state area 85, information to determine the module executed for the control of the robot 27 from the communication log displayed in the detailed log area 83 is displayed. However, each line of the communication log can also be selected in the detailed log area 83, and the program from the log of the selected line is displayed in the program state area 85. (5) Input / output signal area 86. The input / output signal area 86 displays an output signal from various sensors mounted on the robot 27, and an input signal input to various machines.

[0058] Next, the fault processing support screen 88 that can be displayed by the processing computer 70 will be described with reference to Figure 6

[0059] The storage circuit 46 of the controller 44 stores data of a processing method at the time of the occurrence of a certain fault in the robot 27. By outputting this processing method from the controller 44 to the processing computer 70 and displaying it on the display (for example, the display 68 shown in FIG. 1), the operator can be supported in the fault response. Figure 3

[0060] As the content displayed on the display 68 for supporting the operation of processing a fault, for example, the following (1) to (3) can be given.

[0061] (1) Fault explanation area 89. In the fault explanation area 89, the occurrence date, time, and fault code of a fault are displayed. In the fault explanation area 89, a fault occurring within a predetermined time from the time of the occurrence of the most recent fault or a fault occurring a predetermined number of times from the time of the occurrence of the most recent fault can also be selectively displayed. In the following description, the past faults displayed in the fault explanation area 89 can also be referred to as a fault history.

[0062] ​​(2) Processing content description area (detailed description area) 90. In the processing content description area 90, a processing method corresponding to the failure selected as the description object in the failure description area 89 is displayed in detail. The processing method is prepared in advance by the manufacturer of the robot 27 in correspondence with the failure code, and is stored in the storage circuit 46 of the controller 44 in the form of appropriate electronic data such as HTML data, image data, animation data, PDF data, etc. In the case where the failure history is selected in the failure description area 89, the processing method corresponding to the failure history can also be displayed in the processing content description area 90. The animation data can be, for example, data obtained by photographing the robot 27 by the camera 63 when the failure occurred in the past.

[0063] (3) Associated item list area 91. In the associated item list area 91, a list of items related to the failure selected as the description object in the failure description area 89 is displayed. In the case where the failure history is selected in the failure description area 89, the items related to the failure history can also be displayed in the associated item list area 91. The list is composed of one or more associated items. As the associated items, for example, the following (a), (b) can be listed. (a) Past work records corresponding to the present failure or the selected failure history. In the case where the failure occurs, the operator can cause a work record creation screen to be displayed on the display 68 by operating an appropriate user interface device. The interface can be, for example, a touch panel provided integrally with the display 68, or a hardware key disposed in the vicinity of the display 68, but is not limited thereto. The operator can create a work record by specifying, on the work record creation screen, the failure code, the failure occurrence date and time, the operation date and time, the operator, the operation content and its result, the title of the work record, the importance degree of the work record, etc. The work record input by the operator into the processing computer 70 is transmitted from the processing computer 70 to the controller 44. The controller 44, after receiving the data of the work record, associates the work record with the failure code and stores it in the storage circuit 46. The importance degree and the title of the work record are displayed on the associated item list area 91, for example. (b) Failures related to the present failure or the selected failure history. As the related failures, for example, another failure that can occur simultaneously with a certain failure, and another failure that occurs as a result of the occurrence of a certain failure can be listed, but are not limited thereto. The association of failures with failures can be prepared in advance by the manufacturer of the robot 27 and stored in the storage circuit 46 of the controller 44. The association of failures with failures can also be configured to be registered in the storage circuit 46 by the operation of the operator. For example, the failure codes are displayed in the associated item list area 91.

[0064] The operator can appropriately select the associated item displayed on the associated item list area 91 by appropriately operating the user interface device. The information of the selected associated item is transmitted from the processing computer 70 to the controller 44. The controller 44 transmits various data to the processing computer 70 in a manner that, in the case of selecting a job record, the content of the job record is displayed on the processing content description area 90, and in the case of selecting an associated trouble, the processing method of the trouble is displayed on the processing content description area 90.

