Seed crystal pulling assembly and its assembly method

Abstract

This invention belongs to the technical field of single crystal growth equipment, specifically relating to a seed crystal clamping assembly, and more particularly to a seed crystal pulling assembly and its assembly method. The seed crystal pulling assembly, through a unique design that connects the air passage, air slip ring, and heat dissipation chamber, can actively introduce controllable cooling gas from an external air source into the rotating head, thereby uniformly dissipating heat from the rotating head. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the shortcomings of water cooling methods such as insufficient control precision and susceptibility to localized overcooling. Simultaneously, through the cooperation of the limiting ring and the first graphite carbon paper, a reliable sealing structure is formed at the threaded connection, preventing airflow from overflowing from the threaded connection, thereby reducing disordered airflow movement and improving the uniformity of air cooling and the accuracy of temperature gradient control.

Description

Technical Field

[0001] This invention belongs to the technical field of single crystal growth equipment, specifically relating to a seed crystal clamping component, and more particularly to a seed crystal pulling component and its assembly method. Background Technology

[0002] Silicon carbide (SiC), as a representative of third-generation semiconductor materials, has been widely used in new energy vehicles, 5G communications, smart grids and other fields due to its excellent properties such as wide bandgap, high breakdown field strength and high thermal conductivity.

[0003] Silicon carbide crystals are generally prepared using physical vapor transport (PVT) or high-temperature solution slurry (HTSG) methods. Stable heat dissipation conditions are required in the single-crystal growth region to allow for cooling and precipitation on the seed crystal surface under appropriate positive gradient conditions, resulting in an orderly arrangement of crystals. The rationality and stability of heat dissipation in the single-crystal growth region are crucial in this process, and dynamic control of heat dissipation is even more critical during long-term single-crystal growth.

[0004] Related technologies mainly employ natural temperature gradients formed by the thermal field for heat dissipation, or water cooling. When using natural temperature gradients for heat dissipation, the insulation performance of the insulation felt deteriorates and it is corroded, making it difficult to guarantee the magnitude of the positive gradient. The stability and repeatability are poor, and it cannot meet the radial gradient requirements for large-size (8-inch and 12-inch) crystals. Because it is a natural temperature gradient of the thermal field, the radial gradient in the single crystal growth region is large, resulting in uneven heat dissipation, high stress during single crystal growth, and increased defect proliferation. When using water cooling, the control precision is poor, making it difficult to achieve real-time dynamic control of the growth interface temperature, which cannot meet the crystal growth conditions of silicon carbide. At the same time, water cooling is prone to local overcooling, which cannot meet the growth conditions of large-size crystals.

[0005] Therefore, how to accurately control the temperature gradient at the growth interface is an urgent problem to be solved when growing large-size crystals.

[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Summary of the Invention

[0007] This disclosure provides at least one seed crystal pulling component and its assembly method.

[0008] In a first aspect, embodiments of this disclosure provide a seed crystal pulling assembly, comprising:

[0009] Lifting lever;

[0010] A rotating head is disposed below the lifting rod, and the bottom of the rotating head is used to place a seed crystal for crystal growth;

[0011] The lifting rod is provided with an air passage, and the rotating head is provided with a heat dissipation air chamber;

[0012] The air passage is connected to the heat dissipation air chamber;

[0013] The upper part of the lifting rod is provided with an air slip ring that is connected to an external air source. The air slip ring is connected to the air passage and is used to introduce gas into the heat dissipation air chamber to dissipate heat from the rotating head.

[0014] Wherein, the lower part of the lifting rod extends outward along the axial direction to form a limiting ring;

[0015] The top of the rotating head is provided with a threaded hole;

[0016] The end of the lifting rod is fitted with a first graphite carbon paper;

[0017] When the lower end of the lifting rod is threaded into the threaded hole, the limiting ring presses the first graphite carbon paper tightly against the top of the rotating head to seal the threaded connection between the lifting rod and the rotating head, thereby improving the uniformity of gas heat dissipation to the rotating head (200).