[0065] Although a plurality of associated items can be displayed on the associated item list area 91, the controller 44 can control the processing computer 70 in a manner that the associated items are sorted so that the associated items having high priority are located at the upper portion and the associated items having low priority are located at the lower portion. Figure 6 The state in which the associated items are arranged in order of priority is displayed on the associated item list area 91. The priority can be determined, for example, from the frequency of occurrence of the trouble, the frequency of display of the explanation screen, the importance degree specified in the job record, the degree of association determined from the current sensor value, the position sensor value at the time of occurrence of the trouble, and the like. In the case where a plurality of viewpoints are adopted for determining the priority, the controller 44 can calculate, for example, the sum of the indices obtained by quantifying the frequency of occurrence of the trouble and the like multiplied by appropriate weights, and use the obtained sum as the priority.

[0066] For example, in the case where a collision occurs, an abnormality such as an increase in the positional deviation is detected for a plurality of motors that drive the respective joints. On the other hand, for example, in the case where a cable of a certain motor is broken, an abnormality is detected only for the motor. It is also possible to store in advance an abnormality detection pattern assumed in this way, and when an abnormality occurs, to calculate the degree of similarity between the actual abnormality detection pattern and the assumed abnormality detection pattern, and to preferentially display the trouble shooting content for the abnormality corresponding to the assumed abnormality detection pattern having a high degree of similarity. As the abnormality detection pattern, a combination of the presence / absence of a plurality of detection items (positional deviation or speed deviation, or the like) or a measured value such as the current value of a certain motor at the time of occurrence of an abnormality can be used. In addition, as the degree of similarity, for example, in the case where a combination of the presence / absence of a plurality of detection items is used as the abnormality detection pattern, the number of combinations in which the presence / absence of a plurality of detection items are identical can be used. In this case, it is also possible to increase the influence of the degree of similarity for important detection items by weighting a plurality of detection items.

[0067] With the above configuration, it is possible to easily determine the cause of the trouble and perform the processing. In addition, by also using the job record logged by the user as a display object on the trouble processing support screen 88, it is possible to perform the processing based on the accumulation of knowledge acquired through past processing, and it is also possible to share the knowledge among a plurality of people. Since the associated items are sequentially displayed starting from the order of high priority, it is possible to efficiently perform the processing of the generated trouble.

[0068] In the storage circuit 46 of the controller 44, data for determining a cause of a failure, a processing method for describing a failure, and an instruction for describing a method of using the robot are stored. As shown in Figure 7 The user can operate the user interface device according to the situation, and the data and the instruction are displayed on the display 68 for reference.

[0069] The instruction screen 93 will be described simply. A table of contents display area 94 is provided on the left side of the instruction screen 93, and items of a table of contents of the instruction are displayed in a list in the table of contents display area 94. A detailed display area 95 is provided on the right side of the instruction screen 93, and specific contents of the instruction corresponding to an item of the table of contents selected in the table of contents display area 94 can be displayed in the detailed display area 95. A search box 96 is provided on the upper side of the table of contents display area 94, and a character search of character data of the instruction can be performed as an object. Thus, it is not necessary to bring a paper-made instruction to the robot 27.

[0070] Each of the log analysis screen 81, the failure processing support screen 88, and the instruction screen 93 described above is realized by cooperation of a Web server application program installed in the controller 44 in advance and a Web browser application program installed in the processing computer 70 in advance. The operator can display the log analysis screen 81, the failure processing support screen 88, and the instruction screen 93 in the form of a Web page or the like on, for example, the display 68 by starting the Web browser on the processing computer 70 and performing appropriate operations.