[0018] In one optional embodiment, the top surface of the threaded hole is provided with a plurality of first limiting posts along the circumferential direction;

[0019] The first graphite carbon paper is provided with a first limiting groove at the fitting point between itself and the corresponding first limiting post;

[0020] The first graphite carbon paper is fixed to the rotating head by the cooperation of the first limiting groove and the corresponding first limiting post.

[0021] In one optional implementation, the top surface of the first limiting post is an inclined surface;

[0022] Furthermore, the inclination direction of the inclined surface of the first limiting post is adapted to the thread opening direction of the threaded hole.

[0023] In one optional embodiment, the thickness of the first graphite carbon paper is H1;

[0024] The thickness of the portion of the first limiting post protruding from the top of the rotating head is H2;

[0025] Where H2 < H1.

[0026] In one alternative implementation, the rotating head includes:

[0027] Chassis and cover;

[0028] The cover is mounted on the chassis;

[0029] The top surface of the chassis extends outward from the mounting tube;

[0030] The threads of the threaded hole are formed on the inner wall of the mounting tube;

[0031] The cover has a mounting hole in the middle;

[0032] The mounting hole is threaded to the outer wall of the mounting tube to form a heat dissipation cavity through the enclosure and the chassis.

[0033] The top of the cover is provided with a plurality of vent holes spaced apart along the axial direction, and the vent holes are adapted to discharge gas from the heat dissipation chamber.

[0034] In one optional embodiment, the chassis is provided with a circular mounting groove along the circumference;

[0035] A plug-in block is provided at the bottom of the cover where it fits into the circular mounting groove;

[0036] A second graphite carbon paper is provided inside the circular mounting groove;

[0037] When the cover is connected to the mounting pipe of the chassis via threaded connection, the plug block presses the second graphite carbon paper tightly against the bottom of the circular mounting groove to seal the plug joint between the cover and the chassis.

[0038] In one optional embodiment, the bottom surface of the circular mounting groove is provided with a plurality of second limiting posts along the axial direction;

[0039] The second graphite carbon paper is provided with a second limiting groove at the fitting point between it and the corresponding second limiting post;

[0040] The second graphite carbon paper is fixed to the chassis by cooperating with the second limiting groove and the corresponding second limiting post.

[0041] In one optional implementation, the top surface of the second limiting post is an inclined surface;

[0042] Furthermore, the tilting direction of the inclined surface of the second limiting post is adapted to the thread opening direction of the plug block of the cover.

[0043] In one optional embodiment, the mounting pipe has multiple air guide holes along its wall;

[0044] The air passage of the lifting rod is connected to the heat dissipation chamber through the air guide hole.

[0045] Secondly, this disclosure also provides an assembly method for the seed crystal pulling assembly as described above, the assembly method comprising:

[0046] The first graphite carbon paper is fitted onto the end of the lifting rod;

[0047] The lower end of the lifting rod is threaded into the threaded hole of the rotating head to tightly press the first graphite carbon paper against the top of the rotating head through the limiting ring;

[0048] The air slip ring is fitted onto the lifting rod.

[0049] The beneficial effects of this invention are that the seed crystal pulling assembly and its assembly method, through the unique design of the air channel, air slip ring, and heat dissipation air cavity, can actively introduce controllable cooling gas from an external air source into the rotating head, thereby uniformly dissipating heat from the rotating head. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the defects of insufficient control precision and easy local overcooling of water cooling methods. At the same time, through the cooperation of the limiting ring and the first graphite carbon paper, a reliable sealing structure is formed at the threaded connection, preventing airflow from overflowing from the threaded connection, thereby reducing disordered airflow movement, improving the uniformity of air cooling, and improving the accuracy of temperature gradient control.