[0071] The processing computer 70 (in other words, a terminal for the controller 44) for viewing various screens can also be prepared separately from the higher-order controller 61. In any case, a Web browser application program is installed on the computer on the viewing side. The Web server of the controller 44 determines display contents from the storage contents of the storage circuit 46 in response to a request from the Web browser of the computer on the viewing side, and transmits various data such as HTML data. On the computer on the viewing side, the Web browser draws a screen such as a Web page in accordance with the received various data. In this configuration, the operator only needs to prepare an appropriate terminal in which a general Web browser application program is installed as the computer on the viewing side, and can utilize the functions of the log analysis screen 81, the failure processing support screen 88, and the instruction screen 93. Thus, in the present embodiment, it is not necessary to install special software such as a dedicated application program on the terminal. Thus, this configuration is very suitable for use in a semiconductor manufacturing plant or the like in which the carrying-in of electronic equipment is strictly limited and a high level of security measures is required for the carried-in electronic equipment.

[0072] As explained above, in the present embodiment, the image confirmation computer 65 for confirming the image related to the operation of the robot 27 is provided with a storage circuit 66 and an arithmetic circuit 67. The storage circuit 66 is capable of storing information. The arithmetic circuit 67 outputs information based on the storage contents of the storage circuit 66. The storage circuit 66 stores position information of the motors driving the link bodies of the robot 27, and information of the image. The position information of the motors is capable of being received from the controller 44 of the robot 27. The image information is capable of being acquired by the camera 62 installed on the robot 27. The arithmetic circuit 67 is used to display the model area 72 and the image area 73 side by side on the display of the local computer. In the model area 72, a two-dimensional or three-dimensional model reproducing the posture of the robot 27 is displayed by computer graphics. The image is displayed in the image area 73.

[0073] By displaying the two areas side by side, the operator is capable of comprehensively and intuitively grasping the situation related to the operation of the robot 27. Thus, the operator is capable of smoothly and accurately handling the situation (e.g., the generation of a failure).

[0074] In addition, in the image confirmation computer 65 of the present embodiment, the time corresponding to the model displayed in the model area 72 is synchronized with the time corresponding to the image displayed in the image area 73.

[0075] Thus, the reproduction of the model in the model area 72 is synchronized with the reproduction of the animation in the image area 73. Therefore, the operator watching the screen is capable of easily grasping the situation.

[0076] In addition, in the image confirmation computer 65 of the present embodiment, the storage circuit 66 stores the communication log of the controller 44 communicating with other devices. The arithmetic circuit 67 is capable of displaying a log area 74 for outputting the history of the communication log on the local computer in addition to the model area 72 and the image area 73. The display time of the communication log history in the log area 74 is synchronized with the time of the model area 72 and the image area 73.

[0077] Thus, the display of the log area 74 is changed at the time corresponding to the display of the model area 72 and the image area 73. Therefore, the operator will not be confused in grasping the situation.

[0078] In addition, in the image confirmation computer 65 of the present embodiment, the arithmetic circuit 67 displays a common search bar 72a for designating the time corresponding to the model displayed in the model area 72 and the time corresponding to the image displayed in the image area 73.

[0079] Thus, it is possible to specify which situation at which time is displayed in the model area 72 and the image area 73 by using the intuitive operation of the search bar. Therefore, the operator can easily grasp the situation at the time that he or she wants to know. In addition, since the search bar 72a is common, it is possible to realize a simple screen that is not easily confused during operation.

[0080] The above describes the preferred embodiment of the present application, but the configuration can be changed as follows, for example.

[0081] It is also possible to store information in the normal state of the robot 27 in at least one of the storage circuit 66 of the image confirmation computer 65 and the storage circuit 46 of the controller 44. In this case, when a failure occurs, it is possible to display the information in the normal state in the image confirmation computer 65 or the processing computer 70 for reference. This configuration is particularly useful in the graph area 75 on the situation confirmation screen 71 displayed by the image confirmation computer 65. This is because the graph of the graph area 75 can greatly fluctuate even in the normal state, and without a comparison standard, it is not possible to distinguish between abnormalities and normality. It is also possible to display a parameter (for example, the average, maximum, and minimum values of the numerical values) that shows the characteristics of the graph in the normal state in the graph of the graph area 75.