[0050] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0051] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0052] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0053] Figure 1 This is a schematic diagram of the structure of the seed crystal pulling assembly provided in the embodiments of this disclosure;

[0054] Figure 2 This is a cross-sectional view of the seed crystal pulling assembly provided in an embodiment of this disclosure;

[0055] Figure 3This is a cross-sectional view of a portion of the structure of the rotating head provided in an embodiment of this disclosure;

[0056] Figure 4 This is a flowchart illustrating the assembly method of the seed crystal pulling assembly provided in this embodiment of the disclosure.

[0057] In the diagram: 100, lifting rod; 110, air passage; 120, limiting ring; 130, first graphite carbon paper; 131, first limiting groove; 140, air slip ring; 200, rotating head; 210, heat dissipation chamber; 220, threaded hole; 230, first limiting post; 240, chassis; 241, mounting tube; 2411, air guide hole; 242, circular mounting groove; 243, second limiting post; 250, cover; 251, mounting hole; 252, vent hole; 253, plug-in block; 260, second graphite carbon paper; 261, second limiting groove. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0059] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0060] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0061] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0062] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise expressly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0063] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0064] Research has revealed that relevant technologies primarily employ either natural temperature gradients formed by the thermal field or water cooling for heat dissipation. When using natural temperature gradients, the insulation performance of the insulating felt deteriorates and it corrodes, making it difficult to guarantee the magnitude of the positive gradient. This results in poor stability and repeatability, failing to meet the radial gradient requirements for large-size (8-inch and 12-inch) crystals. Because it is a natural temperature gradient within the thermal field, the radial gradient in the single-crystal growth region is large, leading to uneven heat dissipation, high stress during single-crystal growth, and increased defect proliferation. Water cooling, on the other hand, suffers from poor control precision, making real-time dynamic control of the growth interface temperature difficult and failing to meet the crystal growth conditions for silicon carbide. Furthermore, water cooling is prone to causing localized overcooling, which is also unsuitable for the growth of large-size crystals.

[0065] Based on the above research, this seed crystal pulling assembly and its assembly method, through the unique design of connecting the air channel 110, the air slip ring 140, and the heat dissipation air chamber 210, can actively introduce controllable cooling gas from an external air source into the rotating head 200, thereby uniformly dissipating heat from the rotating head. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the defects of insufficient control precision and easy local overcooling of water cooling methods. At the same time, through the cooperation of the limiting ring 120 and the first graphite carbon paper 130, a reliable sealing structure is formed at the threaded connection, preventing airflow from overflowing from the threaded connection, thereby reducing disordered airflow movement, improving the uniformity of air cooling, and improving the accuracy of temperature gradient control.

[0066] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0067] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0068] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0069] Please see Figure 1 and Figure 2 At least one embodiment provides a seed crystal lifting assembly, including: a lifting rod 100; a rotating head 200 disposed below the lifting rod 100, wherein the bottom of the rotating head 200 is used to place a seed crystal for crystal growth; an air channel 110 is provided inside the lifting rod 100, and a heat dissipation air chamber 210 is provided inside the rotating head 200; the air channel 110 communicates with the heat dissipation air chamber 210; an air slip ring 140 communicating with an external air source is provided on the upper part of the lifting rod 100, the air slip ring communicating with the air channel 110 and used to provide air to the seed crystal for crystal growth. Gas is introduced into the heat dissipation chamber 210 to dissipate heat from the rotating head 200; wherein, the lower part of the lifting rod 100 extends outward along the axial direction to form a limiting ring 120; a threaded hole 220 is provided at the top of the rotating head 200; a first graphite carbon paper 130 is sleeved on the end of the lifting rod 100; when the lower end of the lifting rod 100 is threadedly connected to the threaded hole 220, the limiting ring 120 tightly presses the first graphite carbon paper 130 against the top of the rotating head 200 to seal the threaded connection between the lifting rod 100 and the rotating head.

[0070] The unique design of the air passage 110, air slip ring 140, and heat dissipation chamber 210 allows for the active introduction of controllable cooling gas from an external air source into the rotating head 200, thereby achieving uniform heat dissipation. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the shortcomings of water cooling methods such as insufficient control precision and easy local overcooling. Simultaneously, the cooperation between the limiting ring 120 and the first graphite carbon paper 130 forms a reliable sealing structure at the threaded connection, preventing airflow from overflowing from the threaded connection, thus reducing disordered airflow movement and improving the uniformity of air cooling and the accuracy of temperature gradient control.

[0071] Specifically, the temperature of the rotating head 200 can be precisely controlled by adjusting the temperature of the gas.

[0072] Please see Figure 2 The top surface of the threaded hole 220 is provided with a plurality of first limiting posts 230 along the circumferential direction; the first graphite carbon paper 130 is provided with a first limiting groove 131 at the fitting position of the first limiting post 230; the first graphite carbon paper 130 is fixed to the rotating head 200 by the cooperation of the first limiting groove 131 and the corresponding first limiting post 230.

[0073] The radial positioning of the graphite carbon paper is achieved by the snap-fit ​​between the limiting post and the limiting groove, thus preventing displacement during the installation of the first graphite carbon paper 130.

[0074] Please see Figure 3 The top surface of the first limiting post 230 is an inclined surface; and the inclined direction of the inclined surface of the first limiting post 230 (e.g., Figure 3 As shown in F1) and the thread opening direction of the threaded hole 220 (as shown in F1) Figure 3 (As shown in F2) Adaptation. The inclined design of the top surface of the first limiting post 230 adapts to the thread direction, which can guide the carbon paper to automatically align during assembly, reducing assembly difficulty.

[0075] Please continue reading. Figure 2 and Figure 3 The thickness of the first graphite carbon paper 130 is H1; the thickness of the portion of the first limiting post 230 exposed from the top of the rotating head 200 is H2; wherein, H2 < H1.

[0076] By limiting the size of H2 of the first limiting post 230, the first graphite carbon paper 130 is ensured to undergo controllable deformation when the thread is tightened, which not only ensures the sealing performance but also avoids excessive compression damage, thereby improving the reliability of the assembly and preventing damage to the first graphite carbon paper 130.

[0077] Please see Figure 3The rotating head 200 includes a chassis 240 and a cover 250; the cover 250 is mounted on the chassis 240; wherein, a mounting tube 241 extends outward from the top surface of the chassis 240; the thread of the threaded hole 220 is formed on the inner wall of the mounting tube 241; a mounting hole 251 is formed in the middle of the cover 250; the mounting hole 251 is threaded to the outer wall of the mounting tube 241, so as to form a heat dissipation cavity 210 by the cover 250 and the chassis 240; wherein, a plurality of vent holes 252 are provided axially at intervals on the top of the cover 250, and the vent holes 252 are suitable for the gas in the heat dissipation cavity 210 to be discharged.

[0078] The split-type rotating head 200 design facilitates the processing and manufacturing of the heat dissipation chamber 210, and also facilitates the uniform opening of ventilation holes 252 on the cover 250, reducing disordered airflow and further ensuring the uniformity of heat dissipation at the growth interface.

[0079] Please continue reading. Figure 3 The chassis 240 is provided with a circular mounting groove 242 along its circumference; the bottom of the cover 250 is provided with a plug-in block 253 at the fitting point of the circular mounting groove 242; a second graphite carbon paper 260 is provided in the circular mounting groove 242; when the cover 250 is threadedly connected to the mounting tube 241 of the chassis 240, the plug-in block 253 presses the second graphite carbon paper 260 tightly against the bottom of the circular mounting groove 242 to seal the plug-in point of the cover 250 and the chassis 240.

[0080] The bottom surface of the circular mounting groove 242 is provided with a plurality of second limiting posts 243 along the axial direction; the second graphite carbon paper 260 is provided with a second limiting groove 261 at the fitting position of the corresponding second limiting post 243; the second graphite carbon paper 260 is fixed to the chassis 240 through the cooperation of the second limiting groove 261 and the corresponding second limiting post 243.