[0082] The computer that displays at least one of the log analysis screen 81, the failure processing support screen 88, and the instruction manual screen 93 can also be a teacher that is operated to teach the robot 27.

[0083] When teaching is performed by the teacher, the image acquired by the camera 62 installed on the robot 27 can also be used to assist the teaching.

[0084] It is also possible to realize the image confirmation computer 65 and the processing computer 70 by one hardware (computer).

[0085] The situation confirmation screen 71 displayed by the image confirmation computer 65 can also be displayed by a browser, like the log analysis screen 81 and the like.

[0086] The image confirmation computer 65 can also cause the display of another computer connected to the image confirmation computer 65 to display the situation confirmation screen 71 instead of or in addition to the display of the image confirmation computer 65.

Claims

1. A substrate transport device, characterized in that, have: Robots hold and transport the substrate; A camera to photograph the substrate held by the robot; and Storage Department The robot has the following characteristics: A robotic arm, consisting of multiple links; A robotic arm, fixed to one of the plurality of linkages, holds the substrate; and Controller The camera is fixed to the connecting rod body for the robotic arm to hold, and faces the robotic arm. The storage unit stores the position information of the motor that drives the linkage of the robot, received from the controller of the robot, and the image information acquired by the camera.

2. The substrate transport device according to claim 1, characterized in that, The camera is equipped with the function of shooting animation and is configured to capture the entire upper surface of the substrate held by the robot.

3. The substrate transport device according to claim 2, characterized in that, It further includes a computing unit that outputs information based on the stored content of the storage unit. The computing unit displays the model area and the image area side by side on the display. The model area displays a two-dimensional or three-dimensional model that reproduces the posture of the robot through computer graphics, and the image area displays an image configured to represent the state of the substrate.

4. The substrate transport device according to claim 3, characterized in that, Synchronized with the time corresponding to the model displayed in the model area and the time corresponding to the image displayed in the image area.

5. The substrate transport device according to claim 4, characterized in that, The calculation unit displays a shared search bar, which is used to specify the time corresponding to the model displayed in the model area and the time corresponding to the image displayed in the image area.

6. The substrate transport device according to any one of claims 3 to 5, characterized in that, The computing unit displays the graphics area alongside the model area and the image area on the display, and the graphics area at least graphically displays the position information of the motor.

7. The substrate transport apparatus according to claim 6, characterized in that, The arithmetic unit displays a time graph in the graph of the graphics area at a position corresponding to at least one of the time corresponding to the time of the model displayed in the model area and the time of the time of the image displayed in the image area.

8. The substrate transport apparatus according to claim 7, characterized in that, The information of the display objects in the model area and the image area can be regenerated in a synchronized state. In the graphic area, the graphic at the moment moves synchronously with the reproduction of information of the displayed object.

9. A substrate transport method, which is a substrate transport method of a substrate transport apparatus, the substrate transport apparatus comprising: Robots hold and transport substrates; and A camera is used to photograph the substrate held by the robot. The robot has the following characteristics: A robotic arm, consisting of multiple links; A robotic arm, fixed to one of the plurality of linkages, holds the substrate; and Controller The camera is fixed to the connecting rod body for the robotic arm to hold. The substrate transport method is characterized by having: In the shooting process, the robotic arm holds and transports the substrate while the camera captures an image of the robotic arm containing the substrate. The motor position information acquisition process involves acquiring position information from the controller of the motor that drives the linkage of the robot; and In the display process, the image obtained in the shooting process and the position information of the motor obtained in the motor position information acquisition process are displayed on the monitor.

10. A recording medium, which is a computer-readable recording medium, characterized in that, The program is recorded, which causes the computer to perform the following steps: In the shooting process, while the substrate is held and transported by the robotic arm, the robotic arm is photographed by a camera fixed to the linkage of the robotic arm in such a way that the substrate is included in the image. The motor position information acquisition process involves acquiring the position information of the motor that drives the linkage of the robot; and In the display process, the image obtained in the shooting process and the position information of the motor obtained in the motor position information acquisition process are displayed on the monitor.

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