[0081] The dual graphite carbon paper sealing structure blocks the air leakage channels at the threaded connection and the mounting point of the cover 250 respectively; the plug block 253 and the limiting post work together to build a multi-level sealing barrier.

[0082] It should be noted that the top surface of the second limiting post 243 is an inclined surface; and the inclination direction of the inclined surface of the second limiting post 243 is adapted to the thread opening direction of the plug block 253 of the cover 250.

[0083] The inclined design of the top surface of the second limiting post 243 is adapted to the thread direction, which can guide the carbon paper to automatically align during assembly and reduce assembly difficulty.

[0084] Please continue reading. Figure 3The mounting tube 241 has multiple air guide holes 2411 along its wall; the air passage 110 of the lifting rod 100 is connected to the heat dissipation chamber 210 through the air guide holes 2411.

[0085] Please see Figure 4 At least one embodiment also provides an assembly method for the seed crystal pulling assembly as described above. Through the unique design of the air passage 110, the air slip ring 140, and the heat dissipation chamber 210, controllable cooling gas can be actively introduced into the rotating head 200 from an external air source, thereby uniformly dissipating heat from the rotating head. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the defects of insufficient control precision and easy local overcooling of water cooling methods. Simultaneously, through the cooperation of the limiting ring 120 and the first graphite carbon paper 130, a reliable sealing structure is formed at the threaded connection, preventing airflow from overflowing from the threaded connection, thereby reducing disordered airflow and improving the uniformity of air cooling.

[0086] Specifically, the assembly method includes:

[0087] S110: The first graphite carbon paper 130 is fitted onto the end of the lifting rod 100;

[0088] S120: Thread the lower end of the lifting rod 100 to the threaded hole 220 of the rotating head 200 so as to press the first graphite carbon paper 130 tightly against the top of the rotating head 200 through the limiting ring 120.

[0089] S130: Fit the air slip ring 140 onto the lifting rod 100.

[0090] The beneficial effects of this invention are that the seed crystal pulling assembly and its assembly method, through the unique design of the air channel 110, the air slip ring 140, and the heat dissipation air cavity 210, can actively introduce controllable cooling gas from an external air source into the rotating head 200, thereby uniformly dissipating heat from the rotating head. This overcomes the problems of unstable heat dissipation, poor repeatability, and large radial gradient caused by relying on the natural temperature gradient of the thermal field, and also avoids the defects of insufficient control precision and easy local overcooling of water cooling methods. At the same time, through the cooperation of the limiting ring 120 and the first graphite carbon paper 130, a reliable sealing structure is formed at the threaded connection, preventing airflow from overflowing from the threaded connection, thereby reducing disordered airflow movement, improving the uniformity of air cooling, and improving the accuracy of temperature gradient control.

[0091] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances.

[0092] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as a second element, component, region, layer, or segment.

[0093] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0094] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0095] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A seed puller assembly comprising: The seed crystal pulling assembly comprises: a pulling rod (100); a rotating head (200) arranged below the pulling rod (100), and a bottom of the rotating head (200) being used for placing a seed crystal for crystal growth; an air channel (110) arranged in the pulling rod (100), and a heat dissipation air cavity (210) arranged in the rotating head (200); the air channel (110) being in communication with the heat dissipation air cavity (210); an upper portion of the pulling rod (100) being provided with an air slip ring (140) in communication with an external air source, the air slip ring (140) being in communication with the air channel (110) and being used for introducing air into the heat dissipation air cavity (210) to dissipate heat of the rotating head (200); wherein a lower portion of the pulling rod (100) extends outward along an axial direction to form a limiting ring (120); a top of the rotating head (200) being provided with a threaded hole (220); an end of the pulling rod (100) being sleeved with a first graphite carbon paper (130); when the lower end of the pulling rod (100) is threadedly connected with the threaded hole (220), the limiting ring (120) tightly abuts the first graphite carbon paper (130) against the top of the rotating head (200) to seal the threaded connection between the pulling rod (100) and the rotating head, thereby improving uniformity of air dissipation of the rotating head (200).

2. The seed crystal pulling assembly according to claim 1, wherein a top surface of the threaded hole (220) is circumferentially provided with a plurality of first limiting columns (230); the first graphite carbon paper (130) is provided with a first limiting groove (131) at a position corresponding to the first limiting column (230); the first graphite carbon paper (130) is fixed to the rotating head (200) through cooperation of the first limiting groove (131) and the corresponding first limiting column (230).

3. The seed crystal pulling assembly according to claim 2, wherein a top surface of the first limiting column (230) is an inclined surface; and an inclined direction of the inclined surface of the first limiting column (230) is adapted to a threaded opening direction of the threaded hole (220).

4. The seed crystal pulling assembly according to claim 2, wherein a thickness of the first graphite carbon paper (130) is H1; a thickness of a portion of the first limiting column (230) exposed from the top of the rotating head (200) is H2; wherein H2 < H1.

5. The seed crystal pulling assembly according to claim 1, wherein the rotating head (200) comprises: a bottom disc (240) and a cover body (250); the cover body (250) is sleeved on the bottom disc (240); wherein a top surface of the bottom disc (240) extends outward to form a mounting pipe (241); the threaded hole (220) is threadedly formed on an inner wall of the mounting pipe (241); a middle portion of the cover body (250) is provided with a mounting hole (251). The mounting hole (251) is threadedly connected with the outer wall of the mounting pipe (241) to form a heat dissipation air cavity (210) enclosed by the cover (250) and the bottom disc (240); The top of the cover (250) is provided with a plurality of air vents (252) spaced apart in the axial direction, and the air vents (252) are adapted for the gas discharge in the heat dissipation air cavity (210).

6. The seed crystal pulling assembly of claim 5, wherein, The bottom disc (240) is provided with a circular mounting groove (242) in the circumferential direction; The bottom of the cover (250) is provided with a plug-in block (253) at the fitting position of the circular mounting groove (242); The circular mounting groove (242) is provided with a second graphite carbon paper (260); When the cover (250) is threadedly connected with the mounting pipe (241) of the bottom disc (240), the plug-in block (253) tightly abuts the second graphite carbon paper (260) to the groove bottom of the circular mounting groove (242), so as to seal the fitting position of the cover (250) and the bottom disc (240).

7. The seed crystal pulling assembly of claim 6, wherein, The bottom surface of the circular mounting groove (242) is provided with a plurality of second limiting columns (243) in the axial direction; The second graphite carbon paper (260) is provided with a second limiting groove (261) at the fitting position of the corresponding second limiting column (243); The second graphite carbon paper (260) is fixed to the bottom disc (240) through the cooperation of the second limiting groove (261) and the corresponding second limiting column (243).

8. The seed crystal pulling assembly of claim 7, wherein, The top surface of the second limiting column (243) is an inclined surface; The inclined direction of the inclined surface of the second limiting column (243) is adapted to the thread opening direction of the plug-in block (253) of the cover (250).

9. The seed crystal pulling assembly of claim 5, wherein, The mounting pipe (241) is provided with a plurality of air guide holes (2411) in the wall body; The air channel (110) of the pulling rod (100) is in communication with the heat dissipation air cavity (210) through the air guide holes (2411).

10. A method of assembling a seed crystal puller assembly as defined in claim 1, wherein, The assembly method comprises: The first graphite carbon paper (130) is sleeved on the end of the pulling rod (100); The lower end of the pulling rod (100) is threadedly connected with the threaded hole (220) of the rotating head (200) to tightly abut the first graphite carbon paper (130) to the top of the rotating head (200) through the limiting ring (120); The air sliding ring (140) is sleeved on the pulling rod (100).

